WO2020042190A1 - Procédé et dispositif de mesure de topographie de microstructure sur la base d'un codage de spectre de dispersion - Google Patents

Procédé et dispositif de mesure de topographie de microstructure sur la base d'un codage de spectre de dispersion Download PDF

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Publication number
WO2020042190A1
WO2020042190A1 PCT/CN2018/103690 CN2018103690W WO2020042190A1 WO 2020042190 A1 WO2020042190 A1 WO 2020042190A1 CN 2018103690 W CN2018103690 W CN 2018103690W WO 2020042190 A1 WO2020042190 A1 WO 2020042190A1
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WIPO (PCT)
Prior art keywords
dispersion
spectrum
axial
snapshot
spatial light
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PCT/CN2018/103690
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English (en)
Chinese (zh)
Inventor
马锁冬
孙文卿
曾春梅
Original Assignee
苏州大学张家港工业技术研究院
苏州大学
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Application filed by 苏州大学张家港工业技术研究院, 苏州大学 filed Critical 苏州大学张家港工业技术研究院
Priority to PCT/CN2018/103690 priority Critical patent/WO2020042190A1/fr
Publication of WO2020042190A1 publication Critical patent/WO2020042190A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • the present invention relates to a measurement technology of microstructure topography, in particular to a microstructure topography measurement device and method based on dispersion spectrum coding, and belongs to the field of advanced manufacturing and detection.
  • MEMS MEMS
  • DOE Diffractive optical element
  • the complex microstructures formed on the surface of these components by processes such as laser lithography and plasma etching are closely related to the intrinsic characteristics of the components such as residual stress, service life, and damage threshold.
  • the ultra-precision detection of its microstructure and morphology can provide guidance and help for the pre-evaluation and control of the related performance of components.
  • the research on related detection systems and technologies has aroused great interest and widespread attention.
  • optical interference microscopy has become a powerful tool for precise detection of micro-morphology because of its advantages such as full-field non-contact and high accuracy.
  • Traditional solutions usually use a laser with better monochromaticity as the light source, and combined with phase-shifting interferometry, the measurement accuracy can reach sub-nanometer level.
  • the use of single-wavelength lasers has limited its application to the detection of three-dimensional topography of components with complex microstructures (such as steps) on the surface.
  • the white light interference microscopy with a unique position of zero optical path difference can effectively overcome the above problems, its detection requires fine precision along the axial direction with the help of a high-precision micro-displacer (such as Piezoelec trie transducer, PZT) Scanning is implemented.
  • a high-precision micro-displacer such as Piezoelec trie transducer, PZT
  • the entire measurement process is relatively long, and it is easily affected by external air flow disturbances and vibrations. It is only applicable to the detection of static objects, and the structure of the system is more complicated and the detection cost is higher.
  • the detection process of the three-dimensional topography measurement method based on fringe modulation coding is more flexible and controllable, and the system structure is relatively simple.
  • the present invention addresses the shortcomings of the prior art, and provides a non-contact, full-field, non-contact, full-field Apparatus and method for fast (dynamic or even transient) high-precision measurement.
  • the technical solution adopted by the present invention is to provide a microstructure topography measuring device based on dispersion spectrum coding, which includes a broad-spectrum light source, a beam homogenizing coupler, a beam reversing coupler, Spatial light modulator, collimating beam expander lens, beam splitter, axial dispersion type microscope objective, stage, imaging coupling lens, snapshot multi / hyperspectral imaging detector, computer and controller; computer and control respectively
  • the detector is connected to a snapshot multi / hyperspectral imaging detector; the device under test is placed on a stage, and the device under test is spatially conjugated to the spatial light modulator at the center wavelength of the spectral range used in the measurement; Coupler, spatial light modulator, collimating beam expander lens, beam splitter, axial dispersion type microscope objective lens, imaging coupling lens and snapshot multi / hyperspectral imaging detector have a common optical path structure; emitted by a wide-spectrum light source
  • the detector is connected to a snapshot multi / hyperspectral imaging detector
  • the spatial light modulator connected to the front focal plane position of the collimating beam expander lens.
