WO2020161946A1 - Miroir dichroïque, dispositif de source lumineuse, et dispositif de détection de lumière - Google Patents

Miroir dichroïque, dispositif de source lumineuse, et dispositif de détection de lumière Download PDF

Info

Publication number
WO2020161946A1
WO2020161946A1 PCT/JP2019/032867 JP2019032867W WO2020161946A1 WO 2020161946 A1 WO2020161946 A1 WO 2020161946A1 JP 2019032867 W JP2019032867 W JP 2019032867W WO 2020161946 A1 WO2020161946 A1 WO 2020161946A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
coating layer
dichroic coating
dichroic
light source
Prior art date
Application number
PCT/JP2019/032867
Other languages
English (en)
Japanese (ja)
Inventor
琢也 木本
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Publication of WO2020161946A1 publication Critical patent/WO2020161946A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details

Definitions

  • the present invention relates to a dichroic mirror on which a dichroic coating layer is formed, and a light source device and a photodetector including the dichroic mirror.
  • the dichroic mirror is a mirror that transmits light having a specific wavelength and reflects light other than the specific wavelength.
  • various color tones can be expressed by using a light source having a wavelength corresponding to the three primary colors (RGB) of light and adjusting the amount of light.
  • FIG. 6 is a schematic diagram showing a configuration of a light source device 200 using the conventional dichroic mirror 100.
  • the light source device 200 is a device for combining and outputting two lights having different wavelengths.
  • the light source device 200 includes a dichroic mirror 100 and light source elements 110 and 111.
  • the dichroic mirror 100 includes a flat plate-shaped main body 101, an antireflection film 102 formed on one surface of the main body 101, and a dichroic coating layer 103 formed on the other surface of the main body 101.
  • the dichroic coating layer 103 transmits light having a specific wavelength and reflects light other than the specific wavelength.
  • the dichroic coating layer 103 transmits light of wavelength a and reflects light other than wavelength a.
  • the light source element 110 is arranged apart from the main body 101, and faces the antireflection film 102 (one surface).
  • the light source element 110 emits light of wavelength a.
  • the light source element 111 is arranged with a space from the main body 101, and faces the dichroic coating layer 103 (the other surface).
  • the light source element 111 emits light of wavelength b (other than wavelength a).
  • light of wavelength a is emitted from the light source element 110.
  • Light from the light source element 110 passes through the antireflection film 102 and enters the main body 101.
  • the light from the light source element 110 is incident on the main body 101 while being refracted on one surface of the main body 101.
  • the light that has passed through the main body 101 exits from the main body 101 while passing through the dichroic coating layer 103 while being refracted on the other surface of the main body 101.
  • light of wavelength b is emitted from the light source element 111. Since the light from the light source element 111 has the wavelength b, it is reflected by the dichroic coating layer 103. Then, the light from the light source element 111 (light of wavelength b) and the light from the light source element 110 (light of wavelength a) are combined and output.
  • Patent Document 1 describes a projector device that combines and outputs three lights having different wavelengths.
  • the projector device described in Patent Document 1 uses a cross dichroic mirror or a cross dichroic prism to combine and output three lights having different wavelengths.
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a dichroic mirror and a light source device that can combine at least three lights having different wavelengths and can be downsized. Another object of the present invention is to provide a photo-detecting device capable of detecting at least three lights having different wavelengths and realizing miniaturization.
  • the dichroic mirror according to the present invention includes a main body, a first dichroic coating layer, and a second dichroic coating layer.
  • the body has a flat plate shape and transmits light.
  • the first dichroic coating layer is formed on one surface of the body.
  • the second dichroic coating layer is formed on the other surface of the body.
  • the first dichroic coating layer transmits a specific wavelength and reflects light other than the wavelength.
  • the second dichroic coating layer transmits a specific wavelength different from that of the first dichroic coating layer and reflects light other than the wavelength.
  • the light having a wavelength that passes through the second dichroic coating layer and does not pass through the first dichroic coating layer is incident on the dichroic mirror from the other surface, the light is emitted from the second dichroic coating layer and the second dichroic coating layer. After passing through the body, it is reflected by the first dichroic coating layer. Then, the light reflected by the first dichroic coating layer passes through the main body and then the second dichroic coating layer.
