WO2019240516A2 - Système de robinet à vanne et son procédé de commande - Google Patents

Système de robinet à vanne et son procédé de commande Download PDF

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Publication number
WO2019240516A2
WO2019240516A2 PCT/KR2019/007163 KR2019007163W WO2019240516A2 WO 2019240516 A2 WO2019240516 A2 WO 2019240516A2 KR 2019007163 W KR2019007163 W KR 2019007163W WO 2019240516 A2 WO2019240516 A2 WO 2019240516A2
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WO
WIPO (PCT)
Prior art keywords
door
valve housing
gate valve
sealing member
passage
Prior art date
Application number
PCT/KR2019/007163
Other languages
English (en)
Korean (ko)
Other versions
WO2019240516A3 (fr
Inventor
최대규
Original Assignee
(주) 엔피홀딩스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020180068939A external-priority patent/KR102131285B1/ko
Priority claimed from KR1020180070671A external-priority patent/KR102131284B1/ko
Priority claimed from KR1020180070670A external-priority patent/KR102127189B1/ko
Priority claimed from KR1020190002393A external-priority patent/KR20200086139A/ko
Application filed by (주) 엔피홀딩스 filed Critical (주) 엔피홀딩스
Priority claimed from KR1020190070243A external-priority patent/KR102278560B1/ko
Publication of WO2019240516A2 publication Critical patent/WO2019240516A2/fr
Publication of WO2019240516A3 publication Critical patent/WO2019240516A3/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0272—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor permitting easy assembly or disassembly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/316—Guiding of the slide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a gate valve system and a control method thereof, and more particularly, to a gate valve system and a control method thereof to allow the exchange of the o-ring or sealing plate while maintaining a vacuum in the chamber. It is about.
  • a gate valve is a semiconductor manufacturing facility provided between chambers of a semiconductor process to provide an inter-chamber passage and to open and close the provided passage, also called a slit valve.
  • the semiconductor process refers to various processes such as exposure, etching, deposition, and cleaning, and each process is performed in a vacuum chamber, so it is important to keep the chamber in a vacuum state.
  • the gate valve must be closed to open the gate valve to prevent diffusion of materials generated by the process performed in the chamber after the chamber receives the workpiece or the like, or to the other chamber, and to keep the other chamber in a vacuum state.
  • the gate valve moves the sealing plate to open and close the passage.
  • a sealing member such as an o-ring is attached to the sealing plate to seal the inside of the chamber.
  • the O-rings need to be replaced regularly as consumables.
  • the semiconductor process In order to replace the O-rings, the semiconductor process must be stopped, and after the O-rings are replaced, impurities in the chamber must be removed and vacuum suctioned takes a lot of time.
  • Korean Patent No. 10-0756110 shown in Fig. 1 is mounted in the carry-in opening of the processing chamber 4, and has a carry-in opening 37 in the gate valve device which opens and closes with the conveyance chamber 6 side in a vacuum state.
  • Valve body 44 which is seated so as to be able to open and close a), a sealing member 66 that is detachably provided on the surface of the valve body 44, and which is in airtight contact with the seating surface around the carry-in opening 37;
  • the maintenance sealing member 68 provided so that the outer periphery of the sealing member 66 may be enclosed at predetermined intervals from the sealing member 66, and the sealing member is installed in the valve housing and seats the valve body 44.
  • the maintenance opening 72 and the outside of the maintenance opening 72 which are the size which can be hermetically sealed by the maintenance sealing member 68 in the state which the 66 was exposed are detachably airtight.
  • the valve body drive mechanism which moves and seats between the maintenance opening 72 and seats is provided, and the gate valve apparatus which can replace the sealing member 66 without opening the conveyance chamber side to the air is provided.
  • sealing member 66 has the same meaning as the O-ring or the sealing member, and the valve body 44 has the same meaning as the sealing plate.
  • the moving distance of the sealing plate is long so that the supporting member 98 and the supporting member 98 connected to the sealing plate are up and down.
  • the cylinder to be moved to must be longer and can be time consuming if the sealing plate is moved to the front of the maintenance opening 72.
  • the prior art requires that the sealing plate be moved and fixed to three positions, such as the lowermost end of the gate valve, the front of the carry-in opening 37 or the front of the maintenance opening 72 for chamber opening, chamber sealing or O-ring exchange. Therefore, the manufacturing method is complicated and the manufacturing cost may increase.
  • the prior art requires a separate space for the O-ring exchange, so that the gate valve may protrude above the chamber, the impact may be applied to the gate valve by the protruding portion and the space for using other equipment may be limited. .
  • FIG. 2 is a view showing a change in height of the sealing plate with time in the gate valve of FIG.
  • the height of the sealing plate means the height of the sealing plate in the gate valve when the sealing plate is moved to three positions in order to open the chamber, close the chamber, or replace the O-ring in FIG. 1.
  • the sealing plate when the gate valve is opened to open the chamber in the gate valve of FIG. 1, when the height of the sealing plate is the minimum value A, and when the gate valve is to be closed to close the chamber, the sealing plate may have an opening opening 37.
  • the height of the sealing plate must be increased to the value of B since it must be moved up to the front of the
  • the height of the sealing plate should be increased to the value C.
  • the length of the cylinder for moving the connected support member 98 and the support member 98 up and down should be longer by the difference between the B value and the C value.
  • the gate valve may become unstable and the manufacturing cost increases.
  • the O-ring replacement requires additional time since the sealing plate must be moved higher.
  • the conventional sealing member replaceable gate valve has a number of problems, such as the time it takes for the valve body and the sealing member to reach the thermal equilibrium after the sealing member replacement is very long, which wastes a lot of time and cost
  • the sealing members have problems such as being easily deteriorated or damaged due to thermal stress and thermal damage.
  • the present invention is to solve the various problems including the above problems, while maintaining the vacuum in the chamber, it is possible to easily replace the sealing plate and the sealing members, the gate valve is minimized by minimizing the moving distance of the sealing plate Stable operation, reduced manufacturing cost, saving movement time of sealing plate, saving space of gate valve, minimizing movement distance of sealing plate, stable operation of gate valve, reduction of manufacturing cost and sealing It can save the plate moving time, save the space of gate valve, determine whether the exchanged sealing member is genuine or stop the operation of the gate valve if it is not genuine, and the whole door including O-ring Replaceable, significantly reducing replacement costs and time High volume reduction reduces equipment cost, vacuum build-up time and cost, for example, by simply lowering the movable platform to allow door replacement without breaking the overall vacuum of the valve housing, By installing a heat exchanger on the inner side of the valve body, it is possible to quickly heat or cool the valve body and the replaced new first sealing member, which can greatly reduce the preparation time and cost of the equipment, and the second sealing member can be opened in the replacement area.
  • the gate valve system for solving the above problems, the sealing plate for opening and closing the chamber; A support part connected to the sealing plate; A drive unit for moving the support part up and down; A valve housing having the sealing plate and the support part therein and formed with a passage and an exchange part; A first sealing member sealing the passage by the movement of the sealing plate; And a second sealing member sealing the exchange part by the movement of the sealing plate, wherein the driving part moves the sealing plate to a position corresponding to a passage or an exchange part.
  • the sealing member exchange method of the gate valve system for solving the above problems, the sealing plate for opening and closing the chamber, the support portion connected to the sealing plate, the drive unit for moving the support part up and down, the sealing plate And a valve housing having a support portion therein and having a passage and an exchange portion, a first sealing member sealing the passage by movement of the sealing plate, and a second sealing member sealing the exchange portion by movement of the sealing plate, A first valve for communicating or shielding the outside of the valve housing and the exchange part, and a second valve for communicating or shielding the inside or the outside of the valve housing with the exchange part, wherein the driving part passes through the sealing plate through a passage or exchange part.
  • a method of replacing a closure member comprising: sealing the exchange part by movement of the sealing plate; Increasing the pressure of the exchanger through a first valve; Opening the exchange to the outside; Exchanging a first sealing member provided on the sealing plate; Sealing the exchange part; And reducing the pressure of the exchange unit through the second valve.
  • the valve housing is formed with at least one passage; A door in which a first sealing member is installed to block the passage; A movable table for supporting the door in a detachable manner; A first direction moving device capable of moving said movable table in said valve housing in a first direction from a standby position to a first position opposite said passage; A second direction moving device installed between the movable table and the door and capable of moving the door in a second direction from the first position to a second position capable of blocking the passage; And the door replacement area of the valve housing when the moving device is installed on the movable table and moved in the third direction opposite to the first direction from the standby position to the third position by using the first direction moving device. And an isolation member that is present.
  • the isolation member a lower lower surface portion formed to correspond to the inner surface of the valve housing; An intermediate inclined portion formed to be connected to the lower lower surface portion so as to correspond to an inclined surface of the protruding wall portion formed to protrude into the valve housing; And an upper lower surface portion formed to be connected to the intermediate inclined portion so as to correspond to an upper surface of the protruding wall portion.
  • the lower lower surface portion, the edge portion of the middle inclined portion and the upper lower surface portion or the contact surface of the protruding wall portion so as to release the vacuum only the door replacement area while maintaining the overall vacuum of the valve housing.
  • the second sealing member may be installed in the.
  • At least one of the valve housing or the protruding wall portion corresponding to the door replacement area, at least one of the lower surface, the front surface, and combinations thereof is selected to form a door replacement opening, and the door A cover may be installed in the replacement opening.
  • the door may be a slide replaceable door that can be attached and detached along the rail member installed in the second direction movement device.
  • the door may be a fastening replaceable door that is detachably installed to the second direction moving device using a fixture or a jig.
  • the valve housing is formed with at least one passage; A door in which a first sealing member is installed to block the passage; A movable table for supporting the door in a detachable manner; A first direction moving device capable of moving said movable table in said valve housing in a first direction from a standby position to a first position opposite said passage; A second direction moving device installed between the movable table and the door and capable of moving the door in a second direction from the first position to a second position capable of blocking the passage; And installed in the second direction moving device or the movable table, and are primarily moved from the standby position to the third position using the first direction moving device, and the third position using the second direction moving device. And an insulating member capable of isolating the door replacement area of the valve housing by being moved second to the fourth position in the second direction.
  • the isolation member may include an isolation plate formed to correspond to a side surface of the protruding wall portion protruding horizontally in a ring shape in the valve housing.
  • a second sealing member may be installed on the contact surface of the isolation plate or the protruding wall so as to release the vacuum only in the door replacement area while maintaining the overall vacuum of the valve housing.
  • At least one of the valve housing or the protruding wall portion corresponding to the door replacement area, at least one of the lower surface, the front surface, and combinations thereof is selected to form a door replacement opening, and the door A cover may be installed in the replacement opening.
  • the door may be a slide replaceable door that can be attached and detached along the rail member provided in the second direction moving device or the separator plate.
  • the door may be a fastening replaceable door that is detachably installed to the second direction moving device using a fixture or a jig.
  • the valve housing is formed with at least one passage; A valve body provided with a first sealing member to block the passage; A moving device capable of moving the valve body in the passage direction; A cover provided in the opening of the replacement area of the valve housing so as to replace the first sealing member while maintaining the vacuum state of the vacuum area of the valve housing; And a heat exchanger installed on the cover to heat or cool the valve body or the first sealing member.
  • the gate valve is stable by minimizing the moving distance of the sealing plate It can reduce the manufacturing cost, save the moving time of the sealing plate, save the space of the gate valve, minimize the moving distance of the sealing plate, operate the gate valve stably, reduce the manufacturing cost and It can save travel time, save space of gate valve, determine whether the exchanged sealing member is genuine, stop the operation of gate valve if it is not genuine, and replace the whole door including O-ring. Significantly reduce replacement costs and time, and reduce the volume of equipment In order to reduce the unit cost and the time and cost of vacuum formation.
  • simply lowering the movable platform allows the door to be replaced without breaking the overall vacuum of the valve housing, simplifying the operation and operation of the equipment. It is possible to improve the durability and performance of the equipment, and by installing a heat exchanger on the inner side of the cover which can be opposed to the valve body, it is possible to quickly heat or cool the valve body and the replaced new first sealing member to prepare the equipment. It can significantly reduce the cost and cost, and minimize the thermal stress and thermal damage by installing the second sealing member in the opening part of the replacement area to keep it away from the high temperature process module. It has the effect of greatly increasing. Of course, the scope of the present invention is not limited by these effects.
  • FIG. 1 is a side view illustrating an example of a conventional gate valve by way of example.
  • FIG. 2 is a view showing a change in height of the sealing plate with time in the gate valve of FIG.
  • 3A and 3B are side views illustrating an example of a gate valve according to the present invention.
  • FIG. 4 is a perspective view illustrating an example of a gate valve according to the present invention.
  • FIG. 5 is a front view exemplarily showing an example of a sealing plate according to the present invention.