  • the spatial light modulator outputs a spatially-coded complex-colored sine-stripe light field signal, which is then coupled to the collimating beam expander lens by a beam reflex coupler to become parallel light incidence.
  • the beam splitter reflects the parallel polychromatic sinusoidal fringe light into an axial dispersion type microscopic objective lens, outputs a monochromatic sinusoidal fringe light field signal along the axial dispersion, and focuses and shines on the surface of the measured element,
  • Each single-colored sinusoidal fringe light reflected from the measured surface passes through the axial dispersion microscope objective and beam splitter, and is coupled to the snapshot multi / hyperspectral imaging detector through the imaging lens, and the snapshot multi / hyperspectral imaging detection
  • the device transmits the image data acquired synchronously to the computer.
  • the snapshot-type multi / hyperspectral imaging detector described in the present invention is a multi-aperture spectral filter camera, a tunable step grating imager, a spectrally resolved detector array, a computed tomography spectrometer, and a snapshot-type coded aperture spectrometer.
  • the axial dispersion type micro objective lens is a micro objective lens based on an axial diffractive optical element.
  • the spatial light modulator is a digital micromirror device and a silicon-based liquid crystal.
  • the wide-spectrum light source is one of a halogen lamp, a white LED, and a supercontinuum laser.
  • the technical solution of the present invention further includes a microstructure topography measurement method based on dispersion spectrum coding, the steps are as follows:
  • the multi-color light emitted by the wide-spectrum light source is uniformly irradiated to the spatial light modulator via the beam homogenizing coupler and the beam reversing coupler; the spatial light modulator is synchronously controlled to output a spatially-distributed multi-color light signal, and the beam is folded
  • the standard coupler, collimating beam expander, beam splitter, and axial dispersion type micro-objective are irradiated to the standard flat mirror on the stage; the standard flat mirror is driven by the piezoelectric ceramic micro-displacer along the display.
  • the optical axis of the micro-objective lens is scanned in the axial direction, and the optical signal with axial dispersion is reflected into the micro-objective lens and beam splitter, and then received and measured by the spectrometer to obtain the wavelength value of each monochromatic optical signal.
  • the second step is to obtain a dispersion-spectrum-coded image:
  • the test element is placed on the stage, and the position of the stage is adjusted in the axial and radial directions, so that the test element and the spatial light modulator share an object image at the center wavelength in the spectral range used for measurement.
  • Yoke using a spatial light modulator to modulate the spatial light intensity distribution of the incident polychromatic light signal, and output multi-color phase-shifted or single-frame sine fringe pattern light field signals of the complex color according to the measurement needs, and then pass the beam reversal coupler,
  • a collimated beam expander lens, beam splitter, and axial dispersion type microscope objective disperse along the axial direction to the surface of the device under test;
  • a snapshot-type multi / hyperspectral imaging detector cooperates with the controller to collect each reflected by the device under test.
  • Frame axial dispersion sine fringe pattern transmitted to computer for storage and processing;
  • the third step is demodulation of the dispersion-spectrum-encoded image:
  • the computer demodulates the obtained multi-frame phase shift or single-frame dispersion spectrally encoded image, and inverts to obtain Multi-frame phase shift or single frame axial dispersion sinusoidal fringe data cube; using random phase shift algorithm or single frame Fringe map processing algorithms, such as Fourier transform method, windowed Fourier transform method, wavelet transform method, etc., process multi-frame phase shift or single-frame axial dispersion sinusoidal fringe data cubes to obtain the shape of the measured object.
  • random phase shift algorithm or single frame Fringe map processing algorithms such as Fourier transform method, windowed Fourier transform method, wavelet transform method, etc.
  • fringe modulation data cube Gaussian, Gauss-like, or spline model fitting method is used to obtain the "spectrum-modulation" relationship curve of each point on the measured surface, and the modulation of each monochrome sinusoidal fringe using axial dispersion It changes with the axial depth and reaches its maximum at the focal position (that is, the depth position of the point to be measured).
