WO2020094053A1 - 喷淋装置及清洗设备 - Google Patents

喷淋装置及清洗设备 Download PDF

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Publication number
WO2020094053A1
WO2020094053A1 PCT/CN2019/115971 CN2019115971W WO2020094053A1 WO 2020094053 A1 WO2020094053 A1 WO 2020094053A1 CN 2019115971 W CN2019115971 W CN 2019115971W WO 2020094053 A1 WO2020094053 A1 WO 2020094053A1
Authority
WO
WIPO (PCT)
Prior art keywords
atomizing
channel
jet
cleaned
nozzle
Prior art date
Application number
PCT/CN2019/115971
Other languages
English (en)
French (fr)
Chinese (zh)
Inventor
刘伟
刘效岩
吴仪
Original Assignee
北京北方华创微电子装备有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京北方华创微电子装备有限公司 filed Critical 北京北方华创微电子装备有限公司
Priority to EP19882402.1A priority Critical patent/EP3879562A4/en
Priority to US17/288,461 priority patent/US11504727B2/en
Priority to JP2021524229A priority patent/JP7179985B2/ja
Publication of WO2020094053A1 publication Critical patent/WO2020094053A1/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/03—Discharge apparatus, e.g. electrostatic spray guns characterised by the use of gas, e.g. electrostatically assisted pneumatic spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
    • B05B7/0892—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point the outlet orifices for jets constituted by a liquid or a mixture containing a liquid being disposed on a circle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0653—Details
    • B05B17/0661—Transducer materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
    • B05B7/0807—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets

Definitions

  • the orthographic projections of the plurality of atomizing holes 36 are divided into A plurality of groups of atomizing holes, and the intervals are distributed on a circle centered on the center of the cross-section; the orthographic projections of the plurality of atomizing holes 36 in each group of atomizing holes are arranged at least one row along the radial interval of the circle . In this way, the spray range of the droplets can be expanded, and the collision probability of the droplets with the gas can be increased, so that the atomization efficiency can be improved.
  • the gas B enters the intake passage 12 from the intake end 121 of the intake passage 12.
  • the gas B is ejected from each jet hole 37 and collides with the liquid to form a smaller and more Evenly atomize the particles, thus achieving the second atomization of the cleaning liquid.
  • the atomizing body includes a central portion 31 and a plurality of edge portions 32, both of which form a structure similar to a "gear”, and each jet split 33 has a fan-like structure, so that the atomizing structure Together with the air-jet structure, a disc-shaped structure 3 is formed, but the present invention is not limited to this.
  • the atomizing structure and the air-jet structure can also form an integral structure of any other shape, or can also form a split structure .
  • the carrier 40 is used to carry the object 20 to be cleaned.
  • the carrier 40 can also drive the object 20 to be rotated during the cleaning process to improve cleaning efficiency and cleaning uniformity .
  • the spraying device further includes a first liquid inlet line 41, an air inlet line 2 and a first driving source (not shown in the figure), wherein the first driving source is used to drive the first nozzle 10 to be cleaned 20 The edge of the surface to be cleaned reciprocates between the center and the center.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Nozzles (AREA)
  • Cleaning By Liquid Or Steam (AREA)
PCT/CN2019/115971 2018-11-08 2019-11-06 喷淋装置及清洗设备 WO2020094053A1 (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP19882402.1A EP3879562A4 (en) 2018-11-08 2019-11-06 SPRAY APPARATUS AND CLEANING DEVICE
US17/288,461 US11504727B2 (en) 2018-11-08 2019-11-06 Spray device and cleaning apparatus
JP2021524229A JP7179985B2 (ja) 2018-11-08 2019-11-06 噴霧デバイスおよび洗浄装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201811324019.6 2018-11-08
CN201811324019.6A CN111162023B (zh) 2018-11-08 2018-11-08 喷淋装置及清洗设备

Publications (1)

Publication Number Publication Date
WO2020094053A1 true WO2020094053A1 (zh) 2020-05-14

Family

ID=70555383

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/115971 WO2020094053A1 (zh) 2018-11-08 2019-11-06 喷淋装置及清洗设备

Country Status (6)

Country Link
US (1) US11504727B2 (ja)
EP (1) EP3879562A4 (ja)
JP (1) JP7179985B2 (ja)
CN (1) CN111162023B (ja)
TW (1) TWI738108B (ja)
WO (1) WO2020094053A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
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CN115213158A (zh) * 2022-08-05 2022-10-21 无锡京运通科技有限公司 制备薄片化单晶硅片减投清洗剂的加药装置
CN115709439A (zh) * 2022-11-03 2023-02-24 大连理工大学 一种增材制造槽道热管内壁的纳米多相射流复合抛光装置及方法
CN117165924A (zh) * 2023-11-03 2023-12-05 江苏微导纳米科技股份有限公司 一种喷淋装置、处理设备及处理设备的喷淋工艺

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CL2018000341A1 (es) * 2018-02-06 2018-07-06 Ingeagro Eirl Dispositivo y método de aplicación electrostática.
CN111696852A (zh) * 2020-06-22 2020-09-22 徐文凯 第三代半导体的清洗方法
US20230415204A1 (en) * 2022-06-23 2023-12-28 Taiwan Semiconductor Manufacturing Company, Ltd. Wet cleaning tool and method
CN116145453A (zh) * 2022-09-08 2023-05-23 浙江临安金洲纸业有限公司 一种造纸用的清洗装置
CN115569897A (zh) * 2022-09-26 2023-01-06 厦门立林高压电气有限公司 电路板喷淋清洗设备
CN117690826B (zh) * 2023-12-12 2024-06-21 苏州恩腾半导体科技有限公司 一种晶圆处理系统和方法
CN118476884B (zh) * 2024-07-15 2024-09-20 南通大学附属医院 一种医用清洁喷嘴

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CN101607237A (zh) * 2009-07-14 2009-12-23 武汉科技大学 一种气液两相旋流大口径细雾喷嘴
CN103446691A (zh) * 2013-09-13 2013-12-18 中国科学技术大学 一种基于气泡雾化的微水雾喷头
CN104772242A (zh) * 2015-04-24 2015-07-15 河海大学常州校区 雾化喷嘴
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115213158A (zh) * 2022-08-05 2022-10-21 无锡京运通科技有限公司 制备薄片化单晶硅片减投清洗剂的加药装置
CN115213158B (zh) * 2022-08-05 2023-08-11 无锡京运通科技有限公司 制备薄片化单晶硅片减投清洗剂的加药装置
CN115709439A (zh) * 2022-11-03 2023-02-24 大连理工大学 一种增材制造槽道热管内壁的纳米多相射流复合抛光装置及方法
CN117165924A (zh) * 2023-11-03 2023-12-05 江苏微导纳米科技股份有限公司 一种喷淋装置、处理设备及处理设备的喷淋工艺
CN117165924B (zh) * 2023-11-03 2024-02-02 江苏微导纳米科技股份有限公司 一种喷淋装置、处理设备及处理设备的喷淋工艺

Also Published As

Publication number Publication date
TW202017662A (zh) 2020-05-16
CN111162023B (zh) 2023-03-21
EP3879562A1 (en) 2021-09-15
US11504727B2 (en) 2022-11-22
CN111162023A (zh) 2020-05-15
JP7179985B2 (ja) 2022-11-29
JP2022506689A (ja) 2022-01-17
EP3879562A4 (en) 2022-07-20
US20210379611A1 (en) 2021-12-09
TWI738108B (zh) 2021-09-01

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