  • a first dichroic coating layer that transmits a specific wavelength and reflects light other than the wavelength is formed on one surface of the main body, and a specific dichroic coating layer different from the first dichroic coating layer is formed on the other surface of the main body.
  • first dichroic coating layer and the second dichroic coating layer may each have a plurality of regions in which the wavelengths of the light passing therethrough are different.
  • the dichroic mirror can be downsized. For example, if two regions having different wavelengths of light passing therethrough are formed in the first dichroic coating layer and two regions having different wavelengths of light transmitting therethrough are formed in the second dichroic coating layer, the dichroic mirror is used to change the wavelength. Four different lights can be combined. Further, the dichroic mirror can be downsized.
  • a light source device includes the dichroic mirror and at least three light source elements and light source elements.
  • the at least three light source elements light source elements emit light of different wavelengths.
  • the lights of the respective wavelengths emitted from the at least three light source elements are combined by the first dichroic coating layer and the second dichroic coating layer and output.
  • the light source device can be downsized.
  • the photodetector according to the present invention includes the dichroic mirror and at least three detection elements.
  • the at least three detection elements detect light, respectively.
  • the light incident on the dichroic mirror is separated into lights having at least three wavelengths by the first dichroic coating layer and the second dichroic coating layer, and detected by each detection element.
  • At least three lights having different wavelengths can be detected by using the photodetector. Further, it is possible to reduce the size of the photodetector.
  • FIG. 1 It is the schematic which showed the structure of the light source device which concerns on 1st Embodiment of this invention.
  • 3 is a graph showing the light transmittance of the first dichroic coating layer and the second dichroic coating layer of the dichroic mirror shown in FIG. 1. It is the schematic which showed the structure of the photon detection apparatus which concerns on 2nd Embodiment of this invention. It is the schematic which showed the structure of the light source device which concerns on 3rd Embodiment of this invention. It is the schematic which showed the structure of the photon detection apparatus which concerns on 4th Embodiment of this invention. It is the schematic which showed the structure of the light source device using the conventional dichroic mirror.
  • FIG. 1 is a schematic diagram showing the configuration of the light source device 1 according to the first embodiment of the present invention.
  • the light source device 1 is a device for combining and outputting three lights having different wavelengths.
  • the light source device 1 includes a dichroic mirror 2, a first light source element 11, a second light source element 12, and a third light source element 13.
  • the dichroic mirror 2 includes a main body 20, a first dichroic coating layer 21, and a second dichroic coating layer 22.
  • the main body 20 is formed in a flat plate shape.
  • the main body 20 is, for example, a synthetic quartz substrate.
  • the first dichroic coating layer 21 is formed on one surface of the main body 20.
  • the first dichroic coating layer 21 transmits light having a specific wavelength and reflects light having a wavelength other than the specific wavelength. As will be described later, in this example, the first dichroic coating layer 21 transmits red light and reflects other light.
  • the second dichroic coating layer 22 is formed on the other surface of the main body 20.
  • the second dichroic coating layer 22 transmits light having a specific wavelength different from that of the first dichroic coating layer 21, and reflects light other than the specific wavelength. As will be described later, in this example, the second dichroic coating layer 22 transmits red light and green light and reflects other light.
  • the first light source element 11 is arranged at a distance from the dichroic mirror 2 and faces the first dichroic coating layer 21 (one surface).
  • the first light source element 11 emits red light toward the central portion of the first dichroic coating layer 21 of the dichroic mirror 2.
  • the incident angle of the light that enters the dichroic mirror 2 (first dichroic coating layer 21) from the first light source element 11 is approximately 45°.
  • the second light source element 12 is arranged at a distance from the dichroic mirror 2 and faces the second dichroic coating layer 22 (the other surface).
