WO2020134846A1 - Système de détection de vapeur d'eau térahertz et procédé de détection - Google Patents

Système de détection de vapeur d'eau térahertz et procédé de détection Download PDF

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Publication number
WO2020134846A1
WO2020134846A1 PCT/CN2019/121760 CN2019121760W WO2020134846A1 WO 2020134846 A1 WO2020134846 A1 WO 2020134846A1 CN 2019121760 W CN2019121760 W CN 2019121760W WO 2020134846 A1 WO2020134846 A1 WO 2020134846A1
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terahertz
water vapor
detection
detected
light
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PCT/CN2019/121760
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English (en)
Chinese (zh)
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徐利民
祁春超
唐莎娜
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深圳市华讯方舟太赫兹科技有限公司
华讯方舟科技有限公司
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Publication of WO2020134846A1 publication Critical patent/WO2020134846A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]

Definitions

  • the present application relates to the technical field of terahertz time-domain spectrum detection, in particular to a water vapor detection system and detection method based on terahertz.
  • the solution to the steam leakage problem of the steam oven is to do the aging test after the completion of all production processes and observe whether there are droplets on the outside of the steam oven. If there is a leak and the sweat "sweats" on the outside of the oven, you need to disassemble the external cabinet and apply a layer of silicone to all parts of the joint of the inner bladder. This procedure will cause the waste of the subsequent steps of the steam leaking oven, and it is impossible to accurately locate the leak location, wasting silicone.
  • there are the following ways to detect the steam leakage of the steam oven 1. Use air pressure detection-use the equipment to seal the liner, inflate, and measure the change of air pressure. 2. Water tank detection-seal the liner and put it in the water tank to check the change of air bubbles.
  • the present application provides a terahertz-based water vapor detection system and detection method, which can solve the problem of water vapor detection of a steam container in the prior art.
  • a technical solution adopted by the present application is to provide a terahertz-based water vapor detection system including a laser, a terahertz emission unit, a steam container to be detected, and a terahertz detection unit, wherein the The hertz emission unit and the terahertz detection unit are relatively arranged, the steam container to be detected is disposed between the terahertz emission unit and the terahertz detection unit, and the steam container to be detected contains hot steam;
  • the laser is used to emit laser light
  • the laser light is divided into at least pump light and detection light
  • the pump light is transmitted to the terahertz emission unit, so that the terahertz emission unit radiates terahertz waves and Transmitted to the steam container to be detected to detect water vapor around the steam container to be detected, the detection light and the terahertz wave with water vapor information after passing through the steam container to be detected are transmitted to all
  • the terahertz detection unit analyzes and processes the detection light and the
  • a technical solution adopted by the present application is to provide a terahertz-based water vapor detection method.
  • the water vapor detection method includes: emitting a laser pulse, the laser pulse is divided into at least pump light and detection light; The pump light is incident on the terahertz emission unit along its transmission path, so that the terahertz emission unit radiates a terahertz wave; the transmission direction of the terahertz wave is controlled so that the terahertz wave is to be detected around the steam container Detection of water vapor; receiving the detection light and the terahertz wave with water vapor information after passing through the steam container to be detected, and analyzing and processing the detection light and the terahertz wave to A frequency domain spectrum of water vapor around the steam container to be detected is obtained.
  • the beneficial effect of the present application is to provide a terahertz-based water vapor detection system and detection method, which uses a terahertz time-domain spectroscopy system to realize the detection of water vapor leakage around the steam container to be detected, and simultaneously combines the terahertz
  • the spectral information in the frequency domain can improve the detection sensitivity of the water vapor around the steam container to be detected.
  • FIG. 1 is a schematic structural diagram of an embodiment of a terahertz-based water vapor detection system of the present application
  • FIG. 3 is a time-domain spectrum diagram when there is water vapor in the terahertz wave transmission path of this application;
  • FIG. 6 is a schematic flowchart of an embodiment of a terahertz-based water vapor detection method of the present application.
  • first”, “second”, and “third” in this application are for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined as “first”, “second”, and “third” may explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of “plurality” is at least two, such as two, three, etc., unless otherwise specifically limited.
  • the present application is based on a terahertz water vapor detection system, which is mainly applied to the detection of water vapor leakage of a steam container, where the steam container may include but not limited to a steam oven and a steam boiler, etc., and the application uses a terahertz
  • the wave is sensitive to water vapor. It detects small changes in the surrounding air humidity caused by water vapor leakage in the steam container to be detected, so as to achieve the purpose of non-destructive water vapor leak detection.
