WO2020136876A1 - Élément de modulation d'onde acoustique et capteur de quantité physique - Google Patents

Élément de modulation d'onde acoustique et capteur de quantité physique Download PDF

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Publication number
WO2020136876A1
WO2020136876A1 PCT/JP2018/048486 JP2018048486W WO2020136876A1 WO 2020136876 A1 WO2020136876 A1 WO 2020136876A1 JP 2018048486 W JP2018048486 W JP 2018048486W WO 2020136876 A1 WO2020136876 A1 WO 2020136876A1
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WIPO (PCT)
Prior art keywords
magnetic flux
piezoelectric member
elastic wave
pair
main surface
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PCT/JP2018/048486
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English (en)
Japanese (ja)
Inventor
鈴木　英治
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Tdk株式会社
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Priority to JP2020562273A priority Critical patent/JP6885520B2/ja
Priority to PCT/JP2018/048486 priority patent/WO2020136876A1/fr
Publication of WO2020136876A1 publication Critical patent/WO2020136876A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves

Definitions

  • the present invention relates to an elastic wave modulator and a physical quantity sensor, and more particularly to an elastic wave modulator capable of detecting a physical quantity of an object to be detected based on a change in propagation characteristics of surface acoustic waves.
  • delay line type and resonator type sensors using surface acoustic waves (hereinafter, also referred to as SAW (Surface Acoustic Wave)).
  • SAW Surface Acoustic Wave
  • a structure of the delay line type SAW sensor for example, a LiNbO 3 substrate, a pair of comb-teeth electrode portions provided on the substrate, and an amorphous material arranged in the SAW propagation region between the pair of comb-teeth electrode portions are used.
  • a SAW delay line including a TbFe 2 film has been proposed (Non-Patent Document 1).
  • a transponder having a surface acoustic wave element having a piezoelectric substrate and a comb-teeth electrode and an antenna means, a drive signal is transmitted to the transponder, and a response from the transponder.
  • a wireless SAW sensor consisting of an interrogator that receives a signal has been proposed.
  • This SAW sensor has a magnetostrictive film having a substantially rectangular shape having sides that match the propagation direction of surface acoustic waves, and is provided with a magnetostrictive film that is separated from the comb-tooth electrode.
  • the stress acting on the piezoelectric substrate is detected based on the time difference between the echo corresponding to the reflected wave from the echo and the echo corresponding to the reflected wave from the end portion of the rectangular magnetostrictive film on the side opposite to the comb-teeth electrode (Patent Document 1). ).
  • the so-called ⁇ E effect of the magnetostrictive film depends on the change of the magnetization state in the magnetostrictive film, the ⁇ E effect is unlikely to occur when the change amount of the magnetization state is small. Therefore, when the stress acting on the piezoelectric substrate is small, the stress acting on the piezoelectric substrate cannot be sufficiently detected, and the sensitivity may not be good.
  • the external magnetic field (magnetic field) applied to the magnetostrictive film is small, the amount of change in the magnetization state due to the external magnetic field is small, so the ⁇ E effect is also small, and the magnetic field sensitivity as a sensor may not be good.
  • An object of the present invention is to provide an elastic wave modulation element and a physical quantity sensor capable of improving the sensitivity as compared with the prior art and detecting the physical quantity of a detected object with high accuracy.
  • the present invention provides the following means.
  • a piezoelectric member A first electrode portion attached to the piezoelectric member for exciting elastic waves in the piezoelectric member;
  • a magnetostrictive material portion provided in the region where the elastic wave exists or in the vicinity thereof, Equipped with The magnetostrictive material portion,
  • a pair of magnetic flux propagating portions provided on one of the main surfaces of the piezoelectric member and capable of propagating the magnetic flux of the external magnetic field, Provided between the pair of magnetic flux propagating portions on the one main surface, and having a magnetism collecting portion arranged on the propagation path of the elastic wave or in the vicinity thereof,
  • the thickness of the side surface of the magnetic flux collecting portion facing the magnetic flux propagating portion is smaller than the thickness of the side surface of the magnetic flux propagating portion facing the magnetic flux collecting portion,
  • An elastic wave modulator characterized by the above.
  • Each of the pair of magnetic flux propagating portions has a shape in which a cross-sectional area decreases along a direction from one end portion on the side opposite to the magnetic flux collecting portion to the other end portion on the magnetic flux collecting portion side.
  • the magnetic flux in the magnetism collecting portion is formed along a direction perpendicular to the propagation direction of the elastic wave,
  • the pair of magnetic flux propagating portions and the magnetic flux collecting portion are arranged on one main surface of the piezoelectric member,
  • the magnetic flux in the magnetism collecting portion is formed along the propagation direction of the elastic wave,
  • the pair of magnetic flux propagating portions and the magnetic flux collecting portion are arranged on one main surface of the piezoelectric member,
  • the first electrode portion and the second electrode portion are arranged on the one main surface at positions corresponding to a pair of openings provided in the pair of magnetic flux propagating portions, or on the one main surface.
  • the elastic wave modulation element according to the above [3] which is arranged on a surface and below the pair of magnetic flux propagating portions, or arranged on the other main surface of the piezoelectric member.
  • the magnetism collecting part is arranged at a position including the first electrode part and the second electrode part on a projection surface projected in the thickness direction of the piezoelectric member, [1] or [2].
  • the magnetic flux in the magnetism collecting portion is formed along a direction perpendicular to the propagation direction of the elastic wave,
  • the pair of magnetic flux propagating portions and the magnetic flux collecting portion are arranged on one main surface of the piezoelectric member,
  • the first electrode portion and the second electrode portion are arranged on the one main surface of the piezoelectric member and below the magnetism collecting portion, or on the other main surface of the piezoelectric member.
