WO2019224119A3 - Ultrasonic microscope and carrier for carrying an acoustic pulse transducer - Google Patents

Ultrasonic microscope and carrier for carrying an acoustic pulse transducer Download PDF

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Publication number
WO2019224119A3
WO2019224119A3 PCT/EP2019/062834 EP2019062834W WO2019224119A3 WO 2019224119 A3 WO2019224119 A3 WO 2019224119A3 EP 2019062834 W EP2019062834 W EP 2019062834W WO 2019224119 A3 WO2019224119 A3 WO 2019224119A3
Authority
WO
WIPO (PCT)
Prior art keywords
transducer
ultrasonic microscope
acoustic pulses
carrier
carrying
Prior art date
Application number
PCT/EP2019/062834
Other languages
French (fr)
Other versions
WO2019224119A2 (en
Inventor
Peter Hoffrogge
Martin Böckler
Mario LOWACK
Matthias Koch
Martin HINDERER
Markus Herrmann
Tatjana DJURIC-RISSNER
Zyzi RAMOS
Original Assignee
Pva Tepla Analytical Systems Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pva Tepla Analytical Systems Gmbh filed Critical Pva Tepla Analytical Systems Gmbh
Priority to EP19725694.4A priority Critical patent/EP3803372A2/en
Priority to CN201980035327.3A priority patent/CN112166320A/en
Priority to SG11202011257PA priority patent/SG11202011257PA/en
Priority to JP2020566297A priority patent/JP7410057B2/en
Priority to KR1020207035002A priority patent/KR20210014112A/en
Publication of WO2019224119A2 publication Critical patent/WO2019224119A2/en
Publication of WO2019224119A3 publication Critical patent/WO2019224119A3/en
Priority to JP2023215148A priority patent/JP2024029054A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52085—Details related to the ultrasound signal acquisition, e.g. scan sequences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8934—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a dynamic transducer configuration
    • G01S15/8938—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a dynamic transducer configuration using transducers mounted for mechanical movement in two dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52019—Details of transmitters
    • G01S7/5202—Details of transmitters for pulse systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52023—Details of receivers
    • G01S7/52025—Details of receivers for pulse systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52079—Constructional features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Acoustics & Sound (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The invention relates to an ultrasonic microscope for inspecting an object, comprising an object holder for holding the object in an object region; a scan head; a first transducer supported by the scan head and configured to emit first acoustic pulses along an emission direction, to focus the first acoustic pulses in a focal point, to detect second acoustic pulses emerging from the object and to output a first detection signal representing the second acoustic pulses detected by the first transducer; a first actuator configured to move the first transducer relative to the scan head along a vertical direction which is essentially parallel to the emission direction; and a controller configured to control the first actuator based on the first detection signal. Further, the invention relates to a carrier for carrying an acoustic pulse transducer of an ultrasonic microscope within an immersion liquid.
PCT/EP2019/062834 2018-05-25 2019-05-17 Ultrasonic microscope and carrier for carrying an acoustic pulse transducer WO2019224119A2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP19725694.4A EP3803372A2 (en) 2018-05-25 2019-05-17 Ultrasonic microscope and carrier for carrying an acoustic pulse transducer
CN201980035327.3A CN112166320A (en) 2018-05-25 2019-05-17 Ultrasonic microscope and carrier for carrying an acoustic pulse transducer
SG11202011257PA SG11202011257PA (en) 2018-05-25 2019-05-17 Ultrasonic microscope and carrier for carrying an acoustic pulse transducer
JP2020566297A JP7410057B2 (en) 2018-05-25 2019-05-17 Carrier carrying ultrasound microscope and acoustic pulse transducer
KR1020207035002A KR20210014112A (en) 2018-05-25 2019-05-17 Carrier carrying ultrasonic microscope and acoustic pulse transducer
JP2023215148A JP2024029054A (en) 2018-05-25 2023-12-20 Ultrasound microscopes and how to operate them

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/989,428 US20190361103A1 (en) 2018-05-25 2018-05-25 Ultrasonic Microscope and Carrier for carrying an acoustic Pulse Transducer
USUS15/989,428 2018-05-25

Publications (2)

Publication Number Publication Date
WO2019224119A2 WO2019224119A2 (en) 2019-11-28
WO2019224119A3 true WO2019224119A3 (en) 2020-01-02

Family

ID=66625962

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2019/062834 WO2019224119A2 (en) 2018-05-25 2019-05-17 Ultrasonic microscope and carrier for carrying an acoustic pulse transducer

Country Status (8)

