WO2020223927A1 - 光学相控阵及其相位误差改善方法、激光雷达、智能设备 - Google Patents
光学相控阵及其相位误差改善方法、激光雷达、智能设备 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/4911—Transmitters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29301—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means based on a phased array of light guides
Definitions
- the invention relates to the technical field of laser radar, in particular to an optical phased array and a method for improving its phase error, laser radar and intelligent equipment.
- the optical phased array is an important part of the all-solid-state lidar system. It has the advantages of complete solid-state, high reliability, small size, and convenient control.
- the optical phased array can be realized by integrated optoelectronic technology.
- the existing optical antenna units include silicon-on-insulator (SOI) materials, silicon nitride materials, three-five group materials, etc. Since the silicon-based optical phased array based on SOI material can utilize the mature microelectronic complementary metal oxide semiconductor (Complementary Metal Oxide Semiconductor, CMOS) process platform, it has received great attention from the industry in recent years.
- SOI silicon-on-insulator
- CMOS complementary metal oxide semiconductor
- the optical phased array is composed of an optical splitter, a tunable phase shifter, a connecting waveguide, and an antenna transmitting unit.
- the input light can be divided into equal proportions or unequal proportions through the splitter. After these lights pass through the tunable phase shifter, their phase will be changed. After passing through a series of connected waveguides, it is finally launched into free space in the antenna transmitting unit.
- the inventor of the present invention found that since most antenna transmitting units are currently arranged in parallel at a certain interval, the occupied area often cannot be changed.
- the phase shifters are usually large in size, especially in large-scale optical phased arrays. Connecting the output ports of these large-size tunable phase shifters to a fixed area antenna transmitting unit one by one will use a large number of straight waveguides. And bend the waveguide. From a functional point of view, these waveguides are not necessary, but in practice a large amount of area in the entire optical phased array is occupied by these connecting waveguides. Take the 64-channel silicon-based optical phased array as an example. The longest connecting waveguide can even reach several millimeters.
- the embodiments of the present invention provide an optical phased array and a phase error improvement method thereof, a lidar, and a smart device that overcome the above problems or at least partially solve the above problems.
- an optical phased array including: an optical signal output unit, a waveguide unit, and an antenna transmitting unit; the optical signal output unit is used to output M modulated optical signals, where M Is a positive integer; the waveguide unit includes M waveguide pipes, the waveguide unit includes M waveguide pipes, each waveguide pipe includes at least one connecting waveguide, and the connecting waveguide includes input mode converters connected in sequence , A wide waveguide and an output mode converter, the input mode converter is used to convert a narrow waveguide to a wide waveguide, the output mode converter is used to convert a wide waveguide to a narrow waveguide, one of the input modes of the connected waveguide The input end of the converter is connected to the optical signal output unit, and the output end of one of the output mode converters connected to the waveguide is connected to the antenna transmitting unit; the antenna transmitting unit: connected to the waveguide unit for transmitting M optical signals transmitted by the waveguide unit.
- each of the waveguide pipes further includes: at least one curved waveguide, the curved waveguide is used to connect the output mode converter of one of the connecting waveguides and the input mode converter of the adjacent connecting waveguides And bend the waveguide pipe.
- each of the waveguide pipes further includes: an initial mode converter located at the initial end of the waveguide pipe, the input end of the initial mode converter is connected to the optical signal output unit, and the output end is connected to one of the The input mode converter of the connection waveguide is connected.
- each of the waveguide pipes further includes: an end mode converter located at the end of the waveguide pipe, and the input end of the end mode converter is connected to one of the output mode converters connected to the waveguide , The output terminal is connected to the antenna transmitting unit.
- the input mode converters of at least one of the connecting waveguides have the same structure; the output mode converters of at least one of the connecting waveguides have the same structure; and the structures of the at least one curved waveguide are the same .
- the wide waveguides in adjacent waveguide pipes that are positioned directly opposite to each other are parallel to each other, and the waveguide spacing is the same.
- the wide waveguides in adjacent waveguide pipes have the same length difference in positions opposite to each other.
- a laser radar which includes the aforementioned optical phased array, a light receiving unit, and a ranging unit.
- a smart device including the aforementioned lidar.
- a phase error improvement method which is applied to the aforementioned optical phased array.
- the method includes: outputting M channels of modulated optical signals, where M is a positive integer;
- the first narrow waveguide mode of the modulated optical signal is converted into a wide waveguide; at least one of the wide waveguides is used to transmit the optical signal; the wide waveguide mode is converted into a second narrow waveguide for transmitting the optical signal;
- the light signal is emitted.
