WO2019234791A1 - Screen printing machine - Google Patents

Screen printing machine Download PDF

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Publication number
WO2019234791A1
WO2019234791A1 PCT/JP2018/021355 JP2018021355W WO2019234791A1 WO 2019234791 A1 WO2019234791 A1 WO 2019234791A1 JP 2018021355 W JP2018021355 W JP 2018021355W WO 2019234791 A1 WO2019234791 A1 WO 2019234791A1
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WO
WIPO (PCT)
Prior art keywords
mask
substrate
cleaning
holding
screen printing
Prior art date
Application number
PCT/JP2018/021355
Other languages
French (fr)
Japanese (ja)
Inventor
深草祥史
Original Assignee
株式会社Fuji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社Fuji filed Critical 株式会社Fuji
Priority to CN201880094187.2A priority Critical patent/CN112218761B/en
Priority to EP18921910.8A priority patent/EP3804991B1/en
Priority to JP2020523855A priority patent/JP7002181B2/en
Priority to PCT/JP2018/021355 priority patent/WO2019234791A1/en
Publication of WO2019234791A1 publication Critical patent/WO2019234791A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F35/00Cleaning arrangements or devices
    • B41F35/003Cleaning arrangements or devices for screen printers or parts thereof
    • B41F35/005Cleaning arrangements or devices for screen printers or parts thereof for flat screens
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/08Machines
    • B41F15/0881Machines for printing on polyhedral articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/14Details
    • B41F15/16Printing tables
    • B41F15/18Supports for workpieces
    • B41F15/26Supports for workpieces for articles with flat surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41PINDEXING SCHEME RELATING TO PRINTING, LINING MACHINES, TYPEWRITERS, AND TO STAMPS
    • B41P2215/00Screen printing machines
    • B41P2215/10Screen printing machines characterised by their constructional features
    • B41P2215/11Registering devices
    • B41P2215/114Registering devices with means for displacing the article
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41PINDEXING SCHEME RELATING TO PRINTING, LINING MACHINES, TYPEWRITERS, AND TO STAMPS
    • B41P2215/00Screen printing machines
    • B41P2215/50Screen printing machines for particular purposes

