WO2020115110A1 - Machine d'usinage laser pourvue d'un scanner à oscillation - Google Patents

Machine d'usinage laser pourvue d'un scanner à oscillation Download PDF

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Publication number
WO2020115110A1
WO2020115110A1 PCT/EP2019/083625 EP2019083625W WO2020115110A1 WO 2020115110 A1 WO2020115110 A1 WO 2020115110A1 EP 2019083625 W EP2019083625 W EP 2019083625W WO 2020115110 A1 WO2020115110 A1 WO 2020115110A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser beam
axis
optical fiber
workpiece
laser
Prior art date
Application number
PCT/EP2019/083625
Other languages
German (de)
English (en)
Inventor
Martin Huonker
Original Assignee
Trumpf Laser Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Laser Gmbh filed Critical Trumpf Laser Gmbh
Priority to CN201980081028.3A priority Critical patent/CN113165110A/zh
Publication of WO2020115110A1 publication Critical patent/WO2020115110A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Definitions

  • Laser processing machine with a wobble scanner The invention relates to a laser processing machine for processing a
  • a laser beam comprising a laser beam generator for generating the laser beam, an optical fiber into which the laser beam is coupled, collimation optics for collimation of the laser beam emerging divergently from the optical fiber and a mirror scanner for one- or two-dimensional deflection of the laser beam in the direction of the workpiece.
  • Such a laser processing machine with a mirror scanner is known for example from DE 10 2013 110 523 B3.
  • a laser focus oscillating transversely to the direction of advance has proven to be advantageous in some applications, in particular also when welding thick sheet metal, where a gap has to be bridged, or when a larger connecting cross-section is required for overlap welding.
  • a high-frequency mirror scanner is arranged in front of the low-frequency mirror scanner, which deflects the collimated laser beam in one or two dimensions towards the workpiece with an oscillation frequency of maximum 400 Hz , which deflects the collimated or focused laser beam in one or two dimensions with an oscillation frequency between 400 Hz and 5000 Hz.
  • This object is achieved according to the invention by a deflection unit arranged between the fiber end of the optical fiber and the collimating optics, which deflects the beam axis of the divergent laser beam - one or two dimensions - oscillatingly offset in parallel, or by a displacement unit which turns the fiber end of the optical fiber on or off two-dimensionally oscillating offset parallel to the collimation optics.
  • the wobble movement does not take place in the collimated laser beam directly in front of focusing optics, but in the divergent laser beam immediately, i.e. a few mm after the end of the fiber, where the beam diameter is still significantly smaller than the collimated laser beam in front of the focusing optics.
  • the direction of the laser beam cannot simply be changed in the divergent laser beam after the optical fiber with a scanner mirror, but the beam axis must be shifted in parallel in order to achieve a lateral shift of the laser beam in the working focus.
  • the wobble movement takes place in the first variant of the invention by means of a deflection unit which deflects the beam axis of the divergent laser beam in one or two dimensions with an oscillating offset parallel to the actual beam axis, or in the second variant of the invention by means of a displacement unit which oscillates the fiber end of the optical fiber in one or two dimensions displaced parallel to the collimation optics. In the latter case, the fiber end formed on the workpiece is laterally displaced. In both variants of the invention, the oscillation of the deflection or displacement unit is greater than the scanning frequency of the downstream mirror scanner.
  • the deflection unit for a one-dimensional deflection has a plane-parallel plate arranged transversely, that is to say obliquely or at right angles, to the beam axis in the beam path of the divergent laser beam, said plate having an axis running obliquely, in particular at right angles to the beam axis of the divergent laser beam rotates.
  • This planpa parallel plate can for example be mounted on the axis of a conventional scanner engine.
