WO2019042339A1 - Lentille f-thêta appropriée pour être utilisée dans un traitement au laser - Google Patents

Lentille f-thêta appropriée pour être utilisée dans un traitement au laser Download PDF

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Publication number
WO2019042339A1
WO2019042339A1 PCT/CN2018/103136 CN2018103136W WO2019042339A1 WO 2019042339 A1 WO2019042339 A1 WO 2019042339A1 CN 2018103136 W CN2018103136 W CN 2018103136W WO 2019042339 A1 WO2019042339 A1 WO 2019042339A1
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WO
WIPO (PCT)
Prior art keywords
lens
theta
curvature
radius
laser processing
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PCT/CN2018/103136
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English (en)
Chinese (zh)
Inventor
孙建超
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上海微电子装备（集团）股份有限公司
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Publication of WO2019042339A1 publication Critical patent/WO2019042339A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below

Definitions

  • the invention belongs to the field of optical technology and relates to an F-theta lens for laser processing.
  • the F-theta objective (F-theta objective) is often used for flat field and beam focusing to focus the incident laser beam into a planar image field that is sandwiched by an optical axis relative to the F-theta objective.
  • the scan is in the region of the scan angle of ⁇ , in which the ratio of the scan angle of the laser beam to the position of the laser beam incident point in the image field to the optical axis follows a linear function.
  • these F-theta objectives are calibrated to the wavelength of the laser beam in order to obtain a high focus quality in the image field as the laser beam passes through the F-theta objective lens, ie It is said that the objective lens is calculated such that it is for a predetermined laser beam wavelength and a preset laser beam diameter, within an allowable temperature tolerance range and in a pre-set image field. There is no or only a slight optical deviation, where optical deviation refers to a deviation that would result in a significant change in the focus size.
  • the F-theta objective lens used with the laser beam is often required to have a large image field and a large total focal length.
  • the existing F-theta objective lens is prone to measurement error of the laser spot in the horizontal direction in the above application scenario, and the deformation of the laser spot is generated in the scanning field of view corresponding to the ⁇ angle, which affects the quality of the laser beam processing process.
  • the reason is that the F-theta lens in the prior art has problems of small field of view, large telecentricity, and large distortion.
  • the present invention provides an F-theta lens suitable for use in a laser processing process, the F-theta lens including, from the object side, along the optical axis to the image side, including: having positive power a first lens, a second lens having a negative power, a third lens having a positive power, a fourth lens having a positive power, and a fifth lens having a positive power;
  • f 1 is a focal length of the first lens
  • f 2 is the focal length of the second lens
  • f is the focal length of the third lens. 3
  • f is the focal length of the fourth lens. 4
  • 5 where f Is the focal length of the fifth lens
  • f is the total focal length of the F-theta lens.
  • the first lens is a concave-convex lens
  • the second lens is a plano-concave lens
  • the third lens is a concave-convex lens
  • the fourth lens is a concave-convex lens
  • the fifth lens is Concave-convex lens.
  • a radius of curvature of the first lens near the object side mirror surface is r 1
  • a radius of curvature of the first lens near the image side mirror surface is r 2 , r 1 >r 2 .
  • a radius of curvature of the third lens near the object side mirror surface is r 5
  • a radius of curvature of the third lens near the image side mirror surface is r 6 , r 5 >r 6 .
  • a radius of curvature of the fourth lens near the object side mirror surface is r 7
  • a radius of curvature of the fourth lens near the image side mirror surface is r 8 , r 7 >r 8 .
  • a radius of curvature of the mirror surface of the fifth lens near the object side is r 9
  • a radius of curvature of the mirror surface of the fifth lens near the image side is r 10
  • r 9 >r 10 is a radius of curvature of the mirror surface of the fifth lens near the image side
  • the F-theta lens further includes a protection window, wherein the protection window is a planar lens and is disposed between the fifth lens and the image side.
  • the aperture of the F-theta lens is 27 mm to 43 mm from the first lens.
  • the lenses of the first lens, the second lens, the third lens, the fourth lens and the fifth lens are made of fused silica and/or synthetic resin.
  • the F-theta lens is suitable for an incident laser beam having a wavelength of 1070 ⁇ 5 nm.
  • the F-theta lens is suitable for a laser beam incident angle of 0 to 20 degrees.
  • the F-theta lens provided by the present invention suitable for use in a laser processing process has the following beneficial effects:
  • FIG. 1 is a schematic structural view of an F-theta lens according to a first embodiment of the present invention
  • FIG. 2 is a field curvature curve and a distortion curve diagram of an F-theta lens according to a first embodiment of the present invention
  • FIG. 3 is a view of a field-of-view diffraction pattern of an F-theta lens according to a first embodiment of the present invention
  • FIG. 4 is a schematic structural diagram of an F-theta lens according to a second embodiment of the present invention.
  • FIG. 5 is a field curvature curve and a distortion curve diagram of an F-theta lens according to a second embodiment of the present invention.
  • FIG. 6 is a view of a field-of-view diffraction spot of an F-theta lens according to a second embodiment of the present invention.
  • the present invention provides an F-theta suitable for use in a laser processing process. Lens.
  • FIG. 1 is a schematic structural diagram of an F-theta lens according to a first embodiment of the present invention.
  • the F-theta lens includes a first lens 1, a second lens 2, a third lens 3, and a fourth lens. 4, a fifth lens 5 and a protective window 6; wherein the first lens 1 has a positive power; the second lens 2 has a negative power; the third lens 3 has a positive power; and the fourth lens 4 has a positive power;
  • the fifth lens 5 has positive refractive power;
  • the protective window 6 is used to prevent the optical components inside the lens group from being affected by external dust and impurities, so the protective window 6 is a planar lens and does not have positive or negative power. .
  • the focal length of each of the lenses and the total focal length f of the F-theta lens satisfy the following relationship:
  • f 1 , f 2 , f 3 , f 4 and f 5 are the focal lengths of the first lens 1 to the fifth lens 5, respectively;
  • the pupil of the F-theta lens is expressed within a range of 27 mm to 43 mm from the first lens
  • the aperture of the embodiment is disposed at 35.5 mm from the first lens, and the incident angle of the incident beam of the F-theta lens is 0 to 20 degrees.
  • Table 1 is a parameter of each lens of the F-theta provided by the first embodiment of the present invention, wherein "a" in the table represents a mirror surface of the lens near the object side, and “b" represents The mirror surface of the lens adjacent to the image side, the mirror surface of 1a represents the mirror surface of the first lens 1 on the side close to the object side, the mirror surface of 1b represents the mirror surface of the first lens 1 near the image side, and so on.
