WO2020054778A1 - Method for manufacturing elongated body - Google Patents

Method for manufacturing elongated body Download PDF

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Publication number
WO2020054778A1
WO2020054778A1 PCT/JP2019/035757 JP2019035757W WO2020054778A1 WO 2020054778 A1 WO2020054778 A1 WO 2020054778A1 JP 2019035757 W JP2019035757 W JP 2019035757W WO 2020054778 A1 WO2020054778 A1 WO 2020054778A1
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WO
WIPO (PCT)
Prior art keywords
resin film
layer
coating
fep
intermediate layer
Prior art date
Application number
PCT/JP2019/035757
Other languages
French (fr)
Japanese (ja)
Inventor
渡辺 洋明
Original Assignee
株式会社 潤工社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2018196737A external-priority patent/JP6827994B2/en
Application filed by 株式会社 潤工社 filed Critical 株式会社 潤工社
Priority to US17/275,031 priority Critical patent/US11315707B2/en
Priority to KR1020217010532A priority patent/KR102343540B1/en
Priority to CN201980071062.2A priority patent/CN112955981B/en
Priority to EP19860038.9A priority patent/EP3852122B1/en
Publication of WO2020054778A1 publication Critical patent/WO2020054778A1/en

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    • H01B13/06Insulating conductors or cables
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    • B32B1/00Layered products having a general shape other than plane
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    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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    • B29C66/73General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/731General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the intensive physical properties of the material of the parts to be joined
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    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/70General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/731General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the intensive physical properties of the material of the parts to be joined
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Definitions

