WO2020094160A1 - 微透镜中心仪 - Google Patents

微透镜中心仪 Download PDF

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Publication number
WO2020094160A1
WO2020094160A1 PCT/CN2020/070195 CN2020070195W WO2020094160A1 WO 2020094160 A1 WO2020094160 A1 WO 2020094160A1 CN 2020070195 W CN2020070195 W CN 2020070195W WO 2020094160 A1 WO2020094160 A1 WO 2020094160A1
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WIPO (PCT)
Prior art keywords
microlens
support ring
lens
self
adjustment mechanism
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PCT/CN2020/070195
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English (en)
French (fr)
Inventor
张大伦
王娟
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茂莱（南京）仪器有限公司
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Publication of WO2020094160A1 publication Critical patent/WO2020094160A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G01M11/0214—Details of devices holding the object to be tested

Definitions

  • the invention relates to a reflective central instrument used for measuring the center error of a microlens, which belongs to the technical field of optical measuring instruments.
  • the lens center error is an important optical parameter.
  • the presence of center deviation destroys the coaxiality of the optical system and affects the imaging quality of the optical system.
  • Reflective center instrument directly measures the inclination angle or sphere center deviation of each spherical surface of the lens. Compared with the transmissive central instrument, it not only conforms to the definition of the national standard, but also improves the measurement accuracy, so it is gradually popularized and applied.
  • the technical problem to be solved by the present invention is to provide a microlens central instrument, which can measure the central error of microlenses (diameter 1 to 3 mm) and satisfy the central error measurement of microlenses of smaller size
  • the test process is simple, and it can be adapted to the measurement of microlenses of different sizes at the same time with minor adjustments.
  • the technical solutions adopted by the present invention are:
  • Microlens central instrument including a base and a self-centering rotary component fixed on the base, an adjustment mechanism for the eccentricity of the lens outer contour and a self-collimating microscope; also includes a vacuum suction device;
  • the self-centering rotary component includes dense beads Precision rotary shaft system, the upper four-dimensional adjustment mechanism fixed on the dense bead precision rotary shaft system and the micro lens support ring fixed on the upper four-dimensional adjustment mechanism, the micro lens support ring and the dense bead precision rotary shaft system are coaxially arranged
  • the microlens support ring is a hollow cavity, and the microlens support ring is connected to the vacuum suction device through a vacuum suction tube; the self-collimating microscope is connected to an external computer (display device) through a cable.
  • the micro lens supporting ring includes a horizontal portion and a vertical protrusion, the upper end surface of the vertical protrusion is curved, and the micro lens to be tested is placed on the upper end surface of the vertical protrusion.
  • the self-centering rotary component further includes a lower four-dimensional adjustment mechanism located below the dense bead type precision rotary shaft system.
  • the adjustment mechanism for the eccentricity of the outer contour of the lens includes an adjustment part, the adjustment part includes a screw and a jack at the end of the screw, the screw jacket has a sliding sleeve connected to the screw through internal and external threads, and the jack is relatively slipped by rotating the screw The sleeve moves forward or backward horizontally, and the jack is located on the side of the microlens to be tested.
  • the self-collimating microscope includes a CCD display component and can transmit the display image to an external computer.
  • the illumination system includes an internal illumination device used for the autocollimating microscope system and an external illumination device used for image method to adjust the outer contour of the lens.
  • the illumination system is used for the eccentric adjustment of the outer contour of the lens.
  • the self-collimating microscope is fixed on the elevating mechanism.
  • the elevating mechanism adjusts the distance of the self-collimating microscope relative to the microlens to be measured through the grating ruler thereon.
  • the center of the outer circle of the microlens to be measured is automatically centered through the evacuated support ring, and the inner circle center C2 can be measured only by adjusting the outline of the lens outer circle by the image method.