Definitions

  • the present invention relates to a screen printing machine in which the normal height of the substrate is higher than the position at the time of mask cleaning.
  • the screen printer is equipped with a mask having a pattern hole formed thereon, and the substrate transported below is held. Then, the substrate rises and comes into contact with the lower surface of the mask, and the cream solder is spread from the upper surface side of the opposite mask by the squeegee device, whereby the cream solder passing through the pattern holes is printed on the substrate.
  • a camera unit imaging device
  • enters between a mask and a substrate positioned below the mask and a reference mark attached to the lower surface of the mask.
  • the reference marks attached to the upper surface of the substrate are imaged sequentially. Then, the position of each reference mark is confirmed by image processing, and correction is performed when there is a deviation.
  • the screen printing machine is provided with a cleaning unit (cleaning device) that wipes off the dirt on the mask.
  • the cleaning unit is configured to be able to move between the mask and the substrate, like the camera unit.
  • a coupling mechanism is provided so that the cleaning unit and the camera unit can be attached and detached. Both units are moved by the drive unit provided on the camera unit side. Normally, the cleaning unit is separated from the camera unit and only the camera unit can be moved. When cleaning the mask, it is connected to the camera unit. As a result, the cleaning unit can be moved.
  • the cleaning unit provided in the screen printer has a structurally larger height dimension than the camera unit, such as a roll-shaped cleaning paper and a cylinder for pressing the cleaning paper against the lower surface of the mask. End up. Therefore, in order to secure a space for the cleaning unit to enter, it is necessary to widen the distance between the mask and the substrate, and the conventional screen printing machine has a long ascending / descending distance for moving the substrate to the mask during printing. . Therefore, the conventional screen printing machine has a problem that the cycle time becomes longer according to the lift distance of the substrate. In addition, since the movement distance of the substrate is long, a slight error in the movement direction increases the amount of deviation between the substrate and the mask, resulting in a decrease in printing accuracy.
  • an object of the present invention is to provide a screen printing machine that makes the position of the substrate correspond to the height dimension of the imaging device in order to solve such a problem.
  • a screen printing machine includes a mask holding device that holds a mask, a squeegee device that spreads cream solder on the mask held by the mask holding device from above, and a substrate under the mask.
  • a transport device that transports the substrate, a substrate holding and lifting device that holds the substrate transported by the transport device and performs vertical positioning with respect to the mask, a cleaning device that wipes and cleans the lower surface of the mask, and a reference mark for the mask
  • an image pickup device for picking up an image of the reference mark on the substrate, a drive device for moving the image pickup device and the cleaning device between the mask and the substrate holding lift device, and controlling each device.
  • the lifting / lowering portion of the substrate holding lifting / lowering device is set to a reference height corresponding to the size of the imaging device. Constant and, upon movement of the cleaning device and a control device for lowering from the reference height in accordance with the size of the cleaning device.
  • the substrate holding lifting device is set at a reference height corresponding to the size of the imaging device during normal printing, so that the held substrate is placed at a distance close to the mask and when cleaning the mask. As the elevating unit descends, interference with the cleaning device is avoided.
  • FIG. 1 is a side view showing a simplified internal structure of a screen printing machine.
  • This screen printing machine 1 is for printing cream solder on a substrate, and constitutes a circuit board production line together with, for example, an inspection machine for inspecting the printing state and a component mounting machine for mounting electronic components on a substrate. It is.
  • the front-and-rear direction of the screen printing machine 1 shown in the drawing will be described as the Y-axis direction, the body width direction as the X-axis direction, and the body height direction as the Z-axis direction.
  • the screen printing machine 1 a mask is arranged inside the machine body, a substrate is conveyed and held under the mask, and cream solder is applied to the substrate on the lower side from the upper surface of the mask through the printing pattern hole. Therefore, the screen printing machine 1 has a mask holder 2 on the upper side so that a mask can be attached.
  • a squeegee device 3 for spreading the cream solder on the mask in the longitudinal direction of the machine body is installed on the upper side of the mask holder 2.
  • a substrate holding elevating device 4 that holds the transferred substrate and moves it in the vertical direction.
  • the screen printing machine 1 is covered with a machine body cover 19 as shown in the figure, but a transport port 191 is formed on both side surfaces in the machine body width direction so that substrates can be carried in and out. Therefore, a substrate transport device for transporting the substrate in the body width direction is provided below the mask holder 2. Further, on the lower side of the mask holder 2, a clamping device for clamping the substrate in the longitudinal direction of the machine body, a backup device for moving the substrate up and down to the clamping position, and the like are assembled in the lifting device. In the present embodiment, the clamping device and the lifting device are collectively referred to as a substrate holding lifting device 4.
  • FIG. 2 is a diagram showing a simplified structure of the substrate holding / lifting device 4 of the screen printing machine 1.
  • a lifting platform 12 is slidably attached to a guide rail 11 in a vertical direction, and the lifting platform 12 is connected to a lifting motor 14 via a ball screw 13.
  • a substrate transfer device 5, a clamp device 6, and the like are mounted on the lifting platform 12 via a support table 15.
  • a pair of mask supports 21 are provided on the support base 15 in the longitudinal direction of the machine body (Y-axis direction), and mask support plates 28 that contact the mask 20 are fixed to the upper surfaces of the legs.
  • a ball screw 22 is formed on the mask support 21 on the right side of the drawing, and the distance from the mask support 21 on the left side of the drawing can be adjusted by a mask support motor.
  • the clamp device 6 has a pair of side frames 25 arranged in the longitudinal direction of the machine body, and is assembled to the support base 23, respectively.
  • a ball screw 26 is formed on the side frame 25 on the right side of the drawing, and the distance from the side frame 25 on the left side of the drawing can be adjusted by a substrate clamping motor.
  • the pair of side frames 25 has a clamp portion 27 formed at the upper end thereof, and the clamp portions 27 come close to each other so that the substrate 10 can be held therebetween.
  • a substrate transfer device 5 including a conveyor belt 29 is assembled inside the side frame 25.
  • a backup device 7 that supports the substrate 10 is provided between the pair of side frames 25.
  • the backup device 7 is configured such that a backup table 31 having a plurality of backup pins 32 is supported via a ball screw and is moved up and down by a backup motor 34.
  • the support base 23 of the clamp device 6 is supported via a ball screw and is configured to be moved up and down by a lifting motor 33.
  • the support table 15 that supports the clamp device 6 and the backup device 7 can be adjusted in position in the X direction, the Y direction, and the ⁇ direction on the XY plane with respect to the lifting table 12. That is, a correction device that adjusts the position of the held substrate 10 and the mask 20 is configured.
  • the screen printing machine 1 includes the substrate holding and lifting device 4 in which the clamping device 6 and the backup device 7 are assembled to the lifting device 8 on the lower side of the mask 20, and the height of the substrate 10 is increased stepwise. It is configured to change.
  • the position of the lifting platform 12 shown in FIG. 2 is configured as the reference height K.
  • This reference height K specifies the transport height of the substrate 10 transported by the substrate transport device 5. Is. That is, when the lifting platform 12 is positioned at the reference height and the clamp device 6 and the backup device 7 are lowered as shown in FIG. 2, the substrate transfer device 5 assembled to the clamp device 6 becomes the transfer position.
  • the conveyor belt 29 which comprises the board
  • the transferred substrate 10 is configured to move upward by the backup device 7 in order to align the upper surface with the clamp portion 27. After printing, it moves downward, but the height of the upper surface of the conveyor belt 29 is such that the thickness of the substrate 10 that can be processed by the screen printing machine 1 and the amount of warpage so that the vertical movement distance becomes smaller. It is set by.
  • the clamp device 6 is configured such that the held substrate 10 moves upward so that the upper surface of the substrate 10 is aligned with the mask support plate 28. After printing, it moves downward, but in this case as well, the upper surface height of the clamp portion 27 with respect to the mask support plate 28 is set in the clamping device 6 so that the moving distance in the vertical direction becomes small. . Therefore, in the substrate holding / lifting device 4, the relationship of the height of each member is set, and the height of the upper surface of the conveyor belt 29 relative to the upper surface of the mask support plate 28 is also a predetermined height.
  • FIG. 3 is a diagram showing the movement periphery of the camera unit 35 and the cleaning unit 37 in a simplified manner. In particular, the camera unit 35 and the cleaning unit 37 are separated, and only the camera unit 35 enters between the substrate 10 and the mask 20.
  • the arrow A ⁇ b> 1 is the movement range of the camera unit 35 and the cleaning unit 37
  • the arrow A ⁇ b> 2 is the movement range of the substrate 10.
  • the camera unit 35 and the cleaning unit 37 are slidably attached to a guide rod 41 extending in the longitudinal direction of the machine body and configured to be movable by a driving device.
  • the drive device of the present embodiment is configured so that only the camera unit 35 can self-propell like the conventional example.
  • a screw shaft that is rotated by a drive motor is provided in parallel with the guide rail 41, and a nut fixed on the camera unit 35 side is screwed to form a ball screw.
  • a coupler is formed in both units.
  • the cleaning unit 37 is configured such that a roll-shaped cleaning paper is used, and the used portion that is unwound from the first roller 43 before use and wiped off the mask 20 is wound around the second roller 44. Yes.
  • the cleaning paper 13 is wound (unwinding from the first roller 43) by a servo motor provided on the second roller 44 side, and the cleaning paper is pressed against the lower surface of the mask 20 between the two rollers.
  • a paper pressing mechanism using an air cylinder 45 is incorporated.
