WO2019147100A1

WO2019147100A1 - Test socket

Info

Publication number: WO2019147100A1
Application number: PCT/KR2019/001212
Authority: WO
Inventors: 정영배
Original assignee: 주식회사 아이에스시
Priority date: 2018-01-29
Filing date: 2019-01-29
Publication date: 2019-08-01
Also published as: TW201937177A; KR101985464B1; TWI711826B

Abstract

The present invention relates to a test socket and, more specifically, to a test socket comprising: a housing which has an accommodation space accommodating a device-to-be-tested on which an electrical test is to be performed, and which has an open upper part; a cover capable of opening/closing the open upper part of the housing; a pusher device provided in the cover so as to downwardly press the device-to-be-tested placed in the housing; a temperature control means for injecting air or a refrigerant of a predetermined temperature into the accommodation space so as to regulate the temperature in the accommodation space; and a sealing means capable of sealing the accommodation space from the outside when the cover closes the housing, wherein the sealing means comprises: a first packer which is disposed on the housing upper surface facing the cover and which encompasses the accommodation space; a second packer spaced apart from the first packer, and disposed on the housing upper surface so as to encompass the first packer; and a vacuuming means for forming a vacuum state between the first packer and the second packer.

Description

Socket for inspection

The present invention relates to a test socket, and more particularly, to a test socket capable of quickly adjusting a temperature of a test space during an electrical test performed in a high temperature or low temperature environment.

Generally, in a process of manufacturing a semiconductor integrated circuit device, for example, a plurality of integrated circuits are formed on a wafer made of silicon, and then each of these integrated circuits is checked for fundamental electric characteristics, A probe test is performed. Subsequently, the semiconductor chip is formed by cutting the wafer, and the semiconductor chip is housed in an appropriate package. Electrical inspection is performed to select semiconductor houses with potential defects by inspecting electrical characteristics of each packaged semiconductor integrated circuit device under a high temperature or low temperature environment.

In this inspection process, devices to be inspected such as a semiconductor chip requiring inspection are not directly contacted with the inspection device but indirectly through the inspection connector including the inspection socket.

In addition, the device to be inspected is placed on the upper surface of the connector for inspection, and then the upper surface of the device to be inspected is pressed by the pusher device, thereby making sure contact with the connector for inspection.

Such a conventional inspection socket has the following problems.

In the prior art, after the pressing surface of the pusher device is heated or cooled by air at a high or low temperature, the pressing surface conveys heat to the device to be inspected, thereby forming a high temperature or low temperature environment. In this process, Or it takes a long time to create a low-temperature environment.

Further, in the prior art, the pusher apparatus is provided with the thermal control means, which causes a problem that the entire pusher apparatus becomes complicated.

The present invention has been made in order to solve the above-described problems, and more particularly, it is an object of the present invention to provide an air conditioner having a predetermined temperature, And to provide a socket for inspection which enables the socket to be manufactured.

In addition, since the temperature of the accommodation space needs to be adjusted by air or a coolant having a predetermined temperature, the space in which the device to be inspected is sealed is reliably sealed, and there is no heat loss, And it is an object of the present invention to provide a test socket capable of making a test socket.

Another object of the present invention is to provide an inspection socket which can reliably prevent heat loss inside the housing by insulating the space between the housing space and the outside by vacuum.

According to another aspect of the present invention, there is provided a socket for inspection comprising: a housing having a housing space in which an inspected device requiring electrical inspection can be received;

A cover capable of opening and closing an open top of the housing;

A pusher device which is provided on the cover and presses the device under test placed on the housing downward;

Temperature adjusting means for adjusting the temperature in the accommodating space by injecting air or a coolant at a predetermined temperature into the accommodating space; And

And sealing means for sealing the accommodation space from the outside when the cover closes the housing,

The sealing means includes a first packer disposed on the upper surface of the housing facing the cover and surrounding the accommodation space, a second packer spaced apart from the first packer and disposed on the upper surface of the housing to surround the first packer, And a vacuum means for bringing the vacuum between the first packer and the second packer.