  • the use of pulsed terahertz water vapor detection The detection sensitivity of the system to water vapor can be as high as 3ppm.
  • FIG. 1 is a schematic structural diagram of an embodiment of a water vapor detection system based on terahertz detection in the present application.
  • the terahertz-based water vapor detection system 100 provided by the present application includes a laser 110, a terahertz emission unit 120, a steam container 130 to be detected, and a terahertz detection unit 140.
  • the laser 110 may be a femtosecond laser, specifically a titanium sapphire mode-locked laser, and the femtosecond laser may generate a femtosecond laser pulse with a wavelength of about 800 nm.
  • the laser pulse generated by the laser 110 passes through the beam splitter 150 and is divided into two beams, one of which is used as pump light and the other is used as probe light.
  • the range of the splitting ratio of the beam splitter 150 can be set between 1:9 and 1:1.
  • the beam splitter 150 with different splitting ratios can also be selected according to actual needs. Among them, the pulse laser with strong optical power is used as the pump light, whereas the pulse laser with weak optical power is used as the detection light.
  • the terahertz transmitting unit 120 at least includes an optical retarder 121 and a pulsed terahertz source 122, wherein the optical retarder 121 may be one of an optical fiber delay line or an optical fiber stretcher, which is not specifically limited herein. And the optical retarder 121 is used to delay the pump light, and transmits the delayed pump light to the pulsed terahertz source 122, thereby exciting the pulsed terahertz source 122 to radiate the pulsed terahertz wave.
  • the pulsed terahertz source 122 may use one of a photoconductive antenna, a nonlinear crystal, and a terahertz quantum cascade laser.
  • the pulsed terahertz source 122 in the embodiment of the present application uses a photoconductive antenna.
  • the photoconductive antenna is composed of an insulator (not shown), a semiconductor (not shown), and a metal electrode (not shown) plated on the surface of the semiconductor.
  • the single photon energy of the femtosecond laser pulse is greater than the energy gap width of the semiconductor material, so a large number of electrons are generated on the semiconductor surface- Pairs of holes, these free photo-generated carriers are accelerated by the combination of an applied bias field and a self-built electric field inside the semiconductor to form a transient current that changes rapidly with time.
  • This directional moving transient current outwards
  • the terahertz wave is radiated, and the generated terahertz wave can irradiate the steam container 130 to be detected.
  • the terahertz transmitting unit 120 of the present application may further include a control mechanism 123, which may be a lifting platform, and the control mechanism 12 may further include a motor (not shown), a controller (not shown), and Stage (not shown).
  • the stage is used to fix the pulsed terahertz source 122
  • the controller is used to control the motor to drive the stage to move in a set direction to adjust the relative position between the pulsed terahertz source 122 and the steam container 130 to be detected.
  • the pulsed terahertz source 122 accurately positions the location of the water vapor leakage of the steam container 130 to be detected.
  • the steam container 130 to be detected is disposed between the terahertz emission unit 120 and the terahertz detection unit 140.
  • the steam container 130 to be detected may be a steam container including but not limited to a steam oven, a steam oven, and the like. It can be understood that the water vapor leakage of the steam container will seriously affect the service life of the surrounding electronic components.
  • a steam oven is used as an example for description.
  • the steam container to be tested shown in FIG. 1 is a steam oven.
  • the inner liner of the steam oven is composed of aluminum alloy sheet metal, and two adjacent sheets The leakage of water vapor often occurs at the metal bite, and the leaked water vapor will affect the service life of external electronic components. Therefore, it must be strictly eliminated before leaving the factory.
  • the steam container to be tested 130 (the steam oven in this embodiment) needs to be filled with hot steam before the steam container 130 to be tested is leaked.
  • control of the control mechanism 123 in the terahertz transmitting unit 120 realizes real-time detection of the edge joints of the steam oven.
  • the edge joint of the steam oven is not completely sealed, there will inevitably be water vapor leakage, and because the terahertz wave is particularly sensitive to water vapor, that is, there is characteristic absorption in the terahertz wave band, which can realize the water vapor in the air Measurement of content.
  • the terahertz detection unit 140 receives the terahertz wave with the water vapor information after passing through the steam container 130 to be detected, and analyzes and processes the detection light and the terahertz wave to obtain the water vapor around the steam container 130 to be detected Frequency spectrum.
  • the terahertz detection unit 140 in the present application includes a terahertz detector 141 and a signal processing unit 142.
