WO2019220907A1 - Unité de mesure de champ magnétique, et système de mesure de champ magnétique - Google Patents

Unité de mesure de champ magnétique, et système de mesure de champ magnétique Download PDF

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Publication number
WO2019220907A1
WO2019220907A1 PCT/JP2019/017557 JP2019017557W WO2019220907A1 WO 2019220907 A1 WO2019220907 A1 WO 2019220907A1 JP 2019017557 W JP2019017557 W JP 2019017557W WO 2019220907 A1 WO2019220907 A1 WO 2019220907A1
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WIPO (PCT)
Prior art keywords
magnetic field
measurement
sensor
environmental
magnetic
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PCT/JP2019/017557
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English (en)
Japanese (ja)
Inventor
孝二郎 関根
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コニカミノルタ株式会社
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Priority to JP2020519551A priority Critical patent/JP7226717B2/ja
Publication of WO2019220907A1 publication Critical patent/WO2019220907A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves 
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/025—Compensating stray fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/10—Plotting field distribution ; Measuring field distribution

Definitions

  • the present invention relates to magnetic field measurement.
  • Magnetic measurement devices particularly magnetic field distribution measurement devices that measure the two-dimensional or three-dimensional distribution of a magnetic field generated from a measurement object, are excellent in detectability of abnormal points, and have abnormalities in measurement objects in non-destructive inspection and medical fields. Useful for diagnosing the condition. In some cases, such as when the measurement object is a human or other living organism, movement of the measurement object during measurement is unavoidable. When the measurement object to which the magnetic sensor is fixed moves, the magnetic sensor itself also moves and changes the measurement point, so the magnetic field strength of the environmental magnetic field at the measurement point also changes. In addition, an induced magnetic field is generated by movement in the environmental magnetic field. Accordingly, since the environmental magnetic field and the induction magnetic field that can be changed by movement are measured by the magnetic sensor, the magnetic field component generated from the measurement target cannot be accurately evaluated.
  • the detection data of the geomagnetic sensor still includes the environmental magnetic field and the induction magnetic field that can be changed by the movement of the geomagnetic sensor.
  • the biomagnetic measurement device described in Patent Document 2 before and after the biomagnetic field measurement, the magnetic field from the oscillation coil attached to the subject is measured to detect the movement of the subject, and the subject moves. Discard the biomagnetic field data.
  • the environmental magnetic field and the induction magnetic field that can be changed by the movement of the magnetic sensor are not excluded from the measurement signal of the magnetic sensor.
  • the measurement signal includes an environmental magnetic field or an induction magnetic field that can be changed by the movement of the magnetic sensor
  • the magnetic field component generated from the measurement object cannot be accurately evaluated.
  • the measurement object is very weak and greatly affected. Therefore, when the measurement object can move, the measurement data when the measurement object moves as described in Patent Document 2 must be discarded.
  • the measurement object is restrained so as not to move, there is a problem that when the measurement object is a human or other organism, the burden on the organism is large and it is difficult to prevent the measurement object from moving completely.
  • the present invention has been made in view of the above problems in the prior art, and in a configuration in which a magnetic field generated from a measurement object is measured by a magnetic sensor fixed to the measurement object, the measurement object is not restrained. It is an object to accurately measure a magnetic field component generated from a measurement object, including measurement based on a measurement magnetic field signal by the magnetic sensor during movement of the measurement object and the magnetic sensor.
  • the invention according to claim 1 for solving the above-described problem is a magnetic field measurement unit that can be attached to a measurement object so that the position with respect to the measurement object is fixed, and measures a magnetic field from the measurement object. And a motion detection sensor that detects the motion of the magnetic field measurement unit.
  • the invention according to claim 2 is the magnetic field measurement unit according to claim 1, wherein the measurement magnetic sensor measures a magnetic field distribution from a measurement object.
  • the measurement magnetic sensor and the motion detection sensor are integrated on the same semiconductor substrate or mounted and integrated on the same circuit substrate. It is a magnetic field measurement unit as described in above.
