WO2019124357A1 - Système d'évaluation, procédé d'évaluation, procédé de sélection, procédé de fabrication, matériau isolant et emballage - Google Patents

Système d'évaluation, procédé d'évaluation, procédé de sélection, procédé de fabrication, matériau isolant et emballage Download PDF

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Publication number
WO2019124357A1
WO2019124357A1 PCT/JP2018/046526 JP2018046526W WO2019124357A1 WO 2019124357 A1 WO2019124357 A1 WO 2019124357A1 JP 2018046526 W JP2018046526 W JP 2018046526W WO 2019124357 A1 WO2019124357 A1 WO 2019124357A1
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Prior art keywords
electrode
insulating material
predetermined temperature
sample
current integrator
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PCT/JP2018/046526
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English (en)
Japanese (ja)
Inventor
進吾 岡村
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パナソニックＩｐマネジメント株式会社
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Priority to JP2019561104A priority Critical patent/JPWO2019124357A1/ja
Publication of WO2019124357A1 publication Critical patent/WO2019124357A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/14—Circuits therefor, e.g. for generating test voltages, sensing circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/16—Construction of testing vessels; Electrodes therefor

Definitions

  • the present disclosure relates generally to an evaluation system, an evaluation method, a sorting method, a manufacturing method, an insulating material, and a package.
  • the present disclosure relates to an evaluation system and an evaluation method for evaluating withstand voltage performance of an insulating material under a predetermined temperature, a method of selecting and manufacturing an insulating material, an insulating material for a power device, and a package.
  • Patent Document 1 discloses a withstand voltage tester.
  • the withstanding voltage tester includes a single-turn transformer that changes voltage, a transformer that boosts and isolates, a contactor that switches the power, a switch that switches the output of the transformer, a current transformer that detects the current flowing to the DUT, and a current detector It consists of
  • An object of the present disclosure is to evaluate the withstand voltage performance of the insulating material at a predetermined temperature with high accuracy.
  • An evaluation system includes a holding unit having a first electrode and a second electrode sandwiching a sample of an insulating material therebetween, and a housing that receives the holding unit therein, and the inside of the housing A chamber for maintaining the temperature of the sensor within a predetermined temperature range, and a current integrator.
  • the current integrator is interposed between a power supply that applies a DC voltage between the first electrode and the second electrode of the holder and the first electrode.
  • the wiring between the current integrator and the first electrode includes a conductor that is at least partially uncoated.
  • An evaluation system includes a holder, a chamber, and a current integrator.
  • the holding portion has a first electrode and a second electrode sandwiching a sample of the insulating material.
  • the chamber has a housing for accommodating the holding portion, and is configured to maintain the temperature inside the housing within a predetermined temperature range.
  • the current integrator is interposed between a power supply that applies a DC voltage between the first electrode and the second electrode of the holder and the first electrode.
  • the wiring between the current integrator and the first electrode includes a conductor at least a part of which is coated with an insulating coating.
  • the material of the insulating coating comprises polytetrafluoroethylene.
  • the evaluation method evaluates whether the withstand voltage performance of the insulating material under a predetermined temperature satisfies a criterion based on the measurement value of the current integrator of the evaluation system.
  • the sorting method sorts out, from a plurality of insulating materials, insulating materials which are evaluated to have withstand voltage performance under a predetermined temperature by the evaluation method as a criterion.
  • the manufacturing method includes the step of preparing a plurality of samples of insulating material. Further, the manufacturing method includes the step of sorting out the samples of the insulating material which are evaluated that the withstand voltage performance under a predetermined temperature satisfies the standard from the samples of the plurality of insulating materials by the evaluation method. Furthermore, the manufacturing method includes the step of manufacturing an insulating material corresponding to the sample of the selected insulating material.
  • the insulating material according to an aspect of the present disclosure is an insulating material evaluated to have a withstand voltage performance under a predetermined temperature satisfying the standard by the evaluation method.
  • the package according to an aspect of the present disclosure is a package formed of the insulating material.
  • FIG. 1 is a schematic view of an evaluation system of one embodiment.
  • FIG. 2 is a perspective view of a holder in the evaluation system of the same.
  • FIG. 3 is a perspective view of the housing of the chamber in the above evaluation system.
  • FIG. 4 is a graph showing the time change of the measurement value of the current integrator in the evaluation system of the same.
  • FIG. 5 is a graph showing the relationship between the output voltage of the power supply device and the measurement value of the current integrator in the evaluation system of the same.
  • FIG. 6 is a graph showing the relationship between the result of the high temperature reverse bias test and the result of the evaluation (25 ° C.) by the above evaluation system.
  • FIG. 1 is a schematic view of an evaluation system of one embodiment.
  • FIG. 2 is a perspective view of a holder in the evaluation system of the same.
  • FIG. 3 is a perspective view of the housing of the chamber in the above evaluation system.
