WO2019244874A1 - Source d'électrons à cathode froide et générateur de rayons x équipée de celle-ci - Google Patents

Source d'électrons à cathode froide et générateur de rayons x équipée de celle-ci Download PDF

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Publication number
WO2019244874A1
WO2019244874A1 PCT/JP2019/024045 JP2019024045W WO2019244874A1 WO 2019244874 A1 WO2019244874 A1 WO 2019244874A1 JP 2019024045 W JP2019024045 W JP 2019024045W WO 2019244874 A1 WO2019244874 A1 WO 2019244874A1
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cold cathode
cathode electron
ray
source
electron
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PCT/JP2019/024045
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English (en)
Japanese (ja)
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均 桝谷
秀憲 監物
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ナノックス イメージング ピーエルシー
株式会社ナノックスジャパン
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Publication of WO2019244874A1 publication Critical patent/WO2019244874A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes

Definitions

  • the present invention relates to a cold cathode electron source and an X-ray generator including the same, and more particularly, to a modularized cold cathode electron source and an X-ray generator including the same.
  • X-rays used for fluoroscopy for medical or other purposes are usually created by the energy that electrons generated from a cathode are accelerated in a vacuum vessel toward an anode and lost by colliding with the anode.
  • Such an X-ray generator is configured such that one anode having a cathode electron collision point and generating X-rays and a cathode having one or two electron sources are joined to a glass container, a metal container or a glass container and a metal container. It is generally called an X-ray tube or X-ray source (hereinafter, referred to as “X-ray source”).
  • a conventional X-ray source is manufactured through an exhaust quenching process for making the inside of a container a high vacuum.
  • both the anode and the cathode are often permanently sealed in the container by welding or brazing, except for some “open” X-ray sources. In this case, the anode or the cathode cannot be easily replaced.
  • thermoelectrons emitted from filaments or other heating elements as cathode electrons. For this reason, it is difficult to quickly switch the electron sources during use, and the number of electron sources in one container is limited to about two.
  • An X-ray source generally used for fluoroscopy for medical and other uses includes an anode having one X-ray generating point, a cathode having one or two electron sources, a glass tube (or a ceramic tube, and a metal tube for them).
  • the housing is sometimes sealed) or enclosed in a metal housing (sometimes ceramic parts are joined).
  • FIG. 1 is a schematic diagram of a "sealed" X-ray tube using a glass tube 1a for a vacuum vessel.
  • An anode 1b and a cathode 1c are sealed in the glass tube 1a.
  • One or two thermoelectron sources 1e such as filaments are mounted on the cathode 1c.
  • a part of the anode 1b and a conducting wire 1g connected to the thermionic source 1e and the focusing electrode 1f constituting the cathode 1c are drawn out through the glass tube 1a.
  • Cathode portion 1a 2 of the glass tube 1a is also made of metal, in this case, among the cathode side portions 1a 2 made of metal, parts lead 1g penetrates is replaced with an insulating material.
  • Anode portion 1a 1 of the glass tube 1a can be a ceramic.
  • the electrons emitted from the thermionic source 1e are accelerated in a vacuum and collide with the target surface of the anode 1b, from which X-rays are emitted in the side direction of the glass tube 1a.
  • FIG. 2 is a schematic diagram of a "sealed" X-ray tube using the metal housing 2a as a vacuum container.
  • An anode 2b and a cathode 2c are sealed in the metal housing 2a.
  • an insulating material 2b 1 is provided between the metal casing 2a and the anode 2b.
  • a metal housing 2a, between the connected wires 2g cathode 2c, the insulating material 2c 1 is provided.
  • the principle of generating X-rays is the same as that of the X-ray tube shown in FIG. 1, but the X-ray tube shown in FIG. Is provided.
  • a part of the transmission type X-ray source for obtaining high-resolution fluoroscopic images with micro focus and small current can open the metal housing and replace the cathode etc. while maintaining a constant vacuum with a vacuum pump.
  • a “type” other reflective X-ray sources that require a larger current for industrial or medical use are mostly “sealed” as shown in FIG. 1 or FIG. No consideration is given to replacing the cathode or the like.
  • FIG. 3 is a schematic diagram of an “open” X-ray tube.
  • Vacuum vessel the anode side metal casing 3a 1 and is divided into the metal casing 3a 2 on the cathode side, it can be decomposed as needed.
