WO2019112232A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
WO2019112232A1
WO2019112232A1 PCT/KR2018/014828 KR2018014828W WO2019112232A1 WO 2019112232 A1 WO2019112232 A1 WO 2019112232A1 KR 2018014828 W KR2018014828 W KR 2018014828W WO 2019112232 A1 WO2019112232 A1 WO 2019112232A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
module
coupled
pump
rotating body
Prior art date
Application number
PCT/KR2018/014828
Other languages
English (en)
Korean (ko)
Inventor
김광욱
정승이
김남중
Original Assignee
(주)대명엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)대명엔지니어링 filed Critical (주)대명엔지니어링
Publication of WO2019112232A1 publication Critical patent/WO2019112232A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/02—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts the fluids being viscous or non-homogeneous
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Definitions

  • the present invention relates to a vacuum pump, and more particularly, to a vacuum pump capable of increasing a vacuum amount and minimizing the size of a product by providing a plurality of modules for drawing a vacuum.
  • a pump is a machine that transports fluid of a liquid or a gas through a pipe by a pressure action, or pushes a fluid in a low-pressure container through a pipe into a high-pressure container.
  • Such a pump is not limited to water but is widely used for transportation of petroleum and various medicines or special fluids such as pulp, viscose and sludge.
  • the vacuum pump is mainly installed in a vacuum system such as a semiconductor system, an industrial machinery system, and the like, and is used to perform a vacuum.
  • the vacuum pump is closely related to the vacuum efficiency and the service life thereof, depending on the casing constituting the main body, the structure of the impeller (blade) for compressing the air, and the power transmission device.
  • Such a conventional vacuum pump has a limitation in increasing the vacuum amount of the vacuum pump as compared with the power of the driving motor consumed as one vacuum pump is installed in one driving motor.
  • the present invention has been made in view of the above problems, and it is an object of the present invention to provide a vacuum pump capable of increasing a vacuum amount and minimizing the size of a product by providing a plurality of modules for drawing a vacuum.
  • a pump comprising: a pump body having a vacuum space portion and an exhaust space portion; A plurality of vacuum modules connected to the vacuum space part and the exhaust space part, the vacuum module being stacked on the upper side of the pump body in multiple layers; And a cover housing coupled to a vacuum module disposed at an uppermost portion of the plurality of vacuum modules, wherein the plurality of vacuum modules includes a module body having a ceiling portion opened and connected to the vacuum space portion and the exhaust space portion, And a module bearing coupled to the module body and rotatably supporting the rotary shaft, the rotary bearing being provided inside the body and connected to the rotary shaft and rotated.
  • the rotating body includes: a rotating body having a bottom portion supported on an inner bottom portion of the module body and connected to the rotating shaft; A rotating body cover coupled to an upper portion of the rotating body; And a rotor bearing coupled to the rotating body at one side and coupled to the rotating body cover at the other side.
  • a flange to which the one side of the rotor bearing is coupled may be provided at an edge of the rotating body.
  • the pump body includes a pump body having the vacuum space portion and the exhaust space portion; A lower cap detachably coupled to a lower portion of the pump body; And an upper cap detachably coupled to an upper portion of the pump body and coupled to a vacuum module disposed at a lowermost portion of the plurality of vacuum modules, wherein the vacuum space portion includes an inlet and a hose provided in the module body, A plurality of exhaust holes connected by a connecting member may be provided, and the exhaust space may be provided with an exhaust hole provided in the module body and a plurality of inflow holes connected by the connecting member.
  • the lower cap may have a first convex portion protruding convexly in the direction of the upper cap, and the upper cap may be provided with a second convex portion protruding in a direction of the lower cap.
  • a housing space is provided in the cover housing, and a housing bearing rotatably supporting the rotation shaft may be provided on an upper portion of the cover housing.
  • a plurality of vacuum modules are stacked on each other and a vacuum module disposed at the lowermost part of the plurality of vacuum modules is detachably coupled to an upper end of the pump body,
  • the housing can be detachably coupled.
  • Embodiments of the present invention can increase the amount of vacuum by stacking a plurality of vacuum modules including a module body, a rotating body, and a module bearing on an upper portion of a pump body
  • the size of the product can be minimized by providing the vacuum space portion and the exhaust space portion in the pump main body.
  • FIG. 1 is a schematic view of a vacuum pump according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view of Fig.
  • FIG. 3 is a perspective view showing the vacuum module shown in FIG. 2.
  • FIG. 3 is a perspective view showing the vacuum module shown in FIG. 2.
  • FIG. 4 is a cross-sectional view of Fig.
  • FIG. 5 is an exploded perspective view of Fig.
  • FIG. 6 is a perspective view showing the pump body and the rotating shaft shown in Fig.
  • FIG. 7 is an exploded perspective view of Fig.
  • FIG. 2 is a cross-sectional view of FIG. 1
  • FIG. 3 is a perspective view of the vacuum module shown in FIG. 2
  • FIG. 4 is a cross- 3 is an exploded perspective view of Fig. 4
  • Fig. 6 is a perspective view showing a pump body and a rotary shaft shown in Fig. 1
  • Fig. 7 is an exploded perspective view of Fig. 6, .
  • the vacuum pump 1 includes a pump body 100 provided with a vacuum space portion 111 and an exhaust space portion 112, A plurality of vacuum modules 200 connected to the vacuum space part 111 and the exhaust space part 112 and connected to the vacuum module 200 disposed at the uppermost one of the plurality of vacuum modules 200, And a cover housing 300 coupled thereto.
  • the pump main body 100 includes a pump body 110, a lower cap 120 coupled to a lower portion of the pump body 110, And an upper cap 130 coupled thereto.
  • the pump body 110 of the pump main body 100 is partitioned by the vacuum space portion 111 and the lower space portion by the partition wall 113. As shown in FIG.
  • the pump body 110 includes a plurality of discharge holes 114 and a plurality of inlet holes 115, and a plurality of discharge holes 114 are formed in the vacuum space portion And a plurality of inlet holes 115 may be provided to communicate with the exhaust space portion 112.
  • the plurality of discharge holes 114 may be connected by an inlet 211 provided in each of the plurality of module bodies 210 and a connecting member H including a hose, And may be connected to the outlet 212 and the connecting member H, respectively, provided in the plurality of module bodies 210.
  • the plurality of discharge holes 114 and the plurality of the inlet holes 115 may be provided for each of the four modules, and the inlet 211 and the outlet 212 may be provided for each module body 210 .