  • the second light source element 12 emits green light from the central portion of the second dichroic coating layer 22 of the dichroic mirror 2 to a portion slightly closer to one end side (lower left end side in FIG. 1).
  • the incident angle of the light that enters the dichroic mirror 2 (the second dichroic coating layer 22) from the second light source element 12 is about 45°.
  • the third light source element 13 is arranged at a distance from the dichroic mirror 2 and faces the second dichroic coating layer 22 (the other surface).
  • the third light source element 13 emits blue light from the central portion of the second dichroic coating layer 22 of the dichroic mirror 2 to a portion slightly on the other end side (upper right end side in FIG. 1).
  • the optical axis of the light traveling from the third light source element 13 to the dichroic mirror 2 is parallel to the optical axis of the light traveling from the second light source element 12 to the dichroic mirror 2.
  • the incident angle of the light that enters the dichroic mirror 2 (the second dichroic coating layer 22) from the third light source element 13 is about 45°.
  • FIG. 2 is a graph showing the light transmittance of the first dichroic coating layer 21 and the second dichroic coating layer 22 of the dichroic mirror 2.
  • FIG. 2 shows the transmittance of light when each dichroic coating layer is irradiated with light from the S-polarized laser.
  • the graph A shown on the upper side shows the light transmittance of the first dichroic coating layer 21
  • the graph B shown on the lower side shows the light transmittance of the second dichroic coating layer 22.
  • the horizontal axis represents the wavelength of light and the vertical axis represents the light transmittance.
  • the first dichroic coating layer 21 transmits red light. Specifically, the first dichroic coating layer 21 transmits light having a peak wavelength in the wavelength range of 580 to 680 nm (red light) and reflects light other than the wavelength.
  • the second dichroic coating layer 22 transmits red light and green light. Specifically, the second dichroic coating layer 22 transmits light having a peak wavelength in the wavelength range of 500 to 680 nm (red light and green light) and reflects light other than the wavelength.
  • red light is emitted from the first light source element 11 toward the dichroic mirror 2 (first dichroic coating layer 21).
  • first dichroic coating layer 21 For example, in this example, light having a wavelength of 630 nm is emitted from the first light source element 11.
  • the light from the first light source element 11 passes through the first dichroic coating layer 21 and enters the main body 20. At this time, the light from the first light source element 11 is incident on the body 20 while being refracted on one surface of the body 20. Since the first dichroic coating layer 21 has an extremely small thickness, it can be treated as if there is no refraction of light in the first dichroic coating layer 21.
  • the light (red light) that has passed through the main body 20 is emitted from the main body 20 while being refracted on the other surface of the main body 20, and passes through the second dichroic coating layer 22.
  • green light is emitted from the second light source element 12 toward the dichroic mirror 2 (second dichroic coating layer 22).
  • light having a wavelength of 515 nm is emitted from the second light source element 12.
  • Light from the second light source element 12 passes through the second dichroic coating layer 22 and enters the main body 20. At this time, the light from the second light source element 12 enters the main body 20 while being refracted on the other surface of the main body 20. Since the second dichroic coating layer 22 has an extremely small thickness, it can be treated as if there is no refraction of light in the second dichroic coating layer 22.
  • the light (green light) that has passed through the body 20 is reflected by the first dichroic coating layer 21 and passes through the body 20. Then, the light (green light) that has passed through the main body 20 is emitted from the main body 20 while being refracted on the other surface of the main body 20, and passes through the second dichroic coating layer 22.
  • blue light is emitted from the third light source element 13 toward the dichroic mirror 2 (second dichroic coating layer 22).
  • light having a wavelength of 450 nm is emitted from the third light source element 13.
  • the light (blue light) from the third light source element 13 is reflected by the second dichroic coating layer 22.
  • each light source element red light emitted from the first light source element 11, green light emitted from the second light source element 12, and light emitted from the third light source element 13
  • the light L1 that is composed of the combined blue light is output. In this way, in the light source device 1, the three lights having different wavelengths are combined and output.
