WO2020084867A1 - Capteur de concentration - Google Patents

Capteur de concentration Download PDF

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Publication number
WO2020084867A1
WO2020084867A1 PCT/JP2019/030928 JP2019030928W WO2020084867A1 WO 2020084867 A1 WO2020084867 A1 WO 2020084867A1 JP 2019030928 W JP2019030928 W JP 2019030928W WO 2020084867 A1 WO2020084867 A1 WO 2020084867A1
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WO
WIPO (PCT)
Prior art keywords
pipe
lens
concave
measurement light
light
Prior art date
Application number
PCT/JP2019/030928
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English (en)
Japanese (ja)
Inventor
一成 横山
峻 黒田
長谷川　雅一
Original Assignee
株式会社堀場アドバンスドテクノ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社堀場アドバンスドテクノ filed Critical 株式会社堀場アドバンスドテクノ
Publication of WO2020084867A1 publication Critical patent/WO2020084867A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity

Definitions

  • the present invention relates to a concentration sensor used for contactlessly measuring the concentration of a fluid flowing in a light-transmitting pipe.
  • the fluid flowing in a transparent pipe is irradiated with measuring light, and the concentration of the fluid is measured based on its absorbance.
  • a non-contact type concentration sensor is used.
  • Such a concentration sensor is configured so that a casing can be attached later to a resin-made pipe having a light-transmitting property through which a fluid flows as shown in Patent Document 1.
  • an optical device such as a collimating lens that collimates the light emitted from the light source and a condensing lens that condenses the measurement light that has passed through the fluid in the pipe and guides it to the photodetector is installed in the housing. It is provided.
  • the pipe itself through which the fluid flows acts as a cylindrical biconvex lens and is diverged. Therefore, there is a problem that the measurement light passing through the fluid detected by the photodetector does not have a sufficient amount of light and the measurement accuracy is inferior to that of the concentration measurement method using electrodes.
  • the present invention has been made in view of the above-described problems, and a concentration sensor capable of improving the measurement accuracy of concentration while facilitating installation and reducing the possibility of contaminating a fluid to be measured.
  • the purpose is to provide.
  • the concentration sensor according to the present invention is a concentration sensor that measures the concentration of a fluid flowing in a pipe formed of a translucent material, and includes a light source that emits measurement light and a light source that emits the measurement light.
  • a collimating lens for collimating the measurement light a condenser lens for condensing the measurement light passing through the pipe, a light detection mechanism for detecting the measurement light condensed by the condenser lens, One or a plurality of concave lenses provided between the corresponding lens and the pipe or between the pipe and the condenser lens, and the pipe based on the intensity of the measurement light detected by the photodetection mechanism.
  • a concentration calculator for calculating the concentration of the fluid flowing therein, wherein one or a plurality of the concave lenses are arranged so as to form a gap with respect to the outer surface of the pipe.
  • the condensing action of the cylindrical convex lens made of the pipe and the fluid can be canceled by the one or more concave lenses.
  • the concave lens is arranged so as to form a space with respect to the outer surface of the pipe and is not in close contact with each other, for example, a minute gap is generated from the state where the concave lens and the pipe are in close contact with each other. It can be prevented from being formed and causing optical interference. Therefore, it is possible to prevent the optical interference from affecting the concentration measurement.
  • the minute gap in this case refers to a small distance of about several tens mm or less.
  • the radius of curvature of the concave surface of the concave lens may be larger than the radius of curvature of the pipe.
  • the concave surface of the concave lens may have a radius of curvature smaller than that of the pipe.
  • the collimating lens and the light condensing lens are spherical lenses. It is sufficient that the first concave lens and the second concave lens are cylindrical lenses.
  • a plurality of the concave lenses are provided between the collimating lens and the pipe.
  • a second concave lens provided between the pipe and the condenser lens, and the concave surface of the first concave lens is formed on the measurement light incident side of the pipe.
  • the concave surface of the second concave lens is formed on the incident side of the measurement light facing the outer surface of the pipe.
  • a plurality of the concave lenses are a first concave lens provided between the collimating lens and the pipe, the pipe and the condensing lens. And a second concave lens provided between the first concave lens and the second concave lens, the concave surface of the first concave lens is formed on the emission side of the measurement light facing the outer surface of the pipe, and the concave surface of the second concave lens is The one formed on the incident side of the measurement light facing the outer surface of the pipe can be mentioned.
