WO2019078110A1 - Élément d'imagerie à semi-conducteurs, procédé de pilotage d'élément d'imagerie à semi-conducteurs, et dispositif électronique - Google Patents

Élément d'imagerie à semi-conducteurs, procédé de pilotage d'élément d'imagerie à semi-conducteurs, et dispositif électronique Download PDF

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Publication number
WO2019078110A1
WO2019078110A1 PCT/JP2018/038108 JP2018038108W WO2019078110A1 WO 2019078110 A1 WO2019078110 A1 WO 2019078110A1 JP 2018038108 W JP2018038108 W JP 2018038108W WO 2019078110 A1 WO2019078110 A1 WO 2019078110A1
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Prior art keywords
solid
state imaging
imaging device
photoelectric conversion
unit
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PCT/JP2018/038108
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English (en)
Japanese (ja)
Inventor
俊明 小野
聡子 飯田
智彦 朝妻
北野　良昭
勇佑 松村
綾子 梶川
Original Assignee
ソニーセミコンダクタソリューションズ株式会社
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Priority claimed from JP2018159569A external-priority patent/JP2019080305A/ja
Application filed by ソニーセミコンダクタソリューションズ株式会社 filed Critical ソニーセミコンダクタソリューションズ株式会社
Priority to US16/755,416 priority Critical patent/US11509842B2/en
Publication of WO2019078110A1 publication Critical patent/WO2019078110A1/fr

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/50—Control of the SSIS exposure
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components

Definitions

  • the present technology relates to a solid-state imaging device, a method of driving a solid-state imaging device, and an electronic apparatus, and more particularly to a technology of a solid-state imaging device including a film whose optical characteristics change according to an applied voltage.
  • a solid-state imaging device such as a CCD or CMOS image sensor
  • light incident on the sensor unit during a predetermined exposure time is photoelectrically converted by a photodiode, and incident light is converted to charge and accumulated in an accumulation unit.
  • incident light is converted to charge and accumulated in an accumulation unit.
  • the charge storage amount of the storage portion is limited, for example, when strong light is incident, the charge is saturated and the gradation of white and black becomes insufficient. As a method of suppressing this, it is known to expand the dynamic range.
  • Patent Document 1 discloses a semiconductor substrate having a light receiving surface in which photoelectric conversion parts are formed by being divided into pixels arranged in a matrix. An electro that is formed on the semiconductor substrate in a light incident path to the photoelectric conversion unit in a part of the pixels selected from the pixels, and the light transmittance changes from the first transmittance to the second transmittance according to an applied voltage
  • a solid-state imaging device includes a chromic film, a lower electrode formed in the lower layer of the electrochromic film, and an upper electrode formed in the upper layer of the electrochromic film. According to the technology of Patent Document 1, it is supposed that the dynamic range can be expanded without causing problems such as an increase in power consumption and an unnatural image.
  • Patent Document 1 may not be able to further improve the technique for expanding the dynamic range.
  • the present technology has been made in view of such a situation, and its main object is to provide a solid-state imaging device capable of automatically expanding a dynamic range for each unit pixel.
  • a solid-state imaging device which is an example of the present technology, includes a first photoelectric conversion device, a first storage unit that stores charges photoelectrically converted by the first photoelectric conversion device, and And a first film which is electrically connected to the storage unit of the above and whose optical characteristics change in accordance with the applied voltage, is provided for each unit pixel.
  • a unit pixel of a solid-state imaging device which is an example of the present technology, is electrically connected to a first transfer transistor that transfers the charge photoelectrically converted by the photoelectric conversion device to the first storage unit, and the first storage unit.
  • the amplifier may further include an amplification transistor connected and a selection transistor electrically connected to the amplification transistor.
  • a first electrode an electrochromic film whose optical characteristics change according to an applied voltage, a second electrode, and a second electrode in the order in which light is incident.
  • a second storage unit for storing is provided for each unit pixel, the electrochromic film is disposed on the optical path of light incident on the second photoelectric conversion element, and the first storage unit and the second electrode It is connected.
  • the charge is accumulated in the first accumulation portion, and the accumulated charge is accumulated during the exposure period. It can be held in the first accumulation unit.
  • an electronic device which is an example of the present technology includes a first photoelectric conversion element, a first storage unit that stores a charge photoelectrically converted by the first photoelectric conversion element, and a first storage unit.
  • a solid-state imaging device including a first film connected to each other and having a change in optical characteristics according to an applied voltage for each unit pixel is provided as an imaging unit.
  • the present technology it is possible to provide a solid-state imaging device capable of automatically expanding the dynamic range for each unit pixel.
  • the effect of the present technology is not necessarily limited to the above effect, and may be any effect described in the present disclosure.
  • FIG. 1 It is a cross-sectional schematic diagram which shows the pixel of the solid-state image sensor of 1st Embodiment which concerns on this technique. It is a circuit block diagram which shows the equivalent circuit of the unit pixel of FIG. It is a plane schematic diagram which shows the unit pixel of FIG. (A) is a schematic plan view with the electrochromic film and the on-chip lens removed, and (B) is a schematic plan view also showing the electrochromic film and the on-chip lens. It is a graph which shows a typical characteristic when a voltage is applied to the electrochromic film
  • (A) is a graph showing the photoelectric conversion characteristics in the absence of the electrochromic film
  • (B) is a graph showing the photoelectric conversion characteristics in the presence of the electrochromic film
  • (C) is a graph of the electrochromic film It is a graph which shows the relationship between the transmittance
  • It is a cross-sectional schematic diagram which shows the pixel of the solid-state image sensor of 2nd Embodiment which concerns on this technique.
  • Solid-state imaging device according to the first embodiment (1-1) Configuration example of solid-state imaging device (1-2) Circuit configuration example of unit pixel (1-3) Configuration example of unit pixel (1-4) Circuit operation of unit pixel Example (1-5) Dynamic range expansion 2.
  • Solid-state imaging device according to second embodiment Solid-state imaging device of third embodiment 4.
  • Solid-state imaging device of fourth embodiment Solid-state imaging device of fifth embodiment 6.
  • Solid-state Imaging Device of Eighth Embodiment Solid-state Imaging Device of the Ninth Embodiment (9-1) Example of Cross-Sectional Structure of Solid-State Imaging Device (9-2) Example of Circuit Configuration of Unit Pixel (9-3) Configuration Example of Unit Pixel (9-4) Circuit of Unit Pixel Operation example (9-5) Dynamic range expansion 10.
  • Solid-state Imaging Device of Thirteenth Embodiment Solid-state imaging device of 14th Embodiment Solid-state imaging device of fifteenth embodiment 16.
  • Solid-state Imaging Device of First Embodiment> A solid-state imaging device according to a first embodiment of the present technology will be described with reference to FIGS. 1 to 5.
  • the solid-state imaging device according to the present embodiment can capture a subject, such as a complementary metal oxide semiconductor (CMOS) image sensor or a charge coupled device (CCD) image sensor, and can obtain digital data of a captured image. It is an element.
  • CMOS complementary metal oxide semiconductor
  • CCD charge coupled device
  • FIG. 1 is a schematic cross-sectional view of a pixel showing the solid-state imaging device of the present embodiment.
  • the solid-state imaging device 10 of the present embodiment is a surface-illuminated CMOS solid-state imaging device, and is formed on a semiconductor substrate on which a photodiode (PD) 101, which is an example of a photoelectric conversion device, is formed.
  • PD photodiode
  • the wiring layer in which the connection wiring 121 and the like are formed, the lower electrode 131, the electrochromic film 132, and the upper electrode 133 are stacked.
  • color filters 141 of respective colors of red, green and blue are formed on the upper layer of the upper electrode 133, and an on-chip lens 142 is formed on the upper layer thereof.
  • the photodiodes 101 are formed in each pixel of a pixel array of red pixels, green pixels and blue pixels arranged on a matrix on a semiconductor substrate.
  • the electrochromic film 132 is provided in a light incident path to the photodiode 101, and includes an electrochromic material whose light transmittance changes in accordance with an applied voltage.
  • the electrochromic film 132 has a property of changing the light transmittance from the first transmittance to the second transmittance according to the applied voltage.
  • the transfer transistor 102, the capacitor connection transistor 104, the reset transistor 105, the overflow gate 106, and the floating capacitance (floating capacitor) FC are formed in the vicinity of the contact surface with the semiconductor substrate. Further, in the wiring layer, two connection wirings 121 for connecting the semiconductor substrate and the lower electrode 131 are formed. In addition, the transfer transistor 102, the capacitor connection transistor 104, the reset transistor 105, the overflow gate 106, and the floating capacitance FC are connected to the pixel drive wiring 122 via connection wirings, respectively.
  • an FD (floating diffusion) portion 103 which is a floating diffusion region is formed below the space between the adjacent transfer transistor 102 and capacitive connection transistor 104.
  • the FD unit 103 plays a role as a first accumulation unit that accumulates the charge photoelectrically converted by the photodiode 101, which is a first photoelectric conversion element.
  • a storage capacitance 107 including a stray capacitance FC and a diffusion layer located below the stray capacitance FC is formed.
  • the storage capacity 107 plays a role as a second storage unit.
  • the storage capacitor 107 is connected to the lower electrode 131 via one of the connection wires 121.
  • “capacitance” represents a two-terminal element, and a capacitance is formed by the diffusion layer and the floating capacitance FC of polysilicon (and the insulating film sandwiched between them).
  • FIG. 2 is a circuit diagram showing an equivalent circuit of a unit pixel of this embodiment.
  • the unit pixel 20 of the present embodiment includes a photodiode 101, a transfer transistor 102, an FD unit 103 including a floating capacitance FC, a capacitive connection transistor 104, a reset transistor 105, and an overflow gate 106. And a storage capacitance 107 including a stray capacitance FC. Further, the unit pixel 20 includes an amplifier transistor 108 and a selection transistor 109.
  • a plurality of row control lines are commonly wired to each pixel of the same pixel row with respect to the unit pixel 20.
  • the plurality of row control lines are connected in units of pixel rows to the output end corresponding to each pixel row of the vertical drive unit.
  • the vertical driving unit appropriately outputs a transfer signal TRG, which is a transfer pulse on the PD 201 side, a reset signal RST, and a selection signal SEL to the plurality of row control lines when driving each unit pixel 20 of the pixel array unit.
  • the anode electrode of the photodiode 101 is connected to a negative side power supply such as ground, photoelectrically converts the received light into photoelectrons, which are photocharges of a charge amount according to the light amount, and stores the photoelectrons.
  • the cathode electrode of the photodiode 101 is connected to the source electrode of the transfer transistor 102 and the source electrode of the overflow gate 106. Further, the photodiode 101 is electrically connected to the FD unit 103 via the transfer transistor 102. Furthermore, the photodiode 101 is electrically connected to the electrochromic film 132 and the storage capacitor 107 via the overflow gate 106.
  • the drain electrode of the transfer transistor 102 is connected to the FD unit 103.
  • the transfer signal TRG is supplied to the gate electrode of the transfer transistor 102 from the vertical drive unit.
  • the transfer transistor 102 becomes conductive in response to the transfer signal TRG, thereby transferring the photocharges photoelectrically converted by the photodiode 101 to the FD unit 103.
  • the FD unit 103 is connected to the source electrode of the capacitor connection transistor 104 and the gate electrode of the amplifier transistor 108. Further, the FD section 103 is connected to one end of the stray capacitance FC, and the other end of the stray capacitance FC is connected to the ground. Note that the FD unit 103 can be a charge storage unit that stores a charge for applying a voltage to the electrochromic film 132 as a first film. However, the charge storage unit may be provided separately from the FD unit 103.
  • the drain electrode of the capacitor connection transistor 104 is connected to the source electrode of the reset transistor 105 and the storage capacitor 107.
  • the capacitive connection signal CG is given to the gate electrode of the capacitive connection transistor 104 from the vertical drive unit.
  • the capacitive connection transistor 104 connects the FD unit 103 and the storage capacitor 107 by being turned on in response to the capacitive connection signal CG.
  • the drain electrode of the reset transistor 105 is connected to the power supply.
  • the reset signal RST is given to the gate electrode of the reset transistor 105 from the vertical drive unit.
  • the reset transistor 105 becomes conductive in response to the reset signal RST, and resets the FD unit 103 and / or the storage capacitor 107 by flowing the charge of the FD unit 103 and / or the storage capacitor 107 to the power supply.
