WO2019059057A1 - Glass substrate manufacturing method - Google Patents

Abstract

This glass substrate manufacturing method comprises a laminated body fabricating step, a processing step, and a peeling step of peeling and separating a glass substrate 2 and a support glass substrate 3 from each other. The peeling step further comprises a peel start-point portion forming step of forming a peel start-point portion 4 in which the substrates 2, 3 are partially peeled. In the peel start-point portion forming step, the substrates 2, 3 are successively peeled from an end portion 2ya of a short-side portion 2y as a start point, and the peel start-point portion 4 is formed in which the substrates 2, 3 are peeled along the length of the short-side portion 2y.

Description

Method of manufacturing glass substrate

The present invention relates to a method of manufacturing a glass substrate.

Since mobile terminals such as smartphones and tablet PCs that are rapidly spreading in recent years are required to be thin and lightweight, there is an increasing demand for thinning of glass substrates to be incorporated into these terminals. In order to meet such a demand, a glass film which has been thinned (for example, having a thickness of 200 μm or less) in the form of a film has been developed and manufactured. The glass film has the property of being highly flexible because it is extremely thin.

Here, the following method is mentioned as an example of the method of manufacturing the glass substrate for incorporating in the said terminal from the said glass film by performing the process which forms a transparent conductive film etc. with respect to a glass film. .

First, a laminate production step is performed in which a glass film and a supporting glass substrate supporting the same are stacked to produce a laminate. By superimposing on the supporting glass substrate, it is possible to temporarily eliminate the flexible nature of the glass film, and to make it possible to exert an adhesive force between the two superposed. Therefore, at the time of execution of a processing step (film forming step or the like) to be performed later, it is possible to avoid bending of the glass film and to prevent positional deviation of film patterning and the like.

When the laminate preparation step is completed, the treated glass film is manufactured as a glass substrate by subsequently carrying out the treatment step. After that, a peeling process is performed in which the manufactured glass substrate is peeled off from the supporting glass substrate which becomes unnecessary for the terminal. Patent Document 1 discloses a technique that can be used to execute this peeling step.

In one example of the peeling process using the same technology, as shown in FIG. 9, a plurality of rows are used for peeling and separating the glass substrate 100 placed flat and the supporting glass substrate 200 placed on top of this. A suction pad group 400 in which the suction pads 300 are arranged in each of the rows (only three rows of the row R1 to the row R3 are shown in FIG. 9) is used.

Then, in a state where the upper surface of the support glass substrate 200 is adsorbed to each row of the suction pad group 400, the separation direction in which each row is separated from the glass substrate 100 in order from the front row R1 side to the back row side And in FIG. 9 is moved in a direction perpendicular to the paper surface). Thus, a peeling boundary line L which is a boundary between a portion where both substrates 100 and 200 have been peeled (a portion hatched in FIG. 9) and a portion not peeled is shown in the peeling direction T from the corner portion of glass substrate 100. Then, the peeling of both substrates 100 and 200 is advanced.

However, in the above-mentioned example, there are the following problems due to the fact that the peeling boundary line L in progress has an arc shape. That is, since the peeling boundary line L and each row of the suction pad group 400 are not in parallel, it is difficult to move the respective rows of the suction pad group 400 in the separating direction. This is because if the column is moved in the separating direction at the wrong timing, the suction pad 300 belonging to this column will forcibly pull the unpeeled portion from the glass substrate 100 of the supporting glass substrate 200 in the separating direction. It is. For example, at the time point shown in FIG. 9, if the row R3 is moved in the separating direction, the suction pads 300 present at both ends of the row R3 will forcibly pull the unpeeled portion. When such a situation occurs, the glass substrate 100 in which the unreasonable deformation has occurred may be damaged as the unpeeled portion is pulled.

Then, it is also considered to perform a peeling process using the technique disclosed by patent document 2 as a technique which can avoid generation | occurrence | production of the above defects.

In one example of the peeling process using the same technology, as shown in FIGS. 10a and 10b, the supporting glass is formed such that the side portion 100a of the glass substrate 100 becomes a peeling starting point portion partially peeled from the supporting glass substrate 200 in advance. The substrate 200 is provided with a thin portion 200a which is thinner than other portions. Then, when promoting the peeling of both substrates 100, 200, the peeling is made while maintaining the state in which the side 100a and the peeling boundary line L in progress in the peeling direction T extend in parallel (FIG. 10b). The hatched portions are portions where both substrates 100 and 200 have been peeled off). By advancing the peeling in this manner, it becomes possible to easily determine the timing for moving each row of the suction pad group in the separating direction, etc., and unreasonable deformation occurs in the glass substrate 100 in which the peeling is progressing. Can be avoided, and its damage can be prevented. Furthermore, by forming the peeling starting point portion, peeling of both substrates 100 and 200 can be smoothly started.

