WO2019035557A1

WO2019035557A1 - Electrical element transfer apparatus

Info

Publication number: WO2019035557A1
Application number: PCT/KR2018/007836
Authority: WO
Inventors: 장현태; 박민; 이병훈; 이영철; 이창준; 장지영; 문영준; 박민영; 윤정근; 최원; 장시호
Original assignee: 삼성전자주식회사
Priority date: 2017-08-14
Filing date: 2018-07-11
Publication date: 2019-02-21

Abstract

According to various embodiments, provided is an electrical element transfer apparatus comprising: a fixing jig in which each of a plurality of electrical elements is arranged at a predetermined interval; a movement jig movably arranged at an upper part of the fixing jig, and including a plurality of first accommodating grooves for accommodating at least a part of each of the plurality of electrical elements; and an attraction device arranged around the movable jig and attaching each of the plurality of electrical elements through the movable jig to the first accommodating groove of the movable jig through magnetic force. Additional various embodiments are possible.

Description

Electric device transfer device

Various embodiments of the present invention are directed to a transfer device for an electrical device.

Electrical devices such as micro LEDs are being replaced by pixels in the display. Remote displays (such as outdoor outdoor displays) are not suitable for short-distance use or home use because they use a few mm LED package. Therefore, in order to realize a near-field display, the problem of how to transfer an LED having a size of several tens to several hundreds of microns, which can correspond to a pixel of a current pixel, to a substrate with high precision and high yield must be solved in advance. The size of one pixel of a home display under development is usually about 100 mu m, and the size of the R / G / B sub-pixel constituting it is only a few tens of mu m.

Although LEDs with a size of several tens of micrometers corresponding to a pixel size applied to a near-field display have been mass-produced and manufactured, various transfer techniques capable of transferring and mounting the manufactured micro-LEDs to a substrate with a fast, accurate, and low defect rate have been studied to be.

Micro LEDs applied to pixels in a near-field display have a size in the range of 30 to 40 μm and can be fabricated on a substrate (eg, wafer, sapphire substrate, quartz substrate, etc.) have. According to one embodiment, the micro-LEDs thus fabricated must be mounted on a PCB of the display and must be transportable with an accurate, fast and low defect rate. Particularly, in the transfer method, a multi-chip transfer method in which a plurality of micro-LEDs are transferred to the substrate by one transfer can be used. As a multichip transfer method, a method of transferring a plurality of micro-LEDs from a mother substrate to a display substrate using a conventional stamp, tape, or high-speed mounter is used. As a result, a defect rate of the process itself is high, Lt; / RTI >

The various embodiments of the present invention can provide an electric element transfer apparatus which can have a high transfer rate and a low defect rate.

The present invention accurately picks up a microdevice chip using the adhesive force of a porous material and a tape, picks up a precise microdevice chip using the attraction force provided by the vacuum, the porous material and the tape, It is possible to provide a rearrangement device capable of preventing deformation of a micro-LED chip which is not picked up adjacent to the chip.

According to various embodiments, there is provided an electric element transferring apparatus, comprising: a stationary jig in which each of the plurality of electric elements is arranged at a constant interval; a movable jig which is disposed movably above the stationary jig, A moving jig including a plurality of first receiving grooves for receiving the plurality of electric devices and a plurality of electric devices disposed near the moving jig, wherein each of the plurality of electric devices is attached to the first receiving groove of the moving jig by a magnetic force through the moving jig It is possible to provide an electric element transferring apparatus including the attracting apparatus.

According to various embodiments, there is provided a transfer device for a microdevice chip, comprising: a second device in which a plurality of microdevice chips are placed on a fixed carrier film; And a plurality of first through holes opened spatially connected to the first vacuum, and a first porous material coupled to the first vacuum, and a second porous material fixed to the first porous material, And a first device including a first adhesive member that is adsorbed to the first porous material portion by a first vacuum, wherein the first device causes the plurality of micro-LED chips prepared by the adhesive force of the first adhesive member to be selectively And the individual microdevice chips picked up and transported can be lowered by the first device and rearranged on the temporary fixing film.

According to various embodiments, there is provided a micro-LED transfer device, comprising: a fixing device for holding a plurality of micro-LED chips with a fixed carrier film thereon; And a pick-up device for selectively picking up and transporting the plurality of micro-LED chips, wherein the pick-up device comprises: A first porous material portion including a plurality of first through holes spatially connected to the first vacuum; And a first adhesive member that is fixed to the first porous material portion and is adsorbed to a portion of the first multi-processing material portion in accordance with an ON operation of the first vacuum. A second porous material portion including a plurality of second through holes spatially connected to the second vacuum; And a second adhesive member that is fixed to the second porous material portion and is adsorbed to the second porous material portion by an on operation of the second vacuuming.

The various embodiments of the present invention can be applied to a fixing jig for rearranging electric devices by type and a transfer jig for picking up electric devices arranged in the fixing jig and transferring the electric devices to the PCB of the electronic device, There is an alignment structure for aligning the respective positions, and it is possible to easily and quickly transfer the desired electric devices to the substrate using the alignment structure and the device attracting device through the moving jig.

The microdevice chip transferring apparatus according to the present invention is a device for transferring a microdevice chip of a large-size display device (e.g., a TV) by picking up and dropping a plurality of micro-LED chips precisely at a time The production time can be effectively shortened.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a block diagram illustrating a substrate substrate for manufacturing a micro LED according to various embodiments of the present invention. FIG.

1B is a block diagram of a micro-LED according to various embodiments of the present invention.

2 is a view showing a configuration of a fixing jig according to various embodiments of the present invention.

3 shows a schematic system of a transfer device according to various embodiments of the present invention.

4 is a process diagram illustrating a process of transferring a micro-LED according to various embodiments of the present invention.

