CN104505127B - Z axis forward amplifies one-dimensional precise locating platform - Google Patents
Z axis forward amplifies one-dimensional precise locating platform Download PDFInfo
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- CN104505127B CN104505127B CN201410784696.1A CN201410784696A CN104505127B CN 104505127 B CN104505127 B CN 104505127B CN 201410784696 A CN201410784696 A CN 201410784696A CN 104505127 B CN104505127 B CN 104505127B
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Abstract
The invention discloses a kind of Z axis forward and amplify one-dimensional precise locating platform, comprising: pedestal, enlarger, motion platform, piezoelectric ceramics, pre-tightening mechanism；Enlarger includes: flexible arm, the first connecting portion, the second connecting portion and the fixed part at two ends；Motion platform side leans with described first connecting portion, and opposite side forms platform bearer face；Piezoelectric ceramics is arranged between the first connecting portion and the second connecting portion, and piezoelectric ceramics one end leans with pre-tightening mechanism, the other end and fixed part to against；Pre-tightening mechanism is arranged in the fixed part of one end, and pre-tightening mechanism includes pre-load nut and steel ball, and steel ball leans with piezoelectric ceramics, and pre-load nut provides pretightning force by steel ball for piezoelectric ceramics.The Z axis forward of the present invention amplify one-dimensional precise locating platform have stroke range greatly, in high precision, simple in construction, volume are little, rigidity is big, highly sensitive, very high resolution, nanoscale, suitably make the advantages such as micromotion platform.
Description
Technical field
The present invention relates to micro-move device applied technical field, be specifically related to a kind of Z axis forward and amplify one-dimensional precise
Locating platform.
Background technology
In recent years, along with developing rapidly of the subjects such as microelectric technique, aerospace, biological engineering, Ren Leishe
Can formally enter " submicron-nanometer " epoch.At numerous technology necks such as electronics, optics, machine-building
In territory, in the urgent need to high accuracy, high-resolution, the micro-positioning of high reliability, for realizing height
The research of precision.Micro-location technology is at MEMS, nano-fabrication technique, microelectronics and nanoelectronic
Numerous high-tech areas such as technology, nano biological engineering will play an increasingly important role, thus in order to
On-line operation or coordinate other instrument and equipments to complete high-precision research and use.
Along with the development of science and technology, micro-location is defined also from before grade develop into existing
Submicron order and nanoscale, later developing direction will be Subnano-class (< 10-9m).To high-accuracy
Systematic research, the prostatitis in the world is walked by the U.S., Germany and Japan, such as based on piezoelectric ceramics nanometer
Location aspect, it is possible to reach the resolution of 1nm, the positioning precision of about 10nm, the row of more than 10mm
Journey.China is the most backward in the research of micro-field of locating technology at present, therefore, carries out mini positioning platform
Correlational study, for reducing the gap with colleague both at home and abroad, promote defence and military and its people of China
Economic fast development has important and far-reaching meaning.
One-dimensional precise locating platform in mini positioning platform, major function is to realize by operation exemplar or seen
The one-dimensional precise motion of test sample part and location, and the one-dimensional operation etc. of microprobe.Its fine motion operation principle
It is to utilize the inverse piezoelectric effect of piezoelectric ceramics, drives resilient hinge mechanism to realize micrometric displacement transmission, to reach
Requirement to one-dimensional precise location.It is relative to the one-dimensional precise location technology of other type of drive, as
Motor driving, voice coil motor driving, memorial alloy driving and magnetic hysteresis telescopic drive mode etc., it is the most former
Reason realizes conveniently, controls simply, and has resolution height, transmission gapless, easy microminiaturization, motion essence
Degree height and repetitive positioning accuracy advantages of higher.Micro-displacement driver is the key component of mini positioning platform, drives
The characteristic of dynamic device and the precision performance important to locating platform system.Micro-displacement driver is micro-
The key component of locating platform, the performance of locating platform system is had important by characteristic and the precision of driver
Impact.
But, existing one-dimensional precise locating platform realizes in structure and displacement equations mode one-dimensional
Difference, all can go out during realizing one-dimensional big stroke precision location in one-dimensional big stroke precision positions
Existing error, finally affects kinematic accuracy.And can bring accumulation by mistake for one-dimensional big stroke precision locating platform
Difference and the technical barrier such as angular error, coupling displacement.
Therefore, for the problems referred to above, it is necessary to provide a kind of further solution.