JP 2014-141344 A JP 2012-131664 A

However, even the peeling process using the technology disclosed in Patent Document 2 still has the following problems to be solved.

In order to form the thin portion 200 a on the supporting glass substrate 200, it is naturally necessary to process the supporting glass substrate 200. Therefore, in the case of manufacturing a large number of glass substrates 100, it becomes essential to process each of a large number of supporting glass substrates 200 for supporting them, and as a result, the manufacturing cost of the glass substrate 100 is increased. Has the problem of Further, since the glass substrate 100 is in a floating state on the thin portion 200 a, when a process for producing a photoresist or the like is performed on the glass substrate 100, a chemical solution or the like of the glass substrate 100 and the supporting glass substrate 200 is There is a problem that there is a risk of sticking after having penetrated each other, and peeling of the glass substrate 100 from the supporting glass substrate 200 can not be easily started. From such a present condition, the advantage of the peeling process using the above-mentioned technique is obtained, peeling can be easily started, and the establishment of the manufacturing method which can also suppress the manufacturing cost of the glass substrate 100 was expected.

The present invention made in view of the above circumstances can smoothly start peeling between a glass substrate and a supporting glass substrate when manufacturing a glass substrate using a laminate, and can prevent breakage of the glass substrate upon peeling. Further, it is a technical object to establish a method of manufacturing a glass substrate capable of suppressing the manufacturing cost.

The method according to the present invention invented to solve the above problems is a laminate producing step of producing a laminate by laminating a flexible glass film and a supporting glass substrate, and a glass film in the laminate Is a method of manufacturing a glass substrate including a treatment step of forming an electronic device material on the substrate to form a glass substrate, and a peeling step of peeling and separating both the glass substrate and the supporting glass substrate. And the peeling step further includes a peeling starting point forming step of forming a peeling starting point portion in which both substrates are partially peeled, and in the peeling starting point portion forming step, an end portion of a side provided at the outer peripheral end of the glass substrate It is characterized in that a peeling starting point portion in which both substrates are partially peeled along the entire length of the side portion is formed by peeling the both substrates sequentially along the side portion starting from.

In the peeling starting point forming step of the present method, by starting from the end of the side provided at the outer peripheral end of the glass substrate as a starting point, both the glass substrate and the supporting glass substrate are peeled sequentially along the side. A peeling starting point portion in which both substrates are partially peeled is formed along the entire length of the side portion. As described above, the peeling starting point portion is formed without causing undue deformation in the glass substrate by using the end portion of the side portion that easily peels both substrates as a starting point and further peeling sequentially along the side portion. It is possible. Therefore, while being able to prevent the failure | damage of the glass substrate during execution of the same process naturally, it becomes possible to start peeling of both board | substrates smoothly by having formed the peeling starting point part. In addition, by performing the peeling starting point forming step as described above, the peeling starting point can be formed without performing special processing on the supporting glass substrate, so the manufacturing cost of the glass substrate can be reduced accordingly. Is also possible. In addition, after the processing step is performed, the peeling starting point forming step is performed to form the peeling starting point portion. Therefore, the glass substrate does not float from the supporting glass substrate while the processing step is being performed. There is no possibility that a chemical solution or the like intrudes between the substrate and the supporting glass substrate and adheres to each other. Further, by peeling both substrates along the side portion in the peeling starting point forming step, the peeling boundary which becomes the boundary between the portion where both substrates have been peeled and the non-peeling portion after execution of the step. The line extends in a substantially linear shape (a linear shape substantially parallel to the side portion). For this reason, for example, in the case where the peeling of both substrates is advanced using the suction pad group in which the suction pads are arranged in each of a plurality of rows, the timing for moving each row for peeling can be easily determined. become able to. As a result, it is possible to avoid the occurrence of a situation in which the suction pad forcibly pulls the unpeeled portion, and it is possible to prevent the breakage of the glass substrate at the time of peeling. From the above, according to this method, when manufacturing a glass substrate using a laminate, peeling between the glass substrate and the supporting glass substrate can be smoothly started, and breakage of the glass substrate can be prevented at the time of peeling. Furthermore, the manufacturing cost can be suppressed.

In the above method, the peeling step further advances the peeling boundary line which becomes the boundary between the portion where both substrates have been peeled and the portion where it has not been peeled in the peeling direction, thereby peeling both substrates starting from the peeling starting point. It is preferable that the peeling is progressed while maintaining the state in which the side portion and the peeling boundary extend in parallel in the peeling advancing step.