5A to 5H are schematic diagrams illustrating a process of transferring a micro-LED according to various embodiments of the present invention.

6A to 6D are views showing a configuration of a fixing jig for aligning micro-LEDs according to various embodiments of the present invention.

7 is a configuration diagram of a transfer device according to various embodiments of the present invention.

FIG. 8 is a view showing a screen configuration of a display manufactured using micro-LEDs transferred using a transfer device according to various embodiments of the present invention.

9 is a view showing a process of rearranging a plurality of prepared micro-LED chips according to various embodiments.

FIG. 10A is a diagram showing a rearrangement device of a micro-LED chip according to various embodiments of the present invention, and shows a state before pickup of a micro-LED chip. FIG.

FIG. 10B is a diagram showing a state in which the first device is moved downward and attached to a selected micro-LED chip among the micro-LED chip rearrangement devices according to various embodiments of the present invention. FIG.

10C is a view illustrating a state in which the first device moves the selected micro LED chip upward among the micro LED chip rearrangement devices according to various embodiments of the present invention.

FIG. 10D is a view showing a state in which a selected micro-LED chip is attached to a temporary fixing film after the first device is horizontally moved and moved downward, among the rearrangement devices of micro-LED chips according to various embodiments of the present invention.

11A is a view showing a cross section of an adhesive member according to various embodiments of the present invention.

11B is a cross-sectional view of another adhesive member according to various embodiments of the present invention.

Hereinafter, various embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood, however, that this disclosure is not intended to limit the present disclosure to the particular embodiments, but includes various modifications, equivalents, and / or alternatives of the embodiments of the present disclosure. In connection with the description of the drawings, like reference numerals may be used for similar components.

In this document, the expressions " having, " " having, " " comprising, " or &Quot;, and does not exclude the presence of additional features.

In this document, the expressions "A or B," "at least one of A or / and B," or "one or more of A and / or B," etc. may include all possible combinations of the listed items . For example, "A or B," "at least one of A and B," or "at least one of A or B" includes (1) at least one A, (2) at least one B, (3) at least one A and at least one B all together.

The terms "first," "second," "first," or "second," etc. used in various embodiments may describe various components in any order and / or importance, Lt; / RTI > The representations may be used to distinguish one component from another. For example, the first user equipment and the second user equipment may represent different user equipment, regardless of order or importance. For example, without departing from the scope of the present disclosure, the first component may be referred to as a second component, and similarly, the second component may be named as the first component.

It is also possible that a component (eg, a first component) is "(operatively or communicatively coupled) / to" another component (eg, a second component) It is to be understood that when an element is referred to as being " connected to ", it is to be understood that the element may be directly connected to the other element or may be connected through another element (e.g., a third element). On the other hand, when it is mentioned that a component (e.g., a first component) is " directly connected " or " directly connected " to another component (e.g., a second component) It can be understood that there is no other component (e.g., a third component) between other components.

The phrase " configured to " as used herein is intended to encompass, depending on the context, for example, having the ability to be suitable for, The present invention may be used interchangeably with "designed to," "adapted to," "made to," or "capable of". The term " configured to (or configured) " may not necessarily mean specifically designed to be "specifically designed." Instead, in some circumstances, the expression "a device configured to" (Or set) to perform phrases A, B, and C. For example, a processor " configured (or configured) to perform phrases A, B, and C " (E. G., An embedded processor), or a generic-purpose processor (e. G., A CPU or application processor) capable of performing the operations by executing one or more software programs stored in the memory device.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the other embodiments. The singular expressions may include plural expressions unless the context clearly dictates otherwise. All terms used herein, including technical or scientific terms, may have the same meaning as commonly understood by one of ordinary skill in the art of the present disclosure. Commonly used predefined terms may be interpreted to have the same or similar meaning as the contextual meanings of the related art and are not to be construed as ideal or overly formal in meaning unless expressly defined in this document . In some cases, the terms defined herein may not be construed to exclude embodiments of the present disclosure.

An electronic device in accordance with various embodiments of the present disclosure can be, for example, a smartphone, a tablet personal computer, a mobile phone, a videophone, an electronic book reader e- book reader, a desktop personal computer, a laptop personal computer, a netbook computer, a workstation, a server, a personal digital assistant (PDA), a portable multimedia player (PMP) Player, a mobile medical device, a camera, or a wearable device (e.g. smart glasses, head-mounted-device (HMD)), electronic apparel, electronic bracelets, electronic necklaces, An electronic device, an electronic device, an apparel, an electronic tattoo, a smart mirror, or a smart watch).

In some embodiments, the electronic device may be a smart home appliance. Smart home appliances include, for example, televisions, digital video disk players, audio, refrigerators, air conditioners, vacuum cleaners, ovens, microwaves, washing machines, air cleaners, set- (Such as a home automation control panel, a security control panel, a TV box, such as Samsung HomeSync ^TM , Apple TV ^TM or Google TV ^TM , a game console such as Xbox ^TM , PlayStation ^TM , An electronic key, a camcorder, or an electronic photo frame.

In an alternative embodiment, the electronic device may be any of a variety of medical devices (e.g., various portable medical measurement devices such as a blood glucose meter, a heart rate meter, a blood pressure meter, or a body temperature meter), magnetic resonance angiography (MRA) A global positioning system receiver, an event data recorder (EDR), a flight data recorder (FDR), an automotive infotainment device, a navigation system, a navigation system, Electronic devices (eg marine navigation devices, gyro compass, etc.), avionics, security devices, head units for vehicles, industrial or home robots, ATMs (automatic teller's machines) point of sale or internet of things such as light bulbs, various sensors, electric or gas meters, sprinkler devices, fire alarms, thermostats, street lights, toasters, A water tank, a heater, a boiler, and the like).

