WO2020059569A1

WO2020059569A1 - Optical element, optical element array, lens group, electronic device, and method for manufacturing optical element

Info

Publication number: WO2020059569A1
Application number: PCT/JP2019/035448
Authority: WO
Inventors: 康寛鹿浜; 建治竹尾
Original assignee: ソニーセミコンダクタソリューションズ株式会社
Priority date: 2018-09-19
Filing date: 2019-09-10
Publication date: 2020-03-26

Abstract

The present invention comprises: a substrate in which a stepped structure is formed on one surface thereof, the stepped structure having stepped surfaces having a different height than the one surface; and a coating layer for continuously covering the stepped structure and the one surface on the periphery of the stepped structure, and transmitting or reflecting light.

Description

Optical element, optical element array, lens group, electronic device, and method for manufacturing optical element

技術 The present technology relates to an optical element, an optical element array, a lens group, an electronic device, and a method for manufacturing an optical element.

Conventionally, there has been proposed a lens including a substrate having a plurality of base patterns and a coating layer that covers each upper surface of the base patterns and transmits light (for example, see Patent Document 1). The lens described in Patent Literature 1 is formed on the upper surface of each underlying pattern by forming a lens forming pattern layer on the upper surface of each underlying pattern and then thermally reflowing the lens forming pattern layer.

JP 2000-307090 A

However, in the lens described in Patent Literature 1, a curved surface structure is formed using surface tension on the upper surface of a base pattern, that is, on a flat surface, so that the degree of freedom in design is low.
An object of the present disclosure is to provide an optical element, an optical element array, a lens group, an electronic device, and a method of manufacturing an optical element, which have a high degree of freedom in design.

An optical element according to an embodiment of the present disclosure includes: (a) a substrate in which a step structure having a step surface having a height different from that of one surface is formed on one surface; and (b) a step structure and one surface around the step structure. And a coating layer that continuously covers and transmits or reflects light.
In addition, the optical element array according to the present disclosure includes: (a) a substrate having a plurality of step structures regularly arranged in a two-dimensional array; and (b) a plurality of step structures and the surface of the substrate around them. A portion that covers continuously and covers each step structure includes a coating layer that transmits or reflects light.
Further, the optical element array according to the present disclosure includes (a) a plurality of first lenses arranged regularly in a two-dimensional array, and (b) an annular element having different heights with respect to one surface. A substrate on which a plurality of step structures having a step surface are formed, and a coating layer that continuously covers the step structure and one surface around the step structure and transmits light, and includes a coating layer that passes through the first lens. And a plurality of second lenses for correcting the aberration caused by the first lens.
Further, the lens group according to the present disclosure includes (a) a first lens, and (b) light before passing through the first lens or light after passing through the first lens, and the aberration caused by the first lens is reduced. A second lens to be corrected, the second lens comprising: (c) a substrate having a step structure having an annular step surface having a height different from that of one surface on one surface; A step structure and a coating layer that continuously covers one surface around the step structure and transmits light.

Further, the electronic device of the present disclosure includes: (a) a substrate having a plurality of step structures having a plurality of steps regularly arranged in a two-dimensional array; A solid-state imaging device including a microlens array having a covering layer in which each of the portions that cover and cover each step structure has a lens shape; and (b) image light from a subject is captured on an imaging surface of the solid-state imaging device. (C) a signal processing circuit that performs signal processing on a signal output from the solid-state imaging device.
Further, the method of manufacturing an optical element according to the present disclosure includes: (a) a step of forming a step structure on a substrate; (b) a step of applying a coating liquid to a substrate on which the step structure is formed; Drying the coating liquid so that a coating layer that continuously covers the surface of the surrounding substrate and transmits or reflects light is formed.
Further, the method for manufacturing an optical element according to the present disclosure includes: (a) a step of forming a plurality of step structures regularly arranged in a two-dimensional array on a substrate; and (b) a substrate on which a plurality of step structures are formed. (C) drying the coating liquid so as to form a coating layer that continuously covers the plurality of step structures and the surface of the substrate around the step structure and transmits light. (D) each of the step structures includes an annular concave portion for forming a lens into which light before passing through the color filter or light after passing therethrough is incident, and (e) a plurality of step structures on the substrate. In the step of forming, the width and diameter of each of the plurality of annular concave portions are adjusted according to the wavelength range of light transmitted by the color filter corresponding to the annular concave portions.

1 is a diagram illustrating an overall configuration of a solid-state imaging device according to a first embodiment of the present disclosure. FIG. 2 is a diagram illustrating a cross-sectional configuration of a pixel region when cut along a line A ₁ -A _{1 in} FIG. 1. It is a figure which expands and shows the planar structure of a wafer lens. It is a figure which expands and shows the planar structure of a wafer lens. It is a figure which expands and shows the planar structure of a wafer lens. It is a figure which expands and shows the planar structure of a wafer lens. It is a figure which expands and shows the step surface structure of a board | substrate. It is a figure which expands and shows a step structure. It is a figure which expands and shows a step structure. It is a figure which expands and shows the step structure in the solid-state imaging device concerning a modification. It is a figure which expands and shows the step structure in the solid-state imaging device concerning a modification. It is a figure which expands and shows a step structure. It is a figure which expands and shows a step structure. It is a figure which expands and shows a step structure. It is a figure which expands and shows a step structure. It is a figure which expands and shows a step structure. It is a figure which expands and shows a step structure, and is a side view of the step structure whose step surface is a concentric circular shape. It is a figure which expands and shows a step structure, and is a top view of the step structure of FIG. 8A. It is a figure which expands and shows a step structure, and is a side view of the step structure which a step surface is a concentric rectangular shape. It is a figure which expands and shows a step structure, and is a top view of the step structure of FIG. 8C. FIG. 10C is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a cross-sectional view of the optical element when cut along line A ₂ -A _{2 in} FIG. 9B. FIG. 9B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 9A. FIG. 10B is a diagram illustrating the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a cross-sectional view of the optical element when cut along line A ₃ -A _{3 in} FIG. 10B. FIG. 10C is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 10A. FIG. 12B is a diagram illustrating the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a cross-sectional view of the optical element when cut along line A ₄ -A _{4 in} FIG. 11B. FIG. 11B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 11A. FIG. 13 is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a cross-sectional view of the optical element when cut along line A ₅ -A _{5 in} FIG. 12B. FIG. 12B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 12A. FIG. 14B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, which is a cross-sectional view of the optical element taken along line A ₆ -A _{6 in} FIG. 13B. FIG. 13C is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 13A. FIG. 15B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a cross-sectional view of the optical element taken along line A ₇ -A _{7 in} FIG. 14B. FIG. 14C is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 14A. FIG. 15B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a cross-sectional view of the optical element taken along line A ₈ -A _{8 in} FIG. 15B. FIG. 15C is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 15A. FIG. 17B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, which is a cross-sectional view of the optical element taken along line A ₉ -A _{9 in} FIG. 16B. FIG. 16B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 16A. FIG. 17B is a diagram illustrating the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a cross-sectional view of the optical element when cut along a line A ₁₀ -A _{10 in} FIG. 17B. FIG. 17C is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 17A. FIG. 19B is a view showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, which is a cross-sectional view of the optical element taken along line A ₁₁ -A _{11 in} FIG. 18B. FIG. 18B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the first embodiment, and is a plan view of the optical element in FIG. 18A. FIG. 19B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the modification, and is a cross-sectional view of the optical element taken along line A ₁₂ -A _{12 of} FIG. 19B. FIG. 19B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the modification, and is a plan view of the optical element in FIG. FIG. 7 is an enlarged view illustrating a planar configuration of a wafer lens in a solid-state imaging device according to a second embodiment of the present disclosure. FIG. 21B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, which is a cross-sectional view of the optical element taken along line A ₁₃ -A _{13 of} FIG. 21B. FIG. 21B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 21A. It is a diagram showing the flow of a manufacturing process of the optical element in the solid-state imaging device according to a second embodiment, a cross-sectional view of an optical element in the case of breaks at A ₁₄ -A ₁₄ line in FIG 22B. FIG. 22C is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 22A. FIG. 24 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, which is a cross-sectional view of the optical element taken along line A ₁₅ -A _{15 in} FIG. 23B. FIG. 23C is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 23A. FIG. 25 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, which is a cross-sectional view of the optical element taken along line A ₁₆ -A _{16 in} FIG. 24B. FIG. 24B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 24A. FIG. 26 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a cross-sectional view of the optical element taken along line A ₁₇ -A _{17 in} FIG. 25B. FIG. 25C is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 25A. FIG. 27 is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a cross-sectional view of the optical element when cut along line A ₁₈ -A _{18 in} FIG. 26B. FIG. 26B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 26A. FIG. 28 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and a cross-sectional view of the optical element taken along line A ₁₉ -A _{19 in} FIG. 27B. FIG. 27B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 27A. FIG. 29 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, which is a cross-sectional view of the optical element taken along line A ₂₀ -A _{20 of} FIG. 28B. FIG. 29 is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 28B. FIG. 29 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and a cross-sectional view of the optical element taken along line A ₂₁ -A _{21 of} FIG. 29B. FIG. 29B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 29A. FIG. 31B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a cross-sectional view of the optical element taken along line A ₂₂ -A _{22 of} FIG. 30B. FIG. 30B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the second embodiment, and is a plan view of the optical element in FIG. 30A. FIG. 13 is an enlarged view illustrating a planar configuration of a wafer lens in a solid-state imaging device according to a third embodiment of the present disclosure. FIG. 3 is a diagram illustrating a light condensing state of a correction lens arranged in a pixel corresponding to a color filter that transmits red wavelength light. FIG. 3 is a diagram illustrating a light condensing state of a correction lens arranged in a pixel having a color filter that transmits light of a green wavelength. FIG. 3 is a diagram illustrating a light condensing state of a correction lens disposed in a pixel having a color filter that transmits light of a blue wavelength. FIG. 34 is a cross-sectional view of a case where a correction lens arranged in a pixel having a color filter that transmits red wavelength light is cut along a line A ₂₃ -A ₂₃ in FIG. 33B. FIG. 33B is a plan view of a correction lens arranged in a pixel having a color filter transmitting red light of FIG. 33A. FIG. 34B is a cross-sectional view of the case where the correction lens arranged in the pixel having the color filter transmitting the light of the green wavelength is cut along line A ₂₄ -A ₂₄ in FIG. 33B. FIG. 33B is a plan view of a correction lens arranged in a pixel having a color filter that transmits light of a green wavelength in FIG. 33A. FIG. 35B is a cross-sectional view of the case where the correction lens arranged in the pixel having the color filter transmitting the light of the blue wavelength is cut along the line A ₂₅ -A ₂₅ in FIG. 35B. FIG. 35B is a plan view of a correction lens arranged in a pixel having a color filter that transmits light of a blue wavelength in FIG. 35A. It is a figure which expands and shows the step surface structure of a board | substrate. FIG. 38 is a cross-sectional view of the optical element in a solid-state imaging device according to the third embodiment, showing a flow of a manufacturing process thereof, taken along line A ₂₆ -A _{26 in} FIG. 37B. FIG. 37B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, and is a plan view of the optical element in FIG. 37A. FIG. 39 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, which is a cross-sectional view of the optical element taken along line A ₂₇ -A _{27 in} FIG. 38B. FIG. 39A is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, and is a plan view of the optical element in FIG. 38A. FIG. 40 is a cross-sectional view of the optical element in the solid-state imaging device according to the third embodiment, showing the flow of the manufacturing process thereof, which is cut along the line A ₂₈ -A _{28 in} FIG. 39B. FIG. 39A is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, and is a plan view of the optical element in FIG. 39A. FIG. 41 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, which is a cross-sectional view of the optical element taken along line A ₂₉ -A _{29 in} FIG. 40B. FIG. 40B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, and a plan view of the optical element in FIG. 40A. FIG. 42B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, which is a cross-sectional view of the optical element taken along line A ₃₀ -A _{30 of} FIG. 41B. FIG. 41B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, and is a plan view of the optical element in FIG. 41A. FIG. 43 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, which is a cross-sectional view of the optical element taken along the line A ₃₁ -A _{31 in} FIG. 42B. FIG. 42B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, and is a plan view of the optical element in FIG. 42A. FIG. 43 is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, which is a cross-sectional view of the optical element taken along the line A ₃₂ -A _{32 in} FIG. 43B. FIG. 43B is a diagram illustrating a flow of a manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, and is a plan view of the optical element in FIG. 43A. FIG. 45A is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, and is a cross-sectional view of the optical element taken along line A ₃₃ -A _{33 of} FIG. 44B. FIG. 45B is a diagram showing the flow of the manufacturing process of the optical element in the solid-state imaging device according to the third embodiment, and is a plan view of the optical element in FIG. 44A. FIG. 9 is a diagram illustrating a cross-sectional configuration of a pixel region of a solid-state imaging device according to a modification. It is a figure showing the section composition of the reflector of the optical element concerning a modification. The correction lens of the solid-state imaging device according to the modification is a sectional view taken broken at A ₃₄ -A ₃₄ line in FIG 47B. FIG. 47B is a plan view of the correction lens of FIG. 47A. The wafer lens of the solid-state imaging device according to the modification is a sectional view taken broken at A ₃₅ -A ₃₅ line in FIG 48B. FIG. 48B is a plan view of a lens arranged in a pixel corresponding to a color filter that transmits light of a red wavelength in FIG. 48A. The wafer lens of the solid-state imaging device according to the modification is a sectional view taken broken at A ₃₆ -A ₃₆ line in FIG 48B. FIG. 48B is a plan view of a lens arranged in a pixel corresponding to a color filter that transmits light of a red wavelength in FIG. 48A. FIG. 3 is a diagram illustrating a light condensing state by a lens group configured in a pixel corresponding to a color filter that transmits light of a red wavelength. FIG. 4 is a diagram illustrating a light condensing state by a lens group configured in a pixel corresponding to a color filter that transmits light of a green wavelength. FIG. 4 is a diagram illustrating a light condensing state by a lens group configured in a pixel corresponding to a color filter that transmits light of a blue wavelength. FIG. 3 is a diagram illustrating a light condensing state by a lens group configured in a pixel corresponding to a color filter that transmits light of a red wavelength. FIG. 4 is a diagram illustrating a light condensing state by a lens group configured in a pixel corresponding to a color filter that transmits light of a green wavelength. FIG. 4 is a diagram illustrating a light condensing state by a lens group configured in a pixel corresponding to a color filter that transmits light of a blue wavelength. FIG. 13 is a schematic configuration diagram of an electronic device according to a fourth embodiment of the present disclosure. It is a block diagram showing an example of a schematic structure of a vehicle control system. It is explanatory drawing which shows an example of the installation position of a vehicle exterior information detection part and an imaging part. It is a figure showing an example of the schematic structure of an endoscope operation system. FIG. 3 is a block diagram illustrating an example of a functional configuration of a camera head and a CCU.