  • FIG. 4 is a graph showing the time change of the measurement value of the current integrat
  • FIG. 7 is a graph showing the relationship between the result of the high temperature reverse bias test and the result of evaluation (150 ° C.) by the above evaluation system.
  • FIG. 8 is a graph showing the relationship between the result of the high temperature reverse bias test and the result of the evaluation (ratio of dielectric constants) by the above evaluation system.
  • FIG. 9 is a schematic view of an evaluation system of a modification.
  • FIG. 1 shows an evaluation system 10 of one embodiment.
  • the evaluation system 10 includes a holding unit 20, a chamber 30, and a current integrator 40.
  • the holding unit 20 has first and second electrodes 21 and 22 sandwiching the sample 100 of the insulating material.
  • the chamber 30 has a housing 31 that houses the holding unit 20 therein, and is configured to maintain the temperature inside the housing 31 within a predetermined temperature range.
  • the current integrator 40 is interposed between the first electrode 21 and the power supply 50 for applying a DC voltage between the first and second electrodes 21 and 22 of the holder 20.
  • the wiring (first wiring) 61 between the current integrator 40 and the first electrode 21 includes a conductor 611 at least a part of which is not covered.
  • the current integrator 40 integrates the current flowing from the current integrator 40 to the sample 100 to output the amount of charge as a measurement value. Therefore, when charge accumulation occurs in the first wiring 61, the measurement value of the current integrator 40 includes the charge amount accumulated in the first wiring 61, and the amount of charge actually accumulated in the sample 100 is included. Errors can occur with respect to this.
  • the wiring (first wiring) 61 between the current integrator 40 and the first electrode 21 includes the conductor 611 at least a part of which is not coated.
  • the influence of the charge accumulation in the first wiring 61 (for example, The influence of stray capacitance generated between one wire 61 and the surrounding objects is reduced. This improves the accuracy of measurement of the amount of charge accumulated in the sample 100. If the measurement accuracy of the amount of charge accumulated in the sample 100 is improved, evaluation of the withstand voltage performance at a predetermined temperature of the insulating material (sample 100) can be performed with high accuracy.
  • the evaluation system 10 is a system for evaluating the withstand voltage performance of the insulating material under a predetermined temperature. In the present embodiment, it is evaluated whether the withstand voltage performance of the insulating material under a predetermined temperature satisfies the standard. In this evaluation, the dielectric constant of the insulating material under a predetermined temperature is used. Then, in order to obtain the dielectric constant of the insulating material under a predetermined temperature, the amount of charge accumulated in the sample 100 at a predetermined temperature is measured using the sample 100 of the insulating material.
  • the sample 100 used in the evaluation system 10 corresponds to the insulation material to be evaluated.
  • the insulating material is an insulating material whose shape is not fixed or an insulating part whose shape is fixed.
  • Examples of the insulating material include insulating materials for electronic materials such as a substrate (laminated plate), a prepreg, and a sealing material (particularly, a sealing material for high voltage).
  • the insulating material is used, for example, in a power device (power semiconductor device).
  • Examples of power devices include air conditioners, automobiles, solar power generation devices, and semiconductor devices for inverters used in power conditioners.
  • An example of such a semiconductor device is a package in which a silicon chip is sealed. In this case, the package is formed of an insulating material.
  • the sample 100 is a disk of uniform thickness (see FIG. 2) formed of the insulating material.
  • the first surface 101 and the second surface 102 in the thickness direction of the sample 100 are both flat.
  • the sample 100 may be the insulating component itself.
  • the evaluation system 10 includes a holding unit 20, a chamber 30, a current integrator 40, a power supply device 50, first to fourth wires 61 to 64, and an evaluation device 70. ing.
  • the holding unit 20 holds the sample 100.
  • the holding part 20 is provided with the 1st electrode 21, the 2nd electrode 22, and the guard electrode 23, as shown in FIG.
  • the first electrode 21 has a disk shape.
  • the material of the first electrode 21 is a metal (for example, stainless steel).
  • the first electrode 21 is disposed on the first surface 101 of the sample 100.
  • the surface 210 of the first electrode 21 in contact with the sample 100 is a flat surface. This is to bring the first electrode 21 into close contact with the first surface 101 of the sample 100 without a gap being generated between the first electrode 21 and the sample 100.
  • the second electrode 22 has a disk shape.
  • the material of the second electrode 22 is metal (for example, stainless steel).
  • the second electrode 22 is disposed on the second surface 102 of the sample 100.
  • the surface 220 in contact with the sample 100 at the second electrode 22 is a flat surface.
  • the diameter of the first electrode 21 is smaller than the diameter of the second electrode 22.
  • the first electrode 21 and the second electrode 22 are positioned such that the entire first electrode 21 is located inside the second electrode 22. Be placed.
  • the guard electrode 23 is used to suppress such creeping discharge.
  • the guard electrode 23 is cylindrical.
  • the inner diameter of the guard electrode 23 is larger than the diameter of the first electrode 21.
  • the material of the guard electrode 23 is a metal (for example, stainless steel).
