WO2020073347A1 - 一种球面光学元件表面疵病检测装置及方法 - Google Patents

一种球面光学元件表面疵病检测装置及方法 Download PDF

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WO2020073347A1
WO2020073347A1 PCT/CN2018/110362 CN2018110362W WO2020073347A1 WO 2020073347 A1 WO2020073347 A1 WO 2020073347A1 CN 2018110362 W CN2018110362 W CN 2018110362W WO 2020073347 A1 WO2020073347 A1 WO 2020073347A1
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lens
light source
image sensor
tested
light
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PCT/CN2018/110362
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English (en)
French (fr)
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陈艳
俞小进
曾德祥
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广州博冠光电科技股份有限公司
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Priority claimed from CN201811185969.5A external-priority patent/CN109297989A/zh
Priority claimed from CN201821649814.8U external-priority patent/CN209327240U/zh
Application filed by 广州博冠光电科技股份有限公司 filed Critical 广州博冠光电科技股份有限公司
Publication of WO2020073347A1 publication Critical patent/WO2020073347A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

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  • the invention relates to the technical field of optical element detection, in particular to a device and method for detecting surface defects of spherical optical elements.
  • optical elements With the progress of society, spherical optical elements are widely used in various projects.
  • optical elements due to the limitations of processing technology and operating environment, optical elements often have surface defects such as scratches, pits, broken edges and contaminants.
  • these defects will cause different degrees of scattering of the beam, destroy the uniformity of the light field, and reduce the quality of the beam. Therefore, it is necessary to quantitatively detect the topography of the surface defects of the components, so as to accurately judge the damage degree of the optical components and analyze the influence of the defects on the system wavefront.
  • the detection of defects on the surface of the lens mainly depends on the traditional manual visual inspection method, which has high labor intensity and high false detection rate, which greatly affects the detection effect of the defects on the surface of the optical element.
  • the surface of the lens is inspected by atomic force microscopes, optical profilometers and other instruments. Although the detection accuracy can reach the nm level, it cannot distinguish defects from normal processing textures, and it is difficult to apply them to engineering inspection of defects.
  • the present invention provides a device and method for detecting surface defects of spherical optical elements in view of the problems in the background art.
  • the non-contact detection method does not cause damage to the detected spherical optical elements; and the detection device has a simple structure and has measurement accuracy and efficiency High advantage, can realize fast online detection of surface defects of spherical optical elements.
  • the present invention provides a device for detecting surface defects of spherical optical elements, which includes: a control circuit, a light source, a lens to be measured, a matching lens, an image sensor and a computer, wherein the control circuit is connected to the light source to pulse Trigger the light source to emit light, and the lens to be tested is arranged between the light source and the image sensor, and an adapter lens is arranged between the lens to be tested and the image sensor, and the adapter lens is moved to match the spot size with the image sensor; The output end of the image sensor is connected to the input end of the computer.
  • the distance between the light source and the image sensor ranges from 25mm to 50mm.
  • the distance between the lens to be tested and the light source is smaller than the focal length of the lens to be tested.
  • the light source emits spherical waves and diffracts the lens surface defects, and the diffracted light interferes with the unchanged light to form a hologram and is collected by the image sensor.
  • the computer reconstructs the intensity of the collected hologram.
  • the invention also provides a detection method using a surface optical element surface defect detection device, which includes the following steps:
  • the light source emits a spherical wave, which is diffracted in case of defects on the surface of the lens to be tested, and the diffracted light interferes with the unchanged light to form a hologram;
  • the starting light source described in S10 is specifically:
  • the power is turned on, the control circuit pulse triggers the light source to emit light, and the image sensor is started, and the shutter synchronously collects images.
  • the hologram collected by the image sensor described in S40 is sent to the computer, and the surface defect of the lens to be tested is reconstructed through a reconstruction algorithm.
  • the specific formula is as follows:
  • K ( ⁇ , ⁇ z) represents the image intensity of the reconstructed object
  • H (x, y) represents the intensity of the hologram recorded by the image sensor
  • a ref (x, y) represents the reference light with no change in the light source
  • k represents The propagation constant
  • ⁇ represents the wavelength of the light source
  • L represents the distance from the light source to the image sensor
  • ⁇ and ⁇ represent the coordinate parameters of the object plane
  • i is an imaginary unit.
