WO2019220868A1

WO2019220868A1 - Discharge device

Info

Publication number: WO2019220868A1
Application number: PCT/JP2019/016932
Authority: WO
Inventors: 正樹金▲崎▼; 宜久山口; 江　偉華; 太一須貝
Original assignee: 株式会社デンソー; 国立大学法人長岡技術科学大学
Priority date: 2018-05-18
Filing date: 2019-04-22
Publication date: 2019-11-21
Also published as: JP7075046B2; JP2019201508A

Abstract

A discharge device (1) which comprises: a pulse discharge load (2) which is provided with a first discharge electrode (211), a second discharge electrode (212) and a dielectric layer (22); and a pulse power supply circuit part (3) which periodically outputs a pulse voltage to the pulse discharge load (2). The pulse power supply circuit part (3) comprises an energy storage part (31) in which electrical energy is able to be stored. The pulse power supply circuit part (3) is configured such that electrical energy is able to be reversibly transferred between the energy storage part (31) and the pulse discharge load (2).

Description

Discharge device

Cross-reference of related applications

This application is based on Japanese Patent Application No. 2018-95887 filed on May 18, 2018, the contents of which are incorporated herein by reference.

The present disclosure relates to a discharge device.

A pulse generator that supplies a pulse voltage to a load using a Marx circuit has been proposed. This pulse generator charges a plurality of capacitors from a power supply in a state where a plurality of capacitors in a Marx circuit are connected in parallel. Thereby, a lot of charges can be charged at a low voltage. And when supplying the charge charged in the Marx circuit to the load, a plurality of capacitors are connected in series connection. Thereby, a high voltage can be supplied to the load.

JP 2008-11595 A

In supplying a pulse voltage to a pulse discharge load by the pulse generator, there are the following problems.
That is, even after discharge is generated in the pulse discharge load, electric charge remains in the capacitive component existing in the pulse discharge load (for example, as an equivalent electric circuit, a capacitive component of a dielectric connected in series to the pulse discharge load). There may be. If a pulse voltage is repeatedly supplied to the pulse discharge load without extracting this charge, the voltage at the end of the pulse discharge load approaches the applied voltage, so that the voltage between the electrodes decreases and discharge is less likely to occur. Therefore, the Marx circuit is short-circuited and the charge is released as heat in order to extract the charge remaining in the capacitive component of the pulse discharge load after the discharge.

However, releasing electric charge as heat also wastes electrical energy. In other words, it is necessary to add the electric energy to be discarded to the desired discharge power and supply it to the pulse discharge load. Therefore, there is room for improvement in terms of energy efficiency.

This disclosure intends to provide a discharge device with excellent energy efficiency.

One aspect of the present disclosure includes a first discharge electrode and a second discharge electrode, and a dielectric layer disposed on an inner surface of at least one of the first discharge electrode and the second discharge electrode. Pulse discharge load,
A discharge device having a pulse power power supply circuit unit that periodically outputs a pulse voltage to the pulse discharge load,
The pulse power power supply circuit unit has an energy storage unit capable of storing electrical energy,
The pulse power power supply circuit unit is in a discharge device configured to reversibly move electrical energy between the energy storage unit and the pulse discharge load.

In the discharge device, the pulse power power supply circuit unit is configured to reversibly move electrical energy between the energy storage unit and the pulse discharge load. As a result, even when electric charges remain in the dielectric layer after the pulse discharge load performs discharge, the electric energy generated by the electric charges can be recovered and stored in the energy storage unit of the pulse power power supply circuit unit. it can.

Thereby, at the time of the next discharge of the discharge in the pulse discharge load, the electric energy stored in the energy storage unit can be supplied to the pulse discharge load. Therefore, the electrical energy repeatedly supplied to the pulse discharge load can be saved. As a result, a discharge device with excellent energy efficiency can be obtained.

As mentioned above, according to the said aspect, the discharge device excellent in energy efficiency can be provided.

The above and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description with reference to the accompanying drawings. The drawing
FIG. 1 is a circuit diagram of a discharge device in Embodiment 1. FIG. 2 is an explanatory diagram of a pulse discharge load in the first embodiment. FIG. 3 is a circuit diagram of the discharge device in a series state according to the first embodiment. FIG. 4 is a circuit diagram of the discharge device in the parallel state according to the first embodiment. FIG. 5 is a diagram showing temporal changes in the interelectrode voltage and current of the pulse discharge load in Embodiment 1. FIG. 6 is a circuit diagram of a discharge device according to the second embodiment. FIG. 7 is a circuit diagram of a discharge device in a parallel state according to the second embodiment. FIG. 8 is a circuit diagram of the discharge device in a state where both electrodes of the pulse discharge load are short-circuited in the second embodiment. FIG. 9 is a circuit diagram of the discharge device in the series state according to the second embodiment. FIG. 10 is a circuit diagram of the discharge device in a series state according to the third embodiment. FIG. 11 is a circuit diagram of a discharge device in a parallel state according to the third embodiment. FIG. 12 is a circuit diagram of the discharge device in the series state after the parallel state in the third embodiment, FIG. 13 is a circuit diagram of the discharge device in a series state in the fourth embodiment. FIG. 14 is a circuit diagram of a discharge device in a parallel state according to the fourth embodiment. FIG. 15 is a circuit diagram of a discharge device in a parallel state according to the fourth embodiment, and shows a state in which charge is collected to a capacitor. FIG. 16 is a circuit diagram of a discharge device in a series state according to the fifth embodiment. FIG. 17 is a circuit diagram of the discharge device in the parallel state in the fifth embodiment. FIG. 18 is a circuit diagram of a discharge device in a parallel state according to the fifth embodiment, and shows a state in which charge is collected to a capacitor. FIG. 19 is a circuit diagram of a discharge device in Embodiment 6. FIG. 20 is a circuit diagram of the discharge device in a series state according to the sixth embodiment. FIG. 21 is a circuit diagram of a discharge device in a parallel state according to the sixth embodiment.