  • the guard electrode 23 is disposed on the first surface 101 of the sample 100 such that the first electrode 21 is positioned inside the guard electrode 23.
  • the chamber 30 has a housing 31 that houses the holding unit 20 therein, and is configured to maintain the temperature inside the housing 31 within a predetermined temperature range. More specifically, the chamber 30 includes a housing 31 and a temperature controller 32, as shown in FIG.
  • the housing 31 can house the holding unit 20 together with the sample 100 therein.
  • the housing 31 has thermal insulation to maintain the temperature.
  • the temperature controller 32 is a device for setting the temperature inside the housing 31 to a temperature within a predetermined temperature range.
  • the upper limit value of the predetermined temperature range is at least 85 ° C. or more, preferably 100 ° C. or more, and more preferably 150 ° C. or more.
  • the lower limit value of the predetermined temperature range is not particularly limited.
  • the lower limit value is not particularly limited because the chamber 30 may be capable of measurement at a predetermined temperature or higher.
  • the temperature controller 32 has, for example, a heater for adjusting the temperature in the housing 31 and a temperature sensor for measuring the temperature in the housing 31. The temperature controller 32 adjusts the amount of current supplied to the heater so that the measurement value of the temperature sensor matches the predetermined temperature.
  • the temperature controller 32 is not particularly limited, and a conventionally known configuration can be employed.
  • the chamber 30 has the stage 33 which supports the holding
  • the stage 33 is disposed inside the housing 31 and connected to the ground.
  • the chamber 30 also has an insertion hole 34 connecting the inside and the outside of the housing 31. The insertion hole 34 is used to connect the power supply device 50 to the first electrode 21 of the holding unit 20 via the current integrator 40.
  • the current integrator 40 is a device for measuring the amount of charge accumulated in the sample 100. As shown in FIG. 1, the current integrator 40 includes a first terminal 41, a second terminal 42, a capacitor 43 for measurement, a protective resistor 44, and a measuring instrument 45.
  • the capacitor 43 is electrically connected between the first terminal 41 and the second terminal 42.
  • the resistor 44 is electrically connected between the first terminal 41 and the capacitor 43.
  • the measuring device 45 measures the voltage across the capacitor 43. If the capacitance of the capacitor 43 is known, the charge accumulated in the capacitor 43 can be determined from the voltage across the capacitor 43.
  • the power supply device 50 is used to apply a DC voltage between the first electrode 21 and the second electrode 22 of the holder 20.
  • the power supply device 50 includes a first output terminal 51, a second output terminal 52, and a DC power supply 53.
  • the output voltage of the DC power supply 53 can be changed within a predetermined range.
  • the DC power supply 53 is configured to be able to output a relatively high voltage (for example, 50 kV) suitable for the withstand voltage test of the insulating material.
  • the DC power supply 53 is electrically connected between the first output terminal 51 and the second output terminal 52. More specifically, the positive electrode of the DC power supply 53 is connected to the first output terminal 51, and the negative electrode of the DC power supply 53 is connected to the second output terminal 52. Therefore, the power supply device 50 applies a DC voltage between the first electrode 21 and the second electrode 22 so that the first electrode 21 has a higher potential than the second electrode 22.
  • the first wiring 61 is a wiring that electrically connects the first terminal 41 of the current integrator 40 and the first electrode 21 of the holding unit 20.
  • the first wiring 61 includes a first conductor 611 and a second conductor 612 as shown in FIG.
  • the first conductor 611 is a rod made of metal (for example, stainless steel).
  • the first conductor 611 is not coated with insulation.
  • the second conductor 612 is a wire (so-called bare wire) which is not coated with insulation.
  • the second conductor 612 is, for example, a copper bare wire. In the present embodiment, a looped bare electric wire is used as the second conductor 612 in consideration of handling.
  • the first end of the first conductor 611 is connected to the first terminal 41 of the current integrator 40, and the second end of the first conductor 611 is inserted into the chamber 30 (inside the housing 31) through the insertion hole 34 of the chamber 30. Be done.
  • the second end of the first conductor 611 is connected to the first electrode 21 in the chamber 30 via the second conductor 612.
  • the second wiring 62 is a wiring that electrically connects the second electrode 22 of the holding unit 20 and the second output terminal 52 of the power supply device 50.
  • the third wire 63 is a wire for electrically connecting the first output terminal 51 of the power supply device 50 and the second terminal 42 of the current integrator 40.
  • the fourth wiring 64 is a wiring that electrically connects the second terminal 42 of the current integrator 40 and the guard electrode 23 of the holding unit 20.
  • Each of the second wiring 62, the third wiring 63, and the fourth wiring 64 may be a coated electric wire.
  • the first electrode 21 and the second electrode 22 are disposed so as to sandwich the sample 100 in the thickness direction of the sample 100. Since the first electrode 21 and the second electrode 22 are conductors, and the sample 100 is a dielectric, the first electrode 21, the second electrode 22, and the sample 100 constitute a capacitor.