According to some embodiments, the electronic device is a piece of furniture or a part of a building / structure, an electronic board, an electronic signature receiving device, a projector, Water, electricity, gas, or radio wave measuring instruments, etc.). In various embodiments, the electronic device may be a combination of one or more of the various devices described above. An electronic device according to some embodiments may be a flexible electronic device. Further, the electronic device according to the embodiment of the present disclosure is not limited to the above-described devices, and may include a new electronic device according to technological advancement.

Hereinafter, a method of manufacturing a display using a micro-LED mounting technique according to various embodiments of the present invention will be described with reference to the accompanying drawings.

The configuration of the display according to the exemplary embodiment of the present invention can be implemented regardless of the size of the LED, so that the size of the LED to be used is not limited. For example, a large-sized display such as an indoor / outdoor signage uses a few hundred micrometers of LEDs, and an LED of several tens of micrometers can be used for a display. have.

In addition, the exemplary embodiments of the present invention illustrate and describe the transport apparatus and method for a micro-LED, but the present invention is not limited thereto. For example, a variety of electrical devices that can utilize the transport devices and methods disclosed herein can be applied.

Referring to FIG. 1A, the micro-LED 110 may have a thickness of several tens of micrometers (e.g., 30 to 40 micrometers) to be applied to the sub-pixels (e.g., Pr, Pg, Size. The micro-LEDs 110 may be fabricated in a single crystal state of a compound semiconductor at a high temperature / high pressure on a sapphire or SiX base substrate 100 (e.g., a wafer) : red, green, blue) can be configured differently. For example, red is made of GaAs, green is made of InGaP, blue is made of compound semiconductor of GaN, wavelength is determined according to the inherent energy bandgap value of each composition, and the implemented color is different. According to one embodiment, in order for the grown micro-LED 110 to emit light, it may be subjected to several tens of semiconductor processes in an electrically connectable structure in which holes and electrons can be supplied. A pair of connection pads 112 protruding from the body 111 of the micro-LED 110 may be formed in a pad-up type of the base substrate 100.

1B, a micro-LED 110 fabricated on a mother substrate (e.g., a mother substrate 100 shown in FIG. 1A) includes a body 111 as a light emitting portion and a pair of The connection pad 112 may be formed of a metal. According to one embodiment, the micro LED 110 can be used as an electronic device (e.g., a display) (e.g., a display (not shown) of FIG. 8 using a transport device (E.g., a solder pad) (e.g., a conductive pad 241 of FIG. 3) disposed on a substrate (e.g., substrate 240 of FIG. According to one embodiment, the micro-LED 110 attached on the substrate 100 may be subjected to a laser lift-off (LLO) process through a laser (e.g., a gas laser or a solid laser (DPSS) laser) And can be separated from the base substrate 100 by using the same.

According to various embodiments, a micro LED 110 according to an exemplary embodiment of the present invention may be incorporated into an LED attraction device (e.g., the attraction device 300 of FIG. 3) applied to a transfer device (e.g., the transfer device 300 of FIG. 3) 230) can be attracted to a moving jig (e.g., the moving jig 220 in Fig. 3) of the transfer device (e.g., the transfer device 300 in Fig. 3). According to one embodiment, the micro-LED 110 may include an element that is attracted to the magnetic force of the EL attracting device (e.g., the attracting device 230 of FIG. 3). According to one embodiment, the element 113 may include a metal member that is applied to at least a portion of the area of the micro-LED 110. According to one embodiment, the element 113 may comprise a layer of nickel (Ni) applied to at least a portion of the area of the micro-LED 110. The nickel layer is disposed on at least one of the bottom surface of the body 111 of the micro-LED 110, the pad bottom surface 1121 of the pair of contact pads 113, or the pad side surface 1122 . Therefore, the micro-LED 110 can be attracted toward the bottom surface of the moving jig by the magnetic force of the LED attracting device (e.g., the attracting device 230 of FIG. 3) and the conveying device 300 for conveying.

Referring to FIG. 2, the micro-LEDs 110 manufactured on the mother substrate 100 may be rearranged on at least one fixing jig 210. According to one embodiment, the micro-LED 110 may include a fixed jig (not shown) to match the elements constituting the display pixel, such as pitch, color (R / G / B) 210 at regular intervals. According to one embodiment, the micro-LED 110 manufactured on the mother substrate 100 can be moved to the stationary jig 210 through the pickup device only by the micro-LED 110 normally operating through the good product inspection.

According to various embodiments, the fixing jig 210 may be configured in units of sub-pixels (e.g., Pr, Pg, Pb) that constitute pixels of the display, for example. For example, one fixing jig (e.g., the first fixing jig 210-1 in Fig. 3) can accommodate only a plurality of micro-LEDs 110 that express R color. According to one embodiment, another fixing jig (e.g., the second fixing jig 210-2 in Fig. 3) can accommodate only a plurality of micro-LEDs 110 that exhibit G color. According to one embodiment, the remaining one fixing jig (for example, the third fixing jig 210-3 in FIG. 3) can accommodate only a plurality of micro LEDs 110 that display B colors.

According to various embodiments, the fixing jig 210 may include a first receiving groove 2111 formed to accommodate at least a part of the area of the micro-LED 110 at each position where the plurality of micro-LEDs 110 are disposed. The first receiving groove 2111 may be formed lower than the upper surface 211 of the fixing jig 210 facing the moving jig (e.g., the moving jig 220 in Fig. 3). The first receiving groove 2111 is connected to the connection pad 112 of the micro LED 110 facing the forward direction (e.g., the direction in which the connection pad 112 is directed downward) after being transferred by the pickup device, To at least a portion of the body 111. [0035] According to one embodiment, the fixing jig 210 may be formed of a material such as a non-magnetic metal, plastic, ceramic, glass, or silicone. According to one embodiment, when the micro-LED 110 is accommodated in the first receiving groove 2111, since the micro-LED 110 is interrupted by the first receiving groove 2111, . According to one embodiment, the first receiving groove 2111 may be formed in a shape that is equal to or larger than the size of the micro-LED 110.

