WO2019181420A1

WO2019181420A1 - Contact terminal, inspection jig provided with contact terminal, and method for manufacturing contact terminal

Info

Publication number: WO2019181420A1
Application number: PCT/JP2019/007863
Authority: WO
Inventors: 清沼田; 憲宏太田
Original assignee: 日本電産リード株式会社
Priority date: 2018-03-20
Filing date: 2019-02-28
Publication date: 2019-09-26
Also published as: TW201940887A; JPWO2019181420A1

Abstract

A contact terminal 10 is provided with a pair of central conductors 1a, 1b each formed in the shape of a rod using an electrically conductive material, and a tubular body 2 which holds the pair of central conductors 1a, 1b, wherein: the tubular body 2 includes a spring portion 21 comprising a helical body; the pair of central conductors 1a, 1b each include a rod-shaped body 11 installed in a state of being inserted into the tubular body 2, and connecting portions 13, 14 installed in a state of projecting to the outside of the tubular body 2; at least one of the pair of central conductors 1a, 1b has an electrically conductive flexible body 4, which is electrically conductive and flexible, provided on a distal end surface of the rod-shaped body 11; and the pair of central conductors 1a, 1b have an axial length such that the distal end surfaces of the two rod-shaped bodies 11 inserted into the tubular body 2 are capable of being connected electrically to one another by way of the electrically conductive flexible body 4.

Description

Contact terminal, inspection jig provided with contact terminal, and method of manufacturing contact terminal

The present invention relates to a contact terminal used for inspecting a substrate or the like, an inspection jig provided with the contact terminal, and a method for manufacturing the contact terminal.

2. Description of the Related Art Conventionally, a contact terminal (coil spring probe) including a contact pin including a linear contact and a guide is known in a cylinder having a spring portion (spring) formed on a part of a peripheral wall (for example, , See Patent Document 1).

JP 2007-24664 A

By the way, in the above-described inspection jig, since the inspection current is passed through the spring portion of the cylindrical body, the spring portion generates heat when a large current for inspection is applied. Due to this, the function as the contact terminal may be impaired due to plastic deformation or fusing of the cylindrical body.

An object of the present invention is to provide a contact terminal, an inspection jig, and a method for manufacturing a contact terminal that can reduce the possibility that the function as the contact terminal is impaired even when a large current for inspection is applied. That is.

A contact terminal according to an example of the present invention includes a pair of central conductors each formed in a rod shape from a conductive material, and a cylindrical body that holds the pair of central conductors, and the cylindrical body is a spiral. A pair of central conductors installed in a state of being inserted into the cylindrical body, and a connection installed in a state of protruding outside the cylindrical body And at least one of the pair of central conductors is provided with a conductive flexible body having conductivity and flexibility on a distal end surface of the rod-shaped body, and the pair of central conductors is The distal end surfaces of the rod-shaped main bodies inserted into the cylindrical body have an axial length that can be conductively connected via the conductive flexible body.

Further, an inspection jig according to an example of the present invention includes the above-described contact terminal and a support member that supports the contact terminal.

The contact terminal manufacturing method according to an example of the present invention includes a center conductor forming step of forming a center conductor provided with a rod-shaped main body from a conductive material, and a photoresist layer is formed on the outer peripheral surface of the rod-shaped main body. A photoresist layer forming step, a carrier layer disposing step of disposing a catalyst supporting carrier layer on the surface of the rod-shaped main body including the tip surface of the rod-shaped main body, and a catalyst for generating carbon nanotubes supported on the carrier layer A catalyst supporting step, a photoresist layer removing step of removing the photoresist layer together with the carrier layer and the catalyst formed on the outer peripheral surface of the rod-shaped body, and the presence of the catalyst on the tip surface of the rod-shaped body. And a conductive flexible body forming step of forming a conductive flexible body made of an aggregate of carbon nanotubes by chemical vapor deposition of a plurality of carbon nanotubes.

It is a front view which shows the specific structure of the contact terminal which concerns on this invention. It is a perspective view which shows the structure of a conductive flexible body. It is process drawing which shows the manufacturing process of a contact terminal. It is explanatory drawing which shows the manufacturing process of a contact terminal. It is sectional drawing which shows the specific structure of the inspection jig provided with the contact terminal shown in FIG. It is sectional drawing which shows the state in which the base plate was attached to the supporting member. It is sectional drawing which shows the test | inspection state by which the contact terminal was press-contacted to the test object. It is explanatory drawing of the energized state of the contact terminal which concerns on this invention. It is explanatory drawing of the electricity supply state of the contact terminal which concerns on a comparative example. It is a front view which shows the modification of a contact terminal. It is the front view which expanded the edge part of the cylindrical body of the contact terminal shown in FIG. It is an end elevation which shows the state which looked at the cylindrical body of the contact terminal shown in FIG. 10 from the downward direction. It is a front view which shows the state which expand | deployed the edge part of the cylindrical body of the contact terminal shown in FIG. It is a front view which shows the modification of a rod-shaped main body. It is a perspective view which shows the modification of an electroconductive flexible body. FIG. 14 is a perspective view showing a manufacturing process of the conductive flexible body shown in FIG. 13.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted.

FIG. 1 is a front view showing a specific configuration of the contact terminal 10 according to the present invention, FIG. 2 is a perspective view showing the configuration of the conductive flexible body 4, and FIG. 3 is a process showing a manufacturing process of the contact terminal 10. FIG. 4 and FIG. 4 are explanatory views showing the manufacturing process of the contact terminal 10. FIG. 5 is a cross-sectional view illustrating a specific configuration of the inspection jig 3 including the contact terminal 10 illustrated in FIG. 1, and FIG. 6 is a cross-section illustrating a state where the base plate 321 is attached to the support member 31 of the inspection jig 3. 7 is a cross-sectional view showing an inspection state in which the contact terminal 10 is press-contacted to the inspection object, FIG. 8 is an explanatory diagram of an energization state of the contact terminal 10 according to the present invention, and FIG. 9 is a contact according to a comparative example. It is explanatory drawing of the energization state of a terminal.

