WO2019142866A1 - Polyimide precursor resin composition - Google Patents

Polyimide precursor resin composition Download PDF

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Publication number
WO2019142866A1
WO2019142866A1 PCT/JP2019/001296 JP2019001296W WO2019142866A1 WO 2019142866 A1 WO2019142866 A1 WO 2019142866A1 JP 2019001296 W JP2019001296 W JP 2019001296W WO 2019142866 A1 WO2019142866 A1 WO 2019142866A1
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Prior art keywords
resin composition
polyimide film
polyimide
polyimide precursor
film
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PCT/JP2019/001296
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French (fr)
Japanese (ja)
Inventor
昌樹 米谷
直志 篠原
慶太 小川
隆行 金田
敏章 奥田
Original Assignee
旭化成株式会社
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Application filed by 旭化成株式会社 filed Critical 旭化成株式会社
Priority to CN201980006444.7A priority Critical patent/CN111479854B/en
Priority to JP2019566503A priority patent/JP7564621B2/en
Priority to KR1020227022370A priority patent/KR102650759B1/en
Priority to KR1020207009549A priority patent/KR102417292B1/en
Publication of WO2019142866A1 publication Critical patent/WO2019142866A1/en
Priority to JP2022128316A priority patent/JP7536836B2/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1057Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
    • C08G73/106Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing silicon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1042Copolyimides derived from at least two different tetracarboxylic compounds or two different diamino compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1057Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
    • C08G73/1064Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing sulfur
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D179/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
    • C09D179/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C09D179/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/301Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/302Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements characterised by the form or geometrical disposition of the individual elements
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2379/00Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
    • C08J2379/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08J2379/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors

Definitions

  • the present invention relates to a resin composition containing a polyimide precursor, and a polyimide film.
  • the invention further relates to flexible devices (e.g. flexible displays) and laminates and methods of making them.
  • Polyimide resins are insoluble and infusible super heat-resistant resins, and have excellent heat resistance properties (for example, heat oxidation resistance), radiation resistance, low temperature resistance, chemical resistance, and the like. For this reason, polyimide resins are used in a wide range of fields including electronic materials. Examples of application of the polyimide resin in the field of electronic materials include, for example, an insulating coating material, an insulating film, a semiconductor, an electrode protective film of a thin film transistor liquid crystal display (TFT-LCD), and the like. Recently, in place of the glass substrate conventionally used in the field of display materials, adoption of a flexible substrate utilizing its lightness and flexibility has been considered.
  • TFT-LCD thin film transistor liquid crystal display
  • Patent Document 1 discloses a resin precursor (weight-average molecular weight 30,000 to 90,000) which is polymerized from bis (diaminodiphenyl) sulfone (hereinafter also referred to as DAS) and has a siloxane unit, and the precursor is cured
  • DAS bis (diaminodiphenyl) sulfone
  • Patent Document 2 describes a resin composition comprising a polyimide precursor of a specific absorbance and an alkoxysilane compound of a specific absorbance, which is obtained by curing the resin composition. It is described that the resin to be prepared has both sufficient adhesiveness with the support and releasability by laser exfoliation and the like.
  • a resin composition containing a polyimide precursor is coated on a substrate such as glass to form a coating, which is then dried by heating, and further a polyimide precursor Is imidized to form a polyimide film, and if necessary, a device is formed on the film, and then the film is peeled off from a glass substrate as a support to obtain the desired product.
  • a slit coater when a composition containing a polyimide precursor is applied to a substrate such as glass, a slit coater may be used.
  • a coater gap (a set value for defining the distance between a glass substrate and a slit nozzle) is provided as a parameter that affects the coating film. If the size is small, the nozzle may come in contact with the substrate when the flatness of the glass substrate is poor, and the slit nozzle may be broken.
  • an object of the present invention is to provide a polyimide precursor-containing resin composition which is excellent in coating properties of slit coat and also in mechanical properties and optical properties required for applications such as flexible substrates. .
  • the present inventors have found that using a polyimide precursor having a specific structure leads to the realization of good coating properties in slit coat and good mechanical and optical properties. . That is, the present invention includes the following aspects.
  • the following formula (1) In the formula, when there are a plurality of R 1 's each independently represent a divalent organic group, and when there are a plurality of R 2' s each represent a tetravalent organic group independently, n is a positive integer.
  • a resin composition comprising a polyimide precursor having a structure represented by The weight average molecular weight of the polyimide precursor is 110,000 to 250,000, A resin composition, wherein the solid content of the resin composition is 10 to 25% by mass.
  • the shear rate dependency (TI) represented by the following formula is 0.9 to 1.1 when the viscosity of the resin composition is measured at 23 ° C. with a temperature controlled viscometer
  • the resin composition according to the above aspect 1 or 2 wherein the resin composition is a resin composition for slit coat.
  • At least one of R 1 in the formula (1) is a group represented by the following formula (2):
  • the polyimide precursor has the following formula (3): [Wherein, each of R 3 and R 4 independently represents a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, or a monovalent aromatic group having 6 to 10 carbon atoms, when there are a plurality of each. , And m is an integer of 1 to 200.
  • the resin composition according to any one of the above aspects 1 to 4 which has a structure represented by [6]
  • the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride containing 3,3 ′, 4,4′-biphenyltetracarboxylic acid dianhydride and diamine
  • the polyimide precursor is a copolymer of tetracarboxylic dianhydride and diamine, and the tetracarboxylic dianhydride is pyromellitic dianhydride and 3,3 ′, 4,4 ′.
  • -Biphenyltetracarboxylic acid dianhydride at a molar ratio of 20:80 to 80:20 of the pyromellitic acid dianhydride and the 3,3 ′, 4,4′-biphenyltetracarboxylic acid dianhydride,
  • the resin composition according to any one of the above embodiments 1 to 7.
  • the polyimide precursor is tetracarboxylic acid dianhydride, 4,4′-diaminodiphenyl sulfone, 3,3′-diaminodiphenyl sulfone, 2,2′-bis (trifluoromethyl) benzidine and 9, 9.
  • the resin composition according to any one of the above embodiments which is a resin composition for a flexible device.
  • a flexible device comprising the polyimide film according to the above-mentioned aspect 13 or 14.
  • a flexible display comprising the polyimide film according to the above-mentioned aspect 13 or 14.
  • the flexible display according to the above-mentioned aspect 16 wherein the polyimide film is disposed at a place to be viewed when the flexible display is observed from the outside.
  • At least one of R 1 in the formula (1) is a group represented by the following formula (2):
  • the polyimide precursor is represented by the following formula (3): [Wherein, each of R 3 and R 4 independently represents a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, or a monovalent aromatic group having 6 to 10 carbon atoms, when there are a plurality of each. , And m is an integer of 1 to 200. ]
  • the manufacturing method of the polyimide film of said 19 or 20 which has a structure represented by ⁇ .
  • a polyimide precursor-containing resin composition which is excellent in coating properties in slit coating and also excellent in mechanical properties and optical properties required for applications such as flexible substrates.
  • n is a positive integer.
  • the resin composition containing the polyimide precursor which has a structure represented by these is provided.
  • the resin composition comprises the polyimide precursor and a solvent.
  • At least one of R 1 in formula (1) is a group of the following formula (2): Is a group represented by
  • That at least one of R 1 in the formula (1) is a structure represented by the formula (2) contributes to good optical properties (especially Rth) and heat resistance of the polyimide which is a cured product of the polyimide precursor .
  • all of the n R 1 s in Formula (1) have a structure represented by Formula (2).
  • the ratio of the structure represented by Formula (2) to n R 1 in Formula (1) may be 0% or more, 10% or more, or 20% or more. It may be 100% or less, or 90% or less.
  • the embodiment is also a resin composition containing a polyimide precursor having a structure represented by the above formula (1), wherein the polyimide which is a cured product of the resin composition has a thickness direction retardation (Rth) 300. Also provided is a resin composition having the following and / or a yellowness (YI) of 20 or less.
  • the above low thickness direction retardation (Rth) indicates that the polyimide has low birefringence, and the above low yellowness (YI) indicates that the polyimide has a good color tone (that is, it is almost colorless) It represents that it is.
  • the resin composition of the present embodiment preferably has an excellent slit coat performance and gives a polyimide film having excellent mechanical properties and optical properties, so it is preferably for flexible devices (for example, for flexible substrates), particularly preferably It is useful for flexible displays.
  • the weight average molecular weight of the polyimide precursor is 110,000 or more and 250,000 or less.
  • the present inventor found that the weight average molecular weight of the polyimide precursor greatly affects the coating performance when using the resin composition of the present embodiment for slit coating, and has conducted intensive studies.
  • the weight average molecular weight of the polyimide precursor is 110,000 or more, the solid content of the resin composition can be adjusted to realize a good slit coat, while the weight average molecular weight is 250,000 or less
  • the polyimide precursor is found to be easy to manufacture. That is, in the present embodiment, the weight average molecular weight of the polyimide precursor is 110,000 or more in terms of coating performance, and 250,000 or less in terms of ease of manufacture.
  • the desired weight average molecular weight of the polyimide precursor may vary depending on the desired application, the type of polyimide precursor, the solid content of the resin composition, the type of solvent that the resin composition may contain, and the like.
  • preferable examples of the lower limit of the weight average molecular weight are 111,000, 112,000, 113,000, 114,000, 115,000, 116,000, 117,000, 118,000, 119,000, 120, 90, 120. 000, 121,000, 122,000, 123,000, 124,000, 125,000, 126,000, 127,000, 128,000, 129,000, 130,000, 131,000, 132,000, 133,000, 134,000, 135,000, 136,000, 137,000, 138,000, 139,000, 140,000, 141,000, 142,000, 143,000, 144,000, 145, 000, 146,000, 147,000, 148,000, 149,00 , 150,000, 151,000, 152,000, 153,000, 154,000, 155,000, 156,000, 157,000, 158,000, 159,000, 160,000, 161,000, 162 000, 163,000, 164,000, 165,000, 166,000, 167,000, 168,000, 169,000, 170,000, 171,000, 172,000, 173,000, 174,000 , 175,000, 176,000, 177,000, 178,000, 179,000, 180,000, 181,000, 182,000, 183,000, 184,000, 185,000, 18
  • preferable examples of the upper limit of the weight average molecular weight are 249,000, 248,000, 247,000, 246,000, 245,000, 244,000, 243,000, 242,000, 241,000, 240, 240.
  • a weight average molecular weight of 120,000 or more is preferable 130,000 or more is more preferable, and 160,000 or more is particularly preferable.
  • a weight average molecular weight of the polyimide precursor is 160,000 or more and 220,000 or less.
  • Rth is 300 nm or less from the viewpoint of obtaining a low birefringence polyimide film.
  • Rth is preferably 200 nm or less, more preferably 100 nm or less, more preferably 80 nm or less, more preferably 50 nm or less, and particularly preferably 30 nm. If Rth is 300 nm or less, it is easy to capture an image correctly, and in particular, if Rth is 200 nm or less, color reproducibility of the image is good.
  • the polyimide film has a retardation in the thickness direction (Rth) of 10 ⁇ m or less in the thickness direction of 300 nm or less and / or a yellowness (YI) of 10 ⁇ m or less in the film thickness of 20 or less.
  • the polyimide film has a thickness direction retardation (Rth) in terms of a film thickness of 10 ⁇ m of 300 nm or less, and a yellowness (YI) in terms of a film thickness of 10 ⁇ m of 20 or less.
  • the yellowness of polyimide film is 20 or less in view of obtaining good optical characteristics. And preferably 18 or less, more preferably 16 or less, further preferably 14 or less, further preferably 13 or less, still more preferably 10 or less, particularly preferably 7 or less.
  • the YI at a film thickness of 10 ⁇ m of the polyimide film varies depending on the monomer skeleton of the polyimide precursor, but if the monomer skeleton is the same, the larger the weight average molecular weight of the polyimide precursor, the smaller the YI tends to be.
  • the residual stress generated between the polyimide film and the glass substrate at a film thickness of 10 ⁇ m is, for example, From the viewpoint of reducing the amount of warpage of a glass substrate with a polyimide, it is preferably 25 MPa or less, more preferably 23 MPa or less, still more preferably 20 MPa or less, still more preferably 18 MPa or less, particularly preferably 16 MPa or less.
  • the tensile elongation in film thickness of 10 micrometers of the said polyimide film is 15% or more.
  • the tensile elongation is more preferably 20% or more, still more preferably 25% or more, still more preferably 30% or more, still more preferably 35% or more, from the viewpoint of mechanical strength of the flexible display. Preferably it is 40% or more.
  • the tensile elongation of the polyimide film varies depending on the monomer skeleton of the polyimide precursor, but if it is the same monomer skeleton, the tensile elongation tends to increase as the weight average molecular weight of the polyimide precursor increases.
  • the glass transition temperature Tg of the polyimide film is preferably 360 ° C. or higher, more preferably 400 ° C. or higher, from the viewpoint of being able to raise the process temperature when forming an inorganic film such as silicon nitride on polyimide in the CVD step.
  • the polyimide film preferably has a uniform film thickness.
  • the wavelength of visible light is about 380 nm to about 700 nm, and the film thickness is particularly high from the viewpoint of obtaining good display performance and the display manufacturing process. Uniformity is required. 10 ⁇ m or less is preferable, 8 ⁇ m or less is preferable, 5 ⁇ m or less is preferable, 3 ⁇ m or less is preferable, 2 ⁇ m or less is preferable, 1 ⁇ m or less is particularly preferable, and 500 nm is uniform The following are particularly preferable, and 300 nm or less is particularly preferable.
  • the film thickness uniformity is preferably as small as possible, it may be, for example, 50 nm or more or 100 nm or more from the viewpoint of improving the yield of display production.
  • the said film thickness uniformity means the value of 3 (sigma) calculated from the film thickness of several points which are measured by the method as described in the term of [Example] of this indication, for example.
  • the shear rate dependency (TI) (hereinafter, also simply referred to as TI) of the resin composition of the present embodiment is preferably 0.9 or more and 1.1 or less.
  • TI is the viscosity ⁇ a at a measurement rotational speed a (rpm) when the viscosity of the resin composition is measured at 23 ° C.
  • Shear rate dependency is preferably 0.9 or more, or 0.95 or more, or 1.0 or more, preferably 1.1 or less, or 1.05 or less, or 1.0 or less It is.
  • the resin composition is referred to as a Newtonian fluid, which is preferable because the film thickness uniformity when slit-coating the resin composition is good.
  • a polyimide film obtained by curing a resin composition having a good film thickness uniformity has a good film thickness uniformity, and thus can be suitably used as a material of a screen of a flexible display or the like.
  • the shear rate of the resin composition is large near the injection port at the time of slit coat.
  • the shear rate of the resin composition decreases on the side opposite to the inlet (i.e., the deadlock side of the nozzle).
  • the film thickness variation in the width direction can be reduced by the small shear rate dependency (specifically, TI of 0.9 or more and 1.1 or less).
  • the small shear rate dependency specifically, TI of 0.9 or more and 1.1 or less
  • the shear rate dependency of the resin composition is considered to be correlated with the method of synthesizing the resin composition.
  • all of acid dianhydride, diamine, and silicone oil which may be acid dianhydride or diamine depending on the structure are added and heated to react, and the diamine is dissolved in a solvent
  • the acid dianhydride and the silicone oil dissolved in a solvent are dropped little by little at room temperature over time, and compared with the case where they are reacted little by little, in the former case, the monomer (ie, acid dianhydride)
  • those having higher reactivity such as those having high acidity or basicity, those having less steric hindrance, etc.
  • the polyimide precursor tends to be a block polymer.
  • the coat characteristic (slit coat characteristic) by the slit nozzle of the resin composition containing a polyimide precursor has correlation with the weight average molecular weight of a polyimide precursor, and solid content of a resin composition.
  • the polyimide precursor has a low molecular weight and / or the resin composition has a low solid content, liquid leakage from the nozzle is likely to occur, while when the polyimide precursor has a high molecular weight, And / or when the resin composition has a high solid content, clogging of the varnish tends to occur at the nozzle tip. Therefore, it is preferable to control the weight average molecular weight of the polyimide precursor in such a range that the desired slit coat characteristics can be obtained by controlling the solid content.
  • the solid content of the resin composition is 10% by mass to 25% by mass.
  • the settable coat gap i.e., the gap between the tip of the slit coat nozzle and the substrate
  • the coat gap is preferably large. For example, when the coat gap is 50 ⁇ m or more, the collision between the slit nozzle and the substrate can be avoided even when the substrate size is relatively large.
  • the intended coating gap can be realized by selecting the type and molecular weight of the polyimide precursor.
  • the preferred solids content of the resin composition may vary depending on the desired application, the type and molecular weight of the polyimide precursor, the type of solvent that the resin composition may comprise, and the like.
  • Preferred examples of the lower limit of the solid content are 11 mass%, 12 mass%, 13 mass%, 14 mass%, 15 mass%, 16 mass%, 17 mass%, 18 mass%, 19 mass%, 20 mass% , 21% by mass, 22% by mass, 23% by mass or 24% by mass.
  • Preferred examples of the upper limit of the solid content are 24 mass%, 23 mass%, 22 mass%, 21 mass%, 20 mass%, 19 mass%, 18 mass%, 17 mass%, 16 mass%, 15 mass% , 14% by mass, 13% by mass, 12% by mass or 11% by mass.
  • the solid concentration is 10 to 20% by mass, and more preferably 10 to 15% by mass.
  • the polyimide precursor has the formula (3): [Wherein, each of R 3 and R 4 independently represents a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, or a monovalent aromatic group having 6 to 10 carbon atoms, when there are a plurality of each. , And m is an integer of 1 to 200. ⁇ Has a structure represented by The fact that R 3 and R 4 each is a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms or a monovalent aromatic group having 6 to 10 carbon atoms is due to the residual stress and Rth generated with the support.
  • m is 1 to 200, preferably 1 or more, or 3 or more, or 5 or more, preferably 200 or less, from the viewpoint of obtaining a polyimide capable of reducing the residual stress and Rth generated with the support. Or 180 or less, or 160 or less.
  • the polyimide precursor may have the structure of the formula (3) at any site in the molecule, but the structure of the formula (3) is preferably derived from the diamine component from the viewpoint of the type of siloxane monomer and cost. .
  • the ratio of the structural portion represented by the formula (3) to the total mass of the polyimide precursor is preferably 5% by mass or more, more preferably from the viewpoint of reducing the residual stress and Rth generated with the support. It is 6% by mass or more, more preferably 7% by mass or more, preferably 40% by mass or less, more preferably 30% by mass or less from the viewpoint of transparency of the cured product (for example, polyimide film) and heat resistance. More preferably, it is 25 mass% or less.
  • the polyimide precursor of the structure represented by the said Formula (1) is a polymer of the diamine component containing R 1 group, and the acid dianhydride component containing R 2 group.
  • the polyimide precursor having a structure represented by Formula (1) is a copolymer of tetracarboxylic acid dianhydride and diamine.
  • the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride with pyromellitic dianhydride (PMDA) and a diamine.
  • the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride containing 3,3 ', 4,4'-biphenyl tetracarboxylic acid dianhydride and a diamine.
  • the total content of pyromellitic dianhydride (PMDA) and biphenyltetracarboxylic acid dianhydride (BPDA) in total acid dianhydrides has good slit coat performance and cured products (
  • Rth thickness direction retardation
  • YI yellowness
  • Tg glass transition temperature
  • elongation of a polyimide film it is preferably 60 mol% or more, more preferably 80 mol% or more, particularly preferably Is 100 mol%.
  • the content of pyromellitic dianhydride (PMDA) in total acid dianhydride has good slit coat performance, as well as good glass transition temperature Tg of the cured product (eg polyimide film) From the viewpoint of obtaining, 0 mol% or more is preferable, 10 mol% or more is preferable, 20 mol% or more is preferable, 100 mol% or less is preferable, and 90 mol% or less is preferable.
  • the content of biphenyltetracarboxylic acid dianhydride (BPDA) in the total acid dianhydride has good slit coat performance as well as good thickness direction retardation of the cured product (eg polyimide film)
  • BPDA biphenyltetracarboxylic acid dianhydride
  • YI yellowness
  • elongation 0 mol% or more is preferable, 10 mol% or more is preferable, 20 mol% or more is preferable, 100 mol% or less is preferable, 90 mol% or less Is preferred.
  • the content ratio of pyromellitic dianhydride (PMDA): biphenyltetracarboxylic dianhydride (BPDA) in the acid dianhydride is a good thickness direction retardation of a cured product (eg polyimide film)
  • a cured product eg polyimide film
  • the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride and a diamine, said tetracarboxylic acid dianhydride being pyromellitic dianhydride and 3,3 ', 4,4.
  • the molar ratio of pyromellitic dianhydride to 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride is preferably 20:80 to 80:20, more preferably 30. : 70 to 70:30 inclusive.
  • diamine containing an R 1 group in the formula (1) examples include diaminodiphenyl sulfone (eg, 4,4′-diaminodiphenyl sulfone, 3,3′-diaminodiphenyl sulfone), p-phenylenediamine, m-phenylenediamine, 4'-diaminodiphenyl sulfide, 3,4'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl sulfide, 4,4'-diaminobiphenyl, 3,4'-diaminobiphenyl, 3,3'-diaminobiphenyl, 4 4,4'-Diaminobenzophenone, 3,4'-diaminobenzophenone, 3,3'-diaminobenzophenone, 4,4'-diaminodiphenylmethane, 3,4'-diaminodiphen
  • a diamine used to form a polyimide precursor having a structure represented by the formula (1) is diaminodiphenyl sulfone (eg, 4,4′-diaminodiphenyl sulfone and / or 3,3′-diaminodiphenyl sulfone) It is preferable to include.
  • the content of diaminodiphenyl sulfone in all diamines is preferably 50 mol% or more, more preferably 70 mol% or more, still more preferably 90 mol% or more, and may be 95 mol% or more.
  • YI yellowness
  • the diaminodiphenyl sulfone 4,4'-diaminodiphenyl sulfone is particularly preferable from the viewpoint of low yellowness (YI).
  • the diamine to be copolymerized with diaminodiphenyl sulfone is preferably diamidobiphenyls, more preferably diaminobis (triol) from the viewpoint of heat resistance of the cured product (eg polyimide film) and yellowness (YI). Fluoromethyl) biphenyl (TFMB) is included.
  • the content of diaminobis (trifluoromethyl) biphenyl (TFMB) in all diamines is preferably 20 mol% or more, more preferably 30 mol% or more from the viewpoint of the degree of yellowness (YI) of the cured product (for example, polyimide film) From the viewpoint of enabling the diamine to contain other advantageous components such as diaminodiphenyl sulfone, it is preferably at most 80 mol%, more preferably at most 70 mol%.
  • the diamine comprises a silicon containing diamine.
  • the diamine comprises a silicon-containing diamine comprising a structure represented by Formula (3) above.
  • the silicon-containing diamine for example, the following formula (3a): ⁇ Wherein R 5 represents a divalent hydrocarbon group, which may be the same or different, and each of a plurality of R 3 and R 4 is the same as defined in the formula (3), and l represents an integer of 1 to 200.
  • the diamino (poly) siloxane represented by ⁇ can be used suitably.
  • R 5 in the general formula (3a) a methylene group, an ethylene group, a propylene group, a butylene group, a phenylene group, and the like.
  • R ⁇ 3 > and R ⁇ 4 > in Formula (3a) a methyl group, an ethyl group, a propyl group, a butyl group, a phenyl group etc. are mentioned.
  • the number average molecular weight of the compound represented by the above formula (3a) is preferably 500 or more, more preferably from the viewpoint of reduction of residual stress generated between a cured product (for example, a polyimide film) to be obtained and a support. Is preferably 1,000 or more, more preferably 2,000 or more, and preferably 12,000 or less, more preferably 10,000, from the viewpoint of the transparency (particularly low haze) of the resulting cured product (eg, polyimide film). The following is more preferably 8,000 or less.
  • Specific examples of the compound represented by the above formula (3a) include both terminal amine-modified methylphenylsilicone oil (manufactured by Shin-Etsu Chemical Co., Ltd .: X22-1660B-3 (number average molecular weight 4400), X22-9409 (number average) Molecular weight 1300)) Both terminal amino modified dimethyl silicone (Shin-Etsu Chemical Co., Ltd .: X22-161A (number average molecular weight 1600), X22-161B (number average molecular weight 3000), KF 8012 (number average molecular weight 4400), Toray Dow Corning: BY16-835U (number average molecular weight 900) manufactured by Chisso Corporation: Silaprene FM 3311 (number average molecular weight 1000) and the like.
  • a both-end amine modified methylphenyl silicone oil is preferable from the viewpoint of chemical resistance improvement and Tg improvement.
  • the copolymerization ratio of the silicon-containing diamine is preferably in the range of 0.5 to 30% by mass, more preferably 1.0% to 25% by mass, still more preferably 1.5% by mass with respect to the mass of all the polyimide precursors. It is mass% to 20 mass%.
  • the content is 0.5% by mass or more, the effect of reducing the stress generated with the support is good.
  • the content is 30% by mass or less, the transparency (particularly low haze) of the cured product (for example, a polyimide film) obtained is good, which is preferable in terms of realization of high total light transmittance and prevention of lowering of Tg.
  • a dicarboxylic acid can be added within a range that does not impair its performance. You may use it. That is, the polyimide precursor of the present disclosure may be a polyamideimide precursor. A film obtained from such a polyimide precursor can have good properties such as mechanical elongation, glass transition temperature Tg, yellowness (YI) and the like.
  • the dicarboxylic acid to be used include dicarboxylic acids having an aromatic ring and alicyclic dicarboxylic acids.
  • the number of carbons referred to herein includes the number of carbons contained in the carboxyl group.
  • dicarboxylic acids having an aromatic ring are preferred.
  • Isophthalic acid derivatives and the like can be mentioned.
  • these dicarboxylic acids When these dicarboxylic acids are actually copolymerized into a polymer, they may be used in the form of acid chlorides derived from thionyl chloride and the like, active esters and the like.
  • the polyimide precursor comprises tetracarboxylic acid dianhydride, 4,4'-diaminodiphenyl sulfone, 3,3'-diaminodiphenyl sulfone, 2,2'-bis (trifluoromethyl) benzidine and 9 , 9-bis (4-aminophenyl) fluorene and copolymers with one or more diamines selected from the group consisting of
  • polyimide precursor As a particularly preferred polyimide precursor, the following may be mentioned.
  • the acid dianhydride component is pyromellitic dianhydride (PMDA) and biphenyltetracarboxylic acid dianhydride (BPDA)
  • the diamine component is diaminodiphenyl sulfone (DAS) (more preferable Is a weight average molecular weight of 110,000 to 130,000, solid content 12 to 25 mass%)
  • DAS diaminodiphenyl sulfone
  • DAS diaminodiphenyl sulfone
  • a silicon-containing diamine (More preferably, weight average molecular weight 110,000 to 210,000, solid content 10 to 25 mass%)
  • the acid dianhydride component is pyromellitic dianhydride (PMDA) and
  • the silicon-containing diamine is preferably a diamino (poly) siloxane represented by the above-mentioned formula (3a) (preferably a number average molecular weight of 500 to 12,000). And, more preferably, both terminal amine-modified methylphenylsilicone oils.
  • the polyimide precursor of the present embodiment can be synthesized by subjecting a polycondensation component including an acid dianhydride component and a diamine component to a polycondensation reaction.
  • the polycondensation component comprises an acid dianhydride component and a diamine component.
  • the polycondensation reaction is preferably carried out in a suitable solvent. Specifically, for example, there is a method of dissolving a predetermined amount of diamine component in a solvent, adding a predetermined amount of acid dianhydride to the obtained diamine solution, and stirring.
  • the molecular weight of the polyimide precursor can be controlled by adjusting the type of acid dianhydride component and diamine component, adjusting the ratio of acid dianhydride component and diamine component, adding an end capping agent, adjusting the reaction conditions, etc. It is.
  • the polyimide precursor can be made higher in molecular weight as the ratio of the acid dianhydride component to the diamine component is closer to 1: 1 and as the amount of the end capping agent used is smaller. It is recommended to use high purity products as the acid dianhydride component and the diamine component. The purity thereof is preferably 98% by mass or more, more preferably 99% by mass or more, and still more preferably 99.5% by mass or more.
  • the component and the diamine component each have the above-mentioned purity.
  • the solvent for the reaction is not particularly limited as long as it can dissolve the acid dianhydride component and the diamine component, and the resulting polyimide precursor, and a polymer of high molecular weight can be obtained.
  • solvents include, for example, aprotic solvents, phenolic solvents, ethers and glycol solvents.
  • aprotic solvent for example, N, N-dimethylformamide (DMF), N, N-dimethylacetamide (DMAc), N-methyl-2-pyrrolidone (NMP), N-methyl Caprolactam, 1,3-dimethylimidazolidinone, tetramethyl urea, the following general formula (4):
  • Equamide M100 represented by R 12 methyl group (trade name: manufactured by Idemitsu Kosan Co., Ltd.)
  • Amide solvents Lactone solvents such as ⁇ -butyrolactone and ⁇ -valerolactone
  • Phosphorus containing amide solvents such as hexamethylphosphoric amide and hexamethylphosphine triamide
  • Sulfur containing solvents such as dimethylsulfone, dimethylsulfoxide and sul
  • ether and glycol solvents for example, 1,2-dimethoxyethane, bis (2- Examples thereof include methoxyethyl) ether, 1,2-bis (2-methoxyethoxy) ethane, bis [2- (2-methoxyethoxy) ethyl] ether, tetrahydrofuran, 1,4-dioxane and the like.
  • 1,2-dimethoxyethane bis (2- Examples thereof include methoxyethyl) ether, 1,2-bis (2-methoxyethoxy) ethane, bis [2- (2-methoxyethoxy) ethyl] ether, tetrahydrofuran, 1,4-dioxane and the like.
  • solvents may be used alone or in combination of two or more.
  • the boiling point at normal pressure of the solvent used for the synthesis of the polyimide precursor is preferably 60 to 300 ° C., more preferably 140 to 280 ° C., and particularly preferably 170 to 270 ° C.
  • the boiling point of the solvent is higher than 300 ° C., a drying step is required for a long time.
  • the boiling point of the solvent is lower than 60 ° C., the surface of the resin film may be roughened, air bubbles may be mixed into the resin film, and the like during the drying process, and a uniform film may not be obtained.
  • NMP N-methyl-2-pyrrolidone
  • GBL ⁇ -butyrolactone
  • (4) a compound represented by the above general formula (4) is preferable.
  • the water content in the solvent is preferably, for example, 3,000 ppm by mass or less from the viewpoint of the progress of a good polycondensation reaction.
  • the content of molecules having a molecular weight of less than 1,000 is preferably less than 5% by mass.
  • the presence of molecules having a molecular weight of less than 1,000 in the resin composition is considered to be due to the water content of the solvent used during synthesis and the raw materials (acid dianhydride, diamine). That is, it is considered that the acid anhydride group of some of the acid dianhydride monomers is hydrolyzed by water to be a carboxyl group, and remains in a low molecular state without high molecular weight formation.
  • the water content of the solvent is preferably 3,000 ppm by mass or less, and more preferably 1,000 ppm by mass or less.
  • the amount of water contained in the raw material is also preferably 3,000 ppm by mass or less, and more preferably 1,000 ppm by mass or less.
  • the water content of the solvent is the grade of solvent used (dehydration grade, general purpose grade, etc.), solvent container (bottle, 18 L can, canister can etc.), storage condition of solvent (presence or absence of rare gas inclusion etc.), from opening to use It may be considered that the time period of use (whether used immediately after opening or used after aging after opening etc.) is involved. In addition, it is considered that the noble gas substitution of the reactor before synthesis, the presence or absence of the rare gas circulation during synthesis, and the like are also involved. Therefore, when synthesizing the polyimide precursor, it is recommended to use a high purity product as a raw material and use a solvent with a small amount of water, and to take measures so that water from the environment does not enter the system before and during the reaction. Be done.
  • reaction temperatures at the time of polyimide precursor synthesis include 0 ° C. to 120 ° C., 40 ° C. to 100 ° C., or 60 to 100 ° C.
  • the time may be, for example, 1 to 100 hours, or 2 to 10 hours.
  • the resin composition of the present embodiment may be a combination of a polyimide precursor having a structure represented by Formula (1) and another additional polyimide precursor, but the mass ratio of the additional polyimide precursor Is 30% by mass or less based on the total amount of the polyimide precursor in the resin composition from the viewpoint of reducing the degree of yellowness (YI) of the cured product (for example, polyimide film) and the oxygen dependency of the total light transmittance. Is preferable, and 10% by mass or less is more preferable.
  • a part of the polyimide precursor may be imidized.
  • the partially imidized polyimide precursor can improve the viscosity stability of the resin composition when stored at room temperature.
  • the imidation ratio in this case is preferably 5% or more, more preferably 8% or more, from the viewpoint of balancing the solubility of the polyimide precursor in the resin composition with the storage stability of the solution, and is preferably Is 80% or less, more preferably 70% or less, and still more preferably 50% or less.
  • This partial imidization is obtained by heating and dehydrating the ring closure of the polyimide precursor.
  • This heating can be carried out preferably at a temperature of 120 to 200 ° C., more preferably 150 to 180 ° C., preferably for 15 minutes to 20 hours, more preferably for 30 minutes to 10 hours.
  • N, N-dimethylformamide dimethyl acetal or N, N-dimethylformamide diethyl acetal is added to the polyamic acid obtained by the above reaction and heated to esterify part or all of the carboxylic acid,
  • the resin composition in which the viscosity stability at the time of room temperature storage was improved can also be obtained.
  • ester-modified polyamic acids are obtained by sequentially reacting the above-mentioned acid dianhydride component with one equivalent of a monohydric alcohol with respect to an acid anhydride group, and a dehydration condensation agent such as thionyl chloride or dicyclohexylcarbodiimide. It can also be obtained by a method of condensation reaction with a diamine component.
  • the resin composition comprises a solvent.
  • the solvent one having good solubility of the polyimide precursor and capable of appropriately controlling the solution viscosity of the resin composition is preferable, and the reaction solvent of the polyimide precursor can be used as a solvent of the composition.
  • NMP N-methyl-2-pyrrolidone
  • GBL ⁇ -butyrolactone
  • a compound represented by the above general formula (4), and the like are preferable.
  • NMP N-methyl-2-pyrrolidone
  • GBL ⁇ -butyrolactone
  • the resin composition of the present embodiment may contain additional components in addition to (a) a polyimide precursor and (b) a solvent.
  • additional components include (c) surfactants, (d) alkoxysilane compounds, and the like.
  • the coatability of the resin composition can be improved by adding a surfactant to the resin composition of the present embodiment. Specifically, the generation of streaks in the coated film can be prevented.
  • surfactants include silicone surfactants, fluorine surfactants, and nonionic surfactants other than these.
  • silicone surfactants such as organosiloxane polymers KF-640, 642, 643, KP 341, X-70-092, X-70-093 (all trade names, Shin-Etsu Chemical Co., Ltd.) ), SH-28PA, SH-190, SH-193, SZ-6032, SF-8428, DC-57, DC-190 (trade names, manufactured by Toray Dow Corning Silicone Co., Ltd.), SILWET L-77 , L-7001, FZ-2105, FZ-2120, FZ-2154, FZ-2164, FZ-2166, L-7604 (all trade names, manufactured by Nippon Unicar Co., Ltd.), DBE-814, DBE-224, DBE- 621, CMS-626, CMS-222, KF-352A, KF-354L, KF-355A, KF-6020, DB E-821, DBE-712 (Gelest), BYK-307, BYK-310, BYK-378, BY
  • fluorinated surfactants for example, Megafac F171, F173, R-08 (Dainippon Ink and Chemicals, Inc., trade name), Florard FC4430, FC4432 (Sumitomo 3M Ltd., trade name), etc .;
  • a nonionic surfactant other than, for example, polyoxyethylene uralyl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenol ether and the like can be mentioned, respectively.