In the inspection socket,

The first packer can be hermetically contacted with the lower surface of the cover while being seated on the upper surface of the housing.

In the inspection socket,

The second packer can be hermetically contacted to the cover in a state of being seated on the upper surface of the housing.

In the inspection socket,

The vacuum means may discharge the air between the first packer and the second packer to the outside.

In the inspection socket,

A sealing space disposed between the first packer and the second packer;

A connection hole passing through the housing to communicate with the outside of the sealing space; And

And suction means for sucking air between the first packer and the second packer through the connection hole.

In the inspection socket, the sealing space may be formed by recessing the upper surface of the housing while surrounding the first packer.

In the inspection socket, the vacuum means can uniformly adhere the lower surface of the cover to the upper surface of the housing.

In the inspection socket,

The temperature regulating means may include a first air injecting portion for supplying high temperature air into the accommodating space and a second air injecting portion for supplying low temperature air or refrigerant into the accommodating space.

In the inspection socket,

The temperature adjusting means may be installed on a side surface of the housing.

In the inspection socket, the cover is hingedly connected to the housing, and can be automatically opened and closed by the transmission means.

In the inspection socket, the cover may be hingedly connected to the housing and manually opened and closed.

A cover capable of opening and closing an open top of the housing;

The sealing means includes a first packer disposed on the upper surface of the housing facing the cover and surrounding the accommodation space, a second packer spaced apart from the first packer and disposed on the upper surface of the housing to surround the first packer, And vacuum means for discharging the air between the first packer and the second packer to the outside to insulate the accommodation space of the housing from the outside.

The inspection socket may include a pusher device provided on the cover and capable of pushing down the device to be inspected disposed in the accommodation space while being viewed from the lower surface of the cover.

In the inspection socket,

The vacuum means can bring the cover into close contact with the housing without clearance.

A cover capable of opening and closing an open top of the housing;

A pusher device which is provided on the cover and presses the device under test placed on the housing downward; And

The inspection socket according to the present invention provides an advantage that the inspection environment can be quickly made to a desired temperature condition by providing the air or the refrigerant having a predetermined temperature in the accommodation space of the inspection device.

Further, the accommodation space is surely sealed with the outside by the sealing member, so that there is no heat loss and the desired temperature condition can be made quickly.

Further, since the first packer and the second packer that seal the accommodation space from the outside are provided, there is an advantage that the airtightness can be reliably maintained.

Further, since the vacuum means for discharging the air between the first packer and the second packer to the outside to maintain the vacuum state is provided, heat loss of the housing can be reliably prevented.

In addition, there is no need to attach a separate member for temperature control to the pusher device, which makes it possible to simplify the structure of the pusher device as a whole.

1 is an exploded perspective view of a test socket of the present invention.

Fig. 2 is a perspective view of the coupling of Fig. 1; Fig.

Figure 3 is a plan view of Figure 2;

Figure 4 is a side view of Figure 2;

Fig. 5 is a front view of Fig. 2

6 is a sectional view taken along the line VI-VI of Fig. 3;

7 is a cross-sectional view taken along line VII-VII of FIG. 3;

8 is a view showing a state in which the cover is opened in the inspection socket of Fig. 2;

Figs. 9 to 11 are views showing the sealing structure in detail in the inspection socket of Fig. 8; Fig.

12 is a sectional view showing an inspection state of the device to be inspected in the inspection socket of FIG. 2;

Hereinafter, a test socket according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The inspection socket 10 according to the present invention is characterized in that the terminal of the device under test 81 is electrically connected to the pad of the inspection device (not shown) in order to conduct the electrical inspection of the device under test 81 such as a semiconductor chip . Specifically, an inspection apparatus to which a predetermined inspection signal is applied is disposed under the inspection socket 10, and an inspection signal applied from the inspection apparatus is transmitted to the inspection target device 10 mounted on the inspection socket 10 81 to perform a predetermined electrical inspection of the inspected device 81. [

The inspection socket 10 includes a housing 20, a cover 30, a pusher device 40, a temperature regulating means 50, an air discharging portion 60 and a sealing means 70.

