WO2019188246A1

WO2019188246A1 - Electrical standard

Info

Publication number: WO2019188246A1
Application number: PCT/JP2019/009968
Authority: WO
Inventors: 清文久保
Original assignee: 日本電産リード株式会社
Priority date: 2018-03-30
Filing date: 2019-03-12
Publication date: 2019-10-03
Also published as: JP7281640B2; JPWO2019188246A1

Abstract

This electrical standard 10 is provided with a coaxial cable 1 having a core wire 11 and an external conductor 12, a resistor 2 connected at one end in series with the core wire 11, and a baseplate 3 having an opening 31 through which the core wire 11 is passed. The base end of a conductor tube 5 surrounding the coaxial cable 1 is attached to a first surface 3a of the baseplate 3. The core wire 11 is guided from the side of a second surface 3b of the baseplate 3 to pass through the opening 31 and into the conductor tube 5. The resistor 2 is arranged on the second surface 3b side, and the conductor tube 5 is conductively connected to the other end of the resistor 2 located on the second surface 3b side. The external conductor 12 is introduced into the conductor tube 5 from the leading end side of the conductor tube 5, and is arranged so as to fit over the core wire 11 positioned on the first surface 3a side; the electrostatic capacitance C4 occurring between the core wire 11 and the conductor tube 5 can be adjusted by sliding displacement of the baseplate 3 and the conductor tube 5 in the axial direction of the coaxial cable 1.

Description

Electrical standard

The present invention relates to an electrical standard used for calibrating a substrate inspection apparatus or the like.

2. Description of the Related Art Conventionally, a substrate inspection apparatus provided with a measurement circuit for measuring resistance has been known which includes a standard device (reference resistor) having a known resistance for use in calibration of the measurement circuit (for example, , See Patent Document 1). Patent Document 1 discloses that a measurement unit (measurement circuit) can measure an electrical resistance value by a four-terminal method, connects a pin terminal to one end of a standard reference resistor, and connects the other end of the reference resistor. Connect the pin terminal to the terminal, and connect the reference resistor to the measurement circuit via the pin terminal, measure the electric resistance value, and calculate the difference between this measured value and the known electric resistance value. Describes that the measurement circuit is calibrated.

JP-A-2015-55516

By the way, when the inspection target of the inspection device is a capacitive touch panel that senses the touched position by sensing the change in capacitance that occurs when a finger touches the screen, or a capacitor on the inner layer of the board In the case of a component-embedded substrate with a built-in component, an electric circuit including a reference resistor having an electric resistance value corresponding to the electric resistance value to be inspected and a reference capacitor having an electrostatic capacity corresponding to the inspection object It is necessary to use a standard device.

However, in order to create an electrical standard having an electrical resistance value and a capacitance corresponding to a test object by combining the above-described reference resistor and reference capacitor, the reference resistor having various electrical resistance values is used. And reference capacitors having various electrostatic capacities must be prepared in advance, and trial and error must be performed in various combinations. Therefore, it has been extremely difficult to produce an electrical standard having an appropriate electrical resistance value and capacitance.

An object of the present invention is to provide an electrical standard that makes it easy to obtain appropriate electrical resistance and capacitance.

An electrical standard device according to an example of the present invention includes a coaxial cable having a core wire and an outer conductor, a resistor having one end connected in series to the core wire, and a base plate having an opening through which the core wire is inserted. A conductor tube surrounding the coaxial cable is disposed on the first surface side of the base plate, and the core wire is inserted into the conductor tube from the second surface side of the base plate through the opening. The resistor is disposed on the second surface side of the base plate, and the conductor tube is conductively connected to the other end of the resistor located on the second surface side of the base plate, and the external conductor Is introduced into the conductor tube from the distal end side of the conductor tube, and is installed so as to be externally fitted to the core wire located on the first surface side of the base plate. Configured to be position adjustable along the axial direction of the coaxial cable To have.

It is a perspective view which shows simply the composition of the electric standard concerning the present invention. It is a conceptual diagram which shows simply the structure of the electrical standard device shown in FIG. FIG. 3 is a cross-sectional view of the electrical standard device shown in FIG. 2 taken along line III-III. FIG. 3 is an equivalent circuit diagram equivalently showing an electric circuit of the electric standard device shown in FIG. 2.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted.