  • silicone surfactants and fluorosurfactants are preferable from the viewpoint of the coating property (stripping suppression) of the resin composition, and the yellowness (YI) value due to the oxygen concentration at the curing step is preferable.
  • silicone surfactants are preferred.
  • the amount thereof is preferably 0.001 to 5 parts by mass, and 0.01 to 3 parts by mass with respect to 100 parts by mass of (a) polyimide precursor in the resin composition. Is more preferred.
  • (D) Alkoxysilane Compound When the polyimide film obtained from the resin composition according to the present embodiment is used for a flexible substrate or the like, the resin composition from the viewpoint of obtaining good adhesion between the support and the polyimide film in the manufacturing process.
  • the substance may contain 0.01 to 20 parts by mass of the alkoxysilane compound with respect to 100 parts by mass of the (a) polyimide precursor.
  • the content of the alkoxysilane compound is 0.01 parts by mass or more based on 100 parts by mass of the polyimide precursor, good adhesion can be obtained between the support and the polyimide film.
  • the content of the alkoxysilane compound is more preferably 0.02 to 15 parts by mass, still more preferably 0.05 to 10 parts by mass, with respect to 100 parts by mass of the polyimide precursor. Particularly preferred is 8 parts by mass.
  • an alkoxysilane compound as an additive of the resin composition according to the present embodiment, in addition to the improvement of the above-mentioned adhesion, the improvement of the coating property (suppression of uneven streaks) of the resin composition, and It is also possible to reduce the oxygen concentration dependence during curing of the yellowness (YI) value of the cured film.
  • alkoxysilane compound examples include 3-ureidopropyltriethoxysilane, bis (2-hydroxyethyl) -3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, ⁇ -aminopropyltrimethoxysilane, ⁇ -aminopropyltripropoxysilane, ⁇ -aminopropyltributoxysilane, ⁇ -aminoethyltriethoxysilane, ⁇ -aminoethyltripropoxysilane, ⁇ -aminoethyltributoxysilane, ⁇ -aminobutyltriethoxysilane, ⁇ - Aminobutyltrimethoxysilane, ⁇ -aminobutyltripropoxysilane, ⁇ -aminobutyltributoxysilane, phenylsilanetriol, trimethoxyphenylsilane
  • the manufacturing method of the resin composition in this Embodiment is not specifically limited, For example, it can be based on the following method.
  • the synthesized polyimide precursor solution can be used as it is as the resin composition.
  • one or more of (b) a solvent and one or more additional components are added to (a) a polyimide precursor in a temperature range of room temperature (25 ° C.) to 80 ° C. and stirred and mixed. And may be used as a resin composition.
  • appropriate devices such as a three-one motor (manufactured by Shinto Kagaku Co., Ltd.) equipped with stirring blades, a rotation and revolution mixer, and the like can be used. Further, heat of 40 to 100 ° C. may be added if necessary.
  • the solvent in the synthesized polyimide precursor solution is, for example, reprecipitated, After removing by a suitable method such as evaporation of solvent and isolating (a) the polyimide precursor, (b) a solvent and, if necessary, additional components are added in a temperature range of room temperature to 80 ° C.
  • the resin composition may be prepared by stirring and mixing.
  • the composition is heated, for example, at 130 to 200 ° C., for example, for 5 minutes to 2 hours to dehydrate a portion of the polyimide precursor to such an extent that the polymer does not precipitate.
  • the imidization rate can be controlled by controlling the heating temperature and the heating time.
  • the partially imidized polyimide precursor can improve the viscosity stability of the resin composition when stored at room temperature.
  • the solution viscosity of the resin composition is preferably 500 to 100,000 mPa ⁇ s, more preferably 1,000 to 50,000 mPa ⁇ s, and particularly preferably 3,000 to 20,000 mPa ⁇ s. preferable.
  • the viscosity is preferably 500 mPa ⁇ s or more, more preferably 1,000 mPa ⁇ s or more, and still more preferably 3,000 mPa ⁇ s or more, in terms of preventing liquid leakage from the slit nozzle.
  • the solution viscosity of the resin composition is higher than 200,000 mPa ⁇ s, there may be a problem that stirring at the time of synthesis becomes difficult. However, even when the solution has a high viscosity at the time of synthesis, it is possible to obtain a resin composition having a manageable viscosity by adding a solvent and stirring after completion of the reaction.
  • the solution viscosity of the resin composition in the present disclosure is a value measured at 23 ° C. using an E-type viscometer (for example, VISCONICEHD, manufactured by Toki Sangyo Co., Ltd.).
  • the water content of the resin composition according to the present embodiment is preferably 3,000 ppm by mass or less.
  • the water content of the resin composition is preferably 2,500 mass ppm or less, preferably 2,000 mass ppm or less, and preferably 1,500 mass ppm or less from the viewpoint of viscosity stability when storing the resin composition.
  • the amount is preferably 1,000 ppm by mass or less, more preferably 500 ppm by mass or less, preferably 300 ppm by mass or less, and preferably 100 ppm by mass or less.
  • the resin composition is coated on the surface of the support.
  • the support is not particularly limited as long as it has heat resistance at the heating temperature of the subsequent film forming step (heating step), and further, if the peelability in the peeling step is good.
  • glass for example, alkali-free glass
  • silicon wafer for example, PET (polyethylene terephthalate), OPP (oriented polypropylene), polyethylene glycol terephthalate, polyethylene glycol naphthalate, polycarbonate, polyimide, polyamide imide, polyether imide, polyether ether Resin substrates such as ketone, polyether sulfone, polyphenylene sulfone and polyphenylene sulfide; metal substrates such as stainless steel, alumina, copper, nickel and the like are used.
  • PET polyethylene terephthalate
  • OPP oriented polypropylene
  • polyethylene glycol terephthalate polyethylene glycol naphthalate
  • polycarbonate polyimide
  • polyamide imide polyether imide
  • polyether ether Resin substrates such as ketone, polyether sulfone, polyphenylene sulfone and polyphenylene sulfide
  • metal substrates such as stainless steel, alumina,
  • a thin film polyimide molded body for example, a glass substrate, a silicon wafer or the like is preferable, and when forming a thick film polyimide molded body (for example, a thick film, a sheet etc.), for example, PET A support made of (polyethylene terephthalate), OPP (oriented polypropylene) or the like is preferred.
  • Coating methods generally include doctor blade knife coater, air knife coater, roll coater, rotary coater, flow coater, die coater, bar coater and other coating methods, spin coating, spray coating, dip coating and other coating methods; screen printing And printing techniques represented by gravure printing etc., and the resin composition of the present embodiment is particularly useful for slit coating (that is, coating with a slit coater).
  • the coating thickness should be appropriately adjusted in accordance with the desired thickness of the polyimide film and the content of the polyimide precursor in the resin composition, and is preferably about 1 to 1,000 ⁇ m.
  • the application step is sufficient at room temperature, the resin composition may be heated, for example, in the range of 40 to 80 ° C. for the purpose of lowering the viscosity to improve the workability.
  • a drying step may be performed, or the drying step may be omitted and the process may proceed directly to the next film forming step (heating step).
  • the drying step is performed for the purpose of removing the organic solvent in the resin composition.
  • appropriate devices such as a hot plate, a box dryer, a conveyor dryer and the like can be used, for example.
  • the drying step is preferably performed at 80 to 200 ° C., and more preferably 100 to 150 ° C.
  • the implementation time of the drying step is preferably 1 minute to 10 hours, and more preferably 3 minutes to 1 hour.
  • the coating film containing the polyimide precursor is formed on the support.
  • a film forming step (heating step) is performed.
  • the heating step is a step of removing the organic solvent remaining in the coating film in the above-described drying step and advancing the imidization reaction of the polyimide precursor in the coating film to obtain a polyimide film.
  • This heating step can be performed using an apparatus such as, for example, an inert gas oven, a hot plate, a box dryer, a conveyor dryer, and the like. This step may be performed simultaneously with the drying step or both steps may be performed sequentially.
  • the heating step may be carried out in an air atmosphere, but from the viewpoint of safety, good transparency of the obtained polyimide film, low thickness direction retardation (Rth) and low yellowness (YI), inert gas It is recommended to do under the atmosphere.
  • the inert gas include nitrogen, argon and the like.
  • the heating temperature may be appropriately set depending on the type of polyimide precursor and the type of solvent in the resin composition, but is preferably 250 ° C. to 550 ° C., and more preferably 300 to 450 ° C. If the temperature is 250 ° C. or higher, the imidization proceeds well, and if the temperature is 550 ° C. or lower, disadvantages such as a decrease in transparency of the obtained polyimide film and a deterioration in heat resistance can be avoided.
  • the heating time is preferably about 0.1 to 10 hours.
  • the oxygen concentration in the ambient atmosphere in the above heating step is preferably 2,000 ppm by mass or less, and 100 mass ppm or less from the viewpoint of the transparency and yellowness (YI) value of the polyimide film obtained. More preferably, 10 mass ppm or less is more preferable.
  • the yellowness (YI) value of the obtained polyimide film can be made to be 30 or less.
  • peeling step the polyimide film on the support is peeled, for example, after cooling to about room temperature to about 50 ° C.
  • this peeling step include the following embodiments (1) to (4).
  • a polyimide film / substrate comprising a polyimide film / support is produced by the above method, and then the laser is irradiated from the substrate side of the structure to ablate the interface between the substrate and the polyimide film. How to peel off the resin.
  • the type of laser includes a solid (YAG) laser, a gas (UV excimer) laser and the like. It is preferable to use a spectrum such as a wavelength of 308 nm (see, for example, JP-A-2007-512568, JP-A-2012-511173, etc.).
  • the peeling layer include a method using Parylene (registered trademark, manufactured by Japan Parylene Joint Company) and tungsten oxide; a method using a releasing agent such as vegetable oil type, silicone type, fluorine type and alkyd type (JP-A-2010) -67957, JP-A-2013-179306 etc.).
  • This method (2) may be used in combination with the laser irradiation of the above (1).
  • the metal for example, copper (as a specific example, electrolytic copper foil “DFF” manufactured by Mitsui Mining & Smelting Co., Ltd.), aluminum or the like can be used.
  • DFF electrolytic copper foil
  • ferric chloride or the like can be used for copper, and dilute hydrochloric acid or the like can be used for aluminum.
  • the method (1) or (2) is appropriate from the viewpoint of the refractive index difference between the front and back of the obtained polyimide film, the yellowness (YI) value, and the elongation. From the viewpoint of the difference in refractive index between the front and back, it is more appropriate to carry out method (1), that is, an irradiation step of irradiating the laser from the support side prior to the peeling step.
  • method (3) when copper is used as a support body, the yellowness (YI) value of the polyimide film obtained becomes large, and the tendency for elongation to become small is seen. This is considered to be the effect of copper ions.
  • the thickness of the polyimide film obtained by the above method is not particularly limited, but is preferably in the range of 1 to 200 ⁇ m, more preferably 5 to 100 ⁇ m.
  • the polyimide film obtained from the polyimide precursor according to the present embodiment can be applied as, for example, a semiconductor insulating film, a TFT-LCD insulating film, an electrode protective film, etc.
  • a TFT substrate or a color filter substrate in the manufacture of flexible devices, particularly a TFT substrate or a color filter substrate And can be suitably used as a touch panel substrate.
  • a flexible device to which the polyimide film according to the present embodiment can be applied for example, a TFT device for a flexible display, a flexible solar cell, a flexible touch panel, a flexible illumination, a flexible battery, a flexible printed circuit, a flexible color filter, a smartphone Facing surface cover lens etc. can be mentioned.
  • the process of forming a TFT on a flexible substrate using a polyimide film is typically performed at a wide range of temperatures from 150 to 650.degree. Specifically, when manufacturing a TFT device using amorphous silicon, a process temperature of 250 ° C. to 350 ° C. is generally required, and the polyimide film of this embodiment needs to be able to withstand that temperature. Specifically, it is necessary to appropriately select a polymer structure having a glass transition temperature higher than the process temperature and a thermal decomposition start temperature.
  • a process temperature of 320 ° C. to 400 ° C. is generally required, and the polyimide film of this embodiment needs to be able to withstand that temperature. Therefore, it is necessary to appropriately select a polymer structure having a glass transition temperature higher than the TFT manufacturing process maximum temperature and a thermal decomposition start temperature.
  • LTPS low temperature polysilicon
  • a process temperature of 380 ° C. to 520 ° C. is generally required, and the polyimide film of the present embodiment needs to be able to withstand that temperature. It is necessary to appropriately select a glass transition temperature higher than the TFT manufacturing process maximum temperature and a thermal decomposition start temperature.
  • the optical properties of the polyimide film tend to decrease as they are exposed to high temperature processes.
  • the polyimide obtained from the polyimide precursor of the present embodiment has good optical properties even after thermal history.
  • the present embodiment also provides a flexible device including a polyimide film which is a cured product of the resin composition of the present embodiment.
  • a preferred example of the flexible device is a flexible display.
  • the polyimide film is excellent in optical properties (eg, Rth and / or yellowness). Therefore, in a preferred embodiment, the polyimide film is disposed at a location (specifically, the screen portion of the flexible display) to be viewed when the display is observed from the outside.
  • FIG. 1 is a view showing a structure of a top emission type flexible organic EL display as an example of a display provided in one embodiment of the present invention above a polyimide substrate.
  • the organic EL structure 25 shown in FIG. 1 is, for example, an organic EL element 250a emitting red light, an organic EL element 250b emitting green light, and an organic EL element 250c emitting blue light, each forming a matrix.
  • the light emitting area of each organic EL element is defined by the barrier rib (bank) 251.
  • Each organic EL element is composed of a lower electrode (anode) 252, a hole transport layer 253, a light emitting layer 254, and an upper electrode (cathode) 255.
  • a TFT 256 low temperature polysilicon (LTPS)
  • a plurality of interlayer insulating films 258 provided with contact holes 257 and lower electrodes 259 are provided, which are selected from metal oxide semiconductors (such as IGZO).
  • the organic EL element is sealed by a sealing substrate 2b, and a hollow portion 261 is formed between each organic EL element and the sealing substrate 2b.
  • a polyimide film is prepared on a glass substrate support, and the process of manufacturing the organic EL substrate shown in FIG. 1 above, the sealing substrate manufacturing process, and assembly of bonding both substrates
  • the process and the peeling process of peeling the organic electroluminescent display produced on the polyimide film from the glass substrate support are included.
  • a well-known manufacturing process can be applied to the organic EL substrate manufacturing process, the sealing substrate manufacturing process, and the assembling process. Although the example is given below, it is not limited to this.
  • the peeling process may be the same as the peeling process of the polyimide film mentioned above.
  • the polyimide film of the present disclosure is produced on a glass substrate support by the method described above, and silicon nitride (SiN) and silicon oxide (SiO) are formed thereon by CVD or sputtering.
  • a multi-barrier layer (lower substrate 2a in FIG. 1) having a multi-layered structure is produced, and a metal wiring layer for driving the TFT is produced thereon using a photoresist or the like.
  • An active buffer layer of SiO or the like is formed thereon by the CVD method, and a TFT device (TFT 256 in FIG. 1) such as metal oxide semiconductor (IGZO) or low temperature polysilicon (LTPS) is formed thereon.
  • IGZO metal oxide semiconductor
  • LTPS low temperature polysilicon
  • an interlayer insulating film 258 provided with a contact hole 257 is formed of a photosensitive acrylic resin or the like.
  • An ITO film is formed by sputtering or the like, and the lower electrode 259 is formed to be paired with the TFT.
  • a partition (bank) 251 is formed of photosensitive polyimide or the like, a hole transport layer 253 and a light emitting layer 254 are formed in each space partitioned by the partition. Further, the upper electrode (cathode) 255 is formed so as to cover the light emitting layer 254 and the partition (bank) 251.
  • an organic EL material corresponding to the organic EL element 250a emitting red light in FIG. 1 emitting red light
  • an organic EL material emitting green light (FIG. 1) Corresponding to the organic EL element 250b emitting green light
  • the organic EL material emitting blue light correspond to the organic EL element 250c emitting blue light in FIG.
  • the device above the polyimide substrate is peeled from the glass substrate support by a known peeling method such as laser peeling.
  • a top emission type flexible organic EL display is manufactured.
  • a see-through flexible organic EL display is manufactured.
  • a bottom emission type flexible organic EL display may be manufactured by a known method.
  • a flexible liquid crystal display can be manufactured using the polyimide film of the present embodiment.
  • a polyimide film according to the present invention is prepared on a glass substrate support by the above-mentioned method, and amorphous silicon, metal oxide semiconductor (IGZO etc.), or A TFT substrate made of low temperature polysilicon is manufactured.
  • a polyimide film is prepared on a glass substrate support, and a color filter glass substrate provided with a polyimide film using a color resist or the like according to a known method Create a CF substrate).
  • a sealing material composed of a thermosetting epoxy resin or the like is applied to one of a TFT substrate and a CF substrate by screen printing in a frame-like pattern lacking a liquid crystal injection port, and the other substrate is a liquid crystal layer Spray a spherical spacer of plastic or silica with a diameter corresponding to the thickness.
  • the flexible liquid crystal display can be manufactured by peeling the glass substrate on the CF side and the glass substrate on the TFT side at the interface between the polyimide film and the glass substrate by a laser peeling method or the like.
  • the flexible device for example, flexible display
  • a glass substrate is used as the support.
  • Preferred specific procedures of the coating step and the film forming step are the same as those described above for the method for producing the polyimide film.
  • the above-described element is formed on a polyimide film as a flexible substrate, which is formed on a support. Thereafter, the polyimide film and the device may optionally be peeled off from the support in the peeling step.
  • Weight average molecular weight (Mw) and the number average molecular weight (Mn) were measured by gel permeation chromatography (GPC) under the following conditions.
  • NMP manufactured by Wako Pure Chemical Industries, Ltd., for high performance liquid chromatograph
  • lithium bromide monohydrate of 24.8 mmol / L manufactured by Wako Pure Chemical Industries, purity 99.5%
  • 63 A 2 mmol / L phosphoric acid manufactured by Wako Pure Chemical Industries, Ltd., for high performance liquid chromatograph
  • a calibration curve for calculating weight average molecular weight was prepared using standard polystyrene (manufactured by Tosoh Corporation).
  • Shodex KD-806M made by Showa Denko
  • Flow rate 1.0 mL / min
  • Column temperature 40 ° C.
  • PU-2080 Plus manufactured by JASCO
  • Detector RI-2031 Plus (RI: differential refractometer, manufactured by JASCO) and UV-2075 Plus (UV-VIS: ultraviolet-visible spectrophotometer, manufactured by JASCO)
  • TI Shear rate dependency evaluation>
  • the viscosity of the resin composition to be measured using the temperature controller-equipped viscometer (TVE-35H manufactured by Toki Sangyo K. K.) at 23 ° C. It measured using a measurable rotational speed and a cone rotor, and performed shear rate dependence evaluation. Specifically, the viscosity ⁇ a (mPa ⁇ s) at the measurement rotation speed a (rpm) and the viscosity ⁇ b (mPa ⁇ s) at the measurement rotation speed b (rpm) are measured (where a * 10 b There was a) TI, which is represented by the following equation.
  • measurable rotational speeds are, for example, 0.5, 1, 2.5, 5, 10, 20, 50, and 100 rpm.
  • Specific examples of measurable cone rotors are, for example, 1 ° 34 ′ (corn rotor angle) ⁇ R 24 (corn rotor diameter), 1 ° 34 ′ ⁇ R 12, 0.8 ° ⁇ R 24, 0.8 ° ⁇ R12, 3 ° ⁇ R24, 3 ° ⁇ R12, 3 ° ⁇ R17.65, 3 ° ⁇ R14, 3 ° ⁇ R12, 3 ° ⁇ R9.7.
  • the film thickness of the resin composition (varnish) prepared in Examples and Comparative Examples is 10 ⁇ m after imidization (heating at 100 ° C. for 1 hour and heating at 400 ° C. for 30 minutes at an oxygen concentration of 10 mass ppm or less)
  • the glass substrate was coated (coating speed 100 mm / sec) so as to be The coating gap set value of the slit coater at that time was described in the table.
  • the film thickness was measured using a contact-type step gauge. From the results, the film thickness uniformity of the polyimide film (the standard deviation of the film thickness at 30 points) was calculated and evaluated according to the following criteria. Good: In-plane film thickness uniformity (3 sigma) is 1.0 ⁇ m or less Possible: In-plane film thickness uniformity (3 sigma) is more than 1.0 ⁇ m 2.0 ⁇ m or less Defect: In-plane film thickness uniformity (3 sigma) Exceeds 2.0 ⁇ m
  • ⁇ Cured film yellowness (YI)> The polyimide films according to the examples and comparative examples produced on the glass substrate in the above ⁇ coating evaluation> (coat gap) were used.
  • the yellowness (YI) value (film thickness converted to 10 ⁇ m) of the obtained sample was measured using a D65 light source by Nippon Denshoku Kogyo Co., Ltd. (Spectrophotometer: SE600). The results are listed in the table.
  • ⁇ Cured film Rth (retardation, retardation in the thickness direction)>
  • the polyimide films according to the examples and comparative examples produced on the glass substrate in the above ⁇ coating evaluation> (coat gap) were used.
  • the Rth (film thickness converted to 10 ⁇ m) of the obtained sample was measured using a retardation birefringence measurement apparatus (KOBRA-WR manufactured by Oji Scientific Instruments). The wavelength of the measurement light was 589 nm. The results are listed in the table.
  • varnish transparent polyamic acid
  • the obtained varnish was stored in a freezer (setting ⁇ 20 ° C., the same applies hereinafter), and was thawed and used for evaluation.
  • Example 1-1 In a 3 L separable flask with stir bar, while introducing nitrogen gas, as diamine, 4,4'-DAS (15.3 g) and TFMB (12.4 g), and twice the mass of the total mass of these diamines The polymerization solvent (NMP) was added. Next, the dropping funnel was set in the above separable flask, and while introducing nitrogen gas into the dropping funnel, PMDA (15.3 g) and BPDA (8.8 g) as acid dianhydride, and these acid dianhydrides were prepared. Two times the mass of polymerization solvent (NMP) was added. And it stirred with the small stirring blade at room temperature.
  • NMP polymerization solvent
  • the combinations of acid dianhydride and diamine are as shown in Tables 1 to 4, and accordingly, the amount of polymerization solvent used is changed (that is, adjusted to be twice the mass of acid dianhydride or diamine).
  • “heat to 70 ° C. and stir for 4 hours” Change the temperature to 40 ° C and stir for 12 hours.
  • Examples 1-9, 2-9, 3-9, and 4-9 add the additional solvent (NMP) to the additional solvent (NMP and GBL).
  • Example 1-1 The conditions were the same as in Example 1-1, except that the NMP / GBL after addition was adjusted to be 100/100 (w / w).
  • the solid contents shown in Tables 1 to 4 were adjusted to the values shown in the table by changing the amount of the additional solvent.
  • the weight average molecular weight was measured after "stirring for 12 hours" and further extending the reaction time. As a result, it did not become larger than after stirring for 12 hours.
  • Comparative Examples 2-1 to 2-6, 3-1 to 3-6, 4-1 to 4-7 the amount of NMP of Comparative Example 1-1 is 745 g (Comparative Example 2-1), 799 g (Comparative Example 3-1), and 850 g (Comparative Example 4-1).
  • the reaction was conducted in the same manner as in Comparative Example 1-1 except that the acid dianhydride and the diamine were blended as shown in Table 2, respectively.
  • Comparative Examples 2-2 to 2-6 are Comparative Example 2-1 and Comparative Examples 3-2 to 3-6 except that the NMP amount is changed to obtain the solid contents in Tables 2 to 4.
  • Comparative Example 3-1 and Comparative Examples 4-2 to 4-7 were respectively performed in the same manner as Comparative Example 4-1.
  • Example 5-1 In a 3 L separable flask equipped with a stir bar, while introducing nitrogen gas, 4,4′-DAS (24.3 g) as diamine and 2 times the mass of NMP of the total mass of diamine were added. Next, the dropping funnel was set in the above separable flask, and while introducing nitrogen gas into the dropping funnel, PMDA (10.9 g) and BPDA (14.7 g) as acid dianhydrides, and 2 of these acid dianhydrides Double mass of NMP was added. And it stirred with the small stirring blade at room temperature. Then, while stirring the diamine solution in the separable flask, dropping of the acid dianhydride solution was started while stirring the small stirring blade of the dropping funnel at room temperature.
  • the dropping was performed at a low speed, and was dropped over 30 minutes. After the dropwise addition, the residue was washed with a washing solvent (NMP), and the residue was dropped (molar ratio of acid dianhydride to diamine (100: 98)). Thereafter, additional solvent (NMP) was added to make the solid content in Table 5 finally. Subsequently, the mixture was stirred at room temperature for 30 minutes and then heated to 70 ° C. using an oil bath and stirred for 4 hours. Thereafter, the oil bath was removed, and the temperature was returned to room temperature to obtain a transparent polyamic acid in NMP solution (hereinafter also referred to as varnish). The obtained varnish was stored in a freezer (setting ⁇ 20 ° C., the same applies hereinafter), and was thawed and used for evaluation.
  • NMP washing solvent
  • additional solvent NMP
  • the formulations of acid dianhydride and diamine were as shown in Tables 5 to 9, and accordingly, the amount of polymerization solvent used was changed (that is, adjusted to be twice the mass of acid dianhydride or diamine). Further, for Examples 5-3 to 5-9, 6-5 to 6-9, 7-4, 8-1, and 8-2, "the temperature is raised to 70 ° C.
  • Comparative Examples 6-2 to 6-6 are performed in the same manner as Comparative Example 6-1 except that the solid content in Table 6 is changed by changing the amount of NMP, and Comparative Examples 7-2 to 7-6 are NMP.
  • the procedure of Comparative Example 7-1 was repeated except that the amount was changed to obtain the solid content in Table 7.
  • the amount of NMP was changed from 718 g to 215 g (Comparative Example 7-7) and 163 g (Comparative Example 7-8), respectively, and the composition of acid dianhydride and diamine was as shown in Table 7.
  • the same procedure as in Comparative Example 7-1 was performed except that “stirring for 4 hours” was changed to “stirring for 3 hours”.
  • varnish transparent polyamic acid
  • the obtained varnish was stored in a freezer and thawed for evaluation.
  • Comparative Examples 9-2 to 9-3 Comparative Example except that the amount of NMP was changed from 495 g to 438 g (Comparative Example 9-2) and 374 g (Comparative Example 9-3), respectively, and the composition of the acid dianhydride and the diamine was as shown in Table 9. It went in the same way as 9-1.
  • Example 9-1 In a 3 L separable flask with a stirring rod, TFMB (31.3 g) as a diamine and NMP (63 g) twice as much as the total mass of the diamine were added while introducing nitrogen gas. Next, the dropping funnel was set in the above separable flask, and while introducing nitrogen gas into the dropping funnel, BPAF (45.8 g) as acid dianhydride and NMP (92 g) twice the mass of this acid dianhydride were added. Was added. And it stirred with the small stirring blade at room temperature.
  • varnish a transparent polyamic acid in NMP solution (hereinafter also referred to as varnish).
  • the obtained varnish was stored in a freezer (setting ⁇ 20 ° C., the same applies hereinafter), and was thawed and used for evaluation.
  • Examples 9-2 and 9-3 The composition of acid dianhydride and diamine was as shown in Table 9, and the amount of polymerization solvent used was changed accordingly (ie, adjusted to be twice the mass of acid dianhydride or diamine) Others were performed in the same manner as in Example 9-1.
  • the solid content shown in Table 9 was adjusted to the values shown in the table by changing the amount of the additional solvent.
  • Example 10-1 NMP (246 g) is added to a 3 L separable flask with a stirring rod while introducing nitrogen gas, and 4,4'-DAS (14.4 g) and TFMB (12.4 g) as diamines are modified with amine-modified methyl phenyl silicone Oil (10.56 g) was added with stirring, followed by PMDA (15.3 g) and BPDA (8.8 g) as acid dianhydride (molar ratio of acid dianhydride and diamine (100: 99) ). Next, the temperature was raised to 70 ° C. using an oil bath, and after stirring for 8 hours, the oil bath was removed and the temperature was returned to room temperature to obtain an NMP solution of transparent polyamic acid. The obtained varnish was stored in a freezer (setting ⁇ 20 ° C., the same applies hereinafter), and was thawed and used for evaluation.
  • Examples 10-2 to 10-5 The amount of NMP was changed from 246 g to 225 g (Example 10-2), 242 g (Example 10-3), 185 g (Example 10-4), 201 g (Example 10-5), respectively, and acid dianhydride and The procedure of Example 10-1 was repeated except that the diamine composition was as shown in Table 10. The results of the evaluation are shown in Table 10.
  • the resin composition of the present disclosure can be suitably applied to applications such as flexible devices (for example, flexible substrates), particularly flexible displays.
  • the resin composition of the present disclosure can be suitably used to form a transparent substrate of a display device such as a liquid crystal display, an organic electroluminescence display, a field emission display, an electronic paper and the like.
  • the resin composition of the present disclosure can be used to form a thin film transistor (TFT) substrate, a color filter substrate, a transparent conductive film (ITO, Indium Thin Oxide) substrate, and the like.
  • TFT thin film transistor
  • ITO Indium Thin Oxide

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Abstract

This resin composition contains a solvent and a polyimide precursor having the structure represented by formula (1) {in the formula, R1 represents a divalent organic group and, when there is a plurality thereof, the R1's independently represent divalent organic groups; R2 represents a tetravalent organic group and, when there is a plurality thereof, the R2's independently represent tetravalent organic groups; n is a positive integer.}, wherein the weight average molecular weight of the polyimide precursor is 110,000 to 250,000 and the solids content of the resin composition is 10-25 mass%.

Description

ポリイミド前駆体樹脂組成物Polyimide precursor resin composition
 本発明は、ポリイミド前駆体を含む樹脂組成物、及びポリイミドフィルムに関する。本発明はさらに、フレキシブルデバイス(例えばフレキシブルディスプレイ)及び積層体並びにこれらの製造方法にも関する。 The present invention relates to a resin composition containing a polyimide precursor, and a polyimide film. The invention further relates to flexible devices (e.g. flexible displays) and laminates and methods of making them.
 ポリイミド樹脂は、不溶、不融の超耐熱性樹脂であり、耐熱特性(例えば耐熱酸化性)、耐放射線性、耐低温性、耐薬品性等に優れた特性を有している。このため、ポリイミド樹脂は、電子材料を含む広範囲な分野で用いられている。電子材料分野におけるポリイミド樹脂の適用例としては、例えば絶縁コーティング材、絶縁膜、半導体、薄膜トランジスタ液晶ディスプレイ(TFT-LCD)の電極保護膜等を挙げることができる。最近は、ディスプレイ材料の分野において従来使用されていたガラス基板に代わり、その軽さ、柔軟性を利用したフレキシブル基板の採用が検討されている。 Polyimide resins are insoluble and infusible super heat-resistant resins, and have excellent heat resistance properties (for example, heat oxidation resistance), radiation resistance, low temperature resistance, chemical resistance, and the like. For this reason, polyimide resins are used in a wide range of fields including electronic materials. Examples of application of the polyimide resin in the field of electronic materials include, for example, an insulating coating material, an insulating film, a semiconductor, an electrode protective film of a thin film transistor liquid crystal display (TFT-LCD), and the like. Recently, in place of the glass substrate conventionally used in the field of display materials, adoption of a flexible substrate utilizing its lightness and flexibility has been considered.
 例えば特許文献1には、ビス(ジアミノジフェニル)スルホン(以下、DASともいう)から重合され、シロキサン単位を有する樹脂前駆体(重量平均分子量3万~9万)が記載され、当該前駆体を硬化して得られるポリイミドは、ガラス等の支持体との間に発生する残留応力が低く、耐薬品性に優れ、キュア工程時の酸素濃度による黄色度(YI)値及び全光線透過率への影響が小さいことが記載されている。また、特許文献2には、特定の吸光度のポリイミド前駆体と、特定の吸光度のアルコキシシラン化合物と、を含有することを特徴とする樹脂組成物が記載され、当該樹脂組成物を硬化して得られる樹脂が、支持体との十分な接着性と、レーザー剥離等による剥離性を両立することが記載されている。 For example, Patent Document 1 discloses a resin precursor (weight-average molecular weight 30,000 to 90,000) which is polymerized from bis (diaminodiphenyl) sulfone (hereinafter also referred to as DAS) and has a siloxane unit, and the precursor is cured The polyimide obtained by this method has low residual stress generated with a support such as glass, is excellent in chemical resistance, and influences the yellowness (YI) value and the total light transmittance by the oxygen concentration at the curing step. It is stated that is small. Patent Document 2 describes a resin composition comprising a polyimide precursor of a specific absorbance and an alkoxysilane compound of a specific absorbance, which is obtained by curing the resin composition. It is described that the resin to be prepared has both sufficient adhesiveness with the support and releasability by laser exfoliation and the like.
国際公開第2014/148441号International Publication No. 2014/148441 国際公開第2016/167296号International Publication No. 2016/167296
 フレキシブル基板に透明ポリイミド樹脂を適用しようとする場合、ガラス等の基板上に、ポリイミド前駆体を含有する樹脂組成物を塗布して塗膜を形成し、次いでこれを加熱乾燥し、さらにポリイミド前駆体をイミド化してポリイミド膜とし、必要に応じて該膜上にデバイスを形成した後、該膜を支持体であるガラス基板等から剥離して目的物を得る。 When a transparent polyimide resin is to be applied to a flexible substrate, a resin composition containing a polyimide precursor is coated on a substrate such as glass to form a coating, which is then dried by heating, and further a polyimide precursor Is imidized to form a polyimide film, and if necessary, a device is formed on the film, and then the film is peeled off from a glass substrate as a support to obtain the desired product.
 近年、フレキシブル基板の用途であるディスプレイ等の大型化に伴い、ポリイミド前駆体を含む組成物をガラス等の基板に塗布する場合、スリットコーターを用いる場合がある。スリットコーターで組成物を塗布して塗膜を形成する場合、塗膜に対する影響を与えるパラメ-タとして、コーターギャップ(ガラス基板とスリットノズルの距離を規定する設定値)があるが、コーターギャップが小さいと、ガラス基板の平坦性が悪い場合にノズルが基板に接触し、スリットノズルが破損する可能性がある。特に近年のディスプレイ等の大型化等に伴い、このコーターギャップを十分大きくすることが必要となってきた。
 また、ポリイミド膜をフレキシブルディスプレイ等の画面の材料として用いる場合は、可視光の波長が約380nmから約700nmであることから、良好な光学性能を得るためには、特に高い膜厚均一性が求められる。
In recent years, with the increase in size of a display or the like, which is an application of a flexible substrate, when a composition containing a polyimide precursor is applied to a substrate such as glass, a slit coater may be used. When a composition is applied by a slit coater to form a coating film, a coater gap (a set value for defining the distance between a glass substrate and a slit nozzle) is provided as a parameter that affects the coating film. If the size is small, the nozzle may come in contact with the substrate when the flatness of the glass substrate is poor, and the slit nozzle may be broken. In particular, with the recent increase in size of displays and the like, it has become necessary to make the coater gap sufficiently large.
