WO2020119009A1 - 基于光相控阵的硅基集成光学可调延时线 - Google Patents

基于光相控阵的硅基集成光学可调延时线 Download PDF

Info

Publication number
WO2020119009A1
WO2020119009A1 PCT/CN2019/084791 CN2019084791W WO2020119009A1 WO 2020119009 A1 WO2020119009 A1 WO 2020119009A1 CN 2019084791 W CN2019084791 W CN 2019084791W WO 2020119009 A1 WO2020119009 A1 WO 2020119009A1
Authority
WO
WIPO (PCT)
Prior art keywords
phased array
optical
optical phased
array
waveguide
Prior art date
Application number
PCT/CN2019/084791
Other languages
English (en)
French (fr)
Inventor
周林杰
单文胜
许维翰
陆梁军
陈建平
刘娇
Original Assignee
上海交通大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上海交通大学 filed Critical 上海交通大学
Publication of WO2020119009A1 publication Critical patent/WO2020119009A1/zh
Priority to US17/039,964 priority Critical patent/US11333826B2/en

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12038—Glass (SiO2 based materials)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating

Definitions

  • the invention belongs to the field of optical delay/optical buffer.
  • the optical phased array transmitting and receiving unit By combining the optical phased array transmitting and receiving unit and the transmission waveguide, the optical phased array is used to form an optical path with adjustable angle, and multiple total reflection transmission in the waveguide obtains different delay amounts, thereby achieving integrated adjustable optical delay Timeline.
  • Data caching is a key unit in optical communication networks. It can avoid channel network conflicts and improve the throughput of network nodes, thereby reducing the packet loss rate.
  • next-generation all-optical switching network such as packet switching
  • the performance indexes of data buffering are higher.
  • Early all-optical switching networks used electrical random-access memory (RAM, random access memory) to access information. The optical switching speed of this method is limited by the reading speed of electrical RAM.
  • the solution must pass photoelectric optical conversion , Makes the system more complex, and the system's electrical power consumption is relatively large. Therefore, people began to think about whether they can directly complete the data cache function in the optical system without the conversion of photoelectric light.
  • Unfortunately there is no mature and feasible optical storage solution or device. Therefore, the existing data cache and synchronization functions
  • the optical system is realized by various adjustable optical delay lines.
  • the limitation of the first method is relatively large, because the effective refractive index of the medium is related to the refractive index of the device material and the waveguide structure, and generally can be changed in a small range, and the optical absorption loss of the material itself should also be considered when selecting the medium, so This method is hardly adopted.
  • the second method has the best tunability and can be continuously adjusted.
  • the principle of electro-optical effect, thermo-optical effect or carrier dispersion effect of materials can be used to achieve material dispersion or waveguide dispersion.
  • this method also has limitations. Large dispersion is often accompanied by signal distortion, which limits the working bandwidth of the device and is not conducive to the application in high-speed systems. Therefore, the delay adjustment range achieved by this method is often small.
  • the third method is the most direct and can be independent of the material properties of the medium.
  • the amount of delay is directly proportional to the length of the waveguide, due to problems such as loss and system complexity, the size of the device cannot be infinitely increased in practical applications. It is necessary to make the delay adjustment range and loss of the device through reasonable design. optimize.
  • the dynamic adjustment of this type of method generally relies on optical switches and other devices for routing, so how to implement high-performance optical switches is also one of the difficulties that need to be considered.
  • an optical phased array (OPA, Optical) array is used to generate an angle-adjustable light beam, which is then transmitted through different paths in the waveguide to achieve optical signal delay.
  • OPA optical phased array
  • the present invention provides an integrated optically adjustable delay line based on an optical phased array.
  • optical phased array beamforming to form a directional beam, adjusting the angle of incidence of the optical signal into the waveguide, can change the propagation path of the optical signal, and finally get different delays.
  • the invention can realize a large adjustable delay amount, has the advantages of simple structure and control, high integration, flexible adjustment and the like, and has extremely high application value in optical communication, microwave photon and optical signal processing.
  • An integrated optically adjustable delay line based on an optical phased array characterized in that the integrated optically adjustable delay line includes an optical phased array transmitting unit, a flat waveguide transmission unit, and an optical phased array receiving unit;
