WO2020008157A3 - Gyrometre micromecanique resonant performant a encombrement reduit - Google Patents

Gyrometre micromecanique resonant performant a encombrement reduit Download PDF

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Publication number
WO2020008157A3
WO2020008157A3 PCT/FR2019/051671 FR2019051671W WO2020008157A3 WO 2020008157 A3 WO2020008157 A3 WO 2020008157A3 FR 2019051671 W FR2019051671 W FR 2019051671W WO 2020008157 A3 WO2020008157 A3 WO 2020008157A3
Authority
WO
WIPO (PCT)
Prior art keywords
gyrometer
movable mass
compact high
support
resonant micromechanical
Prior art date
Application number
PCT/FR2019/051671
Other languages
English (en)
Other versions
WO2020008157A2 (fr
Inventor
Marc SANSA PERNA
Martial DEFOORT
Sébastien Hentz
Original Assignee
Commissariat A L'energie Atomique Et Aux Energies Alternatives
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat A L'energie Atomique Et Aux Energies Alternatives filed Critical Commissariat A L'energie Atomique Et Aux Energies Alternatives
Publication of WO2020008157A2 publication Critical patent/WO2020008157A2/fr
Publication of WO2020008157A3 publication Critical patent/WO2020008157A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

Gyromètre micromécanique résonant comportant un support (2) et une masse mobile (4) apte à vibrer dans un plan du gyromètre par rapport au support (2), des moyens d'excitation (8) de ladite masse mobile (4) dans une première direction (X) et des moyens de détection (10) de la vibration de ladite masse mobile (4) dans une deuxième direction (Y), caractérisé en ce que le gyromètre comporte au moins un pied (6) ancré sur le support (2) par une première extrémité et fixé à la masse mobile (4) par une deuxième extrémité, et permettant à la masse mobile (4) de vibrer dans le plan du gyromètre le long des première(X) et deuxième (Y) directions.
PCT/FR2019/051671 2018-07-06 2019-07-05 Gyrometre micromecanique resonant performant a encombrement reduit WO2020008157A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1856245 2018-07-06
FR1856245A FR3083606B1 (fr) 2018-07-06 2018-07-06 Gyrometre micromecanique resonant performant a encombrement reduit

Publications (2)

Publication Number Publication Date
WO2020008157A2 WO2020008157A2 (fr) 2020-01-09
WO2020008157A3 true WO2020008157A3 (fr) 2020-02-27

Family

ID=65031383

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2019/051671 WO2020008157A2 (fr) 2018-07-06 2019-07-05 Gyrometre micromecanique resonant performant a encombrement reduit

Country Status (2)

Country Link
FR (1) FR3083606B1 (fr)
WO (1) WO2020008157A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3102855B1 (fr) * 2019-11-06 2021-12-03 Commissariat Energie Atomique Accelerometre performant presentant un encombrement reduit

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010138717A1 (fr) * 2009-05-27 2010-12-02 King Abdullah University Of Science And Technology Système masse-ressort-amortisseur de système microélectromécanique (mems) utilisant un schéma de suspension hors du plan
US8215168B2 (en) * 2007-04-05 2012-07-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Micromechanical inertial sensor for measuring rotation rates
EP2610588A2 (fr) * 2011-12-28 2013-07-03 Maxim Integrated Products, Inc. Taux micro de capteur de rotation et procédé pour faire fonctionner un taux micro de capteur de rotation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012037540A2 (fr) * 2010-09-18 2012-03-22 Fairchild Semiconductor Corporation Gyroscope à 3 axes monolithiques micro-usinés et à commande unique

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8215168B2 (en) * 2007-04-05 2012-07-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Micromechanical inertial sensor for measuring rotation rates
WO2010138717A1 (fr) * 2009-05-27 2010-12-02 King Abdullah University Of Science And Technology Système masse-ressort-amortisseur de système microélectromécanique (mems) utilisant un schéma de suspension hors du plan
EP2610588A2 (fr) * 2011-12-28 2013-07-03 Maxim Integrated Products, Inc. Taux micro de capteur de rotation et procédé pour faire fonctionner un taux micro de capteur de rotation

Also Published As

Publication number Publication date
FR3083606A1 (fr) 2020-01-10
WO2020008157A2 (fr) 2020-01-09
FR3083606B1 (fr) 2021-09-03

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