Summary of the invention
In view of this, the invention provides a kind of Z axis forward and amplify one-dimensional precise locating platform, to overcome
The problem that existing one-dimensional precise locating platform easily occurs error at one-dimensional big stroke precision in positioning.
To achieve these goals, the technical scheme that the embodiment of the present invention provides is as follows:
The Z axis forward of the present invention amplifies one-dimensional precise locating platform and includes: pedestal, enlarger, motion
Platform, piezoelectric ceramics, pre-tightening mechanism；
Described enlarger is positioned in the space that described pedestal limits, and described enlarger is solid with described pedestal
Fixed connection, described enlarger includes: flexible arm, the first connecting portion, the second connecting portion and two ends
Fixed part, described flexible arm is four, and described two of which flexible arm is symmetrically distributed in described first and connects
The both sides in portion, described first connecting portion carries out solid by the fixed part of the flexible arm of its both sides Yu described two ends
Fixed connection；
Described another two flexible arm is symmetrically distributed in the both sides of described second connecting portion, described second connecting portion
Being fixedly connected by the fixed part of the flexible arm of its both sides with described two ends, described flexible arm is with described
Junction point between first connecting portion, the second connecting portion and the fixed part at two ends is flexible hinge point；
Described motion platform side leans with described first connecting portion, and opposite side forms platform bearer face；
Described piezoelectric ceramics is arranged between described first connecting portion and the second connecting portion, described piezoelectric ceramics
One end leans with described pre-tightening mechanism, and the other end leans with described fixed part；
Described pre-tightening mechanism is arranged in the fixed part of described one end, and described pre-tightening mechanism includes pre-load nut
And steel ball, described steel ball leans with described piezoelectric ceramics, and described pre-load nut is institute by described steel ball
State piezoelectric ceramics and pretightning force is provided.
Z axis forward as the present invention amplifies the improvement of one-dimensional precise locating platform, and described pedestal is offered
Having screwed hole, described enlarger is connected by described screwed hole and described pedestal are fixing.
Z axis forward as the present invention amplifies the improvement of one-dimensional precise locating platform, and described enlarger leads to
Cross that described second connecting portion and described pedestal are fixing to be connected.
Z axis forward as the present invention amplifies the improvement of one-dimensional precise locating platform, described first connecting portion
The flexible arm of both sides is symmetrical arranged with the flexible arm of described second connecting portion both sides, each of described flexible arm
Flexible hinge point symmetry is distributed.
Z axis forward as the present invention amplifies the improvement of one-dimensional precise locating platform, and described Z axis forward is put
Big one-dimensional precise locating platform also includes protection set, and described protection puts and offers to draw piezoelectric ceramics
The through hole of shielding line.
Z axis forward as the present invention amplifies the improvement of one-dimensional precise locating platform, and described enlarger leads to
Cross wire cutting technology to be made of one piece.
As the present invention Z axis forward amplify one-dimensional precise locating platform improvement, described enlarger with
The material of described pedestal is identical, and the two material described is light density metal.
Z axis forward as the present invention amplifies the improvement of one-dimensional precise locating platform, described pre-load nut
Material is attached most importance to density metal.
Z axis forward as the present invention amplifies the improvement of one-dimensional precise locating platform, and described piezoelectric ceramics is
The hard piezoelectric ceramics of PZT5 type.
Z axis forward as the present invention amplifies the improvement of one-dimensional precise locating platform, described pre-load nut bag
Including the first nut and the second nut, described second nut is arranged between above-mentioned first nut and steel ball, institute
State steel ball to match with described second nut.
Compared with prior art, the invention has the beneficial effects as follows: the Z axis forward of the present invention amplifies one-dimensional essence
Close locating platform have stroke range greatly, in high precision, simple in construction, volume are little, rigidity is big, sensitivity
Height, very high resolution, nanoscale, suitably make the advantages such as micromotion platform.It is put by using Z axis forward
The most one-dimensional precision positioning and enlarger, effectively raise the amplification in range of movement, reduces
Precisely locating platform volume so that it is compacter, and avoid the angle that other enlargers are brought
Error, improves the precision of location.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to reality
Execute the required accompanying drawing used in example or description of the prior art to be briefly described, it should be apparent that below,
Accompanying drawing in description is only some embodiments described in the present invention, for those of ordinary skill in the art
From the point of view of, on the premise of not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the vertical view of Z axis forward amplification one-dimensional precise locating platform one detailed description of the invention of the present invention
Figure；
Fig. 2 is the sectional view that in Fig. 1, Z axis forward amplifies one-dimensional precise locating platform；
Fig. 3 is the floor map of part-structure in Fig. 2, it should be noted that in order to label is convenient,
Eliminate cut-away section line therein.
