WO2011113643A1 - Système hydraulique de transmission de pression, capteur de mesure de pression doté d'un tel système de transmission de pression et procédé de fabrication de celui-ci - Google Patents

Système hydraulique de transmission de pression, capteur de mesure de pression doté d'un tel système de transmission de pression et procédé de fabrication de celui-ci Download PDF

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Publication number
WO2011113643A1
WO2011113643A1 PCT/EP2011/051737 EP2011051737W WO2011113643A1 WO 2011113643 A1 WO2011113643 A1 WO 2011113643A1 EP 2011051737 W EP2011051737 W EP 2011051737W WO 2011113643 A1 WO2011113643 A1 WO 2011113643A1
Authority
WO
WIPO (PCT)
Prior art keywords
contour
membrane
punch
pressure
separation membrane
Prior art date
Application number
PCT/EP2011/051737
Other languages
German (de)
English (en)
Inventor
Igor Getman
Dieter Funken
Original Assignee
Endress+Hauser Gmbh+Co.Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co.Kg filed Critical Endress+Hauser Gmbh+Co.Kg
Publication of WO2011113643A1 publication Critical patent/WO2011113643A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0046—Fluidic connecting means using isolation membranes

Definitions

  • Hydraulic diaphragm seal Hydraulic diaphragm seal, pressure measuring transducer with such a diaphragm seal and manufacturing method thereof
  • the present invention relates to a hydraulic diaphragm seal, a pressure transducer with such a diaphragm seal and
  • Generic diaphragm seals comprise a diaphragm seal body; and a separation membrane having a first embossed contour extending along at least one circumferential edge with a surface of the
  • Compressor body is connected, wherein the diaphragm seal body having a membrane bed with a second contour, wherein the first contour is obtained by a process which embossing of the separation membrane with the membrane bed side facing away from the separation membrane has against a stamp.
  • a standard variant of the embossing of a separating membrane is the separating membrane after the welding of a separating membrane blank on the base body on the membrane bed of the main body
  • curvatures and / or axial deflections of the contour in the area of the inclusions may be smaller than desired.
  • Dia object is achieved by the pressure transmitter according to
  • the pressure transmitter according to the invention comprises a diaphragm seal body; and a separation membrane having a first embossed contour extending along at least one circumferential edge with a surface of the
  • the pressure medium body has a diaphragm bed with a second contour
  • the first contour is obtained by a process which embossing of the separation membrane with the side facing away from the diaphragm bed of the separation membrane against a punch
  • the punch has a third contour
  • the punch according to the invention comprises at least one channel which extends from the surface of the third contour through the body of the punch to escape fluid trapped in the embossing between the separation membrane and the surface of the punch.
  • the enclosed fluid may in particular be a liquid, a suspension, an emulsion or a gas.
  • the membrane bed can be substantially aligned with the first contour when the separation membrane comes to rest on the membrane bed. This may in particular mean that a rotationally symmetrical separation membrane with a
  • the separation membrane is centered rotationally symmetrical membrane bed. Furthermore, this may mean that the separation membrane can be supported on the membrane bed in such a way that in the case of an overload no plastic deformation of the contour of the separation membrane occurs by embossing against the contour of the membrane bed.
  • the stamp can according to an embodiment of the invention have a plurality of channels extending from the contour through the body of the punch.
  • the openings of the channels to the surface of the stamp leave local plastic deformation of the separation membrane, either directly recognizable or in the structure of
  • Detecting membrane material are detectable.
  • the separation membrane is attached to the base body before embossing.
  • the third contour is not identical to the second contour, wherein the third contour is for example provided to impart the first contour to the separation membrane, which is aligned with the second contour, wherein the third contour is a variation of the axial coordinates Z 3 (r), which are larger than corresponding variation of the axial coordinates Z 2 (r) of the second contour, ie: RR
  • R can in particular be the radius up to which the separating diaphragm measuring operation can be axially elastically deflected.
  • R may be 0.9 times or 0.95 times the inner radius of the joint with which the separation membrane is connected to the main body.
  • ⁇ Z j >: ⁇ Z t (r) dr.
  • Ri and R a are, for example, the inner radius and the outer radius of the axially elastically deflectable region of the separation membrane.
  • R may be the sum of the outer radius of the inner joint and 0.1 times the distance between the inner radius of the outer joint and the outer radius of the inner joint.
  • R a can accordingly be the difference between the inner radius of the outer joint and the 0.1-fold distance between the inner radius of the outer joint and the outer radius of the inner joint.
  • the pressure measuring transducer according to the invention comprises at least one pressure transmitter according to the invention, a hydraulic path and a pressure transducer with a deformation body, wherein the