  • the depth-coded spectral information of each point is obtained by demodulation. Relation curve, and then demodulate to obtain the depth information of the corresponding points on the measured surface, get the microstructure and topography of the tested component, and finally complete the non-mechanical scanning, full field non-contact, Fast (dynamic or even transient) high-precision measurements.
  • the spectral range used in the measurement of the present invention is an ultraviolet band, a visible light band, or an infrared band.
  • the measurement method provided by the present invention is based on the principle of: based on the traditional three-dimensional topography measurement method based on fringe modulation coding and snapshot-type multi / hyperspectral imaging detection, using parallel-colored sinusoidal fringe parallel light passing through
  • the axial dispersion type optical system sequentially disperses in the axial direction and focuses one by one on different axial depth positions, and the modulation degree of each monochrome sinusoidal fringe of axial dispersion varies with the axial depth and at its focal plane position.
  • the image can realize the non-mechanical scanning, full-field non-contact, fast (dynamic or even transient) high-precision measurement of the three-dimensional topographical distribution of the measured component.
  • the provided measuring device does not require an axial mechanical scanning component, and realizes “spectral-tuned” from the system hardware by means of a spatial light modulator, an axial dispersion type micro-objective lens, and a snapshot multi / hyperspectral imaging detector.
  • System-depth "unique coding between the three to complete the micro-structure (especially complex, discontinuous micro-structures), the full-field non-contact, high-precision measurement data of the micro-topography of the component surface ( Dynamic or even transient) acquisition, effectively suppressing measurement errors caused by scanning movements of mechanical parts, and improving the controllability and anti-interference ability of the system.
  • the dispersion spectrum encoding algorithm provided by the present invention is a traditional fringe modulation degree encoding three-dimensional topography measurement method. Based on snapshot and multi-spectral imaging detection techniques, parallel light using complex-colored sinusoidal stripes passes through an axial-dispersion-type optical system, and then sequentially disperses in the axial direction and focuses on different axial depth positions one-to-one correspondingly. The modulation degree of each monochromatic sine fringe to the dispersion varies with the axial depth and reaches a maximum value near its focal plane position. From the measurement principle, the unique encoding between the three "spectral-modulation-depth" is realized.
  • FIG. 1 is a schematic structural diagram of a microstructure and topography measuring device based on dispersion spectrum coding according to an embodiment of the present invention
  • FIG. 3 is a “spectrum-modulation” relationship curve at a point on a measured object according to an embodiment of the present invention
  • FIG. 4 is a schematic flowchart of a process of acquiring and demodulating a dispersion spectrum-encoded image data according to an embodiment of the present invention.
  • a device and method for measuring a microstructure and topography based on dispersion spectrum coding according to the present invention will be further described in detail with reference to the accompanying drawings and embodiments.
  • FIG. 1 it is a schematic structural diagram of a microstructure and topography measuring device based on dispersion spectrum coding provided by this embodiment.
  • the measuring device consists of a broad-spectrum light source 1, a beam homogenizing coupler 2, a beam reversing coupler 3, a spatial light modulator 4, a collimating beam expander 5, a beam splitter 6, an axial dispersion type microscope objective 7, Stage 8, imaging coupling lens 10, snapshot multi / hyperspectral imaging detector 11, data transmission control line 12, calculation
  • the machine 13 and the controller 14 are constituted.
  • the computer 13 is respectively connected to the controller 14 and the snapshot multi / hyperspectral imaging detector 11 via the data transmission control line 12; the measured element 8 is placed on the stage 9 and the measured element 8 and the spatial light modulator 4 are measuring.