  • 1a mirror has a radius of curvature r 1
  • 1b has a radius of curvature of r 2
  • 2a has a radius of curvature of r 3
  • 2b has a radius of curvature of r 4
  • 3a has a radius of curvature of r 5
  • 3b has a radius of curvature of mirror
  • the radius of curvature of the mirror surface of r 6 , 4a is r 7
  • the radius of curvature of the mirror surface of 4b is r 8
  • the radius of curvature of the mirror surface of 5a is r 9
  • the radius of curvature of the mirror surface of 5b is r 10
  • the radius of curvature of the mirror surface of 6a is r 11 , 6b
  • the radius of curvature of the mirror surface is r 12
  • d 1 , d 3 , d 5 , d 7 , d 9 and d 11 respectively represent the thickness of each of the lenses, that is,
  • Table 1 is a parameter of each lens of the F-theta provided by the first embodiment of the present invention.
  • the radius of curvature of the mirror surface of 1a is larger than the radius of curvature of the mirror surface of 1b
  • the mirror surface of 2b of the second lens 2 is a plane mirror.
  • the radius of curvature of the mirror surface of 3a is larger than the radius of curvature of the mirror surface of 3b.
  • the radius of curvature of the mirror surface of 4a in the fourth lens 4 is larger than the radius of curvature of the mirror surface of 4b
  • the radius of curvature of the mirror surface of 5a in the fifth lens 5 is larger than the radius of curvature of the mirror surface of 5b.
  • the lens is made of fused silica, and the fused silica has a good refractive index, which is very suitable for lens fabrication in the field of laser processing.
  • FIG. 2 is a field curve and a distortion curve diagram of the F-theta lens according to the first embodiment of the present invention. It can be seen from the figure that when the incident light diameter is 15 mm, the meridional field curvature curve T and the arc The sagittal curvature curve S is less than 110um, about 100um, and the distortion is less than 0.1%.
  • FIG. 3 is a perspective view of a F-theta lens field of view diffraction diffraction pattern according to a first embodiment of the present invention, wherein the ring in the figure is a diffraction limit, and the figure shows that the discrete phase point does not exceed the diffraction limit. Furthermore, it is explained that the F-theta lens provided by the embodiment has a small horizontal shift in the spot, and the spot distortion in the scanning field of view is small. The angle between the exit of the lens and the exit of the central field of view is less than 4 degrees.
  • FIG. 4 is a schematic structural diagram of an F-theta lens according to a second embodiment of the present invention.
  • the F-theta lens includes: a first lens 1, a second lens 2, a third lens 3, and a fourth lens. 4, a fifth lens 5 and a protective window 6; wherein the first lens 1 has a positive power; the second lens 2 has a negative power; the third lens 3 has a positive power; and the fourth lens 4 has a positive power;
  • the fifth lens 5 has positive refractive power;
  • the protection window 6 is used to prevent the optical components inside the lens group from being affected by external dust and stray light, so the protection window 6 is a planar lens, and does not have positive power or negative optical focus. degree.
  • the focal length of each of the lenses and the total focal length f of the F-theta lens satisfy the following relationship:
  • f 1 , f 2 , f 3 , f 4 and f 5 are focal lengths of the first lens 1 to the fifth lens 5, respectively;
  • Table 2 is a parameter of each lens of the F-theta according to the second embodiment of the present invention, wherein "a" in the table represents a mirror surface of the lens near the object side, and “b” represents The mirror surface of the lens near the image side, the radius of curvature of the mirror surface of 1a is r 1 , the radius of curvature of the mirror surface of 1b is r 2 , the radius of curvature of the mirror surface of 2a is r 3 , and the radius of curvature of the mirror surface of 2b is r 4 .
  • the radius of curvature of the mirror surface of 3a is r 5
  • the radius of curvature of the mirror surface of 3b is r 6
  • the radius of curvature of the mirror surface of 4a is r 7
  • the radius of curvature of the mirror surface of 4b is r 8
  • the radius of curvature of the mirror surface of 5a is r 9
  • the radius of curvature of the mirror surface of 5b The radius of curvature of the mirror surface of r 10 , 6a is r 11
  • the radius of curvature of the mirror surface of 6b is r 12
  • d 1 , d 3 , d 5 , d 7 , d 9 and d 11 respectively represent the thickness of each of the lenses, that is,
  • the spacing between the front and rear surfaces of the lens on the optical axis, d 2 , d 4 , d 6 , d 8 and d 10 respectively represent the spatial separation between the lenses, and the unit of curvature radius and thickness in the
  • Table 2 is a parameter of each lens of the F-theta provided by the second embodiment of the present invention.
  • the radius of curvature of the mirror surface of 1a is larger than the radius of curvature of the mirror surface of 1b
  • the mirror surface of 2b of the second lens 2 is a plane mirror.
  • the radius of curvature of the mirror surface of 3a is larger than the radius of curvature of the mirror surface of 3b.
  • the radius of curvature of the mirror surface of 4a in the fourth lens 4 is larger than the radius of curvature of the mirror surface of 4b
  • the radius of curvature of the mirror surface of 5a in the fifth lens 5 is larger than the radius of curvature of the mirror surface of 5b.
  • the lens is made of fused silica, and the fused silica has a good refractive index, which is very suitable for lens fabrication in the field of laser processing.
  • FIG. 5 is a field curvature curve and a distortion curve diagram of the F-theta lens according to the second embodiment of the present invention. It can be seen from the figure that when the incident light diameter is 15 mm, the meridional surface curvature curve T and the arc The sagittal curvature curve S is less than 110um, about 100um, and the distortion is less than 0.5%.
  • FIG. 6 is a view showing a diffraction pattern of a field of view of a F-theta lens according to a second embodiment of the present invention, wherein the ring in the figure is a diffraction limit, and the figure shows that the discrete phase point does not exceed the diffraction limit. Furthermore, it is explained that the F-theta lens provided by the embodiment has a small horizontal shift in the spot, and the spot distortion in the scanning field of view is small. The angle between the exit of the lens and the exit of the central field of view is less than 2.6°.
  • the F-theta lens in the F-theta lens provided by the present invention for use in a laser processing process, includes a first lens having positive power and a second lens having negative power, having a third lens of positive power, a fourth lens having positive power, and a fifth lens having positive power; by optimizing the mirror curvature of the lens, the F-theta lens has a large field of view, The characteristics of low telecentricity and small distortion effectively reduce the measurement error of the spot in the horizontal direction during laser processing, and better suppress the deformation of the laser spot in the scanning field of view.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)

