CN210347466U - Raman probe cold and hot table and gas environment testing cavity assembly thereof - Google Patents
Raman probe cold and hot table and gas environment testing cavity assembly thereof Download PDFInfo
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- CN210347466U CN210347466U CN201921307339.0U CN201921307339U CN210347466U CN 210347466 U CN210347466 U CN 210347466U CN 201921307339 U CN201921307339 U CN 201921307339U CN 210347466 U CN210347466 U CN 210347466U
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Abstract
The utility model relates to a raman probe cold and hot platform and gaseous environment test chamber subassembly thereof, raman probe cold and hot platform, include the test chamber subassembly and set up the microscope on the test chamber subassembly, the test chamber subassembly includes shell and shell upper cover plate, is provided with the observation window that supplies microscope raman to observe on the shell upper cover plate, is provided with the objective table that supplies the chip to place in the shell and is used for to waiting to detect the corresponding extreme electric connection's of chip probe, be provided with on the shell with being used for of shell inner chamber intercommunication let in the gaseous or the gas connection of evacuation of test to shell inner chamber, still be provided with on the shell be used for with correspond probe electric connection's electricity connect, still be provided with heating device in the shell. The gas joint can realize the inside vacuum environment of shell or fill required different test gas environment, and the inside heating device that is provided with of shell moreover can realize the test environment under the different temperatures, and the function is many, and the commonality is strong, can satisfy different test environment's requirement, convenient to use.
Description
Technical Field
The utility model relates to a test equipment field, concretely relates to raman probe cold and hot platform and gaseous environment test chamber subassembly thereof.
Background
The probe station is mainly applied to the fields of semiconductor industry, photoelectric industry, superconduction, integrated circuits and the like and is used for testing chips, gas sensors and packaging devices. It is intended to ensure quality and reliability and to reduce development time and cost of a device manufacturing process. The probe station generally includes a test chamber assembly for chip mounting and a microscope disposed above the test chamber assembly. For example, semiconductor sensors require inspection and testing of chips during manufacturing and development, have various shapes and various diameter specifications, and require alignment of probes to test contacts with a microscope during testing to test electrochemical signals and observe physical phenomena (raman effect) on the chip surface. For example, a gas sensor including a semiconductor sensor can sense and detect the leakage concentration of flammable and explosive or toxic gas around the gas sensor, and when the gas sensor is tested, corresponding gas with different concentrations needs to be filled in a test cavity assembly. For different testing requirements, testing environments with different temperatures and testing environments with different vacuum degrees and the like may be required, and the conventional probe station has a single function and poor universality, so that the use is inconvenient.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a Raman probe cold and hot table to meet the requirement of simultaneously testing micro electrochemical signals and photochemical signals in different environments; and simultaneously, the utility model aims at still providing a gaseous environment test chamber subassembly that above-mentioned probe station used.
In order to achieve the above object, the utility model discloses a raman probe is gas environment test chamber subassembly for cold and hot platform adopts following technical scheme: a gas environment testing cavity assembly for a Raman probe cold and hot table comprises a shell and a shell upper cover plate, wherein an observation window for microscope Raman observation is arranged on the shell upper cover plate, an object stage for placing a chip and a probe for detecting the corresponding extreme electric connection of the chip are arranged in the shell, a gas connector communicated with the inner cavity of the shell and used for introducing test gas or vacuumizing to the inner cavity of the shell is arranged on the shell, an electric connector used for corresponding to the electric connection of the probe is further arranged on the shell, and a heating device is further arranged in the shell.
The heating device comprises a shell, the objective table is a heat conducting block, a mounting cavity for the objective table to be placed is formed in the shell, a heating wire or a heating rod is arranged on the heat conducting block, and a temperature sensor is further arranged on the heat conducting block.
The shell is provided with an object stage cooling structure used for cooling the object stage, the object stage cooling structure comprises a first cooling channel and a second cooling channel which are respectively communicated with the installation cavity, and the shell is provided with a first cooling joint communicated with the first cooling channel and a second cooling joint communicated with the second cooling channel.
