WO2019048477A1 - Équipement de positionnement destiné à positionner un corps de fonction - Google Patents

Équipement de positionnement destiné à positionner un corps de fonction Download PDF

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Publication number
WO2019048477A1
WO2019048477A1 PCT/EP2018/073869 EP2018073869W WO2019048477A1 WO 2019048477 A1 WO2019048477 A1 WO 2019048477A1 EP 2018073869 W EP2018073869 W EP 2018073869W WO 2019048477 A1 WO2019048477 A1 WO 2019048477A1
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WO
WIPO (PCT)
Prior art keywords
positioning device
transfer
functional
positioning
coupling
Prior art date
Application number
PCT/EP2018/073869
Other languages
German (de)
English (en)
Inventor
Norbert Pinno-Rath
Original Assignee
Anton Paar Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anton Paar Gmbh filed Critical Anton Paar Gmbh
Publication of WO2019048477A1 publication Critical patent/WO2019048477A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4804—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/36—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission in which a servomotor forms an essential element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/08—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for interconverting rotary motion and reciprocating motion
    • F16H25/14—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for interconverting rotary motion and reciprocating motion with reciprocation perpendicular to the axis of rotation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/10—Control of position or direction without using feedback

Definitions

  • the invention relates to a positioning device, a
  • An Atomic Force Microscope (AFM) is used
  • a measuring probe for example, a bending beam, which is also referred to as cantilever
  • a nanoscopically small needle also referred to as a probe tip or probe tip
  • the deflection of the cantilever based on the interaction of the cantilever with the surface detected.
  • the deflection of the cantilever is recorded depending on the position or the tracking of the probe.
  • Deflection of the cantilever or the tip can be measured capacitively (in particular piezoelectrically) or by means of optical sensors.
  • This method allows a structural analysis of the surface of the sample up to atomic resolution.
  • the distance of the cantilever to the surface of the sample to be examined can be set very accurately.
  • various measurement methods such as the contact mode (contact mode), non-contact mode (non contact mode), tactile AFM mode (tapping mode), etc. can be realized.
  • a positioning device for positioning a functional body (in particular for a scanning probe microscope), wherein the positioning device comprises a base body (for example a stator) with a guide surface, a transmission body (in particular for transmitting a positioning force), which is driven by a driving force (For example, which is manually provided by a user or preferably by an automatic drive means) relative to the body in combined rotational and translational movement and has a tread and a transfer surface, and a coupling body (in particular a body for coupling the transfer body with the Functional body) which is operatively coupled to the transfer surface with the transfer body and which is operatively coupled to the functional body to the translational movement of the effetsungsk redirect rpers to the function field (ie, to change the direction of a driving force for the positioning of the functional component) and the functional member thereby to position, wherein the guide surface of the base body and the running surface of the transfer body are arranged in operative connection with each other, so that the transfer
  • a functional arrangement which has a positioning device with the features described above and the functional body, which is operatively coupled to the coupling body (in particular by means of a carriage of the positioning device, the actual mechanical interface of the
  • Positioning device can form the functional body).
  • the scanning probe microscope comprises a movable probe body with a measuring tip for scanning the surface of the sample body and a positioning device with the features described above or a functional arrangement with the features described above for positioning a functional body of the
  • a driving force is applied to a transfer body having a tread and a transfer surface to bring the transfer body into combined rotational and translational motion relative to a main body having a guide surface, and translating the transfer body to the functional body for positioning the transfer body
  • Functional body is deflected by means of a coupling body, which at the Transfer surface is operatively coupled to the transfer body and which is operatively coupled to the functional body, wherein the guide surface of the
  • Body and the tread of the transfer body are brought into operative connection with each other in such a way that the transfer body is guided during its combined rotational and translational movement by means of the body.
  • a positioning device having the above-described features for adjusting or controlling an electromagnetic beam in one
  • a functional body is understood to mean, in particular, a body or component with the aid of which it is possible to perform a desired function in a measuring device or the like, in particular in a scanning probe microscope
  • a functional body is therefore a component of a measuring device, in particular a scanning probe microscope, which is positioned in a predeterminable and precise manner by means of the positioning device
  • Functional body is an optical mirror with which an electromagnetic beam (in particular a laser beam) is deflected in a targeted manner within the scope of a measurement with a scanning probe microscope
  • Positioning device can be precisely positioned according to an exemplary embodiment.
  • the term "scanning probe microscope” is understood to mean, in particular, a microscope in which an image or other surface information of a specimen is not generated with an optical or electron optical image but via the interaction of a measuring probe with the specimen Sample surface is scanned point by point using this probe in a raster process. The measured values resulting for each individual point can then be combined to form a picture or evaluated in another way.