In this way, in the peeling and advancing step, peeling is progressed while maintaining a state in which the side portion and the peeling boundary line extend in parallel, so that the occurrence of excessive deformation in the glass substrate during peeling is avoided it can. Thereby, when peeling both the glass substrate and the support glass substrate, it is possible to prevent breakage of the glass substrate more suitably.

In the above method, in the peeling starting point forming step, a plurality of suction pads for starting point formation movable in a separating direction away from the other in a state where one of both substrates is adsorbed are arranged in a line, and a plurality of starting points are formed. It is preferable to form a peeling starting point by moving the suction pad in the same direction and moving in the separation direction in order.

In this way, the peeling starting point can be formed simply by moving the plurality of starting point forming suction pads in the same direction and in the opposite direction, so that the peeling starting point forming step can be performed efficiently. it can. In addition, since contact of the glass substrate to the interface with the supporting glass substrate can be reliably avoided when performing the peeling starting point forming step, the interface is damaged and the quality of the glass substrate is degraded. It is possible to properly prevent the occurrence of such a situation.

In the above method, in the peeling starting point forming step, only one end of the both ends of the side is used as the starting point of the peeling starting point, and from the suction pad for starting point formation arranged on one end of the side from the other end It is preferable to move in the separation direction in order to the suction pads for starting point formation arranged.

In this way, it is possible to eliminate the trouble of forming the start point of the peeling starting point for each of both end portions of the side, and it is possible to execute the peeling starting point forming step more efficiently. In this case, the peeling starting point portion is formed only in a single direction (direction from one end side to the other end side of the side portion).

In the above-described method, in the peeling and advancing step, on the downstream side of the plurality of suction pads for starting point formation on the downstream side in the peeling direction, the plurality of peelings movable in the separating direction away from the other with one of both substrates adsorbed. It is preferable that the separation of both substrates be developed by arranging the development suction pads side by side in the peeling direction, and moving the plurality of peeling growth suction pads in the separation direction in order along the same.

In this way, it is possible to execute the peeling and advancing process efficiently. Moreover, it is possible to prevent generation | occurrence | production of the situation which a damage | wound generate | occur | produces in the interface with the support glass substrate of a glass substrate, and the quality of a glass substrate falls at the time of execution of a peeling advance process.

In the above-mentioned method, it is preferable to make the area of the suction part in the suction pad for starting point formation smaller than the area of the suction part in the suction pad for exfoliation progress.

As compared with the execution of the peeling extension process, the glass substrate or the supporting glass substrate is likely to be deformed uniquely during the execution of the peeling starting point forming process. Due to this, the larger the area of the suction portion in the suction pad for starting point formation, the more load is placed on the movement of the pad in the separating direction, making it difficult to move the pad, and as a result, the peeling starting point portion is quicker It can be difficult to form. However, if the area of the suction part in the suction pad for starting point formation is made smaller than the area of the suction part in the suction pad for separation and growth, the load when moving the suction pad for starting point formation in the separating direction As a result, the peeling starting point can be rapidly formed stably.

In the above method, it is preferable to use a single suction pad capable of adsorbing substantially the entire width in the direction along the side portion of one of the two substrates as the suction pad for peeling growth. Here, "substantially full width" means a width of 90% or more of the length of the entire width.

In this way, the entire width in the direction along the side portion in one of the two substrates (the substrate on the side attracted to the suction pad for peeling progress of both the substrates) is simultaneously separated by the suction pads for peeling progress. It will be pulled. Due to this, it is possible to easily maintain a state in which the side portion and the exfoliation boundary line extend in parallel, and thus easily determine the timing for moving each exfoliation suction pad in the separating direction. Is possible. As a result, the occurrence of a situation in which the two substrates are not pulled unavoidably in the separation direction can be properly avoided, and breakage of the glass substrate can be more reliably prevented.

In the above method, the glass substrate has a rectangular shape having relatively short short side portions and relatively long long side portions at the outer peripheral end, and in the peeling starting point portion forming step, both substrates along the short side portions It is preferable to form the peeling starting point part which partially peeled off.

This makes it possible to improve the manufacturing efficiency of the glass substrate. More specifically, (1) after the peeling starting point is formed along the short side as in the present method, the peeling boundary is advanced in the direction along the long side, and (2) the present method Is different from that in the case where the peeling start point is formed along the long side, and the peeling boundary line is advanced in the direction along the short side, the short side where the distance of peeling in (1) is shorter Since the peeling starting point portion is provided to peel in the direction along the long side, the required time can be shortened. Therefore, according to the present method, the manufacturing efficiency of the glass substrate is improved.

In the above method, in the peeling starting point forming step, it is preferable to form the starting point of the peeling starting point by inserting a blade-like object between the two substrates.

In this way, it is possible to quickly form the start point of the peeling start portion. Furthermore, since it is sufficient to insert the blade between the two substrates only when forming the starting point, the possibility that the interface between the glass substrate and the supporting glass substrate may be damaged due to the insertion of the blade can be properly eliminated.