  • the drain electrode of the overflow gate 106 is connected to the electrochromic film 132 and the storage capacitor 107.
  • An overflow signal OFG is given to the gate electrode of the overflow gate 106 from the vertical drive unit.
  • the overflow gate 106 is rendered conductive in response to the overflow signal OFG, whereby the photocharges photoelectrically converted and accumulated by the photodiode 101 can flow to the electrochromic film 132 and / or the storage capacitor 107.
  • the storage capacitor 107 is connected to the drain electrode of the capacitor connection transistor 104, the source electrode of the reset transistor 105, the drain electrode of the overflow gate 106, and the electrochromic film 132.
  • the storage capacitor 107 is connected to one end of the stray capacitance FC, and the other end of the stray capacitance FC is connected to the ground.
  • the storage capacitor 107 can be a charge storage portion that stores a charge for applying a voltage to the electrochromic film 132 as the first film.
  • the drain electrode of the amplifier transistor 108 is connected to the power supply, and the source electrode is connected to the drain electrode of the selection transistor 109.
  • the source electrode of the amplifier transistor 108 is connected to the vertical signal line via the selection transistor 109.
  • the source electrode of the selection transistor 109 is connected to the vertical signal line.
  • the selection signal SEL is supplied to the gate electrode of the selection transistor 109 from the vertical drive unit.
  • the selection transistor 109 is rendered conductive in response to the selection signal SEL, thereby setting the unit pixel 20 in the selected state and outputting the pixel signal amplified by the amplifier transistor 108 to the vertical signal line.
  • the selection transistor 109 can be connected between the drain electrode of the amplifier transistor 108 and the power supply. That is, since the selection transistor 109 is connected in series to the amplifier transistor 108 between the power supply and the vertical signal line, the selection operation of the unit pixel 20 can also be performed.
  • FIG. 3 is a schematic plan view showing a unit pixel of this embodiment.
  • FIG. 3A is a schematic plan view of the unit pixel 20 with the electrochromic film 132 and the on-chip lens 142 removed
  • FIG. 3B is an electrochromic film 132 disposed on the photodiode 101 and the on-chip lens 142.
  • FIG. 10 is a schematic plan view of the unit pixel 20 which also represents FIG.
  • the transfer transistor 102, the FD unit 103, the capacitive connection transistor 104, and the reset transistor 105 are connected to one side of a rectangular photodiode 101.
  • the overflow gate 106 and the storage capacitor 107 are connected to the other side adjacent to one side of the rectangular photodiode 101.
  • the connection wiring 121 is formed between the capacitive connection transistor 104 and the reset transistor 105 and at the position of the storage capacitor 107.
  • a rectangular electrochromic film 132 is disposed above the unit pixel 20 so as to cover the unit pixel 20, for example.
  • a circular on-chip lens 142 is disposed above the electrochromic film 132 at a position covering the photodiode 101, the transfer transistor 102, and the overflow gate 106.
  • the electrochromic film 132 of the present embodiment can be made of, for example, a material such as tungsten oxide, whose transmittance changes in accordance with the applied voltage.
  • the electrochromic film 132 of the present embodiment may use a material such as magnesium-titanium alloy, magnesium-nickel alloy, tantalum oxide, or the like.
  • FIG. 4 is a graph showing typical characteristics when a voltage is applied to the electrochromic film 132 using the tungsten oxide of the present embodiment.
  • the solid line in the upper part in FIG. 4 represents the transmittance when the voltage applied between the upper electrode 133 and the lower electrode 131 is 0V.
  • the solid line in the lower part in FIG. 4 represents the transmittance when the voltage applied between the upper electrode 133 and the lower electrode 131 is 2V.
  • the transmissivity of about 70% is shown in the visible light region (approximately 380 nm to 780 nm), whereas when the voltage is 2 V Changes to less than 10%.
  • the charge photoelectrically converted by the photodiode 101 during exposure is stored in the photodiode 101, and when the charge is read out, the transfer transistor 102 is turned on to transfer the charge to the FD unit 103, and the amplifier transistor 108 and A signal is output to the outside through the selection transistor 109.
  • the charge leaks through the overflow gate 106 and is accumulated in the accumulation capacitor 107.
  • the capacitor connection transistor 104 is turned on, and a signal is output to the outside through the amplifier transistor 108 and the selection transistor 109.
  • the potential of the storage portion is reset to make the transmittance of the electrochromic film 132 high.
  • the storage capacitor 107 is reset by turning on the reset transistor 105. Further, by turning on the reset transistor 105 and the capacitor connection transistor 104, the FD unit 103 is also reset.
  • the storage capacitance 107 is connected to the lower electrode 131, if the reset potential and the potential supplied to the upper electrode 133 are set equal, the voltage applied to the electrochromic film 132 at the time of reset is It becomes 0V. That is, in the reset state, the electrochromic film 132 has a high transmittance.
  • the potential decreases, so that a potential difference gradually occurs with the upper electrode 133.
  • the voltage applied to the electrochromic film 132 increases as the amount of photoelectrons increases, and the transmittance decreases.
  • the transmittance decreases, the light incident on the photodiode 101 decreases, and the generated photocharge also decreases, so the sensitivity decreases. Thereby, the dynamic range can be expanded.
  • exposure is performed in a state in which the transmittance of the electrochromic film 132 changes in accordance with the amount of light for each pixel. At this time, it is preferable to hold the accumulated charge in the storage capacitor 107 during the exposure period. Then, the photoelectrically converted signal is read out to obtain an output.
  • FIG. 5 is a graph showing the photoelectric conversion characteristics of the solid-state imaging device 10 of the present embodiment.
  • FIG. 5A is a graph showing the photoelectric conversion characteristics when the electrochromic film 132 is not present
  • FIG. 5B is a graph showing the photoelectric conversion characteristics when the electrochromic film 132 is present
  • FIG. It is a graph which shows the relationship between the transmittance
  • the electrochromic film 132 when the electrochromic film 132 does not exist, first, as the amount of incident light increases from the dark state, the number of photoelectrons accumulated in the photodiode 101 also increases linearly. Then, when the light amount reaches 1 and the number of saturated electrons that can be accumulated by the photodiode 101 is reached, the charge more than that can not be accumulated in the photodiode 101.
  • the generated photoelectrons are stored in the storage capacitor 107 via the overflow gate 106. Therefore, when the light amount exceeds 1, the electrons accumulated in the photodiode 101 do not increase as indicated by the solid line 51, and the number of electrons accumulated in the storage capacitor 107 increases as indicated by the solid line 52. Then, as shown by the solid line 52, when the amount of light further increases and reaches the amount of light 2, when the number of saturated electrons that can be accumulated in the storage capacitor 107 is reached, no more charge can be accumulated.
  • the transmissivity of the electrochromic film 132 is high, and the transmissivity does not change unless the charge stored in the storage capacitor 107 changes. It shows the same photoelectric conversion characteristic as the solid line 51 of 5A.
  • the charge is gradually accumulated in the storage capacitor 107 as indicated by the solid line 53, and the transmittance of the electrochromic film 132 decreases accordingly as indicated by the solid line 54 in FIG. 5C. That is, since the sensitivity gradually decreases, the number of electrons stored in the storage capacity 107 gradually slopes in comparison with the case where the electrochromic film 132 does not exist (indicated by a dotted line in FIG. 5B). .
  • the present technology can provide a solid-state imaging device capable of automatically expanding the dynamic range for each unit pixel, unlike the technology described in Patent Document 1.
  • the voltage applied to the electrochromic film can be controlled individually for each pixel, and since the control is automatically adjusted in accordance with the amount of light incident on that pixel, Even in the case where the amount of incident light is largely different, adjustment is made to the optimum state for each pixel.
  • FIG. 6 is a schematic cross-sectional view showing a pixel of a solid-state imaging device according to a second embodiment of the present technology.
  • the present embodiment is different from the first embodiment in that the electrochromic film 132 is disposed in the wiring layer.
  • symbol is described in the structure similar to the structure of 1st Embodiment, and description is abbreviate
  • the electrochromic film 132 whose optical characteristics change in accordance with the applied voltage is disposed between the color filter 141 and the pixel drive wiring 122 in the wiring layer.
  • the electrochromic film 132 is disposed below the pixel drive wiring 122.
  • the electrochromic film 132 may be disposed in any layer as long as it is the optical path of light incident on the photodiode 101. Therefore, with the above configuration, the solid-state imaging device 60 of the present embodiment can also obtain the same circuit operation and effects of pixels as the solid-state imaging device 10 of the first embodiment.
  • the electrochromic film 132 is disposed closer to the PD 101 than the solid-state imaging device 10 according to the first embodiment. As compared with the solid-state imaging device 10 of the embodiment, it is possible to obtain an effect that improvement in optical characteristics can be expected.
  • FIG. 7 is a schematic cross-sectional view showing a pixel of a solid-state imaging device according to a third embodiment of the present technology.
  • the present embodiment is different from the first embodiment in that a back-illuminated solid-state imaging device is used.
  • symbol is described in the structure similar to the structure of 1st Embodiment, and description is abbreviate
  • the solid-state imaging device 70 of the present embodiment is a backside illuminated solid-state imaging device
  • the wiring layer is disposed below the semiconductor substrate of the photodiode 101.
  • an insulating film 134 is provided between the semiconductor substrate and the lower electrode 131 in order to prevent short circuit. Therefore, the connection wiring 121 is connected to the lower electrode 131 through the semiconductor substrate of the photodiode 101 and the insulating film 134.
  • the solid-state imaging device 70 of the present embodiment can also obtain the same circuit operation and effects of pixels as the solid-state imaging device 10 of the first embodiment.
  • the solid-state imaging device 70 according to the present embodiment is a backside illumination type, it is possible to obtain an effect that improvement in the sensitivity of the PD 101 and improvement in the freedom of the wiring layout can be expected.
  • FIG. 8 is a schematic circuit diagram showing an equivalent circuit of a unit pixel according to a fourth embodiment of the present technology.
  • the present embodiment is different from the first embodiment in that in the circuit configuration of the unit pixel, an FD portion which is an additional floating diffusion region is formed instead of the point having no overflow gate 106 and the storage capacitor 107. That is the point.
  • symbol is described in the structure similar to the structure of 1st Embodiment, and description is abbreviate
  • the unit pixel 80 includes a photodiode 101, a transfer transistor 102, an FD unit 103 including a floating capacitance FC, and an FD (floating diffusion) capacitance switching switch 110 which is a floating diffusion region. , The reset transistor 105, and the FD section 111 including the stray capacitance FC. Further, the unit pixel 80 includes an amplifier transistor 108 and a selection transistor 109.
  • the source electrode of the FD capacitance changeover switch 110 is connected to the FD unit 103.
  • the drain electrode of the FD capacitance changeover switch 110 is connected to the source electrode of the reset transistor 105 and the FD section 111.
  • a capacitance connection signal FDG is given to the gate electrode of the FD capacitance changeover switch 110 from the vertical drive unit.
  • the FD capacitance switching switch 110 connects the FD section 103 and the FD section 111 by being turned on in response to the capacitance connection signal FDG.
  • the FD unit 111 is connected to the drain electrode of the FD capacitance switching switch 110, the source electrode of the reset transistor 105, and the electrochromic film 132. Further, the FD portion 111 is connected to one end of the stray capacitance FC, and the other end of the stray capacitance FC is connected to the ground. Note that the FD section 111 can be a charge storage section that stores charges in order to apply a voltage to the electrochromic film 132 as the first film.
  • the charge photoelectrically converted by the photodiode 101 during exposure is stored in the photodiode 101, and when the charge is read out, the transfer transistor 102 is turned on to transfer the charge to the FD unit 103, and the amplifier transistor 108 and A signal is output to the outside through the selection transistor 109.
  • the unit pixel 80 can switch the capacitance value of the floating diffusion region by turning on / off the FD capacitance switching switch 110, and can switch between the high sensitivity mode and the low sensitivity mode.
  • the FD capacitance switching switch 110 is off, the capacitance is only for the FD section 103 and the capacitance is small, so that high voltage amplitude can be obtained even with a small number of photoelectrons, and a high sensitivity mode is set.