  • the optical phased array transmit/receive unit includes but is not limited to couplers, beam splitters, phase shifters, waveguide array antennas and other structures.
  • the optical phased array transmitting unit emits a directional beam through beamforming, and is connected to one end of the slab waveguide transmission unit.
  • the input beam greater than the critical angle of total reflection is constrained in the waveguide for transmission.
  • the other end of the waveguide is connected to the light
  • the phased array receiving unit is connected. According to the principle of reversible optical path, the receiving end can receive optical signals from a specific direction to realize the establishment of the optical path from the transmitting end to the receiving end.
  • the integrated optically adjustable delay line is characterized in that the optical delay can be adjusted by changing the angle of the optical phased array transmit/receive beam and the length of the propagation path of the light beam in the slab waveguide.
  • the integrated optical adjustable delay line is characterized in that the optical phased array transmitter/receiver can adopt a symmetrical structure relative to the transmission waveguide or the phased array transmitter/receiver can be placed on the same side of the waveguide.
  • the optical phased array transmitting/receiving unit is characterized in that the input coupler of the optical phased array may use a grating coupler, an inverted tapered waveguide coupler and the like.
  • the optical signal input/output adopts horizontal coupling or vertical coupling to realize the connection between the external optical signal and the planar optical waveguide.
  • the horizontal coupling uses a lens and an inverted cone mode speckle converter on the chip, and the vertical coupling uses a plane Grating coupler on fiber and chip.
  • the optical phased array beam splitter adopts structures including, but not limited to, cascaded multi-mode interference coupler, cascaded Y-beam splitter, star coupler, etc., to achieve uniform distribution of input light among multiple phase channels .
  • the phase shifter can be a phase shifter based on free carrier dispersion effect (FCD) or a phase shifter based on thermo-optic effect (TO).
  • FCD free carrier dispersion effect
  • TO thermo-optic effect
  • the phase shifter can determine the phase of the optical signal on each array of waveguides. Modulation is achieved by changing the effective refractive index of the waveguide.
  • the optical phased array has an antenna with a sub-wavelength interval density, which can achieve a large angle range of non-aliasing beam deflection, and the emitting array uses, but is not limited to, a curved waveguide array, a waveguide array with different widths, and a paramagnetic
  • the photonic forbidden band and other structures of materials/metamaterials can suppress the coupling crosstalk of optical signals in the waveguide array antenna.
  • the beam transmission waveguide uses the principle of total reflection to limit the light beam within the waveguide.
  • the core layer is made of silicon material, and the cladding layer is silicon dioxide or air.
  • the interface between the core layer and the cladding layer is smooth and clean to reduce total reflection loss.
  • the optical phased array receiving unit has a mirror image structure with the transmitting unit, and can adopt different array sizes, the number of sub-channels, the principle of sub-channel phase adjustment, beam combining devices, output couplers, and the like.
  • the optical phased array transmitter/receiver may, but is not limited to, increase the receiving efficiency by increasing the array size of the receiver or increasing the number of sub-channels.
  • the present invention uses an integrated optical phased array as the signal emitting end, which can generate a highly directional light beam, and the propagation path of the light beam in the waveguide can be changed by adjusting the applied voltage.
  • the waveguide used in the present invention has a larger size and can provide optical delay with low loss and low dispersion.
  • the optical path of the light beam transmitted in the waveguide can be flexibly adjusted. Compared with the traditional optical delay line, this structure can provide a wide range of delay adjustment with the help of fixed waveguide length and width.
  • the invention has a simple structure and is easy to control.
  • the system components all use a silicon-based substrate to realize monolithic integration, which has the advantages of compact structure, flexible adjustment and simple control.
  • the silicon-based integrated optical delay chip manufacturing process is compatible with the CMOS process. It is beneficial to mass production and has the potential advantage of low cost.
  • FIG. 1 is a structural diagram of an embodiment of the relative placement of an optical phased array transmitter/receiver of the present invention.
  • FIG. 2 is a structural diagram of an embodiment where the optical phased array transmitter/receiver of the present invention is placed on the same side.
  • FIG. 3 is a schematic diagram of (a) a vertical grating coupler and (b) an inverted cone coupler used in an embodiment of an optical phased array in the present invention.