  • the camera unit 35 has a prism combined with the camera 47 in order to image both the upper mask and the lower substrate.
  • a solenoid 48 for moving the plunger up and down is provided in the camera unit 35.
  • a through hole is formed in the cleaning unit 37, and a connecting plate 49 projects toward the camera unit 35.
  • the solenoid 48 and the connection plate 49 serve as a connector for connecting the camera unit 35 and the cleaning unit 37. Therefore, when the plunger of the solenoid 48 extends downward and is inserted into the through hole of the connecting plate 49 inserted into the camera unit 35, the cleaning unit 37 is connected to the camera unit 35 and can be moved integrally. .
  • the front portion of the screen printing machine 1 is in a standby position. Therefore, when the mask 20 is cleaned using the cleaning unit 37, the camera unit 35 moves to the standby position and is connected to the cleaning unit 37. On the other hand, in a state where the plunger of the solenoid 48 is pulled up, the camera unit 35 and the cleaning unit 37 are separated so that the reference mark attached to the substrate 10 or the mask 20 is imaged by the movement of the camera unit 35 alone. It has become.
  • the camera unit 35 and the cleaning unit 37 are entirely covered with a unit cover, but the height dimension of the cleaning unit 37 is larger than the height dimension of the camera unit 35.
  • a roll-shaped cleaning paper wound around the first and second rollers 43 and 44 and an air cylinder 45 for pressing the cleaning paper against the mask are incorporated.
  • the distance between the substrate 10 and the mask 20 is designed corresponding to the height of the cleaning unit 37 having a large size. For this reason, the moving distance of the substrate 10 becomes longer, the cycle time becomes longer, and the positional accuracy of the substrate 10 with respect to the mask 20 is lowered.
  • the screen printer 1 is configured such that the height of the substrate 10 is switched between the normal time shown in FIG. 4 and the cleaning time shown in FIG.
  • the normal cleaning unit 37 is disposed at the standby position shown in FIG. 1, and only the camera unit 35 enters between the substrate 10 and the mask 20.
  • the transport height of the substrate 10 transported into the screen printer 1 is set with the upper surface of the mask support plate 28 shown in FIG. 4 as the reference height k2.
  • the substrate holding / lifting device 4 in which the substrate transfer device 5 and the like are mounted on the lifting / lowering device 8
  • there is a possibility that the lifting / lowering unit that is displaced in the vertical direction may interfere with the camera unit 35 and the cleaning unit 37 that enter the lower side of the mask 20. .
  • the upper surface of the support plate 28 closest to the mask 20 in such an elevation unit is set to the reference height k2.
  • the reference height k2 is the upper surface height of the mask support plate 28 when the lifting platform 12 is positioned at the reference height K as shown in FIG.
  • FIG. 6 is a diagram conceptually showing the positional relationship between the substrate 10 positioned at the reference height k2, the mask 20 held by the mask holder 2, and the camera unit 35.
  • the distance L2 from the mask 20 is set to 3 mm. Therefore, the reference height k2 is designed so that the distance L1 from the camera unit 35 to the substrate 10 is 5 mm, that is, almost the same between the distances L1 and L2.
  • the distance L3 between the substrate 10 and the mask 20 can be minimized by setting the distances L1 and L2 to the same value, but the same degree considering the amount of state change such as warpage that may occur in the substrate 10. And the value of the distance L1 is slightly increased.
  • the cleaning unit 37 moves to the lower side of the mask 20, so that not only the camera unit 35 but also the cleaning unit 37 moves between the substrate 10 and the mask 20. It will be.
  • the cleaning unit 37 is configured to be lowered downward from the reference height k2 so that the substrate 10 does not interfere with the camera unit 35 because the upper surface is aligned with the camera unit 35 and is larger downward. . Since the substrate 10 is not necessarily held when the mask 20 is cleaned, the space between the substrate 10 and the mask 20 is between the height of the substrate 10 and the mask 20 when the substrate 10 is held. It means that.
  • the screen printing machine 1 is equipped with a control device 9 that controls the overall drive, and the drive control of each device including the elevation control of the substrate 10 is performed as follows. It has become. First, for printing on the substrate 10 in the screen printing machine 1, the substrate 10 is conveyed between the side frames 25 by the conveyor belt 29. Then, the backup table 31 is raised by driving the backup motor 34, and the substrate 10 pushed up by the backup pins 32 is lifted from the conveyor belt 29. After the alignment of the substrate 10, the side frame 25 is moved by driving the substrate clamping motor, and the substrate 10 is sandwiched and held by the pair of clamp portions 27.
  • the clamp device 6 holding the substrate 10 is raised by driving the lifting motor 33, and the clamp portion 27 and the substrate 10 are positioned at the height of the mask support plate 28. That is, the upper surface heights of the mask support plate 28, the clamp part 27, and the substrate 10 are aligned with the reference height K.
  • the camera unit 35 moves between the substrate 10 and the mask 20, and the respective reference marks are imaged. Based on the imaging data, the deviation amounts in the X, Y, and ⁇ directions with respect to the substrate 10 and the mask 20 are detected.
  • the positional deviation correction is performed by the correction device calculated and configured on the support base 15.
  • the lifting platform 12 is lifted from the position of the reference height K by driving the lifting motor 14, and the substrate 10 is moved to the mask 20. Positioned at a height that touches the lower surface. Then, the cream solder on the mask 20 is rolled by the squeegee device 3, pushed into the printed pattern holes, and applied to the lower substrate 10. After that, the plate 10 is moved down at a predetermined speed by driving the lifting motor 33, and printing with cream solder according to the printing pattern is performed on the substrate 10.
  • the lifting platform 12 When printing is performed on the substrate 10, the lifting platform 12 is lowered by the driving of the lifting motor 14 and returned to the position of the reference height K. Thereafter, the clamp device 6 holding the substrate 10 is lowered by driving the lifting motor 33, the backup table 31 is lowered by driving the backup motor 34, and the substrate 10 placed on the backup pins 32 is returned to the conveyor belt 29. It is. Thus, the positions of the clamping device 6 and the backup device 7 return to the substrate conveyance height shown in FIG. 2, so that the substrate 10 can be conveyed by the substrate conveyance device 5, and the printed substrate 10 can be transferred from the screen printer 1. Unloaded and a new substrate 10 is loaded.
  • the printing process for the substrate 10 and the loading / conveying of the substrate 10 are repeatedly performed, and the cleaning of the mask 20 is performed for each printing process on a predetermined number of substrates 10.
  • the camera unit 35 moves to the cleaning unit 37 at the standby position as shown in FIG. That is, the connecting plate 4 on the cleaning unit 37 side is inserted into the camera unit 35, and the plunger of the solenoid 48 is inserted into the through hole.
  • the elevating table 12 is lowered by driving the elevating motor 14 so that the substrate 10, the mask support plate 28, and the like do not interfere with the cleaning unit 37, and are lowered by a predetermined distance from the reference height K. Evacuate to. The retracted position is below the substrate transport height. Therefore, the cleaning unit 37 can enter between the substrate 10 and the mask 20, and the cleaning paper is pressed against the lower surface of the mask 20 to wipe off the dirt. After the cleaning of the mask 20 is completed, the cleaning unit 37 is returned to the standby position again, and the connection with the camera unit 35 is disconnected. In the substrate holding / elevating device 4, the elevating table 12 is raised by driving the elevating motor 14, and the upper surface of the mask support plate 28 is returned to the reference height Kk2.
  • the substrate 10 is normally held and positioned at a position close to the mask 20, the ascending and descending distance to the mask 20 is shortened, and the time required for the lifting operation during printing is shortened. Is done.
  • the position of the substrate 10 is brought closer to the mask 20 by 25 mm by making the camera unit 35 smaller in size. Therefore, the moving distance of the substrate 10 during printing is a difference of 50 mm in the reciprocation, and the cycle time can be shortened.
  • the positional accuracy of the substrate 10 with respect to the mask 20 can be increased by reducing the moving distance of the substrate 10.
  • the substrate 10 moves up and down in accordance with the movement of the lifting platform 12 along the guide rail 11.
  • the movement direction is designed in accordance with the vertical direction, as shown in FIG. ) Will occur.
  • a lateral displacement B occurs between the substrate 10 and the mask 20 at a position where the substrate 10 is in contact with the mask 20.
  • the distance L3 between the substrate 10 and the mask 20 is 125 mm in this embodiment and 150 mm in the conventional example
  • the difference in the lateral deviation B is about 44 ⁇ m even if the value of the angle ⁇ is 0.1 °. End up. Since printing on the substrate 10 requires accuracy of several tens of microns, this embodiment is also effective in increasing printing accuracy.
  • the size of the cleaning unit 37 is larger than that of the camera unit 35.
  • the cleaning unit 37 is preferably attached with cleaning paper having a large diameter in consideration of usage efficiency and the like.
  • the mask 20 is moved on the substrate holding / lifting device 4 for cleaning, in the case of the cleaning unit 37 having a large height in accordance with the cleaning paper, it does not interfere with it. It is necessary to secure a larger space.
  • the present embodiment eliminates the drawback that the stroke of the lifting platform 12 becomes large during printing while increasing the usage efficiency of the cleaning unit 37. That is, the lifting stroke of the lifting platform 12 performed for each substrate 10 may be set according to the small camera unit 35 regardless of the size of the cleaning unit 37. On the other hand, when the mask 20 is cleaned, the lifting platform 12 is lowered to create a large space as in the prior art, so that the disadvantages of the cleaning unit 37 using cleaning paper with a large diameter can be eliminated.
  • the cleaning unit 37 is movable by being connected to the camera unit 35 capable of self-running.
  • the cleaning unit 37 is also self-running in which the rotation output of the drive motor is converted into a straight motion by a ball screw. It is good also as a structure.
  • the drive device that causes each unit to travel may have another structure such as converting the rotation of the drive motor into a straight movement through a pulley or a belt.
  • the distance L2 from the mask 20 can be minimized, but the height direction of the camera unit 35 is based on the center position in the height direction of both units.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Screen Printers (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