  • the object image is conjugated at the center wavelength of the adopted spectral range; beam reflex coupler 3, spatial light modulator 4, collimated beam expander lens 5, beam splitter 6, axial dispersion type microscope objective lens 7, imaging coupling
  • a common light path structure is formed between the lens 10 and the snapshot multi / hyperspectral imaging detector 11; the complex-color light emitted by the broad-spectrum light source 1 is uniformly incident on the spatial light modulator 4 through the beam homogenizing coupler 2 and the beam reversing coupler 3
  • the coded image output end of the controller 14 is connected to the spatial light modulator 4 located at the front focal plane position of the collimating beam expander lens 5, and the spatial light modulator 4 outputs a spatially-coded complex-colored sinusoidal fringe light field signal, and then the light beam
  • the monochromatic sinusoidal fringe light reflected from the measured surface passes through the axial dispersion type microscope objective 7 and the beam splitter 6, and is combined into a snapshot type through the imaging lens 10.
  • the multi / hyperspectral imaging detector 11 and the snapshot multi / hyperspectral imaging detector 11 transmit the image data acquired synchronously to the computer 13.
  • the snapshot multi / hyperspectral imaging detector 11 is a multi-aperture spectral filter camera (MAFC), a tunable tunnel echelle imager (TEI), and a spectrum.
  • MAFC multi-aperture spectral filter camera
  • TEI tunnel echelle imager
  • spectrum a spectrum.
  • SRDA Computed tomographic imaging spectrometry
  • CIS Computed tomographic imaging spectrometry
  • CASSI Coded aperture snapshot spectral imager
  • FSSD Filter stack spectral decomposer
  • FRIS Fiber-reformatting imaging spectrometry
  • IFS-L Integral field spectroscopy with lenslet arrays
  • the axial dispersion type microscope objective lens 7 is based on the axial diffractive optical element (Axial diffractive optical elements (ADOE) microscope objective lens, disperse the parallel parallel light in the axial direction to monochromatic light of different wavelengths, and focus one by one on different axial depth positions;
  • the spatial light modulator 4 is a digital micro Digital micromirror device (DMD) or Liquid Crystal on Silicon (LCOS) to modulate the spatial light intensity distribution of the incident light field;
  • the broad-spectrum light source 1 is a halogen lamp and a white light emitting diode (Light emitting diode, LED) or supercontinuum laser.
  • the beam homogenizing coupler is a structural device composed of a lens, a reflector (or an optical fiber), and an integrating sphere (or an integrating rod).
  • the beam turning is called a total internal reflection (TIR) prism.
  • the beam splitter is a 1: 1 transflective prism.
  • a method for measuring the microstructure morphology by using the device shown in FIG. 1 includes the following three steps:
  • the system is pre-calibrated. Before the measurement, the system device needs to be pre-calibrated for the “spectral-depth” correspondence:
  • the complex-colored light emitted by the broad-spectrum light source 1 is uniformly irradiated to the spatial light modulator 4 through the beam homogeneous coupler 2 and the beam reflex coupler 3 ;
  • Using Visual C ++ 2010-based compiler programming to synchronize the spatial light modulator 4 to output spatially-distributed complex-colored light signals, and pass the beam reflex coupler 3, collimated beam expander lens 5, beam splitter 6 and axial dispersion Type micro objective lens 7 irradiates a standard plane mirror on the stage 9;
  • the standard plane mirror is driven by a piezoelectric ceramic micro-displacer to perform axial scanning along the optical axis direction of the micro objective lens 7, and
  • the dispersive optical signal is reflected into the micro objective lens 7 and the beam splitter 6, and then the spectrometer receives and measures the wavelength value of each monochromatic optical
  • a set of "spectrum-depth” data is obtained by axially shifting the position of the micro-displacer; a “spectrum-depth” relationship curve of the system device is determined by using a polynomial or spline fitting technique, Complete system pre-calibration.
  • FIG. 2 is a “spectrum-depth” relationship curve provided by an embodiment of the present invention The horizontal axis represents the wavelength domain
  • a second step obtaining a dispersion-spectrum-coded image.