  • the circle can be set on the display screen according to the drawing tolerance
  • the boundary, the cross image is judged as qualified in the circle; compared with the existing reflective central instrument, the central instrument of the present invention simplifies the measurement steps, improves the test time of the single lens, and the test process is non-contact measurement, which will not hurt
  • the outer circle of the lens there is no slewing movement between the lower spherical surface and the support ring, only a slight tilt, and the lens spherical surface will not be scratched when the support surface is smooth, avoiding damage to the microlens; at the same time, by modifying the size of the support ring and The stroke of the lower four-dimensional adjustment mechanism, the central instrument of the present invention can also be adapted to the measurement of microlenses of different sizes.
  • FIG. 1 is a schematic structural diagram of a microlens center instrument of the present invention
  • FIG. 2 is an enlarged view of the structure of the self-centering rotary part of the microlens center instrument of the present invention
  • Figure 3 is the selection table of the reference axis in clause 4.1 of the national standard GB / T 7242-2010 lens center deviation;
  • Figure 4 is a schematic diagram of the ISO 10110-6 reference axis labeling
  • FIG. 5 is a schematic diagram of the outer circle contour of the micro lens on the support ring is not eccentric
  • FIG. 6 is a top view of the microlens of FIG. 5, or an image seen on a display device;
  • FIG. 7 is a schematic diagram of the eccentricity of the outer circle contour of the micro lens on the support ring
  • FIG. 8 is a top view of the microlens of FIG. 7, or an image seen on a display device;
  • Fig. 9 is a plan view of an adjustment portion in an adjustment mechanism for decentering the outer circle of the lens.
  • the testing principle of the microlens center instrument of the present invention for microlenses is based on the following international standards: According to the national standard GB / T 7242-2010 Lens Center Deviation Clause 4.1 The selection of the reference axis Table 1 Example 2 ( Fig. 3), taking the line between the center P of the intersection of the lens edge surface and the optical surface and the spherical center C 1 of the optical surface as the reference axis. At the same time, the ISO 10110-6 reference axis has the same label ( Figure 4).
  • the theoretical basis of the test is: the line between the midpoint P of the outer circle and the spherical center C 1 is selected as the reference axis, and then the deviation of the spherical center of the inner spherical center C 2 is the lens center error.
  • the microlens center instrument of the invention adopts this principle to measure the lens center error.
  • the microlens center instrument of the present invention includes a base 12 and a self-centering rotary component fixed on the base 12, an adjustment mechanism 9 for the eccentricity of the outer contour of the lens, and a self-collimating microscope 1; Vacuum suction device 8; self-centering rotary parts include dense-bead type precision rotary shaft system 4, upper four-dimensional adjustment mechanism 51 fixed on the dense bead type precision rotary shaft system 4, microlens support fixed on the upper four-dimensional adjustment mechanism 51
  • the ring 6 and the lower four-dimensional adjustment mechanism 52 located below the dense bead type precision rotary shaft system 4, the microlens support ring 6 and the dense bead type precision rotary shaft system 4 are coaxially arranged;
  • the microlens support ring 6 is a hollow cavity (in a hollow shape) Tubular structure), the microlens support ring 6 includes a horizontal portion 62 and a vertical protrusion 61, the upper end surface of the vertical protrusion 61 is curved, the
  • the vacuum suction device 8 ensures the suction positioning of the support ring 6 under the spherical surface of the microlens 10 to be measured during the rotation process; the self-collimating microscope 8 passes the cable and an external computer ( Display device) Connected, it can transfer data (image data) to an external computer for display.
  • the dense-bead type precision rotary shaft system 4 has a rotary accuracy of ⁇ 0.001mm.
  • An upper four-dimensional adjustment mechanism 51 is fixed to the dense bead type precision rotary shaft system 4, and a microlens support ring 6 is fixed to the upper four-dimensional adjustment mechanism 51.
  • the upper four-dimensional adjustment mechanism (XYZ ⁇ four-dimensional adjustment platform) 51 includes a two-dimensional tilt table and a two-dimensional translation table.
  • the upper four-dimensional adjustment mechanism 51 can horizontally and tilt adjust the microlens support ring 6 fixed on it through a two-dimensional tilting table and a two-dimensional translation table.
  • the precision rotary shaft system is 4 coaxial.
