WO2019105333A1

WO2019105333A1 - Safety device, work piece and photoetching machine

Info

Publication number: WO2019105333A1
Application number: PCT/CN2018/117590
Authority: WO
Inventors: 丛国栋
Original assignee: 上海微电子装备（集团）股份有限公司
Priority date: 2017-11-30
Filing date: 2018-11-27
Publication date: 2019-06-06
Also published as: CN109856917A; TW201925925A; TWI709003B

Abstract

A safety device, a work piece and a photoetching machine. A safety device is fixed on a work piece surface (1); when moving, the work piece surface (1) drives the safety device to move simultaneously; an action block assembly (3) of the safety device is disposed in a first axial direction (a), and a safety pin assembly (4) is located in a second axial direction (b); the first axial direction (a) is not parallel to the second axial direction (b); the action block assembly (3) comprises a driving unit (31) and an action block (32); the driving unit (31) is used for driving the action block (32) to move back and forth to drive a bolt (42) to extend out of an end surface of a guiding unit (41) or to retract into an end surface of the guiding unit (41); under the cooperation of the driving unit (31) and the action block (32), the action block assembly (3) and the safety pin assembly (4) are changed into non-axial arrangements, such that the axial dimensions are greatly reduced, thus satisfying requirements for occasions necessitating smaller axial dimensions.

Description

Safety device, workpiece table and lithography machine

Technical field

The present invention relates to the field of semiconductor manufacturing, and in particular to a safety device, a workpiece table, and a lithography machine.

Background technique

At present, in the field of lithography, the workpiece table is used as an independent precision motion platform in the lithography machine system. The workpiece table can be moved into and out of the lithography machine, and other structures such as the workpiece table or the lithography machine can be used for maintenance. To locate and protect the workpiece table. The safety device realizes the extension and extension of the safety pin in the pin hole through the action block assembly, and then realizes the position restriction of the device, and plays a safety protection role during the movement of the workpiece table.

The existing safety device is generally a cylinder and a pin are connected by an anti-rotation device, and the cylinder, the pin and the anti-rotation device are all arranged on one shaft, and the piston of the cylinder is directly connected with the pin, and the telescopic movement of the piston drives the pin to extend or exit. Pin holes, however, the existing safety devices occupy a large axial space and cannot be used in applications where the axial dimensions are tight.

Summary of the invention

It is an object of the present invention to provide a safety device, a workpiece table and a lithography machine, which solve the problems that the existing safety device has a large axial occupation space and cannot be applied in a case where the axial dimension is tight.

In order to achieve the above object, the present invention provides a safety device including an action block assembly and a safety pin assembly, the action block assembly being disposed along a first axial direction, the safety pin assembly being disposed along a second axial direction The first axial direction and the second axial direction are not parallel;

The action block assembly includes a driving unit and an action block, and the driving unit is configured to drive the action block to reciprocate along the first axial direction;

The safety pin assembly includes a guiding unit and a latch disposed in the guiding unit;

When the driving unit drives the working block to reciprocate along the first axial direction, the acting block drives the latch to extend the guiding unit or retract the guiding unit along the second axial direction. Inside.

Optionally, an angle between the first axial direction and the second axial direction is less than or equal to 90 degrees.

Optionally, the first axial direction and the second axial direction are perpendicular.

Optionally, the action block includes a slope, a first end and a second end, and the first end and the second end of the action block are respectively connected to both ends of the slope, and The size of the active block at the first end in the second axial direction is smaller than the size at the second end.

Optionally, the latch includes a first end and a second end, the second end of the latch is away from the active block than the first end of the latch, and the driving unit drives the active block along the When the first axial reciprocating motion, the action block drives the second end of the latch to protrude into the guiding unit or retract into the guiding unit along the second axial direction.

Optionally, when the first end of the latch contacts the first end of the active block, the latch is retracted into the guiding unit; when the first end of the latch contacts the first end The latch protrudes from the guiding unit when the second end of the block is actuated.

