JP7018459B2 - Electronic module - Google Patents

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JP7018459B2
JP7018459B2 JP2019566025A JP2019566025A JP7018459B2 JP 7018459 B2 JP7018459 B2 JP 7018459B2 JP 2019566025 A JP2019566025 A JP 2019566025A JP 2019566025 A JP2019566025 A JP 2019566025A JP 7018459 B2 JP7018459 B2 JP 7018459B2
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substrate
exposed
electronic element
side region
position corresponding
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JPWO2019142256A1 (en
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康亮 池田
理 松嵜
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Shindengen Electric Manufacturing Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/34Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L2224/39Structure, shape, material or disposition of the strap connectors after the connecting process
    • H01L2224/40Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

本発明は、電子素子を封止部内に含み、放熱層を有する電子モジュールに関する。 The present invention relates to an electronic module containing an electronic element in a sealing portion and having a heat dissipation layer.

複数の電子素子が封止樹脂内に設けられた電子モジュールが従来から知られている(例えば特開2014-45157号参照)。このような電子モジュールにおいて電子素子をより多くしたいニーズがある。 An electronic module in which a plurality of electronic elements are provided in a sealing resin has been conventionally known (see, for example, Japanese Patent Application Laid-Open No. 2014-45157). There is a need to increase the number of electronic elements in such an electronic module.

より多くの電子素子を設ける手段として、電子素子を層状に積み重ねていく態様を採用することが考えられる。その際には、電子素子(第一電子素子)の一方側(例えばおもて面側)に別の電子素子(第二電子素子)を設けることが考えられる。 As a means for providing more electronic devices, it is conceivable to adopt a mode in which the electronic devices are stacked in layers. In that case, it is conceivable to provide another electronic element (second electronic element) on one side (for example, the front surface side) of the electronic element (first electronic element).

さらに電子素子の数を増やすとなると、第一基板及び第二基板の面方向での大きさが大きくなってしまう。このように、第一基板及び第二基板の面方向の大きさが大きくなると、熱処理工程で第一基板及び第二基板が反ってしまうことがある。 Further, when the number of electronic elements is increased, the sizes of the first substrate and the second substrate in the plane direction become large. As described above, when the size of the first substrate and the second substrate in the plane direction becomes large, the first substrate and the second substrate may be warped in the heat treatment step.

他方、第一絶縁性基板と、第一絶縁性基板の搭載面に設けられた第一導体層と、第一導体層に設けられた第一パワーデバイスと、第一パワーデバイスに接続された第一接続部と、を有する第一部材と、第二絶縁性基板と、第二絶縁性基板の搭載面に設けられた第二導体層と、第二導体層に設けられた第二パワーデバイスと、第二パワーデバイスに接続された第二接続部と、を有する第二部材と、第一部材と第二部材との間で上下方向に延在する導体柱と、を有する半導体モジュールが国際公開公報2016/174698で提案されている。この態様では、第一パワーデバイスと第二パワーデバイスとが対向して配置されるとともに、導体柱で互いに接続されている。 On the other hand, the first insulating substrate, the first conductor layer provided on the mounting surface of the first insulating substrate, the first power device provided on the first conductor layer, and the first power device connected to the first power device. A first member having one connection portion, a second insulating substrate, a second conductor layer provided on the mounting surface of the second insulating substrate, and a second power device provided on the second conductor layer. , A semiconductor module having a second member having a second connecting portion connected to the second power device, and a conductor column extending in the vertical direction between the first member and the second member is released internationally. It is proposed in Japanese Patent Publication No. 2016/174698. In this aspect, the first power device and the second power device are arranged so as to face each other and are connected to each other by a conductor column.

発明者が検討したところによると、封止樹脂を流し込む際等の熱処理工程において、熱が伝わりやすい箇所、国際公開公報2016/174698で言えば導体柱を起点として基板がひずむことが判明した。 According to the investigation by the inventor, it has been found that the substrate is distorted from the place where heat is easily transferred, that is, the conductor column in the case of International Publication 2016/174698, in the heat treatment process such as when the sealing resin is poured.

本発明は、このような点を鑑みてなされたものであり、基板におけるひずみ、特に導体柱のような接続体を起点として基板がひずむことを防止できる電子モジュールを提供する。 The present invention has been made in view of these points, and provides an electronic module capable of preventing distortion in a substrate, particularly distortion of the substrate starting from a connecting body such as a conductor column.

[概念1]
本発明による電子モジュールは、
第一放熱層と、
前記第一放熱層の一方側に設けられた第一基板と、
前記第一基板の一方側に設けられた第一電子素子と、
前記第一電子素子の一方側に設けられた第二電子素子と、
前記第二電子素子の一方側に設けられた第二基板と、
前記第二基板の一方側に設けられた第二放熱層と、
少なくとも前記第一電子素子及び前記第二電子素子を封止する封止部と、
前記第一電子素子と前記第二電子素子との間又は前記第二電子素子と前記第二基板との間に設けられた接続体と、
を備え、
前記第一放熱層は前記接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有してもよい。
[Concept 1]
The electronic module according to the present invention
With the first heat dissipation layer,
The first substrate provided on one side of the first heat dissipation layer and
The first electronic element provided on one side of the first substrate and
The second electronic element provided on one side of the first electronic element and
A second substrate provided on one side of the second electronic element and
A second heat dissipation layer provided on one side of the second substrate,
At least a sealing portion that seals the first electronic element and the second electronic element,
A connector provided between the first electronic element and the second electronic element or between the second electronic element and the second substrate,
Equipped with
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at a position corresponding to the other side region of the connection body, or the second heat dissipation layer corresponds to the one side region of the connection body. It may have a second exposed portion where the second substrate is exposed at the position.

[概念2]
本発明の概念1による電子モジュールにおいて、
前記第一露出部は前記接続体の他方側領域に対応する位置の一部だけを含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の一部だけを含んでもよい。
[Concept 2]
In the electronic module according to the concept 1 of the present invention.
The first exposed portion includes only a part of the position corresponding to the other side region of the connector, or
The second exposed portion may include only a part of the position corresponding to the one-sided region of the connector.

[概念3]
本発明の概念1による電子モジュールにおいて、
前記第一露出部は前記接続体の他方側領域に対応する位置の全部を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の全部を含んでもよい。
[Concept 3]
In the electronic module according to the concept 1 of the present invention.
The first exposed portion includes or includes all of the positions corresponding to the other side region of the connector.
The second exposed portion may include all of the positions corresponding to one side region of the connector.

[概念4]
本発明の概念1による電子モジュールにおいて、
前記第一露出部は前記接続体の他方側領域に対応する位置の周縁を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の周縁を含んでもよい。
[Concept 4]
In the electronic module according to the concept 1 of the present invention.
The first exposed portion includes or includes a peripheral edge at a position corresponding to the other side region of the connector.
The second exposed portion may include a peripheral edge at a position corresponding to one side region of the connector.

[概念5]
本発明の概念1乃至4による電子モジュールにおいて、
前記接続体が複数設けられ、
前記接続体の各々に対応する露出部が設けられてもよい。
[Concept 5]
In the electronic module according to the concepts 1 to 4 of the present invention.
A plurality of the above-mentioned connections are provided, and the connection body is provided.
An exposed portion corresponding to each of the connecting bodies may be provided.

[概念6]
本発明の概念1乃至5による電子モジュールにおいて、
前記接続体は、前記第一電子素子と前記第二電子素子との間に設けられた第一接続体と、前記第二電子素子と前記第二基板との間に設けられた第二接続体とを有し、
前記第一放熱層は前記第一接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記第二接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有してもよい。
[Concept 6]
In the electronic module according to the concepts 1 to 5 of the present invention.
The connection body is a first connection body provided between the first electronic element and the second electronic element, and a second connection body provided between the second electronic element and the second substrate. And have
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at a position corresponding to the other side region of the first connection body, or the second heat dissipation layer is one side of the second connection body. There may be a second exposed portion where the second substrate is exposed at a position corresponding to the region.

[概念7]
本発明の概念1乃至6による電子モジュールにおいて、
前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の全部で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の全部で前記第二基板が露出する第二露出部を有してもよい。
[Concept 7]
In the electronic module according to the concepts 1 to 6 of the present invention.
The connecting body has a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at all positions corresponding to the other side region of the pillar portion, or the second heat radiation layer is located on one side region of the pillar portion. There may be a second exposed portion where the second substrate is exposed at all of the corresponding positions.

[概念8]
本発明の概念1乃至6による電子モジュールにおいて、
前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の周縁で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の周縁で前記第二基板が露出する第二露出部を有してもよい。
[Concept 8]
In the electronic module according to the concepts 1 to 6 of the present invention.
The connecting body has a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at a peripheral edge at a position corresponding to the other side region of the pillar portion, or the second heat radiation layer is located on one side region of the pillar portion. There may be a second exposed portion where the second substrate is exposed at the peripheral edge of the corresponding position.

本発明において、第一放熱層のうち熱が伝わりやす接続体の他方側領域において第一基板が露出するか、又は、第二放熱層のうち熱が伝わりやすい接続体の一方側領域において第二基板が露出する態様を採用した場合には、第一基板又は第二基板が接続体の面内方向の位置を起点としてひずむことを防止できる。 In the present invention, the first substrate is exposed in the other side region of the connection body in which heat is easily transferred in the first heat dissipation layer, or the second in one side region of the connection body in which heat is easily transferred in the second heat dissipation layer. When the aspect in which the substrate is exposed is adopted, it is possible to prevent the first substrate or the second substrate from being distorted starting from the position in the in-plane direction of the connecting body.

