WO2020080666A1 - Système de suivi d'image intelligent dans un processus impliquant des semiconducteurs - Google Patents

Système de suivi d'image intelligent dans un processus impliquant des semiconducteurs Download PDF

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Publication number
WO2020080666A1
WO2020080666A1 PCT/KR2019/010767 KR2019010767W WO2020080666A1 WO 2020080666 A1 WO2020080666 A1 WO 2020080666A1 KR 2019010767 W KR2019010767 W KR 2019010767W WO 2020080666 A1 WO2020080666 A1 WO 2020080666A1
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WIPO (PCT)
Prior art keywords
information
image
semiconductor
tracking
equipment
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Application number
PCT/KR2019/010767
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English (en)
Korean (ko)
Inventor
배윤성
배경수
홍광진
이수창
김민성
이창우
Original Assignee
무진전자 주식회사
그린정보통신(주)
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Priority to CN201980069006.5A priority Critical patent/CN112912926A/zh
Publication of WO2020080666A1 publication Critical patent/WO2020080666A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/20—Analysis of motion
    • G06T7/246—Analysis of motion using feature-based methods, e.g. the tracking of corners or segments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10016—Video; Image sequence
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Definitions

  • the present invention relates to an intelligent image tracking system in a semiconductor process. More specifically, the present invention is to support the user to be able to track the entire process until the semiconductor process is completed by inputting to the detailed equipment constituting the semiconductor equipment, such as wafers, lots, etc., which are objects to be processed in the semiconductor process. It relates to an intelligent image tracking system in a semiconductor process.
  • a semiconductor process is performed in a manner in which detailed processes are continuously performed, and the semiconductor equipment can be said to be a collection of equipment for performing detailed processes constituting the entire semiconductor process.
  • a plurality of cameras are installed in a position capable of photographing processing operations of detailed equipment constituting the entire semiconductor equipment, and the images captured by the cameras are simply matched to the camera ID. To save.
  • the image recording apparatus may use the individual image captured by the camera Since it is only displayed to the user, there is a problem that the user cannot grasp the entire semiconductor process. That is, according to the prior art, since the image recording apparatus records images taken by a camera installed at a specific location as individual images, detailed equipment constituting semiconductor equipment by a user, such as a wafer or lot, which is an object of a semiconductor process. There is a problem in that it is difficult to track the entire process until the semiconductor process is completed by being introduced into the field.
  • Patent Document 0001 Korean Registered Patent Publication No. 10-1619097 (Registration Date: May 02, 2016, Name: Process monitoring system in semiconductor manufacturing process)
  • Patent Document 0002 Republic of Korea Patent Publication No. 10-2005-0048121 (published date: May 24, 2005, name: monitoring system of the etching device and its monitoring method)
  • the present invention is an intelligent in a semiconductor process that allows a user to track the entire process until the semiconductor process is completed by inputting the wafers, lots, etc., which are the objects to be processed in the semiconductor process, to detailed equipment constituting the semiconductor equipment. It is a technical task to provide an image tracking system.
  • An intelligent image tracking system in a semiconductor process for solving this technical problem is to take an image consisting of cameras arranged at a plurality of points of the semiconductor equipment to photograph a processing process for an object performed by the semiconductor equipment
  • a network image recording device that controls tracking information including the location information of the object and the operation state information to be stored in a tracking database.
  • the network image recording apparatus adds the tracking information stored in the tracking database and the camera identification information stored in the image database according to a search condition input by a user. It is characterized by controlling the displayed image information to be matched so that the processing process for the object performed by the semiconductor equipment is displayed as a continuous image.
  • the network image recording apparatus configures the object identification information as a root node, and a starting point and an arrival point exist on a path through which the object moves. It is characterized in that the tracking information is configured as a child node and the tracking information is stored in a tree structure.
  • the network image recording apparatus when there are a plurality of cameras in charge of photographing the starting point or the arrival point constituting the child node, the operation state information according to It is characterized by selecting one from a plurality of cameras.
  • the central management device for managing a network video recording device
  • the central management device is provided by a network video recording device designated by the user terminal among the plurality of network video recording devices in response to a request from a remote user terminal It characterized in that the control to display the video to be displayed on the user terminal.
  • the intelligent video tracking system has the effect of being provided.
  • FIG. 1 is a view showing an intelligent image tracking system in a semiconductor process according to an embodiment of the present invention
  • FIG. 2 is a view showing an intelligent image tracking system in a semiconductor process according to a modified embodiment of an embodiment of the present invention
  • FIG. 3 is a view for illustratively explaining the operation of the intelligent image tracking system in a semiconductor process according to an embodiment of the present invention
  • FIG. 4 is a view showing an exemplary tree structure that can be applied to an embodiment of the present invention.
  • FIG. 5 is a diagram for explaining a method of searching a camera image using a tree structure in an embodiment of the present invention.
