WO2020126543A1 - Dispositif et procédé de traitement de la surface d'une pièce ouvrée avec un jet de plasma atmosphérique - Google Patents

Dispositif et procédé de traitement de la surface d'une pièce ouvrée avec un jet de plasma atmosphérique Download PDF

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Publication number
WO2020126543A1
WO2020126543A1 PCT/EP2019/083963 EP2019083963W WO2020126543A1 WO 2020126543 A1 WO2020126543 A1 WO 2020126543A1 EP 2019083963 W EP2019083963 W EP 2019083963W WO 2020126543 A1 WO2020126543 A1 WO 2020126543A1
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WIPO (PCT)
Prior art keywords
plasma
nozzle
contact surface
nozzle opening
plasma jet
Prior art date
Application number
PCT/EP2019/083963
Other languages
German (de)
English (en)
Inventor
Syed Salman ASAD
Christian Buske
Matthias HERLTH
Original Assignee
Plasmatreat Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasmatreat Gmbh filed Critical Plasmatreat Gmbh
Publication of WO2020126543A1 publication Critical patent/WO2020126543A1/fr

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3463—Oblique nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/40—Surface treatments

Definitions

  • the present invention relates to a device for treating a
  • atmospheric plasma jet is set up, the plasma nozzle
  • the invention further relates to a method for treating a
  • nozzle arrangements are known from the prior art, through which a plasma jet generated in the plasma nozzle can be guided in order to influence its direction, shape or spatial distribution.
  • EP 1 236 380 A1 discloses a nozzle arrangement with which the plasma jet is widely fanned out.
  • DE 10 2016 125 699 discloses a nozzle arrangement with which the plasma jet can be divided into a plurality of partial jets, with which a larger area of a surface can be applied.
  • Such nozzle arrangements can be formed in one piece with the plasma nozzle or as an attachment for a plasma nozzle, the attachment emerging from the plasma nozzle being introduced directly into the nozzle arrangement.
  • nozzle arrangements are angled with respect to the plasma nozzle axis
  • Nozzle opening is known, so that the plasma jet emerges obliquely from the plasma nozzle.
  • a larger area of the surface to be treated can be applied. If such a rotating plasma nozzle is moved along a workpiece surface, a relatively wide one can be used in this way
  • Treatment track are generated. However, with this type of treatment, there are differences in the intensity of the plasma treatment Workpiece surface This effect is described in detail in DE 10 2015 121 252 A1. In order to counteract this effect, it is proposed in DE 10 2015 121 252 A1 to additionally provide a shield surrounding the nozzle arrangement which interacts with the plasma jet and makes it more uniform.
  • previous measures for influencing the shape, direction or distribution of the plasma jet are essentially based on suitably shaping and aligning the channel or the nozzle opening leading to the nozzle opening.
  • This has the disadvantage that the nozzle arrangements can be designed to be structurally complex, depending on the planned influencing, the type or the degree of influencing cannot be changed or can only be changed in a complex manner, and the plasma jet can generate quite a lot of energy due to prolonged contact with walls of the nozzle arrangement loses.
  • the technical problem underlying the following invention is to provide an alternative possibility for influencing the shape, direction and / or distribution of the plasma beam, which reduces the problems described above as possible.
  • This object is achieved according to the invention in a device for treating a workpiece surface with a plasma nozzle which is set up to generate an atmospheric plasma jet, the plasma nozzle having a nozzle opening from which an atmospheric plasma jet emerges during operation, in that in the region of the nozzle opening Deflector with a convexly curved
  • Contact surface is positioned such that the plasma jet during operation of the
  • Plasma nozzle interacts with the contact surface of the deflecting element, in particular grazes it.
  • Plasma jets can be influenced by the plasma jet with a convex curved contact surface of a deflecting element is brought into interaction. Depending on the curvature of the contact surface, a deflection of the
  • Plasma beams observed in a direction away from the contact surface or towards the contact surface In this way, in particular the original beam direction of the plasma beam can be changed.
  • the device described can be used to spatially model the plasma jet during or after it flows out of the nozzle opening or to influence its direction, which makes it possible, for example, to achieve a desired intensity distribution of the plasma jet on a surface.
  • deflection element has various advantages over influencing or changing the direction of the plasma jet by means of a curved nozzle channel.