Optionally, the action block is provided with a guide rail, and the first end of the plug is provided with a movable structure, and the movable structure is movable along the guide rail.

Optionally, the guide rail comprises a wheel slot, a linear guide or a slide rail, and the movable structure comprises a roller or a slider.

Optionally, the material of the action block and the roller is a heteropolar magnetic material.

Optionally, the positioning pin assembly further includes a reset unit, the reset unit is sleeved on the latch, and the latch has a tendency to retract when the latch is in a state of extending the guide unit.

The invention also provides a workpiece table comprising a work surface and at least one of the safety devices;

The safety device is fixed on the work surface, and when the work surface moves, the safety device is driven to move together;

The action block of the safety device is in contact with the work surface, and the drive unit drives the action block to reciprocate along the first axial direction on the work surface.

Optionally, the number of the security devices is greater than or equal to two.

Optionally, a guide rail is disposed on the work surface, and the driving unit drives the active block to reciprocate along the first axial direction on the guide rail.

The present invention also provides a lithography machine comprising a frame and a workpiece table, the workpiece table being disposed in the frame, the frame being provided with a pin hole, when the pin of the safety device is along When the second axial direction extends into the pin hole, the workpiece stage is locked.

Optionally, the number of pin holes matches the number of the safety devices.

Optionally, when the pin of the safety device protrudes from the pin hole along the second axial direction, the workpiece stage is unlocked.

The invention provides a safety device, a workpiece table and a lithography machine. The safety device is fixed on a workpiece table. When the workpiece table moves, the safety device is moved together, and the functional block component of the safety device is located. In the first axial direction, the safety pin assembly is located in the second axial direction, and the first axial direction and the second axial direction have an angle less than or equal to 90 degrees, and the action block assembly comprises a driving unit And a driving block, the driving unit is configured to drive the working block to reciprocate in a first axial direction, and the driving of the pin along the second axial direction, that is, the driving of the pin protruding from the guiding unit, can also be driven Part or all of the latch protrudes into the guiding unit or retracts into the guiding unit, and the working block assembly and the safety pin assembly become non-axial arrangement by the cooperation of the driving unit and the acting block, and the axial dimension Greatly compressed to meet the requirements of the use of axial dimensional tension.

DRAWINGS

1 to 2 are schematic views of a security device provided in the first embodiment.

3 to 4 are schematic views of the safety device provided in the second embodiment.

5-6 are schematic views of the safety device provided in the third embodiment.

Wherein a-first axial direction, b-second axial direction, 1-work table top, 2-pin hole, 3-acting block assembly, 31-drive unit, 32-acting block, A-acting block A end, B-portion of B-acting block, 323-wheel groove, 4-safety pin assembly, 41-guide unit, 42-bolt, first end of 421-bolt, second end of 422-bolt, 423-movable structure, 43-reset unit, 5-limit unit.

Detailed ways

Specific embodiments of the present invention will be described in more detail below with reference to the drawings. Advantages and features of the present invention will be apparent from the description and appended claims. It should be noted that the drawings are in a very simplified form and all use non-precise proportions, and are only for convenience and clarity to assist the purpose of the embodiments of the present invention.

Embodiment 1

Referring to FIG. 1, which is a schematic diagram of a safety device according to an embodiment, including an action block assembly 3 and a safety pin assembly 4, the action block assembly 3 is disposed on a first axial direction a, and the safety pin assembly 4 is disposed on In the second axial direction b, the first axial direction a and the second axial direction b have an angle less than or equal to 90 degrees; the active block assembly 3 includes a driving unit 31 and an action block 32, The driving unit 31 is capable of driving the action block 32 to reciprocate along the first axial direction a; the safety pin assembly 4 includes a guiding unit 41 and a latch 42 disposed in the guiding unit 41, the latch 42 includes a first end 421 and a second end 422 that are further away from the active block 32 than the first end 421; the drive unit 31 drives the active block 32 along a first axial direction b During the reciprocating motion, the first end 421 of the latch 42 is moved along the second axial direction b, that is, the latch 42 is extended beyond the guiding unit 41, and the latch 42 may be partially or completely retracted. In the guide unit 41. By the cooperation of the driving unit 31 and the action block 42, the action block assembly 3 and the safety pin assembly 4 are arranged in a non-axial direction (not disposed in the same axial direction), and the axial dimension is greatly compressed to satisfy the axial direction. Requirements for use in tight sizes.