  • the plane-parallel plate Due to the lateral offset that a light beam experiences when it passes through a plane-parallel plate that is at an angle in the beam, an optical parallel shift of the beam axis is achieved, which is transferred to the workpiece with the magnification ratio of the subsequent optics.
  • the plane-parallel plate is set into a torsional vibration, the laser beam experiences a corresponding (one-dimensional) lateral vibration movement in the area of the laser focus. Since the necessary plane-parallel plate, provided that it is positioned close to the end of the fiber, can be very small, a very high scanning frequency can be achieved in conjunction with a conventional scanner motor.
  • the axis is advantageously mounted such that it can be rotated azimuthally about the beam axis, so that the position of the scanning frequency or the direction of the scanning movement on the workpiece can be readjusted, which is particularly the case with non-linear ones
  • the deflection unit for an oscillating two-dimensional parallel offset of the beam axis can have two plane-parallel plates arranged one behind the other and each obliquely arranged in the beam path of the divergent laser beam, each of which oscillates or rotates about mutually perpendicular axes, each of which is inclined, in particular at right angles, to the beam axis of the divergent laser beam.
  • the displacement unit has at least one actuator acting in the displacement direction, to which the fiber end of the optical fiber is attached.
  • the actuator can be a piezo actuator, for example.
  • two actuators each acting at right angles to one another, are provided in order to bring about a two-dimensional parallel offset of the fiber end of the optical fiber with respect to the axis of the divergent laser beam.
  • FIG. 1 shows a laser processing machine according to the invention with a deflection unit arranged in the di-divergent laser beam for generating an oscillating one-dimensional parallel offset of the beam axis of the divergent laser beam;
  • FIG. 2 shows a detailed view of the deflection unit shown in FIG. 1;
  • Fig. 3a, 3b the laser beam deflected by the deflection unit of FIG. 2 on the
  • FIG. 4 shows a deflection unit for generating an oscillating two-dimensional parallel offset of the beam axis of the divergent laser beam in a detailed view analogous to FIG. 2;
  • Fig. 5a, 5b the laser beam deflected by the deflection unit of FIG. 4 on the
  • FIG. 6 shows a shifting unit for generating an oscillating one-dimensional parallel offset of the beam axis of the divergent laser beam in a detailed view analogous to FIG. 2.
  • the laser processing machine 1 shown in perspective in FIG. 1 is used for Processing of a workpiece 2 by means of a laser beam 3 and comprises a laser beam generator 4 for generating the laser beam 3, a transport optical fiber 5, into which the laser beam 3 is coupled, a collimation optics 6 for collimation of the laser beam emerging divergent from the fiber end 7 of the optical fiber 5 3, focusing optics 8 for focusing the laser beam 3 in the direction of the workpiece 2, and, for example, a two-axis mirror scanner 9 for two-dimensional deflection of the laser beam 3.
  • the laser processing machine 1 also has a deflection unit 10 which is arranged between the fiber end 7 of the optical fiber 5 and the collimation optics 6 and which deflects the beam axis A of the divergent laser beam 3 in a one-dimensionally osillating manner with a parallel offset.
  • the deflection unit 10 shown enlarged in FIG. 2, has an inclined plane-parallel plate 11 in the beam path of the divergent laser beam 3, which extends around an axis 12 that runs obliquely, at right angles in FIG. 1, to the beam axis A of the divergent laser beam 3 swings or rotates completely (double arrow direction 13).
  • the plane-parallel plate 11 should have the highest possible refractive index with the lowest possible absorption of the laser light in order to achieve the highest possible beam offset, and can e.g. made of sapphire.
  • the beam offset x of the offset beam axis A 'as a function of the angle of incidence a of the beam axis A on the oscillating or rotating plane-parallel plate 11 is calculated from the following equation:
  • n refractive index of the plane-parallel plate 11.
