WO2020125674A1 - Modulateur spatial de lumière - Google Patents

Modulateur spatial de lumière Download PDF

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Publication number
WO2020125674A1
WO2020125674A1 PCT/CN2019/126278 CN2019126278W WO2020125674A1 WO 2020125674 A1 WO2020125674 A1 WO 2020125674A1 CN 2019126278 W CN2019126278 W CN 2019126278W WO 2020125674 A1 WO2020125674 A1 WO 2020125674A1
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WO
WIPO (PCT)
Prior art keywords
optical device
substrate
dielectric layer
intermediate dielectric
layer
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PCT/CN2019/126278
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English (en)
Chinese (zh)
Inventor
谈顺毅
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上海慧希电子科技有限公司
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Publication of WO2020125674A1 publication Critical patent/WO2020125674A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods

Definitions

  • the invention relates to the field of optical devices, in particular, to optical devices and optical systems.
  • Patent document CN101323981A discloses a borate birefringent optical crystal and uses thereof. These crystals are negative uniaxial crystals, and the value of the birefringence in the visible light band is about 0.08-0.15. This series of crystals is easy to cut, grind, polish and store, insoluble in water, not deliquescence, stable in the air, suitable for making optical communication components, such as optical isolators, circulators, beam shifters, optical polarizers and Optical modulator, etc. Especially for making polarizing prisms, phase delay devices and electro-optical modulation devices for various purposes. These devices utilize the refractive index characteristics of the crystal, especially the larger birefringence.
  • the object of the present invention is to provide an optical device and an optical system.
  • An optical device provided according to the present invention includes one or more layers of structure
  • the structure includes an upper substrate, an intermediate dielectric layer, and a lower substrate arranged in sequence; the intermediate dielectric layer is at least one layer; a birefringent material is filled between the upper substrate and the intermediate dielectric layer, and between the intermediate dielectric layer and the lower substrate.
  • the birefringent material uses liquid crystal.
  • the intermediate dielectric layer is a conductive material or a conductive layer is made on the surface.
  • the intermediate dielectric layer constitutes a polarizer or a film with a polarization function on the surface.
  • the intermediate dielectric layer is multiple layers, and the adjacent intermediate dielectric layer is filled with birefringent material.
  • any one or more of the upper substrate, the lower substrate, and the intermediate dielectric layer have pixel voltage modulation capability and/or overall voltage modulation capability.
  • any one or more surfaces are aligned as follows:
  • the alignment of at least one of the following surfaces is different from the other surfaces:
  • the intermediate dielectric layer is a transparent material.
  • the intermediate dielectric layer is ITO and/or TFT glass.
  • the upper substrate and/or the lower substrate are ITO and/or TFT glass.
  • the upper substrate and/or the lower substrate are wafers.
  • the crystal box between the upper substrate and the intermediate dielectric layer and the crystal box between the intermediate dielectric layer and the lower substrate differ in any one or more of the following parameters:
  • the liquid crystal mode is at least one of ECB, TN, VAN, and FLC.
  • An optical device combination provided according to the present invention includes a plurality of the optical devices, and the optical devices are stacked up and down.
  • the sum of the voltages applied on both sides of each layer of birefringent material is zero for a certain period of time.
  • the voltage applied on the substrate and/or the intermediate dielectric layer is an analog signal.
  • the voltage applied on the substrate and/or the intermediate dielectric layer is a digital signal.
  • An optical system provided according to the present invention includes a control and driving system and the optical device;
  • Control and drive the system obtain the data signal, drive the optical device to generate the corresponding light modulation, and synchronize the light source and/or output the synchronization signal.
  • An optical system provided according to the present invention includes the optical device described above, and further includes a matching device that performs cooperative modulation with the optical device, wherein the matching device includes any one of a light source, a polarizing plate, a PBS, a lens, and a polarizing device One or any multiple devices.
  • the present invention has the following beneficial effects:
  • the invention can realize the phase modulation while changing the polarization direction of the incident light. In some application examples, it can also realize the intensity and phase modulation of the incident light.
  • the invention can improve the response speed of the spatial light modulator to the modulation signal.
  • FIG. 1 is a schematic structural diagram of an embodiment of the present invention, showing an upper substrate 1, a lower substrate 2, an intermediate dielectric layer 3, and an intermediate liquid crystal layer 4;
  • FIG. 2 is an embodiment of the present invention, in which the lower substrate applies voltages V2 ⁇ 1y1-V2 ⁇ 1y5 respectively according to pixels, and the upper substrate and the intermediate dielectric layer respectively apply a whole voltage V1, Vcom;
  • FIG. 3 is another embodiment of the present invention, wherein the upper and lower substrates apply voltages respectively according to pixels, and the middle dielectric layer applies a whole voltage; the upper substrate applies voltages according to pixels V1 ⁇ 1y1-V1 ⁇ 1y5;
  • the lower substrate is a transmissive type (for example, TFT glass);
  • FIG. 5 is an embodiment of the present invention, wherein the lower substrate is reflective (for example, a silicon-based wafer);
  • FIG. 6 is an embodiment of the present invention, in which the upper layer material between the upper substrate and the intermediate dielectric layer rotates the polarization direction of incident light by 45°, and the lower layer material between the lower substrate and the intermediate dielectric layer realizes phase modulation of the incident light;
  • FIG. 7 is an embodiment of the present invention, in which the upper layer material between the upper substrate and the intermediate dielectric layer modulates the polarization direction of incident light according to pixel points (intensity modulation can be achieved after adding a polarizer), and the lower substrate and the intermediate dielectric
