WO2020000646A1 - 一种敏感膜及传感器 - Google Patents

一种敏感膜及传感器 Download PDF

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Publication number
WO2020000646A1
WO2020000646A1 PCT/CN2018/104435 CN2018104435W WO2020000646A1 WO 2020000646 A1 WO2020000646 A1 WO 2020000646A1 CN 2018104435 W CN2018104435 W CN 2018104435W WO 2020000646 A1 WO2020000646 A1 WO 2020000646A1
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WO
WIPO (PCT)
Prior art keywords
ring structure
sensitive film
folded ring
closed
folded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/CN2018/104435
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English (en)
French (fr)
Inventor
党茂强
邱冠勳
蔡孟錦
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Goertek Inc
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Goertek Inc
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Priority to US16/760,816 priority Critical patent/US11363384B2/en
Publication of WO2020000646A1 publication Critical patent/WO2020000646A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/16—Mounting or tensioning of diaphragms or cones
    • H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/02—Loudspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2207/00—Details of diaphragms or cones for electromechanical transducers or their suspension covered by H04R7/00 but not provided for in H04R7/00 or in H04R2307/00
    • H04R2207/021—Diaphragm extensions, not necessarily integrally formed, e.g. skirts, rims, flanges
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers

Definitions

  • the invention relates to a sensitive film, and more particularly, to a sensitive film for a sensor, such as a sensitive film applied to a microphone, a sensitive film applied to a speaker, or a sensitive film applied to a pressure sensor.
  • sensors have become an indispensable part of electronic products, such as microphones for picking up sounds, speakers for making sounds, or pressure sensors for measuring pressure, and so on.
  • a microphone structure includes a sensitive film and a back plate that form a flat capacitor structure.
  • the sensitive film senses external sound, it deforms to change the distance between the sensitive film and the back plate, so that the flat capacitor structure outputs
  • the changing electrical signal is used to represent sound information.
  • a ring-shaped folded ring structure that is, a corrugated structure
  • the change range of the middle region of the sensitive film can be increased, and the detection effect can be improved.
  • the folded ring structure will cause excessive deformation of the central region of the sensitive film, which may cause the failure of the sensitive film.
  • An object of the present invention is to provide a new technical solution for a sensitive film.
  • a sensitive film including a film body, and a folding ring structure is provided at an edge region of the film body, the folding ring structure is a non-closed ring; the folding ring structure The non-closed position constitutes a non-closed area, and the positions of the membrane body on both sides of the folded ring structure are integral and continuous with the non-closed area.
  • one is provided in the non-closed area, and the annular folded ring structure is separated by one non-closed area.
  • the non-closed area is provided with at least two, and the annular folded ring structure is separated into at least two sections by the at least two non-closed areas.
  • At least two non-enclosed regions are not equal in length.
  • the lengths of at least two sections are not equal.
  • the length of each non-closed region is equal, and is uniformly distributed in the circumferential direction of the folded ring structure.
  • a plurality of the folded ring structures are provided, and the multiple folded ring structures are sequentially distributed in a radial direction of the membrane body.
  • the multiple folding ring structures have the same shape and are arranged concentrically.
  • a sensor including the above-mentioned sensitive film.
  • the senor is a pressure sensor, a microphone, or a speaker.
  • the ring-shaped folded ring structure is separated by a non-closed section.
  • the non-closed area and the film body are integrated and continuous, the non-closed area is relative to the folded ring structure Will resist the deformation of the membrane body, thereby suppressing the amplitude of the sensitive membrane and reducing the risk of failure of the sensitive membrane.
  • FIG. 1 is a schematic structural diagram of a microphone of the present invention.
  • FIG. 2 is a schematic structural diagram of a first embodiment of the folded ring structure of the present invention.
  • FIG. 3 is a schematic structural diagram of a second embodiment of the folded ring structure of the present invention.