  • a deflection element with a convexly curved contact surface is typically structurally simpler to manufacture and can be arranged more flexibly in order to achieve the desired deflection of the plasma jet. Furthermore, such a deflection element enables a more compact construction of the plasma nozzle. As a result, the device can be better used to treat areas of a workpiece surface that are difficult to access, for example niches or areas under overhangs, with a plasma jet.
  • the plasma jet only has a short distance and preferably only at the edge with respect to its cross-section with the convex curved contact surface of the deflecting element interacts, in particular it only grazes. This results in significantly less energy loss of the plasma beam than, for example, a plasma beam deflection through a channel or a
  • Reflector element for example in the form of a shield. Therefore, at
  • a more intensive surface treatment can be achieved using the above-mentioned device with the same plasma power.
  • the deflection element can be permanently connected to the plasma nozzle
  • the deflection element can also be removably attached to the plasma nozzle, which enables the deflection element to be exchanged and / or aligned.
  • the deflection element can be positioned such that it continuously interacts with a plasma jet emerging from the nozzle opening.
  • the deflection element can also be positioned in such a way that it interacts temporarily with the plasma jet, in particular if the nozzle opening moves relative to the deflection element. For example, it is conceivable that the nozzle opening rotates and that
  • Deflection element is positioned such that the plasma jet emerging from the nozzle opening only deflects the deflection element at certain positions
  • Nozzle opening grazes. In this way, the plasma jet can be influenced depending on the position of the nozzle opening.
  • the plasma beam used can be influenced in a targeted manner, for example, be made more even.
  • the plasma jet in particular its spatial distribution and thus its intensity, it can also be achieved to direct the plasma jet precisely onto certain areas of a workpiece surface or the
  • a treatment of the workpiece surface is furthermore also understood to mean a surface coating, in particular in that a surface coating is achieved by adding at least one precursor to the plasma jet by means of a chemical reaction taking place in the plasma jet and / or on the workpiece surface, at least some of the chemical products
  • Treatment of a workpiece surface also includes cleaning, disinfection or sterilization of the
  • the deflection element consists of an electrically insulating material, in particular glass or ceramic. It has been found that the energy loss of the plasma beam can be reduced in this way through the interaction with the deflection element.
  • glass or ceramic in particular, have good robustness or inertness with regard to the influence of a plasma jet. Glass or ceramics are also heat-resistant.
  • Deflection element can be made entirely of an electrically insulating material such as Example, glass or ceramic, or alternatively be coated with such a material.
  • the deflection element is rod-shaped, in particular in the form of a cylinder or polygonal rod.
  • the deflection element can have, for example, the shape of a cylinder, tube, square rod, hexagonal rod or another rod shape in which a convexly curved contact surface is provided. In the case of a cylindrical or tubular rod, the entire
  • Outer surface is convexly curved, so that each section of the outer surface as
  • Contact surface can be used.
  • one edge forms a convexly curved contact surface, typically with a very small one
  • Coolant can be flowed through.
  • the deflection element extends transversely to the direction of the nozzle opening.
  • the direction of the nozzle opening is understood to mean the direction of the last section of the inner channel of the plasma nozzle to the nozzle opening, which specifies the direction of the plasma jet emerging from the nozzle opening if it were not influenced by the deflection element.
  • the deflection element extends transversely to this direction. In this way, a strong deflection of the plasma beam could be achieved.
  • the deflection element is designed to be adjustable in order to change the positioning of the deflection element in relation to the nozzle opening. In this way, the deflection element can influence the plasma beam
  • the size of the convexly curved contact surface of the deflection element, which interacts with the plasma beam during operation, can be influenced in this way.
  • Plasma jet interacting contact area significantly influences the type and intensity of the deflection of the plasma jet.
  • the deflection angle, ie the Angle between the direction of the nozzle opening and the deflected plasma jet depends on the position of the deflecting element relative to the nozzle opening.
  • the contact surface has a radius of curvature of at most 2 mm. It has been found that a plasma jet at
  • Radius of curvature of at most 2 mm is bent away from the contact surface.
  • a contact surface with a radius of curvature of at most 2 mm can be achieved, for example, by using a cylindrical deflection element with a diameter of at most 4 mm (i.e. with a radius of at most 2 mm).
  • the contact surface has a radius of curvature of more than 2 mm. It has been found that a plasma jet at
  • Radius of curvature of more than 2 mm is bent towards the contact surface.