  • the first concave lens has a convex surface formed on the measurement light incident side, and the second concave lens is formed on the measurement light emission side. It is sufficient that the convex surface is formed.
  • the concave lens is provided between the collimating lens and the pipe, or It should be provided only on one of the pipe and the condenser lens, and concave surfaces may be formed on both the incident side and the reflection side of the measurement light of the concave lens.
  • the light source, the collimating lens, the one or more concave lenses, and the light condensing lens are provided so that the pipe can be easily retrofitted to an existing pipe formed of a translucent material.
  • a lens and a housing for holding the photodetection mechanism at a predetermined position are further provided, and the housing is detachable from the pipe, and the first housing is attached to the pipe. It suffices that a gap be formed between the concave lens and the second concave lens and the outer surface of the pipe.
  • the concentration sensor As described above, in the concentration sensor according to the present invention, one or a plurality of the concave lenses provided in the vicinity of the pipe cancels the light condensing function as the cylindrical biconvex lens composed of the pipe and the fluid, and the concentration is detected by the light detection mechanism. It is possible to improve the quantity of the measuring light to be used. Further, since the concave lens is arranged so that a gap is formed with respect to the pipe, it is possible to prevent optical interference from occurring. Further, since the concentration of the fluid can be measured based on the measurement light that passes through the fluid, the concentration sensor itself can be easily installed on the pipe, and the possibility of contamination of the fluid can be reduced.
  • FIG. 6 is a schematic optical path diagram of a concentration sensor according to a second embodiment of the present invention.
  • FIG. 6 is a schematic optical path diagram of a concentration sensor according to a third embodiment of the present invention.
  • the concentration sensor 100 according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 3.
  • various mirrors shown in FIG. 1 are omitted.
  • the cross section of the pipe P is defined as the XY plane, and the axial direction of the pipe P is defined as the Z axis.
  • the concentration sensor 100 shown in FIG. 1 is used to measure the concentration of a liquid such as a chemical liquid supplied to a chamber or the like in a semiconductor manufacturing process, for example.
  • the concentration sensor 100 is retrofitted to a pipe P formed of a translucent material through which a fluid F to be measured flows. That is, the concentration sensor 100 is configured to measure the concentration of the fluid F flowing in the pipe P based on the absorbance while using the pipe P as a part of the optical system.
  • the concentration sensor 100 has a plurality of optical devices arranged and housed in a casing 1 attached to the pipe P, and the casing 1 is configured to be attachable to and detachable from the pipe P. There is.
  • the housing 1 has a light source 2, a collimating lens 3, an entrance-side mirror 4, and a plurality of concave lenses, which are formed on the optical path for measurement, which is formed in a substantially U-shape.
  • the concave lens 5, the second concave lens 6, the exit side mirror 7, the condenser lens 8, and the light detection mechanism 9 are arranged.
  • a pipe P through which the fluid F to be measured flows is arranged between the first concave lens 5 and the second concave lens 6.
  • the positions of the entrance side mirror 4 and the exit side mirror 7 are between a sample position S where a measurement optical path is formed and a reference position R where a reference optical path is formed. It is configured to be modifiable.
  • the entrance side mirror 4 and the exit side mirror 7 are arranged at the reference position R, the measurement light emitted from the light source 2 enters the photodetection mechanism 9 through the reference RF instead of the pipe P.
  • the positions of the light source 2, the collimating lens 3, the first concave lens 5, the second concave lens 6, the condensing lens 8 and the light detection mechanism 9 with respect to the pipe P are predetermined. Fixed in place.
  • the light source 2 is, for example, an LED, and emits measurement light composed of light in a predetermined wavelength range. Further, the lamp box accommodating the LEDs is fixed to the housing 1.
  • the collimating lens 3 is a biconvex spherical lens that collimates the light emitted from the light source 2 as shown in FIG.
  • the first concave lens 5 receives the collimated measurement light emitted from the collimating lens 3 and emits the measurement light to the pipe P.
  • the surface of the first concave lens 5 on the measurement light incident side is formed as a partially cylindrical concave surface, and the surface facing the pipe P on the measurement light emission side is formed as a flat surface.
  • the first concave lens 5 is a cylindrical lens having a concave surface on one surface.
  • the concave surface is formed so as to have a curvature in the circumferential direction of the pipe P on the XY plane, and is arranged so as to have an equal cross-sectional shape in the Z-axis direction which is the axial direction of the pipe P.
  • the first concave lens 5 is arranged, for example, so that all the luminous fluxes of the measurement light collimated by the collimating lens 3 enter.