  • the laser beam 3 Due to the torsional vibration of the plane-parallel plate 11 about the axis 12, the laser beam 3 experiences a corresponding linear (one-dimensional) lateral vibration movement in the area of the laser focus, that is to say, for example, on the surface of the workpiece 2. Since the plane-parallel plate 11, because it is positioned close (a few mm) to the fiber end 7, can be very small, a very high torsional vibration or scanning frequency can be achieved in connection with a conventional scanner motor.
  • the laser beam 3 incident in the Z direction becomes in accordance with the oscillation of the plane-parallel plate 11 about the axis 12 in Y direction, that is one dimensionally perpendicular to the direction of incidence of the laser beam 3, deflects in an oscillating manner.
  • 3b shows the laser beam 3 deflected by the deflection unit 10 on the workpiece surface with an additional feed movement v (v> 0) in the X direction between the workpiece 2 and the laser beam 3, which results, for example, in a zigzag curve 14 of the laser beam 3 on the workpiece surface .
  • the deflection unit 10 For an oscillating two-dimensional parallel offset of the beam axis A, the deflection unit 10, as shown in FIG. 4, has two plane-parallel plates 11a, 11b arranged one behind the other and in each case obliquely arranged in the beam path of the divergent laser beam 3.
  • the plane-parallel plates 11 a, 11 b each swing about mutually perpendicular axes 12a, 12b, each of which runs obliquely, at right angles in FIG. 3, to the beam axis A of the divergent laser beam 3.
  • the laser beam 3 experiences a corresponding two-dimensional lateral oscillating movement in the region of the laser focus, ie on the surface of the workpiece 2. Since the plane-parallel plates 11 a, 11 b can be very small because they are positioned close (a few mm) to the fiber end 7, a very high torsional vibration or scanning frequency can be achieved in connection with a conventional scanner motor.
  • the incident laser beam 3 in the Z direction is deflected in accordance with the oscillations of the plane-parallel plates 11a, 11b about the axis 12a, 12b in the X and Y directions, that is two-dimensionally perpendicular to the direction of incidence of the laser beam 3 .
  • 5b shows the laser beam 3 deflected by the deflection unit 10 of FIG. 4 on the workpiece surface with an additional feed movement v (v> 0) in the X direction between the workpiece 2 and the laser beam 3, for example in a cycloidal trajectory of the laser beam
  • FIG. 6 shows a displacement unit 20 for generating an oscillating one-dimensional parallel offset of the beam axis A of the divergent laser beam 3 with respect to the collimation optics 6.
  • the displacement unit 20 has an actuator 21 acting at right angles to the beam axis A in the displacement direction 22, on which the fiber end 7 the optical fiber 5 is attached.
  • Corresponding linear (one dimensional) lateral oscillating movement, that is to say one-dimensionally perpendicular to the direction of incidence of the laser beam 3 is carried out.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne une machine d'usinage laser (1) pour l'usinage d'une pièce (2) au moyen d'un faisceau laser (3). La machine comprend un générateur (4) de faisceau laser destiné à générer le faisceau laser (3), une fibre optique (5), dans laquelle le faisceau laser (3) est injecté, une optique de collimation (6) pour la collimation du faisceau laser (3) sortant de manière divergente de la fibre optique (5), un scanner à miroir (9) pour la déviation uni- ou bidimensionnelle du faisceau laser (3) en direction de la pièce (2), ainsi que, selon l'invention, une unité de déviation (10) qui est disposée entre l'extrémité (7) de la fibre optique (5) et l'optique de collimation (6), et qui dévie l'axe du faisceau laser (3) divergent de manière uni- ou bidimensionnelle, oscillante, décalée parallèlement, ou une unité de déplacement (20), laquelle déplace l'extrémité (7) de la fibre optique (5) de manière uni- ou bidimensionnelle, oscillante, décalée parallèlement, par rapport à l'optique de collimation (6).
PCT/EP2019/083625 2018-12-07 2019-12-04 Machine d'usinage laser pourvue d'un scanner à oscillation WO2020115110A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201980081028.3A CN113165110A (zh) 2018-12-07 2019-12-04 具有摇摆扫描器的激光加工机