When a polyimide film is used as a material of a screen of a flexible display or the like, since the wavelength of visible light is about 380 nm to about 700 nm, in order to obtain good optical performance, particularly high film thickness uniformity is required. Be
 本発明者らが上記特許文献1及び2に記載されたものと同様の分子量及び骨格を有するポリイミド前駆体を用いて、スリットコートのコーティング評価を行ったところ、上記特性が不十分であることを見出した。従って本発明の一態様は、スリットコートのコーティング特性に優れるとともに、フレキシブル基板等の用途に求められる、機械特性及び光学特性にも優れる、ポリイミド前駆体含有樹脂組成物を提供することを目的とする。 When the inventors evaluated the coating of the slit coat using a polyimide precursor having a molecular weight and a skeleton similar to those described in Patent Documents 1 and 2, it was found that the above-mentioned characteristics were insufficient. I found it. Accordingly, an object of the present invention is to provide a polyimide precursor-containing resin composition which is excellent in coating properties of slit coat and also in mechanical properties and optical properties required for applications such as flexible substrates. .
 本発明者らは、鋭意検討を行った結果、特定の構造を有するポリイミド前駆体を用いることが、スリットコートにおける良好なコーティング特性、並びに良好な機械特性及び光学特性の実現をもたらすことを見出した。
 すなわち、本発明は下記の態様を包含する。
[1] 下記式(1):
Figure JPOXMLDOC01-appb-C000006
{式中、R1は、複数ある場合それぞれ独立に2価の有機基を示し、R2は、複数ある場合それぞれ独立に4価の有機基を示し、nは正の整数である。}で表される構造を有するポリイミド前駆体と、溶媒と、を含む樹脂組成物であって、
 前記ポリイミド前駆体の重量平均分子量が110,000~250,000であり、
 前記樹脂組成物の固形分含有量が10~25質量%である、樹脂組成物。
[2] 前記樹脂組成物の粘度を温調機付粘度計で23℃にて測定したときの、下記式で表されるせん断速度依存性(TI)が、0.9~1.1である、上記態様1に記載の樹脂組成物。
TI=ηa/ηb
{式中、ηa(mPa・s)は樹脂組成物の測定回転速度a(rpm)における粘度であり、ηb(mPa・s)は樹脂組成物の測定回転速度b(rpm)における粘度であり、ただしa*10=bである。}
[3] 前記樹脂組成物は、スリットコート用の樹脂組成物である、上記態様1又は2に記載の樹脂組成物。
[4] 前記式(1)中のR1の少なくとも1つが、下記式(2):
Figure JPOXMLDOC01-appb-C000007
で表される基である、上記態様1~3のいずれか1項に記載の樹脂組成物。
[5] 前記ポリイミド前駆体が、下記式(3):
Figure JPOXMLDOC01-appb-C000008
{式中、R3及びR4の各々は、複数ある場合それぞれ独立に、炭素数1~5の1価の脂肪族炭化水素基、又は炭素数6~10の1価の芳香族基を示し、そしてmは、1~200の整数である。}で表される構造を有する、上記態様1~4のいずれか1項に記載の樹脂組成物。
[6] 前記ポリイミド前駆体が、ピロメリット酸二無水物を含むテトラカルボン酸二無水物とジアミンとの共重合体である、上記態様1~5のいずれかに記載の樹脂組成物。
[7] 前記ポリイミド前駆体が、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物を含むテトラカルボン酸二無水物とジアミンとの共重合体である、上記態様1~6のいずれかに記載の樹脂組成物。
[8] 前記ポリイミド前駆体が、テトラカルボン酸二無水物とジアミンとの共重合体であり、 前記テトラカルボン酸二無水物が、ピロメリット酸二無水物及び3,3’,4,4’-ビフェニルテトラカルボン酸二無水物を、前記ピロメリット酸二無水物と前記3,3’,4,4’-ビフェニルテトラカルボン酸二無水物とのモル比20:80~80:20で含む、上記態様1~7のいずれかに記載の樹脂組成物。
[9] 前記ポリイミド前駆体が、テトラカルボン酸二無水物と、4,4’-ジアミノジフェニルスルホン、3,3’-ジアミノジフェニルスルホン、2,2’-ビス(トリフルオロメチル)ベンジジン及び9,9-ビス(4-アミノフェニル)フルオレンからなる群から選択される1つ以上のジアミンとの共重合体である、上記態様1~8のいずれかに記載の樹脂組成物。
[10] 前記ポリイミド前駆体の重量平均分子量が160,000~220,000である、上記態様1~9のいずれかに記載の樹脂組成物。
[11] 前記樹脂組成物は、フレキシブルデバイス用の樹脂組成物である、上記態様1~10のいずれかに記載の樹脂組成物。
[12] 前記樹脂組成物は、フレキシブルディスプレイ用の樹脂組成物である、上記態様1~11のいずれかに記載の樹脂組成物。
[13] 上記態様1~12のいずれかに記載の樹脂組成物の硬化物であるポリイミドフィルム。
[14] 膜厚10μm換算での厚み方向レタデーション(Rth)が300以下であり、及び/又は、膜厚10μm換算での黄色度(YI)が20以下である、上記態様13に記載のポリイミドフィルム。
[15] 上記態様13又は14に記載のポリイミドフィルムを含むフレキシブルデバイス。
[16] 上記態様13又は14に記載のポリイミドフィルムを含むフレキシブルディスプレイ。
[17] 前記ポリイミドフィルムは、前記フレキシブルディスプレイを外部から観察した際に視認される箇所に配置されている、上記態様16に記載のフレキシブルディスプレイ。
[18] 支持体の表面上に、上記態様1~12のいずれかに記載の樹脂組成物を塗布する塗布工程と、
 前記樹脂組成物を加熱してポリイミドフィルムを形成する膜形成工程と、
 前記ポリイミドフィルムを前記支持体から剥離する剥離工程と、を含む、ポリイミドフィルムの製造方法。
[19] 前記塗布工程は、前記樹脂組成物をスリットコートすることを含む、上記態様18に記載のポリイミドフィルムの製造方法。
[20] 前記式(1)中のR1の少なくとも1つが、下記式(2):
Figure JPOXMLDOC01-appb-C000009
で表される基である、上記態様19に記載のポリイミドフィルムの製造方法。
[21] 前記ポリイミド前駆体が、下記式(3):
Figure JPOXMLDOC01-appb-C000010
{式中、R3及びR4の各々は、複数ある場合それぞれ独立に、炭素数1~5の1価の脂肪族炭化水素基、又は炭素数6~10の1価の芳香族基を示し、そしてmは、1~200の整数である。}で表される構造を有する、上記態様19又は20に記載のポリイミドフィルムの製造方法。
[22] 前記剥離工程に先立って、前記支持体側から前記ポリイミドフィルムにレ-ザ-を照射する照射工程を更に含む、上記態様18~21のいずれかに記載のポリイミドフィルムの製造方法。
[23] 支持体の表面上に、上記態様1~12のいずれかに記載の樹脂組成物を塗布する塗布工程と、
 前記樹脂組成物を加熱してポリイミドフィルムを形成する膜形成工程と、
 前記ポリイミドフィルム上に素子を形成する素子形成工程と、
 前記素子が形成された前記ポリイミドフィルムを前記支持体から剥離する剥離工程と、を含むディスプレイの製造方法。
[24] 前記塗布工程は、前記樹脂組成物をスリットコートすることを含む、上記態様23に記載のディスプレイの製造方法。
[25] 前記ディスプレイを外部から観察した際に視認される箇所に前記ポリイミドフィルムを配置する、上記態様23又は24に記載のディスプレイの製造方法。
As a result of intensive investigations, the present inventors have found that using a polyimide precursor having a specific structure leads to the realization of good coating properties in slit coat and good mechanical and optical properties. .
That is, the present invention includes the following aspects.
[1] The following formula (1):
Figure JPOXMLDOC01-appb-C000006
In the formula, when there are a plurality of R 1 's each independently represent a divalent organic group, and when there are a plurality of R 2' s each represent a tetravalent organic group independently, n is a positive integer. A resin composition comprising a polyimide precursor having a structure represented by
The weight average molecular weight of the polyimide precursor is 110,000 to 250,000,
A resin composition, wherein the solid content of the resin composition is 10 to 25% by mass.
[2] The shear rate dependency (TI) represented by the following formula is 0.9 to 1.1 when the viscosity of the resin composition is measured at 23 ° C. with a temperature controlled viscometer The resin composition according to the above aspect 1.
TI = ηa / ηb
{Wherein ηa (mPa · s) is the viscosity at the measured rotational speed a (rpm) of the resin composition, and ηb (mPa · s) is the viscosity at the measured rotational speed b (rpm) of the resin composition, However, it is a * 10 = b. }
[3] The resin composition according to the above aspect 1 or 2, wherein the resin composition is a resin composition for slit coat.
[4] At least one of R 1 in the formula (1) is a group represented by the following formula (2):
Figure JPOXMLDOC01-appb-C000007
The resin composition according to any one of the above embodiments 1 to 3, which is a group represented by
[5] The polyimide precursor has the following formula (3):
Figure JPOXMLDOC01-appb-C000008
[Wherein, each of R 3 and R 4 independently represents a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, or a monovalent aromatic group having 6 to 10 carbon atoms, when there are a plurality of each. , And m is an integer of 1 to 200. ] The resin composition according to any one of the above aspects 1 to 4, which has a structure represented by
[6] The resin composition according to any one of the above Embodiments 1 to 5, wherein the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride containing pyromellitic dianhydride and diamine.
[7] The above aspects 1 to 6, wherein the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride containing 3,3 ′, 4,4′-biphenyltetracarboxylic acid dianhydride and diamine The resin composition as described in any one.
[8] The polyimide precursor is a copolymer of tetracarboxylic dianhydride and diamine, and the tetracarboxylic dianhydride is pyromellitic dianhydride and 3,3 ′, 4,4 ′. -Biphenyltetracarboxylic acid dianhydride at a molar ratio of 20:80 to 80:20 of the pyromellitic acid dianhydride and the 3,3 ′, 4,4′-biphenyltetracarboxylic acid dianhydride, The resin composition according to any one of the above embodiments 1 to 7.
[9] The polyimide precursor is tetracarboxylic acid dianhydride, 4,4′-diaminodiphenyl sulfone, 3,3′-diaminodiphenyl sulfone, 2,2′-bis (trifluoromethyl) benzidine and 9, 9. The resin composition according to any one of the above aspects 1 to 8, which is a copolymer with one or more diamines selected from the group consisting of 9-bis (4-aminophenyl) fluorene.
[10] The resin composition according to any one of the above embodiments 1 to 9, wherein the weight average molecular weight of the polyimide precursor is 160,000 to 220,000.
[11] The resin composition according to any one of the above embodiments, which is a resin composition for a flexible device.
[12] The resin composition according to any one of the above embodiments 1 to 11, wherein the resin composition is a resin composition for a flexible display.
[13] A polyimide film which is a cured product of the resin composition according to any one of the above embodiments 1 to 12.
[14] The polyimide film according to the above aspect 13, wherein retardation in a thickness direction (Rth) in terms of a film thickness of 10 μm is 300 or less and / or a yellowness (YI) in terms of a film thickness of 10 μm is 20 or less .
[15] A flexible device comprising the polyimide film according to the above-mentioned aspect 13 or 14.
[16] A flexible display comprising the polyimide film according to the above-mentioned aspect 13 or 14.
[17] The flexible display according to the above-mentioned aspect 16, wherein the polyimide film is disposed at a place to be viewed when the flexible display is observed from the outside.
[18] a coating step of coating the resin composition according to any one of the above embodiments 1 to 12 on the surface of a support;
A film forming step of heating the resin composition to form a polyimide film;
And a peeling step of peeling the polyimide film from the support.
[19] The method for producing a polyimide film according to the above-mentioned aspect 18, wherein the applying step comprises slit-coating the resin composition.
[20] At least one of R 1 in the formula (1) is a group represented by the following formula (2):
Figure JPOXMLDOC01-appb-C000009
The method for producing a polyimide film according to the above-mentioned aspect 19, which is a group represented by
[21] The polyimide precursor is represented by the following formula (3):
Figure JPOXMLDOC01-appb-C000010
[Wherein, each of R 3 and R 4 independently represents a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, or a monovalent aromatic group having 6 to 10 carbon atoms, when there are a plurality of each. , And m is an integer of 1 to 200. ] The manufacturing method of the polyimide film of said 19 or 20 which has a structure represented by}.
[22] The method for producing a polyimide film according to any one of the above embodiments 18 to 21, further comprising an irradiation step of irradiating a laser onto the polyimide film from the support side prior to the peeling step.
[23] a coating step of coating the resin composition according to any one of the above embodiments 1 to 12 on the surface of a support;
A film forming step of heating the resin composition to form a polyimide film;
An element forming step of forming an element on the polyimide film;
And a peeling step of peeling the polyimide film on which the element is formed from the support.
[24] The method for producing a display according to the above-mentioned aspect 23, wherein the applying step comprises slit-coating the resin composition.
[25] The method for producing a display according to the above-mentioned aspect 23 or 24, wherein the polyimide film is disposed at a position which is visually recognized when the display is observed from the outside.
 本発明の一態様によれば、スリットコートにおけるコーティング特性に優れるとともに、フレキシブル基板等の用途に求められる機械特性及び光学特性にも優れるポリイミド前駆体含有樹脂組成物を提供することが可能になる。 According to one aspect of the present invention, it is possible to provide a polyimide precursor-containing resin composition which is excellent in coating properties in slit coating and also excellent in mechanical properties and optical properties required for applications such as flexible substrates.
本発明の一態様で提供されるディスプレイの例としてのトップエミッション型のフレキシブル有機ELディスプレイのポリイミド基板より上部の構造を示す図である。It is a figure which shows the structure of the polyimide substrate top of the top emission type flexible organic electroluminescent display as an example of the display provided by 1 aspect of this invention.
 以下、本発明の例示の実施の形態(以下、「実施の形態」と略記する。)について、詳細に説明する。なお、本発明は、以下の実施の形態に限定されるものではなく、その要旨の範囲内で種々変形して実施することができる。また、本開示で記載する特性値は、特記がない限り、[実施例]の項において記載する方法又はこれと同等であることが当業者に理解される方法で測定される値であることを意図する。 Hereinafter, exemplary embodiments of the present invention (hereinafter abbreviated as “embodiments”) will be described in detail. The present invention is not limited to the following embodiments, and can be variously modified and implemented within the scope of the invention. In addition, characteristic values described in the present disclosure are values measured by methods understood by those skilled in the art to be equivalent to the method described in the section of [Example] unless otherwise specified. Intended.
 本実施の形態は、
 下記式(1):
Figure JPOXMLDOC01-appb-C000011
{式中、R1は、複数ある場合それぞれ独立に2価の有機基を示し、R2は、複数ある場合それぞれ独立に4価の有機基を示し、nは正の整数である。}
で表される構造を有するポリイミド前駆体を含む樹脂組成物を提供する。一態様において、当該樹脂組成物は、当該ポリイミド前駆体と溶媒とを含む。
In the present embodiment,
Following formula (1):
Figure JPOXMLDOC01-appb-C000011
In the formula, when there are a plurality of R 1 's each independently represent a divalent organic group, and when there are a plurality of R 2' s each represent a tetravalent organic group independently, n is a positive integer. }
The resin composition containing the polyimide precursor which has a structure represented by these is provided. In one aspect, the resin composition comprises the polyimide precursor and a solvent.
 好ましい態様においては、式(1)中のR1の少なくとも1つが、下記式(2):
Figure JPOXMLDOC01-appb-C000012
で表される基である。
In a preferred embodiment, at least one of R 1 in formula (1) is a group of the following formula (2):
Figure JPOXMLDOC01-appb-C000012
Is a group represented by
 式(1)中のR1の少なくとも1つが式(2)で表される構造であることは、ポリイミド前駆体の硬化物であるポリイミドの良好な光学特性(特にRth)及び耐熱性に寄与する。一態様において、式(1)中のn個のR1の全部が式(2)で表される構造を有する。また、一態様において、式(1)中のn個のR1のうち式(2)で表される構造の割合は、0%以上、又は10%以上、又は20%以上であってよく、100%以下、又は90%以下であってよい。 That at least one of R 1 in the formula (1) is a structure represented by the formula (2) contributes to good optical properties (especially Rth) and heat resistance of the polyimide which is a cured product of the polyimide precursor . In one embodiment, all of the n R 1 s in Formula (1) have a structure represented by Formula (2). In one aspect, the ratio of the structure represented by Formula (2) to n R 1 in Formula (1) may be 0% or more, 10% or more, or 20% or more. It may be 100% or less, or 90% or less.
 本実施の形態はまた、上記式(1)で表される構造を有するポリイミド前駆体を含む樹脂組成物であって、当該樹脂組成物の硬化物であるポリイミドが、厚み方向レタデーション(Rth)300以下及び/又は黄色度(YI)20以下を有する、樹脂組成物も提供する。上記の低い厚み方向レタデーション(Rth)はポリイミドが低複屈折性であることを表しており、また上記の低い黄色度(YI)は、ポリイミドが良好な色調を有する(すなわちほぼ無色であること)であることを表している。 The embodiment is also a resin composition containing a polyimide precursor having a structure represented by the above formula (1), wherein the polyimide which is a cured product of the resin composition has a thickness direction retardation (Rth) 300. Also provided is a resin composition having the following and / or a yellowness (YI) of 20 or less. The above low thickness direction retardation (Rth) indicates that the polyimide has low birefringence, and the above low yellowness (YI) indicates that the polyimide has a good color tone (that is, it is almost colorless) It represents that it is.
 本実施の形態の樹脂組成物は、優れたスリットコート性能を有するとともに、優れた機械特性及び光学特性を有するポリイミドフィルムを与えることから、好ましくはフレキシブルデバイス用(例えばフレキシブル基板用)、特に好ましくはフレキシブルディスプレイ用として有用である。 The resin composition of the present embodiment preferably has an excellent slit coat performance and gives a polyimide film having excellent mechanical properties and optical properties, so it is preferably for flexible devices (for example, for flexible substrates), particularly preferably It is useful for flexible displays.
(ポリイミド前駆体の重量平均分子量)
 一態様において、ポリイミド前駆体の重量平均分子量は110,000以上250,000以下である。本発明者は、本実施の形態の樹脂組成物をスリットコートに用いる際、ポリイミド前駆体の重量平均分子量がコーティング性能に大きく影響することを見出し、鋭意検討を重ねた。その結果、ポリイミド前駆体の重量平均分子量が110,000以上である場合は、樹脂組成物の固形分含有量を調整して良好なスリットコートを実現でき、一方、重量平均分子量が250,000以下であるポリイミド前駆体は製造容易であることを見出した。すなわち、本実施の形態において、ポリイミド前駆体の重量平均分子量は、コーティング性能の観点で110,000以上であり、製造容易性の点で250,000以下である。
(Weight average molecular weight of polyimide precursor)
In one aspect, the weight average molecular weight of the polyimide precursor is 110,000 or more and 250,000 or less. The present inventor found that the weight average molecular weight of the polyimide precursor greatly affects the coating performance when using the resin composition of the present embodiment for slit coating, and has conducted intensive studies. As a result, when the weight average molecular weight of the polyimide precursor is 110,000 or more, the solid content of the resin composition can be adjusted to realize a good slit coat, while the weight average molecular weight is 250,000 or less The polyimide precursor is found to be easy to manufacture. That is, in the present embodiment, the weight average molecular weight of the polyimide precursor is 110,000 or more in terms of coating performance, and 250,000 or less in terms of ease of manufacture.
 ポリイミド前駆体の望ましい重量平均分子量は、所望される用途、ポリイミド前駆体の種類、樹脂組成物の固形分含有量、樹脂組成物が含み得る溶媒の種類等によって異なってよい。 The desired weight average molecular weight of the polyimide precursor may vary depending on the desired application, the type of polyimide precursor, the solid content of the resin composition, the type of solvent that the resin composition may contain, and the like.
 例えば、重量平均分子量の下限の好ましい例は、111,000、112,000、113,000、114,000、115,000、116,000、117,000、118,000、119,000、120,000、121,000、122,000、123,000、124,000、125,000、126,000、127,000、128,000、129,000、130,000、131,000、132,000、133,000、134,000、135,000、136,000、137,000、138,000、139,000、140,000、141,000、142,000、143,000、144,000、145,000、146,000、147,000、148,000、149,000、150,000、151,000、152,000、153,000、154,000、155,000、156,000、157,000、158,000、159,000、160,000、161,000、162,000、163,000、164,000、165,000、166,000、167,000、168,000、169,000、170,000、171,000、172,000、173,000、174,000、175,000、176,000、177,000、178,000、179,000、180,000、181,000、182,000、183,000、184,000、185,000、186,000、187,000、188,000、189,000、190,000、191,000、192,000、193,000、194,000、195,000、196,000、197,000、198,000、199,000、200,000、201,000、202,000、203,000、204,000、205,000、206,000、207,000、208,000、209,000、210,000、211,000、212,000、213,000、214,000、215,000、216,000、217,000、218,000、219,000、220,000、221,000、222,000、223,000、224,000、225,000、226,000、227,000、228,000、229,000、230,000、231,000、232,000、233,000、234,000、235,000、236,000、237,000、238,000、239,000、240,000、241,000、242,000、243,000、244,000、245,000、246,000、247,000、248,000、又は249,000である。 For example, preferable examples of the lower limit of the weight average molecular weight are 111,000, 112,000, 113,000, 114,000, 115,000, 116,000, 117,000, 118,000, 119,000, 120, 90, 120. 000, 121,000, 122,000, 123,000, 124,000, 125,000, 126,000, 127,000, 128,000, 129,000, 130,000, 131,000, 132,000, 133,000, 134,000, 135,000, 136,000, 137,000, 138,000, 139,000, 140,000, 141,000, 142,000, 143,000, 144,000, 145, 000, 146,000, 147,000, 148,000, 149,00 , 150,000, 151,000, 152,000, 153,000, 154,000, 155,000, 156,000, 157,000, 158,000, 159,000, 160,000, 161,000, 162 000, 163,000, 164,000, 165,000, 166,000, 167,000, 168,000, 169,000, 170,000, 171,000, 172,000, 173,000, 174,000 , 175,000, 176,000, 177,000, 178,000, 179,000, 180,000, 181,000, 182,000, 183,000, 184,000, 185,000, 186,000, 187 , 188,000, 189,000, 190,000, 191 000, 192,000, 193,000, 194,000, 195,000, 196,000, 197,000, 198,000, 19,000, 200,000, 201,000, 202,000, 203,000, 204,000, 205,000, 206,000, 207,000, 208,000, 209,000, 210,000, 211,000, 212,000, 213,000, 214,000, 215,000, 216, 000, 217,000, 218,000, 219,000, 220,000, 221,000, 222,000, 223,000, 224,000, 225,000, 226,000, 227,000, 228,000, 229,000, 230,000, 231,000, 232,000, 2 33,000, 234,000, 235,000, 236,000, 237,000, 238,000, 239,000, 240,000, 241,000, 242,000, 243,000, 244,000, 245, 000, 246,000, 247,000, 248,000, or 249,000.
 また、重量平均分子量の上限の好ましい例は、249,000、248,000、247,000、246,000、245,000、244,000、243,000、242,000、241,000、240,000、239,000、238,000、237,000、236,000、235,000、234,000、233,000、232,000、231,000、230,000、229,000、228,000、227,000、226,000、225,000、224,000、223,000、222,000、221,000、220,000、219,000、218,000、217,000、216,000、215,000、214,000、213,000、212,000、211,000、210,000、209,000、208,000、207,000、206,000、205,000、204,000、203,000、202,000、201,000、200,000、199,000、198,000、197,000、196,000、195,000、194,000、193,000、192,000、191,000、190,000、189,000、188,000、187,000、186,000、185,000、184,000、183,000、182,000、181,000、180,000、179,000、178,000、177,000、176,000、175,000、174,000、173,000、172,000、171,000、170,000、169,000、168,000、167,000、166,000、165,000、164,000、163,000、162,000、161,000、160,000、159,000、158,000、157,000、156,000、155,000、154,000、153,000、152,000、151,000、150,000、149,000、148,000、147,000、146,000、145,000、144,000、143,000、142,000、141,000、140,000、139,000、138,000、137,000、136,000、135,000、134,000、133,000、132,000、131,000、130,000、129,000、128,000、127,000、126,000、125,000、124,000、123,000、122,000、121,000、120,000、119,000、118,000、117,000、116,000、115,000、114,000、113,000、112,000、又は111,000である。 Also, preferable examples of the upper limit of the weight average molecular weight are 249,000, 248,000, 247,000, 246,000, 245,000, 244,000, 243,000, 242,000, 241,000, 240, 240. 000, 239,000, 238,000, 237,000, 235,000, 234,000, 233,000, 232,000, 231,000, 230,000, 229,000, 228,000, 227,000, 226,000, 225,000, 224,000, 223,000, 222,000, 221,000, 220,000, 219,000, 218,000, 217,000, 216,000, 215, 000, 214,000, 213,000, 212,000, 211,000 210,000, 209,000, 208,000, 207,000, 206,000, 205,000, 204,000, 203,000, 202,000, 201,000, 200,000, 19,000, 198, 000, 197,000, 196,000, 195,000, 194,000, 193,000, 192,000, 191,000, 190,000, 189,000, 188,000, 187,000, 186,000, 185,000, 184,000, 183,000, 182,000, 181,000, 180,000, 179,000, 178,000, 177,000, 176,000, 175,000, 174,000, 173, 000, 172,000, 171,000, 170,000, 169, 00, 168,000, 167,000, 166,000, 165,000, 164,000, 163,000, 162,000, 161,000, 160,000, 159,000, 158,000, 157,000, 156,000, 155,000, 154,000, 153,000, 152,000, 151,000, 150,000, 149,000, 148,000, 147,000, 146,000, 145,000, 144, 000, 143,000, 142,000, 141,000, 140,000, 139,000, 138,000, 137,000, 136,000, 135,000, 134,000, 133,000, 132,000, 131,000, 130,000, 129,000, 128,000, 12 7,000, 126,000, 125,000, 124,000, 123,000, 122,000, 121,000, 120,000, 119,000, 118,000, 117,000, 116,000, 115, 000, 114,000, 113,000, 112,000, or 111,000.
 例えば、ポリイミド前駆体を含む樹脂組成物の硬化物(例えばポリイミドフィルム(本開示でキュア膜ともいう。))の伸度及び黄色度(YI)の観点では、重量平均分子量120,000以上が好ましく、130,000以上がさらに好ましく、160,000以上が特に好ましい。また、当該硬化物(例えばポリイミドフィルム)のヘイズの観点では、220,000以下が好ましく、200,000以下がより好ましい。好ましい一態様において、ポリイミド前駆体の重量平均分子量は、160,000以上220,000以下である。 For example, in view of elongation and yellowness (YI) of a cured product of a resin composition containing a polyimide precursor (for example, a polyimide film (also referred to as a cured film in the present disclosure)), a weight average molecular weight of 120,000 or more is preferable 130,000 or more is more preferable, and 160,000 or more is particularly preferable. Moreover, in the viewpoint of the haze of the said hardened | cured material (for example, polyimide film), 220,000 or less is preferable and 200,000 or less is more preferable. In a preferred embodiment, the weight average molecular weight of the polyimide precursor is 160,000 or more and 220,000 or less.
(ポリイミドフィルムの厚み方向レタデーション(Rth))
 ポリイミド前駆体の硬化物(すなわちイミド化物)としてポリイミドフィルムを作製したとき、当該ポリイミドフィルムの膜厚10μmでの厚み方向レタデーション(Rth)は、ポリイミド前駆体のモノマー骨格によって異なるが、同一のモノマー骨格であれば、ポリイミド前駆体の重量平均分子量が大きいほどRthが小さい傾向がある。ポリマー骨格としては、DASを用いるとRthが下さくなる傾向にある。ポリイミド前駆体の重量平均分子量とポリイミドフィルムのRthとの上記関係のメカニズムは不明であるが、ポリイミドフィルムの分子の配向、及び結晶度が関係すると考えられる。
(Retardation in the thickness direction of polyimide film (Rth))
When a polyimide film is produced as a cured product of a polyimide precursor (that is, imidized), retardation in the thickness direction (Rth) at a film thickness of 10 μm of the polyimide film varies depending on the monomer skeleton of the polyimide precursor, but the same monomer skeleton In this case, Rth tends to be smaller as the weight average molecular weight of the polyimide precursor is larger. The use of DAS as the polymer backbone tends to lower Rth. Although the mechanism of the above-mentioned relation between the weight average molecular weight of the polyimide precursor and the Rth of the polyimide film is unknown, it is considered that the orientation and crystallinity of the molecules of the polyimide film are related.
 特定の態様において、Rthは、低複屈折性のポリイミドフィルムを得る観点から、300nm以下である。特にポリイミドフィルムを表示材料として用いる場合、Rthとしては、200nm以下が好ましく、100nm以下がより好ましく、80nm以下がより好ましく、50nm以下がより好ましく、30nmが特に好ましい。Rthが300nm以下であれば、像画像を正しく捉えることが容易であり、特に、Rthが200nm以下であれば、画像の色再現性が良好である。 In a specific aspect, Rth is 300 nm or less from the viewpoint of obtaining a low birefringence polyimide film. In particular, when a polyimide film is used as a display material, Rth is preferably 200 nm or less, more preferably 100 nm or less, more preferably 80 nm or less, more preferably 50 nm or less, and particularly preferably 30 nm. If Rth is 300 nm or less, it is easy to capture an image correctly, and in particular, if Rth is 200 nm or less, color reproducibility of the image is good.
 一態様において、ポリイミドフィルムは、膜厚10μm換算での厚み方向レタデーション(Rth)が300nm以下であり、及び/又は、膜厚10μm換算での黄色度(YI)が20以下である。一態様において、ポリイミドフィルムは、膜厚10μm換算での厚み方向レタデーション(Rth)が300nm以下であり、及び、膜厚10μm換算での黄色度(YI)が20以下である。 In one aspect, the polyimide film has a retardation in the thickness direction (Rth) of 10 μm or less in the thickness direction of 300 nm or less and / or a yellowness (YI) of 10 μm or less in the film thickness of 20 or less. In one embodiment, the polyimide film has a thickness direction retardation (Rth) in terms of a film thickness of 10 μm of 300 nm or less, and a yellowness (YI) in terms of a film thickness of 10 μm of 20 or less.
(ポリイミドフィルムの黄色度(YI))
 特定の態様において、ポリイミド前駆体の硬化物(すなわちイミド化物)としてポリイミドフィルムを作製したとき、当該ポリイミドフィルムの膜厚10μmにおける黄色度(YI)は、良好な光学特性を得る観点で、20以下であり、好ましくは18以下、より好ましくは16以下、更に好ましくは14以下、更に好ましくは13以下、更に好ましくは10以下、特に好ましくは7以下である。当該ポリイミドフィルムの膜厚10μmでのYIは、ポリイミド前駆体のモノマー骨格によって異なるが、同一のモノマー骨格であれば、ポリイミド前駆体の重量平均分子量が大きいほどYIが小さい傾向がある。
(Yellowness of polyimide film (YI))
In a specific aspect, when a polyimide film is produced as a cured product of a polyimide precursor (that is, imidized product), the yellowness (YI) at a film thickness of 10 μm of the polyimide film is 20 or less in view of obtaining good optical characteristics. And preferably 18 or less, more preferably 16 or less, further preferably 14 or less, further preferably 13 or less, still more preferably 10 or less, particularly preferably 7 or less. The YI at a film thickness of 10 μm of the polyimide film varies depending on the monomer skeleton of the polyimide precursor, but if the monomer skeleton is the same, the larger the weight average molecular weight of the polyimide precursor, the smaller the YI tends to be.
(ポリイミドフィルムのその他の好ましい特性)
 ポリイミド前駆体の硬化物(すなわちイミド化物)としてポリイミドフィルムをガラス基板のような無機支持基板上に作製したとき、当該ポリイミドフィルムの膜厚10μmにおけるガラス基板との間に発生する残留応力は、例えばディスプレイ用途における製造上、ポリイミド付きのガラス基板の反り量低減の観点から、好ましくは25MPa以下、より好ましくは23MPa以下、更に好ましくは20MPa以下、更に好ましくは18MPa以下、特に好ましくは16MPa以下である。
(Other desirable characteristics of polyimide film)
When a polyimide film is produced on an inorganic supporting substrate such as a glass substrate as a cured product (i.e., imidized product) of a polyimide precursor, the residual stress generated between the polyimide film and the glass substrate at a film thickness of 10 μm is, for example, From the viewpoint of reducing the amount of warpage of a glass substrate with a polyimide, it is preferably 25 MPa or less, more preferably 23 MPa or less, still more preferably 20 MPa or less, still more preferably 18 MPa or less, particularly preferably 16 MPa or less.
 また、当該ポリイミドフィルムの膜厚10μmにおける引張伸度が15%以上であることが好ましい。引張伸度は、フレキシブルディスプレイの力学強度の観点からより好ましくは20%以上であり、更に好ましくは25%以上であり、更に好ましくは30%以上であり、更に好ましくは35%以上であり、特に好ましくは40%以上である。当該ポリイミドフィルムの引張伸度は、ポリイミド前駆体のモノマー骨格によって異なるが、同一のモノマー骨格であれば、ポリイミド前駆体の重量平均分子量が大きいほど引張伸度が大きい傾向がある。 Moreover, it is preferable that the tensile elongation in film thickness of 10 micrometers of the said polyimide film is 15% or more. The tensile elongation is more preferably 20% or more, still more preferably 25% or more, still more preferably 30% or more, still more preferably 35% or more, from the viewpoint of mechanical strength of the flexible display. Preferably it is 40% or more. The tensile elongation of the polyimide film varies depending on the monomer skeleton of the polyimide precursor, but if it is the same monomer skeleton, the tensile elongation tends to increase as the weight average molecular weight of the polyimide precursor increases.
 ポリイミドフィルムのガラス転移温度Tgは、ポリイミド上に窒化ケイ素のような無機膜をCVD工程で作製する際のプロセス温度をより上げられる観点から、360℃以上であることが好ましく、400℃以上がより好ましく、470℃以上がさらに好ましい。 The glass transition temperature Tg of the polyimide film is preferably 360 ° C. or higher, more preferably 400 ° C. or higher, from the viewpoint of being able to raise the process temperature when forming an inorganic film such as silicon nitride on polyimide in the CVD step. Preferably, 470 ° C. or higher is more preferable.
 ポリイミドフィルムは膜厚が均一であることが好ましい。特にポリイミドフィルムをフレキシブルディスプレイ等の画面の材料として用いる場合は、可視光の波長が約380nmから約700nmであるため良好なディスプレイ性能を得る観点及び、ディスプレイの製造工程の観点から、特に高い膜厚均一性が求められる。ポリイミドフィルムの膜厚均一性(膜厚の複数点の標準偏差)は10μm以下が好ましく、8μm以下が好ましく、5μm以下が好ましく、3μm以下が好ましく、2μm以下が好ましく、1μm以下が特に好ましく、500nm以下が特に好ましく、300nm以下が特に好ましい。膜厚均一性は小さいほど好ましいが、ディスプレイ製造の収率向上の観点で、例えば50nm以上、又は100nm以上であってもよい。なお上記膜厚均一性は、例えば本開示の[実施例]の項に記載の方法で測定されるような複数点の膜厚から計算される3σの値を意味する。 The polyimide film preferably has a uniform film thickness. In particular, when a polyimide film is used as a material of a screen of a flexible display or the like, the wavelength of visible light is about 380 nm to about 700 nm, and the film thickness is particularly high from the viewpoint of obtaining good display performance and the display manufacturing process. Uniformity is required. 10 μm or less is preferable, 8 μm or less is preferable, 5 μm or less is preferable, 3 μm or less is preferable, 2 μm or less is preferable, 1 μm or less is particularly preferable, and 500 nm is uniform The following are particularly preferable, and 300 nm or less is particularly preferable. Although the film thickness uniformity is preferably as small as possible, it may be, for example, 50 nm or more or 100 nm or more from the viewpoint of improving the yield of display production. In addition, the said film thickness uniformity means the value of 3 (sigma) calculated from the film thickness of several points which are measured by the method as described in the term of [Example] of this indication, for example.
