WO2020161946A1 - Dichroic mirror, light source device, and light detection device - Google Patents

Dichroic mirror, light source device, and light detection device Download PDF

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Publication number
WO2020161946A1
WO2020161946A1 PCT/JP2019/032867 JP2019032867W WO2020161946A1 WO 2020161946 A1 WO2020161946 A1 WO 2020161946A1 JP 2019032867 W JP2019032867 W JP 2019032867W WO 2020161946 A1 WO2020161946 A1 WO 2020161946A1
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WO
WIPO (PCT)
Prior art keywords
light
coating layer
dichroic coating
dichroic
light source
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PCT/JP2019/032867
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French (fr)
Japanese (ja)
Inventor
琢也 木本
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株式会社島津製作所
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Publication of WO2020161946A1 publication Critical patent/WO2020161946A1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details

Definitions

  • the present invention relates to a dichroic mirror on which a dichroic coating layer is formed, and a light source device and a photodetector including the dichroic mirror.
  • the dichroic mirror is a mirror that transmits light having a specific wavelength and reflects light other than the specific wavelength.
  • various color tones can be expressed by using a light source having a wavelength corresponding to the three primary colors (RGB) of light and adjusting the amount of light.
  • FIG. 6 is a schematic diagram showing a configuration of a light source device 200 using the conventional dichroic mirror 100.
  • the light source device 200 is a device for combining and outputting two lights having different wavelengths.
  • the light source device 200 includes a dichroic mirror 100 and light source elements 110 and 111.
  • the dichroic mirror 100 includes a flat plate-shaped main body 101, an antireflection film 102 formed on one surface of the main body 101, and a dichroic coating layer 103 formed on the other surface of the main body 101.
  • the dichroic coating layer 103 transmits light having a specific wavelength and reflects light other than the specific wavelength.
  • the dichroic coating layer 103 transmits light of wavelength a and reflects light other than wavelength a.
  • the light source element 110 is arranged apart from the main body 101, and faces the antireflection film 102 (one surface).
  • the light source element 110 emits light of wavelength a.
  • the light source element 111 is arranged with a space from the main body 101, and faces the dichroic coating layer 103 (the other surface).
  • the light source element 111 emits light of wavelength b (other than wavelength a).
  • light of wavelength a is emitted from the light source element 110.
  • Light from the light source element 110 passes through the antireflection film 102 and enters the main body 101.
  • the light from the light source element 110 is incident on the main body 101 while being refracted on one surface of the main body 101.
  • the light that has passed through the main body 101 exits from the main body 101 while passing through the dichroic coating layer 103 while being refracted on the other surface of the main body 101.
  • light of wavelength b is emitted from the light source element 111. Since the light from the light source element 111 has the wavelength b, it is reflected by the dichroic coating layer 103. Then, the light from the light source element 111 (light of wavelength b) and the light from the light source element 110 (light of wavelength a) are combined and output.
  • Patent Document 1 describes a projector device that combines and outputs three lights having different wavelengths.
  • the projector device described in Patent Document 1 uses a cross dichroic mirror or a cross dichroic prism to combine and output three lights having different wavelengths.
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a dichroic mirror and a light source device that can combine at least three lights having different wavelengths and can be downsized. Another object of the present invention is to provide a photo-detecting device capable of detecting at least three lights having different wavelengths and realizing miniaturization.
  • the dichroic mirror according to the present invention includes a main body, a first dichroic coating layer, and a second dichroic coating layer.
  • the body has a flat plate shape and transmits light.
  • the first dichroic coating layer is formed on one surface of the body.
  • the second dichroic coating layer is formed on the other surface of the body.
  • the first dichroic coating layer transmits a specific wavelength and reflects light other than the wavelength.
  • the second dichroic coating layer transmits a specific wavelength different from that of the first dichroic coating layer and reflects light other than the wavelength.
  • the light having a wavelength that passes through the second dichroic coating layer and does not pass through the first dichroic coating layer is incident on the dichroic mirror from the other surface, the light is emitted from the second dichroic coating layer and the second dichroic coating layer. After passing through the body, it is reflected by the first dichroic coating layer. Then, the light reflected by the first dichroic coating layer passes through the main body and then the second dichroic coating layer.
  • a first dichroic coating layer that transmits a specific wavelength and reflects light other than the wavelength is formed on one surface of the main body, and a specific dichroic coating layer different from the first dichroic coating layer is formed on the other surface of the main body.
  • first dichroic coating layer and the second dichroic coating layer may each have a plurality of regions in which the wavelengths of the light passing therethrough are different.
  • the dichroic mirror can be downsized. For example, if two regions having different wavelengths of light passing therethrough are formed in the first dichroic coating layer and two regions having different wavelengths of light transmitting therethrough are formed in the second dichroic coating layer, the dichroic mirror is used to change the wavelength. Four different lights can be combined. Further, the dichroic mirror can be downsized.
  • a light source device includes the dichroic mirror and at least three light source elements and light source elements.
  • the at least three light source elements light source elements emit light of different wavelengths.
  • the lights of the respective wavelengths emitted from the at least three light source elements are combined by the first dichroic coating layer and the second dichroic coating layer and output.
  • the light source device can be downsized.
  • the photodetector according to the present invention includes the dichroic mirror and at least three detection elements.
  • the at least three detection elements detect light, respectively.
  • the light incident on the dichroic mirror is separated into lights having at least three wavelengths by the first dichroic coating layer and the second dichroic coating layer, and detected by each detection element.
  • At least three lights having different wavelengths can be detected by using the photodetector. Further, it is possible to reduce the size of the photodetector.
  • FIG. 1 It is the schematic which showed the structure of the light source device which concerns on 1st Embodiment of this invention.
  • 3 is a graph showing the light transmittance of the first dichroic coating layer and the second dichroic coating layer of the dichroic mirror shown in FIG. 1. It is the schematic which showed the structure of the photon detection apparatus which concerns on 2nd Embodiment of this invention. It is the schematic which showed the structure of the light source device which concerns on 3rd Embodiment of this invention. It is the schematic which showed the structure of the photon detection apparatus which concerns on 4th Embodiment of this invention. It is the schematic which showed the structure of the light source device using the conventional dichroic mirror.
  • FIG. 1 is a schematic diagram showing the configuration of the light source device 1 according to the first embodiment of the present invention.
  • the light source device 1 is a device for combining and outputting three lights having different wavelengths.
  • the light source device 1 includes a dichroic mirror 2, a first light source element 11, a second light source element 12, and a third light source element 13.
  • the dichroic mirror 2 includes a main body 20, a first dichroic coating layer 21, and a second dichroic coating layer 22.
  • the main body 20 is formed in a flat plate shape.
  • the main body 20 is, for example, a synthetic quartz substrate.
  • the first dichroic coating layer 21 is formed on one surface of the main body 20.
  • the first dichroic coating layer 21 transmits light having a specific wavelength and reflects light having a wavelength other than the specific wavelength. As will be described later, in this example, the first dichroic coating layer 21 transmits red light and reflects other light.
  • the second dichroic coating layer 22 is formed on the other surface of the main body 20.
  • the second dichroic coating layer 22 transmits light having a specific wavelength different from that of the first dichroic coating layer 21, and reflects light other than the specific wavelength. As will be described later, in this example, the second dichroic coating layer 22 transmits red light and green light and reflects other light.
  • the first light source element 11 is arranged at a distance from the dichroic mirror 2 and faces the first dichroic coating layer 21 (one surface).
  • the first light source element 11 emits red light toward the central portion of the first dichroic coating layer 21 of the dichroic mirror 2.
  • the incident angle of the light that enters the dichroic mirror 2 (first dichroic coating layer 21) from the first light source element 11 is approximately 45°.
  • the second light source element 12 is arranged at a distance from the dichroic mirror 2 and faces the second dichroic coating layer 22 (the other surface).
  • the second light source element 12 emits green light from the central portion of the second dichroic coating layer 22 of the dichroic mirror 2 to a portion slightly closer to one end side (lower left end side in FIG. 1).
  • the incident angle of the light that enters the dichroic mirror 2 (the second dichroic coating layer 22) from the second light source element 12 is about 45°.
  • the third light source element 13 is arranged at a distance from the dichroic mirror 2 and faces the second dichroic coating layer 22 (the other surface).
  • the third light source element 13 emits blue light from the central portion of the second dichroic coating layer 22 of the dichroic mirror 2 to a portion slightly on the other end side (upper right end side in FIG. 1).
  • the optical axis of the light traveling from the third light source element 13 to the dichroic mirror 2 is parallel to the optical axis of the light traveling from the second light source element 12 to the dichroic mirror 2.
  • the incident angle of the light that enters the dichroic mirror 2 (the second dichroic coating layer 22) from the third light source element 13 is about 45°.
  • FIG. 2 is a graph showing the light transmittance of the first dichroic coating layer 21 and the second dichroic coating layer 22 of the dichroic mirror 2.
  • FIG. 2 shows the transmittance of light when each dichroic coating layer is irradiated with light from the S-polarized laser.
  • the graph A shown on the upper side shows the light transmittance of the first dichroic coating layer 21
  • the graph B shown on the lower side shows the light transmittance of the second dichroic coating layer 22.
  • the horizontal axis represents the wavelength of light and the vertical axis represents the light transmittance.
  • the first dichroic coating layer 21 transmits red light. Specifically, the first dichroic coating layer 21 transmits light having a peak wavelength in the wavelength range of 580 to 680 nm (red light) and reflects light other than the wavelength.
  • the second dichroic coating layer 22 transmits red light and green light. Specifically, the second dichroic coating layer 22 transmits light having a peak wavelength in the wavelength range of 500 to 680 nm (red light and green light) and reflects light other than the wavelength.
  • red light is emitted from the first light source element 11 toward the dichroic mirror 2 (first dichroic coating layer 21).
  • first dichroic coating layer 21 For example, in this example, light having a wavelength of 630 nm is emitted from the first light source element 11.
  • the light from the first light source element 11 passes through the first dichroic coating layer 21 and enters the main body 20. At this time, the light from the first light source element 11 is incident on the body 20 while being refracted on one surface of the body 20. Since the first dichroic coating layer 21 has an extremely small thickness, it can be treated as if there is no refraction of light in the first dichroic coating layer 21.
  • the light (red light) that has passed through the main body 20 is emitted from the main body 20 while being refracted on the other surface of the main body 20, and passes through the second dichroic coating layer 22.
  • green light is emitted from the second light source element 12 toward the dichroic mirror 2 (second dichroic coating layer 22).
  • light having a wavelength of 515 nm is emitted from the second light source element 12.
  • Light from the second light source element 12 passes through the second dichroic coating layer 22 and enters the main body 20. At this time, the light from the second light source element 12 enters the main body 20 while being refracted on the other surface of the main body 20. Since the second dichroic coating layer 22 has an extremely small thickness, it can be treated as if there is no refraction of light in the second dichroic coating layer 22.
  • the light (green light) that has passed through the body 20 is reflected by the first dichroic coating layer 21 and passes through the body 20. Then, the light (green light) that has passed through the main body 20 is emitted from the main body 20 while being refracted on the other surface of the main body 20, and passes through the second dichroic coating layer 22.
  • blue light is emitted from the third light source element 13 toward the dichroic mirror 2 (second dichroic coating layer 22).
  • light having a wavelength of 450 nm is emitted from the third light source element 13.
  • the light (blue light) from the third light source element 13 is reflected by the second dichroic coating layer 22.
  • each light source element red light emitted from the first light source element 11, green light emitted from the second light source element 12, and light emitted from the third light source element 13
  • the light L1 that is composed of the combined blue light is output. In this way, in the light source device 1, the three lights having different wavelengths are combined and output.
  • the light transmittances of the first dichroic coating layer 21 and the second dichroic coating layer 22 and the wavelengths of light emitted from the first light source element 11, the second light source element 12, and the third light source element 13 are as described above. Not limited to the above, various modifications are possible.