  • the light transmittances of the first dichroic coating layer 21 and the second dichroic coating layer 22 and the wavelengths of light emitted from the first light source element 11, the second light source element 12, and the third light source element 13 are as described above. Not limited to the above, various modifications are possible.
  • the first dichroic coating layer 21 may be one that transmits green light, one that transmits blue light, and one that transmits red and green light. , Blue and green light may be transmitted, or blue and red light may be transmitted.
  • the second dichroic coating layer 22 may be one that transmits red light, one that transmits green light, and one that transmits blue light. , Blue and green light may be transmitted, or blue and red light may be transmitted.
  • the first light source element 11 may be one that emits green light or one that emits blue light.
  • the second light source element 12 may be one that emits red light or one that emits blue light.
  • the third light source element 13 may emit red light or may emit green light.
  • the dichroic mirror 2 includes a main body 20, a first dichroic coating layer 21 formed on one surface of the main body 20, and the other of the main body 20. And a second dichroic coating layer 22 formed on the surface.
  • the first dichroic coating layer 21 transmits a specific wavelength and reflects light other than the wavelength.
  • the second dichroic coating layer 22 transmits a specific wavelength different from that of the first dichroic coating layer, and reflects light other than the wavelength.
  • the first dichroic coating layer 21 and the second dichroic coating layer 22 for example, red light
  • the light is emitted.
  • the first dichroic coating layer 21, the main body 20, and the second dichroic coating layer 22 in order.
  • the light having a wavelength that passes through the second dichroic coating layer 22 and does not pass through the first dichroic coating layer 21 (for example, green light) is incident on the dichroic mirror from the second light source element 12. After passing through the second dichroic coating layer 22 and the main body 20, the light is reflected by the first dichroic coating layer 21. The light reflected by the first dichroic coating layer 21 passes through the main body 20 and then the second dichroic coating layer 22.
  • the dichroic mirror 2 when light (for example, blue light) having a wavelength that does not pass through the second dichroic coating layer 22 is incident on the dichroic mirror 2 from the third light source element 13, the light is emitted from the second dichroic coating layer 22. Reflect on. As a result, the dichroic mirror 2 combines and outputs three lights having different wavelengths.
  • light for example, blue light
  • the dichroic mirror 2 combines and outputs three lights having different wavelengths.
  • the first dichroic coating layer 21 is formed on one surface of the main body 20, and the second dichroic coating layer 22 is formed on the other surface of the main body 20. Can be combined and output. Therefore, the dichroic mirror 2 can be used to combine three lights having different wavelengths. Then, the dichroic mirror 2 can be downsized.
  • the dichroic mirror 2 is used for the light source device 1. Therefore, the light source device 1 can be used to combine and output three lights having different wavelengths. In addition, the light source device 1 can be downsized.
  • FIG. 3 is a schematic diagram showing the configuration of the photodetector 3 according to the second embodiment of the present invention.
  • the photodetector 3 is a device for separating incident light into three lights having different wavelengths.
  • the photodetector 3 includes the dichroic mirror 2 described above, a first detection element 31, a second detection element 32, and a third detection element 33.
  • the positional relationship between the dichroic mirror 2 and each detection element in the light detection device 3 corresponds to the positional relationship between the dichroic mirror 2 and each light source element in the light source device 1 of the first embodiment.
  • the first detection element 31 is arranged at a distance from the dichroic mirror 2 and faces the first dichroic coating layer 21 (one surface).
  • the second detection element 32 is arranged at a distance from the dichroic mirror 2 and faces the second dichroic coating layer 22 (the other surface).
  • the third detection element 33 is arranged with a space from the dichroic mirror 2, and faces the second dichroic coating layer 22 (the other surface). The optical axis of the light traveling from the second dichroic coating layer 22 to the second detection element 32 is closer to the one end side of the main body 20 than the optical axis of the light traveling from the second dichroic coating layer 22 to the third detection element 33 (see FIG. It is located at the lower left side of the).
  • the photodetector 3 is used, for example, as an analyzer for analyzing a sample.