  • the terahertz detector 141 receives the detection light and the terahertz wave with water vapor information
  • the signal processing unit 142 is used to process the received detection light and the terahertz wave to obtain the time domain spectrum of the terahertz wave
  • the time domain spectrum of the terahertz wave is calculated to obtain the frequency domain spectrum with water vapor information.
  • the terahertz detector 141 in the present application may be one of a photoconductive antenna and a nonlinear crystal, which is not specifically limited here.
  • a photoconductive antenna is used as a terahertz detector.
  • the detection light is finally focused on the terahertz detector 141 after being reflected by a series of mirrors.
  • the pulsed terahertz wave irradiates the photoconductive antenna
  • induced electromotive force is generated.
  • a laser pulse is detected to illuminate the gap of the photoconductive antenna, generating photo-generated carriers, and forming a photocurrent pulse whose duration is approximately the life of the photoconductive material.
  • the amplitude of the photocurrent pulse is approximately proportional to the intensity of the terahertz pulse focused on the photoconductive antenna.
  • the time-domain waveform information of the detected photocurrent pulse can reflect the time-domain waveform of the pulse terahertz wave.
  • a periodical photocurrent time-domain waveform can be synthesized.
  • Nanowatt-level photocurrent requires a low-noise and high-sensitivity microcurrent amplifier to be amplified into a measurable voltage signal, and sent to a phase-locked amplifier synchronized with beam modulation to improve the signal-to-noise ratio (SNR) before being detected.
  • SNR signal-to-noise ratio
  • the signal processing unit 142 may further include a signal amplification circuit (not shown), a signal acquisition circuit (not shown), and an image analysis device (not shown) connected in sequence.
  • the signal processing unit 142 is specifically configured to process the received probe light and the terahertz wave to obtain a time-domain spectrum of the terahertz wave, and further perform a fast Fourier transform on the time-domain spectrum of the terahertz wave to obtain Frequency domain information.
  • the peak power of the time-domain pulse will change. When there is water vapor, the peak value of the time-domain pulse will be lower than that without water vapor due to the absorption of water vapor.
  • FIG. 2 is a time-domain spectrum chart when there is no obvious water vapor in the terahertz wave transmission path of the present application
  • FIG. 3 is a time-domain spectrum chart when there is water vapor in the terahertz wave transmission path of the present application
  • the pulse waveform it receives is relatively clean and there are almost no glitches.
  • the received pulse waveform will have many glitches, among which the glitch noise and absorption peak are caused by water vapor absorption.
  • FIG. 4 is a frequency domain spectrum diagram when there is water vapor in the terahertz wave transmission path of the present application.
  • 5 is a schematic diagram of the water vapor absorption spectrum of the present application.
  • FIG. 4 is a frequency-domain spectrum diagram of a terahertz wave obtained by performing fast Fourier transform on the terahertz time-domain spectrum in FIG. 3, as shown in FIG. 4, an obvious absorption waterline can be seen. Further calculations can get the water vapor absorption spectrum in the range of 0-2THz.
  • this application uses terahertz waves to detect whether there is water vapor leakage at the junction of the steam container, and comprehensively uses the time domain and frequency domain information of the terahertz wave, and its detection sensitivity for water vapor detection can reach 3ppm. Meet the requirements of steam leak detection of general containers.
  • the relative position of the terahertz source relative to the steam container to be tested can be adjusted, which can realize the detection of each joint of the steam container to be tested.
  • water vapor leak detection is performed immediately to prevent the leaked steam inner tank from entering the subsequent production process, thereby causing subsequent process waste .
  • the water vapor detection system of the present application uses an all-fiber terahertz time-domain spectroscopy system, and the cost of the system is relatively low.
  • the detection of water vapor leakage around the steam container to be detected is implemented by using a terahertz time-domain spectroscopy system, and at the same time, the detection sensitivity of water vapor around the steam container to be detected can be improved by combining the frequency domain spectral information of the terahertz .
  • FIG. 6 is a schematic flowchart of an implementation manner of a terahertz-based water vapor detection method according to the present application.
  • the terahertz-based water vapor detection method of the present application specifically includes the following steps:
  • a laser pulse is emitted, and the laser pulse is at least divided into pump light and detection light.
  • a femtosecond laser may be used to emit laser pulses, and specifically a titanium sapphire mode-locked laser may be used.
  • the laser pulse generated by the laser 110 passes through the beam splitter 150 and is divided into two beams, one of which is used as pump light and the other is used as probe light.