A screen printing machine comprising: a mask holding device that holds a mask; a squeegee device that applies and spreads cream soldier onto the mask being held by the mask holding device from above; a conveyance device that conveys a substrate under the mask; a substrate holding and elevating device that holds the substrate conveyed by the conveyance device and positions the substrate in a vertical direction with respect to the mask; a cleaning device that wipes off and cleans a lower surface of the mask; an imaging device that images a reference mark of the mask and a reference mark of the substrate; a driving device that causes the imaging device and the cleaning device to be moved between the mask and the substrate holding and elevating device; and a control device that controls the respective devices and causes, with respect to the substrate holding and elevating device, an elevating part thereof to be set at a reference height corresponding to the size of the imaging device, and to be lowered from the reference height in accordance with the size of the cleaning device when the cleaning device is moved.

Description

スクリーン印刷機Screen printing machine
 本発明は、基板における通常時の高さがマスク清掃時の位置より高くなるようにしたスクリーン印刷機に関する。 The present invention relates to a screen printing machine in which the normal height of the substrate is higher than the position at the time of mask cleaning.
 スクリーン印刷機は、パターン孔の形成されたマスクが取り付けられ、その下側に搬送された基板が保持される。そして、その基板が上昇してマスクの下面に接触し、反対のマスク上面側からスキージ装置によってクリームはんだが塗り延ばしされることで、パターン孔を通ったクリームはんだが基板上に印刷される。このようなスクリーン印刷機は、下記特許文献1に示すように、マスクとその下側に位置決めされた基板との間にカメラユニット(撮像装置)が進入し、マスクの下面に付された基準マークと基板の上面に付された基準マークが順番に撮像される。そして、各基準マークの位置が画像処理によって確認され、ズレが生じている場合には補正が行われる。 The screen printer is equipped with a mask having a pattern hole formed thereon, and the substrate transported below is held. Then, the substrate rises and comes into contact with the lower surface of the mask, and the cream solder is spread from the upper surface side of the opposite mask by the squeegee device, whereby the cream solder passing through the pattern holes is printed on the substrate. In such a screen printer, as shown in the following Patent Document 1, a camera unit (imaging device) enters between a mask and a substrate positioned below the mask, and a reference mark attached to the lower surface of the mask. The reference marks attached to the upper surface of the substrate are imaged sequentially. Then, the position of each reference mark is confirmed by image processing, and correction is performed when there is a deviation.
 また、スクリーン印刷機にはマスクの汚れを拭き取るクリーニングユニット(クリーニング装置)が設けられている。そのクリーニングユニットは、カメラユニットと同様に、マスクと基板との間を移動することが可能な構成となっている。特に、この従来例では連結機構が設けられ、クリーニングユニットとカメラユニットとを着脱することが可能になっている。両ユニットを移動させるのはカメラユニット側に設けられた駆動装置であり、通常時は、クリーニングユニットがカメラユニットから切り離されてカメラユニットのみが移動可能であり、マスクの清掃時には、カメラユニットに連結されることによってクリーニングユニットの移動が可能になっている。 Also, the screen printing machine is provided with a cleaning unit (cleaning device) that wipes off the dirt on the mask. The cleaning unit is configured to be able to move between the mask and the substrate, like the camera unit. In particular, in this conventional example, a coupling mechanism is provided so that the cleaning unit and the camera unit can be attached and detached. Both units are moved by the drive unit provided on the camera unit side. Normally, the cleaning unit is separated from the camera unit and only the camera unit can be moved. When cleaning the mask, it is connected to the camera unit. As a result, the cleaning unit can be moved.
特開2015-80870号公報Japanese Patent Laying-Open No. 2015-80870
 ところで、スクリーン印刷機に設けられたクリーニングユニットは、ロール状のクリーニングペーパや、そのクリーニングペーパをマスク下面に押し当てるためのシリンダを有するなど、構造的にカメラユニットよりも高さ寸法が大きくなってしまう。そのため、クリーニングユニットが進入する空間を確保するため、マスクと基板との間隔を広くとる必要があり、従来のスクリーン印刷機は、印刷時に基板をマスクまで移動させる昇降距離が長くなってしまっていた。そのため、従来のスクリーン印刷機には、基板の昇降距離に応じてサイクルタイムが長くなってしまう問題があった。また、基板の移動距離が長い分、移動方向の僅かな誤差が基板とマスクとのズレ量を大きくしてしまい、印刷精度を低下させてしまうなどの問題もあった。 By the way, the cleaning unit provided in the screen printer has a structurally larger height dimension than the camera unit, such as a roll-shaped cleaning paper and a cylinder for pressing the cleaning paper against the lower surface of the mask. End up. Therefore, in order to secure a space for the cleaning unit to enter, it is necessary to widen the distance between the mask and the substrate, and the conventional screen printing machine has a long ascending / descending distance for moving the substrate to the mask during printing. . Therefore, the conventional screen printing machine has a problem that the cycle time becomes longer according to the lift distance of the substrate. In addition, since the movement distance of the substrate is long, a slight error in the movement direction increases the amount of deviation between the substrate and the mask, resulting in a decrease in printing accuracy.
 そこで、本発明は、かかる課題を解決すべく、基板の位置を撮像装置の高さ寸法に対応させるスクリーン印刷機を提供することを目的とする。 Therefore, an object of the present invention is to provide a screen printing machine that makes the position of the substrate correspond to the height dimension of the imaging device in order to solve such a problem.
 本発明の一態様におけるスクリーン印刷機は、マスクを保持するマスク保持装置と、前記マスク保持装置によって保持されたマスクに対して上方からクリームはんだを塗り延ばすスキージ装置と、前記マスクの下に基板を搬送する搬送装置と、前記搬送装置によって搬送された基板を保持し、前記マスクに対する上下方向の位置決めを行う基板保持昇降装置と、前記マスクの下面を拭き取り清掃するクリーニング装置と、前記マスクの基準マークと前記基板の基準マークとを撮像する撮像装置と、前記マスクと前記基板保持昇降装置との間を、前記撮像装置および前記クリーニング装置を移動させる駆動装置と、前記各装置を制御するものであって、前記基板保持昇降装置に対して、その昇降部を前記撮像装置のサイズに応じた基準高さに設定し、前記クリーニング装置の移動時には当該クリーニング装置のサイズに応じて前記基準高さから下降させる制御装置とを有する。 A screen printing machine according to an aspect of the present invention includes a mask holding device that holds a mask, a squeegee device that spreads cream solder on the mask held by the mask holding device from above, and a substrate under the mask. A transport device that transports the substrate, a substrate holding and lifting device that holds the substrate transported by the transport device and performs vertical positioning with respect to the mask, a cleaning device that wipes and cleans the lower surface of the mask, and a reference mark for the mask And an image pickup device for picking up an image of the reference mark on the substrate, a drive device for moving the image pickup device and the cleaning device between the mask and the substrate holding lift device, and controlling each device. The lifting / lowering portion of the substrate holding lifting / lowering device is set to a reference height corresponding to the size of the imaging device. Constant and, upon movement of the cleaning device and a control device for lowering from the reference height in accordance with the size of the cleaning device.
 前記構成によれば、マスク保持装置により保持されたマスクの下側には搬送装置によって基板が搬送された後、その基板が基板保持昇降装置によって保持され、マスクの下面に接するようにして位置決めされる。そして、マスクの上方からクリームはんだがスキージ装置により塗り延ばしされ、基板に対する印刷が行われる。また、こうした基板印刷の際には、マスクと基板の間に撮像装置が駆動装置によって進入し、基準マークの撮像が行われ、所定回数の印刷処理の後には、クリーニング装置が進入してマスク下面の拭き取り清掃が行われる。そして、基板保持昇降装置は、印刷が行われる通常時には、昇降部が撮像装置のサイズに応じた基準高さに設定されるため、保持した基板がマスクと近い距離に配置され、マスクの清掃時には、昇降部が下降することによりクリーニング装置との干渉が回避される。 According to the above configuration, after the substrate is transferred by the transfer device to the lower side of the mask held by the mask holding device, the substrate is held by the substrate holding lifting device and positioned so as to be in contact with the lower surface of the mask. The Then, cream solder is spread from above the mask by a squeegee device, and printing on the substrate is performed. In addition, during such substrate printing, the imaging device enters between the mask and the substrate by the driving device, and the reference mark is imaged. After a predetermined number of printing processes, the cleaning device enters and the lower surface of the mask Wiping and cleaning are performed. The substrate holding and lifting device is set at a reference height corresponding to the size of the imaging device during normal printing, so that the held substrate is placed at a distance close to the mask and when cleaning the mask. As the elevating unit descends, interference with the cleaning device is avoided.
スクリーン印刷機の内部構造を簡略化して示した側面図である。It is the side view which simplified and showed the internal structure of the screen printer. スクリーン印刷機の基板保持昇降装置の構造を簡略化して示した図である。It is the figure which simplified and showed the structure of the board | substrate holding | maintenance raising / lowering apparatus of a screen printer. カメラユニットおよびクリーニングユニットの移動周辺を簡略化して示した図である。It is the figure which simplified and showed the movement periphery of a camera unit and a cleaning unit. 通常時の基板の高さを示した図である。It is the figure which showed the height of the board | substrate at the normal time. クリーニングユニットが移動する清掃時の基板の高さを示した図である。It is the figure which showed the height of the board | substrate at the time of the cleaning which a cleaning unit moves. 基板、マスクおよびカメラユニットの位置関係を概念的に示した図である。It is the figure which showed notionally the positional relationship of a board | substrate, a mask, and a camera unit.
 次に、本発明に係るスクリーン印刷機の一実施形態について、図面を参照しながら以下に説明する。図1は、スクリーン印刷機の内部構造を簡略化して示した側面図である。このスクリーン印刷機1は、基板に対してクリームはんだを印刷するものであり、例えば印刷状態を検査する検査機や基板に電子部品の装着を行う部品装着機などと共に回路基板生産ラインを構成するものである。本実施形態では、図示するスクリーン印刷機1の機体前後方向をY軸方向、機体幅方向をX軸方向、そして機体高さ方向をZ軸方向として説明する。 Next, an embodiment of a screen printer according to the present invention will be described below with reference to the drawings. FIG. 1 is a side view showing a simplified internal structure of a screen printing machine. This screen printing machine 1 is for printing cream solder on a substrate, and constitutes a circuit board production line together with, for example, an inspection machine for inspecting the printing state and a component mounting machine for mounting electronic components on a substrate. It is. In the present embodiment, the front-and-rear direction of the screen printing machine 1 shown in the drawing will be described as the Y-axis direction, the body width direction as the X-axis direction, and the body height direction as the Z-axis direction.