  • the present invention relates to a long body composed of an electric wire, a tube, and the like, and a method of manufacturing the same.
  • a flat cable in which a plurality of wires, tubes, and the like are arranged in a flat shape or a twisted round cable is used.
  • This flat cable or round cable is provided with a coating layer on the outer periphery of the cable in order to protect the cable from friction or corrosion due to external stress.
  • a coating layer on the outer periphery of the cable in order to protect the cable from friction or corrosion due to external stress.
  • such a cable often requires flexibility, and polyvinyl chloride (PVC), urethane, or an olefin-based resin is used as a material of the coating layer.
  • PVC polyvinyl chloride
  • urethane urethane
  • an olefin-based resin is used as a material of the coating layer.
  • these resins contain additives such as flame retardants, plasticizers, and antioxidants, and when used in clean rooms in semiconductor and organic EL manufacturing equipment, bleed-out of additives etc. Contamination is a problem.
  • Fluororesin such as polytetrafluoroethylene (PTFE) because of its excellent electrical properties such as cleanliness, slipperiness, heat resistance, nonflammability, chemical resistance, and low dielectric constant without plasticizers Is used as a material for the coating layer.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2006-19125 discloses that, while having excellent environmental resistance properties such as heat resistance and chemical resistance, it has excellent flexibility, flexibility, or flexibility, and good sliding.
  • a flat cable having a property a flat cable using a PTFE sheet or a porous PTFE sheet for a coating layer is disclosed.
  • the present invention has been made in view of the above points, and an object of the present invention is to provide a method for producing a long body having good slipperiness, flexibility, and flexibility, and having less contamination to the surroundings. is there.
  • a long body manufactured by the manufacturing method of the present invention That is, a method for producing a long body covered with a coating layer, wherein the long body is at least composed of a plurality of wires and / or tubes, and the coating layer has at least an intermediate layer and an outermost layer. Consisting of As the intermediate layer, a resin film having a density ⁇ 1 of 0.2 g / cm 3 or more and 1.8 g / cm 3 or less and a peak-to-valley value PV1 of 5 ⁇ m or more is used.
  • a resin film having a density ⁇ 2 of 1.2 g / cm 3 or more and 2.5 g / cm 3 or less is used, and at least a step of coating the elongated body with the coating layer; And / or fixing the position of the tube, and when PV2 which is the Peak-to-Valley value of the surface of the outermost layer is 5 ⁇ m or less, the following formulas (1) and (3) are satisfied, and PV2 is 5 ⁇ m
  • the intermediate layer has a porous structure.
  • a porous structure when the long body is bent, the pores in the intermediate layer are deformed, thereby reducing the load and providing high flexibility.
  • the intermediate layer referred to in the present invention refers to a coating layer having the largest thickness among the coating layers.
  • the coating layer further includes a functional layer.
  • a functional layer When at least one of the outermost layer and the intermediate layer is made of a fluororesin or the like, the adhesiveness to the mating material is often low, and providing an adhesive layer is useful because the durability of the coating layer is improved.
  • a resin film constituting the outermost layer or a heat-meltable resin having a lower melting point than the resin film constituting the intermediate layer can be used.
  • the present invention it is possible to provide a long body having good slipperiness, flexibility, and flexibility, and having less contamination to the surroundings, and a method for manufacturing the same.
  • FIG. 1 is a schematic view of an example of a long body produced by the manufacturing method of the present invention, and is a cross-sectional view of the long body.
  • FIG. 2 is an enlarged cross-sectional view of a portion A of the elongated body covering layer in FIG.
  • FIG. 3 is an enlarged cross-sectional view of the covering layer portion of the long body.
  • FIG. 4 is a schematic view of another example of the elongated body produced by the manufacturing method of the present invention, and is a cross-sectional view of the elongated body.
  • FIG. 5 is a diagram for explaining the Peak-to-Valley value in the present invention.
  • FIG. 1 is an example of a long body produced by the manufacturing method of the present invention, and is a schematic diagram of a cross section of a flat long body 100.
  • the elongated body 100 is prepared by preparing a plurality of electric wires, tubes, or both as objects to be coated, and juxtaposed or arranged in parallel with each other.
  • the number of cores of the object to be coated is five, but is not limited to this number.
  • the coating layer 110 is arranged so as to sandwich both sides (in the vertical direction in FIG. 1) of the object to be coated, and the portion where the coating layer 110 is bonded via the object to be coated, that is, the web portion 111 is formed of Are bonded by sintering or fusion.
  • the electric wires and / or tubes of the individual objects to be coated of the elongated body 100 are held and fixed at predetermined positions.
  • an object to be covered is one in which a plurality of electric wires, tubes, or both are arranged in parallel.
  • the coating target 120 is one FEP electric wire here.
  • 130 is one PFA electric wire here.
  • Reference numeral 140 denotes a two-core parallel cable in which two FEP electric wires are arranged in parallel.
  • Reference numeral 150 denotes a cable in which four PFA electric wires are twisted.
  • 160 is one FEP tube here.
  • the number of objects to be covered is five, but the number of objects to be covered is not limited to this, and the objects to be covered are a single-wire covered conductor, a two-core parallel cable, and a plurality of cables. It can be selected according to the required function, such as a twisted cable, a coaxial cable, and a tube.
  • FIG. 1 As another example of the elongated body produced by the manufacturing method of the present invention shown in FIG. 1, there is also a configuration of one electric wire and one tube as an object to be covered.
  • FIG. 2 is an enlarged cross-sectional view of the portion A of the elongated covering layer 110 of FIG.
  • the coating layer 110 includes at least an intermediate layer 112 and an outermost layer 113.
  • the intermediate layer 112 a resin film having a density ⁇ 1 of 0.2 g / cm 3 or more and 1.8 g / cm 3 or less is used. PV1 on the surface of the resin film constituting the intermediate layer 112 is 5 ⁇ m or more.
  • the resin constituting the intermediate layer 112 is polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkylvinylether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), polyvinylidene fluoride ( It is preferable to use a fluororesin such as PVDF) or a polyolefin resin such as polyethylene (PE).
  • a resin film having a density ⁇ 1 of 0.2 g / cm 3 or more and 1.8 g / cm 3 or less for the intermediate layer 112, and 0.3 g / cm 3 or more and 1.3 g / cm 3. It is more preferably at most 0.4 g / cm 3 and at most 1.0 g / cm 3 .
  • the density of polytetrafluoroethylene (PTFE) or polyethylene (PE) resin can be controlled by the processing conditions. Since these resins can be formed into a porous structure by stretching, in order to reduce the density, after forming into a sheet, by stretching while heating, a plurality of fibrils and pores between the fibrils are formed.
  • the density is reduced by increasing the stretching ratio.
  • a resin film having a plurality of continuous nodes and having high physical strength can be obtained.
  • a biaxial stretching method that is stretching from two directions a resin film having a lower density can be obtained, and flexibility is further increased.
  • the density can also be controlled by adjusting the firing temperature and firing time for firing the formed sheet, and adjusting the firing state to be completely fired, semi-fired, or not fired.
  • a resin film having a porous structure by foaming at the time of extrusion molding or a resin film having a porous structure formed by mixing a resin and a solvent at a high temperature and then lowering the temperature to separate into two layers may be used.
  • a resin film having a density ⁇ 2 of 1.2 g / cm 3 or more and 2.5 g / cm 3 or less is used.
  • the resin used for the outermost layer 113 is PTFE, tetrafluoroethylene-perfluoroalkylvinylether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), or tetrafluoroethylene-ethylene copolymer ( It is preferably a resin containing no plasticizer, such as a fluororesin such as ETFE) or polychlorotrifluoroethylene (PCTFE), or a polyetheretherketone (PEEK) or polyimide (PI).
  • a resin film having a thickness of 5 ⁇ m to 100 ⁇ m is used for the outermost layer.
  • PV1 on the surface of the resin film forming the intermediate layer 112 and PV2 on the surface of the resin film forming the outermost layer 113 are PV1 ⁇ PV2 ⁇ 2 ⁇ m.
  • the outermost layer 113 has PV1 and PV2 satisfying the relationship of PV2 ⁇ PV1> 0 ⁇ m, and at the same time, the resin film constituting the outermost layer.
  • the density ⁇ 2 of the intermediate layer 112 and the density ⁇ 1 of the resin film constituting the intermediate layer 112 satisfy a relationship of ⁇ 2 ⁇ 1 ⁇ 0.1 g / cm 3 .
  • the relationship between PV1 and PV2 suitable for the present invention is switched when PV2 on the surface of the elongated body made by the manufacturing method of the present invention is exactly 5 ⁇ m.
  • the case where ⁇ 2- ⁇ 1 ⁇ 0.3 g / cm 3 or more is preferable, and the case where ⁇ 2- ⁇ 1 ⁇ 1.0 g / cm 3 or more is more preferable.
  • the long object manufactured by the manufacturing method of the present invention can solve the problem of the present invention by the above-described configuration. While having high flexibility, it is possible to reduce the adhesion of foreign substances remaining on the surface of the coating layer, and it is possible to handle a small amount of oil and surroundings during cable handling, assembly and installation processes, equipment operation, etc. Foreign substances such as particles, chemicals, and moisture in the surrounding air are difficult to adhere to and are easily removed. Therefore, when placed in a clean environment, there is little contamination to surroundings, and there is little generation of dust and the like due to outgassing and wear of the long body itself, so that a long body that does not pollute the surroundings can be obtained.
  • FIG. 3 shows another example of the elongated body coating layer formed by the manufacturing method of the present invention.
