WO2019115111A1 - Boîtier de construction modulaire pour la fabrication de capteurs de mesure de pression - Google Patents

Boîtier de construction modulaire pour la fabrication de capteurs de mesure de pression Download PDF

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Publication number
WO2019115111A1
WO2019115111A1 PCT/EP2018/081100 EP2018081100W WO2019115111A1 WO 2019115111 A1 WO2019115111 A1 WO 2019115111A1 EP 2018081100 W EP2018081100 W EP 2018081100W WO 2019115111 A1 WO2019115111 A1 WO 2019115111A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
pressure
module
modules
process connection
Prior art date
Application number
PCT/EP2018/081100
Other languages
German (de)
English (en)
Inventor
Patrick Doria
Anh Tuan Tham
Original Assignee
Endress+Hauser SE+Co. KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser SE+Co. KG filed Critical Endress+Hauser SE+Co. KG
Publication of WO2019115111A1 publication Critical patent/WO2019115111A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0046—Fluidic connecting means using isolation membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Definitions

  • the invention relates to a module construction kit for the production of one or more pressure sensors, with
  • At least one sensor module which comprises a arranged in a pressure measuring chamber pressure sensor which is filled via an outwardly by a arranged on a front side of the sensor module separating membrane, filled with a pressure-transmitting liquid pressure transmitter with an acting on an outer side of the separation membrane pressure is acted upon, and
  • Modular building blocks of the type mentioned are used for the production of modular pressure measuring transducers.
  • Pressure transducers made from modules of a modular module are used in industrial metrology for the metrological detection of pressures.
  • Modular pressure transducers as well as modular modules that can be used for their production offer the advantage that the individual modules can be prefabricated and then connected to one another for the production of the pressure transducers.
  • German Utility Model DE 203 05 869 U1 describes a pressure measuring transducer suitable for measuring high pressures, comprising a sensor module and a process connection module connected thereto.
  • the sensor module of this pressure measuring transducer comprises a pressure sensor arranged in a pressure sensor, which can be acted upon by a pressure-transmitting liquid filled on the outside by a arranged on a front side of the sensor module separation membrane filled with a pressure acting on an outer side of the separation membrane pressure ,
  • the sensor module is inserted into a housing connected to the process connection module in such a way that the separating diaphragm located here runs over a recess running parallel to a longitudinal axis of the process connection module through the process connection module and serving as a pressure supply can be acted upon.
  • Pressure transducers should not be used at locations where particularly high hygiene and / or cleanliness requirements exist. Examples include applications in the food industry, where there is a risk that deposits and / or contaminants can lead to the durability impairing and / or harmful contamination of food.
  • pressure measuring transducers which are referred to as compact pressure transducers, are often used in the prior art, in which the pressure transmitter is integrated in a process connection in such a way that its separating diaphragm terminates the process connection on the front side.
  • a pressure-receiving chamber enclosed in the process connection below the separation membrane is provided with a through-going through the otherwise massive process connection
  • Pressure transmission line connected to a pressure measuring chamber in which the pressure sensor is arranged.
  • the invention comprises a modular construction kit for the production of one or more pressure transducers, with
  • At least one sensor module which comprises a arranged in a pressure measuring chamber pressure sensor which is filled via an outwardly by a arranged on a front side of the sensor module separating membrane, filled with a pressure-transmitting liquid pressure transmitter with an acting on an outer side of the separation membrane pressure is acted upon, and
  • At least one process connection module which can be connected in each case to one of the sensor modules and which comprises a recess extending parallel to a longitudinal axis of the process connection module through the process connection module,
  • Each sensor module is in each case designed such that it is in each case insertable into a first end of the recess of each of the process connection modules, that it closes the first end of the recess to the outside and the separation membrane on a side remote from the recess outer end face the respective sensor module is arranged, and
  • Each sensor module is in each case designed such that it can be inserted through a first end opposite the inlet opening of the recess of each of the process connection modules in each case such in the recess that one of
  • T rennmembran upstream portion of the recess forms a closed end by the sensor module pressure supply line through which the T rennmembran can be acted upon by the pressure.
