WO2019181420A1 - Borne de contact, gabarit d'inspection comprenant une borne de contact, et procédé de fabrication de borne de contact - Google Patents

Borne de contact, gabarit d'inspection comprenant une borne de contact, et procédé de fabrication de borne de contact Download PDF

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Publication number
WO2019181420A1
WO2019181420A1 PCT/JP2019/007863 JP2019007863W WO2019181420A1 WO 2019181420 A1 WO2019181420 A1 WO 2019181420A1 JP 2019007863 W JP2019007863 W JP 2019007863W WO 2019181420 A1 WO2019181420 A1 WO 2019181420A1
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WIPO (PCT)
Prior art keywords
rod
contact terminal
main body
shaped main
cylindrical body
Prior art date
Application number
PCT/JP2019/007863
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English (en)
Japanese (ja)
Inventor
清 沼田
憲宏 太田
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日本電産リード株式会社
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Application filed by 日本電産リード株式会社 filed Critical 日本電産リード株式会社
Priority to JP2020507479A priority Critical patent/JPWO2019181420A1/ja
Publication of WO2019181420A1 publication Critical patent/WO2019181420A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer

Definitions

  • the present invention relates to a contact terminal used for inspecting a substrate or the like, an inspection jig provided with the contact terminal, and a method for manufacturing the contact terminal.
  • a contact terminal including a contact pin including a linear contact and a guide is known in a cylinder having a spring portion (spring) formed on a part of a peripheral wall (for example, , See Patent Document 1).
  • the spring portion of the cylindrical body since the inspection current is passed through the spring portion of the cylindrical body, the spring portion generates heat when a large current for inspection is applied. Due to this, the function as the contact terminal may be impaired due to plastic deformation or fusing of the cylindrical body.
  • An object of the present invention is to provide a contact terminal, an inspection jig, and a method for manufacturing a contact terminal that can reduce the possibility that the function as the contact terminal is impaired even when a large current for inspection is applied. That is.
  • a contact terminal includes a pair of central conductors each formed in a rod shape from a conductive material, and a cylindrical body that holds the pair of central conductors, and the cylindrical body is a spiral.
  • a pair of central conductors installed in a state of being inserted into the cylindrical body, and a connection installed in a state of protruding outside the cylindrical body
  • at least one of the pair of central conductors is provided with a conductive flexible body having conductivity and flexibility on a distal end surface of the rod-shaped body, and the pair of central conductors is
  • the distal end surfaces of the rod-shaped main bodies inserted into the cylindrical body have an axial length that can be conductively connected via the conductive flexible body.
  • an inspection jig includes the above-described contact terminal and a support member that supports the contact terminal.
  • the contact terminal manufacturing method includes a center conductor forming step of forming a center conductor provided with a rod-shaped main body from a conductive material, and a photoresist layer is formed on the outer peripheral surface of the rod-shaped main body.
  • a photoresist layer forming step a carrier layer disposing step of disposing a catalyst supporting carrier layer on the surface of the rod-shaped main body including the tip surface of the rod-shaped main body, and a catalyst for generating carbon nanotubes supported on the carrier layer
  • a catalyst supporting step a photoresist layer removing step of removing the photoresist layer together with the carrier layer and the catalyst formed on the outer peripheral surface of the rod-shaped body, and the presence of the catalyst on the tip surface of the rod-shaped body.
  • a conductive flexible body forming step of forming a conductive flexible body made of an aggregate of carbon nanotubes by chemical vapor deposition of a plurality of carbon nanotubes.
  • FIG. 14 is a perspective view showing a manufacturing process of the conductive flexible body shown in FIG. 13.
  • FIG. 1 is a front view showing a specific configuration of the contact terminal 10 according to the present invention
  • FIG. 2 is a perspective view showing the configuration of the conductive flexible body 4
  • FIG. 3 is a process showing a manufacturing process of the contact terminal 10.
  • FIG. 4 and FIG. 4 are explanatory views showing the manufacturing process of the contact terminal 10.
  • FIG. 5 is a cross-sectional view illustrating a specific configuration of the inspection jig 3 including the contact terminal 10 illustrated in FIG. 1
  • FIG. 6 is a cross-section illustrating a state where the base plate 321 is attached to the support member 31 of the inspection jig 3.
  • 7 is a cross-sectional view showing an inspection state in which the contact terminal 10 is press-contacted to the inspection object
  • FIG. 8 is an explanatory diagram of an energization state of the contact terminal 10 according to the present invention
  • FIG. 9 is a contact according to a comparative example. It is explanatory drawing of the energization state of a terminal.
  • the contact terminal 10 is formed into a cylindrical shape by a first center conductor 1a and a second center conductor 1b formed in a rod shape with a circular cross section by a conductive material such as tungsten, and a conductive material such as nickel or nickel alloy.
  • the formed cylindrical body 2 is provided.
  • the cylindrical body 2 does not necessarily need to be formed with the raw material which has electroconductivity, and may be formed with the nonelectroconductive member.
