WO2020093245A1 - Dispositif laser à solide - Google Patents

Dispositif laser à solide Download PDF

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Publication number
WO2020093245A1
WO2020093245A1 PCT/CN2018/114203 CN2018114203W WO2020093245A1 WO 2020093245 A1 WO2020093245 A1 WO 2020093245A1 CN 2018114203 W CN2018114203 W CN 2018114203W WO 2020093245 A1 WO2020093245 A1 WO 2020093245A1
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WO
WIPO (PCT)
Prior art keywords
laser
laser light
lens
mirror
output
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PCT/CN2018/114203
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English (en)
Chinese (zh)
Inventor
丁闯
勾志勇
蒋峰
Original Assignee
深圳市创鑫激光股份有限公司
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Priority to PCT/CN2018/114203 priority Critical patent/WO2020093245A1/fr
Publication of WO2020093245A1 publication Critical patent/WO2020093245A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/101—Lasers provided with means to change the location from which, or the direction in which, laser radiation is emitted
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109—Frequency multiplication, e.g. harmonic generation

Definitions

  • the embodiments of the present application relate to the field of laser technology, in particular to a solid-state laser.
  • Ultraviolet lasers have high photon energy and can directly destroy many molecules of non-metallic materials during material processing to achieve "cold" processing. Moreover, the ultraviolet laser has a small spot, short wavelength, and good focusing performance, which is suitable for processing fine structures.
  • Green solid-state lasers have the advantages of high efficiency, high power, good beam quality, small size, long life, etc., and are widely used in color display, laser medical, underwater communication, precious metal marking and other fields.
  • a laser may be required to output multiple wavelengths, and dual-wavelength lasers have become a research hotspot.
  • dual-wavelength lasers are also required in laser medical environmental biology. For example, when processing a part composed of multiple materials, according to the material properties, thickness, incident spot size requirements, power requirements, etc., Need to be able to freely switch between different wavelengths of laser.
  • the applicant of the present application found that the current dual-wavelength laser simultaneously generates laser light of two wavelengths through the dichroic prism, and the conversion efficiency is low.
  • the technical problem mainly solved by the embodiments of the present application is to provide a solid-state laser capable of selectively outputting lasers of different wavelengths, and having only one band of laser output required at the same time, with high conversion efficiency.
  • a technical solution adopted by the embodiments of the present application is to provide a solid-state laser, including: a laser input module for generating and emitting a laser light source; and a first wavelength laser generating module provided at the laser input The output end of the module is used to convert the laser light source into the first laser and output; the rotatable mirror is provided at the output end of the first wavelength laser generating module, the rotatable mirror is provided with a first area and a Two areas, the rotatable mirror is used to transmit the first laser light through the first area when in the first position, so that the first laser light is output in the first output direction of the rotatable mirror, When in the second position, the first laser light is reflected through the second area, so that the first laser light is output along the second output direction of the rotatable mirror; a second wavelength laser generating module is provided in the The second output direction of the rotatable mirror is used to convert and output the first laser light reflected by the second area into a second laser light
  • the first wavelength laser generating module includes a first lens, a laser crystal, an acousto-optic Q switch, a second lens, a first dichroic mirror, a first frequency-doubling crystal, and a third lens arranged in sequence;
  • the first lens is provided at the output end of the laser input module, the first lens is used for transmitting the laser light source;
  • the laser crystal converts the laser light source output by the first lens into a third Laser;
  • the acousto-optic Q switch is used to modulate the continuous third laser output by the laser crystal into the pulsed third laser;
  • the second lens is used to reflect the output of the acousto-optic Q switch
  • the first dichroic mirror is used to reflect the third laser reflected by the second lens;
  • the first frequency-doubling crystal is used to reflect through the first dichroic mirror
  • the third lens is used to reflect the third laser output from the first frequency doubling crystal to the first frequency doubling crystal;
  • part of the third laser light is on the first lens, the laser crystal, the acousto-optic Q switch, the second lens, the first dichroic mirror, and the first frequency doubling It oscillates between the crystal and the third lens until it is converted into the first laser, and then is output from the first dichroic mirror to the rotatable mirror.