  • the invention according to claim 4 is the magnetic field measurement unit according to any one of claims 1 to 3,
  • a magnetic field measurement system comprising: an environmental magnetic sensor that measures an environmental magnetic field in a space containing a measurement object on which the magnetic field measurement unit is mounted.
  • the invention according to claim 5 includes an arithmetic unit that calculates a measurement value based on a measurement magnetic field signal from the measurement magnetic sensor, a motion detection signal from the motion detection sensor, and an environmental magnetic field signal from the environmental magnetic sensor,
  • the arithmetic device estimates an environmental magnetic field and an induced magnetic field at the position according to the position and moving speed of the measurement magnetic sensor at the time of measurement of the measurement magnetic field signal based on the motion detection signal and the environmental magnetic field signal.
  • the magnetic field measurement system according to claim 4 wherein the environmental magnetic field and the induction magnetic field are subtracted from the measurement magnetic field signal to obtain a measurement value.
  • the invention according to claim 6 includes an arithmetic unit that calculates a measurement value based on a measurement magnetic field signal from the measurement magnetic sensor, a motion detection signal from the motion detection sensor, and an environmental magnetic field signal from the environmental magnetic sensor,
  • the arithmetic unit is: A first step of obtaining the measurement magnetic field signal from the measurement magnetic sensor; A second step of obtaining the motion detection signal from the motion detection sensor; A third step of acquiring the environmental magnetic field signal from the environmental magnetic sensor; Based on the environmental magnetic field signal acquired in the third step and the motion detection signal acquired in the second step, the measurement magnetic field signal acquired in the first step is corrected to be a measurement value.
  • the invention according to claim 7 is a fifth step of calculating a position of the measurement magnetic sensor at the time of acquisition of the measurement magnetic field signal in the first step based on the motion detection signal acquired in the second step; A sixth step of estimating the environmental magnetic field at the position calculated in the fifth step based on the environmental magnetic field signal acquired in the third step;
  • the eleventh step of subtracting the ambient magnetic field estimated in the ninth step and the induced magnetic field estimated in the tenth step from the measured magnetic field signal acquired in the first step is included in the fourth step.
  • Item 7. The magnetic field measurement system according to Item 6.
  • the measurement object and the magnetism during movement of the magnetic sensor are not restrained.
  • the magnetic field component generated from the measurement object can be accurately measured, including the measurement based on the measurement magnetic field signal from the sensor.
  • FIG. 1 is a perspective view showing a magnetic field distribution measurement system according to an embodiment of the present invention. It is a plane schematic diagram which shows the magnetic field distribution measurement system which concerns on one Embodiment of this invention.
  • FIG. 3 is a schematic plan view showing a magnetic field distribution measurement system according to an embodiment of the present invention, which differs from FIG. 2 in the number of installed environmental magnetic sensors.
  • FIG. 4 is a schematic plan view showing a magnetic field distribution measurement system according to an embodiment of the present invention, which is different from FIGS. 2 and 3 in the number of installed environmental magnetic sensors. It is a plane schematic diagram which shows the magnetic field distribution measurement system which concerns on one Embodiment of this invention.
  • FIG. 1 shows the configuration of the magnetic field distribution measurement system of this embodiment.
  • the magnetic field distribution measurement system 1 includes a magnetic field distribution measurement unit 10, an environmental magnetic sensor 20, and an arithmetic device 30.
  • the case where the measurement object is the head 2a of the human body (subject) 2 is taken as an example.
  • the vertical coordinate in the space 3 containing the measurement object is Z, and the two axes perpendicular to the Z axis and perpendicular to each other are X and Y.
  • FIG. 2 shows a schematic diagram of the XY plane.
  • the magnetic field distribution measurement unit 10 integrally includes a measurement magnetic sensor 11 that measures the magnetic field distribution from the head 2 a and a motion detection sensor 12 that detects the motion of the magnetic field measurement unit 10.