  • the first dichroic coating layer 21 may be one that transmits green light, one that transmits blue light, and one that transmits red and green light. , Blue and green light may be transmitted, or blue and red light may be transmitted.
  • the second dichroic coating layer 22 may be one that transmits red light, one that transmits green light, and one that transmits blue light. , Blue and green light may be transmitted, or blue and red light may be transmitted.
  • the first light source element 11 may be one that emits green light or one that emits blue light.
  • the second light source element 12 may be one that emits red light or one that emits blue light.
  • the third light source element 13 may emit red light or may emit green light.
  • the dichroic mirror 2 includes a main body 20, a first dichroic coating layer 21 formed on one surface of the main body 20, and the other of the main body 20. And a second dichroic coating layer 22 formed on the surface.
  • the first dichroic coating layer 21 transmits a specific wavelength and reflects light other than the wavelength.
  • the second dichroic coating layer 22 transmits a specific wavelength different from that of the first dichroic coating layer, and reflects light other than the wavelength.
  • the first dichroic coating layer 21 and the second dichroic coating layer 22 for example, red light
  • the light is emitted.
  • the first dichroic coating layer 21, the main body 20, and the second dichroic coating layer 22 in order.
  • the light having a wavelength that passes through the second dichroic coating layer 22 and does not pass through the first dichroic coating layer 21 (for example, green light) is incident on the dichroic mirror from the second light source element 12. After passing through the second dichroic coating layer 22 and the main body 20, the light is reflected by the first dichroic coating layer 21. The light reflected by the first dichroic coating layer 21 passes through the main body 20 and then the second dichroic coating layer 22.
  • the dichroic mirror 2 when light (for example, blue light) having a wavelength that does not pass through the second dichroic coating layer 22 is incident on the dichroic mirror 2 from the third light source element 13, the light is emitted from the second dichroic coating layer 22. Reflect on. As a result, the dichroic mirror 2 combines and outputs three lights having different wavelengths.
  • light for example, blue light
  • the dichroic mirror 2 combines and outputs three lights having different wavelengths.
  • the first dichroic coating layer 21 is formed on one surface of the main body 20, and the second dichroic coating layer 22 is formed on the other surface of the main body 20. Can be combined and output. Therefore, the dichroic mirror 2 can be used to combine three lights having different wavelengths. Then, the dichroic mirror 2 can be downsized.
  • the dichroic mirror 2 is used for the light source device 1. Therefore, the light source device 1 can be used to combine and output three lights having different wavelengths. In addition, the light source device 1 can be downsized.
  • FIG. 3 is a schematic diagram showing the configuration of the photodetector 3 according to the second embodiment of the present invention.
  • the photodetector 3 is a device for separating incident light into three lights having different wavelengths.
  • the photodetector 3 includes the dichroic mirror 2 described above, a first detection element 31, a second detection element 32, and a third detection element 33.
  • the positional relationship between the dichroic mirror 2 and each detection element in the light detection device 3 corresponds to the positional relationship between the dichroic mirror 2 and each light source element in the light source device 1 of the first embodiment.
  • the first detection element 31 is arranged at a distance from the dichroic mirror 2 and faces the first dichroic coating layer 21 (one surface).
  • the second detection element 32 is arranged at a distance from the dichroic mirror 2 and faces the second dichroic coating layer 22 (the other surface).
  • the third detection element 33 is arranged with a space from the dichroic mirror 2, and faces the second dichroic coating layer 22 (the other surface). The optical axis of the light traveling from the second dichroic coating layer 22 to the second detection element 32 is closer to the one end side of the main body 20 than the optical axis of the light traveling from the second dichroic coating layer 22 to the third detection element 33 (see FIG. It is located at the lower left side of the).
  • the photodetector 3 is used, for example, as an analyzer for analyzing a sample.
  • the light L2 from the sample is emitted toward the dichroic mirror 2 (second dichroic coating layer 22).
  • the light L2 When the light L2 is applied to the dichroic mirror 2 (second dichroic coating layer 22), blue light is reflected by the second dichroic coating layer 22. Then, the light (blue light) reflected by the second dichroic coating layer 22 is detected by the third detection element 33.
  • the green and red lights included in the light L2 pass through the second dichroic coating layer 22 and enter the main body 20.
  • the light incident on the main body 20 enters the main body 20 and is transmitted through the main body 20 while being refracted on the other surface of the main body 20.
  • Green light of the light that has passed through the body 20 is reflected by the first dichroic coating layer 21 and passes through the body 20.
  • the light that has passed through the main body 20 is emitted from the main body 20 while being refracted on the other surface of the main body 20, passes through the second dichroic coating layer 22, and is detected by the second detection element 32.
  • the red light included in the light L2 is emitted from the body 20 while being refracted on one surface of the body 20, passes through the first dichroic coating layer 21, and is detected by the first detection element 31. Detected in.
  • the photodetector 3 As described above, according to the second embodiment, it is possible to detect three lights having different wavelengths by using the photodetector 3 provided with the dichroic mirror 2. Then, the photodetector 3 can be downsized.
  • the type of light transmitted through the first dichroic coating layer 21 and the second dichroic coating layer 22 is not limited to the above, and can be variously changed.
  • FIG. 4 is a schematic diagram showing the configuration of the light source device 4 according to the third embodiment of the present invention.
  • the light source device 4 is a device for combining and outputting four lights having different wavelengths.
  • the light source device 4 includes a dichroic mirror 5, a first light source element 61, a second light source element 62, a third light source element 63, and a fourth light source element 64.
  • the dichroic mirror 5 includes the main body 20 described above, a first dichroic coating layer 51, and a second dichroic coating layer 52.
  • the first dichroic coating layer 51 is formed on one surface of the main body 20.
  • the first dichroic coating layer 51 is divided into two regions, a first region 511 and a second region 512.
  • the first region 511 is located on the other end side (upper right end side in FIG. 4) of the one surface of the main body 20 and at the center.
  • the first region 511 of the first dichroic coating layer 51 transmits red light and reflects other light.
  • the second region 512 is located at one end side (the lower left end side in FIG. 4) on one surface of the main body 20.
  • the second region 512 of the first dichroic coating layer 51 transmits infrared light and reflects other light.
  • the second dichroic coating layer 52 is formed on the other surface of the main body 20.
  • the second dichroic coating layer 52 is divided into two regions, a third region 523 and a fourth region 524.
  • the third region 523 is located on the other surface of the main body 20 at the other end side (upper right end side in FIG. 4) and at the center.
  • the third region 523 of the second dichroic coating layer 52 transmits infrared light, red light, and green light, and reflects other light.
  • the fourth region 524 is located at one end side (the lower left end side in FIG. 4) on one surface of the main body 20.
  • the fourth region 524 of the second dichroic coating layer 52 transmits green light and reflects other light.
  • the first light source element 61 is arranged apart from the dichroic mirror 5 and faces the first region 511 of the first dichroic coating layer 51.
  • the first light source element 61 emits red light toward the first region 511 of the first dichroic coating layer 51.
  • the incident angle of the light that enters the dichroic mirror 5 (the first region 511 of the first dichroic coating layer 51) from the first light source element 61 is approximately 45°.
  • the second light source element 62 is arranged apart from the dichroic mirror 5 and faces the second region 512 of the first dichroic coating layer 51.
  • the second light source element 62 emits infrared light toward the second region 512 of the first dichroic coating layer 51.
  • the incident angle of the light that enters the dichroic mirror 5 (the second region 512 of the first dichroic coating layer 51) from the second light source element 62 is about 45°.
  • the optical axis of the light traveling from the second light source element 62 to the second region 512 is parallel to the optical axis of the light traveling from the first light source element 61 to the first region 511.
  • the third light source element 63 is arranged at a distance from the dichroic mirror 5 and faces the fourth region 524 of the second dichroic coating layer 52.
  • the third light source element 63 emits green light toward the fourth region 524 of the second dichroic coating layer 52.
  • the incident angle of the light that enters the dichroic mirror 5 (the fourth region 524 of the second dichroic coating layer 52) from the third light source element 63 is approximately 45°.
  • the fourth light source element 64 is arranged at a distance from the dichroic mirror 5 and faces the third region 523 of the second dichroic coating layer 52.
  • the fourth light source element 64 emits blue light toward the third region 523 of the second dichroic coating layer 52.
  • the incident angle of the light that enters the dichroic mirror 5 (the third region 523 of the second dichroic coating layer 52) from the fourth light source element 64 is about 45°.
  • the optical axis of the light traveling from the fourth light source element 64 to the third region 523 is parallel to the optical axis of the light traveling from the third light source element 63 to the fourth region 524.
  • red light is emitted from the first light source element 61 toward the dichroic mirror 5 (the first region 511 of the first dichroic coating layer 51).
  • the light from the first light source element 61 passes through the first region 511 of the first dichroic coating layer 51 and enters the main body 20.
  • the light from the first light source element 61 enters the main body 20 while being refracted on one surface of the main body 20.
  • the light (red light) incident on the main body 20 passes through the main body 20, is refracted on the other surface of the main body 20, is emitted from the main body 20, and passes through the third region 523 of the second dichroic coating layer 52. ..
  • infrared light is emitted from the second light source element 62 toward the dichroic mirror 5 (the second region 512 of the first dichroic coating layer 51).
  • the light from the second light source element 62 passes through the second region 512 of the first dichroic coating layer 51 and enters the main body 20.
  • the light from the second light source element 62 enters the main body 20 while being refracted on one surface of the main body 20.
  • the light (infrared light) incident on the main body 20 passes through the main body 20, is reflected by the fourth region 524 of the second dichroic coating layer 52, then passes through the main body 20, and further, of the first dichroic coating layer 51.
  • After being reflected by the first region 511, it passes through the main body 20, is emitted from the main body 20 while being refracted on the other surface of the main body 20, and passes through the third region 523 of the second dichroic coating layer 52.
  • green light is emitted from the third light source element 63 toward the dichroic mirror 5 (the fourth region 524 of the second dichroic coating layer 52).
  • the light from the third light source element 63 passes through the fourth region 524 of the second dichroic coating layer 52 and enters the main body 20.
  • the light from the third light source element 63 enters the main body 20 while being refracted on the other surface of the main body 20.
  • the light (green light) incident on the main body 20 passes through the main body 20, is reflected by the first region 511 of the first dichroic coating layer 51, then passes through the main body 20, and is refracted on the other surface of the main body 20. While being emitted from the main body 20, it passes through the third region 523 of the second dichroic coating layer 52.
  • blue light is emitted from the fourth light source element 64 toward the dichroic mirror 5 (the third region 523 of the second dichroic coating layer 52).
  • the light (blue light) from the fourth light source element 64 is reflected by the third region 523 of the second dichroic coating layer 52.
  • each light source element red light emitted from the first light source element 61, infrared light emitted from the second light source element 62, and light emitted from the third light source element 63.
  • the light L3 that is a combination of the green light and the blue light emitted from the fourth light source element 64 is output. In this way, in the light source device 4, four lights having different wavelengths are combined and output.
  • the wavelength of the emitted light is not limited to the above, and can be changed in various ways.
  • the first dichroic coating layer 51 and the second dichroic coating layer 52 may be divided into three or more regions in which the wavelengths of the transmitted light are different.
  • the light source device 4 is provided with a light source element corresponding to each region.
  • the first dichroic coating layer 51 and the second dichroic coating layer 52 have two regions in which the wavelengths of light that are transmitted are different. Then, by using the dichroic mirror 5, four lights having different wavelengths can be combined.
  • the first dichroic coating layer 51 having two regions (first region 511 and second region 512) having different wavelengths of transmitted light is formed on one surface of the main body 20, and the other surface of the main body is further formed.