In the above method, it is preferable to interpose the sheet-like member before the blade is pulled out from the space between the two substrates which are partially peeled off with each other as the blade is inserted.

In this way, by interposing the sheet-like member before pulling out the blade-like object, the part where both substrates peeled once comes into contact again and comes into close contact with the insertion of the blade-like object. The fear can be eliminated without fail.

According to the present invention, when manufacturing a glass substrate using a laminate, peeling between the glass substrate and the supporting glass substrate can be smoothly started, and breakage of the glass substrate can be prevented at the time of peeling. Can also be suppressed.

It is a top view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a side view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate concerning embodiment of this invention. It is a top view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a side view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate concerning embodiment of this invention. It is a top view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a side view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate concerning embodiment of this invention. It is a top view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a side view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate concerning embodiment of this invention. It is a top view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a front view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a top view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a front view which shows the peeling starting point part formation process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a top view which shows the peeling advance process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a side view showing the exfoliation progress process in the manufacturing method of the glass substrate concerning the embodiment of the present invention. It is a top view which shows the peeling advance process in the manufacturing method of the glass substrate which concerns on embodiment of this invention. It is a side view showing the exfoliation progress process in the manufacturing method of the glass substrate concerning the embodiment of the present invention. It is a top view which shows the peeling process in the manufacturing method of the conventional glass substrate. It is a side view which shows the peeling process in the manufacturing method of the conventional glass substrate. It is a top view which shows the peeling process in the manufacturing method of the conventional glass substrate.

Hereinafter, a method of manufacturing a glass substrate according to an embodiment of the present invention will be described with reference to the attached drawings.

In the method of manufacturing a glass substrate according to the present embodiment, a laminate manufacturing step of laminating a flexible glass film and a supporting glass substrate to prepare a laminate, and an electronic device material for the glass film in the laminate A process of forming a transparent conductive film as a glass substrate to form a glass substrate, and a peeling process of peeling and separating both the glass substrate and the supporting glass substrate are included.

In the present embodiment, both the glass film (which becomes a glass substrate after execution of the treatment process) and the support glass substrate are rectangular, and the support glass substrate has a size slightly larger than the glass film. Further, both the glass film and the supporting glass substrate have relatively short short sides and relatively long long sides at the outer peripheral edge. The thickness of the glass film is, for example, 200 μm or less, and the thickness of the supporting glass substrate is, for example, 500 μm.

[Laminate manufacturing process]
First, a laminate production step is performed.

In the laminate preparation step, the outer peripheral end of the supporting glass substrate is extruded from the entire periphery of the outer peripheral end of the glass film, and the both are superimposed to produce a laminate. With the production of the laminate, an adhesive force is exerted between the two. Thus, the laminate production process is completed.

Here, in the present embodiment, both of the glass film and the supporting glass substrate are directly superposed to produce a laminate, but as a modification of the present embodiment, a film forming supporting glass substrate is used. The two may be laminated via a film to produce a laminate, or using a supporting glass substrate on which a resin layer is formed, the two may be laminated via a resin layer to form a laminate.

[Processing process]
When the laminate preparation step is completed, the treatment step is performed next.

In the treatment step, a transparent conductive film (for example, an ITO film) is formed on the glass film superposed on the supporting glass substrate by using a known method (for example, a vacuum evaporation method, a sputtering method or the like). Thereafter, patterning of the film is performed using a known method (for example, etching or the like). Thereby, the glass film after a process is manufactured as a glass substrate. Thus, the treatment process is completed.

Here, in the present embodiment, a transparent conductive film is formed on a glass film as an electronic device material, but the present invention is not limited to this.

[Peeling process]
When the treatment process is completed, the peeling process is then performed.

In the peeling step, as shown in FIGS. 1a to 6b, a peeling starting point portion for forming a peeling starting point portion 4 in which both the substrates 2 and 3 of the glass substrate 2 and supporting glass substrate 3 constituting the laminate 1 are partially peeled. The peeling starting point portion 4 is formed by advancing in the peeling direction T the peeling boundary line L which becomes the boundary between the portion where both substrates 2 and 3 have peeled and the portion not peeled shown in FIGS. 7a to 8b. And an exfoliation-progressing process for promoting exfoliation of both the substrates 2 and 3 from the beginning.

Here, in the following description, the direction along the long side 2x of the glass substrate 2 is referred to as the X direction, the direction along the short side 2y is referred to as the Y direction, and the thickness direction of the glass substrate 2 is referred to as the Z direction. write. Furthermore, in the drawings for describing the present embodiment, the hatched portions indicate portions where both the substrates 2 and 3 of the glass substrate 2 and the supporting glass substrate 3 have been peeled off.

