WO2020093802A1 - 微流体通道结构及其制作方法、微流体检测装置及其检测方法 - Google Patents
微流体通道结构及其制作方法、微流体检测装置及其检测方法 Download PDFInfo
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- WO2020093802A1 WO2020093802A1 PCT/CN2019/107487 CN2019107487W WO2020093802A1 WO 2020093802 A1 WO2020093802 A1 WO 2020093802A1 CN 2019107487 W CN2019107487 W CN 2019107487W WO 2020093802 A1 WO2020093802 A1 WO 2020093802A1
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L9/00—Supporting devices; Holding devices
- B01L9/52—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips
- B01L9/527—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips for microfluidic devices, e.g. used for lab-on-a-chip
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0645—Electrodes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/16—Surface properties and coatings
- B01L2300/168—Specific optical properties, e.g. reflective coatings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N2021/0346—Capillary cells; Microcells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
- G01N2021/056—Laminated construction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N2021/6482—Sample cells, cuvettes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N2035/00178—Special arrangements of analysers
- G01N2035/00237—Handling microquantities of analyte, e.g. microvalves, capillary networks
Definitions
- the embodiments of the present disclosure relate to a microfluidic channel structure and a manufacturing method thereof, a microfluidic detection device, and a detection method thereof.
- Microfluidic devices are commonly referred to as on-chip laboratory (LOC) or micro-TAS (micro-TAS), which is used to perform biological or chemical reactions by operating a small amount of fluid for the detection and analysis of biomolecules, such as genes Sequencing, single protein detection, etc.
- LOC on-chip laboratory
- micro-TAS micro-TAS
- the microfluidic channel is the core component of the microfluidic device, but its manufacturing technology is still inefficient, cumbersome, and expensive, and therefore there is room for improvement.
- an embodiment of the present disclosure provides a microfluidic channel structure, including:
- a foundation part which is arranged on the support part and includes a first foundation and a second foundation spaced apart from each other, wherein the first foundation and the second foundation have an extending direction parallel to the surface of the support part; as well as
- a channel defining portion which is arranged on a side of the base portion away from the supporting portion and includes a first channel layer and a second channel layer, wherein the first channel layer covers the first foundation, the second The channel layer covers the second foundation, and there is a gap between the first channel layer and the second channel layer to define a microfluidic channel, and the first channel layer and the second channel layer are made of the same material.
- an embodiment of the present disclosure also provides a microfluidic detection device, including the microfluidic channel structure described above, wherein the microfluidic channel is provided with a sample to be tested, and the microfluidic detection device Also includes:
- At least one signal transmitter configured to generate an excitation signal, wherein the excitation signal illuminates the sample to be tested to excite the sample to be tested to generate a sample signal
- At least one signal detector is configured to receive and detect the sample signal.
- an embodiment of the present disclosure also provides a detection method of a microfluidic detection device, including:
- the at least one signal detector uses the at least one signal detector to receive the sample signal, thereby detecting the sample to be tested,
- the excitation signal is at least partially reflected by the light reflection layer facing the microfluidic channel to excite the sample to be measured, or wherein the sample signal is at least partially reflected by the light facing the microfluidic channel
- the reflective layer reflects to the at least one signal detector.
- an embodiment of the present disclosure also provides a method for manufacturing a microfluidic channel structure, including:
- a foundation portion is formed on the support portion, the foundation portion including a first foundation and a second foundation spaced apart from each other, wherein the first foundation and the second foundation have an extending direction parallel to the surface of the support portion ;as well as
- a channel defining portion is formed on a side of the base portion away from the supporting portion, the channel defining portion includes a first channel layer and a second channel layer, wherein the first channel layer covers the first foundation, the The second channel layer covers the second foundation, and there is a gap between the first channel layer and the second channel layer to define a microfluidic channel, the first channel layer and the second channel layer, all The microfluidic channels are formed simultaneously in the same process.
- FIGS. 1A and 1B are schematic diagrams of a microfluidic detection device according to an embodiment of the present disclosure
- FIG. 2A is a schematic diagram of a microfluidic channel structure according to an embodiment of the present disclosure
- FIG. 2B is a schematic diagram of a microfluidic detection device according to an embodiment of the present disclosure
- FIG. 2C is a schematic diagram of a microfluidic detection device according to an embodiment of the present disclosure.
- 2D is a schematic diagram of a microfluidic detection device according to an embodiment of the present disclosure.
- 3A is a schematic diagram of a microfluidic channel structure according to an embodiment of the present disclosure.
- 3B is a schematic diagram of a microfluidic detection device according to an embodiment of the present disclosure.
- 4A, 4B, 4C, and 4D are schematic diagrams of microfluidic channel structures according to embodiments of the present disclosure.
- 5A, 5B, 5C, 5D, 5E, 5F, 5G, and 5H are schematic diagrams of the manufacturing process of the microfluidic channel structure according to an embodiment of the present disclosure.
- 6A and 6B are schematic diagrams of a manufacturing process of a microfluidic channel structure according to an embodiment of the present disclosure
- FIG. 7 is a schematic diagram of a microfluidic detection device according to an embodiment of the present disclosure.
- FIG. 8 is a schematic diagram of a microfluidic detection device according to an embodiment of the present disclosure.
- microfluidic channels In order to achieve the limit of sub-micron accuracy, the production of microfluidic channels often requires the use of special techniques such as electron beam exposure technology and interference lithography, and subsequent etching, stripping, and the grooved support and top sticking The steps involved are very tedious. In addition, the electron beam exposure equipment is expensive and the manufacturing process is slow, making it unsuitable for large-scale large-area mass production, and greatly increasing the difficulty and cost of manufacturing.
- interference lithography can form interference fringes with sub-micron precision, it is impossible to achieve the special morphology such as the turning spiral of microfluidic channels.
- the microfluidic channel is often etched on the material of the supporting part and is closely packaged and molded, which greatly increases the difficulty of integrating electrodes or devices near the microfluidic channel. In addition, how to effectively measure the sample to be measured in the microfluidic channel and improve the measurement accuracy are also urgent problems to be solved in the art.