Detailed description of the invention
For the technical scheme making those skilled in the art be more fully understood that in the present invention, below in conjunction with
Accompanying drawing in the embodiment of the present invention, clearly and completely retouches the technical scheme in the embodiment of the present invention
State, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole enforcement
Example.Based on the embodiment in the present invention, those of ordinary skill in the art are not before making creative work
Put the every other embodiment obtained, all should belong to the scope of protection of the invention.
As shown in Figure 1, 2, the Z axis forward amplification one-dimensional precise locating platform 100 of the present invention includes: base
Seat 10, enlarger 20, motion platform 30, piezoelectric ceramics 40, pre-tightening mechanism 50.
Described enlarger 20 is for amplifying the deformation that piezoelectric ceramics 40 produces, and passes through motion platform 30
Output displacement enlargement.Enlarger 20 is positioned in the space that described pedestal 10 limits, thus, pedestal 10
Enlarger 20 is played a protective role, makes enlarger 20 not by external interference, to ensure that precision is fixed
The normal work of position workbench.Described enlarger 20 is fixing with described pedestal 10 to be connected, described amplification
Mechanism 20 is identical with the material of described pedestal 10, and the two material described is light density metal.This enforcement
In mode, pedestal and enlarger are not made of one piece, and are i.e. added by material difference processing technique of the same race
Work forms, and is arranged such, compact conformation, and in the case of overall dimensions is limited and piezoelectric ceramics determines,
This structure is obtained in that bigger displacement output ratio.
As it is shown on figure 3, described enlarger 20 includes: flexible arm the 21, first connecting portion 22, second
The fixed part 24 at connecting portion 23 and two ends.
Wherein, described flexible arm 21 is four, and described two of which flexible arm 21 is symmetrically distributed in described
The both sides of the first connecting portion 22, described first connecting portion 22 is by the flexible arm of its both sides and described two ends
Fixed part 24 be fixedly connected.Additionally, described another two flexible arm 21 is symmetrically distributed in described
The both sides of two connecting portions 23, described second connecting portion 23 passes through the flexible arm 21 of its both sides and described two ends
Fixed part 24 be fixedly connected.
In above-mentioned embodiment, described flexible arm 21 and described first connecting portion the 22, second connecting portion 23
And the junction point between the fixed part 24 at two ends is flexible hinge point 25, the number of this flexible hinge point 25
Amount is 8, described 8 symmetrical.The flexible arm 21 of described first connecting portion 22 both sides is with described
The flexible arm 21 of the second connecting portion 23 both sides is symmetrical arranged, thus, each of described flexible arm 21 is flexible
Hinge point 25 is symmetrical.Wherein, flexible hinge point 25 plays and guides and the effect of auxiliary reply, and
And under the protection of flexible hinge point 25, described motion platform 30 can keep the concordance of the direction of motion,
And avoid any motion being perpendicularly to the direction of movement, and the destruction of external force.
Meanwhile, flexible hinge structure makes displacement output ratio reach 4 times, substantially increases existing lever amplification
The displacement equations multiple of mechanism.This is because, flexible hinge structure has certain elastic reaction and produces,
The output displacement making enlarger reduces accordingly；Meanwhile, flexible hinge structure is the bullet due to material
Property deformation produce displacement, so in deformation process some energy by material itself absorption, simultaneously
Piezoelectric ceramics can be made to be subject to bigger load so that it is the drive displacement of offer also has reduction.When overall dimensions is subject to
Limit, in the case of piezoelectric ceramics determines such that it is able to obtain bigger displacement output ratio.
Described first connecting portion 22 leans with described motion platform 30, the opposite side of this motion platform 30
Form platform bearer face.Displacement enlargement is transferred to motion by the first connecting portion 22 and puts down by enlarger 20
Platform 30, makes motion platform 30 produce corresponding displacement output.Specifically, flexible arm 21 is by piezoelectric ceramics
40 deformation produced are amplified, and produce displacement enlargement, and export this displacement enlargement to the first connecting portion
At 22, owing to the first connecting portion 22 leans with motion platform 30, the first connecting portion 22 is by this amplification position
Move output to motion platform 30.Additionally, be further opened with screw on motion platform 30, this screw is used for fixing
Corresponding movement parts.