  • each sensor module has a section which comprises a radially outwardly extending shoulder, which has on its side remote from the separation membrane side a shoulder surface, which is substantially equal to a surface or a partial surface of the end-side first end of the recesses is outside surrounding end faces of the process connection modules or comprises a surface of this size.
  • the recesses of the process connection modules comprise a fixing region arranged between the first end and the inlet opening of the recess thereof, each serving for fastening one of the sensor modules in the interior of the respective process connection module, whose cross-sectional area is smaller than that of the
  • a development of the second development is characterized by the fact that
  • the process connection modules comprise a radially outwardly extending shoulder surrounding the attachment area
  • the sections of the sensor modules which can be used in an accurate fit are each formed by their section which extends radially outward, and / or the sensor modules at least one further, on which the separating membrane
  • a third development is characterized in that the sensor modules and the process connection modules are designed such that the process connection modules each have a shoulder surface serving as a stop, on which a shoulder surface of the sensor module comes to rest when the sensor Module is inserted through the inlet opening into the process connection module.
  • the sensor modules comprise at least one sensor module, one to the
  • Pressure sensor connected, arranged on a remote from the separation membrane back of the respective sensor module arranged sensor electronics
  • the sensor modules at least one connected to the pressure sensor
  • the sensor modules comprise at least one sensor module comprising a sensor electronics connected to the pressure sensor thereof, which comprises a memory in which characteristic curves and / or calibration data determined in a calibration method are stored, which dependency of one generated by the sensor electronics
  • the sensor modules comprise at least one sensor module configured as an absolute pressure sensor module, the pressure sensor of which is designed as an absolute pressure sensor, and / or
  • the sensor modules comprise at least one sensor module configured as a relative pressure sensor module, the pressure sensor of which is designed as a relative pressure sensor, the a trapped under a measuring diaphragm second pressure measuring chamber, which is acted upon via a pressure in the second pressure measuring chamber opening reference pressure supply line with a reference pressure.
  • the sensor modules comprise at least one sensor module designed for a first pressure measuring range, the separating diaphragm of which has a first membrane thickness designed for the first pressure measuring range,
  • the sensor modules at least one for one of the first pressure measuring range
  • the separation membrane has a designed for the other pressure measuring range, different from the first membrane thickness membrane thickness
  • the separation membranes of the sensor modules designed for different pressure measurement ranges have membrane surfaces of essentially the same size.
  • a fifth development is characterized in that the sensor modules have a groove for receiving a process seal.
  • the sensor modules each comprise a metallic sensor housing, on the front side of which is closed off to the outside through the separating membrane
  • Pressure receiving chamber is arranged, which is connected to the enclosed in the sensor housing pressure measuring chamber in which the pressure sensor is arranged, and / or the process connection modules each consist of a metal.
  • the invention comprises a method for producing a
  • the invention comprises a module module according to the invention and / or by means of the method according to the invention
  • Pressure transducer which is characterized in that the pressure transducer is inserted into a process connection module of the modular module by means of a
  • Process connection module connected sensor module comprises. Further developments of the pressure measuring transducer according to the invention are characterized in that
  • the sensor module is inserted into the process connection module such that the sensor module closes the first end of the recess to the outside and the
  • the sensor module is inserted into the recess of the process connection module such that a section of the recess extending upstream of the separation membrane and extending to the first end of the recess forms a pressure feed line closed at the end by the sensor module, via which the separation membrane with the pressure can be acted upon.
  • the sensor module is inserted into the recess of the process connection module such that a section of the recess extending upstream of the separation membrane and extending to the first end of the recess forms a pressure feed line closed at the end by the sensor module, via which the separation membrane with the pressure is acted upon, and
  • Process connection module is connected, comprising a first end of the recess frontally occluding body through which a line segment passes, that has a smaller cross-sectional area than the front-side first end of the recess.
  • Fig. 1 shows: a sensor module
  • Fig. 2 shows: a process connection module
  • Fig. 3 shows: a pressure sensor with front-side separation membrane
  • Fig. 4 shows: a pressure transducer with internal separation membrane.
  • the invention described in detail below relates to a modular module for the production of pressure transducers.