  • the underlying materials between the layers realize phase modulation of the incident light
  • FIG. 8 is a comparison diagram of the alignment directions of the upper and lower substrates and the surface of the intermediate dielectric layer in an embodiment of the present invention.
  • An optical device includes one or more layers of structures; the structure includes: an upper substrate, a lower substrate, and at least one intermediate dielectric layer; between the upper substrate and the intermediate dielectric layer (multilayer structure In this case, a birefringent medium may be filled between the intermediate dielectric layer and the intermediate dielectric layer), and between the intermediate dielectric layer and the lower substrate. Each layer is separated by a conductive intermediate dielectric layer.
  • a voltage is applied to at least one of the upper substrate and the lower substrate (voltage is applied according to pixels, and the voltage at each point may be different, for example, an LCoS wafer is used as a substrate, or a substrate of an LCD screen, etc.), and the intermediate dielectric layer is on at least one surface Apply voltage (total application).
  • the filled birefringent material may be a liquid crystal material, the thickness of the crystal layers located on the upper and lower sides of the intermediate dielectric layer may be the same or different, and the modes of the liquid crystals located on the upper and lower sides of the intermediate dielectric layer may be the same or different.
  • the upper and lower substrates can be TFT/ITO glass or silicon-based wafers
  • the intermediate dielectric layer can be TFT or ITO glass
  • the surfaces of the upper and lower substrates facing the birefringent material and the two surfaces of the intermediate dielectric are aligned
  • the specific method is to rub the above surface in a certain direction using a corresponding felt (which can be installed on a roller), so that the liquid crystal molecules can be filled into a set distribution according to the direction of alignment after filling.
  • At least one of the four surfaces of the upper substrate and the lower substrate facing the surface of the birefringent material and the two surfaces of the intermediate medium has a different alignment direction from the other surfaces.
  • the function of simultaneously changing the polarization direction of the incident light and modulating the phase of the incident light is realized. It is also possible to make the alignment directions of the four surfaces all the same, then at this time compared to the single-layer device that reaches the same modulation range (the thickness of the single-layer liquid crystal will be the sum of the thicknesses of the two layers of the double-layer device in the present invention, and The reaction speed of the material is directly related to its thickness)
  • the refresh rate of the device will be several times that of a single-layer device, so as to improve the refresh rate.
  • the optical system composed of this device also includes a control and drive system and other optical elements.
  • the control and drive system is mainly composed of electronic devices, which control to generate data signals and drive the device to generate corresponding light modulations. Synchronize the light source.
  • Other optical devices may include light sources (such as LD, LED, etc.), polarizers or polarizing prisms, lenses, lens groups, etc. Polarizers or polarizing prisms are used to combine the light beams and/or to filter unwanted light, and lenses and lenses are used to modulate the light beams again (eg, enlarge/reduce the image, etc.).
  • the lower substrate uses a silicon-based liquid crystal wafer with a resolution of 1920x1080, and both the intermediate dielectric layer and the upper substrate use ITO glass.
  • the liquid crystal is selected as the upper layer liquid crystal adopting TN mode packaging, and the lower layer adopting ECB mode packaging.
  • One possible alignment selection is that the lower substrate surface and the intermediate dielectric layer surface are aligned at 45° to one side of the device, while the upper substrate surface is aligned parallel or perpendicular to one side of the device.
  • the distance between the upper substrate and the ITO glass is 1um (that is, the upper liquid crystal layer is 1um thick), and the distance between the ITO glass and the lower substrate is 2.5um (that is, the lower liquid crystal is 2.5um thick).
  • the light source uses an OLED display panel, and a polarizing prism is added to the light path.
  • the incident light (including image information) emitted by the light source can first pass through a polarizer to make its polarization direction into the P direction when it enters the polarizing prism. After being turned 90° by the polarizing prism, it is incident on the above spatial light modulator. Since the alignment direction of the upper substrate of the device is 45° different from that of the middle ITO glass, the polarization direction of the incident light will be rotated by 45° after passing through the upper liquid crystal, and the lower substrate It is a silicon-based liquid crystal wafer.
  • the surface can be reflected back by the CMP process (it can also be coated with an anti-reflection film with a set wavelength or wavelength range), and is modulated by the control system to be able to be on different pixels. Apply different voltages to the liquid crystal, so that the phase modulation of the incident light at different points is different.
  • the polarization direction is rotated again by 45°.
  • it exits from the upper layer to the polarizing prism its polarization
  • S direction which can be transmitted through the polarizing prism, amplified by the subsequent optical system, or directly viewed by the viewer.
  • the light source can be replaced with a traditional silicon-based liquid crystal device.
  • the LD or LED illuminates its surface through a polarizing prism
  • the polarization direction of the image light is changed by 90° and returns to the polarizing prism.
  • the image light is introduced into the spatial light modulator for modulation
  • the polarization direction is changed again by 90° and output through the same polarization prism.
  • a lens system can also be added to the light source to modulate the light emitted by the light source by collimating, expanding, and homogenizing.
  • the voltage of the intermediate dielectric layer is also There is a periodic change, for example, the previous cycle is 6V, the next cycle is 0V, so the cycle, you can also apply the same voltage to the upper surface substrate, for example, the previous cycle is 6V, the next cycle is 0V so as not to make the liquid crystal Deflection destroys the modulation of the polarization direction, and at the same time keeps the sum of the pressure difference between the two ends at zero for a certain period of time, so that no damage will occur.