FIG. 1 is a perspective view schematically showing a configuration of an electric standard according to the present invention. 2 is a conceptual diagram schematically showing the configuration of the electric standard 10 shown in FIG. 1, FIG. 3 is a cross-sectional view taken along the line III-III of the electric standard 10 shown in FIG. 2, and FIG. 4 is shown in FIG. 2 is an equivalent circuit diagram equivalently showing an electrical circuit of the electrical standard 10. FIG. 2 and 4 show a state in which the measuring apparatus 100 for measuring the electrical characteristics of the electrical standard 10 is connected to the electrical standard 10.

The electrical standard 10 includes a coaxial cable 1 having a core wire 11 and an outer conductor 12, a resistor 2 having one end 2a connected in series to the core wire 11, and a base plate 3 having an opening 31 through which the core wire 11 is inserted. A housing case 4 for housing the coaxial cable 1, the resistor 2 and the base plate 3.

As shown in FIGS. 2 and 3, the housing case 4 includes a bottom plate 41 having a predetermined width extending in the installation direction of the coaxial cable 1, a pair of side plates 42 erected on the side portions thereof, and both end portions of the bottom plate 41. A case main body having a pair of end plates 43 erected, and a lid body (not shown) that covers the upper surface portion of the case main body.

A first BNC connector 45 to which the outer conductor 12 of the coaxial cable 1 is connected is provided at one end of the bottom plate 41 located on the right side of FIG. 2 is provided with a second BNC connector 46 to which the other end 2b of the resistor 2 is connected via a connection line 13 to be described later. The BNC connector means a bayonet lock connection type coaxial connector.

The base plate 3 is disposed in a state of being erected between the side plates 42 of the storage case 4 and is slidable along the bottom plate 41 of the storage case 4 by a material having electrical insulation. ing. The opening 31 formed in the base plate 3 has an opening diameter larger than the outer diameter of the core wire 11 by a predetermined value or more. Thereby, the core wire 11 inserted through the opening 31 is configured to be displaceable in a direction orthogonal to the axial direction of the core wire 11 in the opening 31 as shown by an arrow A in FIG.

A base end portion of a conductor tube 5 made of a conductor such as a brass pipe is attached to the first surface 3a of the base plate 3, that is, the wall surface located on the right side in FIG. The conductor tube 5 is formed of a cylindrical body having an open end, and a flange portion (not shown) provided at the base end portion of the conductor tube 5 is bolted to the first surface 3 a of the base plate 3. Is installed so as to surround the coaxial cable 1. Note that the conductor tube 5 is disposed away from the base plate 3, and the base plate 3 and the conductor tube 5 may be connected by, for example, a thin metal rod or the like.

The coaxial cable 1 includes a semi-rigid cable including a core wire 11 made of a copper wire, an outer conductor 12 made of a small-diameter copper pipe, and an insulator made of fluorine resin or the like disposed between the two. Yes. This semi-rigid cable is made of, for example, a trade name “SUCOFLEX100 series” manufactured by Hayashi Eiki Co., Ltd., and has a foldable flexibility and a rigidity for maintaining the folded shape.

The core wire 11 of the coaxial cable 1 is installed so as to extend from the one end 2 a of the resistor 2 toward the one end portion side of the bottom plate 41, that is, the end portion side located on the first surface 3 a side of the base plate 3. Has been. And the front-end | tip of the core wire 11 penetrates the opening part 31 of the base board 3, and is inserted in the below-mentioned external conductor 12 located in the 1st surface 3a side of the base board 3. FIG.

The resistor 2 includes a lead wire type resistor in which lead wires are led out from both ends of the resistor body, and one end 2a of the resistor 2 is connected in series to the core wire 11 on the second surface 3b side of the base plate 3. ing. The resistor 2 constitutes a reference resistor having a predetermined electric resistance value R. In addition, the other end 2 b of the resistor 2 is connected to a second BNC connector 46 provided on the other end side of the housing case 4 via the connection line 13.