  • FIG. 4 is a schematic diagram of a multi-mode interference coupler used in an embodiment of an optical phased array of the present invention and its cascaded beam splitting structure.
  • FIG. 5 is a schematic diagram of a metal-heated phase shifter according to an embodiment of an optical phased array of the present invention.
  • FIG. 6 is a schematic diagram of a waveguide array antenna according to an embodiment of the present invention.
  • the integrated adjustable delay line based on the optical phased array of the present invention is mainly divided into three parts according to functional characteristics: the optical phased array transmitting unit (101), the slab waveguide transmission unit (102), The optical phased array receiving unit (103); the optical phased array transmitting unit (101) is composed of a coupler, a cascaded beam splitting structure, and a phase shifter phase array in order from left to right.
  • the units are represented by "coupler, splitter 1 ⁇ N, multi-channel waveguide with fixed phase difference ⁇ ", the optical phased array receiving unit (103) is sequentially arranged from left to right by the phase shifter phase array , Cascade splitting structure and coupler structure, these composition structures are the same as those in the optical phased array transmitter unit, but the placement order is different.
  • the optical signal needs to be coupled into the input waveguide of the optical phased array through the vertical grating coupler/inverted cone coupler shown in FIG.
  • the input waveguide realizes N-way uniform splitting via the cascade splitting structure shown in FIG. 4.
  • the phase modulation array is mainly used to effectively adjust the phase (phase modulation) of the N-channel beam output from the optical beam splitter.
  • a fixed phase difference ⁇ is generated between the array channels.
  • a directionally emitted light beam is obtained, which enters the waveguide and performs multiple total reflection transmission at a specific total reflection angle.
  • the light beam is received by the optical phased array receiving unit.
  • the principle is the same as that of the phased array transmitting unit, but the optical path is reversed.
  • the vertical grating coupler adopts the structure of FIG. 3(a), the purpose is to couple the optical signal into the transmission waveguide, in which the height of the silicon waveguide is 220nm and the height of the etched grating is 70nm.
  • the period is 630nm, the duty ratio is 50%, and there are 27 grating periods.
  • the width of the silicon waveguide in the grating is 12 ⁇ m and the length is 30 ⁇ m.
  • the wide waveguide gradually transitions to the single-mode narrow waveguide through the tapered waveguide.
  • the optical fiber is incident at an angle of 8° and the waveguide achieves good mode spot matching, thereby achieving higher coupling efficiency.
  • the optical splitter used is composed of two MMIs of two 1 ⁇ 2 splitting units in a four-stage tree structure as shown in FIG. 4, which has a total of 16 optical paths.
  • the metal phase shifter shown in Figure 5 is used as the phase shifter, and air grooves are etched between adjacent waveguides to suppress thermal crosstalk between the waveguides, thereby reducing the phase between the waveguides Crosstalk.
  • the metal used is titanium nitride (TiN). Because TiN metal has a high electrical resistivity, it is suitable as a heat source to generate heat. The heat is transferred to the silicon waveguide through silicon oxide, which in turn changes the effective refractive index of the waveguide to produce a phase shift.
  • Phase shift the width of TiN designed here is 2 ⁇ m, the thickness is 120 nm, and the length of the phase shifter is 400 ⁇ m.
  • TiN is a strip-shaped single-mode silicon waveguide. After the 16-channel phase shifter is applied with voltage, different phase shift amounts can be achieved, thereby ultimately controlling the deflection angle of the beam emitted from the waveguide array antenna.
  • the waveguide output antenna adopts the structure shown in Figure 6.
  • the initial OPA pitch can be seen It is 50.5 ⁇ m, after a 2.5 ⁇ m interval waveguide (shown in the upper inset of Figure 6) transition to the output array interval 3.3 ⁇ m, and then through a specially designed S-bend transition to an array spacing of 0.8 ⁇ m (inset shown in the lower inset of Figure 6).
  • the conventional design is to only transition to the interval of 2.5 ⁇ m, where the interval of 2.5 ⁇ m (much greater than half the wavelength) is already the limit of silicon waveguide decoupling, so there are side lobes in the far field, which limits the effective deflection angle of the main lobe beam range.
  • the invention can realize a large adjustable delay, has the advantages of simple structure and control, and high integration, and has potential application value in the fields of signal processing, microwave photonics, optical communication, and the like.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nonlinear Science (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Communication System (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)