(樹脂組成物のせん断速度依存性)
 本実施の形態の樹脂組成物のせん断速度依存性(TI)(以下、単にTIともいう。)は、好ましくは0.9以上1.1以下である。本開示で、TIは、樹脂組成物の粘度を23℃にて温調機付粘度計(東機産業械社製TVE-35H)で測定したときに、測定回転数a(rpm)における粘度ηa(mPa・s)と、測定回転数b(rpm)における粘度ηb(mPa・s)(但し、a*10=bである)とから、下記式:
TI=ηa/ηb
に従って求められる値である。測定条件の詳細は実施例中の記載で説明する。
(Shear rate dependency of resin composition)
The shear rate dependency (TI) (hereinafter, also simply referred to as TI) of the resin composition of the present embodiment is preferably 0.9 or more and 1.1 or less. In the present disclosure, TI is the viscosity ηa at a measurement rotational speed a (rpm) when the viscosity of the resin composition is measured at 23 ° C. with a temperature controlled viscometer (TVE-35H manufactured by Toki Sangyo Co., Ltd.) From (mPa · s) and viscosity η b (mPa · s) at a measured rotational speed b (rpm) (where a * 10 = b), the following formula:
TI = ηa / ηb
Is a value determined according to Details of the measurement conditions will be described in the description in the examples.
 せん断速度依存性(TI)は、好ましくは、0.9以上、又は0.95以上、又は1.0以上であり、好ましくは、1.1以下、又は1.05以下、又は1.0以下である。TIがこの範囲であると、樹脂組成物はニュートン流体といわれ、樹脂組成物をスリットコートした場合の膜厚均一性が良好であるため好ましい。膜厚均一性が良好な樹脂組成物を硬化して得られるポリイミドフィルムは、良好な膜厚均一性を有するため、フレキシブルディスプレイ等の画面の材料として好適に用いることができる。 Shear rate dependency (TI) is preferably 0.9 or more, or 0.95 or more, or 1.0 or more, preferably 1.1 or less, or 1.05 or less, or 1.0 or less It is. When the TI is in this range, the resin composition is referred to as a Newtonian fluid, which is preferable because the film thickness uniformity when slit-coating the resin composition is good. A polyimide film obtained by curing a resin composition having a good film thickness uniformity has a good film thickness uniformity, and thus can be suitably used as a material of a screen of a flexible display or the like.
 樹脂組成物のせん断速度依存性が0.9以上1.1以下の場合に膜厚均一性が良好になる詳細な理由は不明確であるが、以下の様に考えられる。
 スリットコートにおいては、塗布開始直後の樹脂組成物に与えられるせん断速度が小さく、塗布を継続したときの樹脂組成物に与えられるせん断速度が大きい。せん断速度依存性が小さい(具体的にはTIが0.9以上1.1以下)場合、塗布開始直後と塗布を継続したときとの樹脂組成物の粘度の差が小さいため、塗布方向(MD(Machine direction))の膜厚ばらつきが小さい(すなわち塗布方向の膜厚均一性が良好である)。また、スリットコートノズルが、幅方向(TD(Transverse direction))のいずれかの一端のみから樹脂組成物を注入する仕様の場合、スリットコート時に、注入口付近では樹脂組成物のせん断速度が大きいが、注入口と反対側(すなわちノズルのデッドロック側)では、樹脂組成物のせん断速度が小さくなる。このような場合でも、せん断速度依存性が小さい(具体的にはTIが0.9以上1.1以下)ことで、幅方向の膜厚ばらつきを小さくできる。このように、せん断速度依存性が小さい(具体的にはTIが0.9以上1.1以下)ことは、せん断による粘度への影響を低減し、MD及びTDいずれにおいても膜厚ばらつきが小さい(すなわち膜厚均一性が良好である)という利点を与える。
The detailed reason why the film thickness uniformity becomes good when the shear rate dependency of the resin composition is 0.9 or more and 1.1 or less is unclear, but it is considered as follows.
In the slit coat, the shear rate given to the resin composition immediately after the start of application is small, and the shear rate given to the resin composition when the application is continued is large. When the shear rate dependency is small (specifically, TI is 0.9 or more and 1.1 or less), the difference between the viscosity of the resin composition immediately after the start of the application and the time when the application is continued is small. (Machine direction) film thickness variation is small (ie film thickness uniformity in the coating direction is good). When the slit coat nozzle is of a specification in which the resin composition is injected from only one end in the width direction (TD (Transverse direction)), the shear rate of the resin composition is large near the injection port at the time of slit coat. The shear rate of the resin composition decreases on the side opposite to the inlet (i.e., the deadlock side of the nozzle). Even in such a case, the film thickness variation in the width direction can be reduced by the small shear rate dependency (specifically, TI of 0.9 or more and 1.1 or less). Thus, the small shear rate dependency (specifically, TI of 0.9 or more and 1.1 or less) reduces the influence of shear on viscosity, and the variation in film thickness is small in both MD and TD. It offers the advantage of (i.e., good film thickness uniformity).
 樹脂組成物のせん断速度依存性は、樹脂組成物の合成方法と相関があると考えられる。
 例えば、反応容器に、酸二無水物、ジアミン、及び構造により酸二無水物又はジアミンであり得るシリコーンオイル、のすべてを加え加熱して反応している場合と、該ジアミンに、溶媒に溶解した該酸二無水物と、溶媒に溶解した該シリコーンオイルとを、室温にて時間をかけて少量ずつ滴下し、少しずつ反応させる場合とを比較すると、前者の場合、モノマー(すなわち酸二無水物、ジアミン及びシリコーンオイル)のうち、より反応性が高いもの(酸性又は塩基性が高いもの、立体障害が小さいもの等)から反応し、ポリイミド前駆体はブロックポリマーになりやすい傾向がある。一方、後者の場合、酸二無水物及びシリコーンオイルを溶媒に溶解させ、少量ずつ滴下しているため、各モノマーが反応性等に関係なく反応でき、ポリイミド前駆体はランダムポリマーになりやすい傾向がある。このように上記の前者と後者とでは、生成物のポリマー構成が異なると考えられる。そしてブロックポリマー(前者)の場合、ポリマー中で特定のモノマーが集まっているため、ポリマー鎖間で分子間相互作用が発生しやすくなったり、ポリマーの柔軟性が損なわれるためポリマー鎖同士でスタックしやすくなると考えられる。結果として、樹脂組成物のせん断速度依存性が大きくなると考えられる。一方、後者の場合は、各モノマーが順序良く結合しており、分子間相互作用等が発生しにくいため、せん断速度依存性が小さいと考えられる。
The shear rate dependency of the resin composition is considered to be correlated with the method of synthesizing the resin composition.
For example, in the reaction vessel, all of acid dianhydride, diamine, and silicone oil which may be acid dianhydride or diamine depending on the structure are added and heated to react, and the diamine is dissolved in a solvent The acid dianhydride and the silicone oil dissolved in a solvent are dropped little by little at room temperature over time, and compared with the case where they are reacted little by little, in the former case, the monomer (ie, acid dianhydride) Among the diamines and silicone oils), those having higher reactivity (such as those having high acidity or basicity, those having less steric hindrance, etc.) react, and the polyimide precursor tends to be a block polymer. On the other hand, in the latter case, acid dianhydride and silicone oil are dissolved in a solvent and added dropwise little by little, so that each monomer can react regardless of the reactivity etc., and the polyimide precursor tends to be a random polymer. is there. Thus, the polymer composition of the product is considered to be different between the former and the latter. And, in the case of block polymer (the former), specific monomers are gathered in the polymer, so intermolecular interaction is likely to occur between polymer chains, and the flexibility of the polymer is impaired. It is considered to be easier. As a result, it is considered that the shear rate dependency of the resin composition is increased. On the other hand, in the case of the latter, since each monomer is bound in order and intermolecular interaction and the like are hard to occur, it is considered that the shear rate dependency is small.
 また、前者の場合、モノマーをすべて加え加熱しているため、特に一部の酸二無水物は、ポリマー鎖と反応する前に、熱により酸二無水物基が開環すると考えられる。酸二無水物基が開環してジカルボキシル基になると、酸二無水物基に比べ反応性が下がるため、ポリイミド前駆体の分子量が小さくなると考えられる。一方、後者の場合、酸二無水物を溶媒に溶解させ、室温で少量ずつ滴下するため、酸二無水物基が開環することなくポリマー鎖と反応することが可能となり。分子量が大きくなると考えられる。 In the former case, since all the monomers are added and heated, it is believed that particularly the acid dianhydride thermally opens the acid dianhydride group before reacting with the polymer chain. When the acid dianhydride group is ring-opened to form a dicarboxylic group, the reactivity is lowered as compared with the acid dianhydride group, and therefore, it is considered that the molecular weight of the polyimide precursor becomes smaller. On the other hand, in the latter case, since the acid dianhydride is dissolved in a solvent and dropped little by little at room temperature, the acid dianhydride group can be reacted with the polymer chain without ring opening. It is believed that the molecular weight increases.
(樹脂組成物のスリットコート特性)
 ポリイミド前駆体を含む樹脂組成物のスリットノズルによるコート特性(スリットコート特性)は、ポリイミド前駆体の重量平均分子量及び樹脂組成物の固形分含有量と相関がある。ポリイミド前駆体が低分子量である場合、及び/又は樹脂組成物が低固形分含有量である場合には、ノズルからの液漏れが発生しやすく、一方、ポリイミド前駆体が高分子量である場合、及び/又は樹脂組成物が高固形分含有量である場合には、ノズル先端でワニスの目詰まりが発生しやすい。したがって、ポリイミド前駆体の重量平均分子量は、固形分含有量を制御することで所望のスリットコート特性が得られるような範囲に制御することが好ましい。
(Slit coat characteristics of resin composition)
The coat characteristic (slit coat characteristic) by the slit nozzle of the resin composition containing a polyimide precursor has correlation with the weight average molecular weight of a polyimide precursor, and solid content of a resin composition. When the polyimide precursor has a low molecular weight and / or the resin composition has a low solid content, liquid leakage from the nozzle is likely to occur, while when the polyimide precursor has a high molecular weight, And / or when the resin composition has a high solid content, clogging of the varnish tends to occur at the nozzle tip. Therefore, it is preferable to control the weight average molecular weight of the polyimide precursor in such a range that the desired slit coat characteristics can be obtained by controlling the solid content.
(塗膜のエッジ特性)
 ポリイミド前駆体を含む樹脂組成物をスリットコートして乾燥塗膜を形成する際、ポリイミド前駆体が低分子量である場合、及び/又は樹脂組成物が低固形分含有量である場合には、エッジのダレが発生しやすく、一方、ポリイミド前駆体が高分子量である場合、及び/又は樹脂組成物が高固形分含有量である場合には、エッジビ-ド(すなわちエッジの盛り上がり)が発生しやすい。したがって、ポリイミド前駆体の重量平均分子量は、固形分含有量を制御することで所望のエッジ特性が得られるような範囲に制御することが好ましい。
(Edge characteristics of coating film)
When slit-coating a resin composition containing a polyimide precursor to form a dried coating, an edge is observed if the polyimide precursor has a low molecular weight and / or if the resin composition has a low solid content Edging tends to occur, while edge beads (i.e., edge build-up) tend to occur if the polyimide precursor has a high molecular weight and / or if the resin composition has a high solid content. . Therefore, it is preferable to control the weight average molecular weight of the polyimide precursor in such a range that the desired edge characteristics can be obtained by controlling the solid content.
 一態様において、樹脂組成物の固形分含有量は、10質量%~25質量%である。樹脂組成物をスリットコートする際の設定可能なコートギャップ(すなわち、スリットコートノズル先端と基板とのギャップ)は、樹脂組成物の固形分含有量と相関し、樹脂組成物に含まれる固形分の種類が同一であれば、樹脂組成物の固形分含有量が小さいほどコートギャップを大きくできる傾向がある。良好なコーティングの観点でコートギャップは大きい方が好ましく、例えば、コートギャップが50μm以上であれば、基板サイズが比較的大きい場合にもスリットノズルと基板との衝突を回避できる。樹脂組成物の固形分含有量が10質量%~25質量%である場合、ポリイミド前駆体の種類及び分子量を選択して目的のコートギャップを実現できる。樹脂組成物の好ましい固形分含有量は、所望される用途、ポリイミド前駆体の種類及び分子量、樹脂組成物が含み得る溶媒の種類等によって異なってよい。 In one embodiment, the solid content of the resin composition is 10% by mass to 25% by mass. The settable coat gap (i.e., the gap between the tip of the slit coat nozzle and the substrate) at the time of slit coating the resin composition correlates with the solid content of the resin composition, and the solid content contained in the resin composition If the type is the same, the smaller the solid content of the resin composition, the larger the coat gap tends to be. From the viewpoint of good coating, the coat gap is preferably large. For example, when the coat gap is 50 μm or more, the collision between the slit nozzle and the substrate can be avoided even when the substrate size is relatively large. When the solid content of the resin composition is 10% by mass to 25% by mass, the intended coating gap can be realized by selecting the type and molecular weight of the polyimide precursor. The preferred solids content of the resin composition may vary depending on the desired application, the type and molecular weight of the polyimide precursor, the type of solvent that the resin composition may comprise, and the like.
 固形分含有量の下限の好ましい例は、11質量%、12質量%、13質量%、14質量%、15質量%、16質量%、17質量%、18質量%、19質量%、20質量%、21質量%、22質量%、23質量%、又は24質量%である。 Preferred examples of the lower limit of the solid content are 11 mass%, 12 mass%, 13 mass%, 14 mass%, 15 mass%, 16 mass%, 17 mass%, 18 mass%, 19 mass%, 20 mass% , 21% by mass, 22% by mass, 23% by mass or 24% by mass.
 固形分含有量の上限の好ましい例は、24質量%、23質量%、22質量%、21質量%、20質量%、19質量%、18質量%、17質量%、16質量%、15質量%、14質量%、13質量%、12質量%、又は11質量%である。 Preferred examples of the upper limit of the solid content are 24 mass%, 23 mass%, 22 mass%, 21 mass%, 20 mass%, 19 mass%, 18 mass%, 17 mass%, 16 mass%, 15 mass% , 14% by mass, 13% by mass, 12% by mass or 11% by mass.
 好ましい一態様において、固形分濃度は、10~20質量%であり、10~15質量%がさらに好ましい。 In a preferred embodiment, the solid concentration is 10 to 20% by mass, and more preferably 10 to 15% by mass.
 好ましい態様において、ポリイミド前駆体は、式(3):
Figure JPOXMLDOC01-appb-C000013
{式中、R3及びR4の各々は、複数ある場合それぞれ独立に、炭素数1~5の1価の脂肪族炭化水素基、又は炭素数6~10の1価の芳香族基を示し、そしてmは、1~200の整数である。}で表される構造を有する。
 R3及びR4が炭素数1~5の1価の脂肪族炭化水素基又は炭素数6~10の1価の芳香族基であることは、支持体との間に発生する残留応力及びRthを低減できるポリイミドを得る観点から有利である。R3及びR4の好ましい構造としては、メチル基、エチル基、プロピル基、ブチル基、フェニル基等が挙げられる。
 mは、支持体との間に発生する残留応力及びRthを低減できるポリイミドを得る観点から、1~200であり、好ましくは、1以上、又は3以上、又は5以上、好ましくは、200以下、又は180以下、又は160以下である。
In a preferred embodiment, the polyimide precursor has the formula (3):
Figure JPOXMLDOC01-appb-C000013
[Wherein, each of R 3 and R 4 independently represents a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, or a monovalent aromatic group having 6 to 10 carbon atoms, when there are a plurality of each. , And m is an integer of 1 to 200. } Has a structure represented by
The fact that R 3 and R 4 each is a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms or a monovalent aromatic group having 6 to 10 carbon atoms is due to the residual stress and Rth generated with the support. It is advantageous from the viewpoint of obtaining a polyimide that can reduce the The preferred structure of R 3 and R 4, a methyl group, an ethyl group, a propyl group, a butyl group, a phenyl group, and the like.
m is 1 to 200, preferably 1 or more, or 3 or more, or 5 or more, preferably 200 or less, from the viewpoint of obtaining a polyimide capable of reducing the residual stress and Rth generated with the support. Or 180 or less, or 160 or less.
 ポリイミド前駆体は式(3)の構造を分子中のいずれの部位に有してもよいが、シロキサンモノマーの種類、コストの観点から、式(3)の構造はジアミン成分由来であることが好ましい。ポリイミド前駆体全体質量に占める、式(3)で表される構造部位の比率は、支持体との間に発生する残留応力及びRthを低減する観点から、好ましくは5質量%以上、より好ましくは6質量%以上、更に好ましくは7質量%以上であり、得られる硬化物(例えばポリイミドフィルム)の透明性、及び耐熱性の観点から、好ましくは40質量%以下、より好ましくは30質量%以下、更に好ましくは25質量%以下である。 The polyimide precursor may have the structure of the formula (3) at any site in the molecule, but the structure of the formula (3) is preferably derived from the diamine component from the viewpoint of the type of siloxane monomer and cost. . The ratio of the structural portion represented by the formula (3) to the total mass of the polyimide precursor is preferably 5% by mass or more, more preferably from the viewpoint of reducing the residual stress and Rth generated with the support. It is 6% by mass or more, more preferably 7% by mass or more, preferably 40% by mass or less, more preferably 30% by mass or less from the viewpoint of transparency of the cured product (for example, polyimide film) and heat resistance. More preferably, it is 25 mass% or less.
 典型的な態様において、上記式(1)で表される構造のポリイミド前駆体は、R1基を含むジアミン成分と、R2基を含む酸二無水物成分との重合物である。 In a typical aspect, the polyimide precursor of the structure represented by the said Formula (1) is a polymer of the diamine component containing R 1 group, and the acid dianhydride component containing R 2 group.
 R2基を含む酸二無水物としては、ピロメリット酸二無水物、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、2,2’,3,3’-ビフェニルテトラカルボン酸二無水物、4,4’-(ヘキサフルオロイソプロピリデン)ジフタル酸無水物、5-(2,5-ジオキソテトラヒドロ-3-フラニル)-3-メチル-シクロヘキセン-1,2ジカルボン酸無水物、1,2,3,4-ベンゼンテトラカルボン酸二無水物、3,3’,4,4’-ベンゾフェノンテトラカルボン酸二無水物、2,2’,3,3’-ベンゾフェノンテトラカルボン酸二無水物、3,3’,4,4’―ジフェニルスルホンテトラカルボン酸二無水物、メチレン-4,4’-ジフタル酸二無水物、1,1-エチリデン-4,4’-ジフタル酸二無水物、2,2-プロピリデン-4,4’-ジフタル酸二無水物、1,2-エチレン-4,4’-ジフタル酸二無水物、1,3-トリメチレン-4,4’-ジフタル酸二無水物、1,4-テトラメチレン-4,4’-ジフタル酸二無水物、1,5-ペンタメチレン-4,4’-ジフタル酸二無水物、4,4’-オキシジフタル酸二無水物、p-フェニレンビス(トリメリテート酸無水物)、チオ-4,4’-ジフタル酸二無水物、スルホニル-4,4’-ジフタル酸二無水物、1,3-ビス(3,4-ジカルボキシフェニル)ベンゼン二無水物、1,3-ビス(3,4-ジカルボキシフェノキシ)ベンゼン二無水物、1,4-ビス(3,4-ジカルボキシフェノキシ)ベンゼン二無水物、1,3-ビス[2-(3,4-ジカルボキシフェニル)-2-プロピル]ベンゼン二無水物、1,4-ビス[2-(3,4-ジカルボキシフェニル)-2-プロピル]ベンゼン二無水物、ビス[3-(3,4-ジカルボキシフェノキシ)フェニル]メタン二無水物、ビス[4-(3,4-ジカルボキシフェノキシ)フェニル]メタン二無水物、2,2-ビス[3-(3,4-ジカルボキシフェノキシ)フェニル]プロパン二無水物、2,2-ビス[4-(3,4-ジカルボキシフェノキシ)フェニル]プロパン二無水物、ビス(3,4-ジカルボキシフェノキシ)ジメチルシラン二無水物、1,3-ビス(3,4-ジカルボキシフェニル)-1,1,3,3-テトラメチルジシロキサン二無水物、2,3,6,7-ナフタレンテトラカルボン酸二無水物、1,4,5,8-ナフタレンテトラカルボン酸二無水物、1,2,5,6-ナフタレンテトラカルボン酸二無水物、3,4,9,10-ペリレンテトラカルボン酸二無水物、2,3,6,7-アントラセンテトラカルボン酸二無水物、1,2,7,8-フェナントレンテトラカルボン酸二無水物等を例示することができる。 As the acid dianhydride containing an R 2 group, pyromellitic dianhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic acid dianhydride, 2,2 ′, 3,3′-biphenyltetracarboxylic acid Acid dianhydride, 4,4 '-(hexafluoroisopropylidene) diphthalic anhydride, 5- (2,5-dioxotetrahydro-3-furanyl) -3-methyl-cyclohexene-1,2 dicarboxylic anhydride 1,2,3,4-Benzenetetracarboxylic acid dianhydride, 3,3 ′, 4,4′-benzophenonetetracarboxylic acid dianhydride, 2,2 ′, 3,3′-benzophenonetetracarboxylic acid Anhydride, 3,3 ', 4,4'-Diphenylsulfone tetracarboxylic dianhydride, methylene-4,4'-diphthalic dianhydride, 1,1-ethylidene-4,4'-diphthalic dianhydride , 2,2-Proprylidene-4 4'-diphthalic dianhydride, 1,2-ethylene-4,4'-diphthalic dianhydride, 1,3-trimethylene-4,4'-diphthalic dianhydride, 1,4-tetramethylene- 4,4'-Diphthalic acid dianhydride, 1,5-pentamethylene-4,4'-diphthalic acid dianhydride, 4,4'-oxydiphthalic acid dianhydride, p-phenylene bis (trimellitic acid anhydride) , Thio-4,4'-diphthalic dianhydride, sulfonyl-4,4'-diphthalic dianhydride, 1,3-bis (3,4-dicarboxyphenyl) benzene dianhydride, 1,3- Bis (3,4-dicarboxyphenoxy) benzene dianhydride, 1,4-bis (3,4-dicarboxyphenoxy) benzene dianhydride, 1,3-bis [2- (3,4-dicarboxyphenyl) ) -2-Propyl] benzene dianhydride, 1,4- Bis [2- (3,4-dicarboxyphenyl) -2-propyl] benzene dianhydride, bis [3- (3,4-dicarboxyphenoxy) phenyl] methane dianhydride, bis [4- (3, 4-Dicarboxyphenoxy) phenyl] methane dianhydride, 2,2-bis [3- (3,4-dicarboxyphenoxy) phenyl] propane dianhydride, 2,2-bis [4- (3,4-) Dicarboxyphenoxy) phenyl] propane dianhydride, bis (3,4-dicarboxyphenoxy) dimethylsilane dianhydride, 1,3-bis (3,4-dicarboxyphenyl) -1,1,3,3- Tetramethyldisiloxane dianhydride, 2,3,6,7-naphthalenetetracarboxylic acid dianhydride, 1,4,5,8-naphthalenetetracarboxylic acid dianhydride, 1,2,5,6-naphthalene ether Lacarboxylic acid dianhydride, 3,4,9,10-perylenetetracarboxylic acid dianhydride, 2,3,6,7-anthracenetetracarboxylic acid dianhydride, 1,2,7,8-phenanthrene tetracarboxylic acid A dianhydride etc. can be illustrated.
 中でも、ピロメリット酸二無水物(PMDA)及びビフェニルテトラカルボン酸二無水物(BPDA)は、ポリイミド前駆体の所定の重量平均分子量の範囲内で樹脂組成物の固形分含有量を制御した場合に、良好なスリットコート性能、並びに、硬化物(例えばポリイミドフィルム)の良好な機械特性、光学特性、及び高いガラス転移温度を容易に得られる観点から好ましい。一態様において、式(1)で表される構造を有するポリイミド前駆体は、テトラカルボン酸二無水物とジアミンとの共重合体である。一態様において、ポリイミド前駆体は、ピロメリット酸二無水物(PMDA)を含むテトラカルボン酸二無水物とジアミンとの共重合体である。また一態様において、ポリイミド前駆体は、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物を含むテトラカルボン酸二無水物とジアミンとの共重合体である。 Among them, pyromellitic dianhydride (PMDA) and biphenyl tetracarboxylic dianhydride (BPDA) are used when the solid content of the resin composition is controlled within the predetermined weight average molecular weight of the polyimide precursor. It is preferable from the viewpoint that good slit coat performance and good mechanical properties, optical properties and high glass transition temperature of a cured product (for example, a polyimide film) can be easily obtained. In one aspect, the polyimide precursor having a structure represented by Formula (1) is a copolymer of tetracarboxylic acid dianhydride and diamine. In one aspect, the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride with pyromellitic dianhydride (PMDA) and a diamine. In one embodiment, the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride containing 3,3 ', 4,4'-biphenyl tetracarboxylic acid dianhydride and a diamine.
 特定の態様において、全酸二無水物中の、ピロメリット酸二無水物(PMDA)及びビフェニルテトラカルボン酸二無水物(BPDA)の合計含有量は、良好なスリットコート性能、並びに、硬化物(例えばポリイミドフィルム)の良好な厚み方向レタデーション(Rth)、黄色度(YI)、ガラス転移温度Tg、及び伸度を得る観点で、好ましくは60モル%以上、より好ましくは80モル%以上、特に好ましくは100モル%である。 In a particular embodiment, the total content of pyromellitic dianhydride (PMDA) and biphenyltetracarboxylic acid dianhydride (BPDA) in total acid dianhydrides has good slit coat performance and cured products ( For example, in view of obtaining good thickness direction retardation (Rth), yellowness (YI), glass transition temperature Tg and elongation of a polyimide film), it is preferably 60 mol% or more, more preferably 80 mol% or more, particularly preferably Is 100 mol%.
 特定の態様において、全酸二無水物中の、ピロメリット酸二無水物(PMDA)の含有量は、良好なスリットコート性能、並びに、硬化物(例えばポリイミドフィルム)の良好なガラス転移温度Tgを得る観点で、0モル%以上が好ましく、10モル%以上が好ましく、20モル%以上が好ましく、100モル%以下が好ましく、90モル%以下が好ましい。 In a particular embodiment, the content of pyromellitic dianhydride (PMDA) in total acid dianhydride has good slit coat performance, as well as good glass transition temperature Tg of the cured product (eg polyimide film) From the viewpoint of obtaining, 0 mol% or more is preferable, 10 mol% or more is preferable, 20 mol% or more is preferable, 100 mol% or less is preferable, and 90 mol% or less is preferable.
 特定の態様において、全酸二無水物中の、ビフェニルテトラカルボン酸二無水物(BPDA)の含有量は、良好なスリットコート性能、並びに、硬化物(例えばポリイミドフィルム)の良好な、厚み方向レタデーション(Rth)、黄色度(YI)、及び伸度を得る観点で、0モル%以上が好ましく、10モル%以上が好ましく、20モル%以上が好ましく、100モル%以下が好ましく、90モル%以下が好ましい。 In a particular embodiment, the content of biphenyltetracarboxylic acid dianhydride (BPDA) in the total acid dianhydride has good slit coat performance as well as good thickness direction retardation of the cured product (eg polyimide film) From the viewpoint of obtaining (Rth), yellowness (YI) and elongation, 0 mol% or more is preferable, 10 mol% or more is preferable, 20 mol% or more is preferable, 100 mol% or less is preferable, 90 mol% or less Is preferred.
 特定の態様において、酸二無水物中の、ピロメリット酸二無水物(PMDA):ビフェニルテトラカルボン酸二無水物(BPDA)の含有比率は、硬化物(例えばポリイミドフィルム)の良好な厚み方向レタデーション(Rth)、黄色度(YI)とガラス転移温度に代表される耐熱性を両立する観点で、20:80~80:20が好ましく、30:70~70:30がより好ましい。特定の態様において、ポリイミド前駆体は、テトラカルボン酸二無水物とジアミンとの共重合体であり、該テトラカルボン酸二無水物が、ピロメリット酸二無水物及び3,3’,4,4’-ビフェニルテトラカルボン酸二無水物を、ピロメリット酸二無水物:3,3’,4,4’-ビフェニルテトラカルボン酸二無水物のモル比20:80~80:20、より好ましくは30:70~70:30で含む。 In a particular embodiment, the content ratio of pyromellitic dianhydride (PMDA): biphenyltetracarboxylic dianhydride (BPDA) in the acid dianhydride is a good thickness direction retardation of a cured product (eg polyimide film) From the viewpoint of achieving both (Rth), yellowness (YI) and heat resistance represented by glass transition temperature, 20:80 to 80:20 is preferable, and 30:70 to 70:30 is more preferable. In a particular embodiment, the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride and a diamine, said tetracarboxylic acid dianhydride being pyromellitic dianhydride and 3,3 ', 4,4. The molar ratio of pyromellitic dianhydride to 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride is preferably 20:80 to 80:20, more preferably 30. : 70 to 70:30 inclusive.
 式(1)におけるR1基を含むジアミンとしては、ジアミノジフェニルスルホン(例えば4,4’-ジアミノジフェニルスルホン、3,3’-ジアミノジフェニルスルホン)、p-フェニレンジアミン、m-フェニレンジアミン、4,4’-ジアミノジフェニルスルフィド、3,4’-ジアミノジフェニルスルフィド、3,3’-ジアミノジフェニルスルフィド、4,4’-ジアミノビフェニル、3,4’-ジアミノビフェニル、3,3’-ジアミノビフェニル、4,4’-ジアミノベンゾフェノン、3,4’-ジアミノベンゾフェノン、3,3’-ジアミノベンゾフェノン、4,4’-ジアミノジフェニルメタン、3,4’-ジアミノジフェニルメタン、3,3’-ジアミノジフェニルメタン、1,4-ビス(4-アミノフェノキシ)ベンゼン、1,3-ビス(4-アミノフェノキシ)ベンゼン、1,3-ビス(3-アミノフェノキシ)ベンゼン、ビス〔4-(4-アミノフェノキシ)フェニル〕スルホン、4,4-ビス(4-アミノフェノキシ)ビフェニル、4,4-ビス(3-アミノフェノキシ)ビフェニル、ビス〔4-(4-アミノフェノキシ)フェニル〕エーテル、ビス〔4-(3-アミノフェノキシ)フェニル〕エーテル、1,4-ビス(4-アミノフェニル)ベンゼン、1,3-ビス(4-アミノフェニル)ベンゼン、9,10-ビス(4-アミノフェニル)アントラセン、2,2-ビス(4-アミノフェニル)プロパン、2,2-ビス(4-アミノフェニル)ヘキサフルオロプロパン、2,2-ビス〔4-(4-アミノフェノキシ)フェニル)プロパン、2,2-ビス〔4-(4-アミノフェノキシ)フェニル)ヘキサフルオロプロパン、1,4-ビス(3-アミノプロピルジメチルシリル)ベンゼン、等を挙げることができる。 Examples of the diamine containing an R 1 group in the formula (1) include diaminodiphenyl sulfone (eg, 4,4′-diaminodiphenyl sulfone, 3,3′-diaminodiphenyl sulfone), p-phenylenediamine, m-phenylenediamine, 4'-diaminodiphenyl sulfide, 3,4'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl sulfide, 4,4'-diaminobiphenyl, 3,4'-diaminobiphenyl, 3,3'-diaminobiphenyl, 4 4,4'-Diaminobenzophenone, 3,4'-diaminobenzophenone, 3,3'-diaminobenzophenone, 4,4'-diaminodiphenylmethane, 3,4'-diaminodiphenylmethane, 3,3'-diaminodiphenylmethane, 1,4 -Bis (4-aminophenoxy) benzene, 1,3-bis ( 4-Aminophenoxy) benzene, 1,3-bis (3-aminophenoxy) benzene, bis [4- (4-aminophenoxy) phenyl] sulfone, 4,4-bis (4-aminophenoxy) biphenyl, 4,4 -Bis (3-aminophenoxy) biphenyl, bis [4- (4-aminophenoxy) phenyl] ether, bis [4- (3-aminophenoxy) phenyl] ether, 1,4-bis (4-aminophenyl) benzene 1,3-bis (4-aminophenyl) benzene, 9,10-bis (4-aminophenyl) anthracene, 2,2-bis (4-aminophenyl) propane, 2,2-bis (4-aminophenyl) ) Hexafluoropropane, 2,2-bis [4- (4-aminophenoxy) phenyl) propane, 2,2-bis [4- (4-amino) Phenoxy) phenyl) hexafluoropropane, 1,4-bis (3-aminopropyl dimethylsilyl) benzene, and the like.
 式(1)で表される構造を有するポリイミド前駆体を形成するために用いるジアミンは、ジアミノジフェニルスルホン(例えば、4,4’-ジアミノジフェニルスルホン及び/又は3,3’-ジアミノジフェニルスルホン)を含むことが好ましい。 A diamine used to form a polyimide precursor having a structure represented by the formula (1) is diaminodiphenyl sulfone (eg, 4,4′-diaminodiphenyl sulfone and / or 3,3′-diaminodiphenyl sulfone) It is preferable to include.
 全ジアミン中のジアミノジフェニルスルホンの含有量は、50モル%以上が好ましく、70モル%以上がより好ましく、90モル%以上が更に好ましく、95モル%以上であってよい。ジアミノジフェニルスルホンの量が多いほど、硬化物(例えばポリイミドフィルム)の黄色度(YI)、ガラス転移温度Tg、厚み方向レタデーションRthの観点で好ましい。ジアミノジフェニルスルホンとしては、4,4’-ジアミノジフェニルスルホンが、黄色度(YI)が低い観点から特に好ましい。 The content of diaminodiphenyl sulfone in all diamines is preferably 50 mol% or more, more preferably 70 mol% or more, still more preferably 90 mol% or more, and may be 95 mol% or more. The larger the amount of diaminodiphenyl sulfone, the more preferable in view of the yellowness (YI) of the cured product (for example, polyimide film), the glass transition temperature Tg, and the retardation Rth in the thickness direction. As the diaminodiphenyl sulfone, 4,4'-diaminodiphenyl sulfone is particularly preferable from the viewpoint of low yellowness (YI).
 好ましい態様において、ジアミノジフェニルスルホンと共重合する相手のジアミンとしては、硬化物(例えばポリイミドフィルム)の耐熱性、及び黄色度(YI)の観点から、好ましくはジアミドビフェニル類、より好ましくはジアミノビス(トリフルオロメチル)ビフェニル(TFMB)を含む。全ジアミン中のジアミノビス(トリフルオロメチル)ビフェニル(TFMB)の含有量は、硬化物(例えばポリイミドフィルム)の黄色度(YI)の観点から、好ましくは20モル%以上、より好ましくは30モル%以上であり、ジアミンがジアミノジフェニルスルホン等の他の有利な成分を含有できるようにする観点から、好ましくは80モル%以下、より好ましくは70モル%以下である。 In a preferred embodiment, the diamine to be copolymerized with diaminodiphenyl sulfone is preferably diamidobiphenyls, more preferably diaminobis (triol) from the viewpoint of heat resistance of the cured product (eg polyimide film) and yellowness (YI). Fluoromethyl) biphenyl (TFMB) is included. The content of diaminobis (trifluoromethyl) biphenyl (TFMB) in all diamines is preferably 20 mol% or more, more preferably 30 mol% or more from the viewpoint of the degree of yellowness (YI) of the cured product (for example, polyimide film) From the viewpoint of enabling the diamine to contain other advantageous components such as diaminodiphenyl sulfone, it is preferably at most 80 mol%, more preferably at most 70 mol%.
