WO2019048477A1

WO2019048477A1 - Positioning device for positioning a functional body

Info

Publication number: WO2019048477A1
Application number: PCT/EP2018/073869
Authority: WO
Inventors: Norbert Pinno-Rath
Original assignee: Anton Paar Gmbh
Priority date: 2017-09-06
Filing date: 2018-09-05
Publication date: 2019-03-14
Also published as: AT520419A1; AT520419B1

Abstract

The invention relates to a positioning device (60) for positioning a functional body (62), in particular for a scanning probe microscope (1), wherein the positioning device (60) has a main body (64) with a guide surface (66), a transfer body (68) which can be brought into combined rotational and translational movement relative to the main body (64) by means of a drive force and has a running surface (70) and a transfer surface (72), and has a coupling body (74) which is operatively coupled to the transfer body (68) at the transfer surface (72) and which can be operatively coupled to the functional body (62) in order to deflect the translational movement of the transfer body (68) on to the functional body (62) and as a result to position the functional body (62), wherein the guide surface (66) of the main body (64) and the running surface (70) of the transfer body (68) are arranged in operative connection with one another such that the transfer body (68) can be guided during its combined rotational and translational movement by means of the main body (64).

Description

Positioning device for positioning a functional body

The invention relates to a positioning device, a

Functional arrangement, a scanning probe microscope, a method for

Positioning a functional body, as well as a use.

An Atomic Force Microscope (AFM) is used

mainly the lateral or vertical high-resolution examination of surfaces (in particular topographical investigations of surfaces). In this case, a measuring probe (for example, a bending beam, which is also referred to as cantilever) with a nanoscopically small needle (also referred to as a probe tip or probe tip) over the surface (that is, rasterized or scanned) and the deflection of the cantilever, based on the interaction of the cantilever with the surface detected. Depending on

Surface condition of the sample, the deflection of the cantilever is recorded depending on the position or the tracking of the probe. The

Deflection of the cantilever or the tip can be measured capacitively (in particular piezoelectrically) or by means of optical sensors. This method allows a structural analysis of the surface of the sample up to atomic resolution. The distance of the cantilever to the surface of the sample to be examined can be set very accurately. Thus, various measurement methods, such as the contact mode (contact mode), non-contact mode (non contact mode), tactile AFM mode (tapping mode), etc. can be realized.

For the precise operation of a measuring device, especially one

Scanning Probe Microscopes, is the accurate positioning of components of the

Measuring device required.

Positioning systems with piezoactuators are known which can effect very small linear displacements. However, if larger shifts are needed, a large number of actuators must be combined. In a further conventional embodiment, a piezoactuator is combined with a mechanical drive.

Furthermore, conventional drives are known which are geared down by gears or the like.

All these systems are associated with great effort or are complex in the control. You also need a lot of space.

Conventionally, the described positioning is possible only with moderate accuracy and / or great effort. It is an object of the present invention, a functional body, in particular on a scanning probe microscope, simple and accurate

to be able to position.

This object is solved by the objects with the features according to the independent claims. Further embodiments are described in the dependent claims.

According to an exemplary embodiment of the present invention, a positioning device is provided for positioning a functional body (in particular for a scanning probe microscope), wherein the positioning device comprises a base body (for example a stator) with a guide surface, a transmission body (in particular for transmitting a positioning force), which is driven by a driving force (For example, which is manually provided by a user or preferably by an automatic drive means) relative to the body in combined rotational and translational movement and has a tread and a transfer surface, and a coupling body (in particular a body for coupling the transfer body with the Functional body) which is operatively coupled to the transfer surface with the transfer body and which is operatively coupled to the functional body to the translational movement of the Übertragungsungsk redirect rpers to the function field (ie, to change the direction of a driving force for the positioning of the functional component) and the functional member thereby to position, wherein the guide surface of the base body and the running surface of the transfer body are arranged in operative connection with each other, so that the transfer body can be guided during its combined rotation and translation movement by means of the base body (in particular in order to purposefully restrict the spatial orientation and / or the translational freedom of movement of the transfer body) ,

According to a further exemplary embodiment, a functional arrangement is provided which has a positioning device with the features described above and the functional body, which is operatively coupled to the coupling body (in particular by means of a carriage of the positioning device, the actual mechanical interface of the

Positioning device can form the functional body).

According to another embodiment of the present invention, there is a scanning probe microscope for detecting surface information

with regard to a sample body by means of scanning of a surface of the sample body, wherein the scanning probe microscope comprises a movable probe body with a measuring tip for scanning the surface of the sample body and a positioning device with the features described above or a functional arrangement with the features described above for positioning a functional body of the

Scanning probe microscope.

According to another exemplary embodiment is a

Method for positioning a functional body (in particular a

In the method, a driving force is applied to a transfer body having a tread and a transfer surface to bring the transfer body into combined rotational and translational motion relative to a main body having a guide surface, and translating the transfer body to the functional body for positioning the transfer body

Functional body is deflected by means of a coupling body, which at the Transfer surface is operatively coupled to the transfer body and which is operatively coupled to the functional body, wherein the guide surface of the

Body and the tread of the transfer body are brought into operative connection with each other in such a way that the transfer body is guided during its combined rotational and translational movement by means of the body.

According to yet another exemplary embodiment, a positioning device having the above-described features for adjusting or controlling an electromagnetic beam in one

Scanning probe microscope used.

In the context of the present application, the term "functional body" is understood to mean, in particular, a body or component with the aid of which it is possible to perform a desired function in a measuring device or the like, in particular in a scanning probe microscope In the context of exemplary exemplary embodiments, a functional body is therefore a component of a measuring device, in particular a scanning probe microscope, which is positioned in a predeterminable and precise manner by means of the positioning device An example of such a device Functional body is an optical mirror with which an electromagnetic beam (in particular a laser beam) is deflected in a targeted manner within the scope of a measurement with a scanning probe microscope

Positioning device can be precisely positioned according to an exemplary embodiment.

In the context of the present application, the term "scanning probe microscope" is understood to mean, in particular, a microscope in which an image or other surface information of a specimen is not generated with an optical or electron optical image but via the interaction of a measuring probe with the specimen Sample surface is scanned point by point using this probe in a raster process. The measured values resulting for each individual point can then be combined to form a picture or evaluated in another way.

In the context of the present application is under the term

In particular, "body of a probe" can be understood as meaning a body with the aid of which it is possible to gain access to an item to be analyzed, miniaturized and / or restricted or difficult to access such a probe body in a coupled with a positioning device

Measuring device (for example, but not limited to, a scanning probe microscope) serve as a probe during a measuring operation. In the example of a

Scanning probe microscope, the probe body, a scanning of a

Serve surface of a specimen.