  • body of a probe can be understood as meaning a body with the aid of which it is possible to gain access to an item to be analyzed, miniaturized and / or restricted or difficult to access such a probe body in a coupled with a positioning device
  • Measuring device for example, but not limited to, a scanning probe microscope serve as a probe during a measuring operation.
  • a scanning probe microscope serve as a probe during a measuring operation.
  • Positioning device for positioning a particular very light
  • Coupling body is subjected to a positioning force, which is the Coupling body in turn receives from a combined rotational and translational movement performing transfer body, the above-described stick-slip effect can be reduced.
  • the translational movement of the transfer body leads to the actual repositioning of the
  • the coupling body moves relative to the transfer body not only translationally, but at the same rotational, along a very long trajectory.
  • the system always remains in an operating state with effective sliding friction force
  • Transfer body (for example, with a stepper motor) takes place incrementally. In this way, a very accurate and at the same time structurally very simple positioning of a functional body is possible. By deflecting the acting driving force on the transfer surface of the transfer body also by the geometry of the transfer body precisely definable translation is defined, which determines the accuracy of the positioning of the
  • one exemplary embodiment one
  • Positioning created, which is particularly advantageous for the precise linear displacement of small masses along small path lengths.
  • a positioning device for a scanning probe microscope is used, for example, to accomplish the displacement of mirrors for controlling and deflecting a laser beam, which detects movements of a probe body.
  • a low-cost and space-saving positioning device is provided with which a sufficiently large linear displacement of a functional body in sufficiently finely subdivided steps is made possible. Simultaneously, with such a positioning of the Stick-slip effect are largely suppressed. In particular, ask
  • a positioning device ready, which allows an exact adjustment of optical elements (in particular of mirrors in the beam path of a laser) in a scanning probe microscope.
  • a transmission body for example a piston seated on a spindle and driven, for example, by a motor, is preferably used.
  • Positioning device implemented mechanism (in particular a spindle) a translation of this rotation in a translational movement.
  • a coupling body sitting on the surface of the transmission body preferably transversely to the feed direction of the transmission body (for example a transverse axis) thereupon performs a predeterminable movement, preferably a linear movement upwards or downwards.
  • a tilting or rotary movement of the functional body can be generated.
  • Positioning device for example, a pitch of the spindle
  • adjustable reduction is definable.
  • a precise movement of the functional body over very small distances can be made possible.
  • Exemplary embodiments of the invention are particularly advantageously applicable wherever small or light functional body to move or turn precisely, so for example in the
  • the base body may have a cavity in which the transfer body is at least partially disposed.
  • the cavity may be formed as a simple cylindrical bore in a blank. This leads to a compact configuration of the positioning device and a simple manufacturability.
  • the guide surface may be formed as at least a portion of an inner wall, in particular as at least a portion of a circular cylindrical surface of the inner wall of the cavity.
  • the base body surrounds the transmission body, which can thereby be mechanically protected and accommodated in a compact manner.
  • such a geometry causes a precise guidance of the transmission body through the main body.
  • the tread may be formed by at least a portion of an outer wall and / or by at least a portion of an inner wall of the transfer body.
  • Form body This additionally promotes a space-saving configuration of the positioning device.
  • an inner wall of the transfer body can also completely or partially form the running surface and therefore the coupling surface to the main body.
  • the base body for example, at least partially within the
  • the tread may be at least two apart from each other along a rotational axis of the transfer body
  • Tread sections have the same outer diameter.
  • the spaced tread portions may have circular cylindrical outer surfaces with the same circular diameter.
  • a recess may be formed between the spaced tread portions in the region of the transfer surface. This indentation can be used to receive the coupling body and thus to a particularly space-saving positioning. This also allows a favorable production of the positioning with two separate circular cylindrical lateral surfaces as
  • Tread portions and a particular cone-shaped power transmission section arranged therebetween Tread portions and a particular cone-shaped power transmission section arranged therebetween.
  • the running surface may be at least partially formed by at least one circular cylindrical lateral surface of the transmission body.
  • two opposing axial end portions of the transfer body formed as a circular cylinder and / or circular hollow cylinder, a low-friction coupling with the guide surface of the
  • the transfer surface may be at least partially opposite a rotational axis of the transfer body be inclined, in particular at least partially formed by at least one conical outer surface of the transfer body.
  • Transmission body acting driving force can be adjusted precisely in a positional shift and / or rotation of the functional body.