 好ましい態様において、ジアミンは、ケイ素含有ジアミンを含む。より好ましい態様において、ジアミンは、前述の式(3)で表される構造を含むケイ素含有ジアミンを含む。ケイ素含有ジアミンとしては、例えば、下記式(3a):
Figure JPOXMLDOC01-appb-C000014
{式中、R5は二価の炭化水素基を示し、それぞれ同一でも異なっていてもよく、複数のR3及びR4の各々は、式(3)で定義したのと同様であり、そしてlは1~200の整数を表す。}で表されるジアミノ(ポリ)シロキサンを好適に用いることができる。
In a preferred embodiment, the diamine comprises a silicon containing diamine. In a more preferred embodiment, the diamine comprises a silicon-containing diamine comprising a structure represented by Formula (3) above. As the silicon-containing diamine, for example, the following formula (3a):
Figure JPOXMLDOC01-appb-C000014
{Wherein R 5 represents a divalent hydrocarbon group, which may be the same or different, and each of a plurality of R 3 and R 4 is the same as defined in the formula (3), and l represents an integer of 1 to 200. The diamino (poly) siloxane represented by} can be used suitably.
 上記一般式(3a)中のR5の好ましい構造としては、メチレン基、エチレン基、プロピレン基、ブチレン基、フェニレン基等が挙げられる。また、式(3a)中のR3及びR4の好ましい構造としては、メチル基、エチル基、プロピル基、ブチル基、フェニル基等が挙げられる。 The preferred structure of R 5 in the general formula (3a), a methylene group, an ethylene group, a propylene group, a butylene group, a phenylene group, and the like. Moreover, as a preferable structure of R < 3 > and R < 4 > in Formula (3a), a methyl group, an ethyl group, a propyl group, a butyl group, a phenyl group etc. are mentioned.
 上記式(3a)で表される化合物の、数平均分子量は、得られる硬化物(例えばポリイミドフィルム)と支持体との間に発生する残留応力の低減の観点から、好ましくは500以上、より好ましくは1,000以上、更に好ましくは2,000以上であり、得られる硬化物(例えばポリイミドフィルム)の透明性(特に低HAZE)の観点から、好ましくは12,000以下、より好ましくは10,000以下、更に好ましくは8,000以下である。 The number average molecular weight of the compound represented by the above formula (3a) is preferably 500 or more, more preferably from the viewpoint of reduction of residual stress generated between a cured product (for example, a polyimide film) to be obtained and a support. Is preferably 1,000 or more, more preferably 2,000 or more, and preferably 12,000 or less, more preferably 10,000, from the viewpoint of the transparency (particularly low haze) of the resulting cured product (eg, polyimide film). The following is more preferably 8,000 or less.
 上記式(3a)で表される化合物としては、具体的には、両末端アミン変性メチルフェニルシリコーンオイル(信越化学社製:X22-1660B-3(数平均分子量4400)、X22-9409(数平均分子量1300))、両末端アミノ変性ジメチルシリコーン(信越化学社製:X22-161A(数平均分子量1600)、X22-161B(数平均分子量3000)、KF8012(数平均分子量4400)、東レダウコーニング製:BY16-835U(数平均分子量900)チッソ社製:サイラプレーンFM3311(数平均分子量1000))等が挙がられる。これらの中で、両末端アミン変性メチルフェニルシリコーンオイルが、耐薬品性向上、Tgの向上の観点から好ましい。 Specific examples of the compound represented by the above formula (3a) include both terminal amine-modified methylphenylsilicone oil (manufactured by Shin-Etsu Chemical Co., Ltd .: X22-1660B-3 (number average molecular weight 4400), X22-9409 (number average) Molecular weight 1300)) Both terminal amino modified dimethyl silicone (Shin-Etsu Chemical Co., Ltd .: X22-161A (number average molecular weight 1600), X22-161B (number average molecular weight 3000), KF 8012 (number average molecular weight 4400), Toray Dow Corning: BY16-835U (number average molecular weight 900) manufactured by Chisso Corporation: Silaprene FM 3311 (number average molecular weight 1000) and the like. Among these, a both-end amine modified methylphenyl silicone oil is preferable from the viewpoint of chemical resistance improvement and Tg improvement.
 ケイ素含有ジアミンの共重合割合は、全ポリイミド前駆体の質量に対して、0.5~30質量%の範囲が好ましく、より好ましくは1.0質量%~25質量%、更に好ましくは1.5質量%~20質量%である。0.5質量%以上である場合、支持体との間に発生する応力の低下効果が良好である。また30質量%以下である場合、得られる硬化物(例えばポリイミドフィルム)の透明性(特に低HAZE)が良好であり、高い全光線透過率の実現及びTgの低下防止の点で好ましい。 The copolymerization ratio of the silicon-containing diamine is preferably in the range of 0.5 to 30% by mass, more preferably 1.0% to 25% by mass, still more preferably 1.5% by mass with respect to the mass of all the polyimide precursors. It is mass% to 20 mass%. When the content is 0.5% by mass or more, the effect of reducing the stress generated with the support is good. When the content is 30% by mass or less, the transparency (particularly low haze) of the cured product (for example, a polyimide film) obtained is good, which is preferable in terms of realization of high total light transmittance and prevention of lowering of Tg.
 本実施の態様におけるポリイミド前駆体を形成するための酸成分としては、その性能を損なわない範囲で、酸二無水物(例えば上記で例示したテトラカルボン酸二無水物)に加えて、ジカルボン酸を使用してもよい。すなわち、本開示のポリイミド前駆体はポリアミドイミド前駆体であってもよい。このようなポリイミド前駆体から得られるフィルムは、機械伸度、ガラス転移温度Tg、黄色度(YI)等の諸性能が良好であることができる。用いるジカルボン酸としては、芳香環を有するジカルボン酸及び脂環式ジカルボン酸が挙げられる。特に炭素数が8~36の芳香族ジカルボン酸、及び炭素数が6~34の脂環式ジカルボン酸からなる群から選択される少なくとも1つの化合物であることが好ましい。ここでいう炭素数には、カルボキシル基に含まれる炭素の数も含む。これらのうち、芳香環を有するジカルボン酸が好ましい。 As an acid component for forming a polyimide precursor in this embodiment, in addition to an acid dianhydride (for example, the tetracarboxylic acid dianhydride exemplified above), a dicarboxylic acid can be added within a range that does not impair its performance. You may use it. That is, the polyimide precursor of the present disclosure may be a polyamideimide precursor. A film obtained from such a polyimide precursor can have good properties such as mechanical elongation, glass transition temperature Tg, yellowness (YI) and the like. Examples of the dicarboxylic acid to be used include dicarboxylic acids having an aromatic ring and alicyclic dicarboxylic acids. Particularly preferred is at least one compound selected from the group consisting of aromatic dicarboxylic acids having 8 to 36 carbon atoms and alicyclic dicarboxylic acids having 6 to 34 carbon atoms. The number of carbons referred to herein includes the number of carbons contained in the carboxyl group. Among these, dicarboxylic acids having an aromatic ring are preferred.
 具体的には、例えばイソフタル酸、テレフタル酸、4,4’-ビフェニルジカルボン酸、3,4’-ビフェニルジカルボン酸、3,3’-ビフェニルジカルボン酸、1,4-ナフタレンジカルボン酸、2,3-ナフタレンジカルボン酸、1,5-ナフタレンジカルボン酸、2,6-ナフタレンジカルボン酸、4,4’-スルホニルビス安息香酸、3,4’-スルホニルビス安息香酸、3,3’-スルホニルビス安息香酸、4,4’-オキシビス安息香酸、3,4’-オキシビス安息香酸、3,3’-オキシビス安息香酸、2,2-ビス(4-カルボキシフェニル)プロパン、2,2-ビス(3-カルボキシフェニル)プロパン、2,2’-ジメチル-4,4’-ビフェニルジカルボン酸、3,3’-ジメチル-4,4’-ビフェニルジカルボン酸、2,2’-ジメチル-3,3’-ビフェニルジカルボン酸、9,9-ビス(4-(4-カルボキシフェノキシ)フェニル)フルオレン、9,9-ビス(4-(3-カルボキシフェノキシ)フェニル)フルオレン、4,4’-ビス(4-カルボキシフェノキシ)ビフェニル、4,4’-ビス(3-カルボキシフェノキシ)ビフェニル、3,4’-ビス(4-カルボキシフェノキシ)ビフェニル、3,4’-ビス(3-カルボキシフェノキシ)ビフェニル、3,3’-ビス(4-カルボキシフェノキシ)ビフェニル、3,3’-ビス(3―カルボキシフェノキシ)ビフェニル、4,4’-ビス(4-カルボキシフェノキシ)-p-ターフェニル、4,4’-ビス(4-カルボキシフェノキシ)-m-ターフェニル、3,4’-ビス(4-カルボキシフェノキシ)-p-ターフェニル、3,3’-ビス(4-カルボキシフェノキシ)-p-ターフェニル、3,4’-ビス(4-カルボキシフェノキシ)-m-ターフェニル、3,3’-ビス(4-カルボキシフェノキシ)-m-ターフェニル、4,4’-ビス(3-カルボキシフェノキシ)-p-ターフェニル、4,4’-ビス(3-カルボキシフェノキシ)-m-ターフェニル、3,4’-ビス(3-カルボキシフェノキシ)-p-ターフェニル、3,3’-ビス(3-カルボキシフェノキシ)-p-ターフェニル、3,4’-ビス(3-カルボキシフェノキシ)-m-ターフェニル、3,3’-ビス(3-カルボキシフェノキシ)-m-ターフェニル、1,1-シクロブタンジカルボン酸、1,4-シクロヘキサンジカルボン酸、1,2-シクロヘキサンジカルボン酸、4,4’-ベンゾフェノンジカルボン酸、1,3-フェニレン二酢酸、1,4-フェニレン二酢酸等;及び国際公開第2005/068535号パンフレットに記載の5-アミノイソフタル酸誘導体等が挙げられる。これらジカルボン酸をポリマーに実際に共重合させる場合には、塩化チオニル等から誘導される酸クロリド体、活性エステル体等の形で使用してもよい。 Specifically, for example, isophthalic acid, terephthalic acid, 4,4'-biphenyldicarboxylic acid, 3,4'-biphenyldicarboxylic acid, 3,3'-biphenyldicarboxylic acid, 1,4-naphthalenedicarboxylic acid, 2,3 -Naphthalenedicarboxylic acid, 1,5-naphthalenedicarboxylic acid, 2,6-naphthalenedicarboxylic acid, 4,4'-sulfonylbisbenzoic acid, 3,4'-sulfonylbisbenzoic acid, 3,3'-sulfonylbisbenzoic acid 4,4'-oxybisbenzoic acid, 3,4'-oxybisbenzoic acid, 3,3'-oxybisbenzoic acid, 2,2-bis (4-carboxyphenyl) propane, 2,2-bis (3-carboxy) Phenyl) propane, 2,2'-dimethyl-4,4'-biphenyldicarboxylic acid, 3,3'-dimethyl-4,4'-biphenyl dical Acid, 2,2'-dimethyl-3,3'-biphenyldicarboxylic acid, 9,9-bis (4- (4-carboxyphenoxy) phenyl) fluorene, 9,9-bis (4- (3-carboxyphenoxy) ) Phenyl) fluorene, 4,4'-bis (4-carboxyphenoxy) biphenyl, 4,4'-bis (3-carboxyphenoxy) biphenyl, 3,4'-bis (4-carboxyphenoxy) biphenyl, 3,4 '-Bis (3-carboxyphenoxy) biphenyl, 3,3'-bis (4-carboxyphenoxy) biphenyl, 3,3'-bis (3-carboxyphenoxy) biphenyl, 4,4'-bis (4-carboxyphenoxy) ) -P-terphenyl, 4,4'-bis (4-carboxyphenoxy) -m-terphenyl, 3,4'-bis (4-) Ruboxyphenoxy) -p-terphenyl, 3,3'-bis (4-carboxyphenoxy) -p-terphenyl, 3,4'-bis (4-carboxyphenoxy) -m-terphenyl, 3,3 ' -Bis (4-carboxyphenoxy) -m-terphenyl, 4,4'-bis (3-carboxyphenoxy) -p-terphenyl, 4,4'-bis (3-carboxyphenoxy) -m-terphenyl, 3,4'-bis (3-carboxyphenoxy) -p-terphenyl, 3,3'-bis (3-carboxyphenoxy) -p-terphenyl, 3,4'-bis (3-carboxyphenoxy) -m -Terphenyl, 3,3'-bis (3-carboxyphenoxy) -m-terphenyl, 1,1-cyclobutanedicarboxylic acid, 1,4-cyclohexanedicarboxylic acid 1,2-cyclohexanedicarboxylic acid, 4,4'-benzophenonedicarboxylic acid, 1,3-phenylenediacetic acid, 1,4-phenylenediacetic acid, etc .; and 5-amino described in WO 2005/068535. Isophthalic acid derivatives and the like can be mentioned. When these dicarboxylic acids are actually copolymerized into a polymer, they may be used in the form of acid chlorides derived from thionyl chloride and the like, active esters and the like.
 好ましい態様においては、ポリイミド前駆体が、テトラカルボン酸二無水物と、4,4’-ジアミノジフェニルスルホン、3,3’-ジアミノジフェニルスルホン、2,2’-ビス(トリフルオロメチル)ベンジジン及び9,9-ビス(4-アミノフェニル)フルオレンからなる群から選択される1つ以上のジアミンとの共重合体である。 In a preferred embodiment, the polyimide precursor comprises tetracarboxylic acid dianhydride, 4,4'-diaminodiphenyl sulfone, 3,3'-diaminodiphenyl sulfone, 2,2'-bis (trifluoromethyl) benzidine and 9 , 9-bis (4-aminophenyl) fluorene and copolymers with one or more diamines selected from the group consisting of
 特に好ましいポリイミド前駆体としては下記が挙げられる。
(1)酸二無水物成分がピロメリット酸二無水物(PMDA)及びビフェニルテトラカルボン酸二無水物(BPDA)、ジアミン成分がジアミノジフェニルスルホン(DAS)である材料成分の重縮合物(より好ましくは、重量平均分子量110,000~130,000、固形分含有量12~25質量%)
(2)酸二無水物成分がピロメリット酸二無水物(PMDA)及びビフェニルテトラカルボン酸二無水物(BPDA)、ジアミン成分がジアミノジフェニルスルホン(DAS)及びケイ素含有ジアミンである材料成分の重縮合物(より好ましくは、重量平均分子量110,000~210,000、固形分含有量10~25質量%)
(3)酸二無水物成分がピロメリット酸二無水物(PMDA)及びビフェニルテトラカルボン酸二無水物(BPDA)、ジアミン成分がジアミノジフェニルスルホン(DAS)、ジアミノビス(トリフルオロメチル)ビフェニル(TFMB)及びケイ素含有ジアミンである材料成分の重縮合物(より好ましくは、重量平均分子量110,000~250,000、固形分含有量10~25質量%)
As a particularly preferred polyimide precursor, the following may be mentioned.
(1) Polycondensate of material components in which the acid dianhydride component is pyromellitic dianhydride (PMDA) and biphenyltetracarboxylic acid dianhydride (BPDA), and the diamine component is diaminodiphenyl sulfone (DAS) (more preferable Is a weight average molecular weight of 110,000 to 130,000, solid content 12 to 25 mass%)
(2) Polycondensation of material components in which the acid dianhydride component is pyromellitic dianhydride (PMDA) and biphenyltetracarboxylic dianhydride (BPDA), and the diamine component is diaminodiphenyl sulfone (DAS) and a silicon-containing diamine (More preferably, weight average molecular weight 110,000 to 210,000, solid content 10 to 25 mass%)
(3) The acid dianhydride component is pyromellitic dianhydride (PMDA) and biphenyltetracarboxylic acid dianhydride (BPDA), and the diamine component is diaminodiphenylsulfone (DAS), diaminobis (trifluoromethyl) biphenyl (TFMB) And polycondensates of material components that are silicon-containing diamines (more preferably, weight average molecular weight 110,000 to 250,000, solid content 10 to 25 mass%)
(4)酸二無水物成分がピロメリット酸二無水物(PMDA)、ジアミン成分がジアミノジフェニルスルホン(DAS)である材料成分の重縮合物(より好ましくは、重量平均分子量110,000~140,000、固形分含有量10~25質量%)
(5)酸二無水物成分がピロメリット酸二無水物(PMDA)、ジアミン成分がジアミノジフェニルスルホン(DAS)及びケイ素含有ジアミンである材料成分の重縮合物(より好ましくは、重量平均分子量110,000~230,000、固形分含有量10~25質量%)
(6)酸二無水物成分がピロメリット酸二無水物(PMDA)、ジアミン成分がジアミノジフェニルスルホン(DAS)、ジアミノビス(トリフルオロメチル)ビフェニル(TFMB)及びケイ素含有ジアミンである材料成分の重縮合物(より好ましくは、重量平均分子量110,000~250,000、固形分含有量10~25質量%)
(4) Polycondensate of material components wherein the acid dianhydride component is pyromellitic dianhydride (PMDA) and the diamine component is diaminodiphenyl sulfone (DAS) (more preferably, weight average molecular weight 110,000 to 140, 000, solid content 10 to 25 mass%)
(5) Polycondensate of material components wherein the acid dianhydride component is pyromellitic dianhydride (PMDA), the diamine component is diaminodiphenyl sulfone (DAS) and a silicon-containing diamine (more preferably, weight average molecular weight 110, 000 to 230,000, solid content 10 to 25% by mass)
(6) Polycondensation of material components in which the acid dianhydride component is pyromellitic dianhydride (PMDA) and the diamine component is diaminodiphenyl sulfone (DAS), diaminobis (trifluoromethyl) biphenyl (TFMB) and silicon-containing diamine (More preferably, weight average molecular weight 110,000 to 250,000, solid content 10 to 25 mass%)
(7)酸二無水物成分がビフェニルテトラカルボン酸二無水物(BPDA)、ジアミン成分がジアミノジフェニルスルホン(DAS)である材料成分の重縮合物(より好ましくは、重量平均分子量110,000~120,000、固形分含有量20~25質量%)
(8)酸二無水物成分がビフェニルテトラカルボン酸二無水物(BPDA)、ジアミン成分がジアミノジフェニルスルホン(DAS)及びケイ素含有ジアミンである材料成分の重縮合物(より好ましくは、重量平均分子量110,000~160,000、固形分含有量10~25質量%)
(9)酸二無水物成分がビフェニルテトラカルボン酸二無水物(BPDA)、ジアミン成分がジアミノジフェニルスルホン(DAS)、ジアミノビス(トリフルオロメチル)ビフェニル(TFMB)及びケイ素含有ジアミンである材料成分の重縮合物(より好ましくは、重量平均分子量110,000~240,000、固形分含有量10~25質量%)
(7) Polycondensate of material components wherein the acid dianhydride component is biphenyltetracarboxylic acid dianhydride (BPDA) and the diamine component is diaminodiphenyl sulfone (DAS) (more preferably, weight average molecular weight 110,000 to 120) , Solid content 20 to 25 mass%)
(8) A polycondensate of material components in which the acid dianhydride component is biphenyltetracarboxylic acid dianhydride (BPDA) and the diamine component is diaminodiphenylsulfone (DAS) and a silicon-containing diamine (more preferably, weight average molecular weight 110) 1,000 to 160,000, solid content 10 to 25% by mass)
(9) The weight of the material component in which the acid dianhydride component is biphenyltetracarboxylic acid dianhydride (BPDA), and the diamine component is diaminodiphenylsulfone (DAS), diaminobis (trifluoromethyl) biphenyl (TFMB) and a silicon-containing diamine Condensate (more preferably, weight average molecular weight 110,000 to 240,000, solid content 10 to 25% by mass)
 上記(1)~(9)の重縮合物の材料成分において、ケイ素含有ジアミンは、好ましくは前述の式(3a)で表されるジアミノ(ポリ)シロキサン(好ましくは数平均分子量500~12,000のもの)であり、より好ましくは両末端アミン変性メチルフェニルシリコーンオイルである。 In the material component of the polycondensate of the above (1) to (9), the silicon-containing diamine is preferably a diamino (poly) siloxane represented by the above-mentioned formula (3a) (preferably a number average molecular weight of 500 to 12,000). And, more preferably, both terminal amine-modified methylphenylsilicone oils.
[ポリイミド前駆体の製造]
 本実施の形態のポリイミド前駆体は、酸二無水物成分とジアミン成分とを含む重縮合成分を重縮合反応させることにより、合成することができる。好ましい態様において、重縮合成分は、酸二無水物成分とジアミン成分とからなる。重縮合反応は、適当な溶媒中で行うことが好ましい。具体的には、例えば、溶媒に所定量のジアミン成分を溶解させた後、得られたジアミン溶液に、酸二無水物を所定量添加し、撹拌する方法が挙げられる。
[Production of Polyimide Precursor]
The polyimide precursor of the present embodiment can be synthesized by subjecting a polycondensation component including an acid dianhydride component and a diamine component to a polycondensation reaction. In a preferred embodiment, the polycondensation component comprises an acid dianhydride component and a diamine component. The polycondensation reaction is preferably carried out in a suitable solvent. Specifically, for example, there is a method of dissolving a predetermined amount of diamine component in a solvent, adding a predetermined amount of acid dianhydride to the obtained diamine solution, and stirring.
 ポリイミド前駆体を合成する際の酸二無水物成分とジアミン成分とのモル比は、ポリイミド前駆体樹脂の高分子量化、樹脂組成物のスリットコーティング特性の観点から、酸二無水物:ジアミン=100:90~100:110(酸二無水物1モル部に対してジアミン0.90~1.10モル部)の範囲とすることが好ましく、100:95~100:105(酸二無水物1モル部に対してジアミン0.95~1.05モル部)の範囲とすることが更に好ましい。 The molar ratio between the acid dianhydride component and the diamine component when synthesizing the polyimide precursor is from the viewpoint of the polymerization of the polyimide precursor resin and the slit coating characteristics of the resin composition, acid dianhydride: diamine = 100 It is preferable to make the range of 90: 100: 110 (the diamine 0.90 to 1.10 mole parts with respect to 1 mole part of the acid dianhydride), and 100: 95 to 100: 105 (one mole of the acid dianhydride) It is further preferable to set the range of 0.95 to 1.05 mole parts of diamine) with respect to part.
 ポリイミド前駆体の分子量は、酸二無水物成分とジアミン成分の種類、酸二無水物成分とジアミン成分との比の調整、末端封止剤の添加、反応条件の調整等によってコントロールすることが可能である。酸二無水物成分とジアミン成分との比が1:1に近いほど、及び末端封止剤の使用量が少ないほど、ポリイミド前駆体を高分子量化することができる。 酸二無水物成分及びジアミン成分として、高純度品を使用することが推奨される。その純度としては、それぞれ、98質量%以上とすることが好ましく、99質量%以上とすることがより好ましく、99.5質量%以上とすることが更に好ましい。また、酸二無水物成分及びジアミン成分における水分含量を低減することによって、高純度化することもできる。複数種類の酸二無水物成分又はジアミン成分を併用する場合には、酸二無水物成分又はジアミン成分の全体として上記の純度を有していれば足りるが、使用する全種類の酸二無水物成分及びジアミン成分が、それぞれ上記の純度を有していることが好ましい。 The molecular weight of the polyimide precursor can be controlled by adjusting the type of acid dianhydride component and diamine component, adjusting the ratio of acid dianhydride component and diamine component, adding an end capping agent, adjusting the reaction conditions, etc. It is. The polyimide precursor can be made higher in molecular weight as the ratio of the acid dianhydride component to the diamine component is closer to 1: 1 and as the amount of the end capping agent used is smaller. It is recommended to use high purity products as the acid dianhydride component and the diamine component. The purity thereof is preferably 98% by mass or more, more preferably 99% by mass or more, and still more preferably 99.5% by mass or more. Moreover, it can also be highly purified by reducing the water content in an acid dianhydride component and a diamine component. When a plurality of acid dianhydride components or diamine components are used in combination, it is sufficient if the acid dianhydride component or diamine component as a whole has the above purity, but all types of acid dianhydrides used It is preferable that the component and the diamine component each have the above-mentioned purity.
 反応の溶媒としては、酸二無水物成分及びジアミン成分、並びに生じたポリイミド前駆体を溶解することができ、高分子量の重合体が得られる溶媒であれば特に制限はされない。このような溶媒の具体例としては、例えば、非プロトン性溶媒、フェノール系溶媒、エーテル及びグリコール系溶媒等が挙げられる。これらの具体例としては、前記非プロトン性溶媒として、例えば、N,N-ジメチルホルムアミド(DMF)、N,N-ジメチルアセトアミド(DMAc)、N-メチル-2-ピロリドン(NMP)、N-メチルカプロラクタム、1,3-ジメチルイミダゾリジノン、テトラメチル尿素、下記一般式(4):
Figure JPOXMLDOC01-appb-C000015
式中、R12=メチル基で表されるエクアミドM100(商品名:出光興産社製)、及び、R12=n-ブチル基で表されるエクアミドB100(商品名:出光興産社製)等のアミド系溶媒;γ-ブチロラクトン、γ-バレロラクトン等のラクトン系溶媒;ヘキサメチルホスホリックアミド、ヘキサメチルホスフィントリアミド等の含りん系アミド系溶媒;ジメチルスルホン、ジメチルスルホキシド、スルホラン等の含硫黄系溶媒;シクロヘキサノン、メチルシクロヘキサノン等のケトン系溶媒;ピコリン、ピリジン等の3級アミン系溶媒;酢酸(2-メトキシ-1-メチルエチル)等のエステル系溶媒等が:前記フェノ-ル系溶媒として、例えば、フェノール、o-クレゾール、m-クレゾール、p-クレゾール、2,3-キシレノール、2,4-キシレノール、2,5-キシレノール、2,6-キシレノール、3,4-キシレノール、3,5-キシレノール等が:前記エーテル及びグリコール系溶媒として、例えば、1,2-ジメトキシエタン、ビス(2-メトキシエチル)エーテル、1,2-ビス(2-メトキシエトキシ)エタン、ビス[2-(2-メトキシエトキシ)エチル]エーテル、テトラヒドロフラン、1,4-ジオキサン等が、それぞれ挙げられる。これらの溶媒は、単独で又は2種類以上混合して用いてもよい。
The solvent for the reaction is not particularly limited as long as it can dissolve the acid dianhydride component and the diamine component, and the resulting polyimide precursor, and a polymer of high molecular weight can be obtained. Examples of such solvents include, for example, aprotic solvents, phenolic solvents, ethers and glycol solvents. Specific examples thereof include, as the aprotic solvent, for example, N, N-dimethylformamide (DMF), N, N-dimethylacetamide (DMAc), N-methyl-2-pyrrolidone (NMP), N-methyl Caprolactam, 1,3-dimethylimidazolidinone, tetramethyl urea, the following general formula (4):
Figure JPOXMLDOC01-appb-C000015
In the formula, Equamide M100 represented by R 12 = methyl group (trade name: manufactured by Idemitsu Kosan Co., Ltd.), and Equamide B 100 represented by R 12 = n-butyl group (trade name: manufactured by Idemitsu Kosan Co., Ltd.) Amide solvents; Lactone solvents such as γ-butyrolactone and γ-valerolactone; Phosphorus containing amide solvents such as hexamethylphosphoric amide and hexamethylphosphine triamide; Sulfur containing solvents such as dimethylsulfone, dimethylsulfoxide and sulfolane Solvents: Ketone solvents such as cyclohexanone and methylcyclohexanone; Tertiary amine solvents such as picoline and pyridine; Ester solvents such as acetic acid (2-methoxy-1-methylethyl) and the like: As the phenol solvents, For example, phenol, o-cresol, m-cresol, p-cresol, 2,3-xylenol, 2, —Xylenol, 2,5-xylenol, 2,6-xylenol, 3,4-xylenol, 3,5-xylenol etc. as said ether and glycol solvents, for example, 1,2-dimethoxyethane, bis (2- Examples thereof include methoxyethyl) ether, 1,2-bis (2-methoxyethoxy) ethane, bis [2- (2-methoxyethoxy) ethyl] ether, tetrahydrofuran, 1,4-dioxane and the like. These solvents may be used alone or in combination of two or more.
 ポリイミド前駆体の合成に用いられる溶媒の常圧における沸点は、60~300℃が好ましく、140~280℃がより好ましく、170~270℃が特に好ましい。溶媒の沸点が300℃より高いと、乾燥工程が長時間必要となる。一方で溶媒の沸点が60℃より低いと、乾燥工程中に、樹脂膜の表面における荒れの発生、樹脂膜中への気泡の混入等が起こり、均一なフィルムが得られない場合がある。特に、沸点が170~270℃であり、及び/又は20℃における蒸気圧が250Pa以下である溶媒を使用することが、溶解性及び塗工時エッジはじきの観点から好ましい。より具体的には、N-メチル-2-ピロリドン(NMP)、γ-ブチロラクトン(GBL)、及び前記一般式(4)で表される化合物から成る群より選択される1種以上が好ましい。 The boiling point at normal pressure of the solvent used for the synthesis of the polyimide precursor is preferably 60 to 300 ° C., more preferably 140 to 280 ° C., and particularly preferably 170 to 270 ° C. When the boiling point of the solvent is higher than 300 ° C., a drying step is required for a long time. On the other hand, if the boiling point of the solvent is lower than 60 ° C., the surface of the resin film may be roughened, air bubbles may be mixed into the resin film, and the like during the drying process, and a uniform film may not be obtained. In particular, it is preferable to use a solvent having a boiling point of 170 to 270 ° C. and / or a vapor pressure of 250 Pa or less at 20 ° C. in view of solubility and edge repelling during coating. More specifically, one or more selected from the group consisting of N-methyl-2-pyrrolidone (NMP), γ-butyrolactone (GBL), and a compound represented by the above general formula (4) is preferable.
 溶媒中の水分含量は、良好な重縮合反応の進行の観点から、例えば3,000質量ppm以下であることが好ましい。また、本実施の態様における樹脂組成物中、分子量1,000未満の分子の含有量は、5質量%未満であることが好ましい。樹脂組成物中に分子量1,000未満の分子が存在するのは、合成時に使用する溶媒や原料(酸二無水物、ジアミン)の水分量が関与しているためと考えられる。すなわち、一部の酸二無水物モノマーの酸無水物基が水分によって加水分解してカルボキシル基になり、高分子量化することなく低分子の状態で残存することによると考えられる。従って、上記の重縮合反応に使用する溶媒の水分量は少ないほど好ましい。溶媒の水分量は、3,000質量ppm以下とすることが好ましく、1,000質量ppm以下とすることがより好ましい。同様に、原料に含まれる水分量についても、3,000質量ppm以下とすることが好ましく、1,000質量ppm以下とすることがより好ましい。 The water content in the solvent is preferably, for example, 3,000 ppm by mass or less from the viewpoint of the progress of a good polycondensation reaction. Moreover, in the resin composition in the present embodiment, the content of molecules having a molecular weight of less than 1,000 is preferably less than 5% by mass. The presence of molecules having a molecular weight of less than 1,000 in the resin composition is considered to be due to the water content of the solvent used during synthesis and the raw materials (acid dianhydride, diamine). That is, it is considered that the acid anhydride group of some of the acid dianhydride monomers is hydrolyzed by water to be a carboxyl group, and remains in a low molecular state without high molecular weight formation. Therefore, the smaller the water content of the solvent used for the polycondensation reaction, the better. The water content of the solvent is preferably 3,000 ppm by mass or less, and more preferably 1,000 ppm by mass or less. Similarly, the amount of water contained in the raw material is also preferably 3,000 ppm by mass or less, and more preferably 1,000 ppm by mass or less.
 溶媒の水分量は、使用する溶媒のグレード(脱水グレード、汎用グレード等)、溶媒容器(ビン、18L缶、キャニスター缶等)、溶媒の保管状態(希ガス封入の有無等)、開封から使用までの時間(開封後すぐ使用するか、開封後経時した後に使用するか等)等が関与すると考えられる。また、合成前の反応器の希ガス置換、合成中の希ガス流通の有無等も関与すると考えられる。従って、ポリイミド前駆体の合成時には、原料として高純度品を用い、水分量の少ない溶媒を用いるとともに、反応前および反応中に系内に環境からの水分が混入しないような措置を講ずることが推奨される。 The water content of the solvent is the grade of solvent used (dehydration grade, general purpose grade, etc.), solvent container (bottle, 18 L can, canister can etc.), storage condition of solvent (presence or absence of rare gas inclusion etc.), from opening to use It may be considered that the time period of use (whether used immediately after opening or used after aging after opening etc.) is involved. In addition, it is considered that the noble gas substitution of the reactor before synthesis, the presence or absence of the rare gas circulation during synthesis, and the like are also involved. Therefore, when synthesizing the polyimide precursor, it is recommended to use a high purity product as a raw material and use a solvent with a small amount of water, and to take measures so that water from the environment does not enter the system before and during the reaction. Be done.
 溶媒中に各重縮合成分を溶解させるときには、必要に応じて加熱してもよい。重合度の高いポリイミド前駆体が得られるという観点から、ポリイミド前駆体合成時の好ましい反応温度としては、0℃~120℃、又は40℃~100℃、又は60~100℃を例示でき、好ましい重合時間としては、1~100時間、又は2~10時間を例示できる。重合時間を1時間以上とすることによって均一な重合度のポリイミド前駆体となり、100時間以下とすることによって重合度の高いポリイミド前駆体を得ることができる。 When dissolving each polycondensation component in a solvent, it may be heated if necessary. From the viewpoint of obtaining a polyimide precursor having a high degree of polymerization, preferred reaction temperatures at the time of polyimide precursor synthesis include 0 ° C. to 120 ° C., 40 ° C. to 100 ° C., or 60 to 100 ° C. The time may be, for example, 1 to 100 hours, or 2 to 10 hours. By setting the polymerization time to 1 hour or more, a polyimide precursor having a uniform polymerization degree can be obtained, and by setting the polymerization time to 100 hours or less, a polyimide precursor having a high polymerization degree can be obtained.
 本実施の形態の樹脂組成物は、式(1)で表される構造を有するポリイミド前駆体と、他の追加のポリイミド前駆体との組合せであってよいが、追加のポリイミド前駆体の質量割合は、硬化物(例えばポリイミドフィルム)の黄色度(YI)及び全光線透過率の酸素依存性の低減の観点から、樹脂組成物中のポリイミド前駆体の総量に対して、30質量%以下であることが好ましく、10質量%以下であることがより好ましい。 The resin composition of the present embodiment may be a combination of a polyimide precursor having a structure represented by Formula (1) and another additional polyimide precursor, but the mass ratio of the additional polyimide precursor Is 30% by mass or less based on the total amount of the polyimide precursor in the resin composition from the viewpoint of reducing the degree of yellowness (YI) of the cured product (for example, polyimide film) and the oxygen dependency of the total light transmittance. Is preferable, and 10% by mass or less is more preferable.