Hereinafter, an example of an optical element, an optical element array, a lens group, an electronic device, and a method of manufacturing an optical element according to an embodiment of the present disclosure will be described with reference to FIGS. Embodiments of the present disclosure will be described in the following order. Note that the present disclosure is not limited to the following examples. In addition, the effects described in this specification are illustrative and not limited, and other effects may be provided.

1. 1. First embodiment: solid-state imaging device 1-1 Overall configuration of solid-state imaging device 1-2 Configuration of main part 1-3 Manufacturing method of wafer lens 2. Second embodiment: solid-state imaging device 2-1 Configuration of main part 2-2 Manufacturing method of wafer lens Third embodiment: solid-state imaging device 3-1 Configuration of main part 3-2 Manufacturing method of correction lens 3-3 Modified example 4. 4. Fourth embodiment: electronic device Application example to mobile object 6. Example of application to endoscopic surgery system

<1. First Embodiment>
[1-1 Overall Configuration of Solid-State Imaging Device]
A solid-state imaging device according to a first embodiment of the present disclosure will be described. FIG. 1 is a schematic configuration diagram illustrating the entire solid-state imaging device according to the first embodiment of the present disclosure.
The solid-state imaging device 1 in FIG. 1 is a back-illuminated CMOS (Complementary Metal Oxide Semiconductor) image sensor. As shown in FIG. 52, the solid-state imaging device 1 (101) captures image light (incident light 106) from a subject via an optical lens 102, and determines the amount of incident light 106 imaged on the imaging surface as a pixel. It is converted into an electric signal in units and output as a pixel signal.
As shown in FIG. 1, the solid-state imaging device 1 according to the first embodiment includes a substrate 2, a pixel region 3, a vertical drive circuit 4, a column signal processing circuit 5, a horizontal drive circuit 6, and an output circuit 7. And a control circuit 8.

The pixel region 3 has a plurality of pixels 9 regularly arranged on the substrate 2 in a two-dimensional array. The pixel 9 includes the photoelectric conversion unit 23 illustrated in FIG. 2 and a plurality of pixel transistors (not illustrated). As the plurality of pixel transistors, for example, four transistors of a transfer transistor, a reset transistor, a selection transistor, and an amplifier transistor can be adopted. Further, for example, three transistors excluding the selection transistor may be employed.

The vertical drive circuit 4 is configured by, for example, a shift register, selects a desired pixel drive line 10, supplies a pulse for driving the pixel 9 to the selected pixel drive line 10, and controls each pixel 9 in a row unit. Drive. That is, the vertical drive circuit 4 selectively scans each pixel 9 in the pixel region 3 sequentially in the vertical direction on a row-by-row basis, and generates a pixel signal based on the signal charge generated in the photoelectric conversion unit 23 of each pixel 9 according to the amount of received light. , To the column signal processing circuit 5 through the vertical signal line 11.

The column signal processing circuit 5 is arranged, for example, for each column of the pixels 9 and performs signal processing such as noise removal on the signals output from the pixels 9 for one row for each pixel column. For example, the column signal processing circuit 5 performs signal processing such as CDS (Correlated Double Sampling) and AD (Analog Digital) conversion for removing pixel-specific fixed pattern noise.
The horizontal driving circuit 6 is configured by, for example, a shift register, sequentially outputs horizontal scanning pulses to the column signal processing circuit 5, selects each of the column signal processing circuits 5 in order, and, from each of the column signal processing circuits 5, The pixel signal subjected to the signal processing is output to the horizontal signal line 12.

The output circuit 7 performs signal processing on pixel signals sequentially supplied from each of the column signal processing circuits 5 through the horizontal signal line 12 and outputs the processed signal. As the signal processing, for example, buffering, black level adjustment, column variation correction, various digital signal processing, and the like can be used.
The control circuit 8 generates a clock signal and a control signal, which serve as references for the operations of the vertical drive circuit 4, the column signal processing circuit 5, and the horizontal drive circuit 6, based on the vertical synchronization signal, the horizontal synchronization signal, and the master clock signal. Generate. Then, the control circuit 8 outputs the generated clock signal and control signal to the vertical drive circuit 4, the column signal processing circuit 5, the horizontal drive circuit 6, and the like.

[1-2 Configuration of Main Part]
Next, a detailed structure of the solid-state imaging device 1 of FIG. 1 will be described. FIG. 2 is a diagram illustrating a cross-sectional configuration of the pixel region 3 of the solid-state imaging device 1 according to the first embodiment. In FIG. 2, a back-illuminated CMOS image sensor (CMOS solid-state imaging device) is used as the solid-state imaging device 1.

As shown in FIG. 2, the solid-state imaging device 1 according to the first embodiment includes a light-receiving layer 17 in which a substrate 2, a fixed charge film 13, an insulating film 14, a light-shielding film 15, and a planarizing film 16 are stacked in this order. Have. On the surface of the light receiving layer 17 on the side of the flattening film 16 (hereinafter also referred to as “back surface S1”), a light collecting layer 20 formed by laminating a color filter 18 and a wafer lens 19 (optical element) in this order is formed. Have been. Here, the wafer lens 19 is also called an on-chip lens or a micro lens. Further, a wiring layer 21 and a support substrate 22 are stacked in this order on the surface of the light receiving layer 17 on the substrate 2 side (hereinafter also referred to as “surface S2”). Since the back surface S1 of the light receiving layer 17 and the back surface of the flattening film 16 are the same surface, the back surface of the flattening film 16 is also referred to as “back surface S1” in the following description. Further, since the surface S2 of the light receiving layer 17 and the surface of the substrate 2 are the same surface, in the following description, the surface of the substrate 2 is also referred to as “surface S2”.

The substrate 2 is formed of, for example, a semiconductor substrate made of silicon (Si), and forms a pixel region 3 as shown in FIG. As shown in FIG. 2, the pixel region 3 includes a plurality of photoelectric conversion units 23 formed on the substrate 2, that is, a plurality of pixels 9 including the plurality of photoelectric conversion units 23 embedded in the substrate 2. , Are arranged in a two-dimensional array. In the photoelectric conversion unit 23, signal charges corresponding to the amount of incident light are generated, and the generated signal charges are accumulated.

The fixed charge film 13 continuously covers the entire rear surface S3 side (entire light receiving surface side) of the substrate 2. The insulating film 14 continuously covers the entire back surface S4 side (the entire light receiving surface side) of the fixed charge film 13. The light-shielding film 15 is formed in a lattice shape on a part of the insulating film 14 on the back surface S5 side (a part on the light-receiving surface side) so as to open each light-receiving surface of the plurality of photoelectric conversion units 23. I have. Further, the flattening film 16 continuously covers the entire back surface S5 side (the entire light receiving surface side) of the insulating film 14 including the light shielding film 15 so that the back surface S1 of the light receiving layer 17 becomes a flat surface without unevenness. ing.
The color filters 18 are formed on the back surface S1 side (light receiving surface side) of the flattening film 16 so as to correspond to each pixel 9. Thus, the color filters 18 form a color filter array regularly arranged in a two-dimensional array. Each of the color filters 18 is formed so as to transmit a specific wavelength such as red, green, and blue. Then, the color filter 18 transmits light of a specific wavelength and makes the transmitted light incident on the photoelectric conversion unit 23 of the substrate 2.

The wafer lens 19 is formed on the back surface S6 side (light receiving surface side) of the color filter 18 so as to correspond to each pixel 9. Thus, the wafer lenses 19 form a microlens array 24 (optical element array) regularly arranged in a two-dimensional array. The wafer lens 19 condenses the image light (incident light 106) from the subject shown in FIG. 52, and transmits the condensed incident light 106 to the photoelectric conversion unit 23 after passing through the color filter 18.
In the first embodiment, as shown in FIG. 3A, an example is shown in which one wafer lens 19 is formed so as to correspond to one pixel 9, but another configuration can be adopted. For example, as shown in FIGS. 3B, 3C, and 3D, a configuration in which one wafer lens 19 is formed so as to correspond to a plurality of pixels 9 such as 2 × 1 pixel, 1 × 2 pixel, and 2 × 2 pixel. Good.

As shown in FIG. 4, the wafer lens 19 includes a substrate 25 and a coating layer 26.
The substrate 25 is formed on the back surface S6 side (light receiving surface side) of the color filter 18 and includes a plurality of step structures 27 which are convex portions formed on the back surface S7 side (light receiving surface side) of the substrate 25. It is configured. Each of the step structures 27 is formed corresponding to each pixel 9 and has one or more step surfaces 28. As the step surface 28, for example, a surface having a different height from the back surface S7 of the substrate 25 can be used. For example, a surface parallel to the back surface S7 of the substrate 25 can be adopted. FIG. 4 illustrates a case where the number of steps on the step surface 28 of the step structure 27 is one.

The number of steps on the step surface 28 of the step structure 27 may be two or more as shown in FIGS. 5A and 5B. When there are two or more step surfaces 28, the step structure 27 includes side surfaces 29 and 30, a vertical surface perpendicular to the back surface S7 (surface on the light receiving surface side) of the substrate 25, and a normal direction of the back surface S7. At least one of an inclined surface and a curved surface inclined with respect to. The side surface 29 is a surface on which the back surface S7 of the substrate 25 and the step surface 28 are continuous. The side surface 30 is a surface on which the two step surfaces 28 are continuous. FIG. 5A illustrates a case where the number of steps of the step surface 28 of the step structure 27 is two, the side surface 29 is a vertical surface, and the side surface 30 is a curved surface. In FIG. 5B, the number of steps of the step surface 28 of the step structure 27 is four, the side surface 29 is a vertical surface, the lowermost side surface 30 is a vertical surface, the middle side surface 30 is a curved surface, and the uppermost side surface 30 is a curved surface. An example is shown. By setting the number of steps of the step surface 28 to two or more, the upper surface of the coating layer 26 can be formed into a smooth curved surface, and the wafer lens 19 having a large curvature can be easily formed.