The shell is provided with a shell cooling structure used for cooling the shell, the shell cooling structure comprises a cooling groove arranged on the outer side surface of the bottom wall of the shell and a cooling groove sealing sheet in sealing fit with the cooling groove, and the shell is provided with a third cooling joint and a fourth cooling joint which are respectively communicated with the two ends of the cooling groove.
The cooling groove forms any one of a C-shaped structure, a U-shaped structure and a rectangular structure with a notch on the long side on the side wall of the shell.
The quantity of probe is more than two, and each probe is through adjusting structure movable mounting on the diapire of shell to realize each probe and wait to detect the position control between the chip, wait to detect the chip with the adaptation different specifications.
The adjusting structure comprises a guide rail arranged on the bottom wall of the shell and a guide block movably installed with the guide rail in a guiding mode, the probe is connected onto the guide block to achieve that the probe is horizontally far away from or close to the objective table, and a locking screw is arranged between the guide block and the guide rail.
Each the probe is rotatably installed on the guide block through the probe installation column, the guide block is provided with an installation hole for the probe installation column to be rotatably installed, and the position of the probe installation column is fixed by means of friction force between the probe installation column and the installation hole.
The upper cover plate of the shell is provided with an observation hole, the observation window comprises a glass plate which is hermetically arranged in the observation hole, a pressing plate is arranged on the outer side of the glass plate in the observation hole, and a clamping groove for clamping and matching the operation wrench to disassemble the glass plate is formed in the pressing plate.
The utility model discloses a cold and hot platform of Raman probe adopts following technical scheme: raman probe cold and hot platform, including the test chamber subassembly with set up the microscope on the test chamber subassembly, the test chamber subassembly includes shell and shell upper cover plate, is provided with the observation window that supplies microscope Raman to observe on the shell upper cover plate, be provided with in the shell and supply the objective table that the chip was placed and be used for to wait to detect the corresponding extreme electric connection's of chip probe, be provided with on the shell with being used for of shell inner chamber intercommunication let in experimental gaseous or the gas connector of evacuation to the shell inner chamber, still be provided with on the shell be used for with correspond probe electric connection's electricity and connect, still be provided with heating device in the shell.
The heating device comprises a shell, the objective table is a heat conducting block, a mounting cavity for the objective table to be placed is formed in the shell, a heating wire or a heating rod is arranged on the heat conducting block, and a temperature sensor is further arranged on the heat conducting block.
The shell is provided with an object stage cooling structure used for cooling the object stage, the object stage cooling structure comprises a first cooling channel and a second cooling channel which are respectively communicated with the installation cavity, and the shell is provided with a first cooling joint communicated with the first cooling channel and a second cooling joint communicated with the second cooling channel.
The shell is provided with a shell cooling structure used for cooling the shell, the shell cooling structure comprises a cooling groove arranged on the outer side surface of the bottom wall of the shell and a cooling groove sealing sheet in sealing fit with the cooling groove, and the shell is provided with a third cooling joint and a fourth cooling joint which are respectively communicated with the two ends of the cooling groove.
The cooling groove forms any one of a C-shaped structure, a U-shaped structure and a rectangular structure with a notch on the long side on the side wall of the shell.
The quantity of probe is more than two, and each probe is through adjusting structure movable mounting on the diapire of shell to realize each probe and wait to detect the position control between the chip, wait to detect the chip with the adaptation different specifications.
The adjusting structure comprises a guide rail arranged on the bottom wall of the shell and a guide block movably installed with the guide rail in a guiding mode, the probe is connected onto the guide block to achieve that the probe is horizontally far away from or close to the objective table, and a locking screw is arranged between the guide block and the guide rail.
Each the probe is rotatably installed on the guide block through the probe installation column, the guide block is provided with an installation hole for the probe installation column to be rotatably installed, and the position of the probe installation column is fixed by means of friction force between the probe installation column and the installation hole.