図1は、本発明の第1の実施の形態で用いられうる電子モジュールの側方断面図である。FIG. 1 is a side sectional view of an electronic module that can be used in the first embodiment of the present invention. 図2は、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第二露出部との関係を示した平面図である。FIG. 2 is a plan view of an electronic module that can be used in the first embodiment of the present invention, and is a plan view showing the relationship between the second connecting body and the second exposed portion. 図3は、図2に示す態様とは異なる態様であり、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第二露出部との関係を示した平面図である。FIG. 3 is a plan view of an electronic module that is different from the aspect shown in FIG. 2 and can be used in the first embodiment of the present invention, and is a relationship between the second connecting body and the second exposed portion. It is a plan view which showed. 図4は、図2及び図3に示す態様とは異なる態様であり、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第二露出部との関係を示した平面図である。FIG. 4 is a plan view of an electronic module which is different from the embodiment shown in FIGS. 2 and 3 and can be used in the first embodiment of the present invention, and is a second connection body and a second exposed portion. It is a top view which showed the relationship with. 図5は、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第二露出部との関係を示した平面図である。FIG. 5 is a plan view of an electronic module that can be used in the first embodiment of the present invention, and is a plan view showing the relationship between the first connecting body and the second exposed portion. 図6は、図5に示す態様とは異なる態様であり、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第二露出部との関係を示した平面図である。FIG. 6 is a plan view of an electronic module that is different from the aspect shown in FIG. 5 and can be used in the first embodiment of the present invention, and is a plan view of the relationship between the first connecting body and the second exposed portion. It is a plan view which showed. 図7は、図5及び図6に示す態様とは異なる態様であり、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第二露出部との関係を示した平面図である。FIG. 7 is a plan view of an electronic module which is different from the embodiment shown in FIGS. 5 and 6 and can be used in the first embodiment of the present invention, and is a plan view of a first connector and a second exposed portion. It is a top view which showed the relationship with. 図8は、図2乃至図4に示す態様とは異なる態様であり、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第二露出部との関係を示した平面図である。FIG. 8 is a plan view of an electronic module which is different from the aspect shown in FIGS. 2 to 4 and can be used in the first embodiment of the present invention, and is a second connection body and a second exposed portion. It is a top view which showed the relationship with. 図9は、図2乃至図4及び図8に示す態様とは異なる態様であり、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第二露出部との関係を示した平面図である。FIG. 9 is a plan view of an electronic module which is different from the embodiment shown in FIGS. 2 to 4 and 8 and can be used in the first embodiment of the present invention, and is a plan view of a second connector and a second connector. (Ii) It is a plan view which showed the relationship with the exposed part. 図10は、図5乃至図7に示す態様とは異なる態様であり、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第二露出部との関係を示した平面図である。FIG. 10 is a plan view of an electronic module which is different from the aspect shown in FIGS. 5 to 7 and can be used in the first embodiment of the present invention, and is a plan view of a first connector and a second exposed portion. It is a top view which showed the relationship with. 図11は、図5乃至図7及び図10に示す態様とは異なる態様であり、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第二露出部との関係を示した平面図である。FIG. 11 is a plan view of an electronic module which is different from the embodiment shown in FIGS. 5 to 7 and 10 and can be used in the first embodiment of the present invention, and is a plan view of the first connector and the first connector. (Ii) It is a plan view which showed the relationship with the exposed part. 図12は、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、複数の第二露出部が設けられた態様を示した平面図である。FIG. 12 is a plan view of an electronic module that can be used in the first embodiment of the present invention, and is a plan view showing a mode in which a plurality of second exposed portions are provided. 図13は、本発明の第2の実施の形態で用いられうる電子モジュールの側方断面図である。FIG. 13 is a side sectional view of an electronic module that can be used in the second embodiment of the present invention. 図14は、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第一露出部との関係を示した平面図である。FIG. 14 is a plan view of an electronic module that can be used in the second embodiment of the present invention, and is a plan view showing the relationship between the first connecting body and the first exposed portion. 図15は、図14に示す態様とは異なる態様であり、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第一露出部との関係を示した平面図である。FIG. 15 is a plan view of an electronic module that is different from the aspect shown in FIG. 14 and can be used in the second embodiment of the present invention, and is a plan view of the relationship between the first connecting body and the first exposed portion. It is a plan view which showed. 図16は、図14及び図15に示す態様とは異なる態様であり、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第一露出部との関係を示した平面図である。FIG. 16 is a plan view of an electronic module which is different from the embodiment shown in FIGS. 14 and 15 and can be used in the second embodiment of the present invention, and is a plan view of a first connector and a first exposed portion. It is a top view which showed the relationship with. 図17は、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第一露出部との関係を示した平面図である。FIG. 17 is a plan view of an electronic module that can be used in the second embodiment of the present invention, and is a plan view showing the relationship between the second connecting body and the first exposed portion. 図18は、図17に示す態様とは異なる態様であり、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第一露出部との関係を示した平面図である。FIG. 18 is a plan view of an electronic module that is different from the aspect shown in FIG. 17 and can be used in the second embodiment of the present invention, and is a relationship between the second connecting body and the first exposed portion. It is a plan view which showed. 図19は、図17及び図18に示す態様とは異なる態様であり、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第一露出部との関係を示した平面図である。FIG. 19 is a plan view of an electronic module which is different from the embodiment shown in FIGS. 17 and 18 and can be used in the second embodiment of the present invention, and is a plan view of a second connector and a first exposed portion. It is a top view which showed the relationship with. 図20は、図14乃至図16に示す態様とは異なる態様であり、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第一露出部との関係を示した平面図である。FIG. 20 is a plan view of an electronic module which is different from the aspect shown in FIGS. 14 to 16 and can be used in the second embodiment of the present invention, and is a plan view of a first connector and a first exposed portion. It is a top view which showed the relationship with. 図21は、図14乃至図16及び図20に示す態様とは異なる態様であり、本発明の第1の実施の形態で用いられうる電子モジュールの平面図であって、第一接続体と第一露出部との関係を示した平面図である。21 is a plan view of an electronic module which is different from the embodiment shown in FIGS. 14 to 16 and 20 and can be used in the first embodiment of the present invention, and is a plan view of the first connector and the first connector. It is a top view which showed the relationship with one exposed part. 図22は、図17乃至図19に示す態様とは異なる態様であり、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第一露出部との関係を示した平面図である。22 is a plan view of the electronic module which is different from the aspect shown in FIGS. 17 to 19 and can be used in the second embodiment of the present invention, and is a plan view of the second connector and the first exposed portion. It is a top view which showed the relationship with. 図23は、図17乃至図19及び図22に示す態様とは異なる態様であり、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、第二接続体と第一露出部との関係を示した平面図である。FIG. 23 is a plan view of an electronic module which is different from the aspect shown in FIGS. 17 to 19 and 22 and can be used in the second embodiment of the present invention, and is a plan view of the second connector and the second. It is a top view which showed the relationship with one exposed part. 図24は、本発明の第2の実施の形態で用いられうる電子モジュールの平面図であって、複数の第一露出部が設けられた態様を示した平面図である。FIG. 24 is a plan view of an electronic module that can be used in the second embodiment of the present invention, and is a plan view showing a mode in which a plurality of first exposed portions are provided.

第1の実施の形態
《構成》
本実施の形態において、「一方側」は図1の上方側を意味し、「他方側」は図1の下方側を意味する。図1の上下方向を「第一方向」と呼び、左右方向を「第三方向」と呼び、紙面の表裏方向を「第二方向」と呼ぶ。第二方向及び第三方向を含む面内方向を「面内方向」といい、一方側から他方側に向かって見た場合には「平面視」といい、他方側から一方側に向かって見た場合には「底面視」という。
First Embodiment << Configuration >>
In this embodiment, "one side" means the upper side of FIG. 1 and "the other side" means the lower side of FIG. The vertical direction of FIG. 1 is referred to as a "first direction", the left-right direction is referred to as a "third direction", and the front and back directions of the paper surface are referred to as a "second direction". The in-plane direction including the second direction and the third direction is called "in-plane direction", and when viewed from one side toward the other side, it is called "planar view", and when viewed from the other side toward one side. In that case, it is called "bottom view".

図1に示すように、電子モジュールは、第一放熱層19と、第一放熱層19の一方側に設けられた第一基板11と、第一基板11の一方側に設けられた第一導体層12と、第一導体層12の一方側に設けられた第一電子素子13と、第一電子素子13の一方側に設けられた第二電子素子23と、第二電子素子23の一方側に設けられた第二導体層22と、第二導体層22の一方側に設けられた第二基板21と、第二基板21の一方側に設けられた第二放熱層29と、第一電子素子13及び第二電子素子23を封止する封止樹脂等から構成される封止部90と、を有してもよい。 As shown in FIG. 1, the electronic module includes a first heat radiating layer 19, a first substrate 11 provided on one side of the first heat radiating layer 19, and a first conductor provided on one side of the first board 11. One side of the layer 12, the first electronic element 13 provided on one side of the first conductor layer 12, the second electronic element 23 provided on one side of the first electronic element 13, and the second electronic element 23. The second conductor layer 22 provided in the second conductor layer 22, the second substrate 21 provided on one side of the second conductor layer 22, the second heat radiation layer 29 provided on one side of the second substrate 21, and the first electron. It may have a sealing portion 90 made of a sealing resin or the like that seals the element 13 and the second electronic element 23.

第一導体層12及び第二導体層22の両方又はいずれか一方は端子部100と接続されてもよく、端子部100の先端側は封止部90の外方に露出して、制御基板等の外部装置と接続可能となってもよい。端子部100は、第一端子部110及び第二端子部120を有してもよい。第一端子部110は、第一端子部基端部111と、少なくとも一部が封止部90から露出した第一端子部外方部113と、第一端子部基端部111と第一端子部外方部113との間に設けられ、第一端子部基端部111側で他方側に曲げられた第一屈曲部112と、を有してもよい。第二端子部120は、第二端子部基端部121と、少なくとも一部が封止部90から露出した第二端子部外方部123と、第二端子部基端部121と第二端子部外方部123との間に設けられ、第二端子部基端部121側で一方側に曲げられた第二屈曲部122と、を有してもよい。 Either or both of the first conductor layer 12 and the second conductor layer 22 may be connected to the terminal portion 100, and the tip end side of the terminal portion 100 is exposed to the outside of the sealing portion 90, such as a control board. It may be possible to connect to an external device of. The terminal portion 100 may have a first terminal portion 110 and a second terminal portion 120. The first terminal portion 110 includes a first terminal portion base end portion 111, a first terminal portion outer portion 113 having at least a part exposed from the sealing portion 90, and a first terminal portion base end portion 111 and a first terminal. It may have a first bent portion 112 which is provided between the outer portion 113 and bent to the other side on the side of the base end portion 111 of the first terminal portion. The second terminal portion 120 includes a second terminal portion base end portion 121, a second terminal portion outer portion 123 having at least a part exposed from the sealing portion 90, and a second terminal portion base end portion 121 and a second terminal. It may have a second bent portion 122 which is provided between the outer portion 123 and bent to one side on the side of the base end portion 121 of the second terminal portion.