  • the metal casing 3a 1, the anode 3b is fixed consisting of a metal film via an insulator 3b 1.
  • Cathode 3c connected to conductor 3g is fixed to the metal housing 3a 2.
  • a metal housing 3a 2, between the conductors 3g connected to the cathode. 3c, insulating material 3c 1 is provided.
  • Thermionic source 3e included in the cathode 3c are usually single filament, when worn can be replaced by opening the metal housing 3a 2.
  • the metal casings 3a 1 and 3a 2 are sealed and evacuated constantly by the vacuum pump 3i.
  • the electrons emitted from the cathode 3c are accelerated in a vacuum, collide with the anode 3b, and emit X-rays in a direction opposite to the direction of the cathode 3c.
  • X-rays aperture 3h is provided on a line connecting a cathode 3c and anode 3b of the metal housing 3a 1.
  • the “sealed” X-ray source is an effective method when a vacuum pump is not required at the time of use and sufficient life is ensured for the anode target surface and the cathode filament.
  • a stable manufacturing method is not established as in the thermionic electron source, and there is a high possibility that the performance varies. For this reason, when a cold cathode is used as the electron source of the X-ray source, there is a problem that the cathode cannot be easily replaced with the conventional “sealed type” structure.
  • the cold cathode electron source itself, as shown in FIG. 4, electrons are drawn into a vacuum from a fine conical emitter made of a metal such as molybdenum by an electric field created by a peripheral gate electrode.
  • the current distribution in the electron beam cross section of the thermionic source is made uniform so that the largest possible current can be supplied without melting the anode target.
  • the shape of the electron source and the peripheral mechanism have been devised. This control of the current distribution in the cross section of the electron beam can be performed more directly by adjusting the shape and position of many emitters and carbon nanotubes that constitute one electron beam in the cold cathode electron source. become.
  • FIG. 4 is a schematic view showing a "Spindt-type" X-ray source which is one of the cold cathode electron sources.
  • the Spindt-type cold cathode electron source a large number of sets of a fine cone 4e made of a metal such as molybdenum and a gate 4g as a lead electrode surrounding the cone 4e on the circumference thereof are arranged in a large number.
  • a voltage is applied to the gate 4g, electrons are emitted from the tip of the cone 4e and collide with the anode 4b to generate X-rays.
  • One X-ray emission range is usually designed to collide with electrons emitted from more than 100 cones 3e.
  • FIG. 5 is a schematic diagram showing a “CNT type” X-ray source which is another cold cathode electron source.
  • the CNT type X-ray source it is possible to fix a large number of carbon nanotubes 5e having fine tips with a conductive binder 5f, and arrange a mesh electrode 5g as an extraction electrode between the anode 5b and the carbon nanotube 5e.
  • a voltage is applied to the mesh electrode 5g, electrons are emitted from the tip of the carbon nanotube 5e, and the electrons passing through the mesh electrode 5g collide with the anode 5b to generate X-rays.
  • the tip of the carbon nanotube 5e corresponding to one X-ray emission range is usually 100 or more.
  • a first object of the present invention is to make it possible to replace a cold cathode electron source by making the X-ray source into a modular structure and to facilitate manufacture and maintenance of the X-ray source using the cold cathode electron source. .
  • a second object of the present invention is to make an opening of a vacuum vessel provided for inserting a cold cathode electron source smaller in an X-ray source having three or more cold cathode electron sources.
  • a third object of the present invention is to reduce the number of wirings drawn out of a vacuum vessel to the outside in an X-ray source having three or more cold cathode electron sources.
  • a fourth object of the present invention is to make the electron collision density in the X-ray generation range (X-ray focal point) of the anode more uniform in an X-ray source having three or more cold cathode electron sources.
  • An X-ray generator includes a vacuum vessel having an opening, an anode at least partially located inside the vacuum vessel, and a vacuum vessel detachable from the vacuum vessel and closing the opening. And a cathode including a cold cathode electron source fixed to the flange and located inside the vacuum vessel.
  • a plurality of cold cathode electron sources are arranged on a gantry extending in a predetermined direction, a connection point of the gantry with respect to the flange is provided at a position offset from a center portion of the gantry in a predetermined direction, and a diameter of the opening is It may be smaller than the length of the gantry in a predetermined direction. According to this, the opening of the vacuum container provided for inserting the cold cathode electron source can be made smaller.