  • a contact surface with a radius of curvature of more than 2 mm can be achieved, for example, by using a cylindrical deflection element with a diameter of at most 4 mm (i.e. with a radius of more than 2 mm).
  • a further deflection element with a convexly curved contact surface is positioned in the region of the nozzle opening in such a way that the plasma jet interacts with the contact surface of the further deflection element during operation of the plasma nozzle, in particular grazes it.
  • the plasma beam can be influenced from different sides, thereby influencing the direction and / or in a more targeted manner the shape of the plasma jet or the treatment effected on the surface can be achieved.
  • the contact surface of the deflecting element and the further deflecting element can have the same radius of curvature or different ones
  • Deflector positioned on opposite sides of the nozzle opening.
  • the plasma jet then emerges between the two deflection elements during operation.
  • the plasma beam can be influenced on two opposite sides. This is advantageous, for example, if the device is moved relative to a workpiece surface to be treated.
  • the plasma jet When using deflection elements that bend the plasma jet in the direction of their respective contact surfaces, the plasma jet can be expanded in one plane. When using deflection elements that bend the plasma beam away from their respective contact surfaces, the plasma beam can be focused in one plane.
  • the deflection element and the further deflection element can, for example, be aligned parallel to one another.
  • Deflection element positioned at the nozzle opening such that the
  • the direction of extension of the deflecting element and the direction of extension of the further deflecting element run at an angle to one another, preferably at a right angle.
  • This arrangement of the deflection elements makes it possible to further influence the plasma beam. For example, if the device is moved relative to a workpiece surface to be treated, this can be done, for example an influence on the plasma beam by the deflection elements both in
  • the contact surface of the deflection element and the contact surface of the further deflection element have different curvatures. As previously described, different curvatures of contact surfaces cause different deflections of a plasma beam
  • the plasma beam can be flexibly influenced by using deflection elements with contact surfaces of different curvature.
  • deflection elements with contact surfaces of different curvature.
  • Plasma beam can be expanded in one level and focused in another level.
  • the plasma nozzle has a nozzle head which rotates around an axis of rotation during operation, the nozzle head having the nozzle opening.
  • the plasma jet can be distributed over a larger area.
  • the one or more deflection elements can be positioned in such a way that their contact surfaces interact continuously or temporarily with the plasma jet.
  • the plasma nozzle can, for example, be set up so that the nozzle head rotates during operation at a rotational speed in the range from 1000 to 5600 revolutions per minute.
  • Rotation speeds result in a more homogeneous distribution of the plasma jet on a surface, for example a workpiece surface.
  • the direction of the nozzle opening runs at an angle to the axis of rotation, and the deflection element is positioned such that the plasma jet at least temporarily when the nozzle head is rotated fully about the axis of rotation,
  • Rotation position of the nozzle head emerges in different spatial directions.
  • a deflecting element with a convexly curved contact surface is positioned in the region of the nozzle opening in such a way that the plasma jet interacts at least temporarily with the contact surface of the deflecting element when the nozzle head rotates fully around the axis of rotation.
  • the plasma beam is deflected at least temporarily, the direction of deflection being dependent on the radius of curvature of the contact surface, as described above. In this way, the plasma jet can be dependent on the
  • Plasma jet is balanced.
  • the deflection element can be positioned such that the plasma jet emerging from the rotating plasma nozzle only then coincides with the
  • Contact surface of the deflection element interacts when the plasma jet is directed in the corresponding spatial direction of the deflection element.
  • the nozzle opening of the nozzle head is arranged eccentrically to the axis of rotation. In this way, the
  • Treatment trace of the plasma jet on the surface to be treated can be further enlarged.
  • the deflection element is positioned in a rotationally fixed manner on the nozzle head.
  • the deflecting element also rotates when the nozzle head rotates, the direction in which the plasma jet is deflected by the deflecting element also rotates. In this way, the same effect can be achieved as with a nozzle opening running at an angle to the axis of rotation.
  • the use of the deflection element has the advantage that the contact of the plasma beam with the
  • the angular direction of the plasma jet can be achieved with a nozzle opening running in the direction of the plasma nozzle.
  • the deflecting element has the advantage that the nozzle head can be made more compact than with a nozzle opening running at an angle to the axis of rotation, so that areas of a workpiece that are difficult to access can be better reached with the nozzle head.