  • the second dichroic coating layer 52 having two regions (third region 523 and fourth region 524) having different wavelengths to be transmitted it is possible to combine and output four lights having different wavelengths. ..
  • the four lights having different wavelengths can be combined using the dichroic mirror 5, and the dichroic mirror 5 can be downsized.
  • the dichroic mirror 5 is used in the light source device 4. Therefore, the light source device 4 can be used to combine and output four lights having different wavelengths, and the light source device 4 can be downsized.
  • first dichroic coating layer 51 and the second dichroic coating layer 52 may be divided into three or more regions in which the wavelengths of the light passing therethrough are different. By doing so, it is possible to combine four or more lights having different wavelengths by using the dichroic mirror 5.
  • FIG. 5 is a schematic diagram showing the configuration of the photodetector 6 according to the fourth embodiment of the present invention.
  • the photodetector 6 is a device for separating incident light into four lights having different wavelengths.
  • the photodetector 6 includes the dichroic mirror 5, the first detection element 71, the second detection element 72, the third detection element 73, and the fourth detection element 74 described above.
  • the positional relationship between the dichroic mirror 5 and each detection element in the light detection device 6 corresponds to the positional relationship between the dichroic mirror 5 and each light source element in the light source device 4 of the third embodiment.
  • the first detection element 71 is arranged at a distance from the dichroic mirror 5, and faces the first region 511 of the first dichroic coating layer 51.
  • the second detection element 72 is arranged at a distance from the dichroic mirror 5, and faces the second region 512 of the first dichroic coating layer 51.
  • the third detection element 73 is arranged at a distance from the dichroic mirror 5 and faces the fourth region 524 of the second dichroic coating layer 52.
  • the fourth detection element 74 is arranged at a distance from the dichroic mirror 5 and faces the third region 523 of the second dichroic coating layer 52.
  • the photodetector 6 is used, for example, as an analyzer for analyzing a sample.
  • the light L4 from the sample is emitted toward the dichroic mirror 5 (the third region 523 of the second dichroic coating layer 52).
  • the infrared light, the green light, and the red light included in the light L4 pass through the third region 523 of the second dichroic coating layer 52 and enter the main body 20. At this time, the light entering the main body 20 enters the main body 20 while being refracted on the other surface of the main body 20.
  • the red light of the light that has passed through the main body 20 passes through the first region 511 of the first dichroic coating layer 51 and is detected by the first detection element 71.
  • the infrared light and the green light included in the light L4 are reflected by the first region 511 of the first dichroic coating layer 51 after passing through the main body 20, pass through the main body 20, and pass through the second dichroic coating layer.
  • the green light of the light traveling toward the fourth region 524 of the second dichroic coating layer 52 passes through the fourth region 524 of the second dichroic coating layer 52 and is detected by the third detection element 73.
  • Infrared light of the light traveling toward the fourth region 524 of the second dichroic coating layer 52 is reflected by the fourth region 524 of the second dichroic coating layer 52, passes through the main body 20, and then the first dichroic coating layer 51. The light passes through the second region 512 and is detected by the second detection element 72.
  • the photodetector 6 As described above, according to the fourth embodiment, four lights having different wavelengths can be detected by using the photodetector 6 provided with the dichroic mirror 5. Then, the photodetector 6 can be downsized.
  • the type of light (wavelength of transmitted light) that transmits each region of the first dichroic coating layer 51 and the second dichroic coating layer 52 is not limited to the above, and can be variously changed.
  • each region of the first dichroic coating layer 51 and the second dichroic coating layer 52 may be divided into three or more regions in which the wavelength of the transmitted light is different.
  • a plurality of detection elements may be provided so as to correspond to the respective regions. With this configuration, the light detection device 6 can be used to detect four or more lights having different wavelengths.

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Abstract

A dichroic mirror 2 is provided with a body 20, a first dichroic coating layer 21 formed on one surface of the body 20, and a second dichroic coating layer 22 formed on the other surface of the body 20. The first dichroic coating layer 21 transmits a specific wavelength and reflects light of wavelengths other than the specific wavelength. The second dichroic coating layer 22 transmits a different specific wavelength than the first dichroic coating layer, and reflects light of wavelength other than the different specific wavelength. Three different wavelengths of light can therefore be combined using the dichroic mirror 2. The dichroic mirror 2 can also be reduced in size.

Description

ダイクロイックミラー、光源装置及び光検出装置Dichroic mirror, light source device and light detection device
　本発明は、ダイクロイックコーティング層が形成されるダイクロイックミラー、並びに、当該ダイクロイックミラーを備える光源装置及び光検出装置に関するものである。 The present invention relates to a dichroic mirror on which a dichroic coating layer is formed, and a light source device and a photodetector including the dichroic mirror.
　従来より、プロジェクタ装置などにおいて、ダイクロイックミラーが利用されている。ダイクロイックミラーは、特定波長の光を透過し、特定波長以外の光を反射するミラーである。例えば、プロジェクタ装置では、光の三原色（ＲＧＢ）に対応する波長の光源を用いて、その光量を調整することで多彩な色調を表現することができる。 Conventionally, dichroic mirrors have been used in projector devices and the like. The dichroic mirror is a mirror that transmits light having a specific wavelength and reflects light other than the specific wavelength. For example, in a projector device, various color tones can be expressed by using a light source having a wavelength corresponding to the three primary colors (RGB) of light and adjusting the amount of light.
　図６は、従来のダイクロイックミラー１００を用いた光源装置２００の構成を示した概略図である。 FIG. 6 is a schematic diagram showing a configuration of a light source device 200 using the conventional dichroic mirror 100.
　光源装置２００は、波長の異なる２つの光を合成して出力するための装置である。光源装置２００は、ダイクロイックミラー１００と、光源素子１１０，１１１とを備えている。ダイクロイックミラー１００は、平板状の本体１０１と、本体１０１の一方の面に形成される反射防止膜１０２と、本体１０１の他方の面に形成されるダイクロイックコーティング層１０３とを備えている。 The light source device 200 is a device for combining and outputting two lights having different wavelengths. The light source device 200 includes a dichroic mirror 100 and light source elements 110 and 111. The dichroic mirror 100 includes a flat plate-shaped main body 101, an antireflection film 102 formed on one surface of the main body 101, and a dichroic coating layer 103 formed on the other surface of the main body 101.
　ダイクロイックコーティング層１０３は、特定の波長の光を透過し、特定の波長以外の光を反射する。例えば、ダイクロイックコーティング層１０３は、波長ａの光を透過し、波長ａ以外の光を反射する。光源素子１１０は、本体１０１と間隔を隔てて配置されており、反射防止膜１０２（一方の面）と対向している。光源素子１１０は、波長ａの光を出射する。光源素子１１１は、本体１０１と間隔を隔てて配置されており、ダイクロイックコーティング層１０３（他方の面）と対向している。光源素子１１１は、波長ｂ（波長ａ以外）の光を出射する。 The dichroic coating layer 103 transmits light having a specific wavelength and reflects light other than the specific wavelength. For example, the dichroic coating layer 103 transmits light of wavelength a and reflects light other than wavelength a. The light source element 110 is arranged apart from the main body 101, and faces the antireflection film 102 (one surface). The light source element 110 emits light of wavelength a. The light source element 111 is arranged with a space from the main body 101, and faces the dichroic coating layer 103 (the other surface). The light source element 111 emits light of wavelength b (other than wavelength a).
　光源装置２００では、光源素子１１０から波長ａの光が出射される。光源素子１１０からの光は、反射防止膜１０２を透過し、本体１０１に入射する。このとき、光源素子１１０からの光は、本体１０１の一方の面で屈折しながら、本体１０１に入射する。そして、本体１０１を通過した光は、本体１０１の他方の面で屈折しながら、本体１０１から出射し、ダイクロイックコーティング層１０３を通過する。 In the light source device 200, light of wavelength a is emitted from the light source element 110. Light from the light source element 110 passes through the antireflection film 102 and enters the main body 101. At this time, the light from the light source element 110 is incident on the main body 101 while being refracted on one surface of the main body 101. Then, the light that has passed through the main body 101 exits from the main body 101 while passing through the dichroic coating layer 103 while being refracted on the other surface of the main body 101.
　また、光源素子１１１から波長ｂの光が出射される。光源素子１１１からの光は、波長ｂの光であるため、ダイクロイックコーティング層１０３で反射される。そして、光源素子１１１からの光（波長ｂの光）と、光源素子１１０からの光（波長ａの光）とが合成されて出力される。 Further, light of wavelength b is emitted from the light source element 111. Since the light from the light source element 111 has the wavelength b, it is reflected by the dichroic coating layer 103. Then, the light from the light source element 111 (light of wavelength b) and the light from the light source element 110 (light of wavelength a) are combined and output.
　このように、図６に示す光源装置２００では、ダイクロイックコーティング層１０３を備えるダイクロイックミラー１００を用いることで、波長の異なる２つの光が合成されて出力される。
　また、従来より、波長の異なる３つの光を合成して出力する装置も利用されている（例えば、下記特許文献１参照）。 As described above, in the light source device 200 shown in FIG. 6, by using the dichroic mirror 100 including the dichroic coating layer 103, two lights having different wavelengths are combined and output.
Further, conventionally, an apparatus that combines and outputs three lights having different wavelengths has also been used (see, for example, Patent Document 1 below).
　特許文献１には、波長の異なる３つの光を合成して出力するプロジェクタ装置が記載されている。特許文献１に記載のプロジェクタ装置では、クロスダイクロイックミラーや、クロスダイクロイックプリズムを用いることで、波長の異なる３つの光を合成して出力している。 Patent Document 1 describes a projector device that combines and outputs three lights having different wavelengths. The projector device described in Patent Document 1 uses a cross dichroic mirror or a cross dichroic prism to combine and output three lights having different wavelengths.
特開平０７－３０１７７８号公報JP-A-07-301778
　しかしながら、クロスダイクロイックミラーやクロスダイクロイックプリズムは、組立品であるため、構造が複雑であり、小型化が困難であるという不具合が生じてた。 However, since the cross dichroic mirror and cross dichroic prism are assembled parts, the structure is complicated and it is difficult to miniaturize.
　本発明は、上記実情に鑑みてなされたものであり、波長の異なる少なくとも３つの光を合成でき、かつ、小型化を実現できるダイクロイックミラー及び光源装置を提供することを目的とする。
　また、本発明は、波長の異なる少なくとも３つの光を検出でき、かつ、小型化を実現できる光検出装置を提供することを目的とする。 The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a dichroic mirror and a light source device that can combine at least three lights having different wavelengths and can be downsized.
Another object of the present invention is to provide a photo-detecting device capable of detecting at least three lights having different wavelengths and realizing miniaturization.
（１）本発明に係るダイクロイックミラーは、本体と、第１ダイクロイックコーティング層と、第２ダイクロイックコーティング層とを備える。前記本体は、平板状に形成され、光を透過する。前記第１ダイクロイックコーティング層は、前記本体の一方の面に形成される。前記第２ダイクロイックコーティング層は、前記本体の他方の面に形成される。前記第１ダイクロイックコーティング層は、特定の波長を透過するとともに、当該波長以外の光を反射する。前記第２ダイクロイックコーティング層は、前記第１ダイクロイックコーティング層とは異なる特定の波長を透過するとともに、当該波長以外の光を反射する。 (1) The dichroic mirror according to the present invention includes a main body, a first dichroic coating layer, and a second dichroic coating layer. The body has a flat plate shape and transmits light. The first dichroic coating layer is formed on one surface of the body. The second dichroic coating layer is formed on the other surface of the body. The first dichroic coating layer transmits a specific wavelength and reflects light other than the wavelength. The second dichroic coating layer transmits a specific wavelength different from that of the first dichroic coating layer and reflects light other than the wavelength.