- the method further includes: converting the wide waveguide mode into a bent waveguide; applying the bent waveguide to bend a waveguide pipe; and converting the bent waveguide mode into the wide waveguide.
- the optical phased array includes: an optical signal output unit, a waveguide unit, and an antenna transmitting unit; the optical signal output unit is used to output M modulated optical signals, where M is a positive integer;
- the waveguide unit includes M waveguide pipes, each of the waveguide pipes includes at least one connecting waveguide, and the connecting waveguide includes an input mode converter, a wide waveguide, and an output mode converter connected in sequence, and the input mode converter is used for The narrow waveguide is converted into a wide waveguide, the output mode converter is used to convert the wide waveguide into a narrow waveguide, and the input end of the input mode converter of one of the connected waveguides is connected to the optical signal output unit, and one of the The output end of the output mode converter connected to the waveguide is connected to the antenna transmitting unit; the antenna transmitting unit is connected to the waveguide unit, and is used to transmit M optical signals transmitted by the waveguide unit.
- Figure 1 shows a schematic structural diagram of an optical phased array according to an embodiment of the present invention
- Figure 2 shows a schematic structural diagram of another optical phased array according to an embodiment of the present invention
- Fig. 3 shows a schematic structural diagram of yet another optical phased array according to an embodiment of the present invention
- Fig. 4 shows a schematic flowchart of a method for improving a phase error according to an embodiment of the present invention.
- Fig. 1 shows a schematic structural diagram of an optical phased array according to an embodiment of the present invention.
- the optical phased array includes: an optical signal output unit 1, a waveguide unit 2 and an antenna transmitting unit 3.
- the optical signal output unit 1 is used to output M modulated optical signals, where M is a positive integer.
- the waveguide unit 2 includes M waveguide pipes 200, each of the waveguide pipes 200 includes at least one connecting waveguide 20, and the connecting waveguide 20 includes an input mode converter 21, a wide waveguide 22, and an output mode converter 23 connected in sequence ,
- the input mode converter 21 is used to convert a narrow waveguide to a wide waveguide
- the output mode converter 23 is used to convert a wide waveguide to a narrow waveguide
- the input terminal of is connected to the optical signal output unit 1, and the output terminal of one of the output mode converters 23 of the connecting waveguide 20 is connected to the antenna transmitting unit 3.
- the antenna transmitting unit 3 is connected to the waveguide unit 2 and is used for transmitting M optical signals transmitted by the waveguide unit 2.
- the optical signal output unit 1 includes an optical splitter 10 and a phase shifter 11.
- the beam splitter 10 may first split the input light, and then the phase shifter 11 phase shifts the light split by the beam splitter 10 to obtain and output multiple optical signals with different phases.
- the optical splitter 10 and the phase shifter 11 are alternately arranged, that is, the splitting and phase shifting of the input light are performed alternately, and finally multiple optical signals of different phases are output.
- M optical signals with different phases are output.
- the waveguide unit 2 receives the M optical signals carrying different phase information after being split and phase-shifted by the optical splitter 10 and the phase shifter 11, and the M output ends of the waveguide unit 2 and the M input of the antenna transmitting unit 3 Connect at the end.
- each waveguide pipe 200 further includes: at least one curved waveguide 24.
- the curved waveguide 24 is used to connect the output mode converter 23 of one of the connecting waveguides 20 and the input mode converter 21 of the adjacent connecting waveguide 20 to bend the waveguide pipe 200.
- the input end of the curved waveguide 24 is connected to the output end of the output mode converter 23 of the previous connection waveguide 20, and the output end of the curved waveguide 24 is connected to the input end of the input mode converter 21 of the next connection waveguide 20.
- the curved waveguide 24 is bent 90 degrees.
- the curved waveguide 24 can also be bent at any other angle between 0 and 180.
- each waveguide pipe 200 in the waveguide unit 2 includes N connecting waveguides 20, and N is an integer. In the embodiment of the present invention, N is preferably 3. In other embodiments of the present invention, N can also be other integers, which is not limited herein.
- each waveguide pipe 200 in the waveguide unit 2 includes N connecting waveguides 20; N-1 bending waveguides 24, such as the first bending waveguide,..., the N-1th bending waveguide.
- Each connecting waveguide 20 includes an input mode converter 21, a wide waveguide 22 and an output mode converter 23. Any adjacent connecting waveguides 20 are connected by a curved waveguide 24.
- the wide waveguide 22 is a straight waveguide transmission part, and a plurality of the optical signals are transmitted through a wider waveguide.