  • the measurement magnetic sensor 11 includes a sensor array module in which a plurality of sensor elements are arranged two-dimensionally or three-dimensionally, and is a two-dimensional configuration along the surface of the head 2a or a 3D axis that is perpendicular to the two-dimensional plane. Dimensional magnetic field distribution can be measured. For example, it can be implemented by applying a tunnel magnetoresistive element as the sensor element.
  • the measurement magnetic sensor 11 is simply shown, and each sensor element is arranged so as to face the surface of the adjacent head 2a, or the sensor array covers the measurement target region on the surface of the head 2a.
  • the arrangement to be arranged in this way is designed as appropriate.
  • Communication connection between the arithmetic unit 30 and the magnetic field distribution measurement unit 10 and the environmental magnetic sensor 20 is performed by wire or wirelessly.
  • the magnetic field distribution measurement unit 10 is preferably wirelessly connected.
  • the magnetic field distribution measurement unit 10 can be mounted on the head 2a so that the position with respect to the head 2a is fixed. As shown in FIG. 1, the magnetic field distribution measurement unit 10 is attached to the head 2a to measure the magnetic field generated from the head 2a.
  • the motion detection sensor 12 It is sufficient for the motion detection sensor 12 to be able to detect a factor capable of calculating the current position and the moving speed.
  • an acceleration sensor is applied. Since there is a possibility of movement in the triaxial direction, an acceleration sensor is provided so that acceleration in the triaxial direction can be detected.
  • the magnetic field distribution measurement unit 10 is arranged at a known coordinate, the coordinate is stored as the origin coordinate in the arithmetic unit 30, and each movement amount in the XYZ directions from the origin coordinate is set to zero.
  • the calculation device 30 calculates the current position and movement speed after movement based on the output signal of the acceleration sensor.
  • the motion detection sensor 12 is provided for recognizing the current position and the moving speed of the measurement magnetic sensor 11.
  • the motion detection sensor 12 is integrated with the measurement magnetic sensor 11 and is provided as close as possible.
  • the measurement magnetic sensor 11 and the motion detection sensor 12 may be implemented by constituting a monolithic semiconductor chip integrated on the same semiconductor substrate. Further, a configuration may be implemented in which the semiconductor chip constituting the measurement magnetic sensor 11 and the semiconductor chip constituting the motion detection sensor 12 are mounted close to each other on the same circuit board.
  • the environmental magnetic sensor 20 is for measuring the environmental magnetic field He in the space 3, and one or more are installed in the space 3.
  • the computing device 30 calculates a measurement value based on the measurement magnetic field signal from the measurement magnetic sensor 11, the motion detection signal from the motion detection sensor 12, and the environmental magnetic field signal from the environmental magnetic sensor 20. In this embodiment, magnetic field distribution data corresponding to the magnetoencephalogram is calculated.
  • Space 3 is a space in the room. This is to prevent the departure of the subject 2 from the space 3 and the intrusion of others and other objects into the space 3.
  • An environmental magnetic sensor 20 is installed at a corner or the like in the space 3, and the environmental magnetic sensor 20 measures an environmental magnetic field (mainly geomagnetism) in the space 3.
  • an environmental magnetic field mainly geomagnetism
  • one (Fig. 2), two (Fig. 3), and four (Fig. 4) environmental magnetic sensors 20 are arranged, and more than two in the Z direction. It is also possible to obtain the environment magnetic field in the space 3 as a distribution having the space coordinates XYZ.
  • the environmental magnetic sensor 20 is assumed to be the same as the magnetic field intensity measured by the environmental magnetic sensor 20 at any position in the space 3 (FIG. 2). There is no problem with processing.
  • the environmental magnetic field distribution between the two environmental magnetic sensors 20 can be estimated to be linearly changed and subjected to interpolation processing. Therefore, the accuracy increases as the number of environmental magnetic sensors 20 increases, but the cost also increases.
  • the number of environmental magnetic sensors 20 may be determined in consideration of the uniformity of the environmental magnetic field in the space 3.
  • the moving velocity vector, the head 2a biomagnetic field, the environmental magnetic field, and the induction magnetic field at two different measurement points S1 and S2 are respectively set as v1, Hm1, He1, Hi1, v2, Hm2, He2, and Hi2. .