- the embodiments of the present disclosure provide a microfluidic channel structure and a manufacturing method thereof, a microfluidic detection device and a detection method thereof, which are intended to overcome or alleviate one or more of the technical problems described above.
- the specific implementation of the microfluidic channel structure, the manufacturing method thereof, and the microfluidic detection device provided by the embodiments of the present disclosure will be described in detail below with reference to the drawings.
- FIG. 1A schematically shows a top view of the microfluidic detection device
- FIG. 1B is a cross-sectional view taken along line II ′ of FIG. 1A.
- the microfluidic detection device includes a support portion 10 and a channel defining portion 30 provided on the support portion 10.
- the channel defining portion 30 defines the microfluidic channel 40.
- the microfluidic detection device further includes a driving electrode 95 arranged on the support 10. In the working state, a voltage is applied to the driving electrode 95 to drive the sample 50 to be tested through the microfluidic channel 40.
- the excitation signal transmitter of the microfluidic detection device When the sample 50 to be tested passes through the microfluidic channel 40, the excitation signal transmitter of the microfluidic detection device generates an excitation signal to excite the sample 50 to be tested.
- the sample 50 to be tested is excited by the excitation signal to generate a sample signal.
- the detector of the microfluidic detection device receives the sample signal, and then realizes analysis and detection of the sample 50 to be tested.
- the microfluidic detection device further includes a cover plate 90 that is arranged opposite to the support portion 10 and used to encapsulate the microfluidic channel structure.
- the microfluidic channel 40 has an extending direction parallel to the surface of the support portion 10.
- the microfluidic channel 40 is substantially linear.
- the microfluidic channel 40 may have other shapes, such as a curved shape, or a composite shape composed of multiple straight lines and multiple bends.
- FIG. 2A is a cross-sectional view taken along line II-II 'in FIG. 1A.
- the microfluidic channel structure includes a support portion 10, a foundation portion 20, and a channel defining portion 30.
- the foundation portion 20 is arranged on the support portion 10 and includes a first foundation 21 and a second foundation 22 spaced apart from each other.
- the first foundation 21 and the second foundation 22 have an extending direction parallel to the surface of the support portion 10.
- the channel defining portion 30 is arranged on the side of the base portion 20 away from the support portion 10 and includes a first channel layer 31 and a second channel layer 32.
- the first channel layer 31 covers the first foundation 21, the second channel layer 32 covers the second foundation 22, and the first channel layer 31 and the second channel layer 32 are partially separated from each other to form a gap defining the microfluidic channel 40.
- the first channel layer 31 and the second channel layer 32 are made of the same material.
- the microfluidic channel 40 has a tapered cross section in a direction from the support portion 10 toward the ground portion 20.
- a tapered cross-section refers to a cross-section that gradually decreases in size.
- the size of the cross-section can be continuously reduced or stepwise.
- the first foundation 21 and the second foundation 22 have a tapered cross section in a direction from the foundation portion 20 toward the support portion 10. That is, in the embodiment shown in FIG. 2A, the cross sections of the first foundation 21 and the second foundation 22 are continuously reduced in the direction from the foundation portion 20 toward the support portion 10.
- the cross sections of the first foundation 21 and the second foundation 22 have an inverted trapezoidal shape.
- the support portion 10 includes a base substrate 11, and an excitation signal transmitter 12 disposed on the side of the base substrate 11 facing the ground portion 20.
- FIG. 2B schematically shows a microfluidic detection device based on the microfluidic channel structure shown in FIG. 2A.
- the microfluidic detection device includes the microfluidic channel structure shown in FIG. 2A and the detector 60.
- the detector 60 is arranged directly above the microfluidic channel 40 of the microfluidic channel structure, that is, the side of the microfluidic channel 40 away from the support portion 11.
- the excitation signal transmitter 12 is configured to generate an excitation signal such as an optical signal to detect the sample 50 to be measured in the microfluidic channel 40.
- the excitation signal transmitter 12 is uniformly distributed over the surface of the base substrate 11.
- the excitation signal transmitter 12 is arranged directly under the microfluidic channel 40 so that the excitation signal emitted by it is efficiently utilized to excite the sample 50 to be tested in the microfluidic channel 40.
- the excitation signal 12B propagated upward from directly below the microfluidic channel 40 by the excitation signal transmitter 12 reaches the microfluidic channel 40, thereby exciting the sample 50 to be tested in the microfluidic channel 40.
- the upwardly propagated excitation signal emitted by the excitation signal transmitter 12 is projected onto the sides of the first foundation 21 and the second foundation 22, The sides of the first foundation 21 and the second foundation 22 are reflected and turned.
- the steering excitation signal 12S excites the sample 50 to be tested in the microfluidic channel 40.
- first foundation 21 and the second foundation 22 have a tapered cross section in the direction from the foundation portion 20 toward the support portion 10, the sides of the first foundation 21 and the second foundation 22 will excite the signal transmitter 12
- the emitted excitation signal is redirected to the sample 50 to be tested.
- the excitation signal emitted by the excitation signal transmitter 12 is used to more efficiently excite the sample 50 to be measured.
- first foundation 21 and the second foundation 22 have reflective sides, thereby facilitating the redirection of the excitation signal.
- the channel defining portion 30 further includes a first channel wall 31S covering the side of the first foundation 21 and a second channel wall 32S covering the side of the second foundation 22, as shown in FIG. 2A.
- the first channel wall 31S and the second channel wall 32S are disposed opposite to each other, and the two serve as two opposing side walls of the microfluidic channel 40, respectively.
- the first channel layer 32 and the second channel layer 32 are in contact with each other, so that in a plane perpendicular to the extending direction of the microfluidic channel 40, the cross-sectional shape of the microfluidic channel 40 is a closed figure.
- the microfluidic channel has a closed cavity.
- the closed figure is, for example, an isosceles triangle, or a triangle with two waists curved.
- the channel defining portion 30 further includes a third channel layer 33 connecting the first channel wall 31S and the second channel wall 32S.