  • the rotationally fixed positioning of the deflecting element is preferably adjustable in such a way that the contact surface can be positioned further to or away from the nozzle opening. In this way, the deflection angle can be adjusted as required. Additionally or alternatively, the rotationally fixed positioning of the deflection element is preferably adjustable in such a way that the angle of the convex contact surface to the nozzle opening can be adjusted. In this way, the deflection angle can also be influenced.
  • the plasma beam can be influenced in the plane of the direction of movement, for example expanded, focused or evened out.
  • the workpiece surface is usually scanned in paths with the plasma jet. This happens either by a process of the plasma nozzle, by a process of the workpiece or by a combined process of the plasma nozzle and workpiece.
  • the direction of the relative movement resulting from this method is referred to below as the direction of movement.
  • the intensity profile of a plasma jet across its cross section can result in differences in the intensity of the plasma treatment on the workpiece surface, in particular transverse to the direction of movement.
  • differences in the intensity of the plasma treatment can occur, particularly both in and across the direction of movement.
  • the superimposition of the rotation of the nozzle head and the movement between the plasma nozzle and the workpiece surface results in a spiral trajectory of the plasma jet on the workpiece surface in the treatment track. This leads to an increase in treatment intensity, particularly at the edges of the treatment track (i.e. across the treatment direction).
  • the plasma jet can be in the plane of the
  • Direction of movement can be influenced so that a more homogeneous treatment is achieved.
  • the radius of curvature of the contact surfaces is preferably dimensioned such that the plasma beam is bent toward the respective deflection element.
  • the radius of curvature of the contact surface of such a deflection element is at most 2 mm.
  • the plasma jet in the plane transverse to the direction of movement can be influenced so that a more homogeneous treatment is achieved.
  • the radius of curvature of the contact surfaces is preferably dimensioned such that the plasma beam is bent away from the respective deflection element. In this way, the plasma beam is bent towards the center at the edges of the treatment track, so that the intensity maxima at the edge are reduced.
  • the radius of curvature of the contact surface is such
  • two deflection elements are positioned on the side of the nozzle opening in and against the direction of movement and two further deflection elements are positioned on the sides of the nozzle opening transversely to the direction of movement.
  • Radii of curvature of the contact surfaces of the deflection elements on the sides in and against the direction of movement are preferably greater than the radii of curvature of the contact surfaces of the deflection elements on the sides transverse to the direction of movement.
  • Fig. La-b a first embodiment of the device for treating a
  • FIG. 4a-c another embodiment of the device and a
  • Fig. 7 is a plasma nozzle with angled nozzle opening
  • Fig. 8 shows another embodiment of the device for treating a
  • FIGS. 1 a and 1 b show a first exemplary embodiment of the device 2 with a plasma nozzle 4, which is set up for generating an atmospheric plasma jet 6.
  • the plasma nozzle 4 has a nozzle opening 8 from which the
  • a deflection element 10 with a convexly curved contact surface 12 is adjustably mounted in the region of the nozzle opening 8.
  • the deflection element 10 can be connected to the plasma nozzle directly or via a holding element (not shown).
  • the deflection element 10 is designed in the form of a cylindrical rod.
  • the convexly curved contact surface 12 is correspondingly formed by the surface of the rod 10.
  • the direction of extension of the deflecting element 10 extends into the plane of the paper and the material of the deflecting element consists of an electrically insulating material, in particular glass or ceramic.
  • the deflection element has a radius of curvature of at most 2 mm.
  • the deflection element 10 is arranged laterally offset from the plasma beam 6, so that the contact surface 12 and the plasma beam 6 do not interact with one another.
  • the plasma jet 6 leaves the nozzle opening 8 in the direction of the nozzle opening 8.
  • the deflection element 10 is positioned displaced to the left, so that the plasma jet 6 grazes the contact surface 12. It was found that deflection away from the deflection element 10 takes place when the convexly curved contact surface 12 of the deflection element 10 has a radius of curvature of at most 2 mm.
  • Deflection element 10 the edge of a polygonal rod analogous to Fig. Lb with the
  • Plasma beam 6 is brought into interaction.
  • the edge of the polygonal bar corresponds to a contact surface 12 with a very small radius of curvature of at most 2 mm.