In the context of the present application, the term "embroidery

Slip effect "in particular a physical effect that can occur when an elastic system is to be moved against an existing solid friction in small increments.The force that is necessary to the

Overcoming static friction leads to a preload in the elastic system. If the static friction is overcome, the frictional contact is in a state of sliding friction, resulting in a sudden reduction of the frictional force. By reducing this drag, the bias in the system is also reduced

degraded by the contact point makes a sudden uncontrollable jump, which may be worse than the intended step in the worst case.

According to an exemplary embodiment of the invention is a

Positioning device for positioning a particular very light

Functional body with very short path lengths (for example, in

Micrometer range), which are to be covered during the positioning of the functional body. By the functional body over the

Coupling body is subjected to a positioning force, which is the Coupling body in turn receives from a combined rotational and translational movement performing transfer body, the above-described stick-slip effect can be reduced. The translational movement of the transfer body leads to the actual repositioning of the

Function body. But this translational movement becomes one

Superimposed on rotational movement, the coupling body moves relative to the transfer body not only translationally, but at the same rotational, along a very long trajectory. As a result, the system always remains in an operating state with effective sliding friction force, whereas

Static friction is largely or completely suppressed. Clearly, therefore, it does not come to a jerky jumping and thus not to the above-described stick-slip effect, even if the drive of the

Transfer body (for example, with a stepper motor) takes place incrementally. In this way, a very accurate and at the same time structurally very simple positioning of a functional body is possible. By deflecting the acting driving force on the transfer surface of the transfer body also by the geometry of the transfer body precisely definable translation is defined, which determines the accuracy of the positioning of the

Function body further increased.

In particular, according to one exemplary embodiment, one

Positioning created, which is particularly advantageous for the precise linear displacement of small masses along small path lengths. In a preferred application, such a positioning device for a scanning probe microscope is used, for example, to accomplish the displacement of mirrors for controlling and deflecting a laser beam, which detects movements of a probe body. According to an exemplary embodiment of the invention, a low-cost and space-saving positioning device is provided with which a sufficiently large linear displacement of a functional body in sufficiently finely subdivided steps is made possible. Simultaneously, with such a positioning of the Stick-slip effect are largely suppressed. In particular, ask

exemplary embodiments of the invention, a positioning device ready, which allows an exact adjustment of optical elements (in particular of mirrors in the beam path of a laser) in a scanning probe microscope.

In accordance with an exemplary embodiment, a transmission body, for example a piston seated on a spindle and driven, for example, by a motor, is preferably used. Will the

Transfer body from the engine (or a drive device or manually by a user) set in rotation, so causes in the

Positioning device implemented mechanism (in particular a spindle) a translation of this rotation in a translational movement. A coupling body sitting on the surface of the transmission body, preferably transversely to the feed direction of the transmission body (for example a transverse axis) thereupon performs a predeterminable movement, preferably a linear movement upwards or downwards. Alternatively or additionally, a tilting or rotary movement of the functional body can be generated. A significant advantage here is that the adjustable geometry of the transfer body (for example, the inclination of the cone) and the other components of the

Positioning device (for example, a pitch of the spindle) a

adjustable reduction is definable. As a result, in particular a precise movement of the functional body over very small distances can be made possible. Exemplary embodiments of the invention are particularly advantageously applicable wherever small or light functional body to move or turn precisely, so for example in the

Fine adjustment of samples, sensors, probes or optical elements as well as the positioning of precision tools in mechanical engineering. In the following, additional exemplary embodiments of the positioning device, the functional arrangement, the scanning probe microscope, the method and the use will be described.

According to one embodiment, the base body may have a cavity in which the transfer body is at least partially disposed. For example, the cavity may be formed as a simple cylindrical bore in a blank. This leads to a compact configuration of the positioning device and a simple manufacturability.

According to one embodiment, the guide surface may be formed as at least a portion of an inner wall, in particular as at least a portion of a circular cylindrical surface of the inner wall of the cavity. Illustratively, in such an embodiment, the base body surrounds the transmission body, which can thereby be mechanically protected and accommodated in a compact manner. In addition, such a geometry causes a precise guidance of the transmission body through the main body.

According to one embodiment, the tread may be formed by at least a portion of an outer wall and / or by at least a portion of an inner wall of the transfer body. According to one embodiment, an outer wall of the transfer body, the tread and thus the mechanical interface of the transfer body to the

Form body. This additionally promotes a space-saving configuration of the positioning device. Alternatively or additionally, however, an inner wall of the transfer body can also completely or partially form the running surface and therefore the coupling surface to the main body. In such a case, the base body, for example, at least partially within the

Transfer body extending coupling surface.

According to one embodiment, the tread may be at least two apart from each other along a rotational axis of the transfer body

spaced, in particular spaced by the transfer surface,

Have tread portions. If between these two Tread portions of the transfer surface of the transfer body is arranged, the transfer body is clearly at two mutually axially spaced areas by the guide surface of the

Main body led. This leads to a particularly stable and fault-robust guidance and therefore to a high precision of the positioning.

According to one embodiment, the spaced apart

Tread sections have the same outer diameter. In particular, the spaced tread portions may have circular cylindrical outer surfaces with the same circular diameter. On the one hand, this leads to the fact that the guide surface of the basic body by simply forming a cylindrical

Bore with constant diameter can be formed. On the other hand, this also leads to a symmetrical and therefore less error-prone guidance of the transmission body in the body and to uniform bearing forces.

According to one embodiment, a recess may be formed between the spaced tread portions in the region of the transfer surface. This indentation can be used to receive the coupling body and thus to a particularly space-saving positioning. This also allows a favorable production of the positioning with two separate circular cylindrical lateral surfaces as

Tread portions and a particular cone-shaped power transmission section arranged therebetween.

According to one embodiment, the running surface may be at least partially formed by at least one circular cylindrical lateral surface of the transmission body. In particular, two opposing axial end portions of the transfer body formed as a circular cylinder and / or circular hollow cylinder, a low-friction coupling with the guide surface of the

Basic body combined with a simple manufacturability of the positioning.