  • the lower cap 120 of the pump body 100 may be detachably bolted to the lower portion of the pump body 110, as shown in FIG.
  • a first convex portion 121 protruding in the direction of the upper cap 130 may be provided in the lower cap 120.
  • the first convex portion 121 may have a trapezoidal cross-sectional shape.
  • the upper cap 130 of the pump body 100 may be detachably bolted to the upper portion of the pump body 110, as shown in FIG.
  • a second convex portion 131 protruding in the direction of the lower cap 120 may be provided in the upper cap 130.
  • the second convex portion 131 may have a trapezoidal cross-sectional shape.
  • the shaft support groove may be formed on the upper surface of the upper cap 130 to support the extension portion S1 of the rotation shaft S in a rotatable manner.
  • the upper cap 130 and the lower cap 120 can prevent leakage of the fluid by the sealing member C.
  • the plurality of vacuum modules 200 are stacked in a plurality of layers on the upper part of the pump body 100 to pumped fluid containing the liquid stored in the vacuum space part 111 And supplies the exhaust gas to the exhaust space portion 112.
  • the vacuum module 200 disposed at the lowermost one of the plurality of vacuum modules 200 is bolted to the upper surface of the upper cap 130, And the cover housing 300 can be detachably bolted to the upper side of the vacuum module 200 disposed at the uppermost position.
  • the vacuum module 200 includes a module body 210 having a ceiling portion opened and connected to the vacuum space portion 111 and the exhaust space portion 112, And a module bearing 230 coupled to the module body 210 and rotatably supporting the rotary shaft S, the rotary shaft 220 being rotatably connected to the rotary shaft S,
  • the module body 210 of the vacuum module 200 is provided with one inlet 211 and one outlet 212, and the inlet 211 is connected to the pump body And the discharge port 212 may be connected to the inlet hole 115 of the pump body 110 by the connecting member H.
  • the fluid in the vacuum space part 111 flows into the inlet 211 of the module body 210 through the discharge hole 114, as shown in FIG. 8,
  • the fluid introduced into the interior of the pump chamber 210 is discharged through the discharge port 212 and then flows into the interior of the exhaust space portion 112 through the inlet member 115 provided in the pump body 110 and the connecting member H .
  • the rotating body 220 of the vacuum module 200 is rotatably provided inside the module body 210 shown in FIG. 5 so as to pump the fluid to the inlet 211 of the module body 210, And discharges the fluid through the discharge port 212 of the discharge space 212 to supply the fluid to the discharge space part 112.
  • the upper part of the rotating body 220 may be sealed by the module body 210 of another vacuum module 200 laminated on the upper part thereof.
  • the rotating body 220 includes a rotating body 221 having a central portion connected to the rotating shaft S and rotatably disposed on an inner bottom portion of the module body 210, A rotary body cover 222 connected to the rotation axis S at the center and coupled to the upper side of the rotary body 221 and a lower body coupled to the rotary body 221 and the other side coupled to the rotary body cover 222 And a plurality of rotating bearings 223 rotated together with the rotating body 221 and the rotating body cover 222.
  • the rotating body 220 and the rotating body body cover are fitted to the rotating shaft S and the rotating shaft S is connected to the driving motor M and rotated,
  • the rotary shaft S and the rotary body 220 can be rotated together and the rotary body 220 can be selectively rotated clockwise or counterclockwise.
  • a flange 221a is provided on the rotating body 221 of the rotating body 220.
  • the flange 221a is provided with engaging projections (not shown) of a plurality of rotating bearings 223 223a can be inserted and coupled.
  • the region of the flange 221a to which the engaging projection 223a is engaged can be watertight.
  • a coupling groove 221b is formed in the upper surface portion of the rotary body 221 in this embodiment, and a projecting portion provided on the rotary body cover 222 is inserted into the coupling groove 221b Can be custom-fit.
  • a coupling protrusion 223a is provided to be coupled to the upper and lower portions of the rotating body bearing 223 of the rotating body 220.
  • the coupling protrusion 223a has a flange 221a, And the rotary body cover 222, respectively.
  • the module bearing 230 of the vacuum module 200 is coupled to the bottom portion of the central portion of the module body 210 to rotatably support the rotary shaft S, as shown in FIG.
  • the cover housing 300 is bolted to the upper portion of the vacuum module 200 disposed at the uppermost portion of the plurality of vacuum modules 200 to seal the upper portion of the vacuum module 200.
  • a housing space part 310 is provided in the cover housing 300 and a rotation shaft S is rotatably supported on the upper surface part of the cover housing 300
  • a housing bearing 320 may be provided.
  • the housing space portion 310 can provide a buffer function to reduce noise or vibration during rotation of the rotary shaft S by providing a space at the upper side of the vacuum module 200.
  • the fluid containing the liquid stored or introduced into the vacuum space part 111 of the pump main body 100 is discharged through the plurality of discharge holes 114 and the connection member H by the rotation of the vacuum module 200,
  • the fluid introduced through the inlet port 211 is discharged through the outlet port 212 by the continuous rotation of the vibration module and the fluid discharged through the outlet port 212 flows into the inlet port 211 of the connecting member 210.
  • the fluid introduced into the exhaust space 112 can be supplied to the place of use as indicated by the dotted arrow.
  • a plurality of vacuum modules including a module body, a rotating body, and a module bearing are stacked on the upper portion of the pump body to increase the vacuum amount
  • the size of the product can be minimized by providing the vacuum space portion and the exhaust space portion in the pump main body.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne une pompe à vide. Une pompe à vide selon la présente invention est caractérisée en ce qu'elle comprend : un corps principal de pompe dans lequel sont disposées une partie espace de vide et une partie espace d'échappement ; une pluralité de modules de vide qui sont empilés en de multiples couches et couplés les uns aux autres sur la partie supérieure du corps principal de pompe, et qui sont reliés à la partie espace de vide et à la partie espace d'échappement ; et un boîtier de capot couplé au module de vide supérieur parmi la pluralité de modules de vide, la pluralité de modules de vide comprenant : un corps de module ayant une partie supérieure ouverte et relié à chacune de la partie espace de vide et de la partie espace d'échappement ; un corps rotatif disposé à l'intérieur du corps de module et relié à un arbre rotatif, et qui tourne ; et un palier de module couplé au corps de module et supportant en rotation l'arbre rotatif.
PCT/KR2018/014828 2017-12-04 2018-11-28 Pompe à vide WO2019112232A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2017-0165048 2017-12-04
KR1020170165048A KR101838660B1 (ko) 2017-12-04 2017-12-04 진공 펌프