  • the inclination in a transfer section of the transfer body can be set constant, which corresponds to a conical or frusto-conical geometry of the transfer section of the transfer body. This advantageously allows a linearly translated movement of the functional body during the positioning process. If in other applications, however, a non-linearly translated movement of the functional body is desired, this can be done in a structurally simple manner by a non-constant inclination of the preferably rotationally symmetrical transmission body in its
  • Transfer surface then also have a plurality of opposite the axis of rotation differently inclined sections, illustratively, for example, each seized and stepped truncated cone sections of different pitch. It is also possible to design the lateral surface of the force transmission surface of the transmission body concave or convex to the
  • Positioning device to impose a non-linear positioning.
  • the coupling body as
  • the coupling body can then be formed as a cylindrical shaft. In other applications, however, it may be advantageous to the coupling body geometrically different
  • the positioning device may comprise an automatic drive device, in particular a motor, further in particular a stepper motor, arranged for driving, in particular for rotatory driving, of the transmission body.
  • an automatic drive device in particular a motor, further in particular a stepper motor, arranged for driving, in particular for rotatory driving, of the transmission body.
  • a stepper motor arranged for driving, in particular for rotatory driving, of the transmission body.
  • stepper motors which can be integrated with reasonable space requirements and little effort in the positioning, lead due to the described effective
  • Incremental motion characteristic to no pronounced jerky shifts of the functional body is Incremental motion characteristic to no pronounced jerky shifts of the functional body.
  • the positioning device can have a
  • Such a compensation coupling can advantageously at least partially compensate for a possible parallel axial offset between the drive device and the transfer body. As a result, it is unnecessary to ensure an exact alignment of the axis of the drive device and the axis of the transmission body, which is designed, for example, as a conical body. Instead, the balancing clutch causes a partial or even complete compensation of a possible parallel
  • Positioning device can be implemented.
  • an "Oldham coupling” which can also be referred to as a cross-slotted clutch or cross-slide clutch, can in the context of the present application a non-switchable, torsionally rigid coupling can be understood that can compensate for a radial offset of two parallel waves.
  • An Oldham coupling may in particular comprise three individual parts: two discs, which may be referred to as
  • Clutch hubs may be formed on the respective
  • a third disc can be stored as a sliding joint in the form of a cross-plate and by two mutually orthogonal tongue and groove connections between the clutch hubs.
  • the positioning device may comprise a spindle, which is at least partially inserted into a recess in the transmission body.
  • a spindle can be formed as a stationary mounted or strongly coupled to the body component, which is operatively coupled to the rotatable and translationally mounted transfer body.
  • the spindle may be formed, which was caused by a drive device
  • the corresponding interaction surfaces of spindle and transmission body may also be along an outer diameter of the Transmission body be arranged. However, then occur higher friction moments than in the preferred previously described
  • the positioning means may comprise a spindle with a spindle thread adapted to cooperate with a mating thread of the transmission body to move the spindle
  • Transfer bodies can thus be replaced by two cooperating or
  • the spindle thread an external thread and the spindle thread
  • Mating thread be an internal thread. Such a design is
  • the positioning device can be set up, a functional body operatively coupled to the coupling body only along exactly one predetermined direction of movement
  • Carriage of the positioning device on which the functional body can be mounted in all directions impossible, with the exception of the predetermined direction of movement. Also, then a rotation of the Function body or the carriage are made impossible by a corresponding storage.
  • the positioning device for translational movement of the carriage or the functional body a
  • Ensures parallel position of a rigid connection between the coupling body on the one hand and the functional body or the carriage of the positioning on the other hand, can define a single preferred direction along which the positioning can be moved by the positioning.
  • the positioning device may be configured to tilt a function body operatively coupled to the coupling body about a predetermined tilting axis.
  • the coupling body may be configured to tilt a function body operatively coupled to the coupling body about a predetermined tilting axis.
  • Positioning device for tilting have a rotatable about a hinge lever. Such an embodiment is shown in FIG.
  • Positioning device have at least one solid-state joint for setting a coupling between the coupling body and a functionally coupled to the coupling body functional body.
  • Solid state joint can be configured.
  • a "solid-state joint” can be understood to mean, in particular, a region of a component which allows a relative movement (in particular translatory movement or rotation) between two rigid body regions by bending
  • the joint function is clearly achieved in a solid-state joint by a region of reduced flexural rigidity relative to two adjacent regions of higher flexural stiffness
  • the reduced flexural stiffness can be achieved, for example, by a local reduction in cross-section or a local configuration of the shape Section of the component to be generated.