(Embodiment 1)
An embodiment according to a discharge device will be described with reference to FIGS.
As shown in FIG. 1, the discharge device 1 of this embodiment includes a pulse discharge load 2 and a pulse power power supply circuit unit 3.

As shown in FIG. 2, the pulse discharge load 2 includes a first discharge electrode 211, a second discharge electrode 212, and a dielectric layer 22. The dielectric layer 22 is disposed on the inner surface of at least one of the first discharge electrode 211 and the second discharge electrode 212. In this embodiment, the dielectric layer 22 is disposed on the inner side surfaces of both the first discharge electrode 211 and the second discharge electrode 212.

The pulse power power supply circuit unit 3 periodically outputs a pulse voltage to the pulse discharge load 2.
As shown in FIG. 1, the pulse power power supply circuit unit 3 includes an energy storage unit 31 that can store electrical energy.
The pulse power power supply circuit unit 3 is configured to reversibly move electrical energy between the energy storage unit 31 and the pulse discharge load 2.

The pulse power power supply circuit unit 3 includes a plurality of capacitors Cm and a plurality of switches SW. The pulse power power supply circuit unit 3 is configured to be able to switch between a serial state and a parallel state by switching on and off the plurality of switches SW. The series state is a state in which a plurality of capacitors Cm are connected in series as shown in FIG. The parallel state is a state in which a plurality of capacitors Cm are connected in parallel as shown in FIG.

That is, the pulse power power supply circuit unit 3 forms a Marx circuit.
As shown in FIG. 3, a pulse voltage is output to the pulse discharge load 2 in a series state. As shown in FIG. 4, electrical energy is recovered from the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2 to the energy storage unit 31 in a parallel state.

A broken line arrow Ip in FIG. 3 and a broken line arrow Ic in FIG. 4 indicate current flows. These current flows Ip and Ic are also positive charge flows. The same applies to broken line arrows Ip and Ic in other figures.
In the present embodiment, the energy storage unit 31 is configured by a plurality of capacitors Cm. That is, electric charge is accumulated in each of the plurality of capacitors Cm, and electric energy is accumulated.

As shown in FIG. 1, the pulse power power supply circuit section 3 includes a plurality of stages of circuit units 4 (4A, 4B, 4Z), a DC power supply 5, and a series switch unit 6. The DC power source 5 has a positive electrode connected to the first stage circuit unit 4A. The series switch unit 6 is connected between the circuit unit 4Z at the final stage and the negative electrode of the DC power supply 5.

The pulse power power supply circuit unit 3 includes a first switch SW1 and a second switch SW2 belonging to the circuit unit 4 and a third switch SW3 belonging to the series switch unit 6 as a plurality of switches SW.

The circuit unit 4 includes a switch series body 41 and a capacitor Cm. The switch series body 41 is formed by connecting a first switch SW1 and a second switch SW2 in series at an intermediate connection point 41M. The capacitor Cm is connected in parallel to the switch series body 41. The circuit unit 4 includes a first connection part 421 and a second connection part 422 as a connection part between the switch series body 41 and the capacitor Cm.

The series switch unit 6 is formed by connecting a plurality of third switches SW3 in series.
The first connection part 421 of the circuit unit 4Z at the final stage is connected to the first discharge electrode 211 of the pulse discharge load 2.
The negative electrode of the DC power supply 5 and one end of the series switch unit 6 are connected to each other and to the second discharge electrode 212 of the pulse discharge load 2.

The positive electrode of the DC power supply 5 is connected to the intermediate connection point 41M of the first-stage circuit unit 4A.
The first connection portion 421 of the (k−1) -th stage circuit unit 4 is connected to the intermediate connection point 41M of the k-th stage circuit unit 4. Here, k is a natural number of 2 or more. Note that the number of stages of the circuit unit 4 included in the pulse power power supply circuit unit 3 is N. At this time, k is a natural number of 2 to N. N is a natural number of 2 or more.

Between the second connection portion 422 of the k-th stage circuit unit 4 and the second connection portion 422 of the (k−1) -th stage circuit unit 4, the third switch SW3 in the series switch unit 6 is interposed. ing.
The third switch SW3 in the series switch unit 6 is also interposed between the second connection portion 422 of the first-stage circuit unit 4A and the negative electrode of the DC power supply 5.

In this embodiment, the pulse power power supply circuit unit 3 includes three circuit units 4. Therefore, in the present embodiment, the N is 3 and the k is 2 or 3. The pulse power power supply circuit unit 3 includes, as a plurality of circuit units 4, from the side close to the DC power supply 5, a first stage circuit unit 4A, a second stage circuit unit 4B, and a third stage circuit unit 4Z. And have. The third-stage circuit unit 4Z becomes the final-stage circuit unit 4Z. The number of stages of the circuit unit 4 is not particularly limited as long as it is a plurality of stages.

The series switch unit 6 has three third switches SW3 connected in series with each other. One end of the series switch unit 6 is connected to the second connection part 422 of the circuit unit 4 </ b> Z at the final stage, and the other end is connected to the negative electrode of the DC power supply 5. Further, one third switch SW3 is interposed between the second connection portion 422 of the k-th stage circuit unit 4 and the second connection portion 422 of the (k−1) -th stage circuit unit 4. ing. One third switch SW3 is also interposed between the second connection part 422 of the first-stage circuit unit 4A and the negative electrode of the DC power supply 5.