6A and 6B, even if the number of steps on the step surface 28 of the step structure 27 is one, as the side surface 29 of the step structure 27, the back surface S7 (the surface on the light receiving surface side) of the substrate 25 is used. By using an inclined surface or a curved surface inclined with respect to the normal direction, the upper surface of the coating layer 26 can be formed into a smooth curved surface, and the wafer lens 19 having a large curvature can be formed. FIG. 6A illustrates a case where the number of steps of the step surface 28 is one and the side surface 29 is an inclined surface. FIG. 6B illustrates a case where the number of steps of the step surface 28 is one and the side surface 29 is a curved surface.
The angle of inclination of the inclined surface is preferably in the range of 0 degree or more and 60 degrees or less with respect to the normal direction of the back surface S7 (the light receiving surface side) of the substrate 25. In particular, the range of 15 degrees or more and 60 degrees or less is more preferable. The ratio of the width W to the height H of the step structure 27 shown in FIG. 4 is preferably in the range of 1:10 to 10: 1. In particular, the range of 1: 5 to 5: 1 is more preferable. As the width W, for example, when the step structure 27 is circular in plan view, the diameter of the bottom surface of the step structure 27 can be adopted. When the step structure 27 has a rectangular shape, the short side width of the bottom surface of the step structure 27 can be adopted. The width W of the step structure 27 is set to be equal to or less than the pitch p of the step structure 27 (for example, 50 μm or less).

7A, FIG. 7B, FIG. 7C, FIG. 7D, and FIG. 7E. A circular shape, a polygonal shape, an elliptical shape, or the like can be used according to the layout of the plurality of pixels 9 in. As the polygonal shape, for example, not only those having corners that are rounded, but also those having rounded corners may be used. FIG. 7A illustrates a case where the planar shape of the step structure 27 is a circular shape. FIG. 7B illustrates a case where the planar shape of the step structure 27 is a triangular shape. Further, FIG. 7C illustrates a case where the planar shape of the step structure 27 is rectangular. FIG. 7D illustrates a case where the planar shape of the step structure 27 is a hexagonal shape. Further, FIG. 7E illustrates a case where the planar shape of the step structure 27 is an elliptical shape. Here, when an elliptical shape is used as the planar shape of the step structure 27, the ratio (aspect ratio) between the long side L and the short side S of the elliptical shape shown in FIG. 3B is preferably 1 or more and 5 or less. .

8A and FIG. 8C, when the number of steps of the step surface 28 of the step structure 27 is two or more, as shown in FIG. 8B and FIG. It is preferable to arrange the step surfaces 28 so that the outer circumferences are separated from each other. FIGS. 8A and 8B illustrate a case where the step surfaces 28 are arranged such that the outer periphery of each step surface 28 forms a plurality of concentric circles in plan view. 8C and 8D illustrate a case where the step surfaces 28 are arranged such that the outer periphery of each step surface 28 forms a plurality of concentric rectangles in plan view.
8A to 8D show an example in which the step surfaces 28 are arranged so that the outer peripheries of the step surfaces 28 are concentric in plan view, but the outer peripheries of the step surfaces 28 are separated from each other. As long as each step surface 28 is arranged, another configuration may be adopted. For example, the configuration may be such that the step surfaces 28 are arranged such that the center point of the outer periphery of each step surface 28 is shifted in plan view.

Further, as a material of the substrate 25, for example, a material that transmits light and has a refractive index of about 1.5 can be used. For example, a resin used as a resin lens material such as a styrene resin or an acrylic resin, or an inorganic material such as silicon oxide (SiO ₂ ) or silicon nitride (Si ₃ N ₄ ) having a refractive index close to 1.5. Materials can be adopted. As the styrene-based resin, for example, polystyrene, AS resin, and ABS resin can be adopted. Further, as the acrylic resin, for example, poly (meth) acrylonitrile, polymethyl (meth) acrylate, polyethyl (meth) acrylate, polybutyl (meth) acrylate, polyacrylamide can be employed.

The coating layer 26 is formed on the back surface S7 side (light receiving surface side) of the substrate 25, and continuously covers the step structure 27 and the back surface S7 (surface on the light receiving surface side) of the substrate 25 around the step structure 27. doing. That is, the coating layer 26 is configured to cover the entire back surface S7, that is, the entire surface having the step structure 27. The upper surface of the portion covering the step structure 27 is formed in a curved shape of a convex lens.
As described above, in the first embodiment, the entire surface having the step structure 27 is covered with the covering layer 26, and the portion of the covering layer 26 covering the step structure 27 is formed in a lens shape (convex lens shape). Therefore, a convex microlens is formed by the step structure 27 and the covering layer 26.

Further, as the material of the coating layer 26, for example, a material that transmits light and has a difference from the refractive index of the material of the substrate 25 within ± 10% of the refractive index of the material of the substrate 25 can be used. . In particular, in consideration of the reduction in the difference in the refractive index, it is preferable to use the same material as the material of the substrate 25. By reducing the difference between the refractive index of the coating layer 26 of the incident light and the refractive index of the substrate 25, scattering and reflection of the incident light at the interface between the coating layer 26 and the substrate 25 can be suppressed.

The wiring layer 21 is formed on the surface S2 side of the substrate 2 and includes a plurality of wirings (three layers in FIG. 2) of wirings 32 via an interlayer insulating film 31. The pixel transistors constituting each pixel 9 are driven via a plurality of layers of wirings 32 formed in the wiring layer 21.
The support substrate 22 is formed on the surface of the wiring layer 21 opposite to the surface facing the substrate 2. The support substrate 22 is a substrate for ensuring the strength of the substrate 2 at the stage of manufacturing the solid-state imaging device 1. As a material of the support substrate 22, for example, silicon (Si) can be used.

In the solid-state imaging device 1 having the above configuration, light is irradiated from the back surface side of the substrate 2 (the back surface S1 side of the light receiving layer 17), and the irradiated light is transmitted through the wafer lens 19 and the color filter 18 and transmitted. Are photoelectrically converted by the photoelectric conversion unit 23, thereby generating signal charges. Then, the generated signal charge is output as a pixel signal on the vertical signal line 11 shown in FIG. 1 formed by the wiring 32 via the pixel transistor formed on the surface S2 side of the substrate 2.

[1-3 Manufacturing method of wafer lens]
Next, a method of manufacturing the wafer lens 19 (the optical element of the first embodiment) of the solid-state imaging device 1 of the first embodiment will be described. 9A, 9B, 10A, 10B, 11A, 11B, 12A, 12B, 13A, 13B, 14A, 14B, 15A, 15B, 16A, 16B, and 17A. 17B, FIG. 18A, and FIG. 18B are a plan view and a cross-sectional view illustrating a manufacturing process of the optical element of the first embodiment. FIGS. 9A to 18B illustrate a case where the number of steps on the step surface 28 of the step structure 27 of the substrate 25 is three.
First, as shown in FIGS. 9A and 9B, a photoresist film 33 is applied to the entire back surface S8 of the substrate 25. Subsequently, as shown in FIGS. 10A and 10B, the photoresist film 33 is exposed, and as shown in FIGS. 11A and 11B, the photoresist film 33 is developed.
Subsequently, as shown in FIGS. 12A and 12B, the back surface S8 of the substrate 25 is etched using the developed photoresist film 33 as an etching mask, and the third (uppermost) step surface of the step structure 27 is formed. 28c is formed. Subsequently, as shown in FIGS. 13A and 13B, the photoresist film 33 is slimmed, and as shown in FIGS. 14A and 14B, the third step is formed using the slimmed photoresist film 33 as an etching mask. The surface 28c is etched to form the first (lowest) step surface 28a of the step structure 27. Subsequently, slimming and etching are repeated to form a step surface 28b of the second step (intermediate portion) of the step structure 27, and a step structure 27 having three

step surfaces

28a, 28b and 28c.
Subsequently, as shown in FIGS. 15A and 15B, the photoresist film 33 is removed from the back surface S8 of the substrate 25. As a result, a plurality of step structures 27 having three

step surfaces

28a, 28b, 28c regularly arranged in a two-dimensional array are formed on the back surface S7 of the substrate 25.

Subsequently, as shown in FIGS. 16A and 16B, the coating liquid 34 for forming the coating layer 26 is formed so as to cover the entire back surface S7 of the substrate 25, that is, the entire surface having the step structure 27, and to make the liquid level horizontal. Is applied. The thickness of the layer composed of the coating liquid 34 is the thickest at the portion corresponding to the portion where the step structure 27 is not formed, and the second thickest at the portion corresponding to the first step surface 28 a of the step structure 27. The portion of the step structure 27 corresponding to the second step surface 28b is the third thickest, and the portion of the step structure 27 corresponding to the third step surface 28c is the thinnest. As the coating liquid 34, for example, a coating liquid obtained by dissolving a solute such as a styrene resin or an acrylic resin in a solvent can be used. As a method of applying the coating liquid 34, for example, a spin coating method can be adopted.

Subsequently, as shown in FIGS. 17A and 17B, the applied coating liquid 34 is dried. At that time, the solvent volatilizes, and the thickness of the layer composed of the coating liquid 34 decreases. Specifically, at the initial stage of drying the coating liquid 34, the surface of the coating liquid 34 is flat and the film thickness is uniformly reduced. However, when the drying of the coating liquid 34 proceeds, the solute concentration of the coating liquid 34 in the convex portion locally increases due to the step structure 27 of the substrate 25. As a result, the evaporation rate of the solvent of the coating liquid 34 is reduced in the convex portions, and the surface of the coating liquid 34 in the concave portions is concave. Due to this phenomenon, the amount of decrease in the thickness of the layer increases as the thickness of the layer increases. That is, the portion corresponding to the portion where the step structure 27 is not formed has the largest reduction amount, and the portion corresponding to the first step surface 28a of the step structure 27 has the second largest reduction amount. The portion corresponding to the step surface 28b of the step has the third largest reduction amount, and the portion corresponding to the third step surface 28c of the step structure 27 has the smallest reduction amount. As a result, a convex lens-shaped coating layer 26 is formed in a portion covering the step structure 27.
Subsequently, as shown in FIGS. 18A and 18B, UV curing or baking is performed on the convex lens-shaped coating layer 26 so that the formed coating layer 26 (coating film) becomes a permanent film. As a result, the coating layer 26 is cured, and the wafer lens 19 shown in FIG. 4 is completed. In the completed wafer lens 19, the lens height LH shown in FIG. Further, the lens diameter LR is not less than the width W of the step structure 27 and not more than the pitch p of the step structure 27.

When the side surfaces 29 and 30 are inclined surfaces, for example, a resist receding method can be used. In the resist receding method, as shown in FIGS. 19A and 19B, when etching the substrate 25, the photoresist film 33 is also gradually etched using an etching gas mixed with O ₂ gas or the like. Then, the photoresist film 33 is gradually reduced, and the region to be etched on the substrate 25 is gradually increased. As a result, a portion where the etching time changes continuously can be formed on the substrate 25, and inclined surfaces can be formed on the side surfaces 29 and 30.

As described above, in the wafer lens 19 (optical element) of the first embodiment, the substrate in which the step structure 27 having the step surface 28 having a height different from the back surface S7 is formed on one surface (back surface S7). 25. Further, the step structure 27 and the surrounding back surface S7 are provided with a covering layer 26 that continuously covers and transmits light. Therefore, various shapes can be realized by the shape of the step structure 27, and the wafer lens 19 with high design flexibility can be provided.
Further, in the wafer lens 19 (optical element) of the first embodiment, the number of steps of the step surface 28 is two or more. Alternatively, when the number of steps of the step surface 28 is one, the side surface 29 of the step structure 27 has an inclined surface or a curved surface inclined with respect to the normal direction of the back surface S7 (surface on the light receiving surface side) of the substrate 25. I did it. Therefore, the upper surface of the coating layer 26 can be formed into a smooth curved surface, and the wafer lens 19 having a large curvature can be formed. Therefore, the CMOS image sensor can be made suitable for further miniaturization.
It should be noted that the effects described in this specification are merely examples and are not limited, and may have other effects.

Further, in the method for manufacturing an optical element according to the first embodiment, a step of forming the step structure 27 on the substrate 25, a step of applying a coating liquid 34 to the substrate 25 having the step structure 27 formed thereon, Drying the coating liquid 34 so as to continuously cover the surface (the back surface S7) of the surrounding substrate 25 and form the coating layer 26 that transmits light. Therefore, since a curved surface can be formed only by the application operation, the existing equipment can be used and the cost can be suppressed. Therefore, it is possible to provide a method for manufacturing an optical element capable of reducing the manufacturing cost.
In the method for manufacturing an optical element according to the first embodiment, the surface of the coating layer 26 can have a gentle curvature according to the shape of the step structure 27, and the surface of the coating layer 26 can be controlled with high controllability. Can be changed. Further, the step structure 27 can be designed so that the desired shape of the wafer lens 19 is realized by using the simulation of the application and drying of the application liquid 34.

