WO2020057168A1 - 一种介电弹性体驱动器及其制备方法、换能器 - Google Patents

一种介电弹性体驱动器及其制备方法、换能器 Download PDF

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Publication number
WO2020057168A1
WO2020057168A1 PCT/CN2019/088223 CN2019088223W WO2020057168A1 WO 2020057168 A1 WO2020057168 A1 WO 2020057168A1 CN 2019088223 W CN2019088223 W CN 2019088223W WO 2020057168 A1 WO2020057168 A1 WO 2020057168A1
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Prior art keywords
layer
elastomer
electrode
dielectric
dielectric elastomer
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PCT/CN2019/088223
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English (en)
French (fr)
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韩杨
吴晓宁
周占玉
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北京中石伟业科技股份有限公司
北京中石伟业科技无锡有限公司
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Publication of WO2020057168A1 publication Critical patent/WO2020057168A1/zh

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration

Definitions

  • the invention belongs to the technical field of dielectric elastomer drivers, and relates to a dielectric elastomer driver, a preparation method and a transducer thereof, and particularly to a dielectric elastomer driver capable of being driven at a low voltage, a preparation method thereof, and a transducer. .
  • Electroactive polymers are polymer materials that can produce large deformations under electrical stimulation. EAP materials can be divided into two types: self-supporting and electronic. Electronic EAP can be further divided into electrostrictive elastomers, ferroelectric polymers and dielectric elastomers (DE). Among them, a dielectric elastomer is an elastomer material with a high dielectric constant, which can change its shape after an external electric field is applied to it, and can return to its original shape after the external electric field is removed. This process is accompanied by the generation of stress and strain, which converts electrical energy into mechanical energy, and has received widespread attention over the past two decades.
  • DEA dielectric elastomer driver
  • the driving voltage of dielectric elastomers is very high, which are all above kV, which makes it very difficult for industrial applications.
  • the common method to reduce the driving voltage is to reduce the thickness of the material, increase the dielectric constant of the material, increase the breakdown voltage, and reduce the modulus of the material.
  • SMITITOMORICOMCOMLIMITED disclosed a method for increasing the dielectric constant of a material in US20150202656
  • TOKAIRUBBERINDUSTRIES LTD disclosed a method for increasing the breakdown voltage in US9397589
  • Wacker AG disclosed a mold for reducing the material in US20170044370 Volume method.
  • the effect can be improved by the above methods, it is impossible to drive when the driving voltage is reduced to 100V or less.
  • the technical problem to be solved by the present invention is to provide a dielectric elastomer driver and a preparation method thereof, particularly a dielectric elastomer driver capable of being driven at a low voltage.
  • the present invention controls the dielectric elastomer driver by The thickness of the elastomer layer and the thickness of the electrode layer, combined with appropriate parameters such as modulus, square resistance, and relative permittivity, enable driving at low voltages ⁇ 100V, while achieving large deformation, fast response, and high elasticity.
  • the restoration effect makes the dielectric elastomer useful as a transducer.
  • the invention provides a dielectric elastomer driver having a multilayer structure
  • the multilayer structure includes a single-layer elastomer layer and a single-layer electrode layer compounded on the upper and lower surfaces of the single-layer elastomer layer, or a multilayer formed by alternately stacking and combining a single-layer elastomer layer and a single-layer electrode layer;
  • the thickness of the single-layer electrode layer is 1 ⁇ m or less
  • the thickness of the single-layer elastomer layer is 5 ⁇ m or less.
  • the modulus of the single-layer electrode layer is 5 MPa or less;
  • the square resistance of the single-layer electrode layer is less than or equal to 10 M ⁇ / ⁇ ;
  • the relative dielectric constant of the single-layer elastomer layer is greater than or equal to 2;
  • a thickness of the single-layer electrode layer is 1 nm to 1 ⁇ m;
  • the thickness of the single-layer elastomer layer is 10 nm to 5 ⁇ m.
  • the square resistance of the single-layer electrode layer is 10 ⁇ / ⁇ to 10M ⁇ / ⁇ ;
  • the modulus of the single-layer electrode layer is 0.3 to 5 MPa
  • the relative dielectric constant of the single-layer elastomer layer is 2-10;
  • the modulus of the single-layer elastomer layer is 10 kPa to 5 MPa;
  • the compressive permanent deformation of the single-layer elastomer layer is ⁇ 5%
  • the number of non-contacting electrode layers in the multiple layers is ⁇ 2.
  • the material of the elastomer layer includes one or more of a silicone elastomer and a modified material thereof, an acrylic elastomer and a modified material thereof, and a polyester elastomer and a modified material thereof;
  • the material of the electrode layer includes one or more of carbon nanotubes, graphene, superconducting carbon black, and metal nanowires, or one of carbon nanotubes, graphene, superconducting carbon black, and metal nanowires. Or multiple composite materials with elastomers;
  • the metal nanowire includes one or more of nanosilver wire, nanogold wire, and nanocopper wire;
  • the composite method includes: transferring a film-formed electrode layer to a film-formed elastomer layer, directly molding an elastomer layer on the film-formed electrode layer, and directly molding an electrode layer on the film-formed elastomer layer. One or more of them.
  • the present invention provides a method for manufacturing a dielectric elastomer driver according to any one of the above technical solutions, which comprises the following steps:
  • the other of the electrode material source or the elastomer material source is compounded on the surface of the elastomer layer or the electrode layer of the first substrate obtained in the above steps to obtain a second substrate;
  • one or more of an elastomer layer, an electrode layer, and a single-layer dielectric elastomer driver are stacked and compounded again on the single-layer dielectric elastomer driver to obtain a multi-layer dielectric elastomer driver;
  • the number of times of stacking and compounding may be one or more times
  • the electrode material source recombination method includes chemical vapor deposition method, vacuum suction filtration method, Langermuir-Brouget method, spraying method, bar coating method, slit coating method, micro gravure method, and lifting One or more of the methods of film formation by spin coating, spin coating, and pulse deposition;
  • the method of compounding the source of the elastomer material includes one or more of a spraying method, a bar coating method, a slit coating method, a micro gravure method, a pulling method, a spin coating method, and a molecular beam deposition film;
  • the electrode material source includes one or more of an electrode material coating liquid, an electrode material dispersion liquid, and an electrode film;
  • the elastomer material source includes an elastomer material coating solution and / or an elastomer film.
  • the carbon nanotube coating solution is compounded by a chemical vapor deposition method, a vacuum filtration method, a Langmuir-Blaugette method, a spray method, and a rod.
  • a chemical vapor deposition method e.g., a chemical vapor deposition method, a vacuum filtration method, a Langmuir-Blaugette method, a spray method, and a rod.
  • a coating method e.g., a slit coating method, a micro gravure method, a pulling method, a spin coating method, and a pulse deposition method;
  • the method of compounding the graphene source includes a chemical vapor deposition method, a vacuum suction filtration method, a Langmuir-Blochette method, a spray method, a rod coating method, and a slit coating method.
  • a chemical vapor deposition method e.g., a chemical vapor deposition method, a vacuum suction filtration method, a Langmuir-Blochette method, a spray method, a rod coating method, and a slit coating method.
  • the method of combining the superconducting carbon black sources includes one of a spraying method, a rod coating method, a pulling method, a spin coating method, a slit coating method, and a micro gravure method.
  • the method of compounding the metal nanowire source includes one of vacuum suction filtration method, spray method, rod coating method, slit coating method, micro gravure method, and spin coating method. Or more.
  • the elastomer material coating liquid may be obtained by mixing the elastomer material and the diluent, or it may be only an elastomer material;
  • the electrode material coating liquid is obtained by mixing an electrode material, a binder, and a diluent, or is obtained by mixing an electrode material and a diluent;
  • the diluent includes one or more of volatile silicone oil, naphtha, gasoline, alcohol diluent, ketone diluent, ester diluent and water;
  • the binder includes one or more of silica gel, acrylic, polyester, polyether, polyethylene dioxythiophene-poly (styrene sulfonate), and cellulose.
  • the mass content of the elastic material is 1% to 99.9%;
  • the mass content of the electrode material is 0.1% to 50%;
  • the mass content of the binder is 0.1% to 50%;
  • the deformation rate is 4% or more
  • the fast response time is 20ms or less
  • the high elastic recovery rate is 99% or more.
  • the present invention also provides a transducer including the dielectric elastomer driver according to any one of the above technical solutions or the dielectric elastomer driver prepared by the manufacturing method according to any one of the above technical solutions.
  • the invention provides a dielectric elastomer driver.
  • the dielectric elastomer driver has a multi-layer structure.
  • the multi-layer structure includes a single-layer elastomer layer and a single layer compounded on the upper and lower surfaces of the single-layer elastomer layer.
  • the present invention addresses the problem that the existing dielectric elastomer has a high driving voltage, and it is difficult to achieve effective driving when the driving voltage is less than 100V.
  • the present invention is also directed to the existing commercial materials.
  • Danfoss molds the elastomer layer into a wave shape and physically deposits the electrode layer 10-100 nm, and Parker prints the electrode layer on the elastomer layer.
  • the electrode rigidity has affected the ambassador material and loses its ability to deform; while Parker cannot realize the thickness of printed electrodes at the micro-nano level, which limits the application at low voltages and Industrialization application promotion.
  • the ultra-thin dielectric elastomer applied under the driving of a low voltage of 100V or less needs to simultaneously satisfy the following two points, but the current prior art is difficult to achieve both.
  • the driving voltage is reduced by reducing the thickness of the silicone film and the conductive layer to a nanometer size.
  • Such as the dielectric elastomer driver prepared by Tino Lab and Sophie Lab, etc. but still cannot achieve the problem of effective driving at low voltage.
  • the invention creatively reduces the thickness of the dielectric elastomer to an ultra-thin micro-nano level.
  • the invention breaks through the limitation that conventional dielectric elastomers can only be driven at high voltages above kV, low voltage driving expands the application space of dielectric elastomer materials, and can be used to manufacture a variety of transducers used at low voltages. Such as software robots, haptic feedback devices, adjustable optics, etc.
  • Experimental results show that the dielectric elastomer driver prepared by the present invention can achieve the effects of large deformation> 4%, rapid response ⁇ 20ms, and high elastic recovery> 99% when driven at low voltage ⁇ 100V.
  • the purity of the raw materials used in the present invention is not particularly limited, and the present invention is preferably conventional purity in the field of industrial purity or friction material.
  • the invention provides a dielectric elastomer driver having a multilayer structure
  • the multilayer structure includes a single-layer elastomer layer and a single-layer electrode layer compounded on the upper and lower surfaces of the single-layer elastomer layer, or a multilayer formed by alternately stacking and combining a single-layer elastomer layer and a single-layer electrode layer;
  • the thickness of the single-layer electrode layer is 1 ⁇ m or less
  • the thickness of the single-layer elastomer layer is 5 ⁇ m or less.
  • the dielectric elastomer driver according to the present invention has a multilayer structure and is divided into a single-layer dielectric elastomer driver and a multilayer dielectric elastomer driver.