- the curved waveguide 24 is a curved waveguide transmission part, and the waveguide pipe 200 is bent to transmit a plurality of the optical signals in a narrow waveguide.
- the waveguide width of the wide waveguide 22 is generally 800 nm to 1 ⁇ m, and the waveguide width of the curved waveguide 24 is generally 150 nm to 500 nm. In this way, all the straight waveguide transmission parts are transmitted by waveguides with larger waveguide widths, so that the change in the width of the waveguide caused by the process error to the width of the wide waveguide is smaller than that of the narrow waveguide in the traditional technology, so the phase error Will drop significantly.
- the narrow waveguide is still used in the transmission part of the curved waveguide to reduce the bending radius of the narrow waveguide, and the narrow waveguide is equivalent to a mode filter, which will filter out the higher-order modes that may be generated in the wide wave
- the input mode converter 21 is used to convert the input waveguide width of the optical signal or the first waveguide width w1 of the curved waveguide 24 into the second waveguide width w2 of the wide waveguide 22.
- the output mode converter 23 is connected between the adjacent wide waveguide 22 and the curved waveguide 24 or between the wide waveguide 22 and the antenna transmitting unit 3.
- the output mode converter 23 converts the second waveguide width w2 into the first waveguide width w1 of the curved waveguide 24 and into the input-end waveguide width of the antenna transmitting unit 3.
- the second waveguide width w2 is greater than the first waveguide width w1, and the first waveguide width w1 is preferably the waveguide width w0 of a single-mode waveguide.
- the input waveguide width of the optical signal and the input end waveguide width of the antenna transmitting unit 3 are between the first waveguide width w1 and the second waveguide width w2, of course, they can also be the same as the first waveguide width w1.
- Each waveguide pipe 200 further includes an initial mode converter 25 and an end mode converter 26.
- the initial mode converter 25 is located at the initial end of the waveguide pipe 200, the input end of the initial mode converter 25 is connected to the optical signal output unit 1, and the output end is connected to one of the input modes of the connecting waveguide 20
- the converter 21 is connected.
- the end mode converter 26 is located at the end of the waveguide pipe 200, the input end of the end mode converter 26 is connected to one of the output mode converters 23 of the connecting waveguide 20, and the output end is connected to the antenna transmitting unit 3Connect.
- the initial mode converter 25 is connected to the optical signal output unit 1
- N connection waveguides 20 are connected between the initial mode converter 25 and the end mode converter 26, and any adjacent connection waveguides 20 are connected.
- the curved waveguide 24 is connected between.
- the terminal mode converter 26 is connected to the antenna transmitting unit 3.
- the input end of the initial mode converter 25 is connected to the optical signal output unit 1, the output end is connected to the first input mode converter 21 connected to the waveguide 20, and the first wide waveguide 22 connected to the waveguide 20 is connected to the first Between the input mode converter 21 and the output mode converter 23 connected to the waveguide 20, the input end of the first curved waveguide 24 is connected to the output mode converter 23 of the first connection waveguide 20, and the output end is connected to the adjacent first Two input mode converters 21 connected to the waveguide 20 are connected, and so on, the output end of the N-1th curved waveguide 24 is connected to the input mode converter 21 of the Nth connected waveguide 20, and the width of the Nth connected waveguide 20 is The waveguide 22 is connected between the input mode converter 21 and the output mode converter 23 of the Nth connecting waveguide 20, and the output mode converter 23 of the Nth connecting waveguide 20 is connected to the input end of the end mode converter 26, and the end mode The output terminal of the converter 26 is connected to the antenna transmitting unit 3.
- the initial mode converter 25 converts the input waveguide width of the optical signal into the first waveguide width w1
- the input mode converter 21 converts the first waveguide width w1 into the second waveguide of the wide waveguide 22 Width w2.
- the output mode converter 23 converts the second waveguide width w2 into the first waveguide width w1 of the curved waveguide 24, and the end mode converter 26 converts the first waveguide width w1 into the The width of the waveguide at the input end of the antenna transmitting unit 3.
- the connection between the wide straight waveguide transmission part and the narrow curved waveguide transmission part through a mode converter can effectively reduce the loss.
- the first waveguide width w1 is preferably the waveguide width w0 of a single-mode waveguide. If the input waveguide width of the optical signal is consistent with the waveguide width w0 of the single-mode waveguide, the initial mode converter 25 can be omitted, and the input mode converter 21 directly converts the input waveguide width of the optical signal into the second waveguide width w2 of the wide waveguide 22 .