  • DC BALANCE DC balance requirement
  • the upper substrate can also be replaced with a TFT glass substrate with pixel voltage modulation capability, so as to realize the modulation of the polarization of each pixel, so that the combination of polarizing prism or polarizer can achieve the intensity and phase of the pixel at the same time. modulation.
  • the light source only needs to realize illumination without providing image information (intensity information).
  • a common LD laser can be used. When the laser is incident, the polarization direction is consistent with the alignment direction of the upper substrate, and each pixel on the upper substrate The points are controlled by the control driving system to apply voltages respectively.
  • the polarization direction of each pixel point is changed by the voltage modulation, and the amount of change is between 0 and 45°.
  • the polarization directions of all pixels can be equivalently decomposed into a combination of the direction consistent with the alignment direction of the lower substrate and the direction perpendicular to the alignment direction of the lower substrate. Since the long axis direction of the liquid crystal material of the lower layer coincides with the alignment, all pixels propagate Of the light reaching the lower layer, only the energy of the polarized part consistent with the alignment direction of the lower layer will be correctly modulated by the lower liquid crystal (you can also use a polarizer to make an intermediate dielectric layer, or make a coating with polarizing filter properties on the intermediate dielectric layer.
  • the light in the polarization direction that is correctly modulated by the lower layer liquid crystal is filtered out). After it is reflected back, it passes through the upper substrate again, and the polarization direction is changed again. After passing through the subsequent polarizer or polarizing prism (it can be directly made on the upper substrate) (On the surface, or the upper substrate is made of materials with similar characteristics), it can filter out unnecessary energy, thereby simultaneously realizing the intensity and phase modulation of light.
  • the upper layer may also be designed as a phase modulation (layer between the upper substrate and the intermediate dielectric layer), and the lower layer (layer between the lower substrate and the intermediate dielectric layer) may be designed as the intensity modulation, which is similar to the above example.
  • This can be achieved by simply changing the alignment direction and the thickness of the crystal layer.
  • the alignment directions of the upper substrate and the opposite intermediate dielectric layer are the same, the alignment directions of the lower substrate and the facing intermediate dielectric layer are different by 45°, and the alignment directions of the upper and lower surfaces of the intermediate substrate are the same or different by a certain angle.
  • the pixel size (pixel pitch) of the upper substrate and the lower substrate may be the same, and the pixel positions correspond one-to-one in space.
  • the size of pixels produced on a glass substrate is often larger than the size of pixels on a silicon-based wafer, so the above sizes can also be different.
  • one pixel on the upper substrate is equal to the lower substrate 9 (3 ⁇ 3 ) Pixel size.
  • both the upper substrate and the lower substrate are made of transparent materials.
  • the upper substrate and the lower substrate are TFT substrates with pixel voltage modulation capability.
  • the alignment direction of the upper substrate and the surface of the dielectric layer facing it is about 90° different.
  • the alignment direction of the substrate and the surface of the corresponding dielectric layer is consistent, and it is consistent with the alignment direction of one surface of the upper substrate or the surface of the dielectric layer corresponding to the upper substrate, and the polarization direction of the light emitted by the light source after passing through the upper substrate is changed and changed The amount is determined by the input signal of each pixel.
  • the polarization direction of all pixels can be equivalently decomposed into a direction that is consistent with the alignment direction of the lower substrate and a direction perpendicular to the alignment direction of the lower substrate, because the long axis direction of the liquid crystal material of the lower layer is consistent with the alignment , So all the light propagating from the pixels to the lower layer will only have the energy of the polarized part in the same direction as the alignment of the lower layer will be correctly modulated by the lower liquid crystal.
  • the lower substrate is also transparent in this example, and the modulated light will be Through the substrate, after adding a polarizer (or the intermediate dielectric layer is made to have the characteristics of a polarizer) or a polarizing prism, unnecessary light energy can be filtered out, and the light field with the required intensity and phase can be modulated distributed.
  • Another application is to reduce the thickness of a single layer of material by laminating multiple layers of birefringent materials (thickness and response time are generally in a square relationship, the smaller the thickness, the faster the response speed of the material), so as to achieve the same phase and /Or within the intensity modulation range, improve the response time of the device itself.
  • the optical device includes a multi-layer structure (including three layers of birefringent materials), the lower substrate uses a silicon-based liquid crystal wafer, and a conductive dielectric layer is located at a distance of 1.8um from the wafer, and the conductive dielectric layer has two surfaces
  • the alignment direction is the same as that of the lower layer substrate, the liquid crystal material is filled between the two layers, the conductive medium layer is at least 1.8um at a transparent intermediate layer substrate, and electrodes are made on it, which can perform voltage modulation for each pixel separately.
  • the alignment direction of the side facing the conductive medium layer is consistent with the conductive medium layer, and liquid crystal material is filled between the two layers.
  • a thin film with a polarization selection function can also be plated on the intermediate layer substrate, so as to filter the energy in unnecessary polarization directions.
  • the 1um position on the middle layer substrate is the upper layer substrate.
  • the alignment direction of the surface of the middle layer substrate facing the upper layer substrate is 45° different from that of the upper layer substrate, which can change the polarization direction of incident light.