  • the covering layer may be provided with a functional layer in addition to the intermediate layer and the outermost layer.
  • the covering layer 110a has an adhesive layer 114 # a disposed between the intermediate layer 112a and the outermost layer 113a, and increases the adhesive force between the intermediate layer 112a and the outermost layer 113a to slide the elongated body. The durability of the coating layer 110a is increased. Further, another adhesive layer 114a is disposed on the surface of the intermediate layer 112a opposite to the outermost layer 113a side, and when joining the covering layers 110a, a resin film or an outermost layer constituting the intermediate layer 112a is formed.
  • the bonding and integration can be performed at a temperature lower than the melting point of the resin film constituting the layer 113a. Since the resin film constituting the intermediate layer 112a and the resin film constituting the outermost layer 113a can be joined at a temperature at which the influence is small, the high function of the covering layer 110a can be maintained and high durability can be obtained. .
  • the adhesive layer it is possible to use a heat-meltable fluororesin or an olefin resin such as polyethylene.
  • a functional layer can be provided in accordance with the function required by the elongated body, such as a solvent barrier property.
  • FIG. 4 is a cross-sectional view of a round elongated body according to an example of the embodiment of the present invention.
  • the covering layer 210 of the elongated body 200 includes an outermost layer 211, an intermediate layer 212, and an adhesive layer 213.
  • an electric wire, a tube, or both of them are twisted and used.
  • 220 is one FEP electric wire here.
  • Reference numeral 230 denotes a cable in which seven PFA electric wires are twisted.
  • 240 is a cable in which two FEP electric wires are twisted in this case.
  • Reference numeral 250 denotes one PFA electric wire here.
  • 260 and 270 are a single nylon tube
  • 280 is a tinned annealed copper wire (drain wire).
  • These 220 to 280 are twisted, and the coating layer 210 is wound around the outer periphery thereof. After winding, the overlapping portions of the tape are joined by heating.
  • the electric wires and / or tubes of the individual objects to be coated of the elongated body 200 are held and fixed at predetermined positions.
  • the configuration and number of electric wires and tubes to be coated are not limited to the examples shown here, and one or a plurality of electric wires may be twisted or may be arranged in parallel. Further, a part of the twisted electric wire may be constituted by a tube.
  • a white interference microscope New view 6300 manufactured by Zygo was used.
  • a white LED was used as a light source, and a Gaussian filter was applied for surface filtering.
  • the measurement resolution in the height direction is 0.1 nm.
  • the observation magnification was set to 50 times, the cutoff frequency on the high frequency side (Filter High Wavelength) was set to 0.00250 mm, and the cutoff frequency on the low frequency side (Filter Low Wavelength) was set to 0.80000 mm.
  • the shape of the surface was measured, and a Peak-to-Valley value (PV) was calculated.
  • Analysis software MetroPro was used for the analysis of the measurement data.
  • PV refers to the distance in the height direction between the highest point and the lowest point on the measurement surface.
  • the ink was applied to the surface, the adhesion was checked, and the amount of the ink component remaining when the ink was wiped off with a cotton cloth was checked.
  • the adhesion state of the ink components and the remaining amount of the ink were evaluated on a five-point scale.
  • the ink component did not adhere to 5, the ink component adhered slightly, and the ink component was completely removed by wiping, and the ink component was completely removed.
  • the sample was identified as 3, the ink was attached, and the trace of the ink was confirmed even after wiping, and 2 was the sample where the ink was attached and the ink was hardly removed even after wiping.
  • Example 1 A PTFE resin film was used as the outermost layer, and another PTFE resin film was used as an intermediate layer inside the PTFE resin film.
  • the resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
  • two resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged.
  • a coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
  • the evaluation results of the cleanness are shown in Table 1.
  • Example 2 A PTFE resin film as an outermost layer, a 0.02 ⁇ m-thick FEP resin film as an inner adhesive layer, another PTFE resin film as an intermediate layer further inside, and a further PTFE resin film as an inner adhesive layer.
  • An FEP resin film having a thickness of 0.02 ⁇ m was used. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
  • the four resin films were laminated and heated to form a coating layer.
  • a coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
  • the evaluation results of the cleanness are shown in Table 1.
  • Example 3 A PTFE resin film as an outermost layer, a 0.02 ⁇ m-thick FEP resin film as an inner adhesive layer, another PTFE resin film as an intermediate layer further inside, and a further PTFE resin film as an inner adhesive layer.
  • An FEP resin film having a thickness of 0.02 ⁇ m was used.
  • the resin film was prepared by cutting to a required width.
  • the thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1. Next, the four resin films were laminated and heated to form a coating layer.
  • a coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
  • the evaluation results of the cleanness are shown in Table 1.
  • An FEP resin film was used as the outermost layer, a PTFE resin film was used as an intermediate layer inside the FEP resin film, and a 0.02 ⁇ m-thick FEP resin film was used as an adhesive layer inside the FEP resin film.
  • the resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
  • three resin films were laminated and heated to form a coating layer.
  • As an object to be coated a cable in which four PFA electric wires were twisted together and one in which four FEP electric wires were twisted were prepared.
  • the coating layer was wound around the outer periphery so as to overlap doubly, and heated to fix the position of each object to be coated, thereby producing a long body.
  • the evaluation results of the cleanness are shown in Table 1.
  • Example 5 A PEEK resin film was used as an outermost layer, a PTFE resin film was used as an intermediate layer inside the PEEK resin film, and a 0.02 ⁇ m-thick FEP resin film was used as an adhesive layer inside the PEEK resin film.
  • the resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1. Next, three resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction.
  • a coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
  • the evaluation results of the cleanness are shown in Table 1.
  • a PTFE resin film was used as an outermost layer, and a PE resin film was used as an intermediate layer inside the PTFE resin film.
  • the resin film was prepared by cutting to a required width.
  • the thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
  • two resin films were laminated and heated to form a coating layer.
  • one FEP electric wire In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body. The evaluation results of the cleanness are shown in Table 1. [Example 7] A PTFE resin film was used as the outermost layer, and another PTFE resin film was used as an intermediate layer inside the PTFE resin film. The resin film was prepared by cutting to a required width.
  • the thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2.
  • two resin films were laminated and heated to form a coating layer.
  • a coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
  • Table 2 shows the evaluation results of the cleanliness.
  • Example 8 An FEP resin film was used as the outermost layer, a PTFE resin film was used as an intermediate layer inside the FEP resin film, and a 0.02 ⁇ m-thick FEP resin film was used as an adhesive layer inside the FEP resin film.
  • the resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2. Next, three resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged.
  • a coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
  • Table 2 shows the evaluation results of the cleanliness.
  • a PTFE resin film was used as an outermost layer, another PTFE resin film was used as an intermediate layer inside the PTFE resin film, and a 0.02 ⁇ m-thick FEP resin film was used as an adhesive layer inside the PTFE resin film.
  • the resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2. Next, three resin films were laminated and heated to form a coating layer.
  • a cable in which four PFA electric wires were twisted together and one in which four FEP electric wires were twisted were prepared.
  • the outer periphery was wound and coated so that the coating layer overlapped twice, and heated to fix the position of each object to be coated, thereby producing a long body.
  • Table 2 shows the evaluation results of the cleanliness.
  • a 0.02 mm FEP resin film was used.
  • the resin film was prepared by cutting to a required width.
  • the thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2.
  • the four resin films were laminated and heated to form a coating layer.
  • a coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
  • Table 2 shows the evaluation results of the cleanliness.
  • Example 11 A PEEK resin film was used as the outermost layer, a PTFE resin film was used as an intermediate layer inside the PEEK resin film, and a 0.02 mm thick FEP resin film was used as an adhesive layer inside the PEEK resin film.
  • the resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2. Next, three resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP wire, one FEP wire, one cable in which four PFA wires are twisted, one cable in which two PFA wires are twisted, and one FEP tube are placed horizontally. Arranged.
  • a coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
  • Table 2 shows the evaluation results of the cleanliness.
  • a PTFE resin film was used as an outermost layer, and a PE resin film was used as an intermediate layer inside the PTFE resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2. Next, two resin films were laminated and heated to form a coating layer.
  • one FEP wire, one FEP wire, one cable in which four PFA wires are twisted, one cable in which two PFA wires are twisted, and one FEP tube are placed horizontally. Arranged. Coating layers were arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body. Table 2 shows the evaluation results of the cleanliness.
  • the elongated body of the present invention has good slipperiness, flexibility, and flexibility, and has little contamination to the surroundings, so that it can be used for semiconductor manufacturing equipment or measuring equipment requiring cleanliness. is there.