  • a spring portion 21 made of a spiral body that extends and contracts in the axial direction of the cylindrical body 2 is formed over a predetermined length in a portion excluding both ends of the cylindrical body 2.
  • the spring portion 21 extending spirally along the peripheral surface of the cylindrical body 2 is formed by irradiating the peripheral wall of the cylindrical body 2 with laser light from a laser processing machine (not shown) to form the spiral groove 22. Can be formed.
  • the spiral spring part 21 which consists of a spiral body by etching the surrounding wall of the cylindrical body 2, for example, and forming the spiral groove 22.
  • the spiral spring part 21 can also be formed, for example by electroforming.
  • the first central conductor 1a is a rod-shaped main body 11 having a circular cross section that is installed in a state where it is inserted into the cylindrical body 2, a flange 12 provided at the base end thereof, and a continuous connection to the flange 12. And a connecting portion 13 having a circular cross section that is installed in a state of protruding outside the cylindrical body 2. Further, a conductive flexible body 4 having conductivity and flexibility is provided on the distal end surface of the first central conductor 1a, that is, the distal end surface of the rod-shaped main body 11.
  • a carrier layer 42 on which a catalyst 43 for generating carbon nanotubes 40 to be described later is supported is disposed on the distal end surface of the first central conductor 1a, that is, the distal end surface of the rod-shaped main body 11.
  • the carrier layer 42 is formed in a film shape having a thickness of about 10 ⁇ m with an aluminum alloy or the like, and is fixed to the tip surface of the rod-like main body 11 by means such as vapor deposition.
  • the catalyst 43 is formed in a film shape having a thickness of about 1 ⁇ m with iron or the like, and is fixed to the surface of the carrier layer 42 by means such as vapor deposition.
  • the conductive flexible body 4 is formed by using a well-known CVD apparatus, that is, an apparatus for forming a thin film by chemically changing and depositing a gas on a heated substrate. It consists of an aggregate of CNTs 40 produced by chemical vapor deposition of a plurality of multi-walled carbon nanotubes (hereinafter referred to as CNTs) 40.
  • the CNT40 has an outer diameter of 1 nm to 20 nm and a standing length of 20 ⁇ m to 500 ⁇ m.
  • the conductive flexible body 4 constituted by the aggregate of the CNTs 40 has excellent conductivity and moderate flexibility and shape retention. Thereby, the conductive flexible body 4 is configured to be able to pass a current for inspection at the time of an inspection to be described later, and to be bent in the axial direction of the first central conductor 1a.
  • the manufacturing method of the contact terminal 10 includes a center conductor forming step K1 for forming the first center conductor 1a including the rod-shaped main body 11 from a material having conductivity and heat resistance, and (a As shown in FIG. 4B, an F layer forming step K2 for forming a photoresist layer (hereinafter referred to as F layer) 41 on the outer peripheral surface of the rod-shaped main body 11 of the first central conductor 1a, as shown in FIG.
  • the carrier layer disposing step K3 for disposing the catalyst supporting carrier layer 42 on the surface of the rod-like main body 11 including the tip surface of the rod-like main body 11, and as shown in FIG.
  • Sea urchin, and a conductive flexible forming step a plurality of CNT40 grown chemical vapor to form a conductive flexible member 4 on the distal end surface of the rod-like body 11 K6.
  • the first center conductor 1a including the rod-shaped main body 11 having a predetermined length, the flange portion 12 and the connecting portion 13 is formed of a conductive material such as tungsten.
  • the F layer forming step K2 as shown in FIG. 4A by spraying a masking material that can be dissolved by a peeling solvent made of acetone or the like, for example, a resist ink or the like on the outer peripheral surface of the rod-shaped body 11.
  • An F layer 41 having a thickness of about several ⁇ m is formed.
  • the F layer 41 When forming the F layer 41, it is necessary to take care that the masking material does not adhere to the tip surface of the rod-shaped main body 11. In addition, after forming the F layer 41 on the outer peripheral surface of the rod-shaped main body 11, the masking material adhering to the tip surface of the rod-shaped main body 11 is removed, or the tip portion of the rod-shaped main body 11 is cut off to thereby remove the tip of the rod-shaped main body 11. The surface may be exposed.
  • a carrier layer for supporting the catalyst for example, by depositing an aluminum alloy on the surface of the rod-like main body 11 including the tip surface of the rod-like main body 11. 42 is disposed.
  • the catalyst supporting step K4 as shown in FIG. 4C, the catalyst 43 for CNT generation is supported by evaporating iron on the carrier layer 42 or the like.
  • the F layer 41 is dissolved by using a solvent such as acetone, thereby forming a carrier layer formed on the outer peripheral surface of the rod-shaped main body 11.
  • the F layer 41 is removed together with 42 and the catalyst 43.