  • the magnetic flux in the magnetism collecting portion is formed along the propagation direction of the elastic wave,
  • the pair of magnetic flux propagating portions and the magnetic flux collecting portion are arranged on one main surface of the piezoelectric member,
  • the first electrode portion and the second electrode portion are arranged on the one main surface of the piezoelectric member and below the magnetism collecting portion, or on the other main surface of the piezoelectric member.
  • the elastic wave modulator according to the above [6] which is arranged.
  • the first electrode portion is composed of a pair of comb-teeth electrodes arranged so as to face each other so that the teeth are alternately arranged
  • the elastic wave according to any one of the above [1] to [8], wherein the second electrode portion is configured by another pair of comb-teeth electrodes arranged so as to face each other so that the teeth are alternately arranged.
  • Modulation element [10] The elasticity according to any one of the above [1] to [8], wherein the first electrode portion and the second electrode portion are a pair of comb-teeth electrodes for exciting or receiving elastic waves in the piezoelectric member. Wave modulator.
  • [11] Further includes one reflector attached to the piezoelectric member and arranged on one side of the magnetism collecting unit, The first electrode portion and the second electrode portion are arranged on one main surface of the piezoelectric member and on the other side of the magnetism collecting portion, or on one main surface of the piezoelectric member.
  • the elastic wave modulator according to any one of [1] to [10] above, which is disposed under the magnetic flux collector.
  • the magnetism collecting unit is arranged at a position including the one reflector on a projection plane projected in the thickness direction of the piezoelectric member, and the one reflector is the one main member of the piezoelectric member.
  • the magnetism collecting portion is arranged at a position that includes the pair of reflectors on a projection surface projected in the thickness direction of the piezoelectric member, and the pair of reflectors is the main one of the piezoelectric members.
  • the elastic wave modulation element according to the above [13] which is arranged on a surface and below the magnetic flux collector.
  • the cross-sectional area of the end of the magnetic flux collecting portion on the side facing the magnetic flux propagating portion is larger than the cross-sectional area of the end of the magnetic flux collecting portion on the side facing the magnetic flux collecting portion. 1] to the elastic wave modulator according to any one of [14]. [16] A physical quantity sensor including the elastic wave modulation element according to any one of [1] to [15] above, and a circuit unit that detects modulation of the elastic wave modulation element.
  • the present invention it is possible to improve the sensitivity as compared with the related art and to accurately detect the physical quantity of the detected object.
  • FIG. 3A and 3B are diagrams schematically showing a configuration of a physical quantity sensor including the elastic wave modulation element according to the first embodiment of the present invention, where FIG. 1A is a plan view, FIG. 2B is a sectional view taken along line II, and FIG. ) Is a bottom view.
  • FIG. 1A is a plan view
  • FIG. 2B is a sectional view taken along line II
  • FIG. ) Is a bottom view.
  • (A) is a figure which shows the 1st modification of the elastic wave modulator in FIG. 1
  • (b) is a figure which shows a 2nd modification.
  • FIG. 1 It is a figure which shows the 3rd modification of the elastic wave modulator in FIG. 1, (a) is a top view, (b) is sectional drawing which follows the line III-III. It is a figure which shows the structure of the elastic wave modulator which concerns on 3rd Embodiment of this invention roughly, (a) is a top view, (b) is sectional drawing which follows the line IV-IV. (A) is a top view which shows roughly the structure of the physical quantity sensor provided with the elastic wave modulator which concerns on 4th Embodiment of this invention, (b) is a top view which shows the modification of 4th Embodiment. Is.
  • FIG. 1A and 1B are diagrams schematically showing a configuration of a physical quantity sensor including an elastic wave modulation element according to a first embodiment of the present invention, where FIG. 1A is a plan view and FIG. 1B is a cross section taken along line II. The figure and (c) are bottom views.
  • the physical quantity sensor is a delay line type
  • FIG. 1A is a plan view
  • FIG. 1B is a cross section taken along line II.
  • the figure and (c) are bottom views.
  • the physical quantity sensor is a delay line type
  • features may be enlarged for convenience, and the dimensional ratios of the respective components are not limited to those shown in the drawings. To do.
  • an elastic wave modulator 10 includes a piezoelectric member 11 and a first electrode portion 12 that is attached to the piezoelectric member 11 and excites an elastic wave in the piezoelectric member 11.
  • a second electrode portion 13 attached to the piezoelectric member 11 for receiving an elastic wave, and a magnetostrictive material portion 15 provided in the elastic wave existing region or in the vicinity thereof.
  • the elastic wave modulation element 10 is connected to a detection circuit section (not shown) that detects the modulation of the elastic wave based on the signal from the elastic wave modulation element 10, and the elastic wave modulation element 10 and the detection circuit section are physical quantities.
  • the sensor 1 is configured.
  • the physical quantity sensor 1 includes the elastic wave modulation element 10 and the detection circuit section, and detects the physical quantity of the detected object based on the change in the propagation characteristic of the elastic wave. Further, the physical quantity sensor 1 includes a magnetic field applying section 16 that applies a magnetic field to the magnetostrictive material section 15 on the piezoelectric member 11, and the magnetic field applying section 16 applies a magnetic field to the magnetostrictive material section 15 to generate a magnetostrictive material. A magnetic field (magnetic field) is formed in the portion 15.
  • the physical quantity sensor 1 is, for example, a pressure sensor or a magnetic sensor.
  • the piezoelectric member 11 includes SiO 2 , LiNbO 3 , LiTaO 3 , BaTiO 3 , PbTiO 3 , Pb(Zr.Ti)O 3 (lead zirconate titanate), La 3 Ga 5 SiO 14 , Li 2 B 4 O 7 , and It is composed of at least one material selected from the group consisting of AlN (aluminum nitride), ZnO and diamond. Since the piezoelectric member 11 is made of at least one material selected from the above group, elastic waves can be efficiently generated in the piezoelectric member 11.
  • the piezoelectric member 11 is composed of, for example, a piezoelectric substrate or a piezoelectric film.