  • the single-layer dielectric elastomer driver and the multilayer dielectric elastomer driver Both have a multilayer structure, where a single-layer dielectric elastomer driver refers to a single-layer elastomer layer and a single-layer electrode layer compounded on the upper and lower surfaces of the single-layer elastomer layer; a multilayer dielectric elastomer driver refers to a single-layer
  • the elastomer layer and the single-layer electrode layer are alternately stacked and combined to form a multilayer, which includes at least 2 and more non-contact electrode layers, and more preferably 3 or more.
  • the thickness of the single-layer electrode layer according to the present invention is 1 ⁇ m or less, more preferably 500 nm or less, and more preferably 50 nm or less. It may also be 1 nm to 1 ⁇ m, or 10 to 100 nm, or 30 to 80 nm, or 40 to 60 nm.
  • the thickness of the single-layer elastomer layer according to the present invention is 5 ⁇ m or less, more preferably 1 ⁇ m or less, more preferably 500 nm or less, and even more preferably 300 nm or less. It may also be 10 nm to 5 ⁇ m, or 50 nm to 1 ⁇ m, or 30 to 80nm, or 40-60nm.
  • the modulus of the single-layer electrode layer is not particularly limited in the present invention, and a normal-scale amount of the single-layer electrode layer that is familiar to those skilled in the art may be used. Those skilled in the art may according to the actual application situation, technical requirements and quality. Selection and adjustment are required.
  • the modulus of the single-layer electrode layer is preferably 5MPa or less. It is more preferably 3 MPa or less, more preferably 1 MPa or less, and may also be 0.3 to 5 MPa, or 0.5 to 3 MPa, or 0.6 to 1 MPa, or 0.7 to 0.9 MPa.
  • the square resistance of the single-layer electrode layer is not particularly limited in the present invention, and the conventional square resistance of the single-layer electrode layer is familiar to those skilled in the art, and those skilled in the art may according to the actual application situation, technical requirements and quality. Selection and adjustment are required.
  • the square resistance of the single-layer electrode layer is preferably 10M ⁇ or less.
  • / ⁇ more preferably 1M ⁇ / ⁇ or less, more preferably 100K ⁇ / ⁇ or less, or 10 ⁇ / ⁇ ⁇ 10M ⁇ / ⁇ , or 50 ⁇ / ⁇ ⁇ 1M ⁇ / ⁇ , or 100 ⁇ / ⁇ ⁇ 100K ⁇ / ⁇ , Or 1K ⁇ / ⁇ ⁇ 10K ⁇ / ⁇ .
  • the relative dielectric constant of the single-layer elastomer layer is not particularly limited in principle, and the conventional relative dielectric constant of the single-layer elastomer layer, which is well known to those skilled in the art, may be used.
  • the conditions, technical requirements and quality requirements are selected and adjusted.
  • the single-layer elastomer layer The relative dielectric constant of is preferably 2 to 10, more preferably 3 to 9, still more preferably 4 to 8, and still more preferably 5 to 7.
  • the modulus of the single-layer elastomer layer in the present invention is not particularly limited, and the normal-scale amount of the single-layer elastomer layer that is well known to those skilled in the art may be used. Those skilled in the art may, according to actual application conditions and technical requirements, The quality and requirements are selected and adjusted. In order to ensure that it can be driven at a low voltage of less than or equal to 100V, the invention also has the effects of large deformation, fast response and high elastic recovery.
  • the modulus of the single-layer elastomer layer is optimized. It is 10 KPa to 5 MPa, more preferably 50 KPa to 3 MPa, more preferably 0.1 to 1 MPa, and still more preferably 0.3 to 0.8 MPa.
  • the present invention does not specifically limit the permanent compression deformation of the single-layer elastomer layer.
  • the conventional permanent compression deformation of the single-layer elastomer layer which is well known to those skilled in the art, can be used.
  • the technical requirements and quality requirements are selected and adjusted.
  • the invention can also have the effects of large deformation, fast response and high elastic recovery.
  • the compression of the single-layer elastomer layer The permanent deformation is preferably less than 5%, more preferably 4% or less, more preferably 3% or less, and still more preferably 1% or less.
  • the material of the single-layer elastomer layer is not particularly limited, and conventional materials of the single-layer elastomer layer that are familiar to those skilled in the art may be used, and those skilled in the art may according to actual application conditions, technical requirements, and quality Selection and adjustment are required. In order to ensure that it can be driven at a low voltage of less than or equal to 100V, the invention can also have the effects of large deformation, fast response and high elastic recovery.
  • the material of the elastomer layer preferably includes a silicone elastomer.
  • modified materials thereof acrylic elastomers and modified materials thereof, polyester elastomers and modified materials thereof, more preferably silicone elastomers and modified materials thereof, acrylic elastomers Body and its modified material or polyester-based elastomer and its modified material.
  • the material of the single-layer electrode layer is not particularly limited in principle, and conventional materials of the single-layer electrode layer that are well known to those skilled in the art may be used. Selection and adjustment.
  • the material of the electrode layer preferably includes carbon nanotubes, graphene, One or more of superconducting carbon black and metal nanowires, or a composite material of one or more of carbon nanotubes, graphene, superconducting carbon black and metal nanowires with an elastomer, more preferably carbon Nanotubes, graphene, superconducting carbon black, metal nanowires, or composite materials of one or more of carbon nanotubes, graphene, superconducting carbon black, and metal nanowires with elastomers.
  • the metal nanowires in the present invention preferably include one or more of nanosilver wires, nanogold wires, and nanocopper
  • the present invention does not specifically limit the compounding method, and conventional compounding methods well known to those skilled in the art may be selected and adjusted by those skilled in the art according to the actual application, technical requirements and quality requirements.
  • the present invention is It is guaranteed to be driven at a low voltage of less than or equal to 100V, and at the same time it can have the effects of large deformation, fast response and high elastic recovery.
  • the composite method preferably includes transferring the film-forming electrode layer to the film-forming elasticity.
  • the elastomer layer is directly formed on the film-formed elastomer layer, the electrode layer is formed on the film-formed electrode layer, or the electrode layer is directly formed on the film-formed elastomer layer.
  • the above steps of the present invention provide a dielectric elastomer driver. Firstly, the thickness of the elastomer layer and the thickness of the electrode layer of the dielectric elastomer driver are controlled to reach a specific micro-nano level, and then the modulus and the square resistance of a specific parameter range are controlled. And relative dielectric constant and other parameters, as well as the choice of materials, so that it can be driven at low voltages ⁇ 100V, while achieving large deformation (greater than 4%), fast response and high elastic recovery, making the dielectric elastic
  • the body has value as a transducer application.
  • the invention provides a method for manufacturing a dielectric elastomer driver according to any one of the above technical solutions, including the following steps:
  • the other of the electrode material source or the elastomer material source is compounded on the surface of the elastomer layer or the electrode layer of the first substrate obtained in the above steps to obtain a second substrate;
  • the selection of raw materials, adding methods and parameter conditions, and the corresponding preferred principles, unless otherwise specified, are consistent with the above-mentioned dielectric elastomer driver provided by the foregoing steps of the present invention.
  • the selection of raw materials, adding methods, and parameter conditions in the medium and their corresponding preferred principles are preferably one-to-one correspondence, and will not be described one by one here.
  • one of an elastomer material source or an electrode material source is compounded on the surface of a sacrificial layer of a substrate provided with a sacrificial layer to obtain a first matrix compounded with one of an elastomer layer or an electrode layer.
  • the specific selection of the source of the elastomeric material is not particularly limited in principle, and the conventional selection of the source of the elastomeric material familiar to those skilled in the art may be adopted.
  • the elastomer material source preferably includes an elastomer material coating liquid And / or the elastomer film, more preferably an elastomer material coating liquid or an elastomer film.
  • the elastomer material coating liquid may be obtained by mixing an elastomer material and a diluent, or it may be only an elastomer material.
  • the diluent according to the present invention preferably includes one or more of volatile silicone oil, naphtha, gasoline, alcohol diluent, ketone diluent, ester diluent and water, more preferably volatile silicone oil, naphtha Oil, gasoline, alcohol thinner, ketone thinner, ester thinner or water.
  • the mass content of the elastic material is preferably 1% to 99.9%, more preferably 10% to 90%, and still more preferably 30% to 70%.
  • the present invention does not specifically limit the specific selection of the electrode material source in principle, and the conventional composition of the electrode material source that is familiar to those skilled in the art may be sufficient, and those skilled in the art may select according to the actual application situation, technical requirements and quality requirements
  • the electrode material source preferably includes an electrode material coating liquid and an electrode material dispersion.
  • One or more of the liquid and the electrode film are more preferably an electrode material coating liquid, an electrode material dispersion liquid, or an electrode film, and more preferably an electrode material coating liquid.
  • the electrode material coating liquid is preferably obtained by mixing an electrode material, a binder, and a diluent, or obtained by mixing an electrode material and a diluent.
  • the binder according to the present invention preferably includes one or more of silica gel, acrylic acid, polyester, polyether, polyethylene dioxythiophene-poly (styrene sulfonate) and cellulose, more preferably silica gel, Acrylic, polyester, polyether, polyethylene dioxythiophene-poly (styrene sulfonate) or cellulose.
  • the diluent according to the present invention preferably includes one or more of volatile silicone oil, naphtha, gasoline, alcohol diluent, ketone diluent, ester diluent and water, more preferably volatile silicone oil, naphtha Oil, gasoline, alcohol thinner, ketone thinner, ester thinner or water.
  • the mass content of the electrode material is preferably 0.1% to 50%, more preferably 1% to 40%, and still more preferably 10% to 30%.
  • the mass content of the binder is preferably 0.1% to 50%, more preferably 1% to 40%, and still more preferably 10% to 30%.
  • the present invention does not specifically limit the compounding method of the electrode material source, and conventional compounding methods of electrode materials that are familiar to those skilled in the art may be used. Those skilled in the art may select according to the actual application situation, technical requirements and quality requirements.
  • the method of compounding the electrode material source preferably includes chemical vapor deposition, vacuum One of the methods of suction filtration, Langermuir-Brouget method, spraying method, rod coating method, slit coating method, micro gravure method, pull-up method, spin coating method, and electrodeposition method Or more, more preferably a chemical vapor deposition method, a vacuum suction filtration method, a Langmuir-Blaugert method, a spray method, a rod coating method, a slit coating method, a micro gravure method, and a pulling method , Spin-coating or pulse de
  • the present invention is a complete and detailed preparation process.
  • the carbon nanotube source compounding method preferably includes chemical vapor deposition, vacuum One of the methods of suction filtration, Langermuir-Brouget method, spraying method, rod coating method, slit coating method, micro gravure method, pull-up method, spin coating method, and electrodeposition method Or more, more preferably a chemical vapor deposition method, a vacuum suction filtration method, a Langmuir-Blaugert method, a spray method, a rod coating method, a slit coating method, a micro gravure method, and a pulling method , Spin-coating or pulse deposition.