  • 6A, 6B, 6C and 6D are side views illustrating an example of a gate valve according to the present invention.
  • FIG. 7 is a side view illustrating an example of a gate valve according to the present invention.
  • FIG. 8 is a side view illustrating an example of a gate valve according to the present invention.
  • FIG. 9 is a view showing the height change of the sealing plate over time in the gate valve according to the present invention.
  • 10A, 10B and 10C are side views illustrating an example of a gate valve according to the present invention.
  • FIG. 11 is a flowchart illustrating an example of a method of replacing a sealing member according to the present invention.
  • FIG. 12 is a side view illustrating an example of a gate valve according to the present invention.
  • FIG. 13 is a side view illustrating an example of a gate valve according to the present invention.
  • FIG. 14 is a side view illustrating an example of a gate valve according to the present invention.
  • FIG. 15 is a side view illustrating an example of a gate valve according to the present invention.
  • 16 is a flowchart illustrating an example of a method of replacing a sealing member according to the present invention.
  • FIG. 17 is an external perspective view illustrating a door replaceable gate valve system in accordance with some embodiments of the present disclosure.
  • FIG. 18 is an exploded perspective view of parts illustrating the door replaceable gate valve system of FIG. 17; FIG.
  • FIG. 19 is a cross-sectional view illustrating an example of the door replaceable gate valve system of FIG. 17.
  • FIG. 20 is a cross-sectional view illustrating another example of the door replaceable gate valve system of FIG. 17.
  • FIG. 21 is an enlarged perspective view illustrating a door of the door replaceable gate valve system of FIG. 17.
  • FIG. 21 is an enlarged perspective view illustrating a door of the door replaceable gate valve system of FIG. 17.
  • FIG. 22 is a perspective view illustrating another example of the door replacement opening of the door replaceable gate valve system of FIG. 17.
  • FIG. 23 is a perspective view illustrating still another example of the door replacement opening of FIG. 17.
  • FIG. 23 is a perspective view illustrating still another example of the door replacement opening of FIG. 17.
  • FIG. 24 is a cross-sectional view illustrating still another example of the door replacement opening of FIG. 17.
  • FIG. 25 is a view illustrating a normal operation process of the door replaceable gate valve system of FIG. 17.
  • FIG. 26 is a view illustrating a door replacement process of the door replaceable gate valve system of FIG. 17.
  • FIG. 27 is a flowchart illustrating an operation process of the door replaceable gate valve system of FIG. 17.
  • FIG. 28 is a cross-sectional view illustrating a door replaceable gate valve system in accordance with some other embodiments of the present invention.
  • FIG. 29 is a flowchart illustrating an example of a genuine product identification process of a door of the door replaceable gate valve system of FIG. 17.
  • FIG. 30 is a flowchart illustrating another example of a genuine product identification process of the door of the door replaceable gate valve system of FIG. 29.
  • FIG. 31 is an exploded perspective view illustrating a door of a door replaceable gate valve system in accordance with some other embodiments of the present invention.
  • FIG. 32 is a component assembly cross-sectional view illustrating the door replaceable gate valve system of FIG. 31.
  • FIG. 33 is an enlarged perspective view illustrating an enlarged door of the door replaceable gate valve system of FIG. 31.
  • FIG. 34 is a cross-sectional view illustrating the door of the door replaceable gate valve system of FIG. 31.
  • 35 is an exploded perspective view illustrating a door of a door replaceable gate valve system in accordance with some other embodiments of the present invention.
  • 36 is an external perspective view illustrating a door replaceable gate valve system in accordance with some embodiments of the present disclosure.
  • FIG. 37 is an exploded perspective view of parts illustrating the door replaceable gate valve system of FIG. 36;
  • FIG. 38 is a cross-sectional view illustrating an example of the door replaceable gate valve system of FIG. 36.
  • FIG. 39 is a cross-sectional view illustrating another example of the door replaceable gate valve system of FIG. 36.
  • FIG. 39 is a cross-sectional view illustrating another example of the door replaceable gate valve system of FIG. 36.
  • FIG. 40 is an enlarged perspective view illustrating a door of the door replaceable gate valve system of FIG. 36.
  • FIG. 41 is a perspective view illustrating another example of the door replacement opening of the door replaceable gate valve system of FIG. 36.
  • FIG. 42 is a perspective view illustrating still another example of the door replacement opening of FIG. 36.
  • FIG. 42 is a perspective view illustrating still another example of the door replacement opening of FIG. 36.
  • FIG. 43 is a cross-sectional view showing still another example of the door replacement opening of FIG. 36.
  • FIG. 44 is a view illustrating a normal operation process of the door replaceable gate valve system of FIG. 36.
  • FIG. 45 is a view illustrating a door replacement process of the door replaceable gate valve system of FIG. 36.
  • 46 is a flowchart illustrating an operation of the door replaceable gate valve system of FIG. 36.
  • 47 is a cross-sectional view illustrating a door replaceable gate valve system in accordance with some other embodiments of the present invention.
  • FIG. 48 is an exploded perspective view illustrating a door of a door replaceable gate valve system in accordance with some other embodiments of the present invention.
  • FIG. 49 is a component assembly cross-sectional view illustrating the door replaceable gate valve system of FIG. 48.
  • FIG. 49 is a component assembly cross-sectional view illustrating the door replaceable gate valve system of FIG. 48.
  • FIG. 50 is an enlarged perspective view illustrating an enlarged door of the door replaceable gate valve system of FIG. 48.
  • FIG. 51 is a cross-sectional view illustrating a door of the door replaceable gate valve system of FIG. 48.
  • FIG. 51 is a cross-sectional view illustrating a door of the door replaceable gate valve system of FIG. 48.
  • FIG. 52 is an exploded perspective view illustrating a door of a door replaceable gate valve system in accordance with some other embodiments of the present invention.
  • FIG. 53 is an external perspective view illustrating a door replaceable gate valve system in accordance with some embodiments of the present disclosure.
  • FIG. 54 is a sectional view of the door replaceable gate valve system of FIG. 53.
  • FIG. 55 is an exploded perspective view of parts of the door replaceable gate valve system of FIG. 53;
  • FIG. 56 is a perspective view illustrating the valve housing of the door replaceable gate valve system of FIG. 53.
  • FIG. 56 is a perspective view illustrating the valve housing of the door replaceable gate valve system of FIG. 53.
  • FIG. 57 is an exploded perspective view of a part of the valve housing of the door replaceable gate valve system of FIG. 53; FIG.
  • FIG. 58 is a perspective view illustrating a door of the door replaceable gate valve system of FIG. 53.
  • FIG. 58 is a perspective view illustrating a door of the door replaceable gate valve system of FIG. 53.
  • FIG. 59 is a cross-sectional perspective view illustrating a fastening state of a door of the door replaceable gate valve system of FIG. 53.
  • FIG. 60 is a perspective view illustrating the anti-friction member of the door replaceable gate valve system of FIG. 53.
  • FIG. 61 is a perspective view illustrating the anti-friction member of FIG. 60.
  • FIG. 62 is a perspective view illustrating the isolation plate of the door replaceable gate valve system of FIG. 53.
  • FIG. 63 is a side view illustrating an open state of the opening of the door replaceable gate valve system of FIG. 53; FIG.
  • 64 is a side view illustrating an open state of a guide pin member of the door replaceable gate valve system of FIG. 53.
  • FIG. 65 is a side view illustrating a closed state of the guide pin member of the door replaceable gate valve system of FIG. 53.
  • FIG. 66 is a perspective view illustrating a pin type jig of the door replaceable gate valve system of FIG. 53.
  • FIG. 67 is a perspective view illustrating a use state of a fastening jig and a chamber jig of a single type jig of a door replaceable gate valve system according to another exemplary embodiment.
  • FIG. 68 is a perspective view illustrating a state of use of a multi-type jig of a door replaceable gate valve system according to some other embodiments of the inventive concept.
  • FIG. 69 is an enlarged perspective view illustrating the chamber jig of the door replaceable gate valve system of FIG. 67;
  • 70 is a perspective view illustrating a door detection sensor of the door replaceable gate valve system of FIG. 68.
  • FIG. 71 is an enlarged view illustrating an enlarged door detection sensor of FIG. 70.
  • FIG. 72 is a flowchart illustrating a door replacement process of the door replaceable gate valve system according to some embodiments of the present invention.
  • 73 is a flowchart illustrating a door replacing method of the door replaceable gate valve system in accordance with some embodiments of the present invention.
  • FIG. 74 is an external perspective view illustrating a gate valve system in accordance with some embodiments of the present invention.
  • FIG. 75 is a cross-sectional view illustrating the gate valve system of FIG. 74.
  • FIG. 76 is a cross-sectional view illustrating a passage closed state of the gate valve system of FIG. 75.
  • FIG. 77 is a cross-sectional view illustrating a valve body retracted state of the gate valve system of FIG. 76.
  • FIG. 78 is a cross-sectional view illustrating a valve body lowered state of the gate valve system of FIG. 77.
  • FIG. 79 is a cross-sectional view illustrating a closed area of a replacement valve of the gate valve system of FIG. 78.
  • FIG. 80 is a cross-sectional view illustrating a lid opening and a sealing member separated state of the gate valve system of FIG. 79.
  • FIG. 81 is a cross-sectional view illustrating a sealing member replacement state of the gate valve system of FIG. 80.
  • FIG. 82 is a cross-sectional view illustrating a lid fastening and heating or cooling state of the gate valve system of FIG. 81.
  • FIG. 83 is a perspective view illustrating an example of a rotatable lid of the gate valve system of FIG. 74.
  • FIG. 84 is a perspective view illustrating an example of a sliding lid of the gate valve system of FIG. 74.
  • FIG 85 is a cross-sectional view illustrating a replacement area sealed state of a gate valve system according to some other embodiments of the present invention.
  • FIG. 86 is a cross-sectional view illustrating a cover opening and a sealing plate detachment state of the gate valve system of FIG. 85.
  • 87 is a cross-sectional view illustrating a heat exchange device of a gate valve system according to some other embodiments of the present invention.
  • FIG. 88 is a cross-sectional view illustrating a valve body of a gate valve system in accordance with some other embodiments of the present invention.
  • 89 is a cross-sectional view illustrating a replaceable block of a gate valve system according to some other embodiments of the present invention.
  • FIG. 90 is a front view illustrating the sealing plate of the gate valve system of FIG. 85.
  • FIG. 91 is a cross-sectional view illustrating an example of a sealing plate of the gate valve system of FIG. 90.
  • FIG. 92 is a cross-sectional view illustrating another example of the sealing plate of the gate valve system of FIG. 91.
  • 93 is a flowchart illustrating a method of controlling a gate valve system according to some embodiments of the present invention.
  • 94 is a flowchart illustrating a method of controlling a gate valve system according to some other embodiments of the present invention.
  • 3A and 3B are side views illustrating an example of a gate valve according to the present invention.
  • the gate valve 100 has an opening 210 of the first chamber 200 facing the second passage 152b and an opening 310 of the second chamber 300 having the first opening. It may be provided between the first chamber 200 and the second chamber 300 to face the passage (152a).
  • the gate valve 100 may include a sealing plate 110, a horizontal driving part 120, a support part 130, a driving part 140, and a valve housing 150.
  • the first chamber 200 may be coupled to the gate valve 100 and may send an object, such as a wafer, to the second chamber 300 or receive an object from the second chamber 300 through the opening 210. have.
  • the second chamber 300 may be coupled to the gate valve 100, and receives an object to be processed, such as a wafer, from the first chamber 200 or sends the object to the first chamber 200 through the opening 310. Can be performed.
  • an object to be processed such as a wafer
  • first chamber 200 and the second chamber 300 do not necessarily have to be in a relationship of transmitting or receiving an object to be processed and may correspond to independent process chambers.
  • FIG. 4 is a perspective view illustrating an example of a gate valve according to the present invention.
  • the gate valve 100 may include a sealing plate 110, a support 130, a driver 140, a valve housing 150, and an exchange 154.
  • the exchange part 154 may be located on any one surface of the front surface 154a, the bottom surface 154c, or the side surface 154d of the gate valve 100, as shown in FIG.
  • the front and lower surfaces of the gate valve 100 may be located over the front and side, the bottom and side or the front and bottom and side.
  • the exchange unit 154 is located on any two surfaces of the front, bottom, side surfaces of the gate valve 100 or located on three surfaces of the front, bottom, side surfaces, the exchange unit 154 is widened. 1 may be easy to replace the sealing member (112).
  • the sealing plate 110 may be connected to the support 130. More specifically, when the sealing plate 110 may be coupled to the support 130 through the horizontal driving unit 120 and the driving unit 140 performs the function of the horizontal driving unit 120, the horizontal driving unit 120 is unnecessary.
  • the sealing plate 110 may be directly coupled to the support 130.