- the end mode converter 26 can be omitted, and the output mode converter 23 directly converts the second waveguide width w2 of the wide waveguide 22 into The width of the waveguide at the input end of the antenna transmitting unit 3.
- At least one of the input mode converters connected to the waveguide has the same structure; at least one output mode converter of the connected waveguide has the same structure; and the at least one curved waveguide has the same structure.
- the initial mode converter 25 and the output mode converter 23 are tapered waveguides, and the structure remains the same. Specifically, the length and waveguide width of each mode converter are the same.
- the input mode converter 21 and the end mode converter 26 are tapered waveguides. And the structure remains the same, and at the same time the structure of each curved waveguide 24 also remains the same to ensure that the optical path difference of each waveguide pipe 200 in the entire waveguide unit 2 is consistent.
- the tapered waveguide of each mode converter can be maintained The length is the same.
- the two tapered initial mode converters 25 and one of the input mode converters 21 connected to the waveguide 20 can be combined into a parabolic mode converter.
- one of the two tapered mode converters The output mode converter 23 and the end mode converter 26 connected to the waveguide 20 can also be combined into a parabolic mode converter.
- the structure of the parabolic mode converter is consistent with the combined structure of the two conical mode converters.
- multiple mode converters are used to ensure that the waveguide width of the wide waveguide 22 is relatively large, thereby reducing the phase error caused by the change of the waveguide width due to the process error.
- the wide waveguides in the adjacent waveguide pipes 200 are parallel to each other, and the waveguide spacing is the same.
- the waveguide spacing is related to the position coordinates of the waveguide unit 2 and the number of antennas in the antenna transmitting unit 3.
- the waveguide spacing is greater than 5 ⁇ m.
- the length difference of the wide waveguide 22 of one of the connecting waveguides 20 in the adjacent waveguide pipes 200 that is in a position directly opposite to each other is the same.
- the length difference of the wide waveguide 22 of one of the connecting waveguides 20 in the adjacent waveguide pipes 200 is adjusted by the waveguide pitch of the wide waveguide 22 of the previous connecting waveguide 20.
- the waveguide length difference of the wide waveguide 22 of the second connecting waveguide 20 in the adjacent waveguide pipes 200 is adjusted by the waveguide distance of the wide waveguide 22 of the first connecting waveguide 20 in the pipe.
- the waveguide distance of the first wide waveguide 22 connected to the waveguide 20 in the adjacent waveguide pipe 200 and the waveguide distance of the adjacent waveguide output by the optical signal output unit 1 Similarly, the waveguide spacing of the wide waveguide 22 of the Nth connecting waveguide 20 in the adjacent waveguide pipe 200 is the same as the spacing of adjacent antennas in the antenna transmitting unit 3. At other positions in the adjacent waveguide pipes 200, the length difference of any wide waveguide 22 connected to the waveguide 20 is adjusted by the waveguide spacing of the wide waveguide 22 of the last connected waveguide 20.
- the direction of the wide waveguide 22 of the previous connecting waveguide 20 in the adjacent waveguide pipe 200 is parallel to the direction of the waveguide output by the optical signal output unit 1, the greater the waveguide pitch of the wide waveguide 22 of the previous connecting waveguide 20 , The length difference of the wide waveguide 22 of the latter connecting waveguide 20 is greater. If the direction of the first wide waveguide 22 connected to the waveguide 20 in the adjacent waveguide pipe 200 is perpendicular to the direction of the waveguide output by the optical signal output unit 1, the greater the waveguide spacing of the previous wide waveguide 22 connected to the waveguide 20, the later The length difference of the wide waveguide 22 connecting the waveguide 20 is smaller.
- the direction of the broad waveguide 22 of the first connecting waveguide 20 is the same as the direction of the waveguide output by the optical signal output unit 1
- the direction of the broad waveguide 22 of the second connecting waveguide 20 is the same as the direction of the waveguide output by the optical signal output unit 1.
- the greater the waveguide spacing of the wide waveguide 22 of the first connecting waveguide 20 is, the greater the length difference of the wide waveguide 22 of the second connecting waveguide 20 will be.
- the end of the first wide waveguide 22 connected to the waveguide 20 closest to the optical signal output unit 1 is located in the same horizontal plane, and the last wide waveguide 22 connected to the waveguide 20 is closest to the antenna transmitting unit 3
- the first connecting waveguide 20 is the connecting waveguide 20 closest to the optical signal output unit 1
- the last connecting waveguide 20 is the connecting waveguide 20 closest to the antenna transmitting unit 3.