Abstract

一种基于光相控阵的硅基集成光学可调延时线，依次包括：光相控阵发射单元，平板波导传输单元，光相控阵接收单元。利用光相控发射单元，通过移相器调控通道间的相位差，改变远场干涉光斑，形成具有方向性的波束从而调控光信号进入平板波导中的入射角度，进而改变光信号的传播路径长度，最终通过相对应的光相控阵接收单元接收光信号得到不同的延时量。具体而言，本发明能够实现大的可调延时量，具有结构与控制简单、集成度高等优点，在光通信、微波光子和信号处理等方面具有很高的应用价值。

Description

基于光相控阵的硅基集成光学可调延时线 技术领域
本发明是属于光延迟/光缓存领域。通过将光相控阵发射和接收单元与传输波导结合起来，借助光相控阵形成角度可调的光路，在波导中多次全反射传输获得不同的延时量，从而实现集成可调光延时线。
背景技术
数据缓存是光通信网络中的一个关键单元，它可以避免信道网络冲突问题，提高网络节点的吞吐量，从而降低丢包率。在下一代全光交换网络(如分组交换)中对数据缓存的性能指标要求更高。早期的全光交换网络利用电学随机读取存储器(RAM，random-access memory，)来存取信息，此方法的光交换速度受限于电RAM的读取速度，同时该方案必须通过光电光转换，使得系统较为复杂，系统的电学功耗也比较大。于是，人们开始思考是否可以不经过光电光的转换，直接在光学系统中完成数据缓存的功能，遗憾的是尚未有成熟可行的光学存储方案或者器件，因此现有的针对数据缓存以及同步功能的光学系统均是依靠各种可调光学延迟线实现的。
调节器件的延时量共有三种方法：
1)改变介质的有效折射率；
2)改变介质有效折射率的色散，也就是调节群折射率；
3)改变介质的长度；
第一种方法的局限性比较大，因为介质的有效折射率与器件材料折射率以及波导结构有关，一般可改变的范围很小，并且在选择介质时还应考虑材料本身的光学吸收损耗，因此这种方法几乎不被采用。
第二种方法的可调性最好，可以实现连续调节，利用材料的电光效应、热光效应或者载流子色散效应等原理，可以实现材料色散或者波导色散，但该种方法也有局限，较大的色散往往伴随着信号的失真，限制了器件的工作带宽，不利于高速系统中的应用，因此该方法所实现的延时调节范围往往较小。
第三种方法最直接，可以不受限于介质的材料特性。但是，由于延时量与波导长度成正比，由于损耗、系统复杂度等问题，在实际应用中器件的尺寸不 可能无限增大，需要通过合理的设计使得器件的延时调节范围、损耗等性能最优化。该类方法的动态调节一般依靠光开关等器件进行选路，因此如何实现高性能的光开关也是需要考虑的难点之一。
鉴于上述三种光延迟方式存在的弊端，在此提出一种用光相控阵(OPA，Optical Phased Array)产生角度可调的光束，进而在波导中按照不同路径进行传输，从而实现光信号延时量的灵活调节。
发明内容
针对上述现有实现方案中存在的缺陷，本发明提供一种基于光相控阵的集成光学可调延时线。利用光相控阵波束成型形成具有方向性的波束，调控光信号进入波导中的入射角度，能改变光信号的传播路径，最终得到不同的延时量。具体而言，本发明能够实现大的可调延时量，具有结构与控制简单、集成度高、调节灵活等优点，在光通信、微波光子以及光信号处理中具有极高的应用价值。
为实现上述目的，本发明的技术解决方案如下：
一种基于光相控阵的集成光学可调延时线，其特征在于，该集成光学可调延时线包括光相控阵发射单元，平板波导传输单元，光相控阵接收单元；所述的光相控阵发射/接收单元包括但不限于耦合器、分光器、移相器、波导阵列天线等结构。
所述的光相控阵发射单元通过波束成型发射具有方向性的波束，并同平板波导传输单元一端连接，大于全反射临界角的输入光束被约束在波导中实现传输，波导的另一端与光相控阵接收单元连接，依据光路可逆原理，该接收端可以接收来自特定方向的光信号，实现从发射端到接收端光路的建立。
所述的集成光学可调延时线，其特征在于，通过改变光相控阵发射/接收波束的角度，改变光束在平板波导中传播路径的长度，从而来实现光延时的可调。
所述的集成光学可调延时线，其特征在于，光相控阵发射/接收器可以采用相对于传输波导对称放置的结构或者可以将相控阵发射/接收器放置于波导同一侧。
所述的光相控阵发射/接收单元，其特征在于，所述光相控阵的输入耦合器可以采用光栅耦合器、倒锥形波导耦合器等。光信号输入/输出采用水平耦合或 垂直耦合实现外部光信号与平面光波导之间的连接,所述的水平耦合采用透镜和芯片上的倒锥形模斑转换器，所述的垂直耦合采用平面光纤和芯片上的光栅耦合器。
所述光相控阵的分束器采用包括但不限于级联多模干涉耦合器，级联Y型分束器，星型耦合器等结构，实现输入光在多个相位通道间的均匀分配。
所述的移相器可以采用基于自由载流子色散效应(FCD)的移相器或基于热光效应(TO)的移相器，该移相器对每一路阵列波导上的光信号相位的调制是通过改变波导的有效折射率实现。
所述的光相控阵具有亚波长间隔密度的天线，能够实现大角度范围的无混叠光束偏转，并且该发射阵列采用包括但不限于弯曲波导阵列、宽度相异的波导阵列、含有仿超材料/超材料的光子禁带等结构，抑制波导阵列天线中光信号的耦合串扰。
所述的光束传输波导利用全反射原理将光束限制在波导内，芯层为硅材料，包层为二氧化硅或者空气，芯层和包层之间界面光滑干净以减小全反射损耗。