- the first channel wall 31S, the second channel wall 32S, and the third channel layer 33 define the microfluidic channel 40.
- the material of the channel defining portion 30 is transparent to the excitation signals 12B, 12S from the excitation signal transmitter 12 so as not to hinder the transmission of the excitation signal through the first channel wall 31S, the second channel wall 32S, and the third channel layer 33 to excite The sample 50 to be tested in the microfluidic channel 40.
- the material of the channel defining portion 30 is transparent to the sample signal 50S from the sample to be measured 50 so as not to prevent the sample signal from being transmitted through the first channel layer 31 and the second channel layer 32 to be received by the detector 60.
- the first channel wall 31S, the second channel wall 32S, and the third channel layer 33 are all made of the same light-transmitting material, so that the excitation signal can be transmitted through the above layers.
- the first channel layer and the second channel layer are also made of the same light-transmitting material as the first material layer, which facilitates the simultaneous formation of micro-layers in the process of forming the first, second and third channel layers Fluid channel.
- FIG. 2C schematically shows an implementation manner of the embodiment shown in FIG. 2B.
- the excitation signal transmitter 12 includes a first electrode 121, an active layer 122, and a second electrode 123 that are sequentially stacked.
- the active layer 122 When a voltage is applied to the excitation signal transmitter 12 through the first electrode 121 and the second electrode 123, the active layer 122 generates an excitation signal to excite the sample 50 to be measured.
- the stack of the first electrode 121, the active layer 122 and the second electrode 123 is only provided in the area below the microfluidic channel 40.
- the first electrode 121, the active layer 122, and the second electrode 123 may be arranged in one layer.
- FIG. 2D schematically shows another implementation manner of the embodiment shown in FIG. 2B.
- the excitation signal transmitter 12 is disposed in the first foundation 21 and the second foundation 22, and includes a stack of the first electrode 121, the active layer 122, and the second electrode 123.
- the detector 60 is arranged directly under the microfluidic channel 40 of the microfluidic channel structure.
- the probe 60 is schematically shown as being arranged separately from the microfluidic channel structure.
- the detector 60 may be formed on the microfluidic channel structure, that is, integrated into the microfluidic channel structure.
- the detector 60 is integrated on the support 10.
- the probe 60 is provided in the region of the support portion 10 below the microfluidic channel 40. Similar to the detector 60, according to the requirements of the application scenario, the excitation signal transmitter 12 can also be provided separately from the microfluidic channel structure.
- FIG. 3A schematically shows a modification of the microfluidic channel structure shown in FIG. 2A.
- the microfluidic channel structure further includes an optical film layer 70 disposed between the support portion 10 and the ground portion 20.
- the optical film layer 70 includes an optical signal transmission region 70K and an optical signal blocking region 70B.
- the orthographic projection of the microfluidic channel 40 on the support portion 10 falls within the orthographic projection of the optical signal blocking region 70B on the support portion 10.
- the optical signal blocking area 70B is opaque to the excitation signal from the excitation signal transmitter 12.
- the orthographic projection of the optical signal transmission area 70K on the support portion 10 falls within the orthographic projection of the side surfaces of the first foundation 21 and the second foundation 22 on the support portion 10.
- the optical signal transmission area 70K is transparent to the excitation signal from the excitation signal transmitter 12.
- the optical film layer 70 is made of a material opaque to the excitation signal, and the optical signal transmission region 70K is an area in the optical film layer 70 where the material is missing.
- the optical signal transmission area 70K is an opening in the optical film layer 70.
- the optical signal transmission area 70K is made of a material that is transparent to the excitation signal.
- FIG. 3B schematically shows a microfluidic detection device based on the microfluidic channel structure shown in FIG. 3A.
- the detector 60 is arranged directly above the microfluidic channel 40 of the microfluidic channel structure.
- the optical signal blocking region 70B is opaque to the excitation signal, and the orthographic projection of the microfluidic channel 40 falls within the orthographic projection of the optical signal blocking region 70B, the slave signal emitted by the excitation signal transmitter 12
- the excitation signal propagating upwards directly under the microfluidic channel 40 (for example, the excitation signal 12B in FIG. 2B) is blocked from reaching the microfluidic channel 40.
- the excitation signal emitted by the excitation signal transmitter 12 It is transmitted through the optical signal transmission area 70K and is redirected to the sample 50 to be measured by the sides of the first foundation 21 and the second foundation 22, as shown by the excitation signal 12S in FIG. 3B.
- the optical signal blocking region 70B of the optical film layer 70 is used to control the propagation path of the excitation signal.
- the excitation signal from the excitation signal transmitter 12 is blocked so as not to directly enter the detector 60 arranged directly above the microfluidic channel structure. Therefore, the interference of the background excitation signal from the excitation signal transmitter 12 to the detector 60 is shielded. This helps to improve the detection accuracy of the sample to be tested.
- the arrow 12S is only used to explain the approximate propagation direction of the excitation signal after being redirected.
- the propagation direction is slightly deflected.
- the detection method of the microfluidic detection device is briefly described. As shown in FIGS. 2B and 3B, the excitation signal transmitter 12 is arranged in the support 10, and the detector 60 is arranged on the side of the microfluidic channel 50 away from the support 10.
- the detection method of the microfluidic detection device includes the steps of: generating an excitation signal using the excitation signal transmitter 12, wherein the excitation signal is at least partially reflected by the sides of the first foundation 21 and the second foundation 22 facing the microfluidic channel 50 , Thereby exciting the sample 50 to be tested in the microfluidic channel 40 to generate a sample signal 50S; and using the detector 60 to receive the sample signal 50S to detect the sample 50 to be tested.
- the sample 50 to be tested is excited by the excitation signal from the excitation signal transmitter 12 to generate a sample signal.
- a part of the sample signal is incident on the sides of the first foundation 21 and the second foundation 22, and is redirected to the detector 60 located below the foundation portion 20.
- the sample signal generated by the sample to be measured 50 is collected to the detector 60 more efficiently. This increases the probability that the sample 50 to be tested is detected.