3, the transfer device 300 includes at least one fixing jig 210, a moving jig 220 and a moving jig 220 (not shown) And an attracting device 230 for attracting at least one micro LED 110 arranged in the fixing jig 210 through a plurality of micro LEDs 110. [ According to one embodiment, the at least one fixing jig 210 includes a first fixing jig 210-1 in which a plurality of micro-LEDs corresponding to a sub-pixel Pr in which R color is expressed, for example, A plurality of micro-LEDs corresponding to the second fixing jig 210-2 in which a plurality of micro-LEDs corresponding to the sub-pixel Pg in which the G color is expressed and the sub-pixels Pb in which the B color is expressed are arranged And a third fixing jig 210-3.

The moving jig 220 may also include a second receiving groove 2211 formed on the lower surface 221 facing the fixing jig 210 so as to be lower than the lower surface 221. According to one embodiment, the second receiving groove 2211 also has a depth capable of accommodating at least a part of the micro LED 110 disposed in the first receiving groove 2111 of the fixing jig 210, As shown in FIG. According to one embodiment, the micro-LED 110 may be arranged to receive at least a part of the body 111 in the second receiving groove 2211 of the moving jig 220. According to one embodiment, the moving jig 220 may also be formed of a non-magnetic metal, plastic, ceramic, glass, silicon, or the like.

According to various embodiments, the LED attracting device 230 may include magnetic force generating means for attracting an element responsive to a magnetic force (e.g., the element 113 responsive to the magnetic force of FIG. 1B). According to one embodiment, the magnetic force generating means may comprise a ferrite magnet, a neodymium magnet, a rare earth magnet or a common metal magnet. According to one embodiment, the LED attracting device 230 for generating magnetic force may be formed in a plate shape, a cylindrical shape, a coin shape, a projection shape, an entire coil shape, or a partial coil shape. According to one embodiment, the LED attracting device 230 may be selectively moved in a generally contact manner with the upper portion of the moving jig 220 and may include at least one micro LED 110 disposed in the fixing jig 210, To the second receiving groove 2211 of the moving jig 220 by using a magnetic force.

According to various embodiments, the LED attraction device 230 for generating magnetic force may be replaced by an electromagnet device that generates magnetic force only when power is applied. In this case, the LED attracting device 230 may be integrally formed with the moving jig 220, or the moving jig 220 itself may be formed of an electromagnet without a separate attracting device.

According to various embodiments, the moving jig 220, which includes at least one micro-LED 110 attracted by the LED attracting device 230, moves a certain distance and is positioned on top of the PCB 240 And the magnetic attraction of the LED attracting device 230 may be removed at the alignment position of the micro LED 110 of the substrate 240. According to one embodiment, the micro-LED 110 is separated from the moving jig 220, and a process (for example, soldering or the like) in which the connection pad 112 is electrically connected to the conductive pad 231 of the substrate 240, Can be implemented.

4 is a process diagram illustrating a process of transferring a micro-LED according to various embodiments of the present invention. 5A to 5H are schematic diagrams illustrating a process of transferring a micro-LED according to various embodiments of the present invention.

Referring to FIG. 4, in operation 401, a plurality of electrical elements 110 may be fabricated. According to one embodiment, the electrical device 110 includes a micro-LED 110 having a size of sub-pixel units (e.g., 30 to 40 mu m in size) constituting a pixel of a display (e.g., the display 800 of Fig. 8) . According to one embodiment, the micro-LED 110 can be fabricated on a base substrate (e.g., a wafer) (e.g., the base substrate 100 of FIG. 1A) through a high-level semiconductor process.

Subsequently, in operation 403, a plurality of electrical elements (hereinafter referred to as "micro-LEDs") fabricated on a base substrate (for example, the base substrate 100 of FIG. 1A) are subjected to a cutting process (eg, singulation and flipping) And can be arranged in the fixing jig 210 by a pickup device. 5A, at least one fixing jig 210 is provided on the first receiving groove 2111 in such a manner as to accommodate at least a part of each of the micro-LEDs 110 on the plurality of first receiving grooves 2111. In this embodiment, It is possible to prevent the LED from randomly flowing. According to one embodiment, at least one immobilization jig 210 may include a pixel (e.g., pixel P of FIG. 8) of a display (e.g., display 800 of FIG. 8) The microLEDs 110 in units of subpixels (e.g., subpixels Pr, Pg, Pb in FIG. 8) may be separately included. For example, one fixing jig (e.g., the first fixing jig 210-1 in Fig. 3) can accommodate only a plurality of micro-LEDs 110 that express R color. According to one embodiment, another fixing jig (e.g., the second fixing jig 210-2 in Fig. 3) can accommodate only a plurality of micro-LEDs 110 that exhibit G color. According to one embodiment, the remaining one fixing jig (for example, the third fixing jig 210-3 in FIG. 3) can accommodate only a plurality of micro LEDs 110 that display B colors.

Thereafter, the moving jig 220 may be disposed on the upper portion of the fixing jig 210 in the 405 operation. 5A and 5B, the micro-LED 110 arranged in each of the plurality of first receiving grooves 2111 moves the moving jig 220 to the upper portion of the fixing jig 210, At least some areas may be accommodated in each of the second receiving grooves 2211 formed in the bottom surface 221 of the base plate 220. The first receiving groove 2111 of the fixing jig 210 and the second receiving groove 2211 of the moving jig 220 are moved in the upward direction of the fixing jig 210, And the micro-LED 110 may be supported on the space formed by the first receiving groove 2111 and the second receiving groove 2211. The micro-

Then, in the operation 407, a magnetic force can be applied to the moving jig 220. According to one embodiment, in this case, the LED attracting device 230 attracts the micro-LED 110 including the element (for example, the element 113 of FIG. 1B) The magnetic force generating device may include a magnetic force generating device. 5B and 5C, the LED attracting device 230 may be disposed on the upper portion of the moving jig 220, and may be disposed in such a manner as to move in the direction of the moving jig and come close to or in contact with the moving jig 220 have.