<Peeling origin part formation process>
As shown in FIGS. 1a to 6b, in the peeling starting point forming step, starting from the end 2ya of the short side 2y provided at the outer peripheral end of the glass substrate 2, both substrates 2 and 3 are along the short side 2y. The peeling starting point portion 4 in which both the substrates 2 and 3 are partially peeled is formed along the entire length of the short side portion 2 y by peeling sequentially from the side of the end portion 2 ya.

Here, in the present embodiment, the peeling starting point portion 4 is formed along the short side portion 2y of the glass substrate 2, but the present invention is not limited to this. As a modification of the present embodiment, the peeling starting point portion 4 may be formed along the long side 2x of the glass substrate 2.

At the time of execution of the peeling starting point portion forming step, first, as shown in FIG. 1a and FIG. 1b, with respect to the mutual (interface) between the glass substrate 2 and the supporting glass substrate 3, as a blade along the direction D1. Insert the knife 5. As a result, the peeling boundary line L advances inward from the corner portion side of the glass substrate 2, and along with this, the end 2ya of the short side 2y is locally peeled from the supporting glass substrate 3, and the peeling starting point portion A starting point of 4 is formed.

When the two substrates 2 and 3 are peeled off sequentially from the end 2ya side along the short side 2y starting from the end 2ya of the short side 2y as a starting point, a suction pad for forming a starting point described in detail later 6a pulls in the Z direction in a state where the start point of the peeling starting point portion 4 is adsorbed (see FIGS. 4a to 5b). At this time, if not only the starting point of the peeling starting point portion 4 in which the starting point forming suction pad 6a is peeled but also the non-peeling part is pulled together, the glass substrate 2 may be damaged. Therefore, at the time of formation of the start point of the peeling starting point portion 4, the peeling boundary line L is advanced to the inside of the glass substrate 2 later than the region to which the suction pad 6a for suctioning the starting point is to be adsorbed.

Here, in the present embodiment, although the starting point of the peeling starting point portion 4 is formed by using the knife 5, the present invention is not limited to this. As a modified example of the present embodiment, the start point of the peeling starting point portion 4 may be formed by pressing down (curving) the corner portion of the support glass substrate 3 so as to move away from the corner portion of the glass substrate 2. In this modification, as the corner portion of the supporting glass substrate 3 is pushed down, the curvature of the corner portion of the glass substrate 2 in close contact with this gradually increases. In addition, as the curvature increases, the restoring force acting on the corner portion of the glass substrate 2 gradually increases. Then, when the restoring force becomes larger than the adhesion, both the substrates 2 and 3 are locally peeled off, and the starting point of the peeling starting point portion 4 is formed. In this modification, the thickness of the glass substrate 2 (original glass film) is 50 μm or more for the purpose of securing a size sufficient to peel off both the substrates 2 and 3 with respect to the above-mentioned resilience. It is preferable to apply to the case.

Further, as another modified example of the present embodiment, when the support glass substrate 3 is formed into a film, it is possible to use a laser having a film interposed between the corner portion of the glass substrate 2 and the corner portion of the support glass substrate 3. By removing by irradiation, both substrates 2 and 3 may be exfoliated locally, and the starting point of exfoliation origin part 4 may be formed. Further, as another modification of the present embodiment, the periphery of the interface between the corner portion of the glass substrate 2 and the corner portion of the supporting glass substrate 3 is melted using an etching solution (for example, hydrofluoric acid or the like). Alternatively, the two substrates 2 and 3 may be locally peeled off to form the starting point of the peeling start portion 4.

When the formation of the start point of the peeling starting point portion 4 is completed, next, as shown in FIGS. 2a and 2b, a sheet is formed between the two substrates 2 and 3 partially peeled off with the insertion of the knife 5. A film sheet 7 as a loop member is interposed. Thereby, the re-adhesion of the two substrates 2 and 3 which peeled partially is prevented. In this work, after the film sheet 7 is inserted along the lower surface of the knife 5 inserted between the two substrates 2 and 3, the knife 5 is inserted from the two substrates 2 and 3 along the direction D2. Complete by pulling out. As a result, the film sheet 7 is replaced between the two substrates 2 and 3 instead of the knife 5. In addition, as the film sheet 7, it is possible to use a resin sheet (for example, a Teflon sheet (registered trademark)) or the like.

Here, in the present embodiment, the film sheet 7 is interposed between the two substrates 2 and 3 to prevent re-adhesion of the two substrates 2 and 3, but the present invention is not limited to this. As a modified example of the present embodiment, re-adhesion may be prevented by supplying liquid (for example, oil) or mist to the mutual between the two substrates 2 and 3 which are partially peeled off.