  • the invention provides a device and a method for detecting surface defects of spherical optical elements, and uses laser digital holographic microscopy technology to detect surface defects of spherical optical elements.
  • This method can not only reconstruct the amplitude and phase information of the surface defect of the spherical optical element, realize the three-dimensional reconstruction of the surface defect of the spherical optical element, but also adopt the non-contact detection method, which will not cause the detection of the spherical optical element damage.
  • the detection device of this method has a simple structure, has the advantages of high measurement accuracy and high efficiency, and can realize rapid online detection of surface defects of spherical optical elements.
  • FIG. 1 is a schematic structural diagram of a surface defect detection device for spherical optical elements in a first embodiment of the present invention
  • FIG. 2 is a flowchart of a method for detecting surface defects of spherical optical elements in a second embodiment of the present invention
  • FIG. 3 is a schematic diagram of a hologram in a preferred embodiment of the present invention.
  • FIG. 4 is a flow chart of a method for detecting surface defects of spherical optical elements in three embodiments of the present invention.
  • FIG. 5 is a flowchart of a method for detecting surface defects of spherical optical elements in four embodiments of the present invention.
  • FIG. 6 is a schematic diagram of a projected coordinate system in a preferred embodiment of the present invention.
  • FIG. 7 is a schematic diagram of the appearance of defects in a preferred embodiment of the present invention.
  • FIG. 8 is a flowchart of a method for detecting surface defects of spherical optical elements in five embodiments of the present invention.
  • FIG. 9 is a flowchart of a method for detecting surface defects of spherical optical elements in six embodiments of the present invention.
  • the directional indicator is only used to explain a specific posture (as shown in the drawings) The relative positional relationship, movements, etc. of the various components below, if the specific posture changes, then the directional indication changes accordingly.
  • first”, “second”, etc. are for descriptive purposes only, and cannot be interpreted as indications or hints Its relative importance or implicitly indicates the number of technical features indicated.
  • the features defined with “first” and “second” may include at least one of the features either explicitly or implicitly.
  • the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary people in the art to achieve, when the combination of technical solutions contradicts or cannot be achieved, it should be considered that the combination of such technical solutions does not exist Is not within the scope of protection required by the present invention.
  • the invention provides a detection device for surface defects of spherical optical elements
  • FIG. 1 it includes: a control circuit 1, a light source 2, a lens to be tested 3, a matching lens 4, an image sensor 5, and a computer 6, wherein the control circuit 1 is connected to a light source 2
  • the light source 1 is triggered to emit light with a pulse.
  • the lens 3 to be tested is disposed between the light source 2 and the image sensor 5.
  • An adaptor lens 4 is disposed between the lens 3 to be tested and the image sensor 5 to move the adaptor mirror. 4 to match the spot size with the image sensor 5; the output end of the image sensor 5 is connected to the input end of the computer 6.
  • the light source 2 forms an image 7 of the light source through the lens 3 to be tested;
  • the distance between the light source and the image sensor is 30 mm; the lens to be measured is placed between the light source and the image sensor (CCD) to ensure the distance d 0 ⁇ f (lens to be measured) Focal length);
  • the light source emits spherical waves and diffracts the lens surface defects, and the diffracted light interferes with the unaltered light to form a hologram and is collected by the image sensor.
  • the computer reconstructs the intensity of the collected hologram.
  • the present invention also proposes a detection method using a surface optical element surface defect detection device; as shown in FIG. 2, it includes the following steps:
  • the light source emits a spherical wave, which is diffracted in case of defects on the surface of the lens to be tested, and the diffracted light interferes with the unchanged light to form a hologram, as shown in Figure 3;
  • the image sensor collects the complete hologram and sends it to the computer, and then reconstructs the surface defect of the lens to be tested through a reconstruction algorithm.