  • the current integrator 40 is interposed between the power supply device 50 and the first electrode 21 of the holding unit 20.
  • the capacitor 43 of the current integrator 40 is connected in series to the capacitor formed of the first electrode 21, the second electrode 22, and the sample 100. Therefore, the amount of charge stored in the capacitor 43 is equal to the amount of charge stored in the capacitor formed of the first electrode 21, the second electrode 22, and the sample 100. Therefore, the amount of charge accumulated in the sample 100 at a predetermined temperature can be obtained from the measurement value of the current integrator 40.
  • the first wiring 61 connecting the current integrator 40 and the first electrode 21 of the holding unit 20 is composed of the first conductor 611 and the second conductor 612 which are not all coated with insulation. Therefore, it can be expected that the amount of charge accumulated in the first wiring 61 will be substantially zero. Therefore, compared with the case where the 1st wiring 61 is a well-known covered wire, the influence which accumulation of the electric charge in the 1st wiring 61 gives to the measured value of current integrator 40 can be reduced.
  • the holding unit 20, the chamber 30, the current integrator 40, the power supply device 50, and the first to fourth wires 61 to 64 are the amounts of charges accumulated in the sample 100 at a predetermined temperature.
  • the evaluation device 70 can be realized by, for example, one or more computer systems.
  • the one or more computer systems have one or more processors (microprocessors), one or more memories, one or more human interfaces, and one or more communication interfaces.
  • one or more computer systems function as the evaluation device 70 by one or more processors executing one or more programs stored in one or more memories.
  • the one or more programs may be pre-recorded in the memory, or may be provided by being recorded on a non-transitory recording medium such as a memory card through a telecommunication line such as the Internet.
  • the evaluation device 70 has a function of setting the temperature inside the housing 31 to a predetermined temperature by the temperature controller 32, a function of setting the output voltage of the power supply device 50 to a predetermined value, and data of measurement values from the current integrator It has a function of acquiring time series data).
  • the evaluation device 70 is configured to evaluate whether the withstand voltage performance of the insulating material under a predetermined temperature satisfies the standard based on the measurement value of the current integrator 40 of the measurement system. In particular, the evaluation device 70 evaluates whether the withstand voltage performance of the insulating material under the predetermined temperature satisfies the standard based on the relative dielectric constant of the sample 100 under the predetermined temperature obtained from the measurement value of the current integrator 40. Configured as. That is, the evaluation device 70 obtains the relative dielectric constant of the sample 100 under the predetermined temperature from the measurement value of the current integrator 40.
  • ⁇ r can be obtained based on the relational expression represented by the following equation (1).
  • the measured value of the current integrator 40 is Q [F]
  • the contact area of the holding unit 20 with the sample 100 is S [m 2].
  • the thickness of the sample 100 is d [m]
  • the value of the DC voltage applied between the first electrode 21 and the second electrode 22 is V [V].
  • the dielectric constant of vacuum is set to ⁇ 0 [F / m].
  • the contact area S is given by the area of the contact portion between the first electrode 21 and the first surface 101 of the sample 100. As shown in FIG. 2, since the entire surface 210 of the first electrode 21 contacts the first surface 101 of the sample 100, the contact area S is equal to the area of the surface 210 of the first electrode 21.
  • the diameter of the sample 100 be twice or more the diameter of the first electrode 21 because the influence of the creeping discharge can be easily reduced.
  • the measurement value Q of the current integrator 40 may change according to the time during which a DC voltage is applied between the first electrode 21 and the second electrode 22.
  • FIG. 4 shows an example of the time change of the measured value Q.
  • G11 and G12 in FIG. 4 are graphs of samples 100 of different insulating materials.
  • T0 in FIG. 4 indicates the point in time when the value of the output voltage of the power supply device 50 has reached the set value.
  • the measured value Q increases after the time point t0, and one of the causes of the increase is the leakage current due to the volume resistivity of the insulating material.
  • the first electrode 21, the second electrode 22, and the sample 100 may be considered as capacitors up to the time point t0 at which charge is accumulated by the instantaneous charging current. Therefore, in order to obtain the relative dielectric constant ⁇ r, it is preferable to use, as the measurement value Q, the measurement value Q0 of the current integrator 40 when the output voltage of the power supply device 50 reaches the set value (point t0).
  • the capacitor 43 and the resistor 44 of the current integrator 40 are present between the power supply device 50 and the first electrode 21. Therefore, the value V of the direct current voltage applied between the first electrode 21 and the second electrode 22 does not necessarily match the value of the output voltage of the power supply device 50. Therefore, in order to obtain the relative dielectric constant rr under a predetermined temperature, the measurement value Q0 of the current integrator 40 is obtained for the value of the output voltage of the power supply device 50 of at least 2 with respect to the predetermined temperature. As an example, the value of the output voltage of the power supply device 50 is changed by 1000 V in the range of 1000 V to 5000 V to obtain the measurement value Q0 for each value of the output voltage. Assuming that the value of the output voltage of the power supply device 50 is V0, the relationship represented by the following equation (2) holds. In the following equation (2), k is a constant.