Abstract

Dispositif optique et système optique comprenant une structure monocouche ou multicouche ; la structure comprend un substrat supérieur (1), une couche de milieu intermédiaire (3) et un substrat inférieur (2) qui sont disposés en séquence ; la couche de milieu intermédiaire (3) contient au moins une couche ; et un matériau biréfringent (4) est rempli entre le substrat supérieur (1) et la couche de milieu intermédiaire (3) ainsi qu'entre la couche de milieu intermédiaire (3) et le substrat inférieur (2). Le dispositif optique et le système optique peuvent réaliser une modulation de phase tout en changeant la direction de polarisation de la lumière incidente, tout en modulant également l'intensité et la phase de la lumière incidente, augmentant ainsi la vitesse de réponse du modulateur spatial de lumière à des signaux de modulation.
PCT/CN2019/126278 2018-12-21 2019-12-18 Modulateur spatial de lumière WO2020125674A1 (fr)

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CN109507820A (zh) * 2018-12-21 2019-03-22 江苏慧光电子科技有限公司 一种空间光调制器
CN111240077A (zh) * 2020-02-25 2020-06-05 深圳市隆利科技股份有限公司 防窥显示方法
CN111190296A (zh) * 2020-02-25 2020-05-22 深圳市隆利科技股份有限公司 显示器防窥方法
CN111240049A (zh) * 2020-03-24 2020-06-05 东南大学 一种高速响应纯相位空间光调制器
CN112859477B (zh) * 2021-03-02 2022-04-05 东南大学 一种基于纳米天线的马赫-曾德尔干涉仪
CN113568217A (zh) * 2021-08-04 2021-10-29 上海慧希电子科技有限公司 空间光调制器及显示设备

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US5044732A (en) * 1987-03-23 1991-09-03 Sharp Kabushiki Kaisha Liquid-crystal display device
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