  • the cold cathode electron source has a plurality of fine tips and a plurality of extraction electrodes respectively corresponding to the plurality of fine tips, and a common wiring is formed on a part of the plurality of fine tips or a part of the plurality of extraction electrodes. It may be assigned. According to this, it is possible to reduce the number of wires drawn out from the vacuum container.
  • a plurality of cold cathode electron sources are provided, each of the plurality of cold cathode electron sources includes an electron beam focusing mechanism having a plurality of electrodes, and a plurality of electrodes belonging to different cold cathode electron sources are assigned a common wiring. No problem. According to this, it is possible to reduce the number of wires drawn out from the vacuum container.
  • a cold cathode electron source is a cold cathode electron source having a plurality of fine tips, wherein the plurality of fine tips have a first group disposed in a central region and a peripheral region surrounding the central region. And the amount of current per unit area of the electron beam emitted from the second group is larger than the amount of current per unit area of the electron beam emitted from the first group. .
  • the X-ray generator According to the X-ray generator according to one aspect of the present invention, manufacture and maintenance of the X-ray source are facilitated.
  • the electron collision density in the X-ray generation range (X-ray focus) of the anode becomes more uniform.
  • FIG. 1 is a schematic diagram of a "sealed” X-ray tube using a glass tube 1a for a vacuum vessel.
  • FIG. 2 is a schematic diagram of a "sealed” X-ray tube using the metal housing 2a as a vacuum container.
  • FIG. 3 is a schematic diagram of an “open” X-ray tube.
  • FIG. 4 is a schematic diagram showing a "Spindt-type” X-ray source which is one of the cold cathode electron sources.
  • FIG. 5 is a schematic diagram showing a “CNT type” X-ray source which is another cold cathode electron source.
  • FIG. 6 is a schematic diagram showing the structure of the X-ray source according to the first embodiment of the present invention.
  • FIG. 1 is a schematic diagram of a "sealed” X-ray tube using a glass tube 1a for a vacuum vessel.
  • FIG. 2 is a schematic diagram of a "sealed” X-
  • FIG. 7 is a schematic diagram showing the structure around the cathode of the X-ray source according to the second embodiment of the present invention.
  • FIG. 8 is a schematic diagram showing a method of connecting the cathodes of three or more cold cathode electron sources and the lead wires of the extraction electrodes in the “Spindt type” cold cathode electron source.
  • FIG. 9 is a schematic diagram for explaining the operation of the X-ray source according to the third embodiment of the present invention.
  • FIG. 10 is a schematic view for explaining a current distribution in a cross section of an electron beam when an electron emitted from a plurality of fine tips is used as one electron beam in an X-ray source using a cold cathode electron source.
  • FIG. 11 is a schematic diagram for explaining a first method for making the electron collision density more uniform.
  • FIG. 12 is a schematic diagram for explaining a second method for making the electron collision density more uniform.
  • FIG. 6 is a schematic diagram showing the structure of the X-ray source according to the first embodiment of the present invention.
  • the X-ray source according to the first embodiment is a “sealed” X-ray source and comprises a vacuum vessel 6a.
  • Vacuum container 6a is made cylindrical casing 6a 1 and the metal casing 6a 2 made of glass or ceramic, in its interior one or two cold-cathode electron source 6e and the focus electrode 6f is enclosed.
  • the cold cathode electron source 6e and the focusing electrode 6f are connected to the outside of the vacuum vessel 6a via a conductive wire 6g.
  • An anode 6a 3 is fixed to the cylindrical casing 6a 1.
  • the metal housing 6a 2 is provided with a vacuum pump connection 6b for evacuating during manufacture, and the opening 6d of the ring-shaped metal flange 6c are connected, the aperture 6h for irradiating X-rays to the outside.
  • the vacuum pump connection portion 6b is made of glass or ceramic, is connected to a vacuum pump in a manufacturing stage, and is evacuated until the inside of the vacuum container 6a becomes substantially vacuum, and then sealed.
  • Metal flange 6c is connected to the metal casing 6a 2 via a sealing ring 6c 1, it is fixed to the metal housing 6a 2 by using a bolt 6c 2.