 スクリーン印刷機1は、機体内部にマスクが配置され、その下に基板が搬送および保持され、印刷パターン孔を通してマスク上面から下側の基板にクリームはんだが塗布される。そこで、スクリーン印刷機1には、上部側にマスクホルダ2があり、マスクの取り付けができるようになっている。マスクホルダ2の上方側には、マスク上のクリームはんだを機体前後方向に塗り延ばしするスキージ装置3が設置されている。一方、マスクホルダ2の下側には、搬送された基板を保持して上下方向に移動させる基板保持昇降装置4が設けられている。 In the screen printing machine 1, a mask is arranged inside the machine body, a substrate is conveyed and held under the mask, and cream solder is applied to the substrate on the lower side from the upper surface of the mask through the printing pattern hole. Therefore, the screen printing machine 1 has a mask holder 2 on the upper side so that a mask can be attached. A squeegee device 3 for spreading the cream solder on the mask in the longitudinal direction of the machine body is installed on the upper side of the mask holder 2. On the other hand, on the lower side of the mask holder 2 is provided a substrate holding elevating device 4 that holds the transferred substrate and moves it in the vertical direction.
 スクリーン印刷機1は、図示するように機体カバー19によって覆われているが、機体幅方向の両側面部に搬送口191が形成され、基板の搬入及び搬出が行われるようになっている。そのため、マスクホルダ2の下側には、機体幅方向に基板を搬送させるための基板搬送装置が設けられている。更に、マスクホルダ2の下側には、基板を機体前後方向にクランプするためのクランプ装置、そして基板をクランプ位置へと上下させるバックアップ装置などが昇降装置に組み付けられている。本実施形態では、クランプ装置や昇降装置などをまとめて基板保持昇降装置4と称する。図2は、そうしたスクリーン印刷機1の基板保持昇降装置4の構造を簡略化して示した図である。 The screen printing machine 1 is covered with a machine body cover 19 as shown in the figure, but a transport port 191 is formed on both side surfaces in the machine body width direction so that substrates can be carried in and out. Therefore, a substrate transport device for transporting the substrate in the body width direction is provided below the mask holder 2. Further, on the lower side of the mask holder 2, a clamping device for clamping the substrate in the longitudinal direction of the machine body, a backup device for moving the substrate up and down to the clamping position, and the like are assembled in the lifting device. In the present embodiment, the clamping device and the lifting device are collectively referred to as a substrate holding lifting device 4. FIG. 2 is a diagram showing a simplified structure of the substrate holding / lifting device 4 of the screen printing machine 1.
 先ず、昇降装置8は、鉛直方向のガイドレール11に対して昇降台12が摺動可能に取り付けられ、その昇降台12がボールネジ13を介して昇降用モータ14に連結されている。昇降台12の上部には、支持台15を介して基板搬送装置5やクランプ装置6などが搭載されている。支持台15には機体前後方向(Y軸方向)に一対のマスクサポート21が設けられ、それぞれ脚体上面にマスク20に接触するマスク支持プレート28が固定されている。図面右側のマスクサポート21にはボールネジ22が構成され、マスクサポート用モータによって図面左側のマスクサポート21との距離の調整が可能となっている。 First, in the lifting device 8, a lifting platform 12 is slidably attached to a guide rail 11 in a vertical direction, and the lifting platform 12 is connected to a lifting motor 14 via a ball screw 13. A substrate transfer device 5, a clamp device 6, and the like are mounted on the lifting platform 12 via a support table 15. A pair of mask supports 21 are provided on the support base 15 in the longitudinal direction of the machine body (Y-axis direction), and mask support plates 28 that contact the mask 20 are fixed to the upper surfaces of the legs. A ball screw 22 is formed on the mask support 21 on the right side of the drawing, and the distance from the mask support 21 on the left side of the drawing can be adjusted by a mask support motor.
 クランプ装置6は、機体前後方向に一対のサイドフレーム25が配置され、それぞれ支持台23に組み付けられている。図面右側のサイドフレーム25にはボールネジ26が構成され、基板クランプ用モータによって図面左側のサイドフレーム25との距離の調整が可能となっている。一対のサイドフレーム25には、その上端部にクランプ部27が形成され、クランプ部27同士が近づくことにより、基板10を挟み込んだ保持が可能になっている。そして、サイドフレーム25の内側には、コンベアベルト29からなる基板搬送装置5が組み付けられている。 The clamp device 6 has a pair of side frames 25 arranged in the longitudinal direction of the machine body, and is assembled to the support base 23, respectively. A ball screw 26 is formed on the side frame 25 on the right side of the drawing, and the distance from the side frame 25 on the left side of the drawing can be adjusted by a substrate clamping motor. The pair of side frames 25 has a clamp portion 27 formed at the upper end thereof, and the clamp portions 27 come close to each other so that the substrate 10 can be held therebetween. A substrate transfer device 5 including a conveyor belt 29 is assembled inside the side frame 25.
 一対のサイドフレーム25の間には、基板10を支持するバックアップ装置7が設けられている。バックアップ装置7は、複数のバックアップピン32を備えたバックアップテーブル31がボールネジを介して支持され、バックアップ用モータ34によって昇降するよう構成されている。また、クランプ装置6の支持台23は、ボールネジを介して支持され、昇降用モータ33によって昇降するよう構成されている。そして、クランプ装置6やバックアップ装置7を支持する支持台15は、昇降台12に対してX-Y平面上のX方向及びY方向とθ方向に位置調整が可能な構成となっている。つまり、保持された基板10とマスク20との位置調整を行う補正装置が構成されている。 A backup device 7 that supports the substrate 10 is provided between the pair of side frames 25. The backup device 7 is configured such that a backup table 31 having a plurality of backup pins 32 is supported via a ball screw and is moved up and down by a backup motor 34. Further, the support base 23 of the clamp device 6 is supported via a ball screw and is configured to be moved up and down by a lifting motor 33. The support table 15 that supports the clamp device 6 and the backup device 7 can be adjusted in position in the X direction, the Y direction, and the θ direction on the XY plane with respect to the lifting table 12. That is, a correction device that adjusts the position of the held substrate 10 and the mask 20 is configured.
 スクリーン印刷機1は、このようにマスク20の下側に、昇降装置8にクランプ装置6やバックアップ装置7などが組み付けられた基板保持昇降装置4が構成され、基板10の高さを段階的に変化させるよう構成されている。特に本実施形態では、図2に示す昇降台12の位置が基準高さKとして構成されているが、この基準高さKは、基板搬送装置5によって搬送する基板10の搬送高さを特定するものである。すなわち、基準高さに昇降台12が位置決めされ、クランプ装置6およびバックアップ装置7が図2に示す下降した状態において、そのクランプ装置6に組み付けられた基板搬送装置5が搬送位置となる。 In this way, the screen printing machine 1 includes the substrate holding and lifting device 4 in which the clamping device 6 and the backup device 7 are assembled to the lifting device 8 on the lower side of the mask 20, and the height of the substrate 10 is increased stepwise. It is configured to change. In particular, in the present embodiment, the position of the lifting platform 12 shown in FIG. 2 is configured as the reference height K. This reference height K specifies the transport height of the substrate 10 transported by the substrate transport device 5. Is. That is, when the lifting platform 12 is positioned at the reference height and the clamp device 6 and the backup device 7 are lowered as shown in FIG. 2, the substrate transfer device 5 assembled to the clamp device 6 becomes the transfer position.
 クランプ装置6には、クランプ部27より低い位置に基板搬送装置5を構成するコンベアベルト29が組み付けられている。従って、搬送された基板10は、クランプ部27に上面を合わせるため、バックアップ装置7によって上方へ移動するよう構成されている。印刷後は逆に下方へ移動することになるが、こうした上下方向の移動距離が小さくなるように、コンベアベルト29の上面高さは、スクリーン印刷機1が処理可能な基板10の厚みや反り量などによって設定されている。 The conveyor belt 29 which comprises the board | substrate conveying apparatus 5 is assembled | attached to the clamp apparatus 6 in the position lower than the clamp part 27. As shown in FIG. Accordingly, the transferred substrate 10 is configured to move upward by the backup device 7 in order to align the upper surface with the clamp portion 27. After printing, it moves downward, but the height of the upper surface of the conveyor belt 29 is such that the thickness of the substrate 10 that can be processed by the screen printing machine 1 and the amount of warpage so that the vertical movement distance becomes smaller. It is set by.
 また、クランプ装置6では、保持された基板10がマスク支持プレート28に上面が合うように上方へ移動するよう構成されている。印刷後には逆に下方へ移動することとなるが、この場合も上下方向の移動距離が小さくなるように、クランプ装置6は、マスク支持プレート28に対するクランプ部27の上面高さが設定されている。従って、基板保持昇降装置4では、各部材の高さの関係が設定され、マスク支持プレート28の上面に対するコンベアベルト29の上面の高さも予め定められた高さとなっている。 Further, the clamp device 6 is configured such that the held substrate 10 moves upward so that the upper surface of the substrate 10 is aligned with the mask support plate 28. After printing, it moves downward, but in this case as well, the upper surface height of the clamp portion 27 with respect to the mask support plate 28 is set in the clamping device 6 so that the moving distance in the vertical direction becomes small. . Therefore, in the substrate holding / lifting device 4, the relationship of the height of each member is set, and the height of the upper surface of the conveyor belt 29 relative to the upper surface of the mask support plate 28 is also a predetermined height.
 次に、マスクホルダ2と基板保持昇降装置4の間には、図3に示すように、基板10やマスク20に付された基準マークを撮像するためカメラユニット35(撮像装置)と、マスク20の汚れを下面側から拭き取って清掃するクリーニングユニット37(クリーニング装置)が設けられている。図3は、カメラユニット35およびクリーニングユニット37の移動周辺を簡略化して示した図である。特に、カメラユニット35とクリーニングユニット37とが分離され、カメラユニット35のみが基板10とマスク20の間に進入した状態が示されている。なお、図1に示すスクリーン印刷機1において、矢印A1がカメラユニット35およびクリーニングユニット37の移動範囲であり、矢印A2が基板10の移動範囲である。 Next, between the mask holder 2 and the substrate holding / lifting device 4, as shown in FIG. 3, a camera unit 35 (imaging device) and the mask 20 are used to image the reference marks attached to the substrate 10 and the mask 20. A cleaning unit 37 (cleaning device) is provided for cleaning the surface by wiping off dirt from the lower surface side. FIG. 3 is a diagram showing the movement periphery of the camera unit 35 and the cleaning unit 37 in a simplified manner. In particular, the camera unit 35 and the cleaning unit 37 are separated, and only the camera unit 35 enters between the substrate 10 and the mask 20. In the screen printing machine 1 shown in FIG. 1, the arrow A <b> 1 is the movement range of the camera unit 35 and the cleaning unit 37, and the arrow A <b> 2 is the movement range of the substrate 10.