The upper cover plate of the shell is provided with an observation hole, the observation window comprises a glass plate which is hermetically arranged in the observation hole, a pressing plate is arranged on the outer side of the glass plate in the observation hole, and a clamping groove for clamping and matching the operation wrench to disassemble the glass plate is formed in the pressing plate.
The utility model has the advantages that: the gas joint can realize the inside vacuum environment of shell or fill required different test gas environment, and the inside heating device that is provided with of shell moreover can realize the test environment under the different temperatures, and the function is many, and the commonality is strong, can satisfy different test environment's requirement, convenient to use.
Drawings
Fig. 1 is a first schematic structural diagram of a test chamber assembly in an embodiment of a raman probe cooling and heating table of the present invention;
fig. 2 is a schematic structural diagram ii of a test chamber assembly in an embodiment of the raman probe cooling and heating stage of the present invention;
fig. 3 is a schematic structural diagram three of a test chamber assembly in an embodiment of the raman probe cooling and heating table of the present invention;
FIG. 4 is a schematic view of the test chamber assembly of FIG. 1 with the upper sidewalls removed;
FIG. 5 is a first schematic structural view of the heating apparatus of FIG. 1;
FIG. 6 is a schematic structural view II of the heating apparatus shown in FIG. 1;
FIG. 7 is a cross-sectional view at A-A of FIG. 6;
FIG. 8 is a cross-sectional view of FIG. 6 at B-B;
FIG. 9 is a schematic view of an alternate angle configuration of the test chamber assembly of FIG. 1;
fig. 10 is a cross-sectional view at C-C of fig. 9.
Detailed Description
Embodiments of the raman probe hot and cold stage of the present invention, as shown in fig. 1-10, include a test chamber assembly and a microscope (not shown) disposed above the test chamber assembly. The testing cavity assembly comprises a shell 1 and a shell upper cover plate 3, and an observation window 4 for microscope Raman observation is arranged on the shell upper cover plate 3. The shell 1 is provided with an object stage 15 for placing a chip and probes 16 for electrically connecting corresponding extreme ends of the chip to be detected, the number of the probes 16 is 4 in the embodiment, and the probes 16 are elastic probes and can be broken up and down. The shell 1 is provided with a gas connector 6 which is communicated with the inner cavity of the shell and is used for introducing test gas into the inner cavity of the shell or vacuumizing the inner cavity of the shell. The housing 1 is also provided with electrical connectors 5 for electrical connection with corresponding probes, and likewise the number of electrical connectors 5 is 4. A heating device 17 is also provided within the housing 1.
Heating device 17 includes casing 20, and objective table 15 is the heat conduction piece, is provided with the installation cavity 21 that supplies the objective table to place on casing 20, and casing 20 runs through from top to bottom in installation cavity 21, and the bottom of installation cavity 21 is provided with closing plate 24, and objective 15 platform from top to bottom seal installation is in installation cavity 21. The heat conducting block is provided with a heating rod and a temperature sensor. The objective table is provided with heating rod mounting holes 25 for the heating rods to penetrate, the number of the heating rod mounting holes is two, and the number of the heating rods is also two. The objective table is further provided with a temperature sensor mounting hole 26, and the temperature sensor mounting hole 26 is located between the two heating rod mounting holes 25. The shell is also provided with a data terminal fixing seat 7, the data terminal fixing seat 7 is provided with a power jack 13 for supplying power to the heating rod and a data transmission-power jack 14 for electrically connecting with the temperature sensor, the temperature control of the object stage adopts external closed loop control, the content of the part belongs to the prior art, and the specific circuit structure is not described in detail herein. The shell 20 is provided with an objective table cooling structure for cooling an objective table, the objective table cooling structure comprises a first cooling channel 22 and a second cooling channel 23 which are respectively communicated with the installation cavity 21, and the shell is provided with a first cooling joint 8 communicated with the first cooling channel and a second cooling joint 9 communicated with the second cooling channel.