  • Pressure transducer communicates via the hydraulic path with the diaphragm seal over which the deformation body, in particular a measuring membrane is acted upon by a pressure which depends on the pressure applied to the separation membrane pressure, wherein the
  • Pressure transducer is provided to output signal, which is a measure of the pressure-dependent deformation of the deformation body.
  • the inventive method for producing a pressure transmitter with a diaphragm seal body and a membrane bed and attached to the diaphragm seal body separating membrane which covers the membrane bed comprises: embossing a first contour in the separation membrane with the membrane bed side facing away from the separation membrane against a at least one stamp; wherein the punch has a third contour, with which the material of the separation membrane is plastically deformed at least partially, wherein the third contour is not identical to the second contour, characterized in that the punch has at least one channel which extends from the surface of the contour extends through the plunger to allow a fluid which is trapped between the separation membrane and the stamp to escape.
  • the punch has a plurality of channels extending from the surface of the contour through the body of the punch.
  • the fluid may in particular be a gas, an emulsion or a liquid.
  • the third contour is provided to impart the first contour of the separating membrane, which is aligned with the second contour, wherein the third contour is a variation of axial coordinates Z 3 (r), which are greater than corresponding variation of the axial coordinates Z 2 (r) of the second contour.
  • Separation membrane a sequence of several recuperatives on each a stamp, wherein at least one stamp, for example, the last stamp, the third contour has, for which applies that a variation of the axial coordinates Z 3 (r), which are greater than corresponding variation the axial coordinates Z 2 (r) of the second contour.
  • the separation membrane is attached to the base body before embossing against the stamp, in particular by means of at least one circumferential weld.
  • FIG. 2 shows an exemplary embodiment of a stamp for producing a pressure measuring transducer according to the invention.
  • the pressure transducer 1 shown in Figure 1 comprises a diaphragm seal according to the invention, that is, a base body 2, to which a separation membrane 3 is fixed, for example by welding, wherein the separation membrane 3 has a first contour 4, which is impressed on the separation membrane to allow a sufficient volume stroke ,
  • the main body 2 has a membrane bed 5 with a second contour, which is aligned with the contour 4 of the separating membrane, so that the separation membrane can be supported by the membrane bed when the separation membrane 3 comes to rest on the membrane bed 5.
  • a bore 6 extends through the base body 2, which forms a hydraulic path to a
  • Semiconductor pressure transducer 8 with a measuring membrane 10, which is arranged in a transducer chamber 12, to apply a pending on the separation membrane 3 pressure.
  • the enclosed between the separation membrane and the membrane bed volume, the hydraulic path and the converter chamber is filled with a transfer fluid.
  • the semiconductor pressure transducer comprises, for example piezoresistive resistance elements in Vollmaschinenschltung, which one of the
  • Deformation of the measuring diaphragm 10 provide dependent signal.
  • any other pressure transducer can be used, for example, capacitive pressure transducer, a pressure transducer with a mechanical resonator, a pressure transducer with an optical resonator or an interferometric pressure transducer.
  • the prepared by the pressure transducer signal is in a
  • Evaluation circuit 14 processed and output via a signal output 16 to a higher-level unit.
  • the pressure transducer 1 shown in FIG. 1 is a
  • Pressure sensor also be a pressure transducer for absolute pressure measurements, in which case the volume of the pressure transducer is closed behind the measuring diaphragm and evacuated to a measurement of the front of the measuring diaphragm To allow for upcoming pressure against vacuum.
  • the pressure transducer according to the invention may be a differential pressure transducer for measuring the difference between a first fluid pressure and a second fluid pressure
  • the differential pressure transducer comprises a first pressure determiner according to the invention, which via a first hydraulic path directs a fluid pressure to a first side of a deformation body or a measuring membrane, and a second pressure transmitter according to the invention, which a second media pressure via a second hydraulic path to one of the first side facing away from the second side of the deformation body or the
  • Measuring diaphragm conducts.
  • Fig. 2 shows a spatial representation of a punch 20 for
  • a third contour 22 is formed, against which the separation membrane is to be embossed.
  • FIG. 3 shows the embossing process in which the pressure transmitter, that is to say a base body 2 with welded separating membrane 3, rests against a punch 20, the separating diaphragm 3 being acted upon by the base 6 via the bore 6 by a pressure P in order to prevent the pressure
  • the embossing pressure can be applied either pneumatically or hydraulically.
  • control of the temperature of the medium with which the pressure is applied and / or the temperature of the base body 2 and / or the temperature of the punch 20 can be used to influence the embossing.
  • Separating membrane 3 and the third contour 22 are still a lubricant used to the relative movement between the material of the