  • FIGS. 1a to 1b show a second exemplary embodiment of a device 2 'according to the invention, a deflection element 10 "having a larger radius of curvature of the convexly curved contact surface 12 being used compared to FIGS. 1a to 1b.
  • the radius of curvature is now more than 2 mm.
  • 2a offers a similar image to FIG. La, since there is no interaction between the plasma jet 6 and the contact surface 12.
  • FIG. 2b shows how the plasma jet 6 interacts with the contact surface 12, the contact surface 12 having a radius of curvature of more than 2 mm. It was found that in this case the plasma beam 6 lies around the deflection element 10 ", i.e. there is a deflection of the plasma beam 6 in the direction of the
  • the plasma jet 6 can be positioned by positioning a suitable deflection element with a convexly curved contact surface in the region of the
  • 3a to 3c show a further exemplary embodiment of a device 2 "and an exemplary embodiment of the method for treating a workpiece surface 18 with the device 2".
  • the plasma nozzle 4 ′ (only shown in sections) of the device 2 ′′ has a nozzle head 16 rotating during operation about an axis of rotation 14, the nozzle head 16 having the nozzle opening 8
  • Nozzle opening 8 extends at an angle to the axis of rotation 14, so that the plasma jet exits the nozzle opening 8 obliquely with respect to the axis of rotation 14.
  • the device has a deflection element 10 and a further deflection element 10 ', the two deflection elements 10, 10' each being convexly curved Have contact surfaces 12 whose radius of curvature is at most 2 mm.
  • the two deflection elements 10, 10' each being convexly curved Have contact surfaces 12 whose radius of curvature is at most 2 mm.
  • Relative movement (direction of movement) is represented by arrow 20.
  • the rotational position of the nozzle head 16 is such that the plasma jet 6 interacts with the contact surface 12 of the further deflecting element 10 'and is deflected by the latter.
  • the deflection takes place away from the deflection element into the center of the circle described by the rotation about the axis of rotation 14.
  • the rotational position of the nozzle head 16 is such that the plasma jet 6 does not interact with any of the deflection elements 10, 10 '.
  • the plasma jet 6 emerging obliquely from the nozzle head strikes without being deflected by deflection elements
  • the rotational position of the nozzle head 16 is such that the plasma jet 6 interacts with that of the contact surface 12 of the deflecting element 10 and is deflected by the latter.
  • the deflection again takes place away from the deflection element into the center of the circle described by the rotation about the axis of rotation 14.
  • the deflection elements 10 and 10 ′ of the device 2 ′′ shown in FIGS. 3a-c thus direct the plasma beam 6 into the center at the edges of the treatment track on the workpiece surface 18 the intensity maximum occurring on the treatment track is reduced and the
  • 4a-c show a further exemplary embodiment of a device and a further exemplary embodiment of the method for treating a
  • the device 2 ′′ has a structure like the device 2 ′′ from FIGS. 3a-c, but using deflection elements 10 ′′ and 10 ′′ ′ whose convexly curved contact surfaces 12 have larger radii of curvature.
  • the deflection elements 10 ′′, 10 ′ ′′ are aligned transversely to the direction of movement 20.
  • the rotational position of the nozzle head 16 is such that the plasma jet 6 interacts with and is deflected by the contact surface 12 of the further deflecting element 10 ′′.
  • the deflection takes place in the direction of the deflecting element, out of the center of the circle described by the rotation about the axis of rotation 14 .
  • 4b further shows a second snapshot of the method in which the rotational position of the nozzle head 16 is such that the plasma jet 6 does not interact with any of the deflection elements 10 ", 10 '".
  • the plasma jet 6 emerging obliquely from the nozzle head 16 strikes the workpiece surface 18 without being deflected by deflection elements.
  • the rotational position of the nozzle head 16 is such that the plasma jet 6 interacts with the contact surface 12 of the deflecting element 10 ′′ and is deflected by the latter.
  • the plasma beam 6 is thus deflected out of the center in the plane of the direction of movement 20 and thereby widened by the deflection elements 10 "and 10"'of the device 2'"shown in FIGS. 4a-c. In this way, it is possible
  • FIGS. 3a-c Another exemplary embodiment, not shown, is achieved by combining the devices 2 "from FIGS. 3a-c and 2" from FIGS. 4a-c.
  • Such a device has two deflection elements 10, 10 'with contact surfaces with a smaller one
  • Plasma treatment can be achieved transversely and in the direction of movement.