  • the first electrode portion 12 is composed of, for example, a pair of comb-teeth electrodes 12a and 12b which are arranged so as to face each other so that their teeth are alternately arranged (FIG. 1(a)).
  • the first electrode portion 12 corresponds to an input electrode that generates an elastic wave, particularly a surface acoustic wave (SAW) based on an input signal from the input portion 17.
  • SAW surface acoustic wave
  • the tooth pitch of the pair of comb-teeth electrodes 12a and 12b forming the first electrode portion 12 can be set arbitrarily, but is constant, for example, ⁇ /4 ( ⁇ is the wavelength of SAW).
  • the second electrode portion 13 is composed of, for example, a pair of comb-teeth electrodes 13a and 13b (another pair of comb-teeth electrodes) that are arranged so as to face each other so that the teeth are alternately arranged (FIG. 1). (A)).
  • the second electrode portion 13 corresponds to an output electrode that receives an elastic wave, particularly a SAW, and outputs an output signal corresponding to the elastic wave to the detection circuit portion via the output portion 18.
  • the tooth pitch of the pair of comb-teeth electrodes 13a and 13b forming the second electrode portion 13 can also be set arbitrarily, but is, for example, the same as the tooth pitch of the pair of comb-teeth electrodes 12a and 12b.
  • the material of the first electrode portion 12 and the second electrode portion 13 is not particularly limited as long as it is suitable as an electrode material.
  • Al aluminum
  • Au gold
  • Cu copper
  • Ti titanium
  • It is made of a material such as Cr (chromium) or an alloy thereof.
  • the magnetostrictive material portion 15 is provided on the one main surface 11a of the piezoelectric member 11, and has a pair of magnetic flux propagating portions 15a and 15b capable of propagating the magnetic flux of the external magnetic field and a pair of magnetic flux propagating portions on the one main surface 11a.
  • the magnetism collecting portion 15c is provided between the acoustic wave propagation path 14 and the acoustic wave collecting portion 15c. Then, as shown in FIG. 1B, the thickness of the side surface of the magnetic flux collector 15c that faces the magnetic flux propagating portion 15a (and/or the magnetic flux propagating portion 15b) is equal to the magnetic flux propagating portion 15a (and/or the magnetic flux propagating portion 15b).
  • the magnetic flux collecting portion 15c is formed separately from the pair of magnetic flux propagating portions 15a and 15b, but is formed integrally with the pair of magnetic flux propagating portions 15a and 15b. May be. With the above configuration, the magnetic flux that has passed through the magnetic flux propagating portion 15a or the magnetic flux propagating portion 15b passes through the magnetic flux collecting portion 15c in a denser state, so that the magnetic flux density in the magnetic flux collecting portion 15c is higher than that of the magnetic flux propagating portions 15a and 15b. Will be larger. Further, the magnetic flux collecting portion 15c may be made thinner than at least one of the first electrode portion 12 and the second electrode portion 13 to increase the magnetic flux density.
  • Each of the pair of magnetic flux propagating portions 15a and 15b has a shape in which the cross-sectional area decreases along the direction from one end portion on the side opposite to the magnetic flux collecting portion 15c to the other end portion on the magnetic flux collecting portion 15c side.
  • the pair of magnetic flux propagating portions 15a and 15b have a flat trapezoidal shape and the magnetic flux collecting portion 15c has a rectangular shape in a plan view of the physical quantity sensor 1 (FIG. 1A).
  • the magnetostrictive material portion 15 has a constricted shape, and the narrow magnetic flux collecting portion 15c is arranged between the pair of wide magnetic flux propagating portions 15a and 15b, so that a magnetic field is applied to the magnetostrictive material portion 15.
  • the magnetism collecting unit 15c can reliably collect the magnetism.
  • the cross-sectional area of the end of the magnetic flux collector 15c facing the magnetic flux propagating portions 15a and 15b is smaller than the cross-sectional area of the end of the magnetic flux propagating portions 15a and 15b facing the magnetic flux collector 15c. Is preferred.
  • the thickness of the side surface of the magnetic flux collecting portion 15c facing the magnetic flux propagating portions 15a and 15b is smaller than the thickness of the side surface of the magnetic flux collecting portion 15a and 15b facing the magnetic flux collecting portion 15c, and the cross-sectional area of the magnetic flux collecting portion 15c is the same.
  • the magnetic flux density in the magnetic flux collecting portion 15c can be further increased by being smaller than the cross-sectional area of the magnetic flux propagating portions 15a and 15b.
  • the cross-sectional area of the end of the magnetic flux collector 15c facing the magnetic flux propagating portions 15a and 15b is larger than the cross-sectional area of the end of the magnetic flux propagating portions 15a and 15b facing the magnetic flux collector 15c. Good. Thereby, even if the cross-sectional area of the magnetic flux collecting portion 15c is larger than that of the magnetic flux propagating portions 15a and 15b, the thickness of the magnetic flux collecting portion 15c is smaller than that of the magnetic flux propagating portions 15a and 15b. This makes it possible to increase the magnetic flux density in the magnetism collecting unit 15c.
  • the magnetism collecting portion 15c is arranged between the first electrode portion 12 and the second electrode portion 13 on the projection surface in the thickness direction of the piezoelectric member 11 (see FIGS. 1A and 1C).
  • the magnetic flux in the magnetic flux collector 15c is formed along the direction perpendicular to the propagation direction of the elastic wave.
  • the pair of magnetic flux propagating portions 15 a and 15 b and the magnetic flux collecting portion 15 c are arranged on the one main surface 11 a of the piezoelectric member 11, and the first electrode portion 12 and the second electrode portion 13 are also arranged on the piezoelectric member 11. It is arranged on one main surface 11a.
  • the magnetostrictive material portion 15 is arranged in contact with the one main surface 11a of the piezoelectric member 11 through which the elastic wave propagates, the one main surface 11a that is the propagation path 14 or in the vicinity thereof, It is possible to further increase the change in the propagation velocity of the elastic wave due to magnetostriction.
