WO2019142256A1 - Electronic module - Google Patents
Electronic module Download PDFInfo
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- WO2019142256A1 WO2019142256A1 PCT/JP2018/001167 JP2018001167W WO2019142256A1 WO 2019142256 A1 WO2019142256 A1 WO 2019142256A1 JP 2018001167 W JP2018001167 W JP 2018001167W WO 2019142256 A1 WO2019142256 A1 WO 2019142256A1
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- substrate
- exposed
- position corresponding
- side region
- exposed portion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
Definitions
- the present invention relates to an electronic module including an electronic element in a sealing portion and having a heat dissipation layer.
- An electronic module in which a plurality of electronic elements are provided in a sealing resin is conventionally known (see, for example, JP-A-2014-45157). There is a need for more electronic devices in such electronic modules.
- the size in the plane direction of the first substrate and the second substrate is increased.
- the first substrate and the second substrate may be warped in the heat treatment process.
- a first insulating substrate, a first conductor layer provided on the mounting surface of the first insulating substrate, a first power device provided on the first conductor layer, and a first power device connected A first member having one connection portion, a second insulating substrate, a second conductor layer provided on the mounting surface of the second insulating substrate, and a second power device provided in the second conductor layer
- the first power device and the second power device are disposed to face each other, and are connected to each other by a conductor post.
- the present invention has been made in view of such a point, and provides an electronic module capable of preventing distortion in a substrate, in particular, distortion of the substrate starting from a connecting body such as a conductor post.
- the electronic module according to the invention is The first heat radiation layer, A first substrate provided on one side of the first heat radiation layer; A first electronic element provided on one side of the first substrate; A second electronic device provided on one side of the first electronic device; A second substrate provided on one side of the second electronic device; A second heat dissipation layer provided on one side of the second substrate; A sealing portion for sealing at least the first electronic element and the second electronic element; A connector provided between the first electronic device and the second electronic device or between the second electronic device and the second substrate; Equipped with The first heat dissipation layer has a first exposed portion to which the first substrate is exposed at a position corresponding to the other side area of the connection body, or the second heat dissipation layer corresponds to one side area of the connection body It may have a 2nd exposure part to which the 2nd substrate is exposed in a position.
- the first exposed portion includes only a part of the position corresponding to the other side region of the connector, or
- the second exposed portion may include only a part of the position corresponding to the one side region of the connection body.
- the first exposed portion includes all of the positions corresponding to the other side region of the connector, or
- the second exposed portion may include all of the positions corresponding to the one side region of the connection body.
- the first exposed portion includes a peripheral edge of a position corresponding to the other side region of the connector, or
- the second exposed portion may include a peripheral edge at a position corresponding to the one side region of the connection body.
- connection body is a first connection body provided between the first electronic element and the second electronic element, and a second connection body provided between the second electronic element and the second substrate.
- the first heat dissipation layer has a first exposed portion at which the first substrate is exposed at a position corresponding to the other side region of the first connection body, or the second heat dissipation layer is on one side of the second connection body
- connection body includes a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
- the first heat dissipation layer has a first exposed portion where the first substrate is exposed at all of the positions corresponding to the other side region of the pillar portion, or the second heat dissipation layer is formed on one side region of the pillar portion
- the second substrate may have a second exposed portion where the second substrate is exposed at all of the corresponding positions.
- connection body includes a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
- the first heat dissipation layer has a first exposed portion where the first substrate is exposed at the periphery of a position corresponding to the other side region of the pillar portion, or the second heat dissipation layer is formed on one side region of the pillar portion It may have a 2nd exposure part which the 2nd substrate exposes in the circumference of a corresponding position.
- the first substrate is exposed in the other side region of the connection body to which heat is transmitted in the first heat dissipation layer, or the second substrate is exposed to the one side area of the connection body in which heat is easily transmitted
- substrate exposes is employ
- FIG. 1 is a side sectional view of an electronic module that can be used in the first embodiment of the present invention.
- FIG. 2 is a plan view of an electronic module that can be used in the first embodiment of the present invention, and is a plan view showing the relationship between the second connection body and the second exposed portion.
- FIG. 3 is an aspect different from the aspect shown in FIG. 2 and is a plan view of an electronic module that can be used in the first embodiment of the present invention, wherein the relationship between the second connector and the second exposed portion It is the top view which showed.
- FIG. 4 is an aspect different from the aspect shown in FIGS.
- FIG. 2 and 3 is a plan view of an electronic module that can be used in the first embodiment of the present invention, wherein the second connecting member and the second exposed portion It is the top view which showed the relationship between and.
- FIG. 5 is a plan view of an electronic module that can be used in the first embodiment of the present invention, and is a plan view showing the relationship between the first connector and the second exposed portion.
- FIG. 6 is an aspect different from the aspect shown in FIG. 5 and is a plan view of an electronic module that can be used in the first embodiment of the present invention, wherein the relationship between the first connector and the second exposed portion It is the top view which showed.
- FIG. 7 is an aspect different from the aspect shown in FIGS.
- FIG. 5 and 6 is a plan view of an electronic module that can be used in the first embodiment of the present invention, wherein the first connecting member and the second exposed portion It is the top view which showed the relationship between and.
- FIG. 8 is an aspect different from the aspect shown in FIGS. 2 to 4 and is a plan view of an electronic module that can be used in the first embodiment of the present invention, wherein the second connecting member and the second exposed portion It is the top view which showed the relationship between and.
- FIG. 9 is an aspect different from the aspect shown in FIG. 2 to FIG. 4 and FIG. 8 and is a plan view of an electronic module that can be used in the first embodiment of the present invention. It is the top view which showed the relationship with 2 exposure parts.
- FIG. 10 is an aspect different from the aspect shown in FIGS.
- FIG. 5 to 7 is a plan view of an electronic module that can be used in the first embodiment of the present invention, wherein the first connecting member and the second exposed portion It is the top view which showed the relationship between and.
- FIG. 11 is an aspect different from the aspect shown in FIG. 5 to FIG. 7 and FIG. 10, and is a plan view of an electronic module which can be used in the first embodiment of the present invention. It is the top view which showed the relationship with 2 exposure parts.
- FIG. 12 is a plan view of an electronic module that can be used in the first embodiment of the present invention, showing a mode in which a plurality of second exposed portions are provided.
- FIG. 13 is a side sectional view of an electronic module that can be used in the second embodiment of the present invention.
- FIG. 14 is a plan view of an electronic module that can be used in the second embodiment of the present invention, and is a plan view showing the relationship between the first connector and the first exposed portion.
- FIG. 15 is an aspect different from the aspect shown in FIG. 14 and is a plan view of an electronic module that can be used in the second embodiment of the present invention, wherein the relationship between the first connector and the first exposed portion It is the top view which showed.
- FIG. 16 is an aspect different from the aspect shown in FIGS. 14 and 15, and is a plan view of an electronic module that can be used in the second embodiment of the present invention, wherein the first connecting member and the first exposed portion It is the top view which showed the relationship between and.
- FIG. 15 is an aspect different from the aspect shown in FIG. 14 and is a plan view of an electronic module that can be used in the second embodiment of the present invention, wherein the first connecting member and the first exposed portion It is the top view which showed the relationship between and.
- FIG. 16 is an aspect different from the aspect shown in FIGS. 14 and 15,
- FIG. 17 is a plan view of an electronic module that can be used in the second embodiment of the present invention, and is a plan view showing the relationship between the second connection body and the first exposed portion.
- FIG. 18 is a plan view different from the mode shown in FIG. 17 and is a plan view of an electronic module that can be used in the second embodiment of the present invention, wherein the relationship between the second connection body and the first exposed portion It is the top view which showed.
- FIG. 19 is an aspect different from the aspect shown in FIGS. 17 and 18, and is a plan view of an electronic module which can be used in the second embodiment of the present invention, wherein the second connecting member and the first exposed portion It is the top view which showed the relationship between and.
- FIG. 20 is an aspect different from the aspect shown in FIGS.
- FIG. 14 to 16 is a plan view of an electronic module that can be used in the second embodiment of the present invention, wherein the first connecting member and the first exposed portion It is the top view which showed the relationship between and.
- FIG. 21 is an aspect different from the aspect shown in FIG. 14 to FIG. 16 and FIG. 20, and is a plan view of an electronic module that can be used in the first embodiment of the present invention. It is the top view which showed the relationship with one exposure part.
- FIG. 22 is an aspect different from the aspect shown in FIGS. 17 to 19 and is a plan view of an electronic module that can be used in the second embodiment of the present invention, wherein the second connecting member and the first exposed portion It is the top view which showed the relationship between and.
- FIG. 23 is an aspect different from the aspect shown in FIG. 17 to FIG.
- FIG. 19 and FIG. 22 is a plan view of an electronic module that can be used in the second embodiment of the present invention. It is the top view which showed the relationship with one exposure part.
- FIG. 24 is a plan view of an electronic module that can be used in the second embodiment of the present invention, showing a mode in which a plurality of first exposed portions are provided.
- first direction the horizontal direction
- second direction the front and back direction of the paper surface
- in-plane direction An in-plane direction including the second direction and the third direction
- plane view when viewed from one side to the other side, referred to as “plan view”, viewed from the other side to the one side.
- bottom view When it is called "bottom view”.
- the electronic module includes a first heat dissipation layer 19, a first substrate 11 provided on one side of the first heat dissipation layer 19, and a first conductor provided on one side of the first substrate 11.
- a sealing portion 90 made of a sealing resin or the like for sealing the element 13 and the second electronic element 23 may be included.
- Both or any one of the first conductor layer 12 and the second conductor layer 22 may be connected to the terminal portion 100, and the tip end side of the terminal portion 100 is exposed to the outside of the sealing portion 90, and the control substrate etc. It may be connectable to an external device of The terminal unit 100 may have a first terminal unit 110 and a second terminal unit 120.
- the first terminal portion 110 includes a first terminal portion base end portion 111, a first terminal portion outer portion 113 exposed at least partially from the sealing portion 90, a first terminal portion base end portion 111, and a first terminal. It may be provided between the part outer direction part 113, and may have the 1st bending part 112 bent on the other side by the 1st terminal-part proximal-end part 111 side.
- the second terminal portion 120 includes a second terminal portion base end portion 121, a second terminal portion outer portion 123 exposed at least partially from the sealing portion 90, a second terminal portion base end portion 121, and a second terminal. It may be provided between the part outer direction part 123, and may have the 2nd bending part 122 bent to one side by the 2nd terminal part base end part 121 side.
- a non-connecting conductor layer 50 which is not electrically connected to the first electronic element 13 and the second electronic element 23, which is pressed by a mold when resin sealing is provided Also good (see Figure 2).
- the electronic module of the present embodiment may have connectors 60 and 70.
- the connection bodies 60 and 70 are provided on the opposite side of the first connection body 60 provided between the first electronic element 13 and the second electronic element 23 and the first connection body 60 of the second electronic element 23.
- the second connector 70 may be included.
- the present invention an embodiment in which the first connection body 60 and the second connection body 70 are provided will be described, but the present invention is not limited to such an aspect, and the first connection body 60 and the second connection body 70 are described. Only one of them may be provided.
- the connecting members 60 and 70 may have head portions 61 and 71 and pillar portions 62 and 72 extending from the head portions 61 and 71 in the thickness direction (first direction) of the head portions 61 and 71.
- the first connecting member 60 includes the first head portion 61 and the thickness direction of the first head portion 61 from the first head portion 61.
- the first post portion 62 extending in the
- the second connection body 70 may have a second head portion 71 and a second pillar portion 72 extending from the second head portion 71 in the thickness direction of the second head portion 71.
- the first heat radiation layer 19 may be configured not to expose the first substrate 11 at a position corresponding to the other side region of the connection body 60, 70.
- the “position corresponding to the one side area” of the connection body 60, 70 is a position (area) included when a straight line is drawn along the first direction from the connection body 60, 70 to the one side, and the connection body
- the “position corresponding to the other side area” of 60 and 70 is a position (area) included when a straight line is drawn along the first direction from the connecting body 60 and 70 to the other side.
- connection body 60 is a plan view (or bottom surface)
- Connection means that the connecting members 60 and 70 and the second exposed portion 140 overlap with each other at least in part, and the first heat dissipation layer 19 is connected to the connecting members 60 and 70 as in the second embodiment described later.
- the second exposed portion 140 may include only a part of the position corresponding to the one side region of the connecting members 60 and 70. In other words, in plan view, the second exposed portion 140 is only a portion of the connecting members 60 and 70. May be included. Thus, when including only a part of the position corresponding to the one side area of the connectors 60 and 70, the second exposed portion 140 includes the periphery of the position corresponding to the one side area of the connectors 60 and 70. May be provided. Moreover, it is not restricted to such an aspect, The 2nd exposure part 140 may be made to include all the positions corresponding to the one side area
- the second exposed portion 140 may expose the surface on one side (upper surface in FIG. 1) of the second substrate 21 at all or part of the position corresponding to the one side region of the first column portion 62, or The surface on one side of the second substrate 21 may be exposed at all or part of the position corresponding to the one side region of the one head portion 61. Alternatively, the surface on one side of the second substrate 21 may be exposed at all or part of the position corresponding to the one side region of the second pillar portion 72, or corresponds to the one side region of the second head portion 71. The surface on one side of the second substrate 21 may be exposed at all or part of the position.
- one side of the second substrate 21 is a part of the position corresponding to one side region of the second column portion 72 and one side region of the second head portion 71.