  • the second wavelength laser generating module includes a second dichroic mirror, a fourth lens, a second frequency-doubling crystal, and a fifth lens arranged in sequence; the rotatable mirror is also specifically used for: In the second position, the first laser light transmitted by the first dichroic mirror is reflected through the second area; the second dichroic mirror is provided in the reflection direction of the rotatable mirror, so The second dichroic mirror is used to reflect the first laser light reflected through the rotatable mirror; the fourth lens is used to reflect the first laser light output from the second dichroic mirror; The second frequency doubling crystal is used to reflect the first laser light reflected through the fourth lens; the fifth lens is used to reflect the first laser light transmitted through the second frequency doubling crystal; the second The frequency doubling crystal is also used to convert the first laser reflected by the fifth lens into the second laser; the fourth lens is also used to transmit the second laser output through the second frequency doubling crystal Laser light, so that the second laser light is emitted in the second direction.
  • the rotatable mirror is
  • part of the first laser light oscillates between the second dichroic mirror, the fourth lens, the second frequency-doubling crystal, and the fifth lens until converted to the second
  • the laser light is then output from the fourth lens.
  • the first direction is the same as the second direction.
  • the laser light source is a 878 nm laser
  • the first laser is a 532 nm laser
  • the second laser is a 266 nm laser
  • the third laser is a 1064 nm laser.
  • the solid-state laser further includes: a focusing module; the focusing module is disposed between the laser input module and the first wavelength laser generating module, and the focusing module is used to output the laser input module The laser light source is focused.
  • the focusing module includes: a first plano-convex mirror and a second plano-convex mirror, the convex surface of the first plano-convex mirror and the convex surface of the second plano-convex mirror are disposed oppositely, the first plano-convex The mirror is used to input the laser light source, and the second plano-convex mirror is used to output the focused laser light source.
  • the solid-state laser further includes: a rotary displacement device, the rotatable mirror is provided on the rotary displacement device; the rotary displacement device is used to rotate the rotatable mirror to the first position, The first region is transmitted through the first laser light, or the rotatable mirror is rotated to the second position, so that the second region reflects the first laser light.
  • the rotation displacement device includes: a first synchronous electric gear, a second synchronous electric gear, a third synchronous electric gear, and a base; the rotatable mirror, the first synchronous electric gear, and the second synchronous
  • the electric gear and the third synchronous electric gear are mounted on the base, and the first synchronous electric gear, the second synchronous electric gear and the third synchronous electric gear are respectively provided on the side of the rotatable mirror
  • the first synchronous electric gear, the second synchronous electric gear, and the third synchronous electric gear are used to drive the rotatable rotation.
  • the solid-state laser further includes: a limiting device; the limiting device is used to limit the position of the rotatable mirror so that the rotatable mirror stops at the first position or the second position.
  • the solid-state laser further includes: a controller connected to the rotational displacement device; the controller is used to control the rotational displacement device to cause all The rotatable mirror rotates to the first position; when receiving the second wavelength laser output instruction, the rotary displacement device is controlled to rotate the rotatable mirror to the second position.
  • the controller is also connected to the laser input module, the first wavelength laser generating module and the second wavelength laser generating module.
  • the beneficial effects of the embodiments of the present application are: different from the situation in the prior art, the embodiments of the present application provide a solid-state laser that generates a laser light source through a laser input module, and the first wavelength laser generating module receives the laser light source output by the laser input module, The laser light source is converted into the first laser, and the rotatable mirror rotates to a different position, thereby selectively outputting the first laser or the second laser.
  • the wavelengths of the first laser and the second laser are different, so that there is only one needed at the same time Band laser output, the conversion efficiency is higher.
  • FIG. 1 is a schematic structural diagram of a solid-state laser provided by an embodiment of the present application.
  • FIG. 2 is a partial structural schematic diagram of a solid-state laser provided by an embodiment of the present application.