Abstract

This method for manufacturing an elongated body is characterized by having been invented in order to manufacture an elongated body having good slipperiness, bendability, and flexibility, with little contamination of the surroundings, the elongated body being constituted from a plurality of electric wires and/or tubes, a coating layer comprising at least an intermediate layer and an outermost layer, a resin film having a density ρ1 of 0.2 g/cm3 to 1.8 g/cm3, and a value PV1, which is a surface PV value, of 5 µm or more, being used in the intermediate layer, and a resin film having a density ρ2 of 1.2 g/cm3 to 2.5 g/cm3 being used in the outermost layer, the method including at least a step for coating the elongated body with the coating layer, and a step for securing the position of the plurality of electric wires and/or tubes, a value PV2, which is the PV value of the surface of the outermost layer, satisfying formulae (1) and (3) when being equal to or less than 5 µm, and satisfying formula (2) and (3) when PV2 is greater than 5 µm. PV1 – PV2 ≥ 2 µm (1) PV2 – PV1 ≥ 0 µm (2) ρ2 – ρ1 ≥ 0.1 g/cm3 (3)

Description

長尺体の製造方法Manufacturing method of long body
  本発明は、電線、チューブなどで構成される長尺体とその製造方法に関する。 The present invention relates to a long body composed of an electric wire, a tube, and the like, and a method of manufacturing the same.
  工作機械などの可動部と固定部とを電気的に接続するために、複数本の電線、チューブなどを平坦状に並列したフラットケーブルや撚り合せたラウンドケーブルが用いられる。このフラットケーブルやラウンドケーブルは、外部からの応力による摩擦あるいは腐食などから保護するために、ケーブルの外周に被覆層が設けられる。一般に、このようなケーブルには柔軟性が求められることが多く、被覆層の材料としてポリ塩化ビニル(PVC)やウレタン、オレフィン系樹脂が使用される。しかし、これらの樹脂には難燃剤や可塑剤、酸化防止剤などの添加剤が配合されており、半導体や有機ELの製造装置におけるクリーンルームなどで使用される場合には、添加剤のブリードアウトなどによる汚染が問題となる。 (4) In order to electrically connect a movable part and a fixed part of a machine tool or the like, a flat cable in which a plurality of wires, tubes, and the like are arranged in a flat shape or a twisted round cable is used. This flat cable or round cable is provided with a coating layer on the outer periphery of the cable in order to protect the cable from friction or corrosion due to external stress. Generally, such a cable often requires flexibility, and polyvinyl chloride (PVC), urethane, or an olefin-based resin is used as a material of the coating layer. However, these resins contain additives such as flame retardants, plasticizers, and antioxidants, and when used in clean rooms in semiconductor and organic EL manufacturing equipment, bleed-out of additives etc. Contamination is a problem.
可塑剤などを含まないクリーン性、滑り性、耐熱性、不燃性、耐薬品性、または低誘電率であるなどの電気的特性のすぐれた特性から、ポリテトラフルオロエチレン(PTFE)などのフッ素樹脂が被覆層の材料として用いられる。特許文献1(特開2006-19125号公報)には、耐熱性、耐薬品性などの耐環境特性に優れるとともに、優れた屈曲自在性、可とう性、あるいは柔軟性を有すると共に、良好な滑り性を有する平坦状ケーブルとして、被覆層にPTFEシートあるいは多孔質PTFEシートを用いた平坦状ケーブルが開示されている。 Fluororesin such as polytetrafluoroethylene (PTFE) because of its excellent electrical properties such as cleanliness, slipperiness, heat resistance, nonflammability, chemical resistance, and low dielectric constant without plasticizers Is used as a material for the coating layer. Patent Document 1 (Japanese Patent Application Laid-Open No. 2006-19125) discloses that, while having excellent environmental resistance properties such as heat resistance and chemical resistance, it has excellent flexibility, flexibility, or flexibility, and good sliding. As a flat cable having a property, a flat cable using a PTFE sheet or a porous PTFE sheet for a coating layer is disclosed.
  本発明は、上記の点に鑑みてなされたもので、その目的は、良好な滑り性、屈曲性、柔軟性を有するとともに、周囲への汚染が少ない長尺体の製造方法を提供することである。 The present invention has been made in view of the above points, and an object of the present invention is to provide a method for producing a long body having good slipperiness, flexibility, and flexibility, and having less contamination to the surroundings. is there.
  上記の課題は、本発明の製造方法によって製造された長尺体によって解決される。すなわち、被覆層で被覆された長尺体の製造方法であって、該長尺体は、複数本の、電線及び/又はチューブから少なくとも構成され、該被覆層は、少なくとも中間層と最外層とからなり、
該中間層には、密度ρ1が0.2g/cm以上1.8g/cm以下、かつ、表面のPeak-to-Valley値であるPV1が5μm以上の樹脂膜が使用され、該最外層には、密度ρ2が1.2g/cm以上2.5g/cm以下の樹脂膜が使用され、少なくとも、該長尺体を該被覆層で被覆する工程、及び、該複数本の、電線及び/又はチューブの位置を固定する工程を含み、該最外層の表面のPeak-to-Valley値であるPV2が5μm以下のとき以下の式(1)および式(3)を満たし、PV2が5μmより大きいとき以下の式(2)および式(3)を満たすことを特徴とする、被覆層で被覆された長尺体の製造方法によって製造された長尺体である。
PV1-PV2≧2 μm  (1)
PV2-PV1>0 μm  (2)
ρ2-ρ1≧0.1 g/cm  (3)
The above object is solved by a long body manufactured by the manufacturing method of the present invention. That is, a method for producing a long body covered with a coating layer, wherein the long body is at least composed of a plurality of wires and / or tubes, and the coating layer has at least an intermediate layer and an outermost layer. Consisting of
As the intermediate layer, a resin film having a density ρ1 of 0.2 g / cm 3 or more and 1.8 g / cm 3 or less and a peak-to-valley value PV1 of 5 μm or more is used. A resin film having a density ρ2 of 1.2 g / cm 3 or more and 2.5 g / cm 3 or less is used, and at least a step of coating the elongated body with the coating layer; And / or fixing the position of the tube, and when PV2 which is the Peak-to-Valley value of the surface of the outermost layer is 5 μm or less, the following formulas (1) and (3) are satisfied, and PV2 is 5 μm A long body manufactured by a method for manufacturing a long body covered with a coating layer, characterized by satisfying the following formulas (2) and (3) when larger.
PV1-PV2 ≧ 2 μm (1)
PV2-PV1> 0 μm (2)
ρ2-ρ1 ≧ 0.1 g / cm 3 (3)
また、好ましくは、上記中間層が、多孔構造を有するものである。多孔構造を有していることで、長尺体が屈曲するときに中間層の空孔が変形することで負荷を緩和し、高い柔軟性を与える。本発明でいう中間層とは、被覆層の中で最大の厚さを有するものを指す。 Preferably, the intermediate layer has a porous structure. By having a porous structure, when the long body is bent, the pores in the intermediate layer are deformed, thereby reducing the load and providing high flexibility. The intermediate layer referred to in the present invention refers to a coating layer having the largest thickness among the coating layers.
また、好ましくは、上記被覆層が、さらに機能層を備えている。最外層と中間層の少なくとも一方をフッ素樹脂などで構成した場合には相手材料との接着性が小さい場合が多く、接着層を設けると被覆層の耐久性が向上し有用である。接着層には最外層を構成する樹脂膜または中間層を構成する樹脂膜よりも融点が低い熱溶融性樹脂などを用いることができる。 Preferably, the coating layer further includes a functional layer. When at least one of the outermost layer and the intermediate layer is made of a fluororesin or the like, the adhesiveness to the mating material is often low, and providing an adhesive layer is useful because the durability of the coating layer is improved. For the adhesive layer, a resin film constituting the outermost layer or a heat-meltable resin having a lower melting point than the resin film constituting the intermediate layer can be used.
  本発明によれば、良好な滑り性、屈曲性、柔軟性を有するとともに、周囲への汚染が少ない長尺体とその製造方法を提供することが可能である。 According to the present invention, it is possible to provide a long body having good slipperiness, flexibility, and flexibility, and having less contamination to the surroundings, and a method for manufacturing the same.
図1は、本発明の製造方法で作成した長尺体の一例の模式図であり、長尺体の断面図である。FIG. 1 is a schematic view of an example of a long body produced by the manufacturing method of the present invention, and is a cross-sectional view of the long body. 図2は、図1の長尺体の被覆層のA部分の拡大断面図である。FIG. 2 is an enlarged cross-sectional view of a portion A of the elongated body covering layer in FIG. 図3は、長尺体の被覆層部分の拡大断面図である。FIG. 3 is an enlarged cross-sectional view of the covering layer portion of the long body. 図4は、本発明の製造方法で作成した長尺体の別の一例の模式図であり、長尺体の断面図である。FIG. 4 is a schematic view of another example of the elongated body produced by the manufacturing method of the present invention, and is a cross-sectional view of the elongated body. 図5は、本発明におけるPeak-to-Valley値を説明する図である。FIG. 5 is a diagram for explaining the Peak-to-Valley value in the present invention.
 以下、本発明の好ましい実施の形態について図面を参照して説明する。以下に説明する実施形態は特許請求の範囲に係る発明を限定するものではなく、また実施形態の中で説明されている特徴の組み合わせの全てが本発明の成立に必須であるとは限らない。 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. The embodiments described below do not limit the claimed invention, and not all combinations of the features described in the embodiments are necessarily essential for the achievement of the present invention.