After interposing the film sheet 7 between the two substrates 2 and 3, next, as shown in FIGS. 3a and 3b, the laminated body 1 is turned upside down, and then the laminated body 1 is held on the holding table 8. Place it on top and fix it. Note that the holding table 8 has a mechanism (not shown) for fixing the stacked body 1, and as an example of this mechanism, the holding table 8 is provided on the support surface of the holding table 8 (the surface on which the stacked body 1 is placed) There is a mechanism composed of a large number of suction holes provided and a vacuum pump connected to the large number of holes.

When the fixing of the laminate 1 to the holding table 8 is completed, as shown in FIGS. 4a and 4b, a plurality (five in this case) of starting point forming suction pads 6 arranged in a line along the Y direction Then, adsorption of a portion of the supporting glass substrate 3 overlapping the short side 2y of the glass substrate 2 (here, the short side of the supporting glass substrate 3) is started. Each of the plurality of starting point forming suction pads 6 has a circular suction portion (a portion in contact with the supporting glass substrate 3), and moves in the Z direction separating from the glass substrate 2 in a state where the supporting glass substrate 3 is adsorbed ( Rising) is possible. An ejector is incorporated in each of the starting point forming suction pads 6 and compressed from the upper side (opposite side to the suctioning portion) with respect to each starting point forming suction pad 6 in a state where the suction portion is in contact with the support glass substrate 3 If a gas is introduced, it is possible for each starting point forming adsorption pad 6 to adsorb the supporting glass substrate 3.

Although not shown in FIGS. 4a and 4b, the plurality of suction pads 6 for starting point formation on the downstream side with respect to the peeling direction T (X direction) may be used in the peeling and advancing process to be performed later. The suction pads 9 for peeling growth are arranged in the peeling direction T (see FIGS. 7a to 8b).

Here, it is preferable that an interval S1 between the adjacent starting point forming suction pads 6 along the Y direction be in a range of 0 mm to 30 mm. Further, the diameter D of the suction portion of each suction pad 6 for formation of the starting point is preferably in the range of 20 mm to 80 mm, and more preferably in the range of 20 mm to 40 mm. (Here, equal to [pi] D ^2/4) the area of the suction portion of each starting point forming the suction pad 6 is smaller than the area of the suction unit in the release progress for suction pad 9. In addition, as a modification of this embodiment, it may replace with suction pad 6 for starting point formation which has a circular suction part, and may use suction pad 6 for starting point formation which has a suction part of rectangle (square etc.). The diameter D of the suction portion and the area of the suction portion of the above-mentioned suction pad (the suction pad 6 for starting point formation and the suction pad 9 for separation and growth) and the area of the suction portion are the diameters and It is an area.

Next, as shown in FIGS. 5a and 5b, a plurality of suction pads for starting point formation 6 are arranged in line along the same, and are arranged on the upstream side in the Y direction (the end 2ya side of the short side 2y) The pad 6 is moved in the Z direction in order (from 6a to 6b to 6c to 6d to 6e) to the starting point forming suction pad 6 disposed downstream from the pad 6 (on the end 2yb side of the short side 2y). As a result, the peeling boundary line L advances in the Y direction as the suction pads 6 for starting point formation pull the support glass substrate 3 in order in the Z direction, and along with this, the end 2 ya of the short side 2 y starts As a result, the portion where both substrates 2 and 3 have been peeled is expanded. Then, when the peeling boundary line L reaches the end 2yb of the short side 2y, as shown in FIGS. 6a and 6b, peeling of the two substrates 2 and 3 partially peeled along the entire length of the short side 2y. Starting point 4 is formed. By the above, the peeling starting point part formation process is completed.

Here, when forming the peeling starting point portion 4, the distance for moving each suction point forming suction pad 6 in the Z direction is preferably in the range of 2 mm to 10 mm, and more preferably in the range of 3 mm to 5 mm. preferable. Furthermore, the moving speed of the suction pads 6 for forming each starting point in the Z direction is preferably in the range of 0.01 mm / s to 1 mm / s, and in the range of 0.05 mm / s to 0.5 mm / s. It is more preferable to