According to one embodiment, the transfer surface may be at least partially opposite a rotational axis of the transfer body be inclined, in particular at least partially formed by at least one conical outer surface of the transfer body. By adjusting the slope, the over- or reduction of the on the

Transmission body acting driving force can be adjusted precisely in a positional shift and / or rotation of the functional body. For example, the inclination in a transfer section of the transfer body can be set constant, which corresponds to a conical or frusto-conical geometry of the transfer section of the transfer body. This advantageously allows a linearly translated movement of the functional body during the positioning process. If in other applications, however, a non-linearly translated movement of the functional body is desired, this can be done in a structurally simple manner by a non-constant inclination of the preferably rotationally symmetrical transmission body in its

Power transmission section can be achieved. In particular, the

Transfer surface then also have a plurality of opposite the axis of rotation differently inclined sections, illustratively, for example, each seized and stepped truncated cone sections of different pitch. It is also possible to design the lateral surface of the force transmission surface of the transmission body concave or convex to the

Positioning device to impose a non-linear positioning.

According to one embodiment, the coupling body as

Querachsenkörper be formed, which extends orthogonal to a rotational axis of the transfer body. For example, the coupling body can then be formed as a cylindrical shaft. In other applications, however, it may be advantageous to the coupling body geometrically different

configure, for example, as a sphere.

According to one embodiment, the positioning device may comprise an automatic drive device, in particular a motor, further in particular a stepper motor, arranged for driving, in particular for rotatory driving, of the transmission body. According to exemplary Embodiments is intended to move the functional body with a precise linear movement to a desired position. In this case, a positioning with an accuracy in the micrometer range is often sought. This can not be achieved by a human user in all applications with sufficient accuracy. Therefore, it is preferred that

To equip positioning with an automatic drive device having a reproducible drive characteristic. In this case, it is advantageously possible to be able to implement even simple automatic drive devices, such as stepper motors. Such stepper motors, which can be integrated with reasonable space requirements and little effort in the positioning, lead due to the described effective

Suppression of the stick-slip effect despite their gradual or

Incremental motion characteristic to no pronounced jerky shifts of the functional body.

According to an exemplary embodiment, the positioning device can have a

Compensating coupling between the drive device and the

Have transmission body. Such a compensation coupling can advantageously at least partially compensate for a possible parallel axial offset between the drive device and the transfer body. As a result, it is unnecessary to ensure an exact alignment of the axis of the drive device and the axis of the transmission body, which is designed, for example, as a conical body. Instead, the balancing clutch causes a partial or even complete compensation of a possible parallel

Axial offset between drive device and transmission body.

Particularly advantageous, such a compensation clutch as Oldham-

Be formed coupling, since such Oldham coupling with a small footprint and low cost, simultaneously highly effective in the

Positioning device can be implemented. Under an "Oldham coupling", which can also be referred to as a cross-slotted clutch or cross-slide clutch, can in the context of the present application a non-switchable, torsionally rigid coupling can be understood that can compensate for a radial offset of two parallel waves. An Oldham coupling may in particular comprise three individual parts: two discs, which may be referred to as

Clutch hubs may be formed on the respective

Shaft ends are fastened, for example by a screw or feather key connection. A third disc can be stored as a sliding joint in the form of a cross-plate and by two mutually orthogonal tongue and groove connections between the clutch hubs.

According to one embodiment, the positioning device may comprise a spindle, which is at least partially inserted into a recess in the transmission body. Such a spindle can be formed as a stationary mounted or strongly coupled to the body component, which is operatively coupled to the rotatable and translationally mounted transfer body. In particular, the spindle may be formed, which was caused by a drive device

Rotational movement of the transfer body with an additional

Overlay translation movement. It is particularly advantageous to the

To provide transmission body with a recess (for example, a central axial bore) and to introduce at least a portion of the spindle in this recess. Since the operative connection between the spindle and the transfer body is highly frictional, it is particularly preferred that the interacting interaction surfaces of spindle and

Transfer body very close to the axis, thus in a

Rotation axis of the transmission body containing recess of the

Transmitting body. The small effective radius of the interaction surfaces between spindle and transmission body then leads to a small

Frictional torque and therefore to a low-friction operation of

Positioning. According to an alternative but less preferred embodiment, the corresponding interaction surfaces of spindle and transmission body may also be along an outer diameter of the Transmission body be arranged. However, then occur higher friction moments than in the preferred previously described

Embodiment.

According to one embodiment, the positioning means may comprise a spindle with a spindle thread adapted to cooperate with a mating thread of the transmission body to move the spindle

Transfer transfer body in the combined rotational and translational movement. The interaction surfaces between spindle and

Transfer bodies can thus be replaced by two cooperating or

be realized interlocking thread. A rotational movement of the transmission body, triggered by the drive device, then inevitably leads to an additional forced by the spindle

Translational movement of the transfer body, and thus to a

corresponding change in position of the functional body.

Preferably, the spindle thread an external thread and the

Mating thread be an internal thread. Such a design is

in particular with an arrangement of the spindle in a central and extending through the axis of rotation recess of the transmission body and allows a particularly low-friction operation.

According to one embodiment, the positioning device can be set up, a functional body operatively coupled to the coupling body only along exactly one predetermined direction of movement

to translate. Such an embodiment is shown in FIG. According to such a configuration, due to the

Transmission characteristic of the positioning a movement of the functional body (or rigidly connected to the coupling body

Carriage of the positioning device on which the functional body can be mounted) in all directions impossible, with the exception of the predetermined direction of movement. Also, then a rotation of the Function body or the carriage are made impossible by a corresponding storage.

According to one embodiment, the positioning device for translational movement of the carriage or the functional body a

Have parallel guide. Such a parallel guide, which a

Ensures parallel position of a rigid connection between the coupling body on the one hand and the functional body or the carriage of the positioning on the other hand, can define a single preferred direction along which the positioning can be moved by the positioning.

According to another embodiment, the positioning device may be configured to tilt a function body operatively coupled to the coupling body about a predetermined tilting axis. In particular, the

Positioning device for tilting have a rotatable about a hinge lever. Such an embodiment is shown in FIG.

According to a preferred embodiment, the

Positioning device have at least one solid-state joint for setting a coupling between the coupling body and a functionally coupled to the coupling body functional body. In particular, the above-described parallel guide or the above-described pivot as

Solid state joint can be configured. In the context of the present invention, a "solid-state joint" can be understood to mean, in particular, a region of a component which allows a relative movement (in particular translatory movement or rotation) between two rigid body regions by bending The joint function is clearly achieved in a solid-state joint by a region of reduced flexural rigidity relative to two adjacent regions of higher flexural stiffness The reduced flexural stiffness can be achieved, for example, by a local reduction in cross-section or a local configuration of the shape Section of the component to be generated. A leading the coupling body

Festkörpergelenk has the particular advantage that a movement of the

Functional body is carried out by a soft elastic movement on a targeted mechanically weakened portion of the positioning. As a result, the unwanted stick-slip effect can be suppressed particularly effectively, since the joint function can be accomplished without jerking and thus without abrupt transitions between static friction and sliding friction. The implementation of a solid-state joint in the positioning device therefore allows, in particular, the implementation of a less complicated and compact stepping motor as a drive device in the positioning device, without any fear of undesired sudden changes in the position of the functional element.