The outer conductor 12 of the coaxial cable 1 has a rising portion 12a rising from a first BNC connector 45 provided on one end side of the bottom plate 41 of the housing case 4 and an upper end portion thereof toward the other end portion side of the housing case 4. And an extending portion 12b extending.

The extending portion 12 b of the outer conductor 12 is introduced into the conductor tube 5 from the distal end side of the conductor tube 5 and is externally fitted to the core wire 11 located on the first surface 3 a side of the base plate 3. Is installed. The core wire 11 and the extending portion 12b of the outer conductor 12 constitute a first capacitor having a certain capacitance C1.

Further, on the second surface 3b of the base plate 3, that is, the wall surface located on the left side in FIG. The electrode 32 is connected to the circuit ground via a connection line 33.

The second capacitor capable of adjusting the capacitance C2 is formed by the core wire 11 installed so as to be inserted through the opening 31 of the base plate 3 and the annular electrode 32. That is, since the electrostatic capacitance of the capacitor is inversely proportional to the facing distance, the operator displaces the extending portion 11b of the core wire 11 in a direction orthogonal to the axial direction of the core wire 11, thereby An electrostatic capacitance C2 generated therebetween is configured to be adjustable.

Furthermore, the conductor tube 5 is conductively connected to the other end 2 b of the resistor 2 through a connection line 51. The conductor tube 5 and the extended portion 12b of the outer conductor 12 inserted into the conductor tube 5 form a third capacitor capable of adjusting the capacitance C3. The conductor tube 5 and the core wire 11 form a fourth capacitor capable of adjusting the capacitance C4.

That is, since the capacitance of the capacitor is proportional to the facing area, the operator slides and displaces the base plate 3 along the inner wall surface of the housing case 4, and as shown by the arrow B in FIG. 5 is displaced in the axial center direction of the coaxial cable 1, thereby electrostatic capacitance C 3 generated between the extending portion 12 b of the outer conductor 12 and the conductor tube 5 and static electricity generated between the core wire 11 and the conductor tube 5. The electric capacity C4 is configured to be adjustable.

The measuring apparatus 100 includes a detection circuit 6 including an AC power supply 61 and an ammeter 62, and a measuring unit 7. The measurement unit 7 includes, for example, an impedance measuring instrument that measures electrical characteristics such as resistance of a conductor pattern provided on a substrate and capacitance between conductor patterns.

Next, an adjustment method for setting the electric characteristics of the electric standard 10 to an appropriate value will be described below.

First, the detection circuit 6 of the measuring apparatus 100 and the electrical standard device 10 provided with the resistor 2 are connected via BNC

coaxial cables

63 and 64 each provided with a BNC connector. Next, an alternating current signal of a predetermined voltage is passed from the alternating current power supply 61 between the connection line 13 of the electric standard 10 and the external conductor 12, and the current value is detected by the ammeter 62.

The measurement unit 7 measures the resistance value R of the RC series circuit equivalent to the electric standard 10 and the capacitance C based on the voltage of the AC signal and the detection value of the ammeter 62, and the measurement value is omitted. Displayed on the display device.

The operator displaces the core wire 11 in a direction orthogonal to the axial direction so that the electric resistance value R and the electrostatic capacitance C measured by the measuring unit 7 become desired values, and the electrostatic capacitance. C2 is changed, or the base plates 3 are slid along the inner wall surface of the housing case 4 to change the capacitances C3 and C4. In this way, the electrical characteristics of the electrical standard 10 can be adjusted to a desired value.

When the electrical characteristics of the electrical standard 10 reach a desired value, the operator does not change the capacitance C of the electrical standard 10 by bonding the base plate 3 to the housing case 4 or screwing. Secure to.

According to the electrical standard 10 having the above-described configuration, trial and error such as preparing reference resistors having various electric resistance values and reference capacitors having various capacitances in advance and combining them in various ways. Without performing, it is possible to easily obtain the electrical standard 10 having the appropriate electrical resistance value R and capacitance C.