The housing 20 includes a body portion 21, a hinge means 22, and a locker 23.

The body part 21 is provided with a receiving space 20a in which the device under test 81 can be received, and the upper part is opened. Specifically, the body portion 21 of the housing 20 has a rectangular frame shape, and at the center thereof, a receiving space 20a in which the device under test 81 can be received is provided.

A first receiving groove 211 is formed on an upper surface of the body portion 21 of the housing 20 so as to surround the receiving space 20a and a first packer 71 is installed. A second receiving groove 212 spaced apart from the first receiving groove 211 and provided with a second packer 72 is provided outside the first receiving groove 211.

A sealing space 731 is provided between the first receiving groove 211 and the second receiving groove 212. The sealing space 731 is formed by recessing the upper surface of the body portion 21 of the housing 20 while enclosing the first packer 71. The sealing space 731 is connected to a connection hole 732 passing through the housing 20 so as to communicate with an external suction means (not shown).

A first through hole 213 communicating with the accommodating space 20a is provided on the side surface of the body portion 21 of the housing 20 so that high temperature and low temperature air or refrigerant can be supplied from the outside, A second through hole 214 is formed at a position adjacent to the one through hole 213 to allow air or refrigerant in the accommodating space 20a to be discharged to the outside.

The hinge means 22 comprises a hinge body 221 having a hinge pin 222 penetrating in the longitudinal direction and a hinge pin 222 coupled to the hinge body 221. The cover 30 is coupled to both ends of the hinge pin 222 to enable the cover 30 to be opened and closed.

The locker 23 is installed at one side of the body 21 and functions to fix the closing position of the cover 30 when the cover 30 is placed in the closed position. Specifically, the locker 23 is configured to be hooked on the upper surface of the cover 30 so as to fix the cover 30 so that the cover 30 does not hinge from the closed position to the open position. Such a locker 23 is a conventional fixing means and its detailed description is omitted.

The cover 30 is configured to open and close an opened upper portion of the housing 20 and constitutes a receiving space 20a in cooperation with the housing 20. [ That is, when the cover 30 closes the housing 20, the internal space of the cover 30 becomes the accommodating space 20a. The cover 30 is coupled with the hinge pin 222 and is rotatable. When the inspected device 81 is inserted into or withdrawn from the accommodation space 20a, the cover 30 is opened and the accommodation space 20a of the housing 20 is opened. And closes the accommodating space 20a after the inspected device 81 is placed in the accommodating space 20a for inspection. The cover 30 includes a door base 31 to which the hinge pin 222 is pivotally coupled and an upper base 32 which is fixedly installed on the lower side of the door base 31 and is capable of closing the upper surface of the housing 20 ).

The door base 31 is provided at its center with a first through hole 311 through which the pusher device 40 passes and at a position corresponding to the first through hole 311 in the upper base 32, And a second through hole 321 through which the first electrode 40 penetrates.

The pusher device 40 is provided on the cover 30 and presses the device under test 81 placed on the housing 20 downward. Specifically, the pusher device 40 presses the device under test 81 toward the inspection device so that the terminal of the device under test 81 is electrically and securely connected to the pad of the inspection device.

The pusher device 40 includes a pusher body 41, a cylinder rod 42, and a pressure plate 43. The pusher body 41 is fixedly installed on the upper surface of the cover 30 so as to raise or lower the cylinder rod 42. The pusher body 41 allows the cylinder rod 42 to move linearly by pneumatic or other various known driving methods.

The cylinder rod 42 is moved up or down by the pusher body 41 so that the pressure plate 43 presses or releases the upper surface of the device under test 81. Specifically, an upper portion of the cylinder rod 42 is coupled to the pusher body 41, a lower portion thereof is fixed to the pressure plate 43, and an intermediate portion thereof is connected to the first through hole 311 and the second through hole 311 of the cover 30, (321). The cylinder rod 42, which is raised or lowered by the pusher body 41, can perform the pressing operation while raising or lowering the pressure plate 43 at the lower end.