  • the head 2a is obtained by subtracting the environmental magnetic field at the measurement points (S1, S2) estimated from the environmental magnetic field signal of the environmental magnetic sensor 20 from the measurement magnetic field signal output from the measurement magnetic sensor 11. It is possible to acquire the magnetic field distribution derived from the part 2a.
  • the situation where the head 2a is not moving is a situation where v1 is zero at the measurement point S1, for example.
  • the arithmetic unit 30 firstly obtains a measurement magnetic field signal from the measurement magnetic sensor 11, a second step S ⁇ b> 12 obtains a motion detection signal from the motion detection sensor 12, and The third step S13 for acquiring the environmental magnetic field signal from the environmental magnetic sensor 20 is executed simultaneously. Next, based on the environmental magnetic field signal acquired in the third step S13 and the motion detection signal acquired in the second step S12, the measurement magnetic field signal acquired in the first step S11 is corrected to be a measurement value. Step S14 is executed.
  • the position (measurement point (S1, S2)) of the measurement magnetic sensor 11 at the time of acquisition of the measurement magnetic field signal in the 1st step S11 was acquired in the 2nd step S12.
  • the fifth step S15 calculated based on the motion detection signal and the environmental magnetic field signal (He1, He2) at the position (measurement point (S1, S2)) calculated in the fifth step S15 are acquired in the third step S13.
  • the sixth step S16 estimated based on the above and the seventh step S17 for subtracting the environmental magnetic field estimated in the sixth step S16 from the measured magnetic field signal acquired in the first step S11 are executed.
  • the magnetic field distribution from the head 2a is acquired even while the head 2a is moving. Since the measurement magnetic sensor 11 is fixed to the head 2a, the movement of the head 2a and the movement of the measurement magnetic sensor 11 are substantially the same. As shown in FIG. 5, when the measurement magnetic sensor 11 moves with speed in the environmental magnetic field in the space 3 (when v1 and v2 are not zero), an induced current and an induced magnetic field are generated in the sensor, and the measurement magnetic sensor 11 It is superimposed on the output signal. The induced magnetic field can be converted from the “environmental magnetic field” and the “movement speed”.
  • the measurement magnetic sensor 11 Even if the head 2a moves, the measurement magnetic sensor 11 simultaneously moves to the same position at the same speed, so it can be assumed that the head 2a viewed from the measurement magnetic sensor does not move, and the magnetic field distribution from the head 2a deviates. It is measured without any change.
  • the measurement magnetic sensor 11 for example, a tunnel magnetoresistive element, etc., uses the magnetoresistive effect.
  • the environmental magnetic field (He1, He2) traversing the conductor of the electrical circuit) can change its direction, size, and relative direction as the spatial position changes.
  • the position and moving speed of the measurement magnetic sensor 11 can be known from the motion detection signal of the motion detection sensor 12.
  • the induced magnetic field (Hi1, Hi2) can be calculated from the movement amount of the environmental magnetic field accompanying the movement of the head 2a, and hence the movement of the measurement magnetic sensor 11 and the movement detection sensor 12, and the moving speed.
  • Measurement magnetic signal (Biomagnetic signal) + (Environmental magnetic field signal) + (Inductive magnetic field signal).
  • the arithmetic unit 30 firstly obtains a measurement magnetic field signal from the measurement magnetic sensor 11, and a second step S ⁇ b> 12 obtains a movement detection signal from the movement detection sensor 12.
  • the third step S13 for acquiring the environmental magnetic field signal from the environmental magnetic sensor 20 is executed with the synchronization.
  • the measurement magnetic field signal acquired in the first step S11 is corrected to be a measurement value.
  • Step S14 is executed.
  • the fourth step S14 as shown in FIG.
  • the position (measurement points (S1, S2)) and the moving speed (v1, v2) of the measurement magnetic sensor 11 when the measurement magnetic field signal is acquired in the first step S11 are obtained.
  • the induced magnetic field (Hi1, Hi2) at the position (measurement point (S1, S2)) calculated in the eighth step S18 and the ninth step S19 estimated based on the environmental magnetic field signal acquired in step S13 is obtained.