　このような構成によれば、ダイクロイックミラーに対して、一方の面から、第１ダイクロイックコーティング層及び第２ダイクロイックコーティング層を通過する波長の光を入射させると、その光は、第１ダイクロイックコーティング層、本体及び第２ダイクロイックコーティング層を順々に通過する。 With such a configuration, when light having a wavelength that passes through the first dichroic coating layer and the second dichroic coating layer is incident on the dichroic mirror from one surface, the light is emitted from the first dichroic coating layer. , The body and the second dichroic coating layer in sequence.
　また、ダイクロイックミラーに対して、他方の面から、第２ダイクロイックコーティング層を通過し、かつ、第１ダイクロイックコーティング層を通過しない波長の光を入射させると、その光は、第２ダイクロイックコーティング層及び本体を通過した後、第１ダイクロイックコーティング層で反射する。そして、第１ダイクロイックコーティング層で反射した光は、本体を通過した後、第２ダイクロイックコーティング層を通過する。 When light having a wavelength that passes through the second dichroic coating layer and does not pass through the first dichroic coating layer is incident on the dichroic mirror from the other surface, the light is emitted from the second dichroic coating layer and the second dichroic coating layer. After passing through the body, it is reflected by the first dichroic coating layer. Then, the light reflected by the first dichroic coating layer passes through the main body and then the second dichroic coating layer.
　また、ダイクロイックミラーに対して、他方の面から、第２ダイクロイックコーティング層を通過しない波長の光を入射させると、その光は、第２ダイクロイックコーティング層で反射する。
　これにより、ダイクロイックミラーから、波長の異なる３つの光が合成されて出力される。 When light having a wavelength that does not pass through the second dichroic coating layer is incident on the dichroic mirror from the other surface, the light is reflected by the second dichroic coating layer.
As a result, the three lights having different wavelengths are combined and output from the dichroic mirror.
　すなわち、本体の一方の面に、特定の波長を透過するとともに、当該波長以外の光を反射する第１ダイクロイックコーティング層を形成し、本体の他方の面に、第１ダイクロイックコーティング層とは異なる特定の波長を透過するとともに、当該波長以外の光を反射する第２ダイクロイックコーティング層を形成するという簡易な構成で、波長の異なる３つの光を合成して出力できる。
　そのため、ダイクロイックミラーの小型化を実現できる。 That is, a first dichroic coating layer that transmits a specific wavelength and reflects light other than the wavelength is formed on one surface of the main body, and a specific dichroic coating layer different from the first dichroic coating layer is formed on the other surface of the main body. With a simple configuration in which the second dichroic coating layer that transmits the wavelength of the above and reflects the light of the wavelength other than the wavelength is formed, it is possible to combine and output the three lights of different wavelengths.
Therefore, the dichroic mirror can be downsized.
（２）また、前記第１ダイクロイックコーティング層及び前記第２ダイクロイックコーティング層は、それぞれ透過する光の波長が異なる複数の領域を有してもよい。 (2) Further, the first dichroic coating layer and the second dichroic coating layer may each have a plurality of regions in which the wavelengths of the light passing therethrough are different.
　このような構成によれば、ダイクロイックミラーを用いて波長の異なる４つ以上の光を合成できる。そして、ダイクロイックミラーの小型化を実現できる。
　例えば、第１ダイクロイックコーティング層において透過する光の波長が異なる２つの領域を形成し、第２ダイクロイックコーティング層において透過する光の波長が異なる２つの領域を形成すれば、ダイクロイックミラーを用いて波長の異なる４つの光を合成できる。そして、ダイクロイックミラーの小型化を実現できる。 With such a configuration, it is possible to combine four or more lights having different wavelengths by using the dichroic mirror. Further, the dichroic mirror can be downsized.
For example, if two regions having different wavelengths of light passing therethrough are formed in the first dichroic coating layer and two regions having different wavelengths of light transmitting therethrough are formed in the second dichroic coating layer, the dichroic mirror is used to change the wavelength. Four different lights can be combined. Further, the dichroic mirror can be downsized.
（３）本発明に係る光源装置は、前記ダイクロイックミラーと、少なくとも３つの光源素子光源素子とを備える。前記少なくとも３つの光源素子光源素子は、それぞれ異なる波長の光を出射する。前記光源装置では、前記少なくとも３つの光源素子から出射される各波長の光を、前記第１ダイクロイックコーティング層及び前記第２ダイクロイックコーティング層により合成して出力する。 (3) A light source device according to the present invention includes the dichroic mirror and at least three light source elements and light source elements. The at least three light source elements light source elements emit light of different wavelengths. In the light source device, the lights of the respective wavelengths emitted from the at least three light source elements are combined by the first dichroic coating layer and the second dichroic coating layer and output.
　このような構成によれば、光源装置を用いることで波長の異なる少なくとも３つの光を合成して出力できる。また、光源装置の小型化を実現できる。 With such a configuration, it is possible to combine and output at least three lights having different wavelengths by using the light source device. Further, the light source device can be downsized.
（４）本発明に係る光検出装置は、前記ダイクロイックミラーと、少なくとも３つの検出素子とを備える。前記少なくとも３つの検出素子は、それぞれ光を検出する。前記光検出装置では、前記ダイクロイックミラーに入射する光を、前記第１ダイクロイックコーティング層及び前記第２ダイクロイックコーティング層により少なくとも３つの波長の光に分離して各検出素子で検出する。 (4) The photodetector according to the present invention includes the dichroic mirror and at least three detection elements. The at least three detection elements detect light, respectively. In the photodetector, the light incident on the dichroic mirror is separated into lights having at least three wavelengths by the first dichroic coating layer and the second dichroic coating layer, and detected by each detection element.
　このような構成によれば、光検出装置を用いることで波長の異なる少なくとも３つの光を検出できる。また、光検出装置の小型化を実現できる。 With such a configuration, at least three lights having different wavelengths can be detected by using the photodetector. Further, it is possible to reduce the size of the photodetector.
本発明の第１実施形態に係る光源装置の構成を示した概略図である。It is the schematic which showed the structure of the light source device which concerns on 1st Embodiment of this invention. 図１に示すダイクロイックミラーの第１ダイクロイックコーティング層及び第２ダイクロイックコーティング層における光の透過率を示したグラフである。3 is a graph showing the light transmittance of the first dichroic coating layer and the second dichroic coating layer of the dichroic mirror shown in FIG. 1. 本発明の第２実施形態に係る光検出装置の構成を示した概略図である。It is the schematic which showed the structure of the photon detection apparatus which concerns on 2nd Embodiment of this invention. 本発明の第３実施形態に係る光源装置の構成を示した概略図である。It is the schematic which showed the structure of the light source device which concerns on 3rd Embodiment of this invention. 本発明の第４実施形態に係る光検出装置の構成を示した概略図である。It is the schematic which showed the structure of the photon detection apparatus which concerns on 4th Embodiment of this invention. 従来のダイクロイックミラーを用いた光源装置の構成を示した概略図である。It is the schematic which showed the structure of the light source device using the conventional dichroic mirror.
＜第１実施形態＞
１．光源装置の構成
　図１は、本発明の第１実施形態に係る光源装置１の構成を示した概略図である。
　光源装置１は、波長の異なる３つの光を合成して出力するための装置である。光源装置１は、ダイクロイックミラー２と、第１光源素子１１と、第２光源素子１２と、第３光源素子１３とを備えている。
　ダイクロイックミラー２は、本体２０と、第１ダイクロイックコーティング層２１と、第２ダイクロイックコーティング層２２とを備えている。 <First Embodiment>
1. Configuration of Light Source Device FIG. 1 is a schematic diagram showing the configuration of the light source device 1 according to the first embodiment of the present invention.
The light source device 1 is a device for combining and outputting three lights having different wavelengths. The light source device 1 includes a dichroic mirror 2, a first light source element 11, a second light source element 12, and a third light source element 13.
The dichroic mirror 2 includes a main body 20, a first dichroic coating layer 21, and a second dichroic coating layer 22.
　本体２０は、平板状に形成されている。本体２０は、例えば、合成石英基板である。
　第１ダイクロイックコーティング層２１は、本体２０の一方の面に形成されている。第１ダイクロイックコーティング層２１は、特定の波長の光を透過し、当該特定の波長以外の光を反射する。後述するように、この例では、第１ダイクロイックコーティング層２１は、赤色の光を透過し、他の光を反射する。 The main body 20 is formed in a flat plate shape. The main body 20 is, for example, a synthetic quartz substrate.
The first dichroic coating layer 21 is formed on one surface of the main body 20. The first dichroic coating layer 21 transmits light having a specific wavelength and reflects light having a wavelength other than the specific wavelength. As will be described later, in this example, the first dichroic coating layer 21 transmits red light and reflects other light.
　第２ダイクロイックコーティング層２２は、本体２０の他方の面に形成されている。第２ダイクロイックコーティング層２２は、第１ダイクロイックコーティング層２１とは異なる特定の波長の光を透過し、当該特定の波長以外の光を反射する。後述するように、この例では、第２ダイクロイックコーティング層２２は、赤色の光、及び、緑色の光を透過し、他の光を反射する。 The second dichroic coating layer 22 is formed on the other surface of the main body 20. The second dichroic coating layer 22 transmits light having a specific wavelength different from that of the first dichroic coating layer 21, and reflects light other than the specific wavelength. As will be described later, in this example, the second dichroic coating layer 22 transmits red light and green light and reflects other light.
　第１光源素子１１は、ダイクロイックミラー２と間隔を隔てて配置されており、第１ダイクロイックコーティング層２１（一方の面）と対向している。第１光源素子１１は、ダイクロイックミラー２の第１ダイクロイックコーティング層２１の中央部に向けて、赤色の光を出射する。第１光源素子１１からダイクロイックミラー２（第１ダイクロイックコーティング層２１）に入射する光の入射角は、約４５°である。 The first light source element 11 is arranged at a distance from the dichroic mirror 2 and faces the first dichroic coating layer 21 (one surface). The first light source element 11 emits red light toward the central portion of the first dichroic coating layer 21 of the dichroic mirror 2. The incident angle of the light that enters the dichroic mirror 2 (first dichroic coating layer 21) from the first light source element 11 is approximately 45°.
　第２光源素子１２は、ダイクロイックミラー２と間隔を隔てて配置されており、第２ダイクロイックコーティング層２２（他方の面）と対向している。第２光源素子１２は、ダイクロイックミラー２の第２ダイクロイックコーティング層２２における中央部からやや一端部側（図１における左下端部側）の部分に向けて、緑色の光を出射する。第２光源素子１２からダイクロイックミラー２（第２ダイクロイックコーティング層２２）に入射する光の入射角は、約４５°である。 The second light source element 12 is arranged at a distance from the dichroic mirror 2 and faces the second dichroic coating layer 22 (the other surface). The second light source element 12 emits green light from the central portion of the second dichroic coating layer 22 of the dichroic mirror 2 to a portion slightly closer to one end side (lower left end side in FIG. 1). The incident angle of the light that enters the dichroic mirror 2 (the second dichroic coating layer 22) from the second light source element 12 is about 45°.
　第３光源素子１３は、ダイクロイックミラー２と間隔を隔てて配置されており、第２ダイクロイックコーティング層２２（他方の面）と対向している。第３光源素子１３は、ダイクロイックミラー２の第２ダイクロイックコーティング層２２における中央部からやや他端部側（図１における右上端部側）の部分に向けて、青色の光を出射する。第３光源素子１３からダイクロイックミラー２に向かう光の光軸は、第２光源素子１２からダイクロイックミラー２に向かう光の光軸と平行である。第３光源素子１３からダイクロイックミラー２（第２ダイクロイックコーティング層２２）に入射する光の入射角は、約４５°である。 The third light source element 13 is arranged at a distance from the dichroic mirror 2 and faces the second dichroic coating layer 22 (the other surface). The third light source element 13 emits blue light from the central portion of the second dichroic coating layer 22 of the dichroic mirror 2 to a portion slightly on the other end side (upper right end side in FIG. 1). The optical axis of the light traveling from the third light source element 13 to the dichroic mirror 2 is parallel to the optical axis of the light traveling from the second light source element 12 to the dichroic mirror 2. The incident angle of the light that enters the dichroic mirror 2 (the second dichroic coating layer 22) from the third light source element 13 is about 45°.