Also, a diode is connected in parallel to each switch SW. The diode connected in parallel to the first switch SW1 is connected in the direction in which the intermediate connection point 41M side becomes the anode. The diode connected in parallel to the second switch SW2 is connected in such a direction that the intermediate connection point 41M side becomes the cathode. The diode connected in parallel to the third switch SW3 is connected in such a direction that the side close to the negative electrode of the DC power supply 5 becomes the anode.

The switch SW is made of a power semiconductor element. Then, the switch SW composed of these power semiconductor elements can be appropriately turned on and off by a signal from the drive circuit. As the switch SW, for example, IGBT (abbreviation of insulated gate bipolar transistor), MOSFET (abbreviation of MOS field effect transistor) or the like can be used. Moreover, as a power semiconductor element, what was formed with silicon carbide (SiC) and what was formed with silicon (Si) can be used, for example.

As shown in FIG. 3, the first switch SW1 and the third switch SW3 are turned off (that is, opened) and the second switch SW2 is turned on (that is, short-circuited), thereby forming a series state. As shown in FIG. 4, the parallel state is formed by turning on the first switch SW1 and the third switch SW3 and turning off the second switch SW2.

That is, when forming the series state, as shown in FIG. 3, in all the circuit units 4, the first switch SW1 is turned off and the second switch SW2 is turned on. Further, all the third switches SW3 of the series switch unit 6 are turned off.

When forming the parallel state, as shown in FIG. 4, in all the circuit units 4, the first switch SW1 is turned on and the second switch SW2 is turned off. Further, all the third switches SW3 of the series switch unit 6 are turned on.

All the first switches SW1 and all the third switches SW3 can be configured to be turned on / off in synchronization by the same signal from the drive circuit. Further, all the second switches SW2 can be configured to be turned on / off in synchronization by the same signal from the drive circuit. However, the second switch SW2 is turned on / off by a drive signal different from the drive signals of the first switch SW1 and the third switch SW3. More specifically, the second switch SW2 is turned off when the first switch SW1 and the third switch SW3 are on.

Note that when the discharge device 1 is started, first, electric energy is stored in the energy storage unit 31 of the pulse power power supply circuit unit 3. That is, at this time, the pulse power power supply circuit unit 3 is placed in the parallel state shown in FIG. 4, and the power supply voltage Vin of the DC power supply 5 is applied to each capacitor Cm.

Next, when outputting the pulse voltage to the pulse discharge load 2, the pulse power power supply circuit unit 3 is switched to the series state shown in FIG. That is, a plurality of capacitors Cm in which electric charges are accumulated are connected in series, and a series circuit of these capacitors Cm is also connected in series with the DC power source 5. As a result, a voltage of Vin × (N + 1) is applied to the pulse discharge load 2.

That is, a voltage obtained by multiplying the number N of stages of the circuit unit 4 by 1 and the power supply voltage Vin is applied to the pulse discharge load 2. As a result, pulse discharge occurs in the pulse discharge load 2. However, even after discharge, some charges remain in the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2.

From this state, the pulse power power supply circuit unit 3 is switched to the parallel state as shown in FIG. Then, the plurality of capacitors Cm connected in parallel to each other are connected to the pulse discharge load 2 and also connected to the DC power supply 5 in parallel. Thereby, a current flows from the pulse discharge load 2 to the pulse power power supply circuit unit 3 until the voltage between the electrodes in the pulse discharge load 2 decreases to the power supply voltage Vin. That is, charges are extracted from the capacitance component C2 of the dielectric layer 22 of the pulse discharge load 2, and the charges are recovered by the capacitors Cm of the Marx circuit.

As a result, the electric energy remaining in the pulse discharge load 2 is recovered and stored in the energy storage unit 31 of the pulse power power supply circuit unit 3. At the same time, the voltage between the electrodes of the pulse discharge load 2 is reduced.

The collected electrical energy is used for the next discharge in the discharge device 1. In the next period of pulse discharge, a voltage is output from the pulse power power supply circuit unit 3 to the pulse discharge load 2. That is, similarly to the above, as shown in FIG. 3, the pulse power power supply circuit unit 3 is put in series. As a result, a voltage of Vin × (N + 1) is applied to the pulse discharge load 2.

At this time, the charge that has been extracted from the dielectric layer 22 after the previous pulse discharge and collected in the energy storage unit 31 is superimposed on the charge from the DC power supply 5 and supplied to the pulse discharge load 2. Thereby, discharge occurs again in the pulse discharge load 2. Then, a charge is charged in the capacitive component C2 of the dielectric layer 22.

Thereafter, the parallel state shown in FIG. 4 and the serial state shown in FIG. 3 are alternately repeated. Thereby, the pulse discharge in the pulse discharge load 2 is efficiently generated while saving energy.

The pulse discharge load 2 has a structure that generates a dielectric barrier discharge. As shown in FIG. 2, the pulse discharge load 2 includes a first discharge electrode 211 and a second discharge electrode 212 that are arranged to face each other. The dielectric layers 22 are provided on the inner surface of the first discharge electrode 211 and the inner surface of the second discharge electrode 212, respectively. A discharge gap 23 is formed between the pair of dielectric layers 22. By generating a discharge in the discharge gap 23, for example, plasma can be generated. Further, for example, ozone can be generated by generating plasma in the discharge gap 23 while supplying a gas containing oxygen to the discharge gap 23.

Next, the effect of this embodiment is demonstrated.
In the discharge device 1, the pulse power power supply circuit unit 3 is configured to reversibly move electrical energy between the energy storage unit 31 and the pulse discharge load 2. Thereby, even after the pulse discharge load 2 performs the discharge, even when the electric charge remains in the dielectric layer 22, the electric energy due to this electric charge is recovered in the energy storage unit 31 of the pulse power power supply circuit unit 3, Can be accumulated.