  • the dense bead type precision rotating shaft system 4, the upper four-dimensional adjustment mechanism 51 and the microlens support ring 6 constitute a self-centering device for the lower spherical surface of the microlens.
  • the dense bead type precision rotary shaft system 4 and the micro lens support ring 6 are coaxial, and this axis is used as the theoretical reference axis for the test.
  • the dense bead type precision rotary shaft system 4 is fixed on the lower four-dimensional adjustment mechanism 52, and the lower four-dimensional adjustment mechanism 52 can realize the horizontal and tilt adjustment of the entire spherical micro-lens self-centering device.
  • the adjustment mechanism 9 for the eccentricity of the lens outer contour includes an adjustment portion including a screw 92 and a plunger 91 located at the end of the screw 92.
  • the screw 92 has a sliding sleeve 93 connected to the screw 92 through internal and external threads.
  • the jack 91 moves horizontally forward or backward relative to the sliding sleeve 93, and the jack 91 is located on the side of the microlens 10 to be measured.
  • the central instrument of the present invention further includes a self-collimating microscope 1, which is located above the spherical self-centering device under the microlens.
  • the self-collimating microscope 1 displays and measures the microlens 10 to be measured on the support ring 6.
  • the invention also includes an elevating mechanism 2, the autocollimating microscope 1 is fixed on the elevating mechanism 2, the elevating mechanism 2 is fixed on the base 12 through the support frame 11, and the elevating mechanism 2 faces the autocollimating microscope 1 through the grating ruler on it
  • the distance of the micrometer lens 10 is coarsely and finely adjusted to realize the lifting and lowering of the self-collimating microscope 1, and the imaging effect can be adjusted by lifting and lowering the self-collimating microscope 1.
  • the central instrument of the present invention further includes an illumination system, which includes an internal illumination device 71 for the system of the autocollimating microscope 1 and an external illumination device 72 for adjusting the outer circular contour of the lens by the imaging method.
  • the internal illumination device 71 is located in the autocollimating microscope 1
  • the external illuminator 72 is used to see the outer contour of the microlens, and the external illuminator 72 is used to adjust the eccentricity of the outer contour of the lens.
  • the structure of the support ring 6 is shown in FIG. 5, the A ring surface and the B ring surface are coaxial, first place parallel flat glass on the B surface, the collimated microscope 1 sees the cross image in parallel light, and when the rotary shaft 41 rotates, adjust three
  • the axial screw immobilizes the cross image, remove the flat glass, focus the light of the collimating microscope 1 to look at the edge of the B surface, adjust the four radial screws, and rotate the cross image immobile one turn, indicating that the support ring 6 axis and the dense bead type precision
  • the rotary shaft system is 4 coaxial (the axis is the rotary axis).
  • the lower spherical surface of the microlens 10 to be tested when the lower spherical surface of the microlens 10 to be tested is in contact with the upper end surface of the support ring 6, the lower spherical spherical center C1 falls on the axis of rotation.
  • the lower spherical surface of the microlens 10 to be tested can be closely attached to the support ring 6, and the automatic centering of the microlens 10 to be tested (ie, the lower spherical sphere center C1 is located on the axis of rotation) can be achieved through the vacuum suction device 8.
  • the illumination 71 in the autocollimating microscope 1 is used to find a cross-reflected image (FIG. 4).
  • the self-collimating microscope 1 becomes a general microscope.
  • the two-dimensional translation stage of the lower four-dimensional adjustment mechanism 52 is translated, and the microscope is raised and lowered to adjust the external illumination device 72 to see clearly
  • the outer contour of the microlens, rotate the rotary shaft 41, and see the contour is eccentric (as shown in Figure 7, the outer contour of the microlens is eccentric), you can fine-tune the adjustment mechanism 9 through the lens outer contour eccentricity, so that the outer circle and back
  • the axis of rotation is coaxial (as shown in Figure 5, the outer circle of the microlens is coaxial with the axis of rotation).
  • the lifting mechanism 2 is a cross-roller linear guide with a grating digital display reading and a stroke of 300mm.
  • the top handwheel is coarsely adjusted, and there is a side top fine adjustment on the right side of the middle.