第一基板11の一方側に、樹脂封止する際に金型で押圧される、第一電子素子13及び第二電子素子23に電気的に接続されていない非接続導体層50が設けられてもよい(図2参照)。 On one side of the first substrate 11, a non-connecting conductor layer 50 that is pressed by a mold when sealing the resin and is not electrically connected to the first electronic element 13 and the second electronic element 23 is provided. It may be good (see FIG. 2).

本実施の形態の電子モジュールは、接続体60,70を有してもよい。接続体60,70は、第一電子素子13と第二電子素子23との間に設けられた第一接続体60と、第二電子素子23の第一接続体60と反対側に設けられた第二接続体70とを有してもよい。本実施の形態では、第一接続体60及び第二接続体70が設けられる態様を用いて説明するが、このような態様に限られることはなく、第一接続体60及び第二接続体70のいずれか一方だけが設けられてもよい。 The electronic module of this embodiment may have connectors 60, 70. The connecting bodies 60 and 70 are provided on the opposite sides of the first connecting body 60 provided between the first electronic element 13 and the second electronic element 23 and the first connecting body 60 of the second electronic element 23. It may have a second connector 70. In the present embodiment, the embodiment in which the first connecting body 60 and the second connecting body 70 are provided will be described, but the present invention is not limited to such a mode, and the first connecting body 60 and the second connecting body 70 are not limited to such a mode. Only one of the above may be provided.

接続体60,70は、ヘッド部61,71と、ヘッド部61,71からヘッド部61,71の厚み方向(第一方向)で延びた柱部62,72とを有してもよい。接続体60,70が第一接続体60及び第二接続体70を有する態様では、第一接続体60が、第一ヘッド部61と、第一ヘッド部61から第一ヘッド部61の厚み方向で延びた第一柱部62とを有してもよい。また、第二接続体70が、第二ヘッド部71と、第二ヘッド部71から第二ヘッド部71の厚み方向で延びた第二柱部72とを有してもよい。 The connecting bodies 60, 70 may have head portions 61, 71 and pillar portions 62, 72 extending from the head portions 61, 71 in the thickness direction (first direction) of the head portions 61, 71. In the embodiment in which the connecting bodies 60 and 70 have the first connecting body 60 and the second connecting body 70, the first connecting body 60 has the first head portion 61 and the thickness direction from the first head portion 61 to the first head portion 61. It may have the first pillar portion 62 extended by. Further, the second connecting body 70 may have a second head portion 71 and a second pillar portion 72 extending from the second head portion 71 in the thickness direction of the second head portion 71.

第二放熱層29が接続体60,70の一方側領域に対応する位置で第二基板21の一方側の面を露出させる第二露出部140を有してもよい。他方、第一放熱層19は接続体60,70の他方側領域に対応する位置で第一基板11を露出させないように構成されてもよい。接続体60,70の「一方側領域に対応する位置」とは、接続体60,70から一方側に第一方向に沿って直線を引いた際に含まれる位置(領域)であり、接続体60,70の「他方側領域に対応する位置」とは、接続体60,70から他方側に第一方向に沿って直線を引いた際に含まれる位置(領域)である。このため、第二放熱層29が接続体60,70の一方側領域に対応する位置で第二基板21の一方側の面を露出させる第二露出部140を有するとは、平面視(又は底面視)において、接続体60,70と第二露出部140とが少なくとも一部で重複することを意味し、後述する第2の実施の形態ように、第一放熱層19が接続体60,70の他方側領域に対応する位置で第一基板11の他方側の面を露出させる第一露出部150を有するとは、底面視(又は平面視)において、接続体60,70と第一露出部150とが少なくとも一部で重複することを意味している。 The second heat radiating layer 29 may have a second exposed portion 140 that exposes one surface of the second substrate 21 at a position corresponding to one side region of the connecting bodies 60 and 70. On the other hand, the first heat radiating layer 19 may be configured so as not to expose the first substrate 11 at a position corresponding to the other side region of the connecting bodies 60 and 70. The "position corresponding to the one-sided region" of the connecting bodies 60 and 70 is a position (region) included when a straight line is drawn from the connecting bodies 60 and 70 to one side along the first direction, and is a connecting body. The "position corresponding to the other side region" of 60, 70 is a position (region) included when a straight line is drawn from the connecting body 60, 70 to the other side along the first direction. Therefore, it is said that the second heat dissipation layer 29 has the second exposed portion 140 that exposes one surface of the second substrate 21 at a position corresponding to the one side region of the connecting bodies 60 and 70 (or the bottom surface). In (visual), it means that the connecting bodies 60 and 70 and the second exposed portion 140 overlap at least in a part, and the first heat radiating layer 19 is the connecting bodies 60 and 70 as in the second embodiment described later. Having a first exposed portion 150 that exposes the other side surface of the first substrate 11 at a position corresponding to the other side region of the first exposed portion 60, 70 and the first exposed portion in bottom view (or plan view). It means that 150 overlaps at least in part.

第二露出部140は接続体60,70の一方側領域に対応する位置の一部だけを含んでもよく、言い換えると、平面視において、第二露出部140は接続体60,70の一部だけを含んでもよい。このように接続体60,70の一方側領域に対応する位置の一部だけを含む場合には、第二露出部140は接続体60,70の一方側領域に対応する位置の周縁を含むように設けられてもよい。また、このような態様に限られることはなく、第二露出部140は接続体60,70の一方側領域に対応する位置の全部を含むようになっていてもよい。 The second exposed portion 140 may include only a part of the position corresponding to one side region of the connecting bodies 60 and 70, in other words, in a plan view, the second exposed portion 140 is only a part of the connecting bodies 60 and 70. May include. When only a part of the position corresponding to one side region of the connecting bodies 60 and 70 is included in this way, the second exposed portion 140 includes the peripheral edge of the position corresponding to the one side region of the connecting bodies 60 and 70. It may be provided in. Further, the present invention is not limited to such an aspect, and the second exposed portion 140 may include all of the positions corresponding to one side region of the connecting bodies 60 and 70.

第二露出部140は、第一柱部62の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面(図1の上面)を露出させてもよいし、第一ヘッド部61の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させてもよい。また、第二柱部72の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させてもよいし、第二ヘッド部71の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させてもよい。 The second exposed portion 140 may expose one surface (upper surface of FIG. 1) of the second substrate 21 at all or a part of the positions corresponding to the one side region of the first pillar portion 62, or the second exposed portion 140 may be used. One side surface of the second substrate 21 may be exposed at all or a part of the positions corresponding to the one side area of the one head portion 61. Further, one side surface of the second substrate 21 may be exposed at all or a part of the positions corresponding to the one side region of the second pillar portion 72, or the one side region of the second head portion 71 may be exposed. One side of the second substrate 21 may be exposed at all or part of the position.

図2に示す態様では、第二柱部72の一方側領域に対応する位置の全部であり、かつ第二ヘッド部71の一方側領域に対応する位置の一部で第二基板21の一方側の面(図1の上面)が露出されている。言い換えると、図2に示す態様では、平面視において、第二柱部72の全部を含み、かつ第二ヘッド部71の一部を含むようにして、第二露出部140が設けられている。 In the embodiment shown in FIG. 2, it is the entire position corresponding to one side region of the second pillar portion 72, and is a part of the position corresponding to one side region of the second head portion 71, and is one side of the second substrate 21. Surface (upper surface of FIG. 1) is exposed. In other words, in the aspect shown in FIG. 2, the second exposed portion 140 is provided so as to include the entire second pillar portion 72 and a part of the second head portion 71 in a plan view.

図3に示す態様では、第二ヘッド部71の一方側領域に対応する位置の全部が露出されており、平面視において第二ヘッド部71の全部を含むようにして第二露出部140が設けられている。図4に示す態様では、第二柱部72の一方側領域に対応する位置の一部が露出されており、平面視において第二柱部72の一部を含むようにして第二露出部140が設けられている。 In the embodiment shown in FIG. 3, the entire position corresponding to one side region of the second head portion 71 is exposed, and the second exposed portion 140 is provided so as to include the entire second head portion 71 in a plan view. There is. In the embodiment shown in FIG. 4, a part of the position corresponding to one side region of the second pillar portion 72 is exposed, and the second exposed portion 140 is provided so as to include a part of the second pillar portion 72 in a plan view. Has been done.

図5に示す態様では、第一柱部62の一方側領域に対応する位置の全部であり、かつ第一ヘッド部61の一方側領域に対応する位置の一部で第二基板21の一方側の面(図1の上面)が露出されている。言い換えると、図5に示す態様では、平面視において、第一柱部62の全部を含み、かつ第一ヘッド部61の一部を含むようにして、第二露出部140が設けられている。 In the embodiment shown in FIG. 5, it is the entire position corresponding to one side region of the first pillar portion 62, and is a part of the position corresponding to one side region of the first head portion 61, and is one side of the second substrate 21. Surface (upper surface of FIG. 1) is exposed. In other words, in the aspect shown in FIG. 5, the second exposed portion 140 is provided so as to include the entire first pillar portion 62 and a part of the first head portion 61 in a plan view.

図6に示す態様では、第一ヘッド部61の一方側領域に対応する位置の全部が露出されており、平面視において第一ヘッド部61の全部を含むようにして第二露出部140が設けられている。図7に示す態様では、第一柱部62の一方側領域に対応する位置の一部が露出されており、平面視において第一柱部62の一部を含むようにして第二露出部140が設けられている。 In the embodiment shown in FIG. 6, the entire position corresponding to one side region of the first head portion 61 is exposed, and the second exposed portion 140 is provided so as to include the entire first head portion 61 in a plan view. There is. In the embodiment shown in FIG. 7, a part of the position corresponding to one side region of the first pillar portion 62 is exposed, and the second exposed portion 140 is provided so as to include a part of the first pillar portion 62 in a plan view. Has been done.