That is, the coaxial cable 1 having the core wire 11 and the outer conductor 12, the resistor 2 having one end 2 a connected in series to the core wire 11, and the base plate 3 having the opening 31 through which the core wire 11 is inserted are provided. A base end portion of a conductor tube 5 surrounding the coaxial cable 1 is attached to the first surface 3 a side of the base plate 3, and the core wire 11 passes through the opening 31 from the second surface 3 b side of the base plate 3. The structure is introduced into the conductor tube 5.

As a result, the operator slides and displaces the base plate 3 and the conductor tube 5 along the axial direction of the coaxial cable 1, so that the electrostatic capacitance C <b> 3 generated between the outer conductor 12 and the core wire 11 and the conductor tube 5. , C4 can be adjusted, the capacitance C of the electric standard 10 can be easily adjusted to a value suitable for the inspection object. Therefore, it is possible to easily obtain the electric standard 10 having the desired electric resistance value R and the capacitance C.

Further, as described above, the electrode 32 surrounding the opening 31 was installed on the base plate 3. As a result, the operator can adjust the capacitance C2 generated between the core wire 11 and the electrode 32 by displacing the core wire 11 in a direction orthogonal to the axial direction. There is an advantage that the capacitance C of the electric standard 10 can be adjusted in a wider range by changing the capacitances C2, C3, and C4.

Further, when the coaxial cable 1 is configured by a semi-rigid cable having flexibility that can be bent and rigidity that maintains the bent shape as in the above-described embodiment, an operator uses a tool or the like. The coaxial cable 1 can be easily bent without any manual work. As a result, there is an advantage that the capacitance C2 generated between the core wire 11 of the coaxial cable 1 and the electrode 32 can be easily adjusted. In addition, after the adjustment of the capacitance C2, there is also an advantage that the above bent shape can be easily and appropriately held without requiring a shape retaining operation using a shape retaining tool or the like.

Furthermore, when the opening diameter of the opening portion 31 formed in the base plate 3 is set to a value larger than the outer diameter of the core wire 11 by a predetermined value or more, the operator makes the core wire 11 orthogonal to the axial direction. When the capacitance C2 is adjusted by being displaced in the direction, a sufficient amount of displacement of the core wire 11 can be ensured. As a result, the capacitance C2 generated between the core wire 11 and the electrode 32 can be adjusted over a wide range.

Further, according to the configuration in which the base plate 3 is slidably supported along the inner wall surface of the housing case 4 as described above, the operator slides and displaces the base plate 3 so that the external conductor 12 and the conductor tube 5 are slid. It is possible to easily adjust the capacitance C3 generated between and the capacitance C4 generated between the core wire 11 and the conductor tube 5. Moreover, after adjusting the capacitances C3 and C4, there is an advantage that the values of the capacitances C3 and C4 can be stably held by fixing the base plate 3 to the housing case 4.

The electric standard 10 having the above-described configuration includes, for example, a touch panel substrate, a printed wiring substrate, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display and a plasma display, a package substrate for a semiconductor package, a film carrier, and the like. It can be suitably used as a reference device for calibrating an inspection apparatus or a measurement apparatus for inspecting a measurement object having a resistance value and a capacitance value, such as a substrate made of

That is, an electrical standard device according to an example of the present invention includes a coaxial cable having a core wire and an outer conductor, a resistor having one end connected in series to the core wire, and a base plate having an opening through which the core wire is inserted. A conductor tube surrounding the coaxial cable is disposed on a first surface side of the base plate, and the core wire is inserted into the conductor tube from the second surface side of the base plate. The resistor is disposed on the second surface side of the base plate, and the conductor tube is conductively connected to the other end of the resistor located on the second surface side of the base plate, The outer conductor is introduced into the conductor tube from the distal end side of the conductor tube, and is installed so as to be externally fitted to the core wire located on the first surface side of the base plate. The base plate and the conductor tube are Adjustable position along the axial direction of the coaxial cable It is configured.

According to this configuration, the operator can adjust the capacitance generated between the core wire and the conductor tube by sliding the base plate and the conductor tube along the axial direction of the coaxial cable. . As a result, the capacitance of the electric standard can be adjusted to a value suitable for the inspection object. Therefore, an electrical standard having an electrical resistance value corresponding to the above-described resistor and a predetermined capacitance can be easily obtained.