Incidentally, as described in Patent Document 1, for example, after forming a lens formation pattern layer on each of the upper surfaces of the step structures, the lens formation pattern layer is thermally reflowed to form a lens. According to the method, since a curved surface structure is formed using surface tension, only a convex shape can be formed, and a concave shape cannot be formed.
On the other hand, in the method of manufacturing the optical element according to the first embodiment, since both the convex shape and the concave shape can be formed depending on the shape of the step structure 27, the degree of freedom in design can be improved. The shape of the optical element depends on the structure of the step (shape / height), the control of the drying process of the drying speed, and the coating material such as pitch, width, number of steps, inclination angle, curvature, coating liquid drying speed, diffusion coefficient, concentration, etc. It can be controlled by adjusting the physical properties. Therefore, a curved surface having a desired curvature distribution can be formed. In addition, for example, by forming a step structure or the like for each pixel 9, a curved surface can be formed for each pixel 9.

In addition, for example, in the thermal reflow method, the material of the lens forming pattern layer requires resolution and thermal reflow properties to enable formation of a pattern in addition to photosensitivity.
On the other hand, in the method for manufacturing an optical element according to the first embodiment, the photoresist film 33 does not need to have a resolution and a thermal reflow property, and the material of the photoresist film 33 is less restricted.

Further, for example, in the thermal reflow method, the substrate needs to have heat resistance in order to heat the lens forming pattern layer. Further, for example, as described in JP-A-2005-349708, after forming a water-repellent film having an opening region on a substrate, a liquid member corresponding to a lens shape is dropped on the opening region to form a lens. In the method of forming the substrate, the substrate needs to be hydrophilic.
On the other hand, in the method for manufacturing an optical element according to the first embodiment, the substrate 25 does not need to have heat resistance or hydrophilicity, and the material of the substrate 25 of the wafer lens 19 (optical element) is less restricted.

<2. Second embodiment: solid-state imaging device>
[2-1 Configuration of Main Part]
Next, a solid-state imaging device according to a second embodiment of the present disclosure will be described. The overall configuration of the solid-state imaging device according to the second embodiment and the cross-sectional configuration of the pixel region 3 are the same as those in FIGS. FIG. 20 is a sectional configuration diagram of a main part of the solid-state imaging device 1 according to the second embodiment. 20, parts corresponding to those in FIG. 4 are denoted by the same reference numerals, and redundant description will be omitted.

固体 The solid-state imaging device 1 of the second embodiment differs from the first embodiment in the configuration of the wafer lens 19. In the second embodiment, as shown in FIG. 20, the step structure 27 is a concave portion formed in the depth direction from the back surface S7 side of the substrate 25. The coating layer 26 is configured to continuously cover the bottom surface and the inner wall surface of the concave portion, and the back surface S7 of the substrate 25 around the concave portion. The upper surface of the portion that covers the bottom surface and the inner wall surface of the concave portion is formed into a curved surface of the concave lens.

[2-2 Manufacturing method of wafer lens]
Next, a method of manufacturing the wafer lens 19 (the optical element of the second embodiment) of the solid-state imaging device 1 of the second embodiment will be described. 21A, 21B, 22A, 22B, 23A, 23B, 24A, 24B, 25A, 25B, 26A, 26B, 27A, 27B, 28A, 28B, 29A. 29B, FIG. 30A, and FIG. 30B are a plan view and a cross-sectional view illustrating a manufacturing process of the optical element of the second embodiment. FIGS. 21A to 30B illustrate a case where the number of steps on the step surface 28 of the step structure 27 of the substrate 25 is three.
First, as shown in FIGS. 21A and 21B, a photoresist film 33 is applied to the entire back surface S7 of the substrate 25. Subsequently, as shown in FIGS. 22A and 22B, the photoresist film 33 is exposed, and as shown in FIGS. 23A and 23B, the photoresist film 33 is developed.
Subsequently, as shown in FIGS. 24A and 24B, the back surface S7 of the substrate 25 is etched using the developed photoresist film 33 as an etching mask, and the third (lowest) step surface of the step structure 27 is formed. 28f is formed. Subsequently, as shown in FIGS. 25A and 25B, the photoresist film 33 is slimmed, and as shown in FIGS. 26A and 26B, using the slimmed photoresist film 33 as an etching mask, Is etched to form a second step surface (intermediate portion) 28 e of the step structure 27. Subsequently, slimming and etching are repeated to form the first (uppermost) step surface 28d of the step structure 27, and to form the step structure 27 having three

step surfaces

28d, 28e and 28f.
Subsequently, as shown in FIGS. 27A and 27B, the photoresist film 33 is removed from the back surface S7 of the substrate 25. As a result, a plurality of step structures 27 having three

step surfaces

28d, 28e, and 28f regularly arranged in a two-dimensional array are formed on the back surface S7 of the substrate 25.

Subsequently, as shown in FIGS. 28A and 28B, the coating liquid 34 for forming the coating layer 26 is formed so as to cover the entire back surface S7 of the substrate 25, that is, the entire surface having the step structure 27, and to make the liquid level horizontal. Is applied. The thickness of the layer made of the coating liquid 34 is the thickest at the portion corresponding to the third step surface 28f of the step structure 27, and the second thickest at the portion corresponding to the second step surface 28e of the step structure 27. The portion corresponding to the first step surface 28d of the step structure 27 is the third thickest, and the portion corresponding to the portion where the step structure 27 is not formed is the thinnest. As the coating liquid 34, for example, a coating liquid obtained by dissolving a styrene resin or an acrylic resin in an appropriate solvent can be used. As a method of applying the coating liquid 34, for example, a spin coating method can be adopted.

Subsequently, as shown in FIGS. 29A and 29B, the applied coating liquid 34 is dried. At that time, the solvent volatilizes, and the thickness of the layer composed of the coating liquid 34 decreases. Specifically, at the initial stage of drying the coating liquid 34, the surface of the coating liquid 34 is flat and the film thickness is uniformly reduced. However, as the drying of the coating liquid 34 progresses, the concentration of the solute in the coating liquid 34 in the concave portion locally decreases due to the step structure 27 of the substrate 25. As a result, the evaporation rate of the solvent of the coating liquid 34 is increased in the concave portions, and the surface of the coating liquid 34 in the concave portions is concave. Due to this phenomenon, the amount of decrease in the thickness of the layer increases as the thickness of the layer increases. That is, the portion corresponding to the third step surface 28f of the step structure 27 has the largest reduction amount, and the portion corresponding to the second step surface 28e of the step structure 27 has the second largest reduction amount. The portion corresponding to the step surface 28d of the first step 27 has the third largest reduction amount, and the portion corresponding to the portion where the step structure 27 is not formed has the smallest reduction amount. As a result, a concave lens-like coating layer 26 is formed in a portion covering the step structure 27.
Subsequently, as shown in FIGS. 30A and 30B, UV curing or baking is performed on the concave lens-shaped coating layer 26 so that the formed coating layer 26 (coating film) becomes a permanent film. As a result, the coating layer 26 is cured, and the wafer lens 19 shown in FIG. 20 is completed. In the completed wafer lens 19, the lens height LH shown in FIG. Further, the lens diameter LR is not less than the width W of the step structure 27 and not more than the pitch p of the step structure 27.

As described above, in the wafer lens 19 (optical element) of the second embodiment, the substrate in which the step structure 27 having the step surface 28 having a height different from the back surface S7 is formed on one surface (back surface S7). 25. Further, the step structure 27 and the surrounding back surface S7 are provided with a covering layer 26 that continuously covers and transmits light. Therefore, various shapes can be realized by the shape of the step structure 27, and the wafer lens 19 with high design flexibility can be provided.

<3. Third embodiment: solid-state imaging device>
[3-1 Configuration of Main Part]
Next, a solid-state imaging device according to a third embodiment of the present disclosure will be described. The overall configuration of the solid-state imaging device according to the third embodiment is the same as that in FIG. FIG. 31 is a diagram illustrating a cross-sectional configuration of a pixel region 3 according to the third embodiment. In FIG. 31, portions corresponding to FIG. 2 are denoted by the same reference numerals, and redundant description will be omitted.

As shown in FIG. 31, the solid-state imaging device 1 according to the third embodiment combines a spherical lens-shaped wafer lens 19 having a large curvature at the center and a correction lens 35 having a gentle curvature at the outer periphery. The first embodiment is different from the first embodiment in that a complex aspheric lens having a large curvature at the center and a gentle curvature at the outer periphery is realized by forming a lens group having a large curvature. That is, the correction lens 35 is configured to receive the light transmitted through the wafer lens 19.
The correction lens 35 is formed in the flattening film 16 between the insulating film 14 and the color filter 18 so as to correspond to each pixel 9. Thus, the correction lens 35 forms a correction lens array (optical element array) regularly arranged in a two-dimensional array. The correction lens 35 is optically designed to correct the aberration caused by the wafer lens 19. Examples of the aberration caused by the wafer lens 19 include Seidel's five aberrations (spherical aberration, astigmatism, coma aberration, field curvature aberration, distortion), chromatic aberration (magnification chromatic aberration, axial chromatic aberration), and the like.

Here, in the case where the wafer lens 19 is a lens that causes chromatic aberration of magnification, when light enters the wafer lens 19 obliquely with respect to the optical axis, the light by the wafer lens 19 is changed for each color (wavelength range) included in the incident light. The imaging positions are different positions in a plane orthogonal to the optical axis. When the wafer lens 19 is a lens that causes axial chromatic aberration, when light enters the wafer lens 19 in parallel with the optical axis, the light by the wafer lens 19 is changed for each color (wavelength range) included in the incident light. The imaging positions are different positions on the optical axis. Therefore, depending on the wavelength range (color) of the light transmitted by the color filter 18 corresponding to the wafer lens 19, a part of the light from the wafer lens 19 deviates from the photoelectric conversion unit 23 corresponding to the wafer lens 19, and the photoelectric There is a possibility that the light may enter the light-shielding film 15 around the conversion unit 23 or another photoelectric conversion unit 23. When a part of the light enters the light shielding film 15, the sensitivity of the photoelectric conversion unit 23 corresponding to the wafer lens 19 may be reduced. Further, when a part of the light is incident on another photoelectric conversion unit 23, in addition to the decrease in the sensitivity of the photoelectric conversion unit 23 corresponding to the wafer lens 19, there is a possibility that color mixing may occur in the other photoelectric conversion unit 23.

Therefore, when the correction lens 35 is a lens for correcting chromatic aberration, almost all of the light incident on the wafer lens 19 is, as shown in FIG. 32A, FIG. 32B, and FIG. The correction lens 35 is designed to be incident on the lens 23. That is, the correction lens 35 is configured so that the accuracy of the light collection rate and the imaging point of the aspherical lens realized by combining the wafer lens 19 and the correction lens 35 is increased. FIG. 32A illustrates a state in which light 53 is collected by a correction lens 35 (hereinafter, also referred to as a “red correction lens”) arranged in a pixel 9 having a color filter 18 that transmits light of a red wavelength. FIG. 32B illustrates a state in which the light 53 is collected by a correction lens 35 (hereinafter, also referred to as a “green correction lens”) disposed in the pixel 9 having the color filter 18 that transmits light of a green wavelength. FIG. 32C illustrates a state in which the light 53 is collected by a correction lens 35 (hereinafter, also referred to as a “blue correction lens”) disposed in the pixel 9 having the color filter 18 that transmits light of a blue wavelength.
By correcting the chromatic aberration caused by the wafer lens 19, the sensitivity of the photoelectric conversion unit 23 can be prevented from lowering, and the occurrence of color mixing can be prevented. Also, since almost all of the light incident on the wafer lens 19 is incident on the photoelectric conversion unit 23, the inter-pixel light blocking area between the photoelectric conversion units 23 can be reduced, and the photoelectric conversion unit 23 can be enlarged. The sensitivity of the unit 23 can be improved.

As the correction lens 35 for correcting chromatic aberration such as chromatic aberration of magnification and axial chromatic aberration, for example, as shown in FIGS. 33A, 33B, 34A, 34B, 35A, and 35B, a correction lens in plan view A lens having an annular concave portion 36 along the outer peripheral portion of the lens 35 can be used. 33A and 33B illustrate a red correction lens, FIGS. 34A and 34B illustrate a green correction lens, and FIGS. 35A and 35B illustrate a blue correction lens.
The width of the annular concave portion 36 is, for example, in the order of the width of the annular concave portion 36 of the red correction lens <the width of the annular concave portion 36 of the green correction lens <the width of the annular concave portion 36 of the blue correction lens. The diameter of the annular concave portion 36 is, for example, in the order of the diameter of the annular concave portion 36 of the blue correction lens <the diameter of the annular concave portion 36 of the green correction lens <the diameter of the annular concave portion 36 of the blue correction lens. As the diameter of the annular recess 36, for example, an average value of the inner diameter and the outer diameter of the annular recess 36 can be used.