Thereby, the electrical energy stored in the energy storage unit 31 can be supplied to the pulse discharge load 2 at the time of the next discharge after the discharge in the pulse discharge load 2. Therefore, the electrical energy repeatedly supplied to the pulse discharge load 2 can be saved. As a result, the discharge device 1 excellent in energy efficiency can be obtained.

The pulse power power supply circuit unit 3 includes a plurality of capacitors Cm and a plurality of switches SW. By switching on / off of the plurality of switches SW, the serial state and the parallel state can be switched. The pulse voltage is output to the pulse discharge load 2 in the series state, and the electric energy is recovered from the capacitance component C2 of the dielectric layer 22 of the pulse discharge load 2 to the energy storage unit 31 in the parallel state. That is, the pulse power power supply circuit unit 3 forms a Marx circuit, and by repeatedly switching between the serial state and the parallel state, the pulse voltage output to the pulse discharge load 2 and the pulse discharge load 2 The recovery of electrical energy can be repeated alternately. Therefore, it is possible to efficiently output the pulse voltage and recover the electric energy.

The pulse power power supply circuit unit 3 includes a multi-stage circuit unit 4 and a series switch unit 6, and forms a Marx circuit as shown in FIG. Thereby, the series state and the parallel state can be realized easily and efficiently by appropriately turning on and off the plurality of switches SW. As a result, the discharge device 1 excellent in energy efficiency can be easily obtained.

Specifically, by turning off the first switch SW1 and the third switch SW3 and turning on the second switch SW2, a series state is formed, and the first switch SW1 and the third switch SW3 are turned on. A parallel state is formed by turning off the second switch SW2. Thereby, the output of the pulse voltage to the pulse discharge load 2 and the collection | recovery of the electrical energy from the pulse discharge load 2 can be performed easily and reliably.

Further, as described above, since the charge is extracted from the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2 in the parallel state of the pulse power power supply circuit unit 3, a large amount of charge is extracted in a short time. Is possible. FIG. 5 is a diagram showing temporal changes in the current in the pulse discharge load 2 and the interelectrode voltage (that is, the output voltage from the pulse power power supply circuit unit 3 to the pulse discharge load 2). Here, the output current from the pulse power supply circuit unit 3 to the first discharge electrode 211 of the pulse discharge load 2 is positive (that is, above the current 0 in the graph), and the flow in the opposite direction is negative (that is, the graph). The current is lower than 0).

At time t1 shown in FIG. 5, when the pulse power power supply circuit unit 3 is switched to the serial state and output to the pulse discharge load 2 is started, the output voltage rises to Vin × (N + 1). At this time, a positive pulse current is supplied to the pulse discharge load 2. Thereafter, when the pulse power power supply circuit unit 3 is switched to the parallel state at time t2, the applied voltage decreases to Vin and the current rises sharply in the negative direction. That is, a large amount of charge is extracted from the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2 in a short time.

Thus, in this embodiment, a large amount of charges can be extracted from the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2 in a short time. Therefore, for example, when the discharge device 1 is applied to an ozonizer, the period during which ions existing between the discharge electrodes move to the electrodes can be shortened, so that heat generation of ions can be suppressed, and radical generation in the discharge gap 23 The rate can be improved.

As described above, according to this embodiment, it is possible to provide a discharge device with excellent energy efficiency.

(Embodiment 2)
As shown in FIGS. 6 to 9, the present embodiment is a discharge device 1 in which an attached switch series body 43 is connected in parallel to the circuit unit 4Z at the final stage.

That is, the pulse power power supply circuit unit 3 in the discharge device 1 of the present embodiment further includes a fourth switch SW4 and a fifth switch SW5 connected in series as the switch SW. In the circuit unit 4Z at the final stage, the attached switch series body 43 is connected in parallel to the switch series body 41 and the capacitor Cm. The attached switch series body 43 is a series body of the fourth switch SW4 and the fifth switch SW5.

The connection point 43M between the fourth switch SW4 and the fifth switch SW5 in the attached switch series body 43 is connected to the first discharge electrode 211 of the pulse discharge load 2.

When the electrical energy is recovered from the capacitive component of the dielectric layer 22 of the pulse discharge load 2 to the energy storage unit 31, each switch SW is controlled as shown in FIG. That is, the first switch SW1, the third switch SW3, and the fourth switch SW4 are turned on, and the second switch SW2 and the fifth switch SW5 are turned off to form a parallel state. Thereby, the voltage between the electrodes of the pulse discharge load 2 decreases.

Thereafter, when the voltage between the electrodes of the pulse discharge load 2 drops to the power supply voltage Vin of the DC power supply 5, each switch SW is controlled as shown in FIG. That is, the fourth switch SW4 is switched off and the fifth switch SW5 is switched on. The other switches SW are not switched. As a result, the first discharge electrode 211 and the second discharge electrode 212 of the pulse discharge load 2 are short-circuited.

Then, the electric charge remaining in the dielectric layer 22 of the pulse discharge load 2 is extracted, and heat is generated in the resistance component in the short circuit including the fifth switch SW5 and the series switch unit 6 (that is, the plurality of third switches SW3). Released. And the voltage between electrodes of the pulse discharge load 2 becomes substantially zero. A broken line arrow Ie in FIG. 8 indicates a current flow at this time.

Thereafter, at the timing of the next discharge, as shown in FIG. 9, the pulse power power supply circuit unit 3 is switched to the serial state, and the fourth switch SW4 is turned on and the fifth switch SW5 is turned off in the attached switch series body 43. Switch. As a result, a high voltage of Vin × (N + 1) is applied from the pulse power power supply circuit unit 3 to the pulse discharge load 2, and discharge can be generated again.