  • the method of compounding the graphene source preferably includes a chemical vapor deposition method, a vacuum suction filtration method, a Langmuir-Blujette method, a spray method, a rod coating method, and a slit coating method.
  • a chemical vapor deposition method, a vacuum suction filtration method, a Langmuir-Blouget method, a spray method, Films are formed by the bar coating method, the slit coating method, the micro gravure method, the pulling method or the spin coating method.
  • the method of compounding the superconducting carbon black source preferably includes spray coating method, rod coating method, pull-up method, spin coating method, slit coating method and micro gravure method.
  • spray coating method One or more, more preferably a spray coating method, a bar coating method, a pulling method, a spin coating method, a slit coating method or a micro gravure method.
  • the method of compounding the metal nanowire source preferably includes one of vacuum suction filtration method, spray method, rod coating method, slit coating method, micro gravure method and spin coating method.
  • the present invention has no particular limitation on the compounding method of the elastomeric material source, and the conventional compounding method of the elastomeric material well known to those skilled in the art may be used. Those skilled in the art may according to the actual application situation, technical requirements and quality requirements. For selection and adjustment, in order to ensure that it can be driven at a low voltage of less than or equal to 100V, the invention can also have the effects of large deformation, fast response and high elastic recovery.
  • the method of compounding the source of the elastomer material preferably includes spray coating, One or more of a rod coating method, a slit coating method, a micro gravure method, a pull-up method, a spin coating method, and a molecular beam deposition film, more preferably a spray method, a rod coating method, or a slit coating method Cloth method, micro gravure method, pull method, spin coating method or molecular beam deposition to form a film.
  • the selection of the substrate in the present invention is not particularly limited, and conventional selection of a substrate that is well known to those skilled in the art is sufficient. Those skilled in the art can select and adjust according to the actual application situation, technical requirements and quality requirements.
  • the present invention preferably includes one or more of PET, PI, and PTFE, and more preferably PET, PI, or PTFE.
  • the material selection of the sacrificial layer is not particularly limited, and conventional selection of the sacrificial layer that is well known to those skilled in the art may be adopted. Those skilled in the art can select and adjust according to the actual application situation, technical requirements and quality requirements.
  • the sacrificial layer of the invention preferably includes a photoresist solution sacrificial layer and / or a soluble resin solution sacrificial layer, and more preferably a photoresist solution sacrificial layer or a soluble resin solution sacrificial layer.
  • the present invention has no particular limitation on the way of setting the sacrificial layer, and the conventional way of setting the sacrificial layer is familiar to those skilled in the art, and those skilled in the art can select and adjust according to the actual application, technical requirements and quality requirements.
  • a first substrate that is composited with one of an elastomer layer or an electrode layer is obtained, that is, a first substrate that may include an elastomer layer or an electrode layer on the surface.
  • the first substrate of the present invention has a three-layer structure, which is an elastomer layer, a sacrificial layer, and a substrate in order; or an electrode layer, a sacrificial layer, and a substrate in order.
  • the other of the electrode material source or the elastomer material source is compounded on the surface of the elastomer layer or the electrode layer of the first substrate obtained in the above steps to obtain a second substrate.
  • a second base body that is an elastomer layer and an electrode layer is obtained, that is, a first base body whose surface may contain an elastomer layer or an electrode layer.
  • the second substrate of the present invention has a four-layer structure, which is an elastomer layer, an electrode layer, a sacrificial layer, and a substrate in order; or an electrode layer, an elastomer layer, a sacrificial layer, and a substrate in order.
  • a colloid film without the substrate is obtained.
  • the removal method in the present invention there is no particular limitation on the removal method in the present invention, and the conventional method for removing the sacrificial layer is well known to those skilled in the art, and those skilled in the art can select and adjust according to the actual application situation, technical requirements and quality requirements.
  • the present invention The removing method is preferably dissolving the sacrificial layer.
  • the colloid film is naturally separated from the substrate, and a colloid film without the substrate is obtained.
  • the colloid film according to the present invention has a two-layer structure, one layer is an electrode layer, and the other layer is an elastomer layer.
  • a single-layer dielectric elastomer driver is obtained after the second electrode layer is compounded on the surface of the elastomer layer of the colloid film obtained in the above steps, or after the elastomer layers of the two colloid films obtained in the above steps are combined together.
  • the parameters and materials of the second electrode layer may be the same as or different from those of the electrode layer, and the present invention is not particularly limited.
  • one or more of an elastomer layer, an electrode layer, and a single-layer dielectric elastomer driver are stacked and compounded again in the single-layer dielectric elastomer driver.
  • a multilayer dielectric elastomer driver is obtained.
  • the present invention has no particular limitation on the method of re-stacking and compounding, and conventional compounding methods of such materials that are familiar to those skilled in the art may be used. Those skilled in the art can select and adjust according to actual application conditions, technical requirements and quality requirements.
  • the method of stacking and recombining in the present invention is preferably the same as the method of recombining, or may be selected from the method of recombining.
  • the present invention also provides a transducer including the dielectric elastomer driver according to any one of the above technical solutions or the dielectric elastomer driver prepared by the manufacturing method according to any one of the above technical solutions.
  • the definition and selection of the transducer in the present invention are not particularly limited, and the definition and selection of a transducer well known to those skilled in the art may be used, and those skilled in the art may select according to the actual application situation, technical requirements and quality requirements And adjustment, the transducer according to the present invention may include a software robot, a haptic feedback device or an adjustable optical device, etc.
  • the above steps of the present invention provide a low-voltage-driven dielectric elastomer driver, a preparation method thereof, and a transducer.
  • the dielectric elastomer driver provided by the invention can achieve the effects of large deformation, fast response and high elastic recovery when the thickness of each layer of the dielectric elastomer is in the micro-nano size, and when driven at a low voltage ⁇ 100V, and has application as a transducer the value of.
  • the invention reduces the thickness of the dielectric elastomer to the ultra-thin micro-nano level.
  • the thickness of the elastomer layer and the electrode layer of the dielectric elastomer driver it is combined with appropriate parameters such as modulus, square resistance and relative dielectric constant.
  • the thickness is controlled through a specific processing technology, so that it can be driven at low voltages ⁇ 100V, while achieving large deformation (greater than 4%), fast response and high elastic recovery, This makes the dielectric elastomer useful as a transducer.
  • the invention breaks through the limitation that conventional dielectric elastomers can only be driven at high voltages above kV, low voltage driving expands the application space of dielectric elastomer materials, and can be used to manufacture a variety of transducers used at low voltages. Such as software robots, haptic feedback devices, adjustable optics, etc.
  • Experimental results show that the dielectric elastomer driver prepared by the present invention can achieve the effects of large deformation> 4%, rapid response ⁇ 20ms, and high elastic recovery> 99% when driven at low voltage ⁇ 100V.
  • Step 1 Prepare a silica gel coating solution, wherein the silica gel is a product with a modulus of 1 MPa and a viscosity of 60,000 cp, the diluent is a volatile silicone oil, the viscosity is 1 cp, and the solid content of the silica gel is 33%. It was coated on a PET substrate coated with a sacrificial layer with a bar coating interval of 15 ⁇ m, and after drying at 100 ° C. for 30 minutes, the thickness of the dry silica gel film was 2 ⁇ m.
  • Step 2 prepare an electrode coating solution, wherein the solid content of the superconducting carbon black powder is 2%, the binder is a solid content of silica gel of 20%, and the diluent is a solid content of volatile silicone oil of 78%.
  • the surface of the silica gel film was printed by micro gravure printing, and after drying at 100 ° C. for 30 minutes, the thickness of the electrode layer was 1 ⁇ m.
  • a single layer of 1 ⁇ m thick electrode was printed on a 2 ⁇ m silica gel film.
  • the electrode layer had a square resistance of 3000 ⁇ / ⁇ and a modulus of 1 Mpa.
  • Step 3 After the sacrificial layer is dissolved, the silica gel film can be removed. A second electrode layer is printed on one side of the non-electrode layer of the silicone film to complete a single-layer dielectric elastomer driver.
  • Example 1 of the present invention The dielectric elastomer driver prepared in Example 1 of the present invention was tested.
  • the area deformation rate is 4%, and the response time is 5ms. After removing the voltage, the high elastic recovery rate is greater than or equal to 99%.
  • Step 1 Prepare a silica gel coating solution, wherein the silica gel has a modulus of 1 MPa, a compression set of ⁇ 5%, a product with a viscosity of 1000 cp, a diluent of a volatile silicone oil, a viscosity of 1 cp, and a silica solid content of 20%.
  • Slit coating was performed on a PET substrate coated with a sacrificial layer at a speed of 20 m / min, a wet adhesive film thickness of 10 ⁇ m, and a drying tunnel was dried at 120 ° C. for 30 minutes, and then the dry silica gel film was 2 ⁇ m thick.
  • Step 2 Prepare an electrode coating solution, in which the total solid content of superconducting carbon black powder, graphene powder, and carbon nanotube powder is 2%, the solid content of the binder is 10%, and the solid content of the diluent is 88% of the volatile silicone oil. .
  • the surface of the silica gel film was formed by spin coating, and after drying at 100 ° C for 30 minutes, the thickness of the electrode layer was 1 ⁇ m.
  • a single layer of 1 ⁇ m thick electrode was printed on a 2 ⁇ m silica gel film.
  • the electrode layer had a square resistance of 3000 ⁇ / ⁇ and a modulus of 1 Mpa.
  • Step 3 After the sacrificial layer is dissolved, the silica gel film can be removed. Glue two sheets of silicone film with electrodes on each side and the electrode-less side to complete a single-layer dielectric elastomer driver;
  • a single layer of dielectric elastomer material is stacked and laminated into 20 layers of dielectric elastomer material.
  • Example 2 of the present invention The dielectric elastomer driver prepared in Example 2 of the present invention was tested.
  • the area deformation rate is 4%, and the response time is 5ms. After removing the voltage, the high elastic recovery rate is greater than or equal to 99%.
  • Step 1 Configure an electrode coating solution, in which superconducting carbon black and a dispersant are ball-milled and dispersed for 600 revolutions for 15 minutes, and then diluted with 3 times by adding volatile silicone oil and then dispersed at 150W for half an hour, and centrifuged at 8000 revolutions for 1 minute to take the supernatant.
  • the spraying method is used to mold on the PET coated with the sacrificial layer.
  • the sprayed droplet particles are 10 ⁇ m and the frequency is 300 Hz.
  • the thickness of the electrode layer was 300 nm
  • the square resistance of the electrode layer was 3000 ⁇ / ⁇
  • the modulus was 1 Mpa.
  • Step 2 Prepare a silica gel coating solution, wherein the silica gel is a product with a modulus of 1 MPa and a viscosity of 3000 cp, the diluent is a volatile silicone oil, the viscosity is 1 cp, and the solid content of the silica gel is 80%.