 カメラユニット35およびクリーニングユニット37は、機体前後方向に延びるガイドロッド41に対して摺動可能に取り付けられ、駆動装置によって移動できるよう構成されている。本実施形態の駆動装置は、従来例と同様に、カメラユニット35のみが自走できるように構成されている。その駆動装置は、例えば駆動モータによって回転するネジ軸がガイドレール41と平行に設けられ、そこにカメラユニット35側に固定されたナットが螺合してボールネジが構成されている。そして、自走可能なカメラユニット35との連結によってクリーニングユニット37の移動を可能すべく、両ユニットに連結器が構成されている。 The camera unit 35 and the cleaning unit 37 are slidably attached to a guide rod 41 extending in the longitudinal direction of the machine body and configured to be movable by a driving device. The drive device of the present embodiment is configured so that only the camera unit 35 can self-propell like the conventional example. In the drive device, for example, a screw shaft that is rotated by a drive motor is provided in parallel with the guide rail 41, and a nut fixed on the camera unit 35 side is screwed to form a ball screw. In order to allow the cleaning unit 37 to move by being connected to a self-running camera unit 35, a coupler is formed in both units.
 先ず、クリーニングユニット37は、ロール状のクリーニングペーパが使用され、使用前の第1ローラ43から巻き出されて、マスク20を拭き取った使用済み部分が第2ローラ44によって巻きとられるよう構成されている。第2ローラ44側に設けられたサーボモータによってクリーニングペーパ13の巻取り(第1ローラ43からの巻き出し)が行われ、両ローラの間には、クリーニングペーパをマスク20の下面に押し付けるため、エアシリンダ45を使用したペーパ押し付け機構が組み込まれている。一方、カメラユニット35は、上方のマスクと下方の基板の両方とを撮像するため、カメラ47に対してプリズムが組み合わされている。 First, the cleaning unit 37 is configured such that a roll-shaped cleaning paper is used, and the used portion that is unwound from the first roller 43 before use and wiped off the mask 20 is wound around the second roller 44. Yes. The cleaning paper 13 is wound (unwinding from the first roller 43) by a servo motor provided on the second roller 44 side, and the cleaning paper is pressed against the lower surface of the mask 20 between the two rollers. A paper pressing mechanism using an air cylinder 45 is incorporated. On the other hand, the camera unit 35 has a prism combined with the camera 47 in order to image both the upper mask and the lower substrate.
 そして、カメラユニット35内には、プランジャを上下に伸縮作動させるソレノイド48が設けられ、クリーニングユニット37には、貫通孔が形成され連結プレート49がカメラユニット35側に突き出している。こうしたソレノイド48および連結プレート49が、カメラユニット35とクリーニングユニット37を連結するための連結器となっている。よって、ソレノイド48のプランジャが下方に伸び、カメラユニット35内に挿入された連結プレート49の貫通孔に差し込まれることにより、クリーニングユニット37がカメラユニット35に連結され、一体的な移動が可能になる。 In the camera unit 35, a solenoid 48 for moving the plunger up and down is provided. A through hole is formed in the cleaning unit 37, and a connecting plate 49 projects toward the camera unit 35. The solenoid 48 and the connection plate 49 serve as a connector for connecting the camera unit 35 and the cleaning unit 37. Therefore, when the plunger of the solenoid 48 extends downward and is inserted into the through hole of the connecting plate 49 inserted into the camera unit 35, the cleaning unit 37 is connected to the camera unit 35 and can be moved integrally. .
 クリーニングユニット37は、図1に示すように、スクリーン印刷機1の前部が待機位置となっている。そこで、クリーニングユニット37を使用したマスク20の清掃が行われる場合には、カメラユニット35が待機位置まで移動し、クリーニングユニット37に対する連結が行われるようになっている。一方で、ソレノイド48のプランジャが引き上げられた状態では、カメラユニット35とクリーニングユニット37は分離され、カメラユニット35だけの移動により基板10やマスク20に付された基準マークの撮像が行われるようになっている。 In the cleaning unit 37, as shown in FIG. 1, the front portion of the screen printing machine 1 is in a standby position. Therefore, when the mask 20 is cleaned using the cleaning unit 37, the camera unit 35 moves to the standby position and is connected to the cleaning unit 37. On the other hand, in a state where the plunger of the solenoid 48 is pulled up, the camera unit 35 and the cleaning unit 37 are separated so that the reference mark attached to the substrate 10 or the mask 20 is imaged by the movement of the camera unit 35 alone. It has become.
 ところで、カメラユニット35とクリーニングユニット37は、全体がユニットカバーによって覆われているが、クリーニングユニット37の高さ方向の寸法がカメラユニット35の高さ寸法に比べて大きく。第1、第2ローラ43,44に巻かれるロール状のクリーニングペーパや、そのクリーニングペーパをマスクに押し付けるためのエアシリンダ45などが組み込まれているためである。この点、従来のスクリーン印刷機では、基板10とマスク20との間隔は、サイズの大きいクリーニングユニット37の高さ寸法に対応して設計されていた。そのため、基板10の移動距離が長くなってしまい、サイクルタイムが長くなるほか、マスク20に対する基板10の位置精度を低下させてしまっていた。 Incidentally, the camera unit 35 and the cleaning unit 37 are entirely covered with a unit cover, but the height dimension of the cleaning unit 37 is larger than the height dimension of the camera unit 35. This is because a roll-shaped cleaning paper wound around the first and second rollers 43 and 44 and an air cylinder 45 for pressing the cleaning paper against the mask are incorporated. In this regard, in the conventional screen printing machine, the distance between the substrate 10 and the mask 20 is designed corresponding to the height of the cleaning unit 37 having a large size. For this reason, the moving distance of the substrate 10 becomes longer, the cycle time becomes longer, and the positional accuracy of the substrate 10 with respect to the mask 20 is lowered.
 そこで、スクリーン印刷機1では、図4に示す通常時と、図5に示す清掃時とによって基板10の高さが切り換えられるよう構成されている。通常時のクリーニングユニット37は、図1に示す待機位置に配置され、基板10とマスク20の間にはカメラユニット35だけが進入することとなる。本実施形態では、図4に示すマスク支持プレート28の上面を基準高さk2として、スクリーン印刷機1内に搬送される基板10の搬送高さが設定される。昇降装置8に基板搬送装置5などが搭載された基板保持昇降装置4は、上下方向に変位する昇降部がマスク20の下側に進入するカメラユニット35やクリーニングユニット37と干渉する可能性がある。そのため、本実施形態では、そうした昇降部においてマスク20に最も近い支持プレート28の上面を基準高さk2としている。なお、基準高さk2は、図2に示すように昇降台12が基準高さKに位置する場合のマスク支持プレート28の上面高さである。 Therefore, the screen printer 1 is configured such that the height of the substrate 10 is switched between the normal time shown in FIG. 4 and the cleaning time shown in FIG. The normal cleaning unit 37 is disposed at the standby position shown in FIG. 1, and only the camera unit 35 enters between the substrate 10 and the mask 20. In the present embodiment, the transport height of the substrate 10 transported into the screen printer 1 is set with the upper surface of the mask support plate 28 shown in FIG. 4 as the reference height k2. In the substrate holding / lifting device 4 in which the substrate transfer device 5 and the like are mounted on the lifting / lowering device 8, there is a possibility that the lifting / lowering unit that is displaced in the vertical direction may interfere with the camera unit 35 and the cleaning unit 37 that enter the lower side of the mask 20. . For this reason, in the present embodiment, the upper surface of the support plate 28 closest to the mask 20 in such an elevation unit is set to the reference height k2. The reference height k2 is the upper surface height of the mask support plate 28 when the lifting platform 12 is positioned at the reference height K as shown in FIG.
 ここで、図6は、基準高さk2に位置決めされた基板10、マスクホルダ2に保持されたマスク20およびカメラユニット35の位置関係を概念的に示した図である。例えば、カメラユニット35は、マスク20との距離L2が3mmに設定されている。そこで、基準高さk2は、カメラユニット35から基板10までの距離L1が5mmとなるように、つまり両方の距離L1,L2の差がほとんど無く同程度になるように設計されている。本来であれば距離L1,L2を同じ値にすることにより、基板10とマスク20との距離L3を最も小さくすることができるが、基板10に生じ得る反りなどの状態変化量を考慮した同程度とし、距離L1の値が僅かに大きくなっている。 Here, FIG. 6 is a diagram conceptually showing the positional relationship between the substrate 10 positioned at the reference height k2, the mask 20 held by the mask holder 2, and the camera unit 35. For example, in the camera unit 35, the distance L2 from the mask 20 is set to 3 mm. Therefore, the reference height k2 is designed so that the distance L1 from the camera unit 35 to the substrate 10 is 5 mm, that is, almost the same between the distances L1 and L2. Originally, the distance L3 between the substrate 10 and the mask 20 can be minimized by setting the distances L1 and L2 to the same value, but the same degree considering the amount of state change such as warpage that may occur in the substrate 10. And the value of the distance L1 is slightly increased.
 一方、マスク20の清掃時には、図5に示すように、クリーニングユニット37がマスク20の下側に移動するため、基板10とマスク20の間をカメラユニット35だけではなく、クリーニングユニット37が移動することとなる。そして、クリーニングユニット37は、カメラユニット35と上面を揃えて下側に大きくなっているため、基板10が干渉しないように、基準高さk2から所定の退避距離L4だけ下降するよう構成されている。なお、マスク20の清掃時に必ず基板10が保持されているわけではないため、基板10とマスク20の間とは、基板10が保持されていたとした場合における、基板10の高さとマスク20の間という意味である。 On the other hand, when cleaning the mask 20, as shown in FIG. 5, the cleaning unit 37 moves to the lower side of the mask 20, so that not only the camera unit 35 but also the cleaning unit 37 moves between the substrate 10 and the mask 20. It will be. The cleaning unit 37 is configured to be lowered downward from the reference height k2 so that the substrate 10 does not interfere with the camera unit 35 because the upper surface is aligned with the camera unit 35 and is larger downward. . Since the substrate 10 is not necessarily held when the mask 20 is cleaned, the space between the substrate 10 and the mask 20 is between the height of the substrate 10 and the mask 20 when the substrate 10 is held. It means that.
 続いて、スクリーン印刷機1には、図2に示すように全体の駆動を制御する制御装置9が搭載され、基板10の昇降制御を含む各装置の駆動制御が次のようにして行われるようになっている。先ず、スクリーン印刷機1における基板10への印刷は、コンベアベルト29によってサイドフレーム25の間に基板10が搬送される。そして、バックアップ用モータ34の駆動によりバックアップテーブル31が上昇し、バックアップピン32に突き上げられた基板10がコンベアベルト29から持ち上げられる。基板10の位置合わせ後、基板クランプ用モータの駆動によりサイドフレーム25が移動し、その基板10が一対のクランプ部27によって挟み込まれて保持される。 Subsequently, as shown in FIG. 2, the screen printing machine 1 is equipped with a control device 9 that controls the overall drive, and the drive control of each device including the elevation control of the substrate 10 is performed as follows. It has become. First, for printing on the substrate 10 in the screen printing machine 1, the substrate 10 is conveyed between the side frames 25 by the conveyor belt 29. Then, the backup table 31 is raised by driving the backup motor 34, and the substrate 10 pushed up by the backup pins 32 is lifted from the conveyor belt 29. After the alignment of the substrate 10, the side frame 25 is moved by driving the substrate clamping motor, and the substrate 10 is sandwiched and held by the pair of clamp portions 27.
 次に、昇降用モータ33の駆動によって基板10を保持したクランプ装置6が上昇し、マスク支持プレート28の高さにクランプ部27と基板10とが位置決めされる。すなわち、マスク支持プレート28、クランプ部27、基板10の上面高さが基準高さKに揃えられる。そして、基板10とマスク20との間をカメラユニット35が移動し、各々の基準マークの撮像が行われ、その撮像データに基づいて基板10とマスク20に関してX,Y,θ方向のズレ量が算出され、支持台15に構成されている補正装置によって位置ズレ補正が行われる。 Next, the clamp device 6 holding the substrate 10 is raised by driving the lifting motor 33, and the clamp portion 27 and the substrate 10 are positioned at the height of the mask support plate 28. That is, the upper surface heights of the mask support plate 28, the clamp part 27, and the substrate 10 are aligned with the reference height K. Then, the camera unit 35 moves between the substrate 10 and the mask 20, and the respective reference marks are imaged. Based on the imaging data, the deviation amounts in the X, Y, and θ directions with respect to the substrate 10 and the mask 20 are detected. The positional deviation correction is performed by the correction device calculated and configured on the support base 15.