  • FIG. 3 is a schematic diagram of a circuit structure of a solid-state laser provided by an embodiment of the present application.
  • a laser source is incident on a beam splitter prism to separate two wavelengths of laser light, so that two wavelengths of laser light can be generated at the same time, but the conversion efficiency is low in this way.
  • a higher power laser source is required.
  • lasers of two wavelengths must be output at the same time, selection and switching cannot be performed, and the selectivity is poor.
  • the embodiments of the present application provide a solid-state laser.
  • lasers of different wavelengths can be selected to output, and only one band of laser output is needed at a time, and the conversion efficiency is high.
  • the solid-state laser will be described below through examples.
  • FIG. 1 is a schematic structural diagram of a solid-state laser provided by an embodiment of the present application.
  • the solid-state laser 100 includes a laser input module 110, a first wavelength laser generation module 120, a rotatable mirror 130, and a second wavelength laser generation module 140.
  • the first wavelength laser generating module 120 is provided at the output end of the laser input module 110, the rotatable mirror 130 is provided at the output end of the first wavelength laser generating module 120, and the rotatable mirror 130 is provided with a first output direction and a second output Direction, the output direction of the first wavelength laser generating module 120 is the same as the first output direction, and the second wavelength laser generating module 140 is disposed in the second output direction of the rotatable mirror 130.
  • the laser input module 110 is used to generate and emit a laser light source
  • the first wavelength laser generation module 120 is used to receive the laser light source, and convert the laser light source into the first laser light and output
  • the rotatable mirror 130 is used to When in the first position, through the first laser, the first laser is output in the first output direction of the rotatable mirror 130, when in the second position, the first laser is reflected, so that the first laser is along the The second output direction is output.
  • the second wavelength laser generating module 140 is used to convert the first laser light reflected by the rotatable mirror 130 into a second laser light and output it.
  • the laser light source is a semiconductor laser at 878 nm
  • the first laser is a 532 nm laser (green laser)
  • the second laser is a 266 nm laser (ultraviolet laser).
  • the laser light source, the first laser, and the second laser can also be lasers of other wavelengths, as long as the following conditions are met: the wavelength of the laser light source can generate the first laser after being input into the first wavelength laser generating module 120, and the wavelength of the first laser It is twice the wavelength of the second laser.
  • the laser input module 110 may be a semiconductor laser for generating and emitting a laser light source, thereby providing a light source for the solid-state laser 100.
  • the first wavelength laser generating module 120 includes: a first lens 121, a laser crystal 122, an acousto-optic Q switch 123, a second lens 124, a first dichroic mirror 125, a first frequency-doubling crystal 126, and a third lens 127.
  • the first lens 121, the laser crystal 122, the acousto-optic Q switch 123, the second lens 124, the first dichroic mirror 125, the first frequency-doubling crystal 126, and the third lens 127 are respectively arranged in sequence.
  • the first lens 121, the laser crystal 122, the acousto-optic Q switch 123, and the second lens 124 are arranged in sequence, the first dichroic mirror 125, the first frequency doubling crystal 126, and the third lens 127 are arranged in sequence, and the first lens 121.
  • the laser light transmitted by the laser crystal 122, the acousto-optic Q switch 123 and the second lens 124 is parallel to the first direction, and the laser light transmitted by the first dichroic mirror 125, the first frequency doubling crystal 126 and the third lens 127
  • the direction is the same as or opposite to the first direction.
  • the first lens 121 is disposed on the output end of the laser input module 110
  • the laser crystal 122 is disposed on the side of the first lens 121 away from the laser input module 110
  • the acousto-optic Q switch 123 is disposed on the laser crystal 122 away from the first lens 121
  • the second lens 124 is located on the side of the acousto-optic Q switch 123 away from the laser crystal 122, and is inclined at 45 degrees.
  • the first dichroic mirror 125 is opposite to the second lens 124 and is inclined at 45 degrees.
  • the first frequency doubling crystal 126 is provided between the first dichroic mirror 125 and the third lens 127.