The pressure plate 43 is coupled to the lower end of the cylinder rod 42 and is lifted or lowered together with the cylinder rod 42 to contact the upper surface of the device under test 81, . This pressure plate 43 is disposed on the lower side of the cover 30.

The temperature regulating means 50 adjusts the temperature in the accommodating space 20a by injecting air or a coolant at a predetermined temperature into the accommodating space 20a. The temperature regulating means 50 is fitted into the side surface of the housing 20, specifically, the first through hole 213 provided on one side of the base member 22, and communicates with the accommodating space 20a. The present invention is not limited to adding a new structure to the housing 20 but merely forming a first through hole 213 in the housing 20 and connecting air or a means for injecting refrigerant to the first through hole 213, 81) is accommodated in the accommodating space 20a. The temperature regulating means 50 may be provided on the side surface of the housing 20, but may be provided on the upper surface or the lower surface of the housing 20 as required.

The temperature regulating means 50 includes a first air injecting portion 51 for supplying high temperature air into the accommodating space 20a and a second air injecting portion 51 for supplying low temperature air or refrigerant into the accommodating space 20a. And an injection unit 52. In this case, the refrigerant is a substance that causes a cooling action, and it means all media that act in such a way as to take the heat away from the surroundings and lower the ambient temperature at low temperature such as liquefied nitrogen.

In order to create a high-temperature environment in the accommodation space 20a, hot air from the first air injection unit 51 flows into the accommodation space 20a, and thus the temperature inside the accommodation space 20a rapidly rises .

In order to create a low-temperature environment inside the accommodation space 20a, low-temperature air or coolant flows from the second air injection unit 52 and is supplied to the accommodation space 20a, It goes down quickly.

Specifically, the inside of the accommodation space 20a can be adjusted to a temperature of -40 to 150 degrees by the temperature control means 50, and the temperature can be precisely controlled within 1 degree.

The air discharging part 60 discharges air or refrigerant in the receiving space 20a to the outside and discharges air or refrigerant to the outside during or after the inspection is performed by supplying air or refrigerant . When high temperature air is continuously supplied into the accommodating space 20a through the first air injecting unit 51 while the electrical inspection of the inspected device is being received, So that the temperature inside the accommodation space 20a can be kept at a high temperature while being discharged to the outside through the heat exchanger 60. When the low-temperature air or refrigerant is continuously supplied through the second air injection unit 52, air or refrigerant in the accommodation space 20a is discharged to the outside through the air discharge unit 60, The internal temperature can be maintained at a low temperature. The air discharge portion 60 is connected to the second through hole 214 provided on the side surface of the housing 20.

The sealing means 70 is capable of sealing the accommodating space 20a from the outside when the cover 30 closes the housing 20. That is, in order to raise or lower the temperature inside the accommodation space 20a by the high temperature air, the low temperature air or the coolant, the airtightness is required. In order to maintain the airtightness of the accommodation space 20a, .

This sealing means 70 includes a first packer 71, a second packer 72 and a vacuum means 73.

The first packer 71 is disposed on the upper surface of the housing 20 facing the cover 30 and is configured to surround the accommodation space 20a. The first packer 71 may be made of a rubber material and fit into the first receiving groove 211 on the upper surface of the housing 20. The first packer 71 is hermetically contacted with the lower surface of the cover 30 while being seated on the upper surface of the housing 20. Since the first packer 71 is disposed so as to surround the first accommodating space 20a, air or refrigerant in the first accommodating space 20a flows out through the gap between the cover 30 and the housing 20 .

The second packer 72 is spaced from the first packer 71 and disposed on the upper surface of the housing 20 so as to surround the first packer 71. The second packer 72 may be made of a rubber material and fit into the second receiving groove 212 on the upper surface of the housing 20. The second packer 72 is larger than the first packer 71 so as to surround the first packer 71. The second packer 72 is hermetically contacted with the lower surface of the cover 30 while being seated on the upper surface of the housing 20. Since the second packer 72 is disposed so as to surround the first packer 71, it is possible to reliably prevent the air or the refrigerant flowing out through the first packer 71 from flowing out to the outside.