  • the present invention also proposes a detection method using a surface optical element surface defect detection device; as shown in FIG. 4, it includes the following steps:
  • the light source emits a spherical wave, which is diffracted in case of defects on the surface of the lens to be tested, and the diffracted light interferes with the unchanged light to form a hologram, as shown in Figure 3;
  • the image sensor collects the complete hologram and sends it to the computer, and then reconstructs the surface defect of the lens to be tested through a reconstruction algorithm.
  • the present invention also proposes a detection method using a surface optical element surface defect detection device; as shown in FIG. 5, it includes the following steps:
  • the light source emits a spherical wave, which is diffracted in case of defects on the surface of the lens to be tested, and the diffracted light interferes with the unchanged light to form a hologram, as shown in Figure 3;
  • the hologram is transmitted to the computer after being recorded by the CCD.
  • ⁇ and ⁇ are the coordinate system where the lens to be measured is located
  • x and y are the coordinate system where the CCD is located.
  • the specific formula is as follows:
  • K ( ⁇ , ⁇ z) represents the reconstructed image intensity of the object
  • H (x, y) represents the intensity of the hologram recorded by the image sensor
  • a ref (x, y) represents the reference light whose light source has not changed
  • k represents The propagation constant
  • ⁇ represents the wavelength of the light source
  • L represents the distance from the light source to the image sensor
  • ⁇ and ⁇ represent the coordinate parameters of the object plane
  • i is an imaginary unit.
  • the surface of the lens to be tested is reproduced as shown in FIG. 7, and it can be seen that there are scratches and pitting defects in FIG. 7, and the length of the scratches is about 461.2 ⁇ m.
  • the present invention also proposes a detection method using a surface optical element surface defect detection device; as shown in FIG. 8, it includes the following steps:
  • the light source emits a spherical wave, which is diffracted in case of defects on the surface of the lens to be tested, and the diffracted light interferes with the unchanged light to form a hologram, as shown in Figure 3;
  • the image sensor collects the complete hologram and sends it to the computer, and then reconstructs the surface defect of the lens to be tested through a reconstruction algorithm.
  • the hologram is transmitted to the computer after being recorded by the CCD.
  • ⁇ and ⁇ are the coordinate system of the lens to be measured
  • x and y are the coordinate system where the CCD is located.
  • the computer passes the reconstruction algorithm and the specific formula as follows:
  • K ( ⁇ , ⁇ z) represents the reconstructed image intensity of the object
  • H (x, y) represents the intensity of the hologram recorded by the image sensor
  • a ref (x, y) represents the reference light whose light source has not changed
  • k represents The propagation constant
  • ⁇ represents the wavelength of the light source
  • L represents the distance from the light source to the image sensor
  • ⁇ , ⁇ represent the coordinate parameters of the object plane
  • i is an imaginary unit.
  • the surface of the lens to be tested is reproduced as shown in FIG. 7, and it can be seen that there are scratches and pitting defects in FIG. 7, and the length of the scratches is about 461.2 ⁇ m.
  • the present invention also proposes a detection method using a surface optical element surface defect detection device; as shown in FIG. 9, it includes the following steps:
  • the light source emits a spherical wave, which is diffracted in case of defects on the surface of the lens to be tested, and the diffracted light interferes with the unchanged light to form a hologram, as shown in Figure 3;
  • the image sensor collects the complete hologram and sends it to the computer, and then reconstructs the surface defect of the lens to be tested through a reconstruction algorithm.
  • the hologram is transmitted to the computer after being recorded by the CCD.
  • ⁇ and ⁇ are the coordinate system of the lens to be measured
  • x and y are the coordinate system where the CCD is located.
  • the computer passes the reconstruction algorithm and the specific formula as follows:
  • K ( ⁇ , ⁇ z) represents the reconstructed image intensity of the object
  • H (x, y) represents the intensity of the hologram recorded by the image sensor
  • a ref (x, y) represents the reference light whose light source has not changed
  • k represents The propagation constant
  • ⁇ represents the wavelength of the light source
  • L represents the distance from the light source to the image sensor
  • ⁇ , ⁇ represent the coordinate parameters of the object plane
  • i is an imaginary unit.