第二露出部140が接続体60,70の一方側領域に対応する位置の周縁を含むように設けられる場合には、第二露出部140は、第一柱部62の一方側領域に対応する位置の周縁を含むように設けられてもよいし、第一ヘッド部61の一方側領域に対応する位置の周縁を含むように設けられてもよい。また、第二露出部140は、第二柱部72の一方側領域に対応する位置の周縁を含むように設けられてもよいし、第二ヘッド部71の一方側領域に対応する位置の周縁を含むように設けられてもよい。 When the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one-side region of the connecting bodies 60 and 70, the second exposed portion 140 corresponds to the one-side region of the first pillar portion 62. It may be provided so as to include the peripheral edge of the position, or may be provided so as to include the peripheral edge of the position corresponding to one side region of the first head portion 61. Further, the second exposed portion 140 may be provided so as to include a peripheral edge at a position corresponding to one side region of the second pillar portion 72, or a peripheral edge at a position corresponding to one side region of the second head portion 71. May be provided to include.

図8に示す態様では、第二露出部140が第二柱部72の一方側領域に対応する位置の周縁を含むようにして設けられており、第二柱部72の一方側領域の中心では第二基板21の一方側の面は露出されていない。言い換えると、図8に示す態様では、平面視において、第二柱部72の周縁を含み、かつ第二柱部72の中心を含まないようにして、第二露出部140が設けられている。 In the embodiment shown in FIG. 8, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one-sided region of the second pillar portion 72, and the second is provided at the center of the one-sided region of the second pillar portion 72. One surface of the substrate 21 is not exposed. In other words, in the aspect shown in FIG. 8, the second exposed portion 140 is provided so as to include the peripheral edge of the second pillar portion 72 and not include the center of the second pillar portion 72 in a plan view.

図9に示す態様では、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の周縁を含むようにして設けられており、第二ヘッド部71の一方側領域の中心及び第二柱部72の一方側領域では第二基板21の一方側の面は露出されていない。言い換えると、図9に示す態様では、平面視において、第二ヘッド部71の周縁を含み、かつ第二ヘッド部71の中心及び第二柱部72を含まないようにして、第二露出部140が設けられている。 In the embodiment shown in FIG. 9, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one-sided region of the second head portion 71, the center of the one-sided region of the second head portion 71, and the second. In the one-sided region of the pillar 72, the one-sided surface of the second substrate 21 is not exposed. In other words, in the aspect shown in FIG. 9, in a plan view, the second exposed portion 140 is included so as to include the peripheral edge of the second head portion 71 and not include the center of the second head portion 71 and the second pillar portion 72. Is provided.

図10に示す態様では、第二露出部140が第一柱部62の一方側領域に対応する位置の周縁を含むようにして設けられており、第一柱部62の一方側領域の中心では第二基板21の一方側の面は露出されていない。言い換えると、図10に示す態様では、平面視において、第一柱部62の周縁を含み、かつ第一柱部62の中心を含まないようにして、第二露出部140が設けられている。 In the embodiment shown in FIG. 10, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one-sided region of the first pillar portion 62, and the second is provided at the center of the one-sided region of the first pillar portion 62. One surface of the substrate 21 is not exposed. In other words, in the aspect shown in FIG. 10, the second exposed portion 140 is provided so as to include the peripheral edge of the first pillar portion 62 and not include the center of the first pillar portion 62 in a plan view.

図11に示す態様では、第二露出部140が第一ヘッド部61の一方側領域に対応する位置の周縁を含むようにして設けられており、第一ヘッド部61の一方側領域の中心及び第一柱部62の一方側領域では第二基板21の一方側の面は露出されていない。言い換えると、図11に示す態様では、平面視において、第一ヘッド部61の周縁を含み、かつ第一ヘッド部61の中心及び第一柱部62を含まないようにして、第二露出部140が設けられている。 In the embodiment shown in FIG. 11, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one-sided region of the first head portion 61, the center of the one-sided region of the first head portion 61, and the first. In the one-sided region of the pillar portion 62, one side surface of the second substrate 21 is not exposed. In other words, in the aspect shown in FIG. 11, in a plan view, the second exposed portion 140 is included so as to include the peripheral edge of the first head portion 61 and not include the center of the first head portion 61 and the first pillar portion 62. Is provided.

図12に示すように、接続体60,70が面内方向において複数設けられてもよい。この場合には、接続体60,70の各々に対応する第二露出部140が設けられてもよい。このような態様に限られることはなく、接続体60,70の一部にだけ対応する第二露出部140が設けられてもよい。 As shown in FIG. 12, a plurality of connecting bodies 60 and 70 may be provided in the in-plane direction. In this case, the second exposed portion 140 corresponding to each of the connecting bodies 60 and 70 may be provided. The present invention is not limited to such an aspect, and the second exposed portion 140 corresponding to only a part of the connecting bodies 60 and 70 may be provided.

図1に示すように、第一基板11の一方側には複数の第一導体層12が設けられてもよい。第一電子素子13及び第二電子素子23の各々又はいずれか一方はスイッチング素子であってもよいし、制御素子であってもよい。スイッチング素子としてはMOSFETやIGBT等を用いてもよい。第一電子素子13及び第二電子素子23の各々は半導体素子から構成されてもよく、半導体材料としてはシリコン、炭化ケイ素、窒化ガリウム等であってもよい。 As shown in FIG. 1, a plurality of first conductor layers 12 may be provided on one side of the first substrate 11. Each or any one of the first electronic element 13 and the second electronic element 23 may be a switching element or a control element. As the switching element, MOSFET, IGBT, or the like may be used. Each of the first electronic element 13 and the second electronic element 23 may be composed of a semiconductor element, and the semiconductor material may be silicon, silicon carbide, gallium nitride or the like.

第一電子素子13と第一接続体60との間にははんだ等の導電性接着剤(図示せず)が設けられ、第一電子素子13と第一接続体60は導電性接着剤を介して接続されてもよい。同様に、第一接続体60と第二電子素子23との間にははんだ等の導電性接着剤(図示せず)が設けられ、第一接続体60と第二電子素子23は導電性接着剤を介して接続されてもよい。同様に、第二電子素子23と第二接続体70との間にははんだ等の導電性接着剤(図示せず)が設けられ、第二電子素子23と第二接続体70は導電性接着剤を介して接続されてもよい。 A conductive adhesive (not shown) such as solder is provided between the first electronic element 13 and the first connecting body 60, and the first electronic element 13 and the first connecting body 60 are connected via the conductive adhesive. May be connected. Similarly, a conductive adhesive (not shown) such as solder is provided between the first connecting body 60 and the second electronic element 23, and the first connecting body 60 and the second electronic element 23 are conductively bonded. It may be connected via an agent. Similarly, a conductive adhesive (not shown) such as solder is provided between the second electronic element 23 and the second connecting body 70, and the second electronic element 23 and the second connecting body 70 are electrically conductively bonded. It may be connected via an agent.

第一基板11及び第二基板21としては、セラミック基板、絶縁樹脂層等の絶縁性基板を採用することができる。導電性接着剤としては、はんだの他、AgやCuを主成分とする材料を用いることもできる。第一接続体60及び第二接続体70の材料としてはCu等の金属を用いることができる。なお、基板11,21としては例えば回路パターニングを施した金属基板を用いることもでき、この場合には、基板11,21が導体層12,22を兼ねることになる。 As the first substrate 11 and the second substrate 21, an insulating substrate such as a ceramic substrate or an insulating resin layer can be adopted. As the conductive adhesive, in addition to solder, a material containing Ag or Cu as a main component can also be used. As the material of the first connecting body 60 and the second connecting body 70, a metal such as Cu can be used. As the substrates 11 and 21, for example, a metal substrate subjected to circuit patterning can be used. In this case, the substrates 11 and 21 also serve as the conductor layers 12 and 22.

第一電子素子13がMOSFET等のスイッチング素子である場合には、図1に示すように、第一接続体60側の面(一方側の面)に第一ゲート電極13g及び第一ソース電極13sが設けられてもよい。また、第二電子素子23がMOSFET等のスイッチング素子である場合には、第二接続体70側の面(一方側の面)に第二ゲート電極23g及び第二ソース電極23sが設けられてもよい。この場合、第二接続体70が第二電子素子23の第二ソース電極23sに導電性接着剤を介して接続されてもよい。また、第一接続体60が第一電子素子13の第一ソース電極13sと第二電子素子23の第二接続体70と反対側の面(他方側の面)に設けられた第二ドレイン電極23dとを導電性接着剤を介して接続してもよい。第一電子素子13の第一接続体60と反対側の面(他方側の面)に第一ドレイン電極13dが設けられ、この第一ドレイン電極13dは第一導体層12と導電性接着剤を介して接続されてもよい。第一ゲート電極13gは接続子30と導電性接着剤を介して接続され、この接続子30は第一導体層12と導電性接着剤を介して接続されてもよい。第二ゲート電極23gは接続子40と導電性接着剤を介して接続されて、この接続子40は第二導体層22と導電性接着剤を介して接続されてもよい。 When the first electronic element 13 is a switching element such as a MOSFET, as shown in FIG. 1, the first gate electrode 13 g and the first source electrode 13s are on the surface (one side surface) on the first connector 60 side. May be provided. Further, when the second electronic element 23 is a switching element such as a MOSFET, even if the second gate electrode 23 g and the second source electrode 23s are provided on the surface (one side surface) on the second connector 70 side. good. In this case, the second connecting body 70 may be connected to the second source electrode 23s of the second electronic element 23 via the conductive adhesive. Further, the first connecting body 60 is provided on the surface (the other side surface) opposite to the first source electrode 13s of the first electronic element 13 and the second connecting body 70 of the second electronic element 23. 23d may be connected via a conductive adhesive. A first drain electrode 13d is provided on a surface of the first electronic element 13 opposite to the first connector 60 (the other surface), and the first drain electrode 13d has a first conductor layer 12 and a conductive adhesive. It may be connected via. The first gate electrode 13g may be connected to the connector 30 via a conductive adhesive, and the connector 30 may be connected to the first conductor layer 12 via a conductive adhesive. The second gate electrode 23g may be connected to the connector 40 via a conductive adhesive, and the connector 40 may be connected to the second conductor layer 22 via a conductive adhesive.

端子部100と導体層12,22との接合は、はんだ等の導電性接着剤を利用する態様だけではなく、レーザ溶接を利用してもよいし、超音波接合を利用してもよい。 The bonding between the terminal portion 100 and the conductor layers 12 and 22 is not limited to the embodiment using a conductive adhesive such as solder, but laser welding may be used or ultrasonic bonding may be used.