２．各ダイクロイックコーティング層における光の透過率
　図２は、ダイクロイックミラー２の第１ダイクロイックコーティング層２１及び第２ダイクロイックコーティング層２２における光の透過率を示したグラフである。図２では、各ダイクロイックコーティング層に対してＳ偏光レーザからの光を照射した際の光の透過率を示している。図２では、上方側に示すグラフＡが、第１ダイクロイックコーティング層２１における光の透過率を示しており、下方側に示すグラフＢが、第２ダイクロイックコーティング層２２における光の透過率を示している。なお、図２では、各グラフにおいて、横軸が光の波長を表しており、縦軸が光の透過率を示している。 2. Light Transmittance of Each Dichroic Coating Layer FIG. 2 is a graph showing the light transmittance of the first dichroic coating layer 21 and the second dichroic coating layer 22 of the dichroic mirror 2. FIG. 2 shows the transmittance of light when each dichroic coating layer is irradiated with light from the S-polarized laser. In FIG. 2, the graph A shown on the upper side shows the light transmittance of the first dichroic coating layer 21, and the graph B shown on the lower side shows the light transmittance of the second dichroic coating layer 22. There is. In each graph in FIG. 2, the horizontal axis represents the wavelength of light and the vertical axis represents the light transmittance.
　図２においてグラフＡで示すように、第１ダイクロイックコーティング層２１は、赤色の光を透過する。具体的には、第１ダイクロイックコーティング層２１は、５８０～６８０ｎｍの波長範囲にピーク波長を有する光（赤色の光）を透過し、当該波長以外の光を反射する。 As shown by the graph A in FIG. 2, the first dichroic coating layer 21 transmits red light. Specifically, the first dichroic coating layer 21 transmits light having a peak wavelength in the wavelength range of 580 to 680 nm (red light) and reflects light other than the wavelength.
　また、図２においてグラフＢで示すように、第２ダイクロイックコーティング層２２は、赤色の光、及び、緑色の光を透過する。具体的には、第２ダイクロイックコーティング層２２は、５００～６８０ｎｍの波長範囲にピーク波長を有する光（赤色の光、及び、緑色の光）を透過し、当該波長以外の光を反射する。 Further, as shown by the graph B in FIG. 2, the second dichroic coating layer 22 transmits red light and green light. Specifically, the second dichroic coating layer 22 transmits light having a peak wavelength in the wavelength range of 500 to 680 nm (red light and green light) and reflects light other than the wavelength.
３．光源装置による光の合成
　図１に示すように、光源装置１では、第１光源素子１１からダイクロイックミラー２（第１ダイクロイックコーティング層２１）に向けて赤色の光が出射される。例えば、この例では、第１光源素子１１から６３０ｎｍの波長の光が出射される。第１光源素子１１からの光は、第１ダイクロイックコーティング層２１を透過し、本体２０に入射する。このとき、第１光源素子１１からの光は、本体２０の一方の面で屈折しながら、本体２０に入射する。なお、第１ダイクロイックコーティング層２１は、その厚みが極めて薄いため、第１ダイクロイックコーティング層２１における光の屈折はないものとして扱うことができる。本体２０を通過した光（赤色の光）は、本体２０の他方の面で屈折しながら本体２０から出射し、第２ダイクロイックコーティング層２２を通過する。 3. As shown in FIG. 1, in the light source device 1, red light is emitted from the first light source element 11 toward the dichroic mirror 2 (first dichroic coating layer 21). For example, in this example, light having a wavelength of 630 nm is emitted from the first light source element 11. The light from the first light source element 11 passes through the first dichroic coating layer 21 and enters the main body 20. At this time, the light from the first light source element 11 is incident on the body 20 while being refracted on one surface of the body 20. Since the first dichroic coating layer 21 has an extremely small thickness, it can be treated as if there is no refraction of light in the first dichroic coating layer 21. The light (red light) that has passed through the main body 20 is emitted from the main body 20 while being refracted on the other surface of the main body 20, and passes through the second dichroic coating layer 22.
　また、第２光源素子１２からダイクロイックミラー２（第２ダイクロイックコーティング層２２）に向けて緑色の光が出射される。例えば、この例では、第２光源素子１２から５１５ｎｍの波長の光が出射される。第２光源素子１２からの光は、第２ダイクロイックコーティング層２２を透過し、本体２０に入射する。このとき、第２光源素子１２からの光は、本体２０の他方の面で屈折しながら、本体２０に入射する。なお、第２ダイクロイックコーティング層２２は、その厚みが極めて薄いため、第２ダイクロイックコーティング層２２における光の屈折はないものとして扱うことができる。本体２０を通過した光（緑色の光）は、第１ダイクロイックコーティング層２１で反射し、本体２０を通過する。そして、本体２０を通過した光（緑色の光）は、本体２０の他方の面で屈折しながら本体２０から出射し、第２ダイクロイックコーティング層２２を通過する。 Also, green light is emitted from the second light source element 12 toward the dichroic mirror 2 (second dichroic coating layer 22). For example, in this example, light having a wavelength of 515 nm is emitted from the second light source element 12. Light from the second light source element 12 passes through the second dichroic coating layer 22 and enters the main body 20. At this time, the light from the second light source element 12 enters the main body 20 while being refracted on the other surface of the main body 20. Since the second dichroic coating layer 22 has an extremely small thickness, it can be treated as if there is no refraction of light in the second dichroic coating layer 22. The light (green light) that has passed through the body 20 is reflected by the first dichroic coating layer 21 and passes through the body 20. Then, the light (green light) that has passed through the main body 20 is emitted from the main body 20 while being refracted on the other surface of the main body 20, and passes through the second dichroic coating layer 22.
　また、第３光源素子１３からダイクロイックミラー２（第２ダイクロイックコーティング層２２）に向けて青色の光が出射される。例えば、この例では、第３光源素子１３から４５０ｎｍの波長の光が出射される。第３光源素子１３からの光（青色の光）は、第２ダイクロイックコーティング層２２で反射する。 Also, blue light is emitted from the third light source element 13 toward the dichroic mirror 2 (second dichroic coating layer 22). For example, in this example, light having a wavelength of 450 nm is emitted from the third light source element 13. The light (blue light) from the third light source element 13 is reflected by the second dichroic coating layer 22.
　これにより、光源装置１では、各光源素子からの光（第１光源素子１１から出射される赤色の光、第２光源素子１２から出射される緑色の光、及び、第３光源素子１３から出射される青色の光）が合成された光Ｌ１が出力される。
　このようにして、光源装置１では、波長の異なる３つの光が合成されて出力される。 As a result, in the light source device 1, light from each light source element (red light emitted from the first light source element 11, green light emitted from the second light source element 12, and light emitted from the third light source element 13) is emitted. The light L1 that is composed of the combined blue light) is output.
In this way, in the light source device 1, the three lights having different wavelengths are combined and output.
　なお、第１ダイクロイックコーティング層２１及び第２ダイクロイックコーティング層２２の光の透過率、並びに、第１光源素子１１、第２光源素子１２及び第３光源素子１３から出射される光の波長は、上記したものに限らず種々に変更可能である。 The light transmittances of the first dichroic coating layer 21 and the second dichroic coating layer 22 and the wavelengths of light emitted from the first light source element 11, the second light source element 12, and the third light source element 13 are as described above. Not limited to the above, various modifications are possible.
　すなわち、第１ダイクロイックコーティング層２１は、緑色の光を透過するものであってもよく、青色の光を透過するものであってもよく、赤色及び緑色の光を透過するものであってもよく、青色及び緑色の光を透過するものであってもよく、青色及び赤色の光を透過するものであってもよい。 That is, the first dichroic coating layer 21 may be one that transmits green light, one that transmits blue light, and one that transmits red and green light. , Blue and green light may be transmitted, or blue and red light may be transmitted.
　また、第２ダイクロイックコーティング層２２は、赤色の光の光を透過するものであってもよく、緑色の光を透過するものであってもよく、青色の光を透過するものであってもよく、青色及び緑色の光を透過するものであってもよく、青色及び赤色の光を透過するものであってもよい。
　また、第１光源素子１１は、緑色の光を出射するものであってもよく、青色の光を出射するものであってもよい。
　また、第２光源素子１２は、赤色の光を出射するものであってもよく、青色の光を出射するものであってもよい。
　また、第３光源素子１３は、赤色の光を出射するものであってもよく、緑色の光を出射するものであってもよい。 The second dichroic coating layer 22 may be one that transmits red light, one that transmits green light, and one that transmits blue light. , Blue and green light may be transmitted, or blue and red light may be transmitted.
The first light source element 11 may be one that emits green light or one that emits blue light.
The second light source element 12 may be one that emits red light or one that emits blue light.
The third light source element 13 may emit red light or may emit green light.
４．作用効果
（１）本実施形態によれば、図１に示すように、ダイクロイックミラー２は、本体２０と、本体２０の一方の面に形成される第１ダイクロイックコーティング層２１と、本体２０の他方の面に形成される第２ダイクロイックコーティング層２２とを備えている。第１ダイクロイックコーティング層２１は、特定の波長を透過するとともに、当該波長以外の光を反射する。第２ダイクロイックコーティング層２２は、第１ダイクロイックコーティング層とは異なる特定の波長を透過するとともに、当該波長以外の光を反射する。 4. Function and Effect (1) According to the present embodiment, as shown in FIG. 1, the dichroic mirror 2 includes a main body 20, a first dichroic coating layer 21 formed on one surface of the main body 20, and the other of the main body 20. And a second dichroic coating layer 22 formed on the surface. The first dichroic coating layer 21 transmits a specific wavelength and reflects light other than the wavelength. The second dichroic coating layer 22 transmits a specific wavelength different from that of the first dichroic coating layer, and reflects light other than the wavelength.
　そのため、ダイクロイックミラー２に対して、第１光源素子１１から、第１ダイクロイックコーティング層２１及び第２ダイクロイックコーティング層２２を通過する波長の光（例えば、赤色の光）を入射させると、その光は、第１ダイクロイックコーティング層２１、本体２０及び第２ダイクロイックコーティング層２２を順々に通過する。 Therefore, when light of a wavelength that passes through the first dichroic coating layer 21 and the second dichroic coating layer 22 (for example, red light) is incident on the dichroic mirror 2 from the first light source element 11, the light is emitted. , The first dichroic coating layer 21, the main body 20, and the second dichroic coating layer 22 in order.
　また、ダイクロイックミラーに対して、第２光源素子１２から、第２ダイクロイックコーティング層２２を通過し、かつ、第１ダイクロイックコーティング層２１を通過しない波長の光（例えば、緑色の光）を入射させると、その光は、第２ダイクロイックコーティング層２２及び本体２０を通過した後、第１ダイクロイックコーティング層２１で反射する。そして、第１ダイクロイックコーティング層２１で反射した光は、本体２０を通過した後、第２ダイクロイックコーティング層２２を通過する。 In addition, when light having a wavelength that passes through the second dichroic coating layer 22 and does not pass through the first dichroic coating layer 21 (for example, green light) is incident on the dichroic mirror from the second light source element 12. After passing through the second dichroic coating layer 22 and the main body 20, the light is reflected by the first dichroic coating layer 21. The light reflected by the first dichroic coating layer 21 passes through the main body 20 and then the second dichroic coating layer 22.