  • the region surrounded by the ring-shaped metal flange 6c is provided an insulator 6c 3.
  • the X-ray source according to the first embodiment is a “sealed” X-ray source, in which the cathode part can be replaced at least during manufacture.
  • the metal flange 6c is removed and a new one is removed.
  • members other than the cathode can be used.
  • the metal flange 6c is opened and replaced with a metal flange 6c on which a new cathode is mounted.
  • the vacuum pump connection portion 6b may be opened, the inside of the vacuum container 6a may be evacuated using a vacuum pump until the inside of the vacuum container 6a becomes substantially vacuum, and then sealed again.
  • the X-ray source according to the present embodiment is configured such that the cathode including the cold cathode electron source 6e and the focusing electrode 6f can be exchanged. It is not necessary to dispose of the entire source, only the cathode part can be replaced. Also, the flange need not be made of metal.
  • FIG. 7A is a schematic diagram showing the structure around the cathode of the X-ray source according to the second embodiment of the present invention.
  • the X-ray source according to the second embodiment is a "sealed" X-ray source having a cathode including three or more cold cathode electron sources E1 to En.
  • Vacuum vessel 7a 2 is made of metal, using the same method as shown in FIG. 6, the metal flange 7c and the vacuum chamber 7a 2 which are cathode and integrally formed is fixed.
  • n (n is 3 or more) cold cathode electron sources E1 to En are linearly arranged on one mount 7j.
  • the length of the gantry 7j is greater than the diameter of the opening 7d provided in the metal housing 7a 2.
  • strut 7c 4 connected to the metal flange 7c is connected to the connection point 7k near the end of the gantry 7j I have.
  • a plurality arranging it as shown in FIG. 7 (b) the structure shown in FIG. 7 (a) may be more cold-cathode electron source arranged inside the metal enclosure 7a 2.
  • three metal flanges 7c 1 to 7c 3 and three mounts 7j 1 to 7j 3 are used, and the cold cathodes provided on these mounts 7j 1 to 7j 3 are used.
  • the pitch of the electron source is kept constant.
  • FIGS. 8 (a) to 8 (c) are schematic views showing a connection method between the cathodes of three or more cold cathode electron sources and the lead wires of the extraction electrodes in the "Spindt type" cold cathode electron source.
  • the cathodes of the cold cathode electron sources E1 to En are all connected to a common wiring, while the extraction electrodes are connected to individual wirings for the cold cathode electron sources E1 to En. ing.
  • one or more arbitrary cold cathode electron sources E1 to En can be driven by applying a voltage to the extraction electrode.
  • the number of conducting wires passing through the metal flange 7c is n + 1.
  • the X-ray source according to the second embodiment is a "sealed" X-ray source having a cathode containing three or more cold cathode electron sources, wherein at least during manufacture the cathode part can be replaced. ing.
  • the basic components and the method of use are the same as those of the X-ray source according to the first embodiment.
  • the X-ray source according to the second embodiment includes three or more cold cathode electron sources, so that the overall size of the cold cathode electron source increases. .
  • it is enlarging the diameter of the opening 7d for inserting the cold cathode electron source in the vacuum chamber 7a 2 not preferable to hold the vacuum.
  • the X-ray source according to the second embodiment has three or more cold cathode electron sources arranged in a straight line on the gantry 7j, and has one end of the gantry 7j, that is, the center of the gantry 7j.
  • the connection point 7k By providing the connection point 7k at a position offset from, the opening 7d having a smaller diameter can be used.
  • the number of the cold cathode electron sources is n
  • the cathode and the extraction electrodes are individually wired, 2 ⁇ n conductors are required.
  • the wiring connected to the cathode is made common, and the wiring connected to the extraction electrode is made individual, or as shown in FIG. If the wirings connected to the extraction electrode are made common and the wirings connected to the extraction electrode are made common, the number of wirings can be reduced to n + 1.
  • FIG. 8 (c) may be disposed a control circuit 8m for controlling a voltage applied to the cathode or the extraction electrode individually in the vacuum chamber 7a 2.
  • FIG. 9 is a schematic diagram for explaining the operation of the X-ray source according to the third embodiment of the present invention.
  • the X-ray source according to the third embodiment includes three or more cold cathode electron sources, and the shape and direction of the electron beam can be controlled by the voltage applied to the electrodes p, q, and r.