所述的光相控阵接受单元具有与发射单元互为镜像的架构，可以采用不同的阵列尺寸、子通道数目、子通道相位调节原理、合束器件以及输出耦合器等。
所述的光相控阵发射/接收器可以但不限于通过增大接收器的阵列尺寸或增加子通道数目来提高接收效率。
本发明和现有技术相比，有益效果主要体现在如下方面：
1、本发明采用集成光相控阵作为信号的发射端，能够产生高度定向的光束，通过调节外加电压即可改变光束在波导内的传播路径。
2、本发明采用的波导具有较大尺寸，能提供低损耗和低色散的光延迟。光束在波导中传输的光程可以灵活调节，相比于传统的光延迟线，这种结构能够借助固定的波导长度和宽度提供大范围的延时量调节。
3、本发明结构简单，便于控制，系统组件全部采用硅基衬底实现单片集成，具有结构紧凑、调节灵活、控制简单等优点，同时该硅基集成光延迟芯片制造工艺和CMOS工艺兼容，有利于大批量生产，具有低成本的潜在优势。
附图说明
图1为本发明光相控阵发射/接收器相对放置实施例结构图。
图2为本发明光相控阵发射/接收器同侧放置实施例结构图。
图3为本发明中光相控阵实施例采用的(a)垂直光栅耦合器(b)倒锥形耦合器示意图。
图4为本发明光相控阵实施例采用的多模干涉耦合器及其级联分光结构示意图。
图5为本发明光相控阵实施例的金属加热型移相器示意图。
图6为本发明实施例的波导阵列天线示意图。
具体实施方式
为了进一步阐明本方案的目的、技术方案及核心优势，下文结合附图和实施例，对本发明进行进一步详细说明。请注意，下述具体实施例仅起解释目的，并不用于限定本发明。同时，各个实施例涉及到的技术特征只要彼此未构成冲突，就可以相互结合。
参考图1、图2所示，本发明基于光相控阵的集成可调延时线按照功能特点主要分为三部分：光相控阵发射单元(101)，平板波导传输单元(102)，光相控阵接收单元(103)；所述的光相控阵发射单元(101)所示从左到右依次由耦合器、级联分光结构、移相器相位阵列构成，在图1的(101)单元中分别由“耦合器，分光器1×N，固定相位差ΔΦ的多通道波导”表示，所述的光相控阵接收单元(103)从左向右依次由移相器相位阵列、级联分光结构和耦合器构成，这些组成结构与光相控阵发射单元中的组成结构一样，只是摆放顺序不同。
首先，光信号需要通过图3所示的垂直光栅耦合器/倒锥形耦合器耦合进入光相控阵的输入波导中。
接着，输入波导经由图4所示的级联分光结构实现N路均匀分光。
然后，这N路光信号经过图5所示的移相器相位调制阵列进行相位调节，相位调制阵列主要是对光分束器输出的N路光束进行相位的有效调节(调相)，在波导阵列通道间产生固定相位差ΔΦ，通过调控通道间的相位差，从而实现远场衍射主瓣光束的有效偏转，改变远场干涉图样的角分布，形成具有方向性的波束进而改变光相控阵发射/接收波束的角度。
之后，经由图6所示的波导阵列天线输出，获得在某个方向定向发射的光 束，进入波导按照特定全反射角度进行多次全反射传输。在波导传输末端，光束由光相控阵接收单元接受，其原理与相控阵发射单元相同，只是光路相反。
在上述方案的基础上，垂直光栅耦合器采用图3(a)的结构，目的是将光信号耦合进传输波导中，其中硅波导的高度是220nm，刻蚀的光栅高度为70nm，形成的光栅周期为630nm，占空比50％，共有27个光栅周期。光栅中硅波导宽度为12μm，长度为30μm，宽波导通过锥形波导逐渐过渡到单模窄波导。光纤以8°角入射和波导达到良好的模斑匹配，从而实现较高的耦合效率。
在上述方案的基础上，采用的分光器如图4所示，由2个四级树状结构的1×2分光单元的MMI并联构成，共有16条光路。
在上述方案的基础上，移相器采用图5所示的金属加热型移相器，在相邻的波导间刻蚀出空气槽，用于抑制波导间的热串扰，进而减小波导间相位串扰。采用的金属为氮化钛(TiN)，因为TiN金属的电阻率较高，适合作为热源产生热量，热量经氧化硅传导到硅波导，进而改变波导有效折射率产生相移，为了确保产生足够的相移，这里设计的TiN宽度为2μm，厚度为120nm，移相器的长度为400μm。在TiN正下方是条形单模硅波导，16路移相器加电压后，可以实现不同的相移量，从而最终控制从波导阵列天线发射的光束偏转角度。
在上述方案的基础上，波导输出天线采用图6所示的结构，为了将阵列波导从较宽的间距过渡到较窄的间距，我们设计两段S型过渡段的结构，可见最初的OPA间距是50.5μm，经过2.5μm间隔的波导(图6上方插图所示)过渡到输出阵列间隔3.3μm，又经过一段特殊设计的S型弯曲过渡到阵列间距0.8μm(图6下方插图所示)。常规的设计是只过渡到2.5μm的间隔，这里2.5μm(远大于半波长)的间隔已经是硅波导去耦合的极限值，因此远场中存在旁瓣，限制了主瓣光束有效的偏转角度范围。我们通过后续设计一段S型波导弯曲过渡到只有0.8μm的阵列间隔，理论上接近实现在远场中无旁瓣，主瓣光束扫描角度范围无限制。
在上述方案的基础上，我们可以通过调节光相控阵发射单元的外置电压即可使金属加热型产生不同的热量进而改变波导有效折射率产生相移，从而调控光信号进入波导的角度，改变光信号的传播光路，产生不同的延时量。具体而言，本发明能够实现大的可调延时量，具有结构与控制简单、集成度高的优点，在信号处理、微波光子、光通信等领域有潜在的应用价值。
同领域的科研或产业部门人员容易理解，以上内容仅为本发明的较佳实施 例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。