- the top surface (upper surface in FIG. 1) is exposed.
- the second exposed portion 140 is provided so as to include all of the second pillar portion 72 and a portion of the second head portion 71 in a plan view.
- one side of the second substrate 21 is a part of the position corresponding to one side area of the first column portion 62 and one side area of the first head part 61.
- the top surface (upper surface in FIG. 1) is exposed.
- the second exposed portion 140 is provided so as to include all of the first column portion 62 and a portion of the first head portion 61 in plan view.
- the second exposed portion 140 When the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the connection body 60, 70, the second exposed portion 140 corresponds to the one side region of the first column portion 62. It may be provided to include the peripheral edge of the position, or may be provided to include the peripheral edge of the position corresponding to the one side region of the first head portion 61. In addition, the second exposed portion 140 may be provided so as to include the peripheral edge of the position corresponding to the one side region of the second column 72, or the peripheral edge of the position corresponding to the one side region of the second head portion 71. May be provided.
- the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the second pillar portion 72, and the second exposed portion 140 is provided at the center of the one side region of the second pillar portion 72 The surface on one side of the substrate 21 is not exposed.
- the second exposed portion 140 is provided so as to include the periphery of the second column 72 and not include the center of the second column 72 in a plan view.
- the second exposed portion 140 is provided so as to include the periphery of the position corresponding to the one side region of the second head portion 71, and the center of the one side region of the second head portion 71 and the second The surface on one side of the second substrate 21 is not exposed in the one side region of the column portion 72.
- the second exposed portion 140 includes the periphery of the second head portion 71 and does not include the center of the second head portion 71 and the second pillar portion 72 in plan view. Is provided.
- the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the first pillar portion 62, and the second exposed portion 140 is second at the center of the one side region of the first pillar portion 62.
- the surface on one side of the substrate 21 is not exposed.
- the second exposed portion 140 is provided so as to include the peripheral edge of the first pillar 62 and not include the center of the first pillar 62 in a plan view.
- the second exposed portion 140 is provided so as to include the periphery of the position corresponding to the one side region of the first head portion 61, and the center of the one side region of the first head portion 61 and the first The surface on one side of the second substrate 21 is not exposed in the one side region of the column portion 62.
- the second exposed portion 140 includes the periphery of the first head portion 61 and does not include the center of the first head portion 61 and the first pillar portion 62 in plan view. Is provided.
- a plurality of connectors 60 and 70 may be provided in the in-plane direction.
- the second exposed portion 140 corresponding to each of the connectors 60 and 70 may be provided.
- the present invention is not limited to such an aspect, and the second exposed portion 140 corresponding to only a part of the connectors 60 and 70 may be provided.
- first conductor layers 12 may be provided on one side of the first substrate 11.
- Each or any one of the first electronic element 13 and the second electronic element 23 may be a switching element or a control element.
- a MOSFET, an IGBT or the like may be used as the switching element.
- Each of the first electronic element 13 and the second electronic element 23 may be composed of a semiconductor element, and the semiconductor material may be silicon, silicon carbide, gallium nitride or the like.
- a conductive adhesive such as solder is provided between the first electronic element 13 and the first connection body 60, and the first electronic element 13 and the first connection body 60 are connected via the conductive adhesive. May be connected.
- a conductive adhesive such as solder is provided between the first connection body 60 and the second electronic element 23, and the first connection body 60 and the second electronic element 23 are conductively bonded. It may be connected via an agent.
- a conductive adhesive such as a solder is provided between the second electronic element 23 and the second connection body 70, and the second electronic element 23 and the second connection body 70 have a conductive adhesive. It may be connected via an agent.
- an insulating substrate such as a ceramic substrate or an insulating resin layer can be employed.
- a material having Ag or Cu as a main component can also be used.
- a metal such as Cu can be used as a material of the first connection body 60 and the second connection body 70.
- a metal substrate subjected to circuit patterning can be used as the substrates 11 and 21. In this case, the substrates 11 and 21 also serve as the conductor layers 12 and 22, respectively.
- the first electronic element 13 is a switching element such as a MOSFET
- the first gate electrode 13 g and the first source electrode 13 s are provided on the surface (surface on one side) of the first connection body 60. May be provided.
- the second electronic element 23 is a switching element such as a MOSFET, even if the second gate electrode 23g and the second source electrode 23s are provided on the surface (surface on one side) on the second connection body 70 side. Good.
- the second connection body 70 may be connected to the second source electrode 23s of the second electronic element 23 via a conductive adhesive.
- a second drain electrode in which the first connection body 60 is provided on the surface (the surface on the other side) of the first source electrode 13 s of the first electronic element 13 and the second connection body 70 of the second electronic element 23. 23 d may be connected via a conductive adhesive.
- a first drain electrode 13d is provided on the surface of the first electronic element 13 opposite to the first connection body 60 (the surface on the other side), and the first drain electrode 13d includes the first conductor layer 12 and a conductive adhesive. It may be connected via.
- the first gate electrode 13 g may be connected to the connector 30 via a conductive adhesive, and the connector 30 may be connected to the first conductor layer 12 via a conductive adhesive.
- the second gate electrode 23 g may be connected to the connector 40 via a conductive adhesive, and the connector 40 may be connected to the second conductor layer 22 via a conductive adhesive.
- the bonding between the terminal portion 100 and the conductor layers 12 and 22 may be performed not only by using a conductive adhesive such as solder, but also by laser welding or ultrasonic bonding.
- the in-plane of the connection body 60, 70 is employed. It is possible to prevent the second substrate 21 from being distorted from the position in the direction.
- the first heat radiation layer 19 is configured not to expose the first substrate 11 at a position corresponding to the other side region of the connection body 60, 70, a mold is formed via the non-connection conductor layer 50. It is possible to suppress the reduction of the heat radiation effect by reducing the area (area) of the first heat radiation layer 19 on the side of the first substrate 11 in which distortion is unlikely to occur by pressing.
- the second exposed portion 140 exposes the surface on one side of the second substrate 21 at all (see FIG. 3) or a part (see FIGS. 2 and 4) of the position corresponding to the one side region of the second head portion 71. It is expected that the second substrate 21 can be prevented from being distorted by exposing the surface on one side of the second substrate 21 in the region corresponding to the second connection body 70 to which heat is easily transmitted. it can.
- a mode in which the second exposed portion 140 exposes the surface on one side of the second substrate 21 at all (see FIG. 2) or a part (see FIG. 4) of the position corresponding to the one side region of the second column 72 When employed, it is expected that the second substrate 21 can be efficiently prevented from being distorted by exposing the surface on one side of the second substrate 21 particularly in the region corresponding to the second column portion 72 where heat is easily transmitted. it can.
- the second substrate 21 is distorted while the reduction of the heat radiation effect due to the reduction of the area of the second heat dissipation layer 29 is reduced. Can be prevented efficiently.
- the second exposed portion 140 exposes the surface on one side of the second substrate 21 at all (see FIG. 6) or a portion (see FIGS. 5 and 7) of the position corresponding to the one side region of the first head portion 61.
- the second substrate 21 it is expected that the second substrate 21 can be prevented from being distorted by exposing the surface on one side of the second substrate 21 in the region corresponding to the first connection body 60 where heat is easily transmitted. it can.
- a mode in which the second exposed portion 140 exposes the surface on one side of the second substrate 21 at all (see FIG. 5) or a part (see FIG. 7) of the positions corresponding to the one side region of the first column portion 62 When adopted, it is expected that the second substrate 21 can be efficiently prevented from being distorted by exposing the surface on one side of the second substrate 21 particularly in the region corresponding to the first column portion 62 where heat is easily transmitted. it can.
- the second substrate 21 is distorted while the reduction of the heat radiation effect due to the reduction of the area of the second heat dissipation layer 29 is reduced. Can be prevented efficiently.
- the distortion of the second substrate 21 can be eliminated in some cases by exposing the surface on one side of the second substrate 21 in the peripheral region of the connecting members 60 and 70.
- the second exposed portion 140 is provided to include the periphery of the position corresponding to the one side region of the second head portion 71, and the position corresponding to the one side region of the second head portion 71. It can be expected that the second substrate 21 can be prevented from being distorted by adopting a mode in which the surface on one side of the second substrate 21 is exposed at the peripheral edge of the second substrate 21.
- the second exposed portion 140 is provided to include the periphery of a position corresponding to one side region of the second column portion 72 to which heat is particularly easily transmitted.
- the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the first head portion 61, and the position corresponding to the one side region of the first head portion 61.
- the second exposed portion 140 is provided to include the periphery of the position corresponding to the one side region of the first pillar portion 62 to which heat is particularly easily transmitted, and one side of the first pillar portion 62
- the second substrate 21 can be prevented from being distorted.
- the first heat radiation layer 19 has a first exposed portion 150 that exposes the other side surface of the first substrate 11 at a position corresponding to the other side region of the connecting members 60 and 70.
- any aspect described in the first embodiment can be adopted.
- the members described in the first embodiment will be described using the same reference numerals.
- the first exposed portion 150 may include only a part of the position corresponding to the other side area of the connection body 60, 70.
- the first exposed portion 150 when including only a part of the position corresponding to the other side region of the connectors 60, 70, the first exposed portion 150 includes the periphery of the position corresponding to the other side region of the connectors 60, 70. May be provided.
- the 1st exposure part 150 may be made to include all the positions corresponding to the other side area
- the first exposed portion 150 may expose the other side surface (the lower surface in FIG. 13) of the first substrate 11 at all or part of the position corresponding to the other side region of the first column portion 62, or The surface on the other side of the first substrate 11 may be exposed at all or part of the position corresponding to the other side region of the one head portion 61. In addition, the surface on the other side of the first substrate 11 may be exposed at all or a part of the position corresponding to the other side region of the second pillar portion 72, or corresponds to the other side region of the second head portion 71 The other surface of the second substrate 21 may be exposed at all or part of the position.
- one side of the second substrate 21 is a part of the position corresponding to one side area of the first column portion 62 and is one part of the position corresponding to one side area of the first head portion 61.
- the lower surface of FIG. 13 (the lower surface in FIG. 13) is exposed.
- the first exposed portion 150 is provided so as to include the whole of the first column portion 62 and a portion of the first head portion 61 in a bottom view.
- one side of the second substrate 21 is a part of the position corresponding to one side area of the second column part 72 and the one side area of the second head part 71.
- the lower surface of FIG. 13 (the lower surface in FIG. 13) is exposed.
- the first exposed portion 150 is provided so as to include all of the second column portion 72 and include a portion of the second head portion 71 in bottom view.
- the first exposed portion 150 When the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the connector 60, 70, the first exposed portion 150 corresponds to the other side region of the first column portion 62. It may be provided to include the peripheral edge of the position, or may be provided to include the peripheral edge of the position corresponding to the other side region of the first head portion 61. In addition, the first exposed portion 150 may be provided so as to include the periphery of the position corresponding to the other side region of the second pillar portion 72, or the position corresponding to the other side region of the second head portion 71. It may be provided to include the peripheral edge.
- the first exposed portion 150 is provided so as to include the periphery of the position corresponding to the other side region of the first pillar portion 62, and the first exposed portion 150 is first at the center of the other side region of the first pillar portion 62.
- the other side of the substrate 11 is not exposed.
- the first exposed portion 150 is provided so as to include the peripheral edge of the first pillar portion 62 and not include the center of the first pillar portion 62 in bottom view.
- the first exposed portion 150 is provided so as to include the periphery of the position corresponding to the other side region of the first head portion 61, and the center of the other side region of the first head portion 61 and the first The other side surface of the first substrate 11 is not exposed in the other side region of the column portion 62.
- the first exposed portion 150 includes the periphery of the first head portion 61 and does not include the center of the first head portion 61 and the first column portion 62 in a bottom view. Is provided.
- the first exposed portion 150 is provided to include the peripheral edge of the position corresponding to the other side region of the second pillar portion 72, and the first exposed portion 150 is first at the center of the other side region of the second pillar portion 72.
- the other side of the substrate 11 is not exposed.
- the first exposed portion 150 is provided so as to include the periphery of the second column 72 and not include the center of the second column 72 in a bottom view.
- the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the second head portion 71, and the center of the one side region of the second head portion 71 and the second In the other side region of the column portion 72, the surface on one side of the second substrate 21 is not exposed.
- the first exposed portion 150 includes the periphery of the second head portion 71 and does not include the center of the second head portion 71 and the second pillar portion 72 in a bottom view. Is provided.
- the first exposed portion 150 exposes the other surface of the first substrate 11 at all (see FIG. 15) or a portion (see FIGS. 14 and 16) of the position corresponding to the other side region of the first head portion 61.
- the first substrate 11 can be prevented from being distorted by exposing the other surface of the first substrate 11 in the region corresponding to the first connection body 60 where heat is easily transmitted. it can.
- the first substrate 11 can be efficiently prevented from being distorted by exposing the surface on the other side of the first substrate 11 particularly in the region corresponding to the first column portion 62 where heat is easily transmitted. it can.
- the first exposed portion 150 exposes the other surface of the first substrate 11 at all (see FIG. 18) or a portion (see FIGS. 17 and 19) of the position corresponding to the other side region of the second head portion 71.
- the first substrate 11 it is expected that the first substrate 11 can be prevented from being distorted by exposing the other surface of the first substrate 11 in the region corresponding to the second connection body 70 where heat is easily transmitted it can.
- the first substrate 11 can be efficiently prevented from being distorted by exposing the surface on the other side of the first substrate 11 particularly in the region corresponding to the second column portion 72 where heat is easily transmitted. it can.