  • Functional body is carried out by a soft elastic movement on a targeted mechanically weakened portion of the positioning.
  • the unwanted stick-slip effect can be suppressed particularly effectively, since the joint function can be accomplished without jerking and thus without abrupt transitions between static friction and sliding friction.
  • the implementation of a solid-state joint in the positioning device therefore allows, in particular, the implementation of a less complicated and compact stepping motor as a drive device in the positioning device, without any fear of undesired sudden changes in the position of the functional element.
  • the solid-body joint may be coupled to the main body and the coupling body or arranged therebetween.
  • the main body can be rigid with the main body
  • the functional body may be an optical component (in particular a mirror or a lens), a specimen, a sensor or a measuring sensor.
  • an optical component in particular a mirror or a lens
  • a specimen in particular a specimen, a sensor or a measuring sensor.
  • Positioning device can be implemented with advantage everywhere where relatively lightweight components to be moved by relatively small distances. In such applications, the positioning device unfolds its advantages in a particularly pronounced manner.
  • the functional body may be rigidly connected to the coupling body.
  • This rigid connection can be implemented, for example, by a carriage of the positioning device, which in turn can be rigidly connected to the coupling body.
  • the functional body can be mounted on this slide.
  • a deflection mirror for example a slide
  • the scanning probe microscope can have a further functional body on a further positioning device with the features described above, which is also designed as a deflection mirror and is also mounted for deflecting the electromagnetic beam.
  • the deflection mirrors can be moved by means of the positioning devices in such a way that the electromagnetic beam propagates to the respective deflection mirrors along the respective travel direction.
  • FIG. 11 and FIG. Such an embodiment is shown in FIG. 11 and FIG. In such an implementation, one laser beam or another
  • electromagnetic radiation can be moved precisely (for example in one plane). This allows in particular an adjustment for aligning a laser beam at the beginning of a measurement with an associated
  • Scanning probe microscope be designed as an atomic force microscope.
  • Atomic Force Microscope also called Atomic Force Microscope or Atomic Force Microscope (AFM)
  • Atomic Force Microscope is a special scanning probe microscope. It serves as a tool in surface chemistry and surface characterization and is used for mechanical scanning of surfaces and the measurement of atomic forces on the nanometer scale.
  • the invention relates to a
  • Scanning probe microscope English Scanning Probe Microscope, short SPM
  • atomic force microscope English Atomic Force Microscope, short AFM
  • SAXS small angle scattering
  • XRD X-ray diffraction
  • Scanning microscope or other device for surface inspection for example, a nanoindenter or a scratch tester
  • FIG. 1 shows a scanning probe microscope with one
  • Positioning device having functional arrangement according to a
  • FIG. 2 shows a cross-sectional view of a positioning device for
  • FIG. 2A shows a detail of the positioning device according to FIG. 2 in FIG.
  • FIG. 3 shows a transmission body of a positioning device according to an exemplary embodiment of the invention.
  • FIG. 4 shows a transmission body of a positioning device according to another exemplary embodiment of the invention.
  • Figure 5 shows a cross-sectional view of a positioning device for positioning of a laser beam deflecting optical component according to another exemplary embodiment of the invention, in which the component is subjected to a rotational movement.
  • FIG. 6 shows a spatial view of a positioning device according to an exemplary embodiment of the invention.
  • FIG. 7 and FIG. 8 show cross-sectional views of the positioning device according to FIG. 6.
  • FIG. 9 and FIG. 10 show cross-sectional views of FIG.
  • Coupling body (see Figure 9) and in the extended state of the coupling body (see Figure 10).
  • Figure 11 shows a part of a scanning probe microscope with a
  • FIG. 12 shows a detail of FIG. 11.
  • a positioning device for positioning a functional body in which by means of a rotating and translationally displaced simultaneously
  • Transmission body in a defined manner guided a driving force in a position of the functional body changing force re-directed and can be reduced in a predeterminable manner. Because of this precisely defined kinematics (especially long rotation path in combination with shorter
  • Translationsweg can unwanted jerky steps or jumps of the Functional body, as in a transition between static friction and
  • a solid-state joint for example, in the form of a targeted mechanical weakening of a component of
  • Positioning device instead of a rolling or sliding joint.
  • a soft elastic movement achieved thereby avoids transitions between static friction and sliding friction and thus the undesirable stick-slip effect.
  • stepper motors with defined step angles can be implemented, which can be translated into the smallest possible linear movement.