  • the laser crystal 122 is provided at the output end of the first lens 121, the acousto-optic Q switch 123 is provided at the output end of the laser crystal 122, the second lens 124 is provided at the output end of the acousto-optic Q switch 123, and the first dichroic mirror 125 is provided At the output end of the second lens 124, the first frequency doubling crystal 126 is provided at the reflection end of the first dichroic mirror 125, and the third lens 127 is provided at the output end of the first frequency doubling crystal 126.
  • the first lens 121, the laser crystal 122, the acousto-optic Q switch 123, the second lens 124, the first dichroic mirror 125, the first frequency-doubling crystal 126, and the third lens 127 constitute a resonant cavity.
  • the first lens 121 may be a plane mirror or a curved mirror, specifically a front cavity plane mirror of the resonant cavity, which belongs to a total reflection mirror.
  • An end surface of the first lens 121 close to the laser input module 110 is coated with an 878 nm AR coating, and an end surface of the first lens 121 close to the laser crystal 122 is coated with an 878 nm AR coating and a 1064 nm high reflection film.
  • the first lens 121 is used to transmit the 878 nm laser light source emitted by the laser input module 110 and reflect the 1064 nm laser to prevent it from entering the laser input module 110.
  • the laser crystal 122 is a yttrium aluminum garnet crystal (Neodymium-doped Yttrium Aluminium Garnet; Nd: Y3Al5O12), which is a YAG laser crystal, which jumps to a high energy level after absorbing 878 nm pump light, thereby radiating 1064 nm light. Both end surfaces of the laser crystal 122 are coated with a 1064 nm high reflection film and a 878 nm antireflection film. In the present embodiment, the laser crystal 122 is used to convert the 878 nm laser light source output by the first lens 121 into a third laser of 1064 nm.
  • the acousto-optic Q switch 123 can convert the continuous laser power output into a laser pulse output with high peak power through Q-switching technology.
  • the acousto-optic Q switch 123 is used to modulate the continuous third laser light output by the laser crystal 122 into a pulsed third laser light, wherein the third laser light is a 1064 nm laser light.
  • the second lens 124 may be a mirror made of a plane mirror or a curved mirror.
  • the reflection surface of the second lens 124 is at 45 degrees to the optical axis of the third laser light emitted from the acousto-optic Q switch 123, and the end surface of the second lens 124 near the resonant cavity is coated with a 1064 nm high reflection film to improve the reflection efficiency.
  • the second lens 124 is used to reflect the 1064 nm third laser light output by the acousto-optic Q switch 123.
  • the first dichroic mirror 125 can reflect 1064 nm laser light on its inner surface, and can transmit 532 nm laser light.
  • the first dichroic mirror 125 is used to receive the third laser light reflected by the second lens 124 at a 45-degree angle and reflect the third laser light to the first frequency-doubling crystal 126; the first dichroic mirror 125 is also used for the first laser light output through the first frequency doubling crystal 126, so that the first laser light is output in the direction of the rotatable mirror 130.
  • the first frequency doubling crystal 126 is a frequency doubling crystal, for example, a lithium triborate crystal (LBO), which cooperates with the laser crystal 122 and the acousto-optic Q switch 123, so that the conversion efficiency of the resonant cavity is high. Both ends of the first frequency-doubling crystal 126 are plated with an antireflection coating of 1064 nm and an antireflection coating of 532 nm.
  • LBO lithium triborate crystal
  • the first frequency doubling crystal 126 is used for the third laser light reflected through the first dichroic mirror 125, and the first frequency doubling crystal 126 is also used to convert the third laser light reflected by the third lens 127 into The first laser light is output in the direction where the first dichroic mirror 125 and the rotatable mirror 130 are located.
  • the third lens 127 is a reflection mirror, and the third lens 127 is adjustable, which is an adjustable rear cavity plane mirror of the resonant cavity.
  • the inner side of the cavity of the third lens 127 near the resonant cavity is coated with a 1064 nm high reflection film and a 532 nm high reflection film to increase the reflection efficiency.
  • the third lens 127 is used to reflect the third laser light with a wavelength of 1064 nm output from the first frequency doubling crystal 126 to the first frequency doubling crystal 126.