The contact terminal 10 is formed into a cylindrical shape by a first center conductor 1a and a second center conductor 1b formed in a rod shape with a circular cross section by a conductive material such as tungsten, and a conductive material such as nickel or nickel alloy. The formed cylindrical body 2 is provided. In addition, the cylindrical body 2 does not necessarily need to be formed with the raw material which has electroconductivity, and may be formed with the nonelectroconductive member.

Further, a spring portion 21 made of a spiral body that extends and contracts in the axial direction of the cylindrical body 2 is formed over a predetermined length in a portion excluding both ends of the cylindrical body 2. For example, the spring portion 21 extending spirally along the peripheral surface of the cylindrical body 2 is formed by irradiating the peripheral wall of the cylindrical body 2 with laser light from a laser processing machine (not shown) to form the spiral groove 22. Can be formed.

In addition, it is good also as a structure which provided the spring part 21 which consists of a spiral body by etching the surrounding wall of the cylindrical body 2, for example, and forming the spiral groove 22. FIG. Moreover, the spiral spring part 21 can also be formed, for example by electroforming.

The first central conductor 1a is a rod-shaped main body 11 having a circular cross section that is installed in a state where it is inserted into the cylindrical body 2, a flange 12 provided at the base end thereof, and a continuous connection to the flange 12. And a connecting portion 13 having a circular cross section that is installed in a state of protruding outside the cylindrical body 2. Further, a conductive flexible body 4 having conductivity and flexibility is provided on the distal end surface of the first central conductor 1a, that is, the distal end surface of the rod-shaped main body 11.

A carrier layer 42 on which a catalyst 43 for generating carbon nanotubes 40 to be described later is supported is disposed on the distal end surface of the first central conductor 1a, that is, the distal end surface of the rod-shaped main body 11. The carrier layer 42 is formed in a film shape having a thickness of about 10 μm with an aluminum alloy or the like, and is fixed to the tip surface of the rod-like main body 11 by means such as vapor deposition. The catalyst 43 is formed in a film shape having a thickness of about 1 μm with iron or the like, and is fixed to the surface of the carrier layer 42 by means such as vapor deposition.

The conductive flexible body 4 is formed by using a well-known CVD apparatus, that is, an apparatus for forming a thin film by chemically changing and depositing a gas on a heated substrate. It consists of an aggregate of CNTs 40 produced by chemical vapor deposition of a plurality of multi-walled carbon nanotubes (hereinafter referred to as CNTs) 40.

CNT40 has an outer diameter of 1 nm to 20 nm and a standing length of 20 μm to 500 μm. The conductive flexible body 4 constituted by the aggregate of the CNTs 40 has excellent conductivity and moderate flexibility and shape retention. Thereby, the conductive flexible body 4 is configured to be able to pass a current for inspection at the time of an inspection to be described later, and to be bent in the axial direction of the first central conductor 1a.

As shown in FIG. 3, the manufacturing method of the contact terminal 10 includes a center conductor forming step K1 for forming the first center conductor 1a including the rod-shaped main body 11 from a material having conductivity and heat resistance, and (a As shown in FIG. 4B, an F layer forming step K2 for forming a photoresist layer (hereinafter referred to as F layer) 41 on the outer peripheral surface of the rod-shaped main body 11 of the first central conductor 1a, as shown in FIG. The carrier layer disposing step K3 for disposing the catalyst supporting carrier layer 42 on the surface of the rod-like main body 11 including the tip surface of the rod-like main body 11, and as shown in FIG. A catalyst supporting step K4 for supporting the production catalyst 43, and an F layer for removing the F layer 41 together with the support layer 42 and the catalyst 43 formed on the outer peripheral surface of the rod-shaped main body 11 as shown in FIG. As shown in FIG. 4E in the presence of the removal step K5 and the catalyst 43. Sea urchin, and a conductive flexible forming step a plurality of CNT40 grown chemical vapor to form a conductive flexible member 4 on the distal end surface of the rod-like body 11 K6.

In the center conductor forming step K1, the first center conductor 1a including the rod-shaped main body 11 having a predetermined length, the flange portion 12 and the connecting portion 13 is formed of a conductive material such as tungsten. Thereafter, in the F layer forming step K2, as shown in FIG. 4A by spraying a masking material that can be dissolved by a peeling solvent made of acetone or the like, for example, a resist ink or the like on the outer peripheral surface of the rod-shaped body 11. An F layer 41 having a thickness of about several μm is formed.

When forming the F layer 41, it is necessary to take care that the masking material does not adhere to the tip surface of the rod-shaped main body 11. In addition, after forming the F layer 41 on the outer peripheral surface of the rod-shaped main body 11, the masking material adhering to the tip surface of the rod-shaped main body 11 is removed, or the tip portion of the rod-shaped main body 11 is cut off to thereby remove the tip of the rod-shaped main body 11. The surface may be exposed.

Next, in the carrier layer disposing step K3, as shown in FIG. 4B, a carrier layer for supporting the catalyst, for example, by depositing an aluminum alloy on the surface of the rod-like main body 11 including the tip surface of the rod-like main body 11. 42 is disposed. Further, in the catalyst supporting step K4, as shown in FIG. 4C, the catalyst 43 for CNT generation is supported by evaporating iron on the carrier layer 42 or the like.

Thereafter, in the F layer removing step K5, as shown in FIG. 4 (d), the F layer 41 is dissolved by using a solvent such as acetone, thereby forming a carrier layer formed on the outer peripheral surface of the rod-shaped main body 11. The F layer 41 is removed together with 42 and the catalyst 43.

The carrier layer 42 and the catalyst 43 covering the surface of the F layer 41 are formed so that the film thickness is extremely thin and the eyes are rough. For this reason, there is no problem in the dissolving action of the F layer 41 by the solvent. Therefore, the carrier layer 42 and the catalyst 43 formed on the outer peripheral surface of the rod-shaped main body 11 are removed together with the F layer 41, so that the carrier layer 42 and the catalyst 43 are disposed only on the tip surface of the rod-shaped main body 11. (Refer to FIG. 4D).