- the excitation signal emitter 12 is arranged on the side of the microfluidic channel 40 away from the support 10, and the detector 60 is arranged on the support 12 in.
- the detection method of the microfluidic detection device includes the steps of: generating an excitation signal using the excitation signal transmitter 12, thereby exciting the sample 50 to be tested in the microfluidic channel 40 to generate a sample signal 50S, wherein the sample signal 50S is at least partially It is reflected by the sides of the first foundation 21 and the second foundation 22 facing the microfluidic channel 40; and the sample signal is received by the detector 60 to detect the sample 50 to be measured.
- the sample 50 to be tested is excited by the excitation signal from the excitation signal transmitter 12 to generate a sample signal.
- a part of the sample signal is incident on the sides of the first foundation 21 and the second foundation 22, and is redirected to be transmitted through the optical signal transmission area 70K, and then received by the detector 60 located below the foundation 20.
- the excitation signal from the excitation signal transmitter 12 is blocked by the optical signal blocking region 70B so as not to directly enter the detector 60 arranged directly under the microfluidic channel structure. Therefore, the interference of the background excitation signal from the excitation signal transmitter 12 to the detector 60 is shielded. This helps to improve the detection accuracy of the sample to be tested.
- the excitation signal transmitter 12 or the detector 60 is provided in the support portion 10. This is equivalent to the excitation signal transmitter or detector integrated in the microfluidic channel structure. Compared with the traditional bonding process, this is beneficial to accurately integrate the signal transmitter or signal receiver near the microfluidic channel and align with the microfluidic channel, thereby meeting the measurement accuracy requirements of gene sequencing and protein detection.
- FIG. 2A The modification of the microfluidic channel structure of FIG. 2A is described below with reference to FIGS. 4A-4D.
- FIGS. 4B-4D the channel defining portion 30 is not shown for simplicity.
- the channel defining portion 30 of the microfluidic channel structure does not include the third channel layer 33.
- the optical film layer 70 constitutes the bottom of the microfluidic channel 40. That is, the first channel wall 31S, the second channel wall 32S, and the optical film layer 70 define the microfluidic channel 40.
- the channel defining portion 30 of the microfluidic channel structure does not include the first channel wall 31S, the second channel wall 32S, and the third channel layer 33.
- the first foundation 21 (side surface), the second foundation 22 (side surface), and the optical film layer 70 define the microfluidic channel 40.
- the channel defining portion 30 does not include the first channel wall 31S, the second channel wall 32S, and the third channel layer 33, and the microfluidic channel structure does not include the optical film layer 70. That is, the microfluidic channel 40 directly adjoins the support portion 10. In this case, the first foundation 21 (side surface), the second foundation 22 (side surface), and the support portion 10 define a microfluidic channel 40.
- both sides of the cross section of the first foundation 21 and the second foundation 22 are arc-shaped . That is, the side surfaces of the first foundation 21 and the second foundation 22 are arc-shaped in cross section. Similar to the propagation path of the excitation signal shown in FIG. 2B and FIG. 3B, this side also facilitates the redirection of the excitation signal. Therefore, the first foundation 21 and the second foundation 22 having such a configuration can also efficiently use the excitation signal from the excitation signal transmitter, and increase the possibility that the sample to be tested is detected.
- the cross sections of the first foundation and the second foundation are inverted trapezoids.
- the cross sections of the first foundation and the second foundation are shaped like an inverted trapezoid with an arc-shaped waist.
- both sides of the cross section of the first foundation and the second foundation have a composite profile such as composed of straight lines and circular arcs.
- the first foundation and the second foundation with any cross-section that tapers in the direction from the foundation to the support can redirect the excitation signal from the excitation signal transmitter to the sample to be measured.
- a part of the cross section of the first foundation and the second foundation is tapered in the direction from the foundation portion to the support portion.
- the tapered portion of the cross-section facilitates the redirection of the excitation signal from the excitation signal transmitter to the sample to be measured.
- both sides of the cross section of the first foundation 21 and the second foundation 22 are composed of a vertical straight line at the top and an inclined straight line at the bottom.
- the portion of the cross section where the inclined straight line is located is tapered in the direction from the base portion 20 to the support portion 10.
- the orthographic projection of the optical signal transmission area 70K on the support portion 10 falls on the tapered portion of the cross section of the first foundation 21 and the second foundation 22 on the support portion 10 Within the orthographic projection of, as shown by the dotted line in Figure 4C.
- the foundation 20 further includes a reflective layer 20R disposed on the sides of the first foundation 21 and the second foundation 22 facing the microfluidic channel 40.
- the reflective layer 20R is formed of a metal material.
- the metal reflection layer forms a specular reflection layer, thereby facilitating the redirection of the excitation signal from the excitation signal transmitter to the sample to be measured.
- the reflective layer 20R is also arranged on the top surfaces of the first foundation 21 and the second foundation 22 away from the support 10, for example.
- the ratio of the maximum width Wmax and the height H of the cross section of the microfluidic channel 140 ranges from 1:10 to 10: 1 Inside.
- the microfluidic channel 140 may be formed simultaneously with the formation of the first channel layer 132 and the second channel layer 132 'using a sputtering method.
- the first foundation 121 and the second foundation 122 have a cross section of the same shape, and the The shape is a trapezoid, as shown in Figure 7. It can be understood that the shape of the above cross section may also be an inverted trapezoid (FIG. 2A), a rectangle (FIG. 6B), or both sides of the cross section are rounded (FIG. 4B).
- the signal transmitter includes a first signal transmitter disposed in the ground portion, and the signal detector is disposed on a side of the channel-defining portion away from the support portion, away from the support portion One side of the channel defining portion and at least one position of the supporting portion.
- the first signal transmitter 112 is disposed in the first foundation 121 and is used to generate the first excitation signal 112 a of the sample 150 to be tested irradiated into the microfluidic channel 140.
- the signal detector 160 is provided in the support portion 110 for receiving the sample signal 150S generated by the sample to be measured 150.
- the support portion 110 includes a base substrate 111, and a signal detector 160 and a protective layer 170 on the base substrate 111.