 本実施の形態の好ましい態様において、ポリイミド前駆体は、その一部がイミド化されていてもよい。部分イミド化されたポリイミド前駆体によれば、樹脂組成物の室温保管時の粘度安定性を向上できる。この場合のイミド化率は、樹脂組成物中でのポリイミド前駆体の溶解性と溶液の保存安定性とのバランスをとる観点から、好ましくは5%以上、より好ましくは8%以上であり、好ましくは80%以下、より好ましくは70%以下、更に好ましくは50%以下である。この部分イミド化は、ポリイミド前駆体を加熱して脱水閉環することにより得られる。この加熱は、好ましくは120~200℃、より好ましくは150~180℃の温度において、好ましくは15分~20時間、より好ましくは30分~10時間行うことができる。 また、上述の反応によって得られたポリアミド酸に、N,N-ジメチルホルムアミドジメチルアセタール又はN,N-ジメチルホルムアミドジエチルアセタールを加えて加熱し、カルボン酸の一部又は全部をエステル化したうえで、本実施の形態におけるポリイミド前駆体として用いることにより、室温保管時の粘度安定性が向上された樹脂組成物を得ることもできる。これらエステル変性ポリアミド酸は、他に、上述の酸二無水物成分を、酸無水物基に対して1当量の1価のアルコール、及び塩化チオニル、ジシクロヘキシルカルボジイミド等の脱水縮合剤と順次に反応させた後、ジアミン成分と縮合反応させる方法によっても得ることができる。 In a preferred aspect of the present embodiment, a part of the polyimide precursor may be imidized. The partially imidized polyimide precursor can improve the viscosity stability of the resin composition when stored at room temperature. The imidation ratio in this case is preferably 5% or more, more preferably 8% or more, from the viewpoint of balancing the solubility of the polyimide precursor in the resin composition with the storage stability of the solution, and is preferably Is 80% or less, more preferably 70% or less, and still more preferably 50% or less. This partial imidization is obtained by heating and dehydrating the ring closure of the polyimide precursor. This heating can be carried out preferably at a temperature of 120 to 200 ° C., more preferably 150 to 180 ° C., preferably for 15 minutes to 20 hours, more preferably for 30 minutes to 10 hours. Further, N, N-dimethylformamide dimethyl acetal or N, N-dimethylformamide diethyl acetal is added to the polyamic acid obtained by the above reaction and heated to esterify part or all of the carboxylic acid, By using as a polyimide precursor in this Embodiment, the resin composition in which the viscosity stability at the time of room temperature storage was improved can also be obtained. In addition, these ester-modified polyamic acids are obtained by sequentially reacting the above-mentioned acid dianhydride component with one equivalent of a monohydric alcohol with respect to an acid anhydride group, and a dehydration condensation agent such as thionyl chloride or dicyclohexylcarbodiimide. It can also be obtained by a method of condensation reaction with a diamine component.
 一態様において、樹脂組成物は溶媒を含む。溶媒としては、ポリイミド前駆体の溶解性が良好で、かつ樹脂組成物の溶液粘度を適切に制御できるものが好ましく、前記ポリイミド前駆体の反応溶媒を、組成物の溶媒として用いることができる。その中でも、N-メチル-2-ピロリドン(NMP)、γ-ブチロラクトン(GBL)、前記一般式(4)で表される化合物等が好ましい。溶媒組成の具体例としては、N-メチル-2-ピロリドン(NMP)単独、又はN-メチル-2-ピロリドン(NMP)とγ-ブチロラクトン(GBL)との混合溶媒(例えば、NMP:GBL(質量比)=10:90~90:10)等が挙げられる。 In one aspect, the resin composition comprises a solvent. As the solvent, one having good solubility of the polyimide precursor and capable of appropriately controlling the solution viscosity of the resin composition is preferable, and the reaction solvent of the polyimide precursor can be used as a solvent of the composition. Among them, N-methyl-2-pyrrolidone (NMP), γ-butyrolactone (GBL), a compound represented by the above general formula (4), and the like are preferable. Specific examples of the solvent composition include N-methyl-2-pyrrolidone (NMP) alone or a mixed solvent of N-methyl-2-pyrrolidone (NMP) and γ-butyrolactone (GBL) (for example, NMP: GBL (mass) Ratio) = 10: 90 to 90:10) and the like.
[追加の成分]
 本実施の形態の樹脂組成物は、(a)ポリイミド前駆体、及び(b)溶媒、に加えて追加の成分を含んでよい。追加の成分としては、(c)界面活性剤、(d)アルコキシシラン化合物、等が挙げられる。
[Additional ingredient]
The resin composition of the present embodiment may contain additional components in addition to (a) a polyimide precursor and (b) a solvent. Examples of additional components include (c) surfactants, (d) alkoxysilane compounds, and the like.
((c)界面活性剤)
 本実施の形態の樹脂組成物に、界面活性剤を添加することによって、該樹脂組成物の塗布性を向上することができる。具体的には、塗工膜におけるスジの発生を防ぐことができる。
 このような界面活性剤は、例えば、シリコーン系界面活性剤、フッ素系界面活性剤、これら以外の非イオン界面活性剤等を挙げることができる。これらの例としては、シリコーン系界面活性剤として、例えば、オルガノシロキサンポリマーKF-640、642、643、KP341、X-70-092、X-70-093、(以上、商品名、信越化学工業社製)、SH-28PA、SH-190、SH-193、SZ-6032、SF-8428、DC-57、DC-190(以上、商品名、東レ・ダウコーニング・シリコーン社製)、SILWET L-77,L-7001,FZ-2105,FZ-2120,FZ-2154,FZ-2164,FZ-2166,L-7604(以上、商品名、日本ユニカー社製)、DBE-814、DBE-224、DBE-621、CMS-626、CMS-222、KF-352A、KF-354L、KF-355A、KF-6020、DBE-821、DBE-712(Gelest)、BYK-307、BYK-310、BYK-378、BYK-333(以上、商品名、ビックケミー・ジャパン製)、グラノール(商品名、共栄社化学社製)等が;フッ素系界面活性剤として、例えば、メガファックF171、F173、R-08(大日本インキ化学工業株式会社製、商品名)、フロラードFC4430、FC4432(住友スリーエム株式会社、商品名)等が;これら以外の非イオン界面活性剤として、例えば、ポリオキシエチレンウラリルエーテル、ポリオキシエチレンステアリルエーテル、ポリオキシエチレンオレイルエーテル、ポリオキシエチレンオクチルフェノールエーテル等が、それぞれ挙げられる。
((C) surfactant)
The coatability of the resin composition can be improved by adding a surfactant to the resin composition of the present embodiment. Specifically, the generation of streaks in the coated film can be prevented.
Examples of such surfactants include silicone surfactants, fluorine surfactants, and nonionic surfactants other than these. Examples of these include silicone surfactants such as organosiloxane polymers KF-640, 642, 643, KP 341, X-70-092, X-70-093 (all trade names, Shin-Etsu Chemical Co., Ltd.) ), SH-28PA, SH-190, SH-193, SZ-6032, SF-8428, DC-57, DC-190 (trade names, manufactured by Toray Dow Corning Silicone Co., Ltd.), SILWET L-77 , L-7001, FZ-2105, FZ-2120, FZ-2154, FZ-2164, FZ-2166, L-7604 (all trade names, manufactured by Nippon Unicar Co., Ltd.), DBE-814, DBE-224, DBE- 621, CMS-626, CMS-222, KF-352A, KF-354L, KF-355A, KF-6020, DB E-821, DBE-712 (Gelest), BYK-307, BYK-310, BYK-378, BYK-333 (all trade names, manufactured by BIC Chemie Japan), Granol (trade names, manufactured by Kyoeisha Chemical Co., Ltd.), etc. As fluorinated surfactants, for example, Megafac F171, F173, R-08 (Dainippon Ink and Chemicals, Inc., trade name), Florard FC4430, FC4432 (Sumitomo 3M Ltd., trade name), etc .; As a nonionic surfactant other than, for example, polyoxyethylene uralyl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenol ether and the like can be mentioned, respectively.
 これらの界面活性剤の中でも、樹脂組成物の塗工性(スジ抑制)の観点から、シリコーン系界面活性剤、フッ素系界面活性剤が好ましく、キュア工程時の酸素濃度による黄色度(YI)値及び全光線透過率への影響の観点から、シリコーン系界面活性剤が好ましい。 (c)界面活性剤を用いる場合、その配合量は、樹脂組成物中の(a)ポリイミド前駆体100質量部に対して、0.001~5質量部が好ましく、0.01~3質量部がより好ましい。 Among these surfactants, silicone surfactants and fluorosurfactants are preferable from the viewpoint of the coating property (stripping suppression) of the resin composition, and the yellowness (YI) value due to the oxygen concentration at the curing step is preferable. In view of the influence on the total light transmittance and the silicone resin, silicone surfactants are preferred. When a surfactant (c) is used, the amount thereof is preferably 0.001 to 5 parts by mass, and 0.01 to 3 parts by mass with respect to 100 parts by mass of (a) polyimide precursor in the resin composition. Is more preferred.
(d)アルコキシシラン化合物
 本実施の形態にかかる樹脂組成物から得られるポリイミドフィルムをフレキシブル基板等に用いる場合、製造プロセスにおける支持体とポリイミドフィルムとの良好な密着性を得る観点から、該樹脂組成物は、(a)ポリイミド前駆体100質量部に対して、アルコキシシラン化合物を0.01~20質量部含有することができる。ポリイミド前駆体100質量部に対するアルコキシシラン化合物の含有量が0.01質量部以上であることにより、支持体とポリイミドフィルムとの間に良好な密着性を得ることができる。またアルコキシシラン化合物の含有量が20質量部以下であることが、樹脂組成物の保存安定性の観点から好ましい。アルコキシシラン化合物の含有量は、ポリイミド前駆体100質量部に対して、0.02~15質量部であることがより好ましく、0.05~10質量部であることが更に好ましく、0.1~8質量部であることが特に好ましい。
 また、本実施の形態にかかる樹脂組成物の添加剤としてアルコキシシラン化合物を用いることにより、上記の密着性の向上に加えて、樹脂組成物の塗工性(スジムラ抑制)の向上、及び、得られる硬化膜の黄色度(YI)値のキュア時酸素濃度依存性の低減も可能である。
(D) Alkoxysilane Compound When the polyimide film obtained from the resin composition according to the present embodiment is used for a flexible substrate or the like, the resin composition from the viewpoint of obtaining good adhesion between the support and the polyimide film in the manufacturing process. The substance may contain 0.01 to 20 parts by mass of the alkoxysilane compound with respect to 100 parts by mass of the (a) polyimide precursor. When the content of the alkoxysilane compound is 0.01 parts by mass or more based on 100 parts by mass of the polyimide precursor, good adhesion can be obtained between the support and the polyimide film. Moreover, it is preferable from a viewpoint of the storage stability of a resin composition that content of an alkoxysilane compound is 20 mass parts or less. The content of the alkoxysilane compound is more preferably 0.02 to 15 parts by mass, still more preferably 0.05 to 10 parts by mass, with respect to 100 parts by mass of the polyimide precursor. Particularly preferred is 8 parts by mass.
Further, by using an alkoxysilane compound as an additive of the resin composition according to the present embodiment, in addition to the improvement of the above-mentioned adhesion, the improvement of the coating property (suppression of uneven streaks) of the resin composition, and It is also possible to reduce the oxygen concentration dependence during curing of the yellowness (YI) value of the cured film.
 アルコキシシラン化合物としては、例えば、3-ウレイドプロピルトリエトキシシラン、ビス(2-ヒドロキシエチル)-3-アミノプロピルトリエトキシシラン、3-グリシドキシプロピルトリメトキシシラン、γ-アミノプロピルトリメトキシシラン、γ-アミノプロピルトリプロポキシシラン、γ-アミノプロピルトリブトキシシラン、γ-アミノエチルトリエトキシシラン、γ-アミノエチルトリプロポキシシラン、γ-アミノエチルトリブトキシシラン、γ-アミノブチルトリエトキシシラン、γ-アミノブチルトリメトキシシラン、γ-アミノブチルトリプロポキシシラン、γ-アミノブチルトリブトキシシラン、フェニルシラントリオール、トリメトキシフェニルシラン、トリメトキシ(p-トリル)シラン、ジフェニルシランジオール、ジメトキシジフェニルシラン、ジエトキシジフェニルシラン、ジメトキシジ-p-トリルシラン、トリフェニルシラノール及び下記構造のそれぞれで表されるアルコキシシラン化合物等を挙げることができ、これらから選択される1種以上を使用することが好ましい。 Examples of the alkoxysilane compound include 3-ureidopropyltriethoxysilane, bis (2-hydroxyethyl) -3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, γ-aminopropyltrimethoxysilane, γ-aminopropyltripropoxysilane, γ-aminopropyltributoxysilane, γ-aminoethyltriethoxysilane, γ-aminoethyltripropoxysilane, γ-aminoethyltributoxysilane, γ-aminobutyltriethoxysilane, γ- Aminobutyltrimethoxysilane, γ-aminobutyltripropoxysilane, γ-aminobutyltributoxysilane, phenylsilanetriol, trimethoxyphenylsilane, trimethoxy (p-tolyl) silane, diphenylsilane And dimethoxydiphenylsilane, diethoxydiphenylsilane, dimethoxydi-p-tolylsilane, triphenylsilanol and alkoxysilane compounds represented by the following structures, respectively, and one or more selected from these can be used. It is preferable to do.
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000016
 本実施の形態における樹脂組成物の製造方法は、特に限定されるものではなく、例えば、以下の方法によることができる。 The manufacturing method of the resin composition in this Embodiment is not specifically limited, For example, it can be based on the following method.
 (a)ポリイミド前駆体を合成した際に用いた溶媒と、(b)樹脂組成物に含有させる溶媒とが同一の場合には、合成したポリイミド前駆体溶液をそのまま樹脂組成物とすることができる。また、必要に応じて、室温(25℃)~80℃の温度範囲で、(a)ポリイミド前駆体に(b)溶媒、及び追加の成分の1種以上を添加して、攪拌混合したうえで、樹脂組成物として用いてもよい。この攪拌混合には、撹拌翼を備えたスリーワンモータ(新東化学株式会社製)、自転公転ミキサー等の適宜の装置を用いることができる。また必要に応じて40~100℃の熱を加えてもよい。 When the solvent used when synthesizing (a) the polyimide precursor and the solvent to be contained in (b) the resin composition are the same, the synthesized polyimide precursor solution can be used as it is as the resin composition. . Also, if necessary, one or more of (b) a solvent and one or more additional components are added to (a) a polyimide precursor in a temperature range of room temperature (25 ° C.) to 80 ° C. and stirred and mixed. And may be used as a resin composition. For this stirring and mixing, appropriate devices such as a three-one motor (manufactured by Shinto Kagaku Co., Ltd.) equipped with stirring blades, a rotation and revolution mixer, and the like can be used. Further, heat of 40 to 100 ° C. may be added if necessary.
 一方、(a)ポリイミド前駆体を合成した際に用いた溶媒と、(b)樹脂組成物に含有させる溶媒とが異なる場合には、合成したポリイミド前駆体溶液中の溶媒を、例えば再沈殿、溶媒留去等の適宜の方法により除去して(a)ポリイミド前駆体を単離した後に、室温~80℃の温度範囲で、(b)溶媒、及び必要に応じて追加の成分を添加して、攪拌混合することにより、樹脂組成物を調製してもよい。 On the other hand, when the solvent used when synthesizing the (a) polyimide precursor and the solvent to be contained in the (b) resin composition are different, the solvent in the synthesized polyimide precursor solution is, for example, reprecipitated, After removing by a suitable method such as evaporation of solvent and isolating (a) the polyimide precursor, (b) a solvent and, if necessary, additional components are added in a temperature range of room temperature to 80 ° C. The resin composition may be prepared by stirring and mixing.
 上述のように樹脂組成物を調製した後、該組成物を例えば130~200℃において例えば5分~2時間加熱することにより、ポリマーが析出を起こさない程度にポリイミド前駆体の一部を脱水イミド化してもよい。ここで、加熱温度及び加熱時間をコントロールすることにより、イミド化率を制御することができる。前述のように、部分イミド化されたポリイミド前駆体によれば、樹脂組成物の室温保管時の粘度安定性を向上することができる。 After preparing the resin composition as described above, the composition is heated, for example, at 130 to 200 ° C., for example, for 5 minutes to 2 hours to dehydrate a portion of the polyimide precursor to such an extent that the polymer does not precipitate. May be Here, the imidization rate can be controlled by controlling the heating temperature and the heating time. As described above, the partially imidized polyimide precursor can improve the viscosity stability of the resin composition when stored at room temperature.
 樹脂組成物の溶液粘度は、スリットコート性能の観点においては、500~100,000mPa・sが好ましく、1,000~50,000mPa・sがより好ましく、3,000~20,000mPa・sが特に好ましい。具体的には、スリットノズルから液漏れしにくい点で、好ましくは500mPa・s以上、より好ましくは1,000mPa・s以上、更に好ましくは3,000mPa・s以上である。また、スリットノズルが目詰まりしにくい点で、好ましくは100,000mPa・s以下、より好ましくは50,000mPa・s以下、更に好ましくは20,000mPa・s以下である。また、合成時の粘度の観点では、樹脂組成物の溶液粘度が200,000mPa・sより高いと、合成時の撹拌が困難になるという問題が生じるおそれがある。ただし、合成する際に、溶液が高粘度になったとしても、反応終了後に溶媒を添加して撹拌することにより、取扱い性のよい粘度の樹脂組成物を得ることが可能である。本開示における樹脂組成物の溶液粘度は、E型粘度計(例えばVISCONICEHD、東機産業製)を用い、23℃で測定される値である。 From the viewpoint of slit coat performance, the solution viscosity of the resin composition is preferably 500 to 100,000 mPa · s, more preferably 1,000 to 50,000 mPa · s, and particularly preferably 3,000 to 20,000 mPa · s. preferable. Specifically, the viscosity is preferably 500 mPa · s or more, more preferably 1,000 mPa · s or more, and still more preferably 3,000 mPa · s or more, in terms of preventing liquid leakage from the slit nozzle. Further, it is preferably 100,000 mPa · s or less, more preferably 50,000 mPa · s or less, and still more preferably 20,000 mPa · s or less, from the viewpoint that the slit nozzle is not easily clogged. In addition, from the viewpoint of viscosity at the time of synthesis, when the solution viscosity of the resin composition is higher than 200,000 mPa · s, there may be a problem that stirring at the time of synthesis becomes difficult. However, even when the solution has a high viscosity at the time of synthesis, it is possible to obtain a resin composition having a manageable viscosity by adding a solvent and stirring after completion of the reaction. The solution viscosity of the resin composition in the present disclosure is a value measured at 23 ° C. using an E-type viscometer (for example, VISCONICEHD, manufactured by Toki Sangyo Co., Ltd.).
 本実施の形態にかかる樹脂組成物の水分量は、3,000質量ppm以下であることが好ましい。樹脂組成物の水分量は、該樹脂組成物を保存する時の粘度安定性の観点から、2,500質量ppm以下が好ましく、2,000質量ppm以下が好ましく、1,500質量ppm以下が好ましく、1,000質量ppm以下であることがより好ましく、500質量ppm以下であることが更に好ましく、300質量ppm以下が好ましく、100質量ppm以下が好ましい。 The water content of the resin composition according to the present embodiment is preferably 3,000 ppm by mass or less. The water content of the resin composition is preferably 2,500 mass ppm or less, preferably 2,000 mass ppm or less, and preferably 1,500 mass ppm or less from the viewpoint of viscosity stability when storing the resin composition. The amount is preferably 1,000 ppm by mass or less, more preferably 500 ppm by mass or less, preferably 300 ppm by mass or less, and preferably 100 ppm by mass or less.
<ポリイミドフィルムの製造方法>
 本実施の形態は、
 支持体の表面上に、本実施の形態の樹脂組成物を塗布する塗布工程と、
 樹脂組成物を加熱してポリイミドフィルムを形成する膜形成工程と、
 ポリイミドフィルムを支持体から剥離する剥離工程と、を含むことを特徴とする、ポリイミドフィルムの製造方法を提供する。
<Method for producing polyimide film>
In the present embodiment,
Applying the resin composition of the present embodiment on the surface of the support;
A film forming step of heating the resin composition to form a polyimide film;
And R. a peeling step of peeling the polyimide film from the support.
[塗布工程]
 塗布工程において、支持体の表面上に樹脂組成物を塗布する。支持体は、その後の膜形成工程(加熱工程)の加熱温度における耐熱性を有し、更に、剥離工程における剥離性が良好であれば、特に限定されない。例えば、ガラス(例えば、無アルカリガラス)基板;シリコンウェハー;PET(ポリエチレンテレフタレート)、OPP(延伸ポリプロピレン)、ポリエチレングリコールテレフタレート、ポリエチレングリコールナフタレート、ポリカーボネート、ポリイミド、ポリアミドイミド、ポリエーテルイミド、ポリエーテルエーテルケトン、ポリエーテルスルホン、ポリフェニレンスルホン、ポリフェニレンスルフィド等の樹脂基板;ステンレス、アルミナ、銅、ニッケル等の金属基板等が用いられる。
[Coating process]
In the coating step, the resin composition is coated on the surface of the support. The support is not particularly limited as long as it has heat resistance at the heating temperature of the subsequent film forming step (heating step), and further, if the peelability in the peeling step is good. For example, glass (for example, alkali-free glass) substrate; silicon wafer; PET (polyethylene terephthalate), OPP (oriented polypropylene), polyethylene glycol terephthalate, polyethylene glycol naphthalate, polycarbonate, polyimide, polyamide imide, polyether imide, polyether ether Resin substrates such as ketone, polyether sulfone, polyphenylene sulfone and polyphenylene sulfide; metal substrates such as stainless steel, alumina, copper, nickel and the like are used.
 薄膜状のポリイミド成形体を形成する場合には、例えば、ガラス基板、シリコンウェハー等が好ましく、厚膜状のポリイミド成形体(例えば厚膜フィルム、シート等)を形成する場合には、例えば、PET(ポリエチレンテレフタラート)、OPP(延伸ポリプロピレン)等からなる支持体が好ましい。 When forming a thin film polyimide molded body, for example, a glass substrate, a silicon wafer or the like is preferable, and when forming a thick film polyimide molded body (for example, a thick film, a sheet etc.), for example, PET A support made of (polyethylene terephthalate), OPP (oriented polypropylene) or the like is preferred.
 塗布方法としては、一般には、ドクターブレードナイフコーター、エアナイフコーター、ロールコーター、ロータリーコーター、フローコーター、ダイコーター、バーコーター等の塗布方法、スピンコート、スプレイコート、ディップコート等の塗布方法;スクリーン印刷及びグラビア印刷等に代表される印刷技術等が挙げられるが、本実施の形態の樹脂組成物は、特に、スリットコート(すなわちスリットコーターでの塗布)に有用である。塗布厚は、所望のポリイミドフィルムの厚さと樹脂組成物中のポリイミド前駆体の含有量に応じて適宜調整されるべきものであるが、好ましくは1~1,000μm程度である。塗布工程は、室温における実施で足りるが、粘度を下げて作業性をよくする目的で、樹脂組成物を例えば40~80℃の範囲で加温して実施してもよい。 Coating methods generally include doctor blade knife coater, air knife coater, roll coater, rotary coater, flow coater, die coater, bar coater and other coating methods, spin coating, spray coating, dip coating and other coating methods; screen printing And printing techniques represented by gravure printing etc., and the resin composition of the present embodiment is particularly useful for slit coating (that is, coating with a slit coater). The coating thickness should be appropriately adjusted in accordance with the desired thickness of the polyimide film and the content of the polyimide precursor in the resin composition, and is preferably about 1 to 1,000 μm. Although the application step is sufficient at room temperature, the resin composition may be heated, for example, in the range of 40 to 80 ° C. for the purpose of lowering the viscosity to improve the workability.
[任意の乾燥工程]
 塗布工程に続き、乾燥工程を行ってもよいし、乾燥工程を省略して直接次の膜形成工程(加熱工程)に進んでもよい。上記乾燥工程は、樹脂組成物中の有機溶剤除去の目的で行われる。乾燥工程を行う場合、例えば、ホットプレート、箱型乾燥機、コンベヤー型乾燥機等の適宜の装置を利用することができる。乾燥工程は、80~200℃で行うことが好ましく、100~150℃で行うことがより好ましい。乾燥工程の実施時間は、1分~10時間とすることが好ましく、3分~1時間とすることがより好ましい。 上記のようにして、支持体上にポリイミド前駆体を含有する塗膜が形成される。
[Optional drying process]
Subsequent to the coating step, a drying step may be performed, or the drying step may be omitted and the process may proceed directly to the next film forming step (heating step). The drying step is performed for the purpose of removing the organic solvent in the resin composition. When the drying step is performed, appropriate devices such as a hot plate, a box dryer, a conveyor dryer and the like can be used, for example. The drying step is preferably performed at 80 to 200 ° C., and more preferably 100 to 150 ° C. The implementation time of the drying step is preferably 1 minute to 10 hours, and more preferably 3 minutes to 1 hour. As described above, the coating film containing the polyimide precursor is formed on the support.
[膜形成工程]
 続いて、膜形成工程(加熱工程)を行う。加熱工程は、上記の乾燥工程で塗膜中に残留した有機溶剤の除去を行うとともに、塗膜中のポリイミド前駆体のイミド化反応を進行させ、ポリイミドフィルムを得る工程である。この加熱工程は、例えば、イナートガスオーブン、ホットプレート、箱型乾燥機、コンベヤー型乾燥機等の装置を用いて行うことができる。この工程は前記乾燥工程と同時に行っても、両工程を逐次的に行ってもよい。
[Film formation process]
Subsequently, a film forming step (heating step) is performed. The heating step is a step of removing the organic solvent remaining in the coating film in the above-described drying step and advancing the imidization reaction of the polyimide precursor in the coating film to obtain a polyimide film. This heating step can be performed using an apparatus such as, for example, an inert gas oven, a hot plate, a box dryer, a conveyor dryer, and the like. This step may be performed simultaneously with the drying step or both steps may be performed sequentially.
 加熱工程は、空気雰囲気下で行ってもよいが、安全性と、得られるポリイミドフィルムの良好な透明性、低い厚み方向レタデーション(Rth)及び低い黄色度(YI)を得る観点から、不活性ガス雰囲気下で行うことが推奨される。不活性ガスとしては、例えば、窒素、アルゴン等が挙げられる。加熱温度は、ポリイミド前駆体の種類、及び樹脂組成物中の溶媒の種類に応じて適宜に設定されてよいが、250℃~550℃が好ましく、300~450℃がより好ましい。250℃以上であればイミド化が良好に進行し、550℃以下であれば得られるポリイミドフィルムの透明性の低下、耐熱性の悪化等の不都合を回避できる。加熱時間は、0.1~10時間程度とすることが好ましい。 The heating step may be carried out in an air atmosphere, but from the viewpoint of safety, good transparency of the obtained polyimide film, low thickness direction retardation (Rth) and low yellowness (YI), inert gas It is recommended to do under the atmosphere. Examples of the inert gas include nitrogen, argon and the like. The heating temperature may be appropriately set depending on the type of polyimide precursor and the type of solvent in the resin composition, but is preferably 250 ° C. to 550 ° C., and more preferably 300 to 450 ° C. If the temperature is 250 ° C. or higher, the imidization proceeds well, and if the temperature is 550 ° C. or lower, disadvantages such as a decrease in transparency of the obtained polyimide film and a deterioration in heat resistance can be avoided. The heating time is preferably about 0.1 to 10 hours.
 本実施の形態では、上記の加熱工程における周囲雰囲気の酸素濃度は、得られるポリイミドフィルムの透明性及び黄色度(YI)値の観点から、2,000質量ppm以下が好ましく、100質量ppm以下がより好ましく、10質量ppm以下が更に好ましい。酸素濃度が2,000質量ppm以下の雰囲気中で加熱を行うことにより、得られるポリイミドフィルムの黄色度(YI)値を30以下にすることができる。 In the present embodiment, the oxygen concentration in the ambient atmosphere in the above heating step is preferably 2,000 ppm by mass or less, and 100 mass ppm or less from the viewpoint of the transparency and yellowness (YI) value of the polyimide film obtained. More preferably, 10 mass ppm or less is more preferable. By heating in an atmosphere having an oxygen concentration of 2,000 ppm by mass or less, the yellowness (YI) value of the obtained polyimide film can be made to be 30 or less.
[剥離工程]
 次いで、剥離工程では、支持体上のポリイミドフィルムを、例えば室温~50℃程度まで冷却した後に剥離する。この剥離工程としては、例えば下記の(1)~(4)の態様が挙げられる。
[Peeling process]
Next, in the peeling step, the polyimide film on the support is peeled, for example, after cooling to about room temperature to about 50 ° C. Examples of this peeling step include the following embodiments (1) to (4).
 (1)前記方法により、ポリイミドフィルム/支持体を含む構成体を作製した後、該構造体の支持体側からレーザーを照射して、支持体とポリイミドフィルムとの界面をアブレーション加工することにより、ポリイミド樹脂を剥離する方法。レーザーの種類としては、固体(YAG)レーザー、ガス(UVエキシマー)レーザー等が挙げられる。波長308nm等のスペクトルを用いることが好ましい(特表2007-512568公報、特表2012‐511173公報等を参照)。
 (2)支持体に樹脂組成物を塗工する前に、支持体に剥離層を形成し、その後ポリイミドフィルム/剥離層/支持体を含む構成体を得て、ポリイミドフィルムを剥離する方法。剥離層としては、パリレン(登録商標、日本パリレン合同会社製)、酸化タングステンを用いる方法;植物油系、シリコーン系、フッ素系、アルキッド系等の離型剤を用いる方法等が挙げられる(特開2010-67957公報、特開2013-179306公報等を参照)。
 この方法(2)と前記(1)のレーザー照射とを併用してもよい。
(1) A polyimide film / substrate comprising a polyimide film / support is produced by the above method, and then the laser is irradiated from the substrate side of the structure to ablate the interface between the substrate and the polyimide film. How to peel off the resin. The type of laser includes a solid (YAG) laser, a gas (UV excimer) laser and the like. It is preferable to use a spectrum such as a wavelength of 308 nm (see, for example, JP-A-2007-512568, JP-A-2012-511173, etc.).
(2) A method of forming a release layer on a support before coating the resin composition on the support, thereafter obtaining a structure including a polyimide film / release layer / support, and releasing the polyimide film. Examples of the peeling layer include a method using Parylene (registered trademark, manufactured by Japan Parylene Joint Company) and tungsten oxide; a method using a releasing agent such as vegetable oil type, silicone type, fluorine type and alkyd type (JP-A-2010) -67957, JP-A-2013-179306 etc.).
This method (2) may be used in combination with the laser irradiation of the above (1).
 (3)支持体としてエッチング可能な金属基板を用いて、ポリイミドフィルム/支持体を含む構成体を得た後、エッチャントで金属をエッチングすることにより、ポリイミドフィルムを得る方法。金属としては、例えば、銅(具体例としては、三井金属鉱業株式会社製の電解銅箔「DFF」)、アルミニウム等を使用することができる。エッチャントとしては、銅に対しては塩化第二鉄等を、アルミニウムに対しては希塩酸等を使用することができる。
 (4)前記方法により、ポリイミドフィルム/支持体を含む構成体を得た後、ポリイミドフィルム表面に粘着フィルムを貼り付けて、支持体から粘着フィルム/ポリイミドフィルムを分離し、その後粘着フィルムからポリイミドフィルムを分離する方法。
(3) A method of obtaining a polyimide film by etching a metal with an etchant after obtaining a structure including a polyimide film / support using a metal substrate which can be etched as a support. As the metal, for example, copper (as a specific example, electrolytic copper foil “DFF” manufactured by Mitsui Mining & Smelting Co., Ltd.), aluminum or the like can be used. As an etchant, ferric chloride or the like can be used for copper, and dilute hydrochloric acid or the like can be used for aluminum.
(4) After obtaining a composition including a polyimide film / support by the above method, an adhesive film is attached to the surface of the polyimide film, the adhesive film / polyimide film is separated from the support, and then the polyimide film is removed from the adhesive film How to separate.
 これらの剥離方法の中でも、得られるポリイミドフィルムの表裏の屈折率差、黄色度(YI)値、及び伸度の観点から、方法(1)又は(2)が適切であり、得られるポリイミドフィルムの表裏の屈折率差の観点から方法(1)、すなわち、剥離工程に先立って、支持体側からレ-ザ-を照射する照射工程を行うことがより適切である。
 なお、方法(3)において、支持体として銅を用いた場合は、得られるポリイミドフィルムの黄色度(YI)値が大きくなり、伸度が小さくなる傾向が見られる。これは、銅イオンの影響であると考えられる。
Among these peeling methods, the method (1) or (2) is appropriate from the viewpoint of the refractive index difference between the front and back of the obtained polyimide film, the yellowness (YI) value, and the elongation, From the viewpoint of the difference in refractive index between the front and back, it is more appropriate to carry out method (1), that is, an irradiation step of irradiating the laser from the support side prior to the peeling step.
In addition, in the method (3), when copper is used as a support body, the yellowness (YI) value of the polyimide film obtained becomes large, and the tendency for elongation to become small is seen. This is considered to be the effect of copper ions.
 上記の方法によって得られるポリイミドフィルムの厚さは、特に限定されないが、1~200μmの範囲であることが好ましく、より好ましくは5~100μmである。 The thickness of the polyimide film obtained by the above method is not particularly limited, but is preferably in the range of 1 to 200 μm, more preferably 5 to 100 μm.
<ポリイミドフィルムの用途>
 本実施の形態にかかるポリイミド前駆体から得られるポリイミドフィルムは、例えば、半導体絶縁膜、TFT-LCD絶縁膜、電極保護膜等として適用できる他、フレキシブルデバイスの製造において、特にTFT基板やカラーフィルター基板、タッチパネル基板として好適に利用することができる。ここで、本実施の形態にかかるポリイミドフィルムを適用可能なフレキシブルデバイスとしては、例えば、フレキシブルディスプレイ用TFTデバイス、フレキシブル太陽電池、フレキシブルタッチパネル、フレキシブル照明、フレキシブルバッテリー、フレキシブルプリント基板、フレキシブルカラーフィルター、スマートフォン向け表面カバーレンズ等を挙げることができる。
<Use of polyimide film>
The polyimide film obtained from the polyimide precursor according to the present embodiment can be applied as, for example, a semiconductor insulating film, a TFT-LCD insulating film, an electrode protective film, etc. In addition, in the manufacture of flexible devices, particularly a TFT substrate or a color filter substrate And can be suitably used as a touch panel substrate. Here, as a flexible device to which the polyimide film according to the present embodiment can be applied, for example, a TFT device for a flexible display, a flexible solar cell, a flexible touch panel, a flexible illumination, a flexible battery, a flexible printed circuit, a flexible color filter, a smartphone Facing surface cover lens etc. can be mentioned.
 ポリイミドフィルムを使ったフレキシブル基板上にTFTを形成する工程は、典型的には、150~650℃の広い範囲の温度で実施される。具体的にはアモルファスシリコンを使用したTFTデバイスを作製する場合には、一般的に250℃~350℃のプロセス温度が必要となり、本実施の形態のポリイミドフィルムはその温度に耐えうる必要があるため、具体的にはプロセス温度以上のガラス転移温度、熱分解開始温度を有するポリマー構造を適宜選択する必要がある。 The process of forming a TFT on a flexible substrate using a polyimide film is typically performed at a wide range of temperatures from 150 to 650.degree. Specifically, when manufacturing a TFT device using amorphous silicon, a process temperature of 250 ° C. to 350 ° C. is generally required, and the polyimide film of this embodiment needs to be able to withstand that temperature. Specifically, it is necessary to appropriately select a polymer structure having a glass transition temperature higher than the process temperature and a thermal decomposition start temperature.