- the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the first head portion 61, and the position corresponding to the other side region of the first head portion 61 It can be expected that the first substrate 11 can be prevented from being distorted by adopting a mode in which the surface on the other side of the first substrate 11 is exposed at the peripheral edge of the first substrate 11. Further, as shown in FIG. 21,
- the first exposed portion 150 is provided to include the peripheral edge of the position corresponding to the other side region of the first pillar portion 62 to which heat is particularly easily transmitted, and the other side of the first pillar portion 62
- the first substrate 11 can be prevented from being distorted.
- the first exposed portion 150 is provided so as to include the periphery of the position corresponding to the other side region of the second head portion 71, and the position corresponding to the other side region of the second head portion 71.
- the first exposed portion 150 is provided to include the periphery of the position corresponding to the other side region of the second column 72 which is particularly easy to transmit heat, and the other side of the second column 72 By adopting a mode in which the surface on the other side of the first substrate 11 is exposed at the periphery of the position corresponding to the region, it can be expected that the first substrate 11 can be prevented from being distorted.
- first electronic element 13 and the second electronic element 23 are provided on the other side of the second substrate 21 with the non-connecting conductor layer 50 which is not electrically connected to be pressed by a mold. Good. By providing such a non-connecting conductor layer 50, warpage of the second substrate 21 can be prevented. Also, as shown in FIG. 24, a plurality of first exposed portions 150 may be provided.
- the first heat dissipation layer 19 has the first exposed portion 150 that exposes the first substrate 11 at a position corresponding to the other side region of the connecting members 60 and 70, and the second heat dissipation layer 29 is connected A second exposed portion 140 which exposes the second substrate 21 at a position corresponding to one side region of the body 60, 70 is provided.
- any of the aspects described in the above embodiments can be adopted. About the member demonstrated by said each embodiment, it demonstrates using the same code
- Various modes can be considered as a combination of the modes adopted for the first exposed portion 150 and the second exposed portion 140.
- the first exposed portion 150 is a first column portion
- the surface on the other side of the first substrate 11 may be exposed at a part of the position corresponding to the other side area of the surface 62.
- the first exposed portion 150 is the first head portion 61.
- the surface on the other side of the first substrate 11 may be exposed at all of the positions corresponding to the other side region of the substrate.
- the first exposed portion 150 of the first column portion 62 It may be provided to include the peripheral edge of the position corresponding to the other side region.
- the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the second head portion 71, and the first exposed portion 150 is at the position corresponding to the other side region of the first column portion 62.
- the other surface of the first substrate 11 may be exposed in all.
- the aspect adopted for the first exposed portion 150 and the second exposed portion 140 may be the same, and the second exposed portion 140 corresponds to the one side region of the second head portion 71 in all the first positions.
- the surface of the other side of the first substrate 11 may be exposed at all of the positions where the first exposed portion 150 corresponds to the other side region of the first head portion 61 while exposing the surface of the one side of the two substrates 21 .
- the second exposed portion 140 exposes the surface on one side of the second substrate 21 at a part of the position corresponding to the one side region of the second column portion 72
- the first exposed portion 150 corresponds to the first column portion 62.
- the surface on the other side of the first substrate 11 may be exposed at a part of the position corresponding to the other side region of the substrate.
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Abstract
This electronic module has: a first heat radiation layer 19; a first substrate 11; a first electronic element 13; a second electronic element 23; a second substrate 21; a second heat radiation layer 29; a sealing part 90; and connectors 60, 70 provided between the first electronic element 13 and the second electronic element 23 or between the second electronic element 23 and the second substrate 21. The first heat radiation layer 19 has a first exposure portion 150 which is at a position corresponding to another side region of the connectors 60, 70, and at which the first substrate 11 is exposed, or the second heat radiation layer 29 has a second exposure portion 140 which is at a position corresponding to one side region of the connectors 60, 70 and at which the second substrate 21 is exposed.
Description
本発明は、電子素子を封止部内に含み、放熱層を有する電子モジュールに関する。
The present invention relates to an electronic module including an electronic element in a sealing portion and having a heat dissipation layer.
複数の電子素子が封止樹脂内に設けられた電子モジュールが従来から知られている(例えば特開2014-45157号参照)。このような電子モジュールにおいて電子素子をより多くしたいニーズがある。
An electronic module in which a plurality of electronic elements are provided in a sealing resin is conventionally known (see, for example, JP-A-2014-45157). There is a need for more electronic devices in such electronic modules.
より多くの電子素子を設ける手段として、電子素子を層状に積み重ねていく態様を採用することが考えられる。その際には、電子素子(第一電子素子)の一方側(例えばおもて面側)に別の電子素子(第二電子素子)を設けることが考えられる。
As means for providing more electronic elements, it is conceivable to adopt an aspect in which the electronic elements are stacked in layers. In that case, it is conceivable to provide another electronic element (second electronic element) on one side (for example, the front surface side) of the electronic element (first electronic element).
さらに電子素子の数を増やすとなると、第一基板及び第二基板の面方向での大きさが大きくなってしまう。このように、第一基板及び第二基板の面方向の大きさが大きくなると、熱処理工程で第一基板及び第二基板が反ってしまうことがある。
When the number of electronic devices is further increased, the size in the plane direction of the first substrate and the second substrate is increased. As described above, when the size in the plane direction of the first substrate and the second substrate is increased, the first substrate and the second substrate may be warped in the heat treatment process.
他方、第一絶縁性基板と、第一絶縁性基板の搭載面に設けられた第一導体層と、第一導体層に設けられた第一パワーデバイスと、第一パワーデバイスに接続された第一接続部と、を有する第一部材と、第二絶縁性基板と、第二絶縁性基板の搭載面に設けられた第二導体層と、第二導体層に設けられた第二パワーデバイスと、第二パワーデバイスに接続された第二接続部と、を有する第二部材と、第一部材と第二部材との間で上下方向に延在する導体柱と、を有する半導体モジュールが国際公開公報2016/174698で提案されている。この態様では、第一パワーデバイスと第二パワーデバイスとが対向して配置されるとともに、導体柱で互いに接続されている。
On the other hand, a first insulating substrate, a first conductor layer provided on the mounting surface of the first insulating substrate, a first power device provided on the first conductor layer, and a first power device connected A first member having one connection portion, a second insulating substrate, a second conductor layer provided on the mounting surface of the second insulating substrate, and a second power device provided in the second conductor layer A semiconductor module having a second member having a second connection portion connected to the second power device, and a conductor post extending in the vertical direction between the first member and the second member; It is proposed in publication 2016/174698. In this aspect, the first power device and the second power device are disposed to face each other, and are connected to each other by a conductor post.
発明者が検討したところによると、封止樹脂を流し込む際等の熱処理工程において、熱が伝わりやすい箇所、国際公開公報2016/174698で言えば導体柱を起点として基板がひずむことが判明した。
According to the inventors of the present invention, it was found that in the heat treatment process when pouring the sealing resin, etc., the substrate is distorted starting from the place where the heat is easily transmitted, that is, the conductor column in International Publication No. 2016/174698.
本発明は、このような点を鑑みてなされたものであり、基板におけるひずみ、特に導体柱のような接続体を起点として基板がひずむことを防止できる電子モジュールを提供する。
The present invention has been made in view of such a point, and provides an electronic module capable of preventing distortion in a substrate, in particular, distortion of the substrate starting from a connecting body such as a conductor post.
[概念1]
本発明による電子モジュールは、
第一放熱層と、
前記第一放熱層の一方側に設けられた第一基板と、
前記第一基板の一方側に設けられた第一電子素子と、
前記第一電子素子の一方側に設けられた第二電子素子と、
前記第二電子素子の一方側に設けられた第二基板と、
前記第二基板の一方側に設けられた第二放熱層と、
少なくとも前記第一電子素子及び前記第二電子素子を封止する封止部と、
前記第一電子素子と前記第二電子素子との間又は前記第二電子素子と前記第二基板との間に設けられた接続体と、
を備え、
前記第一放熱層は前記接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有してもよい。 [Concept 1]
The electronic module according to the invention is
The first heat radiation layer,
A first substrate provided on one side of the first heat radiation layer;
A first electronic element provided on one side of the first substrate;
A second electronic device provided on one side of the first electronic device;
A second substrate provided on one side of the second electronic device;
A second heat dissipation layer provided on one side of the second substrate;
A sealing portion for sealing at least the first electronic element and the second electronic element;
A connector provided between the first electronic device and the second electronic device or between the second electronic device and the second substrate;
Equipped with
The first heat dissipation layer has a first exposed portion to which the first substrate is exposed at a position corresponding to the other side area of the connection body, or the second heat dissipation layer corresponds to one side area of the connection body It may have a 2nd exposure part to which the 2nd substrate is exposed in a position.
本発明による電子モジュールは、
第一放熱層と、
前記第一放熱層の一方側に設けられた第一基板と、
前記第一基板の一方側に設けられた第一電子素子と、
前記第一電子素子の一方側に設けられた第二電子素子と、
前記第二電子素子の一方側に設けられた第二基板と、
前記第二基板の一方側に設けられた第二放熱層と、
少なくとも前記第一電子素子及び前記第二電子素子を封止する封止部と、
前記第一電子素子と前記第二電子素子との間又は前記第二電子素子と前記第二基板との間に設けられた接続体と、
を備え、
前記第一放熱層は前記接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有してもよい。 [Concept 1]
The electronic module according to the invention is
The first heat radiation layer,
A first substrate provided on one side of the first heat radiation layer;
A first electronic element provided on one side of the first substrate;
A second electronic device provided on one side of the first electronic device;
A second substrate provided on one side of the second electronic device;
A second heat dissipation layer provided on one side of the second substrate;
A sealing portion for sealing at least the first electronic element and the second electronic element;
A connector provided between the first electronic device and the second electronic device or between the second electronic device and the second substrate;
Equipped with
The first heat dissipation layer has a first exposed portion to which the first substrate is exposed at a position corresponding to the other side area of the connection body, or the second heat dissipation layer corresponds to one side area of the connection body It may have a 2nd exposure part to which the 2nd substrate is exposed in a position.
[概念2]
本発明の概念1による電子モジュールにおいて、
前記第一露出部は前記接続体の他方側領域に対応する位置の一部だけを含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の一部だけを含んでもよい。 [Concept 2]
In an electronic module according toconcept 1 of the invention
The first exposed portion includes only a part of the position corresponding to the other side region of the connector, or
The second exposed portion may include only a part of the position corresponding to the one side region of the connection body.
本発明の概念1による電子モジュールにおいて、
前記第一露出部は前記接続体の他方側領域に対応する位置の一部だけを含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の一部だけを含んでもよい。 [Concept 2]
In an electronic module according to
The first exposed portion includes only a part of the position corresponding to the other side region of the connector, or
The second exposed portion may include only a part of the position corresponding to the one side region of the connection body.
[概念3]
本発明の概念1による電子モジュールにおいて、
前記第一露出部は前記接続体の他方側領域に対応する位置の全部を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の全部を含んでもよい。 [Concept 3]
In an electronic module according toconcept 1 of the invention
The first exposed portion includes all of the positions corresponding to the other side region of the connector, or
The second exposed portion may include all of the positions corresponding to the one side region of the connection body.
本発明の概念1による電子モジュールにおいて、
前記第一露出部は前記接続体の他方側領域に対応する位置の全部を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の全部を含んでもよい。 [Concept 3]
In an electronic module according to
The first exposed portion includes all of the positions corresponding to the other side region of the connector, or
The second exposed portion may include all of the positions corresponding to the one side region of the connection body.
[概念4]
本発明の概念1による電子モジュールにおいて、
前記第一露出部は前記接続体の他方側領域に対応する位置の周縁を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の周縁を含んでもよい。 [Concept 4]
In an electronic module according toconcept 1 of the invention
The first exposed portion includes a peripheral edge of a position corresponding to the other side region of the connector, or
The second exposed portion may include a peripheral edge at a position corresponding to the one side region of the connection body.
本発明の概念1による電子モジュールにおいて、
前記第一露出部は前記接続体の他方側領域に対応する位置の周縁を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の周縁を含んでもよい。 [Concept 4]
In an electronic module according to
The first exposed portion includes a peripheral edge of a position corresponding to the other side region of the connector, or
The second exposed portion may include a peripheral edge at a position corresponding to the one side region of the connection body.
[概念5]
本発明の概念1乃至4による電子モジュールにおいて、
前記接続体が複数設けられ、
前記接続体の各々に対応する露出部が設けられてもよい。 [Concept 5]
In an electronic module according to theconcepts 1 to 4 of the invention,
A plurality of the connectors are provided,
An exposed portion corresponding to each of the connectors may be provided.
本発明の概念1乃至4による電子モジュールにおいて、
前記接続体が複数設けられ、
前記接続体の各々に対応する露出部が設けられてもよい。 [Concept 5]
In an electronic module according to the
A plurality of the connectors are provided,
An exposed portion corresponding to each of the connectors may be provided.
[概念6]
本発明の概念1乃至5による電子モジュールにおいて、
前記接続体は、前記第一電子素子と前記第二電子素子との間に設けられた第一接続体と、前記第二電子素子と前記第二基板との間に設けられた第二接続体とを有し、
前記第一放熱層は前記第一接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記第二接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有してもよい。 [Concept 6]
In an electronic module according to theconcepts 1 to 5 of the invention,
The connection body is a first connection body provided between the first electronic element and the second electronic element, and a second connection body provided between the second electronic element and the second substrate. Have and
The first heat dissipation layer has a first exposed portion at which the first substrate is exposed at a position corresponding to the other side region of the first connection body, or the second heat dissipation layer is on one side of the second connection body You may have a 2nd exposure part which the said 2nd board | substrate exposes in the position corresponding to an area | region.