  • FIG. 4 is a schematic structural diagram of a third embodiment of the folded ring structure of the present invention.
  • FIG. 5 is a schematic cross-sectional view of a folded ring structure of the present invention.
  • FIG. 6 is a schematic diagram of another embodiment of the cross section of the folded ring structure of the present invention.
  • FIG. 7 is a schematic structural diagram of a fourth embodiment of the folded ring structure of the present invention.
  • FIG. 8 is a schematic structural diagram of a fifth embodiment of the folded ring structure of the present invention.
  • any specific value should be construed as exemplary only and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values.
  • the invention provides a sensitive film, which can be applied to sensors including, but not limited to, microphones, speakers, and pressure sensors. As an important part of these sensors, the sensitive film can sense the corresponding information so that the sensor can output the corresponding electrical signal.
  • This sensing principle and structure of the sensor belongs to the common knowledge of those skilled in the art, and will not be described in detail here.
  • the MEMS microphone is taken as an example to describe the sensitive film of the present invention in detail.
  • the invention discloses a MEMS microphone, which includes a substrate 1, a back pole 6 and a diaphragm 3 on the substrate 1. There is a certain gap between the back pole 6 and the diaphragm 3, so that the two can form a flat capacitor structure.
  • the back electrode 6 may be located above the diaphragm 3 or may be located below the diaphragm 3.
  • FIG. 1 shows a plate capacitor structure with the diaphragm 3 on the lower side and the back electrode 6 on the upper side. Specifically, the edge of the diaphragm 3 is bonded to the substrate 1, so that the positions of the diaphragm 3 except the edges are suspended above the back cavity 9 of the substrate 1.
  • the substrate 1 may be made of single crystal silicon or a material well known to those skilled in the art.
  • an insulating layer 2 is further formed between the diaphragm 3 and the substrate 1.
  • the back pole 6 can be supported on the diaphragm 3 through the supporting portion 5, and a certain gap 8 can be ensured between the back pole 6 and the diaphragm 3 through the supporting portion 5.
  • the two constitute a flat capacitor structure.
  • a plurality of through holes 7 are provided in the back pole 6, which belongs to the common knowledge of those skilled in the art and will not be described in detail here.
  • the sensitive film 3 includes a film body, and a folded ring structure 4 is provided at an edge region of the film body.
  • the position of the membrane body on the outer side of the folded ring structure 4 is used to connect the substrate 1.
  • the position of the membrane body on the inner side of the folded ring structure 4 is the main functional area of the sensitive film 3, which is used to cooperate with the back pole 6 to output changing electrical signals.
  • the folded ring structure 4 can not only reduce the stress in the film, but also increase the amplitude of the sensitive film 3 to improve the detection sensitivity of the plate capacitor.
  • the cross-section of the folded ring structure 4 may be zigzag.
  • FIG. 5 shows a zigzag-shaped folding ring structure 4 protruding downward with respect to the film body
  • FIG. 6 shows a zigzag-shaped folding ring structure 4 protruding upward with respect to the film body.
  • the cross section of the folded ring structure 4 may also be a V-shape or other shapes well known to those skilled in the art, which will not be described in detail here.
  • the folded ring structure 4 is in a ring shape and is not closed.
  • the shape of the folded ring structure 4 matches the shape of the sensitive film 3.
  • the folded ring structure 4 has a circular shape.
  • the ring shape of the folded ring structure 4 corresponds to it, which will not be described in detail here.
  • the non-closed position of the folded ring structure 4 constitutes the non-closed area 41, and the positions of the membrane body on both sides of the folded ring structure 4 are integrated and continuous with the non-closed area 41.
  • the sensitive film is manufactured, it is integrally formed by deposition and patterning.
  • the positions of the film body except the folded ring structure 4 are continuous and in the same plane.
  • the non-closed area 41 is located in the annular path of the folded ring structure 4 so as to separate the folded ring structure 4.
  • the ring-shaped folded structure 4 is separated by a non-closed area 41.