  • the traditional reflective central instrument measures the center error of a single lens.
  • the lower spherical surface is first tilted so that the center of the sphere is coaxial with the rotation axis, and then the outer circle of the lens is hit with a dial indicator, and the lens is translated coaxially (because the thin lens side is thin, this method Not applicable), after repeated confirmation several times, the spherical center deviation is measured, generally it takes 15-20 minutes per block.
  • the C 1 is automatically centered, and the C 2 can be measured only by finely adjusting the outer circle by the image method.
  • the circular boundary can be set on the display screen according to the tolerance of the drawing. The cross image is judged as qualified in the circle.
  • the batch lens measures 1 minute / piece; at the same time, the non-contact measurement will not hurt the outer circle, the lower spherical surface and the support There is no slewing motion between the rings, only a slight tilt, and the spherical surface will not be scratched when the support surface is smooth.
  • the measurement accuracy of the invention can reach 3 ⁇ m.
  • the diameter of the microlens 10 to be tested is 1 to 3 mm.
  • the central instrument of the present invention can measure microlenses with a diameter of 1 to 200 mm.
  • the size of the support ring 6 and the stroke of the lower four-dimensional adjustment mechanism 52 are appropriately modified.
  • the shape error (roundness and flatness) of the support ring 6 and the position error (coaxiality and perpendicularity) with respect to the main axis of the rotary shaft 41 are important aspects that affect the accuracy of the instrument, especially for the tiny lens.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Lens Barrels (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