  • the modular module comprises at least one Sensor module 1 and at least one each connectable to one of the sensor modules 1 process connection module 3.
  • Fig. 1 shows an example of a sensor module 1
  • Fig. 2 shows an example of a process connection module. 3
  • Each sensor module 1 in each case comprises a pressure sensor 7 which is arranged in a pressure measuring chamber 5 and which has a pressure transmitter which is closed on the outside by a separating membrane 9 which is closed on a front side of the sensor module 1 and is filled with a pressure race diaphragm 9 acting pressure p can be acted upon.
  • Each process connection module 3 comprises one parallel to a longitudinal axis of the
  • process connection modules 3 preferably each comprise one
  • Fastening device 12 by means of the process connection module 3 on, mounted on or in a complementary thereto fastening device and / or to a
  • Differential pressure line can be connected.
  • the fastening device 12 shown only as an example in FIG. 2 comprises an external thread which can be screwed into a complementary internal thread of a connection provided on the measuring side.
  • each sensor module 1 is in each case designed such that it can be inserted into a front-side first end 13 of the recess 11 of each process connection module 3 of the modular module such that it closes the first end 13 to the outside and the separating membrane 9 is arranged on a side remote from the recess 1 1 outer end face of the respective sensor module 1.
  • Fig. 3 shows an example of a pressure measuring transducer manufactured in this way with the front side arranged
  • each sensor module 1 is in each case designed in such a way that it can be inserted into the recess 1 1 through an inlet opening 15 of the recess 1 1 of each process connection module 3 of the module construction kit opposite the first end 13, such that one of the T Race diaphragm 9 upstream portion of the recess 1 1 forms a closed end by the sensor module 1 pressure supply line 17, via which the separation membrane 9 is acted upon by the metrological pressure to be detected p.
  • FIG. 4 shows an example of a pressure measuring transducer with internal separating diaphragm 9 produced in this way.
  • the modular module according to the invention offers the advantage that by a purely mechanical attachment of the respective sensor module 1 in or on the respective process connection module 3 optionally a pressure sensor with front
  • Pressure sensor variants identical sensor modules 1 and process connection modules 3 are used. The latter reduces the variety of modules and components needed to produce both variants. This leads due to the correspondingly higher quantities to a reduction in the cost of production of the modules, as well as to a
  • the sensor module 1 shown as an example in FIG. 1 comprises
  • a sensor housing 19 on the front side of which a pressure-receiving chamber 21, which is closed off to the outside through the separating membrane 9, is arranged.
  • the pressure receiving chamber 21 is connected to the enclosed in the sensor housing 19 pressure measuring chamber 5, in which the pressure sensor 7 is arranged.
  • the pressure sensor 7 is arranged in the example shown on a T carrier 23, which closes the pressure measuring chamber 5 to the outside.
  • the carrier 23 is substantially in the illustrated examples
  • disc-shaped and may e.g. made of a metal, e.g. Made of a stainless steel.
  • the sensor housing 19 may be made of a metal, e.g. Made of a stainless steel.
  • the pressure-receiving chamber 21 and the pressure measuring chamber 5 connected thereto are filled with a pressure-transmitting liquid. This can the sensor module 1
  • a pressure sensor 7 for example, a so-called semiconductor pressure sensor, for example, a silicon-based pressure sensor chip is suitable.
  • This may, for example, include a measuring diaphragm 29 arranged on a base body 27, including a second pressure measuring chamber 25, and an electromechanical converter.
  • the transducer converts a deflection of the measuring diaphragm 29, which is dependent on the pressure acting on the measuring diaphragm 29, into an electric quantity, which is then transmitted to the converter by means of a pressure connectable sensor electronics 31 metrologically detected and in one of the
  • capacitive transducers which have at least one capacitor with a capacity dependent on the deflection of the measuring diaphragm 29, and transducers, the sensor elements arranged on or in the measuring diaphragm 29, e.g. to a
  • Resistance measuring bridge interconnected piezoresistive elements include. Another alternative is formed by piezoelectric transducers. Alternatively, however, other than those previously mentioned as an example converter can be used.