  • the magnetostrictive material portion 15 includes Co, Ni, Fe, CoNi, NiFe, CoFe, FeAl, CoPt, NiCoCr, FeB, CoFeB, CoFeSiB, FeBSiP, FeBSiC, Ni 2 MnGa, FeCoNiBSi, TbFeCo, Co ferrite, Ni ferrite, Cu ferrite. , Li ferrite, Mn ferrite, NiCo ferrite, NiCuCo ferrite, Fe 3 O 4 , TbFe 2 , DyFe 2 , ErFe 2 , TmFe 2 , SmFe 2 , GaFe, Tb (0.27 to 0.3 atomic composition ratio), Dy.
  • the magnetostrictive material portion 15 With at least one material selected from the above group, it is possible to efficiently generate magnetostriction in the magnetostrictive material portion 15.
  • the magnetostrictive material portion 15 is formed of, for example, a magnetostrictive film, and in that case, the pair of magnetic flux propagation portions 15a and 15b and the magnetic flux collecting portion 15c are also formed of a magnetostrictive film.
  • the thickness of the magnetostrictive material portion 15 is 10 nm to 10 ⁇ m.
  • the method of forming the magnetostrictive material portion 15 is not limited, but the magnetostrictive material portion 15 can be formed by sputtering such as magnetron sputtering.
  • the magnetic field applying unit 16 applies a magnetic field for causing magnetostriction to the magnetostrictive material unit 15 to the magnetostrictive material unit 15.
  • the magnetic field (magnetic field) applied to the magnetostrictive material portion 15 is preferably a static magnetic field capable of obtaining the magnetostrictive effect, but may be a variable magnetic field.
  • the magnetic field application part 16 is composed of, for example, a permanent magnet.
  • the magnetic field applying unit 16 can apply a bias magnetic field for setting the magnetization state to the optimum operation origin. Further, it is preferable that another magnetic field applying section is provided on the opposite side of the magnetostrictive material section 15 from the magnetic field applying section 16.
  • the piezoelectric member 11 is configured to generate SH waves (hereinafter also referred to as SH-SAW) of surface acoustic waves
  • SH-SAW is the main surface 11a of the piezoelectric member 11 or the vicinity thereof.
  • the magnetization state of the magnetostrictive material portion 15 changes, and as a result, the elastic modulus of the magnetostrictive material portion 15, particularly the magnetic flux collecting portion 15c.
  • the ⁇ E effect of the magnetostrictive material portion depends on the change of the magnetization state in the magnetostrictive material portion, so that the ⁇ E effect is unlikely to occur when the amount of change in the magnetization state is small.
  • the magnetic flux density of the magnetic flux collecting portion 15c is higher than that of the pair of magnetic flux propagating portions 15a and 15b. Get higher Therefore, the magnetostriction in the magnetism collecting part 15c becomes larger than the magnetostriction in the non-magnetism collecting part when the magnetism collecting part 15c is not provided.
  • the propagation speed of the SH-SAW propagating through the propagation path 14 largely changes due to the increase of the magnetostriction effect ( ⁇ E effect) accompanying the magnetism collection in addition to the ⁇ E effect accompanying the change of the magnetization state. .. Therefore, for example, when a small stress is generated in the piezoelectric member 11, a change in the propagation velocity of SH-SAW can be sufficiently caused as compared with the case where the magnetostrictive material portion 15 is not provided with the magnetic flux collecting portion 15c. Therefore, for example, the physical quantity sensor 1 can function as a highly sensitive pressure sensor. Further, even when a small external magnetic field is applied to the magnetostrictive material portion 15, the SH-SAW propagation speed can be sufficiently changed. Therefore, the physical quantity sensor 1 of the present embodiment can also function as a highly sensitive magnetic sensor.
  • the detection circuit unit detects the physical quantity of the detected object based on the change in the propagation characteristic of the SAW.
  • the object to be detected include living bodies, walls and columns of structures such as buildings and bridges, electronic devices such as computers, home appliances such as televisions and refrigerators, and examples of the physical quantity include magnetic fields and torque. , Pressure, temperature, gas amount and the like.
  • the magnetostrictive material portion 15 is provided between the pair of magnetic flux propagating portions 15a and 15b on the one main surface 11a and is disposed on the elastic wave propagation path 14.
  • the side surface of the magnetic flux collecting portion 15c facing the magnetic flux propagating portion 15a (and/or the magnetic flux propagating portion 15b) has a thickness of the magnetic flux collecting portion 15a (and/or the magnetic flux propagating portion 15b). Since the thickness is smaller than the thickness of the side surface facing the portion 15c, it is possible to increase the magnetostriction in the magnetic flux collecting portion 15c when an external magnetic field is applied to the magnetostrictive material portion 15. Therefore, a change in the propagation velocity of the SH-SAW propagating in the propagation path 14 can be sufficiently and efficiently generated, and the sensitivity or magnetic field or stress acting on the piezoelectric member 11 can be detected with higher sensitivity than before. You can
  • FIG. 2A and 2B are views showing a modified example of the physical quantity sensor including the elastic wave modulation element according to the second embodiment of the present invention, where FIG. 2A is a plan view and FIG. 2B is a sectional view taken along line II-II.
  • C is a bottom view.
  • the present embodiment is different from the first embodiment in that the magnetostrictive material portion 15 is provided on the main surface 11b of the piezoelectric member 11 opposite to the first electrode portion 12 and the second electrode portion 13. .. Since other parts are the same as those in the first embodiment, the parts different from the first embodiment will be described below.
  • the magnetostrictive material portion 21 is provided on one main surface 11b of the piezoelectric member 11 and is capable of propagating the magnetic flux of the external magnetic field.