  • the sacrifice layer was coated on the PET substrate with micro concave transfer, and after drying at 100 ° C. for 30 minutes, the thickness of the dry silica gel film was 1 ⁇ m.
  • Step 3 After the sacrificial layer is dissolved, the silica gel film can be removed. In the same way, the electrodes were transferred to the other side of the silicone film to complete a single-layer dielectric elastomer driver.
  • a single layer of dielectric elastomer material is stacked and laminated into 5 layers of dielectric elastomer material.
  • Example 3 of the present invention The dielectric elastomer driver prepared in Example 3 of the present invention was tested.
  • the area deformation rate is 5%, and the response time is 5ms. After the voltage is removed, the high elastic recovery rate is greater than or equal to 99%.
  • Step 1 Configure an electrode coating solution, and the silver wire coating liquid has a silver wire solid content of 2%.
  • the slit coating method is used to mold on the silicone film.
  • the thickness of the wet adhesive film is 10 ⁇ m, and the thickness of the clean adhesive film is 200 nm. After drying at 120 ° C for 15 minutes, the thickness of the electrode layer was 300 nm, the square resistance of the electrode layer was 5000 ⁇ / ⁇ , and the modulus was 5 Mpa.
  • Step 2 Prepare a silica gel coating solution, wherein the silica gel is a product with a modulus of 1 MPa and a viscosity of 3000 cp, the diluent is a volatile silicone oil, the viscosity is 1 cp, and the solid content of the silica gel is 80%.
  • the sacrifice layer was coated on the PET substrate with micro concave transfer, and after drying at 100 ° C. for 30 minutes, the thickness of the dry silica gel film was 1 ⁇ m.
  • Step 3 After the sacrificial layer is dissolved, the silica gel film can be removed. In the same way, the electrodes were transferred to the other side of the silicone film to complete a single-layer dielectric elastomer driver.
  • a single layer of dielectric elastomer material is stacked and laminated into 10 layers of dielectric elastomer material.
  • Example 4 of the present invention The dielectric elastomer driver prepared in Example 4 of the present invention was tested.
  • the area deformation rate is 6% and the response time is 5ms. After the voltage is removed, the high elastic recovery rate is greater than or equal to 99%.
  • Step 1 Prepare a silica gel coating solution, wherein the silica gel has a modulus of 1 MPa, a compression set of ⁇ 5%, a product with a viscosity of 4000 cp, a diluent of a volatile silicone oil, a viscosity of 1 cp, and a solid content of 2%.
  • Spin coating was performed on the PET substrate coated with the sacrificial layer, the spin coating speed was 8000 rpm / min for 2 minutes, and after drying at 120 ° C for 30 minutes, the thickness of the dry silica gel film was 200 nm. After the sacrificial layer is dissolved, the silicone film can be removed.
  • Step 2 Prepare an electrode coating solution and a commercial multi-walled carbon nanotube (MWCNT) aqueous dispersion, wherein MWCNT is 1 wt%. Then, 5 wt% MWCNT aqueous dispersion was added with 5 wt% ethylene glycol, 70 wt% isopropanol, and 20 wt% propylene glycol butyl ether to dilute and disperse by ultrasound for 400 W for 1 min. The supernatant was then centrifuged at 3000 rpm for 60 min. The spraying method is used to form on a silica gel film. The spray droplet particles are 5 ⁇ m and the frequency is 700 Hz. After drying at 100 ° C for 30 minutes, the thickness of the electrode layer was 50 nm, the square resistance of the electrode layer was 6000 ⁇ / ⁇ , and the modulus was 0.8 Mpa.
  • MWCNT multi-walled carbon nanotube
  • Step 3 Transfer the electrode on the other side of the silicone film in the same way to complete the single-layer dielectric elastomer driver.
  • a single layer of dielectric elastomer material is stacked and laminated into 25 layers of dielectric elastomer material.
  • Example 5 of the present invention The dielectric elastomer driver prepared in Example 5 of the present invention was tested.
  • the area deformation rate is 5% and the response time is 5ms. After the voltage is removed, the high elastic recovery rate is greater than or equal to 99%.
  • Step 1 Prepare a silica gel, wherein the silica gel has a modulus of 1 MPa, a compression set of ⁇ 5%, and a viscosity of 100 cSt.
  • Film formation by molecular beam deposition is performed under high vacuum conditions.
  • a dry scroll pump is used to achieve a base pressure of 10 -8 mbar.
  • the pumping speed is 110L / min.
  • the nitrogen pumping speed is 77L / s and the speed is 1350Hz.
  • a low temperature spray bath is used to achieve a uniform temperature distribution in the NTEZ crucible.
  • the temperature ramp of the evaporator was adjusted to a heating rate of 10K per minute.
  • the deposition temperature was 180 ° C, the deposition rate was 130 nm / h, and the thickness of the dried silica gel film was 200 nm when cured by UV radiation.
  • Step 2 Prepare the electrode solution. It was mixed with a 0.02% polyalkylthiophene dispersion in a 2wt% multi-walled carbon nanotube dispersion at a volume ratio of 9: 1, and then ultrasonically dispersed for 1 hour, and then centrifuged at 3000 rpm for 15min to take the supernatant into the LB analyzer water tank.
  • the surface tension of the electrode layer on the LS method is 15mN / m on the water surface.
  • the silica gel film is moved toward the electrode layer at a speed of 2mm / min until the electrode layer is transferred onto the silica gel layer.
  • the thickness of the electrode layer is 50nm
  • the square resistance of the electrode layer is 100k ⁇ / ⁇
  • the modulus is 0.8Mpa.
  • Step 3 Transfer the electrode on the other side of the silicone film in the same way to complete the single-layer dielectric elastomer driver.
  • a single layer of dielectric elastomer material is stacked and laminated into 5 layers of dielectric elastomer material.
  • Example 6 of the present invention The dielectric elastomer driver prepared in Example 6 of the present invention was tested.
  • the area deformation rate is 4%, and the response time is 5ms. After the voltage is removed, the high elastic recovery rate is greater than or equal to 99%.
  • Step one spin-coating to make an acrylic elastomer layer.
  • An acrylic coating solution was prepared, wherein the acrylic modulus was 1 MPa, the compression set was less than 5%, and the diluent was propylene glycol methyl ether acetate, and the solid content was 50%.
  • Spin coating was performed on a PET substrate coated with a sacrificial layer. The spin coating speed was 8000 rpm / min for 2 minutes, and after drying at 120 ° C for 30 minutes, the thickness of the dry silica gel film was 1 m.
  • Step 2 The electrode layer is formed by a CVD method.
  • a nickel substrate was plated on a silicon substrate, and a mixed gas of argon and hydrogen was passed for 900 ° C heat treatment, and then a multi-walled carbon nanotube film was grown using acetylene gas as a carbon source, with a thickness of 50 nm and a resistance of 500 ⁇ /.
  • Plasma treatment was performed on the surface of the silica gel membrane, 50 sccm of oxygen and argon, 40 KHz / 100 W, and the time was 1 min. Then, the two electrode layers were closely adhered to both sides of the silicone film, respectively, to complete a single-layer dielectric elastomer driver.
  • a single layer of dielectric elastomer material is stacked and laminated into 5 layers of dielectric elastomer material.
  • Example 7 of the present invention The dielectric elastomer driver prepared in Example 7 of the present invention was tested.
  • the area deformation rate is 5%, and the response time is 5ms. After the voltage is removed, the high elastic recovery rate is greater than or equal to 99%.
  • Step one spin-coating to make an acrylic elastomer layer.
  • An acrylic coating solution was prepared, wherein the acrylic modulus was 1 MPa, the compression set was less than 5%, and the diluent was propylene glycol methyl ether acetate, and the solid content was 50%.
  • Step 2 The electrode layer is formed by suction filtration transfer method.
  • a single carbon nanotube was dispersed in a 1% SDS aqueous solution, 200 W ultrasonic dispersion was performed for 10 minutes, and centrifuged at 3000 rpm for 5 minutes to obtain the supernatant.
  • Polycarbonate filter paper with a pore size of 50 nm was selected, and a film was formed on the filter paper by vacuum suction filtration. After drying at 40 ° C for 1 hour, the thickness of the electrode layer was 30nm, the square resistance of the electrode layer was 5000 ⁇ / ⁇ , and the modulus was 1Mpa.
  • the single electrode layer is closely adhered to one side of the single silicone layer, and then the single silicone layer and the electrode layer are alternately adhered alternately to complete a 10-layer dielectric elastomer driver formed by stacking and compounding.
  • Example 8 of the present invention The dielectric elastomer driver prepared in Example 8 of the present invention was tested.
  • the area deformation rate is 6%, and the response time is 5ms. After the voltage is removed, the high elastic recovery rate is greater than or equal to 99%.
  • Step 1 Prepare a silica gel coating solution, wherein the silica gel has a modulus of 1 MPa, a compression set of ⁇ 5%, a product with a viscosity of 1000 cp, a diluent of a volatile silicone oil, a viscosity of 1 cp, and a solid content of 50%.
  • Spin coating was performed on the substrate coated with the electrode layer, the spin coating speed was 8000 rpm / min for 2 minutes, and after drying at 120 ° C. for 30 minutes, the thickness of the dry silica gel film was 5 ⁇ m.
  • Step 2 Configure the electrode coating solution, in which superconducting carbon black and dispersant are ball milled and dispersed for 600 revolutions for 15 minutes, and then diluted by 3 times with vinyl silicone oil and volatile silicone oil, and then dispersed at 150W for half an hour, and centrifuged at 3000 revolutions for 1 minute and taken. Serum.
  • the spraying method is used to mold on the silica gel film, and the droplet particles are sprayed with 10 ⁇ m and the frequency is 300 Hz. After drying at 100 ° C for 30 minutes, the thickness of the electrode layer was 0.5 ⁇ m, the square resistance of the electrode layer was 3000 ⁇ / ⁇ , and the modulus was 1 Mpa.
  • Step 3 Continue to spin-coat the silica gel layer on the electrode layer, and then repeatedly spray the electrode layer alternately and spin-coat the silica gel layer. Finally, the sacrificial layer is dissolved, and the single-layer elastomer layer and the single-layer electrode layer are alternately stacked and combined to form a 20-layer dielectric elastomer.
  • Example 9 of the present invention The dielectric elastomer driver prepared in Example 9 of the present invention was tested.
  • the area deformation rate is 5%, and the response time is 5ms. After the voltage is removed, the high elastic recovery rate is greater than or equal to 99%.