  • the range of the splitting ratio of the beam splitter 150 can be set between 1:9 and 1:1.
  • the beam splitter 150 with different splitting ratios can also be selected according to actual needs. Among them, pulse laser with strong optical power is used as pump light, and pulse laser with weak optical power is used as probe light.
  • the pump light is incident on the terahertz emission unit along its transmission path, so that the terahertz emission unit radiates a terahertz wave.
  • the terahertz transmitting unit 120 includes at least an optical retarder 121 and a pulsed terahertz source 122, wherein the optical retarder 121 may be one of an optical fiber delay line or an optical fiber stretcher, which is not specifically limited herein. And the optical retarder 121 is used to delay the pump light and transmit the delayed pump light to the pulsed terahertz source 122, thereby exciting the pulsed terahertz source 122 to radiate terahertz waves. It can be understood that the components of the terahertz transmitting unit 120 in this embodiment are the same as the components in the water vapor detection system of the present application. For details, refer to the foregoing implementation manners, and details are not described here.
  • S120 Control the transmission direction of the terahertz wave so that the terahertz wave detects the water vapor around the steam container to be detected.
  • the terahertz transmitting unit 120 may further include a control mechanism 123, wherein the control mechanism 123 is used to adjust the relative position between the pulsed terahertz source 122 and the steam container 130 to be detected, so that the pulsed terahertz source 122 can be detected The water vapor leakage at the junction of each edge of the steam container is detected, so that the pulse terahertz source 122 can accurately locate the location of the water vapor leakage of the steam container 130 to be detected.
  • the steam container to be tested 130 (the steam oven in this embodiment) needs to be filled with hot steam before the steam container 130 to be tested is leaked.
  • the control of the control mechanism 123 in the terahertz transmitting unit 120 realizes real-time detection of the edge joints of the steam oven. Among them, if the edge joint of the steam oven is not completely sealed, there will inevitably be water vapor leakage, and because the terahertz wave is particularly sensitive to water vapor, that is, there is characteristic absorption in the terahertz wave band, which can realize the water vapor in the air Measurement of content.
  • the terahertz detection unit 140 receives the terahertz wave with the water vapor information after passing through the steam container 130 to be detected, and analyzes and processes the detection light and the terahertz wave to obtain the steam to be detected A frequency domain spectrum of water vapor around the container 130.
  • the specific structure of the terahertz detection unit 140 and the calculation of the time-domain spectrum of the terahertz wave are described in detail above, and will not be repeated here.
  • terahertz time-domain pulse method when detecting the presence or absence of water vapor based on a terahertz time-domain pulse method, reference may be made to whether there is a significant displacement of the terahertz wave time domain spectrum on the time axis, terahertz time The peak power of the domain pulse will change and the frequency spectrum of the terahertz wave will change to determine whether water vapor leakage occurs at the edge junction of the steam container to be detected.
  • the detection of water vapor leakage around the steam container to be detected is implemented by using a terahertz time-domain spectroscopy system, and at the same time, the detection sensitivity of water vapor around the steam container to be detected can be improved by combining the frequency domain spectral information of the terahertz .
  • this application provides a terahertz-based water vapor detection system and detection method, which uses a terahertz time-domain spectroscopy system to realize water vapor leakage around the steam container to be detected Detection, combined with terahertz frequency domain spectral information, can improve the detection sensitivity of water vapor around the steam container to be detected.

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Abstract

L'invention concerne un système de détection de vapeur d'eau (100) térahertz et un procédé de détection. Le système de détection de vapeur d'eau (100) comprend un laser (110), une unité d'émission térahertz (120), un récipient de vapeur (130) à détecter et une unité de détection térahertz (140), l'unité d'émission térahertz (120) et l'unité de détection térahertz (140) sont agencés de façon opposée, le récipient de vapeur (130) à détecter est disposé entre l'unité d'émission térahertz (120) et l'unité de détection térahertz (140), et le récipient de vapeur (130) à détecter contient de la vapeur chaude. Le laser (110) est utilisé pour émettre une lumière de pompage et une lumière de détection, la lumière de pompage étant émise à l'unité d'émission térahertz (120), de telle sorte que l'unité d'émission térahertz (120) rayonne une onde térahertz et l'émet au récipient de vapeur (130) à détecter, la lumière de détection et l'onde térahertz comprenant des informations de vapeur d'eau après avoir traversé le récipient de vapeur (130) à détecter sont émises à l'unité de détection térahertz (140), l'unité de détection térahertz (140) analyse et traite la lumière de détection et l'onde térahertz afin d'obtenir le spectre de domaine fréquentiel de la vapeur d'eau autour du récipient de vapeur (130) à détecter ; ainsi, la détection de fuite de vapeur d'eau du récipient de vapeur (130) est réalisée.