Referring to FIG. 1 , the action block assembly 3 is disposed on a first axial direction a, the safety pin assembly 4 is disposed on a second axial direction b, the first axial direction a and the second axial direction The angle between b is less than or equal to 90 degrees, such that the action block assembly 3 and the safety pin assembly 4 become non-axially arranged, of course, the axis of the action block assembly 3 and the axis of the safety pin assembly 4 The angle between the two can be either an acute angle or an obtuse angle. In the present embodiment, the action block assembly 3 shown in Figure 1 is disposed orthogonally to the safety pin assembly 4, i.e., the first axial direction a is perpendicular to the second axial direction b to further axially dimension the safety device. Zoom out.

Specifically, please refer to FIG. 1 to FIG. 3 , which are schematic diagrams of the security device provided in Embodiment 1. Next, the security device provided by the present invention will be further described in conjunction with FIGS. 1 to 3 .

The action block 32 includes a sloped surface, an A end and a B end. The A end and the B end are respectively connected to the two ends of the inclined surface, and the A end is larger in the second axial direction b. The B end is small, and the driving unit 31 can be disposed at the A end direction of the action block, the B end direction or other positions of the easy acting block 32 to drive the action block 32 along the workpiece table 1 along the first end. The axial direction a reciprocates. In general, the workpiece table refers to the side of the workpiece table.

The safety pin assembly 4 includes a latch 42 and a guiding unit 41. The latch 42 passes through the guiding unit 41. The first end 421 of the latch 42 contacts the action block 32, and the second of the latch 42 The end 422 passes through the guiding unit 41. The first end 421 of the latch 42 can be provided with a movable structure 423, such as a roller, a slider, etc., and the movable structure 423 is in contact with the action block 32 to achieve low frictional motion with the action block 32. The movable structure 423 may not be provided, and the low frictional movement with the action block 32 is achieved by using a low friction material such as nylon and Teflon. The latch 42 is slidable within the guide unit 41. Preferably, the guide unit 41 is made of a low friction structure or material to reduce the frictional force of the latch 42 sliding within the guide unit 41. When the driving unit 31 drives the action block 32 to reciprocate along the first axial direction a on the workpiece table 1 , the latch 42 is caused to extend the guiding unit 41 or indent along the second axial direction b. Inside the guiding unit 41.

In this embodiment, the safety pin assembly further includes a reset unit 43. The reset unit 43 includes a reset plate and a plurality of dampings, and the plurality of dampings are respectively connected to the reset plate and the plug 42. When the latch 42 is in a state of extending out of the guide unit 41, the reset unit 43 causes the latch 42 to be in a tendency to be retracted into the guide unit 41.

As shown in FIG. 1, when the first end 421 of the latch contacts the A end of the action block 32, the second end 422 of the latch 42 is retracted into the guide unit 41, at this time unlocked. In the state, the driving unit 31 drives the action block 32 to move in the direction of the first axial direction a, and the first end 421 of the latch 42 slides from the A end of the action block through the inclined surface to the active block 32. The B end of the action block 32 is thicker than the A end of the action block 32, and the first end 421 of the latch 42 moves in the direction of the second axis b, the reset unit 43 The damping is stretched, and the latch 42 projects out of the guiding unit 41 under the restriction of the guiding unit 41, at this time in a locked state.

Preferably, a limit unit 5 can be arranged at the limit position of the stroke of the action block 32, so that the action block 32 does not move when the workpiece table 1 is in the locked state, and can also be set at the limit position of the stroke of the pin 42. The sensor detects that the latch 42 has protruded from the guide unit 41 or is retracted into the guide unit 41, and then performs a subsequent workflow.