  • the configuration of the sealing plate 110 will be described with reference to FIG. 5.
  • FIG. 5 is a front view exemplarily showing an example of a sealing plate according to the present invention.
  • the sealing plate 110 may include a first sealing member 112 and a second sealing member 114 surrounding the first sealing member 112 on a front surface thereof.
  • the first sealing member 112 and the second sealing member 114 may correspond to an o-ring.
  • the front surface of the sealing plate 110 is bounded by the first sealing member 112 provided on the front surface of the inner region (A) of the first sealing member 112 is used to seal the chamber and the first sealing
  • the outer area B of the member 112 can be distinguished as a part used only when closing the exchange part 154.
  • the first sealing member 112 may vary in shape depending on the shape of the first passage 152a connected to the chamber and may be coupled to the front surface of the sealing plate 110.
  • the first sealing member 112 performs a function of closing the first passage 152a by the movement of the sealing plate 110 to seal the chamber and may be damaged by chemicals generated by a process in the chamber. It needs to be replaced.
  • the first sealing member 112 is provided on the inner surface of the valve housing 150 in a manner of enclosing the first passage 152a at intervals from the first passage 152a rather than the front surface of the sealing plate 110. May be
  • the second sealing member 114 may vary in shape depending on the shape of the exchanger 154 and may be coupled to the front surface of the sealing plate 110 to surround the first sealing member 112.
  • the second sealing member 114 seals the exchange part 154 by the movement of the sealing plate 110 so that the inside of the gate valve 100 can replace the first sealing member 112 while maintaining a vacuum. You can do that.
  • the second sealing member 114 may be provided on the inner surface of the valve housing 150 in a form surrounding the exchange portion 154 not the front surface of the sealing plate 110, as shown in Figure 3b.
  • the second sealing member 114 is not used while the first sealing member 112 is in close contact with the chamber to seal the chamber and is used only when replacing the first sealing member 112. This is because the second sealing member 114 should not be damaged in order to periodically replace the first sealing member 112 while maintaining the vacuum through the second sealing member 114.
  • 6A to 6D will be described to describe a method for selectively using the first sealing member 112 and the second sealing member 114.
  • 6A, 6B, 6C and 6D are side views illustrating an example of a state of a gate valve according to the present invention.
  • the gate valve 100 may have four states as the sealing plate 110 moves back and forth or up and down.
  • the sealing plate 110 may have a protrusion formed at the center of the surface thereof, and the protrusion may include the first sealing member 112 and the peripheral portion surrounding the protrusion may include the second sealing member 114.
  • the gate valve 100 may be configured to use only the second sealing member 114.
  • the gate valve 100 may be configured to selectively use the first sealing member 112 and the second sealing member 114 in various ways, without being limited to such a method, and will be described with reference to FIGS. 7 and 8.
  • FIG. 7 is a side view illustrating an example of a gate valve according to the present invention.
  • the first sealing member 112 and the second sealing member 114 may be formed in parallel on the same plane without the protrusion on the sealing plate 110, and the grooves may be formed along the first passage 152a. 151, when the first sealing member 112 is in close contact with the first passage 152a, the second sealing member 114 is positioned above the groove 151 so that the second sealing member 114 is used.
  • the gate valve 100 can be configured so as not to.
  • FIG. 8 is a side view illustrating an example of a gate valve according to the present invention.
  • the second sealing member 114 may be provided on the inner side of the valve housing 150 at intervals from the exchange part 154 instead of the front surface of the sealing plate 110, in which case the sealing plate.
  • the second sealing member 114 is not used when the first sealing member 112 is in close contact with the first passage 152a even when the protrusion 110 is not disposed on the 110.
  • the horizontal driving unit 120 may be coupled to the rear surface of the sealing plate 110 and the support 130.
  • the horizontal driving part 120 advances the sealing plate 110 so that the first sealing member 112 is in close contact with the first passage 152a as shown in FIG. 6B, or the second sealing member is attached to the exchange part 154 as shown in FIG. 6D. 114 may be in close contact.
  • the horizontal driving unit 120 reverses the sealing plate 110 so that the first sealing member 112 is separated from the first passage 152a as shown in FIG. 6A or from the exchange unit 154 as shown in FIG. 6C.
  • the sealing member 114 may be separated.
  • the sealing plate 110 may be moved back and forth through another method that does not use the horizontal driving unit 120. At this time, since the horizontal driving unit 120 is unnecessary, the sealing plate 110 may be directly coupled to the support 130. Can be.
  • the driving unit 140 may be configured to automatically tilt forward after the support 130 moves up and down, and may be configured to automatically tilt backward while the support 130 moves up and down.
  • the sealing plate 110 coupled to the support 130 may also be inclined forward or backward so that the sealing plate 110 may be moved forward or backward so that the horizontal driving part 120 may be unnecessary.
  • the support 130 may be connected to the sealing plate 110. More specifically, the support unit 130 may be coupled to the sealing plate 110 through the horizontal driving unit 120 and the driving unit 140 performs the function of the horizontal driving unit 120 so that the horizontal driving unit 120 is unnecessary The support 130 may be directly coupled to the sealing plate 110.
  • the support 130 may be coupled to the driving unit 140 to move the sealing plate 110 up and down.
  • the driver 140 may be coupled to the support 130 to move the support 130 up and down, and then fix the support 130 to the moved position.
  • the driving unit 140 moves the support 130 up and down to move the sealing plate 110 coupled to the support 130 to a position corresponding to the first passage 152a as shown in FIG. 6A or FIG. It may be fixed after moving to a position corresponding to the exchange unit 154, such as 6c.
  • the driving unit 140 is configured such that the sealing plate 110 is moved and fixed only at two positions of the corresponding positions of the first passage 152a or the corresponding positions of the exchange unit 154, so that the sealing plates 110 have three kinds.
  • the distance that the sealing plate 110 should move up and down can be reduced and the manufacturing method becomes simpler than the case where it is configured to be fixed by moving to the above position, the gate valve 100 can be more stable and manufacturing cost can be reduced. .
  • the length of the support 130 may be reduced, and a cylinder (not shown) provided in the driving unit 140 to move the support 130 is provided.
  • the length of can also be reduced. Therefore, the size of the gate valve 100 can be reduced to save space, the manufacturing cost can be reduced, and the time for the sealing plate to move can be shortened.
  • the sealing plate 110 may be more shaken away from the driving unit 140, the sealing effect may gradually decrease.
  • the sealing unit 110 is configured to move and fix only the two positions, the driving unit 140 Since the distance from the 140 to the maximum position of the sealing plate 110 can be reduced, the distance is large and the problem of reducing the sealing effect can be improved.
  • the valve housing 150 may include a sealing plate 110 and a support 130 therein, and a passage 152 and an exchange part 154 may be formed in the valve housing 150.
  • the first passage 152a and the exchange part 154 may be formed at the upper and lower portions, respectively, and may be formed by changing the upper and lower sides.
  • a second passage 152b may be formed at the other side of the valve housing 150.
  • the exchange part 154 may be formed on the front surface, the bottom surface or the side surface of the valve housing 150, or may be formed over two or more surfaces among the front surface, the bottom surface or the side surface of the valve housing 150. .
  • the exchange part 154 may be formed at a height lower than the passage 152.
  • the exchange part 154 may allow the first sealing member 112 to be replaced while maintaining a vacuum.
  • the exchange unit 154 may include an exchange opening 155 formed at one side of the valve housing 150 as illustrated in FIG. 6A, and the gate valve 100 may include an exchange cover that opens and closes the exchange opening 155. 160 may be included.
  • An exchange opening 155 included in the exchange part 154 may be formed between the first sealing member 112 and the second sealing member 114. That is, when the sealing plate 110 is moved to seal the exchange opening 155, the first sealing member 112 is included inside the exchange opening 155, and the outside of the exchange opening 155 is made of the first sealing member 112. It may be surrounded by the two sealing member (114).
  • the inside of the gate valve 100 can maintain a vacuum, and the exchange can be performed while the vacuum is maintained.
  • the first sealing member 112 may be exchanged through the opening 155.
  • the second passage 152b and the first passage 152a may function as a passage for moving a target object such as a wafer between the first chamber 200 and the second chamber 300 and the exchange unit 154. Makes it possible to replace the first sealing member 112 from the outside.
  • the second passage 152b may be configured to face the opening 210 of the first chamber 200 and the first passage 152a may be configured to face the opening 310 of the second chamber 300. .
  • the front side of the exchange unit 154 may be configured such that the second chamber 300 is embedded.
  • the exchange unit 154 is located at the front of the gate valve 100 as shown in FIG. The reason for this is that the sealing member 112 can be easily replaced.
  • the space may be unnecessary when the exchange part 154 is located on the bottom or side surfaces of the gate valve 100. This is because there may be no chamber in front of the lower surface or the side surface of the gate valve 100.
  • the first chamber 200 and the second chamber 300 are gate valves not only when the gate valve 100 is in the same state as in FIG. 6C but also when the gate valve 100 is in the same state as in FIG. 6D.
  • the target object such as a wafer can be moved through the 100.
  • the sealing plate 110 is positioned between the second passage 152b and the first passage 152a so that the first chamber The 200 and the second chamber 300 may not be able to move a target object such as a wafer through the gate valve 100.
  • the process can be as follows.
  • the first step is the loading or unloading of the workpiece.
  • the gate valve 100 is in a state as shown in FIG. 6C and the second chamber 300 receives the workpiece from the first chamber 200 or the first chamber 200. You can send the object to
  • the second step is an upward movement step, in which the gate valve 100 moves the sealing plate 110 upward so as to be in a state as shown in FIG. 6A.
  • the third step is a sealing step, and the gate valve 100 advances the sealing plate 110 to close the first passage 152a, seal the second chamber 300, and remain in the state as shown in FIG. 6B.
  • the fourth step is a process step, the second chamber 300 may proceed the process in a closed state.
  • the fifth step is an opening step.
  • the gate valve 100 reverses the sealing plate 110 to open the first passage 152a, open the second chamber 300, and remain in the state as shown in FIG. 6A.
  • the sixth step is a downward movement step, in which the gate valve 100 moves the sealing plate 110 downward so as to be in a state as shown in FIG. 6C.
  • the first passage 152a and the exchange part 154 are formed at the upper side and the lower side at one side of the valve housing 150, and the sealing unit 110 is provided by providing the driving unit 140 at the lower side of the valve housing 150.
  • the moving distance of the sealing plate 110 may be minimized by allowing the first sealing member 112 to be exchanged through the exchange unit 154.
  • FIG. 9 is a view showing the height change of the sealing plate with time in the gate valve according to the present invention.
  • the height of the sealing plate 110 refers to the sealing plate 110 in the gate valve 100 when the sealing plate 110 is moved in order to open the chamber, seal the chamber, or replace the first sealing member 112. ) Means the height.
  • the height of the sealing plate 110 is A, which is the minimum value, and the gate valve 100 is closed for the chamber sealing.
  • the height of the sealing plate 110 should be increased to the B value.
  • the first sealing member 112 in order to replace the first sealing member 112, unlike the prior art FIG. 1, it is not necessary to further increase the sealing plate 110. This is because when the gate valve 100 is opened while the height of the sealing plate 110 becomes the minimum A, the first sealing member 112 may be exchanged through the exchange part 154.
  • the support 130 and the driving unit for moving the sealing plate 110 are different.
  • the length of the cylinder provided in the interior of 140 can be minimized. If the length of the support 130 and the cylinder is minimized, the driving unit 140 may be stabilized and manufacturing costs may be reduced.
  • the sealing plate 110 need not be moved higher for the first sealing member 112 to be replaced, time can be saved.
  • the present invention unlike the prior art Figure 1, because the space protruding upward in order to replace the first sealing member 112, it is possible to save space.
  • the exchange cover 160 may be coupled to the valve housing 150 to open and close the exchange opening 155 included in the exchange unit 154 formed in the valve housing 150.
  • the exchange cover 160 may close the exchange opening 155 so that the inside of the gate valve 100 maintains a vacuum despite the exchange opening 155. Therefore, in order to replace the first sealing member 112 through the exchange opening 155, the exchange cover 160 must be opened.
  • the second sealing member 114 may be in close contact with the exchange opening 155 as shown in FIG. 6D to maintain the vacuum inside the gate valve 100.
  • the second sealing member when the second sealing member is provided on the inner side of the valve housing 150 as shown in FIGS. 3B and 8, the second sealing member 114 which advances the sealing plate 110 to surround the exchange opening 155. To be in close contact with each other, the inside of the gate valve 100 may be maintained even after the exchange cover 160 is opened.
  • 10A, 10B and 10C are side views illustrating an example of a gate valve according to the present invention.
  • the gate valve 100 may further include an air supply 170 and an exhaust system 180.
  • the air supply machine 170 may include a first flow path 172 communicating with the outside of the valve housing 150 and the exchange part 154, and a first valve 174 opening and closing the first flow path 172. have.