  • the FD capacitance switching switch 110 is on, the capacitance is the combined capacitance of the FD portion 103 and the additional floating diffusion region 111, and the capacitance is large. Therefore, even if many photoelectrons are transferred, the voltage amplitude is suppressed small and it is difficult to saturate It becomes sensitivity mode.
  • the potential of the storage portion is reset to make the transmittance of the electrochromic film 132 high.
  • the additional floating diffusion region 111 is reset by turning on the reset transistor 105.
  • the FD unit 103 is also reset by turning on the reset transistor 105 and the FD capacitance switching switch 110.
  • the additional floating diffusion region 111 is connected to the lower electrode 131, if the reset potential and the potential applied to the upper electrode 133 are set equal, it is applied to the electrochromic film 132 at the time of reset.
  • the voltage is 0V. That is, in the reset state, the electrochromic film 132 has a high transmittance.
  • pre-exposure is performed.
  • the transfer transistor 102 is turned on with the FD capacitance switch 110 turned on, and the photoelectrons stored in the photodiode 101 are transferred to the FD unit 103 and the additional floating diffusion region 111.
  • the potential of the additional floating diffusion region 111 decreases as the number of photoelectrons increases, so the voltage applied to the electrochromic film 132 increases and the transmittance decreases. That is, the transmittance decreases as the light amount at the pre-exposure increases.
  • the main exposure is started while holding the charge of the additional floating diffusion region 111. Then, as the amount of light at the pre-exposure increases, exposure is performed in a state where the sensitivity is lowered, and saturation of the photodiode 101 can be suppressed. Thereby, the dynamic range can be expanded.
  • the circuit operation and effects of pixels similar to those of the solid-state imaging device 10 of the first embodiment can be obtained.
  • FIG. 9 is a schematic circuit diagram showing an equivalent circuit of a unit pixel according to a fifth embodiment of the present technology.
  • the present embodiment is different from the first embodiment in that the circuit configuration of the unit pixel does not include the overflow gate 106 and the storage capacitor 107 is not formed.
  • symbol is described in the structure similar to the structure of 1st Embodiment, and description is abbreviate
  • the unit pixel 90 of the present embodiment includes a photodiode 101, a transfer transistor 102, an FD unit 103 including a floating capacitance FC, and a reset transistor 105. Further, the unit pixel 90 includes an amplifier transistor 108 and a selection transistor 109.
  • the charge photoelectrically converted by the photodiode 101 during exposure is stored in the photodiode 101, and when the charge is read out, the transfer transistor 102 is turned on to transfer the charge to the FD section 103, and the amplifier transistor 108 and A signal is output to the outside through the selection transistor 109.
  • the potential of the storage portion is reset to make the transmittance of the electrochromic film 132 high.
  • the reset transistor 105 is turned on, and the FD unit 103 is reset.
  • the FD section 103 is connected to the lower electrode 131, if the reset potential and the potential applied to the upper electrode 133 are set equal, the voltage applied to the electrochromic film 132 at the time of reset is 0 V It becomes. That is, in the reset state, the electrochromic film 132 has a high transmittance.
  • pre-exposure is performed.
  • the transfer transistor 102 is turned on to transfer the photoelectrons accumulated in the photodiode 101 to the FD unit 103.
  • the potential of the FD section 103 decreases as the number of photoelectrons increases, so the voltage applied to the electrochromic film 132 increases and the transmittance decreases. That is, the transmittance decreases as the light amount at the pre-exposure increases.
  • the main exposure is started while holding the charge of the FD unit 103. Then, as the amount of light at the pre-exposure increases, exposure is performed in a state where the sensitivity is lowered, and saturation of the photodiode 101 can be suppressed. Thereby, the dynamic range can be expanded.
  • FIG. 10 is a diagram for explaining the circuit operation of the unit pixel 90 according to the present embodiment.
  • the charge photoelectrically converted by the photodiode 101 during exposure is stored in the photodiode 101, and when the charge is read out, the transfer transistor 102 is turned on to transfer the charge to the FD section 103, and the amplifier transistor 108 and A signal is output to the outside through the selection transistor 109 (time t1).
  • the potential of the storage portion is reset to make the transmittance of the electrochromic film 132 high.
  • the reset transistor 105 is turned on, and the FD unit 103 is reset.
  • the FD section 103 is connected to the lower electrode 131, if the reset potential and the potential applied to the upper electrode 133 are set equal, the voltage applied to the electrochromic film 132 at the time of reset is 0 V It becomes. That is, in the reset state, the electrochromic film 132 has a high transmittance.
  • the electronic shutter operation is performed. Specifically, the transfer transistor 102 is turned on to empty the charge accumulated in the photodiode 101. At this time, the charge generated in the photodiode 101 is transferred to and held in the FD unit 103 from time t2 to time t3. Then, since the electric potential of the FD section 103 is lowered as the amount of charge is increased, the voltage applied to the electrochromic film 132 is increased and the transmittance is decreased. That is, as the amount of light incident from time t2 to time t3 increases, the transmittance decreases.
  • the circuit operation and effects of pixels similar to those of the solid-state imaging device 10 of the first embodiment can be obtained.
  • FIG. 11 is a schematic circuit diagram showing an equivalent circuit of a unit pixel according to a sixth embodiment of the present technology.
  • the present embodiment is different from the first embodiment in that an operational amplifier is provided without using the transfer transistor 102 in the circuit configuration of the unit pixel.
  • symbol is described in the structure similar to the structure of 1st Embodiment, and description is abbreviate
  • the unit pixel 160 includes a photodiode 101, an operational amplifier 112, a feedback capacitor 113, and a reset transistor 105. Also, the unit pixel 160 has a selection transistor 109.
  • the anode electrode of the photodiode 101 is connected to a negative side power supply such as ground, photoelectrically converts the received light into photoelectrons, which are photocharges of a charge amount according to the light amount, and stores the photoelectrons.
  • the cathode electrode of the photodiode 101 is connected to the negative input terminal (inverting input terminal) of the operational amplifier 112, the feedback capacitor 113, and the source electrode of the reset transistor 105.
  • the + input terminal (non-inverting input terminal) of the operational amplifier 112 is connected to the drive power supply.
  • the output terminal of the operational amplifier 112, the feedback capacitance 113, and the drain electrode of the reset transistor 105 are connected to the drain electrode of the selection transistor 109 and the electrochromic film 132, respectively.
  • the potential of the storage portion is reset to make the transmittance of the electrochromic film 132 high.
  • the feedback capacitor 113 and the photodiode 101 are reset by turning on the reset transistor 105.
  • the output of the operational amplifier 112 is connected to the lower electrode 131, if the reset potential of the operational amplifier 112 and the potential applied to the upper electrode 133 are set equal, the electric potential is applied to the electrochromic film 132 at the time of reset. Voltage is 0V. That is, in the reset state, the electrochromic film 132 has a high transmittance.
  • the negative input terminal of the operational amplifier 112 is fixed at a constant potential by the operation of the operational amplifier 112, so that the charge photoelectrically converted during exposure changes the output of the operational amplifier 112 via the feedback capacitance.
  • the output potential V of the operational amplifier 112 is determined by the relationship between the photoelectrically converted charge amount Q and the capacitance value C of the feedback capacitor 113.
  • the output potential of the operational amplifier 112 rises in proportion thereto.
  • the voltage applied to the electrochromic film 132 also rises, and the transmittance decreases.
  • the output of the operational amplifier 112 is output to the outside through the selection transistor 109.
  • FIG. 12 is a graph showing the photoelectric conversion characteristics of the solid-state imaging device of the present embodiment.
  • 12A is a graph showing the relationship between the operational amplifier output and the amount of incident light
  • FIG. 12B is a graph showing the relationship between the transmittance of the electrochromic film and the amount of incident light.
  • the circuit operation and effects of the pixels similar to those of the solid-state imaging device 10 of the first embodiment can be obtained.
  • FIG. 13 is a schematic cross-sectional view showing a pixel of a solid-state imaging device according to a seventh embodiment of the present technology.
  • the present embodiment is different from the first embodiment in that two types of pixels having different thicknesses of the electrochromic film 132 are present.
  • symbol is described in the structure similar to the structure of 1st Embodiment, and description is abbreviate
  • the thickness of the electrochromic film 132 is smaller in the pixel on the right side in the drawing of FIG. 13 than in the pixel on the left side in the drawing. Then, even if the same amount of electric charge is accumulated in the storage capacitor 107 with the same light amount and the same voltage is applied to the electrochromic film 132, the right side pixel has a higher transmittance by the thinner thickness. Become.
  • the solid-state imaging device 170 of this embodiment has two types of photoelectric conversion characteristics different from each other in addition to obtaining the circuit operation and effects of the pixels similar to the solid-state imaging device 10 of the first embodiment. Pixels can be realized. Then, the solid-state imaging device 170 of the present embodiment can further expand the dynamic range by combining the outputs of the two types of pixels by image processing.
  • FIG. 14 is a schematic cross-sectional view showing a pixel of a solid-state imaging device according to an eighth embodiment of the present technology.
  • the present embodiment is different from the first embodiment in that there are two types of pixels in which the material of the electrochromic film 132 is different.
  • a material of the electrochromic film 132 an electrochromic film of different materials may be used, or an electrochromic film in which the concentration is changed with the same material may be used.
  • symbol is described in the structure similar to the structure of 1st Embodiment, and description is abbreviate
  • the concentration of the electrochromic film is higher in the pixel on the right side in the drawing of FIG. 13 than in the pixel on the left side in the drawing. Then, even if the same amount of electric charge is accumulated in the storage capacitor 107 with the same light amount and the same voltage is applied to the electrochromic film 132, the right side pixel has a lower state of the transmittance by the higher density. Become.
  • the solid-state imaging device 180 of the present embodiment has two types of photoelectric conversion characteristics different from each other in addition to obtaining the circuit operation and effects of the pixels similar to the solid-state imaging device 10 of the first embodiment. Pixels can be realized. Then, the solid-state imaging device 180 according to the present embodiment can further expand the dynamic range by combining the outputs of the two types of pixels by image processing.
  • Solid-state Imaging Device of Ninth Embodiment> A solid-state imaging device according to a ninth embodiment of the present technology will be described with reference to FIGS. 15 to 19.
  • the solid-state imaging device according to the present embodiment images a subject, such as a complementary metal oxide semiconductor (CMOS) image sensor or a charge coupled device (CCD) image sensor, as in the solid-state imaging device according to the first embodiment. It is a solid-state imaging device capable of obtaining digital data of a captured image.
  • CMOS complementary metal oxide semiconductor
  • CCD charge coupled device
  • FIG. 15 is a schematic cross-sectional view of a pixel showing the solid-state imaging device of the present embodiment.
  • the solid-state imaging device 250 of this embodiment is a surface-illuminated CMOS solid-state imaging device, and is formed of a first photodiode 201 and a second photodiode 214, which are an example of a photoelectric conversion device.
  • the lower electrode 231, the electrochromic film 232, and the upper electrode 233 are stacked on the semiconductor substrate, on which the connection wiring 221 and the like are formed.
  • color filters 241 of respective colors of red, green and blue are formed on the upper layer of the upper electrode 233, and an on-chip lens 242 is formed on the upper layer thereof.
  • the first photodiode 201 and the second photodiode 214 are formed in each pixel of a pixel array of red pixels, green pixels and blue pixels arranged on a matrix on a semiconductor substrate.
  • the electrochromic film 232 is provided in a light incident path to the second photodiode 214, and includes an electrochromic material whose light transmittance changes in accordance with an applied voltage.
  • the electrochromic film 232 has a property of changing the light transmittance from the first transmittance to the second transmittance according to the applied voltage.
  • a first transfer transistor 202, a first reset transistor 205, an overflow gate 206, an FD (floating diffusion) capacitance switching switch 210 which is a floating diffusion region, and a second transfer transistor 202 are provided near the contact surface with the semiconductor substrate.
  • the transfer transistor 215 is formed. Further, in the wiring layer, two connection wirings 221 which connect the semiconductor substrate and the lower electrode 231 are formed. Further, the first transfer transistor 202, the first reset transistor 205, the overflow gate 206, the FD capacitance switching switch 210, and the second transfer transistor 215 are connected to the pixel drive wiring 222 through connection wirings, respectively.
  • a first FD unit 203 is formed below the portion between the adjacent first transfer transistor 202 and the FD capacitance changeover switch 210.