  • the object image is conjugated at the wavelength;
  • the spatial light modulator 4 is controlled by programming based on the Visual C ++ 2010 compiler to achieve the modulation of the spatial light intensity distribution of the incident polychromatic light signal, and the multi-frame phase shift (or (Single frame)
  • the light field signal of the sine fringe pattern is disperse along the axial direction to the surface of the measured element 8 through the beam reflex coupler 3, the collimating beam expander lens 5, the beam splitter 6, and the axial dispersion type microscope objective lens 7;
  • the snapshot-type multi / hyperspectral imaging detector 11 cooperates with the controller 14 to collect the axial dispersion sine fringe pattern of each frame reflected by the measured element 8 and transmit it to the computer 13 for storage and processing;
  • the measurement method is based on a conventional three-dimensional topography measurement method based on fringe modulation coding and a snapshot-type multi / hyperspectral imaging detection technique, and uses parallel-colored sinusoidal fringe parallel light to pass through axial dispersion.
  • Type micro-objective lens 7 is dispersive in the axial direction and focused on different axial depth positions in a one-to-one correspondence, and the modulation degree of each monochrome sine fringe of axial dispersion varies with the axial depth and is near its focal plane Reach the maximum value, complete the unique encoding between the three "spectrum-modulation-depth" required for the measurement; this method only requires multiple frames (such as three frames) phase-shifted (or single frame) dispersion spectrum-encoded image, It can realize the non-mechanical scanning, full-field non-contact, fast (dynamic and even transient) high-precision measurement of the three-dimensional topography distribution of the measured component 8
  • the acquisition of a multi-frame phase-shifted dispersion-spectrum-encoded image is taken as an example, and is specifically: based on a step-shifting technique such as time-domain, the spatially-modulated uniform light field signal of a complex color incident on its surface is transmitted through a spatial light modulator 4 Multi-frame phase-shifted sine fringe pattern light field signal modulated by complex color is output through the beam reversal coupler 3, collimated beam expander lens 5, beam splitter 6, and axial dispersion type microscope objective lens 7 To the component under test 8.
  • the light intensity distribution of the axial dispersion monochromatic phase shift sine fringe diagram of each frame reflected by the measured element 8 ie, the multi-frame phase shift axial dispersion sine fringe data cube
  • formula (2) The light intensity distribution of the axial dispersion monochromatic phase shift sine fringe diagram of each frame reflected by the measured element 8 (ie, the multi-frame phase shift axial dispersion sine fringe data cube) is shown in formula (2):
  • the center wavelength of dispersive monochromatic light is the center wavelength of dispersive monochromatic light
  • n is the phase shift amount of the n step
  • W is the number of phase shift steps (in this embodiment
  • the third step is demodulation of the dispersion-spectrum-encoded image.
  • the corresponding multi-frame phase shift (or single frame) dispersion spectrum-encoded image is obtained by using a corresponding data processing algorithm and a computer 13 ii Demodulate and reverse multi-frame phase shift (or single frame) axial dispersion sinusoidal fringe data cube
  • phase shift algorithm or single frame fringe image processing algorithm, such as Fourier transform method, windowed Fourier transform method, wavelet transform method, etc.
  • Phase shift or single frame axial dispersion sine fringe for multiple frames
  • the modulation degree of each monochrome sinusoidal fringe using axial dispersion varies with the axial depth and at its The focal position (ie, the depth position of the point to be measured) reaches the maximum, and the depth-coded spectral information of each point is demodulated.
  • FIG. 3 a “spectrum-modulation” relationship curve at a point on a measured object according to an embodiment of the present invention is shown.
  • the ordinate is the normalized fringe modulation, and it is determined during the demodulation process based on Gaussian, Gauss-like, or spline model fitting
  • the depth (height) information Zl of this point can be obtained.
  • FIG. 4 it is a schematic flowchart of the acquisition and demodulation processing of dispersion spectrum-encoded image data corresponding to steps two and three in the measurement method according to an embodiment of the present invention, where the axial dispersion sinusoidal fringe data in the dashed box
  • the cube can be in the form of multi-frame phase shift (or single frame) according to the measurement needs.