  • the translation can be accomplished, for example, by a spindle that rotates in one
  • FIG. 1 shows a Scanning Probe Microscope (SPM) or
  • Scanning probe microscope 1 according to an exemplary embodiment of the invention, which is designed as Atomic Force Microscope (AFM).
  • AFM Atomic Force Microscope
  • a cantilever deflection ie a change in position or a change in shape of a measuring probe 11 (which is also referred to as cantilever), is detected by means of an optical sensor system.
  • the measuring probe 11 is made of a measuring tip 5 and a bearing this Probe body 7 is formed.
  • the probe body 7 is mounted on a mounting device 4.
  • An electromagnetic radiation source 2 for example a
  • Laser source transmits an electromagnetic primary beam 13 (in particular a light beam, for example a laser beam) over a
  • Focusing device 12 (which may be configured as an arrangement of one or more optical lenses) on the measuring probe 11.
  • the electromagnetic secondary beam 3 reflected by the measuring probe 11 propagates to a photo- and position-sensitive detector 10 (in particular, the electromagnetic secondary beam 3 can be detected by means of one or more Deflection mirror 14 or one or more other optical deflection elements are deflected to the position-sensitive detector 10).
  • a displacement device 80 for example a piezoactuator, which can effect a change in position in the vertical z-direction according to FIG. 1
  • a displacement device 80 for example a piezoactuator, which can effect a change in position in the vertical z-direction according to FIG.
  • Detector signal can then be processed in an evaluation unit 8.
  • the resulting high-resolution image of the surface of the sample body 6 can then be displayed by means of a display device 9.
  • a surface of the sample body 6 can be scanned with the measuring tip 5 (that is to say a sensitive tip of the measuring probe 11).
  • a sample table is movable by means of actuators in the horizontal plane (that is to say in an x-direction orthogonal to the z-axis and y-direction) in accordance with FIG.
  • the scanning probe microscope 1 thus serves to determine surface information with respect to the sample body 6 by means of scanning scanning of a surface of the sample body 6 by means of the Measuring Probe 11.
  • a displacement measuring device 50 may be provided for measuring a displacement information of the probe body 7.
  • the scanning probe microscope 1 shown in FIG. 1 has a functional arrangement 112 which has a
  • Positioning device 60 positions according to Figure 1, the deflection mirror 14 (the latter is also referred to as a functional body 62, which performs the function of deflecting the electromagnetic secondary beam 3). According to FIG. 1, the illustrated positioning device 60 is thus used to control the electromagnetic secondary beam 3 in one
  • the positioning device 60 is provided to redirect the electromagnetic primary steel 13 before it hits the probe body 7.
  • FIG. 11 and FIG. 12 it is also possible (see FIG. 11 and FIG. 12) for two (or more) positioning devices 60 for positioning two (or more) deflecting mirrors 14 and / or other functional bodies 62 of FIG. 1
  • Scanning probe microscope 1 provide. For example, a positioning of the measuring probe 11 and / or the specimen 6 by means of such a
  • Positioning device 60 possible.
  • positioning devices 60 which can be used according to FIG. 1 are described in more detail below:
  • FIG. 2 shows a cross-sectional view of a positioning device 60 for positioning a laser beam (see electromagnetic
  • deflecting optical component such as the deflection mirror 14 shown in Figure 1
  • the component is subjected to a pure longitudinal movement.
  • the positioning device 60 more generally serves to position a functional body 62 of a scanning probe microscope 1, shown schematically in FIG. 2, and has a static main body 64 with it a guide surface 66.
  • the main body 64 may be made of a cylindrical blank having a circular cylindrical axial
  • Through hole 120 is provided, for example, a bore.
  • a recess 122 can be formed in a lateral surface of the base body 64. By means of the recess 122, a connection between a coupling body 74 described in more detail below and the functional body 62 is created.
  • the main body 64 thus has a cavity 76 in the form of the through hole 120, in which the
  • Transmission body 68 is arranged.
  • a preferably designed as a stepping motor drive means 96 is coupled to the transmission body 68 by means of a here designed as Oldham coupling compensating coupling 98.
  • the compensating clutch 98 is equal to a possible parallel axial offset between the axis of the
  • the main body 64 is rigidly coupled to the drive device 96.
  • the drive device 96 can drive the transfer body 68 to perform a rotational movement.
  • Base 64 performs a combined rotational and translational movement.
  • a running surface 70, the transfer body 68 is brought into operative connection with a corresponding guide surface 66 of the base body 64. More specifically, the guide surface 66 of the body 64 and the tread 70 of the transfer body 68 are operatively connected to each other, so that the transfer body 68 during its combined rotation and Translational movement is guided by means of the base body 64 and held in an axially parallel position relative to the base body 64.