  • the light L2 from the sample is emitted toward the dichroic mirror 2 (second dichroic coating layer 22).
  • the light L2 When the light L2 is applied to the dichroic mirror 2 (second dichroic coating layer 22), blue light is reflected by the second dichroic coating layer 22. Then, the light (blue light) reflected by the second dichroic coating layer 22 is detected by the third detection element 33.
  • the green and red lights included in the light L2 pass through the second dichroic coating layer 22 and enter the main body 20.
  • the light incident on the main body 20 enters the main body 20 and is transmitted through the main body 20 while being refracted on the other surface of the main body 20.
  • Green light of the light that has passed through the body 20 is reflected by the first dichroic coating layer 21 and passes through the body 20.
  • the light that has passed through the main body 20 is emitted from the main body 20 while being refracted on the other surface of the main body 20, passes through the second dichroic coating layer 22, and is detected by the second detection element 32.
  • the red light included in the light L2 is emitted from the body 20 while being refracted on one surface of the body 20, passes through the first dichroic coating layer 21, and is detected by the first detection element 31. Detected in.
  • the photodetector 3 As described above, according to the second embodiment, it is possible to detect three lights having different wavelengths by using the photodetector 3 provided with the dichroic mirror 2. Then, the photodetector 3 can be downsized.
  • the type of light transmitted through the first dichroic coating layer 21 and the second dichroic coating layer 22 is not limited to the above, and can be variously changed.
  • FIG. 4 is a schematic diagram showing the configuration of the light source device 4 according to the third embodiment of the present invention.
  • the light source device 4 is a device for combining and outputting four lights having different wavelengths.
  • the light source device 4 includes a dichroic mirror 5, a first light source element 61, a second light source element 62, a third light source element 63, and a fourth light source element 64.
  • the dichroic mirror 5 includes the main body 20 described above, a first dichroic coating layer 51, and a second dichroic coating layer 52.
  • the first dichroic coating layer 51 is formed on one surface of the main body 20.
  • the first dichroic coating layer 51 is divided into two regions, a first region 511 and a second region 512.
  • the first region 511 is located on the other end side (upper right end side in FIG. 4) of the one surface of the main body 20 and at the center.
  • the first region 511 of the first dichroic coating layer 51 transmits red light and reflects other light.
  • the second region 512 is located at one end side (the lower left end side in FIG. 4) on one surface of the main body 20.
  • the second region 512 of the first dichroic coating layer 51 transmits infrared light and reflects other light.
  • the second dichroic coating layer 52 is formed on the other surface of the main body 20.
  • the second dichroic coating layer 52 is divided into two regions, a third region 523 and a fourth region 524.
  • the third region 523 is located on the other surface of the main body 20 at the other end side (upper right end side in FIG. 4) and at the center.
  • the third region 523 of the second dichroic coating layer 52 transmits infrared light, red light, and green light, and reflects other light.
  • the fourth region 524 is located at one end side (the lower left end side in FIG. 4) on one surface of the main body 20.
  • the fourth region 524 of the second dichroic coating layer 52 transmits green light and reflects other light.
  • the first light source element 61 is arranged apart from the dichroic mirror 5 and faces the first region 511 of the first dichroic coating layer 51.
  • the first light source element 61 emits red light toward the first region 511 of the first dichroic coating layer 51.
  • the incident angle of the light that enters the dichroic mirror 5 (the first region 511 of the first dichroic coating layer 51) from the first light source element 61 is approximately 45°.
  • the second light source element 62 is arranged apart from the dichroic mirror 5 and faces the second region 512 of the first dichroic coating layer 51.
  • the second light source element 62 emits infrared light toward the second region 512 of the first dichroic coating layer 51.
  • the incident angle of the light that enters the dichroic mirror 5 (the second region 512 of the first dichroic coating layer 51) from the second light source element 62 is about 45°.
  • the optical axis of the light traveling from the second light source element 62 to the second region 512 is parallel to the optical axis of the light traveling from the first light source element 61 to the first region 511.
  • the third light source element 63 is arranged at a distance from the dichroic mirror 5 and faces the fourth region 524 of the second dichroic coating layer 52.