Next, in the conductive flexible body forming step K6, a hydrocarbon containing carbon, especially lower hydrocarbons such as methane, ethane, propane, ethylene, propylene, acetylene, etc. are injected into a CVD apparatus (not shown), Heat to a temperature of 500 ° C. or higher. Thereby, in the presence of the catalyst 43, a plurality of single-layer or multi-layer CNTs 40 can be collectively subjected to chemical vapor deposition. Thus, the 1st center conductor 1a by which the electroconductive flexible body 4 which consists of an aggregate | assembly of CNT40 stood on the front end surface of the rod-shaped main body 11 is formed (refer (e) of FIG. 4).

When chemical vapor deposition is performed on the CNT 40, it is preferable to use an atmospheric gas that does not react with the CNT 40, such as helium, argon, hydrogen, nitrogen, neon, krypton, carbon dioxide, and chlorine. Further, the atmospheric pressure of the reaction is preferably 10 ² Pa or more and 10 ⁷ Pa or less, more preferably 10 ⁴ Pa or more and 3 × 10 ⁵ Pa or less, and further preferably 5 × 10 ⁴ Pa or more and 9 × It is particularly preferable that the pressure be 10 ⁴ Pa or less.

In addition, in the conductive flexible body forming step K6, the CNT 40 is formed by various cutting means such as laser processing using a laser processing machine or machining using a cutter blade, milling apparatus using argon ions, oxygen ions, or the like. You may make it cut off the front-end | tip part of the electroconductive flexible body 4 which consists of an aggregate | assembly. Thereby, when the tip part of each CNT40 which comprises the electroconductive flexible body 4 is disjoint etc., this is cut out and the front-end | tip part of the electroconductive flexible body 4 will be arrange | equalized flatly. Further, as a result of the end portions of the conductive flexible body 4 being made flat, the contact area with the second central conductor 1b is increased, so that the contact resistance is reduced.

When manufacturing the conductive flexible body 4 made of an aggregate of CNTs 40 by the above-described chemical vapor deposition method, an aluminum alloy such as alumina having many voids was used as the carrier layer 42 of the catalyst 43 made of iron. In this case, there is an advantage that the iron particles granulated to a predetermined diameter are held in a proper state on the tip surface of the rod-shaped main body 11 while being reduced by being heated to a high temperature of about 800 ° C. Moreover, by using an aluminum alloy as the carrier layer 42 of the catalyst 43, the growth rate of the CNT 40 can be increased and the growth of the CNT 40 can be promoted, and the adhesion of the catalyst 43 to the rod-shaped main body 11 serving as the base material is improved. Can be made.

Instead of the aluminum alloy, the carrier layer 42 may be formed on the surface of the rod-shaped main body 11 including the tip surface of the rod-shaped main body 11 by vapor-depositing titanium with a layer thickness of about 1 μm. In this case, it is possible to appropriately reduce iron by introducing a source gas containing carbon such as acetylene in a relatively low temperature atmosphere of about 450 ° C. Moreover, the diameter of the iron particles is expected to be formed to a particle size suitable for accumulating the CNTs 40 at a high density, for example, about several nm to several tens of nm.

In the conductive flexible body forming step K6, the rod-shaped main body 11 in which the coating layer having at least a part of the iron constituting the catalyst 43, the aluminum alloy constituting the carrier layer 42, and the titanium is formed on the tip surface. The tip of the rod-shaped body 11 is impregnated with at least a part of the iron constituting the catalyst 43, the aluminum alloy constituting the carrier layer 42 for supporting the catalyst, and titanium by being heated to a temperature of 500 ° C. or higher. Will be. As the CNT 40 grows, the catalyst 43 may finally disappear from the tip surface of the rod-shaped main body 11, and the carrier layer 42 disappears from the tip surface of the rod-shaped main body 11. May be.

On the other hand, the second central conductor 1b is a rod-shaped main body 11 having a circular cross section installed in a state inserted in the cylindrical body 2, a flange 12 provided at the base end portion thereof, and a connection to the flange 12. And a connection section 14 having a circular cross section that is installed in a state of protruding outside the cylindrical body 2, and is different from the first central conductor 1 a in that the conductive flexible body 4 is not provided. .

The rod-shaped main bodies 11 of the first center conductor 1a and the second center conductor 1b formed as described above are respectively inserted into the cylindrical body 2, and both ends of the cylindrical body 2 are crimped as necessary. Thus, the contact terminal 10 in which the first center conductor 1a and the second center conductor 1b and the cylindrical body 2 are integrally connected is formed (see FIGS. 5 and 8). In addition, like the modification mentioned later, when the press-fit part provided in the base end part of the rod-shaped main body 11 is press-fitted into the end part of the cylindrical body 2, the first center conductor 1a and the second center conductor 1b You may comprise so that the cylindrical body 2 may be integrally connected.

As shown in FIG. 5, the contact terminal 10 manufactured in this way is supported by a support member 31 to constitute the inspection jig 3. The inspection jig 3 includes, for example, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or a plasma display, a transparent conductive plate for a touch panel, a package substrate for a semiconductor package, a film carrier, or the like. It is used for the inspection of the inspection object.

The support member 31 is configured, for example, by laminating plate-

like support plates

31a, 31b, and 31c. A support plate 31a positioned on the upper side of FIG. 5 is disposed on one end side of the support member 31, and a support plate 31c positioned on the lower side of FIG. It arrange | positions so that it may become. A plurality of through holes H are formed so as to penetrate the

support plates

31a, 31b, 31c.

The

support plates

31a and 31b are formed with insertion hole portions Ha each having an opening hole with a predetermined diameter. The support plate 31c is formed with a through hole made of a narrow portion Hb having a diameter smaller than that of the insertion hole portion Ha. In addition, a small diameter portion Ha1 having a smaller hole diameter than the insertion hole portion Ha is formed on the support plate 31a on the one end side at a portion facing a base plate 321 described later. Then, the small diameter portion Ha1 and the insertion hole portion Ha of the support plate 31a, the insertion hole portion Ha of the support plate 31b, and the narrow portion Hb of the support plate 31c communicate with each other, thereby penetrating the contact terminal 10 as an installation hole. A hole H is formed.