  • the outside of the valve housing 150 may mean a gas supply provided outside the valve housing 150 to supply an inert gas or clean air.
  • the exhaust system 180 includes a second flow passage 182 communicating the interior of the valve housing 150 and the exchange unit 154 and a second valve 184 opening and closing the second flow passage 182 as shown in FIG. 10A.
  • 10B may include a second channel 182 communicating with the outside of the valve housing 150 and the exchange unit 154, and a second valve 184 opening and closing the second channel 182. have.
  • valve housing 150 refers to a space inside the valve housing 150 in which vacuum is maintained when the first sealing member 112 is replaced
  • the exterior of the valve housing 150 refers to a valve housing 150. It may mean a vacuum suction device provided outside to suck the gas.
  • the first valve 174 may be connected to the first passage 172 and positioned outside the valve housing 150.
  • the first valve 174 may communicate or shield the outside of the valve housing 150 and the exchange part 154.
  • the inside of the exchange opening 155 included in the exchange unit 154 is a vacuum
  • the gas is provided outside the valve housing 150 to supply inert gas or clean air. Air supplied from the feeder may be introduced into the exchange opening 155 through the first flow passage 172 until the pressure inside the exchange opening 155 becomes atmospheric pressure.
  • the second valve 184 may be connected to the second passage 182 and may be located inside or outside the valve housing 150.
  • the second valve 184 may communicate or shield the inside or the outside of the valve housing 150 and the exchange part 154. Looking more specifically as follows.
  • valve housing 150 When the inside of the valve housing 150 is vacuum and the pressure of the air inside the exchange opening 155 included in the exchange unit 154 is atmospheric pressure, when the second valve 184 is opened, the air inside the exchange opening 155 is opened. May flow into the valve housing 150 maintained in a vacuum state through the second flow path 182 to decrease the pressure inside the exchange opening 155.
  • the operation means (not shown) for operating the second valve 184 is provided on the outside of the valve housing 150 can do.
  • the exchange opening 155 included in the exchange unit 154 When the pressure of the air inside the exchange opening 155 included in the exchange unit 154 is atmospheric pressure, when the second valve 184 is opened, the exchange opening is provided outside the valve housing 150 to a vacuum suction unit that sucks gas. Air inside the 155 may be leaked to decrease the pressure inside the exchange opening 155.
  • the air supply unit 170 and the exhaust system 180 may be configured as a single common valve.
  • a single valve may be connected to a single pump capable of both gas supply and vacuum suction.
  • the air supply unit 170 and the exhaust system 180 may be configured with a plurality of valves, respectively, to precisely adjust the pressure.
  • the air supply machine 170 may be composed of two valves for supplying and exhausting
  • the exhaust system 180 may be configured with two valves for supplying and exhausting.
  • the air supply machine 170 and the exhaust system 180 may include an air supply opening 173 and an exhaust opening 183 instead of the first flow passage 172 and the second flow passage 182. It may be.
  • the air supply opening 173 and the exhaust opening 183 may be openings formed in the wall constituting the valve housing 150.
  • FIG. 11 is a flowchart illustrating an example of a method of replacing a sealing member according to the present invention.
  • the sealing member exchanging method 500 may include a downward movement step 510 to an exchange part internal opening step 580.
  • the sealing plate 110 is moved downward to be in a state as shown in FIG. 6C.
  • the sealing part 110 may be advanced to close the exchange part 154 by bringing the second sealing member 114 provided on the sealing plate 110 into close contact with the exchange part 154. It is in the same state as in Fig. 6D.
  • the pressure of the exchange unit 154 may be slowly increased by opening the first valve 174.
  • the exchange unit 154 may be opened to the outside.
  • the exchange opening 160 included in the exchange unit 154 may be opened to the outside by opening the exchange cover 160 from the outside.
  • the first sealing member 112 provided in the sealing plate 110 may be replaced.
  • the exchange part 154 opened to the outside may be sealed.
  • the exchange opening 160 included in the exchange unit 154 may be sealed by closing the exchange cover 160 from the outside.
  • the pressure of the exchange part 154 may be slowly decreased by opening the second valve 184.
  • the sealing plate 110 may be reversed to open the exchange part 154 inward, and the state may be in a state as illustrated in FIG. 6C.
  • FIG. 12 is a side view illustrating an example of a gate valve according to the present invention.
  • an inclined surface 156 may be formed in the exchange opening 155 included in the exchange unit 154 so that the cross-sectional area thereof increases from the inside to the outside.
  • the inclined surface 156 may be provided at the edge of the sealing plate 110 to quickly and easily replace the first sealing member 112 that is difficult to replace.
  • FIG. 13 is a side view illustrating an example of a gate valve according to the present invention.
  • the exchange cover 160 may have a protruding needle 162 coupled with the first sealing member 112, and a plurality of protruding needles 162 may be formed.
  • the protruding needle 162 may be coupled to the first sealing member 112 when the sealing plate 110 is advanced in the exchange sealing step 520 of FIG. 11.
  • the protruding needle 162 may be provided at the edge of the sealing plate 110 to quickly and easily recover and replace the first sealing member 112 that is difficult to replace.
  • FIG. 14 is a side view illustrating an example of a gate valve according to the present invention.
  • each sealing plate 110 may include a first passage 152a and a second passage 152b. ) Can be sealed.
  • the first sealing member 112 provided on both sealing plates 110 can be replaced through the first exchange opening 155a and the second exchange opening 155b.
  • FIG. 15 is a side view illustrating an example of a gate valve according to the present invention.
  • the first sealing member 112 may include an identification tag 113 and the gate valve 100 may further include an identification unit 190 and a controller 195. .
  • the identification tag 113 may be combined with the first sealing member 112, may be provided inside the first sealing member 112, or may be printed on the surface of the first sealing member 112, and the identification unit 190 may be provided with a first tag. Information about the sealing member 112 may be provided.
  • the identification tag 113 may be a QR code, a barcode, or a radio frequency identification (RFID) tag.
  • the identification unit 190 may be coupled to the valve housing 150 or the sealing plate 110 to be provided inside the gate valve 100 to identify the identification tag 113 of the first sealing member 112.
  • the identification unit 190 may be a reader capable of recognizing a QR code, a barcode or an RFID tag.
  • the controller 195 may be provided inside or outside the gate valve 100 to control the gate valve 100. More specifically, the controller 195 is the drive unit 140, the sealing plate 110, the exchange cover 160 in accordance with the identification result of the identification unit 190 identified the identification tag 113 of the first sealing member (112). ), The gate valve 100 may be controlled by controlling at least one of the first valve 174 and the second valve 184.
  • 16 is a flowchart illustrating an example of a method of replacing a sealing member according to the present invention.
  • the sealing member exchanging method 500 may include an exchanging sealing step 610 to an stopping step 695.
  • the sealing plate 110 is moved downward to be in a state as illustrated in FIG. 6C, and then the sealing plate 110 is advanced to move the second sealing member 114 provided in the sealing plate 110. In contact with the exchanger 154 or by advancing the sealing plate 110 to the second sealing member 114 provided on the inner side of the valve housing 150 to seal the exchanger 154. It will be in the same state as 6d.
  • the pressure of the exchange unit 154 may be slowly increased by opening the first valve 174.
  • the exchange unit 154 may be opened to the outside.
  • the exchange opening 160 included in the exchange unit 154 may be opened to the outside by opening the exchange cover 160 from the outside.
  • the first sealing member 112 provided in the sealing plate 110 may be replaced.
  • the identification unit 190 may identify the tag 113 of the exchanged first sealing member 112 and transmit the identification result to the control unit 195. If the received identification result matches the predetermined identification information, the control unit 195 allows the exchange sealing step 660 to the internal opening step 680 to be performed. If there is a mismatch, the display step 690 and the deactivation step 695 can be performed.
  • the inconsistency with the identification information may mean, for example, that the exchanged first sealing member 112 is not genuine, and in this case, the control unit 195 causes the operation stop step 695 to be performed. The operation of the valve 100 can be stopped.
  • the exchange part 154 opened to the outside may be sealed.
  • the exchange opening 160 included in the exchange unit 154 may be sealed by closing the exchange cover 160 from the outside.
  • the pressure of the exchange part 154 may be slowly decreased by opening the second valve 184.
  • the sealing plate 110 may be reversed to open the exchange part 154 inward and may be in a state as shown in FIG. 6C.
  • control unit 195 may inform the user visually or audibly that the identification result of the exchanged first sealing member 112 is inconsistent with the predetermined identification information.
  • control unit 195 prevents the exchange cover 160 from closing, opening the second valve 184, or preventing the sealing plate 110 from reversing so that the gate valve 100 enters the process. It can be prevented from being used.
  • the exchange unit 154 maintains an atmospheric pressure state.
  • the chamber is prevented from proceeding with the first sealing member 112 being incorrectly replaced with an inappropriate sealing member.
  • the gate valve may be well maintained in a vacuum state, and only the authorized first sealing member 112 may be used interchangeably.
  • the sealing member identification step 650 may be performed after the exchange part sealing step 660. That is, after closing the exchanger 154 opened to the outside, the identification unit 190 may identify the exchanged first sealing member 112.
  • control unit 195 may prevent the gate valve 100 from being used in the process by preventing the second valve 184 from being opened or reversing the sealing plate 110 in the operation stop step 695. .
  • door replaceable gate valve systems 1100, 1200, 1300, and 1400 according to various embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.
  • the door may be a concept that is substantially the same as the sealing plate or includes a sealing plate.
  • FIG. 17 is an external perspective view illustrating a door replaceable gate valve system 1100 according to some embodiments of the present disclosure.
  • 18 is an exploded perspective view showing parts of the door replaceable gate valve system 1100 of FIG. 17, and
  • FIG. 19 is a cross-sectional view illustrating an example of the door replaceable gate valve system 1100 of FIG. 17.
  • the door replaceable gate valve system 1100 may be classified into a valve housing 10, a door 20, and a movable table ( 30, a first direction movement device 40, a second direction movement device 50, and an isolation member 60.
  • valve housing 10 is a hollow box-shaped structure as a whole, and at least one passage 10a may be formed.
  • valve housing 10 the passage (10a) on one side or both sides so that various objects, such as advanced semiconductor devices such as semiconductor chips, wafers, LCD panels, OLED panels, display devices or other medical devices can enter and exit. It may be a structure to be formed.
  • the valve housing 10 includes the door 20, the movable table 30, the first direction movement device 40, the second direction movement device 50, and the isolation member described above. It can support 60 and be a structure having sufficient strength and durability to be connected to various chambers.
  • the valve housing 10 is not limited to the drawings, as conceptually illustrated in the drawings, and various types and types of passages or valve housings may be applied.
  • the door 20 is a kind of valve body in which a first sealing member S1 is installed to block the passage 10a. ) May be formed according to the detective of the passage (10a) to correspond to the shape of the passage (10a).
  • the first sealing member S1 may be a sealing member such as an O-ring or a gasket for airtightness.
  • the door 20 is shown for the sake of understanding, and is not limited to the drawings, it can be applied in various ways, such as being installed in various numbers or additionally installed various sealing members or various joints or hinge structures.
  • the movable table 30 is a kind of structure similar to a head block that supports the door 20 in a detachable manner, and moves in the first direction to be described later.
  • the device 40 may be installed to be movable.
  • the movable table 30 is not limited to the drawings, of course.
  • the said 1st direction movement apparatus 40 opposes the said movable stand 30 to the said valve housing 10 with the said passage 10a in a standby position.
  • actuators such as a cylinder, a motor, a power transmission device, or a gear box, which can move in the first direction to the first position, may be applied.
  • the said 2nd direction movement apparatus 50 is installed between the said movable stand 30 and the door 20,
  • the door 20 A wide variety of actuators, such as a cylinder, a motor, a power transmission device, or a gear box, which can move in the second direction from the first position to the second position where the passage 10a can be blocked, can be applied.
  • first direction moving device 40 is a lifting cylinder
  • second direction moving device 50 is a sealing cylinder. All mobile devices that have it can be applied.
  • the door 20 can be raised and lowered from the standby position to the first position by the first direction movement device 40 inside the valve housing 10, and then the second direction movement.
  • the device 50 may be advanced back and forth from the first position to the second position to selectively open and close the passage 10a.
  • the isolation member 60 is installed on the movable table 30, and is used in the standby position by using the first direction movement device 40.
  • the plate structure may be a plate structure that is bent in an L shape to be able to isolate the door replacement area A of the valve housing 10. .
  • the isolation member 60 may include a lower lower surface portion 61 formed to correspond to the inner side surface F1 of the valve housing 10.
  • the intermediate inclined portion 62 and the protruding wall portion formed to be connected to the lower lower surface portion 61 so as to correspond to the inclined surface F2 of the protruding wall portion W protruding into the valve housing 10.