  • the working process of the first wavelength laser generating module 120 is roughly as follows: the first lens 121 emits a 878 nm laser light source through the laser input module 110, and the laser light source is converted into a third wavelength of 1064 nm in the laser crystal 122 Laser light, the acousto-optic Q switch 123 modulates the continuous third laser light into a pulsed third laser light, the second lens 124 reflects the third laser light to the first dichroic mirror 125, and the first dichroic mirror 125 converts the third laser light Reflected to the first frequency doubling crystal 126, the third laser light passes through the first frequency doubling crystal 126 and enters the third lens 127, the third lens 127 reflects the third laser light to the first frequency doubling crystal 126, the first frequency doubling crystal 126 converts the third laser light with a wavelength of 1064 nm into the first laser light with a wavelength of 532 nm and outputs it to the first dichroic mirror 125.
  • the first laser light passes through the first dichroic mirror 125 and is output to the rotatable mirror 130.
  • part of the 1064nm third laser that is not converted will be in the first lens 121, the laser crystal 122, the acousto-optic Q switch 123, the second lens 124, the first dichroic The mirror 125, the first frequency doubling crystal 126, and the third lens 127 oscillate until they are converted into 532nm laser light, and then output from the first dichroic mirror 125 to the rotatable mirror 130.
  • the rotatable mirror 130 is disposed on a side of the first dichroic mirror 125 away from the first frequency-doubling crystal 126, and is used to receive the first laser light output by the first wavelength laser generating module 120.
  • the rotatable mirror 130 is provided with a first output direction and a second output direction, wherein the direction of the first laser light output by the first wavelength laser generating module 120 is the same as the first output direction of the rotatable mirror 130; the second wavelength laser generating module 140 is set in the second output direction of the rotatable mirror 130 to receive the first laser light reflected by the rotatable mirror 130.
  • the rotatable mirror 130 may be a rotatable flat circular mirror, and the rotatable mirror 130 has a first area 131 and a Two regions 132, the ratio of the areas of the first region 131 and the second region 132 can be set to an equal ratio or other ratios, the first region 131 is coated with a 532nm antireflection coating (R ⁇ 0.2%), and the second region 132 is coated with 532nm High reflective film (R> 99.9%) and 266nm high reflective film.
  • the first area 131 is used to transmit the first laser light, and the second area 132 is used to reflect the first laser light.
  • the first laser light transmitted through the first dichroic mirror 125 is incident on the first area 131, so that the first laser light passes through the first area and the first laser light is emitted in the first direction
  • the first laser light transmitted through the first dichroic mirror 125 is incident on the second area 132, and the second area 132 reflects the first laser light to the second wavelength laser generating module 140, so that The first laser light is emitted along the second output direction of the rotatable mirror 130.
  • the first direction can be the first output direction of the rotating mirror 130, and the second output direction of the rotatable mirror 130 is perpendicular to the first direction. Therefore, in the above manner, when the first laser light needs to be output, the rotatable mirror 130 is rotated to the first position, and when the second laser light needs to be output, the rotatable mirror 130 is rotated to the second position.
  • the second wavelength laser generating module 140 includes: a second dichroic mirror 141, a fourth lens 142, a second frequency-doubling crystal 143, and a fifth lens 144.
  • the second dichroic mirror 141, the fourth lens 142, the second frequency doubling crystal 143 and the fifth lens 144 are arranged in sequence.
  • the second dichroic mirror 141 is disposed in the second output direction of the rotatable mirror 130
  • the fourth lens 142 is disposed on the side of the second dichroic mirror 141 away from the rotatable mirror 130
  • the second frequency-doubling crystal 143 5 is arranged in the vertical direction of the second output direction of the rotatable mirror 130
  • the second frequency-doubling crystal 143 is arranged between the fourth lens 142 and the fifth lens 144.
  • an end surface of the second dichroic mirror 141 near the rotatable mirror 130 is coated with a 532 nm AR coating
  • an end surface near the fourth lens 142 is coated with a 532 nm AR coating and a 266 nm high reflection coating.