  • the pressure sensor 7 can be connected to the sensor electronics 31 via connecting leads 33, which are connected to the transducer thereof, in the illustrated example through the support 23.
  • a separate, connectable to the pressure sensor 7 sensor electronics 31 can be provided for each sensor module 1 respectively.
  • each sensor module 1 in each case at the pressure sensor. 5
  • the connected sensor electronics 31 include.
  • the sensor electronics 31 are preferably each arranged on a rear side of the respective sensor module 1 facing away from the separating membrane 9.
  • the sensor electronics 31 comprehensive sensor modules 1 are preferably not only factory-filled with the pressure-transmitting liquid, but preferably also calibrated after the filling.
  • Calibration is understood here as meaning a method in which a dependence of the pressure-dependent signals generated by the sensor electronics 31 on the separating membrane 9 is determined by the pressure p, on the basis of which the associated pressure to be measured p is assigned to the signals generated by the sensor electronics 31 during measuring operation can.
  • Dependency determined in the form of characteristic curves and / or calibration data is preferably stored in a memory assigned to the sensor electronics 31 and used for pressure measurement in the subsequent measuring operation of the pressure measuring transducer.
  • Calibrated sensor modules 1 offer the advantage that it is used to manufacture the
  • Pressure sensor from the prefabricated modules only the generation of the mechanical connection of the sensor module 1 and process connection module 3 requires.
  • the generation of the mechanical connection represents a compared to the filling and calibration of the sensor module 1 in a very simple manner, without special equipment executable process, which accordingly comparatively easily outside the factory at one or more decentralized locations, esp
  • the sensor modules 1 can be designed, for example, such that each sensor module 1 has a respective section 35 which comprises a radially outwardly extending shoulder 37. In this case, the paragraphs 37 of the sensor modules 1 on the one of the
  • This embodiment has the advantage that the shoulder surface at the same time forms a stop which ensures a reproducible and defined manner executable insertion of the sensor module 1 in the process connection module 3.
  • the sensor modules 1 may each have at least one further section 41 arranged on a side of the shoulder 37 facing away from the separating membrane 9 and / or at least one further side of the shoulder 37 facing the separating membrane 9, in addition to the section 35 comprising the shoulder 37 arranged portion 43 include.
  • the arranged on the side facing away from the separation membrane 9 of the paragraph 37 sections 41 each have a base area, which is really smaller than that
  • Process connection module 3 is. In this way it is achieved that arranged on the side facing away from the separation membrane 9 of the paragraph 37 sections 41 of the sensor modules 1 in the manufacture of pressure transducers with front side
  • Process connection module 3 can be introduced.
  • the sensor modules 1 may have a groove 44 located upstream of the shoulder 37, which in the case of pressure measuring transducers with a front-side separating diaphragm 9 for receiving a process seal, not shown here, such as, for example, FIG. an O-ring, serves.
  • a groove 44 is arranged in the example shown in FIG. 1 on the side of the shoulder 37 facing the separation membrane 9. This groove 44 is bounded on the outside by the shoulder 37 and the shoulder 37 facing lateral surface of the further portion 43.
  • the sensor modules 1 and the process connection modules 3 for example, be designed such that between the front-side first ends 13 and the opposite inlet openings 15 of the recesses 1 1 of the process connection modules 3 each one for mounting the sensor module. 1 inside the respective Process connection module 3 serving mounting region 45 is provided, whose cross-sectional area is smaller than the cross-sectional area of the inlet opening 15.
  • Outerly surrounding, radially inwardly extending shoulder 47 include.
  • the sensor modules 1 may be e.g. each include a fit into the mounting portion 45 of one of the process connection modules 3 usable section 35.
  • the precisely fitting sections 35 each have a base area which is substantially equal to the cross-sectional area of the
  • Attachment areas 45 of the process connection modules 3 is.
  • Attachment area 45 insertable portion 35 on the T rennmembran 9 facing side and / or on the side facing away from the separation membrane 9 side of the insertable usable portion 35 each comprise at least one further portion 41, 43.
  • further portions 43 each have a base area which is less than or equal to the base of the accurately inserted into the mounting portion 45 portion 35 of the respective sensor module 1.