The narrow narrow portion Hb and the small diameter portion Ha1 may be omitted, and the entire through hole H may be an insertion hole portion Ha having a predetermined diameter. Furthermore, instead of the above-described example in which the

support plates

31a and 31b of the support member 31 are stacked on each other, the support plate 31a and the support plate 31b may be connected to each other with, for example, a support column or the like. Further, the support member 31 is not limited to the example in which the plate-

like support plates

31a, 31b, and 31c are stacked, and for example, a structure in which the through hole H is provided in an integral member may be employed.

A base plate 321 made of, for example, an insulating resin material is provided on one end side of the support plate 31a, and the side surface of one end portion of the small diameter portion Ha1 is closed by the base plate 321 (see FIG. 6). ). A wiring 34 is attached to the base plate 321 so as to penetrate the base plate 321 at a position facing the opening on the other end side of the through hole H. An electrode 34 a that is conductively connected to the connection portion 13 of the first center conductor 1 a is formed by the end face of the wiring 34.

Further, the inner diameter of the insertion hole Ha provided in the support member 31 is set to be larger than the outer diameters of the flange 12 and the cylindrical body 2 provided in the first center conductor 1a and the second center conductor 1b. Thus, the contact terminal 10 is supported by the support member 31 in a state where the flange 12 and the cylindrical body 2 are inserted into the insertion hole Ha (see FIG. 5 and the like).

Furthermore, the inner diameter of the small-diameter portion Ha1 formed on the support plate 31a and the inner diameter of the narrow portion Hb on which the support plate 31c is formed are set to be smaller than the outer diameter of the flange portion 12, respectively. The first center conductor 1a and the second center conductor 1b of the contact terminal 10 supported by the contact terminal 10 are prevented from falling off from the support member 31.

The connecting portion 13 of the first central conductor 1a is configured to be able to be inserted into the small diameter portion Ha1 by forming the outer diameter smaller than the inner diameter of the small diameter portion Ha1 formed in the support plate 31a. Further, the connecting portion 14 of the second central conductor 1b is formed so that its outer diameter is smaller than the inner diameter of the narrow portion Hb formed in the support plate 31c, so that it can be inserted into the narrow portion Hb. Yes.

Further, in a state where the contact terminal 10 is supported by the support member 31, the connection portion 13 of the first center conductor 1 a protrudes from the small diameter portion Ha 1 of the base plate 321 to the outside of the support member 31 by a predetermined distance. Further, the axial length of the connecting portion 13 is set to be larger than the length of the small diameter portion Ha1. Further, a tapered portion 13a having a tapered shape is formed at the connection portion 13 of the first central conductor 1a, and the tip surface of the tapered portion 13a is connected to the electrode 34a provided on the base plate 321 when the substrate 101 or the like is inspected. It comes to contact.

On the other hand, when the connecting portion 14 provided in the second central conductor 1b has its axial length set larger than the thickness of the support plate 31c, the contact member 10 is supported by the support member 31. Further, the distal end portion of the connection portion 14 is configured to protrude from the narrow portion Hb of the support plate 31c to the outside of the support member 31 by a predetermined distance.

In the state where the first center conductor 1a and the second center conductor 1b are assembled to the cylindrical body 2, as shown in FIG. 5, the front end surface of the first center conductor 1a, that is, the front end surface of the conductive flexible body 4 , The total lengths of the first center conductor 1a and the second center conductor 1b are set so that a predetermined gap S is formed between the tip surface of the second center conductor 1b, that is, the tip surface of the rod-shaped main body 11. ing.

When the connecting portion 13 of the first center conductor 1a and the connecting portion 14 of the second center conductor 1b are pushed into the support member 31, respectively, as shown in FIG. 7 and FIG. In addition, the conductive flexible body 4 of the first central conductor 1 a abuts on the rod-shaped main body 11 of the second central conductor 1 b so that both the rod-shaped main bodies 11 are conductively connected via the conductive flexible body 4. The axial lengths of the first center conductor 1a and the second center conductor 1b are set.

Further, the length of the main body of the contact terminal 10 to be inserted and supported in the insertion holes Ha and Ha formed in the

support plates

31a and 31b, that is, the total length of the cylindrical body 2, the first center conductor 1a and the second As shown in FIG. 5, the length obtained by adding the axial length of the flange portion 12 of the center conductor 1b is the total length of the insertion hole portion Ha formed in the support plate 31a and the insertion hole formed in the support plate 31b. It is preferable to set a value equal to the insertion hole length β, which is a value obtained by adding the total length of the portion Ha.

That is, when the length of the main body portion of the contact terminal 10 is formed larger than the insertion hole length β of the

support plates

31a and 31b, the spring of the cylindrical body 2 has a length corresponding to the difference between the two. It is necessary to attach the contact terminal 10 to the support member 31 in a state where the portion 21 is compressed and deformed. In this configuration, there is an advantage that the contact terminal 10 can be prevented from being fluctuated and the contact terminal 10 can be stably held in the insertion holes Ha and Ha of the

support plates

31a and 31b. There is a drawback that the work of attaching the terminal 10 becomes complicated.

On the other hand, when the main body portion length of the contact terminal 10 is formed to be smaller than the insertion hole length β of the

support plates

31a and 31b, the spring member 21 of the cylindrical body 2 is not compressed and deformed without being deformed. There is an advantage that the contact terminal 10 can be easily attached. On the other hand, in the state where the contact terminal 10 is attached to the support member 31, it is inevitable that a gap is formed between the main body portion of the contact terminal 10 and the insertion hole portion Ha of the support plate 31b. 10 is likely to be uneven, and it is difficult to stably hold the contact terminal 10 in the insertion holes Ha and Ha of the

support plates

31a and 31b.

On the other hand, when both lengths are set so that the main body length of the contact terminal 10 and the insertion hole length β of the

support plates

31a and 31b are equal to each other as described above, contact with the support member 31 is possible. It is possible to prevent the contact terminal 10 from becoming uneven in a state where the contact terminal 10 is attached to the support member 31 while facilitating the attachment work of the terminal 10.

As shown in FIG. 6, when the base plate 321 is attached to one end portion side (the upper side in FIG. 6) of the support plate 31a, one end portion of the first center conductor 1a, that is, the upper end surface of the tapered portion 13a is In contact with the electrode 34 a of 321, it is pressed to the other end side of the support member 31. As a result, the spring portion 21 of the cylindrical body 2 is compressed and elastically deformed, and the protruding portions of the connection portion 13 and the tapered portion 13a are pushed into the support member 31 against the biasing force.