In the third embodiment, as a method of forming the wafer lens 19, a thermal reflow method can be adopted. By adopting the thermal reflow method, when the wafer lens 19 is formed into a spherical lens, the step structure 27 of the wafer lens 19 can be formed in a relatively simple shape, so that the labor required for forming the step structure 27 can be reduced. Thus, the manufacturing cost of the wafer lens 19 can be reduced.

Next, the detailed structure of the correction lens 35 in FIG. 31 will be described. FIG. 36 is a diagram illustrating a cross-sectional configuration of the correction lens 35.
As shown in FIG. 36, the correction lens 35 includes a substrate 37 and a cover layer 38.
The substrate 37 is formed on the back surface S10 side (the surface on the color filter 18 side) of the portion 16a of the planarization film 16 on the insulating film 14 side, and like the substrate 25 of the second embodiment, the back surface of the substrate 37 It is configured to include a plurality of step structures 39 which are concave portions formed in the depth direction from the S11 (the surface on the color filter 18 side) side. Each of the step structures 39 is formed corresponding to each pixel 9 and has one or more step surfaces 40. As the step surface 40, for example, a surface having a different height from the back surface S11 of the substrate 37 can be used. For example, a surface parallel to the back surface S11 of the substrate 37 can be used. FIG. 36 illustrates a case where the number of steps on the step surface 40 of the step structure 27 is one. Further, as other structures and materials of the substrate 37, for example, those similar to the structures and materials of the substrate 25 of the first and second embodiments can be adopted.

When the correction lens 35 is a lens having the annular concave portion 36 shown in FIGS. 33A, 33B, 34A, 34B, 35A, and 35B, the step structure 39 of the substrate 37 may be, for example, a plan view. An annular concave portion along the outer peripheral portion of the correction lens 35 can be used. That is, a plurality of step structures 39 having annular step surfaces 40 having different heights with respect to the back surface S11 may be formed on the back surface S11 of the substrate 37. In the following description, reference numeral “39” is also given to the annular concave portion of the step structure 39. Further, for example, when the width of the annular concave portion 36 of the correction lens 35 is adjusted so as to be in the order shown in FIGS. 33A, 33B, 34A, 34B, 35A, and 35B, The width is preferably in the order of the width of the annular concave portion 39 corresponding to the red correction lens <the width of the annular concave portion 39 corresponding to the green correction lens <the width of the annular concave portion 39 corresponding to the blue correction lens.
In the case of such a lens, the diameter of the annular concave portion 39 of the substrate 37 is, for example, the diameter of the annular concave portion 39 corresponding to the blue correction lens <the diameter of the annular concave portion 39 corresponding to the green correction lens <the blue correction lens. It is preferable that the diameter of the corresponding annular concave portion 39 be in order. As the diameter of the annular recess 39, for example, an average value of the inner diameter and the outer diameter of the annular recess 39 can be adopted. Further, it is preferable that the depth of the annular concave portion 39 of the substrate 37 is the same for all the annular concave portions 39.

The coating layer 38 is formed on the back surface S11 side of the substrate 37 (the portion 16b side of the flattening film 16 on the color filter 18 side), and like the coating layers 26 of the first and second embodiments, the step structure 39 and The back surface S11 of the substrate 37 around the step structure 39 is continuously covered. That is, the coating layer 38 is configured to cover the entire back surface S11, that is, the entire surface having the step structure 39. The upper surface of the portion covering the step structure 39 is formed in a curved shape on the outer peripheral portion of the aspherical lens.
Further, as the material of the coating layer 38, for example, a material that transmits light and has a difference from the refractive index of the material of the substrate 37 within ± 10% of the refractive index of the material of the substrate 37 can be used. . In particular, in consideration of the reduction in the difference in the refractive index, it is preferable to use the same material as the material of the substrate 37. By reducing the difference between the refractive index of the coating layer 38 of the incident light and the refractive index of the substrate 37, scattering and reflection of the incident light at the interface between the coating layer 38 and the substrate 37 can be suppressed.

[3-2 Manufacturing method of correction lens]
Next, a method for manufacturing the correction lens 35 (the optical element according to the third embodiment) of the solid-state imaging device 1 according to the second embodiment will be described. FIGS. 37A, 37B, 38A, 38B, 39A, 39B, 40A, 40B, 41A, 41B, 42A, 42B, 43A, 43B, 43A, 44A, and 44B. It is a top view and a sectional view showing a manufacturing process of an optical element of a second embodiment. FIGS. 37A to 44B illustrate a case where the correction lens 35 is a lens having the annular concave portion 36 shown in FIGS. 33A and 33B.
First, as shown in FIGS. 37A and 37B, a photoresist film 41 is applied to the entire back surface S11 of the substrate 37. Subsequently, as shown in FIGS. 38A and 38B, the photoresist film 41 is exposed, and as shown in FIGS. 39A and 39B, the photoresist film 41 is developed.

Subsequently, as shown in FIG. 40A and FIG. 40B, the rear surface S11 of the substrate 37 is etched using the developed photoresist film 41 as an etching mask, and the light after passing through the color filter 18 is incident. A plurality of concave step structures 39 are formed. Subsequently, as shown in FIGS. 41A and 41B, the photoresist film 41, that is, the etching mask of the back surface S11 is removed from the back surface S11 of the substrate 37. As a result, a plurality of annular recessed step structures 39 regularly arranged in a two-dimensional array on the back surface S11 of the substrate 37 are formed.

Subsequently, as shown in FIGS. 42A and 42B, the coating liquid for forming the coating layer 38 is formed so as to cover the entire back surface S11 of the substrate 37, that is, the entire surface having the step structure 39, and to make the liquid level horizontal. 42 is applied. The thickness of the layer made of the coating liquid 42 is the thickest at the portion corresponding to the step surface 40 (the bottom surface of the annular concave portion) of the step structure 39, and the thinnest at the portion corresponding to the portion where the step structure 39 is not formed. As the coating liquid 42, for example, similarly to the coating liquids 34 of the first and second embodiments, a coating liquid obtained by dissolving a styrene-based resin or an acrylic resin in an appropriate solvent can be employed. As a method of applying the coating liquid 42, for example, a spin coating method can be adopted.

Next, as shown in FIGS. 43A and 43B, the applied coating liquid 42 is dried. At that time, the solvent volatilizes, and the thickness of the layer composed of the coating liquid 42 decreases. Specifically, at the initial stage of drying the coating liquid 42, the surface of the coating liquid 42 is flat and the film thickness is uniformly reduced. However, as the drying of the coating liquid 42 proceeds, the solute concentration of the coating liquid 42 in the concave portion locally decreases due to the step structure 39 of the substrate 37. As a result, the evaporation speed of the solvent of the coating liquid 42 is increased in the concave portions, and the surface of the coating liquid 42 in the concave portions is concave. Due to this phenomenon, the amount of decrease in the layer thickness increases as the layer thickness increases. That is, the portion corresponding to the step surface 40 (the bottom surface of the annular concave portion) of the step structure 39 has the largest reduction amount, and the portion corresponding to the portion where the step structure 39 is not formed has the smallest reduction amount. As a result, a lens-shaped coating layer 38 having an annular concave portion in a portion covering the step structure 39 is formed. Subsequently, as shown in FIGS. 44A and 44B, UV curing or baking is performed on the concave lens-shaped coating layer 38 so that the formed coating layer 38 becomes a permanent film. As a result, the coating layer 38 is cured, and the correction lens 35 shown in FIGS. 33A and 33B is completed.

When the correction lens 35 is a lens for correcting chromatic aberration, that is, when the correction lens 35 is a lens having the annular concave portion 36 shown in FIGS. 33A, 33B, 34A, 34B, 35A, and 35B. It is preferable to design the width and diameter of the annular recess 39 of the substrate 37 according to the shape of the annular recess 36. That is, in the above-described step of forming the plurality of step structures 39 (annular concave portions 39) on the substrate 37, as shown in FIGS. 33A, 34A, and 35A, light transmitted by the color filter 18 corresponding to the annular concave portions 39 is transmitted. The width and the diameter of the annular concave portion 39 are adjusted according to the wavelength range (color). Specifically, first, the position where the curvature is formed by the annular concave portion 36 of the correction lens 35 and the magnitude of the curvature are designed so as to correct the chromatic aberration caused by the wafer lens 19. Subsequently, optimization is performed using the width and the diameter (position) of the annular concave portion 39 as parameters so that the shape of the correction lens 35 having the designed curvature is realized using the simulation of the application and drying of the application liquid 42. . At this time, it is preferable that the depth of the annular concave portion 39 of the substrate 37 be the same for all the annular concave portions 39. Accordingly, all the annular concave portions 39 of the substrate 37 can be formed simultaneously in one process flow while the shape of the correction lens 35 is different for each wavelength range (color) of light transmitted by the color filter 18. it can.

As described above, in the correction lens 35 (optical element) of the third embodiment, the substrate in which the step structure 39 having the step surface 40 having a height different from the rear surface S11 is formed on one surface (the rear surface S11). 37. In addition, the step structure 39 and the surrounding back surface S11 are provided with a covering layer 38 that continuously covers and transmits light. Therefore, various shapes can be realized by the shape of the step structure 39, and the correction lens 35 having a high degree of design freedom can be provided.

Further, in the lens group of the third embodiment, the light after passing through the wafer lens 19 (the “first lens” in a broad sense) and the wafer lens 19 is incident, and the aberration caused by the wafer lens 19 is corrected. Correction lens 35 (in a broad sense, “second lens”). The correction lens 35 includes a substrate 37 having a step structure 39 having an annular step surface 40 having a height different from that of the back surface S11 on one surface (back surface S11), a step structure 39, and a back surface S11 around the step structure 39. And a coating layer 38 that continuously covers and transmits light. Therefore, a lens having the same optical performance as a complicated aspherical lens can be realized relatively easily.

In the lens group according to the third embodiment, the correction lens 35 (second lens) is a lens that corrects chromatic aberration caused by the wafer lens 19 (first lens). Therefore, it is possible to prevent the sensitivity of the photoelectric conversion unit 23 corresponding to the wafer lens 19 from lowering, and to prevent the occurrence of color mixture in the photoelectric conversion unit 23 around the photoelectric conversion unit 23.

In the method for manufacturing an optical element according to the third embodiment, a step of forming a plurality of step structures 39 regularly arranged in a two-dimensional array on a substrate 37 and a step of forming a plurality of step structures 39 on the substrate 37 A step of applying a coating liquid 42 to the coating liquid 37 and drying the coating liquid 42 so as to form a coating layer 38 that continuously covers the plurality of step structures 39 and the surrounding surface of the substrate 37 and transmits light. And a process. Each of the step structures 39 includes an annular concave portion 39 for forming a lens into which the light transmitted through the color filter 18 is incident. In the step of forming the plurality of step structures 39 on the substrate 37, the width and diameter of each of the plurality of annular recesses 39 are determined according to the wavelength range (color) of light transmitted by the color filter 18 corresponding to the annular recess 39. I adjusted it. Therefore, the depth of the annular concave portions 39 of the substrate 37 can be made the same, and all the annular concave portions 39 can be formed simultaneously by one process flow.

Incidentally, as described in Patent Document 1, for example, after forming a lens formation pattern layer on each of the upper surfaces of the step structures, the lens formation pattern layer is thermally reflowed to form a lens. According to the method, since a curved surface structure is formed using surface tension, it is difficult to provide a lens with a gentle curvature, and an aberration correction lens cannot be formed.
On the other hand, in the method of manufacturing an optical element according to the third embodiment, the surface of the coating layer 38 can have a gentle curvature according to the shape of the step structure 39, and the surface of the coating layer 38 can be controlled. Can be changed highly. Further, the step structure 39 can be designed so that the desired shape of the correction lens 35 is realized by using the simulation of the application and drying of the application liquid 42.

[3-3 Modification]
(1) In the solid-state imaging device 1 according to the first and second embodiments, an example in which the optical element of the present disclosure is used for the wafer lens 19 has been described. For example, as shown in FIG. The present invention can be applied to the inner lens 43 formed on the film 16. For example, as shown in FIG. 46, the present invention can be applied to a reflector 44 used for a display device or the like. In FIG. 46, on the surface S9 of the concave lens-shaped coating layer 26, a reflector layer 45 (reflection layer) that reflects light, a light emitting layer 46 that emits light, an interlayer film 47 that forms a flat surface without unevenness, and display are desired. The case where the color filters 48 formed corresponding to the wavelength of light are stacked in this order is illustrated. In FIG. 46, the reflected light 49 reflected by the reflector 44 is indicated by an arrow.