  • the second concave lens 6 is arranged so as to sandwich the pipe P in the radial direction together with the first concave lens 5.
  • the measurement light emitted from the inside of the pipe P to the outside enters the second concave lens 6.
  • the second concave lens 6 has a partially cylindrical concave surface formed on the surface facing the pipe P that is the measurement light incident side, and the measurement light emission side surface is formed as a flat surface.
  • the second concave lens 6 is a cylindrical lens having a concave surface on one surface.
  • the concave surface is formed so as to have a curvature in the circumferential direction of the pipe P on the XY plane, and is arranged so as to have an equal cross-sectional shape in the Z-axis direction which is the axial direction of the pipe P.
  • a gap is formed between each of the first concave lens 5 and the second concave lens 6 and the outer surface of the pipe P, and the first concave lens 5 and the second concave lens with respect to the pipe P are formed. 6 is configured not to contact. If the refractive index of the chemical liquid that is the fluid flowing in the pipe P is smaller than the refractive index of the material forming the first concave lens 5 and the second concave lens 6, the concave surfaces of the first concave lens 5 and the second concave lens 6 The radius of curvature is formed larger than the radius of curvature of the outer surface of the pipe P.
  • the concave surfaces of the first concave lens 5 and the second concave lens 6 are The radius of curvature is formed smaller than the radius of curvature of the outer surface of the pipe P.
  • the term "void" means a predetermined gap and means that no other substance such as an adhesive agent is present. For example, it is a concept including that only air, gas, or vacuum exists in the void.
  • the collimated measurement light that enters the first concave lens 5 is slightly diverged to the outside and enters the pipe P. Due to the converging action of the biconvex cylindrical lens composed of the pipe P and the fluid F, the measurement light travels in the pipe P in a substantially parallel state.
  • the measurement light is slightly condensed to the inside due to the condensing action of the pipe P, but is diverged to the outside again by the second concave lens 6 and becomes substantially parallel.
  • the measured light thus emitted is emitted from the second concave lens 6.
  • the condenser lens 8 is a biconvex spherical lens, and the collimated measurement light emitted from the second concave lens 6 is incident and condensed on, for example, a slit formed in the photodetection mechanism 9.
  • the light detection mechanism 9 is provided at a position where a spectroscope (not shown) that disperses the measurement light incident from the slit and a light in the absorption wavelength band of the fluid F to be measured is irradiated from the dispersed measurement light. And a photodetector (not shown). The photodetector outputs a voltage according to the intensity of incident light.
  • the light detection mechanism 9 is also fixed to the housing 1.
  • a concentration calculation unit 10 that calculates the concentration of the fluid F based on the output of the light detection mechanism 9 is provided outside the housing 1.
  • the function of the density calculator 10 is realized by a so-called computer including input / output devices such as a CPU, a memory, an A / D converter, and a D / A converter. That is, the program stored in the memory is executed, and the various devices cooperate to realize the function as the concentration calculation unit 10.
  • the density value calculated by the density calculation unit 10 is transmitted to and used by another device other than the density sensor 100, such as a density control device.
  • the concentration calculation unit 10 calculates the absorbance based on the ratio of the intensity of the measurement light that has passed through the optical path for measurement and the intensity of the light that has passed through the optical path for reference RF, and then calculates the logarithm of the absorbance.
  • the concentration of the target fluid F is calculated.
  • the pipe P and the fluid F to be measured exert a condensing action as a biconvex cylindrical lens, and are provided in the vicinity of the pipe P.
  • the action can be canceled by the concave lens 5 and the second concave lens 6. Therefore, most of the measurement light emitted from the light source 2 can be detected by the light detection mechanism 9.
  • the first concave lens 5 diffuses the light so that the light condensing action on the incident surface of the fluid F is canceled and the light in the fluid F becomes parallel, and the light is emitted to the fluid F, and the fluid F is ejected.
  • the light condensed and emitted from the fluid F by the condensing action on the surface is made parallel by the second concave lens 6.
  • the intensity of the light detected by the light detection mechanism 9 can be increased, even a slight change in concentration can be detected, and the concentration measurement accuracy can be improved.
  • first concave lens 5 and the second concave lens 6 are not in contact with the pipe P and a gap is formed, light is emitted between the pipe P and each of the first concave lens 5 and the second concave lens 6. It is possible to prevent interference and influence on the concentration measurement.