  • a transfer surface 72 of the transfer body 68 redirects the direction of the driving force acting on the transfer body 68 (which is generated by the drive device 96 in cooperation with the spindle 100) and transfers it to a coupling body 74
  • Transfer surface 72 is operatively coupled to the transfer body 68.
  • the coupling body 74 is operatively coupled to the functional body 62 in order to control the translational movement of the transmission body 68 on the
  • the coupling body 74 is formed as Querachsenanalysis or shaft or cylinder body, which is orthogonal to the
  • Rotation axis 86 of the transfer body 68 and perpendicular to the image plane of Figure 2 extends.
  • the coupling body 74 it is also possible to form the coupling body 74 as a ball.
  • the transfer body 68 carries out a combined rotational and translational movement, the coupling body 74 slides along the transfer surface 72 and is translationally displaced in the vertical direction 124 according to FIG.
  • Transfer surface 72 spaced tread portions 88, 90 is formed.
  • the spaced tread portions 88, 90 have the same and identical
  • cylindrical through hole 120 correspond. This allows a production of the positioning device 60 with little effort and also provides a Reliable and low-friction guidance of the transfer body 68 inside the body 64 sure.
  • tread portions 88, 90 as lateral surfaces of
  • the interposed transfer surface 72 is formed as an inclined lateral surface of a cone portion.
  • the tread 70 is thus formed according to Figure 2 by two axially spaced-apart circular cylindrical lateral surfaces of the transfer body 68.
  • the transfer surface 72 is inclined relative to the axis of rotation 86 of the transfer body 68 with a constant pitch in a cross-sectional view and is characterized by the in
  • Axial direction central conical surface of the transfer body 68 is formed.
  • the conical surface causes a constant translation of the longitudinal movement of the transfer body 68 in the vertical movement of the functional body 62 (see reference numeral 124).
  • the spindle 100 is inserted into a central recess 94 in the transfer body 68.
  • the recess 94 may be provided, for example, as a bore in the transfer body 68.
  • An axis of symmetry of the recess 94 can with the rotation axis 86th
  • the spindle 100 is provided with a spindle thread 102 in the form of an external thread, which is adapted to cooperate with an internally threaded counter thread 104 of the transfer body 68 to convert the transfer body 68 in the combined rotational and translational movement.
  • This coupling between the spindle 100 and the transfer body 68 is very frictional.
  • Interaction surfaces (spindle thread 102, mating thread 104) of the spindle 100 and the transmission body 68 can this resulting friction torque but kept low and friction losses can be reduced.
  • the main body 64 is rigidly coupled to the spindle 100.
  • the positioning device 60 is further arranged, one with the
  • Coupling body 74 operatively coupled functional body 62 which can be mounted on a carriage 126 of the positioning device 60, only along a predetermined direction of movement (see reference numeral 124) to move translationally.
  • the positioning device 60 on a parallel guide 106, which advantageously by means of several
  • FIG. 2A shows a detail of FIG
  • Each solid-state joint 118 is a bendable or
  • the parallel guiding device 106 is thus compensatable connected to the base body 64 and the coupling body 74.
  • Coupling body 74 connected.
  • the positioning device 60 shown in FIG. 2 can form a stage and be formed from a guide section and a drive section.
  • the positioning device 60 is particularly well suited for the precise positioning of small masses (such as a deflection mirror 14, lenses 12 or a small sample body 6).
  • the stage enables translation in one
  • a simple stepping motor can be used as drive means 96.
  • the described stage can be used in the measuring head of the scanning probe microscope 1 according to FIG. 1, for example, in order to control the position of a laser beam (see electromagnetic primary beam 3 or electromagnetic secondary beam 13).
  • two of these positioning devices 60 can each be provided with deflecting mirrors 14 or coupled thereto. A displacement of this deflection mirror 14 has a Parallel salting of the laser beam in two spatial directions result (see Figure 11 and Figure 12).
  • a transfer body 68 designed as a conical piston according to FIG. 2 can be implemented whose outer contour consists of two cylindrical tread portions 88, 90 and a conical conical surface arranged therebetween in the axial direction
  • Transfer surface 72 may be formed.
  • the transfer body 68 is formed via the compensating coupling 98 with the engine here
  • the carriage 126 is the component that is to be moved in the end defined. It is connected via the parallel guide 106 with the base body 64, which ensures that the carriage 126 is connected in all directions except the direction of movement according to reference numerals 124 as stiff as possible with the main body 64.