  • a cold cathode electron source As a cold cathode electron source, a "Spindt type" is assumed.
  • the electrodes p1 to pn, the electrodes q1 to qn, and the electrodes r1 to rn are connected to a common wiring. Therefore, the same convergence condition is provided for electron sources other than the active electron source. Of course, inactive electron sources have no effect.
  • M ⁇ n wirings are required. In the example shown in FIG. Wiring is enough.
  • the n cold cathode electron sources E1 to En are divided into several groups (two groups in this example), and the electrodes p, q, and r are shared by common wiring for each group. Connected.
  • the electrodes p1 and pn are connected to a common line
  • the electrodes q1 and qn are connected to a common line
  • the electrodes r1 and rn are connected to a common line. It is connected to the.
  • the electrodes p2 and p3 are connected to a common wiring
  • the electrodes q2 and q3 are connected to a common wiring
  • the electrodes r2 and r3 are connected to a common wiring. Connected to wiring.
  • the example shown in FIG. 9B is useful when it is necessary to operate a plurality of electron sources simultaneously.
  • relay circuits 9L1 to 9Ln are connected to the convergence mechanisms of the cold cathode electron sources E1 to En, respectively, and a control circuit 9m for controlling these is provided. Can be driven. If the control circuit 9m is arranged near the cathode so as to be located inside the vacuum vessel, it is possible to greatly reduce the number of wires penetrating the vacuum vessel.
  • FIG. 10 is a schematic view for explaining a current distribution in a cross section of an electron beam when an electron emitted from a plurality of fine tips is used as one electron beam in an X-ray source using a cold cathode electron source.
  • FIG. 10 One of electrons exiting the micro-tip 10e 0 collides with a certain range t0 on the anode target 10b, in the collision location, collided heat and X-rays corresponding to the number of electrons are emitted.
  • the density distribution of the colliding electrons is s0.
  • Position ranges t0 to electron collision is determined by the position of the fine tip 10e 0, when the sum of the electron (electron beam) from all the fine tip 10e 0, the density distribution of electrons in the region T becomes S.
  • This density distribution S corresponds to the heat generation distribution on the anode target 10b and the X-ray generation distribution generated therefrom.
  • the X-ray dose obtained here is defined as Xs in the range of Tx.
  • the electron collision density is as uniform as possible in the X-ray generation range (X-ray focal point).
  • FIG. 11 As one of the measures to make the electron collision density more uniform in the X-ray generation range (X-ray focal point), there is a method shown in FIG.
  • FIG. 11 there are many fine tips of the cold cathode electron source, and the arrangement is adjusted. That is, the density of the fine tip of the cold cathode electron source is coarsely adjusted at the central portion and the peripheral portion is reduced so that the electron density becomes coarse at the center of the electron collision range on the anode target 11b and the electron density becomes dense at the peripheral portion. To be densely arranged.
  • the example shown in FIG. 11A controls the current distribution S in the cross section of the electron beam in the X-ray source according to the fourth embodiment.
  • the fine tip 11e 0 irradiates the electron beam to the central part of the range T
  • the fine tips 11e 3 and 11e 4 irradiates the peripheral part of the range T to the electron beam.
  • the fine tips 11e 1 and 11e 2 irradiate an electron beam between a central portion and a peripheral portion of the range T.
  • the distance between the fine tips 11e 0 to 11e 4 is narrow between the fine tips 11e 1 to 11e 3 and between the fine tips 11e 2 to 11e 4, and the distance between the fine tips 11e 0 to 11e 1 and 11e 0 to 11e. Wide between the two .
  • the difference between the center part and the peripheral part becomes smaller. .
  • the X-ray dose Xs ′ obtained in the range Tx is larger than the X-ray dose Xs in FIG.
  • FIG. 11B shows a method for realizing a similar configuration with carbon nanotubes.
  • FIG. 12 Another method for making the electron collision density more uniform in the X-ray generation range (X-ray focus) is the method shown in FIG.
  • the example shown in FIG. 12 is for adjusting the amount of electron emission for each fine tip, a method of applying a different extraction voltage for each location of the fine tip, and a circuit for adjusting the extraction voltage for each location of the fine tip. And a method in which the fine tip is manufactured so as to have different electron emission efficiencies at different locations.