本発明の概念1乃至5による電子モジュールにおいて、
前記接続体は、前記第一電子素子と前記第二電子素子との間に設けられた第一接続体と、前記第二電子素子と前記第二基板との間に設けられた第二接続体とを有し、
前記第一放熱層は前記第一接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記第二接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有してもよい。 [Concept 6]
In an electronic module according to the
The connection body is a first connection body provided between the first electronic element and the second electronic element, and a second connection body provided between the second electronic element and the second substrate. Have and
The first heat dissipation layer has a first exposed portion at which the first substrate is exposed at a position corresponding to the other side region of the first connection body, or the second heat dissipation layer is on one side of the second connection body You may have a 2nd exposure part which the said 2nd board | substrate exposes in the position corresponding to an area | region.
[概念7]
本発明の概念1乃至6による電子モジュールにおいて、
前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の全部で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の全部で前記第二基板が露出する第二露出部を有してもよい。 [Concept 7]
In an electronic module according to theconcepts 1 to 6 of the invention,
The connection body includes a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at all of the positions corresponding to the other side region of the pillar portion, or the second heat dissipation layer is formed on one side region of the pillar portion The second substrate may have a second exposed portion where the second substrate is exposed at all of the corresponding positions.
本発明の概念1乃至6による電子モジュールにおいて、
前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の全部で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の全部で前記第二基板が露出する第二露出部を有してもよい。 [Concept 7]
In an electronic module according to the
The connection body includes a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at all of the positions corresponding to the other side region of the pillar portion, or the second heat dissipation layer is formed on one side region of the pillar portion The second substrate may have a second exposed portion where the second substrate is exposed at all of the corresponding positions.
[概念8]
本発明の概念1乃至6による電子モジュールにおいて、
前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の周縁で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の周縁で前記第二基板が露出する第二露出部を有してもよい。 [Concept 8]
In an electronic module according to theconcepts 1 to 6 of the invention,
The connection body includes a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at the periphery of a position corresponding to the other side region of the pillar portion, or the second heat dissipation layer is formed on one side region of the pillar portion It may have a 2nd exposure part which the 2nd substrate exposes in the circumference of a corresponding position.
本発明の概念1乃至6による電子モジュールにおいて、
前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の周縁で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の周縁で前記第二基板が露出する第二露出部を有してもよい。 [Concept 8]
In an electronic module according to the
The connection body includes a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at the periphery of a position corresponding to the other side region of the pillar portion, or the second heat dissipation layer is formed on one side region of the pillar portion It may have a 2nd exposure part which the 2nd substrate exposes in the circumference of a corresponding position.
本発明において、第一放熱層のうち熱が伝わりやす接続体の他方側領域において第一基板が露出するか、又は、第二放熱層のうち熱が伝わりやすい接続体の一方側領域において第二基板が露出する態様を採用した場合には、第一基板又は第二基板が接続体の面内方向の位置を起点としてひずむことを防止できる。
In the present invention, the first substrate is exposed in the other side region of the connection body to which heat is transmitted in the first heat dissipation layer, or the second substrate is exposed to the one side area of the connection body in which heat is easily transmitted When the aspect which a board | substrate exposes is employ | adopted, it can prevent that a 1st board | substrate or a 2nd board | substrate is distorted from the position in the surface direction of a connection body as a starting point.
第1の実施の形態
《構成》
本実施の形態において、「一方側」は図1の上方側を意味し、「他方側」は図1の下方側を意味する。図1の上下方向を「第一方向」と呼び、左右方向を「第三方向」と呼び、紙面の表裏方向を「第二方向」と呼ぶ。第二方向及び第三方向を含む面内方向を「面内方向」といい、一方側から他方側に向かって見た場合には「平面視」といい、他方側から一方側に向かって見た場合には「底面視」という。 First Embodiment << Configuration >>
In the present embodiment, “one side” means the upper side of FIG. 1 and “other side” means the lower side of FIG. The vertical direction in FIG. 1 is referred to as the “first direction”, the horizontal direction is referred to as the “third direction”, and the front and back direction of the paper surface is referred to as the “second direction”. An in-plane direction including the second direction and the third direction is referred to as “in-plane direction”, and when viewed from one side to the other side, referred to as “plan view”, viewed from the other side to the one side. When it is called "bottom view".
《構成》
本実施の形態において、「一方側」は図1の上方側を意味し、「他方側」は図1の下方側を意味する。図1の上下方向を「第一方向」と呼び、左右方向を「第三方向」と呼び、紙面の表裏方向を「第二方向」と呼ぶ。第二方向及び第三方向を含む面内方向を「面内方向」といい、一方側から他方側に向かって見た場合には「平面視」といい、他方側から一方側に向かって見た場合には「底面視」という。 First Embodiment << Configuration >>
In the present embodiment, “one side” means the upper side of FIG. 1 and “other side” means the lower side of FIG. The vertical direction in FIG. 1 is referred to as the “first direction”, the horizontal direction is referred to as the “third direction”, and the front and back direction of the paper surface is referred to as the “second direction”. An in-plane direction including the second direction and the third direction is referred to as “in-plane direction”, and when viewed from one side to the other side, referred to as “plan view”, viewed from the other side to the one side. When it is called "bottom view".
図1に示すように、電子モジュールは、第一放熱層19と、第一放熱層19の一方側に設けられた第一基板11と、第一基板11の一方側に設けられた第一導体層12と、第一導体層12の一方側に設けられた第一電子素子13と、第一電子素子13の一方側に設けられた第二電子素子23と、第二電子素子23の一方側に設けられた第二導体層22と、第二導体層22の一方側に設けられた第二基板21と、第二基板21の一方側に設けられた第二放熱層29と、第一電子素子13及び第二電子素子23を封止する封止樹脂等から構成される封止部90と、を有してもよい。
As shown in FIG. 1, the electronic module includes a first heat dissipation layer 19, a first substrate 11 provided on one side of the first heat dissipation layer 19, and a first conductor provided on one side of the first substrate 11. Layer 12, first electronic element 13 provided on one side of first conductor layer 12, second electronic element 23 provided on one side of first electronic element 13, and one side of second electronic element 23 , A second substrate 21 provided on one side of the second conductor layer 22, a second heat dissipation layer 29 provided on one side of the second substrate 21, and a first electron A sealing portion 90 made of a sealing resin or the like for sealing the element 13 and the second electronic element 23 may be included.
第一導体層12及び第二導体層22の両方又はいずれか一方は端子部100と接続されてもよく、端子部100の先端側は封止部90の外方に露出して、制御基板等の外部装置と接続可能となってもよい。端子部100は、第一端子部110及び第二端子部120を有してもよい。第一端子部110は、第一端子部基端部111と、少なくとも一部が封止部90から露出した第一端子部外方部113と、第一端子部基端部111と第一端子部外方部113との間に設けられ、第一端子部基端部111側で他方側に曲げられた第一屈曲部112と、を有してもよい。第二端子部120は、第二端子部基端部121と、少なくとも一部が封止部90から露出した第二端子部外方部123と、第二端子部基端部121と第二端子部外方部123との間に設けられ、第二端子部基端部121側で一方側に曲げられた第二屈曲部122と、を有してもよい。
Both or any one of the first conductor layer 12 and the second conductor layer 22 may be connected to the terminal portion 100, and the tip end side of the terminal portion 100 is exposed to the outside of the sealing portion 90, and the control substrate etc. It may be connectable to an external device of The terminal unit 100 may have a first terminal unit 110 and a second terminal unit 120. The first terminal portion 110 includes a first terminal portion base end portion 111, a first terminal portion outer portion 113 exposed at least partially from the sealing portion 90, a first terminal portion base end portion 111, and a first terminal. It may be provided between the part outer direction part 113, and may have the 1st bending part 112 bent on the other side by the 1st terminal-part proximal-end part 111 side. The second terminal portion 120 includes a second terminal portion base end portion 121, a second terminal portion outer portion 123 exposed at least partially from the sealing portion 90, a second terminal portion base end portion 121, and a second terminal. It may be provided between the part outer direction part 123, and may have the 2nd bending part 122 bent to one side by the 2nd terminal part base end part 121 side.
第一基板11の一方側に、樹脂封止する際に金型で押圧される、第一電子素子13及び第二電子素子23に電気的に接続されていない非接続導体層50が設けられてもよい(図2参照)。
On one side of the first substrate 11, a non-connecting conductor layer 50 which is not electrically connected to the first electronic element 13 and the second electronic element 23, which is pressed by a mold when resin sealing is provided Also good (see Figure 2).
本実施の形態の電子モジュールは、接続体60,70を有してもよい。接続体60,70は、第一電子素子13と第二電子素子23との間に設けられた第一接続体60と、第二電子素子23の第一接続体60と反対側に設けられた第二接続体70とを有してもよい。本実施の形態では、第一接続体60及び第二接続体70が設けられる態様を用いて説明するが、このような態様に限られることはなく、第一接続体60及び第二接続体70のいずれか一方だけが設けられてもよい。
The electronic module of the present embodiment may have connectors 60 and 70. The connection bodies 60 and 70 are provided on the opposite side of the first connection body 60 provided between the first electronic element 13 and the second electronic element 23 and the first connection body 60 of the second electronic element 23. The second connector 70 may be included. In the present embodiment, an embodiment in which the first connection body 60 and the second connection body 70 are provided will be described, but the present invention is not limited to such an aspect, and the first connection body 60 and the second connection body 70 are described. Only one of them may be provided.
接続体60,70は、ヘッド部61,71と、ヘッド部61,71からヘッド部61,71の厚み方向(第一方向)で延びた柱部62,72とを有してもよい。接続体60,70が第一接続体60及び第二接続体70を有する態様では、第一接続体60が、第一ヘッド部61と、第一ヘッド部61から第一ヘッド部61の厚み方向で延びた第一柱部62とを有してもよい。また、第二接続体70が、第二ヘッド部71と、第二ヘッド部71から第二ヘッド部71の厚み方向で延びた第二柱部72とを有してもよい。
The connecting members 60 and 70 may have head portions 61 and 71 and pillar portions 62 and 72 extending from the head portions 61 and 71 in the thickness direction (first direction) of the head portions 61 and 71. In the aspect in which the connecting members 60 and 70 include the first connecting member 60 and the second connecting member 70, the first connecting member 60 includes the first head portion 61 and the thickness direction of the first head portion 61 from the first head portion 61. And the first post portion 62 extending in the In addition, the second connection body 70 may have a second head portion 71 and a second pillar portion 72 extending from the second head portion 71 in the thickness direction of the second head portion 71.
第二放熱層29が接続体60,70の一方側領域に対応する位置で第二基板21の一方側の面を露出させる第二露出部140を有してもよい。他方、第一放熱層19は接続体60,70の他方側領域に対応する位置で第一基板11を露出させないように構成されてもよい。接続体60,70の「一方側領域に対応する位置」とは、接続体60,70から一方側に第一方向に沿って直線を引いた際に含まれる位置(領域)であり、接続体60,70の「他方側領域に対応する位置」とは、接続体60,70から他方側に第一方向に沿って直線を引いた際に含まれる位置(領域)である。このため、第二放熱層29が接続体60,70の一方側領域に対応する位置で第二基板21の一方側の面を露出させる第二露出部140を有するとは、平面視(又は底面視)において、接続体60,70と第二露出部140とが少なくとも一部で重複することを意味し、後述する第2の実施の形態ように、第一放熱層19が接続体60,70の他方側領域に対応する位置で第一基板11の他方側の面を露出させる第一露出部150を有するとは、底面視(又は平面視)において、接続体60,70と第一露出部150とが少なくとも一部で重複することを意味している。
You may have the 2nd exposure part 140 which exposes the surface of one side of the 2nd board | substrate 21 in the position where the 2nd thermal radiation layer 29 respond | corresponds to one side area | region of the connection bodies 60 and 70. FIG. On the other hand, the first heat radiation layer 19 may be configured not to expose the first substrate 11 at a position corresponding to the other side region of the connection body 60, 70. The “position corresponding to the one side area” of the connection body 60, 70 is a position (area) included when a straight line is drawn along the first direction from the connection body 60, 70 to the one side, and the connection body The “position corresponding to the other side area” of 60 and 70 is a position (area) included when a straight line is drawn along the first direction from the connecting body 60 and 70 to the other side. For this reason, having the second exposed portion 140 which exposes the surface on one side of the second substrate 21 at a position where the second heat dissipation layer 29 corresponds to the one side region of the connection body 60, 70 is a plan view (or bottom surface) Connection means that the connecting members 60 and 70 and the second exposed portion 140 overlap with each other at least in part, and the first heat dissipation layer 19 is connected to the connecting members 60 and 70 as in the second embodiment described later. Having the first exposed portion 150 that exposes the other surface of the first substrate 11 at a position corresponding to the other side region of the connector 11 in the bottom view (or plan view) It means that 150 and at least partially overlap.