  • It may include an upper lower surface portion 63 formed to be connected to the intermediate inclined portion 62 to correspond to the upper surface (F3) of the W.
  • the isolation member 60 has the lower lower portion 61, the middle inclined portion 62, and the upper lower surface portion 63 of the isolation member 60 by the simple lowering movement.
  • the door replacement area A may be isolated by being in close contact with one surface F1 of the), the inclined surface F2 of the protruding wall portion W, and the upper surface F3.
  • the second sealing member S2 may be installed at the edge portion of the portion 62 and the upper lower surface portion 63.
  • the second sealing member S2 may be a sealing member such as an O-ring or a gasket for airtightness.
  • the door replacement area A includes an internal vacuum line 71 in which a first valve V1 is installed and connected to the housing vacuum area B, and The second valve V2 may be installed and a vacuum release line 72 connected to an external atmospheric or clean air source may be connected.
  • the second valve V2 receives the vacuum pressure release control signal by the controller 70. Opens the vacuum release line 72, the vacuum pressure of the door replacement area A is released and the cover C to be described later is opened to open the door 20 through the door replacement opening H. Can be replaced.
  • the housing vacuum area (B) can maintain a vacuum state.
  • the first valve V2 that covers the cover C and receives the vacuum pressure forming control signal by the controller 70 is
  • the vacuum release line 72 is closed, while the first valve V1 opens the internal vacuum line 71, the door replacement area A communicates with the housing vacuum area B.
  • vacuum pressures of the same pressure can be formed, and through this, a normal door opening and closing operation is possible under a vacuum environment.
  • FIG. 20 is a cross-sectional view illustrating another example of the door replaceable gate valve system 1100 of FIG. 17.
  • the door replacement area A may include an external vacuum line 73 in which a third valve V3 is installed and connected to an external pump PUMP. ) And a fourth valve V4 may be installed, and a vacuum release line 74 may be connected to an external atmospheric or clean air source.
  • the fourth valve V2 receives the vacuum pressure release control signal by the controller 70. Opens the vacuum release line 74, the vacuum pressure of the door replacement area A is released and the cover C to be described later is opened to open the door 20 through the door replacement opening H. Can be replaced.
  • the housing vacuum area (B) can maintain a vacuum state.
  • the fourth valve V4 that covers the cover C and receives the vacuum pressure forming control signal by the controller 70 is
  • the vacuum release line 74 is closed, while the third valve V3 opens the external vacuum line 71, the door replacement area A is evacuated by the pump PUMP. This can be formed, through which a normal door opening and closing operation is possible under a vacuum environment.
  • the door replacement area A may be provided with various connection lines such as an inert gas supply line for supplying an inert gas from an inert gas source and a clean air supply line for supplying clean air from a clean air source.
  • connection lines such as an inert gas supply line for supplying an inert gas from an inert gas source and a clean air supply line for supplying clean air from a clean air source.
  • the door replacement area A may be selectively connected to the inside or the outside to form a vacuum, or an inert gas such as nitrogen gas may be supplied or clean air may be supplied.
  • an inert gas such as nitrogen gas may be supplied or clean air may be supplied.
  • various pressure gauges, thermometers, and temperature control devices such as heaters and cooling devices may be additionally installed.
  • FIG. 21 is an enlarged perspective view of the door 20 of the door replaceable gate valve system 1100 of FIG. 17.
  • the door 20 of the door replaceable gate valve system 1100 may include a rail member R installed in the second direction moving device 50. It may be a slide replaceable door 21 that can be removable according to sliding.
  • FIGS. 17 to 21 For the inflow and outflow of the door 20, at least a side surface 10c of the valve housing 10 and the protruding wall portion W corresponding to the door replacement area A is illustrated in FIGS. 17 to 21.
  • the door replacement opening (H) is formed in, and the cover (C) may be installed in the door replacement opening (H).
  • the present invention is not necessarily limited thereto, and the door 20 may flow in and out in various directions.
  • FIG. 22 is a perspective view illustrating another example of the door replacement opening H of the door replaceable gate valve system 1100 of FIG. 17, and FIG. 23 illustrates another example of the door replacement opening H of FIG. 17. It is a perspective view, and FIG. 24 is sectional drawing which shows another example of the door replacement opening H of FIG.
  • a door replacement opening H is formed in the valve housing 10 or the lower surface 10d of the protruding wall portion W corresponding to the door replacement area A.
  • the cover C may be installed in the door replacement opening H.
  • the door replacement opening H is formed in the front side 10e of the valve housing 10 or the protruding wall portion W corresponding to the door replacement area A.
  • FIG. The cover C may be installed in the door replacement opening H.
  • a door replacement opening H is formed in the bottom surface 10d and the front surface 10e of the valve housing 10 corresponding to the door replacement area A,
  • the cover C may be installed in the door replacement opening H.
  • the lower surface 10d and one side surface 10c or the lower surface 10d, the side surface 10c, and the front surface 10e all form openings H of various shapes to facilitate the replacement of the door 20. have.
  • the door 20 is detachably attached to the second direction movement device 50 by using a fastener F or a jig such as a bolt, a nut, a screw, or the like. It may be a fastening replaceable door 22 to be installed.
  • various fastening doors may be applied, such as using an interference bit groove, an interference bit projection, a snap button, or a magnet.
  • the cover (C), various O-rings, etc. are also installed, the lid is detachably fixed by a fastener, a folding door, a cover of various forms such as a cap or a shell may be applied.
  • the door 20 may be an L motion door capable of blocking a single passage 10a formed in the valve housing 10.
  • the door 20 is not necessarily limited thereto.
  • FIG. 25 is a view illustrating a normal operation process of the door replaceable gate valve system 1100 of FIG. 17.
  • the normal operation of the door replaceable gate valve system 1100 will be described.
  • the door 20 may be processed. You can wait in the open stage for loading or unloading.
  • the door 20 can be raised from the standby position to the first stage (Close stage), and then for a second time at the first position for a third time t3.
  • the passage 10a may be sealed by advancing to the position.
  • FIG. 26 is a view illustrating a door replacement process of the door replaceable gate valve system 1100 of FIG. 17.
  • FIG. 26 a door replacement process of the door replaceable gate valve system 1100 according to some embodiments of the present disclosure will be described.
  • the door 20, that is, a sealing plate, of the process of FIG. 25 is described.
  • the door 20 is lowered from the open stage to the third position (Exchange stage) to isolate the door replacement area A.
  • the door replacement area A may be switched to the standby state ATM, and the door replacement operation may be performed during the second replacement time te2.
  • the isolation of the door replacement area A is released to switch the door replacement area A back to a vacuum state, and for the fourth replacement time te4, the door ( 20 may wait to rise from the third position to the standby position.
  • these replacement times are made during the first time t1 of FIG. 25 so that door replacement can be performed quickly without breaking the equipment or breaking the overall vacuum.
  • FIG. 27 is a flowchart illustrating an operation process of the door replaceable gate valve system 1100 of FIG. 17.
  • the door replacement operation of the present invention may be performed by the operator or the control unit, “Does the seal plate need to be replaced?”, For example, checking the use time of the door, The state of the door can be confirmed through various sensors such as a load sensor or a vision measuring the state of the sealing member or measuring the state of the sealing member.
  • FIG. 28 is a cross-sectional view illustrating a door replaceable gate valve system 1200 in accordance with some other embodiments of the present invention.
  • the door 20 of the door replaceable gate valve system 1200 may include a first passage 10a formed at one side of the valve housing 10.
  • T motion door 23 including a first door 20-1 capable of blocking a second door and a second door 20-2 capable of blocking a second passage 10b formed at the other side of the valve housing 10. Can be. Therefore, the technical idea of the present invention can be applied to all the doors of various types of gate valves, such as the L motion and the T motion.
  • FIG. 29 is a flowchart illustrating an example of a genuine product identification process of the door replaceable gate valve system of FIG. 17.
  • the apparatus may further include a device, and more specifically, as shown in FIGS. 19 and 20, for example, the identification device may recognize an RFID tag RT installed in the door 20.
  • the RFID identification control unit 80 may stop the operation of the equipment.
  • FIG. 30 is a flowchart illustrating another example of a genuine product identification process of the door 20 of the door replaceable gate valve system 1100 of FIG. 29.
  • the door replacement area A is sealed, and the door replacement area A is switched to a standby state in a vacuum.
  • the cover C of the door replacement area A may be replaced.
  • the door replacement area A is converted to a vacuum to complete a normal exchange processor, or when it is not determined to be genuine, a non-genuine error message is output visually or audibly, and the door replacement area A Abnormal operation can be terminated at atmospheric pressure.
  • it is not necessarily limited thereto.
  • FIG. 31 is an exploded perspective view of a part of the door 20 of the door replaceable gate valve system 1300 according to some other embodiments of the present invention
  • FIG. 32 is a door replaceable gate valve system 1300 of FIG. 31
  • 33 is an enlarged perspective view showing an enlarged view of the door 20 of the door replaceable gate valve system 1300 of FIG. 31,
  • FIG. 34 is a door of the door replaceable gate valve system of FIG. 20 is a cross sectional view showing the cross section shown in FIG.
  • the door 20 of the door replaceable gate valve system 1300 may include at least one side of the contact rod DS of the door support DS. At least one insertion hole ARH coupled to the AR and an interference bite is formed, and an inlet portion of the insertion hole ARH may be provided with an O-ring S3 to prevent particles from scattering when combined.
  • the tactile bar AR illustrated in FIGS. 31 to 34 protrudes to the left in the horizontal direction from the door support DS, and thus, the door 20 may be disassembled in the horizontal direction. .
  • 35 is an exploded perspective view of a part of a door 20 of a door replaceable gate valve system 1400 in accordance with some other embodiments of the present invention.
  • the tactile rod AR of the door replaceable gate valve system 1400 protrudes downward from the door support DS in a vertical direction.
  • the door 20 is illustrated that it can be disassembled in the vertical direction.
  • FIG. 36 is an external perspective view illustrating a door replaceable gate valve system 2100 according to some embodiments of the present disclosure.
  • 37 is an exploded perspective view showing parts of the door replaceable gate valve system 2100 of FIG. 36
  • FIG. 38 is a cross-sectional view illustrating the door replaceable gate valve system 2100 of FIG. 36.
  • the door replaceable gate valve system 2100 may be classified into a valve housing 10, a door 20, and a movable table ( 30, a first direction movement device 40, a second direction movement device 50, and an isolation member 60.
  • valve housing 10 is a hollow box-shaped structure as a whole, and at least one passage 10a may be formed.
  • valve housing 10 the passage (10a) on one side or both sides so that various objects, such as advanced semiconductor devices such as semiconductor chips, wafers, LCD panels, OLED panels, display devices or other medical devices can enter and exit. It may be a structure to be formed.
  • the valve housing 10 includes the door 20, the movable table 30, the first direction movement device 40, the second direction movement device 50, and the isolation member described above. It can support 60 and be a structure having sufficient strength and durability to be connected to various chambers.
  • the valve housing 10 is not limited to the drawings, as conceptually illustrated in the drawings, and various types and types of passages or valve housings may be applied.
  • the door 20 is a kind of valve body in which a first sealing member S1 is installed to block the passage 10a. ) May be formed according to the detective of the passage (10a) to correspond to the shape of the passage (10a).
  • the first sealing member S1 may be a sealing member such as an O-ring or a gasket for airtightness.
  • the door 20 is shown for the sake of understanding, and is not limited to the drawings, it can be applied in various ways, such as being installed in various numbers or additionally installed various sealing members or various joints or hinge structures.
  • the movable table 30 is a kind of structure similar to a head block that detachably supports the door 20, and moves in the first direction to be described later.
  • the device 40 may be installed to be movable.
  • the movable table 30 is not limited to the drawings, of course.
  • the said 1st direction movement apparatus 40 opposes the said movable stand 30 to the said valve housing 10 with the said passage 10a in a standby position.
  • actuators such as a cylinder, a motor, a power transmission device, or a gear box, which can move in the first direction to the first position, may be applied.
  • the second direction movement device 50 is installed between the movable table 30 and the door 20.
  • actuators such as a cylinder, a motor, a power transmission device, or a gear box, which can move in the second direction from the first position to the second position where the passage 10a can be blocked, can be applied.
  • the first direction movement device 40 is a lifting cylinder
  • the second direction movement device 50 is a sealing cylinder.
  • various shapes and types in various directions may be used. All mobile devices that have it can be applied.
  • the door 20 can be raised and lowered from the standby position to the first position by the first direction movement device 40 inside the valve housing 10, and then the second direction movement.
  • the device 50 may be advanced back and forth from the first position to the second position to selectively open and close the passage 10a.
  • the said isolation member 60 is provided in the said 2nd direction movement apparatus 50 or the said movable table 30, and is said 1st direction movement apparatus.