As a result, one end portion of the contact terminal 10, that is, the upper end surface of the tapered portion 13 a is pressed against the electrode 34 a according to the urging force of the spring portion 21, thereby stabilizing the one end portion of the contact terminal 10 and the electrode 34 a. The conductive contact state is maintained. Note that the tapered portion 13a is not necessarily provided at the upper end portion of the connection portion 13, and the upper end surface of the connection portion 13 may be formed as a flat surface.

Further, when the substrate 101 or the like shown in FIG. 7 is inspected, the connection portion 14 of the second central conductor 1b provided on the other end side of the support member 31 is in a state where the support member 31 is positioned with respect to the substrate 101. Then, it is pressed against the bump BP of the substrate 101 and pressed to one end side of the support member 31. Thereby, the spring part 21 of the cylindrical body 2 is further compressed and elastically deformed, and the protruding part of the connection part 14 is pushed into one end part side of the support member 31, and the conductive flexible body of the first central conductor 1a. 4 comes into contact with the rod-shaped main body 11 of the second central conductor 1b to be in conductive contact with the first central conductor 1a and the second central conductor 1b.

That is, the gap S (see FIG. 5) formed between the distal end surface of the conductive flexible body 4 and the distal end surface of the rod-shaped main body 11 is supported by the connection portion 13 and the connection portion 14 when the substrate 101 or the like is inspected. The amount of deformation of the cylindrical body 2 due to being pushed into the member 31, that is, the amount of compressive deformation of the spring portion 21 is set to be smaller.

As a result, as shown in FIG. 7, when the connecting portion 13 and the connecting portion 14 are pushed into the support member 31 and the substrate 101 is inspected, the connecting portion 13 and the connecting portion 14 are provided at the distal end portion of the first central conductor 1a. When the conductive flexible body 4 abuts on the rod-shaped main body 11 of the second center conductor 1b, the rod-shaped main body 11 of the first center conductor 1a and the rod-shaped main body 11 of the second center conductor 1b become conductive conductive bodies. 4 is in a conductive connection state.

Further, the surface on the other end side of the contact terminal 10, that is, the lower end surface of the connection portion 14 is pressed against the bump BP of the substrate 101 in accordance with the urging force generated by compressing and deforming the spring portion 21 of the cylindrical body 2. Therefore, the other end of the contact terminal 10 and the inspection point (bump BP) of the substrate 101 are held in a stable conductive contact state.

According to the contact terminal 10 having the above-described configuration and the inspection jig 3 including the contact terminal 10, even when a large current for inspection is applied to the contact terminal 10 during the inspection of the substrate 101 or the like, the contact is made. There is an advantage that the risk of the function of the terminal 10 being impaired can be effectively reduced.

For example, in the contact terminal PrS according to the comparative example shown in FIG. 9, that is, the contact terminal PrS not provided with the conductive flexible body, the rod-shaped main body Pb1 of the first center conductor PbS and the second center conductor PcS are inspected when inspecting the substrate or the like. It is necessary to electrically connect the first central conductor PbS and the second central conductor PcS through the cylindrical body Pa by bringing the rod-shaped main body Pc1 into contact with the intermediate position Q of the cylindrical body Pa, respectively. is there.

As a result, the current for inspection energized from the connection portion Pc4 of the second center conductor PcS passes from the rod-shaped main body Pc1 through the spring portion Pe of the cylindrical body Pa and the like as shown in the current path G, and the first center conductor PbS. The connection portion Pb4 is energized. When current flows through the spring portion Pe of the cylindrical body Pa in this way, it is inevitable that the electrical resistance increases due to the length of the current path.

Therefore, a heat generation phenomenon due to the inspection body being energized with the inspection current is likely to occur, and the function of the contact terminal PrS may be impaired due to thermal deformation or fusing of the cylindrical body Pa. . Moreover, when the cylindrical body Pa and the spring part Pe are made of nickel, the electrical resistance of the contact terminal PrS increases due to the electrical resistance of nickel.

On the other hand, in the contact terminal 10 according to the present invention, as shown in FIG. 8, the conductive flexible body 4 made of an aggregate of CNTs 40 provided at the tip of the first central conductor 1 a is formed into a cylindrical body 2. The first central conductor 1a and the second central conductor 1b are directly connected to each other via the conductive flexible body 4 in a state where they are in elastic contact with the tip of the rod-shaped main body 11 of the second central conductor 1b. Current path F is formed. Further, the CNT 40 has a lower resistance than nickel. Therefore, unlike the above-described comparative example, the function of the contact terminal PrS is not impaired by the heat generation phenomenon caused by the inspection current being supplied to the cylindrical body Pa, and the function of the contact terminal 10 is stabilized. Can be maintained.

Moreover, in the above-mentioned embodiment, since it was set as the structure which provided the collar part 12 which has an outer diameter larger than the internal diameter of the cylindrical body 2 in the base end part of the rod-shaped main body 11, the 1st center conductor 1a and the 2nd center conductor When the rod-shaped main body 11 of 1b is inserted into the cylindrical body 2 and the first central conductor 1a and the second central conductor 1b are assembled to the cylindrical body 2, the flange 12 is attached to the end of the cylindrical body 2. By bringing them into contact with each other, there is an advantage that the first center conductor 1a and the second center conductor 1b can be properly positioned and the assembling work can be facilitated.

In addition, instead of the above-described embodiment in which the conductive flexible body 4 is configured by an assembly of CNTs 40 erected on the distal end surface of the rod-shaped main body 11 of the first center conductor 1a, moderate conductivity and flexibility are provided. It is good also as a structure which provided the electroconductive flexible body which consists of electroconductive rubber which has these, or a conductive plastic etc. in the front end surface of the rod-shaped main body 11.