  • a magnetic flux collecting portion 21c provided between the pair of magnetic flux propagating portions 21a and 21b on the one main surface 11b and arranged near the elastic wave propagation path 14 (for example, immediately below the propagation path 14).
  • the pair of magnetic flux propagating portions 21a and 21b and the magnetic flux collecting portion 21c are arranged on the one main surface 11b of the piezoelectric member 11, and the first electrode portion 12 and the second electrode portion 13 are It is arranged on the other main surface 11 a of the piezoelectric member 11. Also in this configuration, the magnetism collecting portion 21c is arranged between the first electrode portion 12 and the second electrode portion 13 on the projection surface in the thickness direction of the piezoelectric member 11 (FIGS. 2A and 2C). )reference).
  • the piezoelectric member is configured to generate a Rayleigh wave of the surface acoustic wave
  • the Rayleigh wave is accompanied by displacement in a direction perpendicular to the surface of the piezoelectric member. Therefore, when the magnetostrictive material portion is provided on the same main surface as the first and second electrode portions, the Rayleigh wave propagates to the magnetostrictive material portion and the attenuation becomes large, and the SAW propagation velocity cannot be sufficiently detected. There is.
  • the pair of magnetic flux propagating portions 21a and 21b and the magnetic flux collecting portion 21c are provided on the main surface 11b of the piezoelectric member 11 opposite to the first electrode portion 12 and the second electrode portion 13. Therefore, when the Rayleigh wave propagates through the propagation path 14 between the first electrode portion 12 and the second electrode portion 13 and reaches the second electrode portion 13, the other main surface 11a of the piezoelectric member 11 The propagating Rayleigh wave can be suppressed from propagating to the magnetostrictive material portion 21, particularly the magnetic flux collecting portion 21c. As shown in FIG.
  • the thickness of the side surface of the magnetic flux collector 21c facing the magnetic flux propagating portion 21a (and/or the magnetic flux propagating portion 21b) is equal to that of the magnetic flux propagating portion 21a (and/or the magnetic flux propagating portion 21b). It is thinner than the thickness of the side surface facing the magnetism collecting portion 21c.
  • the magnetic flux collecting portion 21c is formed separately from the pair of magnetic flux propagating portions 21a and 21b, but is formed integrally with the pair of magnetic flux propagating portions 21a and 21b. May be.
  • the magnetic flux inside the magnetic flux collecting portion 21c is higher than that in the magnetic flux propagating portions 21a and 21b. Greater density. Therefore, in the magnetism collecting unit 21c, the magnetostriction effect ( ⁇ E effect) accompanying the magnetism collection can be increased in addition to the ⁇ E effect accompanying the change of the magnetization state, and further, the attenuation of the Rayleigh wave propagating through the propagation path 14 can be suppressed. It is possible to suppress the change, and it is possible to sufficiently and accurately cause a change in the propagation velocity of the Rayleigh wave.
  • FIG. 3A is a diagram showing a first modification of the elastic wave modulator 10 in FIG. 1
  • FIG. 3C is a diagram showing a second modification.
  • FIG. 3B is a sectional view taken along the line III-III.
  • the magnetic flux collecting portion 15c is formed integrally with the pair of magnetic flux propagating portions 15a and 15b, but the present invention is not limited to this, and the magnetic flux collecting portion is formed separately from the pair of magnetic flux propagating portions. May be
  • the magnetism collecting portion 31c of the magnetostrictive material portion 31 may be arranged so as to be spaced apart from the pair of magnetic flux propagating portions 31a and 31b.
  • the magnetic flux collecting portion 31c in a plan view of the piezoelectric member 11, has a rectangular shape, and each of the pair of magnetic flux propagating portions 31a and 31b has a flat trapezoidal shape.
  • the thickness of the side surface of the magnetic flux collector 31c that faces the magnetic flux propagating portion 31a (and/or the magnetic flux propagating portion 31b) is equal to the magnetic flux propagating portion 31a (and/or the magnetic flux propagating portion 31b).
  • the magnetic flux collecting portion 31c is formed separately from the pair of magnetic flux propagating portions 31a and 31b. With this configuration, the magnetic flux passing through the magnetic flux propagating portion 31a or the magnetic flux propagating portion 31b passes through the magnetic flux collecting portion 31c in a denser state, so that the magnetic flux inside the magnetic flux collecting portion 31c is larger than that in the magnetic flux propagating portions 31a and 31b. Greater density.
  • the magnetic flux collecting portion 32c of the magnetostrictive material portion 32 may be provided separately from the pair of magnetic flux propagating portions 32a and 32b or may be arranged separately.
  • the magnetic flux collecting portion 32c has a rectangular shape
  • the magnetic flux propagating portion 32a has a triangular shape with a plurality of flat rectangular portions 32a-1, 32a-1,.
  • the magnetic flux propagating portion 32b includes a plurality of portions 32b-1, 32b-1,... Having a flat rectangular shape and a portion 32b-2 having a triangular shape.
  • FIG. 4A and 4B are diagrams showing a third modification of the elastic wave modulation element 10 in FIG. 1, in which FIG. 4A is a plan view and FIG. 4B is a sectional view taken along line IV-IV.
  • the magnetic flux in the magnetic flux collecting portion 15c is formed along the direction perpendicular to the propagation direction of the elastic wave.
  • the present invention is not limited to this. May be formed along.
  • the pair of magnetic flux propagating portions 33a and 33b and the magnetic flux collecting portion 33c of the magnetostrictive material portion 33 are arranged on the one main surface 11a of the piezoelectric member 11, and the first electrode portion 12 and the second electrode portion 13 are piezoelectric. It is arranged on the one main surface 11a of the member 11 at a position corresponding to the openings 34a and 34b (non-film forming portions) provided in the pair of magnetic flux propagating portions 33a and 33b. Further, as shown in FIG.