  • Figure 2 formed as a transverse axis coupling body 74 is fixed and immovably connected to the carriage 126.
  • the translation of the transmission body 68 embodied as a conical piston leads via the conical surface to a displacement of the coupling body 74 formed as a transverse axis and thus of the carriage 126 in the direction of movement (see reference numeral 124).
  • a special feature of this path control is now the combination of coarse and fine
  • the design of the stage or the positioning device 60 is very variable. If you choose, for example, the conical slope flatter, even finer resolution is possible with the same size and less stroke. If you make the piston longer and leave the cone slope, you can increase the stroke at the same resolution. Furthermore, in the configuration of the central portion or the transfer surface 72 of the transfer body 68, it is possible to deviate from the shape of an ideal cone in order to realize a different resolution or reduction in different areas of the travel path.
  • the positioning device 60 or the stage may have a stroke of 2 mm. More generally, for example, the stroke may be in a range between 200 ⁇ m and 10 mm, in particular in a range between 1 mm and 5 mm.
  • a drive device 96 which as
  • Microstepping motor can be formed with 24 full steps per revolution, a configuration with a stroke of 2 mm results in a resolution of 3.5 pm per full step or about 880 nm per quarter step.
  • the transfer body 68 may be composed of three sections: The central conical surface in the axial direction forms the transfer surface 72 and controls the displacement of the transverse axis formed here
  • Coupling body 74 The tread 70, the transfer body 68 is used during the combined translation / rotational movement of the transfer body 68 as a guide.
  • the threaded surface of the counter thread 104 of the Transmission body 68 provides with a fixed counterpart (see spindle 100 with spindle thread 102) together for the superimposed longitudinal displacement of the rotating transmission body 68.
  • Figure 2 are the
  • Tread portions 88, 90 The threaded surface of the counter thread 104 is designed according to Figure 2 as an internal thread, but can also be realized as an external thread.
  • FIG. 3 shows a transmission body 68 of a positioning device 60 according to an exemplary embodiment of the invention.
  • the tread 70 is formed by two axially spaced portions of an outer wall of the transfer body 68 (see tread portions 88, 90). Between the tread portions 88, 90, the transfer surface 72 is arranged as a conical surface.
  • the threaded surface of the counter-thread 104 is according to Figure 3 on an inner surface of the transfer body 68th
  • FIG. 4 shows a transmission body 68 of a positioning device 60 according to another exemplary embodiment of the invention.
  • the tread 70 is shown in FIG. 4 by a
  • Part of an inner wall of the transfer body 68 is formed.
  • Counter thread 104 is configured according to FIG. 4 as in FIG.
  • FIG. 5 shows a cross-sectional view of a positioning device 60 for positioning a laser beam (see electromagnetic
  • Embodiment of the invention in which the component is subjected to a rotational movement.
  • the embodiment according to FIG. 5 differs from that according to FIG. 2 essentially in that the positioning device 60 according to FIG. 5 is designed as a tilting stage, whereas the positioning device 60 according to FIG.
  • Positioning device 60 is formed according to Figure 2 as a linear stage.
  • the positioning device 60 according to FIG. 5 is set up to tilt a functional body 62, which is actively coupled to the coupling body 74 by means of the carriage 126, about a predetermined tilting axis (see turning arrow 128).
  • the positioning device 60 is set up to tilt a functional body 62, which is actively coupled to the coupling body 74 by means of the carriage 126, about a predetermined tilting axis (see turning arrow 128).
  • the rotary joint 108 may be formed as a solid-state joint 118.
  • a precision tilting stage can be provided by the parallel guide 106 being driven by the lever 110 with a (preferably solid-based, see solid state joint 118).
  • Swivel 108 is replaced. In this way, by the displacement of the turn formed as a transverse axis coupling body 74 instead of a
  • FIG. 6 shows a three-dimensional view of a positioning device 60 according to an exemplary embodiment of the invention, which, as shown in FIG. 2, is designed as a microlinear stage.
  • Figure 7 and Figure 8 show
  • FIG. 9 and 10 show additional cross-sectional views of the positioning device 60 according to FIG. 6 in a retracted state (see FIG. 9) and in an extended state (see FIG. 10).
  • the profiles 130 are formed and, for example, designed as struts profiles 130 which can be attached to the positioning device 60 (in particular screwed) can be.