According to one embodiment, the solid-body joint may be coupled to the main body and the coupling body or arranged therebetween.

According to one embodiment, the main body can be rigid with the

Drive device and / or the spindle to be coupled. By such a rigid coupling, the positioning can be operated particularly error-resistant and precise.

According to an exemplary embodiment, the functional body may be an optical component (in particular a mirror or a lens), a specimen, a sensor or a measuring sensor. Generally speaking, the

Positioning device can be implemented with advantage everywhere where relatively lightweight components to be moved by relatively small distances. In such applications, the positioning device unfolds its advantages in a particularly pronounced manner.

According to one embodiment, the functional body may be rigidly connected to the coupling body. This rigid connection can be implemented, for example, by a carriage of the positioning device, which in turn can be rigidly connected to the coupling body. The functional body can be mounted on this slide. According to one embodiment, as a functional body on (for example a slide) of the positioning device, a deflection mirror for

Deflecting an electromagnetic force acting on the probe body

Beam attached. Advantageously, the scanning probe microscope can have a further functional body on a further positioning device with the features described above, which is also designed as a deflection mirror and is also mounted for deflecting the electromagnetic beam. In particular, the deflection mirrors can be moved by means of the positioning devices in such a way that the electromagnetic beam propagates to the respective deflection mirrors along the respective travel direction. Such an embodiment is shown in FIG. 11 and FIG. In such an implementation, one laser beam or another

electromagnetic radiation can be moved precisely (for example in one plane). This allows in particular an adjustment for aligning a laser beam at the beginning of a measurement with an associated

Scanning probe microscope.

According to one embodiment of the invention, the

Scanning probe microscope be designed as an atomic force microscope. The

Atomic Force Microscope, also called Atomic Force Microscope or Atomic Force Microscope (AFM), is a special scanning probe microscope. It serves as a tool in surface chemistry and surface characterization and is used for mechanical scanning of surfaces and the measurement of atomic forces on the nanometer scale. The invention relates to a

Scanning probe microscope (English Scanning Probe Microscope, short SPM), in particular an atomic force microscope (English Atomic Force Microscope, short AFM), but in principle also in other devices and instruments can be used.

It is alternatively or additionally possible according to other exemplary embodiments, a positioning or a Functional arrangement in particular for one or more of the following

To provide applications:

- Adjustment of mirrors, lenses and / or other optical elements as a functional body in a measuring instrument for particle size determination by means of light scattering

- Adjusting optical elements as a functional body in one

X-ray scattering instrument, for example small angle scattering (SAXS) or X-ray diffraction (XRD)

- Moving samples as a functional body in a rheometer

- Moving samples or probes as a functional body in one

Scanning microscope or other device for surface inspection (for example, a nanoindenter or a scratch tester)

In the following, exemplary embodiments of the

Present invention described in detail with reference to the following figures.

FIG. 1 shows a scanning probe microscope with one

Positioning device having functional arrangement according to a

exemplary embodiment of the invention.

FIG. 2 shows a cross-sectional view of a positioning device for

Positioning of a laser beam deflecting optical component according to an exemplary embodiment of the invention, in which the component is subjected to a longitudinal movement.

FIG. 2A shows a detail of the positioning device according to FIG. 2 in FIG

Range of solid-state joints implemented there.

FIG. 3 shows a transmission body of a positioning device according to an exemplary embodiment of the invention.

FIG. 4 shows a transmission body of a positioning device according to another exemplary embodiment of the invention. Figure 5 shows a cross-sectional view of a positioning device for positioning of a laser beam deflecting optical component according to another exemplary embodiment of the invention, in which the component is subjected to a rotational movement.

FIG. 6 shows a spatial view of a positioning device according to an exemplary embodiment of the invention.

FIG. 7 and FIG. 8 show cross-sectional views of the positioning device according to FIG. 6.

FIG. 9 and FIG. 10 show cross-sectional views of FIG

Positioning device according to FIG. 6 in the retracted state of a

Coupling body (see Figure 9) and in the extended state of the coupling body (see Figure 10).

Figure 11 shows a part of a scanning probe microscope with a

Functional arrangement according to an exemplary embodiment of the invention.

FIG. 12 shows a detail of FIG. 11.

The same or similar components in different figures are provided with the same reference numerals.

Before describing exemplary embodiments of the invention with reference to the figures, a few general aspects of the invention and the underlying technologies will be explained:

With an exemplary embodiment of the invention, a positioning device for positioning a functional body is provided in which by means of a rotating and translationally displaced simultaneously

Transmission body in a defined manner guided a driving force in a position of the functional body changing force re-directed and can be reduced in a predeterminable manner. Because of this precisely defined kinematics (especially long rotation path in combination with shorter

Translationsweg) can unwanted jerky steps or jumps of the Functional body, as in a transition between static friction and

Sliding friction can occur, and thus parasitic stick-slip phenomena, can be avoided.

This can be done in particular by combining a special

Storage architecture and an associated configuration of the drive train of the positioning are achieved:

- With regard to the storage, a solid-state joint (for example, in the form of a targeted mechanical weakening of a component of

Positioning device) instead of a rolling or sliding joint. A soft elastic movement achieved thereby avoids transitions between static friction and sliding friction and thus the undesirable stick-slip effect.

- As for the powertrain, for example, stepper motors with defined step angles can be implemented, which can be translated into the smallest possible linear movement. The translation can be accomplished, for example, by a spindle that rotates in one

Longitudinal movement converts .. One with advantage with a conical piston

trained transmission body is thereby rotated and longitudinally displaced, whereby a coupling body and subsequently a carriage with functional body mounted thereon can be repositioned specifically. The pitch of the spindle and / or the slope of the conical piston define the

Translation.

FIG. 1 shows a Scanning Probe Microscope (SPM) or

Scanning probe microscope 1 according to an exemplary embodiment of the invention, which is designed as Atomic Force Microscope (AFM).