  • first or second may be used to describe various components, but the components should not be limited by the terms. The above terms are only for the purpose of distinguishing one component from other components, for example, without departing from the scope of rights according to the concept of the present invention, the first component can be referred to as the second component and similarly the second The component may also be referred to as the first component.
  • FIG. 1 is a view showing an intelligent image tracking system in a semiconductor process according to an embodiment of the present invention.
  • an intelligent image tracking system in a semiconductor process includes an image photographing unit 10, an equipment controller 20, and a network image recording device 30.
  • the image photographing unit 10 is composed of cameras disposed at a plurality of points of the semiconductor equipment 1 to photograph a processing process for an object performed by the semiconductor equipment 1.
  • the number of cameras constituting the image photographing unit 10 may be the same as the number of detailed equipments constituting the semiconductor equipment 1, that is, the number of component equipments, but is not limited thereto. It may be greater or less than the number.
  • the semiconductor equipment 1 may be composed of a plurality of chambers in which each processing reaction is performed, and transfer devices that transport an object to be processed to each chamber, and the object is a wafer or wafers. It can be a lot.
  • the equipment controller 20 controls the overall operation of the semiconductor equipment 1, and is an object to be processed, that is, object identification information that is information for identifying a wafer or lot, and object information mapped to time information. Performs a function of real-time transmission of location information and operation status information indicating the current operation status of the semiconductor equipment 1 to the network image recording device 30.
  • the equipment controller 20 may be a cluster tool controller (CTC) defined in the SEMI international standard program, and the CTC may include a plurality of specific wafers and lots according to the provisions of the SEMI international standard program. The path, time and location of each operation performed in the semiconductor equipment 1 composed of component equipment, and the location and time of all steps constituting the process are recorded.
  • CTC cluster tool controller
  • the information recorded in the CTC is interworked with the network image recording device 30 to transmit the wafer ID, starting point, arrival point, operation state, etc. necessary for tracking to the network image recording device 30 in real time. do.
  • the information transmitted to the network video recording device 30 is simultaneously databased separately from the video information.
  • the network image recording device 30 controls to be stored in the image database 310 by adding camera identification information, which is information for identifying the camera that captured the image information, to the image information received in real time from the image capturing unit 10 , Performs a function to control the tracking information including the object identification information, time information, and the location information of the object mapped from the equipment controller 20 and the operation state information to be stored in the tracking database 320.
  • the operation state information is information indicating the current state of an object, such as a wafer or a lot, indicating which detailed process of the semiconductor equipment 1 including a plurality of chambers and transport devices is under process. It can be information.
  • the network image recording device 30 matches the tracking information stored in the tracking database 320 and the image information to which the camera identification information stored in the image database 310 is added according to the search conditions input by the user to semiconductor It is possible to control the processing process for the object performed by the equipment 1 to be displayed as a continuous image.
  • the network image recording apparatus 30 configures object identification information as a root node, and configures a starting node and an arrival point on a path through which the object travels as a child node.
  • tracking information may be stored in a tree structure, and when there are multiple cameras in charge of shooting for a starting point or an arrival point constituting a child node, one of a plurality of cameras may be selected according to operation state information Can be configured.
  • FIG. 4 showing an exemplary tree structure applicable to an embodiment of the present invention.
  • the stored information constitutes a unique tree structure using each wafer ID as a factor.
  • the wafer ID is configured as a root node, and the “start point” and “arrival point” transmitted together are configured as child nodes.
  • "Operation state” is used as the weight of each link. Select the camera ID composed of child nodes of “start point” and “arrival point” by weight. When searching, the camera ID is used to search image information to be output at each time point.
  • the configured wafer information tree provides the ability to track the best image at each time point by applying the “weight” value to the camera selection when multiple cameras are assigned to “start point” and “arrival point”. . Equation 1 below may be applied to the extraction of the camera ID using the “weight”.
  • CAM ID ⁇ (Wafer ID ⁇ f (x), position ⁇ weight)
  • Equation 1 f (x) is an index value for the same wafer ID, and position is an eigenvalue of a starting point and an arrival point. An index value for “operation status” is assigned, and this value is used as a “weight”, so that a camera capable of inquiring a real image according to each location and operation can be selected.
  • the network image recording device 30 may derive a tracking image search algorithm according to the search conditions by utilizing the data stored in this way.
  • Search conditions that can be used efficiently in the process include a search with only “lot ID”, a search with both “lot ID” and “wafer ID”, and “lot ID” and “wafer ID” and “start point” And search based on “arrival point”, and search based on “lot ID” and “wafer ID” and “time”.
  • the network image recording apparatus 30 may configure the tracking image and derive the information by applying the wafer ID, the departure / arrival node value, and the operation state information (weighted value) according to the search condition.