一种微透镜中心仪，包括底座(12)以及固定在底座(12)上的自定心回转部件、透镜外圆轮廓偏心的调节机构(9)和自准直显微镜(1)；还包括抽真空吸附装置(8)；自定心回转部件包括密珠式精密回转轴系(4)、固定在密珠式精密回转轴系(4)上的上方四维调整机构(51)以及固定在上方四维调整机构(51)上的微透镜支承环(6)，支承环(6)与密珠式精密回转轴系(4)共轴设置；支承环(6)为中空腔体，支承环(6)通过真空吸管(81)与抽真空吸附装置(8)连通；自准直显微镜(8)通过电缆与外部计算机连接。微透镜中心仪通过抽真空的支承环(6)对待测微透镜外圆圆心自动定中，只需用影像法调整透镜外圆轮廓即可测内圆心C2，简化了测量步骤，提高了单块透镜测试时间，测试过程为非接触测量，不会碰伤透镜外圆。

Description

微透镜中心仪 技术领域
本发明涉及一种用于测量微透镜中心误差的反射式中心仪，属于光学测量仪器技术领域。
背景技术
透镜中心误差是重要的光学参数，中心偏的存在破坏了光学系统的共轴性，影响光学系统成像质量。反射式中心仪直接测量透镜各球面的面倾角或球心偏差值。它与透射式中心仪相比，既符合国标定义，也使测量精度得到提高，因此逐步得到普及应用。
目前生产厂家，国外的有德国全欧、美国LAS；国内有上海思长约，西安昂科等。但由于现有的放射式中心仪存在调校操作繁琐、复杂、费时、效率低的问题，而仅适用于高精度单件透镜，对于微小透镜，因为其尺寸小而更不好操作。
发明内容
发明目的：本发明所要解决的技术问题是提供一种微透镜中心仪，该反射式中心仪能够测量微透镜(直径1～3mm)的中心误差，满足较小尺寸微透镜的中心误差测量，且测试过程简单，同时稍作调整即可适应不同尺寸微透镜的测量。
为解决上述技术问题，本发明所采用的技术方案为：
微透镜中心仪，包括底座以及固定在底座上的自定心回转部件、透镜外圆轮廓偏心的调节机构和自准直显微镜；还包括抽真空吸附装置；所述自定心回转部件包括密珠式精密回转轴系、固定在密珠式精密回转轴系上的上方四维调整机构以及固定在上方四维调整机构上的微透镜支承环，微透镜支承环与密珠式精密回转轴系共轴设置；所述微透镜支承环为中空腔体，所述微透镜支承环通过真空吸管与抽真空吸附装置连通；所述自准直显微镜通过电缆与外部计算机(显示装置)连接。
其中，所述微透镜支承环包括水平部和竖直凸起，竖直凸起的上端表面呈弧面，待测微透镜置于竖直凸起的上端表面。
其中，所述自定心回转部件还包括位于密珠式精密回转轴系下方的下方四维调整机构。
其中，所述透镜外圆轮廓偏心的调节机构包括调节部，调节部包括螺杆以及位于螺杆端部的顶杆，螺杆外套有与螺杆通过内外螺纹连接的滑套，通过转动螺杆使顶杆相对 滑套水平向前或向后移动，顶杆位于待测微透镜的侧边。
其中，所述自准直显微镜包含CCD显示部件并可将显示图像传输给外部计算机。
其中，还包括照明系统，照明系统包括用于自准直显微镜系统的内照明设备和用于影像法调整透镜外圆轮廓的外照明设备，照明系统用于透镜外圆轮廓的偏心调整。
其中，还包括升降机构，所述自准直显微镜固定在升降机构上，所述升降机构通过其上的光栅尺对自准直显微镜相对待测微透镜的距离进行调整。
与现有技术相比，本发明技术方案具有的有益效果是：
本发明通过抽真空的支承环对待测微透镜外圆圆心自动定中，只需用影像法调整透镜外圆轮廓即可测内圆心C2，对于C2可按图纸公差在显示屏上设定圆形边界，十字像在圆中即判为合格；本发明中心仪与现有反射式中心仪相比，简化了测量步骤，提高了单块透镜测试时间，测试过程为非接触测量，不会碰伤透镜外圆，下球面与支承环之间不做回转运动，只是微小倾斜，在支承面光滑情况下不会划伤透镜球面，避免了对微透镜的损伤；同时可通过修改支承环的尺寸和下方四维调整机构的行程，本发明中心仪还可适应不同尺寸的微透镜测量。
附图说明
图1为本发明微透镜中心仪的结构示意图；
图2为本发明微透镜中心仪的自定心回转部件的结构放大图；
图3为国标GB/T 7242-2010透镜中心偏差中条款4.1基准轴的选定表；
图4为ISO 10110-6基准轴标注示意图；
图5为微透镜在支承环上外圆轮廓不偏心的示意图；