  • the concentration sensor 100 of the first embodiment can be retrofitted to the existing pipe P, and the concentration can be measured in a non-contact manner with respect to the fluid F that is the measurement target. Therefore, the installation is easy, and the possibility of contamination of the fluid F flowing in the pipe P due to the concentration measurement can be eliminated.
  • the concentration sensor 100 according to the second embodiment of the present invention will be described with reference to FIG.
  • the members corresponding to the members described in the first embodiment are designated by the same reference numerals.
  • the direction of the first concave lens 5 is opposite to that of the first embodiment. That is, in the first concave lens 5, the surface on the side where the measurement light is incident is formed into a flat surface, and the surface on the side where the measurement light is emitted is formed into a concave surface.
  • the concentration sensor 100 of the third embodiment as described above can achieve the same effect as that of the above-described embodiment.
  • a third embodiment of the present invention will be described with reference to FIG.
  • the members corresponding to the members described in the first embodiment are designated by the same reference numerals.
  • the density sensor 100 of the third embodiment is different from that of the first embodiment in that the first concave lens 5 and the second concave lens 6 are meniscus concave lenses having not only concave surfaces but also convex surfaces.
  • the first concave lens 5 has a convex surface on the measurement light incident side and a concave surface on the measurement light emission side.
  • the second concave lens 6 has a concave surface on the measurement light incident side and a convex surface on the measurement light emission side.
  • the refracting action of the measurement light can be generated on the respective surfaces of the first concave lens 5 and the second concave lens 6, and the light condensing that occurs in the pipe P and the fluid F.
  • the effect can be canceled more precisely. Therefore, the light amount of the measurement light detected by the light detection mechanism 9 can be increased, and the density measurement accuracy can be improved.
  • a fourth embodiment of the present invention will be described with reference to FIG.
  • the members corresponding to the members described in the first embodiment are designated by the same reference numerals.
  • the density sensor 100 of the fourth embodiment is different from that of the first embodiment in that only the first concave lens 5 is provided between the collimating lens 3 and the pipe P as a concave lens. Further, the first concave lens 5 is formed such that both the surface on the side where the measurement light enters and the surface on the side where the measurement light exits are concave.
  • the condensing action of the biconvex cylindrical lens composed of the fluid and the pipe P is canceled and the concentration measurement accuracy is improved while minimizing the number of arranged lenses. It is possible to raise it. More specifically, the light condensing action on the incident surface and the exit surface of the fluid F is canceled, and the light emitted from the fluid F is diffused by the first lens 5 and incident on the fluid F.
  • a fifth embodiment of the present invention will be described with reference to FIG.
  • the members corresponding to the members described in the first embodiment are designated by the same reference numerals.
  • the density sensor 100 of the fifth embodiment is different from that of the first embodiment in that only the second concave lens 6 is provided between the pipe P and the condenser lens 8 as the concave lens. Further, the surface of the second concave lens 6 on the side where the measurement light enters and the surface on the side where the measurement light exits are formed as concave surfaces.
  • the concentration sensor 100 of the fifth embodiment With the concentration sensor 100 of the fifth embodiment, the same effect as the concentration sensor 100 of the fourth embodiment can be obtained. More specifically, the light condensed and emitted from the fluid F can be made parallel by the second concave lens 6 by the condensing action on the incident surface and the emission surface of the fluid F.
  • each optical element is not limited to the one in which the optical path has a substantially U-shape as shown in FIG. 1, and each optical element may be arranged in a straight line, for example.
  • the case itself can be made compact and the concentration sensor itself can be made smaller by arranging it in a U-shape.
  • the surfaces of the first concave lens and the second concave lens on which the concave surface and the convex surface are formed are not limited to those shown in each embodiment.
  • the first concave lens and the second concave lens may be formed as biconcave lenses, or the convex surfaces may be arranged so as to face the pipe.
  • the photodetection mechanism is not limited to one equipped with a spectroscope and a photodetector.
  • the photodetection mechanism may include only the photodetector.
  • the pipe to which the concentration sensor is attached is not limited to a straight pipe, but may be a curved pipe.
  • the concentration of the fluid can be measured based on the measurement light that passes through the fluid, the concentration sensor itself can be easily installed on the pipe, and the concentration that can eliminate the possibility of contamination of the fluid.
  • a sensor can be provided.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)