《作用・効果》
次に、上述した構成からなる本実施の形態による作用・効果の一例について説明する。なお、「作用・効果」で説明するあらゆる態様を、上記構成で採用することができる。
《Action / Effect》
Next, an example of the action / effect according to the present embodiment having the above-described configuration will be described. In addition, all aspects described in "Action / Effect" can be adopted in the above configuration.

本実施の形態において、第二放熱層29のうち熱が伝わりやすい接続体60,70の一方側領域において第二基板21が露出する態様を採用した場合には、接続体60,70の面内方向の位置を起点として第二基板21がひずむことを防止できる。 In the present embodiment, when the aspect in which the second substrate 21 is exposed in one side region of the connecting bodies 60 and 70 where heat is easily transferred in the second heat radiating layer 29 is adopted, the in-plane of the connecting bodies 60 and 70 is adopted. It is possible to prevent the second substrate 21 from being distorted starting from the position in the direction.

第一基板11の一方側に第一電子素子13及び第二電子素子23に、金型で押圧される電気的に接続されていない非接続導体層50を設ける態様を採用した場合には非接続導体層50が金型で押圧されることから、第一基板11における反りを防止できる。 When the embodiment in which the first electronic element 13 and the second electronic element 23 are provided with the unconnected conductor layer 50 pressed by the mold and not electrically connected is provided on one side of the first substrate 11, the first electronic element 13 and the second electronic element 23 are not connected. Since the conductor layer 50 is pressed by the mold, warpage of the first substrate 11 can be prevented.

第一放熱層19が接続体60,70の他方側領域に対応する位置で第一基板11を露出させないように構成される態様を採用した場合には、非接続導体層50を介して金型で押圧されることでひずみが生じにくい第一基板11側において、第一放熱層19の領域(面積)が減って放熱効果が下がることを抑制できる。 When the aspect in which the first heat dissipation layer 19 is configured so as not to expose the first substrate 11 at the position corresponding to the other side region of the connecting bodies 60 and 70 is adopted, the mold is interposed via the non-connecting conductor layer 50. On the side of the first substrate 11 where distortion is unlikely to occur due to being pressed by, the region (area) of the first heat radiating layer 19 is reduced, and it is possible to suppress the reduction of the heat radiating effect.

第二露出部140が、第二ヘッド部71の一方側領域に対応する位置の全部(図3参照)又は一部(図2及び図4参照)で第二基板21の一方側の面を露出させる態様を際した場合には、熱が伝わりやすい第二接続体70に対応する領域で第二基板21の一方側の面を露出させることで、第二基板21がひずむことを防止できることを期待できる。 The second exposed portion 140 exposes one surface of the second substrate 21 at all (see FIG. 3) or a part (see FIGS. 2 and 4) of the positions corresponding to the one side region of the second head portion 71. It is expected that the second substrate 21 can be prevented from being distorted by exposing one surface of the second substrate 21 in the region corresponding to the second connector 70 where heat is easily transferred. can.

第二露出部140が、第二柱部72の一方側領域に対応する位置の全部(図2参照)又は一部(図4参照)で第二基板21の一方側の面を露出させる態様を採用した場合には、特に熱の伝わりやすい第二柱部72に対応する領域で第二基板21の一方側の面を露出させることで、第二基板21がひずむことを効率よく防止できることを期待できる。なお、第二ヘッド部71の一方側領域に対応する位置の一部だけで第二基板21の一方側の面を露出させつつ、第二柱部72の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させる態様を採用した場合には、第二放熱層29の領域が減ることで放熱効果が下がることを減らしつつ、第二基板21がひずむことを効率よく防止できる。 An embodiment in which the second exposed portion 140 exposes one surface of the second substrate 21 at all (see FIG. 2) or a part (see FIG. 4) at positions corresponding to one side region of the second pillar portion 72. When adopted, it is expected that the second substrate 21 can be efficiently prevented from being distorted by exposing one surface of the second substrate 21 in the region corresponding to the second pillar portion 72 where heat is easily transferred. can. In addition, while exposing one side surface of the second substrate 21 only by a part of the position corresponding to one side region of the second head portion 71, all or all of the positions corresponding to one side region of the second pillar portion 72. When the aspect of exposing one surface of the second substrate 21 is partially adopted, the second substrate 21 is distorted while reducing the decrease in the heat dissipation effect due to the reduction of the area of the second heat dissipation layer 29. Can be prevented efficiently.

第二露出部140が、第一ヘッド部61の一方側領域に対応する位置の全部(図6参照)又は一部(図5及び図7参照)で第二基板21の一方側の面を露出させる態様を際した場合には、熱の伝わりやすい第一接続体60に対応する領域で第二基板21の一方側の面を露出させることで、第二基板21がひずむことを防止できることを期待できる。 The second exposed portion 140 exposes one surface of the second substrate 21 at all (see FIG. 6) or a part (see FIGS. 5 and 7) of the positions corresponding to the one side region of the first head portion 61. It is expected that the second substrate 21 can be prevented from being distorted by exposing one surface of the second substrate 21 in the region corresponding to the first connector 60 where heat is easily transferred. can.

第二露出部140が、第一柱部62の一方側領域に対応する位置の全部(図5参照)又は一部(図7参照)で第二基板21の一方側の面を露出させる態様を採用した場合には、特に熱の伝わりやすい第一柱部62に対応する領域で第二基板21の一方側の面を露出させることで、第二基板21がひずむことを効率よく防止できることを期待できる。なお、第一ヘッド部61の一方側領域に対応する位置の一部だけで第二基板21の一方側の面を露出させつつ、第一柱部62の一方側領域に対応する位置の全部又は一部で第二基板21の一方側の面を露出させる態様を採用した場合には、第二放熱層29の領域が減ることで放熱効果が下がることを減らしつつ、第二基板21がひずむことを効率よく防止できる。 An embodiment in which the second exposed portion 140 exposes one surface of the second substrate 21 at all (see FIG. 5) or a part (see FIG. 7) of the positions corresponding to the one side region of the first pillar portion 62. When adopted, it is expected that the second substrate 21 can be efficiently prevented from being distorted by exposing one surface of the second substrate 21 in the region corresponding to the first pillar portion 62 where heat is easily transferred. can. In addition, while exposing one side surface of the second substrate 21 only by a part of the position corresponding to one side region of the first head portion 61, all or all of the positions corresponding to one side region of the first pillar portion 62. When the aspect of exposing one surface of the second substrate 21 is partially adopted, the second substrate 21 is distorted while reducing the decrease in the heat dissipation effect due to the reduction of the area of the second heat dissipation layer 29. Can be prevented efficiently.

発明者が実験したところ接続体60,70の周縁領域で第二基板21の一方側の面を露出させることで第二基板21のひずみを解消できる場合があることが判明している。 As a result of experiments by the inventor, it has been found that the strain of the second substrate 21 may be eliminated by exposing one surface of the second substrate 21 in the peripheral region of the connecting bodies 60 and 70.

このため、図9に示すように、第二露出部140を第二ヘッド部71の一方側領域に対応する位置の周縁を含むように設け、第二ヘッド部71の一方側領域に対応する位置の周縁で第二基板21の一方側の面を露出させる態様を採用することで、第二基板21がひずむことを防止できることを期待できる。また、図8に示すように、熱の特に伝達しやすい第二柱部72の一方側領域に対応する位置の周縁を含むように第二露出部140を設け、第二柱部72の一方側領域に対応する位置の周縁で第二基板21の一方側の面を露出させる態様を採用することで、第二基板21がひずむことを防止できることを期待できる。 Therefore, as shown in FIG. 9, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the second head portion 71, and the position corresponding to the one side region of the second head portion 71. It can be expected that the second substrate 21 can be prevented from being distorted by adopting an embodiment in which one surface of the second substrate 21 is exposed at the peripheral edge of the second substrate 21. Further, as shown in FIG. 8, a second exposed portion 140 is provided so as to include a peripheral edge at a position corresponding to one side region of the second pillar portion 72 where heat is particularly easily transferred, and one side of the second pillar portion 72 is provided. It can be expected that the second substrate 21 can be prevented from being distorted by adopting an embodiment in which one surface of the second substrate 21 is exposed at the peripheral edge of the position corresponding to the region.

また、図11に示すように、第二露出部140を第一ヘッド部61の一方側領域に対応する位置の周縁を含むように設け、第一ヘッド部61の一方側領域に対応する位置の周縁で第二基板21の一方側の面を露出させる態様を採用することで、第二基板21がひずむことを防止できることを期待できる。また、図10に示すように、熱の特に伝達しやすい第一柱部62の一方側領域に対応する位置の周縁を含むように第二露出部140を設け、第一柱部62の一方側領域に対応する位置の周縁で第二基板21の一方側の面を露出させる態様を採用することで、第二基板21がひずむことを防止できることを期待できる。 Further, as shown in FIG. 11, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the first head portion 61, and the position corresponding to the one side region of the first head portion 61 is provided. It can be expected that the second substrate 21 can be prevented from being distorted by adopting an embodiment in which one surface of the second substrate 21 is exposed at the peripheral edge. Further, as shown in FIG. 10, a second exposed portion 140 is provided so as to include a peripheral edge at a position corresponding to one side region of the first pillar portion 62 in which heat is particularly easily transferred, and one side of the first pillar portion 62 is provided. It can be expected that the second substrate 21 can be prevented from being distorted by adopting an embodiment in which one surface of the second substrate 21 is exposed at the peripheral edge of the position corresponding to the region.

第2の実施の形態
次に、本発明の第2の実施の形態について説明する。
Second Embodiment Next, a second embodiment of the present invention will be described.

本実施の形態では、第一放熱層19が接続体60,70の他方側領域に対応する位置で第一基板11の他方側の面を露出させる第一露出部150を有している。本実施の形態では、第1の実施の形態で説明したあらゆる態様を採用することができる。第1の実施の形態で説明した部材については同じ符号を用いて説明する。 In the present embodiment, the first heat dissipation layer 19 has a first exposed portion 150 that exposes the other side surface of the first substrate 11 at a position corresponding to the other side region of the connecting bodies 60 and 70. In this embodiment, any aspect described in the first embodiment can be adopted. The members described in the first embodiment will be described with reference to the same reference numerals.