 カメラユニット35が移動して基板10の昇降範囲から外れると、基板保持昇降装置4では、昇降用モータ14の駆動により昇降台12が基準高さKの位置から上昇し、基板10がマスク20の下面に接する高さで位置決めされる。そして、スキージ装置3によってマスク20上のクリームはんだがローリングされ、印刷パターン孔へと押し込まれ下側の基板10に塗布される。その後、昇降用モータ33の駆動により基板10を所定速度で下降させる版離れが行われ、その基板10に対して印刷パターンに従ったクリームはんだによる印刷が行われる。 When the camera unit 35 moves and moves out of the lifting range of the substrate 10, in the substrate holding lifting device 4, the lifting platform 12 is lifted from the position of the reference height K by driving the lifting motor 14, and the substrate 10 is moved to the mask 20. Positioned at a height that touches the lower surface. Then, the cream solder on the mask 20 is rolled by the squeegee device 3, pushed into the printed pattern holes, and applied to the lower substrate 10. After that, the plate 10 is moved down at a predetermined speed by driving the lifting motor 33, and printing with cream solder according to the printing pattern is performed on the substrate 10.
 基板10に印刷が行われると、昇降台12は、昇降用モータ14の駆動により下降して基準高さKの位置に戻される。その後、昇降用モータ33の駆動によって基板10を保持したクランプ装置6が下降し、バックアップ用モータ34の駆動によりバックアップテーブル31が下降し、バックアップピン32に載せられた基板10がコンベアベルト29に戻される。こうしてクランプ装置6およびバックアップ装置7の位置が、図2に示す基板搬送高さに戻ることにより、基板搬送装置5による基板10の搬送が可能になり、印刷後の基板10はスクリーン印刷機1から搬出され、新たな基板10が搬入される。 When printing is performed on the substrate 10, the lifting platform 12 is lowered by the driving of the lifting motor 14 and returned to the position of the reference height K. Thereafter, the clamp device 6 holding the substrate 10 is lowered by driving the lifting motor 33, the backup table 31 is lowered by driving the backup motor 34, and the substrate 10 placed on the backup pins 32 is returned to the conveyor belt 29. It is. Thus, the positions of the clamping device 6 and the backup device 7 return to the substrate conveyance height shown in FIG. 2, so that the substrate 10 can be conveyed by the substrate conveyance device 5, and the printed substrate 10 can be transferred from the screen printer 1. Unloaded and a new substrate 10 is loaded.
 スクリーン印刷機1では、前述したように基板10に対する印刷処理と、基板10の搬入・搬送とが繰り返し行われ、マスク20に対する清掃は、所定枚数の基板10への印刷処理毎に行われる。そのマスク清掃時には、カメラユニット35が図1に示すように待機位置のクリーニングユニット37へと移動し、両者の連結が行われる。すなわち、カメラユニット35の中にクリーニングユニット37側の連結プレート4が挿入され、その貫通孔にソレノイド48のプランジャが差し込まれる。 In the screen printer 1, as described above, the printing process for the substrate 10 and the loading / conveying of the substrate 10 are repeatedly performed, and the cleaning of the mask 20 is performed for each printing process on a predetermined number of substrates 10. At the time of the mask cleaning, the camera unit 35 moves to the cleaning unit 37 at the standby position as shown in FIG. That is, the connecting plate 4 on the cleaning unit 37 side is inserted into the camera unit 35, and the plunger of the solenoid 48 is inserted into the through hole.
 一方、基板保持昇降装置4は、基板10やマスク支持プレート28などがクリーニングユニット37と干渉しないように、昇降用モータ14の駆動によって昇降台12が下降し、基準高さKから所定距離だけ下方に退避する。その退避位置は、基板の搬送高さよりも下方である。そのため、基板10とマスク20との間にクリーニングユニット37の進入が可能になり、マスク20の下面にクリーニングペーパが押し当てられて汚れが拭き取られる。マスク20の清掃が終わったクリーニングユニット37は、再び待機位置に戻されてカメラユニット35との連結が切り離される。そして、基板保持昇降装置4では、昇降用モータ14の駆動により昇降台12が上昇し、マスク支持プレート28の上面が基準高さKk2に戻される。 On the other hand, in the substrate holding elevating device 4, the elevating table 12 is lowered by driving the elevating motor 14 so that the substrate 10, the mask support plate 28, and the like do not interfere with the cleaning unit 37, and are lowered by a predetermined distance from the reference height K. Evacuate to. The retracted position is below the substrate transport height. Therefore, the cleaning unit 37 can enter between the substrate 10 and the mask 20, and the cleaning paper is pressed against the lower surface of the mask 20 to wipe off the dirt. After the cleaning of the mask 20 is completed, the cleaning unit 37 is returned to the standby position again, and the connection with the camera unit 35 is disconnected. In the substrate holding / elevating device 4, the elevating table 12 is raised by driving the elevating motor 14, and the upper surface of the mask support plate 28 is returned to the reference height Kk2.
 よって、本実施形態によれば、通常時には、マスク20に近い位置で基板10が保持および位置決めされるため、マスク20までの上昇及び下降距離が短くなり、印刷時の昇降動作に要する時間が短縮される。例えば、クリーニングユニット37に基板10の位置を対応させていた従来例に比べて、本実施形態ではサイズの小さいカメラユニット35に対応させることにより、基板10の位置がマスク20に25mm近づいている。そのため、印刷時の基板10の移動距離は往復で50mmもの差になりサイクルタイムを短縮することができる。 Therefore, according to the present embodiment, since the substrate 10 is normally held and positioned at a position close to the mask 20, the ascending and descending distance to the mask 20 is shortened, and the time required for the lifting operation during printing is shortened. Is done. For example, as compared with the conventional example in which the position of the substrate 10 is made to correspond to the cleaning unit 37, in this embodiment, the position of the substrate 10 is brought closer to the mask 20 by 25 mm by making the camera unit 35 smaller in size. Therefore, the moving distance of the substrate 10 during printing is a difference of 50 mm in the reciprocation, and the cycle time can be shortened.
 また、基板10の移動距離が短くなることによってマスク20に対する基板10の位置精度を上げることができる。基板10は、ガイドレール11に沿った昇降台12の移動に応じて昇降するが、その移動方向は鉛直方向に合わせて設計されてはいるものの、図6に示すように多少のズレ(角度θ)が生じてしまう。そのため、マスク20に接する基板10の到達位置では、その基板10とマスク20との間に横ズレBが生じてしまう。例えば、基板10とマスク20との距離L3が本実施形態では125mmであり、従来例は150mmであるとすると、角度θの値が0.1°であっても横ズレBの差が約44μとなってしまう。基板10に対する印刷には数十μの精度が要求されるため、本実施形態は印刷精度を高める点についても有効である。 Also, the positional accuracy of the substrate 10 with respect to the mask 20 can be increased by reducing the moving distance of the substrate 10. The substrate 10 moves up and down in accordance with the movement of the lifting platform 12 along the guide rail 11. Although the movement direction is designed in accordance with the vertical direction, as shown in FIG. ) Will occur. For this reason, a lateral displacement B occurs between the substrate 10 and the mask 20 at a position where the substrate 10 is in contact with the mask 20. For example, if the distance L3 between the substrate 10 and the mask 20 is 125 mm in this embodiment and 150 mm in the conventional example, the difference in the lateral deviation B is about 44 μm even if the value of the angle θ is 0.1 °. End up. Since printing on the substrate 10 requires accuracy of several tens of microns, this embodiment is also effective in increasing printing accuracy.
 ところで、スクリーン印刷機1では、クリーニングユニット37の方がカメラユニット35よりもサイズが大きくなってしまっている。そして、そのクリーニングユニット37は、使用効率などを考えれば大きな径のクリーニングペーパを取り付けられことが好ましい。しかし、マスク20の清掃のためには、基板保持昇降装置4の上を移動することになるため、クリーニングペーパに応じて高さ方向の寸法が大きなクリーニングユニット37の場合には、それに干渉しないだけの更に大きなスペースを確保する必要が生じる。 By the way, in the screen printing machine 1, the size of the cleaning unit 37 is larger than that of the camera unit 35. The cleaning unit 37 is preferably attached with cleaning paper having a large diameter in consideration of usage efficiency and the like. However, since the mask 20 is moved on the substrate holding / lifting device 4 for cleaning, in the case of the cleaning unit 37 having a large height in accordance with the cleaning paper, it does not interfere with it. It is necessary to secure a larger space.
 よって、本実施形態は、クリーニングユニット37の使用効率を上げつつ、印刷時に昇降台12のストロークが大きくなってしまう欠点を解消したものである。つまり、基板10に対して1枚ごとに行われる昇降台12の昇降ストロークは、クリーニングユニット37の大きさに関わらず、小さいカメラユニット35に応じて設定すればよい。一方、マスク20の清掃時には昇降台12が下降して従来のような大きなスペースを作り出すため、大きな径のクリーニングペーパを用いたクリーニングユニット37のデメリットを解消することができる。 Therefore, the present embodiment eliminates the drawback that the stroke of the lifting platform 12 becomes large during printing while increasing the usage efficiency of the cleaning unit 37. That is, the lifting stroke of the lifting platform 12 performed for each substrate 10 may be set according to the small camera unit 35 regardless of the size of the cleaning unit 37. On the other hand, when the mask 20 is cleaned, the lifting platform 12 is lowered to create a large space as in the prior art, so that the disadvantages of the cleaning unit 37 using cleaning paper with a large diameter can be eliminated.
 以上、本発明の一実施形態について説明したが、本発明はこれらに限定されるものではなく、その趣旨を逸脱しない範囲で様々な変更が可能である。
 例えば、前記実施形態では、自走可能なカメラユニット35に連結してクリーニングユニット37を移動可能にしているが、そのクリーニングユニット37にも駆動モータの回転出力をボールネジによって直進運動に変換させる自走構造としてもよい。また、各ユニットを走行させる駆動装置は、駆動モータの回転をプーリやベルトを介して直進運動に変換するなど他の構造であってもよい。
As mentioned above, although one Embodiment of this invention was described, this invention is not limited to these, A various change is possible in the range which does not deviate from the meaning.
For example, in the above-described embodiment, the cleaning unit 37 is movable by being connected to the camera unit 35 capable of self-running. However, the cleaning unit 37 is also self-running in which the rotation output of the drive motor is converted into a straight motion by a ball screw. It is good also as a structure. Further, the drive device that causes each unit to travel may have another structure such as converting the rotation of the drive motor into a straight movement through a pulley or a belt.
 また、クリーニングユニット37をカメラユニット35の上面に揃える場合がマスク20との距離L2を最も小さくすることができるが、両ユニットの高さ方向の中心位置を基に、カメラユニット35の高さ方向の中心を、大きいクリーニングユニット37の高さ方向の中心よりも上になる関係で組み付けた構造であってもよい。 Further, when the cleaning unit 37 is aligned with the upper surface of the camera unit 35, the distance L2 from the mask 20 can be minimized, but the height direction of the camera unit 35 is based on the center position in the height direction of both units. May be a structure in which the center of each is assembled so as to be higher than the center of the large cleaning unit 37 in the height direction.
1…スクリーン印刷機 2…マスクホルダ 3…スキージ装置 4…基板保持昇降装置 5…基板搬送装置 6…クランプ装置 7…バックアップ装置 8…昇降装置 9…制御装置 10…基板 14…昇降用モータ 20…マスク 27…クランプ部 28…マスク支持プレート 35…カメラユニット 37…クリーニングユニット
 