  • the carrier layer 42 and the catalyst 43 covering the surface of the F layer 41 are formed so that the film thickness is extremely thin and the eyes are rough. For this reason, there is no problem in the dissolving action of the F layer 41 by the solvent. Therefore, the carrier layer 42 and the catalyst 43 formed on the outer peripheral surface of the rod-shaped main body 11 are removed together with the F layer 41, so that the carrier layer 42 and the catalyst 43 are disposed only on the tip surface of the rod-shaped main body 11. (Refer to FIG. 4D).
  • a hydrocarbon containing carbon especially lower hydrocarbons such as methane, ethane, propane, ethylene, propylene, acetylene, etc. are injected into a CVD apparatus (not shown), Heat to a temperature of 500 ° C. or higher.
  • a plurality of single-layer or multi-layer CNTs 40 can be collectively subjected to chemical vapor deposition.
  • assembly of CNT40 stood on the front end surface of the rod-shaped main body 11 is formed (refer (e) of FIG. 4).
  • the atmospheric pressure of the reaction is preferably 10 2 Pa or more and 10 7 Pa or less, more preferably 10 4 Pa or more and 3 ⁇ 10 5 Pa or less, and further preferably 5 ⁇ 10 4 Pa or more and 9 ⁇ It is particularly preferable that the pressure be 10 4 Pa or less.
  • the CNT 40 is formed by various cutting means such as laser processing using a laser processing machine or machining using a cutter blade, milling apparatus using argon ions, oxygen ions, or the like.
  • the tip part of each CNT40 which comprises the electroconductive flexible body 4 is disjoint etc., this is cut out and the front-end
  • the contact area with the second central conductor 1b is increased, so that the contact resistance is reduced.
  • an aluminum alloy such as alumina having many voids was used as the carrier layer 42 of the catalyst 43 made of iron.
  • the iron particles granulated to a predetermined diameter are held in a proper state on the tip surface of the rod-shaped main body 11 while being reduced by being heated to a high temperature of about 800 ° C.
  • an aluminum alloy as the carrier layer 42 of the catalyst 43, the growth rate of the CNT 40 can be increased and the growth of the CNT 40 can be promoted, and the adhesion of the catalyst 43 to the rod-shaped main body 11 serving as the base material is improved. Can be made.
  • the carrier layer 42 may be formed on the surface of the rod-shaped main body 11 including the tip surface of the rod-shaped main body 11 by vapor-depositing titanium with a layer thickness of about 1 ⁇ m.
  • the carrier layer 42 may be formed on the surface of the rod-shaped main body 11 including the tip surface of the rod-shaped main body 11 by vapor-depositing titanium with a layer thickness of about 1 ⁇ m.
  • it is possible to appropriately reduce iron by introducing a source gas containing carbon such as acetylene in a relatively low temperature atmosphere of about 450 ° C.
  • the diameter of the iron particles is expected to be formed to a particle size suitable for accumulating the CNTs 40 at a high density, for example, about several nm to several tens of nm.
  • the rod-shaped main body 11 in which the coating layer having at least a part of the iron constituting the catalyst 43, the aluminum alloy constituting the carrier layer 42, and the titanium is formed on the tip surface.
  • the tip of the rod-shaped body 11 is impregnated with at least a part of the iron constituting the catalyst 43, the aluminum alloy constituting the carrier layer 42 for supporting the catalyst, and titanium by being heated to a temperature of 500 ° C. or higher. Will be.
  • the catalyst 43 may finally disappear from the tip surface of the rod-shaped main body 11, and the carrier layer 42 disappears from the tip surface of the rod-shaped main body 11. May be.
  • the second central conductor 1b is a rod-shaped main body 11 having a circular cross section installed in a state inserted in the cylindrical body 2, a flange 12 provided at the base end portion thereof, and a connection to the flange 12. And a connection section 14 having a circular cross section that is installed in a state of protruding outside the cylindrical body 2, and is different from the first central conductor 1 a in that the conductive flexible body 4 is not provided. .
  • the rod-shaped main bodies 11 of the first center conductor 1a and the second center conductor 1b formed as described above are respectively inserted into the cylindrical body 2, and both ends of the cylindrical body 2 are crimped as necessary.
  • the contact terminal 10 in which the first center conductor 1a and the second center conductor 1b and the cylindrical body 2 are integrally connected is formed (see FIGS. 5 and 8).
  • the first center conductor 1a and the second center conductor 1b You may comprise so that the cylindrical body 2 may be integrally connected.
  • the inspection jig 3 includes, for example, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or a plasma display, a transparent conductive plate for a touch panel, a package substrate for a semiconductor package, a film carrier, or the like. It is used for the inspection of the inspection object.
  • the support member 31 is configured, for example, by laminating plate-like support plates 31a, 31b, and 31c.
  • a support plate 31a positioned on the upper side of FIG. 5 is disposed on one end side of the support member 31, and a support plate 31c positioned on the lower side of FIG. It arrange
  • a plurality of through holes H are formed so as to penetrate the support plates 31a, 31b, 31c.
  • the support plates 31a and 31b are formed with insertion hole portions Ha each having an opening hole with a predetermined diameter.