The vacuum means 73 allows the first packer 71 and the second packer 72 to be in a vacuum state. Specifically, the vacuum means 73 discharges air between the first packer 71 and the second packer 72 to the outside through a connection hole 732 through a separate suction means, 2 packers 72 can be placed in a vacuum state.

If the air inside the sealing space 731 is sucked from the outside in a state where the cover 30 is closed to close the first and

second packers

71 and 72, This allows heat to escape from the air escaping through the air to improve heat control speed and time in the test room.

This vacuum means 73 is composed of a sealing space 731, a connection hole 732 and a suction means (not shown).

The sealing space 731 is disposed between the first packer 71 and the second packer 72 and is formed by recessing the upper surface of the housing 20 so as to surround the first packer 71.

The connection hole 732 is formed to penetrate the housing 20 through the sealing space 731 and the outside. The connection hole 732 functions as a passage through which the air in the sealing space 731 flows.

The suction means sucks air between the first packer 71 and the second packer 72 through the connection hole 732. The suction means sucks air so that the first packer 71 and the second packer 72, (72) to be in a vacuum state.

Meanwhile, the vacuum means 73 also functions to uniformly adhere the lower surface of the cover 30 to the upper surface of the housing 20. When the pusher device 40 presses the device under test 81 in a state in which the cover 30 is closed, due to the minute clearance existing in the connecting portion (hinge portion) of the cover 30 and the

housing

20, 40 may not be able to uniformly press the semiconductor device because the cover 30 near the hinge is slightly moved due to the reaction of the pushing force of the pushing device 81, When the cover 30 is uniformly brought into close contact with the housing 20, the hinge portion is fixed and the clearance is not generated, so that the pusher device 40 is moved to the inspected device 81 ) Can be uniformly pressed.

In the present invention,

reference numerals

82 and 90 denote inserts 82 and transmission means 90, respectively.

The insert 82 is inserted into the accommodation space 20a of the housing 20 and guides the inspected device 81 carried from the outside for inspection. That is, the accommodating space 20a has a somewhat large size to accommodate various types of inspected devices 81. In this accommodating space 20a, the device under test 81 is seated at the correct position, Thereby guiding the device under test 81 so that the inspection can be performed. These inserts 82 have a square frame shape as a structure inserted into the housing space 20a and seated inside the housing 20. [ By changing the size of the center hole of the insert 82, it is possible to easily guide various types of devices to be inspected 81.

The transmission means (90) automatically opens and closes the cover (30) hingedly connected to the housing (20). This transmission means 90 includes a motor 91 and a power transmission body 92 and transmits the rotational force of the motor 91 to the hinge pin 222 of the power transmission body 92 so that the cover 30 So that it can rotate automatically. That is, when the motor 91 rotates in one direction, the cover 30 opens the upper portion of the housing 20, and when the motor 91 rotates in the other direction, the cover 30 interlocks with the housing 20, As shown in Fig.

The test socket 10 according to the present invention has the following actions and effects.

First, as shown in Fig. 8, the device to be inspected 81 carried from the outside is inserted into the accommodating space 20a of the housing 20 with the cover 30 opened. At this time, the lower surface of the device 81 to be inspected is electrically connected to the inspection apparatus. Thereafter, the cover 30 is rotated to close the upper surface of the housing 20, and then the pusher device 40 is operated. At this time, the pusher device 40 causes the lower surface of the pressure plate 43 to contact the upper surface of the device under test 81 as shown in FIG. 12 by lowering the cylinder rod 42, So that the inspected device 81 is brought into contact with the inspection connector 82 securely.