  • the second dichroic mirror 141 can transmit 532 nm laser light and reflect 266 nm laser light.
  • the second dichroic mirror 141 is used to transmit the 532 nm first laser light reflected by the rotatable mirror 130 and output to the fourth lens 142.
  • the fourth lens 142 may be a reflecting mirror or a dichroic mirror made of a plane mirror or a curved mirror.
  • the fourth lens 142 can reflect 532 nm laser light and can transmit 266 nm laser light.
  • the reflection surface of the fourth lens 142 is at 45 degrees to the direction of the incident first laser light, and an end surface of the fourth lens 142 near the second dichroic mirror 141 is coated with a 532 nm high reflection film and a 266 nm antireflection film.
  • the fourth lens 142 is used to receive the first laser light output by the second dichroic mirror 141 at a 45-degree angle and reflect the first laser light to the second frequency-doubling crystal 143.
  • the fourth lens 142 also The second laser light transmitted through the second frequency-doubling crystal 143 is used to emit the second laser light in the second direction.
  • the second frequency doubling crystal 143 is a frequency doubling crystal, for example, it can be barium metaborate crystal (BBO). Both ends of the second frequency-doubling crystal 143 are plated with an anti-reflection coating of 532 nm and an anti-reflection coating of 266 nm.
  • the second frequency doubling crystal 143 is used to transmit the first laser light reflected from the fourth lens 142, and the second frequency doubling crystal 143 is also used to receive the first laser light reflected from the fifth lens 144, and the One laser is converted into a second laser.
  • the second laser is a 266 nm laser.
  • the fifth lens 144 is a reflecting mirror, specifically a plane mirror, and the reflecting surface of the fifth lens 144 near the second frequency-doubling crystal 143 is plated with a 532 nm high reflection film and a 266 nm high reflection film.
  • the fifth lens 144 is used to reflect the first laser light transmitted from the second frequency doubling crystal 143 back to the second frequency doubling crystal 143.
  • the working process of the second wavelength laser generating module 140 is roughly as follows: the rotatable mirror 130 reflects the first laser beam of 532 nm wavelength output by the first wavelength laser generating module 120 to the second dichroic mirror 141, A laser passes through the second dichroic mirror 141 and enters the fourth lens 142.
  • the fourth lens 142 reflects the first laser to the second frequency doubling crystal 143, and the first laser passes through the second frequency doubling crystal 143 to
  • the fifth lens 144 reflects the first laser to the second frequency-doubling crystal 143, and the second frequency-doubling crystal 143 converts the 532nm first laser into a 266nm wavelength second laser and outputs it to the fourth lens 142.
  • the two lasers are output through the fourth lens 142.
  • part of the 532nm first laser that has not been converted will be among the second dichroic mirror 141, the fourth lens 142, the second frequency-doubling crystal 143, and the fifth lens 144 It oscillates intermittently until it is converted into 266nm laser light, and then is output from the fourth lens 142.
  • the first direction in which the first laser beam is emitted is the same as the second direction in which the second laser beam is emitted.
  • the output direction of the first wavelength laser generating module 120 is the same as the output direction of the second wavelength laser generating module 140, and the first output direction of the rotatable mirror 130 is perpendicular to the second output direction.
  • the first laser light output by the first wavelength laser generating module 120 is emitted along the first output direction of the rotatable mirror 130, and when the rotatable mirror 130 is at the second position, the first wavelength laser The first laser light output by the generating module 120 is emitted along the second output direction of the rotatable mirror 130, converted into a second laser by the second wavelength laser generating module 140 and output, so that the first direction of the first laser emission and the second laser The second direction of exit is the same.
  • the cavity structure of the solid-state laser 100 is regular, the difficulty of assembly and production is small, and the direction of the output laser is the same, which provides convenience for the construction of the peripheral optical path of the laser.
  • the solid-state laser 100 further includes a focusing module 150.
  • the focusing module 150 is disposed between the laser input module 110 and the first wavelength laser generating module 120.