  • the support plate 31c is formed with a through hole made of a narrow portion Hb having a diameter smaller than that of the insertion hole portion Ha.
  • a small diameter portion Ha1 having a smaller hole diameter than the insertion hole portion Ha is formed on the support plate 31a on the one end side at a portion facing a base plate 321 described later. Then, the small diameter portion Ha1 and the insertion hole portion Ha of the support plate 31a, the insertion hole portion Ha of the support plate 31b, and the narrow portion Hb of the support plate 31c communicate with each other, thereby penetrating the contact terminal 10 as an installation hole.
  • a hole H is formed.
  • the narrow narrow portion Hb and the small diameter portion Ha1 may be omitted, and the entire through hole H may be an insertion hole portion Ha having a predetermined diameter.
  • the support plate 31a and the support plate 31b may be connected to each other with, for example, a support column or the like.
  • the support member 31 is not limited to the example in which the plate-like support plates 31a, 31b, and 31c are stacked, and for example, a structure in which the through hole H is provided in an integral member may be employed.
  • a base plate 321 made of, for example, an insulating resin material is provided on one end side of the support plate 31a, and the side surface of one end portion of the small diameter portion Ha1 is closed by the base plate 321 (see FIG. 6). ).
  • a wiring 34 is attached to the base plate 321 so as to penetrate the base plate 321 at a position facing the opening on the other end side of the through hole H.
  • An electrode 34 a that is conductively connected to the connection portion 13 of the first center conductor 1 a is formed by the end face of the wiring 34.
  • the inner diameter of the insertion hole Ha provided in the support member 31 is set to be larger than the outer diameters of the flange 12 and the cylindrical body 2 provided in the first center conductor 1a and the second center conductor 1b.
  • the contact terminal 10 is supported by the support member 31 in a state where the flange 12 and the cylindrical body 2 are inserted into the insertion hole Ha (see FIG. 5 and the like).
  • the inner diameter of the small-diameter portion Ha1 formed on the support plate 31a and the inner diameter of the narrow portion Hb on which the support plate 31c is formed are set to be smaller than the outer diameter of the flange portion 12, respectively.
  • the first center conductor 1a and the second center conductor 1b of the contact terminal 10 supported by the contact terminal 10 are prevented from falling off from the support member 31.
  • the connecting portion 13 of the first central conductor 1a is configured to be able to be inserted into the small diameter portion Ha1 by forming the outer diameter smaller than the inner diameter of the small diameter portion Ha1 formed in the support plate 31a. Further, the connecting portion 14 of the second central conductor 1b is formed so that its outer diameter is smaller than the inner diameter of the narrow portion Hb formed in the support plate 31c, so that it can be inserted into the narrow portion Hb. Yes.
  • connection portion 13 of the first center conductor 1 a protrudes from the small diameter portion Ha 1 of the base plate 321 to the outside of the support member 31 by a predetermined distance.
  • the axial length of the connecting portion 13 is set to be larger than the length of the small diameter portion Ha1.
  • a tapered portion 13a having a tapered shape is formed at the connection portion 13 of the first central conductor 1a, and the tip surface of the tapered portion 13a is connected to the electrode 34a provided on the base plate 321 when the substrate 101 or the like is inspected. It comes to contact.
  • connection portion 14 when the connecting portion 14 provided in the second central conductor 1b has its axial length set larger than the thickness of the support plate 31c, the contact member 10 is supported by the support member 31. Further, the distal end portion of the connection portion 14 is configured to protrude from the narrow portion Hb of the support plate 31c to the outside of the support member 31 by a predetermined distance.
  • the front end surface of the first center conductor 1a that is, the front end surface of the conductive flexible body 4
  • the total lengths of the first center conductor 1a and the second center conductor 1b are set so that a predetermined gap S is formed between the tip surface of the second center conductor 1b, that is, the tip surface of the rod-shaped main body 11. ing.
  • the connecting portion 13 of the first center conductor 1a and the connecting portion 14 of the second center conductor 1b are pushed into the support member 31, respectively, as shown in FIG. 7 and FIG.
  • the conductive flexible body 4 of the first central conductor 1 a abuts on the rod-shaped main body 11 of the second central conductor 1 b so that both the rod-shaped main bodies 11 are conductively connected via the conductive flexible body 4.
  • the axial lengths of the first center conductor 1a and the second center conductor 1b are set.
  • the length of the main body of the contact terminal 10 to be inserted and supported in the insertion holes Ha and Ha formed in the support plates 31a and 31b that is, the total length of the cylindrical body 2, the first center conductor 1a and the second
  • the length obtained by adding the axial length of the flange portion 12 of the center conductor 1b is the total length of the insertion hole portion Ha formed in the support plate 31a and the insertion hole formed in the support plate 31b. It is preferable to set a value equal to the insertion hole length ⁇ , which is a value obtained by adding the total length of the portion Ha.