图6是图5微透镜的俯视图，或显示装置上看到的像；
图7为微透镜在支承环上外圆轮廓偏心的示意图；
图8是图7微透镜的俯视图，或显示装置上看到的像；
图9为透镜外圆偏心的调节机构中调节部的俯视图。
具体实施方式
以下结合附图对本发明的技术方案做进一步说明。
如图3和图4所示，本发明微透镜中心仪对微透镜的测试原理基于如下国际标准：根据国标GB/T 7242-2010透镜中心偏差中条款4.1基准轴的选定表1例2(图3)，以透镜边缘面与光学表面交线圆中心P和该光学表面球心C 1的连线为基准轴。同时，ISO  10110-6基准轴也有相同的标注(图4)。所以，测试的理论依据为：以外圆选定截面中点P和球心C 1连线为基准轴，然后检测内圆球心C 2的球心偏即为透镜中心误差。本发明微透镜中心仪就是采用这种原理对透镜中心误差进行测量。
如图1和图2所示，本发明微透镜中心仪包括底座12以及固定在底座12上的自定心回转部件、透镜外圆轮廓偏心的调节机构9和自准直显微镜1；还包括抽真空吸附装置8；自定心回转部件包括密珠式精密回转轴系4、固定在密珠式精密回转轴系4上的上方四维调整机构51、固定在上方四维调整机构51上的微透镜支承环6以及位于密珠式精密回转轴系4下方的下方四维调整机构52，微透镜支承环6与密珠式精密回转轴系4共轴设置；微透镜支承环6为中空腔体(呈中空管状结构)，微透镜支承环6包括水平部62和竖直凸起61，竖直凸起61的上端表面呈弧面，待测微透镜10置于竖直凸起61的上端表面，微透镜支承环6通过真空吸管81与抽真空吸附装置8连通，抽真空吸附装置8确保支承环6在回转过程中对待测微透镜10下球面的吸附定位；自准直显微镜8通过电缆与外部计算机(显示装置)连接，能够将数据(图像数据)传输给外部的计算机用于显示。
密珠式精密回转轴系4，其回转精度<0.001mm。密珠式精密回转轴系4上固定有上方四维调整机构51，上方四维调整机构51上固定有微透镜支承环6。其中，上方四维调整机构(XYZΘ四维调节平台)51包括二维倾斜台和二维平移台。上方四维调整机构51通过二维倾斜台和二维平移台可对固定在其上的微透镜支承环6进行水平和倾斜调整，通过调整上方四维调整机构51保证微透镜支承环6和密珠式精密回转轴系4共轴。密珠式精密回转轴系4、上方四维调整机构51和微透镜支承环6构成了微透镜下球面自定心装置。其中，密珠式精密回转轴系4和微透镜支承环6共轴，这个轴作为测试的理论基准轴。
密珠式精密回转轴系4固定在下方四维调整机构52上，下方四维调整机构52可实现对整个微透镜下球面自定心装置的水平和倾斜调整。
透镜外圆轮廓偏心的调节机构9包括调节部，调节部包括螺杆92以及位于螺杆92端部的顶杆91，螺杆92外套有与螺杆92通过内外螺纹连接的滑套93，通过转动螺杆92使顶杆91相对滑套93水平向前或向后移动，顶杆91位于待测微透镜10的侧边。
本发明中心仪还包括自准直显微镜1，自准直显微镜1位于微透镜下球面自定心装置的上方，自准直显微镜1对支承环6上的待测微透镜10进行显示和测量。本发明还 包括升降机构2，自准直显微镜1固定在升降机构2上，升降机构2通过支撑架11固定在底座12上，升降机构2通过其上的光栅尺对自准直显微镜1相对待测微透镜10的距离进行粗调和微调，实现自准直显微镜1的升降，通过对自准直显微镜1的升降可调整成像效果。
本发明中心仪还包括照明系统，照明系统包括用于自准直显微镜1系统的内照明设备71和用于影像法调整透镜外圆轮廓的外照明设备72，内照明设备71位于自准直显微镜1系统内，外照明设备72用于看清微透镜外圆轮廓，外照明设备72用于透镜外圆轮廓的偏心调整。
在测试前，安装调校支承环6轴线与密珠式精密回转轴系4共轴。支承环6结构如图5所示，A环面和B环面共轴，先在B面放置平行平板玻璃，自准直显微镜1平行光看十字像，在回转轴41转动时，调整三个轴向螺钉使十字像不动，取走平板玻璃，自准直显微镜1会聚光看B面边缘，调整四个径向螺钉，回转一周十字像不动，说明支承环6轴线与密珠式精密回转轴系4共轴(轴线为回转轴线)。
进一步地，当待测微透镜10下球面与支承环6上端面接触时，下球面球心C1便落在回转轴线上。为使上述微调时，待测微透镜10下球面可紧贴支承环6，通过抽真空吸附装置8实现待测微透镜10的自动定中(即下球面球心C1位于回转轴线上)。