  • the thickness of the side surface of the magnetic flux collecting portion 33c that faces the magnetic flux propagating portion 33a (and/or the magnetic flux propagating portion 33b) is equal to the magnetic flux propagating portion 33a (and/or the magnetic flux propagating portion 33b). ) Is thinner than the thickness of the side surface facing the magnetism collecting portion 33c.
  • the magnetic flux collecting portion 33c is formed as a separate body in contact with the pair of magnetic flux propagating portions 33a and 33b, but may be formed integrally with the pair of magnetic flux propagating portions 33a and 33b. Good.
  • the magnetic flux inside the magnetic flux collecting portion 33c is higher than that of the magnetic flux propagating portions 33a and 33b. Greater density.
  • a pair of magnetic flux propagating portions not having the pair of openings is provided, and the pair of magnetic flux propagating portions and magnetic flux collecting portions are arranged on one main surface 11 a of the piezoelectric member 11, and the first electrode portion 12 is provided.
  • the second electrode portion 13 may be disposed on the one main surface 11a of the piezoelectric member 11 and below the pair of magnetic flux propagating portions.
  • the pair of magnetic flux propagating portions and the magnetic flux collecting portion that do not have the pair of openings are arranged on the one main surface 11a of the piezoelectric member 11, and the first electrode portion 12 and the second electrode portion 13 are piezoelectric. It may be arranged on the other main surface 11b of the member 11.
  • the magnetic flux in the magnetic flux collecting portion is formed along the propagation direction of the elastic wave (for example, the direction parallel to the propagation direction), and the pair of magnetic flux propagating portions 33a and 33b and the magnetic flux collecting portion 33c form one of the piezoelectric members 11.
  • the first electrode portion 12 and the second electrode portion 13 may be disposed on the main surface 11a of the above, and may be disposed on one main surface of the piezoelectric member 11 and below the magnetic flux collecting portion 33c.
  • FIG. 5A and 5B are diagrams schematically showing a configuration of an elastic wave modulator according to a third embodiment of the present invention
  • FIG. 5A is a plan view
  • FIG. 5B is a sectional view taken along line VV.
  • the third embodiment differs from the first embodiment in that the first electrode portion 12 and the second electrode portion 13 are provided below the magnetism collecting portion.
  • the explanation is omitted, and a different portion is explained below.
  • the magnetism collecting portion 35c of the magnetostrictive material portion 35 is arranged so as to be separated from the pair of magnetic flux propagating portions 35a and 35b.
  • the magnetism collecting portion 35c is arranged at a position including the first electrode portion 12 and the second electrode portion 13 on the projection surface projected in the thickness direction of the piezoelectric member 11.
  • the first electrode portion 12 and the second electrode portion 13 are provided on the one main surface 11a of the piezoelectric member 11 and below the magnetism collecting portion 35c, the magnetostriction of the magnetism collecting portion 35c.
  • the thickness of the side surface of the magnetic flux collecting portion 35c that faces the magnetic flux propagating portion 35a (and/or the magnetic flux propagating portion 35b) is equal to the magnetic flux propagating portion 35a (and/or the magnetic flux). It is thinner than the thickness of the side surface of the propagating portion 35b) facing the magnetism collecting portion 35c.
  • the magnetic flux inside the magnetic flux collecting portion 35c is higher than that in the magnetic flux propagating portions 35a and 35b. Greater density. Therefore, for example, by applying the configuration of the present embodiment to a resonator-type physical quantity sensor, it is possible to improve the sensitivity as compared with the related art and to accurately detect the stress or magnetic field acting on the piezoelectric member 11.
  • the pair of magnetic flux propagating portions 35 a, 35 b and the magnetic flux collecting portion 35 c are arranged on one main surface 11 a of the piezoelectric member 11, and the first electrode portion 12 and the second electrode portion 13 are arranged on the other side of the piezoelectric member 11. It may be arranged on the main surface 11b.
  • the lower part of the magnetism collecting portion 35c has a comb tooth shape, and is provided between the pair of comb tooth electrodes 12a and 12b and the pair of comb teeth. It preferably penetrates between the electrodes 13a and 13b. As a result, the magnetism collecting portion 35c can be arranged at a position closer to the piezoelectric member 11, and the change in the propagation velocity of the elastic wave can be caused more efficiently.
  • the elastic wave modulation element includes the piezoelectric member 11, the first electrode portion 12, and the second electrode portion from the viewpoint of preventing a short circuit between the electrodes. It is preferable to further include an insulating layer 20 formed so as to cover 13.
  • the magnetic flux in the magnetic flux collecting portion 35c is formed along the direction perpendicular to the propagation direction of the elastic wave.
  • the present invention is not limited to this, and the magnetic flux in the magnetic flux collecting portion 35c propagates in the elastic wave. It may be formed along the direction.
  • the pair of magnetic flux propagating portions 35 a and 35 b and the magnetic flux collecting portion 35 c are arranged on the one main surface 11 a of the piezoelectric member 11, and the first electrode portion 12 and the second electrode portion 13 of the piezoelectric member 11 are arranged. It may be arranged on one main surface 11a and below the magnetic flux collector 35c, or may be arranged on the other main surface 11b of the piezoelectric member 11.
  • FIG. 6A is a plan view schematically showing the configuration of a physical quantity sensor including an elastic wave modulation element according to the fourth embodiment of the present invention
  • FIG. 6B is a modification of the fourth embodiment.
  • FIG. In the fourth embodiment a case where the physical quantity sensor is a resonator type will be described as an example. Since the physical quantity sensor is the same as that of the third embodiment except that the physical quantity sensor is of the resonator type, only portions different from the third embodiment will be described below.
  • the elastic wave modulation element 40 of the physical quantity sensor 2 is attached to the piezoelectric member 11, and a pair of reflectors 41 a arranged on both sides of the first electrode portion 12 and the second electrode portion 13. , 41b are further provided.
  • the first electrode portion 12 is a comb-teeth electrode 42a (one of the pair of comb-teeth electrodes) of the pair of comb-teeth electrodes that are arranged so as to face each other so that the teeth are alternately arranged.