  • the tenth step S20 and the eleventh step S21 in which the environmental magnetic field estimated in the ninth step S19 and the induction magnetic field estimated in the tenth step S20 are subtracted from the measured magnetic field signal acquired in the first step S11 are executed. .
  • the passive magnetic shield has a configuration in which a soft magnetic plate 4 such as a permalloy plate is spread around the periphery, and can reduce an environmental magnetic field such as geomagnetism. Nevertheless, it is difficult to completely reduce the environmental magnetic field in the space 3, and it is difficult to reduce the induced magnetic field when the head 2a moves.
  • the active magnetic shield (FIG. 9C) is arranged around the space 3 according to the output of the environmental magnetic sensor for active magnetic shield (which may be installed separately from the environmental magnetic sensor 20 of the magnetic field distribution measurement system 1). Is configured to cancel and reduce the environmental magnetic field in the space 3 by driving a magnetic field generator (coil or the like) 5 disposed in the space. Again, it is difficult to completely reduce the environmental magnetic field in the space 3, and it is difficult to reduce the induced magnetic field when the head 2a moves. Therefore, by using this magnetic field distribution measurement system 1, both the environmental magnetic field and the induced magnetic field can be canceled by software.
  • the measurement object and the measurement object are not restrained.
  • the magnetic field component generated from the measurement object can be accurately measured, including the measurement based on the measurement magnetic field signal by the magnetic sensor during movement of the magnetic sensor.
  • a good magnetic field distribution signal can be obtained even if the measurement object is moving. Since the restraint that the subject 2 should not move during the measurement is eliminated, the burden on the person is greatly reduced. Further, even when an animal that is not bound is used as a measurement object, the burden on the measurement object is small, and a high-quality magnetic field distribution signal can be obtained.
  • the technology for canceling the environmental magnetic field and the induction magnetic field of the present invention is effective even in a configuration in which the magnetic field distribution is not measured and the magnetic field intensity at one point is measured regardless of the above embodiment.
  • the magnetic field distribution measurement unit 10 is arranged at known coordinates in order to set the origin coordinates.
  • the method for setting the origin coordinates is not limited to this, and other methods may be used. The following method can be mentioned as an example.
  • the magnetic field distribution measurement unit 10 not attached to the head 2a is placed at an arbitrary position in the space 3, and only the environmental magnetic field is detected by the measurement magnetic sensor 11.
  • a plurality of environmental magnetic sensors 20 are provided.
  • the position coordinates of the measurement magnetic sensor 11 in the space 3 are estimated. Since the environmental magnetic field distribution in the space 3 can be estimated based on the plurality of environmental magnetic sensors 20 as described above, the position of the measurement magnetic sensor 11 is determined from the environmental magnetic field measured by the measurement magnetic sensor 11 using the estimated environmental magnetic field distribution. (The reverse of the process of estimating the environmental magnetic field at the position from the position of the measurement magnetic sensor 11 is performed). The position coordinates in the space 3 of the measurement magnetic sensor 11 estimated as described above are set as the origin coordinates.
  • a plurality of position detecting magnetic field oscillators controlled by the arithmetic unit 30 are prepared and installed at locations separated from each other.
  • the arithmetic unit 30 causes the position detection magnetic field oscillator to transmit a predetermined position detection magnetic field signal at a certain timing, extracts the position detection magnetic field signal from the measurement magnetic field signal by the measurement magnetic sensor 11, and the space of the position detection magnetic field signal
  • the distance from each position detecting magnetic field oscillator to the measurement magnetic sensor 11 is estimated by analyzing the time difference and attenuation rate due to propagation. From the distance of the measurement magnetic sensor 11 to the plurality of position detection magnetic field oscillators as described above, the position coordinate in the space 3 of the measurement magnetic sensor 11 is specified, and the specified position coordinate is set as the origin coordinate. Further, the position magnetic field signal may be detected simultaneously by the measurement magnetic sensor 11 and the plurality of environmental magnetic sensors 20, so that the analysis may be performed at the relative position of the measurement magnetic sensor 11 with respect to the plurality of environmental magnetic sensors 20.