  • the third light source element 63 emits green light toward the fourth region 524 of the second dichroic coating layer 52.
  • the incident angle of the light that enters the dichroic mirror 5 (the fourth region 524 of the second dichroic coating layer 52) from the third light source element 63 is approximately 45°.
  • the fourth light source element 64 is arranged at a distance from the dichroic mirror 5 and faces the third region 523 of the second dichroic coating layer 52.
  • the fourth light source element 64 emits blue light toward the third region 523 of the second dichroic coating layer 52.
  • the incident angle of the light that enters the dichroic mirror 5 (the third region 523 of the second dichroic coating layer 52) from the fourth light source element 64 is about 45°.
  • the optical axis of the light traveling from the fourth light source element 64 to the third region 523 is parallel to the optical axis of the light traveling from the third light source element 63 to the fourth region 524.
  • red light is emitted from the first light source element 61 toward the dichroic mirror 5 (the first region 511 of the first dichroic coating layer 51).
  • the light from the first light source element 61 passes through the first region 511 of the first dichroic coating layer 51 and enters the main body 20.
  • the light from the first light source element 61 enters the main body 20 while being refracted on one surface of the main body 20.
  • the light (red light) incident on the main body 20 passes through the main body 20, is refracted on the other surface of the main body 20, is emitted from the main body 20, and passes through the third region 523 of the second dichroic coating layer 52. ..
  • infrared light is emitted from the second light source element 62 toward the dichroic mirror 5 (the second region 512 of the first dichroic coating layer 51).
  • the light from the second light source element 62 passes through the second region 512 of the first dichroic coating layer 51 and enters the main body 20.
  • the light from the second light source element 62 enters the main body 20 while being refracted on one surface of the main body 20.
  • the light (infrared light) incident on the main body 20 passes through the main body 20, is reflected by the fourth region 524 of the second dichroic coating layer 52, then passes through the main body 20, and further, of the first dichroic coating layer 51.
  • After being reflected by the first region 511, it passes through the main body 20, is emitted from the main body 20 while being refracted on the other surface of the main body 20, and passes through the third region 523 of the second dichroic coating layer 52.
  • green light is emitted from the third light source element 63 toward the dichroic mirror 5 (the fourth region 524 of the second dichroic coating layer 52).
  • the light from the third light source element 63 passes through the fourth region 524 of the second dichroic coating layer 52 and enters the main body 20.
  • the light from the third light source element 63 enters the main body 20 while being refracted on the other surface of the main body 20.
  • the light (green light) incident on the main body 20 passes through the main body 20, is reflected by the first region 511 of the first dichroic coating layer 51, then passes through the main body 20, and is refracted on the other surface of the main body 20. While being emitted from the main body 20, it passes through the third region 523 of the second dichroic coating layer 52.
  • blue light is emitted from the fourth light source element 64 toward the dichroic mirror 5 (the third region 523 of the second dichroic coating layer 52).
  • the light (blue light) from the fourth light source element 64 is reflected by the third region 523 of the second dichroic coating layer 52.
  • each light source element red light emitted from the first light source element 61, infrared light emitted from the second light source element 62, and light emitted from the third light source element 63.
  • the light L3 that is a combination of the green light and the blue light emitted from the fourth light source element 64 is output. In this way, in the light source device 4, four lights having different wavelengths are combined and output.
  • the wavelength of the emitted light is not limited to the above, and can be changed in various ways.
  • the first dichroic coating layer 51 and the second dichroic coating layer 52 may be divided into three or more regions in which the wavelengths of the transmitted light are different.
  • the light source device 4 is provided with a light source element corresponding to each region.
  • the first dichroic coating layer 51 and the second dichroic coating layer 52 have two regions in which the wavelengths of light that are transmitted are different. Then, by using the dichroic mirror 5, four lights having different wavelengths can be combined.