Claims (10)

  1. 一种基于光相控阵的硅基集成光学可调延时线，其特征在于，包括光相控阵发射单元(101)、平板波导传输单元(102)和光相控阵接收单元(103)；所述的光相控阵发射单元(101)的输出端与所述的平板波导传输单元(102)的一端相连，所述的平板波导传输单元(102)的另一端与所述的光相控阵接收单元(103)连接，所述的光相控阵发射单元(101)依次由耦合器、级联分光结构、移相器相位阵列构成，所述的光相控阵接收单元(103)依次由移相器相位阵列、级联分光结构和耦合器构成。
  2. 如权利要求1所述的集成光学可调延时线，其特征在于，所述的光相控阵发射单元(101)和光相控阵接收单元(103)相对于所述的平板波导传输单元(102)对称放置的结构或置于所述的平板波导传输单元(102)的同一侧。
  3. 如权利要求1所述的集成光学可调延时线，其特征在于，所述的光相控阵发射单元(101)通过波束成型发射具有方向性的波束，并同平板波导传输单元(102)一端连接，大于全反射临界角的输入光束被约束在波导中传输，波导的另一端与光相控阵接收单元(103)连接，依据光路可逆原理，该接收端可以接收来自波导中特定角度传输的光信号，从而完成光路从输入到输出的连接。
  4. 如权利要求1所述的集成光学可调延时线，其特征在于，通过移相器相位阵列调控通道间的相位差，改变远场干涉光斑，形成具有方向性的波束从而改变光相控阵发射单元(101)或光相控阵接收单元(103)的波束的角度，进而改变光束在平板波导中传播路径的长度，最终来实现光延时的可调。
  5. 如权利要求1所述的集成光学可调延时线，其特征在于，其特征在于，所述的光相控阵的输入耦合器采用光栅耦合器或倒锥形波导耦合器，光信号输入/输出采用水平耦合或垂直耦合实现外部光信号与平面光波导之间的连接,所述的水平耦合采用透镜和芯片上的倒锥形模斑转换器，所述的垂直耦合采用平面光纤和芯片上的光栅耦合器。
  6. 如权利要求1基于光相控阵的硅基集成光学可调延时线，其特征在于，所述光相控阵的分束器采用级联多模干涉耦合器、级联Y型分束器或星型耦合器。
  7. 如权利要求1所述的基于光相控阵的硅基集成光学可调延时线，其特征在于，所述的移相器采用基于自由载流子色散效应移相器或基于热光效应移相器。
  8. 如权利要求1所述的基于光相控阵的硅基集成光学可调延时线，其特征在于，所述的光相控阵具有亚波长间隔的天线密度，能够实现大角度范围的无混叠光束偏转，并且该发射阵列采用弯曲波导阵列，宽度相异的波导阵列，或含有超材料的光子禁带结构，来实现发射单元间的耦合抑制。
  9. 如权利要求1所述的基于光相控阵的硅基集成光学可调延时线，其特征在于，所述的光相控阵接受单元具有与发射单元互为镜像的架构，但可以采用不同的阵列尺寸、子通道数目、子通道相位调节原理、合束器件以及输出耦合器等。
  10. 如权利要求1所述的基于光相控阵的硅基集成光学可调延时线，其特征在于，所述的光相控阵接收单元(103)通过增大接收器的阵列尺寸或增加子通道数目来提高接收效率。
PCT/CN2019/084791 2018-12-14 2019-04-28 基于光相控阵的硅基集成光学可调延时线 WO2020119009A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US17/039,964 US11333826B2 (en) 2018-12-14 2020-09-30 Silicon-based integrated optically adjustable delay line based on optical phased array