  • the first FD unit 203 plays a role as a first accumulation unit that accumulates the charge photoelectrically converted by the first photodiode 201.
  • a second FD portion 216 is formed below the periphery of the second transfer transistor 215.
  • the second FD unit 216 plays a role as a second storage unit that stores the charge photoelectrically converted by the second photodiode 214.
  • an overflow drain 218 is formed below the periphery of the overflow gate 206. The overflow drain 218 is connected to the lower electrode 231 via the connection wiring 221.
  • the overflow drain 218 is a drain region when the overflow gate 206 is formed of a MOSFET, as an example.
  • the overflow drain 218 is, for example, part of a configuration for receiving the charge overflowed from the PD 201 and connecting to the lower electrode 231.
  • FIG. 16 is a circuit diagram showing an equivalent circuit of a unit pixel of this embodiment.
  • the unit pixel 260 includes a first photodiode 201, a first transfer transistor 202, and a first FD unit 203 including a floating capacitance (floating capacitor) FC, and an FD.
  • a capacitor switching switch 210, a first reset transistor 205, and an overflow gate 206 are included.
  • the unit pixel 260 includes a second photodiode 214, a second transfer transistor 215, a second FD unit 216 including a stray capacitance FC, a capacitance connection switch 217, and a second reset transistor 219. have.
  • the unit pixel 260 includes an amplifier transistor 208 and a selection transistor 209.
  • a plurality of row control lines are commonly wired to each pixel of the same pixel row with respect to the unit pixel 260.
  • the plurality of row control lines are connected in units of pixel rows to the output end corresponding to each pixel row of the vertical drive unit.
  • the vertical driving unit transfers a transfer signal TRG that is a transfer pulse on the PD 201 side to a plurality of row control lines, a transfer signal TRS that is a transfer pulse on the PD 214 side, and a reset signal RST for driving each unit pixel 260 And select signal SEL appropriately.
  • the anode electrode of the first photodiode 201 is connected to a negative power supply such as ground, photoelectrically converts the received light into photoelectrons, which are photocharges of a charge amount according to the light quantity, and stores the photoelectrons.
  • the cathode electrode of the first photodiode 201 is connected to the source electrode of the first transfer transistor 202 and the source electrode of the overflow gate 106.
  • the first photodiode 201 is electrically connected to the first FD unit 203 via the first transfer transistor 202.
  • the first photodiode 201 is electrically connected to the electrochromic film 232 and the source electrode of the second reset transistor 219 via the overflow gate 206.
  • the drain electrode of the first transfer transistor 202 is connected to the first FD unit 203.
  • the transfer signal TRG is supplied to the gate electrode of the first transfer transistor 202 from the vertical drive unit.
  • the first transfer transistor 202 is turned on in response to the transfer signal TRG, and transfers the photocharge, which is photoelectrically converted by the first photodiode 201 and stored, to the first FD unit 203.
  • the first FD unit 203 is connected to the source electrode of the FD capacitance switching switch 210 and the gate electrode of the amplifier transistor 208.
  • the first FD unit 203 is connected to one end of the stray capacitance FC, and the other end of the stray capacitance FC is connected to the ground.
  • the first FD unit 203 can be a charge storage unit that stores a charge for applying a voltage to the electrochromic film 232 as a first film.
  • the charge storage unit may be provided separately from the first FD unit 203.
  • the drain electrode of the FD capacitance switching switch 210 is connected to the source electrode of the first reset transistor 205 and the drain electrode of the capacitance connection switch 217.
  • the FD capacitance switching signal FDG is supplied to the gate electrode of the FD capacitance switching switch 210 from the vertical drive unit.
  • the FD capacitance switching switch 210 electrically connects the first FD unit 203 and the second FD unit 216 by being turned on in response to the FD capacitance switching signal FDG.
  • the drain electrode of the first reset transistor 205 is connected to a power supply.
  • the reset signal RST is given to the gate electrode of the first reset transistor 205 from the vertical drive unit.
  • the first reset transistor 205 becomes conductive in response to the reset signal RST, and charges the first FD portion 203 and / or the second FD portion 216 to the power supply to cause the first FD portion 203 and / or Alternatively, the second FD unit 216 is reset.
  • the drain electrode of the overflow gate 206 is connected to the electrochromic film 232 and the source electrode of the second reset transistor 219.
  • An overflow signal OFG is given to the gate electrode of the overflow gate 206 from the vertical drive unit.
  • the overflow gate 206 is turned on in response to the overflow signal OFG, and the photocharges photoelectrically converted and accumulated by the first photodiode 201 are stored in the electrochromic film 232 and / or the second reset transistor 219. It can be flowed through the power supply.
  • the drain electrode of the second reset transistor 219 is connected to the power supply.
  • the reset signal RST2 is supplied to the gate electrode of the second reset transistor 219 from the vertical drive unit.
  • the second reset transistor 219 becomes conductive in response to the reset signal RST2, and resets the overflow drain 218 and / or the electrochromic film 232 by flowing the charge of the overflow drain 218 and / or the electrochromic film 232 to the power supply. .
  • the anode electrode of the second photodiode 214 is connected to a negative power supply such as ground, and photoelectrically converts the received light into photoelectrons, which are photocharges of a charge amount corresponding to the light amount, and stores the photoelectrons.
  • the cathode electrode of the second photodiode 214 is connected to the source electrode of the second transfer transistor 215.
  • the second photodiode 214 is electrically connected to the second FD portion 216 via the second transfer transistor 215.
  • the drain electrode of the second transfer transistor 215 is connected to the second FD unit 216.
  • the transfer signal TRS is supplied to the gate electrode of the second transfer transistor 215 from the vertical drive unit. Since the second transfer transistor 215 becomes conductive in response to the transfer signal TRS, the second transfer transistor 215 transfers the accumulated photocharge, which is photoelectrically converted by the second photodiode 214, to the second FD portion 216.
  • the second FD unit 216 is connected to the source electrode of the capacitive connection switch 217.
  • the second FD unit 216 is connected to one end of the stray capacitance FC, and the other end of the stray capacitance FC is connected to the ground.
  • the second FD unit 216 can be a charge storage unit that stores charges for applying a voltage to the electrochromic film 232 as the first film.
  • the charge storage unit may be provided separately from the second FD unit 216.
  • the drain electrode of the capacitor connection switch 217 is connected to the source electrode of the first reset transistor 205 and the drain electrode of the FD capacitor switching switch 210.
  • a capacitance connection signal FCG is supplied to the gate electrode of the capacitance connection switch 217 from the vertical drive unit.
  • the capacitance connection switch 217 electrically connects the first FD unit 203 and the second FD unit 216 by being conductive in response to the capacitance connection signal FCG.
  • the drain electrode of the amplifier transistor 208 is connected to the power supply, and the source electrode is connected to the drain electrode of the selection transistor 209.
  • the source electrode of the amplifier transistor 208 is connected to the vertical signal line via the selection transistor 209.
  • the source electrode of the selection transistor 209 is connected to the vertical signal line.
  • the selection signal SEL is supplied to the gate electrode of the selection transistor 209 from the vertical drive unit.
  • the selection transistor 209 is rendered conductive in response to the selection signal SEL, thereby setting the unit pixel 260 in the selected state and outputting the pixel signal amplified by the amplifier transistor 208 to the vertical signal line.
  • the selection transistor 209 can also be connected between the drain electrode of the amplifier transistor 208 and the power supply. That is, since the selection transistor 209 is connected in series to the amplifier transistor 208 between the power supply and the vertical signal line, the selection operation of the unit pixel 260 can also be performed.
  • FIG. 17 is a schematic plan view showing a unit pixel of this embodiment.
  • FIG. 17A is a schematic plan view of a unit pixel 260 from which the electrochromic film 232 and the on-chip lens 242 have been removed
  • FIG. 17B is an electrochromic film 232 disposed so as to cover the second photodiode 214.
  • FIG. 10 is a schematic plan view of a unit pixel 260 showing an on-chip lens 242 disposed so as to cover the first photodiode 201 and the second photodiode 214.
  • one side of the rectangular first photodiode 201 is a first transfer transistor 202, a first FD unit 203, and an FD capacitance switching switch 210.
  • the first reset transistor 205 is connected.
  • the overflow gate 206 and the overflow drain 218 are connected to the other side adjacent to one side of the rectangular first photodiode 201.
  • the connection wiring 221 is formed at the position of the overflow drain 218.
  • the capacitance connection switch 217, the second FD unit 216, the second transfer transistor 215, and the second photodiode 214 are connected via a wire between the FD capacitance changeover switch 210 and the first reset transistor 205. ing.
  • a rectangular electrochromic film 232 is formed above the unit pixel 260 as an overflow drain 218, a capacitor connection switch 217, a second FD unit 216, a second transfer transistor 215, and a second transfer transistor 215. It is arranged to cover the two photodiodes 214.
  • a circular on-chip lens 242 is disposed at a position covering the second transfer transistor 215 and the second photodiode 214.
  • another circular on-chip lens 242 is disposed at a position covering the first photodiode 201, the first transfer transistor 202, and the overflow gate 206.
  • the electrochromic film 232 of the present embodiment can be made of, for example, a material such as tungsten oxide, the transmittance of which changes according to the applied voltage.
  • the electrochromic film 132 of the present embodiment may use a material such as magnesium-titanium alloy, magnesium-nickel alloy, tantalum oxide, or the like.
  • FIG. 18 is a graph showing typical characteristics when a voltage is applied to the electrochromic film 232 using tungsten oxide of the present embodiment.
  • the dotted line at the top in FIG. 18 represents the transmittance when the voltage applied between the upper electrode 233 and the lower electrode 231 is 0V.
  • the lower solid line in FIG. 18 represents the transmittance when the voltage applied between the upper electrode 233 and the lower electrode 231 is 2V.
  • the transmittance is about 70% in the visible light range (approximately 380 nm to 780 nm), whereas when the voltage is 2 V Changes to less than 10%.
  • the charges photoelectrically converted during exposure are accumulated in the first photodiode 201 and the second photodiode 214, respectively.
  • the second photodiode 214 is smaller in size and lower in sensitivity than the first photodiode 201. That is, the first photodiode 201 is suitable for high sensitivity and low illuminance, and the second photodiode 214 is low sensitivity and suitable for high illuminance.
  • the first transfer transistor 202 is turned on, the charge generated in the first photodiode 201 is transferred to the first FD unit 203, and a signal is output to the outside through the amplifier transistor 208 and the selection transistor 209. Be done. This is a high sensitivity signal.
  • the second transfer transistor 215 is turned on, and the charge photoelectrically converted by the second photodiode 214 is transferred to the second FD portion 216.
  • the overflow drain 218 is reset by the second reset transistor 219 before the start of exposure. Since the overflow drain 218 is connected to the lower electrode 231, if the reset potential and the potential supplied to the upper electrode 233 are set equal, the voltage applied to the electrochromic film 232 becomes 0 V at the time of reset. . That is, in the reset state, the electrochromic film 232 has a high transmittance.
  • the charge leaks through the overflow gate 206 and is accumulated in the overflow drain 218.
  • the potential is lowered, so that a potential difference is gradually generated with the upper electrode 233. Therefore, the voltage applied to the electrochromic film 232 increases as the amount of photoelectrons increases, and the transmittance decreases. Then, the light incident on the second photodiode 214 decreases, and the sensitivity decreases. Thereby, the dynamic range can be expanded.
  • exposure is performed in a state in which the transmittance of the electrochromic film 232 changes in accordance with the amount of light for each pixel.
  • FIG. 19 is a graph showing the photoelectric conversion characteristics of the solid-state imaging device 250 of the present embodiment.
  • FIG. 19A is a graph showing the photoelectric conversion characteristics when the electrochromic film 232 is not present
  • FIG. 19B is a graph showing the photoelectric conversion characteristics when the electrochromic film 232 is present
  • FIG. It is a graph which shows the relationship between the transmittance
  • the electrochromic film 232 when the electrochromic film 232 does not exist, first, as the amount of incident light increases from the dark state, the number of photoelectrons accumulated in the first photodiode 201 also linearly increases. To go. When the first photodiode 201 reaches the light amount 1 and reaches the number of saturated electrons that can be stored, the first photodiode 201 can not store any more charges.