  • a first movement from the standby position to a third position by using 40 and a second movement in the second direction from the third position to a fourth position by using the second direction movement device 50 It may be a plate structure of a generally flat shape that can isolate the door replacement area A of the valve housing 10.
  • the isolation member 60 is formed to correspond to the side surface of the protruding wall portion protruding horizontally in a ring shape inside the valve housing 10.
  • the isolation plate 61 may be included.
  • the isolation member 60 has a first downward movement and a second forward movement, and the side surfaces of the isolation member 60 closely contact with the side surfaces of the protruding wall portion W, thereby closing the door replacement area A. Isolate.
  • the second sealing member (3) may be attached to the contact surface of the protruding wall portion W or the separator plate 61 so as to release the vacuum only in the door replacement area A while maintaining the overall vacuum of the valve housing 10. S2) can be installed.
  • the second sealing member S2 may be a sealing member such as an O-ring or a gasket for airtightness.
  • the door replacement area A includes an internal vacuum line 71 in which a first valve V1 is installed and connected to the housing vacuum area B, and The second valve V2 may be installed and a vacuum release line 72 connected to an external atmospheric or clean air source may be connected.
  • the second valve V2 receives the vacuum pressure release control signal by the controller 70. Opens the vacuum release line 72, the vacuum pressure of the door replacement area A is released and the cover C to be described later is opened to open the door 20 through the door replacement opening H. Can be replaced.
  • the housing vacuum area (B) can maintain a vacuum state.
  • FIG. 39 is a cross-sectional view illustrating another example of the door replaceable gate valve system 2100 of FIG. 36.
  • the door replacement area A may include an external vacuum line 73 in which a third valve V3 is installed and connected to an external pump PUMP. ) And a fourth valve V4 may be installed, and a vacuum release line 74 may be connected to an external atmospheric or clean air source.
  • the fourth valve V2 receives the vacuum pressure release control signal by the controller 70. Opens the vacuum release line 74, the vacuum pressure of the door replacement area A is released and the cover C to be described later is opened to open the door 20 through the door replacement opening H. Can be replaced.
  • the housing vacuum area (B) can maintain a vacuum state.
  • the fourth valve V4 which covers the cover C and receives the vacuum pressure forming control signal by the controller 70 is
  • the vacuum release line 74 is closed, while the third valve V3 opens the external vacuum line 71, the door replacement area A is evacuated by the pump PUMP. This can be formed, through which a normal door opening and closing operation is possible under a vacuum environment.
  • the door replacement area A may be provided with various connection lines such as an inert gas supply line for supplying an inert gas from an inert gas source and a clean air supply line for supplying clean air from a clean air source.
  • connection lines such as an inert gas supply line for supplying an inert gas from an inert gas source and a clean air supply line for supplying clean air from a clean air source.
  • the door replacement area A may be selectively connected to the inside or the outside to form a vacuum, or an inert gas such as nitrogen gas may be supplied or clean air may be supplied.
  • an inert gas such as nitrogen gas may be supplied or clean air may be supplied.
  • various pressure gauges, thermometers, and temperature control devices such as heaters and cooling devices may be additionally installed.
  • FIG. 40 is an enlarged perspective view illustrating the door 20 of the door replaceable gate valve system 2100 of FIG. 36.
  • the door 20 of the door replaceable gate valve system 2100 may include a rail member R installed in the second direction moving device 50. It may be a slide replaceable door 21 that can be removable according to sliding.
  • the door replacement opening (H) is formed in, and the cover (C) may be installed in the door replacement opening (H).
  • the present invention is not necessarily limited thereto, and the door 20 may flow in and out in various directions.
  • FIG. 41 is a perspective view illustrating another example of the door replacement opening H of the door replaceable gate valve system 2100 of FIG. 36
  • FIG. 42 illustrates another example of the door replacement opening H of FIG. 36. It is a perspective view
  • FIG. 43 is sectional drawing which shows another example of the door replacement opening H of FIG.
  • a door replacement opening H is formed in the valve housing 10 or the lower surface 10d of the protruding wall portion W corresponding to the door replacement area A.
  • the cover C may be installed in the door replacement opening H.
  • the door replacement opening H is formed in the front surface 10e of the valve housing 10 or the protruding wall portion W corresponding to the door replacement area A.
  • FIG. The cover C may be installed in the door replacement opening H.
  • a door replacement opening H is formed in the bottom surface 10d and the front surface 10e of the valve housing 10 corresponding to the door replacement area A.
  • the cover C may be installed in the door replacement opening H.
  • the lower surface 10d and one side surface 10c or the lower surface 10d, the side surface 10c, and the front surface 10e all form openings H of various shapes to facilitate the replacement of the door 20. have.
  • the door 20 is detachably installed to the second direction movement device 50 by using a fastener F or a jig such as a bolt, nut, or screw. It may be a fastening replaceable door 22.
  • various fastening doors may be applied, such as using an interference bit groove, an interference bit projection, a snap button, or a magnet.
  • the cover (C), various O-rings, etc. are also installed, the lid is detachably fixed by a fastener, a folding door, a cover of various forms such as a cap or a shell may be applied.
  • the door 20 may be an L motion door capable of blocking a single passage 10a formed in the valve housing 10.
  • the door 20 is not necessarily limited thereto.
  • FIG. 44 is a view illustrating a normal operation process of the door replaceable gate valve system 2100 of FIG. 36.
  • the normal operation of the door replaceable gate valve system 2100 will be described.
  • the door 20 may be processed. You can wait in the open stage for loading or unloading.
  • the door 20 can be raised from the standby position to the first stage (Close stage), and then for a second time at the first position for a third time t3.
  • the passage 10a may be sealed by advancing to the position.
  • 45 is a view illustrating a door replacement process of the door replaceable gate valve system 2100 of FIG. 36.
  • FIG. 45 a door replacement process of the door replaceable gate valve system 2100 according to some embodiments of the present disclosure will be described.
  • the door 20, that is, the sealing plate, of the process of FIG. 44 is described. If the exchange of is required, the door 20 is first lowered from the open stage to the third exchange stage during the zero replacement time te0 and during the first replacement time te1. The door 20 may be advanced second from the third position to the fourth position to isolate the door replacement area A.
  • the door replacement area A may be switched to the standby state ATM and the door replacement operation may be performed.
  • the door 20 is switched to the vacuum state, and the door 20 is opened at the fourth position to release the isolation of the door replacement area A.
  • FIG. Can be reversed to the third position.
  • the door 20 may rise from the third position to the standby position and wait.
  • these replacement times are made during the first time t1 of FIG. 44 so that door replacement can be performed quickly without breaking the equipment or breaking the overall vacuum.
  • FIG. 46 is a flowchart illustrating an operation process of the door replaceable gate valve system 2100 of FIG. 36.
  • the door replacement operation of the present invention may be performed by the operator or the control unit, “Does the seal plate need to be replaced?”, For example, confirming the use time of the door, The state of the door can be confirmed through various sensors such as a load sensor or a vision measuring the state of the sealing member or measuring the state of the sealing member.
  • 47 is a cross-sectional view illustrating a door replaceable gate valve system 2200 according to some other embodiments of the present invention.
  • the door 20 of the door replaceable gate valve system 2200 may include a first passage 10a formed at one side of the valve housing 10.
  • T motion door 23 including a first door 20-1 capable of blocking a second door and a second door 20-2 capable of blocking a second passage 10b formed at the other side of the valve housing 10. Can be. Therefore, the technical idea of the present invention can be applied to all the doors of various types of gate valves, such as the L motion and the T motion.
  • FIG. 48 is an exploded perspective view of a part of the door 20 of the door replaceable gate valve system 2300 according to some other embodiments of the present invention
  • FIG. 49 is a door replaceable gate valve system 2300 of FIG. 48.
  • 50 is an enlarged perspective view showing an enlarged view of the door 20 of the door replaceable gate valve system 2300 of FIG. 48
  • FIG. 51 is a door of the door replaceable gate valve system of FIG. 20 is a cross sectional view showing the cross section shown in FIG.
  • the door 20 of the door replaceable gate valve system 2300 according to some other embodiments of the present invention, the at least one side of the contact rod (DS) of the contact rod (DS) At least one insertion hole ARH coupled to the AR and an interference bite is formed, and an inlet portion of the insertion hole ARH may be provided with an O-ring S3 to prevent particles from scattering when combined.
  • the tactile rods AR illustrated in FIGS. 48 to 51 protrude leftward from the door support DS in the horizontal direction, and thus, the door 20 is disassembled in the horizontal direction. .
  • FIG 52 is an exploded perspective view of a part of the door 20 of the door replaceable gate valve system 2400 in accordance with some other embodiments of the present invention.
  • the tactile rod AR of the door replaceable gate valve system 2400 protrudes downward from the door support DS in a vertical direction.
  • the door 20 is illustrated that it can be disassembled in the vertical direction.
  • FIG. 53 is a perspective view illustrating a door replaceable gate valve system 3100 according to some embodiments of the present disclosure
  • FIG. 54 is a cross-sectional view of the door replaceable gate valve system 3100 of FIG. 53
  • FIG. 55 is a view of FIG. 55
  • 53 is an exploded perspective view of parts of the door replaceable gate valve system 3100 of FIG. 53
  • FIG. 56 is a perspective view illustrating the valve housing 10 of the door replaceable gate valve system 3100 of FIG. 53
  • FIG. 57 is a door of FIG. 53.
  • the door replaceable gate valve system 3100 may include a valve housing 10 in which at least one passage 10a is formed, and the passage.
  • the door 20 in which the first sealing member S1 is installed to block 10a, the movable table 30 supporting the door 20 in a detachable manner, and the valve housing 10 A first direction moving device 40 capable of moving the movable table 30 in a first direction from a standby position to a first position opposite the passage 10a, the movable table 30 and the door 20 And a second direction moving device 50 and the second which move the door 20 in the second direction from the first position to a second position capable of blocking the passage 10a.
  • the door replacement area of the valve housing 10 is first moved from a standby position to a third position, and secondly moved in the second direction from the third position to the fourth position by using the second direction moving device. It may include an isolation member 60 capable of isolating (A).
  • a door replacement opening H is formed at a side surface of the valve housing 10 corresponding to the door replacement area A, and the door replacement opening H is formed.
  • Removable cover (C) may be installed.
  • the removable cover (C) is to be detachably fixed to the side of the valve housing 10 by a fixing screw, the removable cover (C) is formed at one side of the atmospheric pressure forming valve (V5) On the other side, a vacuum pressure forming vacuum tube VP of FIG. 72 may be installed.
  • the removable cover (C) when replacing the door, it is possible to completely remove the removable cover (C) from the valve housing 10 by loosening the set screw.
  • the atmospheric pressure forming valve V5 before removing the removable cover C, the atmospheric pressure forming valve V5 must be opened to allow atmospheric pressure to be formed in the door replacement area A, and after the door replacement, the removable cover C is reassembled.
  • a vacuum pressure may be formed in the door replacement area A by using the vacuum pressure forming vacuum tube VP.
  • FIG. 58 is a perspective view of the door 20 of the door replaceable gate valve system 3100 of FIG. 53
  • FIG. 59 is a view illustrating the fastening state of the door 20 of the door replaceable gate valve system 3100 of FIG. 53. Sectional perspective view.
  • the door 20 is a slide replaceable door that can be detachably slid along a rail member installed in the second direction moving device 50 or the isolation member 60. 21).
  • the door 20 is formed with at least one rib portion RB in the middle of the rear portion so as to prevent the bending due to the back pressure, two L in the upper and lower ends, Guide portion (G) bent in the shape may be formed.
  • the two rib portions RB and the two guide portions G may increase the strength of the door 20, and the guide portions G correspond to the guide portions G. While sliding along the member, it can be firmly attached to the isolation member 60.
  • FIG. 60 is a perspective view of the anti-friction member 62 of the door replaceable gate valve system 3100 of FIG. 53
  • FIG. 61 is a perspective view of the anti-friction member 62 of FIG. 60
  • FIG. 62 is of FIG. 53.
  • the isolation member 60 includes an isolation plate 61 formed to correspond to the side surface of the protruding wall portion horizontally protruding in a ring shape in the valve housing 10.
  • the second sealing member S2 may be installed on the contact surface of the protruding wall so as to release the vacuum only in the door replacement area A while maintaining the overall vacuum of the valve housing 10.
  • a friction preventing member 62 made of a resin material may be installed between the isolation plate 61 and the door 20 of the isolation member 60.
  • the anti-friction member 62 is made of an engineering plastic material such as PEEK (polyetheretherketone) or Teflon having excellent impact buffer and abrasion resistance so as to minimize friction between the isolation plate 61 and the door 20. Can be.
  • PEEK polyetheretherketone
  • Teflon having excellent impact buffer and abrasion resistance so as to minimize friction between the isolation plate 61 and the door 20. Can be.