  • the spring of the cylindrical body 2 has a length corresponding to the difference between the two. It is necessary to attach the contact terminal 10 to the support member 31 in a state where the portion 21 is compressed and deformed. In this configuration, there is an advantage that the contact terminal 10 can be prevented from being fluctuated and the contact terminal 10 can be stably held in the insertion holes Ha and Ha of the support plates 31a and 31b. There is a drawback that the work of attaching the terminal 10 becomes complicated.
  • the contact terminal 10 when the main body portion length of the contact terminal 10 is formed to be smaller than the insertion hole length ⁇ of the support plates 31a and 31b, the spring member 21 of the cylindrical body 2 is not compressed and deformed without being deformed. There is an advantage that the contact terminal 10 can be easily attached. On the other hand, in the state where the contact terminal 10 is attached to the support member 31, it is inevitable that a gap is formed between the main body portion of the contact terminal 10 and the insertion hole portion Ha of the support plate 31b. 10 is likely to be uneven, and it is difficult to stably hold the contact terminal 10 in the insertion holes Ha and Ha of the support plates 31a and 31b.
  • one end portion of the contact terminal 10 that is, the upper end surface of the tapered portion 13 a is pressed against the electrode 34 a according to the urging force of the spring portion 21, thereby stabilizing the one end portion of the contact terminal 10 and the electrode 34 a.
  • the conductive contact state is maintained.
  • the tapered portion 13a is not necessarily provided at the upper end portion of the connection portion 13, and the upper end surface of the connection portion 13 may be formed as a flat surface.
  • connection portion 14 of the second central conductor 1b provided on the other end side of the support member 31 is in a state where the support member 31 is positioned with respect to the substrate 101. Then, it is pressed against the bump BP of the substrate 101 and pressed to one end side of the support member 31. Thereby, the spring part 21 of the cylindrical body 2 is further compressed and elastically deformed, and the protruding part of the connection part 14 is pushed into one end part side of the support member 31, and the conductive flexible body of the first central conductor 1a. 4 comes into contact with the rod-shaped main body 11 of the second central conductor 1b to be in conductive contact with the first central conductor 1a and the second central conductor 1b.
  • the gap S (see FIG. 5) formed between the distal end surface of the conductive flexible body 4 and the distal end surface of the rod-shaped main body 11 is supported by the connection portion 13 and the connection portion 14 when the substrate 101 or the like is inspected.
  • the amount of deformation of the cylindrical body 2 due to being pushed into the member 31, that is, the amount of compressive deformation of the spring portion 21 is set to be smaller.
  • the connecting portion 13 and the connecting portion 14 are pushed into the support member 31 and the substrate 101 is inspected, the connecting portion 13 and the connecting portion 14 are provided at the distal end portion of the first central conductor 1a.
  • the conductive flexible body 4 abuts on the rod-shaped main body 11 of the second center conductor 1b, the rod-shaped main body 11 of the first center conductor 1a and the rod-shaped main body 11 of the second center conductor 1b become conductive conductive bodies. 4 is in a conductive connection state.
  • the surface on the other end side of the contact terminal 10, that is, the lower end surface of the connection portion 14 is pressed against the bump BP of the substrate 101 in accordance with the urging force generated by compressing and deforming the spring portion 21 of the cylindrical body 2. Therefore, the other end of the contact terminal 10 and the inspection point (bump BP) of the substrate 101 are held in a stable conductive contact state.
  • the contact terminal 10 having the above-described configuration and the inspection jig 3 including the contact terminal 10, even when a large current for inspection is applied to the contact terminal 10 during the inspection of the substrate 101 or the like, the contact is made. There is an advantage that the risk of the function of the terminal 10 being impaired can be effectively reduced.
  • the rod-shaped main body Pb1 of the first center conductor PbS and the second center conductor PcS are inspected when inspecting the substrate or the like. It is necessary to electrically connect the first central conductor PbS and the second central conductor PcS through the cylindrical body Pa by bringing the rod-shaped main body Pc1 into contact with the intermediate position Q of the cylindrical body Pa, respectively. is there.
  • connection portion Pc4 of the second center conductor PcS passes from the rod-shaped main body Pc1 through the spring portion Pe of the cylindrical body Pa and the like as shown in the current path G, and the first center conductor PbS.
  • the connection portion Pb4 is energized.
  • the conductive flexible body 4 made of an aggregate of CNTs 40 provided at the tip of the first central conductor 1 a is formed into a cylindrical body 2.
  • the first central conductor 1a and the second central conductor 1b are directly connected to each other via the conductive flexible body 4 in a state where they are in elastic contact with the tip of the rod-shaped main body 11 of the second central conductor 1b.
  • Current path F is formed.
  • the CNT 40 has a lower resistance than nickel. Therefore, unlike the above-described comparative example, the function of the contact terminal PrS is not impaired by the heat generation phenomenon caused by the inspection current being supplied to the cylindrical body Pa, and the function of the contact terminal 10 is stabilized. Can be maintained.