  • the non-closed area 41 and the membrane body are integrated and continuous, the non-closed area 41 will Resist the deformation of the film body, thereby suppressing the amplitude of the sensitive film 3 and reducing the risk of failure of the sensitive film 3.
  • one non-closed area 41 is provided, as shown in FIG. 3.
  • the ring-shaped folded ring structure 4 is separated into a section 40 by a non-closed region 41.
  • the non-closed area 41 is provided with at least two, and the annular folded ring structure 4 is separated into at least two sections 40 by the at least two non-closed areas 41, as shown in FIG. 2.
  • first non-closed area 44 and a second non-closed area 45 two non-closed areas are provided, which are respectively referred to as a first non-closed area 44 and a second non-closed area 45.
  • the first non-closed area 44 and the second non-closed area 45 divide the folded ring structure 4 into first sections.
  • the lengths of the first non-closed area 44 and the second non-closed area 45 are not equal, or / and the lengths of the first section 42 and the second section 43 are not equal.
  • multiple non-closed areas and sections can be provided, which is not limited herein.
  • the sensitive film 3 may have polarization problems in certain application environments.
  • the sensitive film 3 may have polarization problems in certain application environments.
  • the cross-sections of at least two sections in the folded ring structure 4 are different, and the cross-sections of the sections are selected from one of a convex convex shape, a concave convex shape, or a V shape.
  • the cross section of the first section 42 may be V-shaped, and the cross section of the second section 43 may be zigzag.
  • the non-closed area 41 and the section 40 are preferably provided in plural, and at least four. Referring to FIG. 2, four non-closed areas 41 are provided.
  • the four non-closed areas 41 separate the ring-shaped folded ring structure 4 into four sections 40, and each of the non-closed areas 41 is equal in length and uniformly distributed in In the circumferential direction of the folded ring structure 4, the length of each section 40 is equal, and the design of this symmetrical structure makes it possible to balance the vibration of the sensitive film 3.
  • the cross sections of the four sections 40 may be the same or different.
  • the cross sections of the two symmetrically distributed sections are the same, and the cross sections of two adjacent sections are different.
  • the folding ring structure 4 of the present invention may be provided in plurality.
  • the multiple folding ring structures 4 are sequentially distributed in the radial direction of the membrane body.
  • the multiple folding ring structures are used to adjust the internal stress of the film and increase the amplitude of the film body.
  • the cross sections of two adjacent folded ring structures may be different.
  • the cross section of one folding ring structure may be selected as a V-shape, and the cross section of the other folding ring structure may be selected as a zigzag shape.
  • the number of the folded ring structures 4 is preferably provided in plural, for example, two, four, six or more.
  • four folding ring structures are provided, which are respectively referred to as a first folding ring structure 4 a, a second folding ring structure 4 b, a third folding ring structure 4 c, and a fourth folding ring structure 4 d.
  • the four folded ring structures are circular in shape and are arranged concentrically and are sequentially distributed in the radial direction of the membrane body.
  • the cross-sections of the four folded ring structures may be the same or different.
  • the cross sections of the adjacent first and second folded ring structures 4a and 4b are different, and the cross sections of the adjacent second and third folded ring structures 4b and 4c are different.
  • the cross sections of the adjacent third folded ring structure 4c and the fourth folded ring structure 4d are different.
  • the cross sections of the two folded ring structures separated by one of the folded ring structures are the same. That is, the cross sections of the first folding ring structure 4a and the third folding ring structure 4c separated by the second folding ring structure 4b are the same; the second folding ring structure 4b and the fourth folding ring are separated by the third folding ring structure 4c.
  • the cross sections of the ring structures 4d are the same.
  • the folded ring structures of the same cross section are separated by the folded ring structures of different cross sections, so that the folded ring structures constitute mutual constraints.
  • the non-closed regions of different folded ring structures correspond one-to-one.