  • the isolation plate 61 may have a hard anodizing coating layer formed on a surface thereof to increase hardness and prevent generation of foreign matter.
  • FIG. 63 is a side view illustrating an open state of the opening H of the replaceable gate valve system 3100 of FIG. 53
  • FIG. 64 illustrates a guide pin member 80 of the replaceable gate valve system 3100 of FIG. 53
  • FIG. 65 is a side view illustrating a closed state of the guide pin member 80 of the door replaceable gate valve system 3100 of FIG. 53.
  • the door replaceable gate valve system 3100 has the door 20 in the isolation plate 61 when the shaft is rotated at a first angle. Pressurized and fixed to the shaft, the shaft rotation is possible to the isolation plate 61 or the door 20 so as to freely slide the door 20 from the isolation plate 61 when the shaft is rotated at a second angle. It may be further provided, and may further include a guide pin member 80 is formed in an eccentric shape is formed in the notch portion (N) at least in part.
  • the removable cover C is removed, and then the guide pin is inserted into the driver groove DH of the guide pin member 80 through the exposed opening H.
  • the notch portion N of the guide pin member 80 is opposed to the door 20 when the member 80 is axially rotated.
  • the door 20 may be freely slidably moved from the isolation plate 61, and as shown in FIG. 65, a rounded portion, not the notch portion, when the shaft is rotated at a first angle is formed in the isolation plate 61.
  • the door 20 can be fixed to the pressure.
  • the positional deviation or sliding malfunction of the door 20 can be prevented in advance.
  • FIG. 66 is a perspective view illustrating the pin type jig Z1 of the door replaceable gate valve system 3100 of FIG. 53.
  • the removable cover C may be removed, and then the user may open the door 20 by a user. It may further include a pin-type jig (Z1) consisting of a handle (Z1a) and the binding pin (Z1b) protruding from the handle (Z1a) to be drawn out.
  • the pin type jig Z1 needs to be careful not to collide with the valve housing 10 when the door 20 is pulled out.
  • FIG. 67 is a perspective view illustrating a use state of the fastening jig Z2 and the chamber jig Z3 of the single type jig SZ of the door replaceable gate valve system 3200 according to some other exemplary embodiments.
  • 68 is a perspective view illustrating a state of use of the multi-type jig DZ of the door replaceable gate valve system 3300 according to some other embodiments of the present disclosure
  • FIG. 69 is a door replaceable gate valve of FIG. 67.
  • the door replaceable gate valve system 3200 may be configured to remove the removable cover C, and then the position of the removable cover C.
  • the sliding jig (Z2) is formed on one side sliding fastening (Z2a) and the sliding fastening with the sliding fastening portion (Z2a) of the fastening jig (Z2), the door (
  • the movable part K which can be combined with the 20 is installed, and a push bar PB connected to the movable part K is installed outside, and the door 20 drawn out to the outside by the push bar PB.
  • It may further include a chamber-shaped jig (Z3) that can be surrounded by a total protection.
  • the fastening jig Z2 is temporarily fixed to the position of the removable cover C, and the sliding fastening part of the fastening jig Z2 ( Z2a) and the chamber-type jig (Z3) by sliding fastening, and then can be safely drawn out without using the push bar (PB) without exposing the door (20).
  • the chamber-type jig Z3 includes at least a single jig for pulling out (SZ), an input single jig, and the pull-out single jig (SZ) and the input single jig.
  • SZ single jig for pulling out
  • SZ pull-out single jig
  • DZ dual jig
  • a wide variety of types and types of jig may be applied.
  • FIG. 70 is a perspective view illustrating the door detection sensor S of the door replaceable gate valve system 3300 of FIG. 68
  • FIG. 71 is an enlarged view illustrating the door detection sensor S of FIG.
  • the door replaceable gate valve system 3300 may change the position of the door 20 when the passage 10a of the door 20 is blocked. It may further include a door detection sensor (S) for detecting.
  • S door detection sensor
  • 72 is a flowchart illustrating a door replacement process of the door replaceable gate valve system 3300 according to some exemplary embodiments of the present disclosure.
  • FIG. 1 the valve housing 10 is described.
  • opening the atmospheric pressure forming valve (V5) of the removable cover (C) installed in the valve housing 10 to replace the door of the valve housing 10 The removable cover C may be detached to create an atmospheric pressure in the area A and to open the opening H of the valve housing 10 as shown in FIG. 3.
  • the fastening jig Z2 may be temporarily fastened to the position of the removable cover C removed.
  • the size of the fixing screw of the removable cover (C) and the fixing screw specifications of the fastening jig (Z2) may be the same.
  • the chamber type jig Z3 is slid to the sliding fastening portion Z2a of the fastening type jig Z2, and as in No. 6, the push bar PB of the chamber type jig Z3 is pushed.
  • the push bar (PB) By pulling the push bar (PB) using the), the old door 20 into the chamber-shaped jig (Z3) can be drawn out of the valve housing 10, as in step 7.
  • the chamber-type jig Z3 accommodating the old door 20 is separated from the fastening jig Z2, and the other chamber-type jig Z3 accommodating the new door 20 is fastened.
  • the chamber housing jig Z3 and the fastening jig Z2 are removed from the valve housing 10, and as in No. 3, the valve housing 10 is removed.
  • a vacuum pressure may be formed in the door replacement area A of the valve housing 10 by using a vacuum pressure forming vacuum tube VP installed in the removable cover C. .
  • 73 is a flowchart illustrating a door replacing method of the door replaceable gate valve system 3300 according to some embodiments of the present disclosure.
  • the door replacement method of the door replaceable gate valve system 3300 forming the atmospheric pressure of the removable cover (C) installed in the valve housing 10 Opening the valve (V5) to form an atmospheric pressure in the door replacement area (A) of the valve housing 10 (S110), and the removable cover to open the opening (H) of the valve housing 10 (C) separating the step (S111), the step of temporarily tightening the fastening jig (Z2) in the position of the removable cover (C) removed (S112), and the sliding fastening portion of the fastening jig (Z2) Sliding and fastening the chamber-type jig (Z3) to (Z2a) (S113) and the old door 20 into the chamber-type jig (Z3) by using the push bar (PB) of the chamber-type jig (Z3).
  • PB push bar
  • the productivity can be greatly improved by greatly reducing the downtime of the equipment from days to hours.
  • FIG. 74 is an external perspective view illustrating the gate valve system 4100 according to some embodiments of the present disclosure
  • FIG. 75 is a cross-sectional view illustrating the gate valve system 4100 of FIG. 74.
  • the gate valve system 4100 includes a valve housing 10, a valve body 20, and a moving device 30. And a cover 40 and a heat exchanger 50.
  • valve housing 10 is a hollow box-shaped structure as a whole, and more specifically, for example, one side is connected to a process module PM, that is, a process chamber in which various semiconductor or display processes can be performed. At least one passage 10a may be formed so that the other side thereof may be connected to the transfer module TM on which the transfer or the transfer robot is installed.
  • valve housing 10 is installed between the process module PM and the transfer module TM, and thus is provided with advanced devices such as semiconductor chips, wafers, LCD panels, OLED panels, and the like.
  • the passage 10a may be formed at one side or both sides to allow various objects such as a semiconductor device, a display device, and other medical devices to enter and exit.
  • valve housing 10 is not limited to being installed between the process module PM and the transfer module TM, and may be, for example, between various modules and chambers such as a loading chamber, an unloading chamber or a buffer chamber. Can be installed on
  • valve housing 10 can support the valve body 20, the moving device 30, the lid 40, and the heat exchanger 50 described above, and the various chambers. It may be a structure having sufficient strength and durability to be connected to the.
  • valve housing 10 is not limited to the drawings, as conceptually illustrated in the drawings, and various types and types of passages or valve housings may be applied.
  • valve housing 10 may be divided into a vacuum region A, which occupies most of the internal space including the passage 10a, and a replacement region B for replacing the sealing member.
  • the vacuum region A may be partitioned relatively large in consideration of the moving space of the valve body 20, and the replacement region B may be converted from vacuum pressure to atmospheric pressure or vacuum pressure at atmospheric pressure. When converted to, it can be partitioned relatively narrowly with a minimum volume to reduce pressure conversion time.
  • the position, shape, or volume of the vacuum area A and the replacement area B may be formed in various shapes and shapes according to the specification, process environment, etc. of the process module PM or the transfer module TM to be applied. Can be.
  • the valve body 20 is provided with a first sealing member S1 to block the passage 10a
  • the passage 10a and It may include a door 21 is formed in a shape corresponding to the opening (Ba), the detachable groove (G) is formed so that the first sealing member (S1) can be detachably inserted.
  • the first sealing member S1 may have various sealing members such as an O-ring or a gasket formed in a ring shape for airtightness.
  • the first sealing member S1 is not necessarily limited thereto, and a wide variety of sealing members may be applied.
  • the door 21 is a sealing member mounting surface on which the first sealing member S1 is installed and the second sealing to be described later, in order to minimize thermal contact area with the high temperature process module PM. It is preferable that the contact surface that can be in contact with the member S2 forms a step.
  • the present invention is not limited thereto, and the door 21 may be formed in a wide variety of shapes such as the sealing member installation surface and the contact surface having a flat shape.
  • door 21 is not limited to the drawings, and may be applied in various ways, such as being installed in various numbers or additionally installing various sealing members, various joints, hinge structures, and the like.
  • the moving device 30 is a device capable of moving the valve body 20 in the direction of the passage 10a.
  • First direction moving device 31 capable of moving the movable table M connected to the valve body 20 in a first direction (up and down direction) from a standby position to a first position facing the passage 10a.
  • a second direction front and rear direction
  • the mobile device 30 may be applied to all kinds of actuators, such as a cylinder, a motor, a power transmission device, or a gear box.
  • the first direction movement device 31 may be a lifting cylinder
  • the second direction movement device 32 may be a sealing cylinder, but in addition to having various shapes and types in various directions. All mobile devices can be applied.
  • the door 21 can be raised and lowered from the standby position to the first position by the first direction movement device 31 inside the valve housing 10, and then the second direction movement.
  • the device 32 can be advanced back and forth from the first position to the second position to selectively open and close the passage 10a.
  • FIG. 83 is a perspective view illustrating an example of the rotatable lid 41 of the gate valve system 4100 of FIG. 74.
  • the cover 40 replaces the first sealing member S1 while maintaining the vacuum state of the vacuum region A of the valve housing 10. It can be installed in the opening (Ba) of the replacement area (B) of the valve housing 10 so that.
  • the cover 40 may be a rotatable cover 41 that is rotated based on the hinge shaft H of the valve housing 10.
  • the rotational cover 41 may be held or released from the valve housing 10 by various hooks, screws, bolts, nuts, and other fasteners.
  • the pivotal cover 41 covers and seals the opening Ba of the valve housing 10, or the first sealing member (
  • the opening Ba may be opened by being rotated based on the hinge shaft H so that S1) may be exposed to the outside for replacement.
  • the heat exchanger 50 is installed on the cover 40 to heat or cool the valve body 20 or the first sealing member S1. More specifically, for example, it may be formed in various forms, such as a planar heating element having a heating layer, a heating coil made of a heating wire, etc., and according to the heating principle, resistance heating, electric heating, light heating, induction heating, magnetic heating All of the heat exchanger using various principles, such as can be applied.
  • the heat exchange device 50 is installed on the valve body facing surface, that is, the inner side of the lid 40, and is located near the lid 40 in a closed state. It may be a heater or a cooling device which is formed in a shape corresponding to the valve body 20 so as to heat the valve body 20 and can be controlled by the temperature control unit 90.
  • the temperature control unit 90 preheats or replaces the high temperature valve body 20 to a temperature at which it is easy to replace the low temperature valve body 20 to be applied to the high temperature process module PM. Can be cooled.
  • the heat exchange device 50 is installed on the inner surface of the cover 40 which may be opposed to the valve body 20 so that the valve body 20 and the new first sealing member S1 replaced are replaced. Rapid heating or cooling in minutes to hours can greatly reduce equipment preparation time and costs compared to conventional equipment, which had to wait for hours to days.
  • the gate valve system 4100 may allow the replacement area B to be sealed by the valve body 20.
  • the second sealing member S2 may be installed inside the opening Ba of the replacement area B of the valve housing 10.
  • an inner side of the cover 40 or the opening Ba may be closed to seal the opening Ba of the replacement area B of the valve housing 10.
  • the third sealing member S3 may be installed on the outside of the third sealing member S3.
  • one side and the other side of the replacement area B may be separately sealed using the second sealing member S2 and the third sealing member S3.
  • the replacement area (B) may be provided with an internal vacuum line 71 and a vacuum pressure release line 72 in which valves are installed, respectively.