Thereafter, at 409 operation, the micro-LED 110 attached via the attraction of the attracting device can be moved to the PCB (PCB) 240 using the moving jig 220. 5D and 5E, when a magnetic force is applied to the LED-driven apparatus 230 disposed on the upper side of the moving jig 220, the micro-LED mounted on the first receiving groove 2111 of the fixing jig 210 110 may be moved to the second receiving groove 2211 of the moving jig 220 by the magnetic force of the LED attracting device 230 and then the position thereof may be fixed. The transport jig 220 can then be transported to the top of the substrate 240 (e.g., main substrate) used for an electronic device (e.g., a display) by a transport mechanism.

Then, in 411 operation, after the magnetic force of the moving jig 220 is removed, the micro-LED 110 can be mounted on the substrate 240. Referring to FIGS. 5F to 5H, the moving jig 220 can be moved to an upper portion of the substrate 240. FIG. For example, the moving jig 220 can be moved in such a manner that the connection pad 112 of the micro-LED 110 is in close proximity to or in contact with the top of the substrate 240. According to one embodiment, after the moving jig 220 is moved onto the substrate 240, the LED attracting device 230 can be removed from the magnetic force. According to one embodiment, the LED attracting device 230 may be moved away from the moving jig 220 in order to remove the magnetic force, or the magnetic force applied to the LED attracting device may be removed by electrical disconnection (for example, in the case of an electromagnet) . When the magnetic force is removed from the moving jig 220, the micro-LEDs 110 may be disposed in such a manner as to contact the upper surface of the substrate 240. The micro LEDs 110 may be disposed in a manner such that the connection pads 112 physically contact the conductive pads 241 of the substrate 240 and may be electrically coupled to the conductive pads 241 of the substrate 240 by an electrical bonding process such as soldering, Or the like) to be electrically connected to the substrate 240.

Referring to FIG. 6A, the fixing jig 610 does not have a separate receiving groove formed on the upper surface 611 thereof. According to one embodiment, an adhesive member 612 may be disposed on the upper surface 611 of the fixing jig 610 instead of the receiving groove. According to one embodiment, the micro-LED 110 is transported from a base substrate (e.g., the base substrate 100 of FIG. 1A) and can be maintained in a rearranged position via the adhesive member 612 of the fixing jig 610 have. The adhesive property of the adhesive member 612 can be set to be weaker than the attracting force (e.g., magnetic force, vacuum suction force, etc.) of the attracting device 230 disposed at the upper portion of the moving jig 220. [ According to one embodiment, in this case, the fixing jig 610 may be formed of an uncured resin (such as liquid poly (PI), polydimethylsiloxane (PDMS), polyethylene terephthalate (EP), epoxy or the like, UV tape, A tape (non-UV tape) or a heat foaming tape or the like may be used together with the adhesive member 612.

6B, the fixing jig 620 may include a receiving groove 6211 formed to be lower than the upper surface 621 to accommodate at least a portion of the micro-LED 110, as described above. According to one embodiment, an adhesive member 622 may be disposed on the bottom surface of the receiving groove 6211. [ According to one embodiment, the adhesive member 622 may assist the function of the receiving groove 6211 to prevent the micro LED 110 from flowing arbitrarily.

Referring to FIG. 6C, an LED attraction device 632 may be disposed below the fixing jig 630. According to one embodiment, the LED attracting device 632 is configured to lower the micro LED 110 including the element (e.g., the element 113 of FIG. 1B) that is responsive to the magnetic force lower than the upper surface 631 of the fixing jig 630 And a magnetic force generating device for holding it in the formed receiving groove 6311. According to one embodiment, the LED attracting device 632 may be a magnet or an electromagnet of various materials described above.

Referring to FIG. 6D, an LED attraction device 642 may be disposed below the fixing jig 640. According to one embodiment, the LED attraction device 642 may include a vacuum device. According to one embodiment, the fixing jig 640 is formed lower than the upper surface 641 and may include a plurality of receiving grooves 6411 for receiving the respective micro LEDs 110. [ According to one embodiment, each of the receiving grooves 6411 may have an intake hole 6412 from the bottom of the receiving groove 6411 to a bottom surface opposite to the top surface of the fixing jig 640, The attracting device 642 can maintain the vacuum suction state so that the micro-LEDs 110 accommodated in the receiving grooves 6411 through the suction holes 6412 are not detached from the receiving grooves 6411 or are not allowed to flow. According to one embodiment, the vacuum suction state by the attracting device 642 is selectively applied or removed depending on whether the micro jig 110 is conveyed by the moving jig (e.g., the moving jig 220 in Fig. 3) .

Referring to FIG. 7, the transfer device 700 may include a moving jig 720 to which an LED attraction device 730 using vacuum suction is applied. According to one embodiment, the LED attraction device 730 may include a vacuum device. According to one embodiment, the moving jig 720 is formed lower than the bottom surface 721 and may include a plurality of receiving grooves 7211 for receiving the respective micro-LEDs 110. Each of the receiving grooves 7211 may be formed with an intake hole 7212 from the bottom surface of the receiving groove 7211 to an upper surface facing the bottom surface 721 of the moving jig 720, The LED driving device 730 uses a vacuum suction state such that the micro-LED 110 accommodated in the receiving groove 7211 can be separated from the receiving groove 7211 through the suction hole 7212, Lt; / RTI > According to one embodiment, the vacuum suction state by the attraction device 730 can be selectively applied or removed depending on whether the micro jig 720 moves the micro-LED 110 or not.