  • the second electrode portion 13 constitutes the comb-teeth electrode 42b of the pair of comb-teeth electrodes (the other of the pair of comb-teeth electrodes).
  • the comb-teeth electrode 42a and the comb-teeth electrode 42b are connected to the input/output unit 18.
  • the elastic wave modulator 40 constitutes a so-called 1-port resonator.
  • a pair of reflectors 41a and 41b are arranged on both sides of the pair of comb-tooth electrodes 42a and 42b, and an elastic wave excited by the pair of comb-tooth electrodes 42a and 42b is reflected by the pair of reflection waves. It is trapped between the vessels 41a and 41b.
  • the pair of comb-teeth electrodes 42a and 42b are arranged on the one main surface 11a of the piezoelectric member 11 and below the magnetic flux collecting portion 15c, the propagation path 14 is caused by the magnetostriction of the magnetic flux collecting portion 15c. It is possible to more efficiently cause a change in the propagation velocity of a propagating elastic wave (or standing wave). Therefore, by applying the configuration of the present embodiment to the one-port resonator type physical quantity sensor, the sensitivity or the magnetic field acting on the piezoelectric member 11 can be detected with higher sensitivity than in the conventional case.
  • the elastic wave modulator 50 of the physical quantity sensor 3 may form a so-called 2-port resonator. That is, the acoustic wave modulation element 50 may further include a pair of reflectors 51 a and 51 b attached to the piezoelectric member 11 and arranged on both sides of the first electrode portion 12 and the second electrode portion 13.
  • the first electrode portion 12 is composed of a pair of comb-teeth electrodes 12a and 12b that are arranged so as to face each other so that their teeth alternate
  • the second electrode portion 13 has a pair of teeth. It is composed of a pair of comb-shaped electrodes 13a and 13b which are arranged so as to be alternately arranged so as to face each other.
  • the pair of comb-teeth electrodes 12 a and 12 b are connected to the input unit 17, and the pair of comb-teeth electrodes 13 a and 13 b are connected to the output unit 18. Further, the magnetostrictive material portion 15 is provided on the one main surface 11a of the piezoelectric member 11, and has a pair of magnetic flux propagating portions 36a and 36b capable of propagating the magnetic flux of the external magnetic field and a pair of magnetic flux on the one main surface 11a.
  • the magnetic field collecting unit 36c is provided between the propagation units 36a and 36b, and is located near the elastic wave propagation path 14.
  • the pair of comb-teeth electrodes 12a and 12b and the pair of comb-teeth electrodes 13a and 13b are both arranged on one main surface 11a of the piezoelectric member 11 and below the magnetism collecting portion 36c. Due to the magnetostriction of the magnetism collecting unit 36c, it is possible to more efficiently cause a change in the propagation velocity of the elastic wave (or standing wave) propagating in the propagation path. As described above, by applying the configuration of the elastic wave modulation element 50 to the two-port resonator type physical quantity sensor, the sensitivity is improved as compared with the conventional case by the same mechanism as in the configuration of FIG. 6A. The stress or magnetic field acting on the piezoelectric member 11 can be accurately detected.
  • FIG. 7 is a plan view schematically showing the configuration of a physical quantity sensor including an elastic wave modulator according to the fifth embodiment of the present invention.
  • the physical quantity sensor includes a delay line type elastic wave modulator and an antenna unit will be described as an example.
  • the physical quantity sensor is the same as that of the third embodiment (FIG. 6A) except that the delay line type elastic wave modulator and the antenna section are provided, and therefore the different parts from the third embodiment will be described below.
  • the elastic wave modulation element 60 of the physical quantity sensor 4 is attached to the piezoelectric member 11, and the first electrode portion 12 and the second electrode portion 13 that excite or receive the elastic wave in the piezoelectric member 11;
  • the one reflector 61 attached to the member 11 and arranged on one side of the magnetic flux collector 15c is provided.
  • the first electrode portion 12 and the second electrode portion are a pair of comb-teeth electrodes 43a and 43b that excite or receive elastic waves in the piezoelectric member 11.
  • the comb-teeth electrode 43a of the pair of comb-teeth electrodes 43a and 43b is connected to the antenna unit 19, and the comb-teeth electrode 43b is grounded.
  • the first electrode portion 12 and the second electrode portion 13 are arranged on the one main surface 11a of the piezoelectric member 11 and on the other side of the magnetism collecting portion 15c.
  • the first electrode portion 12 and the second electrode portion 13 may be arranged on the one main surface 11a of the piezoelectric member 11 and below the magnetism collecting portion 13c.
  • this elastic wave modulator 60 when the antenna section 19 receives a radio wave, the elastic wave excited by the pair of comb-teeth electrodes 43a and 43b reaches the reflector 61 via the propagation path 14 of the piezoelectric member 11. After that, the reflected wave generated by the reflection at the reflector 61 reaches the pair of comb-teeth electrodes 43a and 43b via the propagation path 14, and the radio wave is transmitted from the antenna unit 19.
  • the magnetism collecting unit 15c is arranged on the elastic wave propagation path 14, the magnetostriction of the magnetism collecting unit 15c can more efficiently cause a change in the propagation velocity of the elastic wave propagating in the propagation path.
  • the configuration of the present embodiment to a physical quantity sensor including a delay line type elastic wave modulation element and an antenna section, the stress or magnetic field acting on the piezoelectric member 11 can be wirelessly improved with higher sensitivity than before. It is possible to detect with high accuracy.
  • FIG. 8 is a diagram schematically showing the configuration of a physical quantity sensor including an elastic wave modulation element according to the sixth embodiment of the present invention.
  • the magnetic flux propagating portion has a trapezoidal shape in a plan view of the piezoelectric member, but the shape is not limited to this and may be a rectangular shape.