- the end of the wide waveguide 22 of the first connecting waveguide 20 closest to the optical signal output unit 1 is located in the same horizontal plane
- the end of the wide waveguide 22 of the Nth connecting waveguide 20 closest to the antenna transmitting unit 3 is located in the same horizontal plane. Located in the same horizontal plane.
- the optical path difference between the adjacent waveguide pipes 200 in the optical phased array may be the ratio of an integer multiple of 360 to the number of antennas, and the total length of the waveguides in the adjacent waveguide pipe 200 transmitted from the optical signal output unit 1 to the antenna transmitting unit 3
- the sum of the differences is the optical path difference. Since the structures of the mode converters and the curved waveguides 24 are completely the same, and there is no difference in waveguide length, the optical path difference of adjacent waveguide pipes 200 in the optical phased array is equal to the width of each connecting waveguide 20 in adjacent waveguide pipes 200 The sum of the length differences of the waveguide 22.
- the optical phased array of the embodiment of the present invention can be used in silicon-based CMOS process processing, which is beneficial to realize a larger-scale antenna array.
- the optical phased array includes an optical signal output unit 41, a waveguide unit 42 and an antenna transmitting unit 43 connected in sequence.
- the optical signal output unit 41 separates and shifts the input light through an optical splitter and a phase shifter, and outputs three optical signals with different phases.
- the waveguide unit 42 includes an initial mode converter 420, a first connection waveguide 421, a curved waveguide 422, a second connection waveguide 423, a curved waveguide 424, a third connection waveguide 425, and an end mode converter 426 connected in sequence.
- the first connecting waveguide 421 includes an input mode converter 4211 and a wide waveguide 4212, an output mode converter 4213 connected in sequence;
- the second connecting waveguide 423 includes an input mode converter 4231, a wide waveguide 4232, an output mode converter 4233 connected in sequence;
- the third connecting waveguide 425 includes an input mode converter 4251, a wide waveguide 4252, and an output mode converter 4253 connected in sequence.
- the input end of the initial mode converter 420 is connected to the optical signal output unit 41, the output end is connected to the input mode converter 4211, the wide waveguide 4212 is connected between the input mode converter 4211 and the output mode converter 4213, and the curved waveguide 422 is connected to Between the output mode converter 4213 and the input mode converter 4231, the wide waveguide 4232 is connected between the input mode converter 4231 and the output mode converter 4233, and the curved waveguide 424 is connected between the output mode converter 4233 and the input mode converter 4251 between.
- the wide waveguide 4252 is connected between the input mode converter 4251 and the output mode converter 4253, the input end of the end mode converter 426 is connected to the output mode converter 4253, and the output end is connected to the antenna transmitting unit 43.
- the waveguide width slowly changes to the first waveguide width w1, and the first waveguide width w1 is preferably the width w0 of a general single-mode waveguide.
- the input mode converter 4211 performs conversion to convert the waveguide width to the second waveguide width w2.
- the wide waveguide 4212 transmits the optical signal with the second waveguide width w2, and then the output mode converter 4213 slowly converts the second waveguide width w2 to the first waveguide width w1.
- a series of waveguides through the curved waveguide 422 are bent to change the direction of the waveguide pipe.
- the first waveguide width w1 is converted into the second waveguide width w2 by the input mode converter 4231, and the wide waveguide 4232 is entered.
- the waveguide spacing of the wide waveguides in adjacent waveguide pipes that are located directly opposite to each other will decrease.
- the waveguide spacing of the wide waveguide 4232 in adjacent waveguide pipes can be adjusted by the length difference of the wide waveguide 4212. Since the waveguide transmission direction of the wide waveguide 4212 is the same as the waveguide direction output by the optical signal output unit 41, the greater the length difference of the wide waveguide 4212 in adjacent waveguide pipes, the larger the waveguide spacing of the wide waveguide 4232 in adjacent waveguide pipes.
- the wide waveguide 4232 After entering the wide waveguide 4232, the wide waveguide 4232 transmits the optical signal with the second waveguide width w2, and then the output mode converter 4233 slowly converts the second waveguide width w2 to the first waveguide width w1, and a series of waveguides bend through the curved waveguide 424, Change the direction of the waveguide pipe, and then convert the first waveguide width w1 to the second waveguide width w2 through the input mode converter 4251, and enter the wide waveguide 4252.
- the waveguide spacing of the wide waveguide 4252 in adjacent waveguide pipes will decrease. Specifically, the waveguide spacing of the wide waveguide 4252 in adjacent waveguide pipes can be adjusted by the length difference of the wide waveguide 4232 in the adjacent waveguide pipes.