  • FIG. 5 shows graphs G21 and G22 of the measured value Q0 of the current integrator 40 with respect to the value V0 of the output voltage of the power supply device 50 for the samples 100 of different insulating materials.
  • the slope ( ⁇ r ⁇ ⁇ 0 ⁇ S / d) may be determined by a conventionally known approximation method (for example, the least squares method).
  • the evaluation device 70 is configured to evaluate whether the withstand voltage performance of the insulating material under a predetermined temperature satisfies the standard based on the relative dielectric constant ⁇ r of the sample 100 under the predetermined temperature.
  • the condition of the relative dielectric constant ⁇ r satisfying the reference and the reference is appropriately determined according to the application of the insulating material and the like. Examples of criteria include those relating to the use of insulation in power devices.
  • the evaluation device 70 evaluates that the withstand voltage performance of the insulating material under the predetermined temperature satisfies the standard if the relative dielectric constant ⁇ r of the sample 100 under the predetermined temperature is less than the predetermined value set in advance. .
  • the evaluation device 70 evaluates that the withstand voltage performance of the insulating material under the predetermined temperature is good if the relative dielectric constant ⁇ r of the sample 100 under the predetermined temperature is less than the preset specified value.
  • the prescribed value is a numerical value corresponding to the standard of withstand voltage performance, and is 7 as an example.
  • the graph G20 in FIG. 5 corresponds to the case where the relative dielectric constant ⁇ r is 7. Therefore, the insulating material having the relative dielectric constant ⁇ r corresponding to the graph G21 of FIG. 5 is evaluated as the withstand voltage performance under a predetermined temperature satisfies the standard.
  • the specified value is not limited to 7, and may be appropriately set according to the application of the insulating material (for example, the type of power device in which the insulating material is used).
  • the evaluation system 10 of the present embodiment described above evaluates whether the withstand voltage performance of the insulating material under a predetermined temperature satisfies the standard based on the measurement value of the current integrator 40. Run.
  • the first wiring 61 connecting the current integrator 40 and the first electrode 21 of the holding unit 20 is composed of the first conductor 611 and the second conductor 612 which are not coated with insulation. . Therefore, compared with the case where the 1st wiring 61 is a well-known covered wire, the influence which accumulation of the electric charge in the 1st wiring 61 gives to the measured value of current integrator 40 can be reduced. As a result, the withstand voltage performance of the insulating material at a predetermined temperature can be evaluated with high accuracy.
  • Q is a measurement value of the current integrator 40
  • S is a contact area of the holding unit 20 with the sample 100
  • d is a thickness of the sample 100.
  • V is a value of a DC voltage applied between the first electrode 21 and the second electrode 22, and ⁇ 0 is a dielectric constant of vacuum.
  • V0 is a value of the output voltage of the power supply device 50
  • Q0 is a measured value of the current integrator 40 when the value V0 of the output voltage of the power supply device 50 reaches a set value (time t0) .
  • the high temperature reverse bias test is a test that applies a relatively high DC voltage to a power device in a high temperature environment of 150 ° C. to evaluate the withstand voltage deterioration of the power device.
  • the relative dielectric constant r r at a predetermined temperature of the insulating material is evaluated by the amount of charge accumulated in the sample 100 of the insulating material at a predetermined temperature.
  • a high temperature such as 150 ° C. can be selected as the predetermined temperature.
  • the evaluation system 10 as in the high temperature reverse bias test, a DC voltage is applied, so that it is possible to evaluate the insulating material under conditions relatively similar to the high temperature reverse bias test. Therefore, the evaluation of the insulation by the evaluation system 10 can be used as an indicator of whether the insulation can cope with the high temperature reverse bias test.
  • the high temperature reverse bias test it is usually necessary to spend a long time such as 1000 hours, but according to the evaluation method of the present embodiment, it is possible to evaluate the insulating material in a shorter time than the high temperature reverse bias test.
  • Table 1 shows the results of the high temperature reverse bias test and the evaluation by the evaluation method of the present embodiment for the samples A to H of the insulating material.
  • the HTRB resistant area (HTRB resistant area) is “1”, “2”, “3” for a device having a so-called “TO-3P” structure manufactured using samples A to H. It evaluated by.
  • “1” indicates that the device failed the 24 hour test.
  • “2” indicates that the device failed the 72 hour test.
  • “3” indicates that the device passed the 1000 hour test.
  • “Semiconductor Device Environmental and Durability Test Method (Life Test I)” defined in JEITA ED-4701 / 100A was used.
  • the relative dielectric constant ⁇ r (150) under a predetermined temperature here, 150 ° C.
  • the relative dielectric constant r r (25) under a lower specified temperature here, 25 ° C.
  • FIG. 6 is a graph showing the relationship between the result of the high temperature reverse bias test (HTRB resistant region) and the result of evaluation by the evaluation system ( ⁇ r (25)).