Other configurations are the same as those in the first embodiment. Of the reference numerals used in the second and subsequent embodiments, the same reference numerals as those used in the above-described embodiments represent the same components as those in the above-described embodiments unless otherwise indicated.

In the present embodiment, the charge remaining in the capacitive component C2 of the pulse discharge load 2 can be extracted even after recovery to the energy storage unit 31, and the voltage between the electrodes of the pulse discharge load 2 can be reduced to substantially zero. That is, before the next discharge, the voltage between the electrodes of the pulse discharge load 2 can be sufficiently reduced, and the voltage difference from the output voltage of the pulse power power supply circuit unit 3 can be increased. As a result, it becomes easier to cause discharge in the pulse discharge load 2.
In addition, the same effects as those of the first embodiment are obtained.

(Embodiment 3)
In the present embodiment, as shown in FIGS. 10 to 12, the pulse power power supply circuit unit 3 has an inductive component L connected in series with the pulse discharge load 2.
The inductive component L is configured to resonate with the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2. In this embodiment, the induction component L constitutes at least a part of the energy storage unit 31. In this embodiment, the capacitor Cm in each circuit unit 4 also constitutes a part of the energy storage unit 31.

Note that the inductive component L may be provided with an inductor as a component, or may be a parasitic inductance that is parasitic on wiring or other components.

The pulse power power supply circuit unit 3 transfers electric energy from the energy storage unit 31 to the pulse discharge load 2 and transfers electric energy from the pulse discharge load 2 to the energy storage unit 31 (that is, the inductive component L and the capacitor Cm). Is executed during the resonance period of the inductive component L and the capacitive component C2.

That is, the series state shown in FIG. 10 and the parallel state shown in FIG. 11 are executed once each during the resonance period in the series resonance circuit of the inductive component L and the capacitance component C2 of the dielectric layer 22. Then, the switch SW is switched.

In the series state in the pulse power supply circuit unit 3 shown in FIG. 10, a voltage of Vin × (N + 1) is applied to the pulse discharge load 2. Then, a pulse current flows so that a positive charge flows into the first discharge electrode 211 in the pulse discharge load 2. This pulse current flows through a series resonance circuit of an inductive component L and a capacitive component C2.

The pulse power power supply circuit unit 3 is switched between the series state and the parallel state at a frequency close to the resonance frequency of the series resonance circuit. Here, the switching frequency is a frequency when the interval of the switching timing from the serial state to the parallel state or the interval of the switching timing from the parallel state to the serial state is one cycle. Then, the switching frequency f1 is set to, for example, 0.8 × f0 ≦ f1 ≦ 1.2 × f0 with respect to the resonance frequency f0.

In the parallel state shown in FIG. 11, a current flowing from the first discharge electrode 211 of the pulse discharge load 2 to the second discharge electrode 212 through the pulse power power supply circuit unit 3 flows due to the resonance phenomenon of the resonance circuit. . That is, the positive charge accumulated on the first discharge electrode 211 side in the capacitive component C2 of the dielectric layer 22 moves to the second discharge electrode 212 side in the capacitive component C2 via the pulse power power supply circuit unit 3. To do.

At this time, the current branches to the capacitor Cm of the circuit unit 4 in a plurality of stages, merges again in the pulse discharge load 2, and flows into the second discharge electrode 212 side of the capacitive component C2. As a result, positive charges are charged on the second discharge electrode 212 side of the capacitive component C2.

At the same time, a part of the electric charge is recovered also in the capacitor Cm of the circuit unit 4 in a plurality of stages. In this parallel state, since the DC power supply 5 is connected to the capacitors Cm connected in parallel to each other, a charge of Cm × Vin is accumulated in each of the plurality of capacitors Cm. Here, Cm represents the value of the capacitance of the capacitor Cm. Note that the capacitance may be the same or different among the plurality of capacitors Cm. However, the capacitance Cm is required to be a level that can hold a sufficient amount of charge with respect to the discharge charge in the pulse discharge load 2.

In this way, the state is switched from the state where charges are accumulated in each part to the serial state again at a predetermined timing. Then, as shown in FIG. 12, the electric charge accumulated in the capacitors Cm of the plurality of stages of circuit units 4 is supplied to the first discharge electrode 211 of the pulse discharge load 2 (see broken line arrow Ip). At the same time, the positive charge accumulated on the second discharge electrode 212 side of the capacitive component C2 also flows into the first discharge electrode 211 side due to the resonance phenomenon (see the broken arrow Irp). The output voltage due to the flow of the former charge is Vin × (N + 1) as in the first embodiment. A voltage due to a resonance phenomenon is applied to the pulse discharge load 2 so as to be superimposed on the output voltage.

This causes discharge in the pulse discharge load 2. Even after this discharge, a positive charge remains on the first discharge electrode 211 side in the capacitive component C2 in the dielectric layer 22. This positive charge is extracted by a resonance phenomenon in the next parallel state (see FIG. 11), and similarly to the above, the plurality of capacitors Cm in the Marx circuit and the second discharge electrode in the capacitive component C2 of the dielectric layer 22 Collected on the 212 side.

As described above, in the parallel state, charges are accumulated in the capacitor Cm of the Marx circuit, and positive charges are accumulated on the second discharge electrode 212 side of the dielectric layer 22. In other words, the recovery of the positive charge toward the second discharge electrode 212 side of the dielectric layer 22 can be said to be that the electric energy due to the charge transfer is recovered as magnetic energy in the inductive component L in the resonance circuit. That is, electric energy is stored in the induction component L as a part of the energy storage unit 31.
Other configurations are the same as those of the first embodiment.