第二露出部140は接続体60,70の一方側領域に対応する位置の一部だけを含んでもよく、言い換えると、平面視において、第二露出部140は接続体60,70の一部だけを含んでもよい。このように接続体60,70の一方側領域に対応する位置の一部だけを含む場合には、第二露出部140は接続体60,70の一方側領域に対応する位置の周縁を含むように設けられてもよい。また、このような態様に限られることはなく、第二露出部140は接続体60,70の一方側領域に対応する位置の全部を含むようになっていてもよい。
The second exposed portion 140 may include only a part of the position corresponding to the one side region of the connecting members 60 and 70. In other words, in plan view, the second exposed portion 140 is only a portion of the connecting members 60 and 70. May be included. Thus, when including only a part of the position corresponding to the one side area of the connectors 60 and 70, the second exposed portion 140 includes the periphery of the position corresponding to the one side area of the connectors 60 and 70. May be provided. Moreover, it is not restricted to such an aspect, The 2nd exposure part 140 may be made to include all the positions corresponding to the one side area | region of the connection bodies 60 and 70. As shown in FIG.
第二露出部140は、第一柱部62の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面(図1の上面)を露出させてもよいし、第一ヘッド部61の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させてもよい。また、第二柱部72の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させてもよいし、第二ヘッド部71の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させてもよい。
The second exposed portion 140 may expose the surface on one side (upper surface in FIG. 1) of the second substrate 21 at all or part of the position corresponding to the one side region of the first column portion 62, or The surface on one side of the second substrate 21 may be exposed at all or part of the position corresponding to the one side region of the one head portion 61. Alternatively, the surface on one side of the second substrate 21 may be exposed at all or part of the position corresponding to the one side region of the second pillar portion 72, or corresponds to the one side region of the second head portion 71. The surface on one side of the second substrate 21 may be exposed at all or part of the position.
図2に示す態様では、第二柱部72の一方側領域に対応する位置の全部であり、かつ第二ヘッド部71の一方側領域に対応する位置の一部で第二基板21の一方側の面(図1の上面)が露出されている。言い換えると、図2に示す態様では、平面視において、第二柱部72の全部を含み、かつ第二ヘッド部71の一部を含むようにして、第二露出部140が設けられている。
In the aspect shown in FIG. 2, one side of the second substrate 21 is a part of the position corresponding to one side region of the second column portion 72 and one side region of the second head portion 71. The top surface (upper surface in FIG. 1) is exposed. In other words, in the aspect illustrated in FIG. 2, the second exposed portion 140 is provided so as to include all of the second pillar portion 72 and a portion of the second head portion 71 in a plan view.
図3に示す態様では、第二ヘッド部71の一方側領域に対応する位置の全部が露出されており、平面視において第二ヘッド部71の全部を含むようにして第二露出部140が設けられている。図4に示す態様では、第二柱部72の一方側領域に対応する位置の一部が露出されており、平面視において第二柱部72の一部を含むようにして第二露出部140が設けられている。
In the mode shown in FIG. 3, all the positions corresponding to the one side area of the second head portion 71 are exposed, and the second exposed portion 140 is provided so as to include the entire second head portion 71 in a plan view. There is. In the mode shown in FIG. 4, a part of the position corresponding to the one side region of the second pillar 72 is exposed, and the second exposed part 140 is provided so as to include a part of the second pillar 72 in plan view. It is done.
図5に示す態様では、第一柱部62の一方側領域に対応する位置の全部であり、かつ第一ヘッド部61の一方側領域に対応する位置の一部で第二基板21の一方側の面(図1の上面)が露出されている。言い換えると、図5に示す態様では、平面視において、第一柱部62の全部を含み、かつ第一ヘッド部61の一部を含むようにして、第二露出部140が設けられている。
In the aspect shown in FIG. 5, one side of the second substrate 21 is a part of the position corresponding to one side area of the first column portion 62 and one side area of the first head part 61. The top surface (upper surface in FIG. 1) is exposed. In other words, in the aspect illustrated in FIG. 5, the second exposed portion 140 is provided so as to include all of the first column portion 62 and a portion of the first head portion 61 in plan view.
図6に示す態様では、第一ヘッド部61の一方側領域に対応する位置の全部が露出されており、平面視において第一ヘッド部61の全部を含むようにして第二露出部140が設けられている。図7に示す態様では、第一柱部62の一方側領域に対応する位置の一部が露出されており、平面視において第一柱部62の一部を含むようにして第二露出部140が設けられている。
In the mode shown in FIG. 6, all of the positions corresponding to the one side area of the first head portion 61 are exposed, and the second exposed portion 140 is provided so as to include the entire first head portion 61 in plan view. There is. In the mode shown in FIG. 7, a part of the position corresponding to the one side region of the first pillar 62 is exposed, and the second exposed part 140 is provided so as to include a part of the first pillar 62 in plan view. It is done.
第二露出部140が接続体60,70の一方側領域に対応する位置の周縁を含むように設けられる場合には、第二露出部140は、第一柱部62の一方側領域に対応する位置の周縁を含むように設けられてもよいし、第一ヘッド部61の一方側領域に対応する位置の周縁を含むように設けられてもよい。また、第二露出部140は、第二柱部72の一方側領域に対応する位置の周縁を含むように設けられてもよいし、第二ヘッド部71の一方側領域に対応する位置の周縁を含むように設けられてもよい。
When the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the connection body 60, 70, the second exposed portion 140 corresponds to the one side region of the first column portion 62. It may be provided to include the peripheral edge of the position, or may be provided to include the peripheral edge of the position corresponding to the one side region of the first head portion 61. In addition, the second exposed portion 140 may be provided so as to include the peripheral edge of the position corresponding to the one side region of the second column 72, or the peripheral edge of the position corresponding to the one side region of the second head portion 71. May be provided.
図8に示す態様では、第二露出部140が第二柱部72の一方側領域に対応する位置の周縁を含むようにして設けられており、第二柱部72の一方側領域の中心では第二基板21の一方側の面は露出されていない。言い換えると、図8に示す態様では、平面視において、第二柱部72の周縁を含み、かつ第二柱部72の中心を含まないようにして、第二露出部140が設けられている。
In the aspect shown in FIG. 8, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the second pillar portion 72, and the second exposed portion 140 is provided at the center of the one side region of the second pillar portion 72 The surface on one side of the substrate 21 is not exposed. In other words, in the aspect illustrated in FIG. 8, the second exposed portion 140 is provided so as to include the periphery of the second column 72 and not include the center of the second column 72 in a plan view.
図9に示す態様では、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の周縁を含むようにして設けられており、第二ヘッド部71の一方側領域の中心及び第二柱部72の一方側領域では第二基板21の一方側の面は露出されていない。言い換えると、図9に示す態様では、平面視において、第二ヘッド部71の周縁を含み、かつ第二ヘッド部71の中心及び第二柱部72を含まないようにして、第二露出部140が設けられている。
In the aspect shown in FIG. 9, the second exposed portion 140 is provided so as to include the periphery of the position corresponding to the one side region of the second head portion 71, and the center of the one side region of the second head portion 71 and the second The surface on one side of the second substrate 21 is not exposed in the one side region of the column portion 72. In other words, in the aspect illustrated in FIG. 9, the second exposed portion 140 includes the periphery of the second head portion 71 and does not include the center of the second head portion 71 and the second pillar portion 72 in plan view. Is provided.
図10に示す態様では、第二露出部140が第一柱部62の一方側領域に対応する位置の周縁を含むようにして設けられており、第一柱部62の一方側領域の中心では第二基板21の一方側の面は露出されていない。言い換えると、図10に示す態様では、平面視において、第一柱部62の周縁を含み、かつ第一柱部62の中心を含まないようにして、第二露出部140が設けられている。
In the mode shown in FIG. 10, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the first pillar portion 62, and the second exposed portion 140 is second at the center of the one side region of the first pillar portion 62. The surface on one side of the substrate 21 is not exposed. In other words, in the aspect illustrated in FIG. 10, the second exposed portion 140 is provided so as to include the peripheral edge of the first pillar 62 and not include the center of the first pillar 62 in a plan view.
図11に示す態様では、第二露出部140が第一ヘッド部61の一方側領域に対応する位置の周縁を含むようにして設けられており、第一ヘッド部61の一方側領域の中心及び第一柱部62の一方側領域では第二基板21の一方側の面は露出されていない。言い換えると、図11に示す態様では、平面視において、第一ヘッド部61の周縁を含み、かつ第一ヘッド部61の中心及び第一柱部62を含まないようにして、第二露出部140が設けられている。
In the aspect shown in FIG. 11, the second exposed portion 140 is provided so as to include the periphery of the position corresponding to the one side region of the first head portion 61, and the center of the one side region of the first head portion 61 and the first The surface on one side of the second substrate 21 is not exposed in the one side region of the column portion 62. In other words, in the aspect illustrated in FIG. 11, the second exposed portion 140 includes the periphery of the first head portion 61 and does not include the center of the first head portion 61 and the first pillar portion 62 in plan view. Is provided.
図12に示すように、接続体60,70が面内方向において複数設けられてもよい。この場合には、接続体60,70の各々に対応する第二露出部140が設けられてもよい。このような態様に限られることはなく、接続体60,70の一部にだけ対応する第二露出部140が設けられてもよい。
As shown in FIG. 12, a plurality of connectors 60 and 70 may be provided in the in-plane direction. In this case, the second exposed portion 140 corresponding to each of the connectors 60 and 70 may be provided. The present invention is not limited to such an aspect, and the second exposed portion 140 corresponding to only a part of the connectors 60 and 70 may be provided.
図1に示すように、第一基板11の一方側には複数の第一導体層12が設けられてもよい。第一電子素子13及び第二電子素子23の各々又はいずれか一方はスイッチング素子であってもよいし、制御素子であってもよい。スイッチング素子としてはMOSFETやIGBT等を用いてもよい。第一電子素子13及び第二電子素子23の各々は半導体素子から構成されてもよく、半導体材料としてはシリコン、炭化ケイ素、窒化ガリウム等であってもよい。
As shown in FIG. 1, a plurality of first conductor layers 12 may be provided on one side of the first substrate 11. Each or any one of the first electronic element 13 and the second electronic element 23 may be a switching element or a control element. A MOSFET, an IGBT or the like may be used as the switching element. Each of the first electronic element 13 and the second electronic element 23 may be composed of a semiconductor element, and the semiconductor material may be silicon, silicon carbide, gallium nitride or the like.
第一電子素子13と第一接続体60との間にははんだ等の導電性接着剤(図示せず)が設けられ、第一電子素子13と第一接続体60は導電性接着剤を介して接続されてもよい。同様に、第一接続体60と第二電子素子23との間にははんだ等の導電性接着剤(図示せず)が設けられ、第一接続体60と第二電子素子23は導電性接着剤を介して接続されてもよい。同様に、第二電子素子23と第二接続体70との間にははんだ等の導電性接着剤(図示せず)が設けられ、第二電子素子23と第二接続体70は導電性接着剤を介して接続されてもよい。
A conductive adhesive (not shown) such as solder is provided between the first electronic element 13 and the first connection body 60, and the first electronic element 13 and the first connection body 60 are connected via the conductive adhesive. May be connected. Similarly, a conductive adhesive (not shown) such as solder is provided between the first connection body 60 and the second electronic element 23, and the first connection body 60 and the second electronic element 23 are conductively bonded. It may be connected via an agent. Similarly, a conductive adhesive (not shown) such as a solder is provided between the second electronic element 23 and the second connection body 70, and the second electronic element 23 and the second connection body 70 have a conductive adhesive. It may be connected via an agent.
第一基板11及び第二基板21としては、セラミック基板、絶縁樹脂層等の絶縁性基板を採用することができる。導電性接着剤としては、はんだの他、AgやCuを主成分とする材料を用いることもできる。第一接続体60及び第二接続体70の材料としてはCu等の金属を用いることができる。なお、基板11,21としては例えば回路パターニングを施した金属基板を用いることもでき、この場合には、基板11,21が導体層12,22を兼ねることになる。
As the first substrate 11 and the second substrate 21, an insulating substrate such as a ceramic substrate or an insulating resin layer can be employed. As the conductive adhesive, other than solder, a material having Ag or Cu as a main component can also be used. As a material of the first connection body 60 and the second connection body 70, a metal such as Cu can be used. For example, a metal substrate subjected to circuit patterning can be used as the substrates 11 and 21. In this case, the substrates 11 and 21 also serve as the conductor layers 12 and 22, respectively.
第一電子素子13がMOSFET等のスイッチング素子である場合には、図1に示すように、第一接続体60側の面(一方側の面)に第一ゲート電極13g及び第一ソース電極13sが設けられてもよい。また、第二電子素子23がMOSFET等のスイッチング素子である場合には、第二接続体70側の面(一方側の面)に第二ゲート電極23g及び第二ソース電極23sが設けられてもよい。この場合、第二接続体70が第二電子素子23の第二ソース電極23sに導電性接着剤を介して接続されてもよい。また、第一接続体60が第一電子素子13の第一ソース電極13sと第二電子素子23の第二接続体70と反対側の面(他方側の面)に設けられた第二ドレイン電極23dとを導電性接着剤を介して接続してもよい。第一電子素子13の第一接続体60と反対側の面(他方側の面)に第一ドレイン電極13dが設けられ、この第一ドレイン電極13dは第一導体層12と導電性接着剤を介して接続されてもよい。第一ゲート電極13gは接続子30と導電性接着剤を介して接続され、この接続子30は第一導体層12と導電性接着剤を介して接続されてもよい。第二ゲート電極23gは接続子40と導電性接着剤を介して接続されて、この接続子40は第二導体層22と導電性接着剤を介して接続されてもよい。
When the first electronic element 13 is a switching element such as a MOSFET, as shown in FIG. 1, the first gate electrode 13 g and the first source electrode 13 s are provided on the surface (surface on one side) of the first connection body 60. May be provided. When the second electronic element 23 is a switching element such as a MOSFET, even if the second gate electrode 23g and the second source electrode 23s are provided on the surface (surface on one side) on the second connection body 70 side. Good. In this case, the second connection body 70 may be connected to the second source electrode 23s of the second electronic element 23 via a conductive adhesive. In addition, a second drain electrode in which the first connection body 60 is provided on the surface (the surface on the other side) of the first source electrode 13 s of the first electronic element 13 and the second connection body 70 of the second electronic element 23. 23 d may be connected via a conductive adhesive. A first drain electrode 13d is provided on the surface of the first electronic element 13 opposite to the first connection body 60 (the surface on the other side), and the first drain electrode 13d includes the first conductor layer 12 and a conductive adhesive. It may be connected via. The first gate electrode 13 g may be connected to the connector 30 via a conductive adhesive, and the connector 30 may be connected to the first conductor layer 12 via a conductive adhesive. The second gate electrode 23 g may be connected to the connector 40 via a conductive adhesive, and the connector 40 may be connected to the second conductor layer 22 via a conductive adhesive.