The base plate is provided with an electrode that surrounds the opening, and the capacitance generated between the core wire and the electrode is caused by the core wire being displaced in a direction perpendicular to the axial direction. It is preferably configured to be adjustable.

According to this configuration, the operator can adjust the capacitance generated between the core wire and the electrode of the base plate by displacing the core wire of the coaxial cable in a direction orthogonal to the axial direction. . Therefore, there is an advantage that the capacitance of the electric standard device can be adjusted in a wider range by changing both the capacitance and the capacitance generated between the core wire and the conductor tube.

The coaxial cable is preferably a semi-rigid cable.

According to this configuration, the operator can easily bend the coaxial cable manually without using a tool or the like. Accordingly, the electrostatic capacity generated between the core wire and the electrode can be easily adjusted, and after the electrostatic capacity adjustment, the above-described bent shape can be easily and easily performed without requiring a shape-retaining operation using a shape retainer or the like. There is an advantage that it can be held properly.

Moreover, it is preferable that the opening has an opening diameter larger than the outer diameter of the core wire by a predetermined value or more.

According to this configuration, when the operator displaces the core wire in the direction orthogonal to the axial direction of the core wire and adjusts the capacitance generated between the core wire and the electrode, a sufficient amount of displacement of the core wire is ensured. can do. Therefore, there is an advantage that the electrostatic capacitance generated between the core wire and the electrode can be adjusted over a wide range.

Further, it is preferable that a housing case for housing the coaxial cable, the resistor, and the base plate is further provided, and the base plate is slidably supported along an inner wall surface of the housing case.

According to this configuration, the operator can easily perform the operation of adjusting the capacitance generated between the core wire or the like and the conductor tube by sliding the base plate along the inner wall surface of the housing case. it can. In addition, after adjusting the capacitance, there is an advantage that the capacitance value can be stably held by fixing the base plate to the housing case.

An electric standard having such a configuration can easily and appropriately adjust its electric resistance value and capacitance.

This application is based on Japanese Patent Application No. 2018-069716 filed on Mar. 30, 2018, the contents of which are included in the present application. It should be noted that the specific embodiments or examples made in the section for carrying out the invention are merely to clarify the technical contents of the present invention, and the present invention is not limited to such specific examples. It should not be interpreted in a narrow sense only as a limitation.

DESCRIPTION OF SYMBOLS 1 Coaxial cable 2 Resistor 3 Base board 4 Housing case 5 Conductor tube 6 Detection circuit 7 Measuring part 10 Electrical standard 11 Core wire 12 External conductor 13 Connection line 31 Opening part 32 Electrode 33 Wiring cable 41 Bottom plate 42 Side plate 43 End plate 45 1st One BNC connector 46 Second BNC connector 51 Connection line 61 AC power supply 62

Ammeter

63, 64 Coaxial cable 100 Measuring device

Claims

A coaxial cable having a core wire and an outer conductor;
A resistor having one end connected in series to the core wire;
A base plate having an opening through which the core wire is inserted;
On the first surface side of the base plate, a conductor tube surrounding the coaxial cable is disposed,
The core wire is introduced into the conductor tube through the opening from the second surface side of the base plate,
The resistor is disposed on the second surface side of the base plate,
The conductor tube is conductively connected to the other end of the resistor located on the second surface side of the base plate,
The external conductor is introduced into the conductor tube from the leading end side of the conductor tube, and is installed so as to be externally fitted to the core wire located on the first surface side of the base plate,
An electrical standard device in which the base plate and the conductor tube are configured to be position-adjustable along the axial direction of the coaxial cable.
The base plate is provided with an electrode surrounding the opening,
The electric standard according to claim 1, wherein electrostatic capacity generated between the core wire and the electrode is adjustable by displacing the core wire in a direction orthogonal to the axial direction.
The electrical standard according to claim 2, wherein the coaxial cable is configured by a semi-rigid cable.
The electrical standard according to claim 2 or 3, wherein the opening has an opening diameter larger than the outer diameter of the core wire by a predetermined value or more.
A housing case for housing the coaxial cable, the resistor, and the base plate;
The electric standard according to any one of claims 1 to 4, wherein the base plate is slidably supported along an inner wall surface of the housing case.