  • FIG. 7 is a graph showing the relationship between the result of the high temperature reverse bias test (HTRB resistant region) and the result of evaluation by the evaluation system ( ⁇ r (150)).
  • samples A, B, C, D, E, F, G and H are respectively indicated by “ ⁇ ”, “ ⁇ ”, “ ⁇ ”, “ ⁇ ”, “ ⁇ ”, “ ⁇ ”, “ ⁇ ”, “ ⁇ ”, “ ⁇ "and” ⁇ "are shown.
  • ⁇ relative permittivity
  • ⁇ r 150
  • the evaluation in the HTRB resistant region is higher as the ratio r is closer to 1. That is, when the ratio r is less than the predetermined value, it is considered that the evaluation in the HTRB resistant region is high.
  • the sorting method is a method of sorting, from a plurality of insulating materials, insulating materials which are evaluated to have withstand voltage performance at a predetermined temperature satisfying the standard by the evaluation method. That is, according to the evaluation method described above, since the withstand voltage performance of the insulating material at a predetermined temperature can be evaluated with high accuracy, the evaluation method is performed by using the evaluation method to select the insulating material.
  • the insulation material evaluated that the withstand voltage performance under predetermined temperature fulfills a standard can be obtained. That is, an insulating material having excellent withstand voltage performance at a predetermined temperature can be obtained.
  • This manufacturing method is a method of manufacturing an insulating material, and includes a first step, a second step, and a third step.
  • the first step is a step of preparing a plurality of insulating material samples 100.
  • samples 100 of a plurality of insulating materials to be manufactured are prepared.
  • the samples 100 of the insulating material evaluated as satisfying the criteria by the withstand voltage performance under a predetermined temperature by the evaluation method of the present embodiment are sorted out from the plurality of samples 100 of the insulating material prepared in the first step. It is a step. That is, with respect to each of the plurality of samples 100 of the insulating material, it is evaluated whether the withstand voltage performance under a predetermined temperature satisfies the standard by the above evaluation method. By this, it is possible to select an insulating material whose withstand voltage performance at a predetermined temperature satisfies the standard from among a plurality of insulating materials planned to be manufactured.
  • the third step is a step of manufacturing the insulating material corresponding to the sample 100 of the insulating material sorted in the second step. That is, among a plurality of insulating materials planned to be manufactured, only the insulating material whose withstand voltage performance under a predetermined temperature satisfies the standard is manufactured. Thereby, an insulating material excellent in withstand voltage performance at a predetermined temperature can be obtained.
  • the evaluation device 70 may evaluate the insulating material at the rate of increase in charge over time.
  • the rate of increase is given by Q1 / Q0.
  • Q1 is a measurement value of the current integrator 40 when a predetermined time has elapsed from time t0 when the output voltage of the power supply device 50 reaches the set value.
  • the predetermined time is, for example, 600 seconds.
  • the increase ratio Q1 / Q0 of the sample 100 of the insulating material is equal to or less than a predetermined value of 1 or more, it may be evaluated that the withstand voltage performance under the predetermined temperature of the insulating material satisfies the standard.
  • the insulating material may be evaluated by two parameters of the relative permittivity rr and the increase ratio Q1 / Q0. That is, as for the insulating material, it is more preferable that the relative dielectric constant ⁇ r is less than the specified value, and the increase ratio Q1 / Q0 is equal to or less than the predetermined value.
  • the first wire 61 may be a bare wire. That is, the first wiring 61 may not necessarily include the first conductor 611. Moreover, the 1st wiring 61 may be a covered electric wire which one part exposed. In short, the first wiring 61 may include a conductor that is not at least partially covered. That is, the first wiring 61 may include a partially covered conductor. However, in this case, when the DC voltage is applied between the first electrode 21 and the second electrode 22 by the power supply device 50, the first wiring 61 has the amount of charge accumulated in the first wiring 61 It is preferable to be configured to be 1/10 or less of the amount of charge accumulated in the sample 100. Here, the amount of charge accumulated in the sample 100 is not the amount of charge actually accumulated in the sample 100 but the assumed amount of charge accumulated in the sample 100 at the above-mentioned time point t0.
  • the term "uncoated conductor” does not necessarily mean that all of the conductors are not covered by the insulating coating. For example, if it is considered that the amount of charge stored in the insulation coating is small and the conductor is not covered with the insulation coating even though the entire conductor is covered with the insulation coating, then the term “uncoated conductor” You may One example is when the insulating coating is not in contact with the surface of the conductor and sufficiently separated. Specifically, it is conceivable that a pipe made of an insulating material is used as the insulation coating, and the conductor is disposed inside the pipe so that the surface does not contact the pipe. In such a case, although it can be interpreted that the surface of the conductor is covered with the insulating coating, it may be referred to as an "uncoated conductor” if it is not substantially affected by the insulating coating.
  • the insulating coating may be substantially insulating.