In the scanning probe microscope 1, a cantilever deflection, ie a change in position or a change in shape of a measuring probe 11 (which is also referred to as cantilever), is detected by means of an optical sensor system. The measuring probe 11 is made of a measuring tip 5 and a bearing this Probe body 7 is formed. The probe body 7 is mounted on a mounting device 4. An electromagnetic radiation source 2 (for example a

Laser source) transmits an electromagnetic primary beam 13 (in particular a light beam, for example a laser beam) over a

Focusing device 12 (which may be configured as an arrangement of one or more optical lenses) on the measuring probe 11. The electromagnetic secondary beam 3 reflected by the measuring probe 11 propagates to a photo- and position-sensitive detector 10 (in particular, the electromagnetic secondary beam 3 can be detected by means of one or more Deflection mirror 14 or one or more other optical deflection elements are deflected to the position-sensitive detector 10). If the measuring probe 11 is brought into motion via a displacement device 80 (for example a piezoactuator, which can effect a change in position in the vertical z-direction according to FIG. 1) and / or if the measuring probe 11 changes its shape, a change in the laser light at position-sensitive detector 10 are detected. Depending on the interaction of the measuring tip 5 (also called

Cantilever tip called) of the measuring probe 11 with a to be examined or to be characterized sample body 6 on a sample holder 52, the deflection of the probe 11 will vary and an associated area on

Detector 10 hit by the electromagnetic secondary beam 3. The

Detector signal can then be processed in an evaluation unit 8. The resulting high-resolution image of the surface of the sample body 6 can then be displayed by means of a display device 9. A surface of the sample body 6 can be scanned with the measuring tip 5 (that is to say a sensitive tip of the measuring probe 11). A sample table is movable by means of actuators in the horizontal plane (that is to say in an x-direction orthogonal to the z-axis and y-direction) in accordance with FIG. The scanning probe microscope 1 thus serves to determine surface information with respect to the sample body 6 by means of scanning scanning of a surface of the sample body 6 by means of the Measuring Probe 11. A displacement measuring device 50 may be provided for measuring a displacement information of the probe body 7.

As will be described in more detail below, the scanning probe microscope 1 shown in FIG. 1 has a functional arrangement 112 which has a

Positioning device 60 according to an exemplary embodiment of the invention. The positioning device 60 positions according to Figure 1, the deflection mirror 14 (the latter is also referred to as a functional body 62, which performs the function of deflecting the electromagnetic secondary beam 3). According to FIG. 1, the illustrated positioning device 60 is thus used to control the electromagnetic secondary beam 3 in one

Scanning Probe Microscope 1 used. In another embodiment, the positioning device 60 is provided to redirect the electromagnetic primary steel 13 before it hits the probe body 7.

As an alternative to FIG. 1, it is also possible (see FIG. 11 and FIG. 12) for two (or more) positioning devices 60 for positioning two (or more) deflecting mirrors 14 and / or other functional bodies 62 of FIG

Scanning probe microscope 1 provide. For example, a positioning of the measuring probe 11 and / or the specimen 6 by means of such a

Positioning device 60 possible.

Exemplary examples of positioning devices 60 which can be used according to FIG. 1 are described in more detail below:

FIG. 2 shows a cross-sectional view of a positioning device 60 for positioning a laser beam (see electromagnetic

Primary beam 13 or electromagnetic secondary beam 3 in FIG. 1)

deflecting optical component (such as the deflection mirror 14 shown in Figure 1) according to an exemplary embodiment of the invention, in which the component is subjected to a pure longitudinal movement.

The positioning device 60 according to FIG. 2 more generally serves to position a functional body 62 of a scanning probe microscope 1, shown schematically in FIG. 2, and has a static main body 64 with it a guide surface 66. The main body 64 may be made of a cylindrical blank having a circular cylindrical axial

Through hole 120 is provided, for example, a bore. In addition, a recess 122 can be formed in a lateral surface of the base body 64. By means of the recess 122, a connection between a coupling body 74 described in more detail below and the functional body 62 is created.

As a cone piston with two circular cylindrical end sections

formed transmission body 68 can be completely inserted into the through hole 120 to save space. The main body 64 thus has a cavity 76 in the form of the through hole 120, in which the

Transmission body 68 is arranged.

A preferably designed as a stepping motor drive means 96 is coupled to the transmission body 68 by means of a here designed as Oldham coupling compensating coupling 98. The compensating clutch 98 is equal to a possible parallel axial offset between the axis of the

Drive means 96 and the axis of the substantially

rotationally symmetrical transfer body 68. The main body 64 is rigidly coupled to the drive device 96. The drive device 96 can drive the transfer body 68 to perform a rotational movement. A spindle 100 described in more detail below, which cooperates with the transmission body 68, forces that upon the action of the drive torque generated by the drive means 96 of the transmission body 68 relative to the

Base 64 performs a combined rotational and translational movement.

A running surface 70, the transfer body 68 is brought into operative connection with a corresponding guide surface 66 of the base body 64. More specifically, the guide surface 66 of the body 64 and the tread 70 of the transfer body 68 are operatively connected to each other, so that the transfer body 68 during its combined rotation and Translational movement is guided by means of the base body 64 and held in an axially parallel position relative to the base body 64.

On the other hand, a transfer surface 72 of the transfer body 68 redirects the direction of the driving force acting on the transfer body 68 (which is generated by the drive device 96 in cooperation with the spindle 100) and transfers it to a coupling body 74

Positioning device 60. As a result, the coupling body 74 at the

Transfer surface 72 is operatively coupled to the transfer body 68.

At the same time, the coupling body 74 is operatively coupled to the functional body 62 in order to control the translational movement of the transmission body 68 on the

Redirecting functional body 62 and reposition the functional body 62 in a defined manner or to displace it selectively and as far as possible along a longitudinal direction (according to FIG. 2 a vertical direction, cf. reference numeral 124). According to Figure 2, the coupling body 74 is formed as Querachsenkörper or shaft or cylinder body, which is orthogonal to the

Rotation axis 86 of the transfer body 68 and perpendicular to the image plane of Figure 2 extends. Alternatively, it is also possible to form the coupling body 74 as a ball. When the transfer body 68 carries out a combined rotational and translational movement, the coupling body 74 slides along the transfer surface 72 and is translationally displaced in the vertical direction 124 according to FIG.

According to Figure 2, the guide surface 66 of the base body 64 as

Part of a circular cylindrical surface of the inner wall of the cavity 76 is formed. Correspondingly, the tread 70 is separated from one another along the axis of rotation 86 of the transfer body 68 by the two

Transfer surface 72 spaced tread portions 88, 90 is formed. The spaced tread portions 88, 90 have the same and identical

Outer diameter, which is substantially the inner diameter of the

cylindrical through hole 120 correspond. This allows a production of the positioning device 60 with little effort and also provides a Reliable and low-friction guidance of the transfer body 68 inside the body 64 sure.