(2) The present disclosure is not limited to a solid-state imaging device that detects a distribution of the amount of incident visible light and captures an image as in the solid-state imaging devices 1 according to the first and second embodiments. Absent. For example, the present invention can be applied to a solid-state imaging device that captures, as an image, a distribution of an incident amount of infrared rays, X-rays, particles, and the like. Further, the present invention can be applied to all solid-state imaging devices (physical quantity distribution detecting devices) such as a fingerprint detection sensor that detects distribution of other physical quantities such as pressure and capacitance and captures an image as an image.

(3) In the present disclosure, as in the solid-state imaging devices 1 according to the first and second embodiments, the pixels 9 in the pixel region 3 are sequentially scanned in units of rows to read pixel signals from the pixels 9. It is not limited to a solid-state imaging device. For example, the present invention is also applicable to an XY address type solid-state imaging device in which an arbitrary pixel 9 is selected in pixel units and a signal is read from the selected pixel 9 in pixel units.

(4) In the solid-state imaging device 1 according to the third embodiment, the case where the correction lens 35 is disposed in the flattening film 16 has been described as an example. For example, the correction lens 35 is disposed on the light receiving surface side of the wafer lens 19. Alternatively, the light before passing through the wafer lens 19 may be incident on the correction lens 35.
(5) In the solid-state imaging device 1 according to the third embodiment, an example in which an annular concave portion is formed as the step structure 39 of the substrate 37 forming the correction lens 35 has been described. As shown in FIGS. 47A and 47B, an annular convex portion may be formed.

(6) Also, in the solid-state imaging device 1 according to the third embodiment, an example has been described in which an aspheric lens is realized by forming a lens group in which the wafer lens 19 and the correction lens 35 are combined. For example, as shown in FIG. 48A, FIG. 48B, FIG. 49A and FIG. 49B, the aspherical lens-shaped wafer lens 19 is formed by combining the manufacturing methods of the optical elements of the first, second and third embodiments. Is also good. 48A and 48B, on the back surface S7 of the substrate 25 forming the wafer lens 19, a step structure 27 (a “first step structure” in a broad sense) that is a concave portion and an annular shape surrounding the periphery of the step structure 27 are provided. The case where a step structure 39 (in a broad sense, a “second step structure”) which is an annular concave portion having a step surface 40 is formed is illustrated. 49A and 49B, on the back surface S7 of the substrate 25 constituting the wafer lens 19, a step structure 27 (first step structure) as a convex portion and an annular step surface surrounding the periphery of the step structure 27 are provided. The case where a step structure 39 (a second step surface) which is an annular convex portion having a step 40 is formed is illustrated. At that time, the coating layer 26 continuously covers the step structure 27, the step structure 39, and the back surface S7 around them, and transmits light.

(7) In the solid-state imaging device 1 according to the third embodiment, an example has been described in which the lens group is configured by combining the wafer lens 19 and the correction lens 35. In addition, an inner lens may be combined to form a lens group. Specifically, as shown in FIGS. 50A, 50B, and 50C, an inner lens 50 is provided between the correction lens 35 and the photoelectric conversion unit 23, and the wafer lens 19, the correction lens 35, and the inner lens 50 May be combined to form a lens group. FIG. 50A exemplifies a state in which light 53 is collected by a lens group formed in the pixel 9 corresponding to the color filter 18 that transmits red wavelength light. FIG. 50B illustrates a state in which the light 53 is collected by a lens group configured in the pixel 9 corresponding to the color filter 18 that transmits light of a green wavelength. FIG. 50C illustrates a state in which the light 53 is collected by a lens group configured in the pixel 9 corresponding to the color filter 18 that transmits light of a blue wavelength.
Also, for example, as shown in FIGS. 51A, 51B and 51C, a lens provided with an inner lens 51 between the wafer lens 19 and the correction lens 35, and a combination of the wafer lens 19, the inner lens 51, and the correction lens 35 A group may be formed. FIG. 51A illustrates a state in which the light 53 is collected by a lens group formed in the pixel 9 corresponding to the color filter 18 that transmits light of a red wavelength. FIG. 51B illustrates a state in which the light 53 is collected by a lens group configured in the pixel 9 corresponding to the color filter 18 that transmits green wavelength light. FIG. 51C illustrates a state in which the light 53 is collected by a lens group configured in the pixel 9 corresponding to the color filter 18 that transmits light of a blue wavelength. In the case of such a lens group, the correction lens 35 is designed so that almost all of the light that has entered the wafer lens 19 through the lens group enters the photoelectric conversion unit 23 corresponding to the lens group.

(8) In the solid-state imaging device 1 according to the third embodiment, as shown in FIGS. 31, 32A, 32B, and 32C, a correction lens 35 for correcting chromatic aberration caused by the wafer lens 19 is provided. Although the example in which the wafer lens 19 is formed so as to correspond to each of the wafer lenses 19 has been described, for example, the configuration may be such that the wafer lens 19 is formed so as to correspond to only some of the wafer lenses 19. For example, when the light image formation position of the wafer lens 19 corresponding to the color filter 18 transmitting the light of the blue wavelength is most deviated from the center of the photoelectric conversion unit 23 corresponding to the wafer lens 19, the correction lens 35 May be formed so as to correspond only to the wafer lens 19.

(9) In the solid-state imaging device 1 according to the third embodiment, the correction lens 35 is configured so that the light-collecting rate of the aspheric lens realized by combining the wafer lens 19 and the correction lens 35 is increased. Although the case has been described as an example, for example, the light-collecting rate of the aspherical lens may be reduced. For example, when a filter that blocks infrared light is provided in correspondence with each of the plurality of pixels 9, the amount of infrared light received is larger than that of the other photoelectric conversion units 23 due to variations in the light blocking performance of the filter. Pixel 9 may result. On the other hand, if the correction lens 35 is configured so that the condensing rate of the infrared light in the aspherical lens is lowered, even if the pixel 9 that receives a large amount of infrared light is generated, the photoelectric corresponding to the pixel 9 is generated. The amount of incident infrared light on the converter 23 can be reduced.

<4. Fourth embodiment: electronic device>
Next, an electronic device according to a fourth embodiment of the present disclosure will be described. FIG. 52 is a schematic configuration diagram of an electronic device 100 according to the fourth embodiment of the present disclosure.

The electronic device 100 according to the fourth embodiment includes a solid-state imaging device 101, an optical lens 102, a shutter device 103, a drive circuit 104, and a signal processing circuit 105. The electronic device 100 according to the fourth embodiment shows an embodiment in which the solid-state imaging device 1 according to the first embodiment of the present disclosure is used as an electronic device (for example, a camera) as the solid-state imaging device 101.

The optical lens 102 forms image light (incident light 106) from a subject on the imaging surface of the solid-state imaging device 101. As a result, signal charges are accumulated in the solid-state imaging device 101 for a certain period. The shutter device 103 controls a light irradiation period and a light blocking period to the solid-state imaging device 101. The drive circuit 104 supplies a drive signal for controlling the transfer operation of the solid-state imaging device 101 and the shutter operation of the shutter device 103. The signal transfer of the solid-state imaging device 101 is performed by a drive signal (timing signal) supplied from the drive circuit 104. The signal processing circuit 105 performs various signal processing on a signal (pixel signal) output from the solid-state imaging device 101. The video signal on which the signal processing has been performed is stored in a storage medium such as a memory or output to a monitor.

The electronic device 100 to which the solid-state imaging device 1 can be applied is not limited to a camera, but can be applied to other electronic devices. For example, the present invention may be applied to an imaging device such as a camera module for a mobile device such as a mobile phone or a tablet terminal.
Further, in the fourth embodiment, the solid-state imaging device 101 according to the first embodiment is used for an electronic device as the solid-state imaging device 101, but another configuration may be used. For example, the solid-state imaging device 1 according to the second embodiment, the solid-state imaging device 1 according to the third embodiment, and the solid-state imaging device 1 according to the modification may be used in an electronic device.

<5. Example of application to moving objects>
The technology (the present technology) according to the present disclosure can be applied to various products. For example, the technology according to the present disclosure is realized as a device mounted on any type of moving object such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility, an airplane, a drone, a ship, and a robot. You may.

FIG. 53 is a block diagram illustrating a schematic configuration example of a vehicle control system that is an example of a moving object control system to which the technology according to the present disclosure can be applied.

Vehicle control system 12000 includes a plurality of electronic control units connected via communication network 12001. In the example shown in FIG. 53, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside information detection unit 12030, an inside information detection unit 12040, and an integrated control unit 12050. In addition, as a functional configuration of the integrated control unit 12050, a microcomputer 12051, an audio / video output unit 12052, and a vehicle-mounted network I / F (interface) 12053 are illustrated.

The drive system control unit 12010 controls the operation of the device related to the drive system of the vehicle according to various programs. For example, the driving system control unit 12010 includes a driving force generating device for generating driving force of the vehicle such as an internal combustion engine or a driving motor, a driving force transmission mechanism for transmitting driving force to wheels, and a steering angle of the vehicle. It functions as a control mechanism such as a steering mechanism for adjusting and a braking device for generating a braking force of the vehicle.

The body control unit 12020 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body control unit 12020 functions as a keyless entry system, a smart key system, a power window device, or a control device for various lamps such as a head lamp, a back lamp, a brake lamp, a blinker, and a fog lamp. In this case, a radio wave or various switch signals transmitted from a portable device replacing the key may be input to the body control unit 12020. The body control unit 12020 receives the input of these radio waves or signals and controls a door lock device, a power window device, a lamp, and the like of the vehicle.

外 Out-of-vehicle information detection unit 12030 detects information external to the vehicle on which vehicle control system 12000 is mounted. For example, an imaging unit 12031 is connected to the outside-of-vehicle information detection unit 12030. The out-of-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle, and receives the captured image. The out-of-vehicle information detection unit 12030 may perform an object detection process or a distance detection process of a person, a vehicle, an obstacle, a sign, a character on a road surface, or the like based on the received image.

The imaging unit 12031 is an optical sensor that receives light and outputs an electric signal according to the amount of received light. The imaging unit 12031 can output an electric signal as an image or can output the information as distance measurement information. The light received by the imaging unit 12031 may be visible light or non-visible light such as infrared light.

The in-vehicle information detection unit 12040 detects information in the vehicle. The in-vehicle information detection unit 12040 is connected to, for example, a driver status detection unit 12041 that detects the status of the driver. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 determines the degree of driver fatigue or concentration based on the detection information input from the driver state detection unit 12041. The calculation may be performed, or it may be determined whether the driver has fallen asleep.

The microcomputer 12051 calculates a control target value of the driving force generation device, the steering mechanism or the braking device based on the information on the inside and outside of the vehicle acquired by the outside information detection unit 12030 or the inside information detection unit 12040, and the drive system control unit A control command can be output to 12010. For example, the microcomputer 12051 implements functions of ADAS (Advanced Driver Assistance System) including vehicle collision avoidance or impact mitigation, following running based on the following distance, vehicle speed maintaining running, vehicle collision warning, vehicle lane departure warning, and the like. Cooperative control for the purpose.

Further, the microcomputer 12051 controls the driving force generation device, the steering mechanism, the braking device, and the like based on the information about the surroundings of the vehicle obtained by the outside information detection unit 12030 or the inside information detection unit 12040, so that the driver 120 It is possible to perform cooperative control for automatic driving or the like in which the vehicle travels autonomously without depending on the operation.

マイクロ Also, the microcomputer 12051 can output a control command to the body system control unit 12020 based on information on the outside of the vehicle acquired by the outside information detection unit 12030. For example, the microcomputer 12051 controls the headlamp in accordance with the position of the preceding vehicle or the oncoming vehicle detected by the outside-of-vehicle information detection unit 12030, and performs cooperative control for the purpose of preventing glare such as switching a high beam to a low beam. It can be carried out.

The sound image output unit 12052 transmits at least one of a sound signal and an image signal to an output device capable of visually or audibly notifying a passenger of the vehicle or the outside of the vehicle of information. In the example of FIG. 53, an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are illustrated as output devices. The display unit 12062 may include, for example, at least one of an on-board display and a head-up display.

FIG. 54 is a diagram illustrating an example of an installation position of the imaging unit 12031.

In FIG. 54, the vehicle 12100 includes

imaging units

12101, 12102, 12103, 12104, and 12105 as the imaging unit 12031.