  • the conductive flexible body 4 is configured by an assembly of CNTs 40 erected on the distal end surface of the rod-shaped main body 11 of the first center conductor 1a, moderate conductivity and flexibility are provided. It is good also as a structure which provided the electroconductive flexible body which consists of electroconductive rubber which has these, or a conductive plastic etc. in the front end surface of the rod-shaped main body 11.
  • the conductive flexible body 4 made of an assembly of CNTs 40 having excellent conductivity and durability and appropriate flexibility is used as the rod-shaped body 11 of the first central conductor 1a.
  • the structure is provided on the front end surface of the first conductive member 4, at least a part of the CNTs 40 constituting the conductive flexible body 4 is brought into elastic contact with the rod-shaped main body 11 of the second central conductor 1b.
  • the one center conductor 1a and the second center conductor 1b can be appropriately conductively connected. For this reason, there exists an advantage that the conduction connectivity, durability, etc. of the contact terminal 10 can be improved more effectively.
  • Contact terminal provided with process K6 According to 0 manufacturing method of an advantage that has excellent conductive connectivity and moderate flexibility such, can be easily manufactured contact terminals 10 can be suitably used for inspecting jig 3.
  • the carrier layer 42 and the catalyst 43 are only on the tip surface of the rod-shaped main body 11.
  • the arranged first central conductor 1a is obtained. Therefore, when forming the aggregate of the CNTs 40 in the conductive flexible body forming step K6, it is possible to prevent the CNTs 40 from being generated on a portion other than the tip surface of the rod-shaped body 11, such as the outer peripheral surface of the rod-shaped body 11.
  • the contact terminal 10 that can be suitably used for the inspection jig 3 can be manufactured appropriately.
  • the plurality of CNTs 40 are grown by chemical vapor deposition in the presence of the catalyst 43 disposed on the front end surface of the rod-shaped main body 11 so that the CNTs 40 are directly generated on the front end surface of the rod-shaped main body 11.
  • the conductive flexible body 4 made of an aggregate of CNTs 40 formed separately on the tip surface of the rod-shaped main body 11 by means such as bonding.
  • the coating layer having at least a part of the iron constituting the catalyst 43, the aluminum alloy constituting the carrier layer 42, and titanium is formed on the distal end surface of the rod-shaped body 11.
  • the conductive flexible body 4 made of the aggregate of the CNTs 40 can be easily and properly erected on the tip surface of the rod-shaped main body 11. Therefore, there is an advantage that the contact terminal 10 having excellent conductive connectivity and durability can be easily obtained.
  • the rod-shaped main body 11 is heated to a temperature of 500 ° C. or higher, and the like.
  • the iron constituting the catalyst 43, the aluminum alloy constituting the carrier layer 42 for supporting the catalyst, and titanium When at least a part of the impregnation is impregnated in the tip surface of the rod-shaped main body 11, iron particles constituting the catalyst 43 can be stably held. For this reason, a plurality of CNTs 40 are efficiently chemically vapor-grown in the presence of the catalyst 43 to appropriately form the conductive flexible body 4 made of an aggregate of the CNTs 40 on the tip surface of the rod-shaped main body 11. Can do.
  • the conductive flexible body 4 is provided only on the rod-shaped main body 11 of the first center conductor 1a. It is good also as a structure. Moreover, the conductive flexible body 4 is provided on both the rod-shaped main body 11 of the first central conductor 1a and the rod-shaped main body 11 of the second central conductor 1b, and the tips of both conductive flexible bodies 4 are brought into phase contact with each other.
  • the first center conductor 1a and the second center conductor 1b may be electrically connected.
  • FIG. 10 is a front view showing a modified example of the contact terminal 10, and FIGS. 11A, 11B, and 11C are explanatory views showing a specific configuration of the cylindrical body 2 of the contact terminal 10 shown in FIG. 11A is an enlarged plan view of the lower end portion of the cylindrical body 2, FIG. 11B is an end view showing the lower end portion of the cylindrical body 2 as viewed from below, and FIG. 11C is a lower end portion of the cylindrical body 2.
  • 12 is a front view showing a modification of the conductive flexible body 4
  • FIG. 13 is a front view showing a modification of the conductive flexible body 4
  • FIG. 14 is a conductive flexible body shown in FIG. 5 is a perspective view showing a manufacturing process of the body 4.
  • FIG. 11A, 11B, and 11C are explanatory views showing a specific configuration of the cylindrical body 2 of the contact terminal 10 shown in FIG. 11A is an enlarged plan view of the lower end portion of the cylindrical body
  • an outer diameter slightly larger than the inner diameter of the cylindrical body 2 is provided between the rod-shaped main body 11 and the flange portion 12 of the first center conductor 1a and the second center conductor 1b.
  • the outer diameters of the rod-shaped main bodies 11 of the first center conductor 1 a and the second center conductor 1 b are set to a value slightly smaller than the inner diameter of the cylindrical body 2.
  • slits 23 extending substantially in parallel with the axial direction of the cylindrical body 2 from the ends of the spiral groove 22 are formed at both ends of the cylindrical body 2 to have a predetermined width.