- the protective layer 170 is configured to be transparent, and functions to block water and oxygen.
- a second signal transmitter 114 for generating a second excitation signal 114a of the sample 150 to be tested in the microfluidic channel 140 is further provided on the side of the channel defining portion away from the supporting portion 110.
- the signal detector 160 is also used to receive the sample signal generated by the second excitation signal 114a exciting the sample 150 to be measured.
- the channel defining portion is composed of a first channel layer 132 and a second channel layer 132 ', and the first channel layer 132 and the second channel layer 132' cover the first foundation 121 and the second foundation 122, respectively.
- the structures of the first channel layer 132 and the second channel layer 132 ' can be applied to any of the embodiments shown in the previous figures.
- one of the signal transmitter and the signal detector is arranged in the first foundation of the foundation portion, and the other is arranged in the second foundation of the foundation portion.
- the signal transmitter 212 is disposed in the first foundation 221 for generating the excitation signal 212a.
- the first signal detector 260 is disposed in the second foundation 222 for receiving the sample signal 250S generated by the sample to be measured.
- the excitation signal 212a is a laser signal
- the sample signal 250S generated by the sample to be tested will propagate along the propagation direction of the excitation signal 212a, so that the first signal detector 260 located in the second foundation 222 can receive the sample signal 250S .
- the signal transmitter 212 may be used as the first foundation 221.
- the first signal detector 260 can be used as the second foundation 222, which can simplify the manufacturing process of the foundation.
- the signal transmitter 212 and the first signal detector 260 may be directly formed on the base substrate 211.
- a second signal detector 262 may also be provided on the side of the microfluidic channel 240 away from the support 310.
- the excitation signal 212a is ordinary fluorescence
- the sample to be tested will be excited to generate an absorption spectrum signal 250T, which can be received by the second signal detector 262.
- a method for fabricating a microfluidic channel structure includes: preparing a supporting portion; forming a foundation portion including a first foundation and a second foundation spaced apart from each other, wherein the first foundation and the foundation The second foundation has an extension direction parallel to the surface of the support portion, and in a plane perpendicular to the extension direction, the first foundation and the second foundation have a direction from the foundation portion toward the support A tapered cross-section in the direction of the portion; and forming a channel defining portion including a first channel layer and a second channel layer, wherein the first channel layer covers the first foundation and the second channel layer covers the The second foundation, and the first channel layer and the second channel layer are partially separated from each other to define a microfluidic channel.
- FIG. 3A taking the microfluidic channel structure shown in FIG. 3A as an example, a method of manufacturing the microfluidic channel structure according to an embodiment of the present disclosure will be described with reference to FIGS. 5A-5H.
- the support portion 10 is prepared.
- the steps of preparing the support portion 10 include preparing the base substrate 11 and forming the excitation signal transmitter 12 on the base substrate 11.
- the excitation signal transmitter 12 is uniformly distributed over the surface of the base substrate 11.
- the excitation signal transmitter 12 is arranged directly below the microfluidic channel to be formed.
- An optical signal blocking layer 70 ' is formed on the base substrate 11 on which the excitation signal transmitter 12 is formed.
- the optical signal blocking layer 70 ' is made of a material that is opaque to the excitation signal from the excitation signal transmitter 12.
- an optical film layer 70 is formed. Specifically, a patterning process is performed on the optical signal blocking layer 70 ', so that a selected portion of the optical signal blocking layer 70' is removed to form an optical signal transmission region 70K. In an exemplary embodiment, selected portions of the optical signal blocking layer 70 'are backfilled with a material transparent to the excitation signal to form an optical signal transmission region 70K.
- the optical film layer 70 including the optical signal transmission regions 70K and the optical signal shielding regions 70B arranged alternately is formed. The orthographic projection of the microfluidic channel to be formed on the support portion 10 falls within the orthographic projection of the optical signal shielding region 70B on the support portion 10.
- two or more foundation material layers are sequentially deposited on the optical film layer 70 to form the foundation stack 210, and the imprint adhesive layer 80 is coated on the foundation stack 210.
- two base material layers are taken as an example.
- a first foundation material layer 211 and a second foundation material layer 212 are sequentially deposited to form a foundation stack 210.
- the etching rate of the first foundation material layer 211 closer to the support portion 10 is higher than that of the second foundation material layer 212 farther from the support portion 10.
- the first foundation material layer 211 and the second foundation material layer 212 are made of the same material as silicon oxide.
- the deposition rate of the first foundation material layer 211 is greater than the deposition rate of the second foundation material layer 212, so that the etching rate of the first foundation material layer 211 is higher than the etching rate of the second foundation material layer 212.
- the first foundation material layer 211 and the second foundation material layer 212 are made of different materials.
- the first foundation material layer 211 is made of silicon nitride that is relatively easy to etch
- the second foundation material layer 212 is made of silicon oxide that is relatively difficult to etch. This makes the etching rate of the first foundation material layer 211 higher than the etching rate of the second foundation material layer 212.
- the embodiment of the present disclosure does not particularly limit the materials and manufacturing methods of the first foundation material layer 211 and the second foundation material layer 212, and any material that can make the etching rate of the first foundation material layer 211 higher than the second foundation
- the material and the formation method of the etching rate of the material layer 212 fall within the protection scope of the present disclosure.
- the imprinted adhesive layer 80 is patterned to form a patterned imprinted adhesive 80 '.
- the patterning step includes: imprinting the imprinted adhesive layer 80; curing the imprinted adhesive layer 80 by ultraviolet radiation; Residual embossed glue present.
- the foundation stack 210 is etched to form the first foundation 21 and the second foundation 22. Since the etching rate of the first foundation material layer 211 is higher than the etching rate of the second foundation material layer 212, the first foundation 21 and the second foundation 22 obtained after the etching have a direction from the foundation portion 20 to the support portion 10 A cross section that tapers in direction. As shown in FIG. 5F, the patterned imprint glue 80 'is peeled off.
- the foundation portion 20 including the first foundation 21 and the second foundation 22 is formed.