In the present embodiment, only the end 2ya of the both ends 2ya and 2yb of the short side 2y is used as the start point of the peeling starting point 4, and from the end 2ya to the end 2yb of the short side 2y. Although both the substrates 2 and 3 expand the exfoliation part only toward the direction, it is not this limitation. As a modified example of the present embodiment, both ends 2ya and 2yb of the short side 2y are used as the start points of the peeling starting point 4, and both ends 2ya and 2yb toward the intermediate point of both The portions where the substrates 2 and 3 have been peeled may be enlarged. In this modification, the starting point forming suction pads 6 disposed at both ends of the row formed by the plurality of starting point forming suction pads 6 are arranged in order from the starting point forming suction pad 6 disposed inward (6a → 6b → 6c and 6e → 6d → 6c) in the Z direction. As another modification, a plurality of starting point forming suction pads 6 may be moved in the Z direction in the order of 6e → 6d → 6c → 6b → 6a, with the end 2yb as the start point of the peeling starting point 4. As still another modification, a plurality of starting point forming suction pads 6 are used, the order of 6a → 6b → 6c → 6e → 6d with the end 2ya as the start point of the peeling starting point 4, the end 2yb of the peeling starting point 4 As a start point, the movement may be performed in the Z direction in the order of 6e → 6d → 6c → 6a → 6b.

Moreover, in this embodiment, although the adsorption | suction pad 6 for origin formation of two or more is made to expand the location which both board | substrates 2 and 3 exfoliated, it is not this limitation. As a modified example of the present embodiment, by pushing a resin sheet (for example, Teflon sheet (registered trademark)) along the interface between both substrates 2 and 3, the part where both substrates 2 and 3 have already been peeled may be enlarged. . Further, as another modified example of the present embodiment, by moving a knife having a resin sheet connected to the rear in the moving direction along the interface between the two substrates 2 and 3, portions where both the two substrates 2 and 3 have peeled It may be enlarged.

<Peeling development process>
When the peeling starting point portion forming step is completed, the peeling advancing step is then performed. As shown in FIGS. 7a to 8b, in the separation and growth step, the separation of both substrates 2 and 3 is advanced while maintaining the short side 2y and the separation boundary line L extending in parallel.

During execution of the peeling growth step, as shown in FIGS. 7a and 7b, a plurality of peeling suction pads 9 capable of moving in the Z direction separating from the glass substrate 2 with the supporting glass substrate 3 adsorbed, In accordance with that, the suction pads 9 for separation and growth are sequentially moved in the Z direction from the suction pads 9 for separation and growth which are disposed on the upstream side in the X direction to the suction pads 9 for separation and growth which are arranged downstream. As a result, the peeling boundary line L advances in the peeling direction T (X direction) by pulling the supporting glass substrate 3 in order in the Z direction by the suction pads 9 for peeling growth, and along with this, the peeling starting point portion 4 As a starting point, the portion where both substrates 2 and 3 have been peeled is expanded. Then, when the peeling boundary line L reaches the short side portion 2y located on the downstream side in the X direction, as shown in FIGS. 8a and 8b, the two substrates 2 and 3 are completely peeled and separated. Thus, the peeling progressing process is completed.

Each of the plurality of peeling development suction pads 9 has a rectangular suction portion (a portion in contact with the supporting glass substrate 3) elongated in the Y direction, and adsorbs substantially the entire width of the supporting glass substrate 3 along the Y direction. It is a single suction pad that can be

Here, the distance between the suction pad 6 for starting point formation and the suction pad 9 for peeling progress along the X direction, and the space S2 between the suction pads 9 for peeling progress adjacent to each other along the X direction Is preferably in the range of 0 mm to 100 mm. Further, the width W along the X direction of the suction portion of each peelable growth suction pad 9 is preferably in the range of 20 mm to 80 mm, and more preferably in the range of 20 mm to 40 mm. The distance and speed at which each peeling progress suction pad 9 is moved in the Z direction at the time of execution of the peeling growth step is the distance or speed at which each suction point forming suction pad 6 is moved in the Z direction at the time of formation of the peeling starting point 4. It is preferable to set the same conditions as the speed.

In addition, in this embodiment, although the single suction pad long to a Y direction is used as the peeling pad for adsorption | suction advancing 9, it is not this limitation. As a modification of the present embodiment, a plurality of suction pads arranged in a line along the Y direction may be used. In this case, an ejector-type suction pad may be used as in the case of the above-described suction-point-forming suction pad 6. Even in this case, it is preferable that the area of the suction portion of the suction pad 6 for formation of the starting point be smaller than the area of the suction portion of the suction pad 9 for separation and growth. Specifically, the diameter D of the suction portion of the suction pad 6 for starting point formation is preferably 15 mm to 25 mm, and the diameter of the suction portion of the suction pad 9 for separation and growth is preferably 30 mm to 50 mm. The diameter D of the suction portion and the area of the suction portion of the suction pad (the suction pad 6 for formation of the starting point and the suction pad 9 for peeling) and the area of the suction portion are the diameter and area of the state not in contact with the target object (supporting glass substrate 3) Do.

Moreover, in this embodiment, although the peeling expansion process is performed using the adsorption pad 9 for several peeling expansion, it is not this limitation. As a modified example of the present embodiment, the peeling and advancing step may be performed by pushing a resin sheet (for example, Teflon sheet (registered trademark)) along the interface between the two substrates 2 and 3.