- the waveguide transmission direction of the wide waveguide 4232 is the same as the waveguide direction output by the optical signal output unit 41, the greater the length difference of the wide waveguide 4252 in adjacent waveguide pipes, the smaller the waveguide spacing of the wide waveguide 4252 in adjacent waveguide pipes.
- the wide waveguide 4252 After entering the wide waveguide 4252, the wide waveguide 4252 transmits the optical signal with the second waveguide width w2, and then the output mode converter 4253 slowly converts the second waveguide width w2 to the first waveguide width w1. After passing through a series of tapered mode converters of the end mode converter 426, the waveguide width is slowly converted from the first waveguide width w1 to the input waveguide width of the antenna transmitting unit 43.
- the wide waveguides 4212, 4232, and 4252 are straight waveguide transmission parts, and all the wide waveguides with larger widths are used to transmit optical signals.
- the change in the width of the waveguide caused by the process error is compared with that of the wide waveguide.
- the narrow waveguide in the traditional technology is small, so it can reduce the phase error caused by the process error on the change of the waveguide width.
- the curved waveguides 422 and 424 are the transmission parts of the curved guide. Narrow single-mode waveguides are still used to reduce the radius of the curved waveguides, and the narrow curved waveguides are equivalent to a mode filter, which will filter out higher-order modes that may be generated in the wide waveguides. .
- the initial mode converter 420 and the input mode converter 4211 are used to realize the conversion between the waveguide width output by the optical signal output unit 41 and the waveguide width of the wide waveguide 4212, and the input mode converters 4231, 4251 and the output mode converters 4213, 4233 are used. Realize the conversion between the wide waveguide 4212, 4232, 4252 and the curved waveguide 422, 424, and use the output mode converter 4253 and the end mode converter 426 to realize the width of the wide waveguide 4252 and the input end waveguide width of the antenna transmitting unit 43 The conversion can effectively reduce the loss.
- the waveguide spacing of the wide waveguides in positions directly opposite to each other in the adjacent waveguide pipes along the waveguide transmission direction decreases sequentially.
- the waveguide spacing of the wide waveguide 4232 in adjacent waveguide pipes is smaller than the waveguide spacing of the wide waveguide 4212 in adjacent waveguide pipes
- the waveguide spacing of the wide waveguide 4252 in adjacent waveguide pipes is smaller than the waveguide spacing of the wide waveguide 4232 in adjacent waveguide pipes.
- the waveguide spacing of the wide waveguide 4212 in adjacent waveguide pipes is the same as the waveguide spacing output by the optical signal output unit 41
- the waveguide spacing of the wide waveguide 4252 in adjacent waveguide pipes is the same as the antenna spacing of the antenna transmitting unit 43.
- the waveguide spacing of the wide waveguide 4232 in adjacent waveguide pipes is adjusted by the difference in the length of the wide waveguide 4212 in adjacent waveguide pipes.
- the waveguide spacing of the wide waveguide 4252 in adjacent waveguide pipes is adjusted by the length difference of the wide waveguide 4232 in adjacent waveguide pipes.
- the optical path difference between adjacent waveguide pipes in the optical phased array is equal to the sum of the length difference of the wide waveguide 4212, the length difference of the wide waveguide 4232, and the length difference of the wide waveguide 4252 in the adjacent waveguide pipes.
- the optical phased array includes: an optical signal output unit, a waveguide unit, and an antenna transmitting unit; the optical signal output unit is used to output M modulated optical signals, where M is a positive integer;
- the waveguide unit includes M waveguide pipes, each of the waveguide pipes includes at least one connecting waveguide, and the connecting waveguide includes an input mode converter, a wide waveguide, and an output mode converter connected in sequence, and the input mode converter is used to connect
- the narrow waveguide is converted into a wide waveguide
- the output mode converter is used to convert the wide waveguide into a narrow waveguide
- the input end of the input mode converter of one of the connected waveguides is connected to the optical signal output unit
- one of the The output end of the output mode converter connected to the waveguide is connected to the antenna transmitting unit
- the antenna transmitting unit is connected to the waveguide unit, and is used for transmitting M optical signals transmitted by the waveguide unit.
- the embodiment of the invention also discloses a laser radar, which includes an optical phased array, a light receiving unit and a distance measuring unit.
- the optical phased array is used to emit laser light
- the light receiving unit is used to receive the laser signal returned by the object
- the ranging unit is used to perform distance measurement based on the laser signal received by the I receiving unit.