  • Nozzle head 16 and the relative movement 20 (in FIG. 5a in the y direction) between device 2 "or 2 '" and workpiece surface 18.
  • the trajectory (line) represents the point of impact of the maximum plasma intensity.
  • the spiral trajectory results in a relatively wide treatment track on the
  • Workpiece surface 18 leads to the effect that the outer areas of the treatment track in the area of the dashed lines are treated more intensively with the plasma than is the case for the central areas of the treatment track.
  • the rotating plasma jet 6 is deflected inwards by the deflecting elements 10, 10 'at the edges of the treatment track, so that a more uniform plasma treatment along the
  • Treatment track is reached. This is represented in FIG. 5c by the intensity profile which, in contrast to FIG. 5b, assumes a flat or only slightly wavy shape of a plateau. If treatment traces lying next to one another are then brought overlapping onto the workpiece surface 18 in such a way that the
  • Deflection elements 10 ′′, 10 ′′ ′ can be achieved, which widen the plasma jet or its trace on the workpiece surface during one revolution of the nozzle head 16.
  • FIGS. 3a-c The apparatus 2 "shown in FIGS. 3a-c was used for the experiments, which in addition to the deflection elements 10 and 10 '(transverse to the direction of movement) also the deflection elements 10" and 10' "shown in FIGS. 4a-c (in / contrary to
  • This device was then used to treat the surface of a first PE sample along a treatment track. Furthermore, the surface of a second PE sample was treated along a treatment track, the deflection elements 10, 10 ', 10 "and 10"' being removed before the treatment of the second PE sample.
  • Treatment parameters for the two PE samples were otherwise the same.
  • Treatment trace (position +11), which determines the contact angle between the activated PE surface and the water.
  • the lower graph shows the measured contact angles in degrees (°) for the respective measuring positions (from -11 to 11), whereby the solid lines of the first PE sample (with
  • Deflection elements 10, 10 ', 10 ", 10'" and the dashed lines correspond to the second PE sample (without deflection elements).
  • the upper graph also shows the percentage deviation of the contact angle from the mean in percent (%).
  • Workpiece surface 18 with the deflection elements 10, 10 ', 10 ", 10'” is less than the percentage deviation of the contact angle after plasma treatment of the workpiece surface without deflection elements.
  • 7 shows a rotating plasma nozzle with a nozzle opening which is inclined with respect to the axis of rotation 14, as is known, for example, from EP 1 236 380 A1.
  • the plasma jet 6 emerges at an angle from the nozzle opening 8 of a nozzle head 16 rotating about an axis of rotation 14.
  • the plasma nozzle 4 ′′ shown in FIG. 7 can, for example, be used as the plasma nozzle 4 ′ in the exemplary embodiments according to FIGS. 3a-c and 4a-c.
  • the plasma jet 6 describes a circle on one
  • the device 3 has a plasma nozzle 4 ′′ ′′ with a deflecting element 11 that rotates as well
  • Deflection element has a convexly curved contact surface 12 which is positioned on the nozzle head 16 in such a way that the one emerging from the nozzle opening 8
  • Plasma jet 6 interacts with the contact surface 12, in particular grazes it.
  • the deflecting element 11 is preferably mounted so that it can be adjusted such that the angle of the deflecting element 11 to the nozzle opening 8 (arrow 22) can be varied, preferably in a range of at least 45 °, in particular at least 75 °, and / or the position in the direction of the nozzle opening 8 (arrow 24) is variable.
  • the contact surface 12 has a small radius of curvature of less than 2 mm, so that the plasma beam 6 is bent away from the deflection element 11.
  • the plasma beam 6 would instead be bent in the direction of the deflection element 11.
  • the deflection element 11 can accordingly achieve an effect similar to that with an oblique nozzle opening.
  • the plasma jet 6 describes a similar circular movement on a workpiece surface 18 (not shown) as in FIG. 7.
  • the plasma nozzle 4 ′ ′′ shown in FIG. 8 can be used as a plasma nozzle 4 'can be used for the exemplary embodiments according to FIGS. 3a-c and 4a-c.
  • the device 3 from FIG. 8 has the advantage that the nozzle opening runs along the axis of the plasma nozzle, so that
  • the device 3 from FIG. 8 can be made very compact, so that workpiece surfaces that are difficult to access can be treated more easily.