  • a C-shaped retaining ring-shaped holding portion 26 having a divided portion is formed (see FIG. 11B).
  • the outer diameters of the rod-shaped main bodies 11 of the first center conductor 1a and the second center conductor 1b are slightly smaller than the inner diameter of the cylindrical body 2, the first center conductor 1a and the second center conductor 1a
  • the rod-shaped main body 11 of the center conductor 1b can be inserted into the cylindrical body 2, and the work of assembling the first central conductor 1a and the second central conductor 1b to the cylindrical body 2 can be easily performed.
  • the slit 23 constituting the holding portion 26 is formed continuously with the end of the spiral groove 22 constituting the spring portion 21 so as to extend in the axial direction of the cylindrical body 2 as described above.
  • the spiral groove 22 is formed by irradiating the peripheral surface of the cylindrical body 2 with a laser beam machine, there is an advantage that the slit 23 can be easily formed continuously.
  • the slit 23 may be inclined at a predetermined angle with respect to the axial direction of the cylindrical body 2.
  • a tapered portion 11a having a tapered shape is provided at the distal end portion thereof, and the conductive flexible body 4 made of an aggregate of CNTs 40 stands on the distal end surface of the tapered portion 11a. It is installed. According to this configuration, since the diameter of the conductive flexible body 4 can be suppressed, the work of inserting the conductive flexible body 4 and the rod-shaped main body 11 into the cylindrical body 2 can be facilitated. There is an advantage.
  • the plurality of CNTs 40 generated in the conductive flexible body forming step K6 for example, water, alcohols (isopropanol, ethanol, methanol), acetones (acetone), hexane, After dropping the droplet E made of toluene, cyclohexane, DMF (dimethylformamide), etc., it is exposed to the liquid, and then dried by natural drying at room temperature, drying in a vacuum, or heating with a hot plate, etc. It may be.
  • the zipper effect is expressed according to the surface tension of the droplet E and the van der Waals force generated between the CNTs 40, the CNTs 40 are attracted and converged.
  • the base end portion of the conductive flexible body 4 is fixed to the distal end surface of the rod-shaped main body 11, the conductive flexible body 4 rising from the distal end surface of the rod-shaped main body 11, as shown in FIG. Compared to the rising portion, the intermediate portion of the conductive flexible body 4 and the upper portion thereof are remarkably converged and densified.
  • the intermediate portion of the conductive flexible body 4 is converged at a higher density than the rising portion of the conductive flexible body 4 rising from the tip surface of the rod-shaped main body 11 as described above, an aggregate of a plurality of CNTs 40 In the conductive flexible body 4 made of, the contact portion between the CNTs 40 is increased and the current path is increased. Thereby, the electrical conductivity of the contact terminal 10 is effectively improved, and the contact terminal 10 can be suitably used as an inspection jig 3 such as a substrate inspection apparatus.
  • F layer 41 is formed in the outer peripheral surface of the rod-shaped main body 11 in F layer formation process K2.
  • the rod-shaped main body 11 is cut into a predetermined dimension, whereby the outer peripheral surface is covered with the photoresist layer 41. You may comprise so that the one center conductor 1a may be formed. According to this configuration, the distal end surface of the rod-shaped main body 11 can be exposed without requiring an operation such as removing the masking material attached to the distal end surface of the rod-shaped main body 11.
  • a contact terminal includes a pair of center conductors each formed in a rod shape from a conductive material, and a cylindrical body that holds the pair of center conductors, And a spring portion formed of a spiral body, and the pair of central conductors are respectively installed in a state of projecting to the outside of the cylindrical body and a rod-shaped body installed in a state of being inserted into the cylindrical body.
  • At least one of the pair of central conductors is provided with a conductive flexible body having conductivity and flexibility on a distal end surface of the rod-shaped main body, and the pair of central conductors is The tip surfaces of the rod-like main bodies inserted into the cylindrical body have an axial length that can be conductively connected via the conductive flexible body.
  • the base end portion of the rod-shaped main body is provided with a flange portion having an outer diameter larger than the inner diameter of the cylindrical body.
  • the rod-shaped main body of both center conductors is inserted into the cylindrical body, and when the both center conductors are assembled to the cylindrical body, the collar portion is brought into contact with the end of the cylindrical body.
  • the conductive flexible body is constituted by an aggregate of carbon nanotubes erected on the tip surface of the rod-shaped main body.
  • At least a part of the carbon nanotubes constituting the conductive flexible body can be elastically brought into contact with the tip of the rod-shaped main body and the like so that both the central conductors can be properly connected to each other. Therefore, there is an advantage that the conductive connectivity and durability of the contact terminal can be improved more effectively.
  • a tapered portion is formed at the tip of the rod-shaped main body, and the aggregate of the carbon nanotubes is erected on the tip surface of the taper.
  • This configuration has an advantage that the work of inserting the conductive flexible body into the cylindrical body can be facilitated since the increase in the diameter of the carbon nanotube structure can be suppressed.