  • the second photodiode 214 is not saturated at the light amount 1 because the sensitivity is low.
  • the amount of light further increases and reaches the amount of light 2
  • the number of saturated electrons that can be stored in the second photodiode 214 is reached, further charge can not be stored in the second photodiode 214.
  • the transmittance of the electrochromic film 232 is high, and the transmittance does not change unless the potential of the overflow drain 218 changes from the reset value. It shows the same photoelectric conversion characteristic as the solid line 291 of 19A.
  • the light amount exceeds 1 the further charge can not be accumulated in the first photodiode 201, and the photoelectrons generated thereafter are accumulated in the overflow drain 218 through the overflow gate 206. Therefore, when the light amount exceeds 1, the electrons stored in the first photodiode 201 do not increase, and the number of electrons stored in the overflow drain 218 increases.
  • the present technology can provide a solid-state imaging device capable of automatically expanding the dynamic range for each unit pixel, unlike the technology described in Patent Document 1.
  • the present technology it is not necessary to provide a charge detection unit or a voltage application unit outside the pixel, and it is possible to control the voltage applied to the electrochromic film only with the elements present in the pixel.
  • the dynamic range can be expanded without increasing the chip area or the chip area.
  • the voltage applied to the electrochromic film can be controlled individually for each pixel, and since the control is automatically adjusted in accordance with the amount of light incident on that pixel, Even in the case where the amount of incident light is largely different, adjustment is made to the optimum state for each pixel.
  • FIG. 20 is a schematic cross-sectional view showing a pixel of a solid-state imaging device according to a tenth embodiment of the present technology.
  • the present embodiment is different from the ninth embodiment in that the electrochromic film 232 is disposed in the wiring layer.
  • the same components as those of the ninth embodiment are designated by the same reference numerals, and the description thereof will be omitted.
  • the electrochromic film 232 whose optical characteristics change according to the applied voltage is disposed between the color filter 241 and the pixel drive wiring 222 in the wiring layer.
  • the electrochromic film 232 is disposed below the pixel drive wiring 222.
  • the electrochromic film 232 may be disposed on any layer as long as it is the optical path of light incident on the second photodiode 214. Therefore, with the above configuration, the solid-state imaging device 300 of the present embodiment can also obtain the same circuit operation and effects of pixels as the solid-state imaging device 250 of the first embodiment.
  • the solid-state imaging device 250 of the present embodiment has the electrochromic film 232 disposed closer to the PD 201 and PD 214 than the solid-state imaging device 10 of the first embodiment. As compared with the solid-state imaging device 10 of the first embodiment, it is possible to obtain an effect that improvement in optical characteristics can be expected.
  • FIG. 21 is a schematic cross-sectional view showing a pixel of a solid-state imaging device according to an eleventh embodiment of the present technology.
  • the present embodiment is different from the ninth embodiment in that a back-illuminated solid-state imaging device is used.
  • the same components as those of the ninth embodiment are designated by the same reference numerals, and the description thereof will be omitted.
  • the solid-state imaging device 310 of the present embodiment is a backside illuminated solid-state imaging device
  • the wiring layer is below the semiconductor substrate of the first photodiode 201 and the second photodiode 214. Be placed.
  • an insulating film 234 is provided between the semiconductor substrate and the lower electrode 231 in order to prevent short circuit. Therefore, the connection wiring 221 is connected to the lower electrode 231 through the semiconductor substrate and the insulating film 234.
  • the solid-state imaging device 310 of the present embodiment can also obtain the same circuit operation and effects of pixels as the solid-state imaging device 250 of the ninth embodiment.
  • the solid-state imaging device 250 according to the present embodiment is a backside illumination type, it is possible to obtain an effect that improvement in the sensitivity of the PD 201 and PD 214 and improvement in the freedom of the wiring layout can be expected.
  • FIG. 22 is a schematic circuit diagram showing an equivalent circuit of a unit pixel according to a twelfth embodiment of the present technology.
  • the present embodiment is different from the ninth embodiment in that the overflow gate 206 and the second reset transistor 219 are not provided in the circuit configuration of the unit pixel.
  • the same components as those of the ninth embodiment are designated by the same reference numerals, and the description thereof will be omitted.
  • the unit pixel 320 includes a first photodiode 201, a first transfer transistor 202, a first FD unit 203 including a stray capacitance FC, and an FD capacitance switch 210. And the first reset transistor 205.
  • the unit pixel 320 includes a second photodiode 214, a second transfer transistor 215, a second FD unit 216 including a stray capacitance FC, and a capacitance connection switch 217.
  • the unit pixel 260 includes an amplifier transistor 208 and a selection transistor 209.
  • the anode electrode of the first photodiode 201 is connected to a negative power supply such as ground, photoelectrically converts the received light into photoelectrons, which are photocharges of a charge amount according to the light quantity, and stores the photoelectrons.
  • the cathode electrode of the first photodiode 201 is connected to the source electrode of the first transfer transistor 202.
  • the first photodiode 201 is electrically connected to the first FD unit 203 via the first transfer transistor 202.
  • the drain electrode of the FD capacitance switching switch 210 is connected to the source electrode of the first reset transistor 205 and the drain electrode of the capacitance connection switch 217.
  • the drain electrode of the FD capacitance changeover switch 210 is connected to the electrochromic film 232 via the node A.
  • the FD capacitance switching signal FDG is supplied to the gate electrode of the FD capacitance switching switch 210 from the vertical drive unit.
  • the FD capacitance switching switch 210 electrically connects the first FD unit 203 and the second FD unit 216 by being turned on in response to the FD capacitance switching signal FDG.
  • the drain electrode of the capacitor connection switch 217 is connected to the source electrode of the first reset transistor 205 and the drain electrode of the FD capacitor switching switch 210. Further, the drain electrode of the capacitive connection switch 217 is connected to the electrochromic film 232 via the node A.
  • a capacitance connection signal FCG is supplied to the gate electrode of the capacitance connection switch 217 from the vertical drive unit. The capacitance connection switch 217 electrically connects the first FD unit 203 and the second FD unit 216 by being conductive in response to the capacitance connection signal FCG.
  • the overflow path of the charge overflowing from the first photodiode 201 is the overflow gate 106.
  • the unit pixel 320 of the present embodiment is configured to overflow to the first FD unit 203 side because the overflow gate 106 is not present.
  • the overflow charge is accumulated in the node A by turning on the FD capacitance switching switch 210 during the exposure period.
  • the Node A is connected to the lower electrode 231
  • the amount of light incident on the second photodiode 214 decreases as the overflow charge from the first photodiode 201 increases. Thereby, the dynamic range can be expanded.
  • the circuit operation of the other unit pixels 320 is the same as that of the unit pixel 260 of the ninth embodiment.
  • the solid-state imaging device including the unit pixel 320 of this embodiment can also obtain the same effect as the solid-state imaging device 250 of the ninth embodiment.
  • FIG. 23 is a schematic cross-sectional view showing a pixel of a solid-state imaging device according to a thirteenth embodiment of the present technology.
  • the present embodiment is different from the ninth embodiment in that the color filter 241 is not present on the optical path of the light incident on the first photodiode 201.
  • the same components as those of the ninth embodiment are designated by the same reference numerals, and the description thereof will be omitted.
  • the color filter 241 does not exist on the optical path of light incident on the first photodiode 201, and light incident on the second photodiode 214.
  • the color filter 241 is present on the light path of Therefore, the first photodiode 201 can obtain the luminance signal of the subject, and the second photodiode 214 can obtain the color information of the subject.
  • the first photodiode 201 reaches the number of saturated electrons first.
  • the second photodiode 214 enters the second photodiode 214 before reaching the saturation electron number. Light intensity can be reduced. Thereby, the dynamic range can be expanded.
  • the photoelectric conversion characteristics for obtaining the solid-state imaging device 330 at this time are the same as those of the solid-state imaging device 250 of the ninth embodiment.
  • FIG. 24 is a schematic view showing an example of the arrangement of pixels of the solid-state imaging device 330 of the present embodiment.
  • the array 340 of pixels of the solid-state imaging device 330 of the present embodiment as an example, a plurality of color filter arrays 341 in which RGBW pixels are arrayed in a square are arranged.
  • the solid-state imaging device 330 can also be configured to control the transmittance of RGB pixels according to the size of the output of the W pixel using the array 340 of pixels.
  • FIG. 25 is a circuit schematic diagram showing an equivalent circuit of a unit pixel according to a fourteenth embodiment of the present technology.
  • the configuration of the unit pixel of this embodiment is the same as the configuration of the unit pixel of the first embodiment, but the difference from the first embodiment is that one unit of the first FD unit 203 is shared by a plurality of unit pixels. It is a point to do.
  • the same components as those of the first and ninth embodiments are designated by the same reference numerals, and the description thereof will be omitted.
  • the pixel 350 of the present embodiment includes a first unit pixel 351, a second unit pixel 352, and a first FD unit 203 including a stray capacitance FC. Further, the pixel 350 includes an amplifier transistor 208 and a selection transistor 209.
  • the first unit pixel 351 and the second unit pixel 352 respectively include the first photodiode 201, the first transfer transistor 202, and the first FD unit.
  • a capacitor 203 includes a capacitor connection transistor 204, a first reset transistor 205, an overflow gate 206, and a storage capacitor 207 that stores the overflowed charge.
  • the first photodiodes 201 provided in the first unit pixel 351 and the second unit pixel 352 are electrically connected to the electrochromic film 232, respectively.
  • the pixel 350 of the present embodiment is provided with an overflow gate 206, a storage capacitor 207 and an electrochromic film 232, one for each of the first unit pixel 351 and the second unit pixel 352 independently. doing. With this configuration, even if the pixel 350 of this embodiment shares the first FD section 203, the transmittance of the electrochromic film 232 is controlled independently for each first photodiode 201. Is possible.
  • the solid-state imaging device including the pixel 350 of the present embodiment also achieves the effect of realizing the circuit operation of the pixel similar to the solid-state imaging device of the first and ninth embodiments and the wide dynamic range independently for each pixel. Can.
  • FIG. 26 shows a pixel of a solid-state imaging device according to a fifteenth embodiment of the present technology.
  • FIG. 26 is a schematic cross-sectional view showing pixels of the solid-state imaging device in which inter-pixel light shielding is provided in the solid-state imaging device according to the first embodiment.
  • symbol is described in the structure similar to the structure of 1st Embodiment, and description is abbreviate
  • the solid-state imaging device 360 is provided with inter-pixel light shielding 400.
  • the inter-pixel light shield 400 is provided between the electrochromic film 132 and the electrochromic film 132a.
  • the solid-state imaging device 360 shown in FIG. 26 is different from the solid-state imaging device 10 of the first embodiment in that inter-pixel light shielding 400 is provided between the electrochromic film 132 and the electrochromic film 132a.
  • the inter-pixel light shielding 400 is formed of a nonconductive light shielding film that shields light between adjacent pixels (hereinafter also referred to as inter-pixel).
  • the inter-pixel light shielding 400 has a light shielding property and is provided for the purpose of preventing color mixing.
  • the light transmittance of the inter-pixel light shield 400 is not particularly limited.
  • between pixels means between the photodiode 101 and the photodiode 101a in FIG.
  • the inter-pixel light shield 400 is provided between the electrochromic film 132 and the electrochromic film 132a, thereby preventing the color mixing of the photodiode 101 and the photodiode 101a. be able to.
  • the solid-state imaging device 361 includes inter-pixel light shielding 401.
  • the inter-pixel light shielding 401 is provided between the color filter 141 and the color filter 141 a.
  • the solid-state imaging device 361 shown in FIG. 27 differs from the solid-state imaging device 60 of the second embodiment in that inter-pixel light blocking 401 is provided between the color filter 141 and the color filter 141a.
  • the inter-pixel light blocking 401 is provided between the color filter 141 and the color filter 141a in the solid-state imaging device 361, so that the color mixing of the photodiode 101 and the photodiode 101a can be prevented.
  • the solid-state imaging device 362 is provided with the inter-pixel light shielding 402.
  • the inter-pixel light shield 402 is provided between the electrochromic film 132 and the electrochromic film 132a.
  • the solid-state imaging device 362 shown in FIG. 28 is different from the solid-state imaging device 70 of the third embodiment in that an inter-pixel light shield 402 is provided between the electrochromic film 132 and the electrochromic film 132a.