PCT/CN2019/121760 2018-12-27 2019-11-28 Système de détection de vapeur d'eau térahertz et procédé de détection WO2020134846A1 (fr)

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109781656B (zh) * 2018-12-27 2020-12-04 深圳市华讯方舟太赫兹科技有限公司 基于太赫兹的水蒸气检测系统及检测方法
CN111537466B (zh) 2020-05-15 2022-07-05 西安理工大学 一种用于检测细胞和生物大分子的瞬态THz光谱仪
CN114877951B (zh) * 2022-06-22 2023-07-04 北京航空航天大学 一种燃烧温度场及水蒸气含量同步测量装置及方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7781737B2 (en) * 2006-12-20 2010-08-24 Schlumberger Technology Corporation Apparatus and methods for oil-water-gas analysis using terahertz radiation
CN104458645A (zh) * 2014-12-05 2015-03-25 中国科学院上海微系统与信息技术研究所 一种实现连续太赫兹光谱探测的方法及系统
CN204612860U (zh) * 2015-06-05 2015-09-02 合肥工业大学 一种基于红外激光光谱的真空度检测系统
CN105738315A (zh) * 2016-04-07 2016-07-06 绍兴文理学院 实时监测生物分子成分和含量的太赫兹装置及其测量方法
KR101740020B1 (ko) * 2015-11-30 2017-05-26 목원대학교 산학협력단 테라헤르츠파를 이용한 절연유 열화도 측정 시스템
CN107328472A (zh) * 2017-06-02 2017-11-07 中国科学院上海微系统与信息技术研究所 一种太赫兹光谱探测系统及方法
CN108267420A (zh) * 2017-12-22 2018-07-10 深圳市太赫兹系统设备有限公司 种子含水量检测系统和方法
CN109781656A (zh) * 2018-12-27 2019-05-21 深圳市华讯方舟太赫兹科技有限公司 基于太赫兹的水蒸气检测系统及检测方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050056785A1 (en) * 2003-09-16 2005-03-17 Northrop Grumman Corporation Detection and analysis of chemical and biological materials by passive emission of terahertz wave against a cold background target
KR20150061686A (ko) * 2013-11-27 2015-06-05 한국표준과학연구원 가스 검출 장치 및 가스 검출 방법
CN107144546B (zh) * 2017-06-05 2021-10-01 吉林大学 基于反射时域波形加窗的太赫兹成像方法
CN108088810B (zh) * 2017-12-11 2020-12-01 上海理工大学 一种基于太赫兹等离子增强效应的湿度传感器及其系统
CN108107017B (zh) * 2017-12-13 2019-05-17 清华大学 基于太赫兹探测高危化学品分布的方法
CN108121777B (zh) * 2017-12-13 2019-05-17 清华大学 基于太赫兹的多个高危化学品泄露源探测的方法
CN108760673B (zh) * 2018-04-13 2020-01-21 清华大学 基于太赫兹的高危化学品探测的装置和方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7781737B2 (en) * 2006-12-20 2010-08-24 Schlumberger Technology Corporation Apparatus and methods for oil-water-gas analysis using terahertz radiation
CN104458645A (zh) * 2014-12-05 2015-03-25 中国科学院上海微系统与信息技术研究所 一种实现连续太赫兹光谱探测的方法及系统
CN204612860U (zh) * 2015-06-05 2015-09-02 合肥工业大学 一种基于红外激光光谱的真空度检测系统
KR101740020B1 (ko) * 2015-11-30 2017-05-26 목원대학교 산학협력단 테라헤르츠파를 이용한 절연유 열화도 측정 시스템
CN105738315A (zh) * 2016-04-07 2016-07-06 绍兴文理学院 实时监测生物分子成分和含量的太赫兹装置及其测量方法
CN107328472A (zh) * 2017-06-02 2017-11-07 中国科学院上海微系统与信息技术研究所 一种太赫兹光谱探测系统及方法
CN108267420A (zh) * 2017-12-22 2018-07-10 深圳市太赫兹系统设备有限公司 种子含水量检测系统和方法
CN109781656A (zh) * 2018-12-27 2019-05-21 深圳市华讯方舟太赫兹科技有限公司 基于太赫兹的水蒸气检测系统及检测方法

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