  • the profiles 130 have at their end portions or in the region of their attachment to the positioning device 60 on flat portions, which are indicated in Figure 6 in the form of circles. Between the flat sections, the profiles 130 have angled regions (in particular C-shaped regions). The angled regions have a higher rigidity than the flat sections. As a result, when a force is applied to the profiles 130, the flat portions are elastically bent, whereas the angled portions essentially free from bending or being bent much less than the flat sections. Consequently, the flat portions of the profiles 130 act as solid joints 118 with the advantageous effects described above.
  • Figure 11 shows a part of a scanning probe microscope 1 with a
  • FIG. 12 shows a detail of FIG. 11.
  • first functional body 62 may at a first
  • electromagnetic beam 13 may be mounted on a not shown in Figure 11 and Figure 12 probe body 7.
  • the illustrated functional arrangement 112 has a further functional body 62 on a further positioning device 60, wherein the further functional body 62 is formed as a further deflecting mirror 116 and also for deflecting the electromagnetic beam 13 on the probe body 7 at the other
  • Positioning device 60 is mounted.
  • the two deflecting mirrors 114, 116 are movable by means of the positioning devices 60, 60 such that the
  • two stages or positioning devices 60 are used for the purpose of aligning a laser beam, more precisely for positioning the point of intersection of a measuring probe plane 132 (or cantilever plane, ie a plane in which the measuring probe with the probe body 7 is substantially arranged) with the electromagnetic beam 13 (hereinafter
  • Positioning devices 60 each provided with a deflection mirror 114, 116, wherein the deflection mirrors 114, 116 are arranged so that they
  • the laser spot 134 assuming a stage displacement of 2mm, can be positioned within a 2mm square side square area.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

L'invention concerne un équipement de positionnement (60) destiné à positionner un corps de fonction (62), en particulier pour un microscope à sonde locale (1), l'équipement de positionnement (60) comportant un corps de base (64) pourvu d'une surface de guidage (66), un corps de transmission (68) qui peut être mis en mouvement combiné de rotation et de translation par rapport au corps de base (64) au moyen d'une force d'entraînement et comporte une surface de course (70) et une surface de transmission (72), et un corps de couplage (74) qui est couplé activement au corps de transmission (68) sur la surface de transmission (72) et qui peut être couplé activement au corps de fonction (62) afin de dévier le mouvement de translation du corps de transmission (68) sur le corps de fonction (62) et de positionner ainsi le corps de fonction (62), la surface de guidage (66) du corps de base (64) et la surface de course (70) du corps de transmission (68) étant agencées ensemble en liaison active, de sorte que le corps de transmission (68) peut être guidé pendant son mouvement combiné de rotation et de translation au moyen du corps de base (64).
PCT/EP2018/073869 2017-09-06 2018-09-05 Équipement de positionnement destiné à positionner un corps de fonction WO2019048477A1 (fr)

Applications Claiming Priority (2)

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ATA50748/2017 2017-09-06
ATA50748/2017A AT520419B1 (de) 2017-09-06 2017-09-06 Positioniereinrichtung zum Positionieren eines Funktionskörpers

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59115137A (ja) * 1982-12-22 1984-07-03 Hitachi Ltd ワ−ク取付台における微少角度調整装置
US4837445A (en) * 1988-04-04 1989-06-06 Mitsubishi Denki Kabushiki Kaisha Coarse adjusting device of scanning tunneling microscope
US5303035A (en) * 1992-05-04 1994-04-12 New Focus, Inc. Precision micropositioner
US5861550A (en) * 1997-10-14 1999-01-19 Raymax Technology, Incorporated Scanning force microscope

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2960423B2 (ja) * 1988-11-16 1999-10-06 株式会社日立製作所 試料移動装置及び半導体製造装置
JP2773783B2 (ja) * 1990-07-02 1998-07-09 住友重機械工業株式会社 回転並進ステージ装置
JP4354722B2 (ja) * 2003-03-27 2009-10-28 住友重機械工業株式会社 クランプ装置及びそれを備えたチルト機能付き鉛直方向駆動位置決め装置
JP5776812B1 (ja) * 2014-04-01 2015-09-09 日本精工株式会社 テーブル装置、及び搬送装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59115137A (ja) * 1982-12-22 1984-07-03 Hitachi Ltd ワ−ク取付台における微少角度調整装置
US4837445A (en) * 1988-04-04 1989-06-06 Mitsubishi Denki Kabushiki Kaisha Coarse adjusting device of scanning tunneling microscope
US5303035A (en) * 1992-05-04 1994-04-12 New Focus, Inc. Precision micropositioner
US5861550A (en) * 1997-10-14 1999-01-19 Raymax Technology, Incorporated Scanning force microscope

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