  • each of the non-closed regions of the first folded ring structure 4a, the second folded ring structure 4b, the third folded ring structure 4c, and the fourth folded ring structure 4d corresponds to each other.
  • the non-closed regions of different folded ring structures are staggered from each other.
  • the non-closed regions in the first folded ring structure 4 a, the second folded ring structure 4 b, the third folded ring structure 4 c, and the fourth folded ring structure 4 d are staggered from each other.
  • the non-closed regions of the folded-loop structures with the same cross-section correspond one-to-one.
  • the first folded-loop structure 4a and the third folded-loop structure 4c have the same cross-section
  • the cross sections of the folded ring structure 4d are the same
  • the non-closed areas of the first folded ring structure 4a and the third folded ring structure 4c correspond to each other
  • the unclosed areas of the second folded ring structure 4b and the fourth folded ring structure 4d are offset from each other by a certain angle.
  • the sensitive film of the present invention can individually or comprehensively adjust the number, length, and position of non-closed areas, sections, and the cross-sectional area of sections, the number of folded ring structures, etc. to meet the requirements of the sensitive film during each tooling. Requirements are not listed here one by one.

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  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

本发明公开了一种敏感膜及传感器，包括膜本体，在所述膜本体的边缘区域设置有折环结构，所述折环结构呈非封闭的环状；所述折环结构的非封闭位置构成非封闭区，所述膜本体位于折环结构两侧的位置与非封闭区是一体且连续的。本发明的敏感膜，环状的折环结构被非封闭区间隔开，当敏感膜受到较大冲击时，由于非封闭区与膜本体是一体且连续的，该非封闭区相对于折环结构会抵抗膜本体的变形，从而抑制敏感膜的振幅，降低了敏感膜失效的风险。 (图2)

Description