  • the surface of the lens to be tested is reproduced as shown in FIG. 7, and it can be seen that there are scratches and pitting defects in FIG. 7, and the length of the scratches is about 461.2 ⁇ m.

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Abstract

一种球面光学元件表面疵病检测装置及方法，属于光学元件检测技术领域，检测装置包括控制电路（1）、光源（2）、待测透镜（3）、适配透镜（4）、图像传感器（5）及计算机（6），其中控制电路（1）连接光源（2）以脉冲触发光源（2）发光，待测透镜（3）设置于光源（2）与图像传感器（5）之间，待测透镜（3）与图像传感器（5）之间设置有适配透镜（4），移动适配镜（4）以使光斑大小与图像传感器（5）相匹配；图像传感器（5）的输出端连接计算机（6）的输入端；采用非接触检测方式，不会对所检测的球面光学元件造成损伤；且检测装置结构简单，具有测量精度及效率高等优点，能够实现球面光学元件表面疵病的快速在线检测。

Description

一种球面光学元件表面疵病检测装置及方法 技术领域
本发明涉及光学元件检测技术领域，尤其涉及一种球面光学元件表面疵病检测装置及方法。
背景技术
随着社会的进步，球面光学元件被广泛应用于各个工程中，但由于加工工艺及运行环境的限制,光学元件多存在诸如划痕、麻点、破边及污染物等类型的表面疵病。在光路系统中，这些疵病会对光束造成不同程度的散射，破坏光场均匀性，降低光束质量。因此需要定量检测元件表面疵病的形貌结构，以便于准确判断光学元件的损伤程度以及分析疵病对系统波前的影响。
目前对于透镜表面疵病的检测主要是靠传统的人工目测法检测，检测劳动强度大、误检率高，极大影响了光学元件表面疵病的检测效果。另外通过原子力显微镜、光学轮廓仪等仪器对透镜表面进行检测，虽检测精度能达到nm级，但无法区分疵病和正常的加工纹理，难以应用到疵病的工程检测中。
发明内容
本发明针对背景技术的问题提供一种球面光学元件表面疵病检测装置及方法，采用非接触检测方式，不会对所检测的球面光学元件造成损伤；且检测装置结构简单，具有测量精度及效率高等优点，能够实现球面光学元件表面疵病的快速在线检测。
为了实现上述目的，本发明提出一种球面光学元件表面疵病检测装置，包括：控制电路、光源、待测透镜、适配透镜、图像传感器及计算机，其中，所述的控制电路连接光源以脉冲触发光源发光，所述的待测透镜设置于光源与图像传感器之间，所述的待测透镜与图像传感器之间设置有适配透镜，移动适配镜以使光斑大小与图像传感器相匹配；所述的图像传感器的输出端连接计算机的输入端。
优选地，所述的光源与图像传感器间的距离范围为25mm～50mm。
优选地，所述的待测透镜与光源之间的距离小于待测透镜焦距。
优选地，所述的光源，发出球面波遇透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠加，形成全息图并通过图像传感器采集。
优选地，所述的计算机重构采集的全息图强度。
本发明还提出一种采用球面光学元件表面疵病检测装置进行的检测方法，包括如下步骤：
S10、启动光源；
S20、光源经待测透镜聚焦后，在透镜后形成光斑像点，光斑大小发生变化，移动适配透镜，使光斑大小与图像传感器相匹配；
S30、光源发出球面波，遇待测透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠加，形成全息图；
S40、图像传感器采集到完整的全息图后发送至计算机，通过重构算法，重构待测透镜的表面疵病。
优选地，S10所述的启动光源，具体为：
启动电源，控制电路脉冲触发光源发光，同时图像传感器启动，快门同步采集图像。
优选地，S40所述的通过图像传感器采集全息图发送至计算机，通过重构算法，重构待测透镜的表面疵病，具体公式如下：
Figure PCTCN2018110362-appb-000001