 図1は、本発明の製造方法によって作成される長尺体の一例であり、フラット形状の長尺体100の断面の模式図である。長尺体100は、被覆対象物として、複数本の、電線、チューブ、またはその両方を準備し、並置あるいは互いに平行に配列して構成する。図1に示した長尺体の一例では被覆対象物の芯数は5本だが、この芯数に限るものではない。被覆対象物の両側(図1では上下方向)を挟むように被覆層110が配置されているとともに、被覆層110が被覆対象物を介して接合する部分、すなわちウェブ部分111は、被覆層110同士が焼結または融着して結合している。被覆層110の結合により、長尺体100の個々の被覆対象物の電線及び/又はチューブは、所定位置に保持、固定される。 FIG. 1 is an example of a long body produced by the manufacturing method of the present invention, and is a schematic diagram of a cross section of a flat long body 100. The elongated body 100 is prepared by preparing a plurality of electric wires, tubes, or both as objects to be coated, and juxtaposed or arranged in parallel with each other. In the example of the elongated body shown in FIG. 1, the number of cores of the object to be coated is five, but is not limited to this number. The coating layer 110 is arranged so as to sandwich both sides (in the vertical direction in FIG. 1) of the object to be coated, and the portion where the coating layer 110 is bonded via the object to be coated, that is, the web portion 111 is formed of Are bonded by sintering or fusion. By the coupling of the coating layer 110, the electric wires and / or tubes of the individual objects to be coated of the elongated body 100 are held and fixed at predetermined positions.
 図1に示した本発明の製造方法によって作成される長尺体の一例では、被覆対象物として、電線、チューブ、またはその両方を複数本並列したものを用いる。被覆対象物120は、ここでは1本のFEP電線である。130は、ここでは1本のPFA電線である。140は、ここでは2本のFEP電線を平行に並べた2芯平行ケーブルである。150は、ここでは4本のPFA電線を撚り合わせたケーブルである。160は、ここでは1本のFEPチューブである。これら120から160の被覆対象物は、並列に配置され、その上下に、被覆層110が配置されている。図1に示した実施形態では被覆対象物が5本だが、この本数に限るものではなく、また、被覆対象物として用いられるのは、単線の被覆導体、2心並行ケーブル、複数本のケーブルを撚り合せたもの、同軸ケーブル、チューブなど、必要とされる機能に合わせて選択することが可能である。 で は In an example of the elongated body produced by the manufacturing method of the present invention shown in FIG. 1, an object to be covered is one in which a plurality of electric wires, tubes, or both are arranged in parallel. The coating target 120 is one FEP electric wire here. 130 is one PFA electric wire here. Reference numeral 140 denotes a two-core parallel cable in which two FEP electric wires are arranged in parallel. Reference numeral 150 denotes a cable in which four PFA electric wires are twisted. 160 is one FEP tube here. These coating objects 120 to 160 are arranged in parallel, and a coating layer 110 is arranged above and below them. In the embodiment shown in FIG. 1, the number of objects to be covered is five, but the number of objects to be covered is not limited to this, and the objects to be covered are a single-wire covered conductor, a two-core parallel cable, and a plurality of cables. It can be selected according to the required function, such as a twisted cable, a coaxial cable, and a tube.
図1に示した本発明の製造方法によって作成される長尺体の別の一例として、被覆対象物として、1本の電線と1本のチューブの構成もある。 As another example of the elongated body produced by the manufacturing method of the present invention shown in FIG. 1, there is also a configuration of one electric wire and one tube as an object to be covered.
 図2は、図1の長尺体の被覆層110の部分Aの拡大断面図である。被覆層110は、少なくとも中間層112と最外層113とから構成される。 FIG. 2 is an enlarged cross-sectional view of the portion A of the elongated covering layer 110 of FIG. The coating layer 110 includes at least an intermediate layer 112 and an outermost layer 113.
中間層112には密度ρ1が0.2g/cm以上1.8g/cm以下の樹脂膜を使用する。中間層112を構成する樹脂膜の表面のPV1は5μm以上である。中間層112を構成する樹脂は、ポリテトラフルオロエチレン(PTFE)、テトラフルオロエチレン‐パーフルオロアルキルビニルエーテル共重合体(PFA)、テトラフルオロエチレン‐ヘキサフルオロプロピレン共重合体(FEP)、ポリフッ化ビニリデン(PVDF)などのフッ素樹脂、ポリエチレン(PE)などのポリオレフィン樹脂などを使用することが好ましい。 As the intermediate layer 112, a resin film having a density ρ1 of 0.2 g / cm 3 or more and 1.8 g / cm 3 or less is used. PV1 on the surface of the resin film constituting the intermediate layer 112 is 5 μm or more. The resin constituting the intermediate layer 112 is polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkylvinylether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), polyvinylidene fluoride ( It is preferable to use a fluororesin such as PVDF) or a polyolefin resin such as polyethylene (PE).
先述のように、中間層112には密度ρ1が0.2g/cm以上1.8g/cm以下の樹脂膜を使用することが好ましく、0.3g/cm以上1.3g/cm以下であることがより好ましく、0.4g/cm以上1.0g/cm以下であることが特に好ましい。例えばポリテトラフルオロエチレン(PTFE)やポリエチレン(PE)樹脂は、その加工条件により、密度を制御することが可能である。これらの樹脂は、延伸することにより多孔構造とすることができるため、密度を小さくするためにはシート状に成形後、加熱しながら延伸することで、複数のフィブリルとフィブリル間の空孔とで構成される多孔構造とすることができる。基本的には延伸率を高くすることで密度は小さくなる。1方向からの延伸である1軸延伸法で延伸する場合、複数の連続したノードが存在し、物理的強度が高い樹脂膜とすることができる。2方向からの延伸である2軸延伸法で延伸する場合、より低密度の樹脂膜とすることが可能であり、柔軟性がさらに高くなる。また、成形後のシートを焼成する焼成温度、焼成時間を調整し、完全焼成、半焼成、または未焼成として焼成の状態を調整することでも密度を制御することが可能である。また、樹脂膜の押出成形時に発泡させて多孔構造としたもの、樹脂と溶剤を高温で混合した後に降温して2層に分離させて多孔構造としたものなどを用いることもできる。 As described above, it is preferable to use a resin film having a density ρ1 of 0.2 g / cm 3 or more and 1.8 g / cm 3 or less for the intermediate layer 112, and 0.3 g / cm 3 or more and 1.3 g / cm 3. It is more preferably at most 0.4 g / cm 3 and at most 1.0 g / cm 3 . For example, the density of polytetrafluoroethylene (PTFE) or polyethylene (PE) resin can be controlled by the processing conditions. Since these resins can be formed into a porous structure by stretching, in order to reduce the density, after forming into a sheet, by stretching while heating, a plurality of fibrils and pores between the fibrils are formed. It can be configured as a porous structure. Basically, the density is reduced by increasing the stretching ratio. In the case of stretching by a uniaxial stretching method which is stretching from one direction, a resin film having a plurality of continuous nodes and having high physical strength can be obtained. When stretching is performed by a biaxial stretching method that is stretching from two directions, a resin film having a lower density can be obtained, and flexibility is further increased. The density can also be controlled by adjusting the firing temperature and firing time for firing the formed sheet, and adjusting the firing state to be completely fired, semi-fired, or not fired. Further, a resin film having a porous structure by foaming at the time of extrusion molding, or a resin film having a porous structure formed by mixing a resin and a solvent at a high temperature and then lowering the temperature to separate into two layers may be used.
最外層113には、密度ρ2が1.2g/cm以上2.5g/cm以下の樹脂膜を使用する。
最外層113に使用する樹脂は、PTFEや、テトラフルオロエチレン‐パーフルオロアルキルビニルエーテル共重合体(PFA)、テトラフルオロエチレン‐ヘキサフルオロプロピレン共重合体(FEP)、テトラフルオロエチレン‐エチレン共重合体(ETFE)、ポリクロロトリフルオロエチレン(PCTFE)などのようなフッ素樹脂、ポリエーテルエーテルケトン(PEEK)、ポリイミド(PI)などのような可塑剤を含まない樹脂であることが好ましい。 一般的には最外層は厚さが5μm~100μmの樹脂膜が用いられる。
For the outermost layer 113, a resin film having a density ρ2 of 1.2 g / cm 3 or more and 2.5 g / cm 3 or less is used.
The resin used for the outermost layer 113 is PTFE, tetrafluoroethylene-perfluoroalkylvinylether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), or tetrafluoroethylene-ethylene copolymer ( It is preferably a resin containing no plasticizer, such as a fluororesin such as ETFE) or polychlorotrifluoroethylene (PCTFE), or a polyetheretherketone (PEEK) or polyimide (PI). Generally, a resin film having a thickness of 5 μm to 100 μm is used for the outermost layer.
最外層113を構成する樹脂膜の表面のPV2が5μm以下のとき、中間層112を構成する樹脂膜の表面のPV1と最外層113を構成する樹脂膜の表面のPV2とがPV1-PV2≧2μmの関係を満たすと同時に、最外層を構成する樹脂膜の密度ρ2と中間層112を構成する樹脂膜の密度ρ1とがρ2-ρ1≧0.1g/cmの関係を満たす樹脂膜を使用する。また、最外層113を構成する樹脂膜の表面のPV2が5μmより大きいとき、最外層113には、PV1とPV2とがPV2-PV1>0μmの関係を満たすと同時に、最外層を構成する樹脂膜の密度ρ2と中間層112を構成する樹脂膜の密度ρ1とがρ2-ρ1≧0.1 g/cmの関係を満たす樹脂膜を使用する。本発明の製造方法で作られる長尺体の表面のPV2がちょうど5μmのところで、本発明に適したPV1とPV2の関係が切り替わる。ここで、ρ2-ρ1≧0.3g/cm以上のときが好ましく、ρ2-ρ1≧1.0g/cm以上のときが更に好ましい。 When PV2 on the surface of the resin film forming the outermost layer 113 is 5 μm or less, PV1 on the surface of the resin film forming the intermediate layer 112 and PV2 on the surface of the resin film forming the outermost layer 113 are PV1−PV2 ≧ 2 μm. And a resin film in which the density ρ2 of the resin film forming the outermost layer and the density ρ1 of the resin film forming the intermediate layer 112 satisfy the relationship of ρ2−ρ1 ≧ 0.1 g / cm 3. . Further, when the surface PV2 of the resin film constituting the outermost layer 113 is larger than 5 μm, the outermost layer 113 has PV1 and PV2 satisfying the relationship of PV2−PV1> 0 μm, and at the same time, the resin film constituting the outermost layer. Is used, the density ρ2 of the intermediate layer 112 and the density ρ1 of the resin film constituting the intermediate layer 112 satisfy a relationship of ρ2−ρ1 ≧ 0.1 g / cm 3 . The relationship between PV1 and PV2 suitable for the present invention is switched when PV2 on the surface of the elongated body made by the manufacturing method of the present invention is exactly 5 μm. Here, the case where ρ2-ρ1 ≧ 0.3 g / cm 3 or more is preferable, and the case where ρ2-ρ1 ≧ 1.0 g / cm 3 or more is more preferable.