  • the magnetostrictive material portion 71 of the elastic wave modulator 70 has a pair of magnetic flux propagating portions 71a and 71b and a magnetic flux collecting portion 71c, and the pair of magnetic flux propagating portions 71a and 71b collects magnetic flux. It may have a rectangular shape like the portion 71c. Since the pair of magnetic flux propagating portions 71a and 71b have a rectangular shape, it is possible to increase the degree of freedom in designing the lead wire pattern from the electrode.
  • the acoustic wave modulation element 60 of FIG. 7 includes one reflector, but is not limited to this, and may include a pair of reflectors arranged on both sides of the one electrode portion and the second electrode portion. Good. At this time, the first electrode portion and the second electrode portion may be arranged on the one main surface 11a of the piezoelectric member 11 and below the magnetism collecting portion (see FIGS. 6A and 6B). ).
  • the pair of reflectors 41a and 41b are attached to both sides of the magnetism collecting unit 15c, but the present invention is not limited to this.
  • the magnetism collecting portion 15c may be arranged at a position including the pair of reflectors 41a and 41b on the projection surface projected in the thickness direction of the piezoelectric member 11. Further, the pair of reflectors 41a and 41b may be arranged on the one main surface 11a of the piezoelectric member 11 and below the magnetic flux collector 15c.
  • the pair of reflectors 51a and 51b are attached to both sides of the magnetism collecting unit 36c, but the present invention is not limited to this.
  • the magnetism collecting portion 36c may be arranged at a position including the pair of reflectors 51a and 51b on the projection surface projected in the thickness direction of the piezoelectric member 11. Further, the pair of reflectors 51a and 51b may be arranged on the one main surface 11a of the piezoelectric member 11 and below the magnetic flux collector 36c.
  • the reflector 61 is attached to one side of the magnetism collecting unit 15c, but the present invention is not limited to this.
  • the magnetism collecting portion 15c is arranged at a position including the one reflector 61 on the projection surface projected in the thickness direction of the piezoelectric member 11, and the one reflector 61 is provided on the one main surface 11a of the piezoelectric member 11. It may be arranged below the magnetic flux collector 15c.
  • the elastic wave modulator of the present invention can be applied to various physical quantity sensors such as a magnetic field, torque, pressure and temperature.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Pressure Sensors (AREA)

Abstract

L'invention concerne un élément de modulation d'onde acoustique et un capteur de quantité physique avec lesquels la quantité physique d'un objet à détecter peut être détectée avec précision avec une sensibilité améliorée par rapport à l'état de la technique. L'élément de modulation d'onde acoustique (10) comprend un élément piézoélectrique (11), une première électrode (12) qui est fixée à l'élément piézoélectrique (11) et qui excite une onde acosutique dans l'élément piézoélectrique (11); une seconde électrode (13) qui est fixée à l'élément piézoélectrique (11) et qui reçoit l'onde acoustique; et une partie en matériau magnétostrictif (15) qui est disposée dans ou à proximité d'une zone dans laquelle l'onde acoustique est présente. La partie en matériau magnétostrictif (15) comprend une paire de parties de propagation de flux magnétique (15a, 15b) qui sont disposées sur une surface principale (11a) de l'élément piézoélectrique (11) et sont aptes à propager le flux magnétique d'un champ magnétique externe ; et une partie de collecte magnétique (15c) qui est disposée entre la paire de parties de propagation de flux magnétique (15a, 15b) sur la surface principale (11a) et est disposée sur ou à proximité de la trajectoire de propagation (14) de l'onde acoustique. L'épaisseur d'une surface latérale de la partie de collecte magnétique (15c) qui est opposée à la paire de parties de propagation de flux magnétique (15a, 15b) est inférieure à l'épaisseur d'une surface latérale de la paire de parties de propagation de flux magnétique (15a) qui est opposée à la partie de collecte magnétique (15c).
PCT/JP2018/048486 2018-12-28 2018-12-28 Élément de modulation d'onde acoustique et capteur de quantité physique WO2020136876A1 (fr)

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JP2020562273A JP6885520B2 (ja) 2018-12-28 2018-12-28 弾性波変調素子及び物理量センサ
PCT/JP2018/048486 WO2020136876A1 (fr) 2018-12-28 2018-12-28 Élément de modulation d'onde acoustique et capteur de quantité physique

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CN101504446A (zh) * 2009-03-06 2009-08-12 华南理工大学 薄膜式结构磁流体-声表面波集成磁传感器
CN101504445A (zh) * 2009-03-06 2009-08-12 华南理工大学 背槽式结构磁流体-声表面波集成磁传感器
CN102435959A (zh) * 2011-10-11 2012-05-02 电子科技大学 一种磁声表面波磁场传感器及其制备方法
US8269490B2 (en) * 2009-04-03 2012-09-18 Honeywell International Inc. Magnetic surface acoustic wave sensor apparatus and method
JP5080811B2 (ja) * 2003-12-24 2012-11-21 アイメック 磁気セルを超高速制御するための方法及び装置

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Publication number Priority date Publication date Assignee Title
JP2006047229A (ja) * 2004-08-06 2006-02-16 River Eletec Kk 表面弾性波デバイスセンサ

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Publication number Priority date Publication date Assignee Title
JP5080811B2 (ja) * 2003-12-24 2012-11-21 アイメック 磁気セルを超高速制御するための方法及び装置
CN101504446A (zh) * 2009-03-06 2009-08-12 华南理工大学 薄膜式结构磁流体-声表面波集成磁传感器
CN101504445A (zh) * 2009-03-06 2009-08-12 华南理工大学 背槽式结构磁流体-声表面波集成磁传感器
US8269490B2 (en) * 2009-04-03 2012-09-18 Honeywell International Inc. Magnetic surface acoustic wave sensor apparatus and method
CN102435959A (zh) * 2011-10-11 2012-05-02 电子科技大学 一种磁声表面波磁场传感器及其制备方法

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