The

imaging units

12101, 12102, 12103, 12104, and 12105 are provided, for example, at positions such as a front nose, a side mirror, a rear bumper, a back door of the vehicle 12100, and an upper portion of a windshield in the vehicle interior. The imaging unit 12101 provided on the front nose and the imaging unit 12105 provided above the windshield in the passenger compartment mainly acquire an image in front of the vehicle 12100. The

imaging units

12102 and 12103 provided in the side mirror mainly acquire images of the side of the vehicle 12100. The imaging unit 12104 provided in the rear bumper or the back door mainly acquires an image behind the vehicle 12100. The forward images acquired by the

imaging units

12101 and 12105 are mainly used for detecting a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, and the like.

FIG. 54 shows an example of the imaging range of the imaging units 12101 to 12104. The imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, the imaging ranges 12112 and 12113 indicate the imaging ranges of the

imaging units

12102 and 12103 provided on the side mirrors, respectively, and the imaging range 12114 indicates 13 shows an imaging range of an imaging unit 12104 provided in a rear bumper or a back door. For example, a bird's-eye view image of the vehicle 12100 viewed from above is obtained by superimposing image data captured by the imaging units 12101 to 12104.

At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera including a plurality of imaging elements or an imaging element having pixels for detecting a phase difference.

For example, based on the distance information obtained from the imaging units 12101 to 12104, the microcomputer 12051 calculates a distance to each three-dimensional object in the imaging ranges 12111 to 12114 and a temporal change of the distance (relative speed with respect to the vehicle 12100). , It is possible to extract, as a preceding vehicle, a three-dimensional object that travels at a predetermined speed (for example, 0 km / h or more) in a direction substantially the same as that of the vehicle 12100, which is the closest three-dimensional object on the traveling path of the vehicle 12100 it can. Further, the microcomputer 12051 can set an inter-vehicle distance to be secured before the preceding vehicle and perform automatic brake control (including follow-up stop control), automatic acceleration control (including follow-up start control), and the like. In this way, it is possible to perform cooperative control for automatic driving or the like in which the vehicle travels autonomously without depending on the operation of the driver.

For example, the microcomputer 12051 converts the three-dimensional object data relating to the three-dimensional object into other three-dimensional objects such as a motorcycle, a normal vehicle, a large vehicle, a pedestrian, a telephone pole, and the like based on the distance information obtained from the imaging units 12101 to 12104. It can be classified and extracted and used for automatic avoidance of obstacles. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. Then, the microcomputer 12051 determines a collision risk indicating a risk of collision with each obstacle, and when the collision risk is equal to or more than the set value and there is a possibility of collision, via the audio speaker 12061 or the display unit 12062. By outputting an alarm to the driver through forced driving and avoidance steering via the drive system control unit 12010, driving assistance for collision avoidance can be performed.

At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared light. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian exists in the captured images of the imaging units 12101 to 12104. The recognition of such a pedestrian is performed by, for example, extracting a feature point in an image captured by the imaging units 12101 to 12104 as an infrared camera, and performing a pattern matching process on a series of feature points indicating the outline of the object to determine whether the object is a pedestrian. Is performed according to a procedure for determining When the microcomputer 12051 determines that a pedestrian is present in the images captured by the imaging units 12101 to 12104 and recognizes the pedestrian, the audio image output unit 12052 outputs a rectangular contour for emphasis to the recognized pedestrian. The display unit 12062 is controlled so that is superimposed. Further, the sound image output unit 12052 may control the display unit 12062 so as to display an icon or the like indicating a pedestrian at a desired position.

As described above, an example of the vehicle control system to which the technology according to the present disclosure can be applied has been described. The technology according to the present disclosure can be applied to the imaging unit 12031 or the like among the configurations described above. Specifically, the solid-state imaging device 1 in FIG. 1 can be applied to the imaging unit 12031. By applying the technology according to the present disclosure to the imaging unit 12031, a captured image that is more easily viewable can be obtained, so that driver fatigue can be reduced.

<6. Example of application to endoscopic surgery system>
The technology (the present technology) according to the present disclosure can be applied to various products. For example, the technology according to the present disclosure may be applied to an endoscopic surgery system.

FIG. 55 is a diagram illustrating an example of a schematic configuration of an endoscopic surgery system to which the technology (the present technology) according to the present disclosure may be applied.

FIG. 55 shows a state in which an operator (doctor) 11131 is performing an operation on a patient 11132 on a patient bed 11133 using the endoscopic operation system 11000. As shown, the endoscopic surgery system 11000 includes an endoscope 11100, other surgical tools 11110 such as an insufflation tube 11111 and an energy treatment tool 11112, and a support arm device 11120 that supports the endoscope 11100. And a cart 11200 on which various devices for endoscopic surgery are mounted.

The endoscope 11100 includes a lens barrel 11101 having a predetermined length from the distal end inserted into the body cavity of the patient 11132, and a camera head 11102 connected to the proximal end of the lens barrel 11101. In the illustrated example, the endoscope 11100 which is configured as a so-called rigid endoscope having a hard lens barrel 11101 is illustrated. However, the endoscope 11100 may be configured as a so-called flexible endoscope having a soft lens barrel. Good.

開口 An opening in which an objective lens is fitted is provided at the tip of the lens barrel 11101. A light source device 11203 is connected to the endoscope 11100, and light generated by the light source device 11203 is guided to the distal end of the lens barrel by a light guide that extends inside the lens barrel 11101, and the objective The light is radiated toward the observation target in the body cavity of the patient 11132 via the lens. In addition, the endoscope 11100 may be a direct view scope, a perspective view scope, or a side view scope.

光学 An optical system and an image sensor are provided inside the camera head 11102, and the reflected light (observation light) from the observation target is focused on the image sensor by the optical system. The observation light is photoelectrically converted by the imaging element, and an electric signal corresponding to the observation light, that is, an image signal corresponding to the observation image is generated. The image signal is transmitted as raw data to a camera control unit (CCU: \ Camera \ Control \ Unit) 11201.

The $ CCU 11201 is configured by a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), and the like, and controls the operations of the endoscope 11100 and the display device 11202 overall. Further, the CCU 11201 receives an image signal from the camera head 11102, and performs various image processing on the image signal for displaying an image based on the image signal, such as a development process (demosaicing process).

The display device 11202 displays an image based on an image signal on which image processing has been performed by the CCU 11201 under the control of the CCU 11201.

The light source device 11203 includes a light source such as an LED (Light Emitting Diode), for example, and supplies the endoscope 11100 with irradiation light when imaging an operation part or the like.

The input device 11204 is an input interface for the endoscopic surgery system 11000. The user can input various information and input instructions to the endoscopic surgery system 11000 via the input device 11204. For example, the user inputs an instruction or the like to change imaging conditions (type of irradiation light, magnification, focal length, and the like) by the endoscope 11100.

The treatment instrument control device 11205 controls the driving of the energy treatment instrument 11112 for cauterizing, incising a tissue, sealing a blood vessel, and the like. The insufflation device 11206 is used to inflate the body cavity of the patient 11132 for the purpose of securing the visual field by the endoscope 11100 and securing the working space of the operator. Send. The recorder 11207 is a device that can record various types of information related to surgery. The printer 11208 is a device capable of printing various types of information on surgery in various formats such as text, images, and graphs.

The light source device 11203 that supplies the endoscope 11100 with irradiation light at the time of imaging the operation site can be configured by, for example, a white light source including an LED, a laser light source, or a combination thereof. When a white light source is configured by a combination of the RGB laser light sources, the output intensity and output timing of each color (each wavelength) can be controlled with high accuracy. It can be carried out. In this case, the laser light from each of the RGB laser light sources is radiated to the observation target in a time-division manner, and the driving of the image pickup device of the camera head 11102 is controlled in synchronization with the irradiation timing. It is also possible to capture the image obtained in a time-division manner. According to this method, a color image can be obtained without providing a color filter in the image sensor.

The driving of the light source device 11203 may be controlled so as to change the intensity of output light at predetermined time intervals. By controlling the driving of the image sensor of the camera head 11102 in synchronization with the timing of the change of the light intensity, an image is acquired in a time-division manner, and the image is synthesized, so that a high dynamic image without so-called blackout and whiteout is obtained. An image of the range can be generated.

The light source device 11203 may be configured to be able to supply light in a predetermined wavelength band corresponding to special light observation. In the special light observation, for example, by utilizing the wavelength dependence of the absorption of light in the body tissue, by irradiating light in a narrower band than the irradiation light (ie, white light) at the time of normal observation, the surface of the mucous membrane is exposed. A so-called narrow-band light observation (Narrow / Band / Imaging) for photographing a predetermined tissue such as a blood vessel with high contrast is performed. Alternatively, in the special light observation, fluorescence observation in which an image is obtained by fluorescence generated by irradiating excitation light may be performed. In fluorescence observation, body tissue is irradiated with excitation light to observe fluorescence from the body tissue (autofluorescence observation), or a reagent such as indocyanine green (ICG) is locally injected into the body tissue and Irradiation with excitation light corresponding to the fluorescence wavelength of the reagent can be performed to obtain a fluorescence image. The light source device 11203 can be configured to be able to supply narrowband light and / or excitation light corresponding to such special light observation.

FIG. 56 is a block diagram showing an example of a functional configuration of the camera head 11102 and the CCU 11201 shown in FIG.

The camera head 11102 includes a lens unit 11401, an imaging unit 11402, a driving unit 11403, a communication unit 11404, and a camera head control unit 11405. The CCU 11201 includes a communication unit 11411, an image processing unit 11412, and a control unit 11413. The camera head 11102 and the CCU 11201 are communicably connected to each other by a transmission cable 11400.

The lens unit 11401 is an optical system provided at a connection with the lens barrel 11101. Observation light taken in from the tip of the lens barrel 11101 is guided to the camera head 11102, and enters the lens unit 11401. The lens unit 11401 is configured by combining a plurality of lenses including a zoom lens and a focus lens.

The imaging unit 11402 includes an imaging element. The number of imaging elements constituting the imaging unit 11402 may be one (so-called single-panel type) or plural (so-called multi-panel type). When the imaging unit 11402 is configured as a multi-panel type, for example, an image signal corresponding to each of RGB may be generated by each image sensor, and a color image may be obtained by combining the image signals. Alternatively, the imaging unit 11402 may be configured to include a pair of imaging elements for acquiring right-eye and left-eye image signals corresponding to 3D (Dimensional) display. By performing the 3D display, the operator 11131 can more accurately grasp the depth of the living tissue in the operative part. Note that when the imaging unit 11402 is configured as a multi-plate system, a plurality of lens units 11401 may be provided for each imaging element.

撮像 In addition, the imaging unit 11402 does not necessarily have to be provided in the camera head 11102. For example, the imaging unit 11402 may be provided inside the lens barrel 11101 immediately after the objective lens.

The drive unit 11403 is configured by an actuator, and moves the zoom lens and the focus lens of the lens unit 11401 by a predetermined distance along the optical axis under the control of the camera head control unit 11405. Thus, the magnification and the focus of the image captured by the imaging unit 11402 can be appropriately adjusted.

The communication unit 11404 is configured by a communication device for transmitting and receiving various information to and from the CCU 11201. The communication unit 11404 transmits the image signal obtained from the imaging unit 11402 as RAW data to the CCU 11201 via the transmission cable 11400.

The communication unit 11404 receives a control signal for controlling driving of the camera head 11102 from the CCU 11201 and supplies the control signal to the camera head control unit 11405. The control signal includes, for example, information indicating that the frame rate of the captured image is specified, information that specifies the exposure value at the time of imaging, and / or information that specifies the magnification and focus of the captured image. Contains information about the condition.

Note that the above-described imaging conditions such as the frame rate, the exposure value, the magnification, and the focus may be appropriately designated by the user, or may be automatically set by the control unit 11413 of the CCU 11201 based on the acquired image signal. Good. In the latter case, the endoscope 11100 has a so-called AE (Auto Exposure) function, an AF (Auto Focus) function, and an AWB (Auto White Balance) function.

The camera head control unit 11405 controls the driving of the camera head 11102 based on the control signal from the CCU 11201 received via the communication unit 11404.

The communication unit 11411 is configured by a communication device for transmitting and receiving various information to and from the camera head 11102. The communication unit 11411 receives an image signal transmitted from the camera head 11102 via the transmission cable 11400.

(4) The communication unit 11411 transmits a control signal for controlling driving of the camera head 11102 to the camera head 11102. The image signal and the control signal can be transmitted by electric communication, optical communication, or the like.

The image processing unit 11412 performs various types of image processing on an image signal that is RAW data transmitted from the camera head 11102.

The control unit 11413 performs various kinds of control related to imaging of the operation section and the like by the endoscope 11100 and display of a captured image obtained by imaging the operation section and the like. For example, the control unit 11413 generates a control signal for controlling driving of the camera head 11102.