Abstract

L'invention concerne un capteur de concentration qui facilite l'installation et qui permet d'améliorer la précision de mesure de concentration tout en réduisant le risque de contamination d'un fluide en cours de mesure. Le capteur de concentration (100) permettant de mesurer la concentration d'un fluide s'écoulant à l'intérieur d'un tuyau (P) formé à partir d'un matériau transparent est conçu pour comprendre : une source de lumière (2) destinée à émettre une lumière de mesure ; une lentille de collimation (3) servant à collimater la lumière de mesure émise par la source de lumière (2) ; une lentille convergente (8) permettant de faire converger la lumière de mesure qui a traversé le tuyau (P) ; un mécanisme de détection de lumière (9) destiné à détecter la lumière de mesure que la lentille convergente (8) a fait converger ; et une ou plusieurs lentilles concaves (5, 6) qui sont chacune disposées entre la lentille de collimation (3) et le tuyau (P) ou entre le tuyau (P) et la lentille convergente (8) et sont disposées de telle sorte qu'il existe des espaces entre celles-ci et la surface externe du tuyau (P).
PCT/JP2019/030928 2018-10-25 2019-08-06 Capteur de concentration WO2020084867A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-201148 2018-10-25
JP2018201148A JP2022017606A (ja) 2018-10-25 2018-10-25 濃度センサ

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WO2020084867A1 true WO2020084867A1 (fr) 2020-04-30

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023138053A (ja) * 2022-03-18 2023-09-29 アズビル株式会社 濃度測定装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143176U (fr) * 1974-09-26 1976-03-30
JPH0175851U (fr) * 1987-11-11 1989-05-23
JPH01253633A (ja) * 1988-04-01 1989-10-09 Hitachi Ltd 吸光光度検出器
JPH05196602A (ja) * 1992-01-20 1993-08-06 Hitachi Ltd キャピラリー電気泳動用カラム
JPH0743524U (ja) * 1993-12-28 1995-08-22 東亜医用電子株式会社 液体分析装置
JP2005514591A (ja) * 2001-12-19 2005-05-19 スリーエム イノベイティブ プロパティズ カンパニー 毛細管および微細溝のアレイの光ガイド照射を備えた分析装置
JP2006234663A (ja) * 2005-02-25 2006-09-07 Kurabo Ind Ltd フローセル、フローセルの製造方法、及び流体濃度測定装置
JP2013148518A (ja) * 2012-01-20 2013-08-01 Toshiba Corp 自動分析装置
JP2014215041A (ja) * 2013-04-22 2014-11-17 株式会社堀場製作所 粒子計数装置およびその製造方法
JP2017020903A (ja) * 2015-07-10 2017-01-26 協和メデックス株式会社 検出装置及び分析装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143176U (fr) * 1974-09-26 1976-03-30
JPH0175851U (fr) * 1987-11-11 1989-05-23
JPH01253633A (ja) * 1988-04-01 1989-10-09 Hitachi Ltd 吸光光度検出器
JPH05196602A (ja) * 1992-01-20 1993-08-06 Hitachi Ltd キャピラリー電気泳動用カラム
JPH0743524U (ja) * 1993-12-28 1995-08-22 東亜医用電子株式会社 液体分析装置
JP2005514591A (ja) * 2001-12-19 2005-05-19 スリーエム イノベイティブ プロパティズ カンパニー 毛細管および微細溝のアレイの光ガイド照射を備えた分析装置
JP2006234663A (ja) * 2005-02-25 2006-09-07 Kurabo Ind Ltd フローセル、フローセルの製造方法、及び流体濃度測定装置
JP2013148518A (ja) * 2012-01-20 2013-08-01 Toshiba Corp 自動分析装置
JP2014215041A (ja) * 2013-04-22 2014-11-17 株式会社堀場製作所 粒子計数装置およびその製造方法
JP2017020903A (ja) * 2015-07-10 2017-01-26 協和メデックス株式会社 検出装置及び分析装置

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