Thereafter, when hot or cold air or coolant is introduced into the containing space 20a from the temperature regulating means 50 for electrical inspection, the inside of the containing space 20a is quickly changed to the environmental condition of the desired temperature. In this way, the inside of the accommodation space 20a is subjected to a predetermined electrical inspection in a specific temperature environment of high temperature or low temperature. During the inspection, high temperature, low temperature air or refrigerant is continuously injected into the accommodation space 20a, and at the same time, air or refrigerant is discharged through the air outlet 60, Can be maintained.

At this time, when the air existing between the first packer 71 and the second packer 72 is discharged to the outside by operating the vacuum means 73, the air between the first packer 71 and the second packer 72 Is in a vacuum state. When the first packer 71 and the second packer 72 are in a vacuum state, the air serving as the heat medium is removed, thereby preventing the heat loss. Thus, the heat control speed in the housing space 20a of the housing 20 And time is shortened. The pusher device 40 fixed to the cover 30 while the cover 30 is reliably in contact with the housing 20 while the air is discharged to the outside in the sealing space 731, So that it can be pressed with a uniform force.

After the inspecting is completed, air or refrigerant in the accommodating space 20a is discharged to the outside through the air discharging portion 60, and then the pusher device 40 is operated to move the pressure plate 43 to the inspected device 81 . After the cover 30 is rotated to open the upper portion of the housing 20, the inspected device 81 that has been inspected is moved to the outside. On the other hand, when the additional test is required, the above-described operation is repeated while carrying the new inspected device 81.

The inspecting socket 81 according to the present invention is used for inspecting the inspecting device 81 under a specific temperature environment of a high temperature or a low temperature in a housing space 20a in which the inspecting device 81 is accommodated, , The inspection time can be minimized by introducing low temperature air or refrigerant. In the prior art, after the pressure plate of the pusher device 40 is heated or cooled, the inspection is performed through indirect heat transfer, which causes the heat of the pressure plate to be transmitted to the device under test 81. This prior art technique, And the inspection time takes a long time. However, the present invention solves this problem.

In particular, the inspecting socket 10 according to the present invention is a housing 20 made of a plastic material which is resistant to heat and cold, and uses less air and refrigerant to reduce the time required to reach a desired temperature, And inspection switching time.

Since the inspection socket 10 according to the present invention takes in air or refrigerant at a predetermined temperature into the accommodation space 20a, the air or the refrigerant inside the accommodation space 20a is discharged to the outside The sealing means 70 is disposed in the housing 20 in order to prevent the leakage of heat and to prevent the heat loss.

In addition, the inspection socket 10 of the prior art has a problem in that the structure of the pusher device 40 is complicated because the pusher device 40 must have a separate component for heating the pressure plate. However, in the present invention, the electrical inspection of the device under test 81 is performed by adding a simple structure that allows the air to flow from one side of the housing 20 while utilizing the existing accommodating space 20a as it is. Accordingly, the present invention has the advantage of simplifying the overall structure of the apparatus, and also has an advantage of being easy to maintain because of its simple structure.

In addition, the present invention can further ensure airtightness by forming a pair of the first packer 71 and the second packer 72 spaced apart from each other between the housing 20 and the cover 30. In addition, by making the space between the first packer 71 and the second packer 72 vacuum, the heat insulating performance can be further improved, and the heat control speed and time can be shortened. That is, in the case of using a conventional TCU (Temperature Control Unit), it takes about 40 minutes to reach a temperature of 140 degrees, and it takes about 1 hour to 1 hour and 30 minutes to reach a temperature of -40 degrees In contrast, in the case of the present invention, it takes about one minute to reach a temperature of 140 degrees, and it takes a time of about two minutes to reach a temperature of -40 degrees, .

The socket for inspection according to the present invention is not limited to the above contents, but may be modified as follows.

First, in the above-described embodiment, the rotation of the cover is automatically performed by the driving means. However, the present invention is not limited to this, and the cover may be opened and closed manually by a user.

In addition, in the above-described embodiment, the sealing means is provided only on the upper portion of the housing. However, the present invention is not limited to this, and in order to prevent air or refrigerant from escaping through the space between the lower surface of the housing and the upper surface of the testing apparatus, It is also possible to add a packer between the lower surface of the inspection apparatus and the upper surface of the inspection apparatus.