本発明の製造方法で作られる長尺体は、前述の構成により、本発明の課題を解決することが可能である。高い柔軟性を持ちながら、被覆層表面に付着残留する異物の付着を低減することが可能であり、ケーブルのハンドリング、アセンブリや装置への取り付け工程、装置稼働時などに付着する微量の油分、周囲のパーティクル、薬品の付着、周囲の空気中の水分などの異物が付着しにくく、また、除去しやすい。そのため、クリーン環境に置かれたときに、周囲のものへの汚染が少なく、アウトガスや長尺体自身の摩耗による粉塵などの発生が少なく、周囲を汚染しない長尺体とすることができる。 The long object manufactured by the manufacturing method of the present invention can solve the problem of the present invention by the above-described configuration. While having high flexibility, it is possible to reduce the adhesion of foreign substances remaining on the surface of the coating layer, and it is possible to handle a small amount of oil and surroundings during cable handling, assembly and installation processes, equipment operation, etc. Foreign substances such as particles, chemicals, and moisture in the surrounding air are difficult to adhere to and are easily removed. Therefore, when placed in a clean environment, there is little contamination to surroundings, and there is little generation of dust and the like due to outgassing and wear of the long body itself, so that a long body that does not pollute the surroundings can be obtained.
 図3は、本発明の製造方法によって作成される長尺体の被覆層の別の一例を示している。被覆層には、中間層と最外層に加えて機能層を設けることができる。被覆層110aは、中間層112aと最外層113aの間に接着層114 aを配置しており、中間層112aと最外層113aとの接着力を高めて、長尺体を摺動させたときの被覆層110aの耐久性を高めている。また、中間層112aの最外層113a側と反対側の面にもう1層の接着層114aを配置しており、被覆層110a同士を接合させるときに、中間層112aを構成する樹脂膜または最外層113aを構成する樹脂膜の融点よりも低い温度で接合、一体化させることができる。 中間層112aを構成する樹脂膜と最外層113aを構成する樹脂膜への影響が少ない温度で接合させることができるので、被覆層110aの高い機能を保持することができ、高い耐久性が得られる。接着層には、熱溶融性のフッ素樹脂、ポリエチレンなどのオレフィン樹脂などを使用することが可能である。また、接着層以外にも、溶剤バリア性など、長尺体が必要とする機能に合わせて機能層を設けることができる。 FIG. 3 shows another example of the elongated body coating layer formed by the manufacturing method of the present invention. The covering layer may be provided with a functional layer in addition to the intermediate layer and the outermost layer. The covering layer 110a has an adhesive layer 114 # a disposed between the intermediate layer 112a and the outermost layer 113a, and increases the adhesive force between the intermediate layer 112a and the outermost layer 113a to slide the elongated body. The durability of the coating layer 110a is increased. Further, another adhesive layer 114a is disposed on the surface of the intermediate layer 112a opposite to the outermost layer 113a side, and when joining the covering layers 110a, a resin film or an outermost layer constituting the intermediate layer 112a is formed. The bonding and integration can be performed at a temperature lower than the melting point of the resin film constituting the layer 113a. Since the resin film constituting the intermediate layer 112a and the resin film constituting the outermost layer 113a can be joined at a temperature at which the influence is small, the high function of the covering layer 110a can be maintained and high durability can be obtained. . For the adhesive layer, it is possible to use a heat-meltable fluororesin or an olefin resin such as polyethylene. In addition to the adhesive layer, a functional layer can be provided in accordance with the function required by the elongated body, such as a solvent barrier property.
 図4は、本発明の実施形態の一例のラウンド形状の長尺体の断面図である。長尺体200の被覆層210は、最外層211と中間層212及び接着層213とで構成している。被覆対象物として、電線、チューブ、またはその両方を、1本または複数本を撚り合わせるなどしたものを、さらに撚り合わせて用いる。220は、ここでは1本のFEP電線である。230は、ここでは7本のPFA電線を撚り合わせたケーブルである。240は、ここでは2本のFEP電線を撚り合わせたケーブルである。250は、ここでは1本のPFA電線である。260と270は、ここでは1本のナイロンチューブ、280は、ここではすずメッキ軟銅線(ドレイン線)である。これら220から280が撚り合わされ、その外周に被覆層210が巻回されて配置される。巻回後、加熱することでテープの重なり部分を結合する。被覆層210の結合により、長尺体200の個々の被覆対象物の電線及び/又はチューブは、所定位置に保持、固定される。被覆対象物とする電線、チューブの構成と本数はここで示した例に限定されるものではなく、1本、または複数本の電線を撚り合せたもの、平行に引きそろえたものでもよい。また、撚り合わせた電線の一部をチューブで構成してもよい。 FIG. 4 is a cross-sectional view of a round elongated body according to an example of the embodiment of the present invention. The covering layer 210 of the elongated body 200 includes an outermost layer 211, an intermediate layer 212, and an adhesive layer 213. As the object to be coated, one or more of an electric wire, a tube, or both of them are twisted and used. 220 is one FEP electric wire here. Reference numeral 230 denotes a cable in which seven PFA electric wires are twisted. 240 is a cable in which two FEP electric wires are twisted in this case. Reference numeral 250 denotes one PFA electric wire here. Here, 260 and 270 are a single nylon tube, and 280 is a tinned annealed copper wire (drain wire). These 220 to 280 are twisted, and the coating layer 210 is wound around the outer periphery thereof. After winding, the overlapping portions of the tape are joined by heating. By the connection of the coating layer 210, the electric wires and / or tubes of the individual objects to be coated of the elongated body 200 are held and fixed at predetermined positions. The configuration and number of electric wires and tubes to be coated are not limited to the examples shown here, and one or a plurality of electric wires may be twisted or may be arranged in parallel. Further, a part of the twisted electric wire may be constituted by a tube.
本発明を、下記の実施例でより詳細に説明する。以下に説明する実施例は特許請求の範囲に係る発明を限定するものではない。 The present invention is described in more detail in the following examples. The embodiments described below do not limit the invention according to the claims.
<Peak-to-Valley値(PV)の測定>
 測定には、Zygo社製 白色干渉顕微鏡 New  view 6300を使用した。 光源は白色LEDが使用され、表面フィルター処理にはガウシアンフィルタを適用した。高さ方向の測定分解能は0.1nmである。観察倍率を50倍とし、高周波側のカットオフ周波数(Filter High Wavelength) は、0.00250mm、低周波側のカットオフ周波数(Filter Low Wavelength)は、0.80000mmに設定した。表面の形状を測定し、Peak-to-Valley値(PV)を算出した。測定データの解析には解析ソフトMetroProを使用した。図5は本発明におけるPVを説明する図であり、測定で得られるsurface profileのデータの一例を用いて表したものである。図5に示すように、PVとは、測定面の中で最も高いポイントと最も低いポイントの高さ方向の距離のことをいう。
<密度ρの測定>
JIS K 6301の水中置換法に準じて、東洋精機製作所製 DENSIMETER  Hによって室温で測定された比重を、密度として採用した。
<クリーン性の評価>
長尺体の異物の付着について、異物の難付着性と、易除去性を評価した。難付着性と、易除去性は、インクを表面に塗布し付着状況を確認し、綿布でふき取ったときに残留するインク成分の量を確認した。インク成分の付着状況とインク残留量を5段階で評価した。インク成分が付着しなかったものを5、インク成分がわずかに付着したもののふき取ってインク成分を完全に除去できたものを4、インク成分がわずかに付着し、ふき取った後にもインクの跡がわずかに確認できるものを3、インクが付着し、ふき取った後にもインクの跡が確認できるものを2、インクが付着し、ふき取った後にもインクがほとんど除去できないものを1とした。
<Measurement of Peak-to-Valley value (PV)>
For the measurement, a white interference microscope New view 6300 manufactured by Zygo was used. A white LED was used as a light source, and a Gaussian filter was applied for surface filtering. The measurement resolution in the height direction is 0.1 nm. The observation magnification was set to 50 times, the cutoff frequency on the high frequency side (Filter High Wavelength) was set to 0.00250 mm, and the cutoff frequency on the low frequency side (Filter Low Wavelength) was set to 0.80000 mm. The shape of the surface was measured, and a Peak-to-Valley value (PV) was calculated. Analysis software MetroPro was used for the analysis of the measurement data. FIG. 5 is a diagram for explaining a PV in the present invention, and is shown using an example of surface profile data obtained by measurement. As shown in FIG. 5, PV refers to the distance in the height direction between the highest point and the lowest point on the measurement surface.
<Measurement of density ρ>
The specific gravity measured at room temperature by DENSIMETER H manufactured by Toyo Seiki Seisakusho in accordance with the underwater replacement method of JIS K 6301 was adopted as the density.
<Evaluation of cleanliness>
Regarding the adhesion of the foreign matter to the long body, the poor adhesion of the foreign matter and the ease of removal were evaluated. For the hard adhesion and easy removal, the ink was applied to the surface, the adhesion was checked, and the amount of the ink component remaining when the ink was wiped off with a cotton cloth was checked. The adhesion state of the ink components and the remaining amount of the ink were evaluated on a five-point scale. The ink component did not adhere to 5, the ink component adhered slightly, and the ink component was completely removed by wiping, and the ink component was completely removed. The sample was identified as 3, the ink was attached, and the trace of the ink was confirmed even after wiping, and 2 was the sample where the ink was attached and the ink was hardly removed even after wiping.
[実施例1]
最外層としてPTFE樹脂膜を、その内側にくる中間層として別のPTFE 樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表1に記載した。
次に、2つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表1に記載した。
[実施例2]
最外層としてPTFE樹脂膜を、その内側にくる接着層として厚さ0.02μmのFEP樹脂膜を、さらにその内側にくる中間層として別のPTFE樹脂膜を、さらにその内側にくる接着層として厚さ0.02μmのFEP樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表1に記載した。
次に、4つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表1に記載した。
[実施例3]
最外層としてPTFE樹脂膜を、その内側にくる接着層として厚さ0.02μmのFEP樹脂膜を、さらにその内側にくる中間層として別のPTFE樹脂膜を、さらにその内側にくる接着層として厚さ0.02μmのFEP樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表1に記載した。
次に、4つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表1に記載した。
[実施例4]
最外層としてFEP樹脂膜を、その内側にくる中間層としてPTFE樹脂膜を、さらにその内側にくる接着層として厚さ0.02μmのFEP樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表1に記載した。