自准直显微镜1内照明71是找十字反射像用的(图4)。为防杂光，关闭内照明71后，自准直显微镜1就变成了一般的显微镜，此时平移下方四维调整机构52的二维平移台，并升降显微镜，调整外照明设备72，看清微透镜外圆轮廓，转动回转轴41，看到轮廓偏心(如图7所示，微透镜外圆轮廓偏心)，即可通过透镜外圆轮廓偏心的调节机构9进行微调，使外圆与回转轴共轴(如图5所示，微透镜外圆与回转轴共轴)。
升降机构2为交叉滚柱直线导轨，光栅数显读数，行程300mm。顶端手轮为粗调，中部右侧有侧顶微调。
本发明中心仪的工作原理：
首先，将被测微透镜10下球面放入支承环6自动定中，此时下球面球心C 1已在基准轴线上，且倾斜透镜时球心C 1不动(图7)；
然后，用显微镜观测透镜外圆轮廓，转动回转轴41时，看到透镜外圆轮廓偏心(如图7)(通过转动回转轴41时观察外圆的像是否移动来判断外圆轮廓是否偏心)，此时通过转动螺杆92将顶杆91前向微推动透镜外圆，直到转动回转轴41时观察外圆像不 移动，此时说明微透镜外圆轮廓不偏心，居中，与回转轴共轴(如图5)；
最后，用自准直显微镜1找到上球面球心(C2)十字像，密珠式回转轴41回转一周，十字线交点绕成圆形轨迹，在CCD上划圆，取其直径的像素值之半为半径a即为上球心C 2偏数值，计算机显示器显示最终测试结果，读取C 2自准直像偏离值a。
传统反射式中心仪测量单透镜中心误差，通常是先倾斜下球面使其球心与回转轴共轴，然后用百分表打透镜外圆，平移透镜共轴(因微透镜边薄，此法不适用)，再反复数次确认后，测上球面球心偏，一般耗时15-20分钟/块。本发明C 1自动定中，只需用通过影像法微调外圆即可测C 2。对于C 2可按图纸公差在显示屏上设定圆形边界，十字像在圆中即判为合格，批量透镜测量1分钟/块；同时非接触测量不会碰伤外圆，下球面与支承环之间不做回转运动，只是微小倾斜，在支承面光滑情况下不会划伤球面。本发明的测量精度可达3μm。
本发明实施例中待测微透镜10的直径为1～3mm，根据测量原理，本发明中心仪可测量直径为1～200mm的微透镜，当待测微透镜的尺寸变化时，需要按实际需要适当修改支承环6的尺寸和下方四维调整机构52的行程。支承环6的形状误差(圆度和平面度)以及相对回转轴41主轴的位置误差(同轴度和垂直度)是影响仪器精度的重要方面，特别是对微小透镜更为重要。

Claims (7)

  1. 微透镜中心仪，其特征在于：包括底座以及固定在底座上的自定心回转部件、透镜外圆轮廓偏心的调节机构和自准直显微镜；还包括抽真空吸附装置；所述自定心回转部件包括密珠式精密回转轴系、固定在密珠式精密回转轴系上的上方四维调整机构以及固定在上方四维调整机构上的微透镜支承环，微透镜支承环与密珠式精密回转轴系共轴设置；所述微透镜支承环为中空腔体，所述微透镜支承环通过真空吸管与抽真空吸附装置连通；所述自准直显微镜通过电缆与外部计算机连接。
  2. 根据权利要求1所述的微透镜中心仪，其特征在于：所述微透镜支承环包括水平部和竖直凸起，竖直凸起的上端表面呈弧面，待测微透镜置于竖直凸起的上端表面。
  3. 根据权利要求1所述的微透镜中心仪，其特征在于：所述自定心回转部件还包括位于密珠式精密回转轴系下方的下方四维调整机构。
  4. 根据权利要求1所述的微透镜中心仪，其特征在于：所述透镜外圆轮廓偏心的调节机构包括调节部，调节部包括螺杆以及位于螺杆端部的顶杆，螺杆外套有与螺杆通过内外螺纹连接的滑套，通过转动螺杆使顶杆相对滑套水平向前或向后移动，顶杆位于待测微透镜外圆的侧边。
  5. 根据权利要求1所述的微透镜中心仪，其特征在于：所述自准直显微镜包含CCD显示部件并可将显示图像传输给外部的计算机。
  6. 根据权利要求1所述的微透镜中心仪，其特征在于：还包括照明系统，照明系统包括用于自准直显微镜系统的内照明设备和用于影像法调整透镜外圆轮廓的外照明设备，照明系统用于透镜外圆轮廓的偏心调整。
  7. 根据权利要求1所述的微透镜中心仪，其特征在于：还包括升降机构，所述自准直显微镜固定在升降机构上，所述升降机构通过其上的光栅尺对自准直显微镜相对待测微透镜的距离进行调整。
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