　また、ダイクロイックミラー２に対して、第３光源素子１３から、第２ダイクロイックコーティング層２２を通過しない波長の光（例えば、青色の光）を入射させると、その光は、第２ダイクロイックコーティング層２２で反射する。
　これにより、ダイクロイックミラー２からは、波長の異なる３つの光が合成されて出力される。 In addition, when light (for example, blue light) having a wavelength that does not pass through the second dichroic coating layer 22 is incident on the dichroic mirror 2 from the third light source element 13, the light is emitted from the second dichroic coating layer 22. Reflect on.
As a result, the dichroic mirror 2 combines and outputs three lights having different wavelengths.
　このように、本体２０の一方の面に第１ダイクロイックコーティング層２１を形成し、本体２０の他方の面に、第２ダイクロイックコーティング層２２を形成するという簡易な構成で、波長の異なる３つの光を合成して出力できる。
　そのため、ダイクロイックミラー２を用いて波長の異なる３つの光を合成できる。そして、ダイクロイックミラー２の小型化を実現できる。 As described above, the first dichroic coating layer 21 is formed on one surface of the main body 20, and the second dichroic coating layer 22 is formed on the other surface of the main body 20. Can be combined and output.
Therefore, the dichroic mirror 2 can be used to combine three lights having different wavelengths. Then, the dichroic mirror 2 can be downsized.
（２）また、本実施形態によれば、ダイクロイックミラー２は、光源装置１に用いられる。
　そのため、光源装置１を用いて波長の異なる３つの光を合成して出力できる。また、光源装置１の小型化を実現できる。 (2) Further, according to the present embodiment, the dichroic mirror 2 is used for the light source device 1.
Therefore, the light source device 1 can be used to combine and output three lights having different wavelengths. In addition, the light source device 1 can be downsized.
＜第２実施形態＞
　以下では、図３～図５を用いて、本発明の他の実施形態について説明する。なお、第１実施形態と同様の構成については、上記と同一の符号を用いることにより説明を省略する。 <Second Embodiment>
Other embodiments of the present invention will be described below with reference to FIGS. 3 to 5. In addition, about the same structure as 1st Embodiment, description is abbreviate|omitted by using the same code as the above.
５．光検出装置
　図３は、本発明の第２実施形態に係る光検出装置３の構成を示した概略図である。
　光検出装置３は、入射する光を波長の異なる３つの光に分離するための装置である。光検出装置３は、上記したダイクロイックミラー２と、第１検出素子３１と、第２検出素子３２と、第３検出素子３３とを備えている。 5. Photodetector FIG. 3 is a schematic diagram showing the configuration of the photodetector 3 according to the second embodiment of the present invention.
The photodetector 3 is a device for separating incident light into three lights having different wavelengths. The photodetector 3 includes the dichroic mirror 2 described above, a first detection element 31, a second detection element 32, and a third detection element 33.
　光検出装置３におけるダイクロイックミラー２と各検出素子との配置関係は、第１実施形態の光源装置１におけるダイクロイックミラー２と各光源素子との配置関係に対応している。 The positional relationship between the dichroic mirror 2 and each detection element in the light detection device 3 corresponds to the positional relationship between the dichroic mirror 2 and each light source element in the light source device 1 of the first embodiment.
　すなわち、第１検出素子３１は、ダイクロイックミラー２と間隔を隔てて配置されており、第１ダイクロイックコーティング層２１（一方の面）と対向している。また、第２検出素子３２は、ダイクロイックミラー２と間隔を隔てて配置されており、第２ダイクロイックコーティング層２２（他方の面）と対向している。また、第３検出素子３３は、ダイクロイックミラー２と間隔を隔てて配置されており、第２ダイクロイックコーティング層２２（他方の面）と対向している。第２ダイクロイックコーティング層２２から第２検出素子３２に向かう光の光軸は、第２ダイクロイックコーティング層２２から第３検出素子３３に向かう光の光軸よりも、本体２０の一端部側（図３における左下端部側）に位置している。 That is, the first detection element 31 is arranged at a distance from the dichroic mirror 2 and faces the first dichroic coating layer 21 (one surface). In addition, the second detection element 32 is arranged at a distance from the dichroic mirror 2 and faces the second dichroic coating layer 22 (the other surface). The third detection element 33 is arranged with a space from the dichroic mirror 2, and faces the second dichroic coating layer 22 (the other surface). The optical axis of the light traveling from the second dichroic coating layer 22 to the second detection element 32 is closer to the one end side of the main body 20 than the optical axis of the light traveling from the second dichroic coating layer 22 to the third detection element 33 (see FIG. It is located at the lower left side of the).
　光検出装置３は、例えば、試料を分析するための分析装置に用いられる。この場合、試料からの光Ｌ２が、ダイクロイックミラー２（第２ダイクロイックコーティング層２２）に向けて出射される。 The photodetector 3 is used, for example, as an analyzer for analyzing a sample. In this case, the light L2 from the sample is emitted toward the dichroic mirror 2 (second dichroic coating layer 22).
　光Ｌ２がダイクロイックミラー２（第２ダイクロイックコーティング層２２）に照射されると、青色の光が第２ダイクロイックコーティング層２２で反射する。そして、第２ダイクロイックコーティング層２２で反射した光（青色の光）は、第３検出素子３３で検出される。 When the light L2 is applied to the dichroic mirror 2 (second dichroic coating layer 22), blue light is reflected by the second dichroic coating layer 22. Then, the light (blue light) reflected by the second dichroic coating layer 22 is detected by the third detection element 33.
　光Ｌ２に含まれる緑色及び赤色の光は、第２ダイクロイックコーティング層２２を透過し、本体２０に入射する。このとき、本体２０に入射する光は、本体２０の他方の面で屈折しながら、本体２０に入射し、本体２０を透過する。本体２０を通過した光のうち緑色の光は、第１ダイクロイックコーティング層２１で反射し、本体２０を通過する。そして、本体２０を通過した光は、本体２０の他方の面で屈折しながら本体２０から出射し、第２ダイクロイックコーティング層２２を通過して、第２検出素子３２で検出される。 The green and red lights included in the light L2 pass through the second dichroic coating layer 22 and enter the main body 20. At this time, the light incident on the main body 20 enters the main body 20 and is transmitted through the main body 20 while being refracted on the other surface of the main body 20. Green light of the light that has passed through the body 20 is reflected by the first dichroic coating layer 21 and passes through the body 20. Then, the light that has passed through the main body 20 is emitted from the main body 20 while being refracted on the other surface of the main body 20, passes through the second dichroic coating layer 22, and is detected by the second detection element 32.
　光Ｌ２に含まれる赤色の光は、本体２０を通過した後、本体２０の一方の面で屈折しながら、本体２０から出射し、第１ダイクロイックコーティング層２１を通過して、第１検出素子３１で検出される。 After passing through the body 20, the red light included in the light L2 is emitted from the body 20 while being refracted on one surface of the body 20, passes through the first dichroic coating layer 21, and is detected by the first detection element 31. Detected in.
　このように、第２実施形態によれば、ダイクロイックミラー２を設けた光検出装置３を用いて波長の異なる３つの光を検出できる。そして、光検出装置３の小型化を実現できる。 As described above, according to the second embodiment, it is possible to detect three lights having different wavelengths by using the photodetector 3 provided with the dichroic mirror 2. Then, the photodetector 3 can be downsized.
　なお、第１ダイクロイックコーティング層２１及び第２ダイクロイックコーティング層２２を透過する光の種類（透過する光の波長）は、上記したものに限らず種々に変更可能である。 Note that the type of light transmitted through the first dichroic coating layer 21 and the second dichroic coating layer 22 (wavelength of transmitted light) is not limited to the above, and can be variously changed.
＜第３実施形態＞
６．光源装置
　図４は、本発明の第３実施形態に係る光源装置４の構成を示した概略図である。
　光源装置４は、波長の異なる４つの光を合成して出力するための装置である。光源装置４は、ダイクロイックミラー５と、第１光源素子６１と、第２光源素子６２と、第３光源素子６３と、第４光源素子６４とを備えている。
　ダイクロイックミラー５は、上記した本体２０と、第１ダイクロイックコーティング層５１と、第２ダイクロイックコーティング層５２とを備えている。 <Third Embodiment>
6. Light Source Device FIG. 4 is a schematic diagram showing the configuration of the light source device 4 according to the third embodiment of the present invention.
The light source device 4 is a device for combining and outputting four lights having different wavelengths. The light source device 4 includes a dichroic mirror 5, a first light source element 61, a second light source element 62, a third light source element 63, and a fourth light source element 64.
The dichroic mirror 5 includes the main body 20 described above, a first dichroic coating layer 51, and a second dichroic coating layer 52.
　第１ダイクロイックコーティング層５１は、本体２０の一方の面に形成されている。第１ダイクロイックコーティング層５１は、第１領域５１１及び第２領域５１２の２つの領域に分割されている。 The first dichroic coating layer 51 is formed on one surface of the main body 20. The first dichroic coating layer 51 is divided into two regions, a first region 511 and a second region 512.
　第１領域５１１は、本体２０の一方の面において、他端部側（図４における右上端部側）の部分、及び、中央部に位置している。この例では、第１ダイクロイックコーティング層５１の第１領域５１１は、赤色の光を透過し、他の光を反射する。 The first region 511 is located on the other end side (upper right end side in FIG. 4) of the one surface of the main body 20 and at the center. In this example, the first region 511 of the first dichroic coating layer 51 transmits red light and reflects other light.
　第２領域５１２は、本体２０の一方の面において、一端部側（図４における左下端部側）の部分に位置している。この例では、第１ダイクロイックコーティング層５１の第２領域５１２は、赤外光を透過し、他の光を反射する。 The second region 512 is located at one end side (the lower left end side in FIG. 4) on one surface of the main body 20. In this example, the second region 512 of the first dichroic coating layer 51 transmits infrared light and reflects other light.
　第２ダイクロイックコーティング層５２は、本体２０の他方の面に形成されている。第２ダイクロイックコーティング層５２は、第３領域５２３及び第４領域５２４の２つの領域に分割されている。 The second dichroic coating layer 52 is formed on the other surface of the main body 20. The second dichroic coating layer 52 is divided into two regions, a third region 523 and a fourth region 524.
　第３領域５２３は、本体２０の他方の面において、他端部側（図４における右上端部側）の部分、及び、中央部に位置している。この例では、第２ダイクロイックコーティング層５２の第３領域５２３は、赤外光、赤色の光、緑色の光を透過し、他の光を反射する。 The third region 523 is located on the other surface of the main body 20 at the other end side (upper right end side in FIG. 4) and at the center. In this example, the third region 523 of the second dichroic coating layer 52 transmits infrared light, red light, and green light, and reflects other light.
　第４領域５２４は、本体２０の一方の面において、一端部側（図４における左下端部側）の部分に位置している。この例では、第２ダイクロイックコーティング層５２の第４領域５２４は、緑色の光を透過し、他の光を反射する。 The fourth region 524 is located at one end side (the lower left end side in FIG. 4) on one surface of the main body 20. In this example, the fourth region 524 of the second dichroic coating layer 52 transmits green light and reflects other light.
　第１光源素子６１は、ダイクロイックミラー５と間隔を隔てて配置されており、第１ダイクロイックコーティング層５１の第１領域５１１と対向している。第１光源素子６１は、第１ダイクロイックコーティング層５１の第１領域５１１に向けて赤色の光を出射する。第１光源素子６１からダイクロイックミラー５（第１ダイクロイックコーティング層５１の第１領域５１１）に入射する光の入射角は、約４５°である。 The first light source element 61 is arranged apart from the dichroic mirror 5 and faces the first region 511 of the first dichroic coating layer 51. The first light source element 61 emits red light toward the first region 511 of the first dichroic coating layer 51. The incident angle of the light that enters the dichroic mirror 5 (the first region 511 of the first dichroic coating layer 51) from the first light source element 61 is approximately 45°.
