WO2020126454A1 - System mit mikromechanischer taktgebender systemkomponente - Google Patents
System mit mikromechanischer taktgebender systemkomponente Download PDFInfo
- Publication number
- WO2020126454A1 WO2020126454A1 PCT/EP2019/083395 EP2019083395W WO2020126454A1 WO 2020126454 A1 WO2020126454 A1 WO 2020126454A1 EP 2019083395 W EP2019083395 W EP 2019083395W WO 2020126454 A1 WO2020126454 A1 WO 2020126454A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- odr
- sensor
- time base
- clock frequency
- frequency
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
Definitions
- the invention relates to a system with a micromechanical clock
- the invention further relates to a method for operating a sensor system.
- micromechanical clocking system components This can be, for example, a micromirror that is part of a
- Projection module is excited to resonant vibrations.
- the projection module could be referred to as a system in the sense of the invention.
- a micromechanical clock-generating system component is a micromechanical rotation rate sensor with a detection mass which is excited for natural frequency oscillations for measurement purposes. Rotational movements of the sensor about an axis that is oriented parallel to the excitation plane and perpendicular to the excitation direction can be detected as deflections of the seismic mass perpendicular to this excitation plane, since such rotary movements cause a correspondingly directed Coriolis force.
- Such a rotation rate sensor together with a processing unit for the sensor signals already represents a system in the sense of the invention. However, it can also include further sensor components and / or system components with different functionality.
- the oscillator consisting of the vibrating mass and its spring suspension, is usually designed with a high quality in order to minimize the energy for the drive and to maximize the stability of the vibration.
- the oscillation frequency of this oscillator is very stable over temperature and aging.
- the Natural frequency of identical sensors has a very high scatter due to the manufacturing process.
- the natural frequency of the oscillator is usually used to derive the output sampling rate. This usually comes with a fractional one
- n and m are preferably selected as whole numbers and are usually determined individually when trimming the angular rate sensors by measuring f_osc and calculating suitable values n and m in order to get f_odr into a tolerance band around a desired clock frequency f_odr_nom. These values are usually stored in the non-volatile memory for adjustment parameters in the sensor.
- n and divisor m Due to the design, the absolute size of the factor n and divisor m is limited, since large values would lead to high power consumption and a large chip area. However, with limited values of n and m also goes hand in hand that the output sampling rate only with a limited accuracy, i.e. can be set with a certain deviation a_odr from the target clock frequency or target sampling frequency f_odr_nom, for example in a single-digit percentage range.
- m round (f_osc * n / f_odr_nom)
- a_odr f_odr / f_odr_nom
- the rotation rate measurement values are often integrated, for example as part of an algorithm for determining the orientation in space by the angular position.
- This orientation can e.g. can be described by roll, pitch and yaw angles (English: roll, pitch, heading). If the integration is carried out by adding up the product of the rotation rate measured value and the time interval 1 / f_odr_nom, but the actual sampling rate f_odr differs from f_odr_nom, this means that the integration value is subject to an error factor of a_odr.
- the deviation of the sensor sampling rate from the expected value is measured in practice, for example with another time standard (e.g. quartz oscillator), in order to correct this deviation as a correction for the
- the present invention is based on the idea of using the micromechanical clocking system component in order to make it a part-independent
- This reference time base is advantageous
- the part-individual deviation a_odr of the clock frequency f_odr from a predetermined target clock frequency f_odr_nom is made available. This deviation a_odr is usually determined at the end of the manufacturing process of the clocking system component.
- the task is solved with a system having a clocking system component
- micromechanical oscillating element that can be excited to oscillate at a natural frequency
- first circuit means that generate a clock frequency from the natural frequency of the oscillating element that is pre-adjusted to a predetermined target clock frequency
- a processing device that generates a reference time base for at least part of the system on the basis of the generated clock frequency and the stored deviation.
- the object is achieved with a method for operating a sensor system, with a micromechanical rotation rate sensor, in the sensor structure of which at least one oscillating element is formed, in which the oscillating element for measuring signal detection is excited to oscillate at a natural frequency,
- a clock frequency is generated from the natural frequency of the oscillating element, which is pre-adjusted to a predetermined target clock frequency and determines the output sampling rate for the sensor data of the rotation rate sensor
- a reference time base for at least part of the sensor system is generated on the basis of the generated clock frequency and the stored deviation.
- system is designed as a sensor system, with a rotation rate sensor with a micromechanical system as the clocking system component
- At least one oscillating element is formed in the sensor structure and is excited to oscillate at a natural frequency for measuring signal detection
- Natural frequency generate a clock frequency that the
- processing device is designed to process the sensor data on the basis of the reference time base.
- circuit means for generating the clock frequency comprise at least one phase locked loop. In this way, the clock frequency can be generated with high accuracy.