  • the wire 61 between the current integrator 40 and the first electrode 21 may include a conductor 611 covered at least in part by the insulating coating 613.
  • the material of the insulation coating 613 includes polytetrafluoroethylene.
  • the insulating coating 613 is formed only of polytetrafluoroethylene. That is, depending on the material of the insulating coating 613, the entire conductor 611 may be covered with the insulating coating 613.
  • the insulation coating 613 can be used as a guideline whether the result of the evaluation by the evaluation system 10 is completely different depending on the presence or absence of the insulation coating 613 .
  • the power supply device 50 applies a DC voltage between the first electrode 21 and the second electrode 22 so that the first electrode 21 has a higher potential than the second electrode 22.
  • the power supply device 50 may apply a DC voltage between the first electrode 21 and the second electrode 22 so that the first electrode 21 has a lower potential than the second electrode 22.
  • the shapes (for example, the outer shape) of the first electrode 21 and the second electrode 22 are not limited. However, it is preferable that the surface 210 of the first electrode 21 and the surface 220 of the second electrode 22 be shaped to be in close contact with the sample 100. Moreover, in the said embodiment, although the area of the surface 210 of the 1st electrode 21 is used as the contact area S, when the 2nd electrode 22 is smaller than the 1st electrode 21, the area of the surface 220 of the 2nd electrode 22 Is used as the contact area S. In addition, in the holding unit 20, the guard electrode 23 is not essential.
  • the configuration of the chamber 30 is not limited to the configuration of the embodiment.
  • the chamber 30 does not necessarily have to have the insertion hole 34, and may have a connector for connection with the current integrator 40.
  • 175 ° C., 200 ° C., 250 ° C., etc. may be required as the predetermined temperature, so the upper limit of the temperature range of the chamber 30 is preferably as high as possible.
  • the configuration of the current integrator 40 is not limited to the configuration of the embodiment.
  • a known current integrator can be used as the current integrator 40.
  • the configuration of the power supply device 50 is not limited to the configuration of the embodiment.
  • a conventionally known DC power supply device can be used as the power supply device 50.
  • the evaluation system 10 has at least a holding unit 20, a chamber 30, and a current integrator 40, and at least a part of a wire 61 between the current integrator 40 and the first electrode 21 is covered. It is sufficient if there is no conductor 611. That is, the evaluation device 70 is not essential, and the evaluation method of the embodiment may be performed by a person using a computer or the like.
  • the evaluation system (10) of the first aspect includes the holding unit (20), the chamber (30), and the current integrator (40).
  • the holding portion (20) has a first electrode (21) and a second electrode (22) sandwiching a sample (100) of an insulating material.
  • the chamber (30) has a housing (31) for housing the holding portion (20), and is configured to maintain the temperature inside the housing (31) within a predetermined temperature range. .
  • the current integrator (40) comprises a power supply (50) for applying a DC voltage between the first electrode (21) and the second electrode (22) of the holder (20), and the first electrode It is interposed between (21) and
  • the wire (61) between the current integrator (40) and the first electrode (21) includes a conductor (611) that is at least partially uncoated. According to the first aspect, the withstand voltage performance of the insulating material under a predetermined temperature can be evaluated with high accuracy.
  • the evaluation system (10) of the second aspect can be realized in combination with the first aspect.
  • the wiring (61) is accumulated in the conductor (611) when the DC voltage is applied between the first electrode (21) and the second electrode (22). To be less than one-tenth of the amount of charge stored in the sample (100).
  • the withstand voltage performance of the insulating material at a predetermined temperature can be evaluated with high accuracy.
  • the evaluation system (10) of the third aspect can be realized by a combination with the first or second aspect.
  • the conductor (611) is not coated on the whole of the conductor (611).
  • the withstand voltage performance of the insulating material at a predetermined temperature can be evaluated with high accuracy.
  • the evaluation system (10) of the fourth aspect can be realized by combination with any one of the first to third aspects.
  • the current integrator (40) is disposed outside the housing (31).
  • the chamber (30) has an insertion hole (34) connecting the inside and the outside of the housing (31).
  • the conductor (611) passes through the insertion hole (34) so as not to contact the inner surface of the insertion hole (34).
  • the withstand voltage performance of the insulating material at a predetermined temperature can be evaluated with high accuracy.
  • the evaluation system (10) of the fifth aspect may be realized by combination with any one of the first to fourth aspects.
  • the conductor (611) is a metal rod. According to the fifth aspect, compared with the case where the conductor (611) is a wire, unexpected contact between the conductor (611) and the surrounding object can be suppressed.
  • the evaluation system (10) of the sixth aspect includes a holder (20), a chamber (30), and a current integrator (40).
  • the holding portion (20) has a first electrode (21) and a second electrode (22) sandwiching a sample (100) of an insulating material.
  • the chamber (30) has a housing (31) for housing the holding portion (20), and is configured to maintain the temperature inside the housing (31) within a predetermined temperature range. .