  • the inter-pixel light shield 402 is provided between the electrochromic film 132 and the electrochromic film 132a in the solid-state imaging device 362, so that color mixing of the photodiode 101 and the photodiode 101a can be prevented.
  • the solid-state imaging device 363 is provided with the inter-pixel light shielding 403.
  • the inter-pixel light shield 403 is provided between the electrochromic film 132 and the electrochromic film 132a.
  • the difference between the solid-state imaging device 363 shown in FIG. 29 and the solid-state imaging device 170 of the seventh embodiment is that inter-pixel light shielding 403 is provided between the electrochromic film 132 and the electrochromic film 132a.
  • the inter-pixel light shield 403 is provided between the electrochromic film 132 and the electrochromic film 132a, and the inter-pixel light shield 403 is also provided between the lower electrode 131 and the lower electrode 131a. There is. Thereby, the solid-state imaging device 363 can prevent the photodiode 101 and the photodiode 101a from mixing colors.
  • the solid-state imaging device 364 is provided with inter-pixel light shielding 404.
  • the inter-pixel light shield 404 is provided between the electrochromic film 132 and the electrochromic film 132a.
  • the solid-state imaging device 364 shown in FIG. 30 differs from the solid-state imaging device 180 of the eighth embodiment in that an inter-pixel light shield 404 is provided between the electrochromic film 132 and the electrochromic film 132a.
  • the inter-pixel light shield 404 is provided between the electrochromic film 132 and the electrochromic film 132 a, so that color mixing of the photodiode 101 and the photodiode 101 a can be prevented.
  • the solid-state imaging device 365 includes inter-pixel light shielding 405 a (405), inter-pixel light shielding 405 b (405), and inter-pixel light shielding 405 c (405).
  • the inter-pixel light shielding 405 a (405) is provided between the electrochromic film 232 and the electrochromic film 232 a.
  • the inter-pixel light shielding 405 b (405) is also provided between the electrochromic film 232 and the electrochromic film 232 a.
  • the inter-pixel light shielding 405c (405) is provided on the right side of the electrochromic film 232a.
  • inter-pixel light shielding 405 (405a, 405b) is provided between the electrochromic film 232 and the electrochromic film 232a.
  • An inter-pixel shield 405c is provided on the right side of the electrochromic film 232a.
  • the inter-pixel light shielding 405a is provided between the electrochromic film 232 and the electrochromic film 232a, so that the first photodiode 201 and the second photodiode 214 mix colors. It can be prevented.
  • the inter-pixel light shield 405b is provided between the electrochromic film 232 and the electrochromic film 232a, so that the first photodiode 201 and the second photodiode 214a mix color. Can be prevented.
  • the inter-pixel light shield 405c is provided on the right side of the electrochromic film 232a, thereby preventing the first photodiode 201a and the second photodiode 214a from mixing colors. it can.
  • the solid-state imaging device 366 includes inter-pixel light shielding 406a (406), inter-pixel light shielding 406b (406), and inter-pixel light shielding 406c (406).
  • the inter-pixel light shielding 406 a (406) is provided on the right side of the electrochromic film 232.
  • the inter-pixel light shield 406b (406) is provided on the left side of the electrochromic film 232a, and the inter-pixel light shield 406c (406) is provided on the right side of the electrochromic film 232a.
  • inter-pixel light shielding 406a is provided on the right side of the electrochromic film 232 and inter-pixel light shielding 406b on the left side of the electrochromic film 232a.
  • inter-pixel light shield 406c is provided on the right side of the electrochromic film 232a.
  • the inter-pixel light shield 406a is provided on the right side of the electrochromic film 232, so that the first photodiode 201 and the second photodiode 214 can be prevented from mixing colors.
  • the inter-pixel light shield 406b is provided on the left side of the electrochromic film 232a to prevent the first photodiode 201 and the second photodiode 214a from mixing colors. it can.
  • the inter-pixel light shielding 406c is provided on the right side of the electrochromic film 232a to prevent the first photodiode 201a and the second photodiode 214a from mixing colors. it can.
  • the solid-state imaging device 367 includes inter-pixel light shielding 407 a (407) and inter-pixel light shielding 407 b (407).
  • the inter-pixel light shield 407 a is provided on the left side of the electrochromic film 232.
  • the inter-pixel light shield 407 b is provided on the right side of the electrochromic film 232.
  • the difference between the solid-state imaging device 367 shown in FIG. 33 and the solid-state imaging device 310 of the eleventh embodiment is that the inter-pixel light shield 407a (407) is provided on the left side of the electrochromic film 232a.
  • Inter-pixel light shielding 407 b (407) is provided.
  • the inter-pixel light shielding 407a (407) is provided on the left side of the electrochromic film 232a to prevent the first photodiode 201 and the second photodiode 214a from mixing colors. Can. Further, the solid-state imaging device 367 is provided with the inter-pixel light shield 407b (407) on the right side of the electrochromic film 232a, thereby preventing the first photodiode 201a and the second photodiode 214a from mixing colors. can do.
  • the solid-state imaging device 368 is provided with the inter-pixel light shielding 408.
  • the inter-pixel light shielding 408 is provided on the right side of the electrochromic film 232.
  • the point of difference between the solid-state imaging device 368 shown in FIG. 34 and the solid-state imaging device 330 of the thirteenth embodiment is that an inter-pixel light shield 408 is provided on the right side of the electrochromic film 232.
  • the solid-state imaging device 368 can prevent the color mixing between the first photodiode 201 and the second photodiode 214 by providing the inter-pixel light blocking 408 on the right side of the electrochromic film 232.
  • a solid-state imaging device includes a first electrode, an electrochromic film whose optical characteristics change in accordance with an applied voltage, and a second electrode. Electrodes, a first photoelectric conversion element, a first storage portion for storing charges photoelectrically converted by the first photoelectric conversion element, a second photoelectric conversion element, and a second photoelectric conversion element. A second storage unit for storing converted charges is provided for each unit pixel, and the electrochromic film is disposed on the optical path of light incident on the second photoelectric conversion element, and the first storage unit and the first storage unit It is a solid-state image sensor to which two electrodes are connected.
  • the dynamic range can be expanded by expanding the sensitivity difference between the pixel as a pair.
  • FIG. 35 is a schematic cross-sectional view of a pixel showing a solid-state imaging device in which two unit pixels are arranged. Note that “upper” indicates the upward direction in FIG. 35 and “right” means the right direction in FIG. 35 unless otherwise noted.
  • the unit pixel on the right side of FIG. 35 will be mainly described.
  • the first electrode (upper electrode 233) and the electrochromic film 232a whose optical characteristics change according to the applied voltage, and the order in which light is incident;
  • First storage portion (first electrode) (the lower electrode 231), the first photodiode 201a which is the first photoelectric conversion element, and the charge photoelectrically converted by the first photodiode 201a;
  • Second storage unit (second FD unit 216a) for storing the charge photoelectrically converted by the FD unit 203a), the second photodiode 214a which is the second photoelectric conversion element, and the second photodiode 214a And are provided for each unit pixel.
  • the electrochromic film 232a is disposed on the optical path of light incident on the second photodiode 214a, and the first accumulation portion (first FD portion 203a) and the second electrode (lower electrode 231) are connected. ing.
  • the first FD unit 203a functions as a first accumulation unit
  • the second FD unit 214a functions as a second accumulation unit.
  • a color filter 241 and a color filter 241a of any of red, green and blue are formed on the upper layer of the first electrode (upper electrode 233), and the on-chip lens is formed on the upper layer 242 are formed.
  • the first photodiode 201a and the second photodiode 214a are formed on each unit pixel of a pixel array of red pixels, green pixels and blue pixels arranged on a matrix on a semiconductor substrate.
  • the first photodiode 201a has the same configuration as the first photodiode 201, and the second photodiode 214a and the second photodiode 214 have the same configuration.
  • the first electrode (upper electrode 233) and the second electrode (lower electrode 231) must be transparent because light is incident through the on-chip lens 242, the color filter 241, and the color filter 241a. Required Therefore, materials such as indium tin oxide (ITO) and indium zinc oxide (IZO) are used for the first electrode (upper electrode 233) and the second electrode (lower electrode 231), for example.
  • ITO indium tin oxide
  • IZO indium zinc oxide
  • the electrochromic film 232a is disposed between the inter-pixel light shielding 501a and the inter-pixel light shielding 501b.
  • the electrochromic film 232a is made of, for example, a material such as tungsten oxide, the transmittance of which changes in accordance with the applied voltage. Thereby, the electrochromic film 232a has a property that the light transmittance changes from the first transmittance to the second transmittance according to the applied voltage.
  • a predetermined voltage is applied between the first electrode (upper electrode 233) and the second electrode (lower electrode 231), and the second electrode (lower electrode 231)
  • the light transmittance of the electrochromic film 232a is changed by applying a predetermined voltage to the electrochromic film 232a.
  • the electrochromic film 232a is not limited to tungsten oxide, and a material such as magnesium-titanium alloy, magnesium-nickel alloy, tantalum oxide, or the like may be used.
  • FIG. 36 is a graph showing typical characteristics when a voltage is applied to the electrochromic film 232a using tungsten oxide.
  • the dotted line at the top of FIG. 36 represents the transmittance when the voltage applied between the first electrode (upper electrode 233) and the second electrode (lower electrode 231) is 0V.
  • the lower solid line in FIG. 36 represents the transmittance when the voltage applied between the first electrode (upper electrode 233) and the second electrode (lower electrode 231) is 2V.
  • the voltage applied between the first electrode (upper electrode 233) and the second electrode (lower electrode 231) When the voltage applied between the first electrode (upper electrode 233) and the second electrode (lower electrode 231) is 0 V, it exhibits a transmittance of around 80% in the visible light region (approximately 380 nm to 780 nm) However, when 2 V is applied between the first electrode (upper electrode 233) and the second electrode (lower electrode 231), the transmittance changes to 10% or less.
  • the first storage portion (first FD portion 203a) and the second electrode (lower electrode 231) are connected by the connection wiring 221a. Therefore, by setting the reset potential and the potential applied to the first electrode (upper electrode 233) equal before the start of exposure, the potential applied to the electrochromic film 232a at the time of reset becomes 0 V. . That is, in the reset state, the electrochromic film 232a has a transmittance of about 80%.
  • the charges photoelectrically converted during exposure are accumulated in the first photodiode 201a and the second photodiode 214a, respectively.
  • the first photodiode 201a and the second photodiode 214a have different sensitivities.
  • the second photodiode 214a is smaller in size and lower in sensitivity than the first photodiode 201a. That is, the first photodiode 201a is suitable for high sensitivity and low illuminance, while the second photodiode 214a is low sensitivity and suitable for high illuminance.
  • the solid-state imaging device 369 can realize a wide dynamic range by combining a high sensitivity signal and a low sensitivity signal in image processing.
  • FIG. 37 is an explanatory view showing a state in which the dynamic range is expanded. Note that “upper” indicates the upward direction in FIG. 37, and “right” indicates the right direction in FIG. 37 unless otherwise noted.
  • the solid line 510 on the left side in FIG. 37 shows the state until the high sensitivity first photodiode 201a is saturated. Further, a solid line 511 in the middle in FIG. 37 shows a state until saturation occurs when the transmittance of the low sensitivity second photodiode 214a is 80%. The right solid line 512 in FIG. 37 shows a state until saturation occurs when the transmittance of the low sensitivity second photodiode 214a is 10%.
  • the solid-state imaging device 369 a predetermined voltage is applied between the first electrode (upper electrode 233) and the second electrode (lower electrode 231), and the second electrode (lower electrode 231) A predetermined voltage is applied to the chromic film 232a.
  • the light transmittance of the electrochromic film 232a in the visible light range (approximately 380 nm to 780 nm) is changed. Therefore, the solid-state imaging device 369 can switch the mode by changing the voltage applied to the second electrode (lower electrode 231).
  • the visible light region (approximately 380 nm) of the second photodiode 214 a The first transmittance of about 780 nm) is about 80%.
  • the visible light region (approximately 380 nm to 780 nm) of the second photodiode 214 a The second transmittance of) is about 10%.
  • the sensitivity of the second photodiode 214a is the direction of the first transmittance as compared to the sensitivity when the first transmittance in the visible light region is 80% and the second transmittance in the visible light region is 10%. Is 80%, so the sensitivity is high.