  • the section 35 which can be used with a precise fit can be formed by the section 35 of the respective sensor module 1 which comprises the shoulder 37.
  • the shoulders 37 of the sensor modules 1 preferably have outer dimensions that are substantially equal to the
  • Separating membrane 9 comprehensive sections 43 of the sensor modules 1 preferably outer dimensions, which are substantially equal to the outer dimensions of the accurately inserted into the mounting portion 45 sections 35 of the sensor modules 1. The latter offers the advantage that the separation membranes 9 each one
  • the sensor modules 1 can be positioned for example by means of a tool in the respective process connection module 3, that their accurately inserted into the mounting portion 45 section 35 outside on all sides of the surrounding the mounting portion 45 shoulder 47th the process connection module 3 is surrounded.
  • the sensor modules 1 and the process connection modules 3 may be designed such that the process connection modules 3 each have a shoulder surface serving as a stop on which a shoulder surface of the sensor module 1 is in contact comes when the sensor module 1 is inserted through the inlet opening 15 into the process connection module 3.
  • Process connection module 3 each by a in the figures each indicated by triangles weld, e.g. a can be achieved as a closed to a ring, sensor module 1 and process connection module 3 pressure-tight interconnecting weld formed weld.
  • the welding of metallic components is a comparatively easy to carry out process, for which neither special knowledge nor specifically designed for the production of pressure transducers devices are required. The latter is esp.
  • the module kit also decentral executable production of pressure transducers advantage.
  • module module contained sensor modules 1 can, for example, as
  • Absoluttik- and / or designed as a relative pressure sensor modules sensor modules 1 include.
  • the pressure sensor 7 is designed as a relative pressure sensor, the second of which is enclosed under the measuring diaphragm 29
  • Pressure measuring chamber 25 via a in the figures 1, 3 and 4 as an option also shown by the carrier 23 extending therethrough , opening into the second pressure measuring chamber 25 reference pressure supply line 49 with a reference pressure p ref , eg a
  • Atmospheric pressure can be acted upon.
  • absolute pressure sensor modules is the
  • Pressure sensor 7 is formed as an absolute pressure sensor whose under the measuring diaphragm 29 enclosed pressure measuring chamber 25 is evacuated.
  • the reference pressure feed line 49 shown in FIGS. 1, 3 and 4 is omitted.
  • sensor elements contained in the modular module can be omitted.
  • Modules 1 designed for different pressure measuring ranges sensor modules 1 include.
  • the sensor modules 1 preferably comprise at least one sensor module 1 designed for a first pressure measuring range, the membrane 9 of which has a first membrane thickness designed for a first pressure measuring range and at least one further pressure measuring range different from the first pressure measuring range designed sensor module 1, the separation membrane 9 has a designed for the respective further pressure measuring range, different from the first membrane thickness further membrane thickness.
  • the sensor modules 1 preferably comprise at least one sensor module 1 designed for a first pressure measuring range, the membrane 9 of which has a first membrane thickness designed for a first pressure measuring range and at least one further pressure measuring range different from the first pressure measuring range designed sensor module 1, the separation membrane 9 has a designed for the respective further pressure measuring range, different from the first membrane thickness further membrane thickness.
  • separation membranes 9 with a membrane thickness of 40 pm to 60 gm, while for measuring lower pressures, such as. Pressing up to 40 bar, designed sensor modules 1, for example, separation membranes 9 with a
  • Membrane thickness of 20 pm to 30 pm may have.
  • the separating membranes 9 of the sensor modules 1 designed for different pressure measuring ranges have the same membrane area. This reduces the number of parts required for the production of these sensor modules 1. So can the
  • Separation membranes 9 of the sensor modules 1 designed for the aforementioned different measuring ranges have identical membrane diameters, e.g. can range from 10 mm to 20 mm.
  • module modules according to the invention may contain further components.