Although not shown, the LED attraction device using a vacuum suction or a magnetic force can be applied to a fixing jig or a moving jig, or to both a fixing jig and a moving jig.

8 is a schematic view showing a state in which micro-LEDs (for example, the micro-LEDs 110 in FIG. 1A) are arranged for sub-pixels Pr, Pg and Pb from the parent substrate 100 (For example, the micro-LED 110 of FIG. 1A) corresponding to the pixel is disposed on a substrate (e.g., a substrate of the display 800) of the display 800, (E.g., the substrate 240 in Fig. 3). According to one embodiment, the display 800 may have a plurality of pixels P arranged at regular intervals, and each pixel may include sub-pixels Pr, Pg, and Pb. According to one embodiment, micro-LEDs corresponding to the respective sub-pixels Pr, Pg and Pb are transferred by the transfer device according to the invention to the substrate of the display 800 (e.g. the substrate 240 of FIG. 3) It can be mounted quickly and accurately.

Referring to FIG. 9, a plurality of micro-LED chips (R / G / B) that are attached in an aligned fashion include elements constituting a display pixel such as pitch, color (R / G / B) And may be rearranged on the temporary fixing film 122 in accordance with a gap or the like.

Hereinafter, the micro-LED chips will be referred to as R, G, and B, respectively. R represents a micro-LED chip emitting red color, G represents a micro-LED chip emitting green color, and B represents a micro-LED chip emitting blue color.

For example, a method of rearranging a plurality of micro-LEDs (R / G / B) is performed by using micro-LED chips R / G / B by using a pickup tool or picker 925 The LED chip can be picked up and fixed on the temporary fixing film 922.

The method of rearranging the plurality of micro-LED chips R / G / B may be a method of picking up the micro-LED chips R / G / B and transferring them to a temporary fixing film, (R / G / B) is picked up and fixed on a temporary fixing film, or a method of picking up a micro-LED chip (R / G / B) using a magnetic field and fixing it on a temporary fixing film, (R / G / B) is picked up and fixed on a temporary fixing film by using a micro-LED chip (R / G / B) Any of which may be applied.

After the aligned micro LEDs B for emitting blue light, the aligned micro LEDs G for emitting green color and the micro LEDs for emitting red color are prepared, (R / G / B) selected by the R / G / B can be moved and rearranged on the temporary fixing film 922. Arrow directions (?,?,?) Indicate the moving direction of the pickup device 925. The moving direction of the pick-up device 925 moves the selected micro LED chip R / G / B vertically upward (①), horizontally (②), vertically downward (③) The micro-LED chip (R / G / B) can be rearranged by being placed on the temporary fixing film 925. The shifted microLED chip (R / G / B) can be fixed in a state in which RGB is rearranged into one set. The temporary fixing film 925 can be attached to the carrier film 920. [ Thereafter, the micro-LED chips attached on the temporary fixing film 925 are formed in a board form by a molding process and can be fixed by a molding portion.

Hereinafter, with reference to the accompanying drawings, a structure of a device for rearranging a micro LED chip in a micro LED display fabrication process will be described.

FIG. 10A is a diagram showing a rearrangement device of a micro-LED chip according to various embodiments of the present invention, and shows a state before pickup of a micro-LED chip. FIG. FIG. 10B is a diagram showing a state in which the first device is moved downward and attached to a selected micro-LED chip among the micro-LED chip rearrangement devices according to various embodiments of the present invention. FIG. 10C is a view illustrating a state in which the first device moves the selected micro LED chip upward among the micro LED chip rearrangement devices according to various embodiments of the present invention. FIG. 10D is a view showing a state in which a selected micro-LED chip is attached to a temporary fixing film after the first device is horizontally moved and moved downward, among the rearrangement devices of micro-LED chips according to various embodiments of the present invention.

Referring to FIGS. 10A to 10D, a configuration of a redistributing device (hereinafter referred to as a redistributing device) 100 according to various embodiments of the present invention will be described. The rearrangement device 101 of the present invention may mean that the prepared micro LED chips 1010 are arranged in one set of RGB.

The rearrangement device 101 according to various embodiments may include a first device 1000 for selectively picking up, transporting and dropping the prepared micro-LED chip 1010. [ In addition, the rearrangement device 101 according to various embodiments includes a second device 1020 that prevents the micro-LED chips from being picked up or flowing out of the prepared micro-LED chips 1010 that are adjacent to the picked-up micro- can do. For example, the first apparatus 1000 may be referred to as a pick-up apparatus or a transfer apparatus, and the second apparatus 1020 may be referred to as a holding apparatus or holding apparatus. The first device 1000 may be located above the prepared microdevice chip 1010 and may be referred to as an upper device and the second device 1020 may be located below the prepared microdevice chip 1010, .

The first device 1000 according to various embodiments can pick up the micro-LED chip 1010 using the adhesive force of the adhesive member 1003 and precisely pick up the prepared micro-LED chip 1010 using the attraction force .

The prepared micro-LED chip 1010 may be a plurality of micro-LED chips mounted on the carrier film 1011. The micro-LED chips 1010 attached on the carrier film 1011 are arranged on the second device 1020 before being picked up, so that the pre-pickup state can be prepared.

The first apparatus 1000 according to various embodiments may include a first vacuum 1001, a first porous material portion 1002, and a first adhesive member 1003. The first vacuum 1001 may be received in an enclosed structure in an outer casing frame (not shown) and spatially connected to the first porous material 1002. For example, the first vacuum 1001 can be turned on or off by a control unit (not shown).