  • the sensitivity difference between the first photodiode 201a and the second photodiode 214a will be examined.
  • the second photodiode 214a having the first transmittance of 80% has a smaller sensitivity difference than the second photodiode 214a having the second transmittance of 10% in the visible light range.
  • the sensitivity difference between the first photodiode 201a and the second photodiode 214a in the case where the second transmittance of the visible light region is 10% is the first transmission of the first photodiode 201a and the visible light region. It can be said that the rate is larger than that of the second photodiode 214a in the case of 80%.
  • the second voltage is applied.
  • the first mode can be set as a high SN mode in which the sensitivity difference is smaller than when 2 V is applied.
  • the second mode can be set as a dynamic range mode in which the sensitivity difference is larger than when 0 V is applied.
  • a predetermined voltage applied between the first electrode (upper electrode 233) and the second electrode (lower electrode 231) may be applied from the power supply 600.
  • a predetermined voltage is applied from the power supply 600, and a predetermined voltage is applied to the electrochromic film 232a by the second electrode (lower electrode 231), whereby the light of the electrochromic film 232a is generated.
  • the transmittance can be changed.
  • the power supply 600 is configured by the booster circuit, but is not limited to the booster circuit, and may be configured by an external power supply, for example.
  • the power supply 600 may be configured by a combination of a booster circuit and an external power supply.
  • the first electrode (upper electrode 233) and the second electrode (lower electrode 231) may be used even after the solid-state imaging device 369 is manufactured. Since the power supply 600 can apply voltage to adjust the transmittance of the electrochromic film 232a, the dynamic range of the first photodiode 201a and the second photodiode 214a can be adjusted. Thus, the solid-state imaging device 369 can adjust the voltage applied to the electrochromic film 232a for each solid-state imaging device, so that the sensitivity can be easily adjusted for each individual.
  • the voltage set to the solid-state imaging device 369 is fixed for each solid-state imaging device 369 or switched when changing the mode, it is not necessary to be aware of the low response characteristic of the electrochromic film 232a.
  • the solid-state imaging device of the sixteenth embodiment of the present technology since the sensitivity difference with the pixel as a pair can be expanded, the dynamic range can be expanded.
  • the solid-state imaging device according to the sixteenth embodiment can expand the dynamic range without reducing the sensitivity of the first photodiode 201a, which has high sensitivity.
  • the technique described in the solid-state imaging device of the sixteenth embodiment can also be applied to the solid-state imaging device of the fifteenth embodiment.
  • FIG. 38 is a schematic cross-sectional view showing a pixel of a solid-state imaging device 370 of the seventeenth embodiment.
  • the difference between the solid-state imaging device 370 shown in FIG. 38 and the solid-state imaging device 369 of the sixteenth embodiment is that the electrochromic film 232 and the electrochromic film 232a are inter-pixel light shielding 502 (inter-pixel light shielding 502 a, inter-pixel light shielding 502 b, It is a point provided in a layer above the inter-pixel light shielding 502 c and the inter-pixel light shielding 502 d).
  • “upper” means the upper direction in FIG. 38
  • “lower” means the lower direction in FIG. 38 unless otherwise noted.
  • the solid-state imaging device 370 includes an electrochromic film 232 and an electrochromic film 232.
  • the electrochromic film 232 and the electrochromic film 232a are layers above the inter-pixel light shielding 502 (inter-pixel light shielding 502a, inter-pixel light shielding 502b, inter-pixel light shielding 502c, and inter-pixel light shielding 502d), and a color filter 241; It is provided in the layer under the filter 241a.
  • the electrochromic film 232 and the electrochromic film 232a may be the same layer as the inter-pixel light shielding 502 as long as they are the optical paths of light incident on the second photodiode 214 and the second photodiode 214a. Or even different layers can be arranged.
  • the solid-state imaging device 370 can expand the dynamic range regardless of which layer of the solid-state imaging device 370 the electrochromic film 232 and the electrochromic film 232a are disposed. .
  • FIG. 39 is a schematic cross-sectional view showing a pixel of a solid-state imaging device 371 of the eighteenth embodiment.
  • the solid-state imaging device 371 shown in FIG. 39 is different from the solid-state imaging device 369 of the sixteenth embodiment in that the second photodiode 214b has the same pixel size as the first photodiode 201b. . Further, in FIG. 39, the solid-state imaging device 371 is represented by one unit pixel.
  • the same components as those of the sixteenth embodiment are designated by the same reference numerals, and the description will not be repeated.
  • "upper” means the upper direction in FIG. 39
  • “lower” means the lower direction in FIG.
  • the solid-state imaging device 371 includes a first photodiode 201b, which is a first photoelectric conversion element, and a first storage unit (first FD unit) that accumulates the charges photoelectrically converted by the first photodiode 201b.
  • second photodiode 214b which is a second photoelectric conversion element
  • second storage portion for storing the charge photoelectrically converted by the second photodiode 214b; Is equipped.
  • a color filter 241, a color filter 244, an on-chip lens 242, and an on-chip lens 243 are formed on a first electrode (upper electrode 233).
  • the electrochromic film 232 b is provided between the inter-pixel light shielding 503 a and the inter-pixel light shielding 503 b.
  • the second photodiode 214 b has the same pixel size as the first photodiode 201 b.
  • the second photodiode 214b in which the electrochromic film 232b is disposed is not limited to the pixel size, and a desired pixel size is adopted. be able to.
  • the electrochromic film 232 b may be provided for the second photodiode 214 b for each pixel, or may be provided for each color of the color filter 241.
  • the electrochromic film 232 b can not be provided for the first photodiode 201 b paired with the second photodiode 214 b because the electrochromic film 232 b is used for the purpose of expanding the dynamic range.
  • An electronic device is a device including the solid-state imaging device according to any one of the first to eighteenth embodiments of the present technology.
  • the solid-state imaging device according to the first to eighteenth embodiments of the present technology is as described above, and thus the description thereof is omitted here.
  • the electronic device according to the nineteenth embodiment of the present technology includes the solid-state imaging device having excellent image quality and excellent reliability, so that it is possible to improve the performance such as the image quality of a color image.
  • FIG. 40 is a diagram showing an example of use of the solid-state imaging device according to the first to eighteenth embodiments of the present technology as an image sensor.
  • the solid-state imaging device may be used, for example, in various cases for sensing light such as visible light, infrared light, ultraviolet light, X-rays, etc. as described below.
  • the solid-state imaging device according to any of the first to eighteenth embodiments can be used in an apparatus (for example, the electronic device according to the nineteenth embodiment described above) used in the field of agriculture, the field of agriculture, and the like.
  • a device for capturing an image to be provided for viewing such as a digital camera, a smartphone, or a mobile phone with a camera function
  • a device for capturing an image to be provided for viewing such as a digital camera, a smartphone, or a mobile phone with a camera function
  • the solid-state imaging device of the embodiment can be used.
  • in-vehicle sensors for capturing images in front of, behind, around, inside of vehicles, etc., for monitoring safe driving such as automatic stop, etc., driving vehicles and roads.
  • the solid-state imaging device according to any of the first to eighteenth embodiments can be used in devices provided for traffic, such as surveillance cameras, distance measuring sensors that perform distance measurement between vehicles, etc.
  • a device provided to home appliances such as a television receiver, a refrigerator, an air conditioner, etc. in order to photograph a user's gesture and perform device operation according to the gesture.
  • the solid-state imaging device of the eighteenth embodiment can be used.
  • devices provided for medical use and healthcare such as endoscopes and devices that perform blood vessel imaging by receiving infrared light
  • devices provided for medical use and healthcare such as endoscopes and devices that perform blood vessel imaging by receiving infrared light
  • the solid-state imaging device of the embodiment can be used.
  • the solid-state imaging device is used for an apparatus provided for security, such as a surveillance camera for crime prevention and a camera for person authentication. Can.
  • the solid-state imaging device is provided as an apparatus provided for beauty use, such as a skin measuring instrument for photographing the skin and a microscope for photographing the scalp. It can be used.
  • the solid-state imaging device in the field of sports, for example, can be used in devices provided for sports, such as action cameras and wearable cameras for sports applications and the like. it can.
  • the solid-state imaging device may be used in an apparatus used for agriculture, such as a camera for monitoring the condition of fields and crops. it can.
  • the technology according to the present disclosure (the present technology) can be applied to various products.
  • the example of application to a mobile is described.
  • the technology according to the present disclosure can be realized as a device mounted on any type of mobile object such as a car, an electric car, a hybrid electric car, a motorcycle, a bicycle, personal mobility, an airplane, a drone, a ship, a robot.
  • FIG. 41 is a block diagram showing a schematic configuration example of a vehicle control system which is an example of a moving object control system to which the technology according to the present disclosure can be applied.
  • Vehicle control system 12000 includes a plurality of electronic control units connected via communication network 12001.
  • the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an external information detection unit 12030, an in-vehicle information detection unit 12040, and an integrated control unit 12050.
  • a microcomputer 12051, an audio image output unit 12052, and an in-vehicle network I / F (interface) 12053 are illustrated as a functional configuration of the integrated control unit 12050.
  • the driveline control unit 12010 controls the operation of devices related to the driveline of the vehicle according to various programs.
  • the drive system control unit 12010 includes a drive force generation device for generating a drive force of a vehicle such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, and a steering angle of the vehicle. adjusting steering mechanism, and functions as a control device of the braking device or the like to generate a braking force of the vehicle.
  • Body system control unit 12020 controls the operation of the camera settings device to the vehicle body in accordance with various programs.
  • the body system control unit 12020 functions as a keyless entry system, a smart key system, a power window device, or a control device of various lamps such as a headlamp, a back lamp, a brake lamp, a blinker or a fog lamp.
  • the body system control unit 12020 the signal of the radio wave or various switches is transmitted from wireless controller to replace the key can be entered.
  • Body system control unit 12020 receives an input of these radio or signal, the door lock device for a vehicle, the power window device, controls the lamp.
  • Outside vehicle information detection unit 12030 detects information outside the vehicle equipped with vehicle control system 12000.
  • an imaging unit 12031 is connected to the external information detection unit 12030.
  • the out-of-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle, and receives the captured image.
  • the external information detection unit 12030 may perform object detection processing or distance detection processing of a person, a vehicle, an obstacle, a sign, characters on a road surface, or the like based on the received image.
  • Imaging unit 12031 receives light, an optical sensor for outputting an electric signal corresponding to the received light amount of the light.
  • the imaging unit 12031 can output an electric signal as an image or can output it as distance measurement information.
  • the light image pickup unit 12031 is received may be a visible light, it may be invisible light such as infrared rays.
  • Vehicle information detection unit 12040 detects the vehicle information.
  • a driver state detection unit 12041 that detects a state of a driver is connected to the in-vehicle information detection unit 12040.
  • the driver state detection unit 12041 includes, for example, a camera for imaging the driver, and the in-vehicle information detection unit 12040 determines the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041. It may be calculated or it may be determined whether the driver does not go to sleep.
  • the microcomputer 12051 calculates a control target value of the driving force generation device, the steering mechanism or the braking device based on the information inside and outside the vehicle acquired by the outside information detecting unit 12030 or the in-vehicle information detecting unit 12040, and a drive system control unit A control command can be output to 12010.
  • the microcomputer 12051 is collision avoidance or cushioning of the vehicle, follow-up running based on inter-vehicle distance, vehicle speed maintained running, functions realized in the vehicle collision warning, or ADAS including lane departure warning of the vehicle (Advanced Driver Assistance System) It is possible to perform coordinated control aiming at
  • the microcomputer 12051 the driving force generating device on the basis of the information around the vehicle acquired by the outside information detection unit 12030 or vehicle information detection unit 12040, by controlling the steering mechanism or braking device, the driver automatic operation such that autonomously traveling without depending on the operation can be carried out cooperative control for the purpose of.
  • the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the external information detection unit 12030.
  • the microcomputer 12051 controls the headlamps in response to the preceding vehicle or the position where the oncoming vehicle is detected outside the vehicle information detection unit 12030, the cooperative control for the purpose of achieving the anti-glare such as switching the high beam to the low beam It can be carried out.
  • Audio and image output unit 12052 transmits, to the passenger or outside of the vehicle, at least one of the output signal of the voice and image to be output device to inform a visually or aurally information.