In the test process, an operator possibly moves the test cavity assembly to prevent the two ends of the shell from being scalded, and the shell cooling structure for cooling the shell is arranged on the shell. The cooling structure of the housing comprises a cooling groove 12 arranged on the outer side surface of the bottom wall of the housing and a cooling groove sealing sheet (not shown in the figure) in sealing fit with the cooling groove, and the housing is provided with a third cooling joint 10 and a fourth cooling joint 11 which are respectively communicated with two ends of the cooling groove. The cooling bath 12 is formed in a rectangular structure having a notch on a long side on the side wall of the housing.
Each probe is movably mounted on the bottom wall of the shell through the adjusting structure so as to realize position adjustment between each probe and the chip to be detected and adapt to the chips to be detected with different specifications. The adjusting structure comprises a guide rail 18 arranged on the bottom wall of the shell and a guide block 19 movably installed with the guide rail 18 in a guiding mode, the length direction of the guide rail extends along the horizontal direction, the probe 16 is connected onto the guide block 19 to achieve that the probe is horizontally far away from or close to the objective table, and a locking screw is arranged between the guide block and the guide rail. Each probe 16 is rotatably mounted on a guide block 19 through a probe mounting post 20, the guide block is provided with a mounting hole for rotatably mounting the probe mounting post, and the position of the probe mounting post is fixed by means of friction force between the probe mounting post and the mounting hole.
An observation hole is formed in the upper cover plate of the shell, the observation window comprises a glass plate 29 which is hermetically arranged in the observation hole through a sealing ring, and a pressing plate 27 is further arranged on the outer side of the glass plate in the observation hole. Be provided with the sincere draw-in groove 28 that cooperates in order to dismantle the glass board of confession operation spanner card on the clamp plate, two draw-in grooves 28 symmetry sets up, have internal thread section in the observation hole in this embodiment, and clamp plate 27 threaded connection is in observing the hole.
When the test device is used, a chip to be tested is placed on the objective table, the probes are moved to proper positions and are pressed on corresponding electrodes of the chip to be tested, and the probes are connected with an external power supply through electric connectors. Gas joint can realize the inside vacuum environment of shell or fill into required different experimental gas environment, and the inside heating device that is provided with of shell, the temperature that can control the objective table through heating rod and temperature sensor controls the test temperature environment that awaits measuring the chip promptly, can realize the experimental environment under different temperatures, observe the surface phenomenon of awaiting measuring the chip through the microscope, can also test the signal of telecommunication when observing raman effect, therefore, the commonality is strong, can satisfy different test environment's requirement, high durability and convenient use.
In other embodiments of the present invention, the number of the probes in this embodiment can be two according to actual needs, and at this time, the two probes are respectively connected to the positive electrode and the negative electrode of the chip to be tested; the heating device can also be a heating wire wound on the objective table; the heating device can also be arranged in the shell to heat the environment in the shell, but not directly heat the object stage; the cooling groove and the sealing sheet of the cooling groove can be replaced by cooling holes; the cooling groove can also form a C-shaped structure on the side wall of the shell; the cooling channels may also form a U-shaped configuration on the housing side walls.
The utility model discloses a raman probe is cold and hot platform is with the embodiment of gas environment test chamber subassembly the same with the structure of the test chamber subassembly in each embodiment of above-mentioned raman probe cold and hot platform, and here is no longer repeated.
Claims (10)
1. For the cold and hot platform of raman probe gaseous environment test chamber subassembly, including shell and shell upper cover plate, be provided with the observation window that is used for supplying microscope raman to observe on the shell upper cover plate, its characterized in that: the chip detection device is characterized in that an object stage for placing a chip and a probe for detecting the corresponding extreme electric connection of the chip to be detected are arranged in the shell, a gas joint communicated with the inner cavity of the shell and used for introducing test gas or vacuumizing to the inner cavity of the shell is arranged on the shell, an electric joint used for corresponding to the electric connection of the probe is further arranged on the shell, and a heating device is further arranged in the shell.