The first porous material 1002 according to various embodiments may include a plurality of first through holes 1002a spatially connected to the first vacuum 1001. Each of the first through holes 1002a may be regularly arranged in the first porous material portion 202. [ However, the first through apertures 1002a may be non-regularly arrayed, and may be symmetrically or non-symmetrically arranged. Also, the first through-hole 1002a may extend linearly in cross-section. However, the cross-sectional shape of the first through-hole need not be limited to a linear shape, but may be non-linear, e.g., a curved shape.

Each of the first through holes 1002a is formed in the shape of a hole and the first portion (one end portion) is directed toward the first vacuum 1001 and the second portion (the other end) And can face the first adhesive member 1003. For example, the first adhesive member 1003 can be adsorbed to the first porous material portion in accordance with the ON operation of the first vacuum 1001. [ The first porous material portion 1002 according to various embodiments may include at least one concavo-convex portion in a portion facing the first adhesive member 1003. [ The irregularities may be repeatedly formed in the first porous material portion 1002 at regular intervals.

For example, the concave-convex portion may include a protrusion 10020 and a concave portion 10022 disposed adjacent to the protrusion 10020. The micro-LED chip 1010 can be selectively picked up by the protrusion 10020. [ The protrusion 10020 may protrude downward and may be spaced away from the prepared micro-LED chip 1010. This state is shown in FIG. 10A. The protrusions 10020 and the recesses 10022 may be alternately arranged along the portion of the first porous material portion 1002 facing the first contact member 1003. The protrusion height of the protrusion 10020 may be formed to be the same. Further, the irregular portion can be manufactured by laser processing, plasma processing, machining, or the like.

According to the configuration of the first porous material portion 1002, the micro-LED chip 1010 is attached to a portion of each first adhesive member 1003 facing each projection portion 10020, It can be.

The protrusions 10020 according to various embodiments include an adsorption face 10020a facing the first adhesive member 1003 and the adsorption face 10020a is bonded to the first adhesive 10020 in accordance with the ON action of the first vacuum 1001. [ Can be adsorbed to at least part of the member (1003). Further, at the time of turning off the first vacuum 1001, at least a part of the first adhesive member 1003 may be disposed apart from each of the projections 10020 or the adsorption face 10020a of the projections.

The second device 1020 according to various embodiments may include a second vacuum 1021, a second porous material 1022, and a second adhesive material 1023. The second vacuum 1021 may be received in the sealed structure of the outer casing frame and spatially connected to the second porous material 1022. For example, the second vacuum 1021 can be turned on or off by a control unit (not shown).

The second porous material 1022 according to various embodiments may include a plurality of second through holes 1022a spatially connected to the second vacuum 1001. [ Each of the second through-holes 1022a may be regularly arranged in the second porous material portion 1022. [ However, the second through-holes 1022a may be non-regularly arrayed, and may be symmetrically or non-symmetrically arranged. Also, the second through-hole 1022a may extend linearly in cross-section. However, the cross-sectional shape of the second through-hole need not be limited to a linear shape, but may be non-linear, e.g., a curved shape.

Each of the second through holes 1022a is formed as a hole and the first portion (one end portion) is directed toward the first vacuum 1021, the second portion is directed toward the second adhesive member 1022, It can face the adhesive member 1022. [ For example, the second bonding member 1023 can be adsorbed to the second porous material portion 1022 in accordance with the ON operation of the second vacuum 1021. [

The second adhesive member 1023 according to various embodiments may be fixed to the second porous material 1022 and may be disposed in the second porous material 1022 by the second vacuum 1021 . For example, the second adhesive member 1023 may be at least partially attached to the carrier film 1011 to which a plurality of micro-LED chips 1010 are attached.

The rearrangement device 100 according to various embodiments may configure the first and second

porous material portions

1002 and 1022 to be different from each other. The different structures may be the number, shape or diameter of each of the first and second through-

holes

1002a and 1022a, and the like. For example, the first through-hole 1002a may be configured to be larger than the second through-hole 1022a. Further, the diameter of the first through-hole 1002a may be larger than the diameter of the second through-hole 1022a.

According to this configuration, the first attraction force originating from the first vacuum 1001 through the first through-hole 1002a passes through the second through-hole 1022a and the second suction force resulting from the second vacuum 1021 Can be configured to be larger than the attraction force.

The materials of the first and second

porous materials

1002 and 1022 according to various embodiments may include any one of metals, films, wafers, and ceramics including aluminum oxide.

The material of each of the first and second

adhesive members

1003 and 1023 according to various embodiments may include an ultraviolet curable material or a heat foaming resin including any one of epoxy, acrylic, polyester, polyurethane, and silicone have.

The plurality of micro-LED chips 10010 can be rearranged in an aligned state on the prepared temporary fixing film 1030 by the rearrangement apparatus 100 according to various embodiments. At this time, the first adhesive force between the picked-up Micro LED chip 1010 and the first adhesive member 1002 may be smaller than the second adhesive force between the micro-LED chip 1010 and the temporary fixing film 1030. By this difference in adhesive force, the micro-LED chip 210 can be attached to the temporary fixing film 1030.

The rearrangement apparatus 100 according to the present invention allows the first adhesive member 1003 to precisely pick up the microdroid chip 1010 prepared with the first adhesive force, It is possible to precisely pick up and rearrange a large number of micro-LED chips at a time, since the pickup micro-LED chip 1010 is prevented from being tilted when the pick-up force is picked up.

Referring to Figs. 11A and 11B, each of the first and second adhesive tapes may be composed of one side or both sides of the tape.

Referring to FIG. 11A, the adhesive member 1130 according to various embodiments may be the same adhesive member as the first adhesive member 1003 shown in FIG. 10A. The adhesive member 1130 according to various embodiments may include a resin layer 11301 and an adhesive layer 11302 formed on one side of the resin layer 11301. [ The prepared micro-LED chip can be attached to the adhesive layer 11302. [ Such an adhesive member 1130 may be a one-sided adhesive tape.