端子部100と導体層12,22との接合は、はんだ等の導電性接着剤を利用する態様だけではなく、レーザ溶接を利用してもよいし、超音波接合を利用してもよい。
The bonding between the terminal portion 100 and the conductor layers 12 and 22 may be performed not only by using a conductive adhesive such as solder, but also by laser welding or ultrasonic bonding.
《作用・効果》
次に、上述した構成からなる本実施の形態による作用・効果の一例について説明する。なお、「作用・効果」で説明するあらゆる態様を、上記構成で採用することができる。 << Operation / Effect >>
Next, an example of the operation and effect according to the present embodiment configured as described above will be described. In addition, all the aspects demonstrated by "the effect | action and effect" are employable by the said structure.
次に、上述した構成からなる本実施の形態による作用・効果の一例について説明する。なお、「作用・効果」で説明するあらゆる態様を、上記構成で採用することができる。 << Operation / Effect >>
Next, an example of the operation and effect according to the present embodiment configured as described above will be described. In addition, all the aspects demonstrated by "the effect | action and effect" are employable by the said structure.
本実施の形態において、第二放熱層29のうち熱が伝わりやすい接続体60,70の一方側領域において第二基板21が露出する態様を採用した場合には、接続体60,70の面内方向の位置を起点として第二基板21がひずむことを防止できる。
In the present embodiment, in the case where the second substrate 21 is exposed in the one side region of the connection body 60, 70 in the second heat dissipation layer 29 to which heat is easily transmitted, the in-plane of the connection body 60, 70 is employed. It is possible to prevent the second substrate 21 from being distorted from the position in the direction.
第一基板11の一方側に第一電子素子13及び第二電子素子23に、金型で押圧される電気的に接続されていない非接続導体層50を設ける態様を採用した場合には非接続導体層50が金型で押圧されることから、第一基板11における反りを防止できる。
In the case of adopting a mode in which a non-connecting conductor layer 50 not electrically connected to be pressed by a mold is provided on one side of the first substrate 11 to the first electronic element 13 and the second electronic element 23, non-connection Since the conductor layer 50 is pressed by the mold, warpage of the first substrate 11 can be prevented.
第一放熱層19が接続体60,70の他方側領域に対応する位置で第一基板11を露出させないように構成される態様を採用した場合には、非接続導体層50を介して金型で押圧されることでひずみが生じにくい第一基板11側において、第一放熱層19の領域(面積)が減って放熱効果が下がることを抑制できる。
When an embodiment is adopted in which the first heat radiation layer 19 is configured not to expose the first substrate 11 at a position corresponding to the other side region of the connection body 60, 70, a mold is formed via the non-connection conductor layer 50. It is possible to suppress the reduction of the heat radiation effect by reducing the area (area) of the first heat radiation layer 19 on the side of the first substrate 11 in which distortion is unlikely to occur by pressing.
第二露出部140が、第二ヘッド部71の一方側領域に対応する位置の全部(図3参照)又は一部(図2及び図4参照)で第二基板21の一方側の面を露出させる態様を際した場合には、熱が伝わりやすい第二接続体70に対応する領域で第二基板21の一方側の面を露出させることで、第二基板21がひずむことを防止できることを期待できる。
The second exposed portion 140 exposes the surface on one side of the second substrate 21 at all (see FIG. 3) or a part (see FIGS. 2 and 4) of the position corresponding to the one side region of the second head portion 71. It is expected that the second substrate 21 can be prevented from being distorted by exposing the surface on one side of the second substrate 21 in the region corresponding to the second connection body 70 to which heat is easily transmitted. it can.
第二露出部140が、第二柱部72の一方側領域に対応する位置の全部(図2参照)又は一部(図4参照)で第二基板21の一方側の面を露出させる態様を採用した場合には、特に熱の伝わりやすい第二柱部72に対応する領域で第二基板21の一方側の面を露出させることで、第二基板21がひずむことを効率よく防止できることを期待できる。なお、第二ヘッド部71の一方側領域に対応する位置の一部だけで第二基板21の一方側の面を露出させつつ、第二柱部72の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させる態様を採用した場合には、第二放熱層29の領域が減ることで放熱効果が下がることを減らしつつ、第二基板21がひずむことを効率よく防止できる。
A mode in which the second exposed portion 140 exposes the surface on one side of the second substrate 21 at all (see FIG. 2) or a part (see FIG. 4) of the position corresponding to the one side region of the second column 72 When employed, it is expected that the second substrate 21 can be efficiently prevented from being distorted by exposing the surface on one side of the second substrate 21 particularly in the region corresponding to the second column portion 72 where heat is easily transmitted. it can. In addition, while exposing the surface on one side of the second substrate 21 only by a part of the position corresponding to the one side region of the second head portion 71, all or the position corresponding to the one side region of the second pillar portion 72 In the case of adopting a mode in which the surface of one side of the second substrate 21 is exposed in part, the second substrate 21 is distorted while the reduction of the heat radiation effect due to the reduction of the area of the second heat dissipation layer 29 is reduced. Can be prevented efficiently.
第二露出部140が、第一ヘッド部61の一方側領域に対応する位置の全部(図6参照)又は一部(図5及び図7参照)で第二基板21の一方側の面を露出させる態様を際した場合には、熱の伝わりやすい第一接続体60に対応する領域で第二基板21の一方側の面を露出させることで、第二基板21がひずむことを防止できることを期待できる。
The second exposed portion 140 exposes the surface on one side of the second substrate 21 at all (see FIG. 6) or a portion (see FIGS. 5 and 7) of the position corresponding to the one side region of the first head portion 61. In the case where the second substrate 21 is exposed, it is expected that the second substrate 21 can be prevented from being distorted by exposing the surface on one side of the second substrate 21 in the region corresponding to the first connection body 60 where heat is easily transmitted. it can.
第二露出部140が、第一柱部62の一方側領域に対応する位置の全部(図5参照)又は一部(図7参照)で第二基板21の一方側の面を露出させる態様を採用した場合には、特に熱の伝わりやすい第一柱部62に対応する領域で第二基板21の一方側の面を露出させることで、第二基板21がひずむことを効率よく防止できることを期待できる。なお、第一ヘッド部61の一方側領域に対応する位置の一部だけで第二基板21の一方側の面を露出させつつ、第一柱部62の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させる態様を採用した場合には、第二放熱層29の領域が減ることで放熱効果が下がることを減らしつつ、第二基板21がひずむことを効率よく防止できる。
A mode in which the second exposed portion 140 exposes the surface on one side of the second substrate 21 at all (see FIG. 5) or a part (see FIG. 7) of the positions corresponding to the one side region of the first column portion 62 When adopted, it is expected that the second substrate 21 can be efficiently prevented from being distorted by exposing the surface on one side of the second substrate 21 particularly in the region corresponding to the first column portion 62 where heat is easily transmitted. it can. Note that while the surface on one side of the second substrate 21 is exposed only by a part of the position corresponding to the one side area of the first head portion 61, all or the position corresponding to the one side area of the first column 62 In the case of adopting a mode in which the surface of one side of the second substrate 21 is exposed in part, the second substrate 21 is distorted while the reduction of the heat radiation effect due to the reduction of the area of the second heat dissipation layer 29 is reduced. Can be prevented efficiently.
発明者が実験したところ接続体60,70の周縁領域で第二基板21の一方側の面を露出させることで第二基板21のひずみを解消できる場合があることが判明している。
As a result of experiments conducted by the inventor, it has been found that the distortion of the second substrate 21 can be eliminated in some cases by exposing the surface on one side of the second substrate 21 in the peripheral region of the connecting members 60 and 70.
このため、図9に示すように、第二露出部140を第二ヘッド部71の一方側領域に対応する位置の周縁を含むように設け、第二ヘッド部71の一方側領域に対応する位置の周縁で第二基板21の一方側の面を露出させる態様を採用することで、第二基板21がひずむことを防止できることを期待できる。また、図8に示すように、熱の特に伝達しやすい第二柱部72の一方側領域に対応する位置の周縁を含むように第二露出部140を設け、第二柱部72の一方側領域に対応する位置の周縁で第二基板21の一方側の面を露出させる態様を採用することで、第二基板21がひずむことを防止できることを期待できる。
For this reason, as shown in FIG. 9, the second exposed portion 140 is provided to include the periphery of the position corresponding to the one side region of the second head portion 71, and the position corresponding to the one side region of the second head portion 71. It can be expected that the second substrate 21 can be prevented from being distorted by adopting a mode in which the surface on one side of the second substrate 21 is exposed at the peripheral edge of the second substrate 21. In addition, as shown in FIG. 8, the second exposed portion 140 is provided to include the periphery of a position corresponding to one side region of the second column portion 72 to which heat is particularly easily transmitted. By adopting the aspect in which the surface on one side of the second substrate 21 is exposed at the periphery of the position corresponding to the region, it can be expected that the second substrate 21 can be prevented from being distorted.
また、図11に示すように、第二露出部140を第一ヘッド部61の一方側領域に対応する位置の周縁を含むように設け、第一ヘッド部61の一方側領域に対応する位置の周縁で第二基板21の一方側の面を露出させる態様を採用することで、第二基板21がひずむことを防止できることを期待できる。また、図10に示すように、熱の特に伝達しやすい第一柱部62の一方側領域に対応する位置の周縁を含むように第二露出部140を設け、第一柱部62の一方側領域に対応する位置の周縁で第二基板21の一方側の面を露出させる態様を採用することで、第二基板21がひずむことを防止できることを期待できる。
Further, as shown in FIG. 11, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the first head portion 61, and the position corresponding to the one side region of the first head portion 61. By adopting a mode in which the surface on one side of the second substrate 21 is exposed at the periphery, it can be expected that the second substrate 21 can be prevented from being distorted. Further, as shown in FIG. 10, the second exposed portion 140 is provided to include the periphery of the position corresponding to the one side region of the first pillar portion 62 to which heat is particularly easily transmitted, and one side of the first pillar portion 62 By adopting the aspect in which the surface on one side of the second substrate 21 is exposed at the periphery of the position corresponding to the region, it can be expected that the second substrate 21 can be prevented from being distorted.
第2の実施の形態
次に、本発明の第2の実施の形態について説明する。 Second Embodiment Next, a second embodiment of the present invention will be described.
次に、本発明の第2の実施の形態について説明する。 Second Embodiment Next, a second embodiment of the present invention will be described.
本実施の形態では、第一放熱層19が接続体60,70の他方側領域に対応する位置で第一基板11の他方側の面を露出させる第一露出部150を有している。本実施の形態では、第1の実施の形態で説明したあらゆる態様を採用することができる。第1の実施の形態で説明した部材については同じ符号を用いて説明する。
In the present embodiment, the first heat radiation layer 19 has a first exposed portion 150 that exposes the other side surface of the first substrate 11 at a position corresponding to the other side region of the connecting members 60 and 70. In the present embodiment, any aspect described in the first embodiment can be adopted. The members described in the first embodiment will be described using the same reference numerals.
第一露出部150は接続体60,70の他方側領域に対応する位置の一部だけを含んでもよい。このように接続体60,70の他方側領域に対応する位置の一部だけを含む場合には、第一露出部150は接続体60,70の他方側領域に対応する位置の周縁を含むように設けられてもよい。また、このような態様に限られることはなく、第一露出部150は接続体60,70の他方側領域に対応する位置の全部を含むようになっていてもよい。
The first exposed portion 150 may include only a part of the position corresponding to the other side area of the connection body 60, 70. Thus, when including only a part of the position corresponding to the other side region of the connectors 60, 70, the first exposed portion 150 includes the periphery of the position corresponding to the other side region of the connectors 60, 70. May be provided. Moreover, it is not restricted to such an aspect, the 1st exposure part 150 may be made to include all the positions corresponding to the other side area | region of the connection bodies 60 and 70. As shown in FIG.
第一露出部150は、第一柱部62の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面(図13の下面)を露出させてもよいし、第一ヘッド部61の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面を露出させてもよい。また、第二柱部72の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面を露出させてもよいし、第二ヘッド部71の他方側領域に対応する位置の全部又は一部で第二基板21の他方側の面を露出させてもよい。
The first exposed portion 150 may expose the other side surface (the lower surface in FIG. 13) of the first substrate 11 at all or part of the position corresponding to the other side region of the first column portion 62, or The surface on the other side of the first substrate 11 may be exposed at all or part of the position corresponding to the other side region of the one head portion 61. In addition, the surface on the other side of the first substrate 11 may be exposed at all or a part of the position corresponding to the other side region of the second pillar portion 72, or corresponds to the other side region of the second head portion 71 The other surface of the second substrate 21 may be exposed at all or part of the position.