  • the current integrator (40) comprises a power supply (50) for applying a DC voltage between the first electrode (21) and the second electrode (22) of the holder (20), and the first electrode It is interposed between (21) and
  • the wire (61) between the current integrator (40) and the first electrode (21) includes a conductor (611) at least a part of which is covered with an insulating coating (613).
  • the material of the insulation coating (613) comprises polytetrafluoroethylene. According to the sixth aspect, the withstand voltage performance of the insulating material at a predetermined temperature can be evaluated with high accuracy.
  • the evaluation system (10) of the seventh aspect may be realized in combination with any one of the first to sixth aspects.
  • the upper limit value of the predetermined temperature range is 85 ° C. or more.
  • the withstand voltage performance of the insulating material under high temperature can be evaluated with high accuracy.
  • the insulation material is resistant to a predetermined temperature. Evaluate whether the voltage performance meets the criteria. According to the eighth aspect, the withstand voltage performance of the insulating material at a predetermined temperature can be evaluated with high accuracy.
  • the evaluation method of the ninth aspect can be realized by a combination with the eighth aspect.
  • the withstand voltage performance of the insulating material under the predetermined temperature is used as a standard. Evaluate whether to meet.
  • the withstand voltage performance of the insulating material at a predetermined temperature can be evaluated with high accuracy.
  • the evaluation method of the tenth aspect can be realized by a combination with the ninth aspect.
  • the measurement value of the current integrator (40) is Q
  • the contact area of the holding unit (20) with the sample (100) is S
  • the thickness of the sample (100) is d.
  • the value of the DC voltage is V
  • the permittivity of vacuum is ⁇ 0
  • the relative permittivity of the sample (100) at a predetermined temperature is ⁇ r.
  • the withstand voltage performance of the insulating material under a predetermined temperature can be evaluated with high accuracy.
  • the evaluation method of the eleventh aspect can be realized by a combination with the ninth or tenth aspect.
  • the predetermined value of the insulating material when the ratio of the relative dielectric constant at a specified temperature lower than the predetermined temperature to the relative dielectric constant at a predetermined temperature of the sample (100) is less than a predetermined value, the predetermined value of the insulating material It is evaluated that the withstand voltage performance under temperature satisfies the standard. According to the eleventh aspect, the withstand voltage performance of the insulating material under a predetermined temperature can be evaluated with higher accuracy.
  • the predetermined temperature may be 100 ° C. or higher, and the specified temperature may be less than 100 ° C. Furthermore, the difference between the predetermined temperature and the specified temperature may be 100 ° C. or more. Furthermore, the specified temperature may be 25 ° C.
  • the predetermined value may be two. Furthermore, in the eleventh aspect, the predetermined value may be 1.2.
  • the sorting method according to the twelfth aspect sorts out, from among a plurality of insulating materials, an insulating material which is evaluated to have a withstand voltage performance under a predetermined temperature satisfying the standard according to any one of the evaluation methods according to the eighth to eleventh aspects. . According to the twelfth aspect, an insulating material excellent in withstand voltage performance at a predetermined temperature can be obtained.
  • the method of manufacturing an insulating material according to the thirteenth aspect includes the step of preparing a plurality of samples of insulating material (100). Moreover, the said manufacturing method is an insulating material evaluated that the withstand voltage performance under predetermined temperature satisfy
  • the insulating material of the fourteenth aspect is an insulating material evaluated to have withstand voltage performance under a predetermined temperature satisfying the standard according to any one of the evaluation methods of the eighth to eleventh aspects. According to the fourteenth aspect, an insulating material excellent in withstand voltage performance at a predetermined temperature can be obtained.
  • the package of the fifteenth aspect is a package formed of the insulating material of the fourteenth aspect. According to the fifteenth aspect, a package excellent in withstand voltage performance at a predetermined temperature can be obtained.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Relating To Insulation (AREA)

Abstract

La présente invention aborde le problème de l'évaluation d'une charge électrique accumulée dans un matériau isolant avec un degré élevé de précision. L'invention concerne un système d'évaluation (10) comprenant une partie de maintien (20) comprenant une première électrode (21) et une seconde électrode (22) prenant en sandwich un échantillon (100) d'un matériau isolant, une chambre (30) logeant la partie de maintien (20) et un intégrateur de courant (40). L'intégrateur de courant (40) est interposé entre un dispositif de source d'alimentation (50) qui applique une tension continue entre la première électrode (21) et la seconde électrode (22) de la partie de maintien (20) et la première électrode (21). Un câble (61) entre l'intégrateur de courant (40) et la première électrode (21) comprend un conducteur (611) dont au moins une partie n'est pas revêtue.
PCT/JP2018/046526 2017-12-19 2018-12-18 Système d'évaluation, procédé d'évaluation, procédé de sélection, procédé de fabrication, matériau isolant et emballage WO2019124357A1 (fr)

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JP2019561104A JPWO2019124357A1 (ja) 2017-12-19 2018-12-18 評価システム、評価方法、選別方法、製造方法、絶縁材、及び、パッケージ

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