While the tread portions 88, 90 as lateral surfaces of

(Hollow) cylindrical portions of the transfer body 68 are formed, the interposed transfer surface 72 is formed as an inclined lateral surface of a cone portion. Between the spaced

Tread portions 88, 90 in the region of the transfer surface 72, a circumferential indentation 92 is formed. The tread 70 is thus formed according to Figure 2 by two axially spaced-apart circular cylindrical lateral surfaces of the transfer body 68. The transfer surface 72, however, is inclined relative to the axis of rotation 86 of the transfer body 68 with a constant pitch in a cross-sectional view and is characterized by the in

Axial direction central conical surface of the transfer body 68 is formed. The conical surface causes a constant translation of the longitudinal movement of the transfer body 68 in the vertical movement of the functional body 62 (see reference numeral 124).

As shown in FIG. 2, the spindle 100 is inserted into a central recess 94 in the transfer body 68. The recess 94 may be provided, for example, as a bore in the transfer body 68. An axis of symmetry of the recess 94 can with the rotation axis 86th

coincide. The spindle 100 is provided with a spindle thread 102 in the form of an external thread, which is adapted to cooperate with an internally threaded counter thread 104 of the transfer body 68 to convert the transfer body 68 in the combined rotational and translational movement. This coupling between the spindle 100 and the transfer body 68 is very frictional. By the described near-axis provision of the corresponding

Interaction surfaces (spindle thread 102, mating thread 104) of the spindle 100 and the transmission body 68 can this resulting friction torque but kept low and friction losses can be reduced. The main body 64 is rigidly coupled to the spindle 100.

The positioning device 60 is further arranged, one with the

Coupling body 74 operatively coupled functional body 62 which can be mounted on a carriage 126 of the positioning device 60, only along a predetermined direction of movement (see reference numeral 124) to move translationally. For this purpose, the positioning device 60 on a parallel guide 106, which advantageously by means of several

Solid joints 118 is formed. FIG. 2A shows a detail of FIG

Positioning device 60 according to Figure 2 in the region of the solid state joints 118 implemented there. Each solid-state joint 118 is a bendable or

elastic member portion which adjusts the coupling between the coupling body 74 and the operatively coupled to the coupling body 74 functional body 62 on the carriage 126. The parallel guiding device 106 is thus compensatable connected to the base body 64 and the coupling body 74. The

Functional body 62 and the carriage 126, however, are rigid with the

Coupling body 74 connected.

The positioning device 60 shown in FIG. 2 can form a stage and be formed from a guide section and a drive section. The positioning device 60 is particularly well suited for the precise positioning of small masses (such as a deflection mirror 14, lenses 12 or a small sample body 6). The stage enables translation in one

Direction of space with a travel of a few millimeters at a resolution in the sub-micron range. As drive means 96, a simple stepping motor can be used. The described stage can be used in the measuring head of the scanning probe microscope 1 according to FIG. 1, for example, in order to control the position of a laser beam (see electromagnetic primary beam 3 or electromagnetic secondary beam 13). For this purpose, two of these positioning devices 60 can each be provided with deflecting mirrors 14 or coupled thereto. A displacement of this deflection mirror 14 has a Parallel salting of the laser beam in two spatial directions result (see Figure 11 and Figure 12).

Advantageously, in the case of the positioning device 60, a transfer body 68 designed as a conical piston according to FIG. 2 can be implemented whose outer contour consists of two cylindrical tread portions 88, 90 and a conical conical surface arranged therebetween in the axial direction

Transfer surface 72 may be formed. The transfer body 68 is formed via the compensating coupling 98 with the engine here

Drive device 96 connected. Furthermore, the transmission body 68 designed as a conical piston sits on the spindle 100, which, like the motor, is connected to the main body 64. Now force the

Drive means 96, the transmission body 68 to a rotational movement, the spindle 100 ensures that this rotational movement is superimposed on a translation.

The carriage 126 is the component that is to be moved in the end defined. It is connected via the parallel guide 106 with the base body 64, which ensures that the carriage 126 is connected in all directions except the direction of movement according to reference numerals 124 as stiff as possible with the main body 64.

The coupling in the direction of movement, however, is very soft. The according to

Figure 2 formed as a transverse axis coupling body 74 is fixed and immovably connected to the carriage 126. The translation of the transmission body 68 embodied as a conical piston leads via the conical surface to a displacement of the coupling body 74 formed as a transverse axis and thus of the carriage 126 in the direction of movement (see reference numeral 124). A special feature of this path control is now the combination of coarse and fine

Sliding movements to suppress the stick-slip effect. Both the

Relative movement between the transfer body 68 and the base body 64, but especially the sliding of the formed as a transverse axis coupling body 74 on the conical surface of the transfer body 68, are by the superposition a translation and a rotation marked. The rotation leads in

Contact point to track lengths in the size of typically several hundred micrometers per step and thus to a safe transition from static to sliding friction. The influence of the stick-slip effect is negligible here.

However, as soon as the contact points lie clearly in a sliding friction regime, the comparatively small relative movements (typically several micrometers per step) caused by the translation are also easily implementable.

The design of the stage or the positioning device 60 is very variable. If you choose, for example, the conical slope flatter, even finer resolution is possible with the same size and less stroke. If you make the piston longer and leave the cone slope, you can increase the stroke at the same resolution. Furthermore, in the configuration of the central portion or the transfer surface 72 of the transfer body 68, it is possible to deviate from the shape of an ideal cone in order to realize a different resolution or reduction in different areas of the travel path.

For example, the positioning device 60 or the stage may have a stroke of 2 mm. More generally, for example, the stroke may be in a range between 200 μm and 10 mm, in particular in a range between 1 mm and 5 mm. Powered by a drive device 96, which as

Microstepping motor can be formed with 24 full steps per revolution, a configuration with a stroke of 2 mm results in a resolution of 3.5 pm per full step or about 880 nm per quarter step.

The transfer body 68 may be composed of three sections: The central conical surface in the axial direction forms the transfer surface 72 and controls the displacement of the transverse axis formed here

Coupling body 74. The tread 70, the transfer body 68 is used during the combined translation / rotational movement of the transfer body 68 as a guide. The threaded surface of the counter thread 104 of the Transmission body 68 provides with a fixed counterpart (see spindle 100 with spindle thread 102) together for the superimposed longitudinal displacement of the rotating transmission body 68. According to Figure 2 are the

Transfer surface 72 and the tread 70, the transfer body 68 outside, wherein the tread 70 is divided into two sub-areas (see

Tread portions 88, 90). The threaded surface of the counter thread 104 is designed according to Figure 2 as an internal thread, but can also be realized as an external thread.