其中，K(ξ,ηz)表示重构后物体的图像强度，H(x,y)表示图像传感器记录的全息图强度，A ref(x,y)表示光源未发生改变的参考光，k表示传播常数，λ表示光源波长，L表示光源至图像传感器的距离，ξ和η表示物平面坐标参数，i为虚数单位。
优选地，S40之后还包括：
S50、利用深度学习神经网络算法及光学零件表面疵病标准，对待测透镜表面疵病进行判定。
优选地，S50之后还包括：
S60、对透镜进行数据输出，判定透镜的合格率。
本发明提出一种球面光学元件表面疵病检测装置及方法，利用激光数字全息显微技术，检测球面光学元件表面疵病。通过此方法不仅能重构出球面光学元件表面疵病的振幅和相位信息，实现球面光学元件表面疵病的三维重构，而且采用的是非接触检测方式，不会对所检测的球面光学元件造成损伤。另外此方法检测装置结构简单，具有测量精度及效率高等优点，能够实现球面光学元件表面疵病的快速在线检测。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图示出的结构获得其他的附图。
图1为本发明第一实施例中球面光学元件表面疵病检测装置结构示意图；
图2为本发明第二实施例中球面光学元件表面疵病检测方法流程图；
图3为本发明一种优选实施例中全息图示意图；
图4为本发明三种实施例中球面光学元件表面疵病检测方法流程图；
图5为本发明四种实施例中球面光学元件表面疵病检测方法流程图；
图6为本发明一种优选实施例中投影坐标系示意图；
图7为本发明一种优选实施例中疵病形貌重现示意图；
图8为本发明五种实施例中球面光学元件表面疵病检测方法流程图；
图9为本发明六种实施例中球面光学元件表面疵病检测方法流程图；
符号说明：
1-控制电路，2-光源，3-待测透镜，4-适配透镜，5-图像传感器，6-计算机；7-光源的像；
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
需要说明，若本发明实施例中有涉及方向性指示(诸如上、下、左、右、前、后……)，则该方向性指示仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
另外，若本发明实施例中有涉及“第一”、“第二”等的描述，则该“第一”、“第二”等的描述仅用于描述目的，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外，各个实施例之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也 不在本发明要求的保护范围之内。
本发明提出一种球面光学元件表面疵病检测装置；
本发明第一实施例中，如图1所示，包括：控制电路1、光源2、待测透镜3、适配透镜4、图像传感器5及计算机6，其中，所述的控制电路1连接光源2以脉冲触发光源1发光，所述的待测透镜3设置于光源2与图像传感器5之间，所述的待测透镜3与图像传感器5之间设置有适配透镜4，移动适配镜4以使光斑大小与图像传感器5相匹配；所述的图像传感器5的输出端连接计算机6的输入端。光源2经过待测透镜3形成光源的像7；
本发明实施例中，所述的光源与图像传感器间的距离为30mm；将待测透镜置于光源与图像传感器(CCD)中间，保证待测透镜距光源的距离d 0<f(待测透镜焦距)；所述的光源，发出球面波遇透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠加，形成全息图并通过图像传感器采集。所述的计算机重构采集的全息图强度。
本发明第二实施例中，本发明还提出采用球面光学元件表面疵病检测装置进行的检测方法；如图2所示，包括如下步骤：
S10、启动光源；
S20、光源经待测透镜聚焦后，形成光源像点，其大小发生变化；在待测透镜与图像传感器CCD间添加曲面适配透镜，移动适配透镜，使光斑大小与CCD(大小尺寸为2056╳2060，像素分辨率为5.5μm)相匹配；
S30、光源发出球面波，遇待测透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠加，形成全息图，如图3所示；
S40、因适配透镜的调节，图像传感器采集到完整的全息图后发送至计算机，再通过重构算法，重构待测透镜的表面疵病。
本发明第三实施例中，本发明还提出采用球面光学元件表面疵病检测装置进行的检测方法；如图4所示，包括如下步骤：