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201811531401.4 2018-12-14
CN201811531401.4A CN109491010B (zh) 2018-12-14 2018-12-14 基于光相控阵的硅基集成光学可调延时线

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US17/039,964 Continuation US11333826B2 (en) 2018-12-14 2020-09-30 Silicon-based integrated optically adjustable delay line based on optical phased array

Publications (1)

Publication Number Publication Date
WO2020119009A1 true WO2020119009A1 (zh) 2020-06-18

Family

ID=65710216

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/084791 WO2020119009A1 (zh) 2018-12-14 2019-04-28 基于光相控阵的硅基集成光学可调延时线

Country Status (3)

Country Link
US (1) US11333826B2 (zh)
CN (1) CN109491010B (zh)
WO (1) WO2020119009A1 (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109491010B (zh) * 2018-12-14 2020-06-09 上海交通大学 基于光相控阵的硅基集成光学可调延时线
CN110741280B (zh) 2019-05-08 2020-08-28 深圳市速腾聚创科技有限公司 光学相控阵及其相位误差改善方法、激光雷达、智能设备
CN114207462A (zh) * 2019-07-10 2022-03-18 深圳市速腾聚创科技有限公司 光学天线、光学相控阵发射机及激光雷达系统
FR3105456B1 (fr) * 2019-12-23 2021-12-10 Commissariat Energie Atomique EMetteur optoélectronique a antenne reseau a commande de phase comportant un dispositif de commande integre
CN111641458A (zh) * 2020-04-30 2020-09-08 中国电子科技集团公司第三十八研究所 一种通用型多通道光学色散延时器
CN113687552A (zh) * 2020-05-19 2021-11-23 联合微电子中心有限责任公司 一种移相控制电路
CN111740786B (zh) * 2020-06-10 2022-01-25 电子科技大学 一种集成光波导波束赋形装置
CN111796292A (zh) * 2020-07-03 2020-10-20 浙江大学 一种具有平坦输出强度的片上光学相控阵扫描器
CN111766662B (zh) * 2020-07-24 2021-09-07 上海交通大学 一种通用型硅基集成光波导模式转换器
CN112994791A (zh) * 2021-02-04 2021-06-18 中国科学院长春光学精密机械与物理研究所 基于硅基光学相控阵的高速室内光无线通信系统
CN113703244B (zh) * 2021-08-19 2023-12-19 扬州大学 一种大规模集成的电光微环光学相控阵

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003021814A (ja) * 2001-07-09 2003-01-24 Communication Research Laboratory 光遅延多重回路
CN101980460A (zh) * 2010-10-29 2011-02-23 武汉光迅科技股份有限公司 单片集成的多波长差分正交相移键控解调器及其制作方法
CN103091776A (zh) * 2013-02-06 2013-05-08 中国电子科技集团公司第三十八研究所 单移相器控制的集成光波导波束形成芯片及制作方法
CN105527772A (zh) * 2015-12-29 2016-04-27 北京大学 一种光学相控阵
CN109491010A (zh) * 2018-12-14 2019-03-19 上海交通大学 基于光相控阵的硅基集成光学可调延时线