図14に示す態様では、第一柱部62の一方側領域に対応する位置の全部であり、かつ第一ヘッド部61の一方側領域に対応する位置の一部で第二基板21の一方側の面(図13の下面)が露出されている。言い換えると、図14に示す態様では、底面視において、第一柱部62の全部を含み、かつ第一ヘッド部61の一部を含むようにして、第一露出部150が設けられている。
In the mode shown in FIG. 14, one side of the second substrate 21 is a part of the position corresponding to one side area of the first column portion 62 and is one part of the position corresponding to one side area of the first head portion 61. The lower surface of FIG. 13 (the lower surface in FIG. 13) is exposed. In other words, in the aspect illustrated in FIG. 14, the first exposed portion 150 is provided so as to include the whole of the first column portion 62 and a portion of the first head portion 61 in a bottom view.
図15に示す態様では、第一ヘッド部61の一方側領域に対応する位置の全部が露出されており、平面視において第一ヘッド部61の全部を含むようにして第一露出部150が設けられている。図16に示す態様では、第一柱部62の一方側領域に対応する位置の一部が露出されており、底面視において第一柱部62の一部を含むようにして第一露出部150が設けられている。
In the mode shown in FIG. 15, all the positions corresponding to one side area of the first head portion 61 are exposed, and the first exposed portion 150 is provided so as to include the entire first head portion 61 in plan view. There is. In the mode shown in FIG. 16, a part of the position corresponding to the one side region of the first pillar 62 is exposed, and the first exposed part 150 is provided to include a part of the first pillar 62 in a bottom view. It is done.
図17に示す態様では、第二柱部72の一方側領域に対応する位置の全部であり、かつ第二ヘッド部71の一方側領域に対応する位置の一部で第二基板21の一方側の面(図13の下面)が露出されている。言い換えると、図17に示す態様では、底面視において、第二柱部72の全部を含み、かつ第二ヘッド部71の一部を含むようにして、第一露出部150が設けられている。
In the aspect shown in FIG. 17, one side of the second substrate 21 is a part of the position corresponding to one side area of the second column part 72 and the one side area of the second head part 71. The lower surface of FIG. 13 (the lower surface in FIG. 13) is exposed. In other words, in the aspect illustrated in FIG. 17, the first exposed portion 150 is provided so as to include all of the second column portion 72 and include a portion of the second head portion 71 in bottom view.
図18に示す態様では、第二ヘッド部71の一方側領域に対応する位置の全部が露出されており、底面視において第二ヘッド部71の全部を含むようにして第一露出部150が設けられている。図19に示す態様では、第二柱部72の一方側領域に対応する位置の一部が露出されており、底面視において第二柱部72の一部を含むようにして第一露出部150が設けられている。
In the mode shown in FIG. 18, all of the positions corresponding to one side region of the second head portion 71 are exposed, and the first exposed portion 150 is provided to include the entire second head portion 71 in bottom view. There is. In the mode shown in FIG. 19, a part of the position corresponding to the one side region of the second pillar 72 is exposed, and the first exposed part 150 is provided so as to include a part of the second pillar 72 in a bottom view. It is done.
第一露出部150が接続体60,70の他方側領域に対応する位置の周縁を含むように設けられる場合には、第一露出部150は、第一柱部62の他方側領域に対応する位置の周縁を含むように設けられてもよいし、第一ヘッド部61の他方側領域に対応する位置の周縁を含むように設けられてもよい。また、第第一露出部150は、第二柱部72の他方側領域に対応する位置の周縁を含むように設けられてもよいし、第二ヘッド部71の他方側領域に対応する位置の周縁を含むように設けられてもよい。
When the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the connector 60, 70, the first exposed portion 150 corresponds to the other side region of the first column portion 62. It may be provided to include the peripheral edge of the position, or may be provided to include the peripheral edge of the position corresponding to the other side region of the first head portion 61. In addition, the first exposed portion 150 may be provided so as to include the periphery of the position corresponding to the other side region of the second pillar portion 72, or the position corresponding to the other side region of the second head portion 71. It may be provided to include the peripheral edge.
図20に示す態様では、第一露出部150が第一柱部62の他方側領域に対応する位置の周縁を含むようにして設けられており、第一柱部62の他方側領域の中心では第一基板11の他方側の面は露出されていない。言い換えると、図20に示す態様では、底面視において、第一柱部62の周縁を含み、かつ第一柱部62の中心を含まないようにして、第一露出部150が設けられている。
In the embodiment shown in FIG. 20, the first exposed portion 150 is provided so as to include the periphery of the position corresponding to the other side region of the first pillar portion 62, and the first exposed portion 150 is first at the center of the other side region of the first pillar portion 62. The other side of the substrate 11 is not exposed. In other words, in the aspect shown in FIG. 20, the first exposed portion 150 is provided so as to include the peripheral edge of the first pillar portion 62 and not include the center of the first pillar portion 62 in bottom view.
図21に示す態様では、第一露出部150が第一ヘッド部61の他方側領域に対応する位置の周縁を含むようにして設けられており、第一ヘッド部61の他方側領域の中心及び第一柱部62の他方側領域では第一基板11の他方側の面は露出されていない。言い換えると、図21に示す態様では、底面視において、第一ヘッド部61の周縁を含み、かつ第一ヘッド部61の中心及び第一柱部62を含まないようにして、第一露出部150が設けられている。
In the aspect shown in FIG. 21, the first exposed portion 150 is provided so as to include the periphery of the position corresponding to the other side region of the first head portion 61, and the center of the other side region of the first head portion 61 and the first The other side surface of the first substrate 11 is not exposed in the other side region of the column portion 62. In other words, in the aspect illustrated in FIG. 21, the first exposed portion 150 includes the periphery of the first head portion 61 and does not include the center of the first head portion 61 and the first column portion 62 in a bottom view. Is provided.
図22に示す態様では、第一露出部150が第二柱部72の他方側領域に対応する位置の周縁を含むようにして設けられており、第二柱部72の他方側領域の中心では第一基板11の他方側の面は露出されていない。言い換えると、図22に示す態様では、底面視において、第二柱部72の周縁を含み、かつ第二柱部72の中心を含まないようにして、第一露出部150が設けられている。
In the aspect shown in FIG. 22, the first exposed portion 150 is provided to include the peripheral edge of the position corresponding to the other side region of the second pillar portion 72, and the first exposed portion 150 is first at the center of the other side region of the second pillar portion 72. The other side of the substrate 11 is not exposed. In other words, in the aspect illustrated in FIG. 22, the first exposed portion 150 is provided so as to include the periphery of the second column 72 and not include the center of the second column 72 in a bottom view.
図23に示す態様では、第一露出部150が第二ヘッド部71の他方側領域に対応する位置の周縁を含むようにして設けられており、第二ヘッド部71の一方側領域の中心及び第二柱部72の他方側領域では第二基板21の一方側の面は露出されていない。言い換えると、図23に示す態様では、底面視において、第二ヘッド部71の周縁を含み、かつ第二ヘッド部71の中心及び第二柱部72を含まないようにして、第一露出部150が設けられている。
In the embodiment shown in FIG. 23, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the second head portion 71, and the center of the one side region of the second head portion 71 and the second In the other side region of the column portion 72, the surface on one side of the second substrate 21 is not exposed. In other words, in the embodiment shown in FIG. 23, the first exposed portion 150 includes the periphery of the second head portion 71 and does not include the center of the second head portion 71 and the second pillar portion 72 in a bottom view. Is provided.
第一露出部150が、第一ヘッド部61の他方側領域に対応する位置の全部(図15参照)又は一部(図14及び図16参照)で第一基板11の他方側の面を露出させる態様を際した場合には、熱の伝わりやすい第一接続体60に対応する領域で第一基板11の他方側の面を露出させることで、第一基板11がひずむことを防止できることを期待できる。
The first exposed portion 150 exposes the other surface of the first substrate 11 at all (see FIG. 15) or a portion (see FIGS. 14 and 16) of the position corresponding to the other side region of the first head portion 61. In the case where an aspect to be caused is expressed, it is expected that the first substrate 11 can be prevented from being distorted by exposing the other surface of the first substrate 11 in the region corresponding to the first connection body 60 where heat is easily transmitted. it can.
第一露出部150が、第一柱部62の他方側領域に対応する位置の全部(図14参照)又は一部(図16参照)で第一基板11の他方側の面を露出させる態様を採用した場合には、特に熱の伝わりやすい第一柱部62に対応する領域で第一基板11の他方側の面を露出させることで、第一基板11がひずむことを効率よく防止できることを期待できる。なお、第一ヘッド部61の他方側領域に対応する位置の一部だけで第一基板11の他方側の面を露出させつつ、第一柱部62の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面を露出させる態様を採用した場合には、第二放熱層29の領域が減ることで放熱効果が下がることを減らしつつ、第一基板11がひずむことを防止できることを期待できる。
A mode in which the first exposed portion 150 exposes the other side surface of the first substrate 11 at all (see FIG. 14) or a portion (see FIG. 16) of the positions corresponding to the other side region of the first column portion 62 When employed, it is expected that the first substrate 11 can be efficiently prevented from being distorted by exposing the surface on the other side of the first substrate 11 particularly in the region corresponding to the first column portion 62 where heat is easily transmitted. it can. Note that while the surface on the other side of the first substrate 11 is exposed only by a part of the position corresponding to the other side region of the first head portion 61, all or a position corresponding to the other side region of the first column portion 62 When a mode is adopted in which the surface on the other side of the first substrate 11 is partially exposed, the reduction of the heat radiation effect due to the reduction of the area of the second heat radiation layer 29 causes the first substrate 11 to be distorted. Can be expected to prevent.
第一露出部150が、第二ヘッド部71の他方側領域に対応する位置の全部(図18参照)又は一部(図17及び図19参照)で第一基板11の他方側の面を露出させる態様を際した場合には、熱の伝わりやすい第二接続体70に対応する領域で第一基板11の他方側の面を露出させることで、第一基板11がひずむことを防止できることを期待できる。
The first exposed portion 150 exposes the other surface of the first substrate 11 at all (see FIG. 18) or a portion (see FIGS. 17 and 19) of the position corresponding to the other side region of the second head portion 71. In the case of the embodiment in which the first substrate 11 is exposed, it is expected that the first substrate 11 can be prevented from being distorted by exposing the other surface of the first substrate 11 in the region corresponding to the second connection body 70 where heat is easily transmitted it can.
第一露出部150が、第二柱部72の他方側領域に対応する位置の全部(図17参照)又は一部(図19参照)で第一基板11の他方側の面を露出させる態様を採用した場合には、特に熱の伝わりやすい第二柱部72に対応する領域で第一基板11の他方側の面を露出させることで、第一基板11がひずむことを効率よく防止できることを期待できる。なお、第二ヘッド部71の他方側領域に対応する位置の一部だけで第一基板11の他方側の面を露出させつつ、第二柱部72の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面を露出させる態様を採用した場合には、第二放熱層29の領域が減ることで放熱効果が下がることを減らしつつ、第一基板11がひずむことを防止できることを期待できる。
A mode in which the first exposed portion 150 exposes the other surface of the first substrate 11 at all (see FIG. 17) or a portion (see FIG. 19) of the positions corresponding to the other side region of the second column 72. When adopted, it is expected that the first substrate 11 can be efficiently prevented from being distorted by exposing the surface on the other side of the first substrate 11 particularly in the region corresponding to the second column portion 72 where heat is easily transmitted. it can. Note that while the surface on the other side of the first substrate 11 is exposed only by a part of the position corresponding to the other side area of the second head portion 71, all or a position corresponding to the other side area of the second column 72 When a mode is adopted in which the surface on the other side of the first substrate 11 is partially exposed, the reduction of the heat radiation effect due to the reduction of the area of the second heat radiation layer 29 causes the first substrate 11 to be distorted. Can be expected to prevent.
前述したように、発明者が実験したところ接続体60,70の周縁領域で基板のひずみが生じやすい場合があることが判明している。
As described above, it has been found from experiments by the inventor that distortion of the substrate may easily occur in the peripheral region of the connecting members 60 and 70.
このため、図21に示すように、第一露出部150を第一ヘッド部61の他方側領域に対応する位置の周縁を含むように設け、第一ヘッド部61の他方側領域に対応する位置の周縁で第一基板11の他方側の面を露出させる態様を採用することで、第一基板11がひずむことを防止できることを期待できる。また、図20に示すように、熱の特に伝達しやすい第一柱部62の他方側領域に対応する位置の周縁を含むように第一露出部150を設け、第一柱部62の他方側領域に対応する位置の周縁で第一基板11の他方側の面を露出させる態様を採用することで、第一基板11がひずむことを防止できることを期待できる。
Therefore, as shown in FIG. 21, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the first head portion 61, and the position corresponding to the other side region of the first head portion 61 It can be expected that the first substrate 11 can be prevented from being distorted by adopting a mode in which the surface on the other side of the first substrate 11 is exposed at the peripheral edge of the first substrate 11. Further, as shown in FIG. 20, the first exposed portion 150 is provided to include the peripheral edge of the position corresponding to the other side region of the first pillar portion 62 to which heat is particularly easily transmitted, and the other side of the first pillar portion 62 By adopting a mode in which the surface on the other side of the first substrate 11 is exposed at the periphery of the position corresponding to the region, it can be expected that the first substrate 11 can be prevented from being distorted.