However, as shown in the above-described embodiment, the conductive flexible body 4 made of an assembly of CNTs 40 having excellent conductivity and durability and appropriate flexibility is used as the rod-shaped body 11 of the first central conductor 1a. When the structure is provided on the front end surface of the first conductive member 4, at least a part of the CNTs 40 constituting the conductive flexible body 4 is brought into elastic contact with the rod-shaped main body 11 of the second central conductor 1b. The one center conductor 1a and the second center conductor 1b can be appropriately conductively connected. For this reason, there exists an advantage that the conduction connectivity, durability, etc. of the contact terminal 10 can be improved more effectively.

Further, as shown in FIG. 3, a center conductor forming step K1 for forming a first center conductor 1a having a rod-shaped main body 11 and a connecting portion 13 from a conductive material, and a rod-shaped body 11 of the first center conductor 1a. An F layer forming step K2 for forming an F layer 41 on the outer peripheral surface of the substrate, and a carrier layer disposing step K3 for disposing a carrier layer 42 for supporting a catalyst on the surface of the rod-shaped main body 11 including the tip surface of the rod-shaped main body 11; The catalyst supporting step K4 for supporting the catalyst 43 for generating CNTs on the carrier layer 42, and the F layer removing step K5 for removing the F layer 41 together with the carrier layer 42 and the catalyst 43 formed on the outer peripheral surface of the rod-shaped body 11. And forming a conductive flexible body 4 made of an aggregate of CNTs 40 by chemical vapor deposition of a plurality of CNTs 40 in the presence of the catalyst 43 on the tip surface of the rod-shaped main body 11. Contact terminal provided with process K6 According to 0 manufacturing method of an advantage that has excellent conductive connectivity and moderate flexibility such, can be easily manufactured contact terminals 10 can be suitably used for inspecting jig 3.

That is, by removing the F layer 41 together with the carrier layer 42 and the catalyst 43 formed on the outer peripheral surface of the rod-shaped main body 11 in the F layer removing step K5, the carrier layer 42 and the catalyst 43 are only on the tip surface of the rod-shaped main body 11. The arranged first central conductor 1a is obtained. Therefore, when forming the aggregate of the CNTs 40 in the conductive flexible body forming step K6, it is possible to prevent the CNTs 40 from being generated on a portion other than the tip surface of the rod-shaped body 11, such as the outer peripheral surface of the rod-shaped body 11. The contact terminal 10 that can be suitably used for the inspection jig 3 can be manufactured appropriately.

The plurality of CNTs 40 are grown by chemical vapor deposition in the presence of the catalyst 43 disposed on the front end surface of the rod-shaped main body 11 so that the CNTs 40 are directly generated on the front end surface of the rod-shaped main body 11. Instead of the above-described embodiment, it is also conceivable to fix the conductive flexible body 4 made of an aggregate of CNTs 40 formed separately on the tip surface of the rod-shaped main body 11 by means such as bonding.

However, as shown in the above-described embodiment, when the coating layer having at least a part of the iron constituting the catalyst 43, the aluminum alloy constituting the carrier layer 42, and titanium is formed on the distal end surface of the rod-shaped body 11. In other words, the conductive flexible body 4 made of the aggregate of the CNTs 40 can be easily and properly erected on the tip surface of the rod-shaped main body 11. Therefore, there is an advantage that the contact terminal 10 having excellent conductive connectivity and durability can be easily obtained.

In addition, in the conductive flexible body forming step K6, the rod-shaped main body 11 is heated to a temperature of 500 ° C. or higher, and the like. The iron constituting the catalyst 43, the aluminum alloy constituting the carrier layer 42 for supporting the catalyst, and titanium When at least a part of the impregnation is impregnated in the tip surface of the rod-shaped main body 11, iron particles constituting the catalyst 43 can be stably held. For this reason, a plurality of CNTs 40 are efficiently chemically vapor-grown in the presence of the catalyst 43 to appropriately form the conductive flexible body 4 made of an aggregate of the CNTs 40 on the tip surface of the rod-shaped main body 11. Can do.

Instead of the above-described embodiment in which the conductive flexible body 4 is provided only on the rod-shaped main body 11 of the first center conductor 1a, the conductive flexible body 4 is provided only on the rod-shaped main body 11 of the second central conductor 1b. It is good also as a structure. Moreover, the conductive flexible body 4 is provided on both the rod-shaped main body 11 of the first central conductor 1a and the rod-shaped main body 11 of the second central conductor 1b, and the tips of both conductive flexible bodies 4 are brought into phase contact with each other. The first center conductor 1a and the second center conductor 1b may be electrically connected.

FIG. 10 is a front view showing a modified example of the contact terminal 10, and FIGS. 11A, 11B, and 11C are explanatory views showing a specific configuration of the cylindrical body 2 of the contact terminal 10 shown in FIG. 11A is an enlarged plan view of the lower end portion of the cylindrical body 2, FIG. 11B is an end view showing the lower end portion of the cylindrical body 2 as viewed from below, and FIG. 11C is a lower end portion of the cylindrical body 2. It is a front view which shows the state which expand | deployed. 12 is a front view showing a modification of the conductive flexible body 4, FIG. 13 is a front view showing a modification of the conductive flexible body 4, and FIG. 14 is a conductive flexible body shown in FIG. 5 is a perspective view showing a manufacturing process of the body 4. FIG.

In the modification of the contact terminal 10 shown in FIG. 10, an outer diameter slightly larger than the inner diameter of the cylindrical body 2 is provided between the rod-shaped main body 11 and the flange portion 12 of the first center conductor 1a and the second center conductor 1b. The bulging part 15 which has is each provided. Further, the outer diameters of the rod-shaped main bodies 11 of the first center conductor 1 a and the second center conductor 1 b are set to a value slightly smaller than the inner diameter of the cylindrical body 2.

On the other hand, as shown in FIG. 11C, for example, slits 23 extending substantially in parallel with the axial direction of the cylindrical body 2 from the ends of the spiral groove 22 are formed at both ends of the cylindrical body 2 to have a predetermined width. A C-shaped retaining ring-shaped holding portion 26 having a divided portion is formed (see FIG. 11B).

According to this configuration, when the operator inserts the rod-shaped main body 11 of the first center conductor 1a and the second center conductor 1b into both ends of the cylindrical body 2, the slit 23 is expanded and displaced, By pressing the bulging portion 15 of the center conductor 1a and the second center conductor 1b into the holding portion 26, the connection state between the first center conductor 1a and the second center conductor 1b and the cylindrical body 2 is stabilized. There is an advantage that it can be maintained.