- a further advantageous development of the system is characterized in that the clocking system component and / or the processing device are equipped with storage means for the deviation. This allows the deviation to be made available for later use.
- a further advantageous development of the system is characterized in that the clocking system component and / or the processing device have access to external storage means for the deviation. In this way, the deviation is advantageously designed to be accessible externally.
- a further advantageous development of the system is characterized in that at least one further system component is provided, which generates an independent time base, and that the independent time base of the further system component can be calibrated and / or corrected on the basis of the reference time base. This allows the further
- a further advantageous development of the system is characterized in that at least one oscillator component is provided with second circuit means for generating an output signal with a predetermined frequency, the design of the circuit means being based on the reference time base. In this way, the output signal can be generated very precisely with the predetermined frequency.
- a further advantageous development of the method is characterized in that the sensor data of the rotation rate sensor are processed on the basis of the reference time base, in particular that the relative spatial orientation of the rotation rate sensor is determined by integrating the sensor data of the rotation rate sensor taking into account the clock frequency and the deviation .
- a very precise sensing behavior of the sensor can thereby advantageously be provided
- the reference time base is used to calibrate and / or correct an independent time base generated by a further system component.
- the independent time base generated by the further system component can be designed very precisely.
- Another advantageous development of the method is characterized in that the calibration and / or correction of the independent time base selectable times during sensor operation of the rotation rate sensor. This supports a low-power operation of the rotation rate sensor.
- the reference time base is used to set the frequency of the output signal of an oscillator component.
- the frequency of the output signal of the oscillator component can be provided very precisely.
- Fig. 4 shows a third embodiment of the proposed system.
- part-specific deviation a 0 dr it is advantageously possible for the part-specific deviation a 0 dr to be determined and stored already during manufacture when the yaw rate sensor is being compared, this value being made available for later use in sensor data processing.
- the system 100 shows a conventional system 100 in the form of a sensor system.
- the system 100 comprises a rotation rate sensor element 1 as the clock generator
- System component 1 which is equipped with first circuit means 2, the first circuit means 2 comprising a PLL and also a register with values for the PLL, which results from the oscillation frequency of the clock
- a clock frequency or an output data rate f_odr is generated, which is to be understood as the sampling rate of the sensor signal.
- An output element 4 is used to output a signal with the output data rate f_odr to a processing device 10.
- 2 shows a first embodiment as a sensor system
- first storage means 5 can be seen, in which the deviation a_odr is stored and can be supplied to the processing device 10.
- these storage means are part of the clock generator
- Processing device 10 can be designed as a host system (e.g. an application processor) which synchronously rotates the rotation rate signal
- the deviation a_odr is a part-individual factor that is determined once when the yaw rate sensor is manufactured.
- the rotation rate sensor signals can be used, for example, to determine a
- the correction in the algorithm takes place, for example, in a spatial axis as follows:
- 3 shows a further embodiment of the proposed system 100.
- external second storage means 20 are provided, by means of which the deviation a_odr is stored and can be supplied to the processing device 10.
- the external storage means 20 could be, for example, a memory of the processing device 10 or of the host system or a database provided by the manufacturer with trimming parameters or a cloud that the user of the sensor system can access.
- FIG. 4 shows a further embodiment of the proposed system 100. It can be seen that in this variant, second, externally designed storage means 20 are also provided for storing the deviation a_odr.
- the output data rate f_odr des Rotation rate sensor 1 used to generate with the help of an oscillator 30 a time base which is used as the basis for processing the rotation rate sensor signals but can also be used elsewhere in the system.
- the deviation a_odr is supplied to the oscillator 30, so that the
- Oscillator 30 generated time base is derived from the part-specific natural frequency of the rotation rate sensor element, but is independent of this.
- the time base of the oscillator 30 is fed to the processing device 10, the processing device 10 integrating the
- Rotation rate sensor signal based on the corrected oscillator frequency.
- the deviation a_odr is used to calibrate or compensate for an independent time base, for example around an inaccurate RC oscillator in a downstream processing device 10 in the form of a sensor stroke (for example microcontrollers for processing sensor data) to calibrate.
- the oscillator 30 can also function as an accurate fractional PLL or FLL
- the independent time base is only calibrated when the rotation rate sensor is switched on.
- the independent time base continues with its inherent accuracy.
- the rotation rate sensor has a relatively high electrical current consumption (eg 950 mA), which is orders of magnitude higher than the current consumption of a time base based on an RC oscillator (eg 300 nA).
- the high accuracy of the time base is provided primarily when rotation rate sensor signals are to be processed.