また、図23に示すように、第一露出部150を第二ヘッド部71の他方側領域に対応する位置の周縁を含むように設け、第二ヘッド部71の他方側領域に対応する位置の周縁で第一基板11の他方側の面を露出させる態様を採用することで、第一基板11がひずむことを防止できることを期待できる。また、図22に示すように、熱の特に伝達しやすい第二柱部72の他方側領域に対応する位置の周縁を含むように第一露出部150を設け、第二柱部72の他方側領域に対応する位置の周縁で第一基板11の他方側の面を露出させる態様を採用することで、第一基板11がひずむことを防止できることを期待できる。
Further, as shown in FIG. 23, the first exposed portion 150 is provided so as to include the periphery of the position corresponding to the other side region of the second head portion 71, and the position corresponding to the other side region of the second head portion 71. By adopting the aspect of exposing the surface on the other side of the first substrate 11 at the periphery, it can be expected that the first substrate 11 can be prevented from being distorted. Further, as shown in FIG. 22, the first exposed portion 150 is provided to include the periphery of the position corresponding to the other side region of the second column 72 which is particularly easy to transmit heat, and the other side of the second column 72 By adopting a mode in which the surface on the other side of the first substrate 11 is exposed at the periphery of the position corresponding to the region, it can be expected that the first substrate 11 can be prevented from being distorted.
本実施の形態では、第二基板21の他方側に第一電子素子13及び第二電子素子23に、金型で押圧される電気的に接続されていない非接続導体層50が設けられてもよい。このような非接続導体層50が設けられることで、第二基板21における反りを防止できる。また、図24に示すように、複数の第一露出部150が設けられてもよい。
In the present embodiment, even if the first electronic element 13 and the second electronic element 23 are provided on the other side of the second substrate 21 with the non-connecting conductor layer 50 which is not electrically connected to be pressed by a mold. Good. By providing such a non-connecting conductor layer 50, warpage of the second substrate 21 can be prevented. Also, as shown in FIG. 24, a plurality of first exposed portions 150 may be provided.
第3の実施の形態
次に、本発明の第3の実施の形態について説明する。 Third Embodiment Next, a third embodiment of the present invention will be described.
次に、本発明の第3の実施の形態について説明する。 Third Embodiment Next, a third embodiment of the present invention will be described.
本実施の形態では、第一放熱層19が接続体60,70の他方側領域に対応する位置で第一基板11を露出させる第一露出部150を有し、かつ第二放熱層29が接続体60,70の一方側領域に対応する位置で第二基板21を露出させる第二露出部140を有している。本実施の形態では、上記各実施の形態で説明したあらゆる態様を採用することができる。上記各実施の形態で説明した部材については同じ符号を用いて説明する。
In the present embodiment, the first heat dissipation layer 19 has the first exposed portion 150 that exposes the first substrate 11 at a position corresponding to the other side region of the connecting members 60 and 70, and the second heat dissipation layer 29 is connected A second exposed portion 140 which exposes the second substrate 21 at a position corresponding to one side region of the body 60, 70 is provided. In the present embodiment, any of the aspects described in the above embodiments can be adopted. About the member demonstrated by said each embodiment, it demonstrates using the same code | symbol.
本実施の形態では、第一放熱層19及び第二放熱層29の各々で露出部が設けられていることから、これら第一放熱層19及び第二放熱層29の各々に対して反りが発生することを抑制することを期待できる。
In the present embodiment, since the exposed portions are provided in each of the first heat dissipation layer 19 and the second heat dissipation layer 29, warpage occurs in each of the first heat dissipation layer 19 and the second heat dissipation layer 29. Can be expected to suppress
第一露出部150と第二露出部140とで採用される態様の組み合わせとしては様々な態様が考えられる。
Various modes can be considered as a combination of the modes adopted for the first exposed portion 150 and the second exposed portion 140.
一例としては、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の全部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一柱部62の他方側領域に対応する位置の一部で第一基板11の他方側の面を露出させてもよい。また、第二露出部140が第二柱部62の一方側領域に対応する位置の一部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一ヘッド部61の他方側領域に対応する位置の全部で第一基板11の他方側の面を露出させてもよい。
As an example, while the second exposed portion 140 exposes the surface on one side of the second substrate 21 at all of the positions corresponding to the one side region of the second head portion 71, the first exposed portion 150 is a first column portion The surface on the other side of the first substrate 11 may be exposed at a part of the position corresponding to the other side area of the surface 62. In addition, while the second exposed portion 140 exposes the surface on one side of the second substrate 21 at a part of the position corresponding to the one side region of the second column portion 62, the first exposed portion 150 is the first head portion 61. The surface on the other side of the first substrate 11 may be exposed at all of the positions corresponding to the other side region of the substrate.
また、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の全部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一柱部62の他方側領域に対応する位置の周縁を含むように設けられてもよい。また、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の周縁を含むように設けられ、第一露出部150が第一柱部62の他方側領域に対応する位置の全部で第一基板11の他方側の面を露出させてもよい。
In addition, while the second exposed portion 140 exposes the surface on one side of the second substrate 21 at all of the positions corresponding to the one side region of the second head portion 71, the first exposed portion 150 of the first column portion 62 It may be provided to include the peripheral edge of the position corresponding to the other side region. In addition, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the second head portion 71, and the first exposed portion 150 is at the position corresponding to the other side region of the first column portion 62. The other surface of the first substrate 11 may be exposed in all.
また、第一露出部150と第二露出部140とで採用される態様が同様となってもよく、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の全部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一ヘッド部61の他方側領域に対応する位置の全部で第一基板11の他方側の面を露出させてもよい。また、第二露出部140が第二柱部72の一方側領域に対応する位置の一部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一柱部62の他方側領域に対応する位置の一部で第一基板11の他方側の面を露出させてもよい。
Also, the aspect adopted for the first exposed portion 150 and the second exposed portion 140 may be the same, and the second exposed portion 140 corresponds to the one side region of the second head portion 71 in all the first positions. The surface of the other side of the first substrate 11 may be exposed at all of the positions where the first exposed portion 150 corresponds to the other side region of the first head portion 61 while exposing the surface of the one side of the two substrates 21 . In addition, while the second exposed portion 140 exposes the surface on one side of the second substrate 21 at a part of the position corresponding to the one side region of the second column portion 72, the first exposed portion 150 corresponds to the first column portion 62. The surface on the other side of the first substrate 11 may be exposed at a part of the position corresponding to the other side region of the substrate.
上述した各実施の形態の記載及び図面の開示は、請求の範囲に記載された発明を説明するための一例に過ぎず、上述した実施の形態の記載又は図面の開示によって請求の範囲に記載された発明が限定されることはない。また、出願当初の請求項の記載はあくまでも一例であり、明細書、図面等の記載に基づき、請求項の記載を適宜変更することもできる。
The description of the above-described embodiments and the disclosure of the drawings are merely an example for describing the invention described in the claims, and the disclosure of the embodiments described above or the disclosure of the drawings may be included in the claims. The invention is not limited. Further, the description of the claims at the beginning of the application is merely an example, and the description of the claims can be changed as appropriate based on the description of the specification, the drawings and the like.
11 第一基板
13 第一電子素子
19 第一放熱層
21 第二基板
23 第二電子素子
29 第二放熱層
50 非接続導体層
60 第一接続体(接続体)
70 第二接続体(接続体)
90 封止部
140 第二露出部
150 第一露出部 11first substrate 13 first electronic element 19 first heat radiation layer 21 second substrate 23 second electronic element 29 second heat radiation layer 50 non-connection conductor layer 60 first connection body (connection body)
70 Second connection (connection)
90 sealingportion 140 second exposed portion 150 first exposed portion
13 第一電子素子
19 第一放熱層
21 第二基板
23 第二電子素子
29 第二放熱層
50 非接続導体層
60 第一接続体(接続体)
70 第二接続体(接続体)
90 封止部
140 第二露出部
150 第一露出部 11
70 Second connection (connection)
90 sealing
Claims (8)
- 第一放熱層と、
前記第一放熱層の一方側に設けられた第一基板と、
前記第一基板の一方側に設けられた第一電子素子と、
前記第一電子素子の一方側に設けられた第二電子素子と、
前記第二電子素子の一方側に設けられた第二基板と、
前記第二基板の一方側に設けられた第二放熱層と、
少なくとも前記第一電子素子及び前記第二電子素子を封止する封止部と、
前記第一電子素子と前記第二電子素子との間又は前記第二電子素子と前記第二基板との間に設けられた接続体と、
を備え、
前記第一放熱層は前記接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有することを特徴とする電子モジュール。 The first heat radiation layer,
A first substrate provided on one side of the first heat radiation layer;
A first electronic element provided on one side of the first substrate;
A second electronic device provided on one side of the first electronic device;
A second substrate provided on one side of the second electronic device;
A second heat dissipation layer provided on one side of the second substrate;
A sealing portion for sealing at least the first electronic element and the second electronic element;
A connector provided between the first electronic device and the second electronic device or between the second electronic device and the second substrate;
Equipped with
The first heat dissipation layer has a first exposed portion to which the first substrate is exposed at a position corresponding to the other side area of the connection body, or the second heat dissipation layer corresponds to one side area of the connection body An electronic module having a second exposed portion where the second substrate is exposed at a position. - 前記第一露出部は前記接続体の他方側領域に対応する位置の一部だけを含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の一部だけを含むことを特徴とする請求項1に記載の電子モジュール。 The first exposed portion includes only a part of the position corresponding to the other side region of the connector, or
The electronic module according to claim 1, wherein the second exposed portion includes only a part of the position corresponding to the one side region of the connection body. - 前記第一露出部は前記接続体の他方側領域に対応する位置の全部を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の全部を含むことを特徴とする請求項1に記載の電子モジュール。 The first exposed portion includes all of the positions corresponding to the other side region of the connector, or
The electronic module according to claim 1, wherein the second exposed portion includes the entire position corresponding to the one side region of the connection body. - 前記第一露出部は前記接続体の他方側領域に対応する位置の周縁を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の周縁を含むことを特徴とする請求項1に記載の電子モジュール。 The first exposed portion includes a peripheral edge of a position corresponding to the other side region of the connector, or
The electronic module according to claim 1, wherein the second exposed portion includes a peripheral edge of a position corresponding to the one side region of the connection body. - 前記接続体が複数設けられ、
前記接続体の各々に対応する露出部が設けられることを特徴とする請求項1に記載の電子モジュール。 A plurality of the connectors are provided,
The electronic module according to claim 1, wherein an exposed portion corresponding to each of the connectors is provided. - 前記接続体は、前記第一電子素子と前記第二電子素子との間に設けられた第一接続体と、前記第二電子素子と前記第二基板との間に設けられた第二接続体とを有し、
前記第一放熱層は前記第一接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記第二接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有することを特徴とする請求項1に記載の電子モジュール。 The connection body is a first connection body provided between the first electronic element and the second electronic element, and a second connection body provided between the second electronic element and the second substrate. Have and
The first heat dissipation layer has a first exposed portion at which the first substrate is exposed at a position corresponding to the other side region of the first connection body, or the second heat dissipation layer is on one side of the second connection body The electronic module according to claim 1, further comprising a second exposed portion that exposes the second substrate at a position corresponding to the region. - 前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の全部で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の全部で前記第二基板が露出する第二露出部を有することを特徴とする請求項1に記載の電子モジュール。 The connection body includes a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at all of the positions corresponding to the other side region of the pillar portion, or the second heat dissipation layer is formed on one side region of the pillar portion The electronic module according to claim 1, further comprising a second exposed portion in which the second substrate is exposed at all of the corresponding positions. - 前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の周縁で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の周縁で前記第二基板が露出する第二露出部を有することを特徴とする請求項1に記載の電子モジュール。 The connection body includes a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at the periphery of a position corresponding to the other side region of the pillar portion, or the second heat dissipation layer is formed on one side region of the pillar portion The electronic module according to claim 1, further comprising a second exposed portion exposing the second substrate at the periphery of the corresponding position.
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Citations (4)
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JP2008235852A (en) * | 2007-02-23 | 2008-10-02 | Hitachi Metals Ltd | Ceramic substrate and semiconductor module using the same |
WO2014132397A1 (en) * | 2013-02-28 | 2014-09-04 | 新電元工業株式会社 | Module, module assembly, and module manufacturing method |
WO2016174697A1 (en) * | 2015-04-28 | 2016-11-03 | 新電元工業株式会社 | Semiconductor module and production method for semiconductor module |
JP2017017297A (en) * | 2015-07-07 | 2017-01-19 | 株式会社リコー | Semiconductor device and laser equipment |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008235852A (en) * | 2007-02-23 | 2008-10-02 | Hitachi Metals Ltd | Ceramic substrate and semiconductor module using the same |
WO2014132397A1 (en) * | 2013-02-28 | 2014-09-04 | 新電元工業株式会社 | Module, module assembly, and module manufacturing method |
WO2016174697A1 (en) * | 2015-04-28 | 2016-11-03 | 新電元工業株式会社 | Semiconductor module and production method for semiconductor module |
JP2017017297A (en) * | 2015-07-07 | 2017-01-19 | 株式会社リコー | Semiconductor device and laser equipment |
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