Abstract

Le système de transmission de pression selon l'invention comporte un corps de transmission de pression (2) ; et une membrane de séparation (3) présentant un premier contour gaufré (4) qui est assemblée le long d'au moins un bord périphérique à une surface du corps de transmission de pression (2), le corps de transmission de pression présentant un lit de membrane (5) avec un deuxième contour, essentiellement aligné sur le premier contour (4), lorsque la membrane de séparation se place sur le lit de membrane. Le premier contour est obtenu par un procédé qui comprend le gaufrage de la membrane de séparation (3) du côté de la membrane de séparation opposé au lit de membrane (5) contre un piston (20). Ledit piston présente un troisième contour (22) et est caractérisé en ce que le piston présente au moins un canal (24) qui s'étend de la surface du troisième contour à travers du corps du piston destiné à laisser s'échapper lors du gaufrage un fluide enfermé entre la membrane de séparation et la surface du piston.
PCT/EP2011/051737 2010-03-15 2011-02-07 Système hydraulique de transmission de pression, capteur de mesure de pression doté d'un tel système de transmission de pression et procédé de fabrication de celui-ci WO2011113643A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201010002854 DE102010002854A1 (de) 2010-03-15 2010-03-15 Hydraulischer Druckmittler, Druckmessaufnehmer mit einem solchen Druckmittler und Herstellungsverfahren dafür
DE102010002854.1 2010-03-15

Publications (1)

Publication Number Publication Date
WO2011113643A1 true WO2011113643A1 (fr) 2011-09-22

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PCT/EP2011/051737 WO2011113643A1 (fr) 2010-03-15 2011-02-07 Système hydraulique de transmission de pression, capteur de mesure de pression doté d'un tel système de transmission de pression et procédé de fabrication de celui-ci

Country Status (2)

Country Link
DE (1) DE102010002854A1 (fr)
WO (1) WO2011113643A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014028103A1 (fr) * 2012-08-15 2014-02-20 Acist Medical Systems, Inc. Capteur de pression et ensemble tuyauterie pour la surveillance de la pression sanguine pendant une intervention médicale d'injection d'agent de contraste
US10729329B2 (en) 2012-07-20 2020-08-04 Acist Medical Systems, Inc. Fiber optic sensor assembly for sensor delivery device
EP3606413A4 (fr) * 2017-04-03 2021-01-06 The Government of the United States of America as represented by the Department of Veterans Affairs Dispositifs, systèmes et procédés de gestion d'ajustement d'emboîture
CN113916407A (zh) * 2020-07-10 2022-01-11 Vega格里沙贝两合公司 用于优化充油压力传感器的膜功能的通道结构
US11596317B2 (en) 2018-10-31 2023-03-07 Acist Medical Systems, Inc. Fluid pressure sensor protection
CN113916407B (en) * 2020-07-10 2024-04-30 Vega格里沙贝两合公司 Channel structure for optimizing membrane function of oil-filled pressure sensor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015122750A1 (de) 2015-12-23 2017-06-29 Endress + Hauser Gmbh + Co. Kg Verfahren zur Herstellung eines hydraulischen Druckmittlers und hydraulischer Druckmittler
CZ307320B6 (cs) * 2017-08-28 2018-05-30 Bd Sensors S.R.O. Tvarovaná oddělovací membrána tlakového senzoru