  • the first dichroic coating layer 51 having two regions (first region 511 and second region 512) having different wavelengths of transmitted light is formed on one surface of the main body 20, and the other surface of the main body is further formed.
  • the second dichroic coating layer 52 having two regions (third region 523 and fourth region 524) having different wavelengths to be transmitted it is possible to combine and output four lights having different wavelengths. ..
  • the four lights having different wavelengths can be combined using the dichroic mirror 5, and the dichroic mirror 5 can be downsized.
  • the dichroic mirror 5 is used in the light source device 4. Therefore, the light source device 4 can be used to combine and output four lights having different wavelengths, and the light source device 4 can be downsized.
  • first dichroic coating layer 51 and the second dichroic coating layer 52 may be divided into three or more regions in which the wavelengths of the light passing therethrough are different. By doing so, it is possible to combine four or more lights having different wavelengths by using the dichroic mirror 5.
  • FIG. 5 is a schematic diagram showing the configuration of the photodetector 6 according to the fourth embodiment of the present invention.
  • the photodetector 6 is a device for separating incident light into four lights having different wavelengths.
  • the photodetector 6 includes the dichroic mirror 5, the first detection element 71, the second detection element 72, the third detection element 73, and the fourth detection element 74 described above.
  • the positional relationship between the dichroic mirror 5 and each detection element in the light detection device 6 corresponds to the positional relationship between the dichroic mirror 5 and each light source element in the light source device 4 of the third embodiment.
  • the first detection element 71 is arranged at a distance from the dichroic mirror 5, and faces the first region 511 of the first dichroic coating layer 51.
  • the second detection element 72 is arranged at a distance from the dichroic mirror 5, and faces the second region 512 of the first dichroic coating layer 51.
  • the third detection element 73 is arranged at a distance from the dichroic mirror 5 and faces the fourth region 524 of the second dichroic coating layer 52.
  • the fourth detection element 74 is arranged at a distance from the dichroic mirror 5 and faces the third region 523 of the second dichroic coating layer 52.
  • the photodetector 6 is used, for example, as an analyzer for analyzing a sample.
  • the light L4 from the sample is emitted toward the dichroic mirror 5 (the third region 523 of the second dichroic coating layer 52).
  • the infrared light, the green light, and the red light included in the light L4 pass through the third region 523 of the second dichroic coating layer 52 and enter the main body 20. At this time, the light entering the main body 20 enters the main body 20 while being refracted on the other surface of the main body 20.
  • the red light of the light that has passed through the main body 20 passes through the first region 511 of the first dichroic coating layer 51 and is detected by the first detection element 71.
  • the infrared light and the green light included in the light L4 are reflected by the first region 511 of the first dichroic coating layer 51 after passing through the main body 20, pass through the main body 20, and pass through the second dichroic coating layer.
  • the green light of the light traveling toward the fourth region 524 of the second dichroic coating layer 52 passes through the fourth region 524 of the second dichroic coating layer 52 and is detected by the third detection element 73.
  • Infrared light of the light traveling toward the fourth region 524 of the second dichroic coating layer 52 is reflected by the fourth region 524 of the second dichroic coating layer 52, passes through the main body 20, and then the first dichroic coating layer 51. The light passes through the second region 512 and is detected by the second detection element 72.
  • the photodetector 6 As described above, according to the fourth embodiment, four lights having different wavelengths can be detected by using the photodetector 6 provided with the dichroic mirror 5. Then, the photodetector 6 can be downsized.
  • the type of light (wavelength of transmitted light) that transmits each region of the first dichroic coating layer 51 and the second dichroic coating layer 52 is not limited to the above, and can be variously changed.
  • each region of the first dichroic coating layer 51 and the second dichroic coating layer 52 may be divided into three or more regions in which the wavelength of the transmitted light is different.
  • a plurality of detection elements may be provided so as to correspond to the respective regions. With this configuration, the light detection device 6 can be used to detect four or more lights having different wavelengths.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Projection Apparatus (AREA)