  • the same wafer ID value is searched and assigned to each node value of the root, and when storing information, the value stored as a child node is also assigned.
  • a child node may be generated based on the tree creation time.
  • FIG. 5 is a diagram for explaining a method of searching a camera image using a tree structure in an embodiment of the present invention.
  • the network video recorder 30 may be configured as a tree, thereby providing a search path that satisfies all of the above four search conditions. Searching from the left B Node according to the time information among the search conditions, and calculating the weight value from the stored information can search and output the camera image assigned to the Node of Level 3. For example, in order to refer to information to be photographed from various angles, among the camera information allocated to the Level 3 Node according to the “weight”, all information included in the weight value area may be output in multiple numbers. According to this, it is possible to provide an image function at various angles in a method of simply referring to and outputting one camera at each time point. When outputting multiple images at the same time, it is possible to provide a function of highlighting and outputting a camera image having a high weight.
  • FIG. 2 is a diagram illustrating an intelligent image tracking system in a semiconductor process according to a modified embodiment of an embodiment of the present invention.
  • an intelligent image tracking system in a semiconductor process includes a plurality of semiconductor equipment 1 and an equipment controller 20 in charge of the semiconductor equipment 1 )
  • the network image recording device 30 is a system that supports a user to remotely monitor the process status in the case of having a number corresponding to the number of semiconductor equipment (1).
  • the intelligent image tracking system in the semiconductor process according to the modified embodiment of the embodiment illustrated in FIG. 2 further includes a central management device 40 for managing the network video recording device 30.
  • the central management apparatus 40 is an image provided by the network image recording apparatus 30 designated by the user terminal 2 among the plurality of network image recording apparatuses 30 in response to a request from the remote user terminal 2 It is controlled to be displayed on the user terminal 2.
  • the configuration except for the central management apparatus 40 is the same as the configuration of the intelligent image tracking system in the semiconductor process according to an embodiment of the present invention illustrated in FIG. 1, and thus duplicate description is omitted.
  • FIG. 3 is a view for illustratively explaining the operation of the intelligent image tracking system in a semiconductor process according to an embodiment of the present invention.
  • step S10 operation of the semiconductor equipment 1 is started.
  • step S20 a process is performed in which the equipment controller 20 controls the operation of the detailed components constituting the semiconductor equipment 1 according to a preset and input control sequence.
  • step S30 the equipment controller 20 displays object identification information, information for identifying an object that is an object of processing, location information of an object mapped with time information, and operation state information indicating a current operation state of the semiconductor device 1. The process of real-time transmission to the network video recording device 30 is performed.
  • step S40 the network image recording apparatus 30 tracks information received from the equipment controller 20, that is, tracking information including object identification information, time information, and object location information and operation status information mapped to the tracking database.
  • tracking information including object identification information, time information, and object location information and operation status information mapped to the tracking database.
  • the process of real-time storage in 320 is performed.
  • step S50 which is started together with the operation of step S20, a process in which cameras constituting the image photographing unit 10 starts photographing an area in charge of the camera is performed.
  • step S60 a process of real-time delivery of image information captured by cameras constituting the image photographing unit 10 to the network image recording apparatus 30 is performed.
  • the video information that the cameras transmit to the network video recording device 30 in this process may be in the form of a packet, and the packet may include video information and identification information of a camera that photographs the video information.
  • step S70 a process in which the network image recording apparatus 30 adds camera identification information to image information received from cameras constituting the image photographing unit 10 and stores it in the image database 310 in real time is performed.
  • Step S80 and step S90 are processing processes when a request event from a user who wants to monitor the process status occurs.
  • the network video recorder 30 itself is an input / output interface device such as a monitor or the like, or a center.
  • a process of receiving a video search request from a user terminal 2 at a remote location accessed through the management device 40 is performed.
  • step S90 the network image recording device 30 matches the tracking information stored in the tracking database 320 and the image information to which the camera identification information stored in the image database 310 is added according to the search conditions input by the user to semiconductor equipment The process of controlling the object to be processed to be displayed as a continuous image is performed.
  • the user can track the entire process until the semiconductor process is completed by inputting to the detailed equipment constituting the semiconductor equipment, such as wafers, lots, etc., which are objects to be processed in the semiconductor process. It has the effect of providing an intelligent image tracking system in a semiconductor process.
  • a stored camera and wafer and lot information are interlocked and stored, and based on this, a camera follows and records the entire process from the equipment input to the FOUP (Front Opening Unified Pod) recovery. You can show the user an image that looks like it.
  • FOUP Front Opening Unified Pod