In this embodiment, electric energy can be recovered by accumulating magnetic energy in the inductive component L in the resonance circuit in addition to collecting charge in the capacitor Cm of the Marx circuit. That is, more electrical energy can be recovered before the next discharge. Therefore, the power supplied from the DC power supply 5 can be further saved. In addition, the voltage between the electrodes of the pulse discharge load 2 can be further reduced before the next discharge.
In addition, the same effects as those of the first embodiment are obtained.

(Embodiment 4)
As shown in FIGS. 13 to 15, the present embodiment is a form of the discharge device 1 in which the inductive component L shown in the third embodiment is provided in the discharge device of the second embodiment.

That is, in the discharge device 1 of this embodiment, the attached switch series body 43 is provided in the circuit unit 4Z at the final stage in the pulse power power supply circuit unit 3. In addition, the pulse power power supply circuit unit 3 has an inductive component L connected in series with the pulse discharge load 2. The inductive component L can resonate with the capacitive component C2 of the dielectric layer 22 of the pulse discharge load 2. In other words, this embodiment is a combination of the second embodiment and the third embodiment.
Other configurations are the same as those of the first embodiment.

Also in this embodiment, the induction component L constitutes at least a part of the energy storage unit 31.
In this embodiment, the series state shown in FIG. 13 and the parallel state shown in FIG. 14 are repeated. This switching frequency is set to a frequency close to the resonance frequency of the resonance circuit of the induction component L and the capacitance component C2.

In the serial state, as shown in FIG. 13, the first switch SW1 is turned off, the second switch SW2 is turned on, the third switch SW3 is turned off, the fourth switch SW4 is turned on, and the fifth switch SW5 is turned off. Thereby, it becomes a circuit equivalent to the serial state (refer FIG. 10) in Embodiment 3. FIG. As a result, a voltage of Vin × (N + 1) is applied to the pulse discharge load 2. At this time, a pulse current flows through the resonance circuit, and positive charge is supplied to the first discharge electrode 211 side of the capacitive component C2 of the dielectric layer 22.

Next, switch to the parallel state shown in FIG. As shown in the figure, the fourth switch SW4 is turned off and the fifth switch SW5 is turned on. The other switches SW are the same as in the parallel state (see FIG. 11) in the third embodiment. As a result, a closed circuit is formed in which the fifth switch SW5, the series switch unit 6, the capacitance component C2, and the induction component L are connected in series. In this state, due to the resonance phenomenon of the resonance circuit, the electric charge charged on the first discharge electrode 211 side of the capacitive component C2 is extracted, and the capacitive component C2 of the capacitive component C2 is passed through the fifth switch SW5 and the series switch unit 6. It moves to the two-discharge electrode 212 side (see broken line arrow Irc).

In the present embodiment, in the parallel state shown in FIG. 14, the charge charged on the first discharge electrode 211 side of the capacitive component C2 without passing through the capacitor Cm of the Marx circuit is used for the second discharge of the capacitive component C2. Move to the electrode 212 side. Therefore, most of the charge charged on the first discharge electrode 211 side of the capacitive component C2 can be transferred to the second discharge electrode 212 side of the capacitive component C2. At this time, electric energy is converted into magnetic energy in the inductive component L and accumulated.

Further, in this parallel state, the DC power supply 5 is connected to capacitors Cm connected in parallel to each other. Therefore, current flows from the DC power source 5 to each capacitor Cm as indicated by the broken arrow Ib. As a result, a charge of Cm × Vin is accumulated in each of the plurality of capacitors Cm. Here, Cm represents the value of the capacitance of the capacitor Cm.

Then, by switching to the next serial state (see FIG. 13), the electric charge accumulated in the capacitors Cm of the multiple-stage circuit unit 4 is supplied to the first discharge electrode 211 of the pulse discharge load 2 (broken arrow) Ip). At the same time, the positive charge accumulated on the second discharge electrode 212 side of the capacitive component C2 also flows into the first discharge electrode 211 side due to the resonance phenomenon (see the broken arrow Irp). The output voltage due to the flow of the former charge is Vin × (N + 1) as in the first embodiment. A voltage due to a resonance phenomenon is applied to the pulse discharge load 2 so as to be superimposed on the output voltage.

This causes discharge in the pulse discharge load 2. Even after this discharge, a positive charge remains on the first discharge electrode 211 side in the capacitive component C2 in the dielectric layer 22. This positive charge is extracted by the resonance phenomenon in the next parallel state (see FIG. 14), and is collected on the second discharge electrode 212 side in the capacitive component C2 of the dielectric layer 22 in the same manner as described above.

In order to temporarily stop the intermittent power supply operation to the pulse discharge load 2 as described above, the state is switched from the series state shown in FIG. 13 to the state shown in FIG. The state shown in FIG. 15 is a state in which the fifth switch SW5 is opened while the Marx circuit is in a parallel state. Thereby, a circuit equivalent to the parallel state of the third embodiment (see FIG. 11) is obtained. Then, charges are collected in the capacitors Cm of the plurality of stages of circuit units 4 and some positive charges are charged on the second discharge electrode 212 side of the dielectric layer 22.

And when starting up the discharge device 1 again, the electric energy recovered as these charges is used as a part of the next discharge power.
Other configurations are the same as those of the third embodiment.

In this embodiment, as shown in FIG. 14, the positive charge charged on the second discharge electrode 212 side can be increased, and the discharge power at the next discharge can be increased.
In addition, the same effects as those of the third embodiment are obtained.