- the interval between the first foundation 21 and the second foundation 22 is 5 nm-5 ⁇ m
- the height of the first foundation 21 and the second foundation 22 is 5 nm-5 ⁇ m.
- a channel defining portion 30 ', 30 is formed on the ground portion 20 through a thin film deposition process.
- suitable thin film deposition methods and suitable deposition equipment can be used for the deposition channel defining portion.
- suitable deposition methods include: sputtering (for example, magnetron sputtering) and evaporation (for example, chemical vapor deposition method, plasma enhanced chemical vapor deposition (PECVD) method, thermal vapor deposition method, atomic layer deposition (ALD) Method, and electron beam evaporation method).
- PECVD plasma enhanced chemical vapor deposition
- ALD atomic layer deposition
- electron beam evaporation method electron beam evaporation
- the sputtering device may be a DC sputtering instrument, a DC pulse sputtering instrument, an RF sputtering instrument, an intermediate frequency sputtering instrument, or the like.
- the sputtering process may be physical sputtering or reactive sputtering.
- the target used for sputtering is the formed micro-nano structure material or reactant.
- the above structure is placed in the sample tray in the sputtering chamber.
- the sample tray is required to have good thermal conductivity.
- the sputtering temperature is controlled at a lower temperature, such as room temperature sputtering.
- the heat dissipation system can be used to lower the temperature of the sample tray.
- the temperature of the sample tray is controlled below 100 ° C, for example.
- sputtering ionized gas such as argon gas, nitrogen gas, etc.
- a reactive gas such as oxygen is required.
- the working pressure inside the sputtering chamber is kept stable. The partial pressure of the reactive gas is controlled to ensure that the reactive sputtering is fully performed.
- the sputtering power is adjusted according to the type of sputtering equipment and the target material.
- the power density of the sputtering target is the lowest sputtering power at which the device stably starts and there is material deposition.
- the experimental substrate size is 1500 mm x 1800 mm
- the sputtering temperature is room temperature
- the sputtering type is a reactive sputtering in which a silicon target is filled with oxygen and argon.
- the sputtering equipment is an intermediate frequency sputtering equipment with a power of about 5kW and an air pressure of about 0.2pa.
- the sputtered silicon oxide package covers the first foundation 21 and the second foundation 22 to form a channel defining portion 30 '.
- the channel defining portion 30 'formed by sputtering includes: a first channel layer 31' covering the top surface of the first foundation 21, a second channel layer 32 'covering the top surface of the second foundation 22, and a cover A first channel wall 31S 'on the side of the first foundation 21, a second channel wall 32S' covering the side of the second foundation 22, and a third channel layer 33 'covering the exposed portion of the surface of the optical film layer 70.
- the first channel wall 31S ', the second channel wall 32S', and the third channel layer 33 ' define an open microfluidic channel 40'.
- the gap between the first channel layer 31 'and the second channel layer 32' forms an open microfluidic channel 40 ', in a plane perpendicular to the microfluidic channel 40', the cross-sectional shape of the microfluidic channel 40 'is an unclosed figure.
- the side has an opening.
- a closed microfluidic channel 40 as shown in FIG. 3A is formed.
- the microfluidic channel 40 is defined by the first channel wall 31S, the second channel wall 32S, and the third channel layer 33.
- the film deposition rate in different areas is not uniform.
- the film deposition rate on the top surfaces of the first foundation 21 and the second foundation 22 is greater than the film deposition rate on the sides.
- the thinner the deposition rate of the region of the side surfaces of the first foundation 21 and the second foundation 22 closer to the support portion 10 is, the smaller. Therefore, in the thin film deposition process, before the microfluidic channel 40 'is filled, the first channel wall 31S' and the second channel wall 32S 'butt, thereby forming a closed microfluidic channel 40 as shown in FIG. 5H.
- first sub-bases 221 spaced apart from each other are formed on the support portion 10 shown in FIG. 5B.
- a second sub-foundation 222 covering the top and side surfaces of the first sub-foundation 221 is formed, thereby forming a foundation 20 including the first and second foundations 21 and 22.
- channel defining portions 30 ′, 30 are formed on the base portion 20.
- the microfluidic detection device may be various suitable detection devices, such as a gas detection device, a deoxyribonucleic acid (DNA) detection device, a ribonucleic acid (RNA) detection device, a peptide or protein detection device, an antibody detection device , Antigen detection device, tissue factor detection device, carrier and virus carrier detection device, lipid and fatty acid detection device, steroid detection device, neurotransmitter detection device, inorganic ion and electrochemical detection device, pH detection device, free radical detection device , Carbohydrate detection device, nerve detection device, chemical detection device, small molecule detection device, exon detection device, metabolite detection device, intermediate detection device, chromosome detection device and cell detection device.
- suitable detection devices such as a gas detection device, a deoxyribonucleic acid (DNA) detection device, a ribonucleic acid (RNA) detection device, a peptide or protein detection device, an antibody detection device , Antigen detection device, tissue factor detection device, carrier and virus carrier detection device
- the excitation signal transmitter 12 may be a light emitting diode (LED), a laser diode (LD), or the like that emits optical signals in a specific wavelength range.
- LED light emitting diode
- LD laser diode
- the sample 50 to be tested in the microfluidic channel 40 is excited to emit a fluorescent signal, which is then detected by the detector 60.
- the microfluidic detection device of the embodiments of the present disclosure can be used for protein detection, gene sequencing, and the like.