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Abstract

一种介电弹性体驱动器具有多层结构，该多层结构包括单层弹性体层及复合在该单层弹性体层上下表面的单层电极层，或者单层弹性体层及单层电极层交替堆叠复合而成的多层；该单层电极层的厚度小于等于1μm；该单层弹性体层的厚度小于等于5μm。将介电弹性体厚度降低到超薄的微纳米级别，通过控制介电弹性体驱动器的弹性体层厚度和电极层厚度，再结合适当的模量、方阻以及相对介电常数等参数，以及材料的选择，从而实现了能在低电压的情况下驱动，同时实现大形变，快速响应以及高弹性恢复的效果。

Description

[根据细则37.2由ISA制定的发明名称]　一种介电弹性体驱动器及其制备方法、换能器
本申请要求于2018年09月20日提交中国专利局、申请号为201811100354.8、发明名称为“一种可低电压驱动的介电弹性体驱动器及其制备方法、换能器”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明属于介电弹性体驱动器技术领域，涉及一种介电弹性体驱动器及其制备方法、换能器，尤其涉及一种可低电压驱动的介电弹性体驱动器及其制备方法、换能器。
背景技术
电活性聚合物(electroactive polymers，EAP)是指在电刺激下能够产生较大形变的聚合物材料。EAP材料可以分为自立性和电子型两种。电子型EAP又可以分为电致伸缩弹性体，铁电聚合物和介电弹性体(dielectric elastomer，DE)。其中，介电弹性体是指具有高介电常数的弹性体材料，对其施加外电场后可以改变形状，撤销外加电场后会又能恢复到原来的形状的材料。这个过程伴随应力和应变的产生，从而将电能转化为机械能，在过去的二十年中获得了广泛的关注。
在DE薄膜的两侧涂覆柔性电极可以组成介电弹性体驱动器(Dielectric elastomer actuator，DEA)，当通过两个电极施加电压时，上下两个电极间产生的静电力压缩薄膜，导致薄膜厚度减少；而同性电荷相互排斥，在宏观上表现为薄膜平面的伸张，由此将电能转变成机械能发生电致形变。
然而，目前介电弹性体驱动电压非常高，都在kV以上，对于工业化应用有很大困难。降低驱动电压的常用方法是降低材料厚度，提高材料介电常数，提高击穿电压，降低材料模量。比如现有技术中，SΜMITOMO RIKO COMPANY LIMITED在US20150202656中公开了提高材料介电常数的方法；TOKAI RUBBER INDUSTRIES LTD在US9397589中公开了提高击穿电压的方法；Wacker AG在US20170044370中公开了降低材料的模量的方法。但是通过上述方法虽能改善效果，但是都无法实现将驱动电压降低到≤100V时驱 动。
因此，如何得到一种介电弹性体驱动器，能够在驱动电压≤100V时进行驱动，已成为业内诸多研究人员和一线厂商亟待解决的问题之一。
发明内容
有鉴于此，本发明要解决的技术问题在于提供一种介电弹性体驱动器及其制备方法，特别是一种可低电压驱动的介电弹性体驱动器，本发明通过控制介电弹性体驱动器的弹性体层厚度和电极层厚度，再结合适当的模量、方阻以及相对介电常数等参数，从而实现了能在低电压＜100V的情况下驱动，同时实现大变形，快速响应以及高弹性恢复的效果，使得介电弹性体具有作为换能器应用的价值。
本发明提供了一种介电弹性体驱动器，所述介电弹性体驱动器具有多层结构；
所述多层结构包括单层弹性体层及复合在所述单层弹性体层上下表面的单层电极层，或者单层弹性体层及单层电极层交替堆叠复合而成的多层；
所述单层电极层的厚度小于等于1μm；
所述单层弹性体层的厚度小于等于5μm。
优选的，所述单层电极层的模量小于等于5MPa；
所述单层电极层的方阻小于等于10MΩ/□；
所述单层弹性体层的相对介电常数大于等于2；
所述单层电极层的厚度为1nm～1μm；
所述单层弹性体层的厚度为10nm～5μm。
优选的，所述单层电极层的方阻为10Ω/□～10MΩ/□；
所述单层电极层的模量为0.3～5MPa；
所述单层弹性体层的相对介电常数为2～10；
所述单层弹性体层的模量为10kPa～5MPa；
所述单层弹性体层的压缩永久变形＜5％；
所述多层中互不接触的电极层的层数≥2。
优选的，所述弹性体层的材料包括硅胶类弹性体及其改性材料、丙烯酸类弹性体及其改性材料和聚酯类弹性体及其改性材料中的一种或多种；
所述电极层的材料包括碳纳米管、石墨烯、超导炭黑和金属纳米线中的一种或多种，或者碳纳米管、石墨烯、超导炭黑和金属纳米线中的一种或多种与弹性体的复合材料；
所述金属纳米线包括纳米银线、纳米金线和纳米铜线中的一种或多种；
所述复合的方式包括，将成膜的电极层转印到已成膜的弹性体层上、在成膜的电极层上直接成型弹性体层和在成膜的弹性体层上直接成型电极层中的一种或多种。
本发明提供了一种如上述技术方案任意一项所述的介电弹性体驱动器的制备方法，其特征在于，包括以下步骤：
1)将弹性体材料源或电极材料源中的一种，复合在设置有牺牲层的基材的牺牲层表面，得到复合有弹性体层或电极层中的一种的第一基体；
2)将电极材料源或弹性体材料源中的另一种，复合在上述步骤得到的第一基体的弹性体层或电极层表面，得到第二基体；
3)将上述步骤得到的第二基体去除牺牲层后，得到不含基体的胶体膜；
4)在上述步骤得到的胶体膜的弹性体层表面复合第二电极层后，或者，将两个上述步骤得到的胶体膜的弹性体层复合在一起后，得到单层介电弹性体驱动器。
优选的，将弹性体层、电极层和单层介电弹性驱动器中的一种或多种，再次堆叠复合在所述单层介电弹性体驱动器上，得到多层介电弹性体驱动器；
所述堆叠复合的次数可以为一次或多次；
所述电极材料源复合的方式包括化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋涂法和电脉沉积法成膜中的一种或多种；
所述弹性体材料源复合的方式包括喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋转涂布法和分子束沉积成膜中的一种或多种；
所述电极材料源包括电极材料涂布液、电极材料分散液和电极膜中的一种或多种；
所述弹性体材料源包括弹性体材料涂布液和/或弹性体膜。
优选的，所述电极材料为碳纳米管时，所述碳纳米管涂布液复合的方式包 括化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋涂法和电脉沉积法成膜中的一种或多种；
所述电极材料为石墨烯时，所述石墨烯源复合的方式包括化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法和旋涂法成膜中的一种或多种；
所述电极材料为超导炭黑时，所述超导炭黑源复合的方式包括喷涂法、棒涂法、提拉法、旋涂法、条缝涂布法和微凹印法中的一种或多种；
所述电极材料为金属纳米线时，所述金属纳米线源复合的方式包括真空抽滤法、喷涂法、棒涂法、条缝涂布法、微凹印法和旋涂法成膜中的一种或多种。
优选的，所述弹性体材料涂布液可以由弹性体材料和稀释剂混合后得到，或者仅为弹性体材料；
所述电极材料涂布液由电极材料、粘结剂和稀释剂混合后得到，或者由电极材料和稀释剂混合后得到；
所述稀释剂包括挥发性硅油、石脑油、汽油、醇类稀释剂、酮类稀释剂、酯类稀释剂和水中的一种或多种；
所述粘结剂包括硅胶、丙烯酸、聚酯、聚醚、聚乙撑二氧噻吩-聚(苯乙烯磺酸盐)和纤维素中的一种或多种。
优选的，所述弹性体材料涂布液中，所述弹性材料的质量含量为1％～99.9％；
所述电极材料涂布液中，所述电极材料的质量含量为0.1％～50％；
所述电极材料涂布液中，所述粘结剂的质量含量为0.1％～50％；
所述介电弹性体驱动器在驱动电压小于等于100V驱动时，形变率大于等于4％，快速响应时间小于等于20ms，高弹性恢复率大于等于99％。
本发明还提供了一种换能器，包括上述技术方案任意一项所述的介电弹性体驱动器或上述技术方案任意一项所述的制备方法所制备的介电弹性体驱动器。
本发明提供了一种介电弹性体驱动器，所述介电弹性体驱动器具有多层结构；所述多层结构包括单层弹性体层及复合在所述单层弹性体层上下表面的单层电极层，或者单层弹性体层及单层电极层交替堆叠复合而成的多层；所述单 层电极层的厚度小于等于1μm；所述单层弹性体层的厚度小于等于5μm。与现有技术相比，本发明针对现有的介电弹性体驱动电压高，难于在小于100V驱动电压时，实现有效驱动的问题。
本发明又针对现有的商业材料中，如Danfoss是将弹性体层成型为波浪形并物理沉积电极层10～100nm，以及Parker则是在弹性体层上印刷电极层等。虽然可以实现低厚度，但Danfoss的弹性体层厚度低于10μm范围时，电极刚性影响过大使材料失去变形能力；而Parker则无法实现印刷电极厚度在微纳米级别，限制了低电压下的应用和工业化应用推广。而在降低介电弹性体厚度到微纳米级别的方法上，虽然当下高校的研究已有报道实现，但都无法在低电压驱动的同时兼具大变形，快速响应及高弹性恢复等，具有应用价值要求的性能效果。
本发明以为，低电压小于等于100V驱动下应用的超薄介电弹性体需要同时满足如下2点，而目前现有技术则难以同时达到。第一，需要降低每层介电弹性体(电极层加弹性体层)厚度到微纳米尺寸(＜5μm)，才能在低电压＜100V驱动。第二，需要驱动时实现大变形，快速响应以及高弹性恢复的效果，才有介电弹性体作为换能器应用的价值。而如高校学术研究中，通过降低硅胶膜和导电层厚度到纳米尺寸的方式降低驱动电压。如Tino实验室和Sophie实验室制备的介电弹性体驱动器等，但仍然无法实现低电压有效驱动的问题。
本发明创造性的将介电弹性体厚度降低到超薄的微纳米级别，通过控制介电弹性体驱动器的弹性体层厚度和电极层厚度，再结合适当的模量、方阻以及相对介电常数等参数，以及材料的选择，从而实现了能在低电压＜100V的情况下驱动，同时实现大变形(大于4％)，快速响应以及高弹性恢复的效果，使得介电弹性体具有作为换能器应用的价值。
本发明突破了常规介电弹性体只能在kV以上高压下驱动的限制，低电压驱动拓展了介电弹性体材料的应用空间，可以用于制造在低电压下应用的多种换能器，比如软体机器人，触觉反馈器件，可调光学器件等。实验结果表明，本发明制备的介电弹性体驱动器，可以在低电压＜100V驱动时，实现大变形＞4％、快速响应＜20ms、高弹性恢复＞99％的效果。
具体实施方式
为了进一步理解本发明，下面结合实施例对本发明优选实施方案进行描述，但是应当理解，这些描述只是为进一步说明本发明的特征和优点，而不是对本发明权利要求的限制。
本发明所有原料，对其来源没有特别限制，在市场上购买的或按照本领域技术人员熟知的常规方法制备的即可。
本发明所用原料，对其纯度没有特别限制，本发明优选为工业纯或摩擦材料领域的常规纯度即可。