FIG. 3 shows a transmission body 68 of a positioning device 60 according to an exemplary embodiment of the invention. According to Figure 3, the tread 70 is formed by two axially spaced portions of an outer wall of the transfer body 68 (see tread portions 88, 90). Between the tread portions 88, 90, the transfer surface 72 is arranged as a conical surface. The threaded surface of the counter-thread 104 is according to Figure 3 on an inner surface of the transfer body 68th

FIG. 4 shows a transmission body 68 of a positioning device 60 according to another exemplary embodiment of the invention. In contrast to Figure 3, the tread 70 is shown in FIG. 4 by a

Part of an inner wall of the transfer body 68 is formed. The

Configuration of the transfer surface 72 and the threaded surface of

Counter thread 104 is configured according to FIG. 4 as in FIG.

FIG. 5 shows a cross-sectional view of a positioning device 60 for positioning a laser beam (see electromagnetic

Primary beam 13 or electromagnetic secondary beam 3 in FIG. 1)

deflecting optical component according to another exemplary

Embodiment of the invention, in which the component is subjected to a rotational movement. The embodiment according to FIG. 5 differs from that according to FIG. 2 essentially in that the positioning device 60 according to FIG. 5 is designed as a tilting stage, whereas the positioning device 60 according to FIG

Positioning device 60 is formed according to Figure 2 as a linear stage. Correspondingly, the positioning device 60 according to FIG. 5 is set up to tilt a functional body 62, which is actively coupled to the coupling body 74 by means of the carriage 126, about a predetermined tilting axis (see turning arrow 128). For the purpose of such tilting, the

Positioning device 60 to a rotatable about a pivot 108 lever 110. Advantageously, the rotary joint 108 may be formed as a solid-state joint 118.

As an alternative to FIG. 2, according to FIG. 5, therefore, a precision tilting stage can be provided by the parallel guide 106 being driven by the lever 110 with a (preferably solid-based, see solid state joint 118).

Swivel 108 is replaced. In this way, by the displacement of the turn formed as a transverse axis coupling body 74 instead of a

Translation a rotation about the pivot 108 are triggered.

FIG. 6 shows a three-dimensional view of a positioning device 60 according to an exemplary embodiment of the invention, which, as shown in FIG. 2, is designed as a microlinear stage. Figure 7 and Figure 8 show

9 and 10 show additional cross-sectional views of the positioning device 60 according to FIG. 6 in a retracted state (see FIG. 9) and in an extended state (see FIG. 10).

In particular, in Figure 6 to Figure 10, for example, from sheet metal

formed and, for example, designed as struts profiles 130 which can be attached to the positioning device 60 (in particular screwed) can be. The profiles 130 have at their end portions or in the region of their attachment to the positioning device 60 on flat portions, which are indicated in Figure 6 in the form of circles. Between the flat sections, the profiles 130 have angled regions (in particular C-shaped regions). The angled regions have a higher rigidity than the flat sections. As a result, when a force is applied to the profiles 130, the flat portions are elastically bent, whereas the angled portions essentially free from bending or being bent much less than the flat sections. Consequently, the flat portions of the profiles 130 act as solid joints 118 with the advantageous effects described above.

Figure 11 shows a part of a scanning probe microscope 1 with a

Functional arrangement 112 according to an exemplary embodiment of the invention. FIG. 12 shows a detail of FIG. 11.

As a first functional body 62 may at a first

Positioning device 60, a deflection mirror 114 for deflecting a

electromagnetic beam 13 may be mounted on a not shown in Figure 11 and Figure 12 probe body 7. In addition, the illustrated functional arrangement 112 has a further functional body 62 on a further positioning device 60, wherein the further functional body 62 is formed as a further deflecting mirror 116 and also for deflecting the electromagnetic beam 13 on the probe body 7 at the other

Positioning device 60 is mounted. The two deflecting mirrors 114, 116 are movable by means of the positioning devices 60, 60 such that the

electromagnetic beam 13 to the respective deflection mirror 114, 116 respectively propagated along the respective direction of travel.

In the scanning probe microscope 1 associated with FIGS. 11 and 12, two stages or positioning devices 60 are used for the purpose of aligning a laser beam, more precisely for positioning the point of intersection of a measuring probe plane 132 (or cantilever plane, ie a plane in which the measuring probe with the probe body 7 is substantially arranged) with the electromagnetic beam 13 (hereinafter

Laser point 134) at any point on the probe. For this purpose, each of the movable carriages 126 of the

Positioning devices 60 each provided with a deflection mirror 114, 116, wherein the deflection mirrors 114, 116 are arranged so that they

deflect the electromagnetic beam 13 by 90 °. Will now the carriage 126th together with deflection mirror 114, 116 shifted by a measure Äu, this leads to a parallel displacement of the reflected beam. This shift manifests itself in a shift of the laser spot 134 by a measure Δχ.

In the exemplary implementation of FIG

Deflection mirror 114, 116 and the positioning means 60, 60 arranged so that the displacements .DELTA.χ according to Au and .DELTA.ν according to Δν are orthogonal to each other. This means that the laser spot 134 in the probe plane 132 can be moved along a rectangular area. In addition, the electromagnetic beam 13 is always deflected by 90 °, and the

Displacement direction of the deflection mirror 114, 116 always runs parallel to the incoming or reflected electromagnetic beam 13. This has the consequence that Δχ = Δυ and Δν = Δν applies. With this arrangement, the laser spot 134, assuming a stage displacement of 2mm, can be positioned within a 2mm square side square area.

Illustratively, according to FIG. 11 and FIG

Plane to be moved. Thus, an adjustment of the electromagnetic beam 13 at the beginning of a measurement with a scanning probe microscope 1 is possible.

In addition, it should be noted that "having" does not exclude other elements or steps and "a" or "an" does not exclude a multitude. "It should also be noted that features or steps described with reference to one of the above embodiments also can be used in combination with other features or steps of other embodiments described above, and reference signs in the claims are not intended to be limiting.

Claims

P a n t a n s p r e c h e

1. Positioning device (60), in particular for a scanning probe microscope (1), for positioning a functional body (62), wherein the

Positioning device (60) comprises:

a base body (64) having a guide surface (66);

a transfer body (68) which is movable in combined rotational and translational motion relative to the base body (64) by a driving force and has a tread (70) and a transfer surface (72); a coupling body (74) on the transfer surface (72) with the

Transmission body (68) is operatively coupled and which is operatively coupled to the functional body (62) in order to divert the translational movement of the transfer body (68) on the functional body (62) and thereby position the functional body (62);

wherein the guide surface (66) of the base body (64) and the tread

(70) of the transfer body (68) are operatively connected to each other so that the transfer body (68) during its combined

Rotation and translational movement by means of the base body (64) can be guided. 2. Positioning device (60) according to claim 1, wherein the base body (64) has a cavity (76) in which the transfer body (68) is at least partially arranged.