Abstract

Le miroir dichroïque (2) de l'invention est équipé d'un corps principal (20), d'une première couche de revêtement dichroïque (21) formée sur une face du corps principal (20), et d'une seconde couche de revêtement dichroïque (22) formée sur l'autre face du corps principal (20). La première couche de revêtement dichroïque (21) transmet une longueur d'ondes spécifique, et simultanément réfléchit la lumière en dehors de cette longueur d'ondes. La seconde couche de revêtement dichroïque (22) transmet une longueur d'ondes spécifique différente de la première couche de revêtement dichroïque (21), et simultanément réfléchit la lumière en dehors de cette longueur d'ondes. Par conséquent, il est possible de synthétiser trois lumières de longueur d'ondes différente à l'aide de ce miroir dichroïque (2). Enfin, une miniaturisation du miroir dichroïque (2) peut être réalisée.
PCT/JP2019/032867 2019-02-05 2019-08-22 Miroir dichroïque, dispositif de source lumineuse, et dispositif de détection de lumière WO2020161946A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019018603 2019-02-05
JP2019-018603 2019-02-05

Publications (1)

Publication Number Publication Date
WO2020161946A1 true WO2020161946A1 (fr) 2020-08-13

Family

ID=71947550

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2019/032867 WO2020161946A1 (fr) 2019-02-05 2019-08-22 Miroir dichroïque, dispositif de source lumineuse, et dispositif de détection de lumière

Country Status (1)

Country Link
WO (1) WO2020161946A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237619A (ja) * 1988-01-19 1989-09-22 Hewlett Packard Co <Hp> 光学装置
US6005718A (en) * 1997-07-14 1999-12-21 Samsung Electronics Co., Ltd. Apparatus and a method for combining light using one flat plate and a method for manufacturing the apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237619A (ja) * 1988-01-19 1989-09-22 Hewlett Packard Co <Hp> 光学装置
US6005718A (en) * 1997-07-14 1999-12-21 Samsung Electronics Co., Ltd. Apparatus and a method for combining light using one flat plate and a method for manufacturing the apparatus

Similar Documents

Publication Publication Date Title
US9977317B2 (en) Illumination system and projection device
US10444611B2 (en) Projector and illumination system thereof
JP4471903B2 (ja) 照明ユニット及びそれを採用した画像投射装置
KR100694068B1 (ko) 조명유니트 및 이를 채용한 화상투사장치
US9648291B2 (en) Light source device and projection type image display device
KR100219016B1 (ko) 복수 파장의 광을 분리 또는 합성하는 광학 장치
JP3747621B2 (ja) カラー投影表示装置
TWI545385B (zh) 光源單元以及投影式顯示裝置
CN111190322A (zh) 照明系统与投影装置
US20140036364A1 (en) Regular pentagon-arranged optical beam splitting and combining assembly
WO2003007073A1 (fr) Projecteur a cristaux liquides du type a reflexion
JP5355961B2 (ja) 投写型映像表示装置
US20090237616A1 (en) Projection type image display device
TWI731073B (zh) 照明系統
KR20060019381A (ko) 칼라 프리즘 및 이를 채용한 화상투사장치
US10310364B2 (en) Light source device and projection display apparatus
JP2003029211A (ja) 投射型画像表示装置
US10775689B2 (en) Illumination system and projection apparatus
WO2020161946A1 (fr) Miroir dichroïque, dispositif de source lumineuse, et dispositif de détection de lumière
JP2007188037A (ja) 光学設備に用いられる光カプラ
KR101264950B1 (ko) 상이한 파장을 가진 광의 결합 장치
JP2011090036A (ja) 光学素子および光源装置
TWI809249B (zh) 照明系統及其製造方法及投影機
TWI826284B (zh) 照明系統
JPH0815560A (ja) 複数の波長の光を分離又は合成する光学装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19914614

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19914614

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP