WO2019237610A1 - Film exposure stage for glass production - Google Patents

Film exposure stage for glass production Download PDF

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Publication number
WO2019237610A1
WO2019237610A1 PCT/CN2018/110174 CN2018110174W WO2019237610A1 WO 2019237610 A1 WO2019237610 A1 WO 2019237610A1 CN 2018110174 W CN2018110174 W CN 2018110174W WO 2019237610 A1 WO2019237610 A1 WO 2019237610A1
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Prior art keywords
exposure
cover plate
frame
light box
platform
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PCT/CN2018/110174
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French (fr)
Chinese (zh)
Inventor
寇红龙
朱建军
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许昌富华玻璃有限公司
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Publication of WO2019237610A1 publication Critical patent/WO2019237610A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008Production of exposure light, i.e. light sources
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G03F7/70891Temperature

Definitions

  • the invention relates to an exposure table, in particular to a film exposure table for glass production.
  • Exposure is to cover the mask on the photoresist-coated glass surface and irradiate it with an exposure lamp; the photoresist in the light-receiving part undergoes a chemical reaction to change the solubility of this part of the photoresist in the developing solution. Therefore, after development, the photoresist film Shows a pattern consistent with the mask.
  • film is mainly used as the mask. The main problems are as follows: First, the light is uneven, so that the degree of light received on the coated glass is not uniform. The degree of chemical reaction of the photoresist in the light-receiving part is also inconsistent.
  • a cooling device is required to perform the exposure chamber and the exposure table. Cooling, the existing cooling device is fixed, unable to uniformly cool each area of the exposure chamber and the exposure table, resulting in uneven heating of the original on the exposure table, distortion of the image on the film, and the quality of the exposure process cannot be guaranteed; Therefore, in order to solve the above problems, it is necessary to develop a film exposure table for glass production.
  • the purpose of the present invention is to overcome the shortcomings of the prior art, and provide a film exposure table for glass production with uniform illumination, uniform and comprehensive cooling, low energy loss, and high exposure efficiency.
  • a film exposure table for glass production including a frame, a conical light box, an exposure lamp, an exposure platform, a cover plate, a vacuum pump, a vacuum air pipe, a cooler, a cooling pipe and an air outlet device
  • the frame is provided with a conical light box
  • the exposure light is provided in the conical light box
  • the frame is provided with an exposure platform above the conical light box
  • the exposure platform is provided with a cover plate
  • One side of the cover plate and one side of the exposure platform are hinged together, the exposure platform and the cover plate surround a cavity containing the exposed object
  • the cover plate is covered with a sealing cloth
  • the inside of the cover plate A sealing strip is provided at the edge, and a vacuum pump is provided on the frame.
  • the vacuum pump is connected to a sealed cavity formed by the cover plate and the exposure voucher through a vacuum air pipe.
  • a cooling machine is also provided on the frame.
  • the cooler is connected to an air outlet device through a cooling pipe.
  • the air outlet device is provided on the upper sides of the two sides of the inside of the conical light box, a connection plate is provided in the conical light box, and a connection shaft is provided at both ends of the air outlet device.
  • the connecting shaft is rotatably connected to the connecting plate, and a rotating electric machine is also provided on the connecting shaft.
  • the conical light box is also provided with a conventional lighting lamp.
  • An exhaust fan is arranged on the conical light box.
  • the cavity formed by the cover plate is in contact with the exposure platform through the sealing strip, and the cavity formed by the cover plate is airtight.
  • the beneficial effects of the present invention are: through the setting of the conical light box in the present invention, the light of the exposure lamp is better reflected, the light is more uniform, the waste of light energy is reduced, and the exposure efficiency is improved; through the cooling device and the air outlet device
  • the setting can better cool the exposure chamber and the exposure table.
  • the rotating device of the air outlet device can adjust the temperature of each area of the exposure chamber and the exposure table evenly, making the exposure efficiency higher.
  • the The invention has the advantages of uniform illumination, uniform and comprehensive cooling, small energy loss, and high exposure efficiency.
  • FIG. 1 is a schematic view of a front view structure of the present invention.
  • FIG. 2 is a schematic side view structure of the present invention.
  • a film exposure table for glass production includes a frame 1, a conical light box 2, an exposure lamp 3, an exposure platform 4, a cover plate 5, a vacuum pump 6, a vacuum gas pipe 7, and a cooler 8 ⁇ Cooling duct 9 and air outlet device 10.
  • a cone-shaped light box 2 is provided on the frame 1, and an exposure lamp 3 is provided in the cone-shaped light box 2.
  • An exposure platform 4 is provided on the frame 1 above the cone-shaped light box 2 to expose the light.
  • a cover plate 5 is provided on the platform 4. One side of the cover plate 5 and one side of the exposure platform 4 are hinged together.
  • the exposure platform 4 and the cover plate 5 surround a cavity containing the exposed object, and the cover plate 5 is provided with a cover.
  • the sealing cloth is provided with a sealing strip at the inner edge of the cover plate 5. After the cover plate 5 is covered with the sealing cloth, after the cover plate 5 is in contact with the exposure platform 4 through the sealing strip, the cavity formed by the cover plate 5 is airtight.
  • a vacuum pump 6 is also provided on the rack 1.
  • the vacuum pump 6 is connected to the sealed cavity formed by the cover plate 5 and the exposure receipt through a vacuum air pipe 7.
  • the rack 1 is also provided with a cooler 8, which is cooled by cooling.
  • the duct 9 is connected to the air outlet device 10.
  • the air outlet device 10 is provided on the upper sides of the two sides of the tapered light box 2.
  • the connection plate 11 is provided in the tapered light box 2.
  • the two ends of the air outlet device 10 are provided with a connection shaft 12 and a connection shaft 12.
  • the connecting plate 11 can be rotatably connected, and a rotating motor is also provided on the connecting shaft 12.
  • the conical light box 2 is further provided with a conventional lighting lamp, and the conical light box 2 is provided with an exhaust fan.
  • the object to be exposed is placed on the exposure table 4, the cover 5 is covered, the vacuum pump 6 is started, and the exposure platform 4 and the cover 5 are enclosed by a vacuum air pipe 7 to form a cavity containing the object to be exposed for extraction.
  • Vacuum start the exposure lamp 3 for exposure, and then start the cooler 8 to cool the exposure table 4 and the exposure chamber through the cooling pipe 9 and the air outlet device 10, wherein the rotating shaft drives the connection shaft 12 to rotate, thereby driving the air out
  • the device 10 is rotated, so that each area of the exposure chamber and the exposure table 4 is uniformly cooled, so that the exposure efficiency is higher.

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

Provided is a film exposure stage for glass production, the film exposure stage comprising a frame (1), a tapered lamp box (2), exposure lamps (3), an exposure platform (4), a cover plate (5), a vacuum pump (6), a vacuum air pipe (7), a cooling machine (8), a cooling pipeline (9) and an air outlet device (10). The tapered lamp box (2) is provided on the frame (1). The exposure lamps (3) are provided in the tapered lamp box (2). The exposure platform (4) is provided on the frame (1) and above the tapered lamp box (2). The cover plate (5) is provided on the exposure platform (4), and the exposure platform (4) and the cover plate (5) enclose a cavity for accommodating an object to be exposed. A sealing cloth is provided on the cover plate (5) in a manner of covering same, and a sealing strip is provided at an edge of the inner side of the cover plate (5). The vacuum pump (6) is further provided on the frame (1), and the vacuum pump (6) is connected, via the vacuum air pipe (7), to the interior of the sealed cavity which is formed by the cover plate (5) and the exposure platform (4). The cooling machine (8) is further provided on the frame (1), and the cooling machine (8) is connected to the air outlet device (10) via the cooling pipeline (9). The air outlet device (10) is provided at an upper portion of two sides in the tapered lamp box (2). The exposure stage has the advantages of uniform illumination, uniform and complete cooling, low energy loss and high exposure efficiency.

Description

一种玻璃生产用菲林曝光台Film exposure table for glass production 技术领域Technical field
本发明涉及一种曝光台,具体涉及一种玻璃生产用菲林曝光台。The invention relates to an exposure table, in particular to a film exposure table for glass production.
背景技术Background technique
曝光是在涂好光刻胶的玻璃表面覆盖掩膜版,采用曝光灯进行照射;使受光部分的光刻胶发生化学反应,改变这一部分胶在显影液中的溶解度,因而显影后,光刻胶膜显现出与掩膜版上一致的图案,在现有技术中主要采用菲林作为掩膜版,主要存在以下问题:首先,光照不均匀,使得涂好胶的玻璃上接受到的光照程度也不一致,使受光部分的光刻胶发生化学反应的程度也不一致;其次,曝光灯工作时,存在电能转化为热能的情况,使得曝光室和曝光台面温度升高,需要冷却装置对曝光室和曝光台面进行冷却,现有冷却装置固定不动,无法对曝光室内和曝光台面的每个区域进行均匀降温,造成曝光台上的原稿受热不均,造成菲林片上的图像变形,不能保证曝光过程的良品率;所以,为解决上述问题,开发一种玻璃生产用菲林曝光台很有必要。Exposure is to cover the mask on the photoresist-coated glass surface and irradiate it with an exposure lamp; the photoresist in the light-receiving part undergoes a chemical reaction to change the solubility of this part of the photoresist in the developing solution. Therefore, after development, the photoresist film Shows a pattern consistent with the mask. In the prior art, film is mainly used as the mask. The main problems are as follows: First, the light is uneven, so that the degree of light received on the coated glass is not uniform. The degree of chemical reaction of the photoresist in the light-receiving part is also inconsistent. Second, when the exposure lamp is operating, there is a situation in which electrical energy is converted into thermal energy, which causes the temperature of the exposure chamber and the exposure table to rise. A cooling device is required to perform the exposure chamber and the exposure table. Cooling, the existing cooling device is fixed, unable to uniformly cool each area of the exposure chamber and the exposure table, resulting in uneven heating of the original on the exposure table, distortion of the image on the film, and the quality of the exposure process cannot be guaranteed; Therefore, in order to solve the above problems, it is necessary to develop a film exposure table for glass production.
发明内容Summary of the Invention
本发明的目的是为了克服现有技术的不足,而提供一种光照均匀、冷却均匀全面、能源损耗小、曝光效率高的璃生产用菲林曝光台。The purpose of the present invention is to overcome the shortcomings of the prior art, and provide a film exposure table for glass production with uniform illumination, uniform and comprehensive cooling, low energy loss, and high exposure efficiency.
本发明的目的是这样实现的:一种玻璃生产用菲林曝光台,包括机架、锥形灯箱、曝光灯、曝光平台、盖板、真空泵、真空气管、冷却机、冷却管道和出风装置,其中,所述机架上设置锥形灯箱,所述锥形灯箱内设置有所述曝光灯,所述机架上位于锥形灯箱上方设置有曝光平台,所述曝光平台上设置有盖板,所述盖板的一侧和曝光平台的一侧铰接在一起,所述曝光平台和盖板围合 成容纳被曝光物的腔体,所述盖板上覆盖设置有密封布,所述盖板内侧边缘处设置有密封条,所述机架上还设置有真空泵,所述真空泵通过真空气管与盖板和曝光凭条所形成的密封腔体内相连,所述机架上还设置有冷却机,所述冷却机通过冷却管道和出风装置相连,所述出风装置设置在锥形灯箱内两侧上部,所述锥形灯箱内设置有连接板,所述出风装置两端设置有连接轴,所述连接轴可旋转活动连接所述连接板,所述连接轴上还设置有旋转电机。The purpose of the present invention is achieved as follows: a film exposure table for glass production, including a frame, a conical light box, an exposure lamp, an exposure platform, a cover plate, a vacuum pump, a vacuum air pipe, a cooler, a cooling pipe and an air outlet device, Wherein, the frame is provided with a conical light box, the exposure light is provided in the conical light box, the frame is provided with an exposure platform above the conical light box, and the exposure platform is provided with a cover plate, One side of the cover plate and one side of the exposure platform are hinged together, the exposure platform and the cover plate surround a cavity containing the exposed object, the cover plate is covered with a sealing cloth, and the inside of the cover plate A sealing strip is provided at the edge, and a vacuum pump is provided on the frame. The vacuum pump is connected to a sealed cavity formed by the cover plate and the exposure voucher through a vacuum air pipe. A cooling machine is also provided on the frame. The cooler is connected to an air outlet device through a cooling pipe. The air outlet device is provided on the upper sides of the two sides of the inside of the conical light box, a connection plate is provided in the conical light box, and a connection shaft is provided at both ends of the air outlet device. The connecting shaft is rotatably connected to the connecting plate, and a rotating electric machine is also provided on the connecting shaft.
所述曝光灯为三个。There are three exposure lamps.
所述锥形灯箱内还设置有常规照明灯。The conical light box is also provided with a conventional lighting lamp.
所述锥形灯箱上设置有排风扇。An exhaust fan is arranged on the conical light box.
所述盖板覆盖设置密封布后,盖板通过密封条和曝光平台相接触后,其所形成的腔体密封不漏气。After the cover plate is covered with a sealing cloth, the cavity formed by the cover plate is in contact with the exposure platform through the sealing strip, and the cavity formed by the cover plate is airtight.
本发明的有益效果是:本发明中通过锥形的灯箱的设置,对曝光灯灯光更好的进行反射,使光照更加均匀,减少光能量的浪费,提高曝光效率;通过冷却装置和出风装置的设置可更好的对曝光室和曝光台面进行降温同时,出风装置的可转动调节设置,可对曝光室和曝光台面的每个区域进行均匀降温,使得曝光效率更高;总的,本发明具有光照均匀、冷却均匀全面、能源损耗小、曝光效率高的优点。The beneficial effects of the present invention are: through the setting of the conical light box in the present invention, the light of the exposure lamp is better reflected, the light is more uniform, the waste of light energy is reduced, and the exposure efficiency is improved; through the cooling device and the air outlet device The setting can better cool the exposure chamber and the exposure table. At the same time, the rotating device of the air outlet device can adjust the temperature of each area of the exposure chamber and the exposure table evenly, making the exposure efficiency higher. Overall, the The invention has the advantages of uniform illumination, uniform and comprehensive cooling, small energy loss, and high exposure efficiency.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本发明的主视结构示意图。FIG. 1 is a schematic view of a front view structure of the present invention.
图2是本发明的侧视结构示意图。FIG. 2 is a schematic side view structure of the present invention.
图中:1、机架 2、锥形灯箱 3、曝光灯 4、曝光台面 5、盖板 6、真空泵 7、真空气管 8、冷却机 9、冷却管道 10、出风装置 11、连接板  12、连接轴。In the picture: 1. Rack 2. Conical light box 3. Exposure lamp 4. Exposure table 5. Cover 6. Vacuum pump 7. Vacuum tube 8. Cooler 9. Cooling duct 10. Air outlet 11. Connection plate 12. Connect the shaft.
具体实施方式detailed description
下面结合附图对本发明的技术方案做进一步具体的说明。The technical solution of the present invention will be further specifically described below with reference to the accompanying drawings.
如图1、图2所示,一种玻璃生产用菲林曝光台,包括机架1、锥形灯箱2、曝光灯3、曝光平台4、盖板5、真空泵6、真空气管7、冷却机8、冷却管道9和出风装置10。As shown in Figures 1 and 2, a film exposure table for glass production includes a frame 1, a conical light box 2, an exposure lamp 3, an exposure platform 4, a cover plate 5, a vacuum pump 6, a vacuum gas pipe 7, and a cooler 8 、 Cooling duct 9 and air outlet device 10.
其中,机架1上设置锥形灯箱2,锥形灯箱2内设置有曝光灯3,优选的,曝光灯3为三个,机架1上位于锥形灯箱2上方设置有曝光平台4,曝光平台4上设置有盖板5,盖板5的一侧和曝光平台4的一侧铰接在一起,曝光平台4和盖板5围合成容纳被曝光物的腔体,盖板5上覆盖设置有密封布,盖板5内侧边缘处设置有密封条,盖板5覆盖设置密封布后,盖板5通过密封条和曝光平台4相接触后,其所形成的腔体密封不漏气。Wherein, a cone-shaped light box 2 is provided on the frame 1, and an exposure lamp 3 is provided in the cone-shaped light box 2. Preferably, there are three exposure lamps 3. An exposure platform 4 is provided on the frame 1 above the cone-shaped light box 2 to expose the light. A cover plate 5 is provided on the platform 4. One side of the cover plate 5 and one side of the exposure platform 4 are hinged together. The exposure platform 4 and the cover plate 5 surround a cavity containing the exposed object, and the cover plate 5 is provided with a cover. The sealing cloth is provided with a sealing strip at the inner edge of the cover plate 5. After the cover plate 5 is covered with the sealing cloth, after the cover plate 5 is in contact with the exposure platform 4 through the sealing strip, the cavity formed by the cover plate 5 is airtight.
其中,机架1上还设置有真空泵6,真空泵6通过真空气管7与盖板5和曝光凭条所形成的密封腔体内相连,机架1上还设置有冷却机8,冷却机8通过冷却管道9和出风装置10相连,出风装置10设置在锥形灯箱2内两侧上部,锥形灯箱2内设置有连接板11,出风装置10两端设置有连接轴12,连接轴12可旋转活动连接连接板11,连接轴12上还设置有旋转电机。A vacuum pump 6 is also provided on the rack 1. The vacuum pump 6 is connected to the sealed cavity formed by the cover plate 5 and the exposure receipt through a vacuum air pipe 7. The rack 1 is also provided with a cooler 8, which is cooled by cooling. The duct 9 is connected to the air outlet device 10. The air outlet device 10 is provided on the upper sides of the two sides of the tapered light box 2. The connection plate 11 is provided in the tapered light box 2. The two ends of the air outlet device 10 are provided with a connection shaft 12 and a connection shaft 12. The connecting plate 11 can be rotatably connected, and a rotating motor is also provided on the connecting shaft 12.
优选的,锥形灯箱2内还设置有常规照明灯,锥形灯箱2上设置有排风扇。Preferably, the conical light box 2 is further provided with a conventional lighting lamp, and the conical light box 2 is provided with an exhaust fan.
本发明具体实施时,将被曝光物放置在曝光台面4上,盖上盖板5,启动真空泵6,通过真空气管7将曝光平台4和盖板5围合成容纳被曝光物的腔体进行抽真空,启动曝光灯3进行曝光,后启动冷却机8,通过冷却管道9和出风装置10对曝光台面4和曝光室进行冷却,其中,通过旋转电机带动连接轴12进行旋 转,从而带动出风装置10进行转动,从而均匀的对曝光室和曝光台面4的每个区域进行均匀降温,使得曝光效率更高。In the specific implementation of the present invention, the object to be exposed is placed on the exposure table 4, the cover 5 is covered, the vacuum pump 6 is started, and the exposure platform 4 and the cover 5 are enclosed by a vacuum air pipe 7 to form a cavity containing the object to be exposed for extraction. Vacuum, start the exposure lamp 3 for exposure, and then start the cooler 8 to cool the exposure table 4 and the exposure chamber through the cooling pipe 9 and the air outlet device 10, wherein the rotating shaft drives the connection shaft 12 to rotate, thereby driving the air out The device 10 is rotated, so that each area of the exposure chamber and the exposure table 4 is uniformly cooled, so that the exposure efficiency is higher.
以上所述仅为本发明的较佳实施方式,并不用以限制本发明,凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention shall be included in the protection of the present invention. Within range.