一种敏感膜及传感器 技术领域
本发明涉及一种敏感膜，更具体地，涉及一种用于传感器的敏感膜，例如应用于麦克风的敏感膜、应用于扬声器的敏感膜或者应用于压力传感器的敏感膜等。
背景技术
随着科技的发展，传感器成为电子产品中必不可少的部件，例如用于拾取声音的麦克风、用于发声的扬声器，或者用来测量压力的压力传感器等等。
这些传感器基本上都是应用了敏感膜的形变来获得检测的信息。例如麦克风结构，其包括构成平板电容器结构的敏感膜以及背极板，当敏感膜感应外界传入的声音时，发生形变以改变敏感膜与背极板之间的距离，从而使得平板电容器结构输出变化的电信号，以该电信号来表征声音信息。
通常，为了提高敏感膜的形变幅度，会在敏感膜的边缘设置一圈环状的折环结构，即波纹结构。通过该折环结构可以使敏感膜中部区域的变化幅度变大，提高检测的效果。但是当敏感膜遭受较大的冲击时，该折环结构会使得敏感膜的中部区域发生过大的变形，这有可能会造成敏感膜的失效。
发明内容
本发明的一个目的是提供一种敏感膜的新技术方案。
根据本发明的第一方面，提供了一种敏感膜，包括膜本体，在所述膜本体的边缘区域设置有折环结构，所述折环结构呈非封闭的环状；所述折环结构的非封闭位置构成非封闭区，所述膜本体位于折环结构两侧的位置与非封闭区是一体且连续的。
可选地，所述非封闭区设置有一个，所述环状的折环结构被一个非封闭区隔开。
可选地，所述非封闭区设置有至少两个，所述环状的折环结构被至少两个非封闭区间隔成至少两个区段。
可选地，至少有两个非封闭区的长度不相等。
可选地，至少有两个区段的长度不相等。
可选地，所述环状的折环结构中，每个非封闭区的长度相等，且均匀分布在折环结构的周向方向上。
可选地，所述折环结构设置有多个，该多个折环结构依次分布在膜本体的径向方向上。
可选地，多个折环结构形状相同，且同心布置。
根据本发明另一方面，还提供了一种传感器，包括上述的敏感膜。
可选地，所述传感器为压力传感器、麦克风或扬声器。
本发明的敏感膜，环状的折环结构被非封闭区间隔开，当敏感膜受到较大冲击时，由于非封闭区与膜本体是一体且连续的，该非封闭区相对于折环结构会抵抗膜本体的变形，从而抑制敏感膜的振幅，降低了敏感膜失效的风险。
通过以下参照附图对本发明的示例性实施例的详细描述，本发明的其它特征及其优点将会变得清楚。
附图说明
被结合在说明书中并构成说明书的一部分的附图示出了本发明的实施例，并且连同其说明一起用于解释本发明的原理。
图1是本发明麦克风的结构示意图。
图2是本发明折环结构第一实施方式的结构示意图。
图3是本发明折环结构第二实施方式的结构示意图。
图4是本发明折环结构第三实施方式的结构示意图。
图5是本发明折环结构横截面的示意图。
图6是本发明折环结构横截面另一实施方式的示意图。
图7是本发明折环结构第四实施方式的结构示意图。
图8是本发明折环结构第五实施方式的结构示意图。
具体实施方式
现在将参照附图来详细描述本发明的各种示例性实施例。应注意到：除非另外具体说明，否则在这些实施例中阐述的部件和步骤的相对布置、数字表达式和数值不限制本发明的范围。
以下对至少一个示例性实施例的描述实际上仅仅是说明性的，决不作为对本发明及其应用或使用的任何限制。
对于相关领域普通技术人员已知的技术、方法和设备可能不作详细讨论，但在适当情况下，所述技术、方法和设备应当被视为说明书的一部分。
在这里示出和讨论的所有例子中，任何具体值应被解释为仅仅是示例性的，而不是作为限制。因此，示例性实施例的其它例子可以具有不同的值。
应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步讨论。
本发明提供了一种敏感膜，可以应用到包括但不限于麦克风、扬声器、压力传感器等传感器中。敏感膜作为这些传感器中的重要部件，可以感应相应的信息以使传感器可以输出对应的电信号。传感器的这种感应原理及结构属于本领域技术人员的公知常识，在此不再具体说明。
为了便于描述，现以MEMS麦克风为例，对本发明的敏感膜进行详尽的描述。
本发明公开的一种MEMS麦克风，其包括衬底1以及位于衬底1上的背极6、振膜3。背极6与振膜3之间具有一定的间隙，使得二者可以构成平板电容器结构。其中，背极6可以位于振膜3的上方，也可以位于振膜3的下方。