Further, as described above, by setting the outer diameters of the rod-shaped main bodies 11 of the first center conductor 1a and the second center conductor 1b to be slightly smaller than the inner diameter of the cylindrical body 2, the first center conductor 1a and the second center conductor 1a The rod-shaped main body 11 of the center conductor 1b can be inserted into the cylindrical body 2, and the work of assembling the first central conductor 1a and the second central conductor 1b to the cylindrical body 2 can be easily performed.

In addition, when the slit 23 constituting the holding portion 26 is formed continuously with the end of the spiral groove 22 constituting the spring portion 21 so as to extend in the axial direction of the cylindrical body 2 as described above. For example, when the spiral groove 22 is formed by irradiating the peripheral surface of the cylindrical body 2 with a laser beam machine, there is an advantage that the slit 23 can be easily formed continuously. Instead of the above-described embodiment in which the slit 23 is configured to extend substantially parallel to the axial direction of the cylindrical body 2, the slit 23 may be inclined at a predetermined angle with respect to the axial direction of the cylindrical body 2.

In the modification of the rod-shaped main body 11 shown in FIG. 12, a tapered portion 11a having a tapered shape is provided at the distal end portion thereof, and the conductive flexible body 4 made of an aggregate of CNTs 40 stands on the distal end surface of the tapered portion 11a. It is installed. According to this configuration, since the diameter of the conductive flexible body 4 can be suppressed, the work of inserting the conductive flexible body 4 and the rod-shaped main body 11 into the cylindrical body 2 can be facilitated. There is an advantage.

Further, between the plurality of CNTs 40 generated in the conductive flexible body forming step K6, as shown in FIG. 14, for example, water, alcohols (isopropanol, ethanol, methanol), acetones (acetone), hexane, After dropping the droplet E made of toluene, cyclohexane, DMF (dimethylformamide), etc., it is exposed to the liquid, and then dried by natural drying at room temperature, drying in a vacuum, or heating with a hot plate, etc. It may be.

Thereby, since the zipper effect is expressed according to the surface tension of the droplet E and the van der Waals force generated between the CNTs 40, the CNTs 40 are attracted and converged. At this time, since the base end portion of the conductive flexible body 4 is fixed to the distal end surface of the rod-shaped main body 11, the conductive flexible body 4 rising from the distal end surface of the rod-shaped main body 11, as shown in FIG. Compared to the rising portion, the intermediate portion of the conductive flexible body 4 and the upper portion thereof are remarkably converged and densified.

When the intermediate portion of the conductive flexible body 4 is converged at a higher density than the rising portion of the conductive flexible body 4 rising from the tip surface of the rod-shaped main body 11 as described above, an aggregate of a plurality of CNTs 40 In the conductive flexible body 4 made of, the contact portion between the CNTs 40 is increased and the current path is increased. Thereby, the electrical conductivity of the contact terminal 10 is effectively improved, and the contact terminal 10 can be suitably used as an inspection jig 3 such as a substrate inspection apparatus.

In addition, after filling the filling material having fluidity so as to surround the conductive flexible body 4 formed in the conductive flexible body forming step K6, the filling material is cured to provide insulation and elasticity. You may provide the shape-retaining layer which has. According to this structure, there exists an advantage that the contact terminal 10 which has the outstanding intensity | strength and durability is obtained, maintaining the electroconductivity of the electroconductive flexible body 4. FIG.

In addition, after forming the center conductor which has the rod-shaped main body 11 with the raw material which has electroconductivity and heat resistance in center conductor shaping | molding process K1, F layer 41 is formed in the outer peripheral surface of the rod-shaped main body 11 in F layer formation process K2. Instead of the above-described embodiment configured as described above, after forming the F layer 41 on the outer peripheral surface of the rod-shaped main body 11, the rod-shaped main body 11 is cut into a predetermined dimension, whereby the outer peripheral surface is covered with the photoresist layer 41. You may comprise so that the one center conductor 1a may be formed. According to this configuration, the distal end surface of the rod-shaped main body 11 can be exposed without requiring an operation such as removing the masking material attached to the distal end surface of the rod-shaped main body 11.

That is, a contact terminal according to an example of the present invention includes a pair of center conductors each formed in a rod shape from a conductive material, and a cylindrical body that holds the pair of center conductors, And a spring portion formed of a spiral body, and the pair of central conductors are respectively installed in a state of projecting to the outside of the cylindrical body and a rod-shaped body installed in a state of being inserted into the cylindrical body. And at least one of the pair of central conductors is provided with a conductive flexible body having conductivity and flexibility on a distal end surface of the rod-shaped main body, and the pair of central conductors is The tip surfaces of the rod-like main bodies inserted into the cylindrical body have an axial length that can be conductively connected via the conductive flexible body.

According to this configuration, at the time of inspection of a substrate or the like using the contact terminal, the tip surfaces of both rod-shaped main bodies inserted into the cylindrical body are conductively connected via the conductive flexible body. As a result, there is no heat generation phenomenon caused by the inspection current being applied to the spring portion of the cylindrical body. Therefore, a possibility that the situation that the function of the contact terminal is impaired due to plastic deformation or fusing of the cylindrical body is reduced is reduced, and the function of the contact terminal can be stably maintained.

Moreover, it is preferable that the base end portion of the rod-shaped main body is provided with a flange portion having an outer diameter larger than the inner diameter of the cylindrical body.

According to this configuration, the rod-shaped main body of both center conductors is inserted into the cylindrical body, and when the both center conductors are assembled to the cylindrical body, the collar portion is brought into contact with the end of the cylindrical body. Thus, there is an advantage that both the center conductors can be properly positioned and the assembling work can be facilitated.

Further, it is preferable that the conductive flexible body is constituted by an aggregate of carbon nanotubes erected on the tip surface of the rod-shaped main body.

According to this configuration, at least a part of the carbon nanotubes constituting the conductive flexible body can be elastically brought into contact with the tip of the rod-shaped main body and the like so that both the central conductors can be properly connected to each other. Therefore, there is an advantage that the conductive connectivity and durability of the contact terminal can be improved more effectively.