(Embodiment 5)
In this embodiment, as shown in FIGS. 16 to 18, the pulse power power supply circuit unit 3 includes a transformer 32.
As shown in FIG. 16, the discharge device 1 of this embodiment has a circuit configuration in which a transformer 32 is connected between the Marx circuit and the pulse discharge load 2 in the discharge device of Embodiment 4.

In this embodiment, the leakage inductance of the transformer 32 is used as the inductive component Le. That is, the inductive component Le composed of this leakage inductance and the capacitance component C2 of the dielectric layer 22 of the pulse discharge load 2 constitute a resonance circuit. The switching between the serial state and the parallel state of the pulse power power supply circuit unit 3 is performed at a frequency at which the resonant circuit of the inductive component Le and the capacitive component C2 resonates, that is, near the resonant frequency.

The transformer 32 has a primary winding 321 on the Marx circuit side and a secondary winding 322 on the pulse discharge load 2 side. The output voltage from the Marx circuit can be boosted and supplied to the pulse discharge load 2 by adjusting the turns ratio of the primary winding 321 and the secondary winding 322.

Also in this embodiment, by switching the series state shown in FIG. 16 and the parallel state shown in FIG. 17 at a predetermined frequency, it is possible to collect and output electrical energy while utilizing the resonance phenomenon of the resonance circuit. it can. At the time of output, the voltage of Vin × (N + 1) in the Marx circuit is further boosted in the transformer 32. Further, a voltage corresponding to the supply of positive charges from the second discharge electrode 212 side to the first discharge electrode 211 is superimposed on the voltage after the boosting and applied to the pulse discharge load 2 by a resonance phenomenon.

When the intermittent power supply operation to the pulse discharge load 2 is temporarily stopped, the series state shown in FIG. 16 is switched to the state shown in FIG. Thereby, a circuit equivalent to the parallel state of the third embodiment (see FIG. 11) is obtained. Then, electric charges are collected in the capacitors Cm of the multi-stage circuit unit 4 and some positive charges are collected on the second discharge electrode 212 side of the dielectric layer 22.
Other configurations are the same as those of the fourth embodiment.

In this embodiment, the transformer 32 can further boost the output voltage of the Marx circuit. Therefore, a high voltage can be easily applied to the pulse discharge load 2. It is also possible to reduce the number of Marx circuit stages while maintaining the output voltage to the pulse discharge load 2.
In addition, the same effects as those of the fourth embodiment are obtained.

(Embodiment 6)
As shown in FIGS. 19 to 21, the present embodiment is a form of the discharge device 1 in which the pulse power power supply circuit unit 3 further includes a power supply protection unit 40.
That is, as shown in FIG. 19, the pulse power power supply circuit unit 3 further includes a power supply protection unit 40 interposed between the first-stage circuit unit 4 </ b> A and the positive electrode of the DC power supply 5.

The power supply protection unit 40 includes a protection diode 401, a sixth switch SW6, a capacitor Cm, a third connection portion 423, and a fourth connection portion 424. The sixth switch SW6 is a switch SW connected to the anode of the protection diode 401. The capacitor Cm is connected in parallel to the protective series body 44, which is a serial body of the protective diode 401 and the sixth switch SW6. The third connection portion 423 and the fourth connection portion 424 are connection portions between the protective series body 44 and the capacitor Cm.

The third connection portion 423 is connected to the intermediate connection point 41M of the first-stage circuit unit 4A. A third switch SW3 of the series switch unit 6 is interposed between the fourth connection portion 424 and the negative electrode of the DC power supply 5. The third switch SW3 of the series switch unit 6 is also interposed between the fourth connection portion 424 and the second connection portion 422 of the first-stage circuit unit 4A.

The discharge device 1 of the present embodiment has a configuration in which the first-stage circuit unit 4A in the discharge device 1 (see FIG. 1) of the first embodiment is replaced with a power protection unit 40. In other words, the first switch SW1 in the first-stage circuit unit 4A in the discharge device 1 (see FIG. 1) of the first embodiment is replaced with the protective diode 401. Further, the second-stage circuit unit 4B in the discharge device 1 (see FIG. 1) of the first embodiment is replaced with the first-stage circuit unit 4A.

In this embodiment, the circuit unit 4 has two stages. That is, the stage number N of the circuit unit 4 of the pulse power power supply circuit unit 3 is two. The number of stages (N + 1) of the Marx circuit including the circuit unit 4 and the power supply protection unit 40 is 3. The number of stages is not particularly limited as in the first embodiment.

In outputting the pulse voltage to the pulse discharge load 2, the pulse power power supply circuit unit 3 is switched to the serial state shown in FIG. As a result, the DC power supply 5 and (N + 1) capacitors Cm are connected in series, and a voltage of Vin × (N + 2) is applied to the pulse discharge load 2.

When recovering charges from the capacitive component of the dielectric layer 22 of the pulse discharge load 2, the pulse power power supply circuit unit 3 is placed in parallel as shown in FIG. Thereby, a current flows from the pulse discharge load 2 to the pulse power power supply circuit unit 3 until the voltage between the electrodes in the pulse discharge load 2 drops to the power supply voltage Vin (see the broken line arrow Ic). Here, a ripple current may flow from the pulse discharge load 2 to the pulse power power supply circuit unit 3. Even in this case, the ripple current is blocked by the protection diode 401 of the power supply protection unit 40. Therefore, the inflow of the ripple current to the DC power source 5 is prevented.
Other configurations are the same as those of the first embodiment.

In the present embodiment, as described above, when the electrical energy is recovered from the pulse discharge load 2 to the energy storage unit 31 of the pulse power power supply circuit unit 3, the protection diode 401 of the power protection unit 40 supplies the DC power source 5. Current backflow can be prevented. Thereby, the DC power supply 5 can be protected. In addition, it is possible to prevent the ripple current from flowing into other devices connected to the DC power source 5 and to protect other devices.
In addition, the same effects as those of the first embodiment are obtained.