  • the three-dimensional topographical information of the measured object 8 is modulated by the measuring device of the present invention into multi-frame phase shift (or single frame) dispersion spectrum-encoded image (two-dimensional) data; using a corresponding snapshot-type multi / hyperspectral imaging detection data processing algorithm Demodulate the data, inverse the corresponding multi-frame phase shift (or single frame) axial dispersion sinusoidal fringe data cube; and then use a random phase shift algorithm (or single-frame fringe map processing algorithm, such as the Fourier transform method, Windowed Fourier transform method, wavelet transform method, etc.) processing a multi-frame phase shift (or single frame) axial dispersion sine fringe data cube to obtain a fringe modulation data cube related to the three-dimensional shape of the measured object 8; Finally, according to the corresponding relationship between “spectrum-modulation” and the “spectrum-depth” relationship curve obtained by pre-calibration, the 8-point three-dimensional topographic distribution of the measured element is reconstructed.

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Abstract

L'invention concerne un procédé et un dispositif pour mesurer une topographie de microstructure sur la base d'un codage de spectre de dispersion. Après avoir traversé un système optique à dispersion axiale, une lumière parallèle de franges sinusoïdales polychromatiques est dispersée de manière séquentielle dans la direction axiale et focalisée sur différentes positions de profondeur axiale une par une, et la modulation de chaque frange sinusoïdale monochromatique de dispersion axiale varie avec la profondeur axiale et atteint un maximum à proximité de sa position de plan focal, un code unique requis pour une mesure parmi une "profondeur de modulation de spectre" est établi, et une mesure sans contact de la distribution de topographie tridimensionnelle d'un élément mesuré est mise en oeuvre.
PCT/CN2018/103690 2018-08-31 2018-08-31 Procédé et dispositif de mesure de topographie de microstructure sur la base d'un codage de spectre de dispersion WO2020042190A1 (fr)

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CN101266139A (zh) * 2008-04-30 2008-09-17 中北大学 基于红外白光干涉技术的微结构形貌测试方法
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CN103791853A (zh) * 2014-01-20 2014-05-14 天津大学 基于彩色条纹信息处理的微结构测量系统及测量方法
EP2087312B1 (fr) * 2007-04-24 2015-02-11 DeguDent GmbH Dispositif de mesure et procédé de mesure tridimensionnelle d'un objet
CN206311061U (zh) * 2016-12-05 2017-07-07 苏州大学 一种多波长可调谐显微干涉的测量装置
US9823458B2 (en) * 2012-07-31 2017-11-21 Georgia Tech Research Corporation Imaging system and method for multi-scale three-dimensional deformation or profile output
CN107543508A (zh) * 2016-06-27 2018-01-05 陈亮嘉 光学系统及使用该系统的物体表面三维形貌侦测方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050219548A1 (en) * 2004-03-31 2005-10-06 Nec Compound Semiconductor Devices, Ltd. Method of measuring micro-structure, micro-structure measurement apparatus, and micro-structure analytical system
EP2087312B1 (fr) * 2007-04-24 2015-02-11 DeguDent GmbH Dispositif de mesure et procédé de mesure tridimensionnelle d'un objet
CN101266139A (zh) * 2008-04-30 2008-09-17 中北大学 基于红外白光干涉技术的微结构形貌测试方法
US9823458B2 (en) * 2012-07-31 2017-11-21 Georgia Tech Research Corporation Imaging system and method for multi-scale three-dimensional deformation or profile output
CN103411555A (zh) * 2013-08-15 2013-11-27 哈尔滨工业大学 基于线阵角谱照明的并行共焦环形微结构测量装置与方法
CN103791853A (zh) * 2014-01-20 2014-05-14 天津大学 基于彩色条纹信息处理的微结构测量系统及测量方法
CN107543508A (zh) * 2016-06-27 2018-01-05 陈亮嘉 光学系统及使用该系统的物体表面三维形貌侦测方法
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