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69428630T2 (de) * 1993-06-21 2002-08-01 Nippon Telegraph & Telephone Optischer Signal-Prozessor, Verfahren zu seiner Steuerung, Verfahren zu seiner Konstruktion, und Verfahren zu seiner Herstellung
EP1452896B1 (en) * 1996-09-02 2009-12-02 Nippon Telegraph and Telephone Corporation Optical signal processing apparatus and optical signal processing method
GB9722685D0 (en) * 1997-10-28 1997-12-24 Secr Defence Electrically tuneable optical filter
US7082235B2 (en) * 2001-09-10 2006-07-25 California Institute Of Technology Structure and method for coupling light between dissimilar waveguides
US6834152B2 (en) * 2001-09-10 2004-12-21 California Institute Of Technology Strip loaded waveguide with low-index transition layer
US6956998B2 (en) * 2002-08-22 2005-10-18 Prima Luci, Inc. Compact optical delay lines
EP1708390A1 (en) * 2005-03-31 2006-10-04 Corning Incorporated Mitigating the effect of pulse distortions along an optical fiber communications link
CN101364656B (zh) * 2008-09-23 2012-02-22 吉林大学 基于soi光波导单片集成的微波光子移相器及制备方法
US9851443B2 (en) * 2012-03-16 2017-12-26 Alcatel Lucent Optical beam sweeper
JP6363619B2 (ja) * 2013-01-08 2018-07-25 マサチューセッツ インスティテュート オブ テクノロジー 光フェーズドアレイ
CN104570404A (zh) * 2014-12-22 2015-04-29 中国电子科技集团公司第三十八研究所 一种基于热光调制的光波束形成网络芯片及其制备方法
US10075245B2 (en) * 2015-05-08 2018-09-11 Massachusetts Institute Of Technology Apparatus and methods for reconfigurable optical receivers
CN207096498U (zh) * 2016-12-09 2018-03-13 上海信及光子集成技术有限公司 一种高精度N‑bit可调光延时器
US10429582B1 (en) * 2018-05-02 2019-10-01 Globalfoundries Inc. Waveguide-to-waveguide couplers with multiple tapers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003021814A (ja) * 2001-07-09 2003-01-24 Communication Research Laboratory 光遅延多重回路
CN101980460A (zh) * 2010-10-29 2011-02-23 武汉光迅科技股份有限公司 单片集成的多波长差分正交相移键控解调器及其制作方法
CN103091776A (zh) * 2013-02-06 2013-05-08 中国电子科技集团公司第三十八研究所 单移相器控制的集成光波导波束形成芯片及制作方法
CN105527772A (zh) * 2015-12-29 2016-04-27 北京大学 一种光学相控阵
CN109491010A (zh) * 2018-12-14 2019-03-19 上海交通大学 基于光相控阵的硅基集成光学可调延时线

Also Published As

Publication number Publication date
CN109491010A (zh) 2019-03-19
US11333826B2 (en) 2022-05-17
US20210026068A1 (en) 2021-01-28
CN109491010B (zh) 2020-06-09

Similar Documents

Publication Publication Date Title
WO2020119009A1 (zh) 基于光相控阵的硅基集成光学可调延时线
CN106324865B (zh) 一种基于相变材料三维集成光开关
US8320761B2 (en) Broadband and wavelength-selective bidirectional 3-way optical splitter
WO2015096070A1 (zh) 波导偏振分离和偏振转换器
US20100266240A1 (en) Multi-chip system including capacitively coupled and optical communication
US11422431B2 (en) Optical switching using spatially distributed phase shifters
CN106959485B (zh) 基于亚波长光栅的定向耦合型tm起偏器及分束器
CN109725385B (zh) 一种基于波导光栅耦合器的光偏振态调整芯片
CN114721176B (zh) 一种基于片上模式转换的偏振控制器
WO2022222599A1 (zh) 模斑转换器和光子器件
Xu et al. Wired thz communications
CN112596282A (zh) 一种基于soi的宽带可调分束比偏振旋转分束器
US6621644B2 (en) Optical wavelength-demultiplexer with an improved optical lens
CN101881859A (zh) 一种采用多模干涉耦合的光延时器
CN111740786B (zh) 一种集成光波导波束赋形装置
CN112415663B (zh) 一种基于多级微盘耦合的马赫曾德尔宽带低功耗光开关
WO2022027851A1 (zh) 一种热光移相器
CN106646737B (zh) 金属-类光子晶体混合波导耦合器
JP3125902B2 (ja) スタ−型光配線回路
CN113671630B (zh) 一种基于硅基集成的平面超透镜结构非互易光路由器
CN115061236B (zh) 一种Sagnac耦合微环阵列结构的读写可控的硅基集成光缓存器
CN111290144B (zh) 一种光子晶体数字型光开关
JP2003202606A (ja) 光スイッチ
WO2024082794A1 (zh) 模斑转换结构和光子器件
TWM650629U (zh) 以往回建構週期性區塊波導結構的ｙ型分光器來改良５ｇ通訊系統之分光器裝置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19895695

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 26/10/2021)

122 Ep: pct application non-entry in european phase

Ref document number: 19895695

Country of ref document: EP

Kind code of ref document: A1