  • the focusing module 150 is used to focus the laser light source output by the laser input module 110 to focus it on the first wavelength laser generating module 120.
  • the thermal lens effect of the laser crystal 122 is reduced, and the conversion efficiency of the crystal is improved.
  • the focusing module 150 includes a first plano-convex mirror 151 and a second plano-convex mirror 152.
  • the convex surface of the first plano-convex mirror 151 and the convex surface of the second plano-convex mirror 152 are oppositely arranged.
  • the first plano-convex mirror 151 is located near the end of the laser input module 110.
  • the first plano-convex mirror 151 is used to input the laser light source emitted by the laser input module 110;
  • the second plano-convex mirror 152 is located near the end of the first lens 121
  • the second plano-convex mirror 152 is used to output and focus the laser light source to the laser crystal 122.
  • the solid-state laser 100 further includes: a rotation displacement device 160 and a limit device 170.
  • the rotatable mirror 130 is installed on the rotation displacement device 160
  • the limiting device 170 is installed on the rotation displacement device 160.
  • the rotation displacement device 160 is used to rotate the rotatable mirror 130 to the first position, so that the first region 131 transmits the first laser, or rotate the rotatable mirror 130 to the second position, so that the second region 132 Reflect the first laser to achieve the purpose of wavelength switching.
  • the limiting device 170 is used to limit the position of the rotatable mirror 130 so that the rotatable mirror 130 stops at the first position or the second position.
  • the rotation displacement device 160 may include: a first synchronous electric gear 161, a second synchronous electric gear 162, a third synchronous electric gear 163, and a base 164.
  • the rotatable mirror 130 is installed on the base 164, and the first synchronous electric gear 161, the second synchronous electric gear 162, and the third synchronous electric gear 163 are installed on the base 164, and the first synchronous electric gear 161, the second synchronous electric gear 162, and The third synchronous electric gears 163 are respectively provided at different positions on the side of the rotatable mirror 130.
  • the rotation axis J1 of the first synchronous electric gear 161, the rotation axis J2 of the second synchronous electric gear 162, and the rotation axis J3 of the third synchronous electric gear 163 rotate synchronously to make the first synchronous electric gear 161.
  • the second synchronous electric gear 162 and the third synchronous electric gear 163 drive the rotatable mirror 130 to rotate.
  • J1 is an electric rotating spindle
  • J2 and J3 are optical circular orbits to ensure that the angle between the lens and the incident optical path is constant.
  • J1 is the driving axis, J2, J3 driven axis.
  • the limit device 170 may be a limit switch.
  • the rotary displacement device 160 stops rotating, so that the rotatable The mirror 130 stops at the first position or the second position.
  • the solid-state laser 100 further includes: a controller 180.
  • the controller 180 is connected to the rotation displacement device 160.
  • the controller 180 is used to: when receiving the first wavelength laser output instruction, control the rotation displacement device 160 to rotate the rotatable mirror 130 to the first position; when receiving the second wavelength laser When the command is output, the rotary displacement device 160 is controlled to rotate the rotatable mirror 130 to the second position.
  • the controller 180 is also connected to the laser input module 110, the first wavelength laser generating module 120, and the second wavelength laser generating module 140
  • the controller 180 is also used to: after the rotatable mirror 130 is rotated to the first position, control the first frequency doubling crystal 126 of the first wavelength laser generating module 120 to work so that the first frequency doubling crystal 126 reaches the preset operating temperature ,
  • the laser input module 110 is controlled to output a laser light source, and the acousto-optic Q switch of the first wavelength laser generating module 120 is turned on to output the first laser; after the rotatable mirror 130 is rotated to the second position, the first wavelength laser is controlled to be generated
  • the first frequency doubling crystal 126 of the module 120 works, and at the same time controls the operation of the second frequency doubling crystal 143 of the second wavelength laser generating module 140 so that the first frequency doubling crystal 126 and the second frequency doubling crystal 143 reach
  • the solid-state laser 100 generates a laser light source through the laser input module 110
  • the first wavelength laser generation module 120 receives the laser light source output from the laser input module 110, and converts the laser light source into the first laser light
  • the rotatable mirror 130 passes Rotate to a different position to select the first laser or the second laser.