次に、3つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物として4本のPFA電線を撚り合せたケーブルを1本および4本のFEP電線を撚り合せたものを準備した。その外周に、被覆層が2重に重なるように巻回して配置し、加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表1に記載した。
[実施例5]
最外層としてPEEK樹脂膜を、その内側にくる中間層としてPTFE樹脂膜を、さらにその内側にくる接着層として厚さ0.02μmのFEP樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表1に記載した。
次に、3つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表1に記載した。
[実施例6]
最外層としてPTFE樹脂膜を、その内側にくる中間層としてPE樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表1に記載した。
次に、2つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表1に記載した。
[実施例7]
最外層としてPTFE樹脂膜を、その内側にくる中間層として別のPTFE樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表2に記載した。
次に、2つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表2に記載した。
[実施例8]
最外層としてFEP樹脂膜を、その内側にくる中間層としてPTFE樹脂膜を、さらにその内側にくる接着層として厚さ0.02μmのFEP樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表2に記載した。
次に、3つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表2に記載した。
[実施例9]
最外層としてPTFE樹脂膜を、その内側にくる中間層として別のPTFE樹脂膜を、その内側にくる接着層として厚さ0.02μmのFEP樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表2に記載した。
次に、3つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物として4本のPFA電線を撚り合せたケーブルを1本および4本のFEP電線を撚り合せたものを準備した。その外周に、被覆層が2重に重なるように巻回して被覆し、加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表2に記載した。
[実施例10]
最外層としてPTFE樹脂膜を、その内側にくる接着層として厚さ0.02mmのFEP樹脂膜を、さらにその内側にくる中間層として別のPTFE樹脂膜を、さらに内側にくる接着層として厚さ0.02mmのFEP樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表2に記載した。
次に、4つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表2に記載した。
[実施例11]
最外層としてPEEK樹脂膜を、その内側にくる中間層としてPTFE樹脂膜を、さらにその内側にくる接着層として厚さ0.02mmのFEP樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表2に記載した。
次に、3つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表2に記載した。
[実施例12]
最外層としてPTFE樹脂膜を、その内側にくる中間層としてPE樹脂膜を使用した。樹脂膜は所要の幅にカットして準備した。最外層および中間層のそれぞれの樹脂膜の厚さ、PVおよび密度を測定した。その結果を表2に記載した。
次に、2つの樹脂膜を積層して加熱し、被覆層を作成した。被覆対象物の準備としてFEP電線1本、FEP電線1本、4本のPFA電線を撚り合せたケーブルを1本、2本のPFA電線を撚り合せたケーブルを1本およびFEPチューブ1本を横に並べた。並べた被覆対象物の上下に、被覆層を配置し、ウェブ部分を加熱して個々の被覆対象物の位置を固定し、長尺体を作成した。
 クリーン性の評価結果を表2に記載した。
[Example 1]
A PTFE resin film was used as the outermost layer, and another PTFE resin film was used as an intermediate layer inside the PTFE resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
Next, two resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
The evaluation results of the cleanness are shown in Table 1.
[Example 2]
A PTFE resin film as an outermost layer, a 0.02 μm-thick FEP resin film as an inner adhesive layer, another PTFE resin film as an intermediate layer further inside, and a further PTFE resin film as an inner adhesive layer. An FEP resin film having a thickness of 0.02 μm was used. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
Next, the four resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
The evaluation results of the cleanness are shown in Table 1.
[Example 3]
A PTFE resin film as an outermost layer, a 0.02 μm-thick FEP resin film as an inner adhesive layer, another PTFE resin film as an intermediate layer further inside, and a further PTFE resin film as an inner adhesive layer. An FEP resin film having a thickness of 0.02 μm was used. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
Next, the four resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
The evaluation results of the cleanness are shown in Table 1.
[Example 4]
An FEP resin film was used as the outermost layer, a PTFE resin film was used as an intermediate layer inside the FEP resin film, and a 0.02 μm-thick FEP resin film was used as an adhesive layer inside the FEP resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
Next, three resin films were laminated and heated to form a coating layer. As an object to be coated, a cable in which four PFA electric wires were twisted together and one in which four FEP electric wires were twisted were prepared. The coating layer was wound around the outer periphery so as to overlap doubly, and heated to fix the position of each object to be coated, thereby producing a long body.
The evaluation results of the cleanness are shown in Table 1.
[Example 5]
A PEEK resin film was used as an outermost layer, a PTFE resin film was used as an intermediate layer inside the PEEK resin film, and a 0.02 μm-thick FEP resin film was used as an adhesive layer inside the PEEK resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
Next, three resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
The evaluation results of the cleanness are shown in Table 1.
[Example 6]
A PTFE resin film was used as an outermost layer, and a PE resin film was used as an intermediate layer inside the PTFE resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 1.
Next, two resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
The evaluation results of the cleanness are shown in Table 1.
[Example 7]
A PTFE resin film was used as the outermost layer, and another PTFE resin film was used as an intermediate layer inside the PTFE resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2.
Next, two resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
Table 2 shows the evaluation results of the cleanliness.
Example 8
An FEP resin film was used as the outermost layer, a PTFE resin film was used as an intermediate layer inside the FEP resin film, and a 0.02 μm-thick FEP resin film was used as an adhesive layer inside the FEP resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2.
Next, three resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
Table 2 shows the evaluation results of the cleanliness.
[Example 9]
A PTFE resin film was used as an outermost layer, another PTFE resin film was used as an intermediate layer inside the PTFE resin film, and a 0.02 μm-thick FEP resin film was used as an adhesive layer inside the PTFE resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2.
Next, three resin films were laminated and heated to form a coating layer. As an object to be coated, a cable in which four PFA electric wires were twisted together and one in which four FEP electric wires were twisted were prepared. The outer periphery was wound and coated so that the coating layer overlapped twice, and heated to fix the position of each object to be coated, thereby producing a long body.
Table 2 shows the evaluation results of the cleanliness.
[Example 10]
A PTFE resin film as the outermost layer, a 0.02 mm-thick FEP resin film as an inner adhesive layer, another PTFE resin film as an intermediate layer further inside, and a further inner thickness adhesive layer. A 0.02 mm FEP resin film was used. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2.
Next, the four resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP electric wire, one FEP electric wire, one cable in which four PFA electric wires are twisted, one cable in which two PFA electric wires are twisted, and one FEP tube in a horizontal direction. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
Table 2 shows the evaluation results of the cleanliness.
[Example 11]
A PEEK resin film was used as the outermost layer, a PTFE resin film was used as an intermediate layer inside the PEEK resin film, and a 0.02 mm thick FEP resin film was used as an adhesive layer inside the PEEK resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2.
Next, three resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP wire, one FEP wire, one cable in which four PFA wires are twisted, one cable in which two PFA wires are twisted, and one FEP tube are placed horizontally. Arranged. A coating layer was arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
Table 2 shows the evaluation results of the cleanliness.
[Example 12]
A PTFE resin film was used as an outermost layer, and a PE resin film was used as an intermediate layer inside the PTFE resin film. The resin film was prepared by cutting to a required width. The thickness, PV, and density of each of the resin films of the outermost layer and the intermediate layer were measured. The results are shown in Table 2.
Next, two resin films were laminated and heated to form a coating layer. In preparation for the object to be covered, one FEP wire, one FEP wire, one cable in which four PFA wires are twisted, one cable in which two PFA wires are twisted, and one FEP tube are placed horizontally. Arranged. Coating layers were arranged above and below the arranged coating objects, and the web portion was heated to fix the position of each coating object, thereby producing a long body.
Table 2 shows the evaluation results of the cleanliness.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
 