Described second connecting portion 23 is fixedly connected with described pedestal 10, it is preferable that described pedestal 10
On offer screwed hole, the second connecting portion 23 is fixedly connected with described pedestal 10 by this screwed hole.
Described enlarger 20 is made of one piece by wire cutting technology, is arranged such, and overcomes existing
Enlarger because of its reasons in structure in the course of processing it is difficult to ensure that the problem of symmetry, present embodiment
In enlarger in the course of processing, be easier to ensure that its machining accuracy, make the symmetry of workpiece have the biggest
Improve, it is to avoid the coupling displacement of enlarger.
Described piezoelectric ceramics 40 is arranged between described first connecting portion 22 and the second connecting portion 23, and will
Piezoelectric ceramics 40 is integrally located among pedestal 10.Being arranged such, enlarger 20 drives motion platform 30
During axially-movable, this enlarger 20 has bigger space in a lateral direction, and structure is compacter,
And enlarger 20 can realize larger range of motion in effective space.
Described piezoelectric ceramics 40 one end leans with described pre-tightening mechanism 50, the other end and described fixed part
24 to against.When applying a voltage drive to piezoelectric ceramics 40, piezoelectric ceramics 40 can deform upon,
Drive simultaneously enlarger 20 to axially-movable, thus, drive movement parts motion on motion platform according to
The output displacement amplified moves.Preferably, described piezoelectric ceramics is the hard piezoelectric ceramics of PZT5 type.
Additionally, the Z axis forward of the present invention amplifies one-dimensional precise locating platform 100 also includes protection set 60 Hes
Cover plate 70, wherein, protection set 60 offers to draw the through hole of the shielding line of piezoelectric ceramics 40.
Described pre-tightening mechanism 50 is arranged in the fixed part 24 of described one end, and it provides for piezoelectric ceramics 40
Enough pretightning forces, can avoid the kinematic error that the piezoelectric ceramics 40 gap in installation process is caused.
Described pre-tightening mechanism 50 includes pre-load nut 51 and steel ball 52, and wherein, described pre-load nut 51 includes
One nut 511 and the second nut 512, described second nut 512 is arranged at above-mentioned first nut 511 and steel
Between pearl 52.Pre-load nut 51 uses fine thread, use fine thread have locking vibration-isolating effect good,
Can avoid the piezoelectric ceramics 50 gap institute in installation process with the advantage of precise fine-adjustment pretightning force simultaneously
The kinematic error caused and the damage of piezoelectric ceramics.
Further, described steel ball 52 matches with described second nut 512, simultaneously steel ball 52 and institute
Stating piezoelectric ceramics 50 to lean, pre-load nut 51 is carried for described piezoelectric ceramics 50 by described steel ball 52
For pretightning force.It is arranged such that and makes the screwed hole of pre-load nut 51 not keep absolute with piezoelectric ceramics 50
Vertically, it is possible to ensure that piezoelectric ceramics 50 will not be protected to a certain extent by the power in addition to vertical direction
Protect piezoelectric ceramics 50, decrease the loss of piezoelectric ceramics 50.Preferably, described pre-load nut 51
Material is attached most importance to density metal.
Compared with prior art, the Z axis forward amplification one-dimensional precise locating platform of the present invention has stroke model
Enclose greatly, in high precision, simple in construction, volume are little, rigidity is big, highly sensitive, very high resolution, nanometer
Level, suitably make the advantages such as micromotion platform.It amplifies one-dimensional precision positioning by using Z axis forward and puts
Great institutions, effectively raises the amplification in range of movement, reduces precisely locating platform volume,
Make it compacter, and the angular error avoiding other enlargers to be brought, improve the essence of location
Density.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment,
And without departing from the spirit or essential characteristics of the present invention, it is possible to real in other specific forms
The existing present invention.Therefore, no matter from the point of view of which point, embodiment all should be regarded as exemplary, and
Being nonrestrictive, the scope of the present invention is limited by claims rather than described above, therefore purport
All changes in falling in the implication of equivalency and scope of claim are included in the present invention.
Should not be considered as limiting involved claim by any reference in claim.