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Abstract
Description
Claims (25)
- 一种微流体通道结构,包括:支撑部;地基部,其布置在所述支撑部上并且包括相互隔开的第一地基和第二地基,其中所述第一地基和所述第二地基具有与所述支撑部的表面平行的延伸方向;以及通道限定部,其布置在所述地基部的远离所述支撑部的一侧并且包括第一通道层和第二通道层,其中所述第一通道层覆盖所述第一地基,所述第二通道层覆盖所述第二地基,并且所述第一通道层和所述第二通道层之间具有间隙以限定微流体通道,所述第一通道层和所述第二通道层由相同材料制成。
- 根据权利要求1所述的微流体通道结构,其中所述通道限定部还包括:第一通道壁,覆盖所述第一地基的面向所述微流体通道的侧面;第二通道壁,覆盖所述第二地基的面向所述微流体通道的侧面;其中所述第一通道壁和所述第二通道壁彼此相对设置并且用作所述微流体通道的两个侧壁。
- 根据权利要求2所述的微流体通道结构,其中所述通道限定部还包括:连接所述第一通道壁和所述第二通道壁的第三通道层,所述第三通道层覆盖所述支撑部并且用作所述微流体通道的底部。
- 根据权利要求3所述的微流体通道结构,其中所述第一通道层、所述第二通道层、所述第一通道壁、第二通道壁和第三通道层相互连接并且采用相同的透光材料制成。
- 根据权利要求1所述的微流体通道结构,其中所述第一通道层和所述第二通道层彼此不接触,以使所述微流体通道具有封闭的腔。
- 根据权利要求1所述的微流体通道结构,其中所述第一通道层和所述第二通道层彼此接触,以使所述微流体通道在远离于所述支撑部的一侧具有开口。
- 根据权利要求1所述的微流体通道结构,其中所述地基部还包括布置在所述第一地基和所述第二地基的面向所述微流体通道的侧面上的光反射层,所述光反射层配置为将激励信号反射到待测样品上。
- 根据权利要求1所述的微流体通道结构,其中每个所述第一地基和所述第二地基由两个或更多个地基层顺序堆叠形成。
- 根据权利要求1-8中任意一项所述的微流体通道结构,还包括布置在所述支撑部和所述地基部之间的光学膜层,其中所述光学膜层包括光学信号透射区和光学信号遮挡区,其中所述光学信号透射区在所述支撑部上的正投影落在所述第一地基和所述第二地基的侧面在所述支撑部上的正投影之内,以使所述激励信号穿过所述光学信号透射区到达所述微流体通道内。
- 根据权利要求9所述的微流体通道结构,其中所述微流体通道在所述支撑部上的正投影落在所述光学信号遮挡区在所述支撑部上的正投影之内。
- 根据权利要求1所述的微流体通道结构,其中所述微流体通道具有与所述支撑部的表面平行的延伸方向,并且所述微流体通道的延伸方向平行于所述第一地基和所述第二地基的延伸方向,在与所述微流体通道的延伸方向垂直的平面内,所述微流体通道具有在从所述支撑部指向所述地基部的方向上渐缩的横截面。
- 一种微流体检测装置,包括如权利要求1-11中任意一项所述的微流体通道结构,其中所述微流体通道中设置有待测样品,所述微流体检测装置还包括:至少一个信号发射器,配置为产生激励信号,其中所述激励信号照射所述待测样品以激励所述待测样品产生样品信号;以及至少一个信号探测器,配置为接收并且检测所述样品信号。
- 根据权利要求12所述的微流体检测装置,其中所述至少一个信号发射器包括布置在所述地基部中的第一信号发射器,所述至少一个信号探测器布置在所述通道限定部的远离所述支撑部的一侧、所述支撑部的远离所述通道限定部的一侧、和所述支撑部中的至少一个位置上。
- 根据权利要求13所述的微流体检测装置,其中所述至少一个信号发射器还包括设置在所述通道限定部的远离所述支撑部的一侧的第二信号发射器。
- 根据权利要求12所述的微流体检测装置,其中所述至少一个信号发射器和所述至少一个信号探测器其中之一布置在所述地基部的第一地基中, 并且另一个布置在所述地基部的第二地基中。
- 根据权利要求15所述的微流体检测装置,其中所述至少一个信号发射器包括配置为用作所述第一地基的第一信号发射器,所述至少一个信号探测器包括第一信号探测器和第二信号探测器,所述第一信号探测器配置为用作第二地基,所述第二信号探测器位于所述微流体通道的远离所述支撑部的一侧。
- 根据权利要求12-15任意一项所述的微流体检测装置,其中所述微流体检测结构的地基部还包括布置在每个所述第一地基和所述第二地基的面向所述微流体通道的侧面上的光反射层。
- 一种根据权利要求17所述的微流体检测装置的检测方法,包括:利用所述至少一个信号发射器产生激励信号,从而激励所述微流体通道内的待测样品以产生样品信号;以及利用所述至少一个信号探测器接收所述样品信号,从而检测所述待测样品,其中所述激励信号至少部分被面向所述微流体通道的所述光反射层反射而激励所述待测样品,或者其中所述样品信号至少部分被所述面向所述微流体通道的所述光反射层反射而到达所述至少一个信号探测器。
- 一种用于制作微流体通道结构的方法,包括:准备支撑部;在所述支撑部上形成地基部,该地基部包括相互隔开的第一地基和第二地基,其中所述第一地基和所述第二地基具有与所述支撑部的表面平行的延伸方向;以及在所述地基部的远离所述支撑部的一侧形成通道限定部,该通道限定部包括第一通道层和第二通道层,其中所述第一通道层覆盖所述第一地基,所述第二通道层覆盖所述第二地基,并且所述第一通道层和所述第二通道层之间具有间隙以限定微流体通道,所述第一通道层和所述第二通道层、所述微流体通道在同一工艺中同时形成。
- 根据权利要求19所述的方法,其中所述在所述支撑部上形成地基部包括:沉积两个或更多个地基材料层以形成地基叠层,其中越靠近所述支撑部 的地基材料层的刻蚀速率越高;以及利用掩模刻蚀所述地基叠层以形成所述第一地基和第二地基。
- 根据权利要求20所述的方法,其中所述利用掩模刻蚀所述地基叠层以形成所述第一地基和第二地基包括:在所述地基叠层上涂布压印胶层;压印所述压印胶层以形成图案化的压印胶;以及利用所述图案化的压印胶为掩模,刻蚀所述地基叠层以形成所述第一地基和第二地基。
- 根据权利要求19-21任意一项所述的方法,其中所述第一通道层和所述第二通道层同时形成包括:利用溅射法在所述第一地基和所述第二地基上沉积靶材材料以同时形成所述第一通道层和所述第二通道层,其中每个所述第一地基和所述第二地基的顶面上的薄膜沉积速率大于其侧面上的薄膜沉积速率。
- 根据权利要求22所述的方法,其中在所述地基部的远离所述支撑部的一侧形成通道限定部还包括:在利用所述溅射法形成所述第一通道层和所述第二通道层的同时,在所述地基部的远离所述支撑部的一侧上形成第一通道壁、第二通道壁和连接第一通道壁和第二通道壁的第三通道层,其中,所述第一通道壁和所述第二通道壁彼此相对设置并且用作所述微流体通道的两个侧壁,所述第三通道层覆盖所述支撑部并且用作所述微流体通道的底部,所述第一通道层、所述第二通道层、所述第一通道壁、第二通道壁和第三通道层采用相同的透光材料制成。
- 根据权利要求19-23任意一项所述的方法,在准备所述支撑部之后并且在形成所述地基部之前,所述方法还包括:在所述支撑部上形成光学膜层,其中所述光学膜层包括光学信号透射区和光学信号遮挡区,并且其中所述光学信号透射区在所述支撑部上的正投影落在所述第一地基和所述第二地基的侧面在所述支撑部上的正投影之内。
- 根据权利要求19-24任意一项所述的方法,其中在形成所述地基部之后并且在形成所述通道限定部之前,所述方法还包括:在每个所述第一地基和所述第二地基面向所述微流体通道的侧面上形成光反射层。