 
DESCRIPTION OF SYMBOLS 1 ... Screen printer 2 ... Mask holder 3 ... Squeegee apparatus 4 ... Board | substrate holding | maintenance raising / lowering apparatus 5 ... Board | substrate conveyance apparatus 6 ... Clamp apparatus 7 ... Backup apparatus 8 ... Elevating apparatus 9 ... Control apparatus 10 ... Substrate 14 ... Elevating motor 20 ... Mask 27 ... Clamp 28 ... Mask support plate 35 ... Camera unit 37 ... Cleaning unit

Claims (4)

  1.  マスクを保持するマスク保持装置と、
     前記マスク保持装置によって保持されたマスクに対して上方からクリームはんだを塗り延ばすスキージ装置と、
     前記マスクの下に基板を搬送する搬送装置と、
     前記搬送装置によって搬送された基板を保持し、前記マスクに対する上下方向の位置決めを行う基板保持昇降装置と、
     前記マスクの下面を拭き取り清掃するクリーニング装置と、
     前記マスクの基準マークと前記基板の基準マークとを撮像する撮像装置と、
     前記マスクと前記基板保持昇降装置との間を、前記撮像装置および前記クリーニング装置を移動させる駆動装置と、
     前記各装置を制御するものであって、前記基板保持昇降装置に対して、その昇降部を前記撮像装置のサイズに応じた基準高さに設定し、前記クリーニング装置の移動時には当該クリーニング装置のサイズに応じて前記基準高さから下降させる制御装置と、
    を有するスクリーン印刷機。
    A mask holding device for holding the mask;
    A squeegee device for spreading cream solder on the mask held by the mask holding device from above;
    A transfer device for transferring a substrate under the mask;
    A substrate holding elevating device that holds the substrate transferred by the transfer device and performs vertical positioning with respect to the mask;
    A cleaning device for wiping and cleaning the lower surface of the mask;
    An imaging device for imaging the reference mark of the mask and the reference mark of the substrate;
    A driving device for moving the imaging device and the cleaning device between the mask and the substrate holding elevating device;
    Control each of the above devices, and set the lifting portion of the substrate holding lifting device to a reference height corresponding to the size of the imaging device, and the size of the cleaning device when the cleaning device is moved And a control device for lowering from the reference height according to
    Having a screen printing machine.
  2.  前記駆動装置は、前記撮像装置を直接移動させ、前記クリーニング装置は前記撮像装置との間に設けられた連結器を介して移動させるよう構成された請求項1に記載のスクリーン印刷機。 The screen printing machine according to claim 1, wherein the driving device directly moves the imaging device, and the cleaning device is moved via a coupler provided between the driving device and the imaging device.
  3.  前記基板保持昇降装置によって前記保持高さに配置された前記基板に対して、前記撮像装置による基準マークの撮像が行われる請求項1又は請求項2に記載のスクリーン印刷機。 The screen printing machine according to claim 1 or 2, wherein the reference mark is imaged by the imaging device on the substrate placed at the holding height by the substrate holding lifting device.
  4.  前記基板の保持高さは、基準マークを撮像する前記撮像装置との距離が、前記マスクと前記撮像装置との距離と同程度になるように設定されたものである請求項1乃至請求項3のいずれかに記載のスクリーン印刷機。
     
     
    4. The holding height of the substrate is set so that a distance from the imaging device that images a reference mark is approximately the same as a distance between the mask and the imaging device. The screen printing machine in any one of.

PCT/JP2018/021355 2018-06-04 2018-06-04 Screen printing machine WO2019234791A1 (en)

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JP2020523855A JP7002181B2 (en) 2018-06-04 2018-06-04 Screen printing machine
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023021601A1 (en) * 2021-08-18 2023-02-23 株式会社Fuji Conveyance device, mounting system, and conveyance method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230060880A1 (en) * 2021-08-24 2023-03-02 Robert Bosch Gmbh Flattening surface of pasted track in stencil printing process

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5775220A (en) * 1996-05-22 1998-07-07 Thatcher; Robert M. Method for multiple frame screen printing
JP3085316U (en) * 2001-10-11 2002-04-26 天竜精機株式会社 Cream solder printing machine
JP2005262689A (en) * 2004-03-19 2005-09-29 Hitachi Industries Co Ltd Screen printing machine
JP2006289784A (en) * 2005-04-11 2006-10-26 Yamaha Motor Co Ltd Printing method and printing device
JP2015080870A (en) 2013-10-22 2015-04-27 富士機械製造株式会社 Screen printing apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4964522B2 (en) 2006-07-12 2012-07-04 ヤマハ発動機株式会社 Screen printing device
JP2013193402A (en) * 2012-03-22 2013-09-30 Panasonic Corp Screen printing machine and screen printing method
JP2015039865A (en) * 2013-08-23 2015-03-02 パナソニックIpマネジメント株式会社 Screen printer
JP6387100B2 (en) * 2014-08-08 2018-09-05 株式会社Fuji Screen printing device
CN205708849U (en) * 2016-04-21 2016-11-23 深圳市龙方自动化科技有限公司 Full-automatic screen printer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5775220A (en) * 1996-05-22 1998-07-07 Thatcher; Robert M. Method for multiple frame screen printing
JP3085316U (en) * 2001-10-11 2002-04-26 天竜精機株式会社 Cream solder printing machine
JP2005262689A (en) * 2004-03-19 2005-09-29 Hitachi Industries Co Ltd Screen printing machine
JP2006289784A (en) * 2005-04-11 2006-10-26 Yamaha Motor Co Ltd Printing method and printing device
JP2015080870A (en) 2013-10-22 2015-04-27 富士機械製造株式会社 Screen printing apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3804991A4

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023021601A1 (en) * 2021-08-18 2023-02-23 株式会社Fuji Conveyance device, mounting system, and conveyance method

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