3. positioning device (60) according to claim 2, wherein the guide surface (66) as at least a portion of an inner wall, in particular as at least a portion of a circular cylindrical lateral surface of the inner wall of the

Cavity (76) is formed.

4. Positioning device (60) according to one of claims 1 to 3, wherein the running surface (70) through at least a portion of an outer wall and / or is formed by at least a portion of an inner wall of the transfer body (68).

5. Positioning device (60) according to one of claims 1 to 4, wherein the running surface (70) at least two spaced apart along a rotation axis (86) of the transmission body (68), in particular by the

Transfer surface (72) spaced, tread portions (88, 90).

6. Positioning device (60) according to claim 5, wherein the spaced tread portions (88, 90) have the same outer diameter.

7. Positioning device (60) according to claim 5 or 6, wherein between the spaced tread portions (88, 90) in the region of

Transfer surface (72) has a recess (92) is formed.

8. positioning device (60) according to one of claims 1 to 7, wherein the running surface (70) is at least partially formed by at least one circular cylindrical lateral surface of the transfer body (68). 9. positioning device (60) according to any one of claims 1 to 8, wherein the transfer surface (72) at least partially against a

Rotation axis (86) of the transfer body (68) is inclined, in particular at least partially formed by at least one conical outer surface of the transfer body (68).

10. Positioning device (60) according to claim 9, wherein the

Transmission surface (72) has a plurality of opposite the rotation axis (86) differently inclined portions.

11. Positioning device (60) according to one of claims 1 to 10, wherein the coupling body (74) is formed as a transverse axis body which extends orthogonal to a rotation axis (86) of the transmission body (68). 12. Positioning device (60) according to one of claims 1 to 11, comprising a drive device (96), in particular a motor, more particularly a stepper motor, arranged for driving, in particular for rotary driving, of the transfer body (68). 13. Positioning device (60) according to claim 12, comprising a

Compensating clutch (98), in particular an Oldham coupling, between the drive means (96) and the transfer body (68).

14. Positioning device (60) according to one of claims 1 to 13, comprising a spindle (100), at least partially in a

Recess (94) is inserted in the transfer body (68).

15. Positioning device (60) according to one of claims 1 to 14, comprising a spindle (100) with a spindle thread (102), which is connected to the

Cooperating with a mating thread (104) of the transfer body (68) is arranged to bring the transfer body (68) in the combined rotational and translational movement.

16. Positioning device (60) according to claim 15, wherein the spindle thread (102) is an external thread and the counter thread (104) is an internal thread.

17. Positioning device (60) according to one of claims 1 to 16, wherein the positioning device (60) is arranged to translate a function body (62) operatively coupled to the coupling body (74) exclusively along a predetermined direction of movement.

18. Positioning device (60) according to claim 17, wherein the

Positioning device (60) for translational movement of the functional body (62) has a parallel guiding device (106), in particular having a

Solid-body joint, comprising.

19. Positioning device (60) according to one of claims 1 to 18, wherein the positioning device (60) is adapted to tilt a function body (62) operatively coupled to the coupling body (74) about a predetermined tilting axis.

20. Positioning device (60) according to claim 19, wherein the

Positioning device (60) for tilting the functional body (62) around a pivot (108), in particular designed as a solid-state joint, rotatable lever (110).

21. Positioning device (60) according to one of claims 1 to 20, comprising at least one solid-state joint (118) for setting a

Coupling between the coupling body (74) and a with the coupling body (74) operatively coupled functional body (62).

22. Positioning device (60) according to one of claims 18 to 21, wherein the solid-state joint (118) with the main body (64) and the coupling body (74) is coupled.

23. Positioning device (60) according to any one of claims 12 to 22, wherein the base body (64) is rigidly coupled to at least one of the group consisting of the drive means (96) and the spindle (100). 24. Functional arrangement (112), comprising: a positioning device (60) according to one of claims 1 to 23; the functional body (62) operatively coupled to the coupling body (74). The functional assembly (112) of claim 24, wherein the functional body (62) is selected from a group consisting of an optical

Component, in particular a mirror (14, 114, 116) or a lens (12), a specimen (6), a sensor, and a measuring sensor, in particular a probe body (7) or a measuring probe (11).

26. Functional arrangement according to claim 24 or 25, wherein the

Functional body (62) is rigidly connected to the coupling body (74).

27 scanning probe microscope (1) for determining surface information with respect to a sample body (6) by means of scanning a

Surface of the sample body (6), wherein the scanning probe microscope (1) comprises:

a movable probe body (7) having a measuring tip (5) for scanning the surface of the sample body (6) in a scanning manner;

A positioning device (60) according to one of claims 1 to 23 or a functional arrangement (112) according to one of claims 24 to 26 for positioning a functional body (62) of the scanning probe microscope (1).

28. scanning probe microscope (1) according to claim 27, designed as

Atomic force microscope.

29. scanning probe microscope (1) according to claim 27 or 28, wherein as

Functional body (62) on the positioning device (60) a deflecting mirror (14, 114, 116) for deflecting a force acting on the probe body (7) electromagnetic beam (3, 13) is mounted.

30. scanning probe microscope (1) according to claim 29, comprising a further functional body (62) on a further positioning device (60) according to one of claims 1 to 23, which is formed as a further deflecting mirror (116) and for deflecting the electromagnetic beam (3, 13 ) is attached.

31. scanning probe microscope (1) according to claim 30, wherein the deflection mirrors (14, 114, 116) by means of the positioning means (60) are movable such that the electromagnetic beam (3, 13) to the respective deflection mirror (14, 114, 116) each propagated along a respective direction of travel.

32. Method for positioning a functional body (62), in particular a scanning probe microscope (1), the method comprising:

Applying a tread (70) and a transfer surface

(72) having a drive force to move the transfer body (68) relative to a guide surface (66).

having basic body (64) in combined rotational and

To bring translation movement;

Deflecting the translational movement of the transfer body (68) on the functional body (62) for positioning the functional body (62) by means of a coupling body (74) on the transfer surface (72) with the

Transmission body (68) is operatively coupled and which is operatively coupled to the functional body (62);

wherein the guide surface (66) of the base body (64) and the tread

(70) of the transfer body (68) are brought into operative connection with each other such that the transfer body (68) during its

combined rotational and translational movement by means of the base body (64) is guided.

33. Use of a positioning device (60) according to one of claims 1 to 23 for adjusting an electromagnetic beam (3, 13) in a scanning probe microscope (1).