Country Link
US (1) US20190361103A1 (en)
EP (1) EP3803372A2 (en)
JP (2) JP7410057B2 (en)
KR (1) KR20210014112A (en)
CN (1) CN112166320A (en)
SG (1) SG11202011257PA (en)
TW (1) TW202001241A (en)
WO (1) WO2019224119A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022131075A (en) * 2021-02-26 2022-09-07 株式会社日立パワーソリューションズ Ultrasonic inspection device
WO2022213192A1 (en) * 2021-04-07 2022-10-13 Novustx Devices Inc. Systems and methods for operation of multiaxial ultrasound transducers
KR102399081B1 (en) * 2021-09-16 2022-05-18 주식회사 엠아이티 An ultrasonic inspection apparatus for defective elements capable of drying an inspection object and an inspection method using the same
CN114062501B (en) * 2021-11-18 2023-07-28 中国航空制造技术研究院 Orthogonal ultrasonic detection system for composite I-beam
CN114062502A (en) * 2021-11-18 2022-02-18 中国航空制造技术研究院 Orthogonal ultrasonic detection device for composite material I-beam
CN114354749B (en) * 2021-12-29 2024-02-13 长江存储科技有限责任公司 Bonding interface defect detection method and device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4030342A (en) * 1975-09-18 1977-06-21 The Board Of Trustees Of Leland Stanford Junior University Acoustic microscope for scanning an object stereo-optically and with dark field imaging
FR2660436A1 (en) * 1990-03-30 1991-10-04 Bertin & Cie Acoustic microscope for analysing an object on the surface or in depth
JP2006058029A (en) * 2004-08-17 2006-03-02 Hitachi Kenki Fine Tech Co Ltd Ultrasonic video equipment
CN103926315A (en) * 2014-04-04 2014-07-16 北京工业大学 Method for obtaining elastic property of isotropous sheet material based on simplex method

Family Cites Families (12)

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JPS6091256A (en) * 1983-10-25 1985-05-22 Honda Keisuke Ultrasonic microscope apparatus
JPS61210943A (en) * 1985-03-15 1986-09-19 Hitachi Ltd Ultrasonic microscope
JP2006040927A (en) 2004-07-22 2006-02-09 Nikon Corp Supporting apparatus, stage device, exposure device and method of manufacturing device
JP2006292527A (en) 2005-04-11 2006-10-26 Canon Inc 3-dimensional geometry measuring device
JP2008046096A (en) * 2006-08-21 2008-02-28 Honda Electronic Co Ltd Ultrasonic microscopic system and adjusting method therefor
US8794072B2 (en) * 2007-10-10 2014-08-05 Sonoscan, Inc. Scanning acoustic microscope with profilometer function
DE102010027954A1 (en) * 2010-04-20 2011-10-20 Dr. Johannes Heidenhain Gmbh Guide with passive gravity compensation and vertically movable platform
US8720273B2 (en) * 2010-11-23 2014-05-13 Sonoscan, Inc. Scanning acoustic microscope with an inverted transducer and bubbler functionality
EP2501023B1 (en) 2011-03-15 2021-01-27 Etel S. A.. Vertical actuator with gravity compensation
CN103226295A (en) 2013-04-27 2013-07-31 清华大学 Lithography machine silicon wafer bench micro-motion workbench
CN103308607B (en) * 2013-05-16 2015-11-04 北京工业大学 A kind of ultrasonic signal acquisition system of high speed
JP6397600B1 (en) * 2018-05-23 2018-09-26 株式会社日立パワーソリューションズ POSITION CONTROL DEVICE, POSITION CONTROL METHOD, AND ULTRASONIC VIDEO SYSTEM

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4030342A (en) * 1975-09-18 1977-06-21 The Board Of Trustees Of Leland Stanford Junior University Acoustic microscope for scanning an object stereo-optically and with dark field imaging
FR2660436A1 (en) * 1990-03-30 1991-10-04 Bertin & Cie Acoustic microscope for analysing an object on the surface or in depth
JP2006058029A (en) * 2004-08-17 2006-03-02 Hitachi Kenki Fine Tech Co Ltd Ultrasonic video equipment
CN103926315A (en) * 2014-04-04 2014-07-16 北京工业大学 Method for obtaining elastic property of isotropous sheet material based on simplex method

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Semiconductor devices - Mechanical and climatic test methods - Part 35: Acoustic microscopy for plastic encapsulated electronic components", IEC 60749-35:2006, IEC, 3, RUE DE VAREMBÉ, PO BOX 131, CH-1211 GENEVA 20, SWITZERLAND, 18 July 2006 (2006-07-18), pages 1 - 43, XP082004904 *
GOPALAN K ET AL: "A high-speed digital peak detector and averager for acoustic microscopy", 19890425; 19890425 - 19890427, 25 April 1989 (1989-04-25), pages 54 - 56, XP010085071 *

Also Published As

Publication number Publication date
KR20210014112A (en) 2021-02-08
JP2021525366A (en) 2021-09-24
SG11202011257PA (en) 2020-12-30
CN112166320A (en) 2021-01-01
US20190361103A1 (en) 2019-11-28
TW202001241A (en) 2020-01-01
EP3803372A2 (en) 2021-04-14
WO2019224119A2 (en) 2019-11-28
JP7410057B2 (en) 2024-01-09
JP2024029054A (en) 2024-03-05

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