　第２光源素子６２は、ダイクロイックミラー５と間隔を隔てて配置されており、第１ダイクロイックコーティング層５１の第２領域５１２と対向している。第２光源素子６２は、第１ダイクロイックコーティング層５１の第２領域５１２に向けて赤外光を出射する。第２光源素子６２からダイクロイックミラー５（第１ダイクロイックコーティング層５１の第２領域５１２）に入射する光の入射角は、約４５°である。第２光源素子６２から第２領域５１２に向かう光の光軸と、第１光源素子６１から第１領域５１１に向かう光の光軸とは平行である。 The second light source element 62 is arranged apart from the dichroic mirror 5 and faces the second region 512 of the first dichroic coating layer 51. The second light source element 62 emits infrared light toward the second region 512 of the first dichroic coating layer 51. The incident angle of the light that enters the dichroic mirror 5 (the second region 512 of the first dichroic coating layer 51) from the second light source element 62 is about 45°. The optical axis of the light traveling from the second light source element 62 to the second region 512 is parallel to the optical axis of the light traveling from the first light source element 61 to the first region 511.
　第３光源素子６３は、ダイクロイックミラー５と間隔を隔てて配置されており、第２ダイクロイックコーティング層５２の第４領域５２４と対向している。第３光源素子６３は、第２ダイクロイックコーティング層５２の第４領域５２４に向けて緑色の光を出射する。第３光源素子６３からダイクロイックミラー５（第２ダイクロイックコーティング層５２の第４領域５２４）に入射する光の入射角は、約４５°である。 The third light source element 63 is arranged at a distance from the dichroic mirror 5 and faces the fourth region 524 of the second dichroic coating layer 52. The third light source element 63 emits green light toward the fourth region 524 of the second dichroic coating layer 52. The incident angle of the light that enters the dichroic mirror 5 (the fourth region 524 of the second dichroic coating layer 52) from the third light source element 63 is approximately 45°.
　第４光源素子６４は、ダイクロイックミラー５と間隔を隔てて配置されており、第２ダイクロイックコーティング層５２の第３領域５２３と対向している。第４光源素子６４は、第２ダイクロイックコーティング層５２の第３領域５２３に向けて青色の光を出射する。第４光源素子６４からダイクロイックミラー５（第２ダイクロイックコーティング層５２の第３領域５２３）に入射する光の入射角は、約４５°である。第４光源素子６４から第３領域５２３に向かう光の光軸と、第３光源素子６３から第４領域５２４に向かう光の光軸とは平行である。 The fourth light source element 64 is arranged at a distance from the dichroic mirror 5 and faces the third region 523 of the second dichroic coating layer 52. The fourth light source element 64 emits blue light toward the third region 523 of the second dichroic coating layer 52. The incident angle of the light that enters the dichroic mirror 5 (the third region 523 of the second dichroic coating layer 52) from the fourth light source element 64 is about 45°. The optical axis of the light traveling from the fourth light source element 64 to the third region 523 is parallel to the optical axis of the light traveling from the third light source element 63 to the fourth region 524.
　光源装置４では、第１光源素子６１からダイクロイックミラー５（第１ダイクロイックコーティング層５１の第１領域５１１）に向けて赤色の光が出射される。第１光源素子６１からの光は、第１ダイクロイックコーティング層５１の第１領域５１１を透過し、本体２０に入射する。このとき、第１光源素子６１からの光は、本体２０の一方の面で屈折しながら、本体２０に入射する。本体２０に入射した光（赤色の光）は、本体２０を透過し、本体２０の他方の面で屈折しながら本体２０から出射して、第２ダイクロイックコーティング層５２の第３領域５２３を通過する。 In the light source device 4, red light is emitted from the first light source element 61 toward the dichroic mirror 5 (the first region 511 of the first dichroic coating layer 51). The light from the first light source element 61 passes through the first region 511 of the first dichroic coating layer 51 and enters the main body 20. At this time, the light from the first light source element 61 enters the main body 20 while being refracted on one surface of the main body 20. The light (red light) incident on the main body 20 passes through the main body 20, is refracted on the other surface of the main body 20, is emitted from the main body 20, and passes through the third region 523 of the second dichroic coating layer 52. ..
　また、第２光源素子６２からダイクロイックミラー５（第１ダイクロイックコーティング層５１の第２領域５１２）に向けて赤外光が出射される。第２光源素子６２からの光は、第１ダイクロイックコーティング層５１の第２領域５１２を透過し、本体２０に入射する。このとき、第２光源素子６２からの光は、本体２０の一方の面で屈折しながら、本体２０に入射する。本体２０に入射した光（赤外光）は、本体２０を透過し、第２ダイクロイックコーティング層５２の第４領域５２４で反射した後、本体２０を通過し、さらに、第１ダイクロイックコーティング層５１の第１領域５１１で反射した後、本体２０を通過し、本体２０の他方の面で屈折しながら本体２０から出射して、第２ダイクロイックコーティング層５２の第３領域５２３を通過する。 Further, infrared light is emitted from the second light source element 62 toward the dichroic mirror 5 (the second region 512 of the first dichroic coating layer 51). The light from the second light source element 62 passes through the second region 512 of the first dichroic coating layer 51 and enters the main body 20. At this time, the light from the second light source element 62 enters the main body 20 while being refracted on one surface of the main body 20. The light (infrared light) incident on the main body 20 passes through the main body 20, is reflected by the fourth region 524 of the second dichroic coating layer 52, then passes through the main body 20, and further, of the first dichroic coating layer 51. After being reflected by the first region 511, it passes through the main body 20, is emitted from the main body 20 while being refracted on the other surface of the main body 20, and passes through the third region 523 of the second dichroic coating layer 52.
　また、第３光源素子６３からダイクロイックミラー５（第２ダイクロイックコーティング層５２の第４領域５２４）に向けて緑色の光が出射される。第３光源素子６３からの光は、第２ダイクロイックコーティング層５２の第４領域５２４を透過し、本体２０に入射する。このとき、第３光源素子６３からの光は、本体２０の他方の面で屈折しながら、本体２０に入射する。本体２０に入射した光（緑色の光）は、本体２０を透過し、第１ダイクロイックコーティング層５１の第１領域５１１で反射した後、本体２０を通過し、本体２０の他方の面で屈折しながら本体２０から出射して、第２ダイクロイックコーティング層５２の第３領域５２３を通過する。 Further, green light is emitted from the third light source element 63 toward the dichroic mirror 5 (the fourth region 524 of the second dichroic coating layer 52). The light from the third light source element 63 passes through the fourth region 524 of the second dichroic coating layer 52 and enters the main body 20. At this time, the light from the third light source element 63 enters the main body 20 while being refracted on the other surface of the main body 20. The light (green light) incident on the main body 20 passes through the main body 20, is reflected by the first region 511 of the first dichroic coating layer 51, then passes through the main body 20, and is refracted on the other surface of the main body 20. While being emitted from the main body 20, it passes through the third region 523 of the second dichroic coating layer 52.
　また、第４光源素子６４からダイクロイックミラー５（第２ダイクロイックコーティング層５２の第３領域５２３）に向けて青色の光が出射される。第４光源素子６４からの光（青色の光）は、第２ダイクロイックコーティング層５２の第３領域５２３で反射する。 Also, blue light is emitted from the fourth light source element 64 toward the dichroic mirror 5 (the third region 523 of the second dichroic coating layer 52). The light (blue light) from the fourth light source element 64 is reflected by the third region 523 of the second dichroic coating layer 52.
　これにより、光源装置４では、各光源素子からの光（第１光源素子６１から出射される赤色の光、第２光源素子６２から出射される赤外光、第３光源素子６３から出射される緑色の光、及び、第４光源素子６４から出射される青色の光）が合成された光Ｌ３が出力される。
　このようにして、光源装置４では、波長の異なる４つの光が合成されて出力される。 Thereby, in the light source device 4, light from each light source element (red light emitted from the first light source element 61, infrared light emitted from the second light source element 62, and light emitted from the third light source element 63). The light L3 that is a combination of the green light and the blue light emitted from the fourth light source element 64 is output.
In this way, in the light source device 4, four lights having different wavelengths are combined and output.
　なお、第１ダイクロイックコーティング層５１及び第２ダイクロイックコーティング層５２の各領域の光の透過率、並びに、第１光源素子６１、第２光源素子６２、第３光源素子６３及び第４光源素子６４から出射される光の波長は、上記したものに限らず種々に変更可能である。 From the first light source element 61, the second light source element 62, the third light source element 63, and the fourth light source element 64, the light transmittance of each region of the first dichroic coating layer 51 and the second dichroic coating layer 52 The wavelength of the emitted light is not limited to the above, and can be changed in various ways.
　また、第１ダイクロイックコーティング層５１及び第２ダイクロイックコーティング層５２では、透過する光の波長が異なる３つ以上の領域に分割されていてもよい。この場合、光源装置４では、各領域に対応する光源素子が設けられる。 In addition, the first dichroic coating layer 51 and the second dichroic coating layer 52 may be divided into three or more regions in which the wavelengths of the transmitted light are different. In this case, the light source device 4 is provided with a light source element corresponding to each region.
　このように、第３実施形態によれば、ダイクロイックミラー５において、第１ダイクロイックコーティング層５１及び第２ダイクロイックコーティング層５２は、それぞれ透過する光の波長が異なる２つの領域を有している。そして、ダイクロイックミラー５を用いることで、波長の異なる４つの光を合成できる。 As described above, according to the third embodiment, in the dichroic mirror 5, the first dichroic coating layer 51 and the second dichroic coating layer 52 have two regions in which the wavelengths of light that are transmitted are different. Then, by using the dichroic mirror 5, four lights having different wavelengths can be combined.
　すなわち、本体２０の一方の面に、透過する光の波長が異なる２つの領域（第１領域５１１及び第２領域５１２）を有する第１ダイクロイックコーティング層５１を形成し、さらに、本体の他方の面に、透過する波長が異なる２つの領域（第３領域５２３及び第４領域５２４）を有する第２ダイクロイックコーティング層５２を形成するという簡易な構成で、波長の異なる４つの光を合成して出力できる。 That is, the first dichroic coating layer 51 having two regions (first region 511 and second region 512) having different wavelengths of transmitted light is formed on one surface of the main body 20, and the other surface of the main body is further formed. With the simple configuration of forming the second dichroic coating layer 52 having two regions (third region 523 and fourth region 524) having different wavelengths to be transmitted, it is possible to combine and output four lights having different wavelengths. ..
　そのため、ダイクロイックミラー５を用いて波長の異なる４つの光を合成できるとともに、ダイクロイックミラー５の小型化を実現できる。
　また、第３実施形態によれば、ダイクロイックミラー５は、光源装置４に用いられる。
　そのため、光源装置４を用いて波長の異なる４つの光を合成して出力できるとともに、光源装置４の小型化を実現できる。 Therefore, the four lights having different wavelengths can be combined using the dichroic mirror 5, and the dichroic mirror 5 can be downsized.
Further, according to the third embodiment, the dichroic mirror 5 is used in the light source device 4.
Therefore, the light source device 4 can be used to combine and output four lights having different wavelengths, and the light source device 4 can be downsized.
　また、第１ダイクロイックコーティング層５１及び第２ダイクロイックコーティング層５２において、それぞれ透過する光の波長が異なる３つ以上の領域に分割されていてもよい。このようにすれば、ダイクロイックミラー５を用いて波長の異なる４つ以上の光を合成できる。 Further, the first dichroic coating layer 51 and the second dichroic coating layer 52 may be divided into three or more regions in which the wavelengths of the light passing therethrough are different. By doing so, it is possible to combine four or more lights having different wavelengths by using the dichroic mirror 5.