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  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
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  • Plasma Technology (AREA)

Abstract

L'invention concerne un dispositif (2, 2', 2", 2"', 3) de traitement de la surface d'une pièce ouvrée (18), comprenant une buse à plasma (4, 4', 4", 4"') qui est conçue pour générer un jet de plasma atmosphérique (6). La buse à plasma (4, 4', 4", 4"') possède une ouverture de buse (8) de laquelle, lors du fonctionnement, sort un jet de plasma atmosphérique (6). Un élément déflecteur (10, 10', 10", 10"', 11) ayant une surface de contact (12) à courbure convexe est positionné dans la zone de l'ouverture de buse (8) de sorte que le jet de plasma (6) interagit avec la surface de contact (12) de l'élément déflecteur (10, 10', 10", 10"', 11) lors du fonctionnement de la buse à plasma (4, 4', 4", 4"'), notamment érafle celle-ci. L'invention concerne en outre un procédé de traitement de la surface d'une pièce ouvrée (18) avec un tel dispositif (2, 2', 2", 2"', 3).
PCT/EP2019/083963 2018-12-19 2019-12-06 Dispositif et procédé de traitement de la surface d'une pièce ouvrée avec un jet de plasma atmosphérique WO2020126543A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018132960.1A DE102018132960A1 (de) 2018-12-19 2018-12-19 Vorrichtung und Verfahren zur Behandlung einer Werkstückoberfläche mit einem atmosphärischen Plasmastrahl
DE102018132960.1 2018-12-19

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WO2020126543A1 true WO2020126543A1 (fr) 2020-06-25

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1067829A2 (fr) 1999-07-09 2001-01-10 Agrodyn Hochspannungstechnik GmbH Buse à plasma
EP1236380A1 (fr) 1999-12-09 2002-09-04 Agrodyn Hochspannungstechnik GmbH Buse a plasma
US20100019677A1 (en) * 2006-12-12 2010-01-28 Osaka Industrial Promotion Organization Plasma producing apparatus and method of plasma production
CN204221180U (zh) * 2014-11-18 2015-03-25 广东工业大学 小型内孔用粉末等离子熔覆焊炬
JP2016081842A (ja) * 2014-10-21 2016-05-16 国立大学法人豊橋技術科学大学 プラズマ処理装置
DE102015121252A1 (de) 2015-12-07 2017-06-08 Plasmatreat Gmbh Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls und Verfahren zur Behandlung der Oberfläche eines Werkstücks
DE102016125699A1 (de) 2016-12-23 2018-06-28 Plasmatreat Gmbh Düsenanordnung, Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls, Verwendung derselben, Verfahren zur Plasmabehandlung eines Stoffs oder einer Kunststofffolie, plasmabehandelter Vliesstoff und Verwendung desselben
CA3006443A1 (fr) * 2017-06-14 2018-12-14 Tesa Se Methode d'encapsulation de bordure de plasma simultanee d'au moins deux cotes de ruban adhesif

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1067829A2 (fr) 1999-07-09 2001-01-10 Agrodyn Hochspannungstechnik GmbH Buse à plasma
EP1236380A1 (fr) 1999-12-09 2002-09-04 Agrodyn Hochspannungstechnik GmbH Buse a plasma
US20100019677A1 (en) * 2006-12-12 2010-01-28 Osaka Industrial Promotion Organization Plasma producing apparatus and method of plasma production
JP2016081842A (ja) * 2014-10-21 2016-05-16 国立大学法人豊橋技術科学大学 プラズマ処理装置
CN204221180U (zh) * 2014-11-18 2015-03-25 广东工业大学 小型内孔用粉末等离子熔覆焊炬
DE102015121252A1 (de) 2015-12-07 2017-06-08 Plasmatreat Gmbh Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls und Verfahren zur Behandlung der Oberfläche eines Werkstücks
DE102016125699A1 (de) 2016-12-23 2018-06-28 Plasmatreat Gmbh Düsenanordnung, Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls, Verwendung derselben, Verfahren zur Plasmabehandlung eines Stoffs oder einer Kunststofffolie, plasmabehandelter Vliesstoff und Verwendung desselben
CA3006443A1 (fr) * 2017-06-14 2018-12-14 Tesa Se Methode d'encapsulation de bordure de plasma simultanee d'au moins deux cotes de ruban adhesif

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