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10130568A1 (de) * | 2001-06-27 | 2003-01-16 | Nanoparc Gmbh | Optoelektrisches Analysesystem für die Biotechnologie |
DE10219560C1 (de) * | 2002-04-26 | 2003-10-23 | Siemens Ag | Probenträger mit einer Probenplatte für optisch zu untersuchende Proben |
CN1766645A (zh) * | 2004-10-26 | 2006-05-03 | 大日本网目版制造株式会社 | 通道结构及其制造方法 |
CN101175553A (zh) * | 2005-05-13 | 2008-05-07 | 索尼德国有限责任公司 | 制造具有至少一个孔的聚合物膜的方法 |
CN101301990A (zh) * | 2008-01-17 | 2008-11-12 | 上海交通大学 | 用于芯片实验室的声表面波微流体驱动器及其制造方法 |
CN102706835A (zh) * | 2012-05-14 | 2012-10-03 | 中央民族大学 | 一种双探测生化传感检测仪的传感芯片及其制备方法 |
US20140002816A1 (en) * | 2012-06-29 | 2014-01-02 | National Institute For Materials Science | Substrate for surface enhanced raman spectroscopy analysis and manufacturing method of the same, biosensor using the same, and microfluidic device using the same |
CN104620113A (zh) * | 2012-08-31 | 2015-05-13 | 国立大学法人东京大学 | 检测装置及检测方法 |
CN104823049A (zh) * | 2012-10-01 | 2015-08-05 | 普林斯顿大学理事会 | 具有增强的光学信号的微流体传感器 |
CN108474741A (zh) * | 2015-12-23 | 2018-08-31 | 皇家飞利浦有限公司 | 流体中粒子的光学检测 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4455032B2 (ja) * | 2003-12-08 | 2010-04-21 | キヤノン株式会社 | 濃度測定装置および濃度測定方法 |
US20080245971A1 (en) | 2005-10-03 | 2008-10-09 | Koninklijke Philips Electronics, N.V. | Biosensors with Improved Sensitivity |
CN103008038B (zh) * | 2013-01-11 | 2015-07-01 | 西安交通大学 | 双极电极-纸基微流控的芯片及其制备方法 |
WO2015074005A1 (en) * | 2013-11-17 | 2015-05-21 | Quantum-Si Incorporated | Active-source-pixel, integrated device for rapid analysis of biological and chemical speciments |
CN104483496B (zh) * | 2014-11-13 | 2017-08-25 | 广东泓睿科技有限公司 | 绕轴心旋转的检测装置及其检测方法 |
-
2018
- 2018-11-06 CN CN201811312659.5A patent/CN111135878B/zh active Active
-
2019
- 2019-09-24 WO PCT/CN2019/107487 patent/WO2020093802A1/zh active Application Filing
- 2019-09-24 US US16/647,386 patent/US11219894B2/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10130568A1 (de) * | 2001-06-27 | 2003-01-16 | Nanoparc Gmbh | Optoelektrisches Analysesystem für die Biotechnologie |
DE10219560C1 (de) * | 2002-04-26 | 2003-10-23 | Siemens Ag | Probenträger mit einer Probenplatte für optisch zu untersuchende Proben |
CN1766645A (zh) * | 2004-10-26 | 2006-05-03 | 大日本网目版制造株式会社 | 通道结构及其制造方法 |
CN101175553A (zh) * | 2005-05-13 | 2008-05-07 | 索尼德国有限责任公司 | 制造具有至少一个孔的聚合物膜的方法 |
CN101301990A (zh) * | 2008-01-17 | 2008-11-12 | 上海交通大学 | 用于芯片实验室的声表面波微流体驱动器及其制造方法 |
CN102706835A (zh) * | 2012-05-14 | 2012-10-03 | 中央民族大学 | 一种双探测生化传感检测仪的传感芯片及其制备方法 |
US20140002816A1 (en) * | 2012-06-29 | 2014-01-02 | National Institute For Materials Science | Substrate for surface enhanced raman spectroscopy analysis and manufacturing method of the same, biosensor using the same, and microfluidic device using the same |
CN104620113A (zh) * | 2012-08-31 | 2015-05-13 | 国立大学法人东京大学 | 检测装置及检测方法 |
CN104823049A (zh) * | 2012-10-01 | 2015-08-05 | 普林斯顿大学理事会 | 具有增强的光学信号的微流体传感器 |
CN108474741A (zh) * | 2015-12-23 | 2018-08-31 | 皇家飞利浦有限公司 | 流体中粒子的光学检测 |
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US20210129140A1 (en) | 2021-05-06 |
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