Citations (6)

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Publication number Priority date Publication date Assignee Title
US2913008A (en) * 1957-11-21 1959-11-17 Cordero Fidel Nonlinear sensitive diaphragm
DE1180586B (de) * 1963-07-17 1964-10-29 Danfoss As Membran, insbesondere fuer Druckdosen, und Praegeform zu ihrer Herstellung
DE2508830A1 (de) * 1974-04-25 1975-11-06 Mess & Regelungst Veb K Differenzdruckmesseinrichtung und verfahren zu seiner herstellung
SU1374067A1 (ru) * 1986-06-17 1988-02-15 Московский авиационный технологический институт им.К.Э.Циолковского Способ изготовлени мембранного узла датчика давлени
CH685863A5 (de) * 1991-11-18 1995-10-31 Baumann & Cie Verfahren zum Vorspannen einer Membran
DE102006056592A1 (de) * 2006-11-29 2008-06-05 Endress + Hauser Gmbh + Co. Kg Verfahren zur Prägung einer Trennmembran eines Druckmittlers

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DE59305545D1 (de) * 1993-11-25 1997-04-03 Wika Alexander Wiegand Gmbh Verfahren zur Herstellung einer Baueinheit eines Membran-Druckmittlers
DE10152681A1 (de) * 2001-10-19 2003-04-30 Endress & Hauser Gmbh & Co Kg Druckmittler mit Trennmembran und Verfahren zu dessen Herstellung

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2913008A (en) * 1957-11-21 1959-11-17 Cordero Fidel Nonlinear sensitive diaphragm
DE1180586B (de) * 1963-07-17 1964-10-29 Danfoss As Membran, insbesondere fuer Druckdosen, und Praegeform zu ihrer Herstellung
DE2508830A1 (de) * 1974-04-25 1975-11-06 Mess & Regelungst Veb K Differenzdruckmesseinrichtung und verfahren zu seiner herstellung
SU1374067A1 (ru) * 1986-06-17 1988-02-15 Московский авиационный технологический институт им.К.Э.Циолковского Способ изготовлени мембранного узла датчика давлени
CH685863A5 (de) * 1991-11-18 1995-10-31 Baumann & Cie Verfahren zum Vorspannen einer Membran
DE102006056592A1 (de) * 2006-11-29 2008-06-05 Endress + Hauser Gmbh + Co. Kg Verfahren zur Prägung einer Trennmembran eines Druckmittlers

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10729329B2 (en) 2012-07-20 2020-08-04 Acist Medical Systems, Inc. Fiber optic sensor assembly for sensor delivery device
WO2014028103A1 (fr) * 2012-08-15 2014-02-20 Acist Medical Systems, Inc. Capteur de pression et ensemble tuyauterie pour la surveillance de la pression sanguine pendant une intervention médicale d'injection d'agent de contraste
EP3606413A4 (fr) * 2017-04-03 2021-01-06 The Government of the United States of America as represented by the Department of Veterans Affairs Dispositifs, systèmes et procédés de gestion d'ajustement d'emboîture
US11596317B2 (en) 2018-10-31 2023-03-07 Acist Medical Systems, Inc. Fluid pressure sensor protection
CN113916407A (zh) * 2020-07-10 2022-01-11 Vega格里沙贝两合公司 用于优化充油压力传感器的膜功能的通道结构
CN113916407B (en) * 2020-07-10 2024-04-30 Vega格里沙贝两合公司 Channel structure for optimizing membrane function of oil-filled pressure sensor

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