- the clocking system component 1 is a micromirror and the system 100 as an optical system, e.g. a
- Micro projector system is trained.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020217022572A KR20210105944A (ko) | 2018-12-20 | 2019-12-03 | 마이크로기계 클록킹 시스템 구성 요소를 갖는 시스템 |
CN201980084865.1A CN113227709A (zh) | 2018-12-20 | 2019-12-03 | 具有微机械的时钟发生系统部件的系统 |
JP2021534957A JP7212782B2 (ja) | 2018-12-20 | 2019-12-03 | マイクロメカニカルなクロッキングシステムコンポーネントを備えたシステム |
US17/273,662 US11959747B2 (en) | 2018-12-20 | 2019-12-03 | Micromechanical clocking system with improved timing precision |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018222608.3A DE102018222608B4 (de) | 2018-12-20 | 2018-12-20 | System mit mikromechanischer taktgebender Systemkomponente |
DE102018222608.3 | 2018-12-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2020126454A1 true WO2020126454A1 (de) | 2020-06-25 |
Family
ID=68808336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2019/083395 WO2020126454A1 (de) | 2018-12-20 | 2019-12-03 | System mit mikromechanischer taktgebender systemkomponente |
Country Status (7)
Country | Link |
---|---|
US (1) | US11959747B2 (de) |
JP (1) | JP7212782B2 (de) |
KR (1) | KR20210105944A (de) |
CN (1) | CN113227709A (de) |
DE (1) | DE102018222608B4 (de) |
TW (1) | TW202026598A (de) |
WO (1) | WO2020126454A1 (de) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US20120169387A1 (en) * | 2010-12-30 | 2012-07-05 | Susumu Hara | Oscillator with external voltage control and interpolative divider in the output path |
US20150048895A1 (en) * | 2013-08-13 | 2015-02-19 | Silicon Laboratories Inc. | Accurate frequency control using a mems-based oscillator |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10062347A1 (de) * | 2000-12-14 | 2002-06-20 | Bosch Gmbh Robert | Verfahren zum Abgleichen des Phasenregelkreises einer elektronischen Auswertevorrichtung sowie eine elektronische Auswertevorrichtung |
JP2002185312A (ja) | 2000-12-14 | 2002-06-28 | Citizen Watch Co Ltd | Pll圧電発振器の発振周波数調整方法および装置 |
US7124632B2 (en) * | 2004-07-26 | 2006-10-24 | Bei Technologies, Inc. | Electronically configurable rate sensor circuit and method |
JP4883031B2 (ja) | 2008-03-18 | 2012-02-22 | パナソニック株式会社 | 受信装置と、これを用いた電子機器 |
JP2010049010A (ja) | 2008-08-21 | 2010-03-04 | Kyocera Mita Corp | 検査装置及び画像形成装置 |
US9506757B2 (en) * | 2013-03-14 | 2016-11-29 | Invensense, Inc. | Duty-cycled gyroscope |
CN105375921A (zh) | 2014-08-27 | 2016-03-02 | 硅谷实验室公司 | 使用基于mems的振荡器的准确频率控制 |
DE102015200944A1 (de) * | 2015-01-21 | 2016-07-21 | Robert Bosch Gmbh | Verfahren zur Berechnung einer Orientierung mit einem Sensorsystem und Sensorsystem |
TWI690716B (zh) | 2016-01-26 | 2020-04-11 | 德商羅伯特博斯奇股份有限公司 | 以感應器系統計算定向的方法及感應器系統 |
JP6808997B2 (ja) | 2016-06-24 | 2021-01-06 | セイコーエプソン株式会社 | 信号処理回路、物理量検出装置、姿勢演算装置、電子機器及び移動体 |
-
2018
- 2018-12-20 DE DE102018222608.3A patent/DE102018222608B4/de active Active
-
2019
- 2019-12-03 CN CN201980084865.1A patent/CN113227709A/zh active Pending
- 2019-12-03 JP JP2021534957A patent/JP7212782B2/ja active Active
- 2019-12-03 KR KR1020217022572A patent/KR20210105944A/ko not_active Application Discontinuation
- 2019-12-03 WO PCT/EP2019/083395 patent/WO2020126454A1/de active Application Filing
- 2019-12-03 US US17/273,662 patent/US11959747B2/en active Active
- 2019-12-18 TW TW108146411A patent/TW202026598A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120169387A1 (en) * | 2010-12-30 | 2012-07-05 | Susumu Hara | Oscillator with external voltage control and interpolative divider in the output path |
US20150048895A1 (en) * | 2013-08-13 | 2015-02-19 | Silicon Laboratories Inc. | Accurate frequency control using a mems-based oscillator |
Also Published As
Publication number | Publication date |
---|---|
TW202026598A (zh) | 2020-07-16 |
US20210364294A1 (en) | 2021-11-25 |
JP2022513504A (ja) | 2022-02-08 |
DE102018222608A1 (de) | 2020-06-25 |
US11959747B2 (en) | 2024-04-16 |
JP7212782B2 (ja) | 2023-01-25 |
DE102018222608B4 (de) | 2021-06-10 |
CN113227709A (zh) | 2021-08-06 |
KR20210105944A (ko) | 2021-08-27 |
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