图1示出的是振膜3在下、背极6在上的平板电容器结构。具体地，振膜3的边缘结合在衬底1上，使得振膜3除了边缘的位置均悬置在衬底 1的背腔9上方。衬底1可以采用单晶硅或者本领域技术人员所熟知的材质，为了保证振膜3与衬底1之间的绝缘，在振膜3与衬底1之间还形成有绝缘层2。背极6可以通过支撑部5支撑在振膜3上，通过支撑部5可以保证背极6与振膜3之间具有一定的间隙8，二者构成了平板电容器结构。为了均衡背极6与振膜3之间的压力，在背极6上设置有多个通孔7，这属于本领域技术人员的公知常识，在此不再具体说明。
敏感膜3包括膜本体，在膜本体的边缘区域设置有折环结构4。膜本体位于折环结构4外侧的位置用于连接衬底1，膜本体位于折环结构4内侧的位置为敏感膜3的主要功能区，用于与背极6配合以输出变化的电信号。折环结构4不但可以降低膜内应力，还可以提高敏感膜3的振幅，以提高平板电容器的检测灵敏度。
折环结构4的横截面可以为锯齿状。图5示出了相对膜本体呈下凸的锯齿状折环结构4，图6示出了相对膜本体呈上凸的锯齿状折环结构4。当然，对于本领域的技术人员而言，折环结构4的横截面还可以是V形或者本领域技术人员所熟知的其它形状，在此不再具体说明。
本发明的敏感膜，折环结构4呈环状，且是非封闭的。折环结构4的形状与敏感膜3的形状相匹配。例如当敏感膜为圆形时，则折环结构4呈圆环状。当敏感膜为方形或者椭圆形时，则折环结构4的环状与其相对应，在此不再具体说明。
参考图2、图3,折环结构4的非封闭位置构成了非封闭区41，膜本体位于折环结构4两侧的位置与非封闭区41是一体且连续的。敏感膜在制造的时候是通过沉积、图案化的方式一体形成的，膜本体上除了折环结构4的位置均是连续的，在同一个平面内。非封闭区41位于折环结构4的环状路径中，从而将折环结构4隔开。
环状的折环结构4被非封闭区41间隔开，当敏感膜受到较大冲击时，由于非封闭区41与膜本体是一体且连续的，该非封闭区41相对于折环结构4会抵抗膜本体的变形，从而抑制敏感膜3的振幅，降低了敏感膜3失效的风险。
在本发明一个具体的实施方式中，非封闭区41设置有一个，参考图3。 环状的折环结构4被一个非封闭区41间隔为一个区段40。
在本发明另一个具体的实施方式中，非封闭区41设置有至少两个，环状的折环结构4被至少两个非封闭区41间隔成至少两个区段40，参考图2。
参考图4，非封闭区设置有两个，分别记为第一非封闭区44、第二非封闭区45，第一非封闭区44、第二非封闭区45将折环结构4分隔成第一区段42、第二区段43。可以根据实际需要，设计第一非封闭区44与第二非封闭区45的长度不相等，或/和，设计第一区段42、第二区段43的长度不相等。对于本领域的技术人员而言，非封闭区和区段均可以设置多个，在此不做限制。
例如在本发明一个具体的实施方式中，敏感膜3在某些应用环境时，可能会存在偏振的问题，通过选择使部分非封闭区44的长度不相等，选择使部分区段的长度不相等，可以抑制偏振问题的发生，保证敏感膜的平稳工作。
可选的是，折环结构4中至少有两个区段的横截面不同，区段的横截面选自上凸的锯齿状、下凸的锯齿状或者V形中的一种。例如参考图4，第一区段42的横截面可以呈V形，第二区段43的横截面可以呈锯齿形。通过在同一个折环结构4设计不同横截面的区段，使得不同的区段的变形能力不同，从而可以制约敏感膜的形状程度。
非封闭区41和区段40优选设置复数个，且至少四个。参考图2，非封闭区41设置有四个，该四个非封闭区41将环状的折环结构4间隔成四个区段40，每个非封闭区41的长度相等，且均匀分布在折环结构4的周向方向上，使得每个区段40的长度均相等，这种对称结构的设计使得可以平衡敏感膜3的振动。
在图2中，四个区段40的横截面可以均相同，也可以不同。优选的是，对称分布的两个区段的横截面相同，相邻的两个区段的横截面不同。
本发明的折环结构4可以设置有多个，该多个折环结构4依次分布在膜本体的径向方向上，通过多个折环结构来调整膜内应力，以及提高膜本体的振幅。优选的是，相邻两个折环结构的横截面可以不同。例如当设置 两个折环结构时，其中一个折环结构的横截面可以选择为V形，另一个折环结构的横截面可以选择为锯齿形。当振膜在受到外力时，多个不同横截面的折环结构可以相互制约，保证了敏感膜的稳定性能。