  • the present invention can be used for a magnetic field measurement unit and a magnetic field measurement system.
  • Magnetic field distribution measurement system Human body (subject) 2a head 3 space 10 magnetic field distribution measurement unit 11 measurement magnetic sensor 12 motion detection sensor 20 environmental magnetic sensor 30 arithmetic unit

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Abstract

L'invention concerne une unité de mesure de champ magnétique 10 qui peut être montée sur un objet de mesure (2a) si bien que la position de l'unité de mesure de champ magnétique 10 par rapport à l'objet de mesure est fixe. L'unité de mesure de champ magnétique comprend, formés d'un seul tenant, un capteur magnétique de mesure 11 pour mesurer un champ magnétique à partir de l'objet de mesure, et un capteur de détection de mouvement 12 pour détecter un mouvement de l'unité de mesure de champ magnétique. Un système de mesure de champ magnétique 1 comprend un capteur magnétique d'environnement 20 pour mesurer un champ magnétique d'environnement d'un espace 3 contenant un objet de mesure sur lequel l'unité de mesure de champ magnétique est montée, et un dispositif de calcul 30. Le dispositif de calcul : calcule un champ magnétique d'environnement et un champ magnétique induit, à la position du capteur magnétique de mesure, pendant la mesure d'un signal de champ magnétique de mesure, le champ magnétique d'environnement et le champ magnétique induit correspondant à la position et à la vitesse de mouvement du capteur magnétique de mesure ; et obtient une valeur de mesure par soustraction du champ magnétique d'environnement et du champ magnétique induit appartenant au calcul à partir du signal de champ magnétique de mesure.
PCT/JP2019/017557 2018-05-16 2019-04-25 Unité de mesure de champ magnétique, et système de mesure de champ magnétique WO2019220907A1 (fr)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002272695A (ja) * 2001-03-14 2002-09-24 Ryuzo Ueda 汎用性を有する高感度磁気検出装置
JP2004167032A (ja) * 2002-11-21 2004-06-17 Nec Tokin Corp 顎運動測定装置およびその測定方法
JP2009045198A (ja) * 2007-08-20 2009-03-05 Yokogawa Electric Corp 生体磁場測定装置におけるデータ収録方法
JP2012081000A (ja) * 2010-10-08 2012-04-26 Yokogawa Electric Corp 脳磁場測定装置の校正方法および校正装置
JP2012152514A (ja) * 2011-01-28 2012-08-16 Konica Minolta Holdings Inc 磁気計測装置および生体磁気計測方法
JP2016540537A (ja) * 2013-10-23 2016-12-28 ヴェリリー ライフ サイエンシズ エルエルシー 変調源を有する非侵襲的な分析物検出システム
JP2018007821A (ja) * 2016-07-13 2018-01-18 株式会社アドバンテスト 磁場測定装置及び磁場測定方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002272695A (ja) * 2001-03-14 2002-09-24 Ryuzo Ueda 汎用性を有する高感度磁気検出装置
JP2004167032A (ja) * 2002-11-21 2004-06-17 Nec Tokin Corp 顎運動測定装置およびその測定方法
JP2009045198A (ja) * 2007-08-20 2009-03-05 Yokogawa Electric Corp 生体磁場測定装置におけるデータ収録方法
JP2012081000A (ja) * 2010-10-08 2012-04-26 Yokogawa Electric Corp 脳磁場測定装置の校正方法および校正装置
JP2012152514A (ja) * 2011-01-28 2012-08-16 Konica Minolta Holdings Inc 磁気計測装置および生体磁気計測方法
JP2016540537A (ja) * 2013-10-23 2016-12-28 ヴェリリー ライフ サイエンシズ エルエルシー 変調源を有する非侵襲的な分析物検出システム
JP2018007821A (ja) * 2016-07-13 2018-01-18 株式会社アドバンテスト 磁場測定装置及び磁場測定方法

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