制御 Also, the control unit 11413 causes the display device 11202 to display a captured image showing the operative part or the like based on the image signal subjected to the image processing by the image processing unit 11412. At this time, the control unit 11413 may recognize various objects in the captured image using various image recognition techniques. For example, the control unit 11413 detects a shape, a color, or the like of an edge of an object included in the captured image, and thereby detects a surgical tool such as forceps, a specific living body site, bleeding, a mist when using the energy treatment tool 11112, and the like. Can be recognized. When displaying the captured image on the display device 11202, the control unit 11413 may use the recognition result to superimpose and display various types of surgery support information on the image of the operative site. By superimposing the operation support information and presenting it to the operator 11131, the burden on the operator 11131 can be reduced, and the operator 11131 can reliably perform the operation.

The transmission cable 11400 connecting the camera head 11102 and the CCU 11201 is an electric signal cable corresponding to electric signal communication, an optical fiber corresponding to optical communication, or a composite cable thereof.

Here, in the illustrated example, the communication is performed by wire using the transmission cable 11400, but the communication between the camera head 11102 and the CCU 11201 may be performed wirelessly.

As described above, an example of the endoscopic surgery system to which the technology according to the present disclosure can be applied has been described. The technology according to the present disclosure can be applied to, for example, the endoscope 11100, the imaging unit 11402 of the camera head 11102, and the like among the configurations described above. Specifically, the solid-state imaging device 1 in FIG. 1 can be applied to the imaging unit 10402. By applying the technology according to the present disclosure to the imaging unit 11402, a clearer operation part image can be obtained, so that the operator can surely confirm the operation part.

Here, the endoscopic surgery system has been described as an example, but the technology according to the present disclosure may be applied to, for example, a microscopic surgery system or the like.

Note that the present technology may have the following configurations.
(1)
A substrate on which a step structure having a step surface having a height different from that of the one surface is formed on one surface;
An optical element comprising: the step structure; and a coating layer that continuously covers the one surface around the step structure and transmits or reflects light.
(2)
The optical element according to (1), wherein the step structure has, as a side surface that connects the one surface and the step surface, an inclined surface or a curved surface inclined with respect to a normal direction of the one surface.
(3)
The optical element according to (1), wherein the step structure has two or more steps.
(4)
The step structure is parallel to the normal direction of the one surface, as a side surface connecting the one surface and the step surface, and a side surface connecting the two step surfaces in a two-step relationship. The optical element according to (3), further including at least one of a vertical surface, and an inclined surface and a curved surface inclined with respect to a normal direction of the one surface.
(5)
The optical element according to (2) or (4), wherein an inclination angle of the inclined surface is 0 degree or more and 60 degrees or less with respect to a normal direction of the one surface.
(6)
The optical element according to any one of (1) to (5), wherein a ratio of a width of the step structure to a height of the step structure is 1:10 to 10: 1.
(7)
The optical element according to any one of (1) to (6), wherein the step structure has at least one of a circular shape, a polygonal shape, and an elliptical shape in a plan view.
(8)
The optical element according to (7), wherein an aspect ratio of the elliptical shape is 1 or more and 5 or less.
(9)
The optical element according to (3), wherein outer peripheries of the step surfaces of the step structure are separated from each other in a plan view.
(10)
The optical device according to any one of (1) to (9), wherein the difference between the refractive index of the material of the substrate and the refractive index of the material of the coating layer is within ± 10% of the refractive index of the material of the substrate. element.
(11)
The step structure has a convex portion,
The coating layer continuously covers the upper surface and the side wall surface of the convex portion, and the one surface around the convex portion, and transmits or reflects light. (1) to (10) An optical element according to item 1.
(12)
The step structure has a concave portion,
The coating layer continuously covers the bottom surface and the inner wall surface of the concave portion, and the one surface around the concave portion, and transmits or reflects light. (1) to (10). Optical element.
(13)
The step structure includes a first step structure, and a second step structure having an annular step surface surrounding the periphery of the first step structure,
The coating layer continuously covers the first step structure, the second step structure, and the one surface around the first step structure and the second step structure, and transmits light. (1) to (5) and (10) The optical element according to any one of the above.
(14)
A substrate having a plurality of step structures regularly arranged in a two-dimensional array;
An optical element array comprising: a plurality of step structures; and a coating layer that continuously covers surfaces of the substrate around the step structures and a portion that covers each step structure transmits or reflects light.
(15)
A plurality of first lenses regularly arranged in a two-dimensional array;
On one surface, a substrate on which a plurality of step structures having annular step surfaces having different heights with respect to the one surface is formed, and the step structure and the surrounding one surface are continuously covered and light is covered. A plurality of second lenses configured to include a transmitting coating layer, to which light before passing through the first lens or light after passing through the first lens is incident, and to correct aberration caused by the first lens; An optical element array comprising:
(16)
The optical element array according to (15), wherein the second lens is a lens that corrects chromatic aberration caused by the first lens.
(17)
A first lens;
A second lens that receives light before passing through the first lens or light after passing through the first lens, and corrects aberration caused by the first lens;
The second lens is
A substrate having a step structure having an annular step surface having a height different from the one surface on one surface;
A lens group comprising: the step structure; and a coating layer that continuously covers the one surface around the step structure and transmits light.
(18)
The lens group according to (17), wherein the second lens is a lens that corrects chromatic aberration caused by the first lens.
(19)
A substrate having a plurality of step structures having a plurality of steps regularly arranged in a two-dimensional array, and continuously covering the plurality of step structures and the surface of the substrate around them; and covering each step structure. A solid-state imaging device comprising a microlens array having a covering layer each having a lens-like portion,
An optical lens that forms image light from a subject on an imaging surface of the solid-state imaging device,
An electronic device comprising: a signal processing circuit that performs signal processing on a signal output from the solid-state imaging device.
(20)
Forming a step structure on the substrate;
Applying a coating liquid to the substrate on which the step structure is formed,
Drying the coating liquid so as to form a coating layer that continuously covers the step structure and the surface of the substrate around the step structure and transmits or reflects light.
(21)
Forming a plurality of step structures regularly arranged in a two-dimensional array on the substrate;
Applying a coating liquid to the substrate on which the plurality of step structures are formed,
Drying the coating liquid so as to form a coating layer that continuously covers surfaces of the plurality of step structures and the periphery of the substrate and transmits light,
Each of the step structures includes an annular concave portion for forming a lens on which light before transmission through the color filter or light after transmission is incident,
In the step of forming the plurality of step structures on the substrate, the width and the diameter of each of the plurality of annular concave portions are adjusted according to a wavelength range of light transmitted by a color filter corresponding to the annular concave portion. Production method.

DESCRIPTION OF SYMBOLS 1 ... Solid-state imaging device, 2 ... Substrate, 3 ... Pixel area, 4 ... Vertical drive circuit, 5 ... Column signal processing circuit, 6 ... Horizontal drive circuit, 7 ... Output circuit, 8 ... Control circuit, 9 ... Pixel, 10 ... Pixel drive wiring, 11 vertical signal line, 12 horizontal signal line, 13 fixed charge film, 14 insulating film, 15 light shielding film, 16 flattening film, 17 light receiving layer, 18 color filter, 19 Wafer lens, 20: condensing layer, 21: wiring layer, 22: supporting substrate, 23: photoelectric conversion unit, 24: microlens array, 25: substrate, 26: coating layer, 27: step structure, 28, 28a, 28b , 28c, 28d, 28e, 28f: step surface, 29: side surface, 30: side surface, 31: interlayer insulating film, 32: wiring, 33: photoresist film, 34: coating liquid, 35: correction lens, 36: annular concave portion , 37 ... substrate, 38 ... coating layer, 39 Annular recess (step structure), 40 step surface, 41 photoresist film, 42 coating liquid, 43 inner lens, 44 reflector, 45 reflector layer, 46 light emitting layer, 47 interlayer film, 48 color Filter 49, reflected light, 50, 51 inner lens, 100 electronic device, 101 solid-state imaging device, 102 optical lens, 103 shutter device, 104 drive circuit, 105 signal processing circuit, 106 incident light

Claims

A substrate on which a step structure having a step surface having a height different from that of the one surface is formed on one surface;
An optical element comprising: the step structure; and a coating layer that continuously covers the one surface around the step structure and transmits or reflects light.
The optical element according to claim 1, wherein the step structure has, as a side surface that connects the one surface and the step surface, an inclined surface or a curved surface that is inclined with respect to a normal direction of the one surface.
The optical element according to claim 1, wherein the step structure has two or more steps.
The step structure is parallel to the normal direction of the one surface, as a side surface connecting the one surface and the step surface, and a side surface connecting the two step surfaces in a two-step relationship. The optical element according to claim 3, further comprising at least one of a vertical surface, and an inclined surface and a curved surface inclined with respect to a normal direction of the one surface.
The optical element according to claim 4, wherein an inclination angle of the inclined surface is equal to or greater than 0 degrees and equal to or less than 60 degrees with respect to a normal direction of the one surface.
The optical element according to claim 1, wherein a ratio between the width and the height of the step structure is 1:10 to 10: 1.
The optical element according to claim 1, wherein the step structure has at least one of a circular shape, a polygonal shape, and an elliptical shape in a plan view.
The optical element according to claim 7, wherein an aspect ratio of the elliptical shape is 1 or more and 5 or less.
The optical element according to claim 3, wherein outer peripheries of the step surfaces of the step structure are separated from each other in a plan view.
The optical element according to claim 1, wherein the difference between the refractive index of the material of the substrate and the refractive index of the material of the coating layer is within ± 10% of the refractive index of the material of the substrate.
The step structure has a convex portion,
The optical element according to claim 1, wherein the coating layer continuously covers an upper surface and a side wall surface of the convex portion and the one surface around the convex portion, and transmits or reflects light.
The step structure has a concave portion,
The optical element according to claim 1, wherein the coating layer continuously covers a bottom surface and an inner wall surface of the concave portion and the one surface around the concave portion, and transmits or reflects light.
The step structure includes a first step structure, and a second step structure having an annular step surface surrounding the periphery of the first step structure,
The optical element according to claim 1, wherein the covering layer continuously covers the first step structure, the second step structure, and the one surface around the first step structure, and transmits light.
A substrate having a plurality of step structures regularly arranged in a two-dimensional array;
An optical element array comprising: a plurality of step structures; and a coating layer that continuously covers surfaces of the substrate around the step structures and a portion that covers each step structure transmits or reflects light.
A plurality of first lenses regularly arranged in a two-dimensional array;
On one surface, a substrate on which a plurality of step structures having annular step surfaces having different heights with respect to the one surface is formed, and the step structure and the surrounding one surface are continuously covered and light is covered. A plurality of second lenses configured to include a transmitting coating layer, to which light before passing through the first lens or light after passing through the first lens is incident, and to correct aberration caused by the first lens; An optical element array comprising:
The optical element array according to claim 15, wherein the second lens is a lens that corrects chromatic aberration caused by the first lens.
A first lens;
A second lens that receives light before passing through the first lens or light after passing through the first lens, and corrects aberration caused by the first lens;
The second lens is
A substrate having a step structure having an annular step surface having a height different from the one surface on one surface;
A lens group comprising: the step structure; and a coating layer that continuously covers the one surface around the step structure and transmits light.
The lens group according to claim 17, wherein the second lens is a lens that corrects chromatic aberration caused by the first lens.
A substrate having a plurality of step structures having a plurality of steps regularly arranged in a two-dimensional array, and continuously covering the plurality of step structures and the surface of the substrate around them; and covering each step structure. A solid-state imaging device comprising a microlens array having a covering layer each having a lens-like portion,
An optical lens that forms image light from a subject on an imaging surface of the solid-state imaging device,
An electronic device comprising: a signal processing circuit that performs signal processing on a signal output from the solid-state imaging device.
Forming a step structure on the substrate;
Applying a coating liquid to the substrate on which the step structure is formed,
Drying the coating liquid so that a coating layer that continuously covers the step structure and the surrounding surface of the substrate and transmits or reflects light is formed.
Forming a plurality of step structures regularly arranged in a two-dimensional array on the substrate;
Applying a coating liquid to the substrate on which the plurality of step structures are formed,
Drying the coating liquid so as to form a coating layer that continuously covers surfaces of the plurality of step structures and the periphery of the substrate and transmits light,
Each of the step structures includes an annular concave portion for forming a lens on which light before transmission through the color filter or light after transmission is incident,
In the step of forming the plurality of step structures on the substrate, the width and diameter of each of the plurality of annular recesses are adjusted according to the wavelength range of light transmitted by the color filter corresponding to the annular recess. Production method.