Further, it is needless to say that the sealing means is not limited to the above, and it is of course possible to additionally provide the sealing means in addition to the need for sealing.

While the present invention has been described with reference to the exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.

Claims

A housing provided with a housing space in which a device to be inspected requiring electrical inspection can be housed, and an upper portion of which is opened;

A cover capable of opening and closing an open top of the housing;

A pusher device which is provided on the cover and presses the device under test placed on the housing downward;

Temperature adjusting means for adjusting the temperature in the accommodating space by injecting air or a coolant at a predetermined temperature into the accommodating space; And

And sealing means for sealing the accommodation space from the outside when the cover closes the housing,

The sealing means includes a first packer disposed on the upper surface of the housing facing the cover and surrounding the accommodation space, a second packer spaced apart from the first packer and disposed on the upper surface of the housing to surround the first packer, And a vacuum means for bringing the vacuum between the first packer and the second packer.
The method according to claim 1,

Wherein the first packer is hermetically contacted with the lower surface of the cover while being seated on the upper surface of the housing.
The method according to claim 1,

Wherein the second packer is hermetically contacted to the cover while being seated on the upper surface of the housing.
The method according to claim 1,

Wherein the vacuum means discharges the air between the first packer and the second packer to the outside.
5. The method of claim 4,

Wherein the vacuum means comprises:

A sealing space disposed between the first packer and the second packer;

A connection hole passing through the housing to communicate with the outside of the sealing space; And

And suction means for sucking air between the first packer and the second packer through the connection hole.
6. The method of claim 5,

Wherein the sealing space is formed by recessing the upper surface of the housing while surrounding the first packer.
5. The method of claim 4,

Wherein the vacuum means uniformly adheres the lower surface of the cover to the upper surface of the housing uniformly.
The method according to claim 1,

Wherein the temperature adjusting means comprises:

A first air injection unit for supplying high-temperature air into the accommodation space;

And a second air injection unit for supplying low-temperature air or refrigerant into the accommodation space.
The method according to claim 1,

Wherein the temperature adjusting means is provided on a side surface of the housing.
The method according to claim 1,

Wherein the cover is hingedly connected to the housing and is automatically opened and closed by a transmission means.
The method according to claim 1,

Wherein the cover is hingedly connected to the housing and manually opened and closed.
A housing provided with a housing space in which a device to be inspected requiring electrical inspection can be housed, and an upper portion of which is opened;

A cover capable of opening and closing an open top of the housing;

Temperature adjusting means for adjusting the temperature in the accommodating space by injecting air or a coolant at a predetermined temperature into the accommodating space; And

And sealing means for sealing the accommodation space from the outside when the cover closes the housing,

The sealing means includes a first packer disposed on the upper surface of the housing facing the cover and surrounding the accommodation space, a second packer spaced apart from the first packer and disposed on the upper surface of the housing to surround the first packer, And a vacuum means for discharging air between the first packer and the second packer to the outside to insulate the accommodation space of the housing from the outside.
13. The method of claim 12,

And a pusher device provided on the cover, the pusher device being capable of pushing down the device to be inspected disposed in the accommodating space while protruding and retracting from the lower surface of the cover.
14. The method of claim 13,

And the vacuum means makes the cover closely contact with the housing without clearance.
A housing provided with a housing space in which a device to be inspected requiring electrical inspection can be housed, and an upper portion of which is opened;

A cover capable of opening and closing an open top of the housing;

A pusher device which is provided on the cover and presses the device under test placed on the housing downward; And

And sealing means for sealing the accommodation space from the outside when the cover closes the housing,

The sealing means includes a first packer disposed on the upper surface of the housing facing the cover and surrounding the accommodation space, a second packer spaced apart from the first packer and disposed on the upper surface of the housing to surround the first packer, And a vacuum means for bringing the vacuum between the first packer and the second packer.