As described above, when the peeling and developing process is completed, the peeling process including the peeling starting point forming process and the peeling and growing process is also completed. And a peeling process is completed and all the processes of the manufacturing method of the glass substrate concerning this embodiment are completed.

Here, the method for producing a glass substrate according to the present invention is not limited to the aspect described in the above embodiment. For example, in the above embodiment, the glass substrate (the original glass film) has a rectangular shape, but the glass substrate is not rectangular as long as it has a side portion at the outer peripheral edge. Even if this is the case, it is possible to apply the present invention. As an example, the glass substrate may be polygonal (pentagon, hexagon, etc.), trapezoid, etc.

Moreover, in said embodiment, although the suction pad for origin formation and the suction pad for peeling advance become a mode which adsorbs a support glass substrate among a glass substrate and a support glass substrate, it is not this limitation, and glass The substrate may be adsorbed.

Reference Signs List 1 laminate 2 glass substrate 2x long side 2y short side 2ya end 2yb end 3 supporting glass substrate 4 peeling starting point 5 knife 6 suction pad for forming starting point suction pad 6a to 6e suction pad for forming starting point 7 film sheet 9 peeling progress Suction Pad L Peeling Boundary Line T Peeling Direction

Claims (10)

1. A laminate producing step of producing a laminate by laminating a flexible glass film and a supporting glass substrate on each other, and a process of forming an electronic device material on the glass film in the laminate to form a glass substrate A method of manufacturing a glass substrate, comprising: a treatment step; and a peeling step of peeling and separating both the glass substrate and the support glass substrate.
   Furthermore, the peeling step includes a peeling starting point portion forming step of forming a peeling starting point portion in which the both substrates are partially peeled,
   In the peeling starting point forming step, the two substrates are sequentially peeled along the side portion starting from the end of the side portion provided at the outer peripheral end of the glass substrate, thereby along the entire length of the side portion A method of manufacturing a glass substrate, comprising forming the peeling starting point portion in which the both substrates are partially peeled.
2. Furthermore, the peeling process advances the peeling of both substrates starting from the peeling starting point portion by advancing the peeling boundary line which becomes the boundary between the portion where both substrates have been peeled and the portion where it has not been peeled in the peeling direction. Including an advancing peeling process,
   The method for manufacturing a glass substrate according to claim 1, wherein in the peeling and advancing step, the peeling is allowed to progress while maintaining the state in which the side portion and the peeling boundary extend in parallel.
3. In the peeling starting point portion forming step, a plurality of suction pads for starting point formation movable in a separating direction away from the other in a state where one of the two substrates is adsorbed are arranged in a line, and the suction pads for forming the plurality of starting points The method of manufacturing a glass substrate according to claim 2, wherein the peeling starting point portion is formed by moving in the separation direction in order along the same line.
4. In the peeling starting point forming step, only one end of both ends of the side is used as the starting point of the peeling starting point, and the other end side from the starting point forming suction pad disposed on one end of the side The method for manufacturing a glass substrate according to claim 3, wherein the method is moved in the separating direction in order to the suction pad for formation of the starting point disposed on the substrate.
5. In the peeling and advancing step, on the downstream side of the plurality of suction pads for starting point formation on the downstream side in the peeling direction, a plurality of peeling and moving can move in a separating direction away from the other in a state where one of the substrates is adsorbed. Suction pads are arranged side by side in the peeling direction, and the plurality of peeling suction pads are moved in the separation direction sequentially in accordance with the same, thereby promoting peeling of the both substrates The manufacturing method of the glass substrate of claim 3 or 4.
6. The method for manufacturing a glass substrate according to claim 5, wherein the area of the suction portion in the suction pad for starting point formation is smaller than the area of the suction portion in the suction pad for peeling and developing.
7. The method for producing a glass substrate according to claim 6, wherein a single suction pad capable of adsorbing substantially the entire width in the direction along the side portion of one of the two substrates is used as the suction pad for peeling growth. .
8. The glass substrate has a rectangular shape provided with relatively short short sides and relatively long long sides at the outer peripheral end,
   The glass substrate according to any one of claims 1 to 7, wherein in the peeling starting point forming step, the peeling starting point portion in which the both substrates are partially peeled is formed along the short side portion. Manufacturing method.
9. 9. The peeling starting point forming step according to any one of claims 1 to 8, wherein the starting point of the peeling starting point portion is formed by inserting a blade-like material between the two substrates. Method of manufacturing a glass substrate
10. A sheet-like member is interposed between the two substrates which are partially peeled off as the blade is inserted, before the blade is pulled out from the two substrates. The manufacturing method of the glass substrate of Claim 9.

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