Moreover, it will be appreciated that although this specification is been described by according to embodiment, but the most each reality
Mode of executing only comprises an independent technical scheme, and this narrating mode of description is only for understand
Seeing, those skilled in the art should be using description as an entirety, and the technical scheme in each embodiment is also
Other embodiments that it will be appreciated by those skilled in the art that can be formed through suitably closing.
Claims (10)
1. a Z axis forward amplifies one-dimensional precise locating platform, it is characterised in that described Z axis forward amplifies
One-dimensional precise locating platform includes: pedestal, enlarger, motion platform, piezoelectric ceramics, pre-tightening mechanism；
Described enlarger is positioned in the space that described pedestal limits, and described enlarger is fixed with described pedestal
Connecting, described enlarger includes: fixing of flexible arm, the first connecting portion, the second connecting portion and two ends
Portion, described flexible arm is four, and described two of which flexible arm is symmetrically distributed in the two of described first connecting portion
Side, described first connecting portion is fixedly connected by the fixed part of the flexible arm of its both sides with described two ends；
Described another two flexible arm is symmetrically distributed in the both sides of described second connecting portion, and described second connecting portion leads to
The fixed part of the flexible arm and described two ends of crossing its both sides is fixedly connected, described flexible arm and described first
Junction point between connecting portion, the second connecting portion and the fixed part at two ends is flexible hinge point；
Described motion platform side leans with described first connecting portion, and opposite side forms platform bearer face；
Described piezoelectric ceramics is arranged between described first connecting portion and the second connecting portion, described piezoelectric ceramics one
End leans with described pre-tightening mechanism, and the other end leans with described fixed part；
Described pre-tightening mechanism is arranged in the fixed part of described one end, described pre-tightening mechanism include pre-load nut and
Steel ball, described steel ball leans with described piezoelectric ceramics, and described pre-load nut is described pressure by described steel ball
Electroceramics provides pretightning force.
Z axis forward the most according to claim 1 amplifies one-dimensional precise locating platform, it is characterised in that
Offering screwed hole on described pedestal, described enlarger is connected by described screwed hole and described pedestal are fixing.
Z axis forward the most according to claim 1 amplifies one-dimensional precise locating platform, it is characterised in that
Described enlarger is connected by described second connecting portion and described pedestal are fixing.
Z axis forward the most according to claim 1 amplifies one-dimensional precise locating platform, it is characterised in that
The flexible arm of described first connecting portion both sides is symmetrical arranged with the flexible arm of described second connecting portion both sides, described
Each flexible hinge point symmetry distribution of flexible arm.
Z axis forward the most according to claim 1 amplifies one-dimensional precise locating platform, it is characterised in that
Described Z axis forward amplify one-dimensional precise locating platform also include protection set, described protection put offer in order to
Draw the through hole of piezoelectric ceramics shielding line.
Z axis forward the most according to claim 1 amplifies one-dimensional precise locating platform, it is characterised in that
Described enlarger is made of one piece by wire cutting technology.
Z axis forward the most according to claim 1 amplifies one-dimensional precise locating platform, it is characterised in that
Described enlarger is identical with the material of described pedestal, and the two material described is light density metal.
Z axis forward the most according to claim 1 amplifies one-dimensional precise locating platform, it is characterised in that
The material of described pre-load nut is attached most importance to density metal.
Z axis forward the most according to claim 1 amplifies one-dimensional precise locating platform, it is characterised in that
Described piezoelectric ceramics is the hard piezoelectric ceramics of PZT5 type.
Z axis forward the most according to claim 1 amplifies one-dimensional precise locating platform, it is characterised in that
Described pre-load nut include the first nut and the second nut, described second nut be arranged at above-mentioned first nut and
Between steel ball, described steel ball matches with described second nut.
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| CN105244061B (en) * | 2015-10-13 | 2017-10-17 | 天津大学 | The big stroke mini positioning platform of the pressure controllable driven based on stick-slip |
| CN109036495B (en) * | 2018-08-23 | 2021-02-19 | 三英精控（天津）科技有限公司 | Z-direction nanometer displacement positioning platform based on flexible hinge |
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| CN103411106B (en) * | 2013-08-23 | 2015-08-19 | 苏州大学 | A kind of nesting type rhombus amplification two-dimensional precisely locating platform |
| CN203799672U (en) * | 2014-03-28 | 2014-08-27 | 苏州大学 | Precision positioning platform |
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