第一露出部150は接続体60,70の他方側領域に対応する位置の一部だけを含んでもよい。このように接続体60,70の他方側領域に対応する位置の一部だけを含む場合には、第一露出部150は接続体60,70の他方側領域に対応する位置の周縁を含むように設けられてもよい。また、このような態様に限られることはなく、第一露出部150は接続体60,70の他方側領域に対応する位置の全部を含むようになっていてもよい。 The first exposed portion 150 may include only a part of the position corresponding to the other side region of the connecting bodies 60 and 70. When only a part of the position corresponding to the other side region of the connecting bodies 60 and 70 is included in this way, the first exposed portion 150 includes the peripheral edge of the position corresponding to the other side region of the connecting bodies 60 and 70. It may be provided in. Further, the present invention is not limited to such an aspect, and the first exposed portion 150 may include all of the positions corresponding to the other side regions of the connecting bodies 60 and 70.

第一露出部150は、第一柱部62の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面(図13の下面)を露出させてもよいし、第一ヘッド部61の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面を露出させてもよい。また、第二柱部72の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面を露出させてもよいし、第二ヘッド部71の他方側領域に対応する位置の全部又は一部で第二基板21の他方側の面を露出させてもよい。 The first exposed portion 150 may expose the other side surface (lower surface of FIG. 13) of the first substrate 11 at all or a part of the positions corresponding to the other side region of the first pillar portion 62, or the first exposed portion 150 may be used. The other side surface of the first substrate 11 may be exposed at all or a part of the positions corresponding to the other side region of the one head portion 61. Further, the other side surface of the first substrate 11 may be exposed at all or a part of the positions corresponding to the other side region of the second pillar portion 72, or may correspond to the other side region of the second head portion 71. The other side of the second substrate 21 may be exposed at all or part of the position.

図14に示す態様では、第一柱部62の一方側領域に対応する位置の全部であり、かつ第一ヘッド部61の一方側領域に対応する位置の一部で第二基板21の一方側の面(図13の下面)が露出されている。言い換えると、図14に示す態様では、底面視において、第一柱部62の全部を含み、かつ第一ヘッド部61の一部を含むようにして、第一露出部150が設けられている。 In the embodiment shown in FIG. 14, it is the entire position corresponding to one side region of the first pillar portion 62, and is a part of the position corresponding to one side region of the first head portion 61, and is one side of the second substrate 21. Surface (lower surface of FIG. 13) is exposed. In other words, in the embodiment shown in FIG. 14, the first exposed portion 150 is provided so as to include the entire first pillar portion 62 and a part of the first head portion 61 in the bottom view.

図15に示す態様では、第一ヘッド部61の一方側領域に対応する位置の全部が露出されており、平面視において第一ヘッド部61の全部を含むようにして第一露出部150が設けられている。図16に示す態様では、第一柱部62の一方側領域に対応する位置の一部が露出されており、底面視において第一柱部62の一部を含むようにして第一露出部150が設けられている。 In the embodiment shown in FIG. 15, the entire position corresponding to one side region of the first head portion 61 is exposed, and the first exposed portion 150 is provided so as to include the entire first head portion 61 in a plan view. There is. In the embodiment shown in FIG. 16, a part of the position corresponding to one side region of the first pillar portion 62 is exposed, and the first exposed portion 150 is provided so as to include a part of the first pillar portion 62 in the bottom view. Has been done.

図17に示す態様では、第二柱部72の一方側領域に対応する位置の全部であり、かつ第二ヘッド部71の一方側領域に対応する位置の一部で第二基板21の一方側の面(図13の下面)が露出されている。言い換えると、図17に示す態様では、底面視において、第二柱部72の全部を含み、かつ第二ヘッド部71の一部を含むようにして、第一露出部150が設けられている。 In the embodiment shown in FIG. 17, it is the entire position corresponding to one side region of the second pillar portion 72, and is a part of the position corresponding to one side region of the second head portion 71, and is one side of the second substrate 21. Surface (lower surface of FIG. 13) is exposed. In other words, in the embodiment shown in FIG. 17, the first exposed portion 150 is provided so as to include the entire second pillar portion 72 and a part of the second head portion 71 in the bottom view.

図18に示す態様では、第二ヘッド部71の一方側領域に対応する位置の全部が露出されており、底面視において第二ヘッド部71の全部を含むようにして第一露出部150が設けられている。図19に示す態様では、第二柱部72の一方側領域に対応する位置の一部が露出されており、底面視において第二柱部72の一部を含むようにして第一露出部150が設けられている。 In the embodiment shown in FIG. 18, the entire position corresponding to one side region of the second head portion 71 is exposed, and the first exposed portion 150 is provided so as to include the entire second head portion 71 in the bottom view. There is. In the embodiment shown in FIG. 19, a part of the position corresponding to one side region of the second pillar portion 72 is exposed, and the first exposed portion 150 is provided so as to include a part of the second pillar portion 72 in the bottom view. Has been done.

第一露出部150が接続体60,70の他方側領域に対応する位置の周縁を含むように設けられる場合には、第一露出部150は、第一柱部62の他方側領域に対応する位置の周縁を含むように設けられてもよいし、第一ヘッド部61の他方側領域に対応する位置の周縁を含むように設けられてもよい。また、第第一露出部150は、第二柱部72の他方側領域に対応する位置の周縁を含むように設けられてもよいし、第二ヘッド部71の他方側領域に対応する位置の周縁を含むように設けられてもよい。 When the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the connecting bodies 60 and 70, the first exposed portion 150 corresponds to the other side region of the first pillar portion 62. It may be provided so as to include the peripheral edge of the position, or may be provided so as to include the peripheral edge of the position corresponding to the other side region of the first head portion 61. Further, the first exposed portion 150 may be provided so as to include the peripheral edge of the position corresponding to the other side region of the second pillar portion 72, or the first exposed portion 150 may be provided at a position corresponding to the other side region of the second head portion 71. It may be provided so as to include a peripheral edge.

図20に示す態様では、第一露出部150が第一柱部62の他方側領域に対応する位置の周縁を含むようにして設けられており、第一柱部62の他方側領域の中心では第一基板11の他方側の面は露出されていない。言い換えると、図20に示す態様では、底面視において、第一柱部62の周縁を含み、かつ第一柱部62の中心を含まないようにして、第一露出部150が設けられている。 In the embodiment shown in FIG. 20, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the first pillar portion 62, and is the first in the center of the other side region of the first pillar portion 62. The other side of the substrate 11 is not exposed. In other words, in the embodiment shown in FIG. 20, the first exposed portion 150 is provided so as to include the peripheral edge of the first pillar portion 62 and not include the center of the first pillar portion 62 in the bottom view.

図21に示す態様では、第一露出部150が第一ヘッド部61の他方側領域に対応する位置の周縁を含むようにして設けられており、第一ヘッド部61の他方側領域の中心及び第一柱部62の他方側領域では第一基板11の他方側の面は露出されていない。言い換えると、図21に示す態様では、底面視において、第一ヘッド部61の周縁を含み、かつ第一ヘッド部61の中心及び第一柱部62を含まないようにして、第一露出部150が設けられている。 In the embodiment shown in FIG. 21, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the first head portion 61, the center of the other side region of the first head portion 61, and the first. In the other side region of the pillar portion 62, the other side surface of the first substrate 11 is not exposed. In other words, in the aspect shown in FIG. 21, in the bottom view, the first exposed portion 150 is included so as to include the peripheral edge of the first head portion 61 and not include the center of the first head portion 61 and the first pillar portion 62. Is provided.

図22に示す態様では、第一露出部150が第二柱部72の他方側領域に対応する位置の周縁を含むようにして設けられており、第二柱部72の他方側領域の中心では第一基板11の他方側の面は露出されていない。言い換えると、図22に示す態様では、底面視において、第二柱部72の周縁を含み、かつ第二柱部72の中心を含まないようにして、第一露出部150が設けられている。 In the embodiment shown in FIG. 22, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the second pillar portion 72, and is the first in the center of the other side region of the second pillar portion 72. The other side of the substrate 11 is not exposed. In other words, in the embodiment shown in FIG. 22, the first exposed portion 150 is provided so as to include the peripheral edge of the second pillar portion 72 and not the center of the second pillar portion 72 in the bottom view.

図23に示す態様では、第一露出部150が第二ヘッド部71の他方側領域に対応する位置の周縁を含むようにして設けられており、第二ヘッド部71の一方側領域の中心及び第二柱部72の他方側領域では第二基板21の一方側の面は露出されていない。言い換えると、図23に示す態様では、底面視において、第二ヘッド部71の周縁を含み、かつ第二ヘッド部71の中心及び第二柱部72を含まないようにして、第一露出部150が設けられている。 In the embodiment shown in FIG. 23, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the second head portion 71, the center of the one side region of the second head portion 71, and the second. In the other side region of the pillar portion 72, one side surface of the second substrate 21 is not exposed. In other words, in the aspect shown in FIG. 23, in the bottom view, the first exposed portion 150 is included so as to include the peripheral edge of the second head portion 71 and not include the center of the second head portion 71 and the second pillar portion 72. Is provided.

第一露出部150が、第一ヘッド部61の他方側領域に対応する位置の全部(図15参照)又は一部(図14及び図16参照)で第一基板11の他方側の面を露出させる態様を際した場合には、熱の伝わりやすい第一接続体60に対応する領域で第一基板11の他方側の面を露出させることで、第一基板11がひずむことを防止できることを期待できる。 The first exposed portion 150 exposes the other side surface of the first substrate 11 at all or a part (see FIGS. 14 and 16) of the positions corresponding to the other side region of the first head portion 61. It is expected that the first substrate 11 can be prevented from being distorted by exposing the other surface of the first substrate 11 in the region corresponding to the first connector 60 where heat is easily transferred. can.