S101、启动电源，控制电路脉冲触发光源发光，同时图像传感器(CCD)启动，快门同步采集图像；
S20、光源经待测透镜聚焦后，形成光源像点，其大小发生变化；在待测透镜与图像传感器CCD间添加曲面适配透镜，移动适配透镜，使光斑大小与CCD(大小尺寸为2056╳2060，像素分辨率为5.5μm)相匹配；
S30、光源发出球面波，遇待测透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠 加，形成全息图，如图3所示；
S40、因适配透镜的调节，图像传感器采集完整的全息图后发送至计算机，再通过重构算法，重构待测透镜的表面疵病。
本发明第四实施例中，本发明还提出采用球面光学元件表面疵病检测装置进行的检测方法；如图5所示，包括如下步骤：
S101、启动电源，控制电路脉冲触发光源发光，同时图像传感器(CCD)启动，快门同步采集图像；
S20、光源经待测透镜聚焦后，形成光源像点，其大小发生变化；在待测透镜与图像传感器CCD间添加曲面适配透镜，移动适配透镜，使光斑大小与CCD(大小尺寸为2056╳2060，像素分辨率为5.5μm)相匹配；
S30、光源发出球面波，遇待测透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠加，形成全息图，如图3所示；
S401、因适配透镜的调节，图像传感器采集完整的全息图后发送至计算机，再通过重构算法，重构待测透镜的表面疵病。
本发明实施例中，全息图经CCD记录后传输给计算机，如图6所示，ξ、η为待测透镜所在的坐标系，x、y为CCD所在的坐标系，计算机通过重构算法，具体公式如下：
Figure PCTCN2018110362-appb-000002
其中，K(ξ,ηz)表示重构后的物体图像强度，H(x,y)表示图像传感器记录的全息图强度，A ref(x,y)表示光源未发生改变的参考光，k表示传播常数，λ表示光源波长，L表示光源至图像传感器的距离，ξ和η表示物平面坐标参数，i为虚数单位。
本发明实施例中，对待测透镜表面进行疵病形貌重现(如图7所示)，可看到图7中有划痕、麻点疵病，划痕长度约为461.2μm。
本发明第五实施例中，本发明还提出采用球面光学元件表面疵病检测装置进行的检测方法；如图8所示，包括如下步骤：
S101、启动电源，控制电路脉冲触发光源发光，同时图像传感器(CCD)启动，快门同步采集图像；
S20、光源经待测透镜聚焦后，形成光源像点，其大小发生变化；在待测透镜与图像传感 器CCD间添加曲面适配透镜，移动适配透镜，使光斑大小与CCD(大小尺寸为2056╳2060，像素分辨率为5.5μm)相匹配；
S30、光源发出球面波，遇待测透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠加，形成全息图，如图3所示；
S401、因适配透镜的调节，图像传感器采集完整的全息图后发送至计算机，再通过重构算法，重构待测透镜的表面疵病。
本发明实施例中，全息图经CCD记录后传输给计算机，如图6所示，ξ、η为待测透镜坐标系，x、y为CCD所在的坐标系，计算机通过重构算法，具体公式如下：
Figure PCTCN2018110362-appb-000003
其中，K(ξ,ηz)表示重构后的物体图像强度，H(x,y)表示图像传感器记录的全息图强度，A ref(x,y)表示光源未发生改变的参考光，k表示传播常数，λ表示光源波长，L表示光源至图像传感器的距离，ξ、η表示物平面坐标参数，i为虚数单位。
本发明实施例中，对待测透镜表面进行疵病形貌重现(如图7所示)，可看到图7中有划痕、麻点疵病，划痕长度约为461.2μm。
S50、利用深度学习神经网络算法及光学零件表面疵病美国军用标准，对待测透镜表面疵病进行判定。
本发明第六实施例中，本发明还提出采用球面光学元件表面疵病检测装置进行的检测方法；如图9所示，包括如下步骤：
S101、启动电源，控制电路脉冲触发光源发光，同时图像传感器(CCD)启动，快门同步采集图像；
S20、光源经待测透镜聚焦后，形成光源像点，其大小发生变化；在待测透镜与图像传感器CCD间添加曲面适配透镜，移动适配透镜，使光斑大小与CCD(大小尺寸为2056╳2060，像素分辨率为5.5μm)相匹配；