  • an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are illustrated as output devices.
  • Display unit 12062 may include at least one of the on-board display and head-up display.
  • FIG. 42 is a diagram illustrating an example of the installation position of the imaging unit 12031.
  • the vehicle 12100 includes imaging units 12101, 12102, 12103, 12104, and 12105 as the imaging unit 12031.
  • the imaging units 12101, 12102, 12103, 12104, and 12105 are provided, for example, at positions such as the front nose of the vehicle 12100, a side mirror, a rear bumper, a back door, and an upper portion of a windshield of a vehicle interior.
  • the imaging unit 12101 provided in the front nose and the imaging unit 12105 provided in the upper part of the windshield in the vehicle cabin mainly acquire an image in front of the vehicle 12100.
  • the imaging units 12102 and 12103 included in the side mirror mainly acquire an image of the side of the vehicle 12100.
  • the imaging unit 12104 provided in the rear bumper or the back door mainly acquires an image of the rear of the vehicle 12100. Images in the front acquired by the imaging units 12101 and 12105 are mainly used to detect a preceding vehicle or a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.
  • FIG. 42 illustrates an example of the imaging range of the imaging units 12101 to 12104.
  • Imaging range 12111 indicates an imaging range of the imaging unit 12101 provided in the front nose
  • imaging range 12112,12113 are each an imaging range of the imaging unit 12102,12103 provided on the side mirror
  • an imaging range 12114 is The imaging range of the imaging part 12104 provided in the rear bumper or the back door is shown. For example, by overlaying the image data captured by the imaging units 12101 to 12104, a bird's eye view of the vehicle 12100 viewed from above can be obtained.
  • At least one of the imaging unit 12101 through 12104 may have a function of obtaining distance information.
  • at least one of the imaging units 12101 to 12104 may be a stereo camera including a plurality of imaging devices, or an imaging device having pixels for phase difference detection.
  • the microcomputer 12051 based on the distance information obtained from to no imaging unit 12101 12104, and the distance to the three-dimensional object in to no imaging range 12111 in 12114, the temporal change of the distance (relative speed with respect to the vehicle 12100) In particular, it is possible to extract a three-dimensional object traveling at a predetermined speed (for example, 0 km / h or more) in substantially the same direction as the vehicle 12100 as a leading vehicle, in particular by finding the it can. Further, the microcomputer 12051 can set an inter-vehicle distance to be secured in advance before the preceding vehicle, and can perform automatic brake control (including follow-up stop control), automatic acceleration control (including follow-up start control), and the like. Automatic operation or the like for autonomously traveling without depending on the way of the driver operation can perform cooperative control for the purpose.
  • automatic brake control including follow-up stop control
  • automatic acceleration control including follow-up start control
  • the microcomputer 12051 converts three-dimensional object data relating to three-dimensional objects into two-dimensional vehicles such as two-wheeled vehicles, ordinary vehicles, large vehicles, classification and extracted, can be used for automatic avoidance of obstacles.
  • the microcomputer 12051 identifies obstacles around the vehicle 12100 into obstacles visible to the driver of the vehicle 12100 and obstacles difficult to see.
  • the microcomputer 12051 determines a collision risk which indicates the risk of collision with the obstacle, when a situation that might collide with the collision risk set value or more, through an audio speaker 12061, a display portion 12062 By outputting a warning to the driver or performing forcible deceleration or avoidance steering via the drive system control unit 12010, driving support for collision avoidance can be performed.
  • At least one of the imaging unit 12101 to 12104 may be an infrared camera that detects infrared rays.
  • the microcomputer 12051 can recognize a pedestrian by determining whether a pedestrian is present in the images captured by the imaging units 12101 to 12104.
  • Such pedestrian recognition is, for example, a procedure for extracting feature points in images captured by the imaging units 12101 to 12104 as an infrared camera, and pattern matching processing on a series of feature points indicating the outline of an object to determine whether it is a pedestrian or not
  • the procedure is to determine Microcomputer 12051 is, determines that the pedestrian in the captured image of the imaging unit 12101 to 12104 is present, recognizing the pedestrian, the sound image output unit 12052 is rectangular outline for enhancement to the recognized pedestrian to superimpose, controls the display unit 12062.
  • the audio image output unit 12052 is, an icon or the like indicating a pedestrian may control the display unit 12062 to display the desired position.
  • the technology according to the present disclosure may be applied to the imaging unit 12031 (imaging units 12101, 12102, 12103, 12104, and 12105) among the configurations described above.
  • the solid-state imaging device according to the present technology can be applied to the imaging unit 12031 (imaging units 12101, 12102, 12103, 12104, and 12105).
  • the present technology can have the following configurations.
  • a first photoelectric conversion element A first storage unit for storing the charge photoelectrically converted by the first photoelectric conversion element; A first film which is electrically connected to the first storage unit and whose optical characteristics change according to an applied voltage; A solid-state imaging device provided with each unit pixel.
  • the unit pixel is A first transfer transistor that transfers the charge photoelectrically converted by the photoelectric conversion element to the first storage unit; An amplification transistor electrically connected to the first storage unit; A selection transistor electrically connected to the amplification transistor;
  • the solid-state imaging device according to (1) further comprising: (3) The solid-state imaging device according to (1) or (2), wherein the unit pixel further includes a first reset transistor that resets the charge accumulated in the first accumulation unit.
  • the unit pixel is A second storage unit for storing the charge photoelectrically converted by the first photoelectric conversion element; A capacitive connection transistor electrically connecting the first storage unit and the second storage unit;
  • the unit pixel further includes a selection transistor electrically connected to the first film, and an operational amplifier, The solid-state imaging device according to (3), wherein the first storage unit, the reset transistor, and the operational amplifier are connected in parallel to one another.
  • the solid-state imaging device according to any one of (1) to (6), wherein the first photoelectric conversion element and the first storage unit are directly connected.
  • the first film is disposed on the optical path of light incident on the first photoelectric conversion element, and the light transmittance is changed in accordance with the amount of charge accumulated in the first accumulation portion.
  • the solid-state imaging device according to any one of (7) to (7).
  • (9) A second photoelectric conversion element, And a second storage unit for storing the charge photoelectrically converted by the second photoelectric conversion element, The solid-state imaging device according to any one of (1) to (8), wherein the first film is disposed on an optical path of light incident on the second photoelectric conversion device.
  • the solid-state imaging device according to (9), wherein the unit pixel further includes a second transfer transistor that transfers the charge photoelectrically converted by the photoelectric conversion element to the second storage unit.
  • the solid-state imaging device according to (9) or (10), wherein the unit pixel further includes a second reset transistor that resets the charge accumulated in the second accumulation unit.
  • a second film is disposed on the optical path of light incident on the second photoelectric conversion element, The solid-state imaging device according to any one of (9) to (11), wherein the second film has an optical characteristic different from that of the first film.
  • (13) The solid-state imaging device according to any one of (1) to (12), wherein the first storage unit stores overflow charge overflowed from the first photoelectric conversion element.
  • the solid-state imaging device according to any one of (1) to (13), wherein the first storage unit stores discharged charges when the first photoelectric conversion element is reset.
  • the first film is disposed on an optical path on which light is incident to the second photoelectric conversion element, and the light transmittance is changed according to the amount of charge accumulated in the first accumulation portion (9).
  • the solid-state imaging device according to any one of (14) to (14).
  • a first electrode An electrochromic film whose optical characteristics change according to an applied voltage
  • a second electrode A first photoelectric conversion element, A first storage unit for storing the charge photoelectrically converted by the first photoelectric conversion element
  • a second photoelectric conversion unit A second storage unit for storing the charge photoelectrically converted by the second photoelectric conversion element for each unit pixel
  • the electrochromic film is A solid-state imaging device, which is disposed on an optical path of light incident on the second photoelectric conversion device, and in which the first storage unit and the second electrode are connected.
  • a predetermined voltage is applied between the first electrode and the second electrode, The solid-state imaging device according to (19), wherein the light transmittance of the electrochromic film is changed by applying the predetermined voltage from the second electrode to the electrochromic film.
  • a predetermined voltage is applied between the first electrode and the second electrode by an external power supply, The light transmittance of the electrochromic film is changed by applying the predetermined voltage from the second electrode to the electrochromic film, according to any one of (19) to (22).
  • Solid-state image sensor A predetermined voltage is applied between the first electrode and the second electrode by a booster circuit, The light transmittance of the electrochromic film is changed by applying the predetermined voltage from the second electrode to the electrochromic film, according to any one of (19) to (23). Solid-state image sensor.
  • Solid-state imaging devices 20, 80, 90, 160, 260, 320, 351, 352 Unit pixels 101, 114, 201, 214 Photodiodes 102, 115, 202, 215 transfer transistor 103, 203, 216 FD part (floating diffusion region) 104, 204 Capacitance connection transistor 105, 205, 219 reset transistor 106, 206 Overflow gate 107, 207 Storage capacitance 108, 208 Amplifier transistor 109, 209 Selection transistor 110, 210 FD (floating diffusion region) capacitance switching switch 111 Additional floating diffusion region 112 op amp 113 feedback capacitance 121, 221 connection wiring 122, 222 pixel drive wiring 131, 231 lower electrode 132, 232 electrochromic film 133, 233 upper electrode 134, 234 insulating film 141, 241 color filter 142, 242 on-chip lens 217 capacitance Connection switch 218 Overflow drain

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  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

L'invention concerne un élément d'imagerie à semi-conducteurs qui est capable d'étendre automatiquement la plage dynamique individuellement pour chaque pixel unitaire. Chaque pixel unitaire de cet élément d'imagerie à semi-conducteurs comporte : un premier élément de conversion photoélectrique; une première unité de stockage dans laquelle les charges qui ont été converties photoélectriquement par le premier élément de conversion photoélectrique sont stockées; et un premier film qui est électriquement connecté à la première unité de stockage, et dont les caractéristiques optiques changent en fonction de la tension appliquée à celle-ci. De plus, chaque pixel unitaire de cet élément d'imagerie à semi-conducteurs peut être en outre pourvu : d'un premier transistor de transfert qui transfère les charges qui ont été converties de manière photoélectrique par l'élément de conversion photoélectrique vers la première unité de stockage; un transistor amplificateur qui est électriquement connecté à la première unité de stockage; et un transistor de sélection qui est connecté électriquement au transistor amplificateur.
PCT/JP2018/038108 2017-10-20 2018-10-12 Élément d'imagerie à semi-conducteurs, procédé de pilotage d'élément d'imagerie à semi-conducteurs, et dispositif électronique WO2019078110A1 (fr)

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JP2017203415 2017-10-20
JP2017-203415 2017-10-20
JP2018-159569 2018-08-28
JP2018159569A JP2019080305A (ja) 2017-10-20 2018-08-28 固体撮像素子、固体撮像素子の駆動方法および電子機器

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US11490042B2 (en) * 2020-12-15 2022-11-01 Sony Semiconductor Solutions Corporation CTIA image sensor pixel
WO2024106013A1 (fr) * 2022-11-16 2024-05-23 ソニーセミコンダクタソリューションズ株式会社 Dispositif d'imagerie à semi-conducteurs

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JP2012084814A (ja) * 2010-10-14 2012-04-26 Panasonic Corp 固体撮像装置、半導体装置及びカメラ
JP2012216760A (ja) * 2011-03-29 2012-11-08 Sony Corp 固体撮像素子及び電子機器
JP2013161868A (ja) * 2012-02-02 2013-08-19 Sony Corp 固体撮像装置、固体撮像装置の製造方法、及び、電子機器

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JP2012084814A (ja) * 2010-10-14 2012-04-26 Panasonic Corp 固体撮像装置、半導体装置及びカメラ
JP2012216760A (ja) * 2011-03-29 2012-11-08 Sony Corp 固体撮像素子及び電子機器
JP2013161868A (ja) * 2012-02-02 2013-08-19 Sony Corp 固体撮像装置、固体撮像装置の製造方法、及び、電子機器

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11490042B2 (en) * 2020-12-15 2022-11-01 Sony Semiconductor Solutions Corporation CTIA image sensor pixel
WO2024106013A1 (fr) * 2022-11-16 2024-05-23 ソニーセミコンダクタソリューションズ株式会社 Dispositif d'imagerie à semi-conducteurs

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