2. The raman probe hot and cold stage gas environment test chamber assembly of claim 1, wherein: the heating device comprises a shell, the objective table is a heat conducting block, a mounting cavity for the objective table to be placed is formed in the shell, a heating wire or a heating rod is arranged on the heat conducting block, and a temperature sensor is further arranged on the heat conducting block.
3. The raman probe hot and cold stage gas environment testing chamber assembly of claim 2, wherein: the shell is provided with an object stage cooling structure used for cooling the object stage, the object stage cooling structure comprises a first cooling channel and a second cooling channel which are respectively communicated with the installation cavity, and the shell is provided with a first cooling joint communicated with the first cooling channel and a second cooling joint communicated with the second cooling channel.
4. The raman probe hot and cold stage gas environment test chamber assembly of claim 3, wherein: the shell is provided with a shell cooling structure used for cooling the shell, the shell cooling structure comprises a cooling groove arranged on the outer side surface of the bottom wall of the shell and a cooling groove sealing sheet in sealing fit with the cooling groove, and the shell is provided with a third cooling joint and a fourth cooling joint which are respectively communicated with the two ends of the cooling groove.
5. The Raman probe cold and hot stage gas environment test chamber assembly of claim 4, wherein: the cooling groove forms any one of a C-shaped structure, a U-shaped structure and a rectangular structure with a notch on the long side on the side wall of the shell.
6. The Raman probe hot and cold stage gas environment test chamber assembly of any one of claims 1-5, wherein: the quantity of probe is more than two, and each probe is through adjusting structure movable mounting on the diapire of shell to realize each probe and wait to detect the position control between the chip, wait to detect the chip with the adaptation different specifications.
7. The raman probe hot and cold stage gas environment test chamber assembly of claim 6, wherein: the adjusting structure comprises a guide rail arranged on the bottom wall of the shell and a guide block movably installed with the guide rail in a guiding mode, the probe is connected onto the guide block to achieve that the probe is horizontally far away from or close to the objective table, and a locking screw is arranged between the guide block and the guide rail.
8. The raman probe hot and cold stage gas environment test chamber assembly of claim 7, wherein: each the probe is rotatably installed on the guide block through the probe installation column, the guide block is provided with an installation hole for the probe installation column to be rotatably installed, and the position of the probe installation column is fixed by means of friction force between the probe installation column and the installation hole.
9. The raman probe hot and cold stage gas environment test chamber assembly of claim 1, wherein: the glass plate observation window is characterized in that an observation hole is formed in the upper cover plate of the shell, the observation window comprises a glass plate which is hermetically installed in the observation hole, a pressing plate is further arranged on the outer side of the glass plate in the observation hole, and a clamping groove for clamping and matching the operation wrench to disassemble the glass plate is formed in the pressing plate.
10. Raman probe cold and hot platform, including test chamber subassembly and set up in the microscope of test chamber subassembly top, its characterized in that: the testing chamber assembly is tested in a gas environment using a raman probe hot and cold stage according to any one of claims 1 to 9.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921307339.0U CN210347466U (en) | 2019-08-13 | 2019-08-13 | Raman probe cold and hot table and gas environment testing cavity assembly thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921307339.0U CN210347466U (en) | 2019-08-13 | 2019-08-13 | Raman probe cold and hot table and gas environment testing cavity assembly thereof |
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| CN210347466U true CN210347466U (en) | 2020-04-17 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110346351A (en) * | 2019-08-13 | 2019-10-18 | 郑州科探仪器设备有限公司 | A kind of cold and hot of Raman microprobe and its gaseous environment test chamber component |
-
2019
- 2019-08-13 CN CN201921307339.0U patent/CN210347466U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110346351A (en) * | 2019-08-13 | 2019-10-18 | 郑州科探仪器设备有限公司 | A kind of cold and hot of Raman microprobe and its gaseous environment test chamber component |
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