第一露出部150が、第一柱部62の他方側領域に対応する位置の全部(図14参照)又は一部(図16参照)で第一基板11の他方側の面を露出させる態様を採用した場合には、特に熱の伝わりやすい第一柱部62に対応する領域で第一基板11の他方側の面を露出させることで、第一基板11がひずむことを効率よく防止できることを期待できる。なお、第一ヘッド部61の他方側領域に対応する位置の一部だけで第一基板11の他方側の面を露出させつつ、第一柱部62の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面を露出させる態様を採用した場合には、第二放熱層29の領域が減ることで放熱効果が下がることを減らしつつ、第一基板11がひずむことを防止できることを期待できる。 An embodiment in which the first exposed portion 150 exposes the other side surface of the first substrate 11 at all (see FIG. 14) or a part (see FIG. 16) of the positions corresponding to the other side region of the first pillar portion 62. When adopted, it is expected that the first substrate 11 can be efficiently prevented from being distorted by exposing the other surface of the first substrate 11 in the region corresponding to the first pillar portion 62 where heat is easily transferred. can. In addition, while exposing the other side surface of the first substrate 11 only by a part of the position corresponding to the other side region of the first head portion 61, all or all of the positions corresponding to the other side region of the first pillar portion 62. When the aspect of exposing the other side surface of the first substrate 11 is partially adopted, the first substrate 11 is distorted while reducing the decrease in the heat dissipation effect due to the reduction of the region of the second heat dissipation layer 29. Can be expected to be prevented.

第一露出部150が、第二ヘッド部71の他方側領域に対応する位置の全部(図18参照)又は一部(図17及び図19参照)で第一基板11の他方側の面を露出させる態様を際した場合には、熱の伝わりやすい第二接続体70に対応する領域で第一基板11の他方側の面を露出させることで、第一基板11がひずむことを防止できることを期待できる。 The first exposed portion 150 exposes the other side surface of the first substrate 11 at all or a part (see FIGS. 17 and 19) of the positions corresponding to the other side region of the second head portion 71. It is expected that the first substrate 11 can be prevented from being distorted by exposing the other surface of the first substrate 11 in the region corresponding to the second connector 70 where heat is easily transferred. can.

第一露出部150が、第二柱部72の他方側領域に対応する位置の全部(図17参照)又は一部(図19参照)で第一基板11の他方側の面を露出させる態様を採用した場合には、特に熱の伝わりやすい第二柱部72に対応する領域で第一基板11の他方側の面を露出させることで、第一基板11がひずむことを効率よく防止できることを期待できる。なお、第二ヘッド部71の他方側領域に対応する位置の一部だけで第一基板11の他方側の面を露出させつつ、第二柱部72の他方側領域に対応する位置の全部又は一部で第一基板11の他方側の面を露出させる態様を採用した場合には、第二放熱層29の領域が減ることで放熱効果が下がることを減らしつつ、第一基板11がひずむことを防止できることを期待できる。 An embodiment in which the first exposed portion 150 exposes the other side surface of the first substrate 11 at all (see FIG. 17) or a part (see FIG. 19) of the positions corresponding to the other side region of the second pillar portion 72. When adopted, it is expected that the first substrate 11 can be efficiently prevented from being distorted by exposing the other surface of the first substrate 11 in the region corresponding to the second pillar portion 72 where heat is easily transferred. can. In addition, while exposing the other side surface of the first substrate 11 only by a part of the position corresponding to the other side region of the second head portion 71, all or all of the positions corresponding to the other side region of the second pillar portion 72. When the aspect of exposing the other side surface of the first substrate 11 is partially adopted, the first substrate 11 is distorted while reducing the decrease in the heat dissipation effect due to the reduction of the region of the second heat dissipation layer 29. Can be expected to be prevented.

前述したように、発明者が実験したところ接続体60,70の周縁領域で基板のひずみが生じやすい場合があることが判明している。 As described above, as a result of experiments by the inventor, it has been found that the substrate may be easily distorted in the peripheral region of the connectors 60 and 70.

このため、図21に示すように、第一露出部150を第一ヘッド部61の他方側領域に対応する位置の周縁を含むように設け、第一ヘッド部61の他方側領域に対応する位置の周縁で第一基板11の他方側の面を露出させる態様を採用することで、第一基板11がひずむことを防止できることを期待できる。また、図20に示すように、熱の特に伝達しやすい第一柱部62の他方側領域に対応する位置の周縁を含むように第一露出部150を設け、第一柱部62の他方側領域に対応する位置の周縁で第一基板11の他方側の面を露出させる態様を採用することで、第一基板11がひずむことを防止できることを期待できる。 Therefore, as shown in FIG. 21, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the first head portion 61, and the position corresponding to the other side region of the first head portion 61. It can be expected that the first substrate 11 can be prevented from being distorted by adopting an embodiment in which the other surface of the first substrate 11 is exposed at the peripheral edge of the first substrate 11. Further, as shown in FIG. 20, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the first pillar portion 62 in which heat is particularly easily transferred, and the other side of the first pillar portion 62 is provided. It can be expected that the first substrate 11 can be prevented from being distorted by adopting an embodiment in which the other surface of the first substrate 11 is exposed at the peripheral edge of the position corresponding to the region.

また、図23に示すように、第一露出部150を第二ヘッド部71の他方側領域に対応する位置の周縁を含むように設け、第二ヘッド部71の他方側領域に対応する位置の周縁で第一基板11の他方側の面を露出させる態様を採用することで、第一基板11がひずむことを防止できることを期待できる。また、図22に示すように、熱の特に伝達しやすい第二柱部72の他方側領域に対応する位置の周縁を含むように第一露出部150を設け、第二柱部72の他方側領域に対応する位置の周縁で第一基板11の他方側の面を露出させる態様を採用することで、第一基板11がひずむことを防止できることを期待できる。 Further, as shown in FIG. 23, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the second head portion 71, and the position corresponding to the other side region of the second head portion 71 is provided. It can be expected that the first substrate 11 can be prevented from being distorted by adopting an embodiment in which the other surface of the first substrate 11 is exposed at the peripheral edge. Further, as shown in FIG. 22, the first exposed portion 150 is provided so as to include the peripheral edge of the position corresponding to the other side region of the second pillar portion 72 where heat is particularly easily transferred, and the other side of the second pillar portion 72 is provided. It can be expected that the first substrate 11 can be prevented from being distorted by adopting an embodiment in which the other surface of the first substrate 11 is exposed at the peripheral edge of the position corresponding to the region.

本実施の形態では、第二基板21の他方側に第一電子素子13及び第二電子素子23に、金型で押圧される電気的に接続されていない非接続導体層50が設けられてもよい。このような非接続導体層50が設けられることで、第二基板21における反りを防止できる。また、図24に示すように、複数の第一露出部150が設けられてもよい。 In the present embodiment, even if the first electronic element 13 and the second electronic element 23 are provided with the non-connecting conductor layer 50 pressed by the mold and not electrically connected, on the other side of the second substrate 21. good. By providing such a non-connecting conductor layer 50, it is possible to prevent warpage in the second substrate 21. Further, as shown in FIG. 24, a plurality of first exposed portions 150 may be provided.

第3の実施の形態
次に、本発明の第3の実施の形態について説明する。
Third Embodiment Next, a third embodiment of the present invention will be described.

本実施の形態では、第一放熱層19が接続体60,70の他方側領域に対応する位置で第一基板11を露出させる第一露出部150を有し、かつ第二放熱層29が接続体60,70の一方側領域に対応する位置で第二基板21を露出させる第二露出部140を有している。本実施の形態では、上記各実施の形態で説明したあらゆる態様を採用することができる。上記各実施の形態で説明した部材については同じ符号を用いて説明する。 In the present embodiment, the first heat radiating layer 19 has a first exposed portion 150 that exposes the first substrate 11 at a position corresponding to the other side region of the connecting bodies 60 and 70, and the second heat radiating layer 29 is connected. It has a second exposed portion 140 that exposes the second substrate 21 at a position corresponding to one side region of the bodies 60 and 70. In this embodiment, any aspect described in each of the above embodiments can be adopted. The members described in each of the above embodiments will be described using the same reference numerals.

本実施の形態では、第一放熱層19及び第二放熱層29の各々で露出部が設けられていることから、これら第一放熱層19及び第二放熱層29の各々に対して反りが発生することを抑制することを期待できる。 In the present embodiment, since the exposed portions are provided in each of the first heat radiation layer 19 and the second heat radiation layer 29, warpage occurs in each of the first heat radiation layer 19 and the second heat radiation layer 29. It can be expected to suppress doing.

第一露出部150と第二露出部140とで採用される態様の組み合わせとしては様々な態様が考えられる。 Various modes can be considered as the combination of the modes adopted by the first exposed portion 150 and the second exposed portion 140.

一例としては、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の全部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一柱部62の他方側領域に対応する位置の一部で第一基板11の他方側の面を露出させてもよい。また、第二露出部140が第二柱部62の一方側領域に対応する位置の一部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一ヘッド部61の他方側領域に対応する位置の全部で第一基板11の他方側の面を露出させてもよい。 As an example, the first exposed portion 150 is the first pillar portion while the second exposed portion 140 exposes one surface of the second substrate 21 at all the positions corresponding to the one side region of the second head portion 71. The other side surface of the first substrate 11 may be exposed at a part of the position corresponding to the other side region of 62. Further, while the second exposed portion 140 exposes one surface of the second substrate 21 at a part of the position corresponding to the one side region of the second pillar portion 62, the first exposed portion 150 is the first head portion 61. The other side surface of the first substrate 11 may be exposed at all the positions corresponding to the other side region of the first substrate 11.

また、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の全部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一柱部62の他方側領域に対応する位置の周縁を含むように設けられてもよい。また、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の周縁を含むように設けられ、第一露出部150が第一柱部62の他方側領域に対応する位置の全部で第一基板11の他方側の面を露出させてもよい。 Further, while the second exposed portion 140 exposes one surface of the second substrate 21 at all positions corresponding to the one side region of the second head portion 71, the first exposed portion 150 is the first pillar portion 62. It may be provided so as to include the peripheral edge of the position corresponding to the other side region. Further, the second exposed portion 140 is provided so as to include the peripheral edge of the position corresponding to the one side region of the second head portion 71, and the first exposed portion 150 is located at the position corresponding to the other side region of the first pillar portion 62. The other side of the first substrate 11 may be exposed in total.