  • a coating layer having at least a part of iron, an aluminum alloy, and titanium is formed on the tip surface of the rod-shaped main body.
  • a conductive flexible body made of an aggregate of carbon nanotubes can be easily and properly erected on the distal end surface of the rod-shaped main body, so that it has excellent conductive connectivity and durability.
  • a terminal can be easily obtained.
  • an inspection jig includes the above-described contact terminal and a support member that supports the contact terminal.
  • the contact terminal manufacturing method includes a center conductor forming step of forming a center conductor having a rod-shaped body from a conductive material, and a photoresist that forms a photoresist layer on the outer peripheral surface of the rod-shaped body.
  • a supporting step a photoresist layer removing step of removing the photoresist layer together with the carrier layer and the catalyst formed on the outer peripheral surface of the rod-shaped main body, and a plurality of steps in the presence of the catalyst on the tip surface of the rod-shaped main body.
  • the contact terminal having such a configuration and the inspection jig including the contact terminal can reduce the possibility that the function as the contact terminal is impaired even when a large current for inspection is applied. Moreover, according to the manufacturing method of such a structure, the contact terminal which has the outstanding conduction

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

L'invention concerne une borne de contact 10 qui comprend une paire de conducteurs centraux 1a, 1b formés chacun sous la forme d'une tige utilisant un matériau électriquement conducteur, et un corps tubulaire 2 qui porte la paire de conducteurs centraux 1a, 1b, dans lequel : le corps tubulaire 2 comprend une partie de ressort 21 comprenant un corps hélicoïdal ; la paire de conducteurs centraux 1a, 1b comprennent chacun un corps en forme de tige 11 installé dans un état d'insertion dans le corps tubulaire 2, et des parties de liaison 13, 14 installées dans un état de saillie vers l'extérieur du corps tubulaire 2 ; au moins l'un de la paire de conducteurs centraux 1a, 1b possède un corps souple électriquement conducteur 4, qui est électriquement conducteur et souple, disposé sur une surface d'extrémité distale du corps en forme de tige 11 ; et la paire de conducteurs centraux 1a, 1b ont une longueur axiale telle que les surfaces d'extrémité distale des deux corps en forme de tige 11 insérés dans le corps tubulaire 2 sont aptes à être électriquement connectées l'une à l'autre au moyen du corps souple électriquement conducteur 4.
PCT/JP2019/007863 2018-03-20 2019-02-28 Borne de contact, gabarit d'inspection comprenant une borne de contact, et procédé de fabrication de borne de contact WO2019181420A1 (fr)

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DE102023101548A1 (de) 2022-09-05 2024-03-07 Ingun Prüfmittelbau Gmbh Prüfkontaktsonde

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KR102456469B1 (ko) * 2020-08-11 2022-10-21 리노공업주식회사 검사 프로브의 제조 방법 및 장치

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JPH08313553A (ja) * 1995-05-22 1996-11-29 Nhk Spring Co Ltd 導電性接触子
WO2007111107A1 (fr) * 2006-03-24 2007-10-04 Fujitsu Limited Dispositif à structure de fibre de carbone et son procédé de fabrication
JP2010025844A (ja) * 2008-07-23 2010-02-04 Unitechno Inc コンタクトプローブおよび検査用ソケット
JP2011203087A (ja) * 2010-03-25 2011-10-13 Nhk Spring Co Ltd コンタクトプローブ
JP2012506552A (ja) * 2008-10-24 2012-03-15 タイコ エレクトロニクス サービシズ ゲゼルシャフト ミット ベシュレンクテル ハフツンク 試験プローブ
US20120086004A1 (en) * 2010-10-06 2012-04-12 Formfactor, Inc. Elastic encapsulated carbon nanotube based electrical contacts
JP2012230003A (ja) * 2011-04-26 2012-11-22 Nidec-Read Corp 接触子及び検査用治具

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JPH08313553A (ja) * 1995-05-22 1996-11-29 Nhk Spring Co Ltd 導電性接触子
WO2007111107A1 (fr) * 2006-03-24 2007-10-04 Fujitsu Limited Dispositif à structure de fibre de carbone et son procédé de fabrication
JP2010025844A (ja) * 2008-07-23 2010-02-04 Unitechno Inc コンタクトプローブおよび検査用ソケット
JP2012506552A (ja) * 2008-10-24 2012-03-15 タイコ エレクトロニクス サービシズ ゲゼルシャフト ミット ベシュレンクテル ハフツンク 試験プローブ
JP2011203087A (ja) * 2010-03-25 2011-10-13 Nhk Spring Co Ltd コンタクトプローブ
US20120086004A1 (en) * 2010-10-06 2012-04-12 Formfactor, Inc. Elastic encapsulated carbon nanotube based electrical contacts
JP2012230003A (ja) * 2011-04-26 2012-11-22 Nidec-Read Corp 接触子及び検査用治具

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023101548A1 (de) 2022-09-05 2024-03-07 Ingun Prüfmittelbau Gmbh Prüfkontaktsonde

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