- the specific structure and working principle of the optical phased array in the embodiment of the present invention are the same as the optical phased array in the foregoing embodiment, and will not be repeated here.
- the embodiment of the invention also discloses a smart device, including a lidar.
- a smart device including a lidar.
- the specific structure and working principle of the lidar are the same as the lidar in the foregoing embodiment, and will not be repeated here.
- Fig. 4 shows a schematic flowchart of a method for improving a phase error according to an embodiment of the present invention.
- the phase error improvement method is applied to the optical phased array in the foregoing embodiment, as shown in FIG. 4, including:
- Step S10 Output M modulated optical signals, where M is a positive integer.
- the input light is split and phase-shifted through the splitter and the phase shifter to output M-channel modulated optical signals.
- the optical splitter may first split the input light, and then the phase shifter may phase shift the light split by the optical splitter to obtain and output multiple optical signals with different phases.
- the splitter and the phase shifter may also be alternately arranged, that is, the splitting and phase shifting of the input light are performed alternately, and finally multiple optical signals of different phases are output.
- Step S11 Convert the first narrow waveguide mode for outputting the M-channel modulated optical signal into a wide waveguide.
- the M-channel modulated optical signal corresponds to the M-channel waveguide pipe.
- the waveguide width mode of the first narrow waveguide for outputting the M-channel modulated optical signal is converted into the second waveguide width w2 of the wide waveguide by at least one tapered mode converter in each waveguide pipe.
- the second waveguide width w2 is greater than the waveguide width of the first narrow waveguide for outputting the M-channel modulated optical signal.
- a tapered mode converter can be used in each waveguide pipe to slowly convert the waveguide width of the first narrow waveguide for outputting the M-channel modulated optical signal to the waveguide width w of the single-mode waveguide. , And then slowly convert the waveguide width w0 of the single-mode waveguide to the second waveguide width w2 of the wide waveguide by another tapered mode converter.
- Step S12 Use at least one of the wide waveguides to transmit the optical signal.
- the wide waveguide is the straight waveguide transmission part, and the M-channel modulated optical signal is transmitted with the second waveguide width w2.
- the second waveguide width w2 is generally 800 nm to 1 ⁇ m.
- Step S13 Convert the wide waveguide into a second narrow waveguide for transmitting the optical signal.
- the second waveguide width of the wide waveguide is converted into the waveguide width of the second narrow waveguide for transmitting the optical signal by at least one tapered mode converter.
- the second waveguide width w2 is greater than the waveguide width of the second narrow waveguide for transmitting the optical signal.
- the second waveguide width w2 of the wide waveguide can be slowly converted into the waveguide width w0 of the single-mode waveguide by a tapered mode converter, and then another tapered mode The converter slowly converts the waveguide width w0 of the single-mode waveguide into the waveguide width of the second narrow waveguide for transmitting the optical signal.
- Step S14 Transmit the optical signal.
- the phase error improvement method further includes: converting the wide waveguide mode into a bent waveguide; applying the bent waveguide to bend a waveguide pipe; and converting the bent waveguide mode into the wide waveguide.
- the second waveguide width w2 of the wide waveguide is slowly mode converted into the first waveguide width w1 of the curved waveguide by a tapered mode converter.
- the curved waveguide bends the waveguide pipe with the first waveguide width w1 and transmits the optical signal, and then the first waveguide width w1 of the curved waveguide is slowly converted into the second waveguide width w2 of the wide waveguide by another tapered mode converter.
- the first waveguide width w1 of the curved waveguide is preferably the waveguide width w0 of the single-mode waveguide.
- the curved waveguide is preferably bent 90 degrees to the waveguide tube.
- the waveguide width of a curved waveguide is generally 150 nm to 500 nm.
- the narrow waveguide is still used in the transmission part of the curved waveguide to reduce the bending radius of the narrow waveguide, and the narrow waveguide is equivalent to a mode filter, which will filter out the higher-order modes that may be generated in the wide waveguide.
- the connection between the wide straight waveguide transmission part and the narrow curved waveguide transmission part through a mode converter can effectively reduce the loss.
- the optical phased array includes: an optical signal output unit, a waveguide unit, and an antenna transmitting unit; the optical signal output unit is used to output M modulated optical signals, where M is a positive integer;
- the waveguide unit includes M waveguide pipes, each of the waveguide pipes includes at least one connecting waveguide, the connecting waveguide includes an input mode converter, a wide waveguide, and an output mode converter connected in sequence, and one of the connecting waveguides
- the input end of the input mode converter is connected to the optical signal output unit, and the output end of one of the output mode converters connected to the waveguide is connected to the antenna transmitting unit;
- the antenna transmitting unit is connected to the waveguide unit for To transmit M optical signals transmitted by the waveguide unit.