折环结构4的数量优选设置有复数个，例如2个、4个、6个或者更多个。参考图7，设置有四个折环结构，分别记为第一折环结构4a、第二折环结构4b、第三折环结构4c、第四折环结构4d。该四个折环结构的形状呈圆形，且同心设置，依次分布在膜本体的径向方向上。
该四个折环结构的横截面均可以相同，也可以均不相同。在本发明一个具体的实施方式中，相邻的第一折环结构4a、第二折环结构4b的横截面不同，相邻的第二折环结构4b、第三折环结构4c的横截面不同，相邻的第三折环结构4c、第四折环结构4d的横截面不同。
也可以是，被其中一个折环结构间隔开的两个折环结构的横截面相同。即，被第二折环结构4b间隔开的第一折环结构4a、第三折环结构4c的横截面相同；被第三折环结构4c间隔开的第二折环结构4b、第四折环结构4d的横截面相同。相同横截面的折环结构被不同横截面的折环结构间隔开，使得折环结构之间相互构成制约。
在本发明一个可选的实施方式中，不同折环结构的非封闭区一一相对应。参考图7，第一折环结构4a、第二折环结构4b、第三折环结构4c、第四折环结构4d中的每个非封闭区均一一对应在一起。
在本发明一个可选的实施方式中，不同折环结构的非封闭区相互错开。参考图8，第一折环结构4a、第二折环结构4b、第三折环结构4c、第四折环结构4d中的非封闭区相互错开。
进一步优选的是，横截面相同的折环结构的非封闭区一一相对应，例如当第一折环结构4a、第三折环结构4c的横截面相同，第二折环结构4b、第四折环结构4d的横截面相同时，第一折环结构4a、第三折环结构4c的非封闭区一一对应在一起，第二折环结构4b、第四折环结构4d的非封闭区一一对应在一起。而第一折环结构4a、第三折环结构4c的非封闭区与第二折环结构4b、第四折环结构4d的非封闭区相互错开一定的角度。
本发明的敏感膜，可以根据需要单独或者综合调节非封闭区、区段的 数量、长度、位置，以及区段的横截面积、折环结构的数量等，来满足各工装时对敏感膜的要求，在此不再一一列举。
虽然已经通过例子对本发明的一些特定实施例进行了详细说明，但是本领域的技术人员应该理解，以上例子仅是为了进行说明，而不是为了限制本发明的范围。本领域的技术人员应该理解，可在不脱离本发明的范围和精神的情况下，对以上实施例进行修改。本发明的范围由所附权利要求来限定。

Claims (10)

  1. 一种敏感膜，其特征在于：包括膜本体，在所述膜本体的边缘区域设置有折环结构，所述折环结构呈非封闭的环状；所述折环结构的非封闭位置构成非封闭区，所述膜本体位于折环结构两侧的位置与非封闭区是一体且连续的。
  2. 根据权利要求1所述的敏感膜，其特征在于：所述非封闭区设置有一个，所述环状的折环结构被一个非封闭区隔开。
  3. 根据权利要求1或2所述的敏感膜，其特征在于：所述非封闭区设置有至少两个，所述环状的折环结构被至少两个非封闭区间隔成至少两个区段。
  4. 根据权利要求1至3任一项所述的敏感膜，其特征在于：至少有两个非封闭区的长度不相等。
  5. 根据权利要求1至4任一项所述的敏感膜，其特征在于：至少有两个区段的长度不相等。
  6. 根据权利要求1至5任一项所述的敏感膜，其特征在于：所述环状的折环结构中，每个非封闭区的长度相等，且均匀分布在折环结构的周向方向上。
  7. 根据权利要求1至6任一项所述的敏感膜，其特征在于：所述折环结构设置有多个，该多个折环结构依次分布在膜本体的径向方向上。
  8. 根据权利要求1至7任一项所述的敏感膜，其特征在于：多个折环结构形状相同，且同心布置。
  9. 一种传感器，其特征在于：包括如权利要求1至8任一项所述的敏感膜。
  10. 根据权利要求9所述的传感器，其特征在于：所述传感器为压力传感器、麦克风或扬声器。
PCT/CN2018/104435 2018-06-28 2018-09-06 一种敏感膜及传感器 Ceased WO2020000646A1 (zh)

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