本发明所有原料，其牌号和简称均属于本领域常规牌号和简称，每个牌号和简称在其相关用途的领域内均是清楚明确的，本领域技术人员根据牌号、简称以及相应的用途，能够从市售中购买得到或常规方法制备得到。
本发明所有工艺，其简称均属于本领域的常规简称，每个简称在其相关用途的领域内均是清楚明确的，本领域技术人员根据简称，能够理解其常规的工艺步骤。
本发明提供了一种介电弹性体驱动器，所述介电弹性体驱动器具有多层结构；
所述多层结构包括单层弹性体层及复合在所述单层弹性体层上下表面的单层电极层，或者单层弹性体层及单层电极层交替堆叠复合而成的多层；
所述单层电极层的厚度小于等于1μm；
所述单层弹性体层的厚度小于等于5μm。
本发明所述介电弹性体驱动器具有多层结构，分为单层介电弹性体驱动器和多层介电弹性体驱动器，在本发明单层介电弹性体驱动器和多层介电弹性体驱动器均具有多层结构，其中单层介电弹性体驱动器是指单层弹性体层及复合在所述单层弹性体层上下表面的单层电极层；多层介电弹性体驱动器是指单层弹性体层及单层电极层交替堆叠复合而成的多层，其中至少含有2层及以上的互不接触的电极层，更优选为3层及以上。
本发明所述单层电极层的厚度小于等于1μm，更优选小于等于500nm，更优选小于等于50nm，也可以为1nm～1μm，或者为10～100nm，或者为30～80nm，或者40～60nm。本发明所述单层弹性体层的厚度小于等于5μm，更优选小于 等于1μm，更优选小于等于500nm，更优选小于等于300nm，也可以为10nm～5μm，或者为50nm～1μm，或者为30～80nm，或者为40～60nm。
本发明原则上对所述单层电极层的模量没有特别限制，以本领域技术人员熟知的单层电极层的常规模量即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述单层电极层的模量优选小于等于5MPa，更优选小于等于3MPa，更优选小于等于1MPa，也可以为0.3～5MPa，或者为0.5～3MPa，或者为0.6～1MPa，或者为0.7～0.9MPa。
本发明原则上对所述单层电极层的方阻没有特别限制，以本领域技术人员熟知的单层电极层的常规方阻即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述单层电极层的方阻优选小于等于10MΩ/□，更优选小于等于1MΩ/□，更优选小于等于100KΩ/□，也可以为10Ω/□～10MΩ/□，或者为50Ω/□～1MΩ/□，或者为100Ω/□～100KΩ/□，或者为1KΩ/□～10KΩ/□。
本发明原则上对所述单层弹性体层的相对介电常数没有特别限制，以本领域技术人员熟知的单层弹性体层的常规相对介电常数即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述单层弹性体层的相对介电常数优选为2～10，更优选为3～9，更优选为4～8，更优选为5～7。
本发明原则上对所述单层弹性体层的模量没有特别限制，以本领域技术人员熟知的单层弹性体层的常规模量即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述单层弹性体层的模量优选为10KPa～5MPa，更优选为50KPa～3MPa，更优选为0.1～1MPa，更优选为0.3～0.8MPa。
本发明原则上对所述单层弹性体层的压缩永久变形没有特别限制，以本领 域技术人员熟知的单层弹性体层的常规压缩永久变形即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述单层弹性体层的压缩永久变形优选小于5％，更优选小于等于4％，更优选小于等于3％，更优选小于等于1％。
本发明原则上对所述单层弹性体层的材料没有特别限制，以本领域技术人员熟知的单层弹性体层的常规材料即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述弹性体层的材料优选包括硅胶类弹性体及其改性材料、丙烯酸类弹性体及其改性材料和聚酯类弹性体及其改性材料中的一种或多种，更优选为硅胶类弹性体及其改性材料、丙烯酸类弹性体及其改性材料或聚酯类弹性体及其改性材料。
本发明原则上对所述单层电极层的材料没有特别限制，以本领域技术人员熟知的单层电极层的常规材料即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述电极层的材料优选包括碳纳米管、石墨烯、超导炭黑和金属纳米线中的一种或多种，或者碳纳米管、石墨烯、超导炭黑和金属纳米线中的一种或多种与弹性体的复合材料，更优选为碳纳米管、石墨烯、超导炭黑、金属纳米线，或者，碳纳米管、石墨烯、超导炭黑和金属纳米线中的一种或多种与弹性体的复合材料。其中，本发明所述金属纳米线优选包括纳米银线、纳米金线和纳米铜线中的一种或多种，更优选为纳米银线、纳米金线或纳米铜线。
本发明原则上对所述复合的方式没有特别限制，以本领域技术人员熟知的常规复合方式即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述复合的方式优选包括，将成膜的电极层转印到已成膜的弹性体层上、在成膜的电极层上直接成型弹性体层和在成膜的弹性体层上直接成型电极层中的一种或多种，更优选为 将成膜的电极层转印到已成膜的弹性体层上、在成膜的电极层上直接成型弹性体层或在成膜的弹性体层上直接成型电极层。
本发明上述步骤提供了一种介电弹性体驱动器，首要是控制介电弹性体驱动器的弹性体层厚度和电极层厚度分别达到特定的微纳米级别，再控制特定参数范围的模量、方阻以及相对介电常数等参数，以及材料的选择，从而实现了能在低电压＜100V的情况下驱动，同时实现大变形(大于4％)，快速响应以及高弹性恢复的效果，使得介电弹性体具有作为换能器应用的价值。
本发明提供了一种如上述技术方案任意一项所述的介电弹性体驱动器的制备方法，包括以下步骤：
1)将弹性体材料源或电极材料源中的一种，复合在设置有牺牲层的基材的牺牲层表面，得到复合有弹性体层或电极层中的一种的第一基体；
2)将电极材料源或弹性体材料源中的另一种，复合在上述步骤得到的第一基体的弹性体层或电极层表面，得到第二基体；
3)将上述步骤得到的第二基体去除牺牲层后，得到不含基体的胶体膜；
4)在上述步骤得到的胶体膜的弹性体层表面复合第二电极层后，或者，将两个上述步骤得到的胶体膜的弹性体层复合在一起后，得到单层介电弹性体驱动器。
本发明上述介电弹性体驱动器的制备方法中，采用的原料、加入方式以及参数条件的选择，及其相应的优选原则，如无特别注明，与本发明前述步骤提供的介电弹性体驱动器中的原料、加入方式以及参数条件的选择，及其相应的优选原则均优选一一对应，在此不再一一赘述。
本发明首先将弹性体材料源或电极材料源中的一种，复合在设置有牺牲层的基材的牺牲层表面，得到复合有弹性体层或电极层中的一种的第一基体。
本发明原则上对所述弹性体材料源的具体选择没有特别限制，以本领域技术人员熟知的弹性体材料源的常规选择即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述弹性体材料源优选包括弹性体材料涂布液和/或弹性体膜，更优选为弹性体材料涂布液或弹性体膜。所述弹性体材料涂布液可以由弹性体材料和稀 释剂混合后得到，或者仅为弹性体材料。
本发明所述稀释剂优选包括挥发性硅油、石脑油、汽油、醇类稀释剂、酮类稀释剂、酯类稀释剂和水中的一种或多种，更优选为挥发性硅油、石脑油、汽油、醇类稀释剂、酮类稀释剂、酯类稀释剂或水。本发明所述弹性体材料涂布液中，所述弹性材料的质量含量优选为1％～99.9％，更优选为10％～90％，更优选为30％～70％。
本发明原则上对所述电极材料源的具体选择没有特别限制，以本领域技术人员熟知的电极材料源的常规组成即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述电极材料源优选包括电极材料涂布液、电极材料分散液和电极膜中的一种或多种，更优选为电极材料涂布液、电极材料分散液或电极膜，更优选为电极材料涂布液。所述电极材料涂布液优选由电极材料、粘结剂和稀释剂混合后得到，或者由电极材料和稀释剂混合后得到。
本发明所述粘结剂优选包括硅胶、丙烯酸、聚酯、聚醚、聚乙撑二氧噻吩-聚(苯乙烯磺酸盐)和纤维素中的一种或多种，更优选为硅胶、丙烯酸、聚酯、聚醚、聚乙撑二氧噻吩-聚(苯乙烯磺酸盐)或纤维素。本发明所述稀释剂优选包括挥发性硅油、石脑油、汽油、醇类稀释剂、酮类稀释剂、酯类稀释剂和水中的一种或多种，更优选为挥发性硅油、石脑油、汽油、醇类稀释剂、酮类稀释剂、酯类稀释剂或水。本发明所述电极材料涂布液中，所述电极材料的质量含量优选为0.1％～50％，更优选为1％～40％，更优选为10％～30％。所述电极材料涂布液中，所述粘结剂的质量含量优选为0.1％～50％，更优选为1％～40％，更优选为10％～30％。
本发明原则上对所述电极材料源的复合方式没有特别限制，以本领域技术人员熟知的电极材料的常规复合方式即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述电极材料源复合的方式优选包括化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋涂 法和电脉沉积法成膜中的一种或多种，更优选为化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋涂法或电脉沉积法成膜。
本发明为更好的保证最终产品的性能，完整和细化制备过程，特别优选的，所述电极材料为碳纳米管时，所述碳纳米管源复合的方式优选包括化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋涂法和电脉沉积法成膜中的一种或多种，更优选为化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋涂法或电脉沉积法成膜。所述电极材料为石墨烯时，所述石墨烯源复合的方式优选包括化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法和旋涂法成膜中的一种或多种，更优选为化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法或旋涂法成膜。所述电极材料为超导炭黑时，所述超导炭黑源复合的方式优选包括喷涂法、棒涂法、提拉法、旋涂法、条缝涂布法和微凹印法中的一种或多种，更优选为喷涂法、棒涂法、提拉法、旋涂法、条缝涂布法或微凹印法。所述电极材料为金属纳米线时，所述金属纳米线源复合的方式优选包括真空抽滤法、喷涂法、棒涂法、条缝涂布法、微凹印法和旋涂法成膜中的一种或多种，更优选为真空抽滤法、喷涂法、棒涂法、条缝涂布法、微凹印法或旋涂法成膜。