  • An example of this is a Fig. 4 as an optional component of the illustrated there
  • the closing element 51 comprises a recess 1 1 frontally

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un boîtier de construction modulaire destiné à la fabrication de capteurs de mesure de pression et comprenant au moins un module de capteur (1) qui comporte un capteur de pression (7) disposé dans une chambre de mesure de pression (5) et pouvant être soumis à une pression (p), agissant sur une membrane de séparation (9), par le biais d'un transmetteur de pression fermé par rapport à l'extérieur par la membrane de séparation (9) disposé sur une face d'extrémité du module de capteur (1) et au moins un module de connexion de processus (3) pouvant être connecté à chacun des modules de capteur (1) et comprenant un évidement (11) s'étendant à travers le module de connexion de processus (3) parallèlement à un axe longitudinal du module de connexion de processus (3). L'invention est caractérisée en ce qu'elle peut être utilisée pour produire des capteurs de pression pourvus d'une membrane de séparation intérieur et des capteurs de pression pourvus d'une membrane de séparation montée à l'avant. Pour cela, chaque module de capteur (1) est conçu de manière à pouvoir être inséré dans une première extrémité (13) de l'évidement (11) de chacun des modules de connexion de processus (3) de manière à fermer la première extrémité (13) par rapport à l'extérieur et la membrane de séparation (9) est disposée sur une face d'extrémité, opposés à l'évidement (11), du module de capteur respectif (1), à pouvoir être inséré dans l'évidement (11) par une ouverture d'entrée (15), opposée à la première extrémité (13), de l'évidement (11) de chacun des modules de connexion de processus (3) de sorte qu'une partie de l'évidement (11), située en amont de la membrane de séparation (9), forme une conduite d'alimentation en pression (17) qui est fermée à l'extrémité par le module de capteur (1) et qui permet de soumettre la membrane de séparation (9) à la pression (p).
PCT/EP2018/081100 2017-12-13 2018-11-13 Boîtier de construction modulaire pour la fabrication de capteurs de mesure de pression WO2019115111A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017129792.8A DE102017129792A1 (de) 2017-12-13 2017-12-13 Modul-Baukasten zur Herstellung von Druckmessaufnehmern
DE102017129792.8 2017-12-13

Publications (1)

Publication Number Publication Date
WO2019115111A1 true WO2019115111A1 (fr) 2019-06-20

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WO (1) WO2019115111A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018131795A1 (de) * 2018-12-11 2020-06-18 Endress+Hauser SE+Co. KG Drucksensoranordnung zum Bestimmen eines Drucks eines Mediums in einem hygienischen Prozess
DE102019209031A1 (de) * 2019-06-21 2020-12-24 Metallux Ag Drucksensoreinrichtung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4695817A (en) * 1985-06-26 1987-09-22 Kulite Semiconductor Products, Inc. Environmentally protected pressure transducers employing two electrically interconnected transducer arrays
FR2600162A1 (fr) * 1986-06-12 1987-12-18 Sealol Detecteur de pression a seuil ajustable
DE20305869U1 (de) 2003-04-10 2003-06-18 Endress & Hauser Gmbh & Co Kg Druckmeßumformer
US9689769B2 (en) * 2013-07-19 2017-06-27 Rosemount Inc. Pressure transmitter having an isolation assembly with a two-piece isolator plug

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202009014795U1 (de) * 2009-11-02 2010-04-22 Endress + Hauser Gmbh + Co. Kg Druckmessmodul
DE102010063166A1 (de) * 2010-12-15 2012-06-21 Endress + Hauser Gmbh + Co. Kg Bausatz zur Herstellung von Druckmessgeräten und daraus hergestellte Druckmessgeräte
EP3193148A1 (fr) * 2016-08-18 2017-07-19 Siemens Aktiengesellschaft Capteur de pression

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4695817A (en) * 1985-06-26 1987-09-22 Kulite Semiconductor Products, Inc. Environmentally protected pressure transducers employing two electrically interconnected transducer arrays
FR2600162A1 (fr) * 1986-06-12 1987-12-18 Sealol Detecteur de pression a seuil ajustable
DE20305869U1 (de) 2003-04-10 2003-06-18 Endress & Hauser Gmbh & Co Kg Druckmeßumformer
US9689769B2 (en) * 2013-07-19 2017-06-27 Rosemount Inc. Pressure transmitter having an isolation assembly with a two-piece isolator plug

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