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Abstract

La présente invention concerne un système de suivi d'image intelligent dans un traitement impliquant des semiconducteurs. La présente invention comprend : une unité de photographie d'image constituée de caméras disposées en une pluralité de points d'un appareil à semiconducteur de façon à photographier des procédés de traitement pour un objet réalisés par l'appareil à semiconducteur ; un dispositif de commande d'appareil pour commander une opération de l'appareil à semiconducteur et transmettre des informations d'identification d'objet qui sont des informations pour identifier l'objet, des informations de position de l'objet cartographiées sur des informations temporelles, et des informations d'état de fonctionnement indiquant un état de fonctionnement actuel de l'appareil à semiconducteur ; et un dispositif d'enregistrement d'image de réseau pour ajouter, aux informations d'image transmises par l'unité de photographie d'image, des informations d'identification de caméra qui sont des informations pour identifier une caméra qui a photographié les informations d'image et commander les informations d'image à stocker dans une base de données d'image, et pour commander des informations de suivi comprenant les informations d'identification d'objet, les informations de position de l'objet cartographiées les informations temporelles, et les informations d'état de fonctionnement, transmises par le dispositif de commande d'appareil, à stocker dans une base de données de suivi. La présente invention peut aider un utilisateur de telle sorte que l'utilisateur peut généralement suivre des procédés entre l'insertion de tranches, de lots, etc. qui sont des objets du processus impliquant des semiconducteurs dans des appareils détaillés et l'achèvement du traitement de semi-conducteur.
PCT/KR2019/010767 2018-10-19 2019-08-23 Système de suivi d'image intelligent dans un processus impliquant des semiconducteurs WO2020080666A1 (fr)

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Application Number Priority Date Filing Date Title
CN201980069006.5A CN112912926A (zh) 2018-10-19 2019-08-23 半导体工艺中的智能图像跟踪系统

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KR10-2018-0125323 2018-10-19
KR1020180125323A KR102110498B1 (ko) 2018-10-19 2018-10-19 반도체 공정에서의 지능형 영상 추적 시스템

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KR102308082B1 (ko) * 2020-11-06 2021-10-05 (주)에프피에이 다단조색 제어를 이용하는 펠릿 불량 검사 시스템 및 그의 제어 방법

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JP6271990B2 (ja) * 2013-01-31 2018-01-31 キヤノン株式会社 画像処理装置、画像処理方法
KR101619097B1 (ko) 2015-08-17 2016-05-18 주식회사 엠에스비전 반도체 제조 공정에서의 공정 모니터링 시스템

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JP2007121768A (ja) * 2005-10-28 2007-05-17 Mitsubishi Electric Corp 画面表示方法およびこれを用いた設備監視装置
JP2010055334A (ja) * 2008-08-28 2010-03-11 Olympus Corp 生産システムの制御方法および生産システム
KR20100026343A (ko) * 2008-08-29 2010-03-10 현대중공업 주식회사 감시제어시스템에서 중요 알람의 표시와 공정 화면의 전환을 위한 사용자 인터페이스 방법
JP2011090649A (ja) * 2009-10-26 2011-05-06 Toshiba Corp 製造履歴記録システムおよび製造履歴記録方法
KR101909836B1 (ko) * 2017-12-04 2018-10-18 김정석 산업 공정 자동화 제어를 위한 ｈｍｉ 시스템, 이를 기반으로 한 공정 자동화 모니터링 방법

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