  • the wavelength of the first laser and the second laser are different, so that only one band of laser output is needed at the same time, the conversion efficiency is higher, and it is more convenient and more convenient. Element laser marking materials, users can freely switch the laser band according to the needs of the material.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

La présente invention porte sur un dispositif laser à solide (100), comprenant : un module d'entrée laser (110) destiné à générer et émettre une source de lumière laser ; un premier module de génération laser à longueurs d'onde (120), situé au niveau d'une extrémité de sortie du module d'entrée laser (110), et servant à convertir la source de lumière laser en une première lumière laser et à émettre la première lumière laser ; une lentille rotative (130), disposée au niveau d'une extrémité de sortie du premier module de génération laser à longueurs d'onde (120), la lentille rotative (130) comportant une première région (131) et une seconde région (132) et transmettant, lorsqu'elle est dans une première position, la première lumière laser à travers la première région (131) et émettant la première lumière laser dans une première direction de sortie de la lentille rotative (130), et réfléchissant, lorsqu'elle est dans une seconde position, la première lumière laser au moyen de la seconde région (132) et émettant la première lumière laser dans une seconde direction de sortie de la lentille rotative (130) ; et un second module de génération laser à longueurs d'onde (140), disposé dans la seconde direction de sortie de la lentille rotative (130), et servant à convertir la première lumière laser réfléchie par la seconde région (132) en une seconde lumière laser et à émettre la seconde lumière laser. Selon la présente invention, la lumière laser présentant différentes longueurs d'onde peut être sélectionnée pour être émise, et la lumière laser d'une seule gamme d'ondes requise est émise à la fois, et l'efficacité de conversion est relativement élevée.
PCT/CN2018/114203 2018-11-06 2018-11-06 Dispositif laser à solide WO2020093245A1 (fr)

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PCT/CN2018/114203 WO2020093245A1 (fr) 2018-11-06 2018-11-06 Dispositif laser à solide

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PCT/CN2018/114203 WO2020093245A1 (fr) 2018-11-06 2018-11-06 Dispositif laser à solide

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WO2020093245A1 true WO2020093245A1 (fr) 2020-05-14

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202723981U (zh) * 2012-02-10 2013-02-13 上海瑞柯恩激光技术有限公司 双路并列同轴耦合单光纤输出的激光治疗装置
CN103182284A (zh) * 2013-03-21 2013-07-03 上海交通大学 气相光热耦合催化反应器
KR20140020147A (ko) * 2012-08-08 2014-02-18 주식회사 루트로닉 스위칭유닛 및 레이저장치
CN204835199U (zh) * 2015-08-12 2015-12-02 南京大学 一种基于翻折连接架的1064nm与532nm双波长可切换激光器
CN106170897A (zh) * 2014-02-13 2016-11-30 斯佩克卓尼克斯株式会社 激光光源装置以及激光器脉冲光生成方法
CN107112711A (zh) * 2014-12-16 2017-08-29 波士顿科学医学有限公司 双波长外科激光系统

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202723981U (zh) * 2012-02-10 2013-02-13 上海瑞柯恩激光技术有限公司 双路并列同轴耦合单光纤输出的激光治疗装置
KR20140020147A (ko) * 2012-08-08 2014-02-18 주식회사 루트로닉 스위칭유닛 및 레이저장치
CN103182284A (zh) * 2013-03-21 2013-07-03 上海交通大学 气相光热耦合催化反应器
CN106170897A (zh) * 2014-02-13 2016-11-30 斯佩克卓尼克斯株式会社 激光光源装置以及激光器脉冲光生成方法
CN107112711A (zh) * 2014-12-16 2017-08-29 波士顿科学医学有限公司 双波长外科激光系统
CN204835199U (zh) * 2015-08-12 2015-12-02 南京大学 一种基于翻折连接架的1064nm与532nm双波长可切换激光器

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