Referring to FIG. 11B, the adhesive member 1132 according to various embodiments may be the same adhesive member as the first adhesive member 1003 shown in FIG. 2A. The adhesive member 1132 according to various embodiments may include a resin layer 11321 and first and second

adhesive layers

11322 and 11323 formed on one surface and the other surface of the resin layer 11321. [ The prepared micro-LED chip can be attached to the first adhesive layer 11322. [ Such an adhesive member 1132 may be a double-sided adhesive tape.

The various embodiments of the disclosure set forth in this specification and the drawings are illustrative only and are not intended to limit the scope of the disclosure in any way to facilitate the understanding of the disclosure of the disclosure and the understanding of the disclosure. Accordingly, the scope of the present disclosure should be construed as being included within the scope of the present disclosure in addition to the embodiments disclosed herein, all changes or modifications derived from the technical idea of the present disclosure.

Claims

In the electric element transferring apparatus,

A fixing jig in which the plurality of electric elements are arranged at regular intervals;

A moving jig movably disposed above the fixing jig and including a plurality of first receiving grooves for receiving at least a portion of each of the plurality of electric elements; And

And an attracting device which is disposed near the moving jig and attaches each of the plurality of electric elements to the first receiving groove of the moving jig by a magnetic force through the moving jig.
The electronic apparatus according to claim 1, wherein the fixing jig is disposed at a position corresponding to the first receiving groove of the moving jig and includes a plurality of second receiving grooves formed to receive at least a part of the electric element,

Wherein a space formed by the receiving groove of the moving jig and the receiving groove of the fixing jig is formed to be equal to or larger than the size of the electric element when the moving jig faces the fixing jig.
2. The electric device according to claim 1, wherein the attracting device further comprises a magnetic force generating portion capable of attracting an electric element including an element which reacts with the magnetic force through the moving jig in an upper portion of the moving jig in the direction of the moving jig Conveying device.
The apparatus according to claim 3, wherein the electric element includes a micro-LED, and the element includes a metal member that is responsive to a magnetic force disposed in at least a part of the area of the micro-LED.
The electric element transfer device according to claim 1, wherein the fixing jig includes a planar upper surface and an adhesive member disposed on the upper surface.
The apparatus according to claim 1, wherein the attracting device further comprises a vacuum suction part for sucking the electric device through the moving jig into the first receiving grooves.
The electric element transferring apparatus according to claim 1, wherein the electric element transferring apparatus transfers the electric elements rearranged from the base substrate to the fixing jig to the substrate of the electronic apparatus.
In the microdevice chip transfer device,

A second device in which a plurality of micro-LED chips are placed on a fixed carrier film; And

And a plurality of first through holes opened spatially connected to the first vacuum chamber, wherein the first vacuum chamber has a first porous material portion coupled to the first vacuum and a second porous material portion fixed to the first porous material portion, And a first device including a first adhesive member that is adsorbed to the first porous material portion by uniaxial treatment,

The first device selectively picks up and transports a plurality of micro-LED chips prepared by the adhesive force of the first adhesive member,

And the individual micro-diode chips picked up and transported are lowered by the first device and rearranged on the temporary fixing film.
9. The method according to claim 8, wherein the first porous material portion includes at least one concave-convex portion in a portion facing the first bonding material,

projection part; And

And a concave portion disposed adjacent to the protruding portion,

The micro-LED chips are selectively picked up by the protrusions,

Wherein the protrusions and recesses are alternately arranged along a facing portion of the first porous material portion.
The micro-LED chip according to claim 9, wherein a micro-LED chip is attached to a portion of each first adhesive member facing each of the projections,

Wherein at least a part of each first adhesive member facing each of the projections is adsorbed to each projection by the action of the first vacuum.
9. The apparatus of claim 8, wherein the second device

Second energizing;

A second porous material portion including a plurality of second through openings spatially connected to the second vacuum and coupled to the second vacuum; And

And a second adhesive member that is fixed to the second porous material portion and is sucked into the second porous material portion by the second vacuuming,

Wherein each of the first through holes has a first portion communicating with the first vacuum and a second portion facing the first adhesive member, At least a part of the adhesive member is adsorbed with at least a part of the second part,

Each of the second through holes has a third portion communicating with the second vacuum, and a fourth portion facing the second adhesive member, wherein the second portion of the second through- And at least a part of the adhesive member is adsorbed with at least a part of the second part.
12. The method of claim 11, wherein the first and second porous material portions are configured differently from each other,

Wherein the first through-hole is larger than the second through-hole,

And the first attraction force resulting from the first vacuuming through the first through-hole is greater than the second attraction force originating from the second vacuuming through the second through-hole.
12. The method according to claim 11, wherein the first attraction force held by the first adhesive member causes the prepared micro-LED chip to be picked up precisely,

And the second attraction force held by the second adhesive member prevents deformation of the un-picked micro-LED chip adjacent to the picked-up micro-LED chip.
12. The apparatus of claim 11, wherein the first adhesive force between the picked-up microdevice chip and the first adhesive member is less than the second adhesive force between the lowered microdevice chip and the temporary fixing film.
In the micro-LED transfer device,

A holding device on which a plurality of micro-LED chips are fixed and on which a micro-LED chip is not picked up; And

And a pick-up device for selectively picking up and transporting the plurality of micro-LED chips,

The pick-

The first evacuation;

A first porous material portion including a plurality of first through holes spatially connected to the first vacuum; And

And a first adhesive member fixed to the first porous material portion and adsorbed to a portion of the first multi-process material portion according to an ON operation of the first vacuum,

The fastening device

Second energizing;

A second porous material portion including a plurality of second through holes spatially connected to the second vacuum; And

And a second adhesive member fixed to the second porous material portion and adsorbed to the second porous material portion by an on operation of the second vacuum.