The present disclosure is not limited to the above embodiments, and can be applied to various embodiments without departing from the scope of the disclosure.

Although the present disclosure has been described based on the embodiment, it is understood that the present disclosure is not limited to the embodiment or the structure. The present disclosure includes various modifications and modifications within the equivalent range. In addition, various combinations and forms, as well as other combinations and forms including only one element, more or less, are within the scope and spirit of the present disclosure.

Claims

A first discharge electrode (211) and a second discharge electrode (212); and a dielectric layer (22) disposed on an inner surface of at least one of the first discharge electrode and the second discharge electrode. A provided pulse discharge load (2);
A discharge device (1) having a pulse power power supply circuit section (3) for periodically outputting a pulse voltage to the pulse discharge load,
The pulse power power supply circuit unit (3) has an energy storage unit (31) capable of storing electrical energy,
The pulse power power supply circuit unit is a discharge device configured to reversibly move electrical energy between the energy storage unit and the pulse discharge load.
The pulse power power supply circuit unit includes a plurality of capacitors (Cm) and a plurality of switches (SW), and a plurality of capacitors connected in series by switching on and off the plurality of switches, Of the capacitors connected in parallel to each other, and the pulse voltage is output to the pulse discharge load in the series state, and the pulse is output in the parallel state. The discharge device according to claim 1, wherein the discharge device is configured to recover electric energy from a capacitance component (C2) of the dielectric layer of the discharge load to the energy storage unit.
The pulse power power supply circuit unit includes a plurality of circuit units (4) connected to each other, a DC power supply (5) having a positive electrode connected to the first circuit unit, and the circuit unit (4) in the final stage. 4Z) and a series switch unit (6) connected between the negative electrode of the DC power source,
As the plurality of switches, a first switch (SW1) and a second switch (SW2) belonging to the circuit unit, and a third switch (SW3) belonging to the series switch unit,
The circuit unit includes a switch series body (41) in which the first switch and the second switch are connected in series to each other at an intermediate connection point (41M), and the capacitor connected in parallel to the switch series body, As a connection part between the switch series body and the capacitor, the first connection part (421) and the second connection part (422),
The series switch unit is formed by connecting a plurality of the third switches in series with each other,
The first connection portion of the circuit unit at the final stage is connected to the first discharge electrode of the pulse discharge load;
The negative electrode of the DC power source and one end of the series switch unit are connected to each other and connected to the second discharge electrode of the pulse discharge load,
The positive terminal of the DC power source is connected to the intermediate connection point of the circuit unit (4, 4A) in the first stage,
The first connection portion of the (k−1) -th stage circuit unit is connected to the intermediate connection point of the k-th stage circuit unit,
K is a natural number of 2 or more,
The third switch in the series switch unit is interposed between the second connection portion of the circuit unit at the k-th stage and the second connection portion of the circuit unit at the (k−1) -th stage. And
3. The discharge device according to claim 2, wherein the third switch in the series switch unit is interposed between the second connection portion of the circuit unit at the first stage and the negative electrode of the DC power supply.
By turning off the first switch and the third switch and turning on the second switch, the series state is formed, and the first switch and the third switch are turned on and the second switch is turned on. The discharge device according to claim 3, wherein the parallel state is formed by turning off the power supply.
The pulse power power supply circuit unit further includes a fourth switch (SW4) and a fifth switch (SW5) connected in series as the switch, and the circuit unit in the final stage includes the switch series body and the capacitor In addition, an attached switch series body (43) which is a series body of the fourth switch and the fifth switch is connected in parallel, and the connection between the fourth switch and the fifth switch in the attached switch series body is performed. The discharge device according to claim 3 or 4, wherein the point (43M) is connected to the first discharge electrode of the pulse discharge load.
When recovering electrical energy from the capacitive component of the dielectric layer of the pulse discharge load to the energy storage unit, the first switch, the third switch, and the fourth switch are turned on and The second switch and the fifth switch are turned off to form the series state, and then the fourth switch is turned off when the interelectrode voltage of the pulse discharge load drops to the power supply voltage of the DC power supply. 6. The discharge device according to claim 5, wherein the discharge device is configured to short-circuit the first discharge electrode and the second discharge electrode of the pulse discharge load by switching on the fifth switch. .
The pulse power power circuit unit further includes a power protection unit (40) interposed between the circuit unit at the first stage and the positive electrode of the DC power source,
The power protection unit includes a protection diode (401), a sixth switch (SW6) that is the switch connected to the anode of the protection diode, and a series body of the protection diode and the sixth switch. The capacitor connected in parallel to a certain protective series body (44), and a third connection part (423) and a fourth connection part (424) which are connection parts of the protective series body and the capacitor are provided. And
The third connection portion is connected to the intermediate connection point of the circuit unit at the first stage, and the third switch of the series switch unit is connected between the fourth connection portion and the negative electrode of the DC power supply. The third switch of the series switch unit is interposed between the fourth connection portion and the second connection portion of the first-stage circuit unit. The discharge device according to claim 1.
The pulse power power supply circuit unit has an inductive component (L) connected in series with the pulse discharge load, and the inductive component is configured to resonate with a capacitive component of the dielectric layer of the pulse discharge load. The discharge device according to any one of claims 1 to 7, wherein the inductive component constitutes at least a part of the energy storage unit.
The pulse power power supply circuit unit transfers the electric energy from the energy storage unit to the pulse discharge load and the electric energy transfer from the pulse discharge load to the energy storage unit. The discharge device according to claim 8, wherein the discharge device is configured to be executed during a resonance period of.