  • FIGS. 12A to 12C are schematic diagrams showing a method of controlling the current distribution S while keeping the arrangement pitch of the fine tips constant on the premise of the “Spindt” cold cathode electron source.
  • Figure in 12 (a) ⁇ (c) a plurality of micro-tip 12e 1 is arranged in the central area, it is arranged a plurality of fine tip 12e 3 to the peripheral region, a plurality of micro-tip 12e 2 is disposed in the middle region Have been.
  • a low voltage is applied to the fine tip 12e 1 disposed in the central region where electrons collide with the central part of the range T, the peripheral region that impinges on the periphery of the electronic range T to apply a high voltage to a fine tip 12e 3 that placed on.
  • the central region and the intermediate region are connected via a resistor R1
  • the peripheral region and the intermediate region are connected via a resistor R2
  • a predetermined voltage is applied to the peripheral region.
  • the voltage drop due to the resistance R1, R2 is a lower voltage is applied to the fine tip 12e 1
  • a high voltage is applied to the fine tip 12e 3.
  • a low cathode resistance in fine tip 12e 1 can also be achieved by increasing the fine tip 12e 3.
  • the same extraction voltage is applied to the fine tips 12e 1 to 12e 3 , but the electron emission efficiency is low in the fine tip 12e 1 located in the central region, and the fine tips located in the peripheral region are low. so that the electron emission efficiency becomes higher in 12e 3, designing the shape of the fine tip 12e 1 ⁇ 12e 3.
  • the electron emission efficiency can be changed by changing the distance from the fine tips 12e 1 to 12e 3 to the gate electrode.

Abstract

Le but de la présente invention est de fournir une structure modulaire pour une source de rayons X qui permet le remplacement d'une source d'électrons à cathode froide, ce qui facilite la production et la maintenance d'une source de rayons X qui utilise une source d'électrons à cathode froide. Un générateur de rayons X selon un aspect de la présente invention comprend : un récipient sous vide ayant une ouverture ; une anode dont au moins une partie est située à l'intérieur du récipient sous vide ; une bride qui est fixée de manière amovible au récipient sous vide et fixée au récipient sous vide pour fermer l'ouverture de celui-ci ; et une cathode fixée à la bride et comprenant une source d'électrons à cathode froide située à l'intérieur du récipient sous vide. Ceci permet de remplacer facilement et de remplacer une seule section de cathode.
PCT/JP2019/024045 2018-06-22 2019-06-18 Source d'électrons à cathode froide et générateur de rayons x équipée de celle-ci WO2019244874A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4120802A4 (fr) * 2020-03-13 2024-04-17 Worldbeam Solution Co Ltd Dispositif de source de lumière ultraviolette extrême utilisant des faisceaux d'électrons

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06176686A (ja) * 1992-12-10 1994-06-24 Fujitsu Ltd 電界放出陰極装置及びその製造方法
JPH07182966A (ja) * 1993-12-22 1995-07-21 Futaba Corp 電界放出形電子源
JPH0950758A (ja) * 1995-05-30 1997-02-18 Mitsubishi Electric Corp 電子源、それを用いた陰極線管及び電子源の製造方法
JP2017059360A (ja) * 2015-09-15 2017-03-23 浜松ホトニクス株式会社 Ｘ線計測装置、電子線源の交換方法、及び電子銃
US20180005796A1 (en) * 2016-05-16 2018-01-04 Nanox Imaging Plc X-ray tube and a controller thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06176686A (ja) * 1992-12-10 1994-06-24 Fujitsu Ltd 電界放出陰極装置及びその製造方法
JPH07182966A (ja) * 1993-12-22 1995-07-21 Futaba Corp 電界放出形電子源
JPH0950758A (ja) * 1995-05-30 1997-02-18 Mitsubishi Electric Corp 電子源、それを用いた陰極線管及び電子源の製造方法
JP2017059360A (ja) * 2015-09-15 2017-03-23 浜松ホトニクス株式会社 Ｘ線計測装置、電子線源の交換方法、及び電子銃
US20180005796A1 (en) * 2016-05-16 2018-01-04 Nanox Imaging Plc X-ray tube and a controller thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4120802A4 (fr) * 2020-03-13 2024-04-17 Worldbeam Solution Co Ltd Dispositif de source de lumière ultraviolette extrême utilisant des faisceaux d'électrons

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