S30、光源发出球面波，遇待测透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠加，形成全息图，如图3所示；
S401、因适配透镜的调节，图像传感器采集完整的全息图后发送至计算机，再通过重构算法，重构待测透镜表面疵病。
本发明实施例中，全息图经CCD记录后传输给计算机，如图6所示，ξ、η为待测透镜坐 标系，x、y为CCD所在的坐标系，计算机通过重构算法，具体公式如下：
Figure PCTCN2018110362-appb-000004
其中，K(ξ,ηz)表示重构后的物体图像强度，H(x,y)表示图像传感器记录的全息图强度，A ref(x,y)表示光源未发生改变的参考光，k表示传播常数，λ表示光源波长，L表示光源至图像传感器的距离，ξ、η表示物平面坐标参数，i为虚数单位。
本发明实施例中，对待测透镜表面进行疵病形貌重现(如图7所示)，可看到图7中有划痕、麻点疵病，划痕长度约为461.2μm。
S50、利用深度学习神经网络算法及光学零件表面疵病美国军用标准，对待测透镜表面疵病进行判定。
S60、对透镜进行数据输出，判定透镜的合格率。
以上所述仅为本发明的优选实施例，并非因此限制本发明的专利范围，凡是在本发明的发明构思下，利用本发明说明书及附图内容所作的等效结构变换，或直接/间接运用在其他相关的技术领域均包括在本发明的专利保护范围内。

Claims (10)

  1. 一种球面光学元件表面疵病检测装置，其特征在于，包括：控制电路、光源、待测透镜、适配透镜、图像传感器及计算机，其中，所述的控制电路连接光源以脉冲触发光源发光，所述的待测透镜设置于光源与图像传感器之间，所述的待测透镜与图像传感器之间设置有适配透镜，移动适配镜以使光斑大小与图像传感器相匹配；所述的图像传感器的输出端连接计算机的输入端。
  2. 根据权利要求1所述的球面光学元件表面疵病检测装置，其特征在于，所述的光源与图像传感器间的距离范围为25mm～50mm。
  3. 根据权利要求1所述的球面光学元件表面疵病检测装置，其特征在于，所述的待测透镜与光源之间的距离小于待测透镜焦距。
  4. 根据权利要求1所述的球面光学元件表面疵病检测装置，其特征在于，所述的光源，发出球面波遇透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠加，形成全息图并通过图像传感器采集。
  5. 根据权利要求1所述的球面光学元件表面疵病检测装置，其特征在于，所述的计算机重构采集的全息图强度。
  6. 采用权利要求1所述的球面光学元件表面疵病检测装置进行的检测方法，其特征在于，包括如下步骤：
    S10、启动光源；
    S20、光源经待测透镜聚焦后，在透镜后形成光斑像点，光斑大小发生变化，移动适配透镜，使光斑大小与图像传感器相匹配；
    S30、光源发出球面波，遇待测透镜表面疵病发生衍射，衍射光与未发生改变的光干涉叠加，形成全息图；
    S40、图像传感器采集到完整的全息图后发送至计算机，通过重构算法，重构待测透镜的表面疵病。
  7. 根据权利要求6所述的检测方法，其特征在于，S10所述的启动光源，具体为：
    启动电源，控制电路脉冲触发光源发光，同时图像传感器启动，快门同步采集图像。
  8. 根据权利要求6所述的检测方法，其特征在于，S40所述的通过图像传感器采集全息图发送至计算机，通过重构算法，重构待测透镜的表面疵病，具体公式如下：
    Figure PCTCN2018110362-appb-100001
    其中，K(ξ,ηz)表示重构后物体的图像强度，H(x,y)表示图像传感器记录的全息图强度，A ref(x,y)表示光源未发生改变的参考光，k表示传播常数，λ表示光源波长，L表示光源至图像传感器的距离，ξ和η为物平面坐标参数，i为虚数单位。
  9. 根据权利要求6所述的检测方法，其特征在于，S40之后还包括：
    S50、利用深度学习神经网络算法及光学零件表面疵病标准，对待测透镜表面疵病进行判定。
  10. 根据权利要求9所述的检测方法，其特征在于，S50之后还包括：
    S60、对透镜进行数据输出，判定透镜的合格率。
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