Claims (5)

  1. 一种玻璃生产用菲林曝光台,其特征在于:包括机架(1)、锥形灯箱(2)、曝光灯(3)、曝光平台(4)、盖板(5)、真空泵(6)、真空气管(7)、冷却机(8)、冷却管道(9)和出风装置(10),其中,所述机架(1)上设置锥形灯箱(2),所述锥形灯箱(2)内设置有所述曝光灯(3),所述机架(1)上位于锥形灯箱(2)上方设置有曝光平台(4),所述曝光平台(4)上设置有盖板(5),所述盖板(5)的一侧和曝光平台(4)的一侧铰接在一起,所述曝光平台(4)和盖板(5)围合成容纳被曝光物的腔体,所述盖板(5)上覆盖设置有密封布,所述盖板(5)内侧边缘处设置有密封条,所述机架(1)上还设置有真空泵(6),所述真空泵(6)通过真空气管(7)与盖板(5)和曝光凭条所形成的密封腔体内相连,所述机架(1)上还设置有冷却机(8),所述冷却机(8)通过冷却管道(9)和出风装置(10)相连,所述出风装置(10)设置在锥形灯箱(2)内两侧上部,所述锥形灯箱(2)内设置有连接板(11),所述出风装置(10)两端设置有连接轴(12),所述连接轴(12)可旋转活动连接所述连接板(11),所述连接轴(12)上还设置有旋转电机。A film exposure table for glass production, which is characterized by comprising a frame (1), a tapered light box (2), an exposure lamp (3), an exposure platform (4), a cover plate (5), a vacuum pump (6), The vacuum air pipe (7), the cooler (8), the cooling pipe (9) and the air outlet device (10), wherein the frame (1) is provided with a conical light box (2), and the conical light box (2) ) Is provided with the exposure lamp (3), an exposure platform (4) is provided on the frame (1) above the conical light box (2), and a cover plate (5) is provided on the exposure platform (4) ), One side of the cover plate (5) and one side of the exposure platform (4) are hinged together, and the exposure platform (4) and the cover plate (5) surround a cavity containing the object to be exposed, and A cover cloth is provided on the cover plate (5), a sealing strip is provided on the inner edge of the cover plate (5), and a vacuum pump (6) is also provided on the frame (1). The vacuum pump (6) passes through The vacuum air pipe (7) is connected to the sealed cavity formed by the cover plate (5) and the exposure receipt. The frame (1) is also provided with a cooler (8), and the cooler (8) passes through a cooling pipe. (9) It is connected with the air outlet device (10), and the air outlet device (10) is arranged on both sides of the inside of the conical light box (2) A connecting plate (11) is provided in the conical light box (2), and a connecting shaft (12) is provided at both ends of the air outlet device (10), and the connecting shaft (12) can rotatably connect the connection The plate (11) is further provided with a rotating electric machine on the connecting shaft (12).
  2. 根据权利要求1所述的一种玻璃生产用菲林曝光台,其特征在于:所述曝光灯(3)为三个。The film exposure table for glass production according to claim 1, characterized in that there are three exposure lamps (3).
  3. 根据权利要求1所述的一种玻璃生产用菲林曝光台,其特征在于:所述锥形灯箱(2)内还设置有常规照明灯。The film exposure table for glass production according to claim 1, characterized in that the conical light box (2) is further provided with a conventional illumination lamp.
  4. 根据权利要求1所述的一种玻璃生产用菲林曝光台,其特征在于:所述锥形灯箱(2)上设置有排风扇。The film exposure table for glass production according to claim 1, wherein an exhaust fan is arranged on the conical light box (2).
  5. 根据权利要求1所述的一种玻璃生产用菲林曝光台,其特征在于:所述盖板(5)覆盖设置密封布后,盖板(5)通过密封条和曝光平台(4)相接触后,其所形成的腔体密封不漏气。The film exposure table for glass production according to claim 1, wherein after the cover plate (5) is covered with a sealing cloth, the cover plate (5) is in contact with the exposure platform (4) through a sealing strip. The cavity formed by it is airtight.
PCT/CN2018/110174 2018-06-12 2018-10-15 Film exposure stage for glass production WO2019237610A1 (en)

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