Further, it is preferable that a tapered portion is formed at the tip of the rod-shaped main body, and the aggregate of the carbon nanotubes is erected on the tip surface of the taper.

This configuration has an advantage that the work of inserting the conductive flexible body into the cylindrical body can be facilitated since the increase in the diameter of the carbon nanotube structure can be suppressed.

Furthermore, it is preferable that a coating layer having at least a part of iron, an aluminum alloy, and titanium is formed on the tip surface of the rod-shaped main body.

According to this configuration, a conductive flexible body made of an aggregate of carbon nanotubes can be easily and properly erected on the distal end surface of the rod-shaped main body, so that it has excellent conductive connectivity and durability. There is an advantage that a terminal can be easily obtained.

According to this configuration, even when a large current for inspection is applied, the possibility that the function as the contact terminal is impaired is reduced, and there is an advantage that an inspection target made of a semiconductor element or the like can be appropriately inspected.

The contact terminal manufacturing method according to an example of the present invention includes a center conductor forming step of forming a center conductor having a rod-shaped body from a conductive material, and a photoresist that forms a photoresist layer on the outer peripheral surface of the rod-shaped body. A layer forming step, a carrier layer disposing step of disposing a support layer for catalyst support on the surface of the rod-shaped main body including the tip surface of the rod-shaped main body, and a catalyst for supporting a catalyst for generating carbon nanotubes on the support layer A supporting step, a photoresist layer removing step of removing the photoresist layer together with the carrier layer and the catalyst formed on the outer peripheral surface of the rod-shaped main body, and a plurality of steps in the presence of the catalyst on the tip surface of the rod-shaped main body. A conductive flexible body forming step of forming a conductive flexible body made of an aggregate of carbon nanotubes by chemical vapor deposition of carbon nanotubes.

According to this configuration, by removing the photoresist layer together with the carrier layer and the catalyst formed on the outer peripheral surface of the rod-shaped main body, a central conductor in which the carrier layer and the catalyst are disposed only on the tip surface of the rod-shaped main body is obtained. . Therefore, when the aggregate of carbon nanotubes is generated in the conductive flexible body forming step, the carbon nanotube structure is prevented from being generated on the tip surface portion of the rod-shaped body, for example, the outer peripheral surface of the rod-shaped body. A contact terminal that can be suitably used for an inspection jig can be easily manufactured.

The contact terminal having such a configuration and the inspection jig including the contact terminal can reduce the possibility that the function as the contact terminal is impaired even when a large current for inspection is applied. Moreover, according to the manufacturing method of such a structure, the contact terminal which has the outstanding conduction | electrical_connection connectivity, durability, etc. can be manufactured easily.

This application is based on Japanese Patent Application No. 2018-052519 filed on Mar. 20, 2018, the contents of which are included in the present application. It should be noted that the specific embodiments or examples made in the section for carrying out the invention are merely to clarify the technical contents of the present invention, and the present invention is not limited to such specific examples. It should not be interpreted in a narrow sense only as a limitation.

DESCRIPTION OF SYMBOLS 1a 1st center conductor 1b 2nd center conductor 2 Cylindrical body 3 Inspection jig 4 Conductive flexible body 8 Inspection object 10 Contact terminal 11 Rod-shaped main body 11a Tapered part 12 Gutter part 13 Connection part 14 Connection part 15 Expansion part 21 Spring portion 22 Spiral groove 23 Slit 24 Tip surface 25 Inclined surface 26 Holding portion 31

Support member

31a, 31b, 31c Support plate 34 Wiring 34a Electrode 40 Carbon nanotube 41 Photoresist layer (F layer)
42 carrier layer 43 catalyst 101 substrate 321 base plate E droplet G gap H through hole Ha insertion hole part Ha1 small diameter part Hb narrow part K1 center conductor forming process K2 F layer forming process K3 carrier layer arranging process K4 catalyst supporting process K5 F layer Removal process K6 Conductive flexible body formation process

Claims

A pair of central conductors each formed in a rod shape from a conductive material;
A cylindrical body holding the pair of central conductors,
The cylindrical body has a spring portion made of a spiral body,
Each of the pair of central conductors has a rod-like main body installed in a state of being inserted into the cylindrical body, and a connection portion installed in a state of protruding to the outside of the cylindrical body,
At least one of the pair of central conductors is provided with a conductive flexible body having conductivity and flexibility on a tip surface of the rod-shaped main body,
The pair of central conductors are contact terminals having an axial length that allows the two rod-like main bodies inserted into the cylindrical body to be conductively connected via the conductive flexible body.
The contact terminal according to claim 1, wherein a flange portion having an outer diameter larger than an inner diameter of the cylindrical body is provided at a proximal end portion of the rod-shaped main body.
The contact terminal according to claim 1 or 2, wherein the conductive flexible body is constituted by an aggregate of carbon nanotubes erected on a tip surface of the rod-shaped main body.
A tapered portion is formed at the tip of the rod-shaped main body,
The contact terminal according to claim 3, wherein an aggregate of the carbon nanotubes is erected on a tip surface of the tapered portion.
The contact terminal according to claim 3 or 4, wherein a coating layer having at least a part of iron, an aluminum alloy, and titanium is formed on a tip surface of the rod-shaped main body.
The contact terminal according to any one of claims 1 to 5,
An inspection jig comprising a support member for supporting the contact terminal.
A center conductor molding step of molding a center conductor having a rod-shaped body from a conductive material;
A photoresist layer forming step of forming a photoresist layer on the outer peripheral surface of the rod-shaped body;
A carrier layer disposing step of disposing a carrier layer for supporting a catalyst on the surface of the rod-shaped body including the tip surface of the rod-shaped body;
A catalyst supporting step of supporting a catalyst for carbon nanotube production on the carrier layer;
A photoresist layer removing step of removing the photoresist layer together with the carrier layer and the catalyst formed on the outer peripheral surface of the rod-shaped body;
A conductive flexible body forming step of forming a conductive flexible body composed of an aggregate of carbon nanotubes by chemical vapor deposition of a plurality of carbon nanotubes in the presence of the catalyst on the tip surface of the rod-shaped main body; A method for manufacturing a contact terminal.