Abstract

L'invention concerne une lentille F-thêta appropriée pour être utilisée dans un traitement au laser. La lentille F-thêta comprend une première lentille (1) ayant une puissance optique positive, une deuxième lentille (2) ayant une puissance optique négative, une troisième lentille (3) ayant une puissance optique positive, une quatrième lentille (4) ayant une puissance optique positive, et une cinquième lentille (5) ayant une puissance optique positive. Grâce à l'optimisation de la courbure de la surface de lentille de la lentille, la lentille F-thêta présente les caractéristiques d'un grand champ de vision, d'une faible télécentricité et d'une faible distorsion, réduit efficacement les erreurs de mesure de points lumineux dans la direction horizontale pendant un traitement au laser, et empêche mieux la déformation de points laser dans la plage d'un champ de vision de balayage.
PCT/CN2018/103136 2017-08-30 2018-08-30 Lentille f-thêta appropriée pour être utilisée dans un traitement au laser WO2019042339A1 (fr)

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CN201710763481.5 2017-08-30
CN201710763481.5A CN109425962A (zh) 2017-08-30 2017-08-30 一种用于激光加工的F-theta镜头

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CN111123472B (zh) * 2018-11-01 2023-03-24 佳能企业股份有限公司 光学镜头
CN110936014A (zh) * 2019-12-30 2020-03-31 苏州迅镭激光科技有限公司 一种可实现大幅面扫描焊接的光学系统
CN114442264A (zh) * 2020-11-05 2022-05-06 宁波舜宇车载光学技术有限公司 光学镜头及电子设备
CN114029609B (zh) * 2021-11-16 2023-01-31 中国科学院长春光学精密机械与物理研究所 一种紫外镜头及其光学系统、打标设备
DE102022105366A1 (de) 2022-03-08 2023-09-14 Trumpf Laser Gmbh F-Theta-Objektiv und Scannervorrichtung damit

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EP0360233A2 (fr) * 1988-09-20 1990-03-28 Dainippon Screen Mfg. Co., Ltd. Système de lentilles f-theta télécentrique
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