 各実施例は、屈曲性、柔軟性が良好でありクリーン性が高く、長尺体の被覆層自身から発生する汚染物質も少なく、周囲への汚染が少ない良好な結果が得られた。
 
Figure JPOXMLDOC01-appb-T000002

In each of the examples, good results were obtained in which the flexibility and flexibility were good, the cleanliness was high, the contaminants generated from the long coating layer itself were small, and the surroundings were less contaminated.
 本発明の長尺体は、良好な滑り性、屈曲性、柔軟性を有するとともに、周囲への汚染が少ないため、クリーン性が要求される半導体製造装置や測定機器などに使用することが可能である。 The elongated body of the present invention has good slipperiness, flexibility, and flexibility, and has little contamination to the surroundings, so that it can be used for semiconductor manufacturing equipment or measuring equipment requiring cleanliness. is there.
100 長尺体(フラット形状)、 110 被覆層、 112 中間層、 113 最外層、200 長尺体(ラウンド形状)、 210 被覆層  100 mm long body (flat shape), {110} covering layer, {112} intermediate layer, {113} outermost layer, 200 mm long body (round shape), {210} covering layer}
特開2006-19125号公報JP 2006-19125 A

Claims (3)

  1.  被覆層で被覆された長尺体の製造方法であって、該長尺体は、複数本の、電線及び/又はチューブから少なくとも構成され、該被覆層は、少なくとも中間層と最外層とからなり、
    該中間層には、密度ρ1が0.2g/cm以上1.8g/cm以下、かつ、表面のPeak-to-Valley値であるPV1が5μm以上の樹脂膜が使用され、該最外層には、密度ρ2が1.2g/cm以上2.5g/cm以下の樹脂膜が使用され、少なくとも、該長尺体を該被覆層で被覆する工程、及び、該複数本の、電線及び/又はチューブの位置を固定する工程を含み、該最外層の表面のPeak-to-Valley値であるPV2が5μm以下のとき以下の式(1)および式(3)を満たし、PV2が5μmより大きいとき以下の式(2)および式(3)を満たすことを特徴とする、被覆層で被覆された長尺体の製造方法。
    PV1-PV2≧2 μm  (1)
    PV2-PV1>0 μm  (2)
    ρ2-ρ1≧0.1 g/cm  (3)
    A method for producing a long body covered with a coating layer, wherein the long body is constituted by at least a plurality of electric wires and / or tubes, and the covering layer comprises at least an intermediate layer and an outermost layer. ,
    As the intermediate layer, a resin film having a density ρ1 of 0.2 g / cm 3 or more and 1.8 g / cm 3 or less and a peak-to-valley value PV1 of 5 μm or more is used. A resin film having a density ρ2 of 1.2 g / cm 3 or more and 2.5 g / cm 3 or less is used, and at least a step of coating the elongated body with the coating layer; And / or fixing the position of the tube, and when PV2 which is the Peak-to-Valley value of the surface of the outermost layer is 5 μm or less, the following formulas (1) and (3) are satisfied, and PV2 is 5 μm A method for producing a long body covered with a coating layer, characterized by satisfying the following formulas (2) and (3) when larger.
    PV1-PV2 ≧ 2 μm (1)
    PV2-PV1> 0 μm (2)
    ρ2-ρ1 ≧ 0.1 g / cm 3 (3)
  2.   前記中間層は、複数の空孔を含む多孔構造を有することを特徴とする請求項1に記載の被覆層で被覆された長尺体の製造方法。 The method according to claim 1, wherein the intermediate layer has a porous structure including a plurality of pores.
  3. 前記被覆層が、さらに機能層を備えていることを特徴とする請求項1または2に記載の被覆層で被覆された長尺体の製造方法。
     

     
    The method for producing a long body covered with a coating layer according to claim 1 or 2, wherein the coating layer further includes a functional layer.


PCT/JP2019/035757 2018-09-11 2019-09-11 Method for manufacturing elongated body WO2020054778A1 (en)

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CN201980071062.2A CN112955981B (en) 2018-09-11 2019-09-11 Method for producing long body
EP19860038.9A EP3852122B1 (en) 2018-09-11 2019-09-11 Method for manufacturing elongated body

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EP3852122A4 (en) 2022-05-18
CN112955981B (en) 2022-03-29
US11315707B2 (en) 2022-04-26
KR20210057112A (en) 2021-05-20
CN112955981A (en) 2021-06-11
US20220044846A1 (en) 2022-02-10
EP3852122A1 (en) 2021-07-21
EP3852122B1 (en) 2024-02-28

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