 金属酸化物半導体(IGZO等)を使用したTFTデバイスを作製する場合には、一般的に320℃~400℃のプロセス温度が必要となり、本実施の形態のポリイミドフィルムはその温度に耐えうる必要があるため、TFT作製プロセス最高温度以上のガラス転移温度、熱分解開始温度を有するポリマー構造を適宜選択する必要がある。 When manufacturing a TFT device using a metal oxide semiconductor (such as IGZO), a process temperature of 320 ° C. to 400 ° C. is generally required, and the polyimide film of this embodiment needs to be able to withstand that temperature. Therefore, it is necessary to appropriately select a polymer structure having a glass transition temperature higher than the TFT manufacturing process maximum temperature and a thermal decomposition start temperature.
 低温ポリシリコン(LTPS)を使用したTFTデバイスを作製する場合には、一般的に380℃~520℃のプロセス温度が必要となり、本実施の形態のポリイミドフィルムはその温度に耐えうる必要があるため、TFT作製プロセス最高温度以上のガラス転移温度、熱分解開始温度を適宜選択有する必要がある。
 一方で、これら熱履歴により、ポリイミドフィルムの光学特性(特に、光線透過率、レタデーション特性及び黄色度)は高温プロセスにさらされるほどに低下する傾向にある。しかし、本実施の形態のポリイミド前駆体から得られるポリイミドは、熱履歴を経ても良好な光学特性を有する。
When manufacturing a TFT device using low temperature polysilicon (LTPS), a process temperature of 380 ° C. to 520 ° C. is generally required, and the polyimide film of the present embodiment needs to be able to withstand that temperature. It is necessary to appropriately select a glass transition temperature higher than the TFT manufacturing process maximum temperature and a thermal decomposition start temperature.
On the other hand, due to these heat histories, the optical properties of the polyimide film (particularly, light transmittance, retardation properties and yellowness) tend to decrease as they are exposed to high temperature processes. However, the polyimide obtained from the polyimide precursor of the present embodiment has good optical properties even after thermal history.
 以下に、本実施の形態の樹脂組成物及びポリイミドフィルムの用途例として、ディスプレイ及び積層体並びにこれらの製造方法について説明する。 Below, a display, a laminated body, and the manufacturing method of these are demonstrated as an application example of the resin composition of this Embodiment, and a polyimide film.
[ディスプレイ及びその製造方法]
 本実施の形態は、本実施の形態の樹脂組成物の硬化物であるポリイミドフィルムを含むフレキシブルデバイスも提供する。該フレキシブルデバイスの好適例はフレキシブルディスプレイである。一態様において、ポリイミドフィルムは、光学特性(例えばRth及び/又は黄色度)に優れている。したがって、好ましい態様において、ポリイミドフィルムは、ディスプレイを外部から観察した際に視認される箇所(具体的には、フレキシブルディスプレイの画面部分)に配置されている。
[Display and Method of Manufacturing the Same]
The present embodiment also provides a flexible device including a polyimide film which is a cured product of the resin composition of the present embodiment. A preferred example of the flexible device is a flexible display. In one aspect, the polyimide film is excellent in optical properties (eg, Rth and / or yellowness). Therefore, in a preferred embodiment, the polyimide film is disposed at a location (specifically, the screen portion of the flexible display) to be viewed when the display is observed from the outside.
 本実施の形態は、
 ガラス基板等の支持体の表面上に、本実施の形態の樹脂組成物を塗布(好ましくはスリットコート)する塗布工程と、
 樹脂組成物を加熱してポリイミドフィルムを形成する膜形成工程と、
 ポリイミドフィルム上に素子を形成する素子形成工程と、
 素子が形成されたポリイミドフィルムを支持体から剥離する剥離工程と、を含むディスプレイの製造方法も提供する。
In the present embodiment,
Applying (preferably slit coating) the resin composition of the present embodiment on the surface of a support such as a glass substrate;
A film forming step of heating the resin composition to form a polyimide film;
An element forming step of forming an element on a polyimide film;
And a peeling step of peeling the polyimide film on which the element is formed from the support.
[フレキシブル有機ELディスプレイの製造方法]
 図1は、本発明の一態様で提供されるディスプレイの例としてのトップエミッション型のフレキシブル有機ELディスプレイのポリイミド基板より上部の構造を示す図である。図1の有機EL構造部25を説明すると、例えば、赤色光を発光する有機EL素子250a、緑色光を発光する有機EL素子250b及び青色光を発光する有機EL素子250cが1単位として、マトリクス状に配列されており、隔壁(バンク)251により、各有機EL素子の発光領域が画定されている。各有機EL素子は、下部電極(陽極)252、正孔輸送層253、発光層254、上部電極(陰極)255から構成されている。また、窒化ケイ素(SiN)や酸化ケイ素(SiO)からなるCVD複層膜(マルチバリヤーレイヤー)を示す下部層2a上には、有機EL素子を駆動するためのTFT256(低温ポリシリコン(LTPS)、金属酸化物半導体(IGZO等)から選択される)、コンタクトホール257を備えた層間絶縁膜258、及び下部電極259が複数設けられている。有機EL素子は封止基板2bで封入されており、各有機EL素子と封止基板2bとの間に中空部261が形成されている。
[Method of manufacturing flexible organic EL display]
FIG. 1 is a view showing a structure of a top emission type flexible organic EL display as an example of a display provided in one embodiment of the present invention above a polyimide substrate. The organic EL structure 25 shown in FIG. 1 is, for example, an organic EL element 250a emitting red light, an organic EL element 250b emitting green light, and an organic EL element 250c emitting blue light, each forming a matrix. The light emitting area of each organic EL element is defined by the barrier rib (bank) 251. Each organic EL element is composed of a lower electrode (anode) 252, a hole transport layer 253, a light emitting layer 254, and an upper electrode (cathode) 255. In addition, on the lower layer 2a showing a CVD multilayer film (multi-barrier layer) made of silicon nitride (SiN) or silicon oxide (SiO), a TFT 256 (low temperature polysilicon (LTPS), A plurality of interlayer insulating films 258 provided with contact holes 257 and lower electrodes 259 are provided, which are selected from metal oxide semiconductors (such as IGZO). The organic EL element is sealed by a sealing substrate 2b, and a hollow portion 261 is formed between each organic EL element and the sealing substrate 2b.
 フレキシブル有機ELディスプレイ製造工程には、ガラス基板支持体上にポリイミドフィルムを作製し、その上部に上記図1に示される有機EL基板を製造する工程、封止基板製造工程、両基板を貼り合わせる組み立て工程、及び、ガラス基板支持体からポリイミドフィルム上に作製された有機ELディスプレイを剥離する剥離工程が含まれる。
 有機EL基板製造工程、封止基板製造工程、及び組み立て工程は、周知の製造工程を適用することができる。以下ではその一例を挙げるが、これに限定されるものではない。また、剥離工程は、上述したポリイミドフィルムの剥離工程と同一であってよい。
In the flexible organic EL display manufacturing process, a polyimide film is prepared on a glass substrate support, and the process of manufacturing the organic EL substrate shown in FIG. 1 above, the sealing substrate manufacturing process, and assembly of bonding both substrates The process and the peeling process of peeling the organic electroluminescent display produced on the polyimide film from the glass substrate support are included.
A well-known manufacturing process can be applied to the organic EL substrate manufacturing process, the sealing substrate manufacturing process, and the assembling process. Although the example is given below, it is not limited to this. Moreover, the peeling process may be the same as the peeling process of the polyimide film mentioned above.
 図1を参照し、例えば、まず、上述した方法によりガラス基板支持体上に本開示のポリイミドフィルムを作製し、その上部にCVD法又はスパッタ法により窒化ケイ素(SiN)と酸化ケイ素(SiO)との複層構造からなるマルチバリアレイヤー(図1中の下部基板2a)を作製し、その上部にTFTを駆動するためのメタル配線層を、フォトレジスト等を使用して作製する。その上部にCVD法を用いてSiO等のアクティブバッファー層を作製し、その上部に金属酸化物半導体(IGZO)、低温ポリシリコン(LTPS)などのTFTデバイス(図1中のTFT256)を作製する。フレキシブルディスプレイ用TFT基板を作製後、感光性アクリル樹脂等でコンタクトホール257を備えた層間絶縁膜258を形成する。スパッタ法等にてITO膜を成膜し、TFTと対をなすように下部電極259を形成する。 Referring to FIG. 1, for example, first, the polyimide film of the present disclosure is produced on a glass substrate support by the method described above, and silicon nitride (SiN) and silicon oxide (SiO) are formed thereon by CVD or sputtering. A multi-barrier layer (lower substrate 2a in FIG. 1) having a multi-layered structure is produced, and a metal wiring layer for driving the TFT is produced thereon using a photoresist or the like. An active buffer layer of SiO or the like is formed thereon by the CVD method, and a TFT device (TFT 256 in FIG. 1) such as metal oxide semiconductor (IGZO) or low temperature polysilicon (LTPS) is formed thereon. After manufacturing a flexible display TFT substrate, an interlayer insulating film 258 provided with a contact hole 257 is formed of a photosensitive acrylic resin or the like. An ITO film is formed by sputtering or the like, and the lower electrode 259 is formed to be paired with the TFT.
 次に、感光性ポリイミド等で隔壁(バンク)251を形成した後、隔壁で区画された各空間内に、正孔輸送層253、発光層254を形成する。また、発光層254及び隔壁(バンク)251を覆うように上部電極(陰極)255を形成する。その後、ファインメタルマスク等をマスクにして、赤色光を発光する有機EL材料(図1中の、赤色光を発光する有機EL素子250aに対応)、緑色光を発光する有機EL材料(図1中の、緑色光を発光する有機EL素子250bに対応)及び青色光を発光する有機EL材料(図1中の、青色光を発光する有機EL素子250cに対応)を公知の方法にて蒸着することで、有機EL基板が作製され、封止フィルム等(図1中の封止基板2b)で封止後、ガラス基板支持体からポリイミド基板より上部のデバイスをレーザー剥離等の公知の剥離方法で剥離することでトップエミッションタイプのフレキシブル有機ELディスプレイが作製される。本実施の形態のポリイミドを使用した場合は、シースルー型のフレキシブル有機ELディスプレイが作製される。また、公知の方法にてボトムエミッションタイプのフレキシブル有機ELディスプレイを作製してもよい。 Next, after a partition (bank) 251 is formed of photosensitive polyimide or the like, a hole transport layer 253 and a light emitting layer 254 are formed in each space partitioned by the partition. Further, the upper electrode (cathode) 255 is formed so as to cover the light emitting layer 254 and the partition (bank) 251. Thereafter, using a fine metal mask or the like as a mask, an organic EL material (corresponding to the organic EL element 250a emitting red light in FIG. 1) emitting red light, an organic EL material emitting green light (FIG. 1) (Corresponding to the organic EL element 250b emitting green light) and the organic EL material emitting blue light (corresponding to the organic EL element 250c emitting blue light in FIG. 1) by a known method Then, after the organic EL substrate is manufactured and sealed with a sealing film or the like (the sealing substrate 2b in FIG. 1), the device above the polyimide substrate is peeled from the glass substrate support by a known peeling method such as laser peeling. As a result, a top emission type flexible organic EL display is manufactured. When the polyimide of the present embodiment is used, a see-through flexible organic EL display is manufactured. Further, a bottom emission type flexible organic EL display may be manufactured by a known method.
[フレキシブル液晶ディスプレイの製造方法]
 本実施の形態のポリイミドフィルムを使用してフレキシブル液晶ディスプレイを作製することが出来る。具体的な作製方法としては、上述した方法にてガラス基板支持体上に本発明からなるポリイミドフィルムを作製し、上述した方法を用いて、例えばアモルファスシリコン、金属酸化物半導体(IGZO等)、又は低温ポリシリコンからなるTFT基板を作製する。別途、本実施の形態の、塗布工程及び膜形成工程に従って、ガラス基板支持体上にポリイミドフィルムを作製し、公知の方法に従ってカラーレジスト等を使用して、ポリイミドフィルムを備えたカラーフィルターガラス基板(CF基板)を作製する。TFT基板及びCF基板の一方に、スクリーン印刷により、熱硬化性エポキシ樹脂などで構成されたシール材料を、液晶注入口の部分を欠いた枠状パターンに塗布し、他方の基板に、液晶層の厚さに相当する直径を持ち、プラスチック又はシリカで構成された球状のスペーサーを散布する。
[Method of manufacturing flexible liquid crystal display]
A flexible liquid crystal display can be manufactured using the polyimide film of the present embodiment. As a specific preparation method, a polyimide film according to the present invention is prepared on a glass substrate support by the above-mentioned method, and amorphous silicon, metal oxide semiconductor (IGZO etc.), or A TFT substrate made of low temperature polysilicon is manufactured. Separately, according to the coating step and the film forming step of the present embodiment, a polyimide film is prepared on a glass substrate support, and a color filter glass substrate provided with a polyimide film using a color resist or the like according to a known method Create a CF substrate). A sealing material composed of a thermosetting epoxy resin or the like is applied to one of a TFT substrate and a CF substrate by screen printing in a frame-like pattern lacking a liquid crystal injection port, and the other substrate is a liquid crystal layer Spray a spherical spacer of plastic or silica with a diameter corresponding to the thickness.
 次いで、TFT基板とCF基板とを貼り合わせ、シール材料を硬化させる。
 最後に、TFT基板及びCF基板並びにシール材料で囲まれる空間に、減圧法により液晶材料を注入した後、液晶注入口に熱硬化樹脂を塗布し、加熱によって液晶材料を封止することで液晶層を形成する。最後に、CF側のガラス基板とTFT側のガラス基板とをレーザー剥離法などでポリイミドフィルムとガラス基板の界面で剥離することでフレキシブル液晶ディスプレイを作製することが出来る。
Then, the TFT substrate and the CF substrate are bonded to each other, and the sealing material is cured.
Finally, a liquid crystal material is injected into the space surrounded by the TFT substrate, the CF substrate, and the seal material by a pressure reduction method, a thermosetting resin is applied to the liquid crystal injection port, and the liquid crystal material is sealed by heating. Form Finally, the flexible liquid crystal display can be manufactured by peeling the glass substrate on the CF side and the glass substrate on the TFT side at the interface between the polyimide film and the glass substrate by a laser peeling method or the like.
[積層体の製造方法]
 本実施の形態は、
 支持体の表面上に、本実施の形態の樹脂組成物を塗布する塗布工程と、
 樹脂組成物を加熱してポリイミドフィルムを形成する膜形成工程と、
 ポリイミドフィルム上に素子を形成する素子形成工程と、を含む積層体の製造方法も提供する。
[Method of manufacturing laminate]
In the present embodiment,
Applying the resin composition of the present embodiment on the surface of the support;
A film forming step of heating the resin composition to form a polyimide film;
And a device forming step of forming a device on a polyimide film.
 積層体における素子としては、前記のフレキシブルデバイス(例えばフレキシブルディスプレイ)として例示したものが挙げられる。支持体としては例えばガラス基板を用いる。塗布工程及び膜形成工程の好ましい具体的手順は、前述のポリイミドフィルムの製造方法に関して前述したのと同様である。また素子形成工程においては、支持体上に形成された、フレキシブル基板としてのポリイミドフィルムの上に、上記の素子を形成する。その後、任意に剥離工程においてポリイミドフィルム及び素子を支持体から剥離してもよい。 As an element in a laminated body, what was illustrated as said flexible device (for example, flexible display) is mentioned. For example, a glass substrate is used as the support. Preferred specific procedures of the coating step and the film forming step are the same as those described above for the method for producing the polyimide film. In the element formation step, the above-described element is formed on a polyimide film as a flexible substrate, which is formed on a support. Thereafter, the polyimide film and the device may optionally be peeled off from the support in the peeling step.
 以下、本発明について、実施例に基づき更に詳述するが、これらは説明のために記述されるものであって、本発明の範囲が下記実施例に限定されるものではない。実施例及び比較例における各種評価は次のとおりに行った。 Hereinafter, the present invention will be described in more detail based on examples, but these are described for the purpose of explanation, and the scope of the present invention is not limited to the following examples. Various evaluations in Examples and Comparative Examples were performed as follows.
<重量平均分子量>
 重量平均分子量(Mw)及び数平均分子量(Mn)は、ゲルパーミエ-ションクロマトグラフィー(GPC)にて、下記の条件により測定した。
<Weight average molecular weight>
The weight average molecular weight (Mw) and the number average molecular weight (Mn) were measured by gel permeation chromatography (GPC) under the following conditions.
 溶媒として、NMP(和光純薬工業社製、高速液体クロマトグラフ用、測定直前に24.8mmol/Lの臭化リチウム一水和物(和光純薬工業社製、純度99.5%)及び63.2mmol/Lのリン酸(和光純薬工業社製、高速液体クロマトグラフ用)を加えて溶解したもの)を使用した。重量平均分子量を算出するための検量線は、スタンダ-ドポリスチレン(東ソ-社製)を用いて作製した。
カラム:Shodex KD-806M(昭和電工社製)
流速:1.0mL/分
カラム温度:40℃
ポンプ:PU-2080Plus(JASCO社製)
検出器:RI-2031Plus(RI:示差屈折計、JASCO社製)及びUV-2075Plus(UV-VIS:紫外可視吸光計、JASCO社製)
As a solvent, NMP (manufactured by Wako Pure Chemical Industries, Ltd., for high performance liquid chromatograph, lithium bromide monohydrate of 24.8 mmol / L (manufactured by Wako Pure Chemical Industries, purity 99.5%) just before measurement and 63 A 2 mmol / L phosphoric acid (manufactured by Wako Pure Chemical Industries, Ltd., for high performance liquid chromatograph) was added and dissolved. A calibration curve for calculating weight average molecular weight was prepared using standard polystyrene (manufactured by Tosoh Corporation).
Column: Shodex KD-806M (made by Showa Denko)
Flow rate: 1.0 mL / min Column temperature: 40 ° C.
Pump: PU-2080 Plus (manufactured by JASCO)
Detector: RI-2031 Plus (RI: differential refractometer, manufactured by JASCO) and UV-2075 Plus (UV-VIS: ultraviolet-visible spectrophotometer, manufactured by JASCO)
<せん断速度依存性(TI)評価>
 実施例及び比較例において調製した樹脂組成物の粘度を、23℃において、温調機付粘度計(東機産業械社製TVE-35H)を用いて、測定対象である樹脂組成物の粘度が測定可能な回転速度及びコーンローターを用いて測定し、せん断速度依存性評価を行った。
 具体的には、測定回転数a(rpm)における粘度ηa(mPa・s)と、測定回転数b(rpm)における粘度ηb(mPa・s)とを測定し(ここでa*10=bである)、下記式で表されるTIを求めた。
 TI=ηa/ηb
測定可能な回転速度の具体例は、例えば、0.5,1,2.5,5,10,20,50,100rpmである。
測定可能なコーンローターの具体例は、例えば、1°34’(コーンローターの角度)×R24(コーンローターの直径),1°34’×R12,0.8°×R24,0.8°×R12,3°×R24,3°×R12,3°×R17.65,3°×R14,3°×R12,3°×R9.7である。
<Shear rate dependency (TI) evaluation>
The viscosity of the resin composition to be measured using the temperature controller-equipped viscometer (TVE-35H manufactured by Toki Sangyo K. K.) at 23 ° C. It measured using a measurable rotational speed and a cone rotor, and performed shear rate dependence evaluation.
Specifically, the viscosity ηa (mPa · s) at the measurement rotation speed a (rpm) and the viscosity ηb (mPa · s) at the measurement rotation speed b (rpm) are measured (where a * 10 = b There was a) TI, which is represented by the following equation.
TI = ηa / ηb
Specific examples of measurable rotational speeds are, for example, 0.5, 1, 2.5, 5, 10, 20, 50, and 100 rpm.
Specific examples of measurable cone rotors are, for example, 1 ° 34 ′ (corn rotor angle) × R 24 (corn rotor diameter), 1 ° 34 ′ × R 12, 0.8 ° × R 24, 0.8 ° × R12, 3 ° × R24, 3 ° × R12, 3 ° × R17.65, 3 ° × R14, 3 ° × R12, 3 ° × R9.7.
<コーティング評価>
 実施例及び比較例において調製した樹脂組成物を、スリットコーター(SCREENファインテックソリューションズ(株)製)を用いて300mm*300mmのガラス基板に295mm*295mmの塗布面積で塗布し、コーティング評価を行った。
<Coating evaluation>
The resin composition prepared in Examples and Comparative Examples was applied to a glass substrate of 300 mm * 300 mm with a coating area of 295 mm * 295 mm using a slit coater (made by SCREEN Finetech Solutions Co., Ltd.), and coating evaluation was performed. .
(スリットノズル評価)
 実施例及び比較例において調製した樹脂組成物(ワニス)を、スリットコーターのノズルに充填し、下記基準で評価し、表に記載した。
ノズルからワニスの吐出を開始し、吐出を停止した後、ワニスがスリットノズルから垂れ落ちる:液漏れ
ノズルからワニスが吐出されない:目詰まり
液漏れ、目詰まりなくコートできる:問題なし
(Slit nozzle evaluation)
The resin composition (varnish) prepared in Examples and Comparative Examples was filled into the nozzle of a slit coater, evaluated according to the following criteria, and listed in the table.
After the discharge of the varnish from the nozzle is started and the discharge is stopped, the varnish drips down from the slit nozzle: the varnish is not discharged from the liquid leakage nozzle: clogging liquid leakage, can be coated without clogging: no problem
(コートギャップ)
 実施例及び比較例において調製した樹脂組成物(ワニス)を、イミド化(酸素濃度10質量ppm以下において、100℃で1時間加熱後、400℃で30分間加熱)した後の膜厚が10μmになるようにガラス基板上にコート(塗布速度100mm/sec)した。その際のスリットコーターのコートギャップ設定値を表に記載した。
(Coat gap)
The film thickness of the resin composition (varnish) prepared in Examples and Comparative Examples is 10 μm after imidization (heating at 100 ° C. for 1 hour and heating at 400 ° C. for 30 minutes at an oxygen concentration of 10 mass ppm or less) The glass substrate was coated (coating speed 100 mm / sec) so as to be The coating gap set value of the slit coater at that time was described in the table.
(エッジ評価)
 実施例及び比較例において調製した樹脂組成物をガラス基板にコートし、乾燥炉に移動し100℃で1時間加熱した後、塗膜のエッジ部を、光学顕微鏡を用いて10倍で観察し、下記基準で評価した。
 また、触針式段差計(P-15:KLA Tencor製)を用いて、塗布膜のエッジビード(エッジ部の盛り上がり)を測定し、下記基準で評価した。
 エッジ部分の顕微鏡観察で0.5mm以上の幅の液だれが観察される:ダレ
 エッジ部分の膜厚測定でビードの厚さが塗布膜厚さの30%以上である:ビード
 ダレ、エッジ異常がいずれもない:問題なし
(Edge evaluation)
The resin composition prepared in Examples and Comparative Examples is coated on a glass substrate, moved to a drying furnace and heated at 100 ° C. for 1 hour, and then the edge of the coating is observed at 10 × using an optical microscope, The following criteria were evaluated.
Further, using a stylus type profilometer (P-15: manufactured by KLA Tencor), the edge bead (the rise of the edge portion) of the coating film was measured and evaluated according to the following criteria.
Dripping with a width of 0.5 mm or more is observed by microscopic observation of the edge portion: The thickness of the bead is 30% or more of the coating film thickness in the film thickness measurement of the sag edge portion: Bead sag, edge abnormality None: No problem
(スリットコート可否)
 前記(スリットノズル評価)、(コートギャップ)、(エッジ評価)について、下記基準で評価し、表に記載した。
 各実施例及び比較例の所定の重量平均分子量のポリイミド前駆体を用いた組成物において、7~28質量%の範囲の少なくともいずれかの固形分含有量で、下記すべての評価結果をみたす:可
 各実施例及び比較例の所定の重合平均分子量のポリイミド前駆体を用いた組成物において、固形分含有量7~28質量%の範囲では、下記すべての評価結果をみたす場合がない:不可
  スリットノズル評価:問題なし
  コートギャップ:50μm以上
  エッジ評価:問題なし
(Slit coat possible)
The above-mentioned (slit nozzle evaluation), (coat gap), and (edge evaluation) were evaluated according to the following criteria and described in the table.
In the composition using the polyimide precursor of the predetermined weight average molecular weight of each example and comparative example, all the following evaluation results are satisfied with a solid content in the range of 7 to 28% by mass: In the composition using the polyimide precursor of the predetermined polymerization average molecular weight of each example and comparative example, in the range of solid content 7 to 28% by mass, all the following evaluation results can not be obtained: not possible Slit nozzle Evaluation: No problem Coat gap: 50 μm or more Edge evaluation: No problem
<硬化膜 膜厚均一性(標準偏差)>
 上記<コーティング評価> (コートギャップ)においてガラス基板上に作製した実施例及び比較例にかかるポリイミドフィルム(すなわち、300mm*300mmのガラス基板に295mm*295mmで形成したポリイミドフィルム)を用いた。ポリイミドフィルムが形成されたガラス基板を用いて、塗布面の中心から、MD(すなわちスリットコート方向)及びTD(MDに対して直角の方向)それぞれの端面に向かって、20mm間隔の位置の膜厚を測定した(したがって、一番端は、端面から7.5mmの位置となる。)(MD15点、TD15点で合計30点)。膜厚の測定は、接触式段差計を使用した。その結果から、ポリイミドフィルムの膜厚均一性(30点の膜厚の標準偏差)を計算し、下記基準で評価した。
  良:面内膜厚均一性(3シグマ)が1.0μm以下
  可:面内膜厚均一性(3シグマ)が1.0μm超 2.0μm以下
  不良:面内膜厚均一性(3シグマ)が2.0μm超
<Cured film thickness uniformity (standard deviation)>
The above-mentioned <coating evaluation> (coat gap) The polyimide film concerning the example and comparative example which were produced on a glass substrate (namely, the polyimide film formed 295 mm * 295 mm in a 300 mm * 300 mm glass substrate) was used. Using a glass substrate on which a polyimide film is formed, the film thickness at a distance of 20 mm from the center of the coated surface toward the end faces of MD (that is, slit coat direction) and TD (direction perpendicular to MD) (Therefore, the end is located 7.5 mm from the end face) (a total of 30 points at 15 points of MD and 15 points of TD). The film thickness was measured using a contact-type step gauge. From the results, the film thickness uniformity of the polyimide film (the standard deviation of the film thickness at 30 points) was calculated and evaluated according to the following criteria.
Good: In-plane film thickness uniformity (3 sigma) is 1.0 μm or less Possible: In-plane film thickness uniformity (3 sigma) is more than 1.0 μm 2.0 μm or less Defect: In-plane film thickness uniformity (3 sigma) Exceeds 2.0 μm
<硬化膜 伸度>
 実施例及び比較例において調製した樹脂組成物を、表面にアルミニウム蒸着層を設けた6インチシリコンウェハー基板に、硬化後膜厚が10μmになるようにスピンコートし、100℃にて6分間プリベークした。その後、縦型キュア炉(光洋リンドバーグ社製、型式名VF-2000B)を用いて、庫内の酸素濃度が10質量ppm以下になるように調整して、400℃で30分間の加熱硬化処理を施し、ポリイミドフィルムが形成されたウェハーを作製した。次に、ダイシングソー(株式会社ディスコ製 DAD 3350)を用いて該ウェハーのポリイミドフィルムに3mm幅の切れ目を入れた後、希塩酸水溶液に一晩浸してフィルム片を剥離し、乾燥させた。これを、長さ50mmにカットし、サンプルとした。
<Hardened film elongation>
The resin compositions prepared in Examples and Comparative Examples were spin-coated on a 6-inch silicon wafer substrate provided with an aluminum deposition layer on the surface to a thickness of 10 μm after curing and prebaked at 100 ° C. for 6 minutes . Thereafter, using a vertical curing furnace (manufactured by Koyo Lindberg, model name VF-2000B), the oxygen concentration in the chamber is adjusted to 10 mass ppm or less, and the heat curing treatment is performed at 400 ° C. for 30 minutes. Then, a wafer on which a polyimide film was formed was produced. Next, 3 mm wide cuts were made in the polyimide film of the wafer using a dicing saw (DAD 3350 manufactured by Disco Co., Ltd.), and then soaked in dilute hydrochloric acid aqueous solution overnight to peel off the film pieces and dried. This was cut into a length of 50 mm and used as a sample.
 上記のサンプルにつき、TENSILON(オリエンテック社製 UTM-II-20)を用いて、試験速度40mm/min、初期荷重0.5fsにて伸度を測定した。下記基準で評価し、表に記載した。
 優:40%以上
 良:20%以上、40%未満
 可:20%未満
The elongation of the above sample was measured at a test speed of 40 mm / min and an initial load of 0.5 fs using TENSILON (UTM-II-20 manufactured by Orientec Co., Ltd.). The following criteria were evaluated and listed in the table.
Excellent: 40% or more Good: 20% or more, less than 40% Acceptable: less than 20%
<硬化膜 ヘイズ(Haze)>
 上記<コーティング評価>(コートギャップ)においてガラス基板上に作製した実施例及び比較例にかかるポリイミドフィルムを用いた。
Hardened film (Haze)
The polyimide films according to the examples and comparative examples produced on the glass substrate in the above <coating evaluation> (coat gap) were used.
 得られたサンプルについて、スガ試験機社製SC-3H型ヘイズメーターを用いてJIS K7105透明度試験法に準拠してヘイズ(膜厚10μm換算)の測定を行った。 測定結果は下記基準で評価し、表に記載した。
優:ヘイズが0.5以下
良:ヘイズが0.5より大きく1.5以下
可:ヘイズが1.5より大きい
About the obtained sample, the measurement of the haze (10 micrometers of film thickness conversion) was performed according to JISK7105 transparency test method using SC-3H type haze meter by Suga Test Instruments Co., Ltd. product. The measurement results were evaluated according to the following criteria and listed in the table.
Excellent: Haze 0.5 or less Good: Haze greater than 0.5 and 1.5 or less acceptable: Haze greater than 1.5
<硬化膜 黄色度(YI))>
 上記<コーティング評価>(コートギャップ)においてガラス基板上に作製した実施例及び比較例にかかるポリイミドフィルムを用いた。得られたサンプルについて、日本電色工業(株)製(Spectrophotometer:SE600)にてD65光源を用いて黄色度(YI)値(膜厚10μm換算)を測定した。結果を表に記載した。
<Cured film yellowness (YI)>
The polyimide films according to the examples and comparative examples produced on the glass substrate in the above <coating evaluation> (coat gap) were used. The yellowness (YI) value (film thickness converted to 10 μm) of the obtained sample was measured using a D65 light source by Nippon Denshoku Kogyo Co., Ltd. (Spectrophotometer: SE600). The results are listed in the table.
<硬化膜 Rth(レタデーション、厚み方向レタデーション)>
 上記<コーティング評価>(コートギャップ)においてガラス基板上に作製した実施例及び比較例にかかるポリイミドフィルムを用いた。得られたサンプルについて、位相差複屈折測定装置(王子計測機器社製、KOBRA-WR)を用いて、Rth(膜厚10μm換算)を測定した。測定光の波長は589nmとした。結果を表に記載した。
<Cured film Rth (retardation, retardation in the thickness direction)>
The polyimide films according to the examples and comparative examples produced on the glass substrate in the above <coating evaluation> (coat gap) were used. The Rth (film thickness converted to 10 μm) of the obtained sample was measured using a retardation birefringence measurement apparatus (KOBRA-WR manufactured by Oji Scientific Instruments). The wavelength of the measurement light was 589 nm. The results are listed in the table.
<比較例1-1>
 撹拌棒付き3Lセパラブルフラスコに、窒素ガスを導入しながらNMP(812g)を加え、ジアミンとして4,4’-DAS(4,4’-ジアミノジフェニルスルホン)(14.2g)、TFMB(12.2g)、両末端アミン変性メチルフェニルシリコーンオイル(10.56g)を撹拌しながら加え、続いて酸二無水物としてPMDA(15.3g)、BPDA(8.8g)を加えた(酸二無水物、ジアミンのモル比(100:98))。次に、オイルバスを用いて80℃に昇温し4時間撹拌した後、オイルバスを外して室温に戻し、透明なポリアミド酸のNMP溶液(以下、ワニスとも記す)を得た。得られたワニスは冷凍庫(設定-20℃、以下同じ。)で保管し、評価をする際は解凍して使用した。
Comparative Example 1-1
NMP (812 g) is added to a 3 L separable flask with a stirring rod while introducing nitrogen gas, and 4,4'-DAS (4,4'-diaminodiphenyl sulfone) (14.2 g) as a diamine, TFMB (12. 2 g), both terminal amine modified methyl phenyl silicone oil (10.56 g) was added with stirring, followed by PMDA (15.3 g), BPDA (8.8 g) as an acid dianhydride (acid dianhydride , Molar ratio of diamine (100: 98)). Next, the temperature was raised to 80 ° C. using an oil bath, and after stirring for 4 hours, the oil bath was removed and the temperature was returned to room temperature to obtain an NMP solution of transparent polyamic acid (hereinafter also referred to as varnish). The obtained varnish was stored in a freezer (setting −20 ° C., the same applies hereinafter), and was thawed and used for evaluation.
<比較例1-2~1-6>
 NMP量を変更して表1の固形分含有量にしたことを除いて比較例1-1と同様に行った。
<Comparative Examples 1-2 to 1-6>
The same procedure as in Comparative Example 1-1 was repeated except that the solid content in Table 1 was changed by changing the amount of NMP.
<実施例1-1>
 撹拌棒付き3Lセパラブルフラスコに、窒素ガスを導入しながら、ジアミンとして4,4’-DAS(15.3g)及びTFMB(12.4g)、並びにこれらのジアミンの全質量の2倍の質量の重合溶媒(NMP)を加えた。
 次に上記セパラブルフラスコに滴下ロートをセットし、その滴下ロートに窒素ガスを導入しながら酸二無水物としてPMDA(15.3g)及びBPDA(8.8g)、並びにこれらの酸二無水物の2倍の質量の重合溶媒(NMP)を加えた。そして、室温にて小型の撹拌羽根で撹拌した。
 続いて上記セパラブルフラスコに別の滴下ロートをセットし、その滴下ロートに窒素ガスを導入しながら、ジアミンとして両末端アミン変性メチルフェニルシリコーンオイルX-22-1660B-3(10.56g)及び当該シリコーンオイルの2倍の質量の重合溶媒(NMP)を加えた。そして、室温にて小型の撹拌羽根で撹拌した。
 そして、セパラブルフラスコ内のジアミン溶液を撹拌しながら、室温で、上記滴下ロートの小型の撹拌羽根を撹拌したままで、同時に酸二無水物溶液とシリコーンオイルとの滴下を開始した。滴下はいずれも低速で行い、30分以上かけて滴下した。滴下後、洗浄溶媒(NMP)で洗浄し、残存物を滴下した(酸二無水物、ジアミンのモル比(100:99))。
 その後、追加溶媒(NMP)を加え、最終的に表1の固形分含有量になるようにした。続いて室温で30分撹拌し、続けてオイルバスを用いて70℃に昇温し4時間撹拌した。その後、オイルバスを外して室温に戻し、透明なポリアミド酸のNMP溶液(以下、ワニスとも記す)を得た。得られたワニスは冷凍庫(設定-20℃、以下同じ。)で保管し、評価をする際は解凍して使用した。
Example 1-1
In a 3 L separable flask with stir bar, while introducing nitrogen gas, as diamine, 4,4'-DAS (15.3 g) and TFMB (12.4 g), and twice the mass of the total mass of these diamines The polymerization solvent (NMP) was added.
Next, the dropping funnel was set in the above separable flask, and while introducing nitrogen gas into the dropping funnel, PMDA (15.3 g) and BPDA (8.8 g) as acid dianhydride, and these acid dianhydrides were prepared. Two times the mass of polymerization solvent (NMP) was added. And it stirred with the small stirring blade at room temperature.