また、第一露出部150と第二露出部140とで採用される態様が同様となってもよく、第二露出部140が第二ヘッド部71の一方側領域に対応する位置の全部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一ヘッド部61の他方側領域に対応する位置の全部で第一基板11の他方側の面を露出させてもよい。また、第二露出部140が第二柱部72の一方側領域に対応する位置の一部で第二基板21の一方側の面を露出させつつ、第一露出部150が第一柱部62の他方側領域に対応する位置の一部で第一基板11の他方側の面を露出させてもよい。 Further, the mode adopted by the first exposed portion 150 and the second exposed portion 140 may be the same, and the second exposed portion 140 is the entire position corresponding to one side region of the second head portion 71. (2) While exposing one surface of the substrate 21, the other surface of the first substrate 11 may be exposed at all positions where the first exposed portion 150 corresponds to the other side region of the first head portion 61. .. Further, while the second exposed portion 140 exposes one surface of the second substrate 21 at a part of the position corresponding to the one side region of the second pillar portion 72, the first exposed portion 150 is the first pillar portion 62. The other side surface of the first substrate 11 may be exposed at a part of the position corresponding to the other side region of the first substrate 11.

上述した各実施の形態の記載及び図面の開示は、請求の範囲に記載された発明を説明するための一例に過ぎず、上述した実施の形態の記載又は図面の開示によって請求の範囲に記載された発明が限定されることはない。また、出願当初の請求項の記載はあくまでも一例であり、明細書、図面等の記載に基づき、請求項の記載を適宜変更することもできる。 The description of each embodiment and the disclosure of the drawings described above are merely examples for explaining the invention described in the claims, and are described in the claims by the description of the above-described embodiments or disclosure of the drawings. The invention is not limited. Further, the description of the claims at the time of filing is only an example, and the description of the claims may be changed as appropriate based on the description of the description, drawings and the like.

11 第一基板
13 第一電子素子
19 第一放熱層
21 第二基板
23 第二電子素子
29 第二放熱層
50 非接続導体層
60 第一接続体(接続体)
70 第二接続体(接続体)
90 封止部
140 第二露出部
150 第一露出部
11 1st substrate 13 1st electronic element 19 1st heat radiation layer 21 2nd substrate 23 2nd electronic element 29 2nd heat radiation layer 50 non-connecting conductor layer 60 1st connection body (connection body)
70 Second connector (connector)
90 Sealing part 140 Second exposed part 150 First exposed part

Claims (8)

第一放熱層と、
前記第一放熱層の一方側に設けられた第一基板と、
前記第一基板の一方側に設けられた第一電子素子と、
前記第一電子素子の一方側に設けられた第二電子素子と、
前記第二電子素子の一方側に設けられた第二基板と、
前記第二基板の一方側に設けられた第二放熱層と、
少なくとも前記第一電子素子及び前記第二電子素子を封止する封止部と、
前記第一電子素子と前記第二電子素子との間又は前記第二電子素子と前記第二基板との間に設けられた接続体と、
を備え、
前記第一放熱層は前記接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有し、前記第一露出部の周縁全体において前記第一基板が露出していない部分が存在し、又は、前記第二放熱層は前記接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有し、前記第二露出部の周縁全体において前記第二基板が露出していない部分が存在することを特徴とする電子モジュール。
With the first heat dissipation layer,
The first substrate provided on one side of the first heat dissipation layer and
The first electronic element provided on one side of the first substrate and
The second electronic element provided on one side of the first electronic element and
A second substrate provided on one side of the second electronic element and
A second heat dissipation layer provided on one side of the second substrate,
At least a sealing portion that seals the first electronic element and the second electronic element,
A connector provided between the first electronic element and the second electronic element or between the second electronic element and the second substrate,
Equipped with
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at a position corresponding to the other side region of the connector, and the first substrate is exposed over the entire peripheral edge of the first exposed portion. There is no portion , or the second heat dissipation layer has a second exposed portion where the second substrate is exposed at a position corresponding to one side region of the connector, and the entire peripheral edge of the second exposed portion. An electronic module characterized in that there is a portion where the second substrate is not exposed .
前記第一露出部は前記接続体の他方側領域に対応する位置の一部だけを含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の一部だけを含むことを特徴とする請求項1に記載の電子モジュール。
The first exposed portion includes only a part of the position corresponding to the other side region of the connector, or
The electronic module according to claim 1, wherein the second exposed portion includes only a part of a position corresponding to one side region of the connector.
第一放熱層と、
前記第一放熱層の一方側に設けられた第一基板と、
前記第一基板の一方側に設けられた第一電子素子と、
前記第一電子素子の一方側に設けられた第二電子素子と、
前記第二電子素子の一方側に設けられた第二基板と、
前記第二基板の一方側に設けられた第二放熱層と、
少なくとも前記第一電子素子及び前記第二電子素子を封止する封止部と、
前記第一電子素子と前記第二電子素子との間又は前記第二電子素子と前記第二基板との間に設けられた接続体と、
を備え、
前記第一放熱層は前記接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有し、
前記第一露出部は前記接続体の他方側領域に対応する位置の全部を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の全部を含むことを特徴とする電子モジュール。
With the first heat dissipation layer,
The first substrate provided on one side of the first heat dissipation layer and
The first electronic element provided on one side of the first substrate and
The second electronic element provided on one side of the first electronic element and
A second substrate provided on one side of the second electronic element and
A second heat dissipation layer provided on one side of the second substrate,
At least a sealing portion that seals the first electronic element and the second electronic element,
A connector provided between the first electronic element and the second electronic element or between the second electronic element and the second substrate,
Equipped with
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at a position corresponding to the other side region of the connection body, or the second heat dissipation layer corresponds to the one side region of the connection body. It has a second exposed portion where the second substrate is exposed at the position.
The first exposed portion includes or includes all of the positions corresponding to the other side region of the connector.
The second exposed portion is an electronic module including the entire position corresponding to one side region of the connector.
前記第一露出部は前記接続体の他方側領域に対応する位置の周縁を含む、又は、
前記第二露出部は前記接続体の一方側領域に対応する位置の周縁を含むことを特徴とする請求項1に記載の電子モジュール。
The first exposed portion includes or includes a peripheral edge at a position corresponding to the other side region of the connector.
The electronic module according to claim 1, wherein the second exposed portion includes a peripheral edge at a position corresponding to one side region of the connector.
第一放熱層と、
前記第一放熱層の一方側に設けられた第一基板と、
前記第一基板の一方側に設けられた第一電子素子と、
前記第一電子素子の一方側に設けられた第二電子素子と、
前記第二電子素子の一方側に設けられた第二基板と、
前記第二基板の一方側に設けられた第二放熱層と、
少なくとも前記第一電子素子及び前記第二電子素子を封止する封止部と、
前記第一電子素子と前記第二電子素子との間又は前記第二電子素子と前記第二基板との間に設けられた接続体と、
を備え、
前記第一放熱層は前記接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有し、
前記接続体が複数設けられ、
前記接続体の各々に対応する露出部が設けられることを特徴とする電子モジュール。
With the first heat dissipation layer,
The first substrate provided on one side of the first heat dissipation layer and
The first electronic element provided on one side of the first substrate and
The second electronic element provided on one side of the first electronic element and
A second substrate provided on one side of the second electronic element and
A second heat dissipation layer provided on one side of the second substrate,
At least a sealing portion that seals the first electronic element and the second electronic element,
A connector provided between the first electronic element and the second electronic element or between the second electronic element and the second substrate,
Equipped with
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at a position corresponding to the other side region of the connection body, or the second heat dissipation layer corresponds to the one side region of the connection body. It has a second exposed portion where the second substrate is exposed at the position.
A plurality of the above-mentioned connections are provided, and the connection body is provided.
An electronic module characterized in that an exposed portion corresponding to each of the connectors is provided.
前記接続体は、前記第一電子素子と前記第二電子素子との間に設けられた第一接続体と、前記第二電子素子と前記第二基板との間に設けられた第二接続体とを有し、
前記第一放熱層は前記第一接続体の他方側領域に対応する位置で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記第二接続体の一方側領域に対応する位置で前記第二基板が露出する第二露出部を有することを特徴とする請求項1に記載の電子モジュール。
The connection body is a first connection body provided between the first electronic element and the second electronic element, and a second connection body provided between the second electronic element and the second substrate. And have
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at a position corresponding to the other side region of the first connection body, or the second heat dissipation layer is one side of the second connection body. The electronic module according to claim 1, wherein the electronic module has a second exposed portion in which the second substrate is exposed at a position corresponding to a region.
前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の全部で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の全部で前記第二基板が露出する第二露出部を有することを特徴とする請求項1に記載の電子モジュール。
The connecting body has a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion in which the first substrate is exposed at all positions corresponding to the other side region of the pillar portion, or the second heat radiation layer is located in one side region of the pillar portion. The electronic module according to claim 1, wherein the second substrate has a second exposed portion exposed at all of the corresponding positions.
前記接続体は、ヘッド部と、前記ヘッド部から前記ヘッド部の厚み方向に延びた柱部とを有し、
前記第一放熱層は前記柱部の他方側領域に対応する位置の周縁で前記第一基板が露出する第一露出部を有する、又は、前記第二放熱層は前記柱部の一方側領域に対応する位置の周縁で前記第二基板が露出する第二露出部を有することを特徴とする請求項1に記載の電子モジュール。
The connecting body has a head portion and a pillar portion extending from the head portion in the thickness direction of the head portion.
The first heat dissipation layer has a first exposed portion where the first substrate is exposed at a peripheral edge at a position corresponding to the other side region of the pillar portion, or the second heat radiation layer is located on one side region of the pillar portion. The electronic module according to claim 1, wherein the second substrate has a second exposed portion exposed at a peripheral edge of a corresponding position.
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Citations (4)

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JP2008235852A (en) 2007-02-23 2008-10-02 Hitachi Metals Ltd Ceramic substrate and semiconductor module using the same
WO2014132397A1 (en) 2013-02-28 2014-09-04 新電元工業株式会社 Module, module assembly, and module manufacturing method
WO2016174697A1 (en) 2015-04-28 2016-11-03 新電元工業株式会社 Semiconductor module and production method for semiconductor module
JP2017017297A (en) 2015-07-07 2017-01-19 株式会社リコー Semiconductor device and laser equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008235852A (en) 2007-02-23 2008-10-02 Hitachi Metals Ltd Ceramic substrate and semiconductor module using the same
WO2014132397A1 (en) 2013-02-28 2014-09-04 新電元工業株式会社 Module, module assembly, and module manufacturing method
WO2016174697A1 (en) 2015-04-28 2016-11-03 新電元工業株式会社 Semiconductor module and production method for semiconductor module
JP2017017297A (en) 2015-07-07 2017-01-19 株式会社リコー Semiconductor device and laser equipment

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