本发明原则上对所述弹性体材料源的复合方式没有特别限制，以本领域技术人员熟知的弹性体材料的常规复合方式即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明为保证能够在小于等于100V的低电压下驱动，同时还能具有大变形，快速响应以及高弹性恢复的效果，所述弹性体材料源复合的方式优选包括喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋转涂布法和分子束沉积成膜中的一种或多种，更优选为喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋转涂布法或分子束沉积成膜。
本发明对所述基材的选择没有特别限制，以本领域技术人员熟知的基材的常规选择即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求 进行选择和调整，本发明所述基材优选包括PET、PI和PTFE中的一种或多种，更优选为PET、PI或PTFE。
本发明对所述牺牲层的材料选择没有特别限制，以本领域技术人员熟知的牺牲层的常规选择即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明所述牺牲层的优选包括光刻胶溶液牺牲层和/或可溶性树脂溶液牺牲层，更优选为光刻胶溶液牺牲层或可溶性树脂溶液牺牲层。
本发明对所述牺牲层的设置方式没有特别限制，以本领域技术人员熟知的牺牲层的常规设置方式即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整。
本发明上述步骤得到了复合有弹性体层或电极层中的一种的第一基体，即表面可以含有弹性体层或电极层的第一基体。本发明所述第一基体具有三层结构，依次为弹性体层、牺牲层和基体；或者依次为电极层、牺牲层和基体。
本发明随后将电极材料源或弹性体材料源中的另一种，复合在上述步骤得到的第一基体的弹性体层或电极层表面，得到第二基体。
本发明上述步骤中采用的原料、复合方式以及参数条件的选择，及其相应的优选原则，如无特别注明，与本发明前述步骤1)中的原料、加入方式以及参数条件的选择，及其相应的优选原则均优选一一对应，在此不再一一赘述。
本发明上述步骤得到了复合有弹性体层和电极层的第二基体，即表面可以含有弹性体层或电极层的第一基体。本发明所述第二基体具有四层结构，依次为弹性体层、电极层、牺牲层和基体；或者依次为电极层、弹性体层、牺牲层和基体。
本发明然后将上述步骤得到的第二基体去除牺牲层后，得到不含基体的胶体膜。
本发明对所述去除的方式没有特别限制，以本领域技术人员熟知的常规去除牺牲层的方式即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明所述去除的方式优选为溶解牺牲层。
本发明将牺牲层去除后，胶体膜自然和基体脱离，即得到了不含基体的胶体膜。本发明所述胶体膜为两层结构，一层为电极层，另一层为弹性体层。
本发明最后在上述步骤得到的胶体膜的弹性体层表面复合第二电极层后，或者，将两个上述步骤得到的胶体膜的弹性体层复合在一起后，得到单层介电弹性体驱动器。
在本发明中第二电极层的参数和材料，与电极层的参数和材料的选择可以相同也可以不同，本发明没有特别限制。
本发明在得到上述单层介电弹性体驱动器后，然后将弹性体层、电极层和单层介电弹性驱动器中的一种或多种，再次堆叠复合在所述单层介电弹性体驱动器上，得到多层介电弹性体驱动器。
本发明对所述再次堆叠复合的方式没有特别限制，以本领域技术人员熟知的常规此类材料的复合方式即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明所述再次堆叠复合的方式优选与前述复合的方式相同，或在前述复合的方式中进行选择即可。
本发明还提供了一种换能器，包括上述技术方案任意一项所述的介电弹性体驱动器或上述技术方案任意一项所述的制备方法所制备的介电弹性体驱动器。
本发明对所述换能器的定义和选择没有特别限制，以本领域技术人员熟知的换能器的定义和选择即可，本领域技术人员可以根据实际应用情况、技术要求和质量要求进行选择和调整，本发明所述换能器可以包括软体机器人、触觉反馈器件或可调光学器件等
本发明上述步骤提供了一种可低电压驱动的介电弹性体驱动器及其制备方法、换能器。本发明提供的介电弹性体驱动器能够在每层介电弹性体厚度在微纳米尺寸，在低电压＜100V驱动时，实现大变形，快速响应以及高弹性恢复的效果，具有作为换能器应用的价值。
本发明将介电弹性体厚度降低到超薄的微纳米级别，通过控制介电弹性体驱动器的弹性体层厚度和电极层厚度，再结合适当的模量、方阻以及相对介电常数等参数，以及材料的选择，更通过特定的加工工艺，控制住厚度，从而实现了能在低电压＜100V的情况下驱动，同时实现大变形(大于4％)，快速响应以及高弹性恢复的效果，使得介电弹性体具有作为换能器应用的价值。
本发明突破了常规介电弹性体只能在kV以上高压下驱动的限制，低电压 驱动拓展了介电弹性体材料的应用空间，可以用于制造在低电压下应用的多种换能器，比如软体机器人，触觉反馈器件，可调光学器件等。实验结果表明，本发明制备的介电弹性体驱动器，可以在低电压＜100V驱动时，实现大变形＞4％、快速响应＜20ms、高弹性恢复＞99％的效果。
为了进一步说明本发明，以下结合实施例对本发明提供的一种介电弹性体驱动器及其制备方法、换能器进行详细描述，但是应当理解，这些实施例是在以本发明技术方案为前提下进行实施，给出了详细的实施方式和具体的操作过程，只是为进一步说明本发明的特征和优点，而不是对本发明权利要求的限制，本发明的保护范围也不限于下述的实施例。
实施例1
2μm硅胶层+1μm电极层
步骤一：配制硅胶涂布液，其中硅胶为模量1MPa，粘度60000cp产品，稀释剂为挥发性硅油，粘度1cp，硅胶固含量33％。在涂有牺牲层的PET基材上涂布，棒涂间距为15μm，100℃干燥30min后，干硅胶膜厚度2μm。
步骤二：配制电极涂布液，其中超导炭黑粉固含量2％，粘结剂为硅胶固含量20％，稀释剂为挥发性硅油固含量78％。通过微凹印刷印在硅胶膜表面，100℃干燥30min后，电极层厚度1μm。完成2μm硅胶膜上印单层1μm厚电极，电极层方阻3000Ω/□，模量1Mpa。
步骤三：牺牲层溶解后可将硅胶膜取下。在硅胶膜的非电极层的一面印刷第二电极层，完成单层介电弹性体驱动器。
对本发明实施例1制备的介电弹性体驱动器进行检测。
施加电压100V时，面积形变率为4％，响应时间5ms，去除电压后高弹性恢复率大于等于99％。
实施例2
2μm硅胶层+1μm电极层
步骤一：配制硅胶涂布液，其中硅胶为模量1MPa，压缩永久变形＜5％，粘度1000cp产品，稀释剂为挥发性硅油，粘度1cp，硅胶固含量20％。在涂有牺牲层的PET基材上狭缝涂布，速度20m/min,湿胶膜厚度10μm，烘道鼓 风干燥120℃干燥30min后，干硅胶膜厚度2μm。
步骤二：配制电极涂布液，其中超导炭黑粉，石墨烯粉，碳纳米管粉总固含量2％，粘结剂为硅胶固含量10％，稀释剂为挥发性硅油固含量88％。通过旋涂成型在硅胶膜表面，100℃干燥30min后，电极层厚度1μm。完成2μm硅胶膜上印单层1μm厚电极，电极层方阻3000Ω/□，模量1Mpa。
步骤三：牺牲层溶解后可将硅胶膜取下。将2张各单面有电极的硅胶膜，没有覆电极的一面贴合在一起，完成一个单层介电弹性体驱动器；
步骤四：
将单层介电弹性体材料堆叠覆合为20层介电弹性体材料。
对本发明实施例2制备的介电弹性体驱动器进行检测。
施加电压100V时，面积形变率4％，响应时间5ms，去除电压后高弹性恢复率大于等于99％。
实施例3
300nm电极层+1μm硅胶层
步骤一：配置电极涂布液，其中超导炭黑与分散剂球磨分散600转15min，之后加挥发性硅油稀释3倍后150W超声分散半小时，8000转离心过滤1min后取上清液。用喷涂方式在涂有牺牲层的PET上成型，喷涂液滴颗粒10μm，频率300Hz。100℃干燥30min后，电极层厚度300nm，电极层方阻3000Ω/□，模量1Mpa。
步骤二：配制硅胶涂布液，其中硅胶为模量1MPa，粘度3000cp产品，稀释剂为挥发性硅油，粘度1cp，硅胶固含量80％。在涂有牺牲层的PET基材上微凹转印，100℃干燥30min后，干硅胶膜厚度1μm。
步骤三：牺牲层溶解后可将硅胶膜取下。以同样方法在硅胶膜的另一面转印电极，完成单层介电弹性体驱动器。
步骤四：
将单层介电弹性体材料堆叠覆合为5层介电弹性体材料。
对本发明实施例3制备的介电弹性体驱动器进行检测。
施加电压80V时，面积形变率5％，响应时间5ms，去除电压后高弹性恢复率大于等于99％。
实施例4
300nm电极层+1μm硅胶层
步骤一：配置电极涂布液，纳米银线涂布液银线固含量2％。用狭缝涂布方式在硅胶膜上成型，湿胶膜厚度10μm，干净胶膜厚度200nm。120℃干燥15min后，电极层厚度300nm，电极层方阻5000Ω/□，模量5Mpa。
步骤二：配制硅胶涂布液，其中硅胶为模量1MPa，粘度3000cp产品，稀释剂为挥发性硅油，粘度1cp，硅胶固含量80％。在涂有牺牲层的PET基材上微凹转印，100℃干燥30min后，干硅胶膜厚度1μm。
步骤三：牺牲层溶解后可将硅胶膜取下。以同样方法在硅胶膜的另一面转印电极，完成单层介电弹性体驱动器。
步骤四：
将单层介电弹性体材料堆叠覆合为10层介电弹性体材料。
对本发明实施例4制备的介电弹性体驱动器进行检测。
施加电压80V时，面积形变率6％，响应时间5ms，去除电压后高弹性恢复率大于等于99％。
实施例5
200nm硅胶层+50nm电极层
步骤一：配制硅胶涂布液，其中硅胶为模量1MPa，压缩永久变形＜5％，粘度4000cp产品，稀释剂为挥发性硅油，粘度1cp，硅胶固含量2％。在涂有牺牲层的PET基材上旋涂，旋涂速度8000转/min时间2min，120℃干燥30min后，干硅胶膜厚度200nm。牺牲层溶解后可将硅胶膜取下。
步骤二：配制电极涂布液，商品化多壁碳纳米管(MWCNT)水分散液，其中MWCNT 1wt％。再将5wt％MWCNT水分散液中加入5wt％乙二醇，70wt％异丙醇，20wt％丙二醇丁醚稀释超声分散400W1min。然后3000转60min离心取上清液。用喷涂方式在硅胶膜上成型，喷涂液滴颗粒5μm，频率700Hz。100℃干燥30min后，电极层厚度50nm，电极层方阻6000Ω/□，模量0.8Mpa。
步骤三：以同样方法在硅胶膜的另一面转印电极，完成单层介电弹性体驱动器。
步骤四：
将单层介电弹性体材料堆叠覆合为25层介电弹性体材料。
对本发明实施例5制备的介电弹性体驱动器进行检测。
施加电压20V时，面积形变率5％，响应时间5ms，去除电压后高弹性恢复率大于等于99％。
实施例6