  • the valve body 20 can be separated in place of the internal vacuum line 71, the replacement area B can be formed from the vacuum state to the atmospheric state only by the vacuum release line 72. have.
  • the vacuum pressure release line 72 is opened in order to open the lid 40 to separate the aged first sealing member S1 to the outside.
  • the replacement area B may be converted to atmospheric pressure by using Nm. Then, when the new first sealing member S1 is replaced, the cover 40 is fastened, and then the internal vacuum line 71 is closed.
  • the replacement area (B) By converting the replacement area (B) to a vacuum pressure again using the valve body 20 can open the replacement area (B) to perform the opening and closing operation.
  • the replacement area B may additionally be provided with various lines and valves and additional devices such as an external vacuum line connected to a vacuum pump, an inert gas supply line connected to an inert gas supply, a clean air supply line, and the like.
  • each of these lines can be controlled by a control unit 70 for controlling the valves, the control unit 70 controls the moving device 30 described above to perform a series of valve opening and closing operations and sealing member replacement operation Can be done.
  • the gate valve system 4100 can identify the identification information of the first sealing member (S1) or the sealing plate 23 to allow operation only when matching the identification information. It may further comprise an identification device (80).
  • the identification device 80 may be used to check various identification information such as the RF ID included in the first sealing member S1 or the sealing plate 23 so that only genuine products can be operated normally.
  • FIG. 76 is a cross-sectional view illustrating a passage closed state of the gate valve system 4100 of FIG. 75
  • FIG. 77 is a cross-sectional view illustrating a valve body backward state of the gate valve system 4100 of FIG. 76
  • FIG. 78 is a gate of FIG. 77
  • 79 is a cross-sectional view illustrating a valve body lowered state of the valve system 4100
  • FIG. 79 is a cross-sectional view illustrating a closed area sealing state of the gate valve system 4100 of FIG. 78
  • FIG. 80 is a cross-sectional view of the gate valve system 4100 of FIG. 79
  • 81 is a cross-sectional view showing a lid opening and a sealing member detached state
  • FIG. 81 is a cross-sectional view showing a sealing member replacement state of the gate valve system 4100 of FIG. 80
  • FIG. 82 is a lid fastening and It is sectional drawing which shows a heating or cooling state.
  • the operation of the gate valve system 4100 according to some embodiments of the present invention will be described first, as shown in FIG. 76, the valve body 20 is When advancing in the raised position, the first sealing member S1 may be in contact with the passage 10a to close the passage 10a.
  • the first sealing member S1 is exposed to a high temperature environment of the process module PM, and may be deteriorated or damaged when used for a long time.
  • valve body 20 can be reversed to open the passage 10a, and then shown in FIG. As described above, the valve body 20 may descend to stand by at the waiting place so that the substrate flows in and out through the passage 10a.
  • the opening and closing process of the passage 10a may be repeatedly performed until a predetermined cycle or deterioration or damage of the first sealing member S1 occurs.
  • valve body 20 moves forward in the lowered state. To seal the replacement area (B).
  • the vacuum region A forms an atmospheric pressure in the replacement region B while maintaining the vacuum pressure, and removes the lid 40 from the valve housing 10.
  • the opening Ba may be opened by separating.
  • the aged first sealing member S1 exposed to the outside through the opening Ba may be separated from the door 21.
  • the new first sealing member S1 may be replaced with the detachable groove G of the door 21.
  • the cover 40 is fastened to the valve housing 10 to close the opening Ba, and a vacuum pressure is formed in the replacement area B.
  • the valve body 20 or the first sealing member S1 can be heated or cooled by using the 50.
  • the finishing passage opening and closing process may be repeatedly performed.
  • FIG. 84 is a perspective view illustrating an example of a sliding lid of the gate valve system 4100 of FIG. 74.
  • the lid 40 of the gate valve system 4100 of FIG. 74 may be a sliding lid 42 sliding along the rail R of the valve housing 10.
  • the rotational space of the pivotal cover 41 of FIG. 83 is not sufficient due to equipment specifications, maintenance space, or the like, the sliding that may be raised and lowered and adhered to the opening Ba along the rail G.
  • the mold cover 42 can efficiently operate the equipment even in a narrow space.
  • FIG. 85 is a cross-sectional view illustrating a closed area sealing state of the gate valve system 4200 according to some other embodiments of the present disclosure
  • FIG. 86 illustrates a cover opening and a sealing plate detachment state of the gate valve system 4200 of FIG. 85. It is sectional drawing to show.
  • the base plate is formed in a shape corresponding to the opening (Ba) ( 22) and a sealing plate 23 detachably mounted to the base plate 22 and formed in a shape corresponding to the passage 10a and in which the first sealing member S1 is integrally fixed. Can be.
  • 87 is a cross-sectional view illustrating a heat exchange device of a gate valve system according to some other embodiments of the present invention.
  • a gate valve system may provide a width of the heat exchange device 50 in order to minimize the influence of temperature on the first sealing member S1.
  • L1 may be formed to be narrower than the width of the first sealing member S1.
  • FIG. 88 is a cross-sectional view illustrating a valve body 20 of the gate valve system in accordance with some other embodiments of the present invention.
  • valve body 25 of the gate valve system may include an inclined surface Bb having a second sealing member S2 installed in the opening Ba. Corresponding inclined surfaces may be formed.
  • the operator checks the second sealing member S2 with the naked eye easily through the inclined surface Bb of the opening Ba with the naked eye. It is possible to replace only the second sealing member S2 without having to open the entire valve housing 10.
  • 89 is a cross-sectional view illustrating a replaceable block 11 of a gate valve system according to some other embodiments of the present invention.
  • a second sealing member S2 is formed on one side of the gate valve system, and the opening Ba is formed.
  • a fourth sealing member may be installed between the valve housing 10 and the replaceable block 11 to maintain airtightness.
  • the second sealing member S2 may be easily replaced by separating the replaceable block 11 from the valve housing 10.
  • FIG. 90 is a front view illustrating the sealing plate 23 of the gate valve system of FIG. 85
  • FIG. 91 is a cross-sectional view illustrating an example of the sealing plate 23 of the gate valve system of FIG. 90.
  • valve body 20 of the gate valve system of FIG. 85 is a fastener F provided in an outer region of the first sealing member S1 of the sealing plate 23. It may further include.
  • the sealing plate 23 may be firmly fixed to the base plate 22 by using the fastener F that is not exposed to the processing environment of the process module PM. have.
  • FIG. 92 is sectional drawing which shows another example of the sealing plate 23 of the gate valve system of FIG.
  • the sealing plate 23 may have a locking portion T formed at one side thereof, that is, a lower side thereof, and the fixture F may be fastened to the other side and the upper side thereof.
  • the operator first engages the locking portion T below the base plate 22, and then fastens the fastener F above the base plate 22, thereby fixing the fastener F. It is possible to secure the installation area of the first sealing member (S1) as wide as possible while reducing the number of installation of the, and simplify the fastening process.
  • 93 is a flowchart illustrating a method of controlling a gate valve system according to some embodiments of the present invention.
  • a control method of a gate valve system may include a valve housing 10 in which at least one passage 10a is formed, and the passage 10a.
  • the moving device 30 capable of moving the valve body 20 in the passage direction, and the valve housing 10 of the valve housing 10.
  • the cover 40 which is installed in the opening Ba of the replacement area B of the valve housing 10 so that the first sealing member S1 can be replaced while maintaining the vacuum state of the vacuum area A and the In the control method of the gate valve system 4100 including the heat exchanger 50 which is installed in the cover 40 to heat or cool the valve body 20 or the first sealing member (S1), the The valve 30 is moved in the direction of the replacement area B by the moving device 30 so that the bell A replacement area sealing step (S10) of sealing the replacement area (B) of the bar housing (10); An atmospheric pressure forming step (S20) of forming an atmospheric pressure in the replacement area (B); A cover opening step (S30) of opening the opening (Ba) by separating the cover (40) from the valve housing (10); A replacement step (S40) of replacing the first sealing member (S1) through the opening (Ba); A cover fastening step (S50) of closing the opening Ba by fastening the cover 40 to the valve housing 10; After the cover fastening step (S50), the vacuum pressure to form a vacuum pressure in
  • the present invention is not necessarily limited thereto, and in order to save time, it is also possible to simultaneously perform the heat exchange step 60 and the vacuum pressure forming step 70.
  • 94 is a flowchart illustrating a method of controlling a gate valve system according to some other embodiments of the present invention.
  • the vacuum pressure forming step S70 for forming a vacuum pressure in the replacement area B and the heat exchanger 50 may be performed. It is also possible to perform the heat exchange step S60 for heating or cooling the valve body 20.
  • the gate valve is stable by minimizing the moving distance of the sealing plate It can reduce the manufacturing cost, save the moving time of the sealing plate, save the space of the gate valve, minimize the moving distance of the sealing plate, operate the gate valve stably, reduce the manufacturing cost and It can save travel time, save space of gate valve, determine whether the exchanged sealing member is genuine, stop the operation of gate valve if it is not genuine, and replace the whole door including O-ring. Significantly reduce replacement costs and time, and reduce the volume of equipment In order to reduce the unit cost and the time and cost of vacuum formation.
  • simply lowering the movable platform allows the door to be replaced without breaking the overall vacuum of the valve housing, simplifying the operation and operation of the equipment. It is possible to improve the durability and performance of the equipment, and by installing a heat exchanger on the inner side of the cover which can be opposed to the valve body, it is possible to quickly heat or cool the valve body and the replaced new first sealing member to prepare the equipment. It can significantly reduce the cost and cost, and minimize the thermal stress and thermal damage by installing the second sealing member in the opening part of the replacement area to keep it away from the high temperature process module. It can be greatly increased.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

Des modes de réalisation de la présente invention concernent un robinet à vanne comprenant : une plaque d'étanchéité pour ouvrir/fermer une chambre; une partie support reliée à la plaque d'étanchéité; une partie d'entraînement pour déplacer verticalement la partie support; un boîtier de robinet recevant la plaque d'étanchéité et la partie support et ayant un passage et une partie de remplacement; un premier élément d'étanchéité pour sceller le passage au moyen du mouvement de la plaque d'étanchéité; et un second élément d'étanchéité pour sceller la partie de remplacement au moyen du déplacement de la plaque d'étanchéité, la partie d'entraînement déplaçant la plaque d'étanchéité vers l'emplacement correspondant au passage ou à la partie de remplacement. Ainsi, la distance de déplacement de la plaque d'étanchéité est réduite au minimum de telle sorte que le robinet à vanne fonctionne de manière fiable, ses coûts de fabrication sont réduits, le temps de déplacement de la plaque d'étanchéité peut être réduit et l'espace du robinet à vanne peut être réduit.
PCT/KR2019/007163 2018-06-15 2019-06-13 Système de robinet à vanne et son procédé de commande WO2019240516A2 (fr)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
KR10-2018-0068939 2018-06-15
KR1020180068939A KR102131285B1 (ko) 2018-06-15 2018-06-15 게이트밸브
KR1020180070671A KR102131284B1 (ko) 2018-06-20 2018-06-20 도어 교체형 게이트 밸브 시스템
KR10-2018-0070671 2018-06-20
KR10-2018-0070670 2018-06-20
KR1020180070670A KR102127189B1 (ko) 2018-06-20 2018-06-20 도어 교체형 게이트 밸브 시스템
KR1020190002393A KR20200086139A (ko) 2019-01-08 2019-01-08 게이트 밸브 시스템 및 이의 제어 방법
KR10-2019-0002393 2019-01-08
KR1020190070243A KR102278560B1 (ko) 2019-06-13 2019-06-13 게이트 밸브 시스템 및 이의 제어 방법
KR10-2019-0070243 2019-06-13

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WO2019240516A3 WO2019240516A3 (fr) 2020-02-06

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023285091A1 (fr) * 2021-07-12 2023-01-19 Vat Holding Ag Soupape
NL2030241B1 (en) * 2021-12-22 2023-06-29 Rheavita Bv Device and method for freeze-drying liquid-containing composition

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05306779A (ja) * 1992-05-06 1993-11-19 Kobe Steel Ltd ゲート弁
US6390448B1 (en) * 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
JP4010314B2 (ja) * 2004-12-17 2007-11-21 東京エレクトロン株式会社 ゲートバルブ装置、処理システム及びシール部材の交換方法
JP2017026128A (ja) * 2015-07-28 2017-02-02 大日本印刷株式会社 ゲート装置、処理システムおよび封止部交換方法
KR20170076159A (ko) * 2015-12-24 2017-07-04 인베니아 주식회사 게이트밸브 및 이를 이용한 기판처리장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023285091A1 (fr) * 2021-07-12 2023-01-19 Vat Holding Ag Soupape
NL2030241B1 (en) * 2021-12-22 2023-06-29 Rheavita Bv Device and method for freeze-drying liquid-containing composition

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