Subsequently, another dropping funnel is set in the above separable flask, and while introducing nitrogen gas into the dropping funnel, the both terminal amine modified methylphenyl silicone oil X-22-1660B-3 (10.56 g) as the diamine and the said Two times the weight of the silicone oil polymerization solvent (NMP) was added. And it stirred with the small stirring blade at room temperature.
Then, while stirring the diamine solution in the separable flask, while the small stirring blade of the dropping funnel was being stirred at room temperature, dropping of the acid dianhydride solution and the silicone oil was simultaneously started. The dropping was all performed at low speed, and was dropped over 30 minutes. After the dropwise addition, the resultant was washed with a washing solvent (NMP), and the residue was dropped (molar ratio of acid dianhydride to diamine (100: 99)).
Thereafter, additional solvent (NMP) was added to make the final solid content shown in Table 1. Subsequently, the mixture was stirred at room temperature for 30 minutes and then heated to 70 ° C. using an oil bath and stirred for 4 hours. Thereafter, the oil bath was removed, and the temperature was returned to room temperature to obtain a transparent polyamic acid in NMP solution (hereinafter also referred to as a varnish). The obtained varnish was stored in a freezer (setting −20 ° C., the same applies hereinafter), and was thawed and used for evaluation.
<実施例1-2~1-17、2-1~2-14、3-1~3-16、4-1~4-12>
 酸二無水物及びジアミンの配合を表1~4に示すとおりとし、これに応じて重合溶媒の使用量を変え(すなわち酸二無水物又はジアミンの質量の2倍の量となるように調整し)、更に実施例1-5~1-8、2-5~2-14、3-3~3-16、4-5~4-12については「70℃に昇温し4時間撹拌」を「40℃に昇温し12時間撹拌」に変更し、実施例1-9、2-9、3-9、4-9については「追加溶媒(NMP)」を「追加溶媒(NMP及びGBL)(添加後のNMP/GBLが100/100(w/w)になるよう調整)」に変更した他は、実施例1-1と同様にした。表1~4に示す固形分量は上記追加溶媒の量を変えることで表に示す値に調整した。なお実施例1-16、2-12、2-13、3-14、3-15、4-10、4-11において「12時間撹拌」した後更に反応時間を延長したものの重量平均分子量を測定したところ、12時間撹拌後と比べて大きくなることは無かった。
Examples 1-2 to 1-17, 2-1 to 2-14, 3-1 to 3-16, 4-1 to 4-12>
The combinations of acid dianhydride and diamine are as shown in Tables 1 to 4, and accordingly, the amount of polymerization solvent used is changed (that is, adjusted to be twice the mass of acid dianhydride or diamine). Further, for Examples 1-5 to 1-8, 2-5 to 2-14, 3-3 to 3-16, and 4-5 to 4-12, “heat to 70 ° C. and stir for 4 hours” Change the temperature to 40 ° C and stir for 12 hours. For Examples 1-9, 2-9, 3-9, and 4-9, add the additional solvent (NMP) to the additional solvent (NMP and GBL). The conditions were the same as in Example 1-1, except that the NMP / GBL after addition was adjusted to be 100/100 (w / w). The solid contents shown in Tables 1 to 4 were adjusted to the values shown in the table by changing the amount of the additional solvent. In Examples 1-16, 2-12, 2-13, 3-14, 3-15, 4-10, and 4-11, the weight average molecular weight was measured after "stirring for 12 hours" and further extending the reaction time. As a result, it did not become larger than after stirring for 12 hours.
<比較例2-1~2-6、3-1~3-6、4-1~4-7>
 比較例2-1、3-1、4-1は、比較例1-1のNMP量を745g(比較例2-1)、799g(比較例3-1)、850g(比較例4-1)にそれぞれ変更し、酸二無水物及びジアミンの配合を表2に示すとおりとしたことを除いて比較例1-1と同様に行った。また、NMP量を変更して表2~4の固形分含有量にしたことを除いて、比較例2-2~2-6は比較例2-1と、比較例3-2~3-6は比較例3-1と、比較例4-2~4-7は比較例4-1と、それぞれ同様に行った。
<Comparative Examples 2-1 to 2-6, 3-1 to 3-6, 4-1 to 4-7>
In Comparative Examples 2-1, 3-1, and 4-1, the amount of NMP of Comparative Example 1-1 is 745 g (Comparative Example 2-1), 799 g (Comparative Example 3-1), and 850 g (Comparative Example 4-1). The reaction was conducted in the same manner as in Comparative Example 1-1 except that the acid dianhydride and the diamine were blended as shown in Table 2, respectively. In addition, Comparative Examples 2-2 to 2-6 are Comparative Example 2-1 and Comparative Examples 3-2 to 3-6 except that the NMP amount is changed to obtain the solid contents in Tables 2 to 4. Comparative Example 3-1 and Comparative Examples 4-2 to 4-7 were respectively performed in the same manner as Comparative Example 4-1.
<比較例5-1>
 撹拌棒付き3Lセパラブルフラスコに、窒素ガスを導入しながらNMP(620g)を
加え、ジアミンとして4,4’-DAS(24.8g)を撹拌しながら加え、続いて酸二無水物としてPMDA(21.8g)を加えた(酸二無水物、ジアミンのモル比(100:100))。次に、オイルバスを用いて80℃に昇温し4時間撹拌した後、オイルバスを外して室温に戻し、透明なポリアミド酸のNMP溶液(以下、ワニスとも記す)を得た。得られたワニスは冷凍庫で保管し、評価をする際は解凍して使用した。
Comparative Example 5-1
NMP (620 g) is added to a 3 L separable flask with stir bar while introducing nitrogen gas, 4,4'-DAS (24.8 g) as a diamine is added with stirring, followed by PMDA (acid dianhydride). 21.8 g) were added (molar ratio of acid dianhydride to diamine (100: 100)). Next, the temperature was raised to 80 ° C. using an oil bath, and after stirring for 4 hours, the oil bath was removed and the temperature was returned to room temperature to obtain an NMP solution of transparent polyamic acid (hereinafter also referred to as varnish). The obtained varnish was stored in a freezer and thawed for evaluation.
<比較例5-2~5-6>
 NMP量を変更して表5の固形分含有量にしたことを除いて比較例5-1と同様に行った。
<Comparative Examples 5-2 to 5-6>
The same procedure as in Comparative Example 5-1 was repeated except that the solid content in Table 5 was changed by changing the amount of NMP.
<実施例5-1>
 撹拌棒付き3Lセパラブルフラスコに、窒素ガスを導入しながらジアミンとして4,4’-DAS(24.3g)と、ジアミンの全質量の2倍の質量のNMPを加えた。
 次に上記セパラブルフラスコに滴下ロートをセットし、その滴下ロートに窒素ガスを導入しながら酸二無水物としてPMDA(10.9g)、BPDA(14.7g)とこれらの酸二無水物の2倍の質量のNMPを加えた。そして、室温にて小型の撹拌羽根で撹拌した。
 そして、セパラブルフラスコ内のジアミン溶液を撹拌しながら、室温で、上記滴下ロートの小型の撹拌羽根を撹拌したままで、酸二無水物溶液の滴下を開始した。滴下は低速で行い、30分以上かけて滴下した。滴下後、洗浄溶媒(NMP)で洗浄し、残存物を滴下した(酸二無水物、ジアミンのモル比(100:98))。
 その後、追加溶媒(NMP)を加え、最終的に表5の固形分含有量になるようにした。続いて室温で30分撹拌し、続けてオイルバスを用いて70℃に昇温し4時間撹拌した。その後、オイルバスを外して室温に戻し、透明なポリアミド酸のNMP溶液(以下、ワニスとも記す)を得た。得られたワニスは冷凍庫(設定-20℃、以下同じ。)で保管し、評価をする際は解凍して使用した。
Example 5-1
In a 3 L separable flask equipped with a stir bar, while introducing nitrogen gas, 4,4′-DAS (24.3 g) as diamine and 2 times the mass of NMP of the total mass of diamine were added.
Next, the dropping funnel was set in the above separable flask, and while introducing nitrogen gas into the dropping funnel, PMDA (10.9 g) and BPDA (14.7 g) as acid dianhydrides, and 2 of these acid dianhydrides Double mass of NMP was added. And it stirred with the small stirring blade at room temperature.
Then, while stirring the diamine solution in the separable flask, dropping of the acid dianhydride solution was started while stirring the small stirring blade of the dropping funnel at room temperature. The dropping was performed at a low speed, and was dropped over 30 minutes. After the dropwise addition, the residue was washed with a washing solvent (NMP), and the residue was dropped (molar ratio of acid dianhydride to diamine (100: 98)).
Thereafter, additional solvent (NMP) was added to make the solid content in Table 5 finally. Subsequently, the mixture was stirred at room temperature for 30 minutes and then heated to 70 ° C. using an oil bath and stirred for 4 hours. Thereafter, the oil bath was removed, and the temperature was returned to room temperature to obtain a transparent polyamic acid in NMP solution (hereinafter also referred to as varnish). The obtained varnish was stored in a freezer (setting −20 ° C., the same applies hereinafter), and was thawed and used for evaluation.
<実施例5-2~5-9、6-1~6-9、7-1~7-4、8-1、8-2>
 酸二無水物及びジアミンの配合を表5~9に示すとおりとし、これに応じて重合溶媒の使用量を変え(すなわち酸二無水物又はジアミンの質量の2倍の量となるように調整し)、更に実施例5-3~5-9、6-5~6-9、7-4、8-1、8-2については上記「70℃に昇温し4時間撹拌」を「40℃に昇温し12時間撹拌」に変更し、実施例5-7、6-4、7-4については「追加溶媒(NMP)」を「追加溶媒(NMP及びGBL)(添加後のNMP/GBLが100/100(w/w)になるよう調整)」に変更した他は、実施例5-1と同様にした。表5~9に示す固形分量は上記追加溶媒の量を変えることで表に示す値に調整した。なお実施例5-8,5-9、6-6~6-9において「12時間撹拌」した後更に反応時間を延長したものの重量平均分子量を測定したところ、12時間撹拌後と比べて大きくなることは無かった。
Examples 5-2 to 5-9, 6-1 to 6-9, 7-1 to 7-4, 8-1, 8-2>
The formulations of acid dianhydride and diamine were as shown in Tables 5 to 9, and accordingly, the amount of polymerization solvent used was changed (that is, adjusted to be twice the mass of acid dianhydride or diamine). Further, for Examples 5-3 to 5-9, 6-5 to 6-9, 7-4, 8-1, and 8-2, "the temperature is raised to 70 ° C. and stirring for 4 hours" The temperature was changed to “12 ° C and stirring for 12 hours”, and the “additional solvent (NMP)” was added to “additional solvent (NMP and GBL)” (NMP / GBL after addition for Examples 5-7, 6-4 and 7-4) Was adjusted to 100/100 (w / w) in the same manner as in Example 5-1 except that it was changed to 100/100 (w / w). The solid contents shown in Tables 5 to 9 were adjusted to the values shown in the table by changing the amount of the additional solvent. In Examples 5-8, 5-9, and 6-6 to 6-9, when the reaction time was extended after “stirring for 12 hours”, the weight average molecular weight was measured, which was larger than after stirring for 12 hours. It never happened.
<比較例6-1~6-6、7-1~7-8、8-1~8-2>
 比較例6-1、7-1、8-1~8-2は、比較例5-1のNMP量を664g(比較例6-1)、718g(比較例7-1)、401g(比較例8-1)、344g(比較例8-2)にそれぞれ変更し、酸二無水物及びジアミンの配合を表6~8に示すとおりとしたことを除いて比較例5-1と同様に行った。比較例6-2~6-6はNMP量を変更して表6の固形分含有量にしたことを除いて比較例6-1と同様に行い、比較例7-2~7-6はNMP量を変更して表7の固形分含有量にしたことを除いて比較例7-1と同様に行った。比較例7-7、7-8は、NMP量を718gから215g(比較例7-7)、163g(比較例7-8)にそれぞれ変更し、酸二無水物及びジアミンの配合を表7に示すとおりとし、「4時間撹拌」を「3時間撹拌」に変更したことを除いて比較例7-1と同様に行った。
<Comparative Examples 6-1 to 6-6, 7-1 to 7-8, 8-1 to 8-2>
In Comparative Examples 6-1, 7-1, and 8-1 to 8-2, the amount of NMP of Comparative Example 5-1 was 664 g (Comparative Example 6-1), 718 g (Comparative Example 7-1), and 401 g (Comparative Example). 8-1) Changed to 344 g (Comparative Example 8-2) respectively, and carried out in the same manner as Comparative Example 5-1 except that the blending of the acid dianhydride and the diamine was as shown in Tables 6 to 8 . Comparative Examples 6-2 to 6-6 are performed in the same manner as Comparative Example 6-1 except that the solid content in Table 6 is changed by changing the amount of NMP, and Comparative Examples 7-2 to 7-6 are NMP. The procedure of Comparative Example 7-1 was repeated except that the amount was changed to obtain the solid content in Table 7. In Comparative Examples 7-7 and 7-8, the amount of NMP was changed from 718 g to 215 g (Comparative Example 7-7) and 163 g (Comparative Example 7-8), respectively, and the composition of acid dianhydride and diamine was as shown in Table 7. As shown, the same procedure as in Comparative Example 7-1 was performed except that “stirring for 4 hours” was changed to “stirring for 3 hours”.
<比較例9-1>
 撹拌棒付き3Lセパラブルフラスコに、窒素ガスを導入しながらNMP(495g)を加え、ジアミンとしてTFMB(30.9g)を撹拌しながら加え、続いて酸二無水物としてBPAF(9,9-ビス(3,4-ジカルボキシフェニル)フルオレン二無水物)(45.8g)、両末端アミン変性メチルフェニルシリコーンオイルをX-22-1660B-3(10.56g)を加えた(酸二無水物、ジアミンのモル比(100:99))。次に、オイルバスを用いて80℃に昇温し4時間撹拌した後、オイルバスを外して室温に戻し、透明なポリアミド酸のNMP溶液(以下、ワニスとも記す)を得た。得られたワニスは冷凍庫で保管し、評価をする際は解凍して使用した。
<Comparative Example 9-1>
NMP (495 g) is added to a 3 L separable flask with a stir bar while introducing nitrogen gas, TFMB (30.9 g) as a diamine is added with stirring, and then BPAF (9, 9-bis as acid dianhydride is added (3,4-Dicarboxyphenyl) fluorene dianhydride (45.8 g), both terminal amine modified methyl phenyl silicone oil was added X-22-1660 B-3 (10.56 g) (acid dianhydride, Molar ratio of diamine (100: 99)). Next, the temperature was raised to 80 ° C. using an oil bath, and after stirring for 4 hours, the oil bath was removed and the temperature was returned to room temperature to obtain an NMP solution of transparent polyamic acid (hereinafter also referred to as varnish). The obtained varnish was stored in a freezer and thawed for evaluation.
<比較例9-2~9-3>
 NMP量を495gから438g(比較例9-2)、374g(比較例9-3)にそれぞれ変更し、酸二無水物及びジアミンの配合を表9に示すとおりとしたことを除いて、比較例9-1と同様に行った。
Comparative Examples 9-2 to 9-3
Comparative Example except that the amount of NMP was changed from 495 g to 438 g (Comparative Example 9-2) and 374 g (Comparative Example 9-3), respectively, and the composition of the acid dianhydride and the diamine was as shown in Table 9. It went in the same way as 9-1.
<実施例9-1>
 撹拌棒付き3Lセパラブルフラスコに、窒素ガスを導入しながらジアミンとしてTFMB(31.3g)と、ジアミンの全質量の2倍の質量のNMP(63g)を加えた。
 次に上記セパラブルフラスコに滴下ロートをセットし、その滴下ロートに窒素ガスを導入しながら酸二無水物としてBPAF(45.8g)とこの酸二無水物の2倍の質量のNMP(92g)を加えた。そして、室温にて小型の撹拌羽根で撹拌した。
 続いて上記セパラブルフラスコに別の滴下ロートをセットし、その滴下ロートに窒素ガスを導入しながら、両末端アミン変性メチルフェニルシリコーンオイルX-22-1660B-3(10.56g)と当該シリコーンオイルの2倍の質量のNMP(21g)を加えた。そして、室温にて小型の撹拌羽根で撹拌した。
 そして、セパラブルフラスコ内のジアミン溶液を撹拌しながら、室温で、上記滴下ロートの小型の撹拌羽根を撹拌したままで、酸二無水物溶液の滴下を開始した。滴下は低速で行い、30分以上かけて滴下した。滴下後、洗浄溶媒(NMP)で洗浄し、残存物を滴下した(酸二無水物、ジアミンのモル比(100:100))。
 その後、追加溶媒(NMP)を加え、最終的に表9の固形分含有量になるようにした。
続いて室温で30分撹拌し、続けてオイルバスを用いて40℃に昇温し12時間撹拌した。その後、オイルバスを外して室温に戻し、透明なポリアミド酸のNMP溶液(以下、ワニスとも記す)を得た。得られたワニスは冷凍庫(設定-20℃、以下同じ。)で保管し、評価をする際は解凍して使用した。
Example 9-1
In a 3 L separable flask with a stirring rod, TFMB (31.3 g) as a diamine and NMP (63 g) twice as much as the total mass of the diamine were added while introducing nitrogen gas.
Next, the dropping funnel was set in the above separable flask, and while introducing nitrogen gas into the dropping funnel, BPAF (45.8 g) as acid dianhydride and NMP (92 g) twice the mass of this acid dianhydride were added. Was added. And it stirred with the small stirring blade at room temperature.
Subsequently, another dropping funnel is set in the separable flask, and while introducing nitrogen gas into the dropping funnel, the both terminal amine modified methylphenyl silicone oil X-22-1660B-3 (10.56 g) and the silicone oil Two times the mass of NMP (21 g) was added. And it stirred with the small stirring blade at room temperature.
Then, while stirring the diamine solution in the separable flask, dropping of the acid dianhydride solution was started while stirring the small stirring blade of the dropping funnel at room temperature. The dropping was performed at a low speed, and was dropped over 30 minutes. After dropping, the residue was washed with a washing solvent (NMP), and the residue was dropped (molar ratio of acid dianhydride to diamine (100: 100)).
Thereafter, additional solvent (NMP) was added to make the solid content of Table 9 finally.
Subsequently, the mixture was stirred at room temperature for 30 minutes and then heated to 40 ° C. using an oil bath and stirred for 12 hours. Thereafter, the oil bath was removed, and the temperature was returned to room temperature to obtain a transparent polyamic acid in NMP solution (hereinafter also referred to as varnish). The obtained varnish was stored in a freezer (setting −20 ° C., the same applies hereinafter), and was thawed and used for evaluation.
<実施例9-2、9-3>
 酸二無水物及びジアミンの配合を表9に示すとおりとし、これに応じて重合溶媒の使用量を変え(すなわち酸二無水物又はジアミンの質量の2倍の量となるように調整し)た他は実施例9-1と同様に行った。表9に示す固形分量は上記追加溶媒の量を変えることで表に示す値に調整した。
Examples 9-2 and 9-3
The composition of acid dianhydride and diamine was as shown in Table 9, and the amount of polymerization solvent used was changed accordingly (ie, adjusted to be twice the mass of acid dianhydride or diamine) Others were performed in the same manner as in Example 9-1. The solid content shown in Table 9 was adjusted to the values shown in the table by changing the amount of the additional solvent.
<実施例10-1>
 撹拌棒付き3Lセパラブルフラスコに、窒素ガスを導入しながらNMP(246g)を加え、ジアミンとして4,4’-DAS(14.4g)、TFMB(12.4g)、両末端アミン変性メチルフェニルシリコーンオイル(10.56g)を撹拌しながら加え、続いて酸二無水物としてPMDA(15.3g)、BPDA(8.8g)を加えた(酸二無水物、ジアミンのモル比(100:99))。次に、オイルバスを用いて70℃に昇温し8時間撹拌した後、オイルバスを外して室温に戻し、透明なポリアミド酸のNMP溶液を得た。得られたワニスは冷凍庫(設定-20℃、以下同じ。)で保管し、評価をする際は解凍して使用した。
Example 10-1
NMP (246 g) is added to a 3 L separable flask with a stirring rod while introducing nitrogen gas, and 4,4'-DAS (14.4 g) and TFMB (12.4 g) as diamines are modified with amine-modified methyl phenyl silicone Oil (10.56 g) was added with stirring, followed by PMDA (15.3 g) and BPDA (8.8 g) as acid dianhydride (molar ratio of acid dianhydride and diamine (100: 99) ). Next, the temperature was raised to 70 ° C. using an oil bath, and after stirring for 8 hours, the oil bath was removed and the temperature was returned to room temperature to obtain an NMP solution of transparent polyamic acid. The obtained varnish was stored in a freezer (setting −20 ° C., the same applies hereinafter), and was thawed and used for evaluation.
<実施例10-2~10-5>
 NMP量を246gから225g(実施例10-2)、242g(実施例10-3)、185g(実施例10-4)、201g(実施例10-5)にそれぞれ変更し、酸二無水物及びジアミンの配合を表10に示すとおりとしたことを除いて、実施例10-1と同様に行った。
 評価の結果を表10に示す。
Examples 10-2 to 10-5
The amount of NMP was changed from 246 g to 225 g (Example 10-2), 242 g (Example 10-3), 185 g (Example 10-4), 201 g (Example 10-5), respectively, and acid dianhydride and The procedure of Example 10-1 was repeated except that the diamine composition was as shown in Table 10.
The results of the evaluation are shown in Table 10.
Figure JPOXMLDOC01-appb-T000017
Figure JPOXMLDOC01-appb-T000017
Figure JPOXMLDOC01-appb-T000018
Figure JPOXMLDOC01-appb-T000018
Figure JPOXMLDOC01-appb-T000019
Figure JPOXMLDOC01-appb-T000019
Figure JPOXMLDOC01-appb-T000020
Figure JPOXMLDOC01-appb-T000020
Figure JPOXMLDOC01-appb-T000021
Figure JPOXMLDOC01-appb-T000021
Figure JPOXMLDOC01-appb-T000022
Figure JPOXMLDOC01-appb-T000022
Figure JPOXMLDOC01-appb-T000023
Figure JPOXMLDOC01-appb-T000023
Figure JPOXMLDOC01-appb-T000024
Figure JPOXMLDOC01-appb-T000024
Figure JPOXMLDOC01-appb-T000025
Figure JPOXMLDOC01-appb-T000025
Figure JPOXMLDOC01-appb-T000026
Figure JPOXMLDOC01-appb-T000026
 本開示の樹脂組成物は、フレキシブルデバイス(例えばフレキシブル基板)、特にフレキシブルディスプレイ等の用途に好適に適用できる。例えば、本開示の樹脂組成物は、液晶ディスプレイ、有機エレクトロルミネッセンスディスプレイ、フィールドエミッションディスプレイ、電子ペーパー等の表示装置の透明基板を形成するために好適に用いることができる。より具体的には、本開示の樹脂組成物は、薄膜トランジスタ(TFT)の基板、カラーフィルタの基板、透明導電膜(ITO、IndiumThinOxide)の基板等を形成するために用いることができる。 The resin composition of the present disclosure can be suitably applied to applications such as flexible devices (for example, flexible substrates), particularly flexible displays. For example, the resin composition of the present disclosure can be suitably used to form a transparent substrate of a display device such as a liquid crystal display, an organic electroluminescence display, a field emission display, an electronic paper and the like. More specifically, the resin composition of the present disclosure can be used to form a thin film transistor (TFT) substrate, a color filter substrate, a transparent conductive film (ITO, Indium Thin Oxide) substrate, and the like.
 2a  下部基板
 2b  封止基板
 25  有機EL構造部
 250a  赤色光を発光する有機EL素子
 250b  緑色光を発光する有機EL素子
 250c  青色光を発光する有機EL素子
 251  隔壁(バンク)
 252  下部電極(陽極)
 253  正孔輸送層
 254  発光層
 255  上部電極(陰極)
 256  TFT
 257  コンタクトホール
 258  層間絶縁膜
 259  下部電極
 261  中空部
2a lower substrate 2b sealing substrate 25 organic EL structure 250a organic EL element 250b emitting red light organic EL element 250c emitting green light organic EL element emitting blue light 251 partition wall (bank)
252 Lower electrode (anode)
253 hole transport layer 254 light emitting layer 255 top electrode (cathode)
256 TFT
257 contact hole 258 interlayer insulating film 259 lower electrode 261 hollow portion

Claims (25)

  1.  下記式(1):
    Figure JPOXMLDOC01-appb-C000001
    {式中、R1は、複数ある場合それぞれ独立に2価の有機基を示し、R2は、複数ある場合それぞれ独立に4価の有機基を示し、nは正の整数である。}で表される構造を有するポリイミド前駆体と、溶媒と、を含む樹脂組成物であって、
     前記ポリイミド前駆体の重量平均分子量が110,000~250,000であり、
     前記樹脂組成物の固形分含有量が10~25質量%である、樹脂組成物。
    Following formula (1):
    Figure JPOXMLDOC01-appb-C000001
    In the formula, when there are a plurality of R 1 's each independently represent a divalent organic group, and when there are a plurality of R 2' s each represent a tetravalent organic group independently, n is a positive integer. A resin composition comprising a polyimide precursor having a structure represented by
    The weight average molecular weight of the polyimide precursor is 110,000 to 250,000,
    A resin composition, wherein the solid content of the resin composition is 10 to 25% by mass.
  2.  前記樹脂組成物の粘度を温調機付粘度計で23℃にて測定したときの、下記式で表されるせん断速度依存性(TI)が、0.9~1.1である、請求項1に記載の樹脂組成物。
    TI=ηa/ηb
    {式中、ηa(mPa・s)は樹脂組成物の測定回転速度a(rpm)における粘度であり、ηb(mPa・s)は樹脂組成物の測定回転速度b(rpm)における粘度であり、ただしa*10=bである。}
    The shear rate dependency (TI) represented by the following equation is 0.9 to 1.1 when the viscosity of the resin composition is measured at 23 ° C. with a thermostat and viscometer. The resin composition as described in 1.
    TI = ηa / ηb
    {Wherein ηa (mPa · s) is the viscosity at the measured rotational speed a (rpm) of the resin composition, and ηb (mPa · s) is the viscosity at the measured rotational speed b (rpm) of the resin composition, However, it is a * 10 = b. }
  3.  前記樹脂組成物は、スリットコート用の樹脂組成物である、請求項1又は2に記載の樹脂組成物。 The resin composition according to claim 1, wherein the resin composition is a resin composition for slit coat.
  4.  前記式(1)中のR1の少なくとも1つが、下記式(2):
    Figure JPOXMLDOC01-appb-C000002
    で表される基である、請求項1~3のいずれか1項に記載の樹脂組成物。
    At least one of R 1 in the formula (1) is represented by the following formula (2):
    Figure JPOXMLDOC01-appb-C000002
    The resin composition according to any one of claims 1 to 3, which is a group represented by
  5.  前記ポリイミド前駆体が、下記式(3):
    Figure JPOXMLDOC01-appb-C000003
    {式中、R3及びR4の各々は、複数ある場合それぞれ独立に、炭素数1~5の1価の脂肪族炭化水素基、又は炭素数6~10の1価の芳香族基を示し、そしてmは、1~200の整数である。}で表される構造を有する、請求項1~4のいずれか1項に記載の樹脂組成物。
    The polyimide precursor is represented by the following formula (3):
    Figure JPOXMLDOC01-appb-C000003
    [Wherein, each of R 3 and R 4 independently represents a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, or a monovalent aromatic group having 6 to 10 carbon atoms, when there are a plurality of each. , And m is an integer of 1 to 200. The resin composition according to any one of claims 1 to 4, which has a structure represented by
  6.  前記ポリイミド前駆体が、ピロメリット酸二無水物を含むテトラカルボン酸二無水物とジアミンとの共重合体である、請求項1~5のいずれか一項に記載の樹脂組成物。 The resin composition according to any one of claims 1 to 5, wherein the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride containing pyromellitic dianhydride and diamine.
  7.  前記ポリイミド前駆体が、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物を含むテトラカルボン酸二無水物とジアミンとの共重合体である、請求項1~6のいずれか一項に記載の樹脂組成物。 The copolymer according to any one of claims 1 to 6, wherein the polyimide precursor is a copolymer of tetracarboxylic acid dianhydride containing 3,3 ', 4,4'-biphenyltetracarboxylic acid dianhydride and diamine. The resin composition as described in a term.
  8.  前記ポリイミド前駆体が、テトラカルボン酸二無水物とジアミンとの共重合体であり、 前記テトラカルボン酸二無水物が、ピロメリット酸二無水物及び3,3’,4,4’-ビフェニルテトラカルボン酸二無水物を、前記ピロメリット酸二無水物と前記3,3’,4,4’-ビフェニルテトラカルボン酸二無水物とのモル比20:80~80:20で含む、請求項1~7のいずれか一項に記載の樹脂組成物。 The polyimide precursor is a copolymer of tetracarboxylic dianhydride and diamine, and the tetracarboxylic dianhydride is pyromellitic dianhydride and 3,3 ', 4,4'-biphenyltetra The carboxylic acid dianhydride is contained at a molar ratio of 20:80 to 80:20 of the pyromellitic dianhydride and the 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride. The resin composition according to any one of to 7.
  9.  前記ポリイミド前駆体が、テトラカルボン酸二無水物と、4,4’-ジアミノジフェニルスルホン、3,3’-ジアミノジフェニルスルホン、2,2’-ビス(トリフルオロメチル)ベンジジン及び9,9-ビス(4-アミノフェニル)フルオレンからなる群から選択される1つ以上のジアミンとの共重合体である、請求項1~8のいずれか一項に記載の樹脂組成物。 The polyimide precursor includes tetracarboxylic acid dianhydride, 4,4′-diaminodiphenyl sulfone, 3,3′-diaminodiphenyl sulfone, 2,2′-bis (trifluoromethyl) benzidine and 9,9-bis The resin composition according to any one of claims 1 to 8, which is a copolymer with one or more diamines selected from the group consisting of (4-aminophenyl) fluorene.
  10.  前記ポリイミド前駆体の重量平均分子量が160,000~220,000である、請求項1~9のいずれか一項に記載の樹脂組成物。 The resin composition according to any one of claims 1 to 9, wherein the weight average molecular weight of the polyimide precursor is 160,000 to 220,000.
  11.  前記樹脂組成物は、フレキシブルデバイス用の樹脂組成物である、請求項1~10のいずれか一項に記載の樹脂組成物。 The resin composition according to any one of claims 1 to 10, wherein the resin composition is a resin composition for a flexible device.
  12.  前記樹脂組成物は、フレキシブルディスプレイ用の樹脂組成物である、請求項1~11のいずれか一項に記載の樹脂組成物。 The resin composition according to any one of claims 1 to 11, wherein the resin composition is a resin composition for a flexible display.
  13.  請求項1~12のいずれか一項に記載の樹脂組成物の硬化物であるポリイミドフィルム。 A polyimide film which is a cured product of the resin composition according to any one of claims 1 to 12.
  14.  膜厚10μm換算での厚み方向レタデーション(Rth)が300以下であり、及び/又は、膜厚10μm換算での黄色度(YI)が20以下である、請求項13に記載のポリイミドフィルム。 The polyimide film according to claim 13, wherein retardation in a thickness direction (Rth) in terms of a film thickness of 10 μm is 300 or less and / or a yellowness (YI) in terms of a film thickness of 10 μm is 20 or less.
  15.  請求項13又は14に記載のポリイミドフィルムを含むフレキシブルデバイス。 A flexible device comprising the polyimide film according to claim 13 or 14.
  16.  請求項13又は14に記載のポリイミドフィルムを含むフレキシブルディスプレイ。 A flexible display comprising the polyimide film according to claim 13 or 14.
  17.  前記ポリイミドフィルムは、前記フレキシブルディスプレイを外部から観察した際に視認される箇所に配置されている、請求項16に記載のフレキシブルディスプレイ。 The flexible display according to claim 16, wherein the polyimide film is disposed at a location that is viewed when the flexible display is observed from the outside.
  18.  支持体の表面上に、請求項1~12のいずれか一項に記載の樹脂組成物を塗布する塗布工程と、
     前記樹脂組成物を加熱してポリイミドフィルムを形成する膜形成工程と、
     前記ポリイミドフィルムを前記支持体から剥離する剥離工程と、を含む、ポリイミドフィルムの製造方法。
    An applying step of applying the resin composition according to any one of claims 1 to 12 on the surface of a support;
    A film forming step of heating the resin composition to form a polyimide film;
    And a peeling step of peeling the polyimide film from the support.
  19.  前記塗布工程は、前記樹脂組成物をスリットコートすることを含む、請求項18に記載のポリイミドフィルムの製造方法。 The method for producing a polyimide film according to claim 18, wherein the applying step includes slit coating the resin composition.
  20.  前記式(1)中のR1の少なくとも1つが、下記式(2):
    Figure JPOXMLDOC01-appb-C000004
    で表される基である、請求項19に記載のポリイミドフィルムの製造方法。
    At least one of R 1 in the formula (1) is represented by the following formula (2):
    Figure JPOXMLDOC01-appb-C000004
    The manufacturing method of the polyimide film of Claim 19 which is group represented by these.
  21.  前記ポリイミド前駆体が、下記式(3):
    Figure JPOXMLDOC01-appb-C000005
    {式中、R3及びR4の各々は、複数ある場合それぞれ独立に、炭素数1~5の1価の脂肪族炭化水素基、又は炭素数6~10の1価の芳香族基を示し、そしてmは、1~200の整数である。}で表される構造を有する、請求項19又は20に記載のポリイミドフィルムの製造方法。
    The polyimide precursor is represented by the following formula (3):
    Figure JPOXMLDOC01-appb-C000005
    [Wherein, each of R 3 and R 4 independently represents a monovalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, or a monovalent aromatic group having 6 to 10 carbon atoms, when there are a plurality of each. , And m is an integer of 1 to 200. The manufacturing method of the polyimide film of Claim 19 or 20 which has a structure represented by}.
  22.  前記剥離工程に先立って、前記支持体側から前記ポリイミドフィルムにレ-ザ-を照射する照射工程を更に含む、請求項18~21のいずれか一項に記載のポリイミドフィルムの製造方法。 The method for producing a polyimide film according to any one of claims 18 to 21, further comprising an irradiation step of irradiating a laser onto the polyimide film from the support side prior to the peeling step.
  23.  支持体の表面上に、請求項1~12のいずれか一項に記載の樹脂組成物を塗布する塗布工程と、
     前記樹脂組成物を加熱してポリイミドフィルムを形成する膜形成工程と、
     前記ポリイミドフィルム上に素子を形成する素子形成工程と、
     前記素子が形成された前記ポリイミドフィルムを前記支持体から剥離する剥離工程と、を含むディスプレイの製造方法。
    An applying step of applying the resin composition according to any one of claims 1 to 12 on the surface of a support;
    A film forming step of heating the resin composition to form a polyimide film;
    An element forming step of forming an element on the polyimide film;
    And a peeling step of peeling the polyimide film on which the element is formed from the support.
  24.  前記塗布工程は、前記樹脂組成物をスリットコートすることを含む、請求項23に記載のディスプレイの製造方法。 The method for manufacturing a display according to claim 23, wherein the applying step comprises slit coating the resin composition.
  25.  前記ディスプレイを外部から観察した際に視認される箇所に前記ポリイミドフィルムを配置する、請求項23又は24に記載のディスプレイの製造方法。 The method for manufacturing a display according to claim 23, wherein the polyimide film is disposed at a position where the display is viewed when the display is observed from the outside.
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