200nm硅胶层+50nm电极层
步骤一：配制硅胶，其中硅胶为模量1MPa，压缩永久变形＜5％，粘度100cSt产品。分子束沉积方式成膜，在高真空条件下进行。使用干式涡旋泵实现10 -8mbar的基础压力，抽速为110L/min与涡轮分子泵组合使用，氮气抽速为77L/s，转速为1350Hz。使用低温喷射池实现NTEZ坩埚内的均匀温度分布。将蒸发器的温度斜坡调节至每分钟10K的加热速率。沉积温度180℃，沉积速率130nm/h，UV辐射固化厚得到干硅胶膜厚度200nm。
步骤二：配制电极液。在2wt％多壁碳纳米管分散液中与0.02％聚烷基噻吩分散液以体积比9:1混合后超声分散1h，之后3000转离心15min取上清液放入LB分析仪水槽中。LS法电极层在水面15mN/m表面张力，将硅胶膜以2mm/min速度移向电极层，直至电极层转印到硅胶层上。电极层厚度50nm，电极层方阻100kΩ/□，模量0.8Mpa。
步骤三：以同样方法在硅胶膜的另一面转印电极，完成单层介电弹性体驱动器。
步骤四：
将单层介电弹性体材料堆叠覆合为5层介电弹性体材料。
对本发明实施例6制备的介电弹性体驱动器进行检测。
施加电压20V时，面积形变率4％，响应时间5ms，去除电压后高弹性恢复率大于等于99％。
实施例7
1μm丙烯酸层+50nm电极层
步骤一：旋涂法做丙烯酸弹性体层。配制丙烯酸涂布液，其中丙烯酸模量1MPa，压缩永久变形＜5％产品，稀释剂为丙二醇甲醚醋酸酯，固含量50％。在涂有牺牲层的PET基材上旋涂，旋涂速度8000转/min时间2min，120℃干 燥30min后，干硅胶膜厚度1μm。
步骤二：CVD法做电极层。在硅基底材镀镍膜，通入氩气和氢气混合气体进行900℃热处理，随后通入以乙炔气体为碳源生长多壁碳纳米管薄膜，厚度50nm，电阻500Ω/。
步骤三：
将硅胶膜表面做等离子处理，氧气和氩气50sccm双气，40KHz/100W，时间1min。然后将2张电极层分别紧密贴合到硅胶膜上的双侧，完成单层介电弹性体驱动器。
步骤四：
将单层介电弹性体材料堆叠覆合为5层介电弹性体材料。
对本发明实施例7制备的介电弹性体驱动器进行检测。
施加电压80V时，面积形变率5％，响应时间5ms，去除电压后高弹性恢复率大于等于99％。
实施例8
1μm丙烯酸层+50nm电极层
步骤一：旋涂法做丙烯酸弹性体层。配制丙烯酸涂布液，其中丙烯酸模量1MPa，压缩永久变形＜5％产品，稀释剂为丙二醇甲醚醋酸酯，固含量50％。在涂有牺牲层的PET基材上旋涂，旋涂速度8000转/min时间2min，120℃干燥30min后，干硅胶膜厚度1μm
步骤二：抽滤转移法做电极层。单笔碳纳米管分散在1％的SDS水溶液中，200W超声分散10min，3000转离心过滤5min后取上清液。选择50nm孔径的聚碳酸酯滤纸，用真空抽滤方式在滤纸上成膜。40℃干燥1h后，电极层厚度30nm，电极层方阻5000Ω/□，模量1Mpa。
步骤三：
将单张电极层紧密贴合到单张硅胶层单侧，然后继续交替贴合单张硅胶层与电极层，完成堆叠复合而成的10层介电弹性体驱动器。
对本发明实施例8制备的介电弹性体驱动器进行检测。
施加电压30V时，面积形变率6％，响应时间5ms，去除电压后高弹性恢复率大于等于99％。
实施例9
直接成型多层驱动器(2μm硅胶+0.5μm电极)
步骤一：配制硅胶涂布液，其中硅胶为模量1MPa，压缩永久变形＜5％，粘度1000cp产品，稀释剂为挥发性硅油，粘度1cp，硅胶固含量50％。在涂有电极层的基材上旋涂，旋涂速度8000转/min时间2min，120℃干燥30min后，干硅胶膜厚度5μm。
步骤二：配置电极涂布液，其中超导炭黑与分散剂球磨分散600转15min，之后加乙烯基硅油及挥发性硅油稀释3倍后150W超声分散半小时，3000转离心过滤1min后取上清液。用喷涂方式在硅胶膜上成型，喷涂液滴颗粒10μm，频率300Hz。100℃干燥30min后，电极层厚度0.5μm，电极层方阻3000Ω/□，模量1Mpa。
步骤三：继续在电极层上旋涂硅胶层，之后依次重复交替喷涂电极层，旋涂硅胶层。最后将牺牲层溶解，取下单层弹性体层及单层电极层交替堆叠复合而成的20层介电弹性体。
对本发明实施例9制备的介电弹性体驱动器进行检测。
施加电压100V时，面积形变率5％，响应时间5ms，去除电压后高弹性恢复率大于等于99％。
以上对本发明提供的一种可低电压驱动的介电弹性体驱动器及其制备方法、换能器进行了详细的介绍，本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本发明的方法及其核心思想，包括最佳方式，并且也使得本领域的任何技术人员都能够实践本发明，包括制造和使用任何装置或系统，和实施任何结合的方法。应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以对本发明进行若干改进和修饰，这些改进和修饰也落入本发明权利要求的保护范围内。本发明专利保护的范围通过权利要求来限定，并可包括本领域技术人员能够想到的其他实施例。如果这些其他实施例具有不是不同于权利要求文字表述的结构要素，或者如果它们包括与权利要求的文字表述无实质差异的等同结构要素，那么这些其他实施例也应包含在权利要求的范围内。

Claims (10)

  1. 一种介电弹性体驱动器，其特征在于，所述介电弹性体驱动器具有多层结构；
    所述多层结构包括单层弹性体层及复合在所述单层弹性体层上下表面的单层电极层，或者单层弹性体层及单层电极层交替堆叠复合而成的多层；
    所述单层电极层的厚度小于等于1μm；
    所述单层弹性体层的厚度小于等于5μm。
  2. 根据权利要求1所述的介电弹性体驱动器，其特征在于，所述单层电极层的模量小于等于5MPa；
    所述单层电极层的方阻小于等于10MΩ/□；
    所述单层弹性体层的相对介电常数大于等于2；
    所述单层电极层的厚度为1nm～1μm；
    所述单层弹性体层的厚度为10nm～5μm。
  3. 根据权利要求1所述的介电弹性体驱动器，其特征在于，所述单层电极层的方阻为10Ω/□～10MΩ/□；
    所述单层电极层的模量为0.3～5MPa；
    所述单层弹性体层的相对介电常数为2～10；
    所述单层弹性体层的模量为10kPa～5MPa；
    所述单层弹性体层的压缩永久变形＜5％；
    所述多层中互不接触的电极层的层数≥2。
  4. 根据权利要求1所述的介电弹性体驱动器，其特征在于，所述弹性体层的材料包括硅胶类弹性体及其改性材料、丙烯酸类弹性体及其改性材料和聚酯类弹性体及其改性材料中的一种或多种；
    所述电极层的材料包括碳纳米管、石墨烯、超导炭黑和金属纳米线中的一种或多种，或者碳纳米管、石墨烯、超导炭黑和金属纳米线中的一种或多种与弹性体的复合材料；
    所述金属纳米线包括纳米银线、纳米金线和纳米铜线中的一种或多种；
    所述复合的方式包括，将成膜的电极层转印到已成膜的弹性体层上、在成 膜的电极层上直接成型弹性体层和在成膜的弹性体层上直接成型电极层中的一种或多种。
  5. 一种如权利要求1～4任意一项所述的介电弹性体驱动器的制备方法，其特征在于，包括以下步骤：
    1)将弹性体材料源或电极材料源中的一种，复合在设置有牺牲层的基材的牺牲层表面，得到复合有弹性体层或电极层中的一种的第一基体；
    2)将电极材料源或弹性体材料源中的另一种，复合在上述步骤得到的第一基体的弹性体层或电极层表面，得到第二基体；
    3)将上述步骤得到的第二基体去除牺牲层后，得到不含基体的胶体膜；
    4)在上述步骤得到的胶体膜的弹性体层表面复合第二电极层后，或者，将两个上述步骤得到的胶体膜的弹性体层复合在一起后，得到单层介电弹性体驱动器。
  6. 根据权利要求5所述的介电弹性体驱动器，其特征在于，将弹性体层、电极层和单层介电弹性驱动器中的一种或多种，再次堆叠复合在所述单层介电弹性体驱动器上，得到多层介电弹性体驱动器；
    所述堆叠复合的次数可以为一次或多次；
    所述电极材料源复合的方式包括化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋涂法和电脉沉积法成膜中的一种或多种；
    所述弹性体材料源复合的方式包括喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋转涂布法和分子束沉积成膜中的一种或多种；
    所述电极材料源包括电极材料涂布液、电极材料分散液和电极膜中的一种或多种；
    所述弹性体材料源包括弹性体材料涂布液和/或弹性体膜。
  7. 根据权利要求6所述的介电弹性体驱动器，其特征在于，所述电极材料为碳纳米管时，所述碳纳米管源复合的方式包括化学气相沉积法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法、旋涂法和电脉沉积法成膜中的一种或多种；
    所述电极材料为石墨烯时，所述石墨烯源复合的方式包括化学气相沉积 法、真空抽滤法、朗格缪尔-布劳杰特法、喷涂法、棒涂法、条缝涂布法、微凹印法、提拉法和旋涂法成膜中的一种或多种；
    所述电极材料为超导炭黑时，所述超导炭黑源复合的方式包括喷涂法、棒涂法、提拉法、旋涂法、条缝涂布法和微凹印法中的一种或多种；
    所述电极材料为金属纳米线时，所述金属纳米线源复合的方式包括真空抽滤法、喷涂法、棒涂法、条缝涂布法、微凹印法和旋涂法成膜中的一种或多种。
  8. 根据权利要求6所述的介电弹性体驱动器，其特征在于，所述弹性体材料涂布液可以由弹性体材料和稀释剂混合后得到，或者仅为弹性体材料；
    所述电极材料涂布液由电极材料、粘结剂和稀释剂混合后得到，或者由电极材料和稀释剂混合后得到；
    所述稀释剂包括挥发性硅油、石脑油、汽油、醇类稀释剂、酮类稀释剂、酯类稀释剂和水中的一种或多种；
    所述粘结剂包括硅胶、丙烯酸、聚酯、聚醚、聚乙撑二氧噻吩-聚(苯乙烯磺酸盐)和纤维素中的一种或多种。
  9. 根据权利要求8所述的介电弹性体驱动器，其特征在于，所述弹性体材料涂布液中，所述弹性材料的质量含量为1％～99.9％；
    所述电极材料涂布液中，所述电极材料的质量含量为0.1％～50％；
    所述电极材料涂布液中，所述粘结剂的质量含量为0.1％～50％；
    所述介电弹性体驱动器在驱动电压小于等于100V驱动时，形变率大于等于4％，快速响应时间小于等于20ms，高弹性恢复率大于等于99％。
  10. 一种换能器，其特征在于，包括权利要求1～4任意一项所述的介电弹性体驱动器或权利要求5～9任意一项所述的制备方法所制备的介电弹性体驱动器。
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