Publications (1)

Publication Number Publication Date
WO2019112232A1 true WO2019112232A1 (fr) 2019-06-13

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ID=61660356

Family Applications (1)

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PCT/KR2018/014828 WO2019112232A1 (fr) 2017-12-04 2018-11-28 Pompe à vide

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KR (1) KR101838660B1 (fr)
WO (1) WO2019112232A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001153089A (ja) * 1999-11-29 2001-06-05 Tosei Kk 真空ポンプ
KR20030030316A (ko) * 2001-10-09 2003-04-18 지영배 다단 강자흡식 폄프
JP5546094B2 (ja) * 2003-09-30 2014-07-09 エドワーズ リミテッド 真空ポンプ
KR20160033134A (ko) * 2013-07-04 2016-03-25 파이퍼 배큠 건식 저진공 펌프
KR20160110169A (ko) * 2015-03-09 2016-09-21 가부시키가이샤 에바라 세이사꾸쇼 진공 펌프

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10288192A (ja) * 1997-04-16 1998-10-27 Daikin Ind Ltd ターボ型ドライ真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001153089A (ja) * 1999-11-29 2001-06-05 Tosei Kk 真空ポンプ
KR20030030316A (ko) * 2001-10-09 2003-04-18 지영배 다단 강자흡식 폄프
JP5546094B2 (ja) * 2003-09-30 2014-07-09 エドワーズ リミテッド 真空ポンプ
KR20160033134A (ko) * 2013-07-04 2016-03-25 파이퍼 배큠 건식 저진공 펌프
KR20160110169A (ko) * 2015-03-09 2016-09-21 가부시키가이샤 에바라 세이사꾸쇼 진공 펌프

Also Published As

Publication number Publication date
KR101838660B1 (ko) 2018-03-14

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