- modules or units or components in the embodiments can be combined into one module or unit or component, and in addition, they can be divided into multiple sub-modules or sub-units or sub-components. Except that at least some of such features and/or processes or units are mutually exclusive, any combination can be used to compare all features disclosed in this specification (including the accompanying claims, abstract and drawings) and any method or methods disclosed in this manner or All the processes or units of the equipment are combined. Unless expressly stated otherwise, each feature disclosed in this specification (including the accompanying claims, abstract and drawings) may be replaced by an alternative feature providing the same, equivalent or similar purpose.
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Abstract
Description
Claims (11)
- 一种光学相控阵,其特征在于,包括光信号输出单元、波导单元和天线发射单元;所述光信号输出单元,用于输出M路调制后的光信号,其中M为正整数;所述波导单元,包括M路波导管道,每路所述波导管道包括至少一个连接波导,所述连接波导包括依次连接的输入模式转换器、宽波导和输出模式转换器,所述输入模式转换器用于将窄波导转换为宽波导,所述输出模式转换器用于将宽波导转换为窄波导,其中一个所述连接波导的所述输入模式转换器的输入端连接所述光信号输出单元,其中一个所述连接波导的所述输出模式转换器的输出端连接所述天线发射单元;天线发射单元,与所述波导单元连接,用于发射所述波导单元传输的M路光信号。
- 如权利要求1所述的光学相控阵,其特征在于,每路所述波导管道还包括:至少一个弯曲波导,所述弯曲波导用于连接其中一个所述连接波导的所述输出模式转换器和相邻的所述连接波导的所述输入模式转换器,将所述波导管道进行弯曲。
- 如权利要求1所述的光学相控阵,其特征在于,每路所述波导管道进一步包括:初始模式转换器,位于所述波导管道的初始端,所述初始模式转换器的输入端和所述光信号输出单元连接,输出端和其中一个所述连接波导的所述输入模式转换器连接。
- 如权利要求1或3所述的光学相控阵,其特征在于,每路所述波导管道进一步包括:末端模式转换器,位于所述波导管道的末端,所述末端模式转换器的输入端和其中一个所述连接波导的所述输出模式转换器连接,输出端和所述天线发射单元连接。
- 如权利要求2-4中任意一项所述的光学相控阵,其特征在于,至少一个所述连接波导的所述输入模式转换器之间结构相同;至少一个所述连接波导的所述输出模式转换器之间结构相同;所述至少一个弯曲波导之间的结构相同。
- 如权利要求5所述的光学相控阵,其特征在于,所述M路波导管道中,相邻波导管道中处于相互正对位置的其中一个所述连接波导的所述宽波导之间 相互平行,波导间距相同。
- 如权利要求1所述的光学相控阵,其特征在于,所述M路波导管道中,相邻波导管道中处于相互正对位置的其中一个所述连接波导的所述宽波导的长度差相同。
- 一种激光雷达,其特征在于,包括如权利要求1-7中任一项所述的光学相控阵、光接收单元以及测距单元。
- 一种智能设备,其特征在于,包括如权利要求8所述的激光雷达。
- 一种相位误差改善方法,其特征在于,应用于如权利要求1-7中任一项所述的光学相控阵,方法包括:输出M路调制后的光信号,其中M为正整数;将用于输出M路调制后的光信号的第一窄波导模式转换为宽波导;应用至少一个所述宽波导传输所述光信号;将所述宽波导模式转换为用于发射所述光信号的第二窄波导;发射所述光信号。
- 如权利要求10所述的方法,其特征在于,所述方法还包括:将所述宽波导模式转换为弯曲波导;应用所述弯曲波导对波导管道进行弯曲;将所述弯曲波导模式转换为所述宽波导。
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CN201980002797.XA CN110741280B (zh) | 2019-05-08 | 2019-05-08 | 光学相控阵及其相位误差改善方法、激光雷达、智能设备 |
US17/520,601 US11953621B2 (en) | 2019-05-08 | 2021-11-05 | Optical phased array, method for improving reducing a phase error thereof, LiDAR, and intelligent apparatus |
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JP2015169766A (ja) * | 2014-03-06 | 2015-09-28 | 日本電信電話株式会社 | 偏波回転回路 |
CN107533137A (zh) * | 2015-01-20 | 2018-01-02 | 迪吉伦斯公司 | 全息波导激光雷达 |
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US20220057488A1 (en) | 2022-02-24 |
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