＜第４実施形態＞
７．光検出装置
　図５は、本発明の第４実施形態に係る光検出装置６の構成を示した概略図である。
　光検出装置６は、入射する光を波長の異なる４つの光に分離するための装置である。光検出装置６は、上記したダイクロイックミラー５と、第１検出素子７１と、第２検出素子７２と、第３検出素子７３と、第４検出素子７４とを備えている。 <Fourth Embodiment>
7. Photodetector FIG. 5 is a schematic diagram showing the configuration of the photodetector 6 according to the fourth embodiment of the present invention.
The photodetector 6 is a device for separating incident light into four lights having different wavelengths. The photodetector 6 includes the dichroic mirror 5, the first detection element 71, the second detection element 72, the third detection element 73, and the fourth detection element 74 described above.
　光検出装置６におけるダイクロイックミラー５と各検出素子との配置関係は、第３実施形態の光源装置４におけるダイクロイックミラー５と各光源素子との配置関係に対応している。 The positional relationship between the dichroic mirror 5 and each detection element in the light detection device 6 corresponds to the positional relationship between the dichroic mirror 5 and each light source element in the light source device 4 of the third embodiment.
　すなわち、第１検出素子７１は、ダイクロイックミラー５と間隔を隔てて配置されており、第１ダイクロイックコーティング層５１の第１領域５１１と対向している。また、第２検出素子７２は、ダイクロイックミラー５と間隔を隔てて配置されており、第１ダイクロイックコーティング層５１の第２領域５１２と対向している。また、第３検出素子７３は、ダイクロイックミラー５と間隔を隔てて配置されており、第２ダイクロイックコーティング層５２の第４領域５２４と対向している。第４検出素子７４は、ダイクロイックミラー５と間隔を隔てて配置されており、第２ダイクロイックコーティング層５２の第３領域５２３と対向している。 That is, the first detection element 71 is arranged at a distance from the dichroic mirror 5, and faces the first region 511 of the first dichroic coating layer 51. In addition, the second detection element 72 is arranged at a distance from the dichroic mirror 5, and faces the second region 512 of the first dichroic coating layer 51. In addition, the third detection element 73 is arranged at a distance from the dichroic mirror 5 and faces the fourth region 524 of the second dichroic coating layer 52. The fourth detection element 74 is arranged at a distance from the dichroic mirror 5 and faces the third region 523 of the second dichroic coating layer 52.
　光検出装置６は、例えば、試料を分析するための分析装置に用いられる。この場合、試料からの光Ｌ４が、ダイクロイックミラー５（第２ダイクロイックコーティング層５２の第３領域５２３）に向けて出射される。 The photodetector 6 is used, for example, as an analyzer for analyzing a sample. In this case, the light L4 from the sample is emitted toward the dichroic mirror 5 (the third region 523 of the second dichroic coating layer 52).
　光Ｌ２が第２ダイクロイックコーティング層５２の第３領域５２３に照射されると、青色の光が第２ダイクロイックコーティング層５２の第３領域５２３で反射する。そして、第２ダイクロイックコーティング層５２の第３領域５２３で反射した光（青色の光）は、第４検出素子７４で検出される。 When the light L2 is applied to the third region 523 of the second dichroic coating layer 52, blue light is reflected by the third region 523 of the second dichroic coating layer 52. Then, the light (blue light) reflected by the third region 523 of the second dichroic coating layer 52 is detected by the fourth detection element 74.
　光Ｌ４に含まれる赤外光、緑色の光、及び、赤色の光は、第２ダイクロイックコーティング層５２の第３領域５２３を透過し、本体２０に入射する。このとき、本体２０に入射する光は、本体２０の他方の面で屈折しながら、本体２０に入射する。本体２０を通過した光のうち赤色の光は、第１ダイクロイックコーティング層５１の第１領域５１１を透過して、第１検出素子７１で検出される。 The infrared light, the green light, and the red light included in the light L4 pass through the third region 523 of the second dichroic coating layer 52 and enter the main body 20. At this time, the light entering the main body 20 enters the main body 20 while being refracted on the other surface of the main body 20. The red light of the light that has passed through the main body 20 passes through the first region 511 of the first dichroic coating layer 51 and is detected by the first detection element 71.
　また、光Ｌ４に含まれる赤外光及び緑色の光は、本体２０を通過した後、第１ダイクロイックコーティング層５１の第１領域５１１で反射し、本体２０を通過して、第２ダイクロイックコーティング層５２の第４領域５２４に向かう。第２ダイクロイックコーティング層５２の第４領域５２４に向かう光のうち緑色の光は、第２ダイクロイックコーティング層５２の第４領域５２４を通過して、第３検出素子７３で検出される。 The infrared light and the green light included in the light L4 are reflected by the first region 511 of the first dichroic coating layer 51 after passing through the main body 20, pass through the main body 20, and pass through the second dichroic coating layer. Toward the fourth region 524 of 52. The green light of the light traveling toward the fourth region 524 of the second dichroic coating layer 52 passes through the fourth region 524 of the second dichroic coating layer 52 and is detected by the third detection element 73.
　第２ダイクロイックコーティング層５２の第４領域５２４に向かう光のうち赤外光は、第２ダイクロイックコーティング層５２の第４領域５２４で反射し、本体２０を通過した後、第１ダイクロイックコーティング層５１の第２領域５１２を透過して、第２検出素子７２で検出される。 Infrared light of the light traveling toward the fourth region 524 of the second dichroic coating layer 52 is reflected by the fourth region 524 of the second dichroic coating layer 52, passes through the main body 20, and then the first dichroic coating layer 51. The light passes through the second region 512 and is detected by the second detection element 72.
　このように、第４実施形態によれば、ダイクロイックミラー５を設けた光検出装置６を用いて波長の異なる４つの光を検出できる。そして、光検出装置６の小型化を実現できる。 As described above, according to the fourth embodiment, four lights having different wavelengths can be detected by using the photodetector 6 provided with the dichroic mirror 5. Then, the photodetector 6 can be downsized.
　なお、第１ダイクロイックコーティング層５１及び第２ダイクロイックコーティング層５２の各領域を透過する光の種類（透過する光の波長）は、上記したものに限らず種々に変更可能である。 Note that the type of light (wavelength of transmitted light) that transmits each region of the first dichroic coating layer 51 and the second dichroic coating layer 52 is not limited to the above, and can be variously changed.
　また、第１ダイクロイックコーティング層５１及び第２ダイクロイックコーティング層５２の各領域を、透過する光の波長が異なる３つ以上の領域に分割してもよい。その際には、光検出装置６において、各領域に対応するように複数の検出素子を設けてもよい。このようにすれば、光検出装置６を用いて波長の異なる４つ以上の光を検出できる。 Also, each region of the first dichroic coating layer 51 and the second dichroic coating layer 52 may be divided into three or more regions in which the wavelength of the transmitted light is different. In that case, in the photodetector 6, a plurality of detection elements may be provided so as to correspond to the respective regions. With this configuration, the light detection device 6 can be used to detect four or more lights having different wavelengths.
　　　１　　　　光源装置
　　　２　　　　ダイクロイックミラー
　　　３　　　　光検出装置
　　　４　　　　光源装置
　　　５　　　　ダイクロイックミラー
　　　６　　　　光検出装置
　　　１１　　　第１光源素子
　　　１２　　　第２光源素子
　　　１３　　　第３光源素子
　　　２０　　　本体
　　　２１　　　第１ダイクロイックコーティング層
　　　２２　　　第２ダイクロイックコーティング層
　　　３１　　　第１検出素子
　　　３２　　　第２検出素子
　　　３３　　　第３検出素子
　　　５１　　　第１ダイクロイックコーティング層
　　　５２　　　第２ダイクロイックコーティング層
　　　６１　　　第１光源素子
　　　６２　　　第２光源素子
　　　６３　　　第３光源素子
　　　６４　　　第４光源素子
　　　７１　　　第１検出素子
　　　７２　　　第２検出素子
　　　７３　　　第３検出素子
　　　７４　　　第４検出素子
　　　５１１　　第１領域
　　　５１２　　第２領域
　　　５２３　　第３領域
　　　５２４　　第４領域 1 light source device 2 dichroic mirror 3 photodetector device 4 light source device 5 dichroic mirror 6 photodetector device 11 first light source element 12 second light source element 13 third light source element 20 main body 21 first dichroic coating layer 22 second dichroic coating layer 31 First detection element 32 Second detection element 33 Third detection element 51 First dichroic coating layer 52 Second dichroic coating layer 61 First light source element 62 Second light source element 63 Third light source element 64 Fourth light source element 71 First detection Element 72 Second detection element 73 Third detection element 74 Fourth detection element 511 First area 512 Second area 523 Third area 524 Fourth area

Claims (4)

  1. 　平板状に形成され、光を透過する本体と、
    　前記本体の一方の面に形成された第１ダイクロイックコーティング層と、
    　前記本体の他方の面に形成された第２ダイクロイックコーティング層とを備え、
    　前記第１ダイクロイックコーティング層は、特定の波長を透過するとともに、当該波長以外の光を反射し、
    　前記第２ダイクロイックコーティング層は、前記第１ダイクロイックコーティング層とは異なる特定の波長を透過するとともに、当該波長以外の光を反射することを特徴とするダイクロイックミラー。     A body that is formed in a flat plate shape and transmits light,
    A first dichroic coating layer formed on one surface of the body,
    A second dichroic coating layer formed on the other surface of the body,
    The first dichroic coating layer transmits a specific wavelength and reflects light other than the wavelength,
    The dichroic mirror is characterized in that the second dichroic coating layer transmits a specific wavelength different from that of the first dichroic coating layer and reflects light other than the wavelength.
  2. 　前記第１ダイクロイックコーティング層及び前記第２ダイクロイックコーティング層は、それぞれ透過する光の波長が異なる複数の領域を有することを特徴とする請求項１に記載のダイクロイックミラー。 The dichroic mirror according to claim 1, wherein the first dichroic coating layer and the second dichroic coating layer each have a plurality of regions in which the wavelengths of light passing therethrough are different.
  3. 　請求項１に記載のダイクロイックミラーと、
    　それぞれ異なる波長の光を出射する少なくとも３つの光源素子とを備え、
    　前記少なくとも３つの光源素子から出射される各波長の光を、前記第１ダイクロイックコーティング層及び前記第２ダイクロイックコーティング層により合成して出力することを特徴とする光源装置。     A dichroic mirror according to claim 1;
    And at least three light source elements that emit light of different wavelengths,
    A light source device, characterized in that lights of respective wavelengths emitted from the at least three light source elements are combined and output by the first dichroic coating layer and the second dichroic coating layer.
  4. 　請求項１に記載のダイクロイックミラーと、
    　それぞれ光を検出する少なくとも３つの検出素子とを備え、
    　前記ダイクロイックミラーに入射する光を、前記第１ダイクロイックコーティング層及び前記第２ダイクロイックコーティング層により少なくとも３つの波長の光に分離して各検出素子で検出することを特徴とする光検出装置。     A dichroic mirror according to claim 1;
    And at least three detection elements each detecting light,
    A photodetector, wherein the light incident on the dichroic mirror is separated into lights of at least three wavelengths by the first dichroic coating layer and the second dichroic coating layer and detected by each detection element.
PCT/JP2019/032867 2019-02-05 2019-08-22 Dichroic mirror, light source device, and light detection device WO2020161946A1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237619A (en) * 1988-01-19 1989-09-22 Hewlett Packard Co <Hp> Optical apparatus
US6005718A (en) * 1997-07-14 1999-12-21 Samsung Electronics Co., Ltd. Apparatus and a method for combining light using one flat plate and a method for manufacturing the apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237619A (en) * 1988-01-19 1989-09-22 Hewlett Packard Co <Hp> Optical apparatus
US6005718A (en) * 1997-07-14 1999-12-21 Samsung Electronics Co., Ltd. Apparatus and a method for combining light using one flat plate and a method for manufacturing the apparatus

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