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018221203.1A DE102018221203A1 (de) 2018-12-07 2018-12-07 Laserbearbeitungsmaschine mit einem Wobbelscanner
DE102018221203.1 2018-12-07

Publications (1)

Publication Number Publication Date
WO2020115110A1 true WO2020115110A1 (fr) 2020-06-11

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PCT/EP2019/083625 WO2020115110A1 (fr) 2018-12-07 2019-12-04 Machine d'usinage laser pourvue d'un scanner à oscillation

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CN (1) CN113165110A (fr)
DE (1) DE102018221203A1 (fr)
WO (1) WO2020115110A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022107324B4 (de) 2022-03-29 2024-03-28 Precitec Gmbh & Co. Kg Laserbearbeitungskopf mit Auslenkvorrichtungen
CN115079404B (zh) * 2022-06-01 2024-04-02 武汉欧毅光学有限公司 一种具备双维扫描功能的激光振镜扫描系统
CN115889978B (zh) * 2023-03-09 2023-05-09 深圳市睿达科技有限公司 一种激光焊接3d螺旋式光斑控制方法及装置

Citations (5)

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Publication number Priority date Publication date Assignee Title
US5247174A (en) * 1990-05-07 1993-09-21 Scitex Corporation Ltd. Laser scanning apparatus having a scanning beam and a reference beam
DE102010049460A1 (de) * 2010-09-13 2012-03-15 Laser- Und Medizin-Technologie Gmbh, Berlin Trepanieroptik
US20120273472A1 (en) 2010-10-22 2012-11-01 Electro Scientific Industries, Inc. Laser processing systems and methods for beam dithering and skiving
DE102013110523B4 (de) 2013-09-24 2016-08-18 Scansonic Mi Gmbh Vorrichtung und Verfahren zum Fügen von Werkstücken mittels Laserstrahls
DE102017201495A1 (de) * 2017-01-31 2018-08-02 Robert Bosch Gmbh Laserschweißverfahren zum Erzeugen einer Schweißnaht auf einer Oberfläche einer Materialanordnung; Laserschweißvorrichtung

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DD243123A1 (de) * 1985-12-02 1987-02-18 Zeiss Jena Veb Carl Anordnung zur einkopplung eines laserstrahles in eine glasfaser
CN103203541B (zh) * 2013-02-04 2015-05-13 张立国 一种激光加工装置
EP3209453A1 (fr) * 2014-10-20 2017-08-30 Bystronic Laser AG Tête d'usinage pour machine de traitement au laser et machine de traitement au laser
JPWO2017130351A1 (ja) * 2016-01-28 2018-10-04 オリンパス株式会社 光ファイバ走査装置、光走査型内視鏡、および内視鏡システム
JP6484204B2 (ja) * 2016-09-09 2019-03-13 ファナック株式会社 ガルバノスキャナ
FR3056129B1 (fr) * 2016-09-20 2019-07-19 Renault S.A.S Procede de guidage d'un faisceau laser en deplacement rotatif, et dispositif de guidage associe
CN107138862B (zh) * 2017-06-20 2023-10-20 深圳市韵腾激光科技有限公司 一种激光旋转切割装置及方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5247174A (en) * 1990-05-07 1993-09-21 Scitex Corporation Ltd. Laser scanning apparatus having a scanning beam and a reference beam
DE102010049460A1 (de) * 2010-09-13 2012-03-15 Laser- Und Medizin-Technologie Gmbh, Berlin Trepanieroptik
US20120273472A1 (en) 2010-10-22 2012-11-01 Electro Scientific Industries, Inc. Laser processing systems and methods for beam dithering and skiving
DE102013110523B4 (de) 2013-09-24 2016-08-18 Scansonic Mi Gmbh Vorrichtung und Verfahren zum Fügen von Werkstücken mittels Laserstrahls
DE102017201495A1 (de) * 2017-01-31 2018-08-02 Robert Bosch Gmbh Laserschweißverfahren zum Erzeugen einer Schweißnaht auf einer Oberfläche einer Materialanordnung; Laserschweißvorrichtung

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CN113165110A (zh) 2021-07-23
DE102018221203A1 (de) 2020-06-10

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