Meanwhile, the embodiment further provides a workpiece table including a work surface 1 and a plurality of the safety devices; the safety device is fixed on the work surface 1 , and the safety is driven when the work table moves The device moves together. Specifically, the action block 32 moves with the workpiece table; the action block 32 of the safety device is coupled to the work surface 1. In the workpiece table moving in and out process, when the workpiece table moves to a set position or rises to a certain height, the driving unit 31 drives the action block 32 to reciprocate along the first axial direction a, so that the pin 42 is moved. The guiding unit 41 is extended to achieve locking and fixing of the vertical position of the workpiece table. The driving unit is disposed on the inner frame, the guiding unit 41 may be disposed on the inner frame, and the reset unit 43 may be disposed on the inner frame.

The safety device may not be provided with a driving unit. The action block 32 is fixedly connected to the workpiece table 1. When the workpiece table is moved in and out, the action block 32 moves along the workpiece axis along the first axial direction a.

As shown in FIG. 1, the safety device is fixed on the workpiece table 1. When the workpiece table 1 moves in the direction of the first axis a, the safety device is simultaneously moved. The safety device includes the action block assembly 3 and safety. The pin assembly 4, which comprises a drive element 31 and an active block 32, which is in contact with the workpiece table 1 and is movable along the first axial direction a on the workpiece table 1. The surface of the workpiece table 1 in contact with the action block 32 may be provided with a low friction material such as nylon and Teflon to achieve low friction movement of the workpiece table 1 and the action block 32, and of course, on the workpiece table 1 The guide rail is arranged to fix the action block 32 and the guide rail, and can reciprocate along the first axial direction a on the guide rail, and the low frictional movement of the workpiece table 1 and the action block 32 is also achieved.

The workpiece table may be provided with a plurality of safety devices. Preferably, the number of safety devices is two or more, for example, two, four and six, etc., and the safety device is uniformly or unevenly disposed on the work surface. On the 1st, the position limit of the workpiece table is realized, which plays a safety protection function, and at the same time, the unlocking function can also be realized, and the workpiece table can be moved in and out.

The embodiment further provides a lithography machine comprising a frame and the workpiece table, the workpiece table being located in the frame, and the frame is provided with a pin hole 2. The number of the pin holes 2 may be matched with the number of the safety devices. When the pins 42 of the safety device extend into the pin holes 2, the workpiece table is locked, and the pins 42 extend out. When the hole 2 is pinned, the workpiece stage is unlocked and can be moved in and out. The positioning and safety protection of the workpiece table can be achieved by the combination of a plurality of safety devices.

Embodiment 2

Referring to FIG. 3 to FIG. 4, different from the first embodiment, in the embodiment, the latch 42 is provided with a movable structure 423, and the movable structure 423 and the active block 32 are made of a heteropolar magnetic material. The resetting function of the reset unit 43 in the first embodiment can be realized by the magnetic force attracting each other to keep the two sides in close contact with each other, thereby further shortening the axial dimension of the safety device.

Embodiment 3

Referring to FIG. 5 - FIG. 6 , the difference from the first embodiment and the second embodiment is that a movable structure 423 is disposed on one end of the latch 42 , and the movable structure 423 can be a roller or a slider or the like. A guide rail 323 is disposed on the inclined surface of the action block 32. The guide rail 323 may be in the form of a wheel groove, a linear guide rail, a slide rail, or the like, and the movable structure 423 can be along the guide rail. The 323 moves and is limited by the guide rail 323. As the movable block 32 reciprocates along the first axial direction a, the movable structure 423 is in contact with the first end or the second end of the active block 32, so that the latch 42 extends along the second axial direction b. The guiding unit 41 is retracted into the guiding unit 41.

In a safety device, a workpiece table, and a lithography machine according to an embodiment of the present invention, the safety device is fixed on a workpiece table, and when the workpiece table moves, the safety device is moved together. The action block assembly of the safety device is located in the first axial direction, the safety pin assembly is located in the second axial direction, and the first axial direction and the second axial direction have an angle less than or equal to 90 degrees. The action block assembly includes a driving unit and an action block, and the driving unit is configured to drive the action block to reciprocate in a first axial direction to drive the pin to move along the second axial direction, that is, to drive the pin to extend The guiding unit may also drive the latch part or all of the protruding unit or retract into the guiding unit, and the working block assembly and the safety pin assembly become non-axial by the cooperation of the driving unit and the acting block. The arrangement of the axial size is greatly compressed to meet the requirements of the use of axial dimensional tension.

The above is only a preferred embodiment of the present invention and does not impose any limitation on the present invention. Any changes in the technical solutions and technical contents disclosed in the present invention may be made by those skilled in the art without departing from the technical scope of the present invention. The content is still within the scope of protection of the present invention.

Claims

A safety device, comprising: an action block assembly and a safety pin assembly, the action block assembly being disposed along a first axial direction, the safety pin assembly being disposed along a second axial direction, the first The axial direction and the second axial direction are not parallel;

The action block assembly includes a driving unit and an action block, and the driving unit is configured to drive the action block to reciprocate along the first axial direction;

The safety pin assembly includes a guiding unit and a latch disposed in the guiding unit;

When the driving unit drives the working block to reciprocate along the first axial direction, the acting block drives the latch to extend the guiding unit or retract the guiding unit along the second axial direction. Inside.
The safety device of claim 1 wherein said first axial direction and said second axial direction have an included angle of less than or equal to 90 degrees.
The security device of claim 2 wherein said first axial direction and said second axial direction are perpendicular.
The safety device of claim 1 wherein said active block includes a ramp, a first end and a second end, said first end and said second end of said active block being respectively said Both ends of the ramp are connected, and the size of the active block at the first end is smaller than the size at the second end in the second axial direction.
A safety device according to claim 4, wherein said latch includes a first end and a second end, said second end of said latch being spaced apart from said active block by said first end of said latch, said drive When the unit drives the action block to reciprocate along the first axial direction, the action block drives the second end of the latch to extend the guide unit along the second axis or retract the guide Within the unit.
A safety device according to claim 5, wherein said latch is retracted into said guide unit when said first end of said latch contacts said first end of said active block; When the first end of the plug contacts the second end of the active block, the latch protrudes from the guiding unit.
A safety device according to claim 6, wherein said action block is provided with a guide rail, said first end of said latch being provided with a movable structure, said movable structure being movable along said guide rail .
The security device of claim 7 wherein said rail comprises a wheel slot, a linear guide or a slide, and said movable structure comprises a roller or a slider.
The safety device according to claim 8, wherein the material of the action block and the roller is a heteropolar magnetic material.
A safety device according to claim 4, wherein said positioning pin assembly further comprises a reset unit, said reset unit being sleeved on said latch, when said latch is in a state of extending out said guide unit, The latch has a tendency to retract.
A workpiece stage, comprising: a work surface and at least one safety device according to any one of claims 1-10;

The safety device is fixed on the work surface, and when the work surface moves, the safety device is driven to move together;

The action block of the safety device is in contact with the work surface, and the drive unit drives the action block to reciprocate along the first axial direction on the work surface.
The workpiece table according to claim 11, wherein the number of the safety devices is two or more.
A workpiece table according to claim 11, wherein said work surface is provided with a guide rail, and said drive unit drives said action block to reciprocate along said first axial direction on said guide rail.
A lithography machine comprising: a gantry and a workpiece stage according to any one of claims 11-13, wherein the workpiece stage is disposed in the frame, and the frame is provided with a pin a hole that is locked when the pin of the safety device projects into the pin hole along the second axial direction.
The lithography machine of claim 14 wherein the number of pin holes matches the number of said safety devices.
A lithography